As 103090 LS-9000 Um 15623GB WW GB 2110 2

MLS19GB
High-speed, High-precision
1 Introduction
Micrometer Measuring Instrument
Installation and
2 Connection
3 Basic Operations
4
User's Manual
Easy Setting Guide
Read this manual before use.

After you read this manual, keep it in a safe place for future reference. 5 Program Setting
Checking the
6 Measurement Results
7 Environment Setting
Communication Interface
8 and I/O Terminals
9 RS-232C
10 Timing Chart
11 Specifications
Error Messages,
A
Troubleshooting
Introduction
Introduction
Read this user’s manual before use.

After you read this manual, keep it in a safe place for future reference.
Symbols
In this manual, the following symbols alert you to important messages.
Be sure to read the messages.
It indicates a hazardous situation which, if not avoided, will result in death or serious
injury.
It indicates a hazardous situation which, if not avoided, could result in death or serious
injury.
It indicates a hazardous situation which, if not avoided, could result in minor or moderate
injury.
It indicates a situation which, if not avoided, could result in product damage as well as
property damage.
It indicates cautions and limitations that must be followed during operation.
It indicates additional information on proper operation.
It indicates tips for better understanding or useful information.
It indicates the reference pages and items in this manual.
Precautions
(1) Unauthorized reproduction of this manual in whole or part is prohibited.
(2) The contents of this manual may be changed for improvements without prior notice.
(3) An utmost effort has been made to ensure the contents of this manual are as complete as possible. If there
are any mistakes or questions, please contact a KEYENCE office listed in the back of the manual.
(4) Regardless of item (3), KEYENCE will not be liable for any effect resulting from the use of this unit.
(5) Any manuals with missing pages or other paging faults will be replaced.
Trademarks
yyThe company names and product names used in this manual are registered trademarks or the trademarks of their
respective companies.
yyMicrosoft, Windows, and Windows Vista are registered trademarks of Microsoft Corporation in the United States and
other countries.
yyAdobe, Adobe logo, Reader are trademarks or registered trademarks of Adobe Systems Incorporated in the United
States and other countries.
yyOther proper nouns such as product names used in this manual are registered trademarks or the trademarks of their
respective companies. This manual does not use TM or ® mark for the trademarks or registered trademarks in the
text.
Safety Information
Safety Information
General Precautions
yy Do not use this product for the purpose to protect a human body or part of a human
body.
yy This product is not intended for use as an explosion-proof product. Do not use this
product in a hazardous location and/or potentially explosive atmosphere.
yy At startup and during operation, be sure to monitor the functions and performance of
the LS-9000 Series.
yy We recommend that you take substantial safety measures to avoid any damage in the
event of a problem occurring.
yy Do not allow the temperature to change sharply around the LS-9000 Series, including
the accessories. Otherwise, condensation may lead to malfunction.
yy Do not attempt to open or modify the LS-9000 Series or use it in any way other than as
described in the specifications. If the LS-9000 Series is modified or used other than as
described, the warranty will be voided.
yy When the LS-9000 Series is used in combination with other devices, functions
and performance may be degraded, depending on the operating conditions and
surrounding environment.
15623GB 1
Important Instructions
Observe the following cautions to prevent malfunction of the LS-9000 series

and to ensure that it is used properly.
Precautions for use
yy Do not use the controller (LS-9501/LS-9501P) at a voltage other than 24 V DC. Failure to
do so may cause fire, electric shock, or a product damage.
yy Do not disassemble or modify this instrument. Doing so may cause fire and electric
shock.
yy The power of this instrument and peripherals connected to this instrument must be
turned off when the head cable is plugged or unplugged. Failure to do so may cause
product damage.
yy Do not connect and disconnect the expansion unit and the controller while the power is
on. Failure to do so may cause product damage.
yy Do not turn off this instrument while this instrument is writing data to memory such as
when settings are being modified. Failure to do so may cause loss of a part of or all of
the setting data.
yy Do not block the vent holes on the instrument. Increase of internal temperature could
cause failure.
yy The USB connector and a part of the input/output terminals are not insulated from the
DC24V (-) terminal. Exercise caution not to produce a potential difference between
the non-insulated terminals due to a positive grounding environment or a potential
difference between the equipment. Otherwise, it may cause a malfunction in the
LS‑9000 Series or a malfunction in the connected computer or other external device.
“Insulated condition between each I/O circuit” (page 8-33)
yy You are advised to back up the settings in LS-Navigator2 to prevent data loss in the
event of system trouble or failure.
yy A change in the ambient temperature may cause the measurement to fluctuate. Be sure
to keep the temperature stabilized. When the ambient temperature changes by 10 °C, it
takes 60 minutes for the distribution of internal temperature to equalize.
yy Wait approximately 30 minutes after the power is turned on before using the LS-9000
Series. Otherwise, the measured value may gradually fluctuate because the circuit is
not immediately stable after the power is turned on.
yy Do not operate this device near lighting fixtures. If the unit must be used in such a
location, install a light shielding board or similar device so that the light will not affect
the measurement.
yy When the target is vibrating, the measured value may fluctuate. In this case, increase
the averaging of the profiles and the measurement averaging to achieve a more
accurate value.
yy The measured value may fluctuate due to the slow fluctuation in the air. In this case,
take the following countermeasures.
yy Completely cover the head with a cover
yy Stir the air between the head and the workpiece with a fan.
Precautions in Emergency
Turn the power off immediately in the following cases. Using the unit in an abnormal
condition could cause fire, electric shock, or accident.
Contact the KEYENCE office for repair.
yy If liquid, including water or chemicals, or debris enters the unit.
yy If the unit is dropped or the case is damaged.
yy If abnormal smoke or odor is present.
2 - LS-9000 Series User’s Manual -

Precautions on installation
yy To use this instrument correctly and safely, avoid installing it in the following locations.
Installation in such locations may cause malfunction.
yy Locations that are humid, dusty or poorly ventilated
yy Locations where the temperature is high such as those exposed to direct sunlight
yy Locations where there are flammable or corrosive gases
yy Locations where the unit may be subject to vibration or impact
yy Locations where water, oil, or chemicals may splash onto the instrument
yy Locations that are prone to static electricity
yy Installing the instrument in the vicinity of an electrical noise source such as a power
source and high-voltage line could cause malfunction and instrument damage due
to noise. Take preventive actions such as using noise filters, separating cables, and
insulating the controller and the head. Use single-conductor shielded cable for the
analog output cable.
In the following cases, foreign matter such as dust and debris or water and oil could
cause differences in the measurement values.
yy Adhesion on the protective glass: Blow off the dirt on the cover glass with clean air. If
dirt persists, wipe the glass surface gently using a soft cloth moistened with alcohol.
yy Adhesion on the surface of the measuring target: Blow the dirt off with clean air or wipe
it off.
yy Intrusion of floating or sprinkled dust or dirt into the light-axis range: In this case, take
corrective action with a protective cover or air purge.
Precautions in storing
Do not wipe the instrument with a wet wipe, benzene, or thinner. Doing so could change
the color or shape of the instrument. If the instrument has a large amount of dirt on it,
wipe it off with a cloth moistened with a mild detergent, then wipe with a soft dry cloth.
- LS-9000 Series User’s Manual - 3

Precautions on Regulations and Standards
CE Marking
Keyence Corporation has confirmed that this product complies with the essential requirements of the applicable
EC Directive, based on the following specifications. Be sure to consider the following specifications when using
this product in the Member States of European Union.
zz
EMC Directive (2004/108/EC)
yy Applicable standard EMI: EN61326-1, Class A
EMS: EN61326-1
yy All cables connected to the controller terminal side and BCD unit cannot exceed 30m in length.
yy Wrap more than 1 TURN of the following ferrite core to the head cable connected to the head expansion unit
within 200 mm from the head connector of the head expansion unit.
Model ZCAT2035-0930A-BK (Manufactured by TDK)
Remarks: These specifications do not give any guarantee that the end-product with this product incorporated complies
with the essential requirements of EMC Directive. The manufacturer of the end-product is solely responsible for the
compliance on the end-product itself according to EMC Directive.

Software product license agreement 3. Restrictions.

3.1. This Software may not be modified by the
NOTICE TO USER: PLEASE READ THIS User in any form except from the installation
SOFTWARE LICENSE AGREEMENT (“”THIS of updates or new functions provided by
AGREEMENT””) CAREFULLY. BY USING ALL OR KEYENCE.
ANY PORTION OF THE LS-Navigator2 (“”THIS 3.2. The reverse engineering, decompiling or
SOFTWARE””), YOU ARE AGREEING TO BE disassembling of this Software by any persons
BOUND BY ALL THE TERMS AND CONDITONS are not permitted.
OF THIS AGREEMENT. IF YOU DO NOT AGREE 3.3. Without the prior permission of KEYENCE, the
TO THE TERMS OF THIS AGREEMENT, DO NOT User may not reproduce or copy this Software
USE THIS SOFTWARE. for selling or distributing to a third party
If you install, copy and or use all or a portion of
this Software on a device or computer, you will 4. Intellectual Property Rights.
be deemed to have agreed to all the terms of this Except as stated herein, KEYENCE reserves all
Agreement, and this Agreement will come into effect. rights, titles and interests in this Software, along with
all associated copyrights, trademarks, and other
1. Definitions intellectual property rights.
1.1 “Use” or “using” refers to the accessing, installing,
downloading, copying, operating and or otherwise 5. Disclaimer.
benefiting from the utilization of this Software. This Software is licensed to the User “AS IS” and
1.2 “This Software” denotes the software and without any warranty of any kind. In no event does
all associated documentation provided by KEYENCE or its suppliers accept or assume any
KEYENCE. liability for any damages, claims, costs or profit loss
1.3 “User” or “User’s” infers the company or as a result of operating this Software.
persons who have had the license to use this
Software granted to them by KEYENCE. 6. Termination.
6.1 Under this Agreement the User’s license will
2. Grant of License. automatically terminate if this Software and
2.1 In compliance with all of the terms and any associated copies of this Software are
conditions of this Agreement, KEYENCE grants destroyed or voluntarily returned to KEYENCE.
the nonexclusive and non-transferable license 6.2 Under this Agreement the User’s license
to install and use this Software. will terminate immediately and automatically
2.2 The granting of the license permits the single without any notice from KEYENCE if there is
reproduction and or copying of this Software for any failure to comply with any of the terms and
the User’s backing up or archiving purposes. conditions of this Agreement. Upon termination,
2.3. This Software maybe installed on multiple the using of this Software shall cease, and all
devices and computers for the User’s benefit and copies (full or partial) of this Software should be
use. destroyed or returned to KEYENCE.
2.4. The transfer of this Software via devices and 6.3 Compensation will be sought by KEYENCE
computers with this Software installed on them should any violation or breach of this
by the User to third parties is permitted. In Agreement result in any incurred costs or lost
such a case, the third party who receives this profit to KEYENCE.
Software may continue to use this Software in
the same manner as the previous User. 7. Governing Law.
2.5. With the transfer of this Software to a third 7.1 This Agreement will be governed by and
party, the original User may install this Software construed in accordance with the substantive
to additional devices and computers for further laws of Japan.
use as required. In such a case, the third party 7.2 If any part of this Agreement is found void and
who receives this Software may continue to unenforceable, the rest of this Agreement will
use this Software in the same manner as the remain intact, valid and enforceable according
previous User. to the associated terms and conditions.
2.6. The User maintains and guarantees that any
thirdparties (as detailed in the previous two
sections) who receive and use this Software
agree to this license Agreement and comply
with all the terms and conditions.

