MEC.

I531
Mechanical Biomimetics
機械バイオミメティクス

第６回

Associate Prof. Hiroto Tanaka

E-mail: [email protected]
 Today’s contents

1. Observation tools
2. MEMS fabrication methods
3. Artificial sticky foot
4. Lotus leaf: hydrophobic surface
5. Morpho butterfly: structural color
6. Moth eye: anti-reflection surface
 SEM (Scanning electron microscope)
Example image

B. N. J. Persson and S. Gorb, "The effect of surface roughness on the adhesion of elastic plates with
application to biological systems," The Journal of Chemical Physics, vol. 119, pp. 11437-11444, 2003.
SEM (Scanning electron microscope)
走査型電子顕微鏡

日立ハイテクノロジーズ
Miniscope TM3030Plus

Keyence VE-8800
JEOL JSM-7800FPRIME
*ものつくり教育研究支援センター
 Principle of the SEM
Electron beam
Electron gun Display

Vacuum Electron source x scan

pump L2
1st anode y scan
2nd anode
Focusing lens
sample
Electron beam L1
Deflection coil
Magnification M = L1 / L2
Objective SE
lens detector
Sample Display
chamber
Vacuum pump SE: Secondary electron
二次電子

渡邉俊哉, "走査電子顕微鏡の原理と応用 (観察，分析)," 精密工学会誌, vol. 77,

pp. 1021-1026, 2011.
 Signals from the sample
Electron beam

X-ray (elemental info)

Used for SEM imaging
SE (surface info)
BSE (composition info)

Fluorescence (chemical bonding info)

Backscattered electron
後方散乱電子
Less than 10 nm
(SE generation depth)

Absorption current
Electron scattering area

渡邉俊哉, "走査電子顕微鏡の原理と応用 (観察，分析)," 精密工学会誌, vol. 77,

pp. 1021-1026, 2011.
 Electron source and resolution

Type of electron gun Thermal electron emission Field emission 電界放出 先端に強い電界
を作用させて，
Tungsten
filament トンネル効果に
より電子を放出
Structure
Emit electrons by
tunnel effect

Size of electron source

Luminance
Energy band
Cathode temperature
Chamber pressure
Lifetime

Probe size More than 5 nm Less than 1 nm

渡邉俊哉, "走査電子顕微鏡の原理と応用 (観察，分析)," 精密工学会誌, vol. 77,

pp. 1021-1026, 2011.
Advantage of SEM: deep focal depth
Optical image SEM image

Optical light Electron beam

Focal depth:
Focal depth: deep
shallow

1 radian = 57 degrees

渡邉俊哉, "走査電子顕微鏡の原理と応用 (観察，分析)," 精密工学会誌, vol. 77,

pp. 1021-1026, 2011.
 Charge up problem of SEM
Image distortion
due to charge up
Charge up

Abnormal contrast
Absorption current due to charge up
-

渡邉俊哉, "走査電子顕微鏡の原理と応用 (観察， JEOL, 走査電子顕微鏡基本用語集

分析)," 精密工学会誌, vol. 77, pp. 1021-1026, 2011. http://www.jeol.co.jp/words/semterms/
 Countermeasure to the charge up
- Metal coating
Material: Au, Pt, Au-Pd, Pt-Pb
Thickness: a few nm to 10 nm
- Low acceleration voltage
SE emission rate

Acceleration voltage

JEOL, 走査電子顕微鏡基本用語集
http://www.jeol.co.jp/words/semterms/
 TEM (Transmission Electron Microscope)
透過型電子顕微鏡

Thin sample

TEM image of MWCNT

富士通クオリティ・ラボ
http://www.fujitsu.com/jp/group/fql/services/pr
JAIMA, 透過電子顕微鏡（TEM/AEM）の原理と応用 oduct-quality/analysis/method/tem/
http://www.jaima.or.jp/jp/basic/em/tem.html
 SEM observation of living specimen
Nano-suit by Prof. Takahiko Hariyama group
(Hamamatsu University School of Medicine)
with electron scan
without electron scan

A living Drosophila larva ショウジョウバエの幼虫

 SEM observation of living specimen
Nano-suit by Prof. Takahiko Hariyama group
(Hamamatsu University School of Medicine)
with electron scan
without electron scan

ECSs (extracellular substances 細胞外物質) was modified

by the electron beam, and then protect the larva

A living Drosophila larva ショウジョウバエの幼虫

Y. Takaku, et al., "A thin polymer membrane, nano-suit, enhancing survival across
the continuum between air and high vacuum," PNAS, 2013.
 Nano-suit
1% Tween 20 solution (界面活性剤の一種) works like the ECSs
of the Drosophila larva

