Laser Material Processing

Company Profile
As a proud member of Excelitas Technologies, & Hoyer and others. In October 2013, Qioptiq was
Qioptiq designs and manufactures photonic products acquired by Excelitas Technologies Corp., a global
and solutions that serve a wide range of markets and technology leader focused on delivering innovative,
applications in the areas of medical and life sciences, customized solutions to meet the lighting, detection
industrial manufacturing, defense and aerospace, and other high-performance technology needs of
and research and development. OEM customers. The combined companies have
approximately 6,700 employees in North America,
Qioptiq benefits from having integrated the Europe and Asia, serving customers across the world.
knowledge and experience of Avimo, Gsänger,
LINOS, Optem, Point Source, Rodenstock, Spindler Visit www.excelitas.com for more information.

1877 1898 1966 1969 1984 1991 1996

Pilkington PE
Ltd. founded,
Rodenstock Spindler & Hoyer which later Gsänger Optem Point Source LINOS founded
founded founded becomes THA- Optoelektronik International founded through the merger
LES Optics founded founded of Spindler & Hoyer,
Steeg & Reuter
Präzisionsoptik,
Franke Optik and
Gsänger Optoelektronik
 Content
Company Profile 02 – 03
BIOMEDICAL CONSUMER Our Core Competencies 04 – 05
PRODUCTS
LINOS F-Theta-Ronar Lenses
Overview 06 – 09
340-360 nm 10
515-540 / 532 nm 11 3
940-980 nm 12
SEMICONDUCTOR SCIENTIFIC &
ANALYTICAL 1064 / 1030-1080 nm 13
1900-2000 nm 14

LINOS Beam Expanders

Overview 15 – 17
Manual Variable Versions 18
INDUSTRIAL DEFENSE & Motorized Versions 19
AEROSPACE

Protective Glasses 20

LINOS Focus-Ronar Lenses

355 nm 21
1064 + 532 nm 22

2000 2001 2005 2006 / 2007 2010 2013

Qioptiq Qioptiq is aquired by

founded as Excelitas Technologies
Rodenstock THALES sells Qioptiq acquires The new Qioptiq
AVIMO Group
Präzisionsoptik High Tech LINOS and Point Source consolidates all
acquired
acquired Optics Group as “members of the group members
by THALES
by LINOS Qioptiq group” under one brand
4
04

Our Core
Competencies:

Products for
Laser Material
Processing
Benefit from over 30 years of experience in the Development
development of optical systems for laser material • Development of
processing! - Optical system design (in-house
software-system, Code V®, Zemax®)
Our broad selection of manual and motorized Beam including back reflection analysis
Expanders and comprehensive range of LINOS - Mechanical design
F-Theta-Ronar and Focus-Ronar lenses are engineered - Coating design
to meet the most stringent requirements. We will • FEM-analysis including thermal effects
serve you from development and prototyping to for high-power applications
volume production. During the full lifetime of your • Advanced tolerance analysis and
product Qioptiq is your partner for your OEM needs. yield simulation adapted to Qioptiq
patented mounting, adjustment and
gluing technologies
 05
5

Consistent High-Quality
Production from Rapid
Prototype to High Volume

Manufacturing Quality Control

• S tate-of-the-art machinery for optics and • Automated measurement equipment for
mechanics production optical parameters (e.g. focal length)
•D
 evelopment of in-house processes for • Measurements of the image spot
precise assembly of optical elements diameter (1/e2) for Gaussian illumination
•M
 ounting techniques with accuracies for 355 nm, 532 nm and 1064 nm
down to 2 µm • UV to NIR transmission measurements
•A
 ctive positioning and gluing technologies • Absorption testing of the coatings at
• Cleanroom facilities various wavelengths
•C
 oating process from conventional • Enviromental testing (temperature,
deposition up to ion-beam-sputtering in humidity, vibration, shock)
spectral range: UV, VIS, NIR • Quality report on request
• L ow absorption coating for higher laser • After sales service
power applications • Technical support
 LINOS F-Theta-Ronar Lenses

LINOS F-Theta-Ronar Lenses

and LINOS Beam Expander
Applications for LINOS beam guidance
components
The wide range of different laser sources and types
opens up a broad market for focusing systems. Only
with the provision of process-oriented focusing
systems are the extremely diverse possible applications
of the laser tool fully usable. LINOS F-Theta-Ronar
lenses, LINOS Focus-Ronar lenses and LINOS Beam
Expanders for laser material processing guarantee the
6 best machining results over the entire working range.
They contribute significantly to the optimization of
process safety, especially in demanding tasks. The
fields of application are extremely versatile:

