Page 1 of 6

FAILURE MODE AND EFFECT ANALYSIS

FMEA Number:

SJ51-000002-01

Item:

Facilities-Electrical Facilities,Electrical system

Process Responsibility: Facilities Key Date: 25-Jul-11

Prepared By: Sim Chung Chin FMEA Date (Orig): 20-Jul-06 (Rev) ( 1 ) 25/ 7 / 11

Sub-Module/Sub-Department: Core Team:

Sulong Mamat ,Sim Chung Chin & Khairi D=Detection, P=Prevention O c Current c Process u Control r 3 UPS supply to critical tools, RTM for chiller pumps of Etch tools

Process Function

Potential Failure Mode

Potential Effect(s) of Failure

S e v

Requirements In coming Supply Power supply disturbamces

C l a s s

Potential Cause(s)/ Mechanism(s) of Failure External Fault at the national grid

Move loss,wafer scrap,wafer 5 re-work

D e t RPN e c 5 75

Recommended Action(s)

Responsibility & Target Completion Date Sim Chung Chin/ Completed

Actions Result S e v NUR gen-sets in 5 operation hot back up to National Grid IR Scan 5 Spare card Actions Taken O c c 3 D e RPN t 5 75

conform tools to SEMIS F47, NUR to run in Island Mode.

VMB Supply UPS SYSTEM

Gas interruption,loss of power Unable to close bypass switch Powerbridge bearing failure One of the unit faulty,Loss of redundancy Loss of power

Move loss,wafer scrap,wafer 5 re-work Move loss,wafer scrap,wafer 10 re-work Move loss,wafer scrap,wafer 10 re-work Loss of power to one side of 10 11kv busbar

loose connection Card failure

1 termination re-tightening, yearly 5 Change all other controller cards and re-program the bypass mechanism 1 Vibration monitoring and IR scan 5 IR Scan, yearly maintenance, oil check

5 25 5 250

IR Scan Test run and verify the bypass mechanism Perform PM as per manufacturing specification Automatic bypass to redundant transformer

Sim Chung Chin/Completed Sim Chung Chin/ Had completed the testing, completed Sim Chung Chin/ Completed Sim Chung Chin/ Completed the testing

1 3 15

10 2 5 100

UPS SYSTEM 33kV main transfomer

Wear and tear Fault within the transformer

5 50 5 250

IR Scan

10 1 5 50 10 2 5 100

Transformers (11kv/480v)

Move loss,wafer scrap,wafer 10 re-work

Fault within the transformer

5 IR Scan, yearly maintenance, oil check

5 250

Transformers (11kv/415v) Tools Transformers (480v/208v)

Loss of power

Move loss,wafer scrap,wafer 10 re-work Move loss,wafer scrap,wafer 10 re-work

Fault within the transformer Fault within the transformer

5 IR Scan, yearly maintenance, oil check 5 IR Scan, yearly maintenance,

5 250

1.Manual bypass to sparring transformers,downtime of 2hrs. 2.Provide bumpless redundancy (RM680K) Manual bypass to sparring transformers

Automatic bypass to redundant transformer Need management to approve Provide budget bumpless redundancy Sim Chung Chin/ Completed

10 2 5 100

Loss of power

5 250

Manual bypass to sparring transformers 1. Replace the transformer, keep Need management to approve Provide N+1 spare transformer, downtime 2 days budget bumpless ( RM400K) redundancy, 2. Provide N+1 bumpless zero down time redundancy, zero down time (RM5,800K) Replace busduct, spare available Sim Chung Chin

10 2 5 100

10 2 5 100

Busduct for Tools PIU for Tools

Loss of power

Move loss,wafer scrap,wafer 10 re-work Move loss,wafer scrap,wafer 6 re-work Move loss,wafer scrap,wafer 6 re-work

Fault within the busduct

4 IR Scan

5 200

Need to get one 10 2 5 100 length for spare Check and tighten all component Check and tighten all component 6 2 2 24

Loss of power

Fault within PIU.