Drosophila larva
ショウジョウバエ
の幼虫

Mosquito larva
ボウフラ
（control）

Mosquito larva
（nano-suite）

300 um 1 um 0.2 um
Y. Takaku, et al., "A thin polymer membrane, nano-suit, enhancing survival across
the continuum between air and high vacuum," PNAS, 2013.
Chinatsu Nakane, Yasuharu Takaku, Masatsugu Shimomura, Takahiko Hariyama, “The NanoSuit method to observe the
living mammalian tissue and cell,” Engineering Neo-Biomimetics VI, Oct. 22-23, 2015
 Micro X-ray CT (computed tomography)
X線コンピュータ断層撮影法
- Presented by Godfrey N. Hounsfield in 1972
- Hounsfield and Cormack received the Nobel Prize in
Physiology or Medicine

Micro-CT of a cicada
Micro Photonics Inc.
https://www.microphotonics.com/1376-2/
Micro-CT of a cicada
Micro Photonics Inc.
https://www.microphotonics.com/1376-2/
 Principle of micro X-Ray CT

Top-view camera

X-ray detector

X-ray source

Rotational stage

- X-ray is absorbed by heavy atoms

- Soft specimen requires low X-ray energy
and high sensitivity
島津製作所 inspeXio SMX-225CT
http://www.an.shimadzu.co.jp/ndi/products/x_ryct/smx_225ct_fpd_hr05.htm
 Today’s contents

1. Observation tools
2. MEMS fabrication methods
3. Artificial sticky foot
4. Lotus leaf: hydrophobic surface
5. Structural color
6. Moth’s eye: anti-reflection surface
 Photolithography and etching process
MEMS (Microelectromechanical Systems)
Photolithography and etching process

1. Deposition
Photolithography and etching process

1. Deposition
Photolithography and etching process

1. Deposition
2. Photolithography
Photolithography and etching process

Exposure

1. Deposition
2. Photolithography
Photolithography and etching process

1. Deposition
2. Photolithography
Photolithography and etching process

Development

1. Deposition
2. Photolithography
Photolithography and etching process

Etching

1. Deposition
2. Photolithography
3. Etching
Photolithography and etching process

1. Deposition
2. Photolithography
3. Etching
Photolithography and etching process

1. Deposition つんで
2. Photolithography リソして
3. Etching けずる
Molding using resin

ex) PDMS: Poly(dimethylsiloxane)

 UV-curable resin
1. Photolithography
UV light

Mask
UV-curable resin
Substrate

2. Development

ex) SU-8: UV-curable epoxy resin

i.e. Negative photoresist
 Today’s contents

1. Observation tools
2. MEMS fabrication methods
3. Artificial sticky foot
4. Lotus leaf: hydrophobic surface
5. Structural color
6. Moth’s eye: anti-reflection surface
 Gecko’s foot

75 μm
Tokay Gecko Gekko gecko
トッケイヤモリ

Size: 110 μm x 4.2 μm

5 μm
Material: Beta keratin

K. Autumn and N. Gravish, "Gecko adhesion: evolutionary

nanotechnology," Philosophical Transactions of the Royal Society
a-Mathematical Physical and Engineering Sciences, vol. 366, pp.
1 μm
1575-1590, May 2008.
 Biomimetic gecko‘s foot

8 um diameter SU-8

8 um diameter polyurethane

B. Aksak, M. P. Murphy, and M. Sitti, "Adhesion of Biologically Inspired Vertical and Angled
Polymer Microfiber Arrays," Langmuir, vol. 23, pp. 3322-3332, 2007.
 Fabrication process

B. Aksak, M. P. Murphy, and M. Sitti, "Adhesion of Biologically Inspired Vertical and Angled
Polymer Microfiber Arrays," Langmuir, vol. 23, pp. 3322-3332, 2007.
 Adhesion force

Loading

Unloading

B. Aksak, M. P. Murphy, and M. Sitti, "Adhesion of Biologically Inspired Vertical and Angled
Polymer Microfiber Arrays," Langmuir, vol. 23, pp. 3322-3332, 2007.
 Directional adhesion

M. P. Murphy, B. Aksak, and M. Sitti, "Gecko-Inspired Directional and Controllable Adhesion,"

Small, vol. 5, pp. 170-175, 2009.
 Fabrication process

M. P. Murphy, B. Aksak, and M. Sitti, "Gecko-Inspired Directional and Controllable Adhesion,"

Small, vol. 5, pp. 170-175, 2009.
 Hierarchical micro hairs

M. P. Murphy, S. Kim, and M. Sitti, "Enhanced Adhesion by Gecko-Inspired Hierarchical

Fibrillar Adhesives," ACS Applied Materials & Interfaces, vol. 1, pp. 849-855, 2009.
 Fabrication process

