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High Performance Green LEDs for Solid State Lighting

High Performance Green LEDs for Solid State Lighting University of California, Santa Barbara Professor Jim Speck [email protected] U.S. DEPARTMENT OF ENERGY OFFICE OF ENERGY EFFICIENCY & RENEWABLE ENERGY 1 Project Summary Timeline: Start date: September 30, 2017 Planned end date: September 30, 2019 Key Milestones 1. Green LEDs with ≥ 54% internal quantum efficiency (IQE) at 35 A/cm2 , 9/30/2019 2. Green LEDs with ≥ 46% external quantum efficiency (EQE) at 35 A/cm2 , 9/30/2019 3. Green LEDs with ≥ 35% power conversion efficiency at 35 A/cm2, 9/30/2019 Budget: Total Project $ to Date: • DOE: $178,370.76 • Cost Share: $35,674.15 Total Project $: • DOE: $999,996 • Cost Share: $250,130 U.S. DEPARTMENT OF ENERGY OFFICE OF ENERGY EFFICIENCY & RENEWABLE ENERGY Key Partners: UCSB will share all progress and data with DOE SSL program and stakeholders in the DOE SSL program. Project Outcome: We have assembled a team of leading experts at UCSB in GaN-based materials growth, device processing and measurement, materials characterization and semiconductor physics to aggressively address the green gap and to meet or exceed the 2020 FOA goals for direct green LEDs. 2 Team Prof. Shuji Nakamura UCSB Prof. James Speck UCSB Abdullah Alhassan Postdoc, UCSB Cheyenne Lynsky GSR, UCSB U.S. DEPARTMENT OF ENERGY Prof. Steven DenBaars Prof. Claude Weisbuch UCSB UCSB, École Polytechnique Guillaume Lheureux Postdoc, UCSB OFFICE OF ENERGY EFFICIENCY & RENEWABLE ENERGY Bastien Bonef Postdoc, UCSB 3 Challenge White LED progress for solid state lighting has been driven by phosphor converted LEDs (pcLEDs) Fundamental limitation of ~300 lm/W due to Stokes’ losses between blue pump LED and phosphor Color mixed LEDs (cm-LEDs) produce white light from red, green, blue, and amber (RGBA) LEDs Higher fundamental efficiency limit of ~400 lm/W U.S. DEPARTMENT OF ENERGY OFFICE OF ENERGY EFFICIENCY & RENEWABLE ENERGY Poor efficiency of green and amber LEDs is the primary efficiency limitation for cm-LEDs Poor performance of green LEDs due to: 1. Poor materials quality due to low temperature MOCVD growth 2. Large internal electric fields 3. An excess operating voltage ΔVF much larger than in blue 4 Challenge Problem Definition: Fundamental limitations of pc-LEDs motivate the development of green LEDs for use in cm-LEDs. Green LEDs, however, suffer from poor materials quality, large internal electric fields, and excess operating voltage relative to SOA blue LEDs. The challenge therefore lies in identifying and understanding the fundamental limitations of green LEDs and then designing and implementing solutions to address these issues. Target Audience and Market: Audience: U.S. based LED manufacturers and U.S. R&D community Market: U.S. lighting market U.S. DEPARTMENT OF ENERGY OFFICE OF ENERGY EFFICIENCY & RENEWABLE ENERGY 5 Approach Reduction of SRH Recombination Active region optimization - high temperature MOCVD growth of InGaN QWs combined with AlGaN cap layers followed by higher temperature GaN quantum barriers Systematic studies of growth temperature, metalorganic flows, carrier gas flows, and NH3 flow Use peak EQE and EQE at 35 A/cm2 as metrics for improvement of material quality Advanced Design Use new device simulation tool based on landscape theory to account for the role of alloy fluctuations in carrier transport and recombination Design reduced