• Additive manufacturing processes with metallic How the LINOS F-Theta-Ronar lenses
and organic substances (e.g. selective laser work
melting) A collimated laser beam is deflected, for example
• Welding of metals and non-ferrous metals (e.g. by galvanometer mirrors, at an angle θ with respect
battery cell manufacturing) to the optical axis. The LINOS F-Theta-Ronar lens
• Drilling and fineblanking of metals and ceramics focuses the ray bundels in its focal plane. By rotating
(e.g. printed circuit board micro drillings) the mirrors and thus changing the object angle θ, the
• Plastic welding for the local melting of surfaces focal point moves over the working plane.
allows connections of plastics without additional
materials Characteristics of F-Theta lenses
• Structuring/perforating of metallic and non- F-Theta lenses have two main characteristics.
metallic materials (e.g. solar cells, display glass) When a beam is deflected by a scanning mirror in
• Labelling (e.g. smart cards, ICs, printing plates, front of a F-Theta lens, then the scanned distance
keyboards, controls with day & night design) is proportional to the scanning angle. Secondly the
• Cleaning by means of laser pulses ensures a focus position over the entire scan field is always in
material-sparing treatment of industrial products the same plane.
(e.g. wafers) as well as restoration projects (e.g.
monuments)
 LINOS F-Theta-Ronar Lenses

Basic calculations of F-Theta-Ronar Aperture

lenses The aperture stop position of the system is
All LINOS F-Theta-Ronar lenses achieve diffraction characterized in that the chief ray of the incident
limited performance. The truncated entrance beam beam bundle intersects the optical axis. When using
diameter and the image spot diameter refer to the only one scanning element, this is located at the
intensity 1/e² at Gaussian illumination and for ideal aperture stop position.
M²=1. The spot size of LINOS F-Theta-Ronar lenses
can be calculated with the following formula: It is desirable to position the scanning element as
close as possible to the first lens element of the
Spot-Ø = 1.83 * λ * FL / beam-Ø objective lens. Thus, the impact height of the beam
Spot-Ø: image spot diameter [µm] on the first and all subsequent lenses and thus the
1.83: factor of apodisation lens diameters are minimized. The lens becomes
λ: wavelength [nm] more compact.
FL: focal length [mm]
7
Beam-Ø: entrance-beam diameter [mm] For systems with more than one scanning element
(e.g. scan heads) the aperture stop position is
The scan length in each direction x or y can be different for the different scan angles. Since all lens
calculated by the formula: aberrations, with the exception of the spherical
aberration, depend on the aperture stop position,
2y= FL * 2Θy * π/180 and 2x= FL * 2Θx * π/180 they vary depending on the mirror deflection. For
2x, 2y: scan length in direction x,y [mm] this reason, the number of scanning elements, the
FL: focal length [mm] distance to each other (m1), and to the lens (m2)
2Θx,y: max. scan angle Theta for each mirror [°] must be known when the lens is being designed.
π/180: conversion factor (into radians)
Mirror distances
The mirror distances m1 and m2 are recommended The design of the scan heads has a fundamental
values and may vary. A smaller entrance beam diameter influence on the field size and the performance of
allows larger scan angles and therefore larger scan the respective lens. Depending on the aperture and
fields are achievable. model, the distance between the two mirrors and
thus the aperture stop position varies. In addition,
Application data the scan heads have different maximum deflection
angles. These are usually limited by the scan head
manufacturers to avoid overexposure of the mirror
or a collision of both mirrors in excessive distraction.
The distance between the mirrors is called m1.

The distance m2 is the distance between the vertex

of the first lens surface and the center of the second
scan head mirror.
 LINOS F-Theta-Ronar Lenses

Product range of LINOS F-Theta-Ronar The maximum scan field of telecentric lenses cannot
lenses exceed the lens diameter. On the other hand the spot
roundness and the impact angle is constant over the
Optical-glass lenses scan field.
For all major applications a wide variety of lenses
exist with various focal lengths ranging from This ensures that the point of impact of the beam
100 mm to 420 mm and for different wavelengths bundle remains constant even with defocusing.
from 532 nm to 1064 nm. Telecentricity is gaining great importance, for
example, in drilling systems in the printed circuit
Fused-silica lenses board industry, some of which drill through millimeter
Qioptiq has developed a range of sophisticated LINOS thick circuit boards. In such extreme cases refocusing
F-Theta-Ronar scan lenses made of fused-silica for of the beam by beam widening is inevitable.
high-power and short-pulse laser material processing.
Fused-silica lenses provide minimized thermal focus Qioptiq offers telecentric F-Theta-Ronar lenses
8
shift and higher resistance when working at high made of fused-silica and of optical-glass/fused-silica
power density. These lenses are usable for wavelength combination.
ranges of 340-360 nm, 515-540 nm, 1030-
1080 nm or 1900-2000 nm. A specially developed Customized solutions
coating achieves very low reflection and qualified In addition to our existing LINOS F-Theta-Ronar lenses
absorption values. The optical designs minimize damage Qioptiq offers customized solutions from adapted
due to back reflections onto the scanning mirrors and wavelength shift of standard lenses up to complete
internal reflections. The LINOS fused-silica F-Theta- new designs. Please contact Qioptiq to discuss your
Ronar lenses are suitable for fiber- and disk lasers. requests with our specialists.