4 IR Scan

4 96

Perform PM as per manufacturing specification Perform PM as per manufacturing specification

Sim Chung Chin

MCB/MCCB for Tools

Loss of power

Fault within the MCB/MCCB.

4 IR Scan

4 96

Sim Chung Chin/ Completed

2 2 24

Page 2 of 6

FAILURE MODE AND EFFECT ANALYSIS

FMEA Number:

SJ51-000002-01

Item:

Facilities-Electrical Facilities,Electrical system

Process Responsibility: Facilities Key Date: 25-Jul-11

Prepared By: Sim Chung Chin FMEA Date (Orig): 20-Jul-06 (Rev) ( 1 ) 25/ 7 / 11

Sub-Module/Sub-Department: Core Team:

Sulong Mamat ,Sim Chung Chin & Khairi D=Detection, P=Prevention

Process Function

Potential Failure Mode Loss of power

Potential Effect(s) of Failure

S e v

Requirements Electrical cable Move loss,wafer scrap,wafer 6 re-work Move loss,wafer scrap,wafer 6 re-work Move loss,wafer scrap,wafer 6 re-work Move loss,wafer scrap,wafer 6 re-work Move loss,wafer scrap,wafer 6 re-work Move loss,wafer scrap,wafer 10 re-work Move loss,wafer scrap,wafer 10 re-work Move loss,wafer scrap,wafer 10 re-work Move loss,wafer scrap,wafer 10 re-work Move loss,wafer scrap,wafer 10 re-work Move loss,wafer scrap,wafer 6 re-work Move loss,wafer scrap,wafer 6 re-work Move loss,wafer scrap,wafer 6 re-work Move loss,wafer scrap,wafer 6 re-work Move loss,wafer scrap,wafer 6 re-work Move loss,wafer scrap,wafer 6 re-work Move loss,wafer scrap,wafer 6 re-work Move loss,wafer scrap,wafer 6 re-work

C l a s s

Potential Cause(s)/ Mechanism(s) of Failure Cable failure, Cable puncture . Fault within breaker.

O c c u r

Current Process Control

D e t RPN e c 5 150

Recommended Action(s)

Responsibility & Target Completion Date Sim Chung Chin / completed

Actions Result Actions Taken Put all cable in cable tray and label proprely Check and tighten all component Check and tighten all component Check and tighten all component Spare card Spare card S e v 6 O D c e RPN c t 2 2 24

4 IR Scan,Put back the trunking cover and tighten the screw 4 IR Scan

Perform PM as per manufacturing specification Perform PM as per manufacturing specification Perform PM as per manufacturing specification Perform PM as per manufacturing specification Perform PM as per manufacturing specification Test run and verify the bypass mechanism Test run and verify the bypass mechanism Test run and verify the bypass mechanism Test run monthly

MG ACB for Tools MG ACB for Facilities MG ACB for Facilities MG ACB for Tools UPS SYSTEM

Loss of power

4 96

Sim Chung Chin/ Completed

2 2 24

Loss of power

Fault within the Built in protection card. Mechanical Fault of the breaker .

4 IR Scan

4 96

Sim Chung Chin/ Completed

2 2 24

Loss of power

4 IR Scan

4 96

Sim Chung Chin/ Completed

2 2 24

Loss of power Unable to close bypass switch Unable to close bypass switch Unable to close bypass switch Diesel engine can't start during power outage Unable to close bypass switch Loss of power Loss of power

Fault within the 4 IR Scan MCB/MCCB. Opening coil open circuit 5 Tripping and test the breaker

4 96 5 250

Sim Chung Chin/ Completed Sim Chung Chin/ Had completed the testing, completed Sim Chung Chin/ Had completed the testing, completed Test run monthly

10 2 5 100 10 2 5 100

UPS SYSTEM

Closing coil open circuit

UPS SYSTEM

UPS SYSTEM

5 Change all other controller cards and re-program the bypass mechanism Charging motor coil open 5 Change all other controller cards circuit and re-program the bypass mechanism Battery weak can't start 5 To replace the battery yearly the diesel engine Battery weak can't start the diesel engine Mechanical Fault of the breaker . ACB built in proctection relay ACB coil getting false signal Current transformer faulty SPAJ faulty . 5 Due to battery charger malfuntion 5 Tripping and test the breaker 5 Tripping and test the breaker