MEMO

Structure of the Manual
Structure of the Manual
1
This chapter describes the packaged items, optional parts, system
Introduction configuration, and name and function of each part.
1
2 Installation and
Connection
This chapter describes the installation and connection of each instrument.
2
3
This chapter describes the basic operations of LS-Navigator 2 and the
Basic Operations touch panel monitor.
3
4
This chapter describes the available measurements and their settings for
Easy Setting Guide
4
different measurement purposes.
5
This chapter describes the contents and setup procedure for the program
Program Setting
5
settings.
6 Checking the This chapter describes the setup screen and operation procedure of
6
Measurement Results functions available during the measurement.
This chapter describes the details and setting procedures for the PC
7 Environment Setting communication configuration, device information setting, and other

options.
7
This chapter describes the communication specifications of the
8 Communication Interface
and I/O Terminals
available interface (Ethernet, USB, and RS-232C) and the input/output
specifications.
8
9 RS-232C This chapter describes the RS-232C communication commands.
9
10 Timing Chart This chapter describes all kinds of input and output timing charts.
10
11 11
This chapter describes the specifications, characteristics, and dimensions
Specifications of the LS-9000 Series.
A Appendix
A

Contents
Contents
Introduction Head expansion unit............................................. 1-14

Symbols BCD unit............................................................... 1-15
Precautions EtherNet/IP communication unit........................... 1-16
Trademarks PROFINET communication unit............................ 1-17
Safety Information.................................................1 Software Installation.........................................1-18
General Precautions.................................................. 1 Required system environment.............................. 1-18
Important Instructions............................................2 Preparation for the Installation.............................. 1-18
Precautions for use.................................................... 2
Hard disk free space..........................................1-18
Precautions in Emergency......................................... 2
Windows environment and installation
destination..........................................................1-18
Precautions on installation......................................... 3
Precautions in storing................................................ 3
Help file..............................................................1-18
Installing LS-Navigator2........................................ 1-19
Precautions on Regulations and Standards..........4 Uninstalling LS-Navigator..................................... 1-20
CE Marking................................................................ 4
Software product license agreement......................... 5
Structure of the Manual.........................................7 Chapter 2 Installation and Connection
Mounting the Head.............................................2-2
Chapter 1 Introduction Installation cautions................................................ 2-2
Suitable mounting for specific environments.......... 2-2
Checking the Package.......................................1-2
If a light source is present near the head.............2-2
Controller................................................................ 1-2 Mounting method.................................................... 2-3

LS-9501/LS-9501P...............................................1-2

Mounting with the TR base...................................2-3
Head....................................................................... 1-2
Mounting without the TR base..............................2-3

LS-9006/LS-9006M..............................................1-2

Mounting LS-9006D/LS-9030D............................2-4

LS-9030/LS-9030M..............................................1-2
Using the Air Purge Unit.....................................2-5

LS-9120M.............................................................1-2
How to use the air purge unit.................................. 2-5

LS-9006D.............................................................1-3

LS-9006/LS-9006M..............................................2-5

LS-9030D.............................................................1-3

LS-9030/LS-9030M..............................................2-6
HMI Display panel................................................... 1-3

LS-9120M.............................................................2-7

LS-D1000.............................................................1-3

LS-9006D.............................................................2-8
Head expansion unit............................................... 1-3

LS-9030D.............................................................2-9

LS-HA100.............................................................1-3
Using the Pulley Jig..........................................2-10
Expansion unit........................................................ 1-4
For LS-9030/LS-9030M........................................ 2-10

CB-BD100............................................................1-4
For LS-9006/LS-9006M........................................ 2-10

CB-EP100............................................................1-4
For LS-9006D....................................................... 2-11

CB-PN100............................................................1-4
For LS-9030D....................................................... 2-11
Head cable.............................................................. 1-4
40m connecting unit for cable extension................ 1-4 Replacing the Glass of the Transmitter /
PC software LS-H2................................................. 1-4 Receiver...........................................................2-12
Option list................................................................ 1-5 For LS-9030/LS-9030M........................................ 2-12

Extension cable between the transmitter and For LS-9006/LS-9006M........................................ 2-12
receiver................................................................1-5 For LS-9120M....................................................... 2-13

Display panel cable..............................................1-5 Attaching the Protective Sheet.........................2-14

Target holder pulley..............................................1-5 How to attach the protective sheet....................... 2-14

Display panel stand..............................................1-5
Mounting the Controller....................................2-15

Display panel support...........................................1-5
Installation cautions.............................................. 2-15

Panel switch.........................................................1-6
Mounting the controller to the DIN rail.................. 2-16

24 V DC power supply.........................................1-6
Mounting to the bottom panel............................... 2-16

RS-232C cable (2.5 m, straight)...........................1-6

RS-232C conversion adapter (9-pin, female).......1-6 Mounting the Panel..........................................2-17

USB cable (2 m)...................................................1-6 Using the Display Panel Stand.........................2-18

Ethernet cable......................................................1-6 Setting up the unit vertically.................................. 2-18

Air purge unit........................................................1-7 Setting up the unit horizontally.............................. 2-18

Replacement glass unit........................................1-7 Using the switches (OP-87611)............................ 2-19

Protective sheet...................................................1-7 Using the Display Panel Support......................2-20

I/O extension cable (3m) for BCD unit.................1-7

Common to LS-9006D/LS-9030D......................2-20
System Configuration.........................................1-8 Connecting Various Components.....................2-21
Part Names and Functions.................................1-9 Connecting the transmitter and the receiver of
Controller................................................................ 1-9 the head................................................................ 2-22
Display panel........................................................ 1-10 Connecting the head and the controller................ 2-22
Head..................................................................... 1-11 Using the 40m connecting unit for

LS-9006/LS-9006M............................................ 1-11 cable extension..................................................... 2-23

LS-9030/LS-9030M............................................ 1-11 Connecting the controller and

LS-9120M...........................................................1-12
the expansion unit................................................. 2-24

LS-9006D...........................................................1-13
Connecting the controller and the display panel.... 2-24

LS-9030D...........................................................1-13

Contents
Connecting the controller and the PC................... 2-25

Setting values.....................................................4-10

Connecting using USB.......................................2-25 Pitch Measurement..........................................4-11

Connecting using the Ethernet...........................2-25
Setting values..................................................... 4-11
Connecting the power supply to the controller...... 2-26 Group Determination........................................4-12
How to use the terminal block............................... 2-26
Setting values.....................................................4-12
Statistical Processing.......................................4-13
Chapter 3 Basic Operations
Setting values.....................................................4-13
Basic Operation Flow.........................................3-2

Basic Operations of the Display Panel...............3-3 Chapter 5 Program Setting
Basic Operation of Setting...................................... 3-3 Flow of the Program Setting...............................5-2

Selecting Items.....................................................3-3 If you wish to create new program settings............ 5-2

Entering numeric values.......................................3-3 If you wish to edit existing program settings........... 5-2

Using Shortcuts....................................................3-3
List of Initial Values and Setting Ranges............5-3
Screen transition..................................................... 3-4
Basic settings.......................................................... 5-3
Description of Each Screen.................................... 3-6

Set measure target...............................................5-3

Single OUT Display..............................................3-6

OUT setting..........................................................5-3

Multi-OUT Display................................................3-6
Calibration and Scaling........................................... 5-6

Operation Setting Screen.....................................3-7
Common setting...................................................... 5-7

Program Switching Screen...................................3-8

Edge detection.....................................................5-7

Display Setting Screen.........................................3-8

Interference prevention........................................5-7

Light Intensity Inspection Screen.........................3-9

Sync setting..........................................................5-7

Display OUT Selection Screen.............................3-9

Data storage.........................................................5-7

Position Display Head Selection Screen............3-10

Group calculation.................................................5-8

2D Position Display Setting Screen................... 3-11

I/O terminal setting...............................................5-8

Key Lock Check Screen/Password Entry

Stat process.........................................................5-9
Screen................................................................3-13
Setting a different range and initial value for the

Buzzer Setting Screen.......................................3-14
minimum display unit............................................ 5-10

All Setting Initialization Screen...........................3-14
Different Initial Value for Setting Calibration and
Basic Operations of LS-Navigator2..................3-15
Scaling Points....................................................... 5-14
Startup.................................................................. 3-15
Shutdown.............................................................. 3-16 Combined limitation for analog scaling
Sending/Reading Settings.................................... 3-16 (Ref. val mode) and minimum display unit.......5-15

Sending the settings to the controller.................3-16 Limitation for combined analog scaling

Reading Settings from Controller.......................3-17 (Ref. val mode) and minimum display unit............ 5-15
Saving and Reading Setting File.......................... 3-17 Function Restriction of Each Head Model........5-16
Saving the setting file........................................ 3-17 Function Restriction of Each Head Model............ 5-16
Reading Setting File......................................... 3-18 [Program Setting] Screen.................................5-17

From Startup Menu............................................3-18 [Edit program list] dialog....................................... 5-18

From Main Screen..............................................3-18 Basic Operations of LS-Navigator2...................... 5-18

From [Program setting] Screen..........................3-19 Switching the program setting.......................... 5-18
Displaying Objective Screen................................. 3-19 Changing the program name............................ 5-18
How to Use Help................................................... 3-20 Copying the program setting............................. 5-19
Initializing the program setting.......................... 5-19
Settings on the Display Panel............................... 5-19
Chapter 4 Easy Setting Guide Copying the program setting............................. 5-19
Flow of Measurement.........................................4-2 Initializing the program setting.......................... 5-20
Outer Diameter Measurement (1 head).............4-4 [Basic settings] Tab: Set Measurement

Setting values.......................................................4-4 Target...............................................................5-21
Outer Diameter Measurement (2 Axes)..............4-5 [Set measure target] area..................................... 5-21

Setting values.......................................................4-5 [Target] window................................................. 5-22
Outer Diameter / Width Measurement (Large Set measure target............................................... 5-22
Diameter Measurement by Using 2 Heads).......4-6
Outer diameter...................................................5-22

Setting values.......................................................4-6
Top edge/Bottom edge.......................................5-23

Steps....................................................................4-6
Edge (pitch) number setting...............................5-24
Inner Diameter / Gap Measurement...................4-7
Ultrafine outer DIA..............................................5-25

Setting values.......................................................4-7
Ultrafine gap.......................................................5-25
Outer Diameter / Runout Measurement.............4-8

Tx-Rx Pos..........................................................5-25

Setting values.......................................................4-8
Center position...................................................5-25
Optional setting................................................. 5-26

Steps....................................................................4-8

Tilt correction......................................................5-26
Edge Position Measurement..............................4-9
Delay..................................................................5-26

Setting values.......................................................4-9

Median filter........................................................5-26
Edge Position Measurement Basic Operations of LS-Navigator2...................... 5-27
(Transparent Target).........................................4-10 Adding more measurement targets.................. 5-27

Contents
Editing the measurement target........................ 5-27 Registering the calibration setting..................... 5-55
Deleting any measurement target..................... 5-27 Restoring the calibration setting to its initial
Switching the display method of target............. 5-27 value................................................................. 5-55
Display Panel Setting Method............................... 5-28 Canceling the registration of calibration
Target setting method....................................... 5-28 setting............................................................... 5-55
Setting multiple measurement targets.............. 5-28 Display Panel Setting Method............................... 5-56
Selecting the measuring head.......................... 5-29 Registering the calibration setting..................... 5-56
Setting the measurement method..................... 5-30 [Calibration, Scaling] Tab: Scaling Setting........5-57

Switching the edge/pitch setting.........................5-30 [Scaling] area........................................................ 5-58
Setting up the tilt correction.............................. 5-31 [Scaling] dialog................................................. 5-59
Setting up the delay.......................................... 5-31 Scaling setting...................................................... 5-59
Setting up the median filter............................... 5-31
Set from actual...................................................5-59
[Basic settings] Tab: OUT Setting.....................5-32
Scaling pts..........................................................5-59
[OUT setting] area................................................. 5-32 Basic Operations of LS-Navigator2...................... 5-60
[Edit OUT list] dialog......................................... 5-33 Register the scaling setting............................... 5-60
[Measure mode] window................................... 5-33 Restoring the scaling setting to its initial
[OUT option setting] window............................. 5-34 value................................................................. 5-60
OUT setting........................................................... 5-34 Canceling the registration of scaling setting..... 5-60

Minimum display unit..........................................5-34 Display Panel Setting Method............................... 5-61

Tolerance mode..................................................5-35 Register the scaling setting............................... 5-61

Add OUT............................................................5-35 [Common setting] Tab: Edge Detection............5-62

Delete OUT........................................................5-35 [Edge detection] area............................................ 5-62

Edit OUT list.......................................................5-35
[Calibration of received light intensity] dialog.... 5-63

OUTx..................................................................5-35
Edge detection...................................................... 5-64