barriers for electron and hole injection into QWs, thus reducing operating voltage Explore novel layer designs to reduce barriers for hole transport to deeper QWs so as to reduce overall carrier density and thus reduce droop U.S. DEPARTMENT OF ENERGY OFFICE OF ENERGY EFFICIENCY & RENEWABLE ENERGY 6 Approach Polarization Engineering Design, grow, and process structures with reduced polarization-related electric fields in the quantum to increase electron-hole overlap and thus radiative recombination rate Heavily doped layers adjacent to the QWs have the potential to screen the piezoelectric induced field in the QW Quaternary alloys will be explored for polarization matched quantum barriers Current density ( A/cm2) 300 1.5E20 cm-3 1.2E20 cm-3 1.0E19 cm-3 200 100 0 1.5 2.0 2.5 3.0 3.5 Voltage ( V) SiLENSe simulations of electron and hole wavefunctions and IV curves U.S. DEPARTMENT OF ENERGY OFFICE OF ENERGY EFFICIENCY & RENEWABLE ENERGY 7 Impact www.arkesso.com Because of their key role in cm-LEDs, realizing high performance green LEDs will advance LED technology Compared to pc-LEDs, cm-LEDs have a higher fundamental efficiency limit Color mixed white lighting has other inherent advantages over pc-LEDs in terms of color purity, stability, adaptive lighting, and small source size. A thorough understanding of the green gap combined with novel approaches are essential to meeting all 2020 DOE targets for green LEDs U.S. DEPARTMENT OF ENERGY OFFICE OF ENERGY EFFICIENCY & RENEWABLE ENERGY 8 Progress Subtask 4.1 Role of the electron blocking layer (EBL) in forward voltage 8 50 7 30 No EBL 15% Al 10% Al 5% Al Power (mW) Current (mA) 40 20 6 5 4 No EBL 15% Al 10% Al 5% Al 3 2 10 1 0 1 2 3 4 Voltage (V) 5 0 0 10 20 30 Current (mA) 40 50 p-AlGaN EBL has a negative effect on VF, however increasing the Al% in the EBL improves the output power U.S. DEPARTMENT OF ENERGY OFFICE OF ENERGY EFFICIENCY & RENEWABLE ENERGY 9 Progress Subtask 2.4 Assess the necessity of the electron blocking layer in green LEDs U.S. DEPARTMENT OF ENERGY OFFICE OF ENERGY EFFICIENCY & RENEWABLE ENERGY 10 Progress Subtask 4.2 Role of the number of quantum wells in forward voltage 35 140 120 1 QW 2 QWs 3 QWs 5 QWs 7 QWs 25 20 100 80 15 60 10 40 5 20 0 0 1 2 3 4 Voltage (V) 5 6 U.S. DEPARTMENT OF ENERGY 20 A/cm2 2 0 7 Series resistance between 40 to 60 A/cm2 : 1QW = 3 Ω 2QW = 2.95 Ω 3QW = 3.3 Ω 5QW = 5.3 Ω 7QW = 8.1 Ω OFFICE OF ENERGY EFFICIENCY & RENEWABLE ENERGY 4 3 Power (mW) 30 5 0.90 0.85 0.80 0.75 0.70 0.65 0.60 0.55 0.50 0.45 0.40 1 1 2 2 3 3 4 5 4 3.6 3.4 3.2 3.0 2.8 2.6 2.4 2.2 2.0 20 A/cm2 1.8 1.6 5 6 7 QW (#) QW (#) 6 7 Power density (W/cm2) 160 Voltage (V) 40 Current density (A/cm2) Current (mA) 6 11 Progress Reduction in internal barriers by reducing the Al % in the AlGaN cap layer 50 p-GaN HT GaN barrier 5x 2 nm AlXGa1-XN cap layer 3 nm InGaN QW GaN UID Current (mA) p++contact layer 40 30 20 10 n-(In0.05GaN0.95/GaN) S.L 0 0 Power (mW) 4 X = 0, 0.11, 0.20 and 0.33 3 OFFICE OF ENERGY EFFICIENCY & RENEWABLE ENERGY 2 3 4 Voltage (V) 5 6 7 0% Al 11% Al 20% Al 32.5% Al 2 1 0 0 U.S. DEPARTMENT OF ENERGY 1 5 5 um UID GaN/n-GaN Patterned Sapphire Substrate (PSS) 0% Al 11% Al 20% Al 32.5% Al 10 20 30 Current (mA) 40 50 12 Progress Subtask 4.4 Detailed I-V measurement and analysis 100.0µ 10 um 15 um 25 um 35 um 45 um 55 um Pd/Au Unoptimized contact P-GaN Current (A) Optimizing p++GaN contact layer 50.0µ 0.0 -50.0µ 50.0µ Optimized contact -50.0µ -2 0 Voltage (V) 1 2 