5 250

Spare card

10 2 5 100

5 250

Spare Battery

10 2 5 100

5 250

Sim Chung Chin / Will be test monthly Sim Chung Chin / Will be test monthly Sim Chung Chin / Will be test when window time alocated Sim Chung Chin / Will be test when window time alocated Sim Chung Chin / Will be test when window time alocated Sim Chung Chin / Will be test when window time alocated Sim Chung Chin / Will be test when window time alocated Sim Chung Chin / Will be test when window time alocated Sim Chung Chin / Will be test when window time alocated Sim Chung Chin / Will be test when window time alocated Sim Chung Chin / Will be test when window time alocated

Spare Battery

10 2 5 100

UPS SYSTEM MG ACB for Facilities MG ACB for Facilities MG ACB for Facilities MG ACB for Facilities MG ACB for Facilities MG ACB for Facilities MG ACB for Facilities MG ACB for Facilities MG ACB for Facilities

5 250 5 150 5 150

Test run monthly Perform PM as per manufacturing specification Perform PM as per manufacturing specification Perform PM as per manufacturing specification Perform PM as per manufacturing specification Perform PM as per manufacturing specification Perform PM as per manufacturing specification Perform PM as per manufacturing specification Perform PM as per manufacturing specification Perform PM as per manufacturing specification

Spare card Spare card Spare card

10 2 5 100 10 2 5 100 10 2 5 100

Loss of power Loss of power Loss of power

5 Tripping and test the breaker 5 Secondary current injection test 5 Secondary current injection test

5 150 5 150 5 150

Spare card Spare card Spare card

10 2 5 100 10 2 5 100 10 2 5 100

Loss of power Loss of power

Downstream circuit overload or earth fault Out of calibration

5 Primary injection test the breaker 5 Tripping and test the breaker

5 150 5 150

Spare card Spare card

10 2 5 100 10 2 5 100

Loss of power

5 Give operation persoanl more on job training Miss operation 5 Power Quality monitoring High harmonic level

5 150

Spare card

10 2 5 100

Loss of power

Move loss,wafer scrap,wafer 6 re-work

5 150

Spare card

10 2 5 100

Page 3 of 6

FAILURE MODE AND EFFECT ANALYSIS

FMEA Number:

SJ51-000002-01

Item:

Facilities-Electrical Facilities,Electrical system

Process Responsibility: Facilities Key Date: 25-Jul-11

Prepared By: Sim Chung Chin FMEA Date (Orig): 20-Jul-06 (Rev) ( 1 ) 25/ 7 / 11

Sub-Module/Sub-Department: Core Team:

Sulong Mamat ,Sim Chung Chin & Khairi D=Detection, P=Prevention

Process Function

Potential Failure Mode

Potential Effect(s) of Failure Move loss,wafer scrap,wafer re-work

S e v

Requirements Breaker Trip/ Loss power Breaker Trip/ Loss power Breaker Trip/ Loss power Breaker Trip/ Loss power Breaker Trip/ Loss power Breaker Trip/ Loss power Breaker Trip/ Loss power Breaker Trip/ Loss power Breaker Trip/ Loss power Breaker Trip/ Loss power Breaker Trip/ Loss power Breaker Trip/ Loss power Breaker Trip/ Loss power Breaker Trip/ Loss power Breaker Trip/ Loss power Breaker Trip/ Loss power Breaker Trip/ Loss power

C l a s s

Potential Cause(s)/ Mechanism(s) of Failure

O c c u r

Current Process Control

D e t RPN e c 5 250

Recommended Action(s)

