Measuring Microscope

STM6-LM/STM6

Versatile, high-reliability lineup packed with features

to meet every measurement need.
The STM6 series offers more system versatility and higher performance than ever before.
Maintaining the exceptional levels of precision and durability that have always characterized
Olympus measuring microscopes, the series features a wide range of models to cover various
customer's demands for new measuring capabilities and superior functionality.
The range includes the STM6-LM, for fast inspection of large samples,
and the high-precision STM6 which offers the most compact body in this class.
In addition, plentiful optionnal units ensure that every measurement need can be met.
Among the series' outstanding features are motorized focusing, highly advanced UIS2 optics,
the high-rigidity body with integrated counters, high-performance long-life LED illumination for
bright and clear images, and much more.
The STM6 series: built to perform today's most demanding measuring requirements.

STM6-LM
Large motorized 3-axis measuring
microscope with 0.1m readout

STM6-LM

STM6 SERIES

Large motorized 3-axis measuring

microscope with 0.5m readout

L I N E U P

STM6
Compact motorized 3-axis measuring
microscope with 0.1m readout

STM6
Compact manual 3-axis measuring
microscope with 0.1m readout

STM6
Compact manual 3-axis measuring
microscope with 0.5m readout

STM6
Compact manual 2-axis measuring
microscope with 0.5m readout

Technology with traceability the road to high precision.

Accurate design and leading-edge technology:

two keys to significant quality and process improvements.
Rigid body and stage for rock-solid stability
over long periods.
STM6 series quality derives from two main sources:
time-tested manufacturing expertise plus valuable
feedback from numerous customers. Recognizing that
precision and rigidity must not only be provided but also
maintained for long periods, Olympus achieved
exceptional lengths to ensure a high standard of rigidity in
the microscope body and stage. Straightness is
maintained by utilizing a superb linear guide mechanism.
In addition, newly developed Olympus original integrated
optical linear scale provides improved reliability.

maintenance due to lamp burn-out, and this helps not

only to reduce operating costs, but also to improve
throughput.

Power supply unit/

MM6-ILPS

White LED unit/

MM6-ILW

Green LED unit/

MM6-ILG

Optical linear scale to guarantee sub-micron

resolution.

FEM analysis

Long-life LED illumination, with little impact on

measurement precision.
An LED illuminator is used for reflected/transmitted
coaxial illumination. The low-heat character of LED
illumination protects specimens from the effects of heat
and contributes to more reliable measurement data. In
addition, the illuminator has a long operating life, low
power consumption, and brightness on a par with
halogen. The LED illumination also achieves a dramatic
reduction in work interruptions and lamp replacement

All optical information gained through Olympus' originally

developed optical linear scale is processed electrically and
measured. The precision of the scale is obviously critical
to measuring accuracy so to minimized error, this scale
is mounted to
the ideal position
based on the
Abbe's theorem,
which defines
the ideal position
of scale and
measured object
as on the linear
line, toward the
measuring
direction.

Traceability system for higher quality.

Rigorous manufacturing procedures ensure
excellent quality control.
Olympus puts the highest priority on precision throughout
all the stages of production and assembly. As well as
maintaining a strictly controlled thermostatic
manufacturing environment, skilled Olympus engineers
apply the most rigorous standards to component material
selection, high-precision machining, delicate finishing
processes and final adjustment. All completed products
and component parts are fully controlled under a rigorous
traceability system.

Measuring Microscopes Traceability System

England

Japan

(NPL)

(NMIJ/AIST)

JCSS

UKAS

(Japan Calibration Service System)

(United Kingdom
Accreditation Service)

OLYMPUS
JCSS: No. 0044

Optical Polygons

Block
Gauge

Stabilized
He-Ne Laser

Rotary Tables

Coordinate
Measuring
Machines

Dial Gauge
Testing
Machine

Glass Block

Squares

Dial Test
Indicators

Standard
Scale

Block
Gauge

Olympus Measuring Microscopes

As of October 2006

 Active reflective type auto focus optical path

Photo Detector unit
Pinhole unit

Photo Detector
unit
Pinhole unit

Laser Diode

Objective lens

Sample

The focus system achieves height measurement with superior

repeatability efficiently and with high precision.

Quick and accurate measuring free from operators' dispersion.