M. P. Murphy, S. Kim, and M. Sitti, "Enhanced Adhesion by Gecko-Inspired Hierarchical

Fibrillar Adhesives," ACS Applied Materials & Interfaces, vol. 1, pp. 849-855, 2009.
 Adhesion force

M. P. Murphy, S. Kim, and M. Sitti, "Enhanced Adhesion by Gecko-Inspired Hierarchical

Fibrillar Adhesives," ACS Applied Materials & Interfaces, vol. 1, pp. 849-855, 2009.
 Today’s contents

1. Observation tools
2. MEMS fabrication methods
3. Artificial sticky foot
4. Lotus leaf: hydrophobic surface
5. Structural color
6. Moth’s eye: anti-reflection surface
Hydrophobic surface of lotus leaf

WildFilmsIndia, “Water resistant leaves of Lotus or Nelumbo nucifera”

https://www.youtube.com/watch?v=f9BXOdrtSCA
 Hierarchical micro-nano structures

10 μm 2 μm 0.4 μm

Papillose epidermal cells Epicuticular wax

乳頭状表皮細胞 エピクチクラワックス
Hydrophobic
material

Lotus, Nelumbo nucifera

B. Bhushan, Y. C. Jung, and K. Koch, "Micro-, nano- and hierarchical structures for
superhydrophobicity, self-cleaning and low adhesion," Philosophical Transactions of the Royal
Society A: Mathematical, Physical and Engineering Sciences, vol. 367, p. 1631, 2009.
 Principle

Enhanced
hydrophobicity

Z. Burton and B. Bhushan, "Hydrophobicity, Adhesion, and Friction Properties of Nanopatterned

Polymers and Scale Dependence for Micro- and Nanoelectromechanical Systems," Nano Letters,
vol. 5, pp. 1607-1613, 2005.
 *Si was coated with PF3 (phosphorus trifluoride)
三フッ化リン

Best

Z. Burton and B. Bhushan, "Hydrophobicity, Adhesion, and Friction Properties of Nanopatterned

Polymers and Scale Dependence for Micro- and Nanoelectromechanical Systems," Nano Letters,
vol. 5, pp. 1607-1613, 2005.
 Rose petal (花弁) effect

Cassie impregnating wetting regime

B. Bhushan, "Bioinspired Structured Surfaces," Langmuir, vol. 28, pp. 1698-

1714, Jan 2012.
 Rose petal (花弁) effect

Cassie impregnating wetting regime

B. Bhushan, "Bioinspired Structured Surfaces," Langmuir, vol. 28, pp. 1698-

1714, Jan 2012.
 Today’s contents

1. Observation tools
2. MEMS fabrication methods
3. Artificial sticky foot
4. Lotus leaf: hydrophobic surface
5. Structural color
6. Moth’s eye: anti-reflection surface
 Wave length of visible light

Wave length
?

スガツネ工業: https://www.sugatsune.co.jp/technology/illumi-l.php
 Wave length of visible light

Wave length
Frequency

oven
Microwave

TV
FM radio,

radio
Marine/aviation
communication
Underwater
AM radio
Wave length

スガツネ工業: https://www.sugatsune.co.jp/technology/illumi-l.php
 Structural color of Morpho butterfly

Morpho didius
(en.wikipedia.org)

Cross sectional views of the scales of Morpho didius

http://m-
newton.ex.ac.uk/research/emag/butterfli
es/optical/morpho/optical12.html

S. Kinoshita, S. Yoshioka, and K. Kawagoe, "Mechanisms of structural colour in the Morpho butterfly:
cooperation of regularity and irregularity in an iridescent scale," Proceedings of the Royal Society of
London. Series B: Biological Sciences, vol. 269, pp. 1417-1421, 2002.
 Principle: interfering light
1. Interference in a single shelf
multilayer

2. Diffraction from small width

3. Randomness in height and

length prevents the multi-color

4. Narrow gap makes high

reflectivity.

A. Saito, Y. Miyamura, Y. Ishikawa, J. Murase, M. Akai-Kasaya, and Y. Kuwahara, "Reproduction,

Mass-production, and Control of the Morpho-butterfly's Blue," in Advanced Fabrication
Technologies for Micro/Nano Optics and Photonics Ii. vol. 7205, T. J. Suleski, W. V. Schoenfeld,
and J. J. Wang, Eds., ed, 2009.
 Reproduction of Morpho-blue

A. Saito, Y. Miyamura, Y. Ishikawa, J. Murase, M. Akai-Kasaya, and Y. Kuwahara, "Reproduction,

Mass-production, and Control of the Morpho-butterfly's Blue," in Advanced Fabrication
Technologies for Micro/Nano Optics and Photonics Ii. vol. 7205, T. J. Suleski, W. V. Schoenfeld,
and J. J. Wang, Eds., ed, 2009.
 Reflectivity from white light