Responsibility & Target Completion Date Sim Chung Chin / Will be test when window time alocated Sim Chung Chin / Will be test when window time alocated Sim Chung Chin / Will be test when window time alocated Sim Chung Chin / Will be test when window time alocated Sim Chung Chin / Will be test when window time alocated Sim Chung Chin / Will be test when window time alocated Sim Chung Chin / Will be test when window time alocated Sim Chung Chin / Will be test when window time alocated Sim Chung Chin / Will be test when window time alocated Sim Chung Chin / Will be test when window time alocated Sim Chung Chin / Will be test when window time alocated Sim Chung Chin / Will be test when window time alocated Sim Chung Chin / Will be test when window time alocated Sim Chung Chin / Will be test when window time alocated Sim Chung Chin / Will be test when window time alocated Sim Chung Chin / Will be test when window time alocated Sim Chung Chin / Will be test when window time alocated

Actions Result Actions Taken Spare card S e v O D c e RPN c t

5 Tripping and test the breaker 10 Mechanical Fault of the breaker . 5 Tripping and test the breaker 10 SF6 gas leakage 5 Tripping and test the breaker 10 Differential Relay given faulty signal 5 Tripping and test the breaker 10 Current transformer faulty 5 Tripping and test the breaker 10 SPAJ faulty . 5 Tripping and test the breaker 10 Downstream circuit overload or earth fault 5 Tripping and test the breaker 10 Out of calibration 5 Tripping and test the breaker 10 Miss operation 5 Tripping and test the breaker 10 Inrush current from transformer 5 Tripping and test the breaker 10 Mechanical Fault of the breaker . 5 Tripping and test the breaker 10 ACB built in proctection relay 5 Tripping and test the breaker 10 ACB coil getting false signal 5 Tripping and test the breaker 10 Current transformer faulty 5 Tripping and test the breaker 10 SPAJ faulty . 5 Tripping and test the breaker 10 Downstream circuit overload or earth fault 5 Tripping and test the breaker 10 Out of calibration 5 Tripping and test the breaker 10 Miss operation

Perform PM as per manufacturing specification Perform PM as per manufacturing specification Perform PM as per manufacturing specification Perform PM as per manufacturing specification Perform PM as per manufacturing specification Perform PM as per manufacturing specification Perform PM as per manufacturing specification Perform PM as per manufacturing specification Perform PM as per manufacturing specification Perform PM as per manufacturing specification Perform PM as per manufacturing specification Perform PM as per manufacturing specification Perform PM as per manufacturing specification Perform PM as per manufacturing specification Perform PM as per manufacturing specification Perform PM as per manufacturing specification Perform PM as per manufacturing specification

10 2 5 100

33Kv System

Move loss,wafer scrap,wafer re-work Move loss,wafer scrap,wafer re-work Move loss,wafer scrap,wafer re-work Move loss,wafer scrap,wafer re-work Move loss,wafer scrap,wafer re-work Move loss,wafer scrap,wafer re-work Move loss,wafer scrap,wafer re-work Move loss,wafer scrap,wafer re-work Move loss,wafer scrap,wafer re-work Move loss,wafer scrap,wafer re-work Move loss,wafer scrap,wafer re-work Move loss,wafer scrap,wafer re-work Move loss,wafer scrap,wafer re-work Move loss,wafer scrap,wafer re-work Move loss,wafer scrap,wafer re-work Move loss,wafer scrap,wafer re-work

5 250

Spare card

10 2 5 100

33Kv System

5 250

Spare card

10 2 5 100

33Kv System

5 250

Spare card

10 2 5 100

33Kv System

5 250

Spare card

10 2 5 100

33Kv System

5 250

Spare card

10 2 5 100

33Kv System

5 250

Spare card

10 2 5 100

33Kv System

5 250

Spare card

10 2 5 100

33Kv System

5 250

Spare card

10 2 5 100

33Kv System

5 250

Spare card

10 2 5 100

11kV Syatem

5 250

Spare card

10 2 5 100

11kV Syatem

5 250

Spare card

10 2 5 100

11kV Syatem

5 250

Spare card

10 2 5 100

11kV Syatem

5 250

Spare card

10 2 5 100

11kV Syatem

5 250

Spare card

10 2 5 100

11kV Syatem

5 250

Spare card

10 2 5 100

11kV Syatem

5 250

Spare card

10 2 5 100

11kV Syatem

Page 4 of 6

FAILURE MODE AND EFFECT ANALYSIS

FMEA Number:

