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The preamplifier is replaced by a gain GPA, which translates the capacitive variations into a
corresponding voltage signal, which is fed to the third-order single-loop SDM. A M? resistor can be
implemented using high-resistance poly, which gives us a linear resistor independent of the signal
swing across it. Hence to match both the coefficients, an array of BJTs is used in the second branch.
The first read- out interface was integrated with MCM in single package and acoustic tests were
performed on the inte- grated system. Yole Developpement Mems microphone Mems microphone
Naughattyy Poem MEMS Microphone: Market, Applications and Business Trends 2014 2014 Report
by. Figure 3-29b plots SNR and SNDR against the input for SDM, highlighting 80dB dynamic
range. Approximately 10 microphone assemblies were inspected at varying levels. Her vast spectrum
of knowledge and involvement with social domains of human life have enabled me to learn very
important things as a human being, which I would cherish all throughout my life. As mentioned in
the previous section, MCM is approxi- mated as a second-order system, in which the displacement of
the moving membrane is governed by a balance of acoustic, electrostatic and mechanical forces,
along with the inertial forces due to mass of the moving membrane. This low-pass filtering could be
embedded in the SDM that follows the PAMP. The major blocks of the interface are shown in figure
3-1. Table 2-2 lists the SNR and power consumption of some commercial MEMS microphone, along
with a PAMP, to develop a benchmark of the expected performance from the PAMP. The OTA is
loaded with another matching PMOS pair with the same gm to achieve a unity gain at dc. CL
represents the effective load capacitance present at the output of the PAMP. The first thing to
observe is that the distortion starts dominating much earlier than expected, lowering the SNDR from
-20dBFS onwards. Information regarding the design and process are provided in US Patent
Applications. Figure 3-28b shows the frequency response of the PAMP. Page 55. Since the swing at
the input of the source follower reaches around 400mV for 114dB-SPL (10Pa), this resistor causes
signal clipping and therefore causes distortion at the output. The output offsets reduce to 23mV-
25mV as listed in Table 5-7. As many of us have experienced over the day-to-day grind with our
smartphone sidekicks, the microphones they equip are highly susceptible to water, dust, and other
environmental particulates, and once they’ve been damaged there’s little to no hope of them ever
again operating at an acceptable level. For this reason, a CT CMFB circuit, shown in figure 5-17a, is
employed to control the CM output voltage of the low-gm OTA. The benefits of active control, low-
power consumption and small size of optical MEMS aims to feed into the development of
miniaturised quantum optic components and sensors, with particular interest in cold atom
applications and single atom sensing. RF GaN Market: Applications, Players, Technology and
Substrates 2019 report b. Seriously, though, this one qualifies for the “best typical application circuit
of all time” award. The INC or DEC of the shift register depends on the polarity of the mismatch
between the MEMS and dummy branch. These approaches utilize the first CT stage as a PAMP for
the sensor. Spec’ing MEMS microphones has some differences and this article touches upon these
points. The clock input is used to control the delta-sigma modulator that converts the analog signal
from the sensor into a digital Pulse-Density Modulated (PDM) signal. I would also like to express
my gratitude towards Audio Technology group of ADI in Copenhagen and Technical University of
Denmark for accepting me as a guest PhD student. The positive temperature can also be boosted by
ratio between R1 and R2.
The intercon- nect parasitic from the bonding wire and the parasitic from the input device of the
PAMP also contributed to the total parasitic capacitive at the sensing node and is shown as CP,IN. A
dummy-branch with dynamic matching converted the single-ended MCM into a pseudo-differential
sensor to make it compatible with force-feedback. The other accurate model should mimic the
electro-mechanical structure of sensor closely, including Page 35. Bosch Sensortec BMA355 3-Axis
MEMS Accelerometer teardown reverse costing rep. To test bootstrapping, discrete capacitors are
used to emulate the MEMS sensor. Today, smartphones include arrays of MEMS microphones that
are used not only to capture and amplify voice during calls, but also to eliminate ambient noise and
enable far-field audio zoom using beamforming techniques. The values of external capacitors used to
emu- late the MCM are kept close to twice of the actual sensor capacitors listed in table 2-1. About
MEMS Microphone: MEMS stands for Micro-Electro Machanical Systems. As such, a circuit
designer only needs to ensure that the voltage output of the power supply is within the voltage range
called out in the MEMS microphone specifications. An example of such con- figurability is to adapt
hearing aids or mobile phone for different surrounding environments. Andrea Baschirotto MIS
Division, IRST, Department of Electrical Engineering, Fondazione Bruno Kessler, University of
Bicocca, Trento, Italy. The MEMS capacitive microphone is approximated as a second order electro-
mechanical system, whose pressure-sensitive capacitive-variations are dependent on the inter-
electrode gap. It is also possible to identify the direction a particular sound is coming from. Given
the long lifecycles, designers must be able to depend on system components for years or decades,
and in order to reach projected numbers of connected devices, price points for advanced silicon must
be in line with those of a high-volume market. This gain (Kq) can be defined as the ratio between the
output signal (yq) of the quantizer and its input (xq), as expressed in eq. 4-5. (Eq. 4-5) Kq can swing
between zero and infinity. This PAMP performs conversion of the sin- gle-ended MCM input to a
fully-differential output in a more area and power efficient way as compared to interface-I.
Nominally, the gain of the offset control circuit is -6dB, which means that if an offset of 10mV is
dictated externally, 20mV of offset should appear at the output of PAMP. First model should simply
deliver the equivalent capacitive variations with the specified sensitiv- ity. This is due to the fact that
OTAs are required to settle according to one of 1 Refer to the relevant product data-sheets for more
details on the product features Page 28. The noise of the PAMP was also boosted by the same factor;
therefore, SNR remains unaffected. For hearing aids, the size of the overall system and the
integration with digital signal processing are the critical factors. Moreover, having a controllable
gain at the output of the PAMP can relax the design of the SDM by enabling it to use smaller
capacitors for the required KTC noise, consequently, re- ducing the power consumption. These
approaches utilize the first CT stage as a PAMP for the sensor. However, if C0 and CP2 are
comparable, which is typically the case in MCM, the spread in the signal boost is not considerably
large. One of the major issues during this research activity was the unavailability of relevant
specifications on MCM. At the same time, modulation would also affect the noise from the bias
resistor. Since the thermal noise of the resistor has a flat wide- band shape, the shape of the output
noise actually demonstrates the frequency-response of the closed-loop noise-transfer-function in
PAMP. If we assume that a speech detection algorithm requires 10dB between the microphone noise
floor and the input signal level, then a microphone with an SNR of 64dB will be able to detect
sounds down to 40dBPSL. However, the major issues with CT SDMs is the unmatched spread in
resistors and capacitors that are used to implement the loop filters, furthermore, the sensitivity to the
clock jitter becomes a bottleneck. The subsequent chapters of this thesis describe the application of
zero- biased diodes, pseudo-PMOS resistors and utilization of miller effect to achieve the low-
frequency pole using M? resistor.
The mis- match effect due to gm maximization can be larger in weak inversion and input pair is kept
in strong in- version just to avoid that. If applying the paste by hand, extra care should be taken to
align the pads accurately and when lifting the stencil from the board to avoid smudging the solder
paste. The measured noise with 10pF of feedback capacitor flattens around -120dB, which signifies
the dominance of instrumentation noise. However, as the device dimensions of the input PMOS in-
crease, the parasitic capacitance at the sensing node (CP,IN) also increases, decreasing the readout
sensitiv- ity. As mentioned, -140dB is the measurement limit of the instrumentation amplifier,
therefore, even if the SF settles below that, it is not possible to measure it with this setup. I also
acknowledge the support from Giorgio Fontana. However, this does not affect the measured output
noise; therefore, it is most likely the KTC noise of the first sampler. Keywords MEMS Capacitive
Microphone, Silicon Microphone, Condenser Microphone, Low-Noise Preamplifier, Readout
Interface, Sigma-Delta Modulator, Force-Feedback. Page 4. This positive development is due to
Infineon’s long-term experience in MEMS microphone design and high-volume manufacturing,
supporting customers to deliver an unmatched consumer experience. The negative temperature
coefficient is provided by the VBE of the bipolar transistor while the positive temperature
coefficient comes from the difference of the base-emitter voltage of two branches. Figure 1-1b
shows a block-level representation of a typical RI for MCM, partitioned in front-end and backend.
Especially, for the acous- tic testing of the integrated system, a better measurement environment was
needed. The Ayrton shunt or universal shunt eliminates the possibil. The OTA is loaded with another
matching PMOS pair with the same gm to achieve a unity gain at dc. Therefore, the length of the
input PMOS is kept lower while increasing its width to increase the area. For OCC, the input pair
and load will not affect the behavior in case of a failure. This term always contributes to an
attractive force between the electrodes. If adding flexibility to the front-end of the interface is the
main applica- tion goal; to make the system adaptable to different operating conditions, the
multifunction preamplifier is the more suitable approach to employ. However, as noise receives the
same boost due to re-cycling, there is no SNR gain at the output of the bootstrapped PAMP. This
allows improved high frequency immunity for better audio signal processing and increases the
acoustic overload point of 10% Total Harmonic Distortion (THD) to 135 dB SPL. Figure 3-11a and
3-11b show the simulated signal and noise, respectively, at the output of the PAMP for all three
configurations; i.e. no-bootstrapping, single-terminal bootstrapping and two-terminal bootstrapping.
Introduction The SD3526B MEMS Microphones are integrated with specialized Pre-amplification
ASIC to provide high. The stencil thickness should be between 0.1mm to 0.12mm, with the ratio of
the size of the stencil to pad being between 0.8:1 to 0.9:1 to minimize tin bead content. Force-
feedback is not as com- monly employed by MCM as by other MEMS capacitive sensors, such as
accelerometers. The mismatch minimization logic consists of a high-pass filter and a 16-bit shift
register. I would like to thank Fausto Borghetti from FBK-IRST whose timely and frequent helps
with design issues helped me a great deal. The acoustic input is provided through a speaker driven by
Audio Precision instrument under near-field assumptions. Therefore, to build an optimal RI based on
a goal-oriented approach, it is important to understand the relevant sensor characteristics from the
perspective of readout interface. Out of these, condenser microphone is very accurate and smallest
technology. Therefore, it goes without saying that wave soldering is not recommended.
However, as the device dimensions of the input PMOS in- crease, the parasitic capacitance at the
sensing node (CP,IN) also increases, decreasing the readout sensitiv- ity. Hearing aid anatomy
Hearing aid anatomy Bosch Sensortec BMX055 9-Axis MEMS IMU teardown reverse costing
report publis. The Trento mountains and the River Adige have been a huge source of inspiration for
me; I would like to thank Trento and its people for that. Page 6. Out of these, condenser microphone
is very accurate and smallest technology. For this readout interface, i.e. with the application of force-
balancing to the MCM, it is advanta- geous to have the flexibility of controlled PAMP gain, to have
another controlling parameter for the over- all loop-gain. Chat with our engineers to determine what
solutions can work for whatever problem you are trying to solve. I would also like to express my
grati- tude towards the caring personality of Feroz Farazi and his help in proof reading this
dissertation. The sigma-delta modulator converts the analog output of the preamplifier into an
oversampled digital bitstream. The backend digital signal processing is normally more efficient and
flexible than the analog front-end signal processing and the future CMOS technologies are optimized
for digital design; however, some configura- bility in the front-end can make the overall system more
flexible and efficient. Figure 1-1a shows a typical scheme to readout the capacitive variations in
MCM. For typical differential capacitive MEMS analog microphones, dual grids can be used and
provide improved noise immunity over single ended inputs. Unfortunately, due to the unavailability
of MCM sensor, the effect of the force-feedback could not be tested on a MCM. The performance
pointers (such as SNR) for acoustic systems are typically specified for 1Pa and 1kHz signal. To avoid
artifacts due to sound reflections, several measurements are performed by changing the location of
MCM in front of the speaker, which are subsequently averaged to achieve the final frequency
response. Therefore, due to this bias charge, although ?V and ?C have an inverse relation, the
resulting voltage- source based model remains linear but 1800 out-of-phase. When the third-order
SDM is placed in front of the sensor, we can see that with the FFB loop, the quantization noise
shaping is slightly different from third-order shaping from 10kHz to 20kHz. However, most of this
current goes to the global current biases that are placed inside the chip to scale-down this current to
the required level for the PAMP, where the actual PAMP core consumes 50uA- 60uA of total
current. A telescopic OTA, shown in figure 3-14a, achieves a differential- swing of 2V for a power
supply of 1.8V. The current-sources are allocated an overdrive of 200mV, while cascodes operate
with 100mV of overdrive. This can be explained by highlighting the fact that the charge redistribu-
tion due to CM is residing over a bias charge, which is orders-of-magnitude larger than charge
induced by CM. Pete Loeppert, Vice President of research and development presents his team’s
approach to MEMS design. Thus, the designed SDM does not have any limit cycle in the audio band
for acoustic inputs as large as 10Pa (114dB-SPL). MEMS microphone Patent Infringement April
2015 report published by Yole Devel. Figure 4-6 zooms into PSD of the output to highlight the
behaviour of signal harmonics for three different values of KFB (0.5,1 and 2). The following text dis-
cusses these results in detail. Page 66. The negative temperature coefficient is provided by the VBE
of the bipolar transistor while the positive temperature coefficient comes from the difference of the
base-emitter voltage of two branches. Digital technology enables greater audio performance by
taking advantage of inherently higher RF and electromagnetic interference (EMI) immunity, as
illustrated in figure 1. The clock input is used to control the delta-sigma modulator that converts the
analog signal from the sensor into a digital Pulse-Density Modulated (PDM) signal. The
demonstrated third-order single-loop single-bit SDM suffered from flicker noise of OTA in the first
integrator since the SDM does not employ CDS or CHS approaches to minimize offset and flicker
noise. The cascaded topology has several advantages over single-loop topol- ogy, which includes
better stability and higher resolution. The following text presents the criteria on which spare devices
were added. Eventually, it would be more efficient to combine the biasing and the offset-control for
the second-stage of the PAMP through a feedback loop, which would ultimately improve the noise
and area of the PAMP.
I am also very much grateful to Syed Talat Ali whose passionate care for others have always been
impressive for me; I sincerely wish him success in all his current and future endeavours. The achieved
SNDR at 1Pa is 53dB and 59dBA where the signal peak is at -40dB for an input signal of 10mVp,
which represents equivalent voltage swing for a pressure of 1Pa. The other terms, for both odd and
even harmonics, increase or decrease depending on the polarity of FFB pulse, and are a multiple of
Vbias and Vfb. Typical high performance microphones currently have an SNR in the range of 64dB
to 68dB. At the same time, this extra resistor also makes the sensor operate in a charge-controlled
manner, reducing the risk of dynamic pull-in for large low-frequency signals. The OTA uses a
switched-capacitor common-mode feedback (CMFB) circuit since it is compatible with the inherent
switched nature of the SDM and it does not incur swing and stability problems which arise in a CT-
CMFB. In CMOS, the ratio between two similar caps can be controlled accurately, implying that the
NTF and STF of DT SDMs are well-controlled. This allows improved high frequency immunity for
better audio signal processing and increases the acoustic overload point of 10% Total Harmonic
Distortion (THD) to 135 dB SPL. Her vast spectrum of knowledge and involvement with social
domains of human life have enabled me to learn very important things as a human being, which I
would cherish all throughout my life. The first interface presents a bootstrapped preamplifier and a
third-order sigma-delta modulator (SDM) for analog-to-digital conversion. While there were another
dozen other early developers of MEMS microphones, most did not survive to maturation or were
acquired due to the challenges this technology presented as well as the lack of staying power of the
venture capital investment behind many of these efforts. Both of these biases can be adjusted by
adding extra current to the stacked bias generation branch. For OCC, the input pair and load will not
affect the behavior in case of a failure. Consequently, the root locus of the closed-loop system is
computed as a function of the feedback gain KFB. In this article, we share some of our experiences
with these parts and provide some advice to prevent damaging these delicate devices. Interdigitated
Input Pair and Load Interdigitated PMOS Current Sources Interdigitated NMOS Current Sources
Biases Figure 5-19: Layout of the OCC 5.3.4 Adding Spare Devices as a Fail-Safe Mechanism Some
spare devices are added in the PAMP core as a fail-safe mechanism. Second, it relaxed the required
gain factor at the input of the subsequent sigma-delta modulator, which reduced power consumption.
The differential offset controlling signal is generated by a semi-ideal differ- ence amplifier.
Moreover, CT modulators inherently offer anti-aliasing filter function since there is no sampling of
the signal at the input. This necessitates the development of two different models for the MCM. The
material on this site may not be reproduced, distributed, transmitted, cached or otherwise used,
except with the prior written permission of WTWH Media. This means, that there is no dc feedback
in the PAMP in this case. The carbon- microphones developed in 1878 were the essential ingredient
of the early telephone systems. Ribbon- microphones were invented in 1942 for radio-broadcasting.
This reduction in SNDR can be attributed mainly to the reduced sensitivity and higher thermal noise
floor shown by the MCM sensor. The other contribution directly at the output is not common-mode
and thus affects the output. For this reason, Infineon has full ownership of performance, quality, and
technology innovation of its products. If adding flexibility to the front-end of the interface is the
main applica- tion goal; to make the system adaptable to different operating conditions, the
multifunction preamplifier is the more suitable approach to employ. ASICs with SNR greater than
64dB are expected today, complementing advances achieved by MEMS engineers to optimise the
characteristics of the transducer. Mems and sensors packaging technology and trends presentation
held by Amandin. The resulting loss in the gain of the control loop, which should ideally have a gain
of unity, is compensated by the difference-amplifier.
Furthermore, for higher acoustic in- puts, the mechanical system could be stretch beyond its optimal
range of mechanical operation and sec- ondary issues, such as membrane bending, may arise. As
such, a circuit designer only needs to ensure that the voltage output of the power supply is within the
voltage range called out in the MEMS microphone specifications. MCM, the reference microphone
and the speaker are placed inside a wooden box, which is internally matted with cotton to minimize
reflections of sound-waves. Bosch Sensortec BMA355 3-Axis MEMS Accelerometer teardown
reverse costing rep. It can be seen that al- tering bias current does not have much impact on the
output since the noise is dominated either by the thermal noise of bias resistor or by the flicker noise
of the OTA current sources. Therefore, this paves the way of application of a PDM output (such as
the output of a sigma-delta modulator) directly as a force-feedback to the MEMS and it is termed as
digital force-feedback. One reason of increased distortion in the measured results could be due to
the fact that the bias voltages of the OTA cascade devices are higher than expected and are limiting
the swing. Similar approach can be extended to the MCM parasitics, as briefly shown in figure 2-7a
and is analyzed in detail in chapter 3. Hybrid sigma-delta modulator ap- proaches, which employ
both continuous-time and discrete-time loop filters, are also very interesting prospects for MCM
readout interface. A conceptual representation of DT and CT SDMs is shown in figure 2-8.
Apparently, every other MEMS microphone uses a ceramic transducer. The OTA uses a switched-
capacitor common-mode feedback (CMFB) circuit since it is compatible with the inherent switched
nature of the SDM and it does not incur swing and stability problems which arise in a CT- CMFB.
In this dissertation, the characteristics of the IRST MEMS microphone, listed in table 2-1, are used
as one of the main driving specifications for the readout interface design and are re- ferred later in
the text. Simply put, this scheme turns the single-ended MCM into a pseudo-differential MCM. Page
79. And last but not the least; I would like to thank Prof. Audio surely know much more than I do
about the current state of. Therefore, the length of the input PMOS is kept lower while increasing its
width to increase the area. On the root locus there are four points, symmetric two by two, where it
goes out of the unit circle. It typically consists of two parts situated side by side; the ASIC chip and
the MEMS acoustic sensor mounted on a PCB board, which is then enclosed within a metal or
plastic casing. The first readout interface consisted of a preamplifier, a sigma-delta modulator,
integrated biasing and digital control. Consequently, by controlling the value of this resistor or the
feedback capacitor, ?P can be pushed up or down, thus implementing the re- quired high-pass
functionality for low-frequency hum. This is done intentionally to utilize the large size of the
collector to implement a large diode utilizing smaller devices. The flicker noise is the dominant noise
as expected form the simulations, hence A-weighting achieves a 10dB improvement in SNDR. The
THD is below 0.1% so the preamplifier for 1Pa does not cause considerable distortion. Therefore, for
larger signals the resis- tance is smaller and causes signal clipping and distortion. Although most
microphones have omnidirectional sensitivity, some applications can benefit from increased
sensitivity in a particular direction or reduced sensitivity in others; for example to improve audio
quality and intelligibility in situations such as audioconferencing or in-car calling. Front-end of the
RI usually employs a preamplifier, feeding the backend which subsequently converts the analog
signal into a digital representation. The I2S digital MEMS (DMM-4026-B-I2S-R) microphone also
offers the ability to set up microphone arrays by changing the WCLK Hold Time. However, if C0 and
CP2 are comparable, which is typically the case in MCM, the spread in the signal boost is not
considerably large. If the SDM output is less busy, i.e. less frequent zero-one transitions, the FFB
pulse applied to the backplate would slowly discharge through this 200kOhm resistor. Figure 3-30b
compares the results of 3-30a with the expected results.
Such adaptability can also be useful for arrays of MCM sensors to partition the audio band in several
sub-bands of enhanced sensitivity and subsequently regenerating the complete band through
backend post-processing. The second-stage can be used to provide a digitally-controllable gain-factor
to adjust the output of PAMP within the desired area of the subsequent SDM’s dynamic range.
Isolation groves fabricated using a diamond-saw cutting tool. On bottom-firing microphones, a
solder joint also acts as the acoustic seal between the microphone sound hole and the PCB. To free
the board, a bending action is applied to break the tabs. Therefore, the output of a PAMP employing
CDS is not always available for pick-up by the subsequent components of the interface. Although
screening, or binning, is one potential solution, microphone designers are looking for ASICs to
provide adjustable gain that enables tuning out of process-related variations in MEMS fabrication.
The equivalent input for electrical measurements is also 1Pa. This interface consists of a Preamplifier
(PAMP), a Sigma-Delta Modulator (SDM), integrated biasing and digital control, converting the
capacitive variations of MCM into an over-sampled digital bitstream. An adhesive seal located
between the bottom plate and package side walls. The third readout interface focused on the
development of a multi-function two-stage chopper- stabilized preamplifier for MCM. Second, to
have an accurate estimate of the noise and distortion of the whole system along with the sensor. The
biasing component could either be a resistor or a switch periodically charging the node to a fixed dc
value. The targeted power-supply voltage is 1.8V. The circuit-level simulations of the system are per-
formed using Eldo in Cadence design environment. 3.3.1 The Preamplifier The constant-charge
voltage-readout scheme based on two-terminal bootstrapped topology using a source-follower buffer
is shown in figure 3-10 and its CMOS design details are discussed in the follow- ing text. Figure 3-
12 shows the spread of gain in SF for different process variations and mismatch. Second, the
spurious charge-injection from the switches around the MEMS sensor can deteriorate the linearity of
the readout. MEMS microphones, however, have been mostly based on a single-ended structure, due
to the complications in processing a differential vertical out-of-plane structure. Nevertheless, the
unavailability of the MCM sensor for the readout interface with force-feedback ham- pered the
complete characterization of the interface and digital force-balancing for MCM. Where all the
mistakes are solely mine, the credit of any personal well-being that I pos- sess is due to my parents’
teachings and training. High-End Inertial Sensors for Defense, Aerospace and Industrial
Applications. Both the ASIC and MEMS microphone are attached using a soft adhesive. This was
likely done to create a more robust joint. Analog microphones, which essentially contain the MEMS
transducer and companion analog-amplifier IC, are a popular solution for small handheld devices
such as feature phones and entry to mid-level smartphones. The inertial components such as mass are
replaced by inductors in the lumped model. The package might be plastic or contained in a metal
can. Another observation is that the SNDR starts decreasing for higher-inputs before the expected
overload of the SDM. The chopping takes place at 200kHz, therefore, the total power of the KTC
noise is spread in a bandwidth of 200kHz. This can be attributed to the flicker noise of the first OTA
that is used to implement the first integrator in the SDM. I would also like to express my gratitude
towards Audio Technology group of ADI in Copenhagen and Technical University of Denmark for
accepting me as a guest PhD student. If it is on the bottom, then the circuit board it is flow-soldered
to must be thin (perhaps a flexible PCB) and have a hole that aligns to the MEMS mic port.