Telecentric lenses Thermal focus shift

With telecentric lenses the beam impact angle on the Thermal focus shift of beam guidance components
work target is nearly perpendicular over the entire is a topic especially for lasers of high beam quality
scan field. and high power. When a light beam passes through
an optical system, it loses a part of its energy. There
is a local heating effect and thus a local deformation
of the lens causing a change in the refractive index
Application data
of the lens material. This results in a change in the
propagation of the wave front of the laser beam in
the medium and at the entrance and exit surfaces of
the individual optical components. This phenomenon
is referred to as a thermal lens and leads to a shift in
the focus position, the so-called thermal focus shift,
and deterioration of the beam quality.
 LINOS F-Theta-Ronar Lenses

It is a matter of design, material selection and ≤ 20 ppm at 1064 nm (typically better than
production process how well a lens can withstand 10 ppm) and ≤ 30 ppm at 532 nm (typically better than
environmental fluctuations and energy input by 15 ppm). The absorption is measured in batches
laser radiation. The most important strategy for with our own specially developed measuring device
reducing the thermal focus shift is to use materials in series. Fused-silica lenses with this coating can
that inherently absorb less energy. QIOPTIQ achieves be recognized by the product number ending -26.
this through using particularly selected high-quality Furthermore, the lenses of the motorized LINOS
fused-silica materials and a low absorption coating of Beam Expanders for the wavelength ranges 515-
the lenses. Compliance with the specified maximum 540 nm and 1030-1080 nm are coated with the
absorption of the coating is monitored in batches “low absorption” coating.
using a specially developed absorption measuring
device. An excellent uniform transmission over the entire
scan field is achieved with our special Qioptiq in-
Coating house developed angle-optimized coatings.
9
Coatings are applied on each lens surface to maximize
the transmission of the complete optical system The respective damage threshold of the applied
like LINOS F-Theta-Ronar lenses or LINOS Beam coating can be found in the datasheet of the
Expanders. The additional challenge for coatings corresponding lens.
in laser material applications lies in a high damage
resistance and minimized absorption. All our coatings are analyzed for laser damage
threshold values. The tests are conducted according
The fused-silica optics in the wavelength range to the standardized test method DIN EN ISO 11254-
between 400 nm and 1080 nm are coated as standard 2, a multi-pulse procedure (S-on-1) with given pulse
with Qioptiq’s newly developed “low absorption” lengths:
coating, which has a specified absorption of

Laser damage threshold Pulse length Laser damage threshold Pulse length
(J/cm²) (ns) (J/cm²) (fs)
Optical-glass lenses
532 nm 6 - 20 6
1064 nm 6 - 30 9

Fused-silica lenses
340 - 360 nm 4 6
515 - 540 nm 20 8 0.6 204
1030 - 1080 nm 40 12 0.9 291

There is no guarantee that the same values will result under the customer‘s conditions of use.
 LINOS F-Theta-Ronar Lenses

LINOS F-Theta-Ronar Lenses

340-360 ​nm
• Fused-silica designs • All lenses can be used with enlarged
• Telecentric versions available beam ​diameters and different mirror
• Focal lengths ranging from 70 mm to distances.
255 ​mm, tolerance ±1% Ac­cordingly the scan fields and spot size
• Screw thread M85x1 diameters will be changed. ​Please feel
free to send us your request.
• Transmission ≥ 96 % with good
performance ​in VIS-range
• Angle-optimized coatings
• Laser damage threshold coating up to
4 J/cm² at 355 ​nm, 6 ns, 100 Hz
• Includes interchangeable fused-silica
protect­ive glasses
LINOS F-Theta-Ronar telecentric lens for 355 nm,
focal length 167 mm
10

LINOS F-Theta-Ronar 340-360 nm, Fused-Silica

Focal ​ Scan ​ Max. scan ​ Beam ​diameter ​ Spot Mirror Working ​ Pro­tective ​ Part No.
length ​ field ​ angle ±Θx,y ​ truncated ​at 1/e² ​ dia­meter dis­tances distance ​ glass
at ​1/e2 ​​ m1/​m2
(mm) (mm²) (°) (mm) (µm) (mm) (mm)
70 ​telecentric 28 x 28 ±11.3 10 5 13/19 92.5 PG4 4401-576-000-21
100 ​telecentric 46 x 46 ±12.7 10 7 13/29 136.7 PG11 4401-509-000-21
160 98 x 98 ±17.7 7 15 9/16 197.4 PG4 4401-399-000-21
167 ​telecentric 65 x 65 ±11.3 10 13 13/48 255.0 PG15 4401-511-000-21
255 170 x 170 ±19.3 10 17 13/30 318.1 PG11 4401-481-000-21