OUT name..........................................................5-35

Edge detection threshold...................................5-64

Calculation method............................................5-36

Mask setting.......................................................5-65

Offset..................................................................5-36

Check No. of edges............................................5-65

Measurement mode...........................................5-37

FOCUS monitor..................................................5-66

Filter...................................................................5-38

Acquiring received light waveforms....................5-67

Tolerance............................................................5-39

Calibration of received light intensity..................5-67

OUT option setting.............................................5-40
Basic Operations of LS-Navigator2...................... 5-67
Setting edge detection...................................... 5-67
Setting the minimum display unit...................... 5-41
Acquiring received light waveforms.................. 5-67
Setting the tolerance mode............................... 5-41
Performing calibration of received light
Add OUT setting............................................... 5-41
intensity............................................................. 5-68
Edit OUT setting................................................ 5-42
Display Panel Setting Method............................... 5-68
Delete OUT setting........................................... 5-42
Edge detection setup........................................ 5-68
Copy OUT setting............................................. 5-42
Setting edge detection...................................... 5-69
Modifying the OUT setting name in the edit list
Setting a mask range........................................ 5-69
operation........................................................... 5-42
Setting the Check No. of edges function.......... 5-70
Setting FOCUS monitor.................................... 5-70
OUT setting method.......................................... 5-43
Performing calibration of received light
Setting multiple OUTs....................................... 5-43
intensity............................................................. 5-71
Calculation setting............................................ 5-44
[Common setting] Tab: Interference

No calculation setting.........................................5-44

Combined calculation setting.............................5-45 Prevention........................................................5-72

Average setting..................................................5-45 [Interference prevention] area............................... 5-72
Minimum display unit........................................ 5-45 Interference prevention function........................... 5-73
Outlier exclusion function.................................. 5-46
AB-ON................................................................5-73

Outlier exclusion enable setting.........................5-46
ABC-ON.............................................................5-73
Filter setting...................................................... 5-47 Basic Operations of LS-Navigator2...................... 5-73
Difference function setting................................ 5-47 Display Panel Setting Method............................... 5-73
Abnormal value canceling function setting....... 5-48 [Common setting] Tab: Sync Setting................5-75
Offset setting..................................................... 5-49 [Sync setting] area................................................ 5-75
Measurement mode setting.............................. 5-49 Sync measure target............................................. 5-76
Tolerance setting............................................... 5-50 Basic Operations of LS-Navigator2...................... 5-76

Switching the tolerance mode............................5-50 Display Panel Setting Method............................... 5-76
[Calibration, Scaling] Tab: Calibration [Common setting] Tab: Data Storage...............5-77
Setting..............................................................5-52
In case of storage cycle “x1”..............................5-77
[Calibration setting] area....................................... 5-53
In case of storage cycle “TIMING sync” or
“Storage trg sync”...............................................5-77
[Calibration setting] dialog................................ 5-54
Calibration setting................................................. 5-54 [Data storage] area............................................... 5-78
Data storage......................................................... 5-79

Set from actual...................................................5-54

Calibration pts....................................................5-54
Storage points....................................................5-79
Storage cycle.....................................................5-79

Contents

Storage control method......................................5-79 I/O terminal setting.......................................... 5-101

Storage target OUT............................................5-79 Setting the encoder......................................... 5-101

Fail storage........................................................5-79
Input mode setting............................................5-101
Pulse count preset...........................................5-102
Encoder TIM func setting.................................5-102
Setting data storage.......................................... 5-80
Sampling setting...............................................5-103
Setting storage points....................................... 5-81 I/O setting output............................................ 5-103
Setting storage cycle........................................ 5-81
Strobe time.......................................................5-103
Setting storage control...................................... 5-82
Off-delay time...................................................5-103
Setting storage target OUT............................... 5-82
No. of control Ch..............................................5-104
Setting fail storage............................................ 5-83 Setting analog output...................................... 5-105
[Common setting] Tab: Group Calculation........5-84 Setting status output....................................... 5-106
[Group calculation] area........................................ 5-85
Upon selection of WAIT or OUTLIER...............5-107
Group calculation.................................................. 5-86
Upon selection of FOCUS, DARK, or
EDGE-CHK......................................................5-107

Calc. content......................................................5-86

Upon selection of STAT-RUN...........................5-107

Original calc. OUT..............................................5-86

Upon selection of FREQ-ERR..........................5-107

Calc. point..........................................................5-86
BCD unit......................................................... 5-107

When OUT-FUNC is selected..........................5-107
Setting group calculation.................................. 5-87

When INPUT is selected..................................5-108

When CH is selected........................................5-108
[Common setting] Tab: I/O Terminal Setting.....5-89
When STROBE is selected..............................5-108
[I/O terminal setting] area .................................... 5-89 [Common setting] Tab: Stat Process..............5-109
[Encoder set] area............................................ 5-90 [Stat process] area.............................................. 5-109
[I/O setting] area............................................... 5-90 Statistic process settings.................................... 5-110
[Analog output] area......................................... 5-91
Stat control method.......................................... 5-110
[Analog output terminal setting] window........... 5-91
No. of stat proc................................................. 5-110
[Status output] area.......................................... 5-91
Stat process Ch1 to Ch2.................................. 5-110
[BCD unit] area................................................. 5-92 Setting LS-Navigator2..........................................5-111
I/O terminal setting................................................ 5-93 Setting the display panel......................................5-111
Encoder set....................................................... 5-93 Statistical processing.......................................5-111

Input mode.........................................................5-93 Stat control method......................................... 5-112

Sampling............................................................5-95 Setting No. of stat proc................................... 5-112

Pitch unit............................................................5-95 Stat process settings...................................... 5-113

Pitch interval.......................................................5-95
[Setting list] Tab..............................................5-114

Encoder TIM func...............................................5-95
Items in which any setting is updated............. 5-115

Pulse count preset.............................................5-95
Setting list........................................................... 5-115
I/O setting......................................................... 5-96
Setting LS-Navigator2......................................... 5-115

Strobe time.........................................................5-96
Checking settings before update.................... 5-115

Off-delay time.....................................................5-96
Copying list of settings.................................... 5-115

No. of control Ch................................................5-96

Total judgment setting........................................5-97
Analog output.................................................... 5-97

Ref value mode..................................................5-97 Chapter 6 Checking the Measurement

Threshold mode.................................................5-97 Results

Analog scaling value..........................................5-98
Measurement Screen Outline and Switching

Volt of output waiting data..................................5-98
Status output..................................................... 5-98 Screens..............................................................6-2

Output waiting....................................................5-98 Measurement screen outline.................................. 6-2

Outlier continue..................................................5-98
[Head information] screen....................................6-2

FOCUS...............................................................5-98
[Display measurement value] screen...................6-2

Insufficient light..................................................5-98
[Total judgment] screen........................................6-2

Check No. of edges: Fail....................................5-98
[Target viewer] screen..........................................6-2

Stat processing..................................................5-98
[Trend graph] screen............................................6-2

Pulse frequency error.........................................5-98
[Data storage] screen...........................................6-2
BCD unit........................................................... 5-99
[Oval display] screen............................................6-2

Output selection function....................................5-99
[2D position display] screen.................................6-2

OUT selection method........................................5-99
[Display stat process] screen...............................6-2

BCD strobe time.................................................5-99
[SPC] screen........................................................6-2
Basic Operations of LS-Navigator2.................... 5-100
[Event logging] screen..........................................6-2
Setting the encoder......................................... 5-100
[Display terminal status] screen...........................6-2
Setting judgment output.................................. 5-100 Head Information................................................6-3
Setting analog output...................................... 5-100 Head information.................................................... 6-3
Setting status output....................................... 5-100 Head indicator..................................................... 6-3
BCD unit......................................................... 5-100
Head status..........................................................6-3
Setting the display panel..................................... 5-101 Common indicator............................................... 6-3

Head common status...........................................6-3

Contents
Display Measurement Value...............................6-4 Statistical information display area....................... 6-33

[Display measurement value] screen...................... 6-4
[Average]............................................................6-33
[OUT display setting] dialog.................................... 6-6
[Maximum value]................................................6-33
Display mode...................................................... 6-6
[Minimum value].................................................6-33

Simple display......................................................6-6
[Max-Min]...........................................................6-33

Detailed display (small-size)................................6-6
[Deviation]..........................................................6-33

Detailed display (large-size).................................6-6
[Parameter]........................................................6-33
[Excel transfer - Logging settings] dialog................ 6-8
[HH]....................................................................6-33
[Excel transfer] dialog (Click logging)................... 6-10
[HI]......................................................................6-33
[Excel transfer] dialog box (Trigger logging)......... 6-10
[GO]....................................................................6-33
[Excel transfer] (Click logging/Trigger logging)..... 6-10
[LO]....................................................................6-33

Writing format to Excel.......................................6-10
[LL].....................................................................6-33

When any abnormal value exists.......................6-10 SPC..................................................................6-34
Total Judgment.................................................6-12 [SPC] screen......................................................... 6-34
[Total judgment] screen......................................... 6-12 SPC information.................................................... 6-35
Graph display area........................................... 6-35

When the total judgment is "Pass".....................6-12

When the total judgment is "Fail".......................6-12
Vertical axis........................................................6-35
Target Viewer...................................................6-14
Horizontal axis....................................................6-35
[Target viewer] screen........................................... 6-14

X bar tag.............................................................6-35

R tag...................................................................6-35
Trend Graph.....................................................6-16
Average..............................................................6-35
[Trend graph] Screen............................................ 6-16
Upper Control Limit (UCL) / Lower Control
Graph display area............................................... 6-17 Limit (LCL)..........................................................6-35

[Time/view] drop-down list..................................6-17
Out of spec.........................................................6-35

Graph display area.............................................6-17 Data display area.............................................. 6-36
Data Storage....................................................6-20
[Target OUT].......................................................6-36
[Data storage] Screen........................................... 6-20
[Data acq interval]..............................................6-36
Graph display area............................................... 6-22
[SPC group points].............................................6-36

Vertical axis........................................................6-22
[SPC group interval]...........................................6-36

Horizontal axis....................................................6-22
[Copy SPC information] button...........................6-36

OUT tag..............................................................6-22
[No. of groups]....................................................6-36

Tolerance............................................................6-22
[Valid No. of groups]...........................................6-36

Cursors A and B.................................................6-22
[Last acq date]....................................................6-36
Data display area.................................................. 6-22
[Final pulse count]..............................................6-36

[Target]...............................................................6-22
[X bar up standard].............................................6-36

[OUT name]........................................................6-22
[X bar low standard]...........................................6-36

[Cursor A]...........................................................6-22
[X bar UCL]........................................................6-36

Judgment result of the cursor A position............6-22
[X bar LCL].........................................................6-36

[Cursor B]...........................................................6-22
[X bar average]...................................................6-36

Judgment result of the cursor B position............6-22
[X maximum value].............................................6-36

[Cursor A-B]........................................................6-23
[X minimum value]..............................................6-36

[Max A-B]............................................................6-23
[Deviation]..........................................................6-37

[Min A-B].............................................................6-23
[CpK]..................................................................6-37

[Avg A-B]............................................................6-23
[Cp].....................................................................6-37

[A-B deviation]....................................................6-23
[R up standard]...................................................6-37

[Acq date]...........................................................6-23
[R UCL]..............................................................6-37

[Pulse count]......................................................6-23
[R average].........................................................6-37
[Excel transfer settings] dialog.............................. 6-24
[Acq date]...........................................................6-37
[Data search] dialog.............................................. 6-26
[Pulse count]......................................................6-37
[Set comparison] window...................................... 6-26
[Group No.].........................................................6-37
Oval Display.....................................................6-28
[X bar].................................................................6-37
[Oval display] screen............................................ 6-28

[R].......................................................................6-37
[SPC setting] dialog.............................................. 6-38
Oval display area.................................................. 6-29 SPC setting........................................................... 6-39

Radial axis..........................................................6-29
[SPC collection setting] area............................. 6-39

Tolerance............................................................6-29

Target OUT.........................................................6-39
Data display area.................................................. 6-29

[Target]...............................................................6-29
Data acq interval................................................6-39

[OUT name]........................................................6-29
Group points.......................................................6-39

[Max value].........................................................6-29
Group interval.....................................................6-39

[Min value]..........................................................6-29
Max. plot pts.......................................................6-39
[X bar graph] area............................................. 6-40

[p-p value]..........................................................6-29

Vertical scale .....................................................6-40

[Avg value]..........................................................6-29

Standard ............................................................6-40
2D Position Display..........................................6-30 [R graph] area................................................... 6-40
[2D position display] screen.................................. 6-30

Vertical scale......................................................6-40
Display Stat Process........................................6-32
Standard.............................................................6-40
[Display stat process] screen................................ 6-32 Event Logging..................................................6-42