Auto Focus System

Focus Navigation System

Simple add-on type auto focus unit.

STM6 series provides two AF modes; the One-shot and
Tracking focus. All the height and depth measurements,
which require the continuous fine and accurate operation,
can be done with utilizing each focusing mode. Z direction measurement efficiencies are dramatically improved
with the auto focus so that the operators' dispersion is
now minimized. This unit can be easily added on
because of its intermediate tube type compact design.
z One-shot mode
From the roughly focused
state, this mode enables
instant focus on the center
of the field of view.

Focus navigation system achieves high-precision

height measurement simply by focusing the
vertical divergence of the index pattern.
This system applies to the reflected light brightfield and
darkfield observation using 10x-50x objective lenses.
High efficiency height measurement is accomplished by
focusing the vertical divergence of the index pattern
projected onto the sample. This improves repeatability
compared to visual focusing by sample images, and
reduces measurement variation due to individual
differences between operator. The index pattern is
compatible with a variety of samples and can be easily
focused, thus greatly reducing measurement time.

x track mode
This mode maintains focus by following the focused
surface. Since image is always focused, work efficiency is
dramatically improved.

Below focus

In focus

Reproducibility to 1m using high-magnification

objective lenses as well as auto focusing on the
extremely small areas.
The confocal auto focus employs active reflection
method. This system maintains steady focusing even on
samples with angle or unevenness on surfaces. When
using 100x objective lenses, the laser spot diameter is
1m. This allows Z-axis measurement on smaller areas
enabling measurement of, for example, the bonding
wires in semiconductor chips.

*1 Values based on our standard samples *2 Theoretical values from calculations

MM6-FN dimensions
MM6-FN/
Control unit

MM6-FN/
Focus navigation unit
33.2

83

15

137.5

51

55

245
71

MM6-ILG/
Green LED unit

00

90

260

88
55

An intermediate tube type unit can be easily added on.

An LED is used for the light source. The compact control
unit enables easy, convenient stepless adjustment of
index brightness, and index ON/OFF operation.

132

MM6C-AF dimensions
(AF unit)

169

169
109

MM6-AF dimensions
(AF unit)

Intermediate tube type that can be added on

24

Spot diameter *2
5m
2m
1m

84
105.5

Reproducibility (2 n-1) *1
2m
1m
1m

57

Objective lens
LMPLFLN20x
LMPLFLN50x
LMPLFLN100x

Above focus

(Unit: mm)
Wavelength =785nm, IEC60825-1 Class 1 compatible

(Unit: mm)

For Olympus, system expansion and ease of use starts

for the sake of operators.

Design ideas to reduce fatigue even in long-time operations.

Motorized focusing for quick and
precise Z-axis measurement.
Olympus' introduction of motorized focusing to this
category of microscopes drastically improves operability
in both focusing and the measuring of height and depth.
Exchanges of coarse and 4-step fine movements (800,
400, 200 and 50m/rotation) are carried out from the Zaxis control box conveniently located right by the
operator's hand.
(For STM6-LM and STM6 motorized type)

Motorized
focusing button
(up/down)

UIS2 optics and LED illumination help further

improve edge detection and microscopic
inspection.
Edge detection is dramatically improved by using UIS2
optics which achieve outstanding resolution and contrast,
and LED illumination which delivers faithful color
reproduction unaffected by changes in brightness. This
results in greatly improved both measurement and
microscopic inspection. LED illumination is also free from
the flickering and brightness fluctuation, reducing eye
fatigue in long-time use.

Auto focus stop

button
Z reset button
Focusing handle

Auto focus
button

Data output
button

Set-up button
for upper and
lower limits

Coarse and fine

switchover
button

White LED

Halogen lamp

Z-axis operation box

Towards the ideal observation eye-point position:

column with counter.

Easy positioning using reticles which correspond

to the resolving power of the human eye.

The column with counter is integrated with the

microscope body, with the display section comfortably
located at almost the same height as the observation eyepoint position. The operator can thus confirm the
measuring value with only a slight change of eye angle,
allowing easier
concentration on the
sample observation
and positioning.

For any measuring microscope, accurate alignment of the

measuring object to the reticles is critical. In straight-line
alignment, research shows that the use of a reticle and a
dotted line produces more accurate results than using
only a single line. Through analysis of the characteristics
and resolving power of the human eye, Olympus has
improved alignment accuracy by using a reticle and a
dotted line on the
plate.