Subject to technical changes

High quality
Fused-silica lenses

Qioptiq has developed a range of sophisticated F-Theta-Ronar scan lenses made of specially selected fused-silica for
high-power and short-pulse laser material processing. Fused-silica lenses provide minimized thermal focus shift and
higher resistance when working at high power density. A specially developed coating achieves very low reflection and
absorption values.
 LINOS F-Theta-Ronar Lenses

LINOS F-Theta-Ronar Lenses

515-540/​532 nm
• Fused-silica and optical-glass designs • All lenses can be used with enlarged
• Telecentric versions available beam ​diameters and different mirror
• Focal lengths ranging from 100 mm to distances.
420 ​mm, tolerance ±1% Ac­cordingly the scan fields and spot size
• Screw thread M85x1 diameters will be changed. ​Please feel
free to send us your request.
• Transmission ≥ 96 % with good
performance ​in VIS-range
• Laser damage threshold coating up to
20 J/cm² at 532 ​nm, 8 ns, 100 Hz and up
to 0.6 J/cm² at 515 nm, ​204 fs, 50 kHz
• Low absorption coating for fused-silica
lenses ≤ 30 ppm at 532 nm
• Includes interchangeable protective
LINOS F-Theta-Ronar telecentric lens for 515-540 nm, glasses
focal length 100 mm 11

LINOS F-Theta-Ronar 515-540 nm, Fused-Silica

Focal ​ Scan ​ Max. scan ​ Beam ​diameter ​ Spot Mirror Working ​ Pro­tective ​ Part No.
length ​ field ​ angle ±Θx,y ​ truncated ​at 1/e² ​ dia­meter dis­tances distance ​ glass
at ​1/e2 ​​ m1/​m2
(mm) (mm²) (°) (mm) (µm) (mm) (mm)
100 telecentric 43 x 43 ±12.2 14 9 17/28 138.5 PG13 4401-547-000-26
160 83 x 83 ±15.2 14 12 17/23 215.8 PG13 4401-587-000-26
167 telecentric 86 x 86 ±15.4 14 12 17/33 215.5 PG21 4401-517-000-26
255 183 x 183 ±20.9 10 25 13/25 318.1 PG13 4401-496-000-26
420 251 x 251 ±17.1 14 29 17/24 498.6 PG13 4401-590-000-26

Subject to technical changes

LINOS F-Theta-Ronar 532 nm, Optical-Glass

Focal ​length ​ Scan ​ Max. scan ​ Beam ​diameter ​ Spot Mirror Working ​ Pro­tective ​ Part No.
field ​ angle ±Θx,y​ truncated ​at 1/e²​ dia­meter dis­tances distance​ glass
(mm) at ​1/e2 ​​ m1/​m2
(mm²) (°) (mm) (µm) (mm) (mm)
100 58 x 58 ±17.7 6 15 16/12 90.8 PG8 4401-304-000-21
100 telecentric * 53 x 53 ±15.7 14 7 17/36 126.6 PG7 4401-461-000-21
160 98 x 98 ±17.7 10 16 16/12 176.1 PG8 4401-305-000-21
250 154 x 154 ±17.7 20 12 22/24 288.5 PG7 4401-289-000-20
330 204 x 204 ±17.7 14 23 18/24 389.0 PG7 4401-485-000-21
420 275 x 275 ±18.7 15 27 17/28 494.6 PG7 4401-489-000-21

* Entrance lens made of fused-silica Subject to technical changes

 LINOS F-Theta-Ronar Lenses

LINOS F-Theta-Ronar Lenses

940-980 ​nm
• Focal lengths ranging from 100 mm • All lenses can be used with enlarged
to 420 ​mm, tolerance ±1% beam ​diameters and different mirror
• Screw thread M85x1, distances.
except 4401-527-000-​21: M76x1 Ac­cordingly the scan fields and spot size
diameters will be changed. ​Please feel
free to send us your request.
• Transmission ≥ 97 %
• Transmission ≥ 75 % at VIS-range
• Includes interchangeable protective
glasses

12 LINOS F-Theta-Ronar lens for 940-980 nm,

focal length 330 mm

LINOS F-Theta-Ronar 940-980 nm, Optical-Glass

Focal ​ Scan ​ Max. scan ​ Beam ​diameter ​ Spot Mirror Working ​ Pro­tective ​ Part No.
length ​ field ​ angle ±Θx,y ​ truncated ​at 1/e² ​ dia­meter dis­tances distance ​ glass
at ​1/e2 ​​ m1/​m2
(mm) (mm²) (°) (mm) (µm) (mm) (mm)
100 43 x 43 ±12.3 14 14 17/18 96.9 PG19 4401-528-000-21
163 96 x 96 ±16.9 14 20 17/30 183.7 PG18 4401-527-000-21
254 139 x 139 ±15.7 20 24 26/28 294.2 PG17 4401-526-000-21
330 204 x 204 ±17.7 20 32 26/28 386.0 PG17 4401-524-000-21
420 259 x 259 ±17.7 20 40 26/28 491.7 PG17 4401-525-000-21

