18503-Pt0208ben P

OPERATING INSTRUCTIONS EN
Translation of the Original
HIPACE 80
Turbopump
Dear Customer,
Thank you for choosing a Pfeiffer Vacuum product. Your new turbopump is designed to
support you by its performance, its perfect operation and without interfering your individual
application. The name Pfeiffer Vacuum stands for high-quality vacuum technology, a
comprehensive and complete range of top-quality products and first-class service. With this
expertise, we have acquired a multitude of skills contributing to an efficient and secure
implementation of our product.
Knowing that our product must not interfere with your actual work, we are convinced that our
product offers you the solution that supports you in the effective and trouble-free execution of
your individual application.
Please read these operating instructions before putting your product into operation for the
first time. If you have any questions or suggestions, please feel free to contact info@pfeiffer-
vacuum.de.
Further operating instructions from Pfeiffer Vacuum can be found in the Download Center on
our website.
Disclaimer of liability
These operating instructions describe all models and variants of your product. Note that your
product may not be equipped with all features described in this document. Pfeiffer Vacuum
constantly adapts its products to the latest state of the art without prior notice. Please take
into account that online operating instructions can deviate from the printed operating
instructions supplied with your product.
Furthermore, Pfeiffer Vacuum assumes no responsibility or liability for damage resulting from
the use of the product that contradicts its proper use or is explicitly defined as foreseeable
misuse.
Copyright
This document is the intellectual property of Pfeiffer Vacuum and all contents of this
document are protected by copyright. They may not be copied, altered, reproduced or
published without the prior written permission of Pfeiffer Vacuum.
We reserve the right to make changes to the technical data and information in this document.
2/58
Table of contents
Table of contents
1 About this manual 7
1.1 Validity 7
1.1.1 Applicable documents 7
1.1.2 Variants 7
1.2 Target group 7
1.3 Conventions 7
1.3.1 Instructions in the text 7
1.3.2 Pictographs 8
1.3.3 Stickers on the product 8
1.3.4 Abbreviations 9
1.4 Trademark proof 9
2 Safety 10
2.1 General safety information 10
2.2 Safety instructions 10
2.3 Safety precautions 14
2.4 Limits of use of the product 14
2.5 Proper use 15
2.6 Foreseeable improper use 15
2.7 Personnel qualification 16
2.7.1 Ensuring personnel qualification 16
2.7.2 Personnel qualification for maintenance and repair 16
2.7.3 Advanced training with Pfeiffer Vacuum 16
3 Product description 17
3.1 Function 17
3.1.1 Cooling 17
3.1.2 Rotor bearing 17
3.1.3 Drive 18
3.2 Identifying the product 18
3.2.1 Product types 18
3.2.2 Product features 18
3.3 Scope of delivery 18
4 Transportation and Storage 19

4.1 Transport 19
4.2 Storage 19
5 Installation 20
5.1 Preparatory work 20
5.2 Fastening turbopump to bottom part 20
5.3 Connecting the high vacuum side 21
5.3.1 Requirements for the dimensioning of a counter flange 21
5.3.2 Considering earthquake protection 22
5.3.3 Using a splinter shield or protective screen 23
5.3.4 Using the vibration compensator 23
5.3.5 Mounting orientations 23
5.3.6 Installation of ISO-KF flange 24
5.3.7 Attaching ISO-K flange onto ISO-K 24
5.3.8 Installation of ISO-K flange onto ISO-F 25
5.3.9 Attaching CF flange to CF-F 26
5.4 Connecting the fore-vacuum side 28
5.5 Connecting accessories 28
5.6 Connecting the electrical supply 29
5.6.1 Earthing the turbopump 29
5.6.2 Establishing electric connection 30
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Table of contents
6 Operation 32
6.1 Commissioning 32
6.2 Operating modes 33
6.2.1 Operation without operating unit 33
6.2.2 Operation via multi-function connection "X3" 33
6.2.3 Operation via Pfeiffer Vacuum control unit 33
6.2.4 Operation via field bus 33
6.3 Switching on the turbopump 34
6.4 Operation monitoring 34
6.4.1 Operating mode display via LED 34
6.4.2 Temperature monitoring 35
6.5 Switching off and venting 35
6.5.1 Switching off 35
6.5.2 Venting 35
7 Maintenance 37
7.1 General maintenance information 37
7.2 Maintenance intervals and responsibilities 37
7.3 Replace operating fluid reservoir 38
7.3.1 Removing the operating fluid reservoir 38
7.3.2 Installing the operating fluid reservoir 39
7.4 Replacing the electronic drive unit 40
7.5 Confirming speed specification 41
8 Decommissioning 43
8.1 Shutting down for longer periods 43
8.2 Recommissioning 43
9 Recycling and disposal 44

9.1 General disposal information 44
9.2 Dispose of turbopumps 44
10 Malfunctions 45
11 Service solutions by Pfeiffer Vacuum 47
12 Spare parts HiPace 80 49
13 Accessories 50
13.1 Accessory information 50
13.2 Ordering accessories 50
14 Technical data and dimensions 52

14.1 General 52
14.2 Technical data 52
14.3 Substances in contact with the media 54
14.4 Dimensions 54
EC Declaration of Conformity 56
UK Declaration of Conformity 57
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List of tables
List of tables
Tbl. 1: Abbreviations used in this document 9
Tbl. 2: Permissible ambient conditions 15
Tbl. 3: Product designation of Pfeiffer Vacuum HiPace turbopumps 18
Tbl. 4: Turbopump features 18
Tbl. 5: Requirements for fastening the turbopumps to the bottom part 21
Tbl. 6: Requirements for the dimensioning of customer-specific high vacuum con- 22
nection
Tbl. 7: Effect of splinter shield or protective screen on pumping speed 23
Tbl. 8: Factory setting of the electronic drive unit for turbopumps when delivered 32
Tbl. 9: Behavior and meaning of the LEDs on the electronic drive unit 35
Tbl. 10: Factory settings for delayed venting in turbopumps 36
Tbl. 11: Characteristic nominal rotation speeds of the turbopumps 42
Tbl. 12: Troubleshooting turbopumps 46
Tbl. 13: Overview of the spare parts available for the HiPace 80 49
Tbl. 14: Accessories 51
Tbl. 15: Conversion table: Pressure units 52
Tbl. 16: Conversion table: Units for gas throughput 52
Tbl. 17: Technical data for HiPace 80 | 24 V 54
Tbl. 18: Materials that make contact with the process media 54
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List of figures
List of figures
Fig. 2: Position of the stickers on the product 9
Fig. 3: HiPace 80 design 17
Fig. 4: Example: Safety connections 22
Fig. 5: Recommended alignment when using oil-sealed backing pumps 23
Fig. 6: Flange connection ISO-KF to ISO-KF 24
Fig. 7: Flange connection ISO-K to ISO-F, bracket screws 24
Fig. 8: Flange connection CF-F, hexagon head screw and through hole 26
Fig. 9: Flange connection CF-F, stud screw and tapped hole 27
Fig. 10: Flange connection CF-F, stud screw and through hole 27
Fig. 11: Example of fore-vacuum connection on HiPace 80 28
Fig. 12: Example of accessory connection via adapter TCS 12 29
Fig. 13: Example: Connecting the grounding cable 30
Fig. 14: Connecting electronic drive unit to power supply pack 30
Fig. 15: Removing the operating fluid reservoir 39
Fig. 16: Installing the operating fluid reservoir 40
Fig. 17: Electronic drive unit installation and removal 41
Fig. 18: Spare parts HiPace 80 49
Fig. 19: Dimensions HiPace 80 | DN 63 ISO-K 54
Fig. 20: Dimensions HiPace 80 | DN 63 CF-F 55
Fig. 21: Dimensions HiPace 80 | DN 40 ISO-KF 55
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About this manual
1 About this manual

IMPORTANT
Read carefully before use.
Keep the manual for future consultation.
1.1 Validity
These operating instructions are a customer document of Pfeiffer Vacuum. The operating instructions
describe the functions of the named product and provide the most important information for the safe use
of the device. The description is written in accordance with the valid directives. The information in these
operating instructions refers to the product's current development status. The document shall remain
valid provided that the customer does not make any changes to the product.
1.1.1 Applicable documents
Document Number
Operating instructions, “electronic drive unit" TC 110 standard PT 0204 BN
Operating instructions for "electronic drive unit" TC 110 PB PT 0245 BN
Operating instructions, electronic drive unit TC 110 E74 PT 0301 BN
Operating instructions for "electronic drive unit" TC 110 RS PT 0351 BN
Declaration of conformity Part of this document
You can find these documents in the Pfeiffer Vacuum Download Center.
1.1.2 Variants
● HiPace 80, DN 63 ISO-K, TC 110
● HiPace 80, DN 63 CF-F, TC 110
● HiPace 80, DN 40 ISO-KF, TC 110
1.2 Target group

These operating instructions are aimed at all persons performing the following activities on the product:
● Transportation
● Setup (Installation)
● Usage and operation
● Decommissioning
● Maintenance and cleaning
● Storage or disposal
The work described in this document is only permitted to be performed by persons with the appropriate
technical qualifications (expert personnel) or who have received the relevant training from Pfeiffer Vac-
uum.
1.3 Conventions
1.3.1 Instructions in the text
Usage instructions in the document follow a general structure that is complete in itself. The required ac-
tion is indicated by an individual step or multi-part action steps.
Individual action step
A horizontal, solid triangle indicates the only step in an action.
► This is an individual action step.
7/58
About this manual
Sequence of multi-part action steps

The numerical list indicates an action with multiple necessary steps.
1. Step 1
2. Step 2
3. ...
1.3.2 Pictographs
Pictographs used in the document indicate useful information.
Note
Tip
Qr code is linked to further online information.

We recommend viewing on a tablet computer.
Pay attention to the amount of data that is generated.
1.3.3 Stickers on the product

This section describes all the stickers on the product along with their meanings.
Rating plate
D-35614 Asslar Berliner Str. 43 The rating plate of the turbopump is located on the lower part
Mod. HiPace 80 of the vacuum pump.
P/N PM P0X XXX
S/N -------- Type 12
IP44
Rating plate of the electronic drive unit
Oil PM XXX XXX -T
The electronic drive unit rating plate is located on the top
TÜV Rheinland
n, f 90000 1/min, 1500 Hz C

UL / CSA 61010-1
US
Mass _ _._ kg Made in Germany 2023/02
Operating instructions note

This sticker indicates that this operating instructions must be
read before performing any tasks.
Protection class
This sticker describes protection class 1 for the product. Its
placement indicates the position for the ground connection.
warranty seal Warranty seal
The product is sealed ex-factory. Damaging or removing a war-
ranty seal results in loss of the warranty.
8/58
About this manual
1 2
5 4
Fig. 2: Position of the stickers on the product
1 Operating instructions note 5 Information regarding ground connection

2 Electronic drive unit type plate 4 Rating plate of the turbopump
3 Warranty seal
1.3.4 Abbreviations
Abbreviation Meaning in this document

CF Flange: Metal-sealed connector in accordance with ISO 3669
d Diameter value (in mm)
DC Direct current
DN Nominal diameter as size description
f Rotation speed value of a vacuum pump (frequency, in rpm or Hz)
HPU Handheld Programming Unit. Aid for control and monitoring of pump parameters
HV High vacuum flange, high vacuum side
ISO Flange: Connection in accordance with ISO 1609 and ISO 2861
LED Light emitting diode
FE Functional earth
FKM Fluoropolymer rubber
[P:xxx] Electronic drive unit control parameters. Printed in bold as a three-digit number in
square brackets. Frequently displayed in conjunction with a short description.
Example: [P:312] software version
WAF Width Across Flats
T Temperature (in °C)
TC Turbopump electronic drive unit (turbo controller)
TPS Voltage supply (turbo power supply)
VV Fore-vacuum flange, fore-vacuum connection
X3 15-pole D-Sub connecting socket on the turbopump electronic drive unit
Tbl. 1: Abbreviations used in this document
1.4 Trademark proof