A versatile lineup of add-on units that allow selection of necessary functions

and bring dramatic improvements to measurement efficiency.
For high magnification measurement and
Nomarski DIC observation.
Three different types of reflected light illumination units are
available for both the STM6-LM and STM6, to meet the
full range of measurement requirements. Corresponding
to measuring objective lenses or metallurgical objective
lenses using the revolving nosepiece, these enable
brightfield, darkfield and Nomarski DIC observations. The
system can be freely upgraded by adding further units
according to need.

For STM6-LM
MM6-VLR

MM6-VL
MM6-VLU

For STM6
MM6C-KMAS
MM6C-VL

MM6C-RLAS

XYZ
0.1m

Motorized

250150
Stage

Auto
Focus

Focus
Navigation

Option

Option

Large motorized 3-axis measuring

microscope with 0.1m readout
MM6-AF AF unit, MM6-VLU universal reflected light illuminator,
and MM6-CAL22 2-dimensional data processing unit
configuration example

XYZ
0.5m

Motorized

250150
Stage

Auto
Focus

Focus
Navigation

Option

Option

Large motorized 3-axis measuring

microscope with 0.5m readout
MM6-VL reflected light illuminator for objectives for
measuring microscope configuration example

Motorized focusing as standard, for fast, high-precision

measurement of large samples.

Motorized focusing dramatically reduces fatigue

in Z-axis measurement.

Clutch-type large stage allows quick inspection

of large areas.

Motorized focusing is equipped as a standard feature.

Since the Z control box, which is positioned by the
operator's hand, provides easy focusing, it is no longer
necessary to take uncomfortable positions to control the
Z-axis.

The stage provides a large measuring area (250x150

mm). All X and Y movements are clutch-controlled, and
quick changeover between coarse and fine movements is
performed by simply moving a lever. Free movements on
the X/Y axis and XY plane allow even large samples to be
quickly and accurately
inspected. It is also
possible to measure
multiple samples on
the stage at the same
time.

Space efficient body with integrated electric

circuits.
The counter column and electric circuits are
integrated with the microscope body to save
space and facilitate operation. Data can be
transmitted via the built-in RS232C, which
enables easy connection to external
equipment like a personal computer or printer.
Data in a personal computer can then easily
be used to make a database using such
software as Microsoft Excel.

(Unit: mm)

224

520

827

STM6-LM dimensions

370

468
579

MM6-CS250 dimensions

Setting example

800

320

684
1000

740

125

377

480

10

XYZ
0.1m

Motorized

5050
Stage

10050
Stage

100100
Stage

150100
Stage

Auto
Focus

Focus
Navigation

Option

Option

Compact motorized 3-axis measuring microscope with

0.1m readout
MM6C-RLAS universal illuminator and MM6C-AF AF unit configuration example

XYZ
0.1m

5050
Stage

10050
Stage

100100
Stage

150100
Stage

Focus
Navigation
Option

Compact manual 3-axis measuring microscope

with 0.1m readout
MM6C-RLAS universal illuminator configuration example

XYZ
0.5m

5050
Stage

10050
Stage

100100
Stage

150100
Stage

Focus
Navigation
Option

Compact manual 3-axis measuring

microscope with 0.5m readout
MM6C-KMAS reflected light illuminator for brightfield/DIC observation
configuration example

XY
0.5m

5050
Stage

10050
Stage

100100
Stage

150100
Stage

Focus
Navigation
Option

Compact manual 2-axis measuring

microscope with 0.5m readout
MM6C-VL reflected light illuminator for objectives for measuring microscope
configuration example

11

Compact and highly functional design, with various combinations

of bodies and stages.

Compatibility of high magnification requirements

and wide measuring areas.
The best combination can be selected from four types of
stage and a variety of reflected light illumination systems.
Three of the stage types
(50x50, 100x50 and 100x100)
are equipped with coaxial
knobs for coarse and fine
movement, while the fourth
(150x100) has a clutch-free
mechanism to enable quick
movement and precise
positioning.