Subject to technical changes

 LINOS F-Theta-Ronar Lenses

LINOS F-Theta-Ronar Lenses

1064/​1030-1080 nm
• Fused-silica and optical-glass designs • All lenses can be used with enlarged
• Telecentric versions available beam ​diameters and different mirror
• Focal lengths ranging from 70 mm to distances.
420 ​mm, tolerance ±1 % Ac­cordingly the scan fields and spot size
• Screw thread M85x1, diameters will be changed. ​Please feel
except 4401-261-000-​21: M76x1 free to send us your request.

• Transmission ≥ 96 % with good

performance ​in VIS-range
• Laser damage threshold coating up to
40 J/cm² at ​1064 nm, 12 ns, 100 Hz and
up to 0.9 J/cm² at 1030 ​nm, 291 fs, 5 kHz
• Low absorption coating for fused-silica
lenses ≤ 20 ppm at 1064 nm
• Includes interchangeable protective
LINOS F-Theta-Ronar lens for 1030-1080 nm, glasses 13
focal length 420 mm

LINOS F-Theta-Ronar 1030-1080 nm, Fused-Silica

Focal ​ Scan ​ Max. scan ​ Beam ​diameter ​ Spot Mirror Working ​ Pro­tective ​ Part No.
length ​ field ​ angle ±Θx,y ​ truncated ​at 1/e² ​ dia­meter dis­tances distance ​ glass
at ​1/e2 ​​ m1/​m2
(mm) (mm²) (°) (mm) (µm) (mm) (mm)
70 telecentric 26 x 26 ±10.9 14 10 17/17 87.5 PG22 4401-551-000-26
100 telecentric 43 x 43 ±12.2 14 15 17/28 137.0 PG14 4401-561-000-26
163 85 x 85 ±15.2 14 23 17/23 219.3 PG14 4401-589-000-26
167 telecentric 84 x 84 ±14.9 20 22 26/28 215.4 PG16 4401-513-000-26
255 187 x 187 ±21.3 10 50 13/25 317.4 PG14 4401-499-000-26
340 176 x 176 ±15.1 20 35 26/26 441.6 PG16 4401-546-000-26
420 254 x 254 ±17.3 20 42 26/24 510.9 PG14 4401-508-000-26
Subject to technical changes

LINOS F-Theta-Ronar 1064 nm, Optical-Glass

Focal ​ Scan ​ Max. scan ​ Beam ​diameter ​ Spot Mirror Working ​ Pro­tective ​ Part No.
length ​ field ​ angle ±Θx,y​ truncated ​at 1/e² ​ dia­meter dis­tances distance ​ glass
at ​1/e2 ​​ m1/​m2
(mm) (mm²) (°) (mm) (µm) (mm) (mm)
100 62 x 62 ±17.7 12 16 16/12 97.7 PG2 4401-302-000-21
100 telecentric * 57 x 57 ±17.0 14 14 17/29 126.0 PG6 4401-464-000-21
160 99 x 99 ±17.7 12 26 16/12 176.2 PG2 4401-301-000-21
163 115 x 115 ±20.2 10 32 13/24 185.9 PG5 4401-261-000-21
254 157 x 157 ±17.7 20 25 26/23 296.2 PG6 4401-288-000-20
330 217 x 217 ±18.7 16 40 18/24 387.6 PG6 4401-360-000-21
420 291 x 291 ±19.8 15 55 30/16 494.2 PG6 4401-350-000-21

* Entrance lens made of fused-silica Subject to technical changes

 LINOS F-Theta-Ronar Lenses

LINOS F-Theta-Ronar Lenses

1900-2000 nm
• Fused-silica designs • All lenses can be used with enlarged
• Focal lengths ranging from 265 nm beam ​diameters and different mirror
to 437 ​mm, tolerance ±1 % distances.
• Screw thread M85x1 Ac­cordingly the scan fields and spot size
diameters will be changed. ​Please feel
free to send us your request.
• Transmission ≥ 95 % at 1940 nm
• Includes interchangeable protective
glasses