SJ51-000002-01

Item:

Facilities-Electrical Facilities,Electrical system

Process Responsibility: Facilities Key Date: 25-Jul-11

Prepared By: Sim Chung Chin FMEA Date (Orig): 20-Jul-06 (Rev) ( 1 ) 25/ 7 / 11

Sub-Module/Sub-Department: Core Team:

Sulong Mamat ,Sim Chung Chin & Khairi D=Detection, P=Prevention

Process Function

Potential Failure Mode

Potential Effect(s) of Failure Move loss,wafer scrap,wafer re-work

S e v

Requirements Breaker Trip/ Loss power Breaker Trip/ Loss power Breaker Trip/ Loss power Breaker Trip/ Loss power Breaker Trip/ Loss power Breaker Trip/ Loss power Breaker Trip/ Loss power Breaker Trip/ Loss power Breaker Trip/ Loss power Breaker Trip/ Loss power Breaker Trip/ Loss power Breaker Trip/ Loss power Breaker Trip/ Loss power Breaker Trip/ Loss power Breaker Trip/ Loss power Breaker Trip/ Loss power Breaker Trip/ Loss power

C l a s s

Potential Cause(s)/ Mechanism(s) of Failure

O c c u r

Current Process Control

D e t RPN e c 5 250

Recommended Action(s)

Responsibility & Target Completion Date Sim Chung Chin / Will be test when window time alocated Sim Chung Chin / Will be test when window time alocated Sim Chung Chin / Will be test when window time alocated Sim Chung Chin / Will be test when window time alocated Sim Chung Chin / Will be test when window time alocated Sim Chung Chin / Will be test when window time alocated Sim Chung Chin / Will be test when window time alocated Sim Chung Chin / Will be test when window time alocated Sim Chung Chin / Will be test when window time alocated Sim Chung Chin / Will be test when window time alocated Sim Chung Chin / Will be test when window time alocated Sim Chung Chin / Will be test when window time alocated Sim Chung Chin / Will be test when window time alocated Sim Chung Chin / Will be test when window time alocated Sim Chung Chin / Will be test when window time alocated Sim Chung Chin / Will be test when window time alocated Sim Chung Chin / Will be test when window time alocated

Actions Result Actions Taken Spare card S e v O D c e RPN c t

5 Tripping and test the breaker 10 High harmonic level 5 Tripping and test the breaker 10 Breaker internal faulty 5 Tripping and test the breaker 8 Mechanical Fault of the breaker . 5 Tripping and test the breaker 8 ACB built in proctection relay 5 Tripping and test the breaker 8 ACB coil getting false signal 5 Tripping and test the breaker 8 Current transformer faulty 5 Tripping and test the breaker 8 SPAJ faulty . 5 Tripping and test the breaker 8 Downstream circuit overload or earth fault 5 Tripping and test the breaker 8 Out of calibration 5 Tripping and test the breaker 8 Miss operation 5 Tripping and test the breaker 8 High harmonic level 5 Tripping and test the breaker 8 Inrush current from transformer 5 Tripping and test the breaker 8 Mechanical Fault of the breaker . 5 Tripping and test the breaker 8 ACB built in proctection relay 5 Tripping and test the breaker 8 ACB coil getting false signal 5 Tripping and test the breaker 8 Current transformer faulty 5 Tripping and test the breaker 8 SPAJ faulty .

Perform PM as per manufacturing specification Perform PM as per manufacturing specification Perform PM as per manufacturing specification Perform PM as per manufacturing specification Perform PM as per manufacturing specification Perform PM as per manufacturing specification Perform PM as per manufacturing specification Perform PM as per manufacturing specification Perform PM as per manufacturing specification Perform PM as per manufacturing specification Perform PM as per manufacturing specification Perform PM as per manufacturing specification Perform PM as per manufacturing specification Perform PM as per manufacturing specification Perform PM as per manufacturing specification Perform PM as per manufacturing specification Perform PM as per manufacturing specification

10 2 5 100

11kV Syatem

Move loss,wafer scrap,wafer re-work Move loss,wafer scrap,wafer re-work Move loss,wafer scrap,wafer re-work Move loss,wafer scrap,wafer re-work Move loss,wafer scrap,wafer re-work Move loss,wafer scrap,wafer re-work Move loss,wafer scrap,wafer re-work Move loss,wafer scrap,wafer re-work Move loss,wafer scrap,wafer re-work Move loss,wafer scrap,wafer re-work Move loss,wafer scrap,wafer re-work Move loss,wafer scrap,wafer re-work Move loss,wafer scrap,wafer re-work Move loss,wafer scrap,wafer re-work Move loss,wafer scrap,wafer re-work Move loss,wafer scrap,wafer re-work

5 250

Spare card

10 2 5 100

11kV Syatem 415V System (Facilities) 415V System (Facilities) 415V System (Facilities) 415V System (Facilities) 415V System (Facilities) 415V System (Facilities) 415V System (Facilities) 415V System (Facilities) 415V System (Facilities) 415V System (Facilities) 480V System (Tool) 480V System (Tool) 480V System (Tool) 480V System (Tool) 480V System (Tool)

5 200

Spare card

10 2 5 100

5 200

Spare card

10 2 5 100

5 200

Spare card

10 2 5 100

5 200

Spare card

10 2 5 100

5 200

Spare card

10 2 5 100

5 200

Spare card

10 2 5 100

5 200

Spare card

10 2 5 100

5 200

Spare card

10 2 5 100

5 200

Spare card

10 2 5 100

5 200

Spare card

10 2 5 100

5 200

Spare card

10 2 5 100

5 200

Spare card

10 2 5 100

5 200

Spare card

10 2 5 100

5 200

Spare card

10 2 5 100

5 200

Spare card

10 2 5 100

Page 5 of 6

FAILURE MODE AND EFFECT ANALYSIS

FMEA Number:

SJ51-000002-01

Item:

Facilities-Electrical Facilities,Electrical system

Process Responsibility: Facilities Key Date: 25-Jul-11

Prepared By: Sim Chung Chin FMEA Date (Orig): 20-Jul-06 (Rev) ( 1 ) 25/ 7 / 11

Sub-Module/Sub-Department: Core Team:

Sulong Mamat ,Sim Chung Chin & Khairi D=Detection, P=Prevention

Process Function

Potential Failure Mode

Potential Effect(s) of Failure Move loss,wafer scrap,wafer re-work

S e v

Requirements 480V System (Tool) 480V System (Tool) 480V System (Tool) 480V System (Tool) 480V System (Tool) Breaker Trip/ Loss power Breaker Trip/ Loss power Breaker Trip/ Loss power Breaker Trip/ Loss power Breaker Trip/ Loss power Breaker Trip/ Loss power Breaker Trip/ Loss power Breaker Trip/ Loss power Breaker Trip/ Loss power Breaker Trip/ Loss power Breaker Trip/ Loss power Breaker Trip/ Loss power Breaker Trip/ Loss power Breaker Trip/ Loss power Breaker Trip/ Loss power

C l a s s

Potential Cause(s)/ Mechanism(s) of Failure

O c c u r

Current Process Control

D e t RPN e c 5 200

Recommended Action(s)

Responsibility & Target Completion Date Sim Chung Chin / Will be test when window time alocated Sim Chung Chin / Will be test when window time alocated Sim Chung Chin / Will be test when window time alocated Sim Chung Chin / Will be test when window time alocated Sim Chung Chin / Will be test when window time alocated Sim Chung Chin / Will be test when window time alocated Sim Chung Chin / Will be test when window time alocated Sim Chung Chin / Will be test when window time alocated Sim Chung Chin / Will be test when window time alocated Sim Chung Chin / Will be test when window time alocated Sim Chung Chin / Will be test when window time alocated Sim Chung Chin / Will be test when window time alocated Sim Chung Chin / Will be test when window time alocated Sim Chung Chin / Will be test when window time alocated Sim Chung Chin / Will be test when window time alocated Sim Chung Chin / Will be test when window time alocated Sim Chung Chin / Will be test when window time alocated

Actions Result Actions Taken Spare card S e v O D c e RPN c t

5 Tripping and test the breaker 8 Downstream circuit overload or earth fault 5 Tripping and test the breaker 8 Out of calibration 5 Tripping and test the breaker 8 Miss operation 5 Tripping and test the breaker 8 High harmonic level 5 Measure the voltage 8 Transient problem 5 Tripping and test the breaker 6 Mechanical Fault of the breaker . 5 Tripping and test the breaker 6 ACB built in proctection relay 5 Tripping and test the breaker 8 ACB coil getting false signal 5 Tripping and test the breaker 6 Current transformer faulty 5 Tripping and test the breaker 6 SPAJ faulty . 5 Tripping and test the breaker 6 Downstream circuit overload or earth fault 5 Tripping and test the breaker 6 Out of calibration 5 Tripping and test the breaker 6 Miss operation 5 IR scan 6 Over temperature trip 5 Power Quality monitoring 6 High harmonic level 5 Tripping and test the breaker 10 Battery 5 Tripping and test the breaker 10 Starter

Perform PM as per manufacturing specification Perform PM as per manufacturing specification Perform PM as per manufacturing specification Perform PM as per manufacturing specification Perform PM as per manufacturing specification Perform PM as per manufacturing specification Perform PM as per manufacturing specification Perform PM as per manufacturing specification Perform PM as per manufacturing specification Perform PM as per manufacturing specification Perform PM as per manufacturing specification Perform PM as per manufacturing specification Perform PM as per manufacturing specification Perform PM as per manufacturing specification Perform PM as per manufacturing specification Perform PM as per manufacturing specification Perform PM as per manufacturing specification

10 2 5 100

Move loss,wafer scrap,wafer re-work Move loss,wafer scrap,wafer re-work Move loss,wafer scrap,wafer re-work Move loss,wafer scrap,wafer re-work Move loss,wafer scrap,wafer re-work Move loss,wafer scrap,wafer re-work Move loss,wafer scrap,wafer re-work Move loss,wafer scrap,wafer re-work Move loss,wafer scrap,wafer re-work Move loss,wafer scrap,wafer re-work Move loss,wafer scrap,wafer re-work Move loss,wafer scrap,wafer re-work Move loss,wafer scrap,wafer re-work Move loss,wafer scrap,wafer re-work Move loss,wafer scrap,wafer re-work

5 200

Spare card

10 2 5 100

5 200

Spare card

10 2 5 100

5 200

Spare card

10 2 5 100

5 200

Spare card

10 2 5 100

5 150

Spare card

10 2 5 100

208V System

5 150

Spare card

10 2 5 100

208V System

5 200

Spare card

10 2 5 100

208V System

5 150

Spare card

10 2 5 100

208V System

5 150

Spare card

10 2 5 100

208V System

5 150

Spare card

10 2 5 100

208V System

5 150

Spare card

10 2 5 100

208V System

5 150

Spare card

10 2 5 100

208V System 208 V Dry type Transformers

5 150

Spare card

10 2 5 100

5 150

Spare card

10 2 5 100

208V System UPS system (Diesel Engine) UPS system (Diesel Engine)

5 250

Spare card

10 2 5 100

Unable to start Move loss,wafer scrap,wafer re-work Unable to start

5 250

Spare card

10 2 5 100

Page 6 of 6

FAILURE MODE AND EFFECT ANALYSIS

FMEA Number:

SJ51-000002-01

Item:

Facilities-Electrical Facilities,Electrical system

Process Responsibility: Facilities Key Date: 25-Jul-11

Prepared By: Sim Chung Chin FMEA Date (Orig): 20-Jul-06 (Rev) ( 1 ) 25/ 7 / 11

Sub-Module/Sub-Department: Core Team:

Sulong Mamat ,Sim Chung Chin & Khairi D=Detection, P=Prevention

Process Function

Potential Failure Mode

Potential Effect(s) of Failure Move loss,wafer scrap,wafer re-work

S e v

Requirements UPS system (Diesel Engine) UPS system (Diesel Engine) UPS system (Diesel Engine) UPS system (Diesel Engine) UPS system (Diesel Engine) UPS system (Diesel Engine) UPS system (Alternator/Triblock) UPS system (Alternator/Triblock) UPS system (Alternator/Triblock) UPS system (Alternator/Triblock) UPS system (Power Bridge) UPS system (Power Bridge) UPS system (Power Bridge) UPS system (Power Bridge) UPS system (Power Bridge)

C l a s s

Potential Cause(s)/ Mechanism(s) of Failure

O c c u r

Current Process Control

D e t RPN e c 5 250

Recommended Action(s)

Responsibility & Target Completion Date Sim Chung Chin / Will be test when window time alocated Sim Chung Chin / Will be test when window time alocated Sim Chung Chin / Will be test when window time alocated Sim Chung Chin / Will be test when window time alocated Sim Chung Chin / Will be test when window time alocated Sim Chung Chin / Will be test when window time alocated Sim Chung Chin / Will be test when window time alocated Sim Chung Chin / Will be test when window time alocated Sim Chung Chin / Will be test when window time alocated Sim Chung Chin / Will be test when window time alocated Sim Chung Chin / Will be test when window time alocated Sim Chung Chin / Will be test when window time alocated Sim Chung Chin / Will be test when window time alocated Sim Chung Chin / Will be test when window time alocated Sim Chung Chin / Will be test when window time alocated

Actions Result Actions Taken Spare card S e v O D c e RPN c t

5 Tripping and test the breaker 10 Battery Charger 5 Tripping and test the breaker 10 Fuel 5 Tripping and test the breaker 10 Miss operation or no knowlegde 5 Tripping and test the breaker 10 bearing 5 Tripping and test the breaker 10 current control card 5 Tripping and test the breaker 10 Control signal back contact 5 Tripping and test the breaker Coupling choke faulty 5 Tripping and test the breaker 10 Clutch 5 Tripping and test the breaker 10 bearing 5 Tripping and test the breaker 10 Rotaring Diode 5 Tripping and test the breaker 10 bearing 5 Tripping and test the breaker 10 Control card 5 Tripping and test the breaker 10 Thyristor fuse 5 Tripping and test the breaker 10 Diode 5 Tripping and test the breaker 10 Thyristor

Perform PM as per manufacturing specification Perform PM as per manufacturing specification Perform PM as per manufacturing specification Perform PM as per manufacturing specification Perform PM as per manufacturing specification Perform PM as per manufacturing specification Perform PM as per manufacturing specification Perform PM as per manufacturing specification Perform PM as per manufacturing specification Perform PM as per manufacturing specification Perform PM as per manufacturing specification Perform PM as per manufacturing specification Perform PM as per manufacturing specification Perform PM as per manufacturing specification Perform PM as per manufacturing specification

10 2 5 100

Unable to start Move loss,wafer scrap,wafer re-work Unable to start Move loss,wafer scrap,wafer re-work Unable to start Move loss,wafer scrap,wafer re-work Unable to start Move loss,wafer scrap,wafer re-work Unable to start Move loss,wafer scrap,wafer re-work Unable to start Move loss,wafer scrap,wafer re-work Unable to start Move loss,wafer scrap,wafer re-work Unable to start Move loss,wafer scrap,wafer re-work Unable to start Move loss,wafer scrap,wafer re-work Unable to start Move loss,wafer scrap,wafer re-work Unable to start Move loss,wafer scrap,wafer re-work Unable to start Move loss,wafer scrap,wafer re-work Unable to start Move loss,wafer scrap,wafer re-work Unable to start Move loss,wafer scrap,wafer re-work Unable to start

5 250

Spare card

10 2 5 100

5 250

Spare card

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5 250

Spare card

10 2 5 100

5 250

Spare card

10 2 5 100

5 250

Spare card

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5 250

Spare card

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10

5 250

Spare card

10 2 5 100

5 250

Spare card

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5 250

Spare card

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5 250

Spare card

10 2 5 100

5 250

Spare card

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5 250

Spare card

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5 250

Spare card

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5 250

Spare card

10 2 5 100