● Torx® is a trademark of Acument Intellectual Properties, LLC.
● Profibus® is a trademark of Profibus Nutzerorganisation e.V.
9/58
Safety
2 Safety
2.1 General safety information
The following 4 risk levels and 1 information level are taken into account in this document.
DANGER
Immediately pending danger
Indicates an immediately pending danger that will result in death or serious injury if not observed.
► Instructions to avoid the danger situation
WARNING
Potential pending danger
Indicates a pending danger that could result in death or serious injury if not observed.
CAUTION
Potential pending danger
Indicates a pending danger that could result in minor injuries if not observed.
NOTICE
Danger of damage to property
Is used to highlight actions that are not associated with personal injury.
► Instructions to avoid damage to property
Notes, tips or examples indicate important information about the product or about this docu-
ment.
2.2 Safety instructions

All safety instructions in this document are based on the results of the risk assessment carried out in
accordance with Machinery Directive 2006/42/EC Annex I and EN ISO 12100 Section 5. Where applica-
ble, all life cycle phases of the product were taken into account.
Risks during transport
WARNING
Danger of serious injury due to falling objects
Due to falling objects there is a risk of injuries to limbs through to broken bones.
► Take particular care and pay special attention when transporting products manually.
► Do not stack the products.
► Wear protective equipment, e.g. safety shoes.
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Safety
Risks during installation
DANGER
Danger to life from electric shock
Power supply packs that are not specified or are not approved will lead to severe injury to death.
► Make sure that the power supply pack meets the requirements for double isolation between
mains input voltage and output voltage, in accordance with IEC 61010-1 IEC 60950-1 and
IEC 62368-1.
► Make sure that the power supply pack meets the requirements in accordance with IEC 61010-1
IEC 60950-1 and IEC 62368-1.
► Where possible, use original power supply packs or only power supply packs that correspond
with the applicable safety regulations.
WARNING
Risk of cuts on moving, sharp-edged parts when reaching into the open high vacuum flange
With the high vacuum flange open, access to sharp-edged parts is possible. A manual rotation of the
rotor increases the danger situation. There is the risk of cuts, up to the separation of body parts (e.g.
fingertips). There is a risk of hair and loose clothing being drawn in. Objects falling in destroy the tur-
bopump during subsequent operation.
► Only remove the original protective covers immediately prior to connecting the high vacuum
flange.
► Do not reach into the high vacuum connection.
► Wear protective gloves during installation.
► Do not start the turbopump with open vacuum connections.
► Always carry out the mechanical installation before electrical connection.
► Prevent access to the high vacuum connection of the turbopump from the operator side (e.g.
open vacuum chamber).
WARNING
Risk of injury caused by the turbopump breaking away with the vibration compensator in the
event of a malfunction
Sudden jamming of the rotor generates high destructive torques in accordance with ISO 27892.
When using a vibration compensator, this will probably lead to the turbopump being sheared off in
use. The energy that this would release could throw the entire turbopump or shattered pieces from its
interior through the surrounding space. Potentially dangerous gases can escape. There is a risk of
very serious injuries, including death, and extensive property damage.
► Take suitable safety precautions on-site for the compensation of the occurring torques.
► Before installing a vibration compensator, you must first of all contact Pfeiffer Vacuum.
WARNING
Danger to life from poisoning where toxic process media leak from damaged connections
Sudden twisting of the turbopump in the event of a fault causes fittings to accelerate. There is the risk
of damaging on-site connections (e.g., fore-vacuum line) and resulting leaks. This results in leakage
of process media. In processes involving toxic media, there is a risk of injury and danger to life due to
poisoning.
► Keep masses connected to the turbopump as low as possible.
► Use flexible lines to connect to the turbopump where necessary.
WARNING
Risk of danger to life through missing mains disconnection device
The vacuum pump and electronic drive unit are not equipped with a mains disconnection device
(mains switch).
► Install a mains disconnection device according to SEMI-S2.
► Install a circuit breaker with an interruption rating of at least 10,000 A.
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Safety
WARNING
Risk of injury due to incorrect installation
Dangerous situations may arise from unsafe or incorrect installation.
► Do not carry out your own conversions or modifications on the unit.
► Ensure the integration into an Emergency Off safety circuit.
WARNING
Danger of cut injuries from unexpected start up.
The use of mating plugs of the electronic drive unit (accessories) enables the automatic run-up of the
vacuum pump as soon the power is turned on. Attaching mating plugs before or during the installa-
tion leads to the movement of parts hence the risk of cut injuries by sharp-edged in the exposed high
vacuum flange.
► Only connect mating plugs after the mechanical installation.
► Only switch on the vacuum pump immediately prior to operation.
Risks during operation
WARNING
Risk of burns on hot surfaces when using additional equipment for heating during operation
The use of additional equipment for heating the vacuum pump or for optimizing the process gener-
ates very high temperatures on surfaces that can be touched. There is a risk of burning.
► If necessary, set up a contact guard.
► If necessary, apply the warning stickers provided for this at the danger points.
► Ensure adequate cooling down before working on the vacuum pump or in its vicinity.
► Wear protective equipment, e.g., gloves.
WARNING
Risk of serious injury in the event of vacuum pump destruction due to over pressure
Gas entry with very high over pressure results in destruction of the vacuum pump. There is a risk of
serious injury due to ejected objects.
► Never exceed the permissible 1500 hPa (absolute) inlet pressure on the suction side or the vent-
ing and sealing gas connection.
► Make sure that high, process-related over pressures cannot directly enter the vacuum pump.
CAUTION
Risk of injuries due to contact with vacuum when venting
While venting the vacuum pump there is a risk of minor injuries due to the direct contact of body parts
with the vacuum, e.g. hematomas.
► Do not fully unscrew the venting screw out of the housing during venting.
► Keep a distance from automatic venting device, such as venting valves.
Risks during maintenance and decommissioning
WARNING
Danger to life from electric shock during maintenance and service work
The device is only completely de-energized when the mains plug has been disconnected and the tur-
bopump is at a standstill. There is a danger to life from electric shock when making contact with live
components.
► Before performing all work, switch off the main switch.
► Wait until the turbopump comes to a standstill (rotation speed f = 0).
► Remove the mains plug from the device.
► Secure the device against unintentional restarting.
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Safety
WARNING
Risk of cuts on moving, sharp-edged parts when reaching into the open high vacuum connec-
tion
Incorrect handling of the turbopump before maintenance work results in hazardous situations with
risk of injury. There is a risk of cuts from accessing sharp-edged, rotating parts when removing the
turbopump.
► Switch the turbopump off properly.
► Secure the turbopump against re-start.
► Seal open connections immediately following removal, using the original protective cover.
WARNING
Health hazard through poisoning from toxic contaminated components or devices
Toxic process media result in contamination of devices or parts of them. During maintenance work,
there is a risk to health from contact with these poisonous substances. Illegal disposal of toxic sub-
stances causes environmental damage.
► Take suitable safety precautions and prevent health hazards or environmental pollution by toxic
process media.
► Decontaminate affected parts before carrying out maintenance work.
► Wear protective equipment.
WARNING
Risk of poisoning from contact with harmful substances
The operating fluid reservoir and parts of the turbopump may contain toxic substances from pumped
media.
► Prevent health hazards or environmental impacts with adequate safety precautions.
► Observe the operating fluid safety data sheet.
► Dispose of the operating fluid reservoir according to applicable regulations.
Risks in the event of malfunctions
WARNING
Danger to life from the turbopump breaking away in the event of a fault
Sudden jamming of the rotor generates high destructive torques in accordance with ISO 27892. If the
turbopump is not properly secured, it can shear off. The energy that this would release could throw
the entire turbopump or shattered pieces from its interior through the surrounding space. Potentially
dangerous gases can escape. There is a risk of very serious injuries, including death, and extensive
property damage.
► Follow the installation instructions for this turbopump.
► Observe the requirements regarding stability and design of the counter flange.
► Use only original accessories or fixing material approved by Pfeiffer Vacuum for the installation.
WARNING
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Safety
WARNING
poisoning.
2.3 Safety precautions

Duty to provide information on potential dangers
The product holder or user is obliged to make all operating personnel aware of dangers
posed by this product.
Every person who is involved in the installation, operation or maintenance of the product
must read, understand and adhere to the safety-related parts of this document.
Infringement of conformity due to modifications to the product

The Declaration of Conformity from the manufacturer is no longer valid if the operator
changes the original product or installs additional equipment.
● Following the installation into a system, the operator is required to check and re-evalu-
ate the conformity of the overall system in the context of the relevant European Direc-
tives, before commissioning that system.
General safety precautions when handling the product

► Observe all applicable safety and accident prevention regulations.
► Check that all safety measures are observed at regular intervals.
► Do not expose body parts to the vacuum.
► Always ensure a secure connection to the earthed conductor (PE).
► Never disconnect plug connections during operation.
► Observe the above shutdown procedures.
► Before working on the high vacuum connection, wait until the rotor has stopped completely (rota-
tion speed f = 0).
► Never put the device into operation with the high vacuum connection open.
► Keep lines and cables away from hot surfaces (> 70°C).
► Never fill or operate the unit with cleaning agents or cleaning agent residues.
► Observe the unit protection class prior to installation or operation in other environments.
2.4 Limits of use of the product

Installation location weatherproof (internal space)
Air pressure 530 hPa to 1060 hPa
Installation altitude max. 5000 m
Rel. air humidity max. 80%, at T <31°C,
up to max. 50% at T <40°C
Protection class III
Overvoltage category II
Permissible protection degree IP44,
Type 12 according to UL 50E
Degree of pollution 2
Ambient temperature 5 °C to 30 °C with convection cooling
without gas throughput
5°C to 35°C with air cooling
5°C to 40°C with water cooling
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Safety
Permissible surrounding magnetic field for air cooling 3.3 mT

Permissible surrounding magnetic field for water cooling 3.8 mT
Maximum irradiated thermal output for air cooling 0.9 W
Maximum irradiated thermal output for water cooling 1.2 W
Maximum permissible rotor temperature of the turbopump 90 ℃
Maximum permissible bakeout temperature at the high 120 ℃
vacuum flange
Tbl. 2: Permissible ambient conditions
Notes on ambient conditions

The specified permissible ambient temperatures apply to operation of the turbopump at
maximum permissible backing pressure or at maximum gas throughput, depending on the
cooling type. The turbopump is intrinsically safe thanks to redundant temperature monitor-
ing.
● The reduction in backing pressure or gas throughput permits operation of the turbo-
pump at higher ambient temperatures.
● If the maximum permissible operating temperature of the turbopump is exceeded, the
electronic drive unit first reduces the drive output and then switches it off where neces-
sary.
2.5 Proper use

► Use the turbopump only for generating vacuum.
► Use the turbopump only in combination with a suitable backing pump that can deliver up to the
required maximum fore-vacuum pressure.
► Use the turbopump only in closed indoor areas.
► Use the turbopump only for the evacuation of dry and inert gases.
2.6 Foreseeable improper use

Improper use of the product invalidates all warranty and liability claims. Any use that is counter to the
purpose of the product, whether intentional or unintentional, is regarded as improper use; in particular:
● Establishing the voltage supply without correct installation
● Installing with non-specified fastening material
● Pumping explosive media
● Pumping of corrosive media
● Pumping of condensing vapors
● Pumping of fluids
● Pumping of dust
● Operating with impermissible high gas throughput
● Operating with impermissible high fore-vacuum pressure
● Operation with excessive irradiated heat output
● Operating in impermissible high magnetic fields
● Operating in an incorrect gas mode
● Venting with impermissible high venting rates
● Using for pressure generation
● Using in areas with ionizing radiation
● Operating in potentially explosive areas
● Using in systems in which sporadic loads and vibrations or periodic forces act on the device
● Causing of hazardous operating conditions by a presetting on the electronic drive unit that is con-
trary to the process
● Using of accessories or spare parts that are not listed in these instructions
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Safety
2.7 Personnel qualification