429.4mm

Space-saving body allows

installation to a convenient
place.
This model is the smallest in our
measuring microscope lineups
despite of its numerous versatile
functions.
295mm

4-model lineup to perform a

full range of different jobs.
One motorized 3-axis model with 0.1m readout, two
manual 3-axis models with 0.1m and 0.5m readouts
and one manual 2-axis model with 0.5m readout give
users a wide variety of selection to suit their specific
purpose.

STM6 (Manual model) dimensions

(Unit: mm)

204

204

478

500

592

694

STM6 (Motorized model) dimensions

429.4

295

MM6C-CS100R
dimensions
10050 stage

MM6C-CS100
dimensions
100100 stage

MM6C-CS150
dimensions
150100 stage
353

272

253

577

465
98.5

437
85

85

363

Setting example:
5050 stage, 10050 stage or 100100 stage configuration

850

600

Setting example:
150100 stage configuration

600

85

369
256

272

327
206

327
206

230

378

MM6C-CS50
dimensions
5050 stage

429.4

295

800

12

Two dimensional measuring calculation is

performed speedily by simple point data input.
During measurement, an explanation of
alignment and measuring items are shown on
the display. Measurement results are output
from the built-in printer.

Hot-key assignment for alignment and

measuring items.
Now the necessary function can be assigned
to the buttons without increasing number of
keys. It realizes the easy and user-friendly
operation with maintaining its compactness.

13

MM6-CAL22 dimensions

Easy-to-understand icon-based
operation panel.
Alignment items, measuring items and input
items can be selected easily using icons which
can be understood at a glance. For all items,
multi-point designation calculation enables to
increase accuracy of measurements. Up to 8
different patterns of teaching procedures can
be saved with combination of various kinds of
measuring function.

Display of measurement results and

printer output.
During program measurement, the running
situation is shown on the display. Statistical
values for measurement results and the
results of their determinations against the
tolerance can be displayed on the display or
printed using the built-in printer.

70

98

Calculate and output the result with

point data input.

Stored measurement data can be transferred

to a personal computer via the standard
RS232C interface, and organized with
commonly used software.

236

Since parallel alignment of a sample with the

stage travel is unnecessary, the operator can
start measuring immediately after the sample
is placed on the stage.

RS232C interface as standard.

21

Improve throughput without parallel

alignment.

300

(Unit: mm)

Versatile calculation functions in a compact data processor.

Two points for X and center

The line through input points 1
and 2 becomes the X-axis and
the midpoint becomes the origin.

Two points for X and origin

The line through input points 1
and 2 becomes the X-axis and
input point 1 becomes the
origin.

Two points for distance

Calculate the distance between two
input points at different height.

Three points for X and Y

The line through input points 1
and 2 becomes the X-axis, and
the perpendicular line from input
point 3 down to the X-axis
becomes the Y-axis.

Midpoint coordinates
Calculate the coordinate of the
midpoint between input points 1
and 2.

Four points for perpendicular

distance
Calculate the perpendicular distance
from input point 4 and after to a
plane determined by point 1 through
3.

Three points for circle

measurement
Calculate the diameter, radius,
and center coordinates of a circle
determined by the input three
points.

Distance from reference line and

previous point
Determine a line with point 1 and 2 then
measure the distance from point3 to the line.
Measure distance to the line and to the
previous point from the 4 th and after point.

Four points for coordinates and

angle
Calculate the intersection
coordinates and intersection angle
of two lines determined by point 1
and 2, and point 3 and 4.

Parallelism measurement
Calculate crossing angle of two lines that are determined
with point 1 and 2, and point 3 and 4. Also calculate
length of perpendicular line from the line determined
with point 3 and 4 to the other at the typed in reference
position on the line determined with point 1 and 2.

Three points for X and Y

Input point 3 becomes the origin
and the line parallel to the line
through point 1 and 2 will be Xaxis.

Five points for rectangle

Calculate each side of a rectangle
that passes point 1 through 5, and
its center coordinates.

Perpendicularity measurement
Calculate shift of crossing angle of two lines
that are determined with point 1 and 2, and
point 3 and 4 (Obtaining crossing angle is
calculated as the difference angle from the
reference angle of 90.).

Four points for X and origin

The line through input points 1
and 2 becomes the X-axis. The
intersection of the X-axis and the
line through input points 3 and 4
becomes the origin.