LINOS F-Theta-Ronar lens for 1900-2000 nm,

14 focal length 265 mm

LINOS F-Theta-Ronar 1900-2000 nm, Fused-Silica

Focal ​ Scan ​ Max. scan ​ Beam ​diameter ​ Spot Mirror Working ​ Pro­tective ​ Part No.
length ​ field ​ angle ±Θx,y​ truncated ​at 1/e²​ dia­meter dis­tances distance ​ glass
at 1940 nm at ​1/e2 ​​ m1/​m2
(mm) (mm²) (°) (mm) (µm) (mm) (mm)
265 155 x 155 ±16.9 14 68 17/34 328.0 PG23 4401-588-000-21
354 214 x 214 ±16.6 14 90 17/28.5 457.5 PG24 4401-569-000-21
437 292 x 292 ±19.2 14 100 17/29.5 526.2 PG23 4401-568-000-21
Subject to technical changes
 LINOS Beam Expanders

LINOS Beam Expanders

LINOS Beam Expanders are optical systems for beam

forming used in laser material processing. They can
vary the diameter and the divergence of a laser beam
and allow optimization of focus diameter, focus
position and beam propagation.

The focal positions of LINOS F-Theta-Ronar or LINOS

Focus-Ronar lenses can be changed by the divergence
of the laser input beam. A fine focusing of the
beam widening makes it possible to compensate LINOS Beam Expanders are optimally be applied in
15
for divergence tolerances of laser sources as well as conjunction with LINOS F-Theta-Ronar lenses and
focal length tolerances of other optical components. LINOS Focus-Ronar lenses for applications including:
It should be noted, however, that the imaging
performance of the lens may change. • Laser structuring of foils
• Laser scribing of ceramic substrates
Qioptiq offers standard versions of manual and • Cutting of solar cells
motorized variable LINOS Beam Expanders made of • Micro drilling of sheet metal
fused-silica and/or optical-glass. • Marking of diverse materials with encodings

Variable Beam Expander

 LINOS Beam Expanders

Entrance aperture depending on the the beam expansion, only the focusing ring should
magnification factor be adjusted.
The maximum entrance aperture has to be The Beam Expander is mounted on surface A (see page
considered. This depends on the magnification 15). Please take care that the laser beam is centered
factor and decreases with increasing magnification on the entrance lens and parallel to the optical axis of
factor. The permissible optical entrance aperture can the Beam Expander (x; y; tilt adjustment).
be found in the datasheet of your respective Beam
Expander. Maximum tilting of Beam Expanders
The LINOS Beam Expander can be operated with a
All LINOS Beam Expanders can also be implemented max. entrance angle of up to 0.2° without vignetting.
in reverse mode as Beam Reducers. This allows a certain amount of leeway to compensate
for mechanical tolerances in your system.
Manual version
Continuous magnification between 2x and 8x are The tilting of the exiting laser beam is amplified by
16
available. In addition Qioptiq offers manual variable the inverse magnification factor with respect to the
LINOS Beam Expanders with fused-silica entrance input beam. As a result, the laser beam does not
lenses for higher laser power. pass through the lenses in the center of the lens, in
particular on the exit side, so that the wavefront error
The back focal length of LINOS F-Theta-Ronar becomes greater due to the asymmetry.
or LINOS Focus-Ronar lenses can be modified by
changing the divergence of the incoming laser beam. Maximum displacement of the entrance beam
Fine focusing of the Beam Expander compensates the In case of lateral (x; y) displacement, the outer,
focal length tolerances of other optical components non-central part of the laser beam is truncated.
as well as divergence of the laser source. The wavefront is therefore no longer rotationally
symmetric along the axis. In addition, a larger
Handling proportion of the input beam is vignetted, which
Zoom and focusing rings of the manual variable results in a reduction of the transmitted energy. How
LINOS Beam Expanders are set according to product much the wavefront deforms and the laser beam is
specific graphs. The expansion factor is adjusted by vignetted depends on both the exact profile and the
turning the focusing ring and zoom ring. To focus selected magnification.
 LINOS Beam Expanders

Motorized version Software

The motorized variable LINOS Beam Expanders of The Windows™-based software developed with
second generation are highly precise and easy to LabView allows an easy control of the motorized
integrate. They are used in automatic production LINOS Beam Expander. After initialization, the
processes or in application laboratories. The controller desired expansion is achieved by moving the two
is integrated into the Beam Expander. independent stepper motors. The lens positions for
the magnification range of 1-4x or 2-8x are listed
For high-power or short-pulse laser applications for each motorized Beam Expander type in provided
full fused-silica designs are available with excellent tables. Ten individual presets can be stored.
transmission and thermal resistance performance.
The special coating with low absorption and high The LINOS Beam Expander can also be directly
transmission covers complete wavelength ranges controlled under other operating systems via the
of 340-360 nm, 515-540 nm or 1030-1080 nm. serial interface (e.g. terminal program). All serial
The customer can select between three electrical interface commands are listed in the manual.
17
interfaces (SubD9/RS232, Phoenix Contact/RS232 or
USB 2.0). Further information including 3D CAD data, product-
specific graphs of variable Beam Expanders and the
manual for motorized Beam Expanders are available
on request.