Contents
[Event logging] screen.......................................... 6-42

Event logging........................................................ 6-43 Chapter 8 Communication Interface and I/O
Display Terminal Status....................................6-44 Terminals
[Display terminal status] screen............................ 6-44
Ethernet Interface...............................................8-2
[Controller] tab.................................................. 6-44
Basic specifications/Connector specifications........ 8-2
[BCD Unit] tab................................................... 6-45
Outputting test data.............................................. 6-46
USB Interface.....................................................8-3
Basic specifications/Connector specifications........ 8-3
Outputting test data.......................................... 6-46
RS-232C Interface..............................................8-4
Communication specifications................................ 8-4
Chapter 7 Environment Setting Connector specifications......................................... 8-4
Connection with the PLC link unit or PC................. 8-5
PC communication configuration........................7-2 Outputting measurement values and changing
Communicate via USB............................................ 7-2 settings using commands....................................... 8-6
Communicate via Ethernet..................................... 7-2
Command types...................................................8-6
Instrument information display setting................7-5
Command format.................................................8-6
LS-Navigator2 setting method............................ 7-5 I/O Terminal Names and Functions....................8-7

Saving the device settings file..............................7-5 Input terminal block 1.............................................. 8-7

Loading the device settings file............................7-6
Input terminal block 2.............................................. 8-9

Initializing the controller setting............................7-6
Encoder signal input terminal block...................... 8-11
[Common] tab......................................................... 7-7 Output terminal block 1......................................... 8-12

Program setting switching method.......................7-7
Output terminal block 2......................................... 8-13

Panel lock.............................................................7-7
Analog output terminal block................................ 8-15

Password.............................................................7-7
24V power input terminal block............................. 8-16
LS-Navigator2 setting method............................ 7-7
Head expansion unit............................................. 8-17
Display panel setting method.............................. 7-8
BCD unit Input terminal block 1........................... 8-18

Method for Setting up the Environment
BCD unit Input terminal block 2........................... 8-19
Settings................................................................7-8

Program switching setting....................................7-9 BCD unit Expansion connector............................. 8-21

Panel lock setting.................................................7-9
Output connector 1.............................................8-21
[Time and Date] tab.............................................. 7-10

Time and Date setting........................................7-10

Daylight savings time setting..............................7-10
LS-Navigator2 setting method.......................... 7-10 I/O circuit............................................................... 8-27
[Ethernet] tab........................................................ 7-11
LS-9501 (NPN type)...........................................8-27

Setting at next power ON................................... 7-11
LS-9501P (PNP) type.........................................8-29

IP address/Subnet mask/Gateway..................... 7-11
Common for LS-9501/LS-9501P/LS-HA100......8-31

TCP port number................................................ 7-11
CB-BD100..........................................................8-31
Encoder input........................................................ 8-35

UDP port number............................................... 7-11
LS-Navigator2 setting method.......................... 7-11
Display panel setting method............................ 7-12

Setting the ETHERNET......................................7-12 Chapter 9 RS‑232C

Setting the operation at next power ON.............7-13 RS-232C interface commands...........................9-2

Setting the IP address........................................7-13 Command format.................................................... 9-2

Setting the subnet mask.....................................7-14 Received command format................................. 9-2

Setting the gateway............................................7-14 Reply command format....................................... 9-2

Setting the TCP port number..............................7-15
Reply command format in the event of an
[RS232C] tab........................................................ 7-15 error.................................................................... 9-3

Communication speed.......................................7-15
Measurement value formats............................... 9-4

Parity..................................................................7-15

Measurement value format examples..................9-4

Data send mode.................................................7-15
Setting numeric value formats............................ 9-4
LS-Navigator2 setting method.......................... 7-16
Display panel setting method............................ 7-17

Examples of setting numeric value formats.........9-4
Specification of the automatic transmission........ 9-5
Optional settings...............................................7-18
Output format.......................................................9-5
Changing the OUT display color........................... 7-18
When output measurement values in
LS-Navigator2 setting method.......................... 7-18 synchronization with the TIMING1 terminal..........9-6
Initializing the screen layout.................................. 7-19
When outputting measurement values using
LS-Navigator2 setting method.......................... 7-19 the “Self timing hold” mode..................................9-6
Displaying the start-up menu................................ 7-19 ASCII code table..................................................... 9-7
LS-Navigator2 setting method.......................... 7-20 Measurement control command list........................ 9-8
Language setting..............................................7-21
Measurement value output (Single).....................9-8
Switching the display language............................ 7-21
Measurement value output (Multiple)...................9-9
Help..................................................................7-22
Measurement value output (ALL).........................9-9
Manual.................................................................. 7-22
Timing ON/OFF (Single).....................................9-10
Version information............................................... 7-22

Timing ON/OFF (Multiple)..................................9-10

Timing ON/OFF (Synchronization).....................9-10

Contents

Auto zero ON/OFF (Single)................................9-10
Data storage (TIMING synchronization/

Auto zero ON/OFF (Multiple)............................. 9-11 Storage trigger synchronization)......................10-20

Auto zero ON/OFF (Synchronization)................ 9-11
Group calculation.............................................10-21

Reset (Single).................................................... 9-11
BCD unit...........................................................10-22

Reset (Multiple).................................................. 9-11
Sampling frequency.........................................10-23

Reset (Synchronization).....................................9-12

Statistics data output..........................................9-12

Statistics start.....................................................9-12 Chapter 11 Specifications

Statistics stop.....................................................9-12
Specifications...................................................11-2

Statistics clear....................................................9-13
Controller.............................................................. 11-2
Setting control command list................................. 9-13
Head..................................................................... 11-4
Settings change command list.............................. 9-14

Head setting.......................................................9-15
LS-9006M/LS-9006/LS-9030M/LS-9030/
LS-9120M........................................................... 11-4

Setting the measurement target.........................9-17

LS-9006D/LS-9030D.......................................... 11-6

OUT setting........................................................9-19
Head expansion unit............................................. 11-7

Tolerance setting................................................9-22
BCD unit............................................................... 11-7

Calibration/Scaling.............................................9-23
EtherNet/IP communication unit........................... 11-8

Common settings...............................................9-24
PROFINET communication unit............................ 11-9

I/O terminal setting.............................................9-27

Data storage.......................................................9-31 Display panel...................................................... 11-10

Statistics processing..........................................9-33 Cable...................................................................11-11
Setting check command list.................................. 9-34 Head cable/Extension cable............................11-11

Head setting.......................................................9-34 Extension cable between the transmitter and

Setting the measurement target.........................9-34 receiver............................................................11-11

OUT setting........................................................9-34 Dedicated display panel cable.........................11-11

Tolerance setting................................................9-35 LS-H2 (LS-Navigator2) operating system

Calibration/Scaling.............................................9-35 environment........................................................ 11-12

Common settings...............................................9-35 Other options...................................................... 11-13

I/O terminal setting.............................................9-36 40m connecting unit for cable extension........ 11-13

Data storage.......................................................9-36 Target holder pulley........................................ 11-13

Statistics processing..........................................9-36 Display panel stand........................................ 11-13
Other commands.................................................. 9-37 Display panel support..................................... 11-13
List of command parameters................................ 9-37 Characteristics................................................11-14
Time delay in response when sending and Measurement range and accuracy..................... 11-14
receiving commands............................................. 9-40

LS-9006/LS-9006M.......................................... 11-14

LS-9030/LS-9030M.......................................... 11-14
Chapter 10 Timing Chart

LS-9120M......................................................... 11-15

LS-9006D......................................................... 11-16
Measurement overview....................................10-2
LS-9030D......................................................... 11-17

Normal................................................................10-2 Temperature characteristics................................ 11-18

Auto peak hold/Auto bottom hold/Auto peak to
LS-9006/LS-9006M/LS-9006D......................... 11-18
Peak hold...........................................................10-3
LS-9030/LS-9030M/LS-9030D......................... 11-18

Peak hold/Bottom hold/Peak to Peak hold/
LS-9120M......................................................... 11-18
Average hold (Hold 1)........................................10-4 State Table.....................................................11-20

Peak hold/Bottom hold/Peak to Peak hold/ Dimensions.....................................................11-23
Average hold (Hold 2)........................................10-5
Controller............................................................ 11-23

Sensor Head....................................................... 11-24
Average hold (Hold 3)........................................10-6

Sample hold (Hold 1).........................................10-7
LS-9006/LS-9006M.......................................... 11-24

Sample hold (Hold 2).........................................10-8
LS-9030/LS-9030M.......................................... 11-25

Self timing hold...................................................10-9
LS-9120M......................................................... 11-26
I/O details.......................................................10-10

LS-9006D......................................................... 11-27

LS-9030D......................................................... 11-28

Normal mode, Auto peak hold/Auto bottom hold/
HMI Display panel............................................... 11-29
Auto peak to Peak hold....................................10-10

LS-D1000......................................................... 11-29
Auto peak to Peak hold (Hold 1 to Hold 3)....... 10-11 Head expansion unit........................................... 11-30

Sample hold (Hold 1).......................................10-12
LS-HA100......................................................... 11-30
BCD unit............................................................. 11-31

Sample hold (Hold 2).......................................10-13

Self timing hold.................................................10-14
CB-BD100........................................................ 11-31

Encoder input...................................................10-15 EtherNet/IP communication unit......................... 11-32

Encoder TIMING input PROFINET communication unit.......................... 11-32
(Pulse frequency error)....................................10-17 Head extension cable......................................... 11-33

Statistics processing........................................10-18
Cable between the controller and head

Total judgement output.....................................10-18 CB-B3/CB-B10................................................. 11-33

Data storage
Head extension cable
(Sampling frequency synchronization).............10-19 CB-B5E/CB-B10E/CB-B20E............................ 11-33

Contents

Cable between the transmitter and receiver
OP-87686 (1 m cable)/OP-87687 (3 m cable). 11-33
40m connecting unit for cable extension............ 11-34

CB-BR01.......................................................... 11-34
Target holder pulley............................................ 11-34

OP-87609 (For LS-9030)................................. 11-34

OP-87684 (For LS-9006)................................. 11-35

OP-87749 (For LS-9030D)............................... 11-35

OP-87750 (For LS-9006D)............................... 11-36
Panel stand......................................................... 11-36

OP-87610......................................................... 11-36
Display panel support......................................... 11-37

OP-87757......................................................... 11-37
Appendix
Measurement Conditions and Measurement
Data Flow.......................................................... A-2
LS-Navigator2 Saved File List........................... A-3
Transition diagram for the display panel
operations setting screen.................................. A-4
Troubleshooting............................................... A-15
If a problem occurs...............................................A-15
Error Messages............................................... A-18
System error message..........................................A-18
Error messages in the RS-232C/display panel.....A-21
Index................................................................ A-23
Revision history............................................... A-32

Contents
MEMO

1
This chapter describes the configurations, main parts and
functions of the LS-9000 Series.
Introduction
Checking the Package.............................................. 1-2

System Configuration............................................... 1-8
Part Names and Functions....................................... 1-9
Software Installation............................................... 1-18
- LS-9000 Series User’s Manual - 1-1

Checking the Package
Unpack the LS-9000 Series and check if the following parts are included in the package.
See “Option list” (page 1-5) regarding the separately sold optional products.
KEYENCE takes all possible measures to ensure correct packaging. If any parts are missing, please contact the
1 nearest KEYENCE office.
Controller
Introduction

LS-9501/LS-9501P
Controller Flathead screwdriver
User’s manual (This document)
Head

LS-9006/LS-9006M
Sensor Head (includes air purge unit) Hexagon socket bolts Hexagon socket bolts
(M3 x 35 washer included: x 5) (M4 x 20 : x 4)
Hexagonal wrench

LS-9030/LS-9030M
Sensor Head (includes air purge unit) Hexagon socket bolts Hexagon socket bolts
Hexagonal wrench

LS-9120M
Sensor Head Hexagon socket bolts Hexagon socket bolts
1-2 - LS-9000 Series User’s Manual -


LS-9006D
Sensor Head (includes air purge unit) Hexagon socket bolts (M6 x 25 : x 4)
Introduction

LS-9030D
Sensor Head (includes air purge unit) Hexagon socket bolts (M6 x 25 : x 4)
HMI Display panel

LS-D1000
HMI Display panel Panel mounting brackets (x 4)
Head expansion unit

LS-HA100
Head expansion unit Flathead screwdriver
Ferrite core x2

Expansion unit
1

CB-BD100
CB-EP100
CB-PN100
BCD unit EtherNet/IP unit PROFINET unit
Introduction
Head cable
CB-B3 : 3 m cable x1 Head extension cable
CB-B5E : 5 m extension cable x 1
CB-B10 : 10 m cable x1
40m connecting unit for cable extension