Two points for angle, distance

and coordinates
Calculate angle of a line through points 1
and 2 to the X-axis, the distance between
the 2 points, and the coordinate
differences of the X-and Y-axes.

Flatness of plane
Calculate the difference between
highest and lowest value (flatness)
among any input points on the same
plane.

One point to rotate coordinates

Input 1 and use numeric keypad to input
either X-axis value and Y-axis value signs or
X-axis value signs and Y-axis value signs.
Rotate the coordinate system so that input
point 1 becomes the set up axis value sign.

Three point for perpendicular

distance
Calculate the perpendicular
distance from point 3 to the line
through points 1 and 2.

One point to rotate for X-axis

Without shifting the origin point,
rotate the coordinate system so
that input point 1 lies on the Xaxis.

Five points for radius and coordinates

Calculate the intersection coordinates
created by a circle that passes point 1
through 3, and a line determined with
points 4 and 5 as well as the radius of the
circle.
Six points for intersection coordinates
and radius
Calculate intersection coordinates created
by a circle that passes point 1 through 3,
and a circle that passes point 4 through 6.
Also measures the radius of each circle.

Angle for rotation

Rotate the coordinate system by
the entered angle A.

Direct coordinates
Measures the coordinate of input
point 1.

Previous coordinates
Go back to the previous
coordinates setting.

Coordinates, differences and

distance
Calculate X-Y coordinates at the input
point, as well as differences of X-Y
coordinates and distances the previous
input points.

One point for Z parallel move

Shift the Z-axis in parallel so that
the origin point lies in the plane
of input point 1.

Distance from origin and angular

difference
Calculate distance between input point
and original point; the angle from the Xaxis; and the angle difference from the
previous input point.

Boot-up coordinates
Go back to the boot-up
coordinates setting.

One point for Z distance

Calculate the Z-axis distance of
input point 1 from the reference
plane.

Z distance
Measure Z coordinate of input
point plane and Z distance from
previously input point's plane.

Z
Coordinates for origin
Input X and Y points via the
numeric keypad as the new
origin so that the coordinates
moves in parallel to the new
origin.

Data Input methods

Parallel X/Y shift

Input point 1 will be the new
original position with shifting the
X/Y coordinates position.

Measuring and calculating items

Alignment

1 point input
Used when directly input a point as
data. Measured data is processed as
input data.

2-point input
Used when the input point is
midpoint of two measured points.
This midpoint coordinate is
processed as input data.

3-point input
Used when input point is the center
of a circle. The center coordinates of
the circle created by three measured
points is processed as input data.

*
/

4-point input
Used when input point is the
intersection of two lines. The
intersection coordinates value
created by two lines from 4 input
points is processed as input data.
5-point input
Used when input point is the center of the
rectangle. Two input points form one side
of rectangle and the other three points for
other three sides of rectangle. This center
coordinates is processed as input point data.

MM6-CAL22 may not be available in some area.

14

Accessories

U-CBS
Control box for
coded function

U-D5BDRES-ESD
Coded quintuple revolving
nosepiece for BF/DF with
slider slot for DIC

DP21/Microscope digital camera

Coded revolving nosepiece

Live images at 15 frames/second are displayed in high definition

television class resolution so that focusing on the monitor is performed
easily without any breaks in traveling the stage during observation and
faithful color is obtained at a high resolving power.
Also, the DP21 enables image recording and simple measurements
without a PC.

Combining a coded revolving nosepiece for the STM6 and STM6-LM

with the DP21 digital camera system lets you display the objective
magnification on-screen during observation and allows you to record
that magnification. This convenient feature allows information on your
sample and the objectives magnification to be recorded at the same
time when recording a sample.

MM6-RHS250, MM6C-RHS100/
Reset switch

15

U-5RES-ESD
Coded quintuple
revolving nosepiece

MM6-RK01/Remote key unit

MMFS01/Foot switch

The switch to reset X and Y counter values is

near the operator's hand.

X, Y and Z counter reset, data output and

one-half count exchange are fully controlled
from close to the operators hand.

Enables hands-free transmission of data to a

printer or 2-dimensional data processing unit.