Motorized Beam Expander with Phoenix Contact interface

Windows™ software mask for easy control of motorized Beam Expanders.

 LINOS Beam Expanders

LINOS Variable Magnification

Beam ​Expanders
• Continuous variation of magnification • Max. exit-beam diameter 31 mm
2x...8x • Max. length 165.5 mm
• Choice between fused-silica or glass • Max. diameter 42.0 mm
entrance lens • Mounting diameter 37.6-0.1 mm,
• Continuous variation of exit-beam reference on surface A (see page 15)
divergence
• Wavelengths 355 nm, 532 nm,
633/780/830/980 nm or 1064 nm
• Precise scales allow reliable settings
and high repeatability

LINOS Beam Expander with a variable expansion factor

2x to 8x for 1064 nm Laser damage threshold coating up to:
18

Laser damage threshold Pulse length

(J/cm²) (ns)
355 nm Fused-silica 5 5
532 nm Optical-glass 10 6
532 nm Entrance lens fused-silica 20 6
633/780/830/980 nm Optical-glass 6 6
1064 nm Optical-glass 20 9
1064 nm Entrance lens fused-silica 30 9

LINOS Variable Magnification Beam Expander 2x...8x

Wavelength Max. entrance-beam diameter ​truncated at 1/e² Material Part No.
(nm) (mm)
355 3.4 Fused-silica 4401-402-000-20
532 4 Fused-silica + Optical-glass 4401-446-000-20
532 8 Optical-glass 4401-257-000-20
633/780/ 830/980 8 Optical-glass 4401-258-000-20
1064 4 Fused-silica + Optical-glass 4401-359-000-20
1064 8 Optical-glass 4401-256-000-20
Entrance beam diameter max. = 31 mm / zoom factor. Subject to technical changes
 LINOS Beam Expanders

LINOS Motorized Beam Expanders

• Continuous variable magnification • Exit beam diameter: max. 31 mm
1x...4x and 2x...8x • 10 individual presets for magnification
• Fused-silica designs and divergence
• Continuous variation of exit-beam • Pointing stability < 0.5 mrad
divergence • Adjustment from 2x to 8x about 7 sec
• Wavelengths 340-360 nm, 515-540 nm • Mechanical dimensions: length 167 mm
or 1030-1080 nm (1x...4x), 203 mm (2x...8x),
• Software running on the Windows™ width 58 mm, height 55.5 mm
platform (XP, Win7, Win8) • Mechanical interface via high-precision
• Reduce machine setup times by auto holes 6H7 (recommended) or mounting
matic change of magnification diameter 39h11
• Maintains laser-protection class during • Different electronic interfaces: SubD9/
readjustment of the Beam Expander RS232, USB 2.0, Phoenix Contact/ RS232
• All-in-one design, controller integrated • Baud rate: 9600 bit/sec
LINOS Motorized Beam Expander
• CE and ROHS conform • Power input 7–12 V, Phoenix Contact
• IP 20 7-24 V
• Laser damage threshold coating up to
4 J/cm² at 355 nm, 6 ns, 100 Hz
• Laser damage threshold coating up to 19
20 J/cm² at 532 nm, 8 ns, 100 Hz and
0.6 J/cm² at 515 nm, 204 fs, 50 kHz
• Laser damage threshold coating up to
40 J/cm² at 1064 nm, 12 ns, 100 Hz and
0.9 J/cm² at 1030 nm, 291 fs, 5 kHz
• Includes interchangeable protective
glasses

LINOS Motorized Beam Expander 1x-4x - Fused-Silica

Wavelength Max. entrance ​beam diameter truncated at 1/e² PC Interface Part No.
(nm) ​(mm)

515 – 540 8 SubD9/ RS232 4401-597-000-20

515 – 540 8 Phoenix Contact/ RS232 4401-597-000-21

515 – 540 8 USB 2.0 4401-597-000-22

1030 – 1080 8 SubD9/ RS232 4401-598-000-20

1030 – 1080 8 Phoenix Contact/ RS232 4401-598-000-21

1030 – 1080 8 USB 2.0 4401-598-000-22

Entrance beam diameter max. = 31 mm / zoom factor. Subject to technical changes

LINOS Motorized Beam Expander 2x-8x - Fused-Silica

Wavelength Max. entrance ​beam diameter truncated at 1/e² PC Interface Part No.
(nm) ​(mm)
340 - 360 6 SubD9/ RS232 4401-516-000-20

340 - 360 6 Phoenix Contact/ RS232 4401-516-000-21

340 - 360 6 USB 2.0 4401-516-000-22

515 – 540 8 SubD9/ RS232 4401-515-000-20

515 – 540 8 Phoenix Contact/ RS232 4401-515-000-21

515 – 540 8 USB 2.0 4401-515-000-22

1030 – 1080 8 SubD9/ RS232 4401-514-000-20

1030 – 1080 8 Phoenix Contact/ RS232 4401-514-000-21

1030 – 1080 8 USB 2.0 4401-514-000-22

Entrance beam diameter max. = 31 mm / zoom factor. Subject to technical changes

 Protective Glasses

Protective Glasses

• Optimum protection for diverse

optical systems
• Coated on both sides
• High transmission for the corresponding
wavelength or wavelength range
• High laser damage threshold
• Short delivery time

20
Protective Glasses, Fused-Silica

Protective glass Protective glass diamet­er Protective glass thick­ness AR coated for λ Part No.
(mm) (mm) (nm)
PG 4 75 1.5 340-380+633 4401-399-005-00
PG11 113 3 340-380+633 4401-481-005-00
PG13 113 3 515-540, low absorption 4401-496-005-01
PG14 113 3 1030-1080, low absorption 4401-499-005-00
PG15 113 3 340-380+633 4401-511-823-00
PG16 132 3 1030-1080, low absorption 4401-513-006-00
PG21 132 3 515-540, low absorption 4401-517-006-00
PG22 75 1.5 1030-1080, low absorption 4401-551-016-00
PG23 113 3 1900-2000 4401-568-004-00
PG24 132 3 1900-2000 4401-569-005-00
PG25 17.5 1.6 1030-1080, low absorption 4401-514-006-00
PG26 17.5 1.6 515-540, low absorption 4401-515-006-00
PG27 17.5 1.6 340-380+633 4401-516-006-00

Subject to technical changes

Protective Glasses, Optical-Glass

Protective glass Protective glass diamet­er Protective glass thick­ness AR coated for λ (nm) Part No.
(mm) (mm)
PG 2 75 1.6 1064+VIS 4401-301-001-00
PG 5 100 3 1064+VIS 4401-261-004-00
PG 6 113 3 1064+VIS 4401-288-005-01
PG 7 113 3 532 4401-289-007-00
PG 8 75 1.6 532 4401-304-005-00
PG17 113 3 940-980 4401-524-004-00
PG18 100 3 940-980 4401-527-004-00
PG19 75 1.6 940-980 4401-528-005-00

Subject to technical changes

 LINOS Focus-Ronar Lenses

LINOS Focus-Ronar Lenses

for ​355 nm
Focussing lenses are optimized for high
precision ​applications, as used in laser
systems for weld­ing, cutting, drilling and
structuring.

• Focal lengths ranging from 58 mm • Diffraction limited up to 17.5 mm

to 120 mm (1/e²) ​entrance-beam diameter
• Flexible lens exchange without any • High clear aperture up to 35 mm
adjust­ment • Housing diameter 41mm
• Three-lens-element designs • Transmission ≥ 98%
• Full fused-silica designs • Damage threshold 5 J/cm² with pulse
duration ​of 5 ns, 100 Hz

21
41h7

35

WD

LINOS Focus-Ronar 355 nm, Fused-Silica

Focal length Length L Working distance WD Part No.

(mm) (mm) (mm)
58 26.7 48.9 4401-519-000-20
77 25.1 68.8 4401-521-000-20
90 25.1 81.7 4401-522-000-20
120 24.7 112.1 4401-523-000-20

Subject to technical changes

 LINOS Focus-Ronar Lenses

LINOS Focus-Ronar Lenses

1064 nm + ​532 nm
Focussing lenses are optimized for high
precision ​applications, as used in laser
systems for weld­ing, cutting, drilling and
structuring.

• Focal lengths ranging from 58 mm • High clear aperture up to 35 mm

to 122 mm • Housing diameter 41h7 mm
• Flexible lens exchange without any • The coating is optimized for 1064 nm,
adjust­ment T ≥ ​97% and T(532 nm) ≥ 96%
• Three-lens-element designs • Good inspection performance at
VIS ​wavelengths
• Laser damage threshold coating 10 J/cm²
at 1064 nm, ​9 ns, 100 Hz
• Laser damage threshold 6 J/cm² at
532 nm, 6 ​ns, 100 Hz
22
41h7

35

WD

LINOS Focus-Ronar 1064 + 532 nm, Optical-Glass

Focal length at 1064 nm Length L Working distance for ​1064 nm Working distance for ​532 nm Part No.
(mm) (mm) (mm) (mm)
58 24.6 48.3 47.7 4401-505-000-20
77 18.9 72.2 71.5 4401-486-000-20
90 33.6 73.7 73.3 4401-490-000-20
122 24.0 111.5 111.6 4401-420-000-21

Subject to technical changes

Notes

23
 Discover the Q!
24

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industrial manufacturing. Our expanding global
footprint, growing range of optical technologies and
state-of-the-art manufacturing capabilities ensure
exacting solutions with timely delivery and regional
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