CB-BR01 Connection cable
PC software LS-H2
LS-H2
CD-ROM

Option list

Extension cable between the transmitter and receiver
Up to three cables (maximum of 9 m) can be used at LS-9120M.
For other models, only one cable can be used.
1
OP-87686 : 1 m cable
Introduction

Display panel cable
OP-87604 : 10 m cable
OP-87605 : 20 m cable

Target holder pulley
OP-87684 : For LS-9006 OP-87609 : For LS-9030

2 screws M4 x 8 2 screws M4 x 8
OP-87750 : For LS-9006D OP-87749 : For LS-9030D

4 screws M5 x 15 4 screws M5 x 15

Display panel stand
OP-87610 6 caps
1 DIN rail
(2 of each) screws, nuts, and
washers
4 rubbers

Display panel support
OP-87757 4 screws M4 x 10
3 screws M5 x 12


Panel switch
OP-87611
1
Introduction

RS-232C cable (2.5 m, straight)
OP-96368

RS-232C conversion adapter (9-pin, female)
OP-26401
01
64
-2
P
O

USB cable (2 m)
OP-66844

Ethernet cable
OP-66843


Air purge unit
OP-87696 (For LS-9006/LS-9006M) OP-87695 (For LS-9030/LS-9030M)

x2
Hexagonal wrench
x2
Hexagonal wrench 1
Introduction
OP-87755 (For LS-9120M) OP-87752 (For LS-9006D)
x2 Hexagon socket bolts
Hexagon socket bolts (M4 x 35 : x 4)
(M3 x 10 : x 8)
Hexagonal wrench
OP-87751 (For LS-9030D)

Hexagon socket bolts
(M5 x 50 : x 4)

Replacement glass unit
OP-87697 (For LS-9030/LS-9030M, common for OP-87756 (For LS-9120M, common for transmitter and
transmitter and receiver) receiver)
x1 x1
4 pan head screws M2 x 4 Hexagon socket bolts
(M2 x 4 : x 8)
Hexagonal wrench
OP-87698 (For LS-9006/LS-9006M transmitter) OP-87699 (For LS-9006/LS-9030M receiver)

x1 x1

Protective sheet
OP-87729 (For LS-D1000)
5 sheets

I/O extension cable (3m) for BCD unit
OP-51657

System Configuration
The LS-9000 Series can configure a system with the following devices and third party items.
1
Introduction
Stack light, buzzer, and others Encoder, photoelectric sensor, proximity Printer
Depending on the output of the determination sensor, and others A printer prints out the
result, notification such as warning can be The sensors send a signal to the timing input measurement results.
generated. when they detect any target object.
Expansion unit
Head expansion unit CB-BD100 (BCD unit)
LS-HA100 CB-EP100 (EtherNet/IP unit)
CB-PN100 (PROFINET unit)
Controller
LS-9501/LS-9501P
Display panel cable
OP-87602/3/4/5
Display panel
24 V DC power supply
LS-D1000
Head cable
CB-B3/10,
CB-B5E/10E/20E
PC
*Different models can be used

together.
Sensor head
Sensor head
Data logger Programmable controller PC

A data logger can record the A programmable controller can receive the control A personal computer can control
measurement values. output and measurement values, as well as control and receive the measurement
the measurement timing and switch between the values via RS-232C, USB, and
set program numbers. Ethernet communication.

Part Names and Functions
Part Names and Functions
This section describes the part names and functions of the controller, display panel and heads.
Controller
Terminal side Left side 1
Introduction
6
1 7
8
2 9
10
3 15
4 11
5
12
13
14
Names Contents
1 Input terminal block 1 Used for control signal input.
9-pole European terminal block
2 Input terminal block 2 Used for control signal input.
3 Output terminal block 1 Used for control signal output.
4 Output terminal block 2 Used for control signal output.
5 24V power input terminal block Used for supply of the power source (DC24V).
Upper side: +24 V, Lower side: +0 V
6 POWER ON LED Lights green when the controller normally turned on.
7 ERROR LED Shows the controller status.
OFF: Normal operating state
Lights red: Error status
8 Display panel connector Connects to the display panel.
9 Encoder input terminal block Used for pulse signal input from an encoder.
10 Analog output terminal block Used for analog voltage/current output.
11 Head connector Connects to the sensor head.

Bottom: Head 1 connector, Upper side: Head 2 connector
The head can be connected to either Head connector 1 or Head
connector 2.
12 USB port Connects to a personal computer with a USB cable. (Type B connector)
13 Ethernet port Connects to a personal computer with the Ethernet cable.
(RJ-45 connector)
14 RS-232C port Connects to a personal computer or PLC with the RS-232C cable.
(modular 6-pin connector)
15 Expansion unit connector Connects to the expansion unit.

Display panel
1 1
OUT HH
HI
GO
LO
LL
TIM
ZERO
VIEWER
TOP
14
15 19
HH
2
OUT TIM
HI
GO
Introduction
LO
LL ZERO
OUT HH
HI
GO
TIM
16
20
LO
LL ZERO
OUT HH TIM
HI
17
GO BOTTOM
LO
3
LL ZERO 1 2 3 4
HEAD
PROGRAM
SYNC ASYNC 1 2 3 TIM
+Y
4
PROG DISP L-INS
TIM
4
O- SEL
5
H-SEL
6
2 D -POS
RESET
-X +X
5 FUNC 7
LIMIT
8
CAL
9
SCAL
ZERO
18
6 LOCK -
L-CAL
0
SET
ENT ESC
-Y
2D -POSITION
LS- D1000
7 8 9 10 11 12 13
Names Contents
1 Main display area During measurement: Displays the measurement value or tolerance setting.
During setting: Displays the setting values.
2 OUT display Displays the OUT number to be displayed in the main display area.
3 Control group Displays the selection status of the synchronization input.
information display
4 Program No. display Displays the currently used program No.
5 [FUNC] key Used in combination with [Numeric keys] to change the setting values.
6 [LOCK] key Used for locking and unlocking the panel operations.
7 / / / keys Selects the setting contents.
8 Numeric keys Used for entering numeric values.
9 [ENT] key Used for confirming the setting items.
10 [ESC] key Finishes the setting.
11 [ZERO] key Inputs ZERO to the synchronized OUTs.
12 [RESET] key Inputs RESET to the synchronized OUTs.
13 [TIM] key Inputs TIMING to the synchronized OUTs.
14 Input status Displays the TIMING and ZERO input statuses of the selected OUT.
15 Judgment result display Indicates the judgment result in the main display area.
16 Position display Displays location of target in measurement range.
17 HEAD information Displays the head number to be displayed in the position display.
display
18 2D position display Displays the desired OUT result in the X and Y axes.
19 Display panel connector Used for connecting multiple display panels.
20 Controller connector Used for connecting the controller and the display panel.

Head

LS-9006/LS-9006M
1 4
1
7
Introduction
2
3
8
9 5
10

LS-9030/LS-9030M
1 4
2
3
5
10
6
9
8
7
Names Contents
1 Receiver head (Model: LS-9xxxR) Receives the light from the transmitter.
2 Receiver cover glass -
3 Transmitter cover glass -
4 Cable between the head and Connects to the controller.
controller
5 Mounting hole Used for mounting the head.
6 Focus mark Position at which the most accurate measurement values can be
obtained with the head in the condition of being mounted at the timing
of shipping.
7 Cable between the transmitter and Connects the transmitter head cable to the receiver head cable.
the receiver
8 TR base Mounts and secures the transmitter and receiver.
9 Transmitter head (Model: LS-9xxxT) Emits the light for the measurements.
10 Multi-purpose mounting hole Used for attaching the mounting base, etc. for the measurement target
as required.


LS-9120M
1
1 4
2
Introduction
3
9 5
10
6
8
7
Names Contents
1 Receiver head (Model: LS-9120MR) Receives the light from the transmitter.
2 Receiver cover glass -
3 Transmitter cover glass -
4 Cable between the head and controller Connects to the controller.
6 Focus mark Position at which the most accurate measurement values can be
obtained with the head in the condition of being mounted at the
timing of shipping.
7 Cable between the transmitter and the Connects the transmitter head cable to the receiver head cable.
receiver
8 TR base Mounts and secures the transmitter and receiver.
9 Transmitter head (Model: LS-9120MT) Emits the light for the measurements.
10 Multi-purpose mounting hole Used for attaching the mounting base, etc. for the measurement
target as required.


LS-9006D
3 2
6
1
Introduction
7 7
8
8
9
5
10
4 1

LS-9030D
3 2
6
7 7
8
8
9
10 5
4 1
Names Contents
1 X-axis receiver Receives the light from the transmitter.
2 Y-axis receiver Receives the light from the transmitter.
3 X-axis transmitter Emits the light for the measurements.
4 Y-axis transmitter Emits the light for the measurements.
5 Cable between the X-axis head and controller Connects the X-axis head with the controller.
6 Cable between the Y-axis head and controller Connects the Y-axis head with the controller.
8 Display panel support mounting hole Used for mounting the display panel support.
9 Base panel Used when mounting the head from top.
10 Base bottom panel Used when mounting the head from bottom.

Head expansion unit

Right side Front side
1
2
Introduction
3
4
1
5
Names Contents
1 Controller connector Connects to the controller.
2 POWER ON LED Lights green: Measurement in progress; Setting change in progress; At
power ON
OFF: Error state
3 ERROR LED Red light: Error state
4 Analog output terminal block Used for analog voltage/current output.
5 Head connector 4 Connects to the sensor head.
6 Head connector 3 Connects to the sensor head.
The sensor head can be connected to either Head connector 3 or Head connector 4.

BCD unit
Right side Front side Left side
1
2
Introduction
5 7
8
4
6
Names Contents
1 Controller connector Connects to the controller and the expansion unit.
Lights green: Measurement in progress; Setting change in progress
2 POWER ON LED Lights red: Error status
OFF: Starting
Used for control signal input to output connector 1/output connector 2.
3 Input terminal block 1
Used for control signal input to output connector 3/output connector 4.
4 Input terminal block 2
Used for output the measurement values or judgment results. Ch1 is
5 Output connector 1
supported.
supported.
supported.
supported.

EtherNet/IP communication unit

1
2
Introduction
3
4
1
5
6
7
Names Contents
1 Controller connector Connects the controller.
2 LINC/ACT LED Off : Not connected with the network.
No power is supplied.
Blinks green : Normally linked and sending and receiving data.
Lights green : Normally linked.
3 MS LED Shows the condition of the EtherNet/IP communication unit.
Off : No power is supplied to the EtherNet/IP communication
unit.
Lights green : In the normal operation.
Blinks red : Duplicated IP address or the connected controller in the
error condition.
Lights red : A system error occurred.
4 NS LED Shows the condition of the EtherNet/IP communication unit.
Off : No IP address is set on the controller.
No power is supplied.
Blinks green : The IP address is assigned but the connection has not
been established. And the “Monitor data/External input”
connection has not timed-out.
Blinks red : The “Monitor data/External input” connection has timed-
out.
Lights red : It is detected that other device already uses the assigned
IP address.
5 RESET button Press and hold the button to reset the controller to the factory default.
6 MAC adress Contains the MAC address of the controller.
7 Communication port Connector for the Ethernet cable. (RJ-45 connector)
* For the details, refer to CB-EP100 User’s Manual.

PROFINET communication unit

1
2
Introduction
3
4
1
5
6
7
Names Contents
1 Controller connector Connects the controller.
2 LINC/ACT LED Shows whether the CB-PN100 is normally linked with the Ethernet.
(Link/Activity indicator) Blinks green or lights green : In the normal operation.
Off : Not connected with the network or no power is supplied.
3 SF LED (System Failure indicator) Shows the normal/malfunction condition of the CB-PN100 and the error
condition of the controller.
Lights red : There is a system error in this device or the controller.
Blinks orange : The Flash LED was requested from the IO controller.
Flashes four times with the frequency of approximately a
second.
Off : In the normal operation.
4 BF LED (Bus Failure indicator) Shows the PROFINET communication status.
Lights red : Data exchange via the data I/O communication does not
operate normally.
Off : In the normal operation.
5 RESET button Press and hold the button at least three seconds to reset the device to
the factory default.
6 MAC adress Contains the MAC address of the device.
7 Communication port Connector for the Ethernet cable. (RJ-45 connector)
* For the details, refer to CB-PN100 User’s Manual.