MM6-EMO/
Erect image monocular tube

SZ-LW61/
White LED illumination unit

SZX2-ILR66+SZX-RHS/LED ring
illuminator+manual control unit

Monocular tube for erect images. Can be

used in combination with MM6-OCC10x
(eyepiece with cross hairs).

This light-weight, space-saving design model

provides a long operating life and low power
consumption. The cost-effective LED
illumination unit is also free from the flickering
and brightness fluctuation.

SZX-RHS manual control unit enables

independent illumination of 4-segments of the
SZX2-ILR66 reflected LED ring illuminator
which provides clear images with high color
temperature. The optimal illumination can be
selected from 13 patterns.

 Stage
Several kinds of stages are available to suit different sample sizes.
STM6

STM6-LM

MM6-CS250 250x150 stage

MM6C-CS150 150x100 stage

STM6

MM6C-CS100 100x100 stage

STM6

MM6C-CS100R 100x50 stage

STM6

MM6C-CS50 50x50 stage

Rotatable table
Enables easy parallel alignment of sample.
STM6

STM6-LM

MM6-RS3 rotatable stage, type 3

(For MM6-CS250)

MM6C-RS2 rotatable stage, type 2

(For MM6C-CS150)

STM6

MM6C-RS1 rotatable stage, type 1

(For MM6C-CS100R and MM6C-CS100)

16

System Diagram

STM6-LM
MM6-OC10x
Eyepiece
MM6-OCC10x
Eyepiece (with cross hairs)

VIDEO/DIGITAL CAMERA SYSTEM

U-TLU
Single port
tube with lens

MM6-EMO
Erect image
monocular tube

MM6-ILPS
Power supply unit

MM6-ETR
Erect image
trinocular tube

MM6-ILW
White LED unit
MX-AFDIC
Analyzer slot unit for MX-AF

U-AN
Analyzer for reflected light
MM6-FN
Control unit

25ND6
25mm dia.
neutral density
filter (6%)

MM6-ND
ND filter holder

MM6-AF *1
AF unit

MM6-FN
Focus navigation
unit

MM6-ILG
Green LED unit

25ND25
25mm dia.
neutral density
filter (25%)
MM6-PO
Polarizer

U-5BDRE
Quintuple
revolving
nosepiece
for BF/DF

U-D5BDRE
Quintuple
revolving
nosepiece
for BF/DF with
slider slot for DIC

MM6-VLR
Reflected light illuminator for
brightfield observation

MM6-VLU
Universal reflected
illuminator

U-D5BDRES-ESD
Coded quintuple
revolving nosepiece
for BF/DF with
slider slot for DIC

U-5RES-ESD
Coded quintuple
revolving
nosepiece

U-5RE-2
Quintuple
revolving
nosepiece

MM6-LGRAD
Ring light guide
adapter

MM6-FLAD
Fluorescence
light guide
adapter

SZX2-ILR66
LED ring
illuminator

U-CBS
Control
box
for coded
function

U-DICR
DIC slider for
reflected light

MM6-VL*3
Reflected light illuminator
for objectives
for measuring microscope

SZX2-RHS
Manual
control unit

SZ-LW61
White LED
illumination unit

DP21
Digital camera
system

Z-axis
operation
box

BD-M-AD
Adapter
to mount
BF objectives

BF/DF
objective
lenses

BF
objective
lenses

STM6-LM-F35
Microscope body type 3 for
3-axis counter (0.5 m)
STM6-LM-F31
Microscope body type 3 for
3-axis counter (0.1 m)

BD-M-AD
Adapter to
mount BF
objectives MM6-OB1x
1x objective lens
MM6-OB3x
3x objective lens
MM6-OB5x
5x objective lens
BF
MM6-OB10x
objective
10x objective lens
lenses

MM6-ILG
Green LED unit

MM6-RHS250*2
Reset switch

MM6-RK01*2
Remote key unit
MMFS01
Foot switch

Printer
MM6C-PSZ-2
Power supply unit
MM6-RS3
Rotatable stage,
type 3

MM6-CS250
250x150 stage

MM6-CAL22
2-dimensional
data processing unit
Personal
computer

*1 The objective lenses to be combined with MM6-AF for Z-axis measurement are LMPLFLN20x-100x. *2 Choose either MM6-RHS250 or MM6-RK01. These cannot be connected simultaneously.
*3 No revolving nosepiece can be used with MM6-VL. * Some products may not be available in some area.