The work described in this document may only be carried out by persons who have appropriate profes-
sional qualifications and the necessary experience or who have completed the necessary training as
provided by Pfeiffer Vacuum.
Training people
1. Train the technical personnel on the product.
2. Only let personnel to be trained work with and on the product when under the supervision of
trained personnel.
3. Only allow trained technical personnel to work with the product.
4. Before starting work, make sure that the commissioned personnel have read and understood
these operating instructions and all applicable documents, in particular the safety, maintenance
and repair information.
2.7.1 Ensuring personnel qualification

Specialist for mechanical work
Only a trained specialist may carry out mechanical work. Within the meaning of this document, special-
ists are people responsible for construction, mechanical installation, troubleshooting and maintenance
of the product, and who have the following qualifications:
● Qualification in the mechanical field in accordance with nationally applicable regulations
● Knowledge of this documentation
Specialist for electrotechnical work

Only a trained electrician may carry out electrical engineering work. Within the meaning of this docu-
ment, electricians are people responsible for electrical installation, commissioning, troubleshooting, and
maintenance of the product, and who have the following qualifications:
● Qualification in the electrical engineering field in accordance with nationally applicable regulations
● Knowledge of this documentation
In addition, these individuals must be familiar with applicable safety regulations and laws, as well as the
other standards, guidelines, and laws referred to in this documentation. The above individuals must
have an explicitly granted operational authorization to commission, program, configure, mark, and earth
devices, systems, and circuits in accordance with safety technology standards.
Trained individuals
Only adequately trained individuals may carry out all works in other transport, storage, operation and
disposal fields. Such training must ensure that individuals are capable of carrying out the required activi-
ties and work steps safely and properly.
2.7.2 Personnel qualification for maintenance and repair
Advanced training courses

Pfeiffer Vacuum offers advanced training courses to maintenance levels 2 and 3.
Adequately trained individuals are:

● Maintenance level 1
─ Customer (trained specialist)
─ Customer with technical education
─ Pfeiffer Vacuum service technician
─ Customer with Pfeiffer Vacuum service training
─ Pfeiffer Vacuum service technician
2.7.3 Advanced training with Pfeiffer Vacuum

For optimal and trouble-free use of this product, Pfeiffer Vacuum offers a comprehensive range of
courses and technical trainings.
For more information, please contact Pfeiffer Vacuum technical training.
16/58
Product description
3 Product description
3.1 Function
The turbopump forms a compact unit with the electronic drive unit. Pfeiffer Vacuum power supply packs
provide the voltage supply.
Scan this qr code or click here and see how Pfeiffer Vacuum turbopumps work.
1 2 3 4 5
16
15 14 13 12 11 10 9 8 7 6
Fig. 3: HiPace 80 design
1 Protective cover for the high vacuum connec- 9 Electronic drive unit TC 110
tion
2 Ground terminal 10 Mounting surface for water cooling
3 Sealing gas connection 11 Pump base
4 Pump housing, stainless steel 12 Rubber-metal bumper
5 Turbo rotor 13 Protective cover for the fore-vacuum con-
nection
6 High vacuum connection, here for example DN 14 Multifunction connection "X3"
63 CF-F
7 Fore-vacuum connection, DN 16 ISO-KF 15 LED operating mode display
8 Venting screw 16 Pump housing, aluminum
3.1.1 Cooling
● Convection cooling
● Air cooling (optional)
● Water cooling (optional)
The electronic drive unit automatically regulates the drive power down in the event of excessive temper-
atures.
3.1.2 Rotor bearing

Hybrid-bearing turbopump
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Product description
● High vacuum side: wear-free permanent magnetic bearing

● Fore-vacuum side: ball bearing with ceramic balls
Permanent lubrication of the rotor bearing on the fore-vacuum side is ensured by an operating fluid res-
ervoir.
3.1.3 Drive
● TC 110 electronic drive unit
3.2 Identifying the product

► To ensure clear identification of the product when communicating with Pfeiffer Vacuum, always
keep all of the information on the rating plate to hand.
► Learn about certifications through test seals on the product or at www.certipedia.com with compa-
ny ID no. 000021320.
3.2.1 Product types

The product designation of Pfeiffer Vacuum turbopumps from the HiPace series is composed of the
family name, the size (which is based on the pumping speed of the vacuum pump) and, if required, an
additional feature description.
Family Size/model Property, attribute, feature

HiPace 10 to 2800 none = Standard version
mini = Compact version
U = Overhead version
C = Corrosive gas version
P = Process
M = Active magnetic bearing
T = Temperature management
Plus = Low vibration, low magnetic field
E = High efficiency
H = High compression
I = Ion implantation
Tbl. 3: Product designation of Pfeiffer Vacuum HiPace turbopumps
3.2.2 Product features
Feature Version
HV flange DN 63 ISO-K DN 63 CF-F DN 40 ISO-KF
Flange material Aluminium Stainless steel Aluminium
Tbl. 4: Turbopump features
3.3 Scope of delivery

● Turbopump with electronic drive unit
● Protective cover for the high vacuum connection
● Protective cover for the fore-vacuum connection
● Operating instructions
18/58
Transportation and Storage
4 Transportation and Storage

4.1 Transport
WARNING
Danger of serious injury due to falling objects
Due to falling objects there is a risk of injuries to limbs through to broken bones.
► Take particular care and pay special attention when transporting products manually.
► Do not stack the products.
► Wear protective equipment, e.g. safety shoes.
Recommendation
Pfeiffer Vacuum recommends keeping the transport packaging and original protective cov-
er.
Safe transport of the product

► Transport the turbopump only within the permissible temperature limits.
► Observe weight specified on the rating plate.
► Where possible, always transport or ship the turbopump in its original packaging.
► Always carry the turbopump with both hands.
► Remove the protective cover only immediately prior to installation.
4.2 Storage
We recommend
Pfeiffer Vacuum recommends storing the products in their original transport packaging.
Storing the turbopump

1. Seal all flange openings with the original protective caps.
2. Seal all other connections (e.g. venting connection) with the corresponding original parts.
3. Store the turbopump only indoors within the permissible temperature limits.
4. In rooms with humid or aggressive atmospheres: Hermetically seal the turbopump together with a
drying agent in a plastic bag.
19/58
Installation
5 Installation
The installation of the turbopump and its fastening is of outstanding importance. The rotor of the turbo-
pump revolves at very high speed. In practice it is not possible to exclude the risk of the rotor touching
the stator (e.g. due to the penetration of foreign bodies into the high vacuum connection). The kinetic
energy released acts on the housing and on the anchoring of the turbopump within fractions of a sec-
ond.
Comprehensive tests and calculations conforming to ISO 27892 confirm the safety of the turbopump
both against crashes (destruction of the rotor blades) and against bursting (breakage of the rotor shaft).
The experimental and theoretical results are expressed in safety measures and recommendations for
the correct and safe fastening of the turbopump.
5.1 Preparatory work

WARNING
Risk of cuts on moving, sharp-edged parts when reaching into the open high vacuum flange
With the high vacuum flange open, access to sharp-edged parts is possible. A manual rotation of the
rotor increases the danger situation. There is the risk of cuts, up to the separation of body parts (e.g.
fingertips). There is a risk of hair and loose clothing being drawn in. Objects falling in destroy the tur-
bopump during subsequent operation.
► Only remove the original protective covers immediately prior to connecting the high vacuum
flange.
► Do not reach into the high vacuum connection.
► Wear protective gloves during installation.
► Do not start the turbopump with open vacuum connections.
► Always carry out the mechanical installation before electrical connection.
► Prevent access to the high vacuum connection of the turbopump from the operator side (e.g.
open vacuum chamber).
General notes for the installation of vacuum components

► Choose an installation location that permits access to the product and to supply lines at all times.
► Observe the ambient conditions given for the limits of use.
► Provide the highest possible level of cleanliness during assembly.
► Ensure that flange components during installation are grease-free, dust-free and dry.
Select the installation location
1. Observe the instructions for transport to the installation location.
2. Make sure that there are sufficient cooling options for the turbopump.
3. Install suitable shielding if the surrounding magnetic fields exceed the permissible levels.
4. Install suitable shielding so that the irradiated thermal output does not exceed the permissible val-
ues when high temperatures occur due to the process.
5. Observe the permissible temperatures for the vacuum connection.
5.2 Fastening turbopump to bottom part

NOTICE
Damage to the vacuum pump due to force acting on the high vacuum side
When fastened to the pump bottom part and simultaneously attached to the high vacuum side with a
rigid pipe connection, there is risk of reactive forces acting on the turbopump. This can produce me-
chanical loads up to and including destruction of the turbopump.
► Create a flexible connection to the high vacuum flange.
► Observe the requirements for fastening the turbopump to the bottom part.
► If the rotor blocks suddenly, make sure that all the torques generated are absorbed by the
mounting plate on the operator side.
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Installation
Required aids
● Hole circle in accordance with the dimensions of the turbopump
● Fixing screws, strength class ≥ 8.8, galvanized
● Washer, DIN EN ISO 7090 or DIN EN ISO 7092
● Mounting plate supplied by the customer
Required tools
● Allen key, WAF 4
● Wrench, alternatively, for DIN 933 hexagon head screws
● Calibrated torque wrench (tightening factor ≤ 1.6)
Fastening turbopump to bottom part
1. Remove any anti-vibration buffers from the pump bottom part.
2. Place the turbopump upright on the mounting plate.
3. Bolt the pump bottom part to the mounting plate with the required number of permissible fixing
screws and washers.
– Observe the specified engagement depth.
– Observe the permissible tightening torque.
Turbopump Mounting plate Thread Quantity Screw in Tightening tor-

Minimum thickness | size depth que
Tensile strength
HiPace 30 2 mm | > 270 MPa M5 4 ≥ 1.3 × d 6 Nm ± 10 %
HiPace 30 Neo
HiPace 30 Neo H
HiPace 60
HiPace 80
HiPace 80 Neo
HiPace 80 Neo H
SplitFlow 50
SplitFlow 80
SplitFlow 80 Neo
Tbl. 5: Requirements for fastening the turbopumps to the bottom part
5.3 Connecting the high vacuum side

5.3.1 Requirements for the dimensioning of a counter flange
NOTICE
Risk of damage due to incorrect counter flange design
Unevenness on the operator-side counter flange results in stresses in the vacuum pump housing,
even when properly attached. This can produce leakage or negative changes in running characteris-
tics.
► Adhere to the shape tolerances for the counter flange.
► Observe the maximum flatness deviations over the entire surface.
Superstructural parts and fittings on the high vacuum connection

Installing superstructural parts and fittings to the high vacuum connection is the responsibil-
ity of the operating company. The loading capacity of the high vacuum flange is specific for
the turbopump used.
● The total weight of superstructural parts must not exceed the maximum axial values
specified.
● Make sure that all the torques generated if the rotor blocks suddenly, are absorbed by
the system on the operator side and the high vacuum connection.
● Only use the approved mounting kits of Pfeiffer Vacuum for the high vacuum connec-
tion of the turbopump.
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Installation
Parameter HiPace 80
Maximum torque occurring in the event of a burst1) 620 Nm
Maximum permissible axial load on the high vacuum flange2) 200 N
(equivalent to 20 kg)
Flatness ± 0.05 mm
Minimum tensile strength of the flange material in all operating states in rela- 170 N/mm2 at 2.5 x d
tion to the engagement depth of the fixing screws 270 N/mm2 at 1.5 x d
Maximum permissible surrounding magnetic field 3.3 mT
3.8 mT (water cooling)
Maximum permissible irradiated thermal output 0.9 W
1.2 W (water cooling)
Maximum permissible rotor temperature 90 °C
Tbl. 6: Requirements for the dimensioning of customer-specific high vacuum connection
Important information for correct installation

► Only use the approved mounting kits of Pfeiffer Vacuum for the high vacuum connection of the
turbopump.
5.3.2 Considering earthquake protection
NOTICE
Vacuum pump damage caused by external vibrations
In the event of earthquakes or other external vibrations, there is the risk of the rotor coming into con-
tact with the safety bearings, or the housing wall touching the turbopump. This can produce mechani-
cal loads up to and including destruction of the turbopump.
► Make sure that all flange and safety connections absorb the resulting forces.
► Secure the vacuum chamber against displacement or tipping.
VACUUM CHAMBER 1
Fig. 4: Example: Safety connections

1 Safety connections, customer-side
1) The theoretically calculated torque in the event of a burst (rotor shaft breakage) according to ISO 27892 was
not reached in any experimental test.
2) A one-sided load is not permitted.
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Installation
5.3.3 Using a splinter shield or protective screen

Pfeiffer Vacuum centering rings with splinter shield or protective screen in the high vacuum flange pro-
tect the turbopump against foreign matter from the vacuum chamber. The pumping speed of the turbo-
pump reduces according to the passage guide values and the size of the high vacuum flange.
Flange size Reduced pumping speed in % for the gas type

H2 He N2 Ar
Splinter shield DN 40 6 9 17 18
Splinter shield DN 63 3 6 15 16
Protective screen DN 63 1 1 4 4
Tbl. 7: Effect of splinter shield or protective screen on pumping speed
Procedure
1. With ISO flanges, use centering rings with protective screen or splinter shield.
2. For CF flanges, always insert protective screen or splinter shield with the clamping lugs pointing
towards the rotor in the high vacuum flange.
5.3.4 Using the vibration compensator
WARNING
Pfeiffer Vacuum vibration compensators are suitable for use on vibration-sensitive systems.
Installing the vibration compensator
1. Install the vibration compensator only with vertical passage.
2. Consider the flow resistance.
3. Secure the turbopump additionally to the high vacuum flange.
4. Observe the fastening of the ISO flanges.
5.3.5 Mounting orientations

Pfeiffer Vacuum turbopumps from the HiPace series are suitable for use with dry compressing backing
pumps for mounting in all orientations.
► When using oil-sealed backing pumps, avoid backflow from the fore-vacuum range.
HV
VV VV ±25° max VV
Fig. 5: Recommended alignment when using oil-sealed backing pumps
23/58
Installation
Specify a horizontal mounting orientation for oil-sealed backing pumps

1. Always align the fore-vacuum connection downwards vertically.
– Permissible deviation ± 25°
2. Support the tube connections in front of the turbopump.
3. Do not allow any forces from the piping system to act on the turbopump.
4. Do not load the high vacuum flange of the turbopump on one side.
5.3.6 Installation of ISO-KF flange
ISO flange connections

For the connection of flanges in ISO-KF or ISO-K design, twisting may occur in the event of
sudden blockage of the rotor, despite correct installation.
● Leak-tightness of the flange connection, however, is not jeopardized in this regard.
Required tools
● Allen key
● Calibrated torque wrench (Tightening factor ≤ 1.6)
Fig. 6: Flange connection ISO-KF to ISO-KF
Using of clamping ring

1. Only use the approved mounting kits from Pfeiffer Vacuum for the connection.
2. Fasten the high vacuum connection on the turbopump and the clamping ring to the counter flange.
3. Utilize all prescribed components for the turbopump.
4. Tighten the clamping ring screws evenly.
– Tightening torque: 3,7 Nm.
5.3.7 Attaching ISO-K flange onto ISO-K

Required tools
● Wrench, WAF 15
● Calibrated torque wrench (Tightening factor ≤ 1.6)
Fig. 7: Flange connection ISO-K to ISO-F, bracket screws
Connection with bracket screw

1. For the connection of the turbopump, use only the approved mounting kits from Pfeiffer Vacuum.
2. Connect the flange with the components of the mounting kit according to the figure.
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Installation
3. Use for all prescribed components for the turbopump.

4. Tighten the bracket screws cross-wise in 3 steps.
– Tightening torque: 5, 15, 25 ± 2 Nm
5.3.8 Installation of ISO-K flange onto ISO-F

The connection types for the installation of ISO-K with ISO-F flange are:
● "Claw and tapped hole"
● "Hexagon head set screw and tapped hole"
● "Stud screw and tapped hole"
● "Stud screw and through-bore"

Connection of claw and tapped hole
2. Connect the flange according to the diagram using the components in the mounting kit.
4. Tighten the claws in 3 stages in opposite pairs.
Connection of hexagon head set screw and tapped hole
2. Place the collar flange over the high vacuum flange on the turbopump.
3. Insert the snap ring into the side groove on the high vacuum flange of the turbopump.
4. Fasten the turbopump onto the counter flange in accordance with the diagram using the collar
flange, snap ring and centering ring.
6. Screw the hexagon head set screws into the tapped holes.
– Observe the minimum tensile strength of the flange material and the screw-in depth.
7. Tighten the hexagon head set screws in 3 stages in opposite pairs.
Connection of stud screw and tapped hole
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Installation
2. Screw the required number of stud screws with the shorter screw-in end into the holes in the
counter flange.
– Observe the minimum tensile strength of the flange material and the screw-in depth.
7. Tighten the nuts in 3 stages in opposite pairs.
Connection of stud screw and through-bore
6. Tighten the nuts in 3 stages in opposite pairs.
7. Tightening torque: 5, 10, 16 ± 1 Nm
5.3.9 Attaching CF flange to CF-F

The connection types for CF installation with CF flange are:
● "Hexagon head screw and through hole"
● "Stud screw with tapped hole"
● "Stud screw with through hole"
NOTICE
Leaks may occur due to the incorrect installation of CF flanges
Inadequate cleanliness when handling CF flanges and copper gaskets results in leaks and may
cause process damage.
► Always wear suitable gloves before touching or fitting any components.
► Fit seals only if dry and free of grease.
► Take care of damaged surfaces and cut edges.
► Replace the damaged components.
Required tools
● Hexagonal wrench (13 WAF)
Fig. 8: Flange connection CF-F, hexagon head screw and through hole
26/58
Installation
Connection of the hexagon head screw and through holes

2. If used: Insert the protective screen or splinter shield with clamping lugs downwards in the turbo-
pump high vacuum flange.
3. Place the seal exactly in the hollow.
5. Tighten the screw couplings all the way around.
– Tightening torque: 22 ± 2 Nm
6. Then check the torque, since flowing of the sealing material may make it necessary to re-tighten
the screws.
Fig. 9: Flange connection CF-F, stud screw and tapped hole
Connection of the stud screw and tapped hole

2. Screw in the required number of stud screws with the shorter end in the holes on the counter
flange.
the screws.
Fig. 10: Flange connection CF-F, stud screw and through hole
Connection of the stud screw and through hole

the screws.
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Installation
5.4 Connecting the fore-vacuum side

WARNING
poisoning.
Suitable backing pump

Use the turbopump only in combination with a suitable backing pump that can deliver up to
the required maximum fore-vacuum pressure. To achieve the fore-vacuum pressure, use a
suitable vacuum pump or a pumping station from the Pfeiffer Vacuum range.
In this case, the backing pump is also controlled directly via the turbopump electronic drive
unit interfaces (e.g., relay box or connection cable).
1 2 3 4
5
Fig. 11: Example of fore-vacuum connection on HiPace 80
1 Turbopump fore-vacuum connection 4 Backing pump (e.g., diaphragm pump)

2 Centering ring 5 Vacuum components DN 16 ISO-KF
3 Circlip
Establishing the fore-vacuum connection

1. With rigid pipe connections, include bellows to attenuate external vibrations.
2. Install a fore-vacuum connection with small flange components, e.g., fasteners and pipe compo-
nents DN 16 ISO-KF, from the Pfeiffer Vacuum Components Shop.
3. Implement measures to counteract the backflow of operating fluids or condensate from the fore-
vacuum area.
4. Observe the information in the operating instructions of the backup pump or pumping station when
connecting and operating it.
5.5 Connecting accessories

Installation and operation of accessories
Pfeiffer Vacuum offers a series of special, compatible accessories for its products.
● Information and ordering options for approved accessories for hybrid bearing turbo-
pumps can be found online.
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Installation
Connecting accessory devices to TC

● Use of Pfeiffer Vacuum accessories via the electronic drive unit is enabled via a corre-
sponding connection cable or adapter at the “X3” multi-function connection.
● The desired accessory output is configured via RS-485 using Pfeiffer Vacuum control
units or a PC.
1 2 3 4 5
B1 ACC A1
DO2
X3
DO1
7 6
Fig. 12: Example of accessory connection via adapter TCS 12
1 Multifunction connection X3 5 Digital output DO2

2 Adapter TCS 6 Digital output DO1
3 Accessory connection B1 7 Accessory connection A1
4 Connection RS-485
Connect pre-configured accessories

► Observe the installation instructions in the operating instructions for the relevant accessory.
► Note the existing configuration of existing connections and control lines.
► Connect only matching accessory devices to the electronic drive unit.
Using additional accessories
► Observe the installation instructions in the operating instructions for the relevant accessory.
► Note the existing configuration of existing connections and control lines.
► Use a Pfeiffer Vacuum control unit for the configuration if needed.
5.6 Connecting the electrical supply

WARNING
Risk of danger to life through missing mains disconnection device
The vacuum pump and electronic drive unit are not equipped with a mains disconnection device
(mains switch).
► Install a mains disconnection device according to SEMI-S2.
► Install a circuit breaker with an interruption rating of at least 10,000 A.
WARNING
Risk of injury due to incorrect installation
Dangerous situations may arise from unsafe or incorrect installation.
► Ensure the integration into an Emergency Off safety circuit.
5.6.1 Earthing the turbopump

Pfeiffer Vacuum recommends connecting a suitable grounding cable to discharge applicative interfer-
ences.
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Installation
M4
Fig. 13: Example: Connecting the grounding cable
Procedure
1. Use the turbopump ground terminal (M4 female thread).
2. Route the connection in accordance with locally applicable provisions.
5.6.2 Establishing electric connection
DANGER
Danger to life from electric shock
Power supply packs that are not specified or are not approved will lead to severe injury to death.
► Make sure that the power supply pack meets the requirements for double isolation between
mains input voltage and output voltage, in accordance with IEC 61010-1 IEC 60950-1 and
IEC 62368-1.
► Make sure that the power supply pack meets the requirements in accordance with IEC 61010-1
IEC 60950-1 and IEC 62368-1.
► Where possible, use original power supply packs or only power supply packs that correspond
with the applicable safety regulations.
WARNING
vacuum flange.
1 2 3
9 4
8
5
7
DC out
6
Fig. 14: Connecting electronic drive unit to power supply pack
1 Connection cable 6 Power supply pack | Control unit with power supply pack
2 RS 485 connector (optional) 7 DCout connector
3 Accessory connector (optional) 8 Mains connection ACin
4 Turbopump electronic drive unit 9 Main switch
5 Multifunction connection X3
30/58
Installation
Original power supply packs (e.g. TPS) or control units and connection cables are available for the elec-
tronic drive unit supply voltage.
Connection cable type Function

Connection cable with RS-485 interface and ● Voltage supply via power supply pack
bridges from TC 110|TC 120 to power supply ● Automatic ramp-up with bridges on pins 2, 5, 7
pack ● Connection to control unit via RS-485
Connection cable with RS-485 interface and ac- ● Voltage supply via power supply pack
cessory connectors from TC 110|TC 120 to ● Connector for accessory units with M8 plug
power supply pack ● Connection to control unit via RS-485
Connection cable with bridges from TC 110| ● Voltage supply via power supply pack
TC 120 to power supply pack ● Automatic ramp-up with bridges on pins 2, 5, 7
Connection cable with bridges and accessory ● Voltage supply via power supply pack
connectors from TC 110|TC 120 to power sup- ● Automatic ramp-up with bridges on pins 2, 5, 7
ply pack ● Connector for accessory units with M8 plug
Connecting electronic drive unit
1. Ensure the correct supply voltage.
2. Make sure that the power supply pack main switch is off prior to connection.
3. Use a suitable connection cable from the Pfeiffer Vacuum accessories range.
4. Plug the 15-pole connection cable plug into the "X3" connection on the electronic drive unit and
secure it.
5. Insert the connecting cable into the connection "DCout" on the power supply pack and close the
bayonet lock.
6. If you are using a Pfeiffer Vacuum control unit: Connect the “RS-485” connector to the control
unit using a suitable extension cable.
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Operation
6 Operation
6.1 Commissioning
WARNING
vacuum flange.
NOTICE
Vacuum pump destruction due to excessive energy input during operation
Simultaneous loading by means of high drive power (gas throughput, fore-vacuum pressure), high
heat radiation, or strong magnetic fields results in uncontrolled heating of the rotor and can destroy
the vacuum pump.
► Consult Pfeiffer Vacuum before combining varying loads on the vacuum pump. Lower limit val-
ues apply.
NOTICE
Turbopump destruction due to gases with too high molecular masses
The pumping of gases with impermissible high molecular masses leads to the destruction of the tur-
bopump.
► Make sure that the gas mode is set correctly by [P:027] in the electronic drive unit.
► Consult Pfeiffer Vacuum before you use gases with higher molecular masses (> 80).
Important settings and function-related variables are programmed ex factory as parameters in the vac-
uum pump electronic drive unit. Each parameter has a three-digit number and a description. Parameter-
driven operation and control is supported via a Pfeiffer Vacuum control unit, or externally via RS-485
using Pfeiffer Vacuum protocol.
Parameter Name Designation Adjustment, setting

[P:027] GasMode Gas mode 0 = heavy gases
[P:035] CfgAccA1 Accessory connection A1 0 = fan (continuous opera-
tion)
[P:036] CfgAccB1 Accessory connection B1 1 = venting valve
[P:700] RUTimeSVal Set value run-up time 8 min.
[P:701] SpdSwPt1 Rotation speed switch point 1 80 %
[P:707] SpdSVal Speed-control operation specification 65 %
[P:708] PwrSVal Set value power consumption 100 %
[P:720] VentSpd Venting at rotation speed, delayed venting 50 %
[P:721] VentTime Venting time, delayed venting 3600 s
Tbl. 8: Factory setting of the electronic drive unit for turbopumps when delivered
Notes for turbopump commissioning

1. When using water cooling, observe the cooling water flow and throughput.
2. When using sealing gas, observe the sealing gas flow and throughput.
3. Provide the current supply for the power supply pack.
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Operation
6.2 Operating modes

The turbopump can be operated in different modes.
● Operation without control unit
● Operation via connection "X3"
● Operating via RS-485 interface from Pfeiffer Vacuum control unit or PC
● Operation via connection "E74"
● Operation via field bus
6.2.1 Operation without operating unit
Automatic start
After bypassing the contacts at pins 2, 5 and 7 on the “X3” connection or when using a con-
nection cable with bridges and applying the supply voltage, the turbopump starts up imme-
diately.
Notes on operation without control unit

1. Only use the approved Pfeiffer Vacuum connection cables with bridges on the "X3" connection on
the electronic drive unit.
2. Only switch on the power supply of the turbopump immediately before operation.
After applying the operating voltage, the electronic drive unit carries out a self-test to check the supply
voltage. After completing the self-test successfully, the turbopump starts and activates connected addi-
tional equipment according to the configuration.
6.2.2 Operation via multi-function connection "X3"

Remote control is available via the 15 Pole D-Sub connection with the “X3” designation on the electron-
ic drive unit. The accessible individual functions are mapped to "PLC levels".
Instructions for remote control operation
► See the electronic drive unit operating instructions.
6.2.3 Operation via Pfeiffer Vacuum control unit

Connecting a Pfeiffer Vacuum control unit allows the turbopump to be controlled via static parameters
stored in the electronic drive unit.
Using control unit
1. Observe the appropriate operating instructions for handling Pfeiffer Vacuum control units:
– Operating instructions available from the Download Center.
2. Observe the electronic drive unit operating instructions from the scope of delivery of the vacuum
pump.
3. Connect the control unit to the “X3” multi-function connection of the electronic drive unit.
– Use a suitable connection cable with “RS-485” connection or an adapter for “X3”.
4. Switch on the turbopump power supply via the external power supply pack or the control unit with
integrated power supply pack.
6.2.4 Operation via field bus

Integrating and operating Pfeiffer Vacuum turbopumps in the customer's field bus system is possible
when using an electronic drive unit with a corresponding connection panel.
The following are available:
● Profibus
Instructions for field bus operation
► See the operating manual of the electronic drive unit with corresponding connection panel.
33/58
Operation
6.3 Switching on the turbopump

WARNING
vacuum flange.
WARNING
Risk of burns on hot surfaces when using additional equipment for heating during operation
The use of additional equipment for heating the vacuum pump or for optimizing the process gener-
ates very high temperatures on surfaces that can be touched. There is a risk of burning.
► If necessary, set up a contact guard.
► If necessary, apply the warning stickers provided for this at the danger points.
► Ensure adequate cooling down before working on the vacuum pump or in its vicinity.
► Wear protective equipment, e.g., gloves.
WARNING
Risk of serious injury in the event of vacuum pump destruction due to over pressure
Gas entry with very high over pressure results in destruction of the vacuum pump. There is a risk of
serious injury due to ejected objects.
► Never exceed the permissible 1500 hPa (absolute) inlet pressure on the suction side or the vent-
ing and sealing gas connection.
► Make sure that high, process-related over pressures cannot directly enter the vacuum pump.
Switching on the turbopump

► Connect the power supply pack to the mains power supply on the customer-side.
► Switch on the power supply pack.
6.4 Operation monitoring

6.4.1 Operating mode display via LED
LEDs on the electronic drive unit show the basic operating states of the vacuum pump. A differentiated
error and warning display is only possible for operation with the Pfeiffer Vacuum control unit or a PC.
LED Symbol LED status Display Meaning

Off Currentless
On, flashing "pumping station OFF", rotation speed
≤ 60 rpm
Green
On, inverse flashing "pumping station ON", set rotation speed not
reached
On, constant "pumping station ON", set rotation speed
reached
On, flashing "pumping station OFF", speed > 60 rpm
Yellow Off No warning
On, constant Warning
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Operation
LED Symbol LED status Display Meaning

Red Off No error, no warning
On, constant Error, malfunction
Tbl. 9: Behavior and meaning of the LEDs on the electronic drive unit
6.4.2 Temperature monitoring

If threshold values are exceeded, output signals from temperature sensors bring the turbopump to a
safe condition. Depending on the type, temperature thresholds for warning and error messages are im-
mutably stored in the electronic drive unit. For information purposes, various status requests are set up
in the parameter set.
● In order to avoid switching off the turbopump, the electronic drive unit already reduces the power
consumption in case of exceeding the warning threshold for excess temperature.
─ Examples are an impermissible motor temperature, or impermissibly high housing tempera-
ture.
● Further reduction of drive power and thus decreasing speed can potentially lead to underrun the
rotation speed switchpoint. The turbopump switches off.
● Exceeding the temperature threshold for error messages switches off the turbopump immediately.
6.5 Switching off and venting

We recommend
Vent the turbopump after shutdown. By doing so, you prevent particles flowing back into
the vacuum system from the fore-vacuum area.
6.5.1 Switching off

Notes for switching off the turbopump
1. Shut down the turbopump via the control unit or remote control.
2. Close the fore-vacuum line.
3. Switch off the backing pump, if necessary.
4. Vent the turbopump.
5. Close the supply lines (e.g. for cooling water or sealing gas).
6.5.2 Venting
CAUTION
Risk of injuries due to contact with vacuum when venting
While venting the vacuum pump there is a risk of minor injuries due to the direct contact of body parts
with the vacuum, e.g. hematomas.
► Do not fully unscrew the venting screw out of the housing during venting.
► Keep a distance from automatic venting device, such as venting valves.
NOTICE
Damage to the turbopump due to non-permissibly fast pressure rise during venting
Non-permissibly high pressure rise rates place a significant load on the rotor and the magnetic bear-
ing of the turbopump. During venting very small volumes in the vacuum chamber or the turbopump,
there is a risk of uncontrollable pressure rises. This causes mechanical damage to the turbopump,
including potential failure.
► Observe the prescribed maximum pressure rise speed of 15 hPa/s.
► Avoid manual and uncontrolled venting of very low volumes.
► Where necessary, use a venting valve from the Pfeiffer Vacuum range of accessories.
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Operation
Manual venting
Manual venting describes the standard process for venting the turbo pumping station.
1. Ensure that the vacuum system is shut down.
2. Open the black venting screw on the turbopump by one revolution maximum.
3. Wait for pressure equalization to atmospheric pressure in the vacuum system.
4. Close the venting screw again.
Use a Pfeiffer Vacuum venting valve
The Pfeiffer Vacuum venting valve is an optional accessory for installation on the turbopump.
The venting valve is normally closed. Control is via the turbopump electronic drive unit, and configura-
tion of parameters [P:012] and [P:030]. In the event of a power failure, the turbopump continues to de-
liver sufficient energy during its run-down period to initiate a proper venting process. When power is re-
stored, the venting process is interrupted.
► Switch off the turbopump.
– The venting process starts automatically.
Venting speed [P:720] Venting duration [P:721] Venting duration in the event of a power
failure
50 % of rated speed 3600 s 3600 s
Tbl. 10: Factory settings for delayed venting in turbopumps
General information for fast venting

We recommend fast venting of larger volumes in 4 steps.
1. Use a Pfeiffer Vacuum venting valve for the turbopump, or match the valve cross-section to the
size of the recipient and maximum venting rate.
2. Vent the vacuum system with a maximum rate of pressure rise of 15 hPa/s for a duration of 20
seconds.
3. Then vent the system with a second venting valve of any size; for example, directly at the vacuum
chamber.
4. Wait for pressure equalization to atmospheric pressure in the vacuum system.
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Maintenance
7 Maintenance
7.1 General maintenance information
WARNING
Danger to life from electric shock during maintenance and service work
The device is only completely de-energized when the mains plug has been disconnected and the tur-
bopump is at a standstill. There is a danger to life from electric shock when making contact with live
components.
► Before performing all work, switch off the main switch.
► Remove the mains plug from the device.
► Secure the device against unintentional restarting.
WARNING
process media.
WARNING
Risk of cuts on moving, sharp-edged parts when reaching into the open high vacuum connec-
tion
Incorrect handling of the turbopump before maintenance work results in hazardous situations with
risk of injury. There is a risk of cuts from accessing sharp-edged, rotating parts when removing the
turbopump.
► Switch the turbopump off properly.
► Secure the turbopump against re-start.
► Seal open connections immediately following removal, using the original protective cover.
7.2 Maintenance intervals and responsibilities

Recommendations for performing maintenance measures
1. Clean the turbopump exterior with a lint-free cloth and a little isopropanol.
2. Replace the electronic drive unit as an independent unit.
3. Replace the operating fluid reservoir as an independent unit.
4. Pay attention to when the operating fluid must be changed.
5. Change the operating fluid reservoir at least every 4 years.
6. Have Pfeiffer Vacuum Service replace the rotor bearing of the turbopump at least every 4 years.
7. Consult with Pfeiffer Vacuum Service about shorter maintenance intervals for extreme loads or im-
pure processes.
8. For all other cleaning, maintenance or repair work, contact the appropriate Pfeiffer Vacuum Serv-
ice location.
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Maintenance
Scan this qr code or click here and see the service level 1, replacing operating fluid
reservoir.
7.3 Replace operating fluid reservoir

WARNING
Risk of poisoning from contact with harmful substances
The operating fluid reservoir and parts of the turbopump may contain toxic substances from pumped
media.
► Prevent health hazards or environmental impacts with adequate safety precautions.
► Observe the operating fluid safety data sheet.
► Dispose of the operating fluid reservoir according to applicable regulations.
NOTICE
Damage to sealing surfaces from unsuitable tools
The use of unsuitable tools for removal or insertion of sealing rings damages the sealing surfaces,
causing vacuum pump leakage.
► Never use sharp, metallic tools (e.g. tweezers).
► Only remove sealing rings with an O-ring picker.
Replacing the operating fluid reservoir

Depending on its design, the turbopump’s operating fluid reservoir may feature capillary
rods.
● When ordering spare parts, make sure you use the correct pump article number and
the operating fluid reservoir.
● This information can be found on the pump rating plate.
You can find the safety data sheet in the Pfeiffer Vacuum Download Center.
Prerequisites
● Turbopump off
● Vacuum system vented to atmospheric pressure
● Electrical supply disconnected
● All cables disconnected
● All openings sealed with the original protective covers and any plugs
7.3.1 Removing the operating fluid reservoir

Required consumables
● Clean, lint-free cloth
● Laboratory gloves
Required tools
● Wrench, WAF 17
● Special tool (order number: PV M40 813)
● Tweezers
● O-ring picker
● Screwdriver
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Maintenance
1 2 3 4
9
Fig. 15: Removing the operating fluid reservoir
1 Rubber-metal bumper 6 O-ring, operating fluid reservoir

2 Special tool 7 Operating fluid reservoir
3 Wrench 8 Capillary rod (8×)
4 Screw cap 9 Protective cover
5 O-ring
Removing the operating fluid reservoir

1. Wear laboratory gloves to avoid skin contact.
2. Place the turbopump on the closed high vacuum flange.
3. Unscrew the rubber-metal pad from the pump base.
4. Unscrew the screw cap using the special tool.
5. Be careful with the O-ring; use an O-ring picker to remove if needed.
6. Lift the operating fluid reservoir out of the bearing housing with two screwdrivers.
7. Pull the old capillary rods (8×) out of the pump base with the tweezers.
8. Clean the screw cap with a clean, lint-free cloth.
– Do not use cleaning agents.
7.3.2 Installing the operating fluid reservoir

Required consumables
● Laboratory gloves
● Operating fluid reservoir
Required tools
● Wrench, WAF 17
● Special tool (order number: PV M40 813)
● Tweezers
● Screwdriver
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Maintenance
1 2 3 4 5 6
Fig. 16: Installing the operating fluid reservoir
1 Screw cap 6 Rubber-metal bumper

2 O-ring 7 Torque wrench
3 O-ring, operating fluid reservoir 8 Special tool
4 Operating fluid reservoir 9 Protective cover
5 Capillary rod (8×)
Installing the operating fluid reservoir

1. Insert all new capillary rods with the tweezers.
2. Insert the new operating fluid reservoir up to its O-ring in the bearing housing.
– When doing so, do not exert pressure on the operating fluid reservoir.
3. Insert the O-ring in the groove in the pump base.
4. Fit the screw cap.
5. Tighten the screw cap.
– Tightening torque: 13 Nm.
6. Screw the rubber-metal pad into the pump base.
7.4 Replacing the electronic drive unit

NOTICE
Damage to the vacuum pump and electronic drive unit due to improper disconnection of com-
ponents
Even after the power supply has been switched off, the vacuum pump continues to deliver electrical
energy during its run-down period. If the vacuum pump and electronic drive unit are disconnected
prematurely, there is the risk of body contact and consequently the destruction of electronic compo-
nents.
► Never disconnect the vacuum pump and electronic drive unit from each other if power is still con-
nected or if the rotor is running.
► Monitor the rotation speed via the parameters available in the electronic drive unit (e.g. [P:398]).
► Wait until the vacuum pump comes to a standstill (rotation speed f = 0).
NOTICE
Property damage from electrostatic discharge
Neglecting the electrostatic hazard for electronic components results in their damage or destruction
► Implement ESD safety measures at the workstation.
► Observe EN 61340 "Protection of electronic devices from electrostatic phenomena".
40/58
Maintenance
Backing up settings made by the customer

The factory operating parameters are always preset in replacement units. All settings made
by the customer to the original electronic drive unit are lost when it is replaced. To preserve
your custom settings, you have the following options:
1. Back up all your settings as a parameter set in an HPU.
2. Load a backup parameter set by means of HPU into the new electronic drive unit.
3. Program the individual settings into the new electronic drive unit by hand.
4. See the operating instructions of the electronic drive unit and the HPU.
The electronic drive unit of the turbopump cannot be repaired. In the event of a defect, replace the en-
tire electronic drive unit with a replacement part.
Prerequisites
● Turbopump off
● Turbopump cooled
● Vacuum system vented to atmospheric pressure
● Electrical supply disconnected
● All cables disconnected from the electronic drive unit
● All openings sealed with the original protective covers, and any screw plugs.
Required tools
● Torx screwdriver TX 10
2 3
1
5 4
Fig. 17: Electronic drive unit installation and removal
1 Torx screw 4 Fore-vacuum connection protective cover

2 Electronic drive unit 5 Adapter plate
3 High vacuum connection protective cover
Procedure
1. Install the turbopump upright if required.
2. Unscrew all 4 Torx screws from the electronic drive unit.
3. Pull the old electronic drive unit off the turbopump, taking care to keep it straight.
4. Place a new electronic drive unit straight onto the adapter plate connection of the turbopump.
5. Screw the electronic drive unit to the turbopump with all 4 Torx screws.
– Tightening torque: 0.8 Nm
7.5 Confirming speed specification

The typical nominal rotation speed of a turbopump is preset ex factory in the electronic drive unit. If the
electronic drive unit is replaced or a different pump type is used, the set value settings of the nominal
rotation speed is cleared. The manual confirmation of the nominal rotation speed is part of a redundant
safety system as a measure for preventing excess rotation speed.
The redundant confirmation of the nominal rotation speed of a turbopump is possible by adjusting the
[P:777] NomSpdConf parameter in the electronic drive unit.
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Maintenance
HiPace Nominal rotation speed

10 | 30 | 60 | 80 1500 Hz
300 1000 Hz
350 | 450 1100 Hz
400 | 700 | 800 820 Hz
Tbl. 11: Characteristic nominal rotation speeds of the turbopumps
Required aids
● Connected Pfeiffer Vacuum control unit
● Knowledge of the configuration and setting of electronic drive unit operating parameters
Adjusting nominal rotation speed confirmation
1. Observe the operating instructions of the control unit.
2. See the electronic drive unit operating instructions.
3. Set the parameter [P:794] to "1" and activate the expanded parameter set.
4. Open and edit the parameter [P:777].
5. Set the parameter [P:777] to the required value of the nominal rotation speed in Hertz.
Alternative to adjusting the nominal rotation speed confirmation

A Pfeiffer Vacuum SpeedConfigurator for the one-time immediate setting of parameter
[P:777] is included with the replacement units.
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Decommissioning
8 Decommissioning
8.1 Shutting down for longer periods
WARNING
process media.
Procedure for a longer downtime of the turbopump (> 1 year)

1. Remove the turbopump from the vacuum system if necessary.
2. Change the operating fluid reservoir of the turbopump if necessary.
3. Close the high vacuum flange of the turbopump.
4. Evacuate the turbopump via the fore-vacuum connection.
5. Vent the turbopump via the venting connection with dry, oil-free air or inert gas.
6. Seal all flange openings with the original protective caps.
7. Store the turbopump upright with the high vacuum flange upwards.
8. Store the turbopump indoors only, within the specified temperature range.
9. In rooms with humid or aggressive atmospheres: Hermetically seal the turbopump together with a
drying agent in a plastic bag.
8.2 Recommissioning
NOTICE
Risk of damage to the turbopump as a result of operating fluid aging after recommissioning
The shelf life of the operating fluid of the turbopump is limited. Aging of the operating fluid may lead
to the failure of the ball bearing and cause damage to the turbopump.
► Pay attention to when the operating fluid must be changed:
● after maximum 2 years without operation,
● after maximum 4 years combined operation and downtimes.
► Observe the maintenance instructions and inform Pfeiffer Vacuum Service.
Procedures for recommissioning the turbopump

1. Check the turbopump for contamination and moisture.
2. Clean the turbopump externally with a lint-free cloth and a little isopropanol.
3. If necessary, arrange for Pfeiffer Vacuum Service to completely clean the turbopump.
4. Observe the total running time of the turbopump and if necessary, arrange for Pfeiffer Vac-
uum Service to replace the bearing.
5. Change the operating fluid reservoir of the turbopump.
6. Install the turbopump according to these operating instructions (see chapter “Installa-
tion”, page 20).
7. Recommission the turbopump according to these instructions .
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Recycling and disposal
9 Recycling and disposal

WARNING
process media.
Environmental protection
You must dispose of the product and its components in accordance with all applicable reg-
ulations for protecting people, the environment and nature.
● Help to reduce the wastage of natural resources.
● Prevent contamination.
9.1 General disposal information

Pfeiffer Vacuum products contain materials that you must recycle.
► Dispose of our products according to the following:
– Iron
– Aluminium
– Copper
– Synthetic
– Electronic components
– Oil and fat, solvent-free
► Observe the special precautionary measures when disposing of:
– Fluoroelastomers (FKM)
– Potentially contaminated components that come into contact with media
9.2 Dispose of turbopumps

Pfeiffer Vacuum turbopumps contain materials that you must recycle.
1. Remove the complete operating fluid reservoir.
2. Remove the electronic drive unit.
3. Decontaminate components that come into contact with process gases.
4. Separate the components into recyclable materials.
5. Recycle the non-contaminated components.
6. Dispose of the product or components in a safe manner according to locally applicable regula-
tions.
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Malfunctions
10 Malfunctions
WARNING
poisoning.
WARNING
Danger to life from the turbopump breaking away in the event of a fault
Sudden jamming of the rotor generates high destructive torques in accordance with ISO 27892. If the
turbopump is not properly secured, it can shear off. The energy that this would release could throw
the entire turbopump or shattered pieces from its interior through the surrounding space. Potentially
dangerous gases can escape. There is a risk of very serious injuries, including death, and extensive
property damage.
► Follow the installation instructions for this turbopump.
► Observe the requirements regarding stability and design of the counter flange.
► Use only original accessories or fixing material approved by Pfeiffer Vacuum for the installation.
WARNING
Should malfunctions occur, you can find information about potential causes and how to fix them here.
The operating instructions of the associated electronic drive unit contains more detailed error descrip-
tions.
Problem Possible causes Remedy

Turbopump will not start up; ● Current supply interrupt- ● Check the plug contacts on the power supply pack.
none of the built-in LEDs on the ed ● Check the current supply lines.
electronic drive unit light up ● Check the output voltage at the power supply pack
“DC out” connection.
─ Depending on the version of the power supply
pack, 24 V DC or 48 V DC are present.
● Incorrect operating volt- ● Observe the electronic drive unit rating plate.
age ● Supply the correct operating voltage.
● No operating voltage ● Supply the correct operating voltage.
present ● Switch on the power supply pack.
● Electronic drive unit de- ● Replace the electronic drive unit.
fective ● Contact Pfeiffer Vacuum Service.
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Malfunctions
Turbopump will not start up; ● For operation without ● Connect the connections according to the electron-
green LED on the electronic control unit: Pins 2-7 ic drive unit connection diagram.
drive unit is flashing and 5-7 on the “X3” con- ● Check the bridges on the connection cable.
nection are not connect-
ed
● For operation via ● Remove the bridge from the “X3” connection.
RS-485: The bridge be- ● Check the connection cable.
tween pins 5 and 7 in-
hibits control commands
● For operation via ● Set the parameters [P: 010] and [P: 023] via the in-
RS-485: Parameters not terface RS-485 to 1 = "ON".
set in the electronic
drive unit
● Voltage drop in the ca- ● Check the connection cable.
ble is too high ● Use a suitable connection cable.
Turbopump fails to reach the ● Fore-vacuum pressure ● Check backup pump compatibility (see technical
nominal rotation speed within too high data).
the set run-up time ● Check that the backup pump is working.
● Leakage on the turbo- ● Carry out leak detection.
pump ● Check seals and flange connections.
● Eliminate leaks.
● Gas throughput too high ● Reduce the process gas load.
● Rotor not running ● Check the turbopump for noise development
smoothly, defective ● Contact Pfeiffer Vacuum Service.
bearing
● Run-up time setpoint ad- ● Use a control unit to extend the set value run-up
justed too low time [P:700].
Thermal load due to: ● Reduce the thermal load.
● lack of ventilation ─ Ensure adequate air supply.
● water flow too low ─ Adjust the cooling water flow.
● Fore-vacuum pressure ─ Reduce the fore-vacuum pressure.
too high ─ Adapt the ambient conditions.
● ambient temperature too
high
Turbopump not achieving the ul- ● Turbopump is polluted ● Heat the turbopump if required.
timate pressure ● Have it cleaned.
● Contact Pfeiffer Vacuum Service.
● Vacuum chamber, pipes ● Carry out leak detection starting from the vacuum
or turbopump leaking chamber.
● Check seals and flange connections.
● Eliminate leaks in the vacuum system.
Unusual noises during operation ● Rotor bearing damaged ● Contact Pfeiffer Vacuum Service.
● Rotor damaged ● Contact Pfeiffer Vacuum Service.
● Splinter shield or protec- ● Check and correct the seat of the splinter shield or
tive screen loose protective screen in the high vacuum flange.
● Follow the installation instructions.
Red LED on the electronic drive ● Group error ● Reset the malfunction by switching the current sup-
unit illuminates ply off and on.
● Reset the malfunction with V+ on pin 6 on the “X3”
connection.
● Set the parameter [P: 009] via the interface RS-485
to 1 = Malfunction acknowledgment.
● Set the parameter [P: 010] via the interface RS-485
to 0 = off and then 1 = On and Malfunction ac-
knowledgment.
● Carry out a differentiated malfunction analysis with
a control unit.
● Contact Pfeiffer Vacuum Service.
Tbl. 12: Troubleshooting turbopumps
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Service solutions by Pfeiffer Vacuum
11 Service solutions by Pfeiffer Vacuum

We offer first-class service
High vacuum component service life, in combination with low downtime, are clear expectations that you
place on us. We meet your needs with efficient products and outstanding service.
We are always focused on perfecting our core competence – servicing of vacuum components. Once
you have purchased a product from Pfeiffer Vacuum, our service is far from over. This is often exactly
where service begins. Obviously, in proven Pfeiffer Vacuum quality.
Our professional sales and service employees are available to provide you with reliable assistance,
worldwide. Pfeiffer Vacuum offers an entire range of services, from original replacement parts to service
contracts.
Make use of Pfeiffer Vacuum service

Whether preventive, on-site service carried out by our field service, fast replacement with mint condition
replacement products, or repair carried out in a Service Center near you – you have various options for
maintaining your equipment availability. You can find more detailed information and addresses on our
homepage, in the Pfeiffer Vacuum Service section.
You can obtain advice on the optimal solution for you, from your Pfeiffer Vacuum representa-
tive.
For fast and smooth service process handling, we recommend the following:
1. Download the up-to-date form templates.
─ Explanations of service requests
─ Service requests
─ Contamination declaration
a) Remove and store all accessories (all external parts, such as valves, pro-
tective screens, etc.).
b) If necessary, drain operating fluid/lubricant.
c) If necessary, drain coolant.
ANFORDERUNG SERVICE
2. Complete the service request and contamination declaration.
ERKLÄRUNG KONTAMINIERUNG
3. Send the forms by email, fax, or post to your local Service Center.
4. You will receive an acknowledgment from Pfeiffer Vacuum.
Submission of contaminated products

No microbiological, explosive, or radiologically contaminated products will be accepted. Where products
are contaminated, or the contamination declaration is missing, Pfeiffer Vacuum will contact you before
starting service work. Depending on the product and degree of pollution, additional decontamination
costs may be incurred.
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Service solutions by Pfeiffer Vacuum
5. Prepare the product for transport in accordance with the provisions

in the contamination declaration.
a) Neutralize the product with nitrogen or dry air.
b) Seal all openings with blind flanges, so that they are airtight.
c) Shrink-wrap the product in suitable protective foil.
d) Package the product in suitable, stable transport containers only.
e) Maintain applicable transport conditions.
6. Attach the contamination declaration to the outside of the packag-

ing.
ERKLÄRUNG KONTAMINIERUNG
7. Now send your product to your local Service Center.
8. You will receive an acknowledgment/quotation, from Pfeiffer Vac-

uum.
Our sales and delivery conditions and repair and maintenance conditions for vacuum devices and com-
ponents apply to all service orders.
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Spare parts HiPace 80
12 Spare parts HiPace 80

1
Fig. 18: Spare parts HiPace 80
Position Designation Order number Note Pieces

1 Electronic drive unit TC 110 refer to the rating plate depending on the con- 1
nection panel
2 Operating fluid reservoir PM 143 740 -T incl. capillary rods and 1
O-rings
3 Rubber-metal bumper P 3695 700 ZD 4
Tbl. 13: Overview of the spare parts available for the HiPace 80
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Accessories
13 Accessories
View the range of accessories for hybrid bearing turbopumps on our website.
13.1 Accessory information

Fixing materials
Type-specific assembled packages, with centering ring and seal, ensure the secure fastening of the
vacuum pump. Optionally with splinter shield or protective screen.
Power supply packs and control units

Power supply packs for optimal voltage supply of Pfeiffer Vacuum products are characterized by their
compact size and adapted power supply with maximum reliability. Control units are used to check and
adjust operating parameters.
Cable and adapter

Mains, interface, connection, and extension cables provide a secure and suitable connection. Different
lengths on request
Venting accessories
A Pfeiffer Vacuum venting valve offers maximum operating and process security. Automatic control
through the integrated electronic drive unit of the turbopump.
Sealing gas supply

Sealing gas is used to protect the vacuum pump from dusty and corrosive processes, or excessive gas
throughputs. Sealing gas prevents the ingress of damaging substances into the motor and bearing area.
The supply is carried out either via a sealing gas valve or a sealing gas throttle without control.
Air cooling
For processes with low gas throughputs and good fore-vacuum pressure, air cooling can be used inde-
pendently of a water supply. Automatic control through the integrated electronic drive unit of the turbo-
pump.
Heating
Heating jackets enable the ultimate pressure to be reached more quickly during process cleaning. Auto-
matic control through the integrated electronic drive unit of the turbopump.
Backing pump control

The electronic drive unit of the turbopump enables useful control of backing pumps. Depending on the
backing pump used, different operating modes are available.
Integrated pressure measurement

Evaluation and control by the integrated electronic drive unit, independently of an additional power sup-
ply.
13.2 Ordering accessories

Description Order number
Mounting kit for HiPace 60/80, DN 63 ISO-K, including coated centering ring and PM 016 510 -T
claws
bracket screws
Mounting kit for HiPace 60/80, DN 40 ISO-KF, including centering ring and clamp- PM 016 625 -T
ing ring
Mounting kit for HiPace 60/80, DN 40 ISO-KF, splinter shield, clamping ring PM 016 626-T
claws
Hexagon screw set for flanges with through holes, DN 63 CF-F PM 016 683 -T
Set of stud screws for flanges with a threaded hole, DN 63 CF-F PM 016 684 -T
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Accessories
Description Order number

Set of stud screws for flanges with through-hole, DN 63 CF-F PM 016 733 -T
Centering ring with multifunction coating and integrated splinter shield, DN 63 ISO- PM 016 207 AU
K/-F
Vibration damper for HiPace 60/80, DN 63 ISO-K PM 006 800 -X
Vibration damper for HiPace 60/80, DN 63 CF-F PM 006 801 -X
Vibration damper for HiPace 60/80, DN 40 ISO-KF PM 006 799 -X
OmniControl 001 Mobile, control units PE D20 000 0
OmniControl 001, rack unit without integrated power supply pack PE D40 000 0
OmniControl 200, rack unit with integrated power supply pack PE D50 000 0
TPS 180, power supply pack for wall/standard rail installation PM 061 341 -T
TPS 181, power supply pack 19" plug-in unit 3HU PM 061 345 -T
Mains cable 230 V AC, CEE 7/7 to C13, 3 m P 4564 309 ZA
Mains cable 115 V AC, NEMA 5-15 to C13, 3 m P 4564 309 ZE
Mains cable 208 V AC, NEMA 6-15 to C13, 3 m P 4564 309 ZF
Connecting cable from 24V/48V power supply pack to electronic drive unit. With PM 061 350 -T
RS-485 interface
Connection cable with RS-485 interface and 2 accessory ports for TC110/120 to PM 061 351 -T
power supply pack
Y-connector M12 for RS-485 P 4723 010
USB RS-485 converter PM 061 207 -T
Interface cable, M12 m straight / M12 m straight, 3 m PM 061 283 -T
TIC 010, adapter for two sensors PT R70 000
TCS 11, adapter for TC 110/120 with RS-485 interface PM 061 636 -U
TCS 12, adapter for TC 110/120 with interface RS-485, 4 accessory ports and cou- PM 061 638 -U
pling set
TCS 13, adapter for TC 110/120 with interface RS-485, 2 accessory ports and cou- PM 061 856 -U
pling set
Air cooling for HiPace 60 P, HiPace 80 and SplitFlow 50/80 with TC 110/120 PM Z01 300
Water cooling for HiPace 60 P / 80 / 350 / 450 and for SplitFlow 50 / 80 with push- PM 016 623 -T
in fitting, 8 mm
Extension cable M8 on M8 PM 061 783 -T
Venting valve, shielded, 24 V DC, G 1/8", for connection to TC 110/120 PM Z01 290
Sealing gas valve, shielded for HiPace 30/60/80 with TC 110 PM Z01 310
Heating sleeve for HiPace® 80 with TC 110, 230 V AC, safety plug PM 061 360 -T
Heating sleeve for HiPace® 80 with TC 110, 208 V AC, ul plug PM 061 361 -T
Heating sleeve for HiPace® 80 with TC 110, 115 V AC, ul plug PM 061 362 -T
Relay box for backing pumps, 1-phase motor 20 A for TC 110/120 and TCP 350, PM 061 373 -T
plug M8
Relay box, shielded, for backing pumps, 1-phase motor 7A for TC 110/120 and PM 071 282 -X
TCP 350, plug M8
RPT 010, digital Piezo/Pirani sensor PT R71 100
IKT 010, digital cold cathode sensor, low current PT R72 100
IKT 011, digital cold cathode sensor, high current PT R73 100
Tbl. 14: Accessories
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Technical data and dimensions
14 Technical data and dimensions

14.1 General
This section describes the basis for the technical data of Pfeiffer Vacuum turbopumps.
Technical data
Maximum values refer exclusively to the input as a single load.
● Specifications according to PNEUROP committee PN5

● ISO 27892 2010:"Vacuum technology - Turbomolecular pumps - Measurement of rapid shutdown
torque"
● ISO 21360 2012: “Vacuum technology - Standard methods for measuring vacuum-pump perform-
ance - Part 1: General description”
● ISO 21360 2018: "Vacuum technology - Standard methods for measuring vacuum-pump perform-
ance - Part 4: Turbomolecular vacuum pumps"
● Ultimate pressure with test dome after 48 h bake out duration
● Gas throughput with water cooling; backing pump = rotary vane pump (10 m3/h)
● Cooling water consumption at maximum gas throughput, cooling water temperature 25 °C
● Integral leakage rate with 100 % helium concentration, 10 s measurement duration
● Sound pressure level at distance to vacuum pump = 1 m
mbar bar Pa hPa kPa Torr | mm Hg

mbar 1 1 · 10-3 100 1 0.1 0.75
bar 1000 1 1 · 10 5 1000 100 750
Pa 0.01 1 · 10 -5 1 0.01 1 · 10 -3
7.5 · 10-3
hPa 1 1 · 10 -3 100 1 0.1 0.75
kPa 10 0.01 1000 10 1 7.5
Torr | mm Hg 1.33 1.33 · 10-3 133.32 1.33 0.133 1
2
1 Pa = 1 N/m
Tbl. 15: Conversion table: Pressure units
mbar l/s Pa m3/s sccm Torr l/s atm cm3/s

mbar l/s 1 0.1 59.2 0.75 0.987
Pa m /s3 10 1 592 7.5 9.87
sccm 1.69 · 10-2 1.69 · 10-3 1 1.27 · 10-2 1.67 · 10-2
Torr l/s 1.33 0.133 78.9 1 1.32
atm cm3/s 1.01 0.101 59.8 0.76 1
Tbl. 16: Conversion table: Units for gas throughput
14.2 Technical data

Type designation extended HiPace® 80 with HiPace® 80 with HiPace® 80 with
TC 110 TC 110 TC 110
Part number PM P03 940 PM P03 941 PM P03 942
Connection flange (in) DN 63 ISO-K DN 63 CF-F DN 40 ISO-KF
Connection flange (out) DN 16 ISO-KF/G ¼" DN 16 ISO-KF/G ¼" DN 16 ISO-KF/G ¼"
Final pressure -7
< 1 · 10 hPa < 5 · 10 -10
hPa < 1 · 10-7 hPa
Compression ratio for Ar > 1 · 1011 > 1 · 1011 > 1 · 1011
Compression ratio for H2 1.4 · 105
1.4 · 105
1.4 · 105
Compression ratio for He 1.3 · 107 1.3 · 107 1.3 · 107
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TC 110 TC 110 TC 110
Compression ratio for N2 > 1 · 1011 > 1 · 1011 > 1 · 1011
Pumping speed for Ar 66 l/s 66 l/s 30 l/s
Pumping speed for H2 48 l/s 48 l/s 38 l/s
Pumping speed for He 58 l/s 58 l/s 41 l/s
Pumping speed for N2 67 l/s 67 l/s 35 l/s
Gas throughput at final rotation 0.54 hPa·l/s 0.54 hPa·l/s 0.54 hPa·l/s
speed for Ar
speed for H2
speed for He
speed for N2
Fore-vacuum max. for N2 22 hPa 22 hPa 22 hPa
Fore-vacuum max. for Ar 23 hPa 23 hPa 23 hPa
Fore-vacuum max. for H2 14 hPa 14 hPa 14 hPa
Fore-vacuum max. for He 22 hPa 22 hPa 22 hPa
Rotation speed ± 2 % 90000 rpm 90000 rpm 90000 rpm
Rotation speed variable 50 – 100 % 50 – 100 % 50 – 100 %
Performance curve in gas mode 56/90000 W/min -1
56/90000 W/min -1
56/90000 W/min-1
0, vertex C
Performance curve in gas mode 65/81000 W/min-1 65/81000 W/min-1 65/81000 W/min-1
0, vertex D
1, vertex A
1, vertex B
2, vertex E
2, vertex F
Operating voltage: DC 24 V 24 V 24 V
Power consumption max. 110 W 110 W 110 W
Input voltage: tolerance ±10 % ±10 % ±10 %
Current, max. 4,6 A 4,6 A 4,6 A
Run-up time 1.7 min 1.7 min 1.7 min
Electronic drive unit TC 110 TC 110 TC 110
I/O interfaces RS-485, Remote RS-485, Remote RS-485, Remote
Mounting orientation Arbitrary Arbitrary Arbitrary
Bearing Hybrid Hybrid Hybrid
Cooling method Air (Forced convec- Air (Forced convec- Air (Forced convec-
tion) tion) tion)
Cooling water flow 75 l/h 75 l/h 75 l/h
Cooling water temperature 5 – 25 °C 5 – 25 °C 5 – 25 °C
Cooling method, optional Water Water Water
Sound pressure level ≤48 dB(A) ≤48 dB(A) ≤48 dB(A)
Venting connection G 1/8" G 1/8" G 1/8"
Max. connection pressure (abs.) 1500 hPa 1500 hPa 1500 hPa
for venting/sealing gas valve
Integral leak rate < 1 · 10-8 Pa m³/s < 1 · 10-8 Pa m³/s < 1 · 10-8 Pa m³/s
Relative humidity of air 5 – 85 %, non-con- 5 – 85 %, non-con- 5 – 85 %, non-con-
densing densing densing
53/58

TC 110 TC 110 TC 110
Protection degree IP44, Type 12 IP44, Type 12 IP44, Type 12
Permissible radial magnetic field 3.8 mT 3.8 mT 3.8 mT
max.
Permissible irradiated thermal 0.9 W 0.9 W 0.9 W
output max.
Shipping and storage tempera- -25 – 55 °C -25 – 55 °C -25 – 55 °C
ture
Weight 2.4 kg 3.8 kg 2.4 kg
Tbl. 17: Technical data for HiPace 80 | 24 V
14.3 Substances in contact with the media

Substances in contact with the media
Aluminum alloy
Stainless steel
Rare-earth magnets
Carbon-fiber-reinforced plastic
Epoxy resin
FKM
Nickel
Felt
Operating fluid (ester oil)
Oxide ceramic, as required
Tbl. 18: Materials that make contact with the process media
14.4 Dimensions
Dimensions in mm
HV
DN 63 ISO-K
89.3
3 3°
43°
30°
91
119.5
117
65
149
97
55
100
Ø
Ø8
6
33 ° 43° M5 - 10 deep (6x) 37.5

4 0° VV
DN 16 ISO-KF / 1/4“
Fig. 19: Dimensions HiPace 80 | DN 63 ISO-K
54/58
HV
89.3
DN 63 CF-F
43°
30° 33°
97.2
65
123.2
125.7
155.2
ø 97
55
100
86
33° 43° M5 - 10 deep (6x)

40°
37.5 VV
DN 16 ISO-KF / G 1/4“
Fig. 20: Dimensions HiPace 80 | DN 63 CF-F
HV
89.3 DN 40 ISO-KF
33°
43°
30°
65
100
126
128.5
ø 97
158
55
ø 86
100
M5 - 10 deep (6x)
33° 43°
40°
37.5
VV
DN 16 ISO-KF / 1/4“
Fig. 21: Dimensions HiPace 80 | DN 40 ISO-KF
55/58
EC Declaration of Conformity
This declaration of conformity has been issued under the sole responsibility of the manufac-
turer.
Declaration for product(s) of the type:
Turbopump
HiPace 80
We hereby declare that the listed product satisfies all relevant provisions of the following
European Directives.
Machinery 2006/42/EC (Annex II, no. 1 A)

Electromagnetic compatibility 2014/30/EU
Restriction of the use of certain hazardous substances 2011/65/EU
Restriction of the use of certain hazardous substances, delegated directive
2015/863/EU
Harmonized standards and applied national standards and specifications:

DIN EN ISO 12100 : 2011 DIN EN 61326-1 : 2013
DIN EN 1012-2 : 2011 DIN EN 62061 : 2016
DIN EN IEC 61000-3-2 : 2019 DIN ISO 21360-1 : 2020
DIN EN 61000-3-3 : 2020 ISO 21360-4 : 2018
DIN EN 61010-1 : 2020 DIN EN IEC 63000 : 2019
The authorized representative for the compilation of technical documents is Mr. Tobias Stoll,
Pfeiffer Vacuum GmbH, Berliner Straße 43, 35614 Asslar, Germany.
Signature:
Pfeiffer Vacuum GmbH
Berliner Straße 43
35614 Asslar
Germany
(Daniel Sälzer) Asslar, 2022-11-08
Managing Director
UK Declaration of Conformity
This declaration of conformity has been issued under the sole responsibility of the manufac-
turer.
Declaration for product(s) of the type:
Turbopump
HiPace 80
We hereby declare that the listed product satisfies all relevant provisions of the following
British Directives.
Supply of Machinery (Safety) Regulations 2008

Electromagnetic Compatibility Regulations 2016
The Restriction of the Use of Certain Hazardous Substances in Electrical and Elec-
tronic Equipment Regulations 2012
Applied standards and specifications:

ISO 12100:2010 IEC 61326-1:2012
EN 1012-2+A1:1996 IEC 62061:2005
IEC 61000-3-2:2018 ISO 21360-1:2020
IEC 61000-3-3+A1:2013 ISO 21360-4:2018
IEC 61010-1+A1:2010 IEC 63000:2018
The manufacturer's authorized representative in the United Kingdom and the authorized
agent for compiling the technical documentation is Pfeiffer Vacuum Ltd, 16 Plover Close, In-
terchange Park, MK169PS Newport Pagnell.
Signature:
Pfeiffer Vacuum GmbH
Berliner Straße 43
35614 Asslar
Germany
(Daniel Sälzer) Aßlar, 2022-11-14
Managing Director
ed. P - Date 2308 - P/N:PT0208BEN
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OPERATING INSTRUCTIONS EN

Translation of the Original

4 Transportation and Storage 19

9 Recycling and disposal 44

11 Service solutions by Pfeiffer Vacuum 47

12 Spare parts HiPace 80 49

14 Technical data and dimensions 52

1 About this manual

1.1.1 Applicable documents

1.2 Target group

Sequence of multi-part action steps

Qr code is linked to further online information.

1.3.3 Stickers on the product

n, f 90000 1/min, 1500 Hz C

Mass _ _._ kg Made in Germany 2023/02

Operating instructions note

1 Operating instructions note 5 Information regarding ground connection

Abbreviation Meaning in this document

1.4 Trademark proof

2.2 Safety instructions

Risks during transport

Risks during installation

Risks during operation

Risks during maintenance and decommissioning

Risks in the event of malfunctions

2.3 Safety precautions

Infringement of conformity due to modifications to the product

General safety precautions when handling the product

2.4 Limits of use of the product

Permissible surrounding magnetic field for air cooling 3.3 mT

Notes on ambient conditions

2.5 Proper use

2.6 Foreseeable improper use

2.7 Personnel qualification

2.7.1 Ensuring personnel qualification

Specialist for electrotechnical work

2.7.2 Personnel qualification for maintenance and repair

Advanced training courses

Adequately trained individuals are:

2.7.3 Advanced training with Pfeiffer Vacuum

3.1.2 Rotor bearing

● High vacuum side: wear-free permanent magnetic bearing

3.2 Identifying the product

3.2.1 Product types

Family Size/model Property, attribute, feature

3.2.2 Product features

3.3 Scope of delivery

4 Transportation and Storage

Safe transport of the product

Storing the turbopump

5.1 Preparatory work

General notes for the installation of vacuum components

5.2 Fastening turbopump to bottom part

Turbopump Mounting plate Thread Quantity Screw in Tightening tor-

5.3 Connecting the high vacuum side

Superstructural parts and fittings on the high vacuum connection

Important information for correct installation

5.3.2 Considering earthquake protection

Fig. 4: Example: Safety connections