A. Saito, Y. Miyamura, Y. Ishikawa, J. Murase, M. Akai-Kasaya, and Y. Kuwahara, "Reproduction, Mass-

production, and Control of the Morpho-butterfly's Blue," in Advanced Fabrication Technologies for
Micro/Nano Optics and Photonics Ii. vol. 7205, T. J. Suleski, W. V. Schoenfeld, and J. J. Wang, Eds., ed, 2009.
Photonic crystal
 Today’s contents

1. Observation tools
2. MEMS fabrication methods
3. Artificial sticky foot
4. Lotus leaf: hydrophobic surface
5. Structural color
6. Moth’s eye: anti-reflection surface
 Surface of the moth’s eye

魚津吉弘, “第 1 章 モスアイ型無反射フィルム," in インスツルメンテーションの視点から見たバイオミメ

ティクス∼バイオミメティクス研究及び製品開発の動向と今後の展望∼, シーエムシー・リサーチ, 2016
 Surface of the moth’s eye

魚津吉弘, “第 1 章 モスアイ型無反射フィルム," in インスツルメンテーションの視点から見たバイオミメ

ティクス∼バイオミメティクス研究及び製品開発の動向と今後の展望∼, シーエムシー・リサーチ, 2016
 Principle of reflection
R : Reflectivity
n : Refractive index
0 : Medium
1 : Reflecting object

魚津吉弘, “第 1 章 モスアイ型無反射フィルム," in インスツルメンテーションの視点から見たバイオミメ

ティクス∼バイオミメティクス研究及び製品開発の動向と今後の展望∼, シーエムシー・リサーチ, 2016
Mosmite by Mitsubishi Rayon

三菱レイヨン：https://www.mrc.co.jp/rd/research/result.html
 Process of Mosmite by Mitsubishi Rayon
Anodization of aluminum アルミニウムの陽極酸化
Hole Cell

Oxidized
surface

Aluminum plate

Electrolyte solution
Cell
H2SO4
(COOH)2
H3PO4

魚津吉弘, “第 1 章 モスアイ型無反射フィルム," in インスツルメンテーションの視点から見たバイオミメ

ティクス∼バイオミメティクス研究及び製品開発の動向と今後の展望∼, シーエムシー・リサーチ, 2016
 Process of Mosmite by Mitsubishi Rayon

Anodization

Anodization

Repeat

Etching

Process for original metal mold for Mosmite

魚津吉弘, “第 1 章 モスアイ型無反射フィルム," in インスツルメンテーションの視点から見たバイオミメ

ティクス∼バイオミメティクス研究及び製品開発の動向と今後の展望∼, シーエムシー・リサーチ, 2016
 Process of Mosmite by Mitsubishi Rayon

Metal mold
Metal mold
Resin product

魚津吉弘, “第 1 章 モスアイ型無反射フィルム," in インスツルメンテーションの視点から見たバイオミメ

ティクス∼バイオミメティクス研究及び製品開発の動向と今後の展望∼, シーエムシー・リサーチ, 2016
 Reflectivity
Multilayered AR
Moth eye AR (PET)
Moth eye AR (Acryl)

Reflectivity

Moth eye AR Previous AR

魚津吉弘, “第 1 章 モスアイ型無反射フィルム," in インスツルメンテーションの視点から見たバイオミメ

ティクス∼バイオミメティクス研究及び製品開発の動向と今後の展望∼, シーエムシー・リサーチ, 2016
 Other nano nipple structures
Cabbage butterfly Asian swallowtail

Chest nut tiger

butterfly

野村周平, “昆虫SEM写真をもとにした画像データベース構築の試み," in インスツルメンテーションの視

点から見たバイオミメティクス∼バイオミメティクス研究及び製品開発の動向と今後の展望∼, シーエ
ムシー・リサーチ, 2016
 Other nano-pillar structures
Dog-day cicada Cryptotympana facialis

Meimuna opalifera Tanna japonensis

クマゼミ
昆虫エクスプローラ
http://www.insects.jp/ko
n-semikuma.htm

野村周平, “昆虫SEM写真をもとにした画像データベース構築の試み," in インスツルメンテーションの視

点から見たバイオミメティクス∼バイオミメティクス研究及び製品開発の動向と今後の展望∼, シーエ
ムシー・リサーチ, 2016
 Other nano pillar structures

Could be convergent evolution

for anti-reflection
クマゼミ
昆虫エクスプローラ
http://www.insects.jp/ko
n-semikuma.htm

野村周平, “昆虫SEM写真をもとにした画像データベース構築の試み," in インスツルメンテーションの視

点から見たバイオミメティクス∼バイオミメティクス研究及び製品開発の動向と今後の展望∼, シーエ
ムシー・リサーチ, 2016