Software Installation
This section describes the required system environment for the installation of the LS-Navigator2 and the USB driver,
and the installation procedure for them.
1 Required system environment

To use LS-Navigator2, the following computer system environment is required.
Introduction
Supported OS yyWindows 10*1

yyWindows 7 (SP1 or later)*2
yyWindows Vista (SP2 or later)*3
yyWindows XP (SP3 or later) *4)*4
Supported languages Japanese, English, German, Chinese (Simplified), Chinese (Traditional)
CPU Core2Duo 2GHz or higher
Memory capacity 2GB or more
L2 cache memory 2MB or more
Free hard disk space 10 GB or more
Display XGA (1024×768 pixel) or more, 256-colors or more
Interface USB USB2.0 HI-SPEED supported (USB1.1 Full-SPEED compatible)*5
Ethernet Ethernet 1000BASE-T/100BASE-TX*6
*1 Compatible with each edition of Home, Pro, and Enterprise.

*2 Compatible with Home Premium, Professional, and Ultimate editions.
*3 Compatible with Ultimate, Business, Home Premium, and Home Basic editions.
*4 Compatible with Home Premium and Professional editions.
*5 Connection through a USB hub or converter is not guaranteed.
*6 Connections with a LAN through a router or converter are not guaranteed.
Preparation for the Installation

Please check the following before installing LS-Navigator2.
It is recommended to back up the master disk to account for accidental damage.

Hard disk free space
LS-Navigator2 can be installed on a hard disk. The destination hard disk requires a free space of 10 GB or more. Make
sure to allocate sufficient free disk space in advance.

Windows environment and installation destination
LS-Navigator2 runs on Windows and its installation is also performed on Windows. Check that a supported OS is
installed on the computer and is working properly.

Help file
The help file of this system is a PDF file. To use the help file, install Adobe Reader, the PDF viewer supplied by Adobe
System, on your computer.
Adobe Reader is available for free from the Adobe Systems web site (http: //www.adobe.com).

Installing LS-Navigator2 3 Read and check "Software License Agreement",

select "I accept the terms in the license
The following section describes the procedure to install agreement" if you agree, and click the [Next]
LS-Navigator2 onto your computer.
The example here describes installation on Windows 7.
Microsoft .NET Framework 2.0 is required to run
button.
1
LS-Navigator2. If the OS of your PC is Windows 8
Introduction
or later, install Microsoft .NET Framework 2.0 or 3.5
beforehand.
1 Start up Windows and insert "LS-H2" into the CD-

ROM drive.
Items required for installation will appear.
The items will not appear if they had been
previously installed.
2 Click the [Install] button.

Follow the instructions on the screen.
After the completion of the installation, the
"InstallShield Wizard Completed" screen appears.
4 Click the [Finish] button.
After the completion of the installation of all

necessary items, “InstallShield Wizard" starts up
and the "License Agreement" screen appears.
5 Remove the CD-ROM.

The installation of LS-Navigator2 is completed.
By default, LS-Navigator2 will be installed
at “C: \Program files (x86)\KEYENCE\LS-
Navigator 2\”.

Uninstalling LS-Navigator
The following section describes the procedure to
1 uninstall LS-Navigator2 from your computer.

The example here describes uninstallation from
Windows 7.
Introduction
yyBefore starting the uninstallation,

terminate all other applications running
on the computer.
yyLog onto the computer with an account
that has Administrator privileges.
1 Click [Uninstall program] in the control panel.

The "Uninstall or Change Programs" screen
appears.
2 Select
button.
LS-Navigator2 and click the [Uninstall]
The "Uninstallation confirmation" screen appears.
3 Click the [Yes] button.

The uninstallation starts.

2
This chapter describes the installation and connection of
each instrument.
Installation and
Connection
Mounting the Head.................................................... 2-2

Using the Air Purge Unit........................................... 2-5
Using the Pulley Jig................................................ 2-10
Replacing the Glass of the
Transmitter / Receiver............................................. 2-12
Attaching the Protective Sheet.............................. 2-14
Mounting the Controller.......................................... 2-15
Mounting the Panel................................................. 2-17
Using the Display Panel Stand............................... 2-18
Using the Display Panel Support........................... 2-20
Connecting Various Components.......................... 2-21

Mounting the Head
Mounting the Head
The head can be mounted to suit the measurement

target type and the usage environment. The following
Suitable mounting for specific
describes the mounting methods with/without the environments
included TR base.

If a light source is present near the head
Installation cautions The light reflected from the target may enter the
receiver, resulting in errors in the measurement.
2 When mounting the head, make sure that the

misalignment and tilt of the receiver and transmitter are
less than the below.
In such an event, take the following countermeasure:
yyShield the target from the light source (fluorescence
lamp or sunlight).
Installation and Connection
Parallel misalignment
Values are the same in all of the following models: Light source
LS‑9006/LS‑9006M/LS‑9030/LS‑9030M/LS‑9120M
Receiver Transmitter Receiver Transmitter

1 mm or less Target
Receiver Transmitter
1 mm or less Light source
Obstacle
Tilt
±0.25° or less (For
LS‑9120M, ±0.15° or less)
LS‑9120M, ±0.15° or less)
LS‑9120M, ±0.15° or less)
LS‑9120M, ±0.15° or less)

Mounting the Head
Mounting method
Mounting without the TR base
The following describes the mounting method for using

Mounting with the TR base the transmitter and receiver without the TR base, using
At the time of shipping, the transmitter and receiver LS-9030 as an example.
are fixed to the TR base. The following describes the
mounting method with the TR base, using LS-9030 as 1 Loosen the bolts on the bottom panel of the TR
zz
an example.
Using the top mounting holes
base, and then remove the head.
2
Secure the transmitter and receiver with the hexagon

socket bolts (included) using the mounting holes
located at the top of the TR base.
Maximum tightening torque value
yyLS-9006/LS-9006M : 1.5 N·m
yyLS-9030/LS-9030M : 1.5 N·m
yyLS-9120M : 5 N·m
For LS-9120M, also remove the plate for

locking the cable between TR.
zz
Using the bottom mounting holes
Secure the transmitter and receiver using the mounting
holes located on the bottom panel of the TR base
(LS‑9006/LS-9006M: M4 10 mm Depth, LS-9030/
LS‑9030M: M4 10 mm Depth, LS-9120M: M6 15 mm
Depth).
yyLS-9006/LS-9006M : 1.5 N·m
yyLS-9030/LS-9030M : 1.5 N·m
yyLS-9120M : 5 N·m

Mounting the Head
2 Mount the head.

Mounting LS-9006D/LS-9030D
Use the mounting holes located on the side panel
as shown below. Use the hexagon socket bolts zz
Using the top mounting holes
(included). Secure the head by inserting the provided hexagon
Maximum tightening torque value socket bolts (M6 x 25) through the mounting holes on
yyLS-9006/LS-9006M : 0.6 N·m the base surface and tightening them.
2
yyLS-9030/LS-9030M : 1.5 N·m Maximum tightening torque value
yyLS-9120M : 5 N·m yyLS-9006D : 5.2 N·m
yyLS-9030D : 5.2 N·m
Do not perform the operation while

As shown below, you can also secure holding the cable between the
them using the mounting holes located on transmitter and receiver.
the bottom panel of the head (LS-9006/
LS-9006M: M4, Depth 3.5, LS-9030/
LS‑9030M: M4, Depth 5, LS-9120M: M6, zz
Using the bottom mounting holes
Depth 6). Secure the head using the mounting holes located on
Maximum tightening torque value the bottom panel of the base (M6 12 mm Depth).
yyLS-9006/LS-9006M : 2.5 N·m Maximum tightening torque value
yyLS-9030/LS-9030M : 2.5 N·m yyLS-9006D : 5.2 N·m
yyLS-9120M : 1.5 N·m yyLS-9030D : 5.2 N·m
Do not perform the operation while

holding the cable between the
transmitter and receiver.

Using the Air Purge Unit
At the time of shipping, the air purge unit is attached to the transmitter and receiver for the models other than LS-9120M.
By using the air purge unit, you can reduce the dirt on the transmitter and receiver caused by water, dust and other debris.
How to use the air purge unit 3 Attach the tube towards the direction with enough
room for the tube.

LS-9006/LS-9006M
2
To use LS-9006/LS-9006M’s air purge unit, prepare the
following off-the-shelf items:
yyPC4-M3M (PISCO fitting) (Recommended)
yyAir tube (Outer diameter φ4) (Same for the transmitter

and receiver)
1 Attach the fitting on the air purge unit.

Recommended tightening torque: 0.7 N·m
yySupply air flow rate:

20 L/min (10 L/min per unit)
yyAir pressure:
Approx. 20 kPa
The air pressure is measured before
the air purge. The pressure will vary
depending on the point of measurement.
Be sure to check the performance based
If you use an L-shaped fitting, make
on the air flow.
sure that the threaded portion will
yyBe sure to use clean, dry air.
not become loose due to twisting of
the tube. yyThe air purge performance and the
measurement accuracy of the sizer can
be affected by the usage environment
2 Insert the air tube into the fitting. and/or the condition of the air source.
Determine the specifications for the air
source and the glass cleaning schedule
in accordance with the actual operating
conditions.
yyWhen the air purge unit is used, the
visual field is narrowed. When using
the air purge unit with the distance
between the transmitter and the receiver
increased, confirm the accuracy on the
actual equipment.


LS-9030/LS-9030M 3 Insert the air tube into the fitting.
To use LS-9030/LS-9030M’s air purge unit, prepare the
following off-the-shelf items:
yyPC4-M3M (PISCO fitting) (Recommended)
yyAir tube (Outer diameter φ4) (Same for the transmitter
and receiver)
2 1 Remove the set screw from the inlet to which the

fitting will be attached.
Remove the M3 set screw.

(Do not remove the other screws)
4 Attach the tube towards the direction with enough

room for the tube.
yyAt the time of shipping, three inlets

are fitted with a M3 set screw to
prevent air leakage. Remove the set
screw from the inlet you wish to use,
and then attach the fitting to this hole
(Do not remove the other set screws).
yyBe sure to supply air from only one
inlet.
40 L/min (20 L/min per unit)
yyAir pressure:
2 Attach the fitting on the air purge unit. Approx. 80 kPa.
Recommended tightening torque: 0.7 N·m
on the air flow.
yyThe air purge performance and the
sizer’s measurement accuracy can
and/or the condition of the air source.
conditions.
visual field is narrowed. When using
the air purge unit with the distance
If you use an L-shaped fitting, make between the transmitter and the receiver
sure that the threaded portion will increased, confirm the accuracy on the
not become loose due to twisting of actual equipment.
the tube.


LS-9120M
To use LS-9120M’s air purge unit, prepare the following 80 L/min to 160 L/min (40 L/min to 80 L/
off-the-shelf items: min for one unit)
yyPC6-M5 (PISCO fitting) (Recommended) yyAir pressure:
yyAir tube (Outer diameter φ6) (Same for the transmitter Approx. 180 kPa.
and receiver) The air pressure is measured before
1 Put on the air purge unit.

2
on the air flow.

conditions.
Hook the level difference of the visual field is narrowed. When using
case with that of the air purge. the air purge unit with the distance
between the transmitter and the receiver
2 Attach the fitting on the air purge. increased, confirm the accuracy on the
actual equipment.
Recommended tightening torque: 1 to 1.5N·m
3 Insert the air tube into the fitting.

the tube.


LS-9006D When cleaning the receiver, remove the air purge unit
that is secured with four screws as shown below.
To use LS-9006D’s air purge unit, prepare the following
Maximum tightening torque for securing the unit: 1.5
off-the-shelf items:
N·m
yyPC6-M5 (PISCO fitting) (Recommended)
yyAir tube (Outer diameter φ6)
2 1 Attach the fitting on the air purge unit.


the tube.

20 L/min to 40 L/min
yyAir pressure:
Approx. 60 kPa.
on the air flow.
conditions.


LS-9030D When cleaning the receiver, remove the air purge unit
that is secured with four screws as shown below.
To use LS-9030D’s air purge unit, prepare the following
Maximum tightening torque for securing the unit: 1.5
off-the-shelf items:
N·m
yyPC6-M5 (PISCO fitting) (Recommended)
yyAir tube (Outer diameter φ6)
1 Attach the fitting on the air purge unit (2 mounting

points).
2

the tube.

