P R O D U C T D ATA

FEI Quanta 200 FEG

The most versatile high resolution
low-vacuum FEG SEM with
extended low-vacuum capabilities
for the really challenging samples
and dynamic experiments

Any sample,
all data, anywhere Technologies, materials and samples are changing faster
than ever before, and so are the requirements of today’s
analytical laboratory. Analytical tools need to accommodate
materials with very different properties while collecting
more analytical data in less time. The demand for non-
destructive analytical techniques and functionality is
increasing.

The QuantaTM series from FEI is the advanced, flexible

solution for current and future diagnostics applications.
• Increase your imaging capabilities with high resolution Featuring three imaging modes – high-vacuum, low-
high- , low- and extended low-vacuum (ESEM) vacuum and ESEMTM it accommodates the widest range
secondary electron imaging of samples of any SEM system. It is engineered to provide
maximum data – imaging and microanalysis – from all
• Minimize switching between different detectors, have specimens, with or without preparation.
all the information from the different detectors instantly
available on one single screen in Quanta’s four The new 2nd generation of Quanta’s feature improved
Quadrant user interface image resolution and contrast thanks to a new imaging
engine that also accommodates remote control.
• Minimize the amount of sample preparation, low-
and ESEM-vacuum capability enables charge free Better data. More flexibility. Higher efficiency.
imaging and analysis of non-conductive specimens The Quanta series delivers more value for your investment.
and/or hydrated specimens

• Increase your analysis capabilities by performing in-situ

dynamic experiments and live record them on video

• Increase your analytical capabilities by enabling EDS

and EBSD analysis on non-conductive samples in low-
vacuum thanks to Quanta’s patented through the lens
pumping

• Increase your flexibility and operate the microscope

from any computer by using Quanta’s remote capability
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Essential specs Chamber vacuum Support materials

• High-vacuum: < 6e-4 Pa • On-line help
Electron optics • Low-vacuum: 10 to 130 Pa • Quanta FEG getting started training
• High-resolution field emission- • ESEM-vacuum: 10 to 4000 Pa CD
SEM column optimized for high
brightness/high current Vacuum system System options
• 45° objective lens geometry with • 1x 240 l/s TMP, 2x PVP • Support PC (incl. 2nd 19-inch LCD
through-the-lens differential pumping • Patented through-the-lens differential monitor and DVD R/W)
and heated objective apertures pumping • Multi-functional control panel
• Beam gas path length: 10 or 2 mm • Image archive software
Resolution • SW controlled Peltier cooled
• High-vacuum Chamber specimen stage
- 0.8nm at 30kV (STEM)* • 284mm left to right • SW controlled WETSTEM system
- 1.2nm at 30kV (SE) • 10mm analytical WD • SW controlled 1000°C heating stage
- 2.5nm at 30kV (BSE) • 8 ports • SW controlled 1500°C heating stage
- 3.0nm at 1kV (SE) • EDX take-off angle: 35° • Remote control SW
• Low-vacuum • Video printer
- 1.5nm at 30kV (SE) 4-axis motorized stage • Specimen holder kit
- 2.5nm at 30kV (BSE) • Eucentric goniometer stage • EDS
- 3.0nm at 3kV (SE) • X,Y = 50mm • WDS
• Extended vacuum mode (ESEM) • Z = 50mm (25mm motorised) • EBSD
- 1.5nm at 30kV (SE) • T = -15° - to +75° (manual) • e-Beam litho package
• Accelerating voltage: 200V – 30kV • R = 360° continuous • CL system
• Probe current: up to 100nA – • Repeatability: 2µm
continuously adjustable Installation requirements
System control • Power: voltage 230V (-6%, +10%),
Detectors • 32-bit graphical user interface with Frequency: 50 or 60 Hz (+/- 1%)
• Everhardt-Thornley SED Windows XP, keyboard, optical mouse • Power consumption: < 3.0kVA for
• Low-vacuum SED (LFD) • Image display: 19-inch LCD, SVGA basic microscope
• Gaseous SED (GSED) 1280 x 1024 • Environment: temperature 20°C (+/-
• IR-CCD • Single frame or 4-quadrant image 3°C), relative humidity below 80% RH
• Solid-state BSED display • Stray AC magnetic fields
• Gaseous analytical BSED (GAD)* • 4-quadrant live < 40nT asynchronous
• STEM* < 300nT synchronous
• Scintillator BSED/CLD* Image processor • Acoustics: < 60 dBC
• Gaseous BSED* • Up to 4096 x 3536 pixels • Compressed air 4-6 bar – clean,
* optional • File type: TIFF (8- or 16-bit), BMP dry and oil-free
or JPEG • Water cooling is only required if room
is not meeting specification according
Standard utilities pre-install instructions
• Digital video recording (.avi) • Door width: 90cm
• SW temperature control • Weight: column console 530kg
• Image histogram and measurement • Weight: electrical console 139kg
software

FEI Company European Sales

World Headquarters and Tel: +31 40 23 56 110
North American Sales Fax: +31 40 23 56 612
5350 NE Dawson Creek Drive
Hillsboro, OR 97124-5793 USA Asia-Pacific Sales
Tel: +1 503 726 7500 Tel: +65 6272 0050
Fax: +1 503 726 7509 Fax: +65 6272 0034

Japan Sales
Minimal floorplan e-mail: [email protected] Tel: +81-3-3740-0970
www.fei.com Fax: +81-3-3740-0975

©2006. We are constantly improving the performance of our products, SE032-DS0111 07/06
so all specifications are subject to change without notice.
The FEI logo and Quanta are trademarks of FEI Company.
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