160 140 35 0.0 -100.0µ -3 -1 40 10 um 15 um 25 um 35 um 45 um 55 um -1 U.S. DEPARTMENT OF ENERGY 0 Voltage (V) 1 2 3 OFFICE OF ENERGY EFFICIENCY & RENEWABLE ENERGY Current (mA) Current (A) 100.0µ -2 30 120 3_QWs_old 3_QWs_new 25 100 20 80 15 60 10 40 5 20 0 0 1 2 3 4 Voltage (V) 5 6 Current density (A/cm2) -100.0µ 0 13 Stakeholder Engagement Stakeholders: U.S. Department of Energy U.S. Academic R&D community Engagement with Industry: Share all progress with U.S. industry via DOE SSL Roundtable and Workshops Communication with Stakeholders: DoE SSL workshops U.S. DEPARTMENT OF ENERGY OFFICE OF ENERGY EFFICIENCY & RENEWABLE ENERGY 14 Remaining Project Work Subtask 3.1 Polarization-field screened QWs High Doped Layers VF=3.41 V at 100 A/cm2 p-GaN p++GaN InGaN SQW n++GaN n-GaN Doping layers adjacent to QWs to reduce electric field Grow thicker (screened) QWs to achieve reduced carrier densities Bias-dependent photocurrent and PL to quantify screening U.S. DEPARTMENT OF ENERGY OFFICE OF ENERGY EFFICIENCY & RENEWABLE ENERGY VF=2.67 V at 100 A/cm2 15 Remaining Project Work Subtask 3.3 Polarization-field screened QWs with polarization-matched QBs p++-GaN UID AlInGaN InGaN SQW UID AlInGaN 0.8 Overlap integrals Quaternary Layers 1.0 1.5e20 1.2e20 1.0e19 1.8e20 ( AlInGaN) 0.6 0.4 0.2 n++-GaN 0.0 0 50 100 150 200 250 300 2 Polarization screened QWs and polarization matched QB (using quaternary alloys) will be implemented Wavefunction overlap will be optimized Current density ( A/cm2) Current density ( A/cm ) 200 1.5e20 1.2e20 1e19 1.8e20( AlInGaN) 100 0 1.5 2.0 2.5 3.0 3.5 Voltage ( V) U.S. DEPARTMENT OF ENERGY OFFICE OF ENERGY EFFICIENCY & RENEWABLE ENERGY 16 Remaining Project Work Doping optimization for the polarization-field screened QWs U.S. DEPARTMENT OF ENERGY OFFICE OF ENERGY EFFICIENCY & RENEWABLE ENERGY 17 Thank You University of California, Santa Barbara Professor Jim Speck [email protected] U.S. DEPARTMENT OF ENERGY OFFICE OF ENERGY EFFICIENCY & RENEWABLE ENERGY 18 References 1. “Solid-State Lighting Research and Development: Multi-Year Program Plan,” U.S. Department of Energy, April 2012. 2. M. Auf der Maur, A. Pecchia, G. Penazzi, W. Rodrigues, and A. Di Carlo, “Efficiency Drop in Green InGaN/GaN Light Emitting Diodes: The Role of Random Alloy Fluctuations,”Physical Review Letters, vol. 116, p. 027401, Jan. 2016. 3. C.-K. Li, M. Piccardo, L.-S. Lu, S. Mayboroda, L. Martinelli, J. Peretti, J. S. Speck, C. Weisbuch, M. Filoche, and Y.-R. Wu, “Localization landscape theory of disorder in semiconductors. III. Application to carrier transport and recombination in light emitting diodes,” Physical Review B, vol. 95, p. 144206, Apr. 2017. U.S. DEPARTMENT OF ENERGY OFFICE OF ENERGY EFFICIENCY & RENEWABLE ENERGY 19 Project Budget Project Budget: • DOE: $999,996 • Cost Share: $250,130 Variances: W2018, S2018 – personnel added to take program to level spending Cost to Date: • DOE: $178,370.76 • Cost Share: $35,674.15 Additional Funding: None Budget History FY 2018 (current) DOE 178,370 FY 2019 – 9/30/19 Cost-share DOE 35,674 500,000 U.S. DEPARTMENT OF ENERGY (planned) Cost-share 125,065 OFFICE OF ENERGY EFFICIENCY & RENEWABLE ENERGY 20 Project Plan and Schedule Go/No-Go Decision Point Summary: The Go/No-Go decision point at 12 months is to realize MQW green LED with ΔVF (35 A/cm2) < 0.5 V and performance (EQE) comparable to our current standard reference. U.S. DEPARTMENT OF ENERGY OFFICE OF ENERGY EFFICIENCY & RENEWABLE ENERGY 21