40 L/min to 80 L/min (20 L/min to 40 L/
min per unit)
yyAir pressure:
Approx. 40 kPa.
on the air flow.
conditions.

Using the Pulley Jig
The following describes how to mount the pulley jig to

the TR base.
For LS-9006/LS-9006M
The pulley to be used is OP-87684.
The pulley to be used is OP-87609. 1 Insert the jig through the gap of the air purge unit
as shown below. Mount the pulley jig with the
2
base facing the receiver.
1 Mount the pulley jig with the base facing the
receiver.
Receiver
Receiver
Transmitter
2 Secure it using the hexagon socket bolt

(included).
2 Secure the jig to the screw hole near the receiver
with the hexagon socket bolt (included). Transmitter
Receiver Transmitter Receiver

For LS-9006D For LS-9030D

The pulley to be used is OP-87750. The pulley to be used is OP-87749.
1 Place
unit.
the jig into the notched section of air purge 1 Place
unit.
the jig into the notched section of air purge

2 Secure it using the provided hexagon socket
bolts (M5 x 15).
2 Secure it using the provided hexagon socket
bolts (M5 x 15).

Replacing the Glass of the Transmitter / Receiver
When the cover glass of the transmitter/receiver is

broken, it can be replaced by the following procedure.
3 Screw on the replacement cover glass.
yy30cN·m
yyThe measurement accuracy may be
adversely affected if glass has entered
inside the head when the cover glass Gasket
is broken. Glass
2 In such an event, contact your nearest

KEYENCE office.
yyIf you replace the cover glass in an
Sheet
Frame
unsuitable environment, the dust

may enter the head resulting in

lower measurement accuracy. The IP
performance is not guaranteed.
Contact your nearest KEYENCE office
if you wish to have the cover glass
replaced by KEYENCE.
For LS-9030/LS-9030M Use the following cover glass replacement options:
yyTransmitter: OP-87698
The OP-87697 cover glass should be used for both the
yyReceiver: OP-87699
transmitter and receiver.
1 Remove the air purge unit.

1 Remove the air purge unit.
2 Remove the cover glass. The cover glass

has a screw thread. Rotate the cover glass
counterclockwise.
2 Loosen the screws in the four corners, and then

remove the cover glass.
3 Secure the replacement cover glass by rotating it

clockwise.
yy20cN·m

For LS-9120M
At the cover glass replacement, use OP-87756 on both
the transmitter and receiver.
1 Turn 8 screws to remove the cover glass.

2

2 Secure
screws.
the replacement cover glass with the

yy15 cN·m
Gasket
Glass
Frame

Attaching the Protective Sheet
Attaching the Protective Sheet
How to attach the protective sheet

This following explains how to attach the protective
sheet to the display panel.
1 Peel off a small amount of the backing paper
2
from the edge of the protective sheet and attach
it to the corner of the panel.
Attach the protective sheet such that its notched
section is at the bottom left of the panel.
Notched section
2 Attach the protective sheet by slowly peeling off

the backing paper, such that no air is trapped
between the protective sheet and the touch
panel.

Mounting the Controller
Be sure to read the installation cautions carefully and install the controller correctly.
The controller unit should either be mounted on the DIN rail or installed by fixing the bottom panel with screws.
Installation cautions
The controller should be installed in the direction of the circled figure below. Do not install it in any other direction.

For proper ventilation, allow a space of 50 mm or more
on top of the controller and a space of 30 mm or more on
both sides.
In addition, allow a space of 90 mm or more in front of the 50 mm
terminal panel to ensure safe cable connection.
30 mm 30 mm
If you mount two or more controllers side by side, allow

a space of 30 mm or more between the controllers and a
space of 50 mm or more on top of the controllers.
50 mm
30 mm 30 mm 30 mm
yyDo not block the ventilation holes located on the top and bottom panels of the controller unit.
Doing so may cause heat to build up inside the unit, resulting in malfunction.
yyIf the temperature inside the control panel exceeds the rated operating ambient temperature
(50 °C: Head expansion unit not connected, 45 °C: Head expansion unit connected), lower the
operating ambient temperature below the rating using forced air cooling or by creating more
space around the unit.

Mounting the controller to the DIN rail Mounting to the bottom panel
This section describes the procedure for mounting the This section describes the procedure for mounting the
controller to a DIN rail. controller using the bottom panel.
1 Pull 1 Fasten
2
the tab on the back panel of the controller, the screws into the mounting holes on the
and then attach the controller to the DIN rail. bottom panel.
Tab
2 Push in the tab to fix the controller in place.
M4 screw x 4 (Screw depth 6 mm)
See “Dimensions” (page 11-23) for the dimensions

for installation.

Mounting the Panel
Mounting the Panel
Use the included mounting brackets to mount the panel.

The dimensions of the panel are as shown below.
207
+1
169 0
2
+1
124 0
200

Unit: mm
1 Insert the mounting brackets into the mounting

holes (8 holes) on the panel.
yyTwo each on top and bottom panels
yyTwo each on left and right panels
2 Fasten them using a Phillips screwdriver.

yyTightening the mounting bracket
screw too hard may result in
deformation of the panel and/or the
controller case. Set the tightening
torque to 0.4 N·m or less.
yyDo not remove the gasket. Doing
so will result in failure to meet the
IP65 requirements.

Using the Display Panel Stand
Secure the display panel using the display panel stand.

The panel can be mounted vertically or horizontally.
Setting up the unit horizontally
The display panel stand has a hole for securing the
switch (OP-87611).
Cover the hole with the included cap if the switch will 1 Attach the rubber pads (included) in the positions
shown below.
not be used.
2 Setting up the unit vertically

1 Attach the rubber pads (included) in the positions

shown below.
2 Mount
stand.
the display panel on the display panel
Use the included mounting bracket to secure the
2 Mount
stand.
the display panel on the display panel
panel.
Use the included mounting bracket to secure the

panel.

3 Mount the DIN rail on the back panel. Using the switches (OP-87611)
Secure the DIN rail to the panel stand using a screw
and nut. Secure the switch to the display panel.
1 Remove
switch.
the metal washer included with the

2 Align the orientation of the notch on the switch
with the mounting hole, and then insert the
switch.
You can mount the controller and/

or power supply in a simple and easy
manner.
3 Secure the switch to the panel stand using the

metal washer removed in step 1.
4 Connect
terminal.
the lead wire to the desired input

Using the Display Panel Support
Using the Display Panel Support

Common to LS-9006D/LS-9030D The panel support can be mounted on either side of
the casing.
The following describes how to mount the display panel
support (OP-87757) to the casing.
1 Mount the display panel support to the display

panel (LS-D1000) using the provided bolts (M4 x
2 10).
Maximum tightening torque for securing the unit:
0.75 N·m
2 Mount the display panel support to the casing

using the provided bolts (M5 x 12).

Connecting Various Components
This section describes the connection procedure for the configuration shown below.
Expansion unit
Head Expansion unit
Controller
2

24 V DC power
supply
He
(Th ad c
40 e ca able Display panel
un m us ble c Up to 4 units
it f
or ing t an b are connectable
ca h e
ble e 40 ext
ex m c end
ten e
sio onne d up
n) cti
ng to
PC
Up to 4 heads are connectable

Different models can be * Each unit of LS-9006D and LS-9030D equal to 2 units.
used in combination. Example: LS-9006D x 1 + LS-9030M x 2 = 4 units
yyAlways make sure to switch OFF the controller before connecting or removing cables.
Connecting or removing cables with the controller switched ON may result in a malfunction.
yyPlug in the connector making sure its orientation is correct. Inserting the connector in the wrong
orientation may break the connector pins and result in a malfunction.
yyAlways use a class D grounding for the frame ground terminal of the 24 V DC power supply.

Connecting the transmitter and the Connecting the head and the controller
receiver of the head This section describes the procedure for connecting the
This allows you to adjust the distance between the controller and the head.
transmitter and the receiver of the head.
yyDo not supply power to the controller
The transmitter and receiver of the head are shipped in
before connecting the head cable.
2
connected state.
Connecting the head cable while the
yyFor LS-9120M, the transmitter and controller is switched ON may damage
receiver of the head are shipped in the head and/or the controller.
removed state. yyMaintain a minimum bend radius of 22

yyFor LS-9006D and LS-9030D, the mm or more for the head cable.
distance of the transmitter and receiver yyWhen using a cable tray, select a
cannot be adjusted. model with R100 or higher unless
specified otherwise.
yyWhen connecting the cable to the
1 Connect the cables coming out from the light
transmitter and receiver of the head.
controller, connect it to the controller
while thrusting down buttons on both
sides of the connector of the head
cable.
2 Align the notches on the connectors, and then
plug them together.
Tighten the screw with a tightening torque of 0.5 N·m.
1 Connect the head cable to the head connector of
the controller.
If you are using only one head, connect it to the
Head 1 connector.
Insert the cable firmly until you hear a clicking
sound.
To unplug the connector, pull it out,

pushing the buttons on both sides of
the connector.
Head 2
yy Plug in the connector making

sure its orientation is correct.
Inserting the connector in the
wrong orientation may break the
connector pins and result in a Head 1
malfunction.
yy Insert the connector without
tilting it, and then tighten
it firmly. If the connector is
not tightened enough, it may
become loose due to vibration,
etc. resulting in poor contact.
*Tighten it firmly by hand and then
retighten approx. 15° to 20°.

2 Connect the head and the head cable. Using the 40m connecting unit for cable
Check the orientation of the connector, and then
insert it all the way while slowly rotating it. Tighten extension
the screw with a tightening torque of 1 to 1.5 N·m. To connect the sensor head and the controller 40
m apart, connect the 40m connecting unit for cable
yy Plug in the connector making extension, head connection cable, and head connection
sure its orientation is correct.
2
extension cable as shown below.
Inserting the connector in the
Controller
wrong orientation may break the
connector pins and result in a

malfunction.
CB-B10
yy Insert the connector without
tilting it, and then tighten CB-B10E
it firmly. If the connector is
not tightened enough, it may
become loose due to vibration,
etc. resulting in poor contact. CB-BR01 CB-B20E
*Tighten it firmly by hand and then
retighten approx. 45° to 60°. CB-BR01
(Connector conversion cable)
Head

Connecting the controller and the Connecting the controller and the
expansion unit display panel
This section describes the procedure for connecting the This section describes the procedure for connecting the
controller and the expansion unit. controller and the display panel.
2 1 Insert the controller connector on the expansion

unit side into the expansion unit connector on the
1 Connect the display panel connector of the
controller and the controller connector of the
controller side. display panel using the display panel cable.
Display panel Controller

Connector Connector
2 Tighten the joint screws of the expansion unit

using a screwdriver.
Fix using joint

screws
zz
Connecting two or more display panels to the
controller
Bottom You can connect up to four display panels by
connecting the display panel connector of the
display panel connected to the controller with the
controller connector of the second display panel
using the display panel cable. The total length of the
display panel cable that can be connected is 60 m.
Display panel cable

Connecting the controller and the PC

Connecting using the Ethernet
An Ethernet connection allows you to connect multiple
To communicate with the controller using LS- controllers to a single PC. You can select one of
Navigator2, there are two methods for connecting with the connected controllers for the communication.
PC as below: The communication protocol is TCP/IP; and the
yy[Connecting using USB] communication model is peer to peer.
2
yy[Connecting using the Ethernet]
See “PC communication configuration” (page 7-2) yyYou must set the IP addresses of the
for the communication settings. controllers and the PCs such that they
do not overlap with each other in the

network.

Connecting using USB
yyProper operation is not guaranteed for
This section describes the procedure for connecting the
connections to LAN and/or connections
controller and the PC using USB.
via a router.
Do not unplug the USB cable while the
controller is in operation. Doing so
may cause the controller to function zz
Connecting the controller and the PC one-to-one
improperly or stop functioning. If the For the connection, use the OP-66843 (Ethernet) cable.
cable gets unplugged and the connection
is lost, restart LS-Navigator2.
1 Connect the connector of the controller and the

USB port of the PC with a USB cable.
Ethernet Ethernet cable Ethernet port

connector
USB connector USB port zz

Connecting two or more controllers to the PC
To connect two or more controllers, a hub supporting
100BASE-TX or 1000BASE-T is required.
For the connection between the controller and hub, or
between the PC and hub, use the OP-66843 (Ethernet)
cable.
Hub
Ethernet port
Ethernet connector Ethernet cable
The controller supports the Auto MDI/

MDI-X function (which automatically detects
the required cable connection type and
configures the connection appropriately),
allowing you to use either a crossover or
straight-through Ethernet cable.