17

STM6
MM6-OC10x
Eyepiece
MM6-OCC10x
Eyepiece (with cross hairs)

VIDEO/DIGITAL CAMERA SYSTEM

MM6-EMO
Erect image
monocular
tube

U-TLU
Single port
tube with
lens

MM6-ILPS
Power supply unit

MM6-ETR
Erect image
trinocular tube

MM6-ILW
White LED unit

MM6-FN
Control unit

U-AN360-3
Analyzer

MM6-ILG
Green LED unit

MM6C-AF*1*3
AF unit

MM6-FN
Focus navigation unit

U-25ND6,
U-25ND25
ND filter
holder

Revolving
nosepiece
holder

U-DICR
DIC slider for
reflected light

U-5BDRE
Quintuple
revolving
nosepiece
for BF/DF

MM6C-KMAS
Reflected light illuminator
for brightfield/DIC observation

MM6C-RLAS
Universal reflected
light illuminator

U-PO3
Polarizer

U-D6RE
Sextuple revolving
nosepiece with
slider slot for DIC

U-D5BDRES-ESD
Coded quintuple
revolving nosepiece
for BF/DF with
slider slot for DIC

U-5RES-ESD
Coded quintuple
revolving
nosepiece

U-5RE-2
Quintuple
revolving
nosepiece

BD-M-AD
Adapter to mount BF objectives
BF/DF
objective
lenses

MM6C-VL*4
Reflected light
illuminator for
objectives for
measuring
microscope

Revolving
nosepiece
holder

MM6-LGRAD
Ring light guide
adapter
SZX2-ILR66
LED ring
illuminator

SZX2-RHS
Manual
control unit

BF
objective
lenses

MM6-FLAD
Fluorescence
light guide
adapter

BD-M-AD
Adapter to
mount BF
objectives
BF
objective
lenses

MM6-OB1x
1x objective lens
MM6-OB3x
3x objective lens
MM6-OB5x
5x objective lens
MM6-OB10x
10x objective lens

SZ-LW61
White LED
illumination unit
MM6-ILG
Green
LED unit

MM6C-DC350
3-axis (0.5 m)
counter box

Printer

MM6C-DC250
2-axis (0.5 m)
counter box
Power
supply unit

Power
supply unit
STM6-F00
Microscope body type 0 for
2-axis counter

U-CBS
Control box for
coded function

STM6-F10
Microscope body type 1 for
3-axis counter

MM6C-DC310
3-axis (0.1 m)
counter box

MMFS01
Foot switch

STM6-F21
Microscope body type 2 for
3-axis counter (0.1 m)

Personal
computer

Z-axis operation box

Power
supply unit

DP21
Digital camera system

MM6-CAL22
2-dimensional
data processing unit

MM6C-PSZ-2
Power supply unit
MM6-RK01*2
Remote key unit

MM6C-RS2
Rotatable stage,
type 2

MM6C-CS150
150x100 stage

MM6C-CS100
100x100 stage

MM6C-RS1
Rotatable stage,
type 1

MM6C-CS100R
100x50 stage

MM6C-CS50
50x50 stage

MM6-RHS100*2
Reset switch

*1 The objective lenses to be combined with MM6C-AF for Z-axis measurement are LMPLFLN20x-100x. *2 Choose either MM6-RHS100 or MM6-RK01. These cannot be connected simultaneously.
*3 MM6C-AF can be combined with STM6-F21 only. *4 No revolving nosepiece can be used with MM6C-VL. * Some products may not be available in some area.

18

STM6-LM/STM6 specifications
STM6-LM

STM6
Manual 2-axis

Microscope
body

Focus

Vertical movement range

205 mm

Motorized 3-axis

155 mm

Maximum accepted sample height

205 mm*1, 150 mm*2

Z-axis measurement range

205 mm*1, 150 mm*2

4.8 mm/s

4.8 mm/s

800 m/400 m/200 m/50 m

(full rotation of knob) 4 steps

800 m/400 m/200 m/50 m

(full rotation of knob) 4 steps

Coarse focusing speed

Fine focusing speed (variable)
Illumination

Manual 3-axis

LED illumination

155 mm*1, 100 mm*2

155 mm*1, 100 mm*2

White: for reflected light illumination, green: for transmitted light illumination

Observation tube

Erect image monocular tube, erect image trinocular tube (100:0/0:100)

Objective
lens

MM6-OB series

For measuring microscope

For metallurgical microscope

Max. power consumption: 10 W

MPLFLN series, LMPLFLN series, MPLFLN-BD series, LMPLFLN-BD series

Eyepiece

MM6-OCC10x (with cross hairs, F.N. 22), MM6-OC10x (F.N. 22)

Stroke

MM6-CS250 =
MM6C-CS50 = X-axis: 50 mm, Y-axis: 50 mm/MM6C-CS100R = X-axis: 100 mm, Y-axis: 50 mm
X-axis: 250 mm, Y-axis: 150 mm MM6C-CS100 = X-axis: 100 mm, Y-axis: 100 mm/MM6C-CS150 = X-axis: 150 mm, Y-axis: 100 mm

Stage

Measuring accuracy

X-axis: (3+5L/250) m
Y-axis: (3+5L/150) m
[L: measuring length (mm)]

Counter
display

Minimum readout

Dimensions*3

0.1 m/0.5 m (selectable)

0.5 m

0.1 m/0.5 m (selectable)

0.1 m

684 (W) x 579 (D) x 843 (H) mm

465 (W) x 437 (D) x 596 (H) mm

465 (W) x 437 (D) x 592 (H) mm

465 (W) x 437 (D) x 696 (H) mm

Approx. 170 kg

Approx. 94 kg

Approx. 95 kg

Weight*4
Power consumption

50 mm stroke: (3+L/50) m
100 mm stroke: (3+2L/100) m
150 mm stroke: (3+3L/150) m [L: measuring length (mm)]

100-120/220-240 Vg1.6/0.8 A
50/60 Hz

100-120/220-240 Vg0.7/0.4 A
50/60 Hz

Approx. 97 kg
100-120/220-240 Vg1.6/0.8 A
50/60 Hz

*1 With objective lenses for metallurgical microscope

*2 With objective lenses for measuring microscope *3 STM6-LM microscope body+MM6-CS250 stage combination, STM6 microscope
body+MM6C-CS100 stage combination *4 STM6-LM microscope body+MM6-CS250 stage + integrated unit combination, STM6 microscope body+MM6C-CS100 stage+integrated unit combination
This device is designed for use in industrial environments for the EMC performance (Class A device). Using it in a residential environment may affect other equipment in the environment.

Objective lenses working distance

Objective lenses for
measuring microscope

Magnifications

Objective lenses for

metallurgical
microscope

Magnifications

MM6-OB series

1x

3x

5x

10x

59.6

76.8

65.4

50.5

5x

10x

20x

50x

100x

MPLFLN series

Brightfield

20.0

11.0

3.1

1.0

1.0

LMPLFLN series

Long working distance

22.5

21.0

12.0

10.6

3.4

MPLFLN-BD series

Brightfield/darkfield

12.0

6.5

3.0

1.0

1.0

LMPLFLN-BD series

Brightfield/darkfield, long working distance

15.0

10.0

12.0

10.6

3.3

OLYMPUS CORPORATION is ISO9001/ISO14001 certified.

Illumination devices for microscope have suggested lifetimes.
Periodic inspections are required. Please visit our web site for details.
All company and product names are registered trademarks and/or trademarks of their respective owners.
Images on the PC monitors are simulated.
Specifications and appearances are subject to change without any notice or obligation on the part of the manufacturer.

www.olympus-ims.com

For enquiries - contact

www.olympus-ims.com/contact-us

Shinjuku Monolith, 2-3-1, Nishi-Shinjuku, Shinjuku-ku, Tokyo 163-0914, Japan

8F Olympus Tower, 446 Bongeunsa-ro, Gangnam-gu, Seoul, 135-509 Korea

Wendenstrasse 14-18, 20097 Hamburg, Germany

3 Acacia Place, Notting Hill VIC 3168, Australia

48 Woerd Avenue, Waltham, MA 02453, U.S.A.

491B River Valley Road, #12-01/04 Valley Point Office Tower, Singapore 248373

10F, K. Wah Centre, 1010 Huai Hai Road (M), Xuhui District, Shanghai, 200031 P.R.C.

M1713E-072014