Connecting the power supply to the How to use the terminal block
controller This section describes how to use the terminal block.
This section describes the procedure for connecting the
yyUse the following wires according to the
controller and the power supply.
terminal block used:
2 1 Connect the 24 V DC power supply to the 24 V

power supply terminal of the controller.
yyFor input terminal block (1, 2) and
output terminal block (1,2): AWG20 to
AWG28
yyFor encoder input terminal block:
yyUse a wire between AWG14 and
AWG16 to AWG28
AWG22.
yyThe end of the wire should be processed
yyIf you are using a solderless terminal,
to the following length:
use a terminal that has the following
size and suits the M3 screw: yyFor input terminal block (1, 2) and
output terminal block (1,2): Approx. 8
Ring terminal mm
yyFor encoder input terminal block:
5.8 mm or less Approx. 9 mm
yyDo not solder (pre-solder) the processed
end of the wire.
Y terminal yyThe wire should be inserted all the way
into the terminal block.
5.8 mm or less yyAttach the wire to the terminal block
directly, without using a solderless
terminal, etc.
yyTighten the screw firmly with a
tightening torque of 0.5 to 0.75 N·m.
1 Insert the wire into “part b” while pushing in “part
a” of the terminal block with a screwdriver.
Flathead screwdriver
Terminal block
a
2 When the wire is inserted to the end, remove the

screwdriver.
Lightly pull the wire to make sure it is

fixed firmly.

3
This chapter describes the basic operation flow of
LS-Navigator2 from the startup and the basic operations of
the display panel.
Basic Operations
Basic Operation Flow................................................ 3-2

Basic Operations of the Display Panel.................... 3-3
Basic Operations of LS-Navigator2....................... 3-15
- LS-9000 Series User's Manual - 3-1

Basic Operation Flow
Basic Operation Flow
The following part describes the operation flow from the startup of LS-Navigator2.
Connect the LS-9000 series with a personal computer or the display panel.
“Connecting the controller and the PC” (page 2-25)
“Connecting the controller and the display panel” (page 2-24)
3 Set up the target to be measured

“[Basic settings] Tab: Set Measurement Target” (page 5-21)
Basic Operations
Set up where to display the measurement (OUT)

“[Basic settings] Tab: OUT Setting” (page 5-32)
Set up other functions as needed.

“5 Program Setting” (page 5-1)
Monitor the measurements.

“6 Checking the Measurement Results” (page 6-1)
3-2 - LS-9000 Series User's Manual -

Basic Operations of the Display Panel
This part describes the basic operations of the display

Using Shortcuts
panel.
You can use the shortcuts combining the [FUNC] key
and the numeric keys on the display panel. The screen
Basic Operation of Setting can be switched using the shortcuts.

Selecting Items Operation Screen
On the display panel, use the [ ], [ ], [ ], and [ ] keys [FUNC]+[0] Operation setting screen
to move the cursor and use the [ENT] key to select the
items. [FUNC]+[1] Program switching screen
[FUNC]+[2] Display setting screen

Entering numeric values
To enter numeric values, operate the display panel as
[FUNC]+[3]
[FUNC]+[4]
Light intensity inspection screen
Display OUT selection screen
3
below.
Basic Operations
Position display head selection
1 any
Use the [ ] and [ ] keys to place the cursor onto
digit to which you enter the numeric value.
[FUNC]+[5]
screen
[FUNC]+[6] 2D position display setting screen
[FUNC]+[7] Tolerance setting screen
[FUNC]+[8] Area calibration screen
[FUNC]+[9] OUT scaling screen
[FUNC]+[-] Light intensity calibration screen
The selected digit blinks.
2 Use the numeric keys to enter the numeric

values.
yyPressing the [ZERO] key enters "0" in

all the digits.
yyPressing the [RESET] key restores
all the digits to the last values before
change.
yyPress the [-] key to enter a negative
value.
3 After changing the value, press the [ENT] key.

The entered numeric value is fixed.

Screen transition
Display setting screen
3
Basic Operations
[FUNC]+[2] Select [SINGLE] Select [MULTI]
Single OUT setting Multi-OUT setting
Measurement display screen
[FUNC]+[0] [FUNC]+[1] [FUNC]+[3] [FUNC]+[4] [FUNC]+[5]
Set up the operation Light intensity inspection Position display head

settings setting selection screen
POSITION
OUT HH TIM TOP
HI
GO
LO
LL ZERO
OUT HH TIM
HI
GO
LO
LL ZERO
OUT HH TIM
HI
GO
LO
LL ZERO
OUT HH TIM
HI
GO BOTTOM
LO
LL ZERO 1 2 3 4
HEAD
PROGRAM
SYNC ASYNC 1
PROG
2
DISP
3
L-INS
TIM
+Y
TIM
4
O- SEL
5
H-SEL
6
2 D -POS
RESET
-X +X
FUNC 7
LIMIT
8
CAL
9
SCAL
ZERO
Program switching screen Display OUT selection

- 0 -Y
LOCK ENT ESC
L-CAL SET 2D -POSITION
screen
LS- D1000

Display Reference
Display setting “Display Setting Screen” (page 3-8)

Single OUT setting “Single OUT Display” (page 3-6)
Multi-OUT setting “Multi-OUT Display” (page 3-6)
Set up the operation
settings “Operation Setting Screen” (page 3-7)
3
Switch the Program “Program Switching Screen” (page 3-8)
Light intensity inspection setting “Light Intensity Inspection Screen” (page 3-9)
Select the display OUT
Basic Operations
“Display OUT Selection Screen” (page 3-9)
Position Display Head Selection “Position Display Head Selection Screen” (page 3-10)
2D position display setting “2D Position Display Setting Screen” (page 3-11)
Tolerance setting “Tolerance setting” (page 5-50)
Calibration setting “Registering the calibration setting” (page 5-56)
Scaling setting “Register the scaling setting” (page 5-61)
Light intensity calibration “Performing calibration of received light intensity” (page 5-71)
[FUNC]+[6] [FUNC]+[7] [FUNC]+[8] [FUNC]+[9] [FUNC]+[-]
Tolerance setting screen Scaling setting screen
2D position display setting Calibration setting screen Light intensity calibration

screen screen
[ESC], or [ENT] after all the operation has completed.

Description of Each Screen

Multi-OUT Display
When 4 OUT’s have been selected, the main display

Single OUT Display will show the OUT value and the associated input
When using the single OUT display, the main display statuses.
section displays the OUT value on the top column You can input a signal to the selected OUT by pressing
and the associated tolerance threshold values in the the [TIM], [ZERO], or [RESET] key.
following columns.
You can input a signal to the selected OUT by pressing
zz
Temporarily displaying the tolerance threshold
value of the displayed OUT
the [TIM], [ZERO], or [RESET] key.
Pressing the [ENT] key temporarily displays the
3
zz
Switching the tolerance threshold value to be tolerance threshold value of the displayed OUT. The
displayed screen returns to the OUT display screen in 5 seconds
When the tolerance mode to be displayed is [Threshold or by any key operation.
value], you can switch the display of the tolerance
Basic Operations
Reference value mode

determination threshold value by pressing the [ ] or The displayed values are the upper limit, standard, and
[ ] key. the lower limit from the top.
“Ref. value” (page 5-35)
Threshold value mode

The values displayed are, from the top to the bottom
columns, the most upper limit, upper limit, lower limit,
and most lower limit values.
POSITION
OUT HH TIM TOP
HI
GO
LO
LL ZERO
OUT HH TIM
zz
Switching the control group for the target to be
HI
GO
LO
controlled LL ZERO
OUT HH TIM
You can switch the control group by pressing the [ ] or HI
GO POSITION
[ ] key.
LO
OUT HH TIM
ZERO LL TOP
HI
“Threshold” (page 5-35)

GO
OUT HH TIM LO
HI LL ZERO
GO BOTTOM
LO
OUT HH TIM
ZERO 1 2 3 4
zz
LL
Switching the control group of the target to be
HI
HEAD GO
LO
PROGRAM
SYNC ASYNC 1
PROG
2
DISP
3
L-INS
TIM
+Y
controlled LL ZERO
OUT HH TIM
TIM
4 5 6 RESET You can switch the control group by pressing the [ ] or HI
GO
O- SEL H-SEL 2 D -POS
[ ] key.
LO
-X +X ZERO LL
FUNC 7
LIMIT
8
CAL
9
SCAL
ZERO OUT HH TIM
HI
GO BOTTOM
LOCK - 0 ENT ESC

-Y LO
LL ZERO 1 2 3 4
The input targets when [TIM], [ZERO], and

HEAD
[RESET] keys are pressed depend on the

LS- D1000 PROGRAM
SYNC ASYNC 1
PROG
2
DISP
3
L-INS
TIM
+Y
control group which OUT display belongs to. TIM

4 5 6 RESET
SYNC O- SEL H-SEL 2 D -POS
-X +X
The signal is input to the synchronized OUT. FUNC 7

LIMIT
8
CAL
9
SCAL
ZERO
ASYNC - 0 -Y
LOCK ENT ESC
The signal is input to the OUT displayed in L-CAL SET 2D -POSITION
the single OUT. LS- D1000

The input targets when [TIM], [ZERO],

Operation Setting Screen
and [RESET] keys are pressed depend on This section describes how to apply the settings to the
the control group which the selected OUT controller.
belongs to.
SYNC
The signal is input to the synchronized OUT. 1 Press the [FUNC] key and then [0] key.
The setting item selection screen appears.
ASYNC
The signal is input uniquely to the OUT
selected by the multi-OUT.
Basic Operations
2 Press the [ ] or [ ] key to select the item you
change the setting, and then press the [ENT] key.
The selectable items are the following:
yyHEAD (Head setting)
yyTARGET (Target setting)
yyOUT (OUT setting)
yyCOMMON (Common setting)
yyIO (IO setting)
yySTAT (Statistical setting)
yyENV (Environment setting)
yyAPPLY (Apply the settings)
Please refer to the following items for

details on each setting item.
HEAD (Page 3-10)
TARGET (Page 5-21)
OUT (Page 3-6)
COMMON (Page 5-62)
IO (Page 5-89)
STAT (Page 5-52)
ENV (Page 7-8)
3 Select [APPLY] after completing the settings.
Select [EXECUTE] to apply the settings to the

controller.


Program Switching Screen
Display Setting Screen
This section describes how to switch the program used This section describes how to select and change the
for the measurement. display mode of the display panel between "Single OUT
display" and "Multi-OUT display".
1 Press the [FUNC] key and then [1] key.
[PROGRAM SELECT] appears and the PROGRAM 1 Press the [FUNC] key and then [2] key.
display blinks. The display setting screen appears.
3
Basic Operations
2 setting.
Press the [ ] or [ ] key to change the display
The items you can select are:

yySINGLE (Single OUT display)
2 Press the [
number.
] or [ ] key to select the program “Single OUT Display” (page 3-6)
yyMULTI (Multi-OUT display)
“Multi-OUT Display” (page 3-6)
0 to 15 are available for the selection.
3 Press the [ENT] key. 3 Press the [ENT] key.

The display setting turns to the selected one.
The program changes to one selected at the
PROGRAM display.


Light Intensity Inspection Screen
Display OUT Selection Screen
This section describes how to display the intensity
distribution of the received light of the specified head zz
Single OUT Display
on the main display. One "-" shows the light intensity
of 5%. On this screen, you can check the 40 to 100%
intensity of the received light.
The display OUT selection screen appears and the
95 to 100% intensity 70 to 75% intensity OUT number blinks.
of the received light of the received light
Basic Operations
2 Press the [ ] or [ ] key to select OUT to be
1 Press the [FUNC] key and then [3] key. displayed, and then press the [ENT] key.
The light intensity inspection screen appears.
The OUT numbers not set cannot be
selected.
2 display.
Press the [ ] or [ ] key to change the head to
POSITION
HH TIM TOP
HI
GO
LO
LL ZERO
HH TIM
HI
GO
LO
LL ZERO
HH TIM
HI
GO
LO
LL ZERO
HH TIM
HI
GO
LO
BOTTOM
Head number of the
LL ZERO 1 2 3 4
selected head
HEAD
3 TIM
+Y
-INS
The light intensity inspection screen for the head
6 RESET selected appears.
D-POS
-X +X
9
CAL
ZERO
3 Press the [ESC] key.
-Y
The light intensity inspection screen returns to the
ENT ESC
2D -POSITIONlast screen.
The light intensity that the display panel
can display is 40 to 100%. To check the
status of the received light in more detail,
use the target viewer.
“Target Viewer” (page 6-14)

zz
Multi-OUT display
Position Display Head Selection Screen
This section describes how to check the position of the
1 Press the [ ] or [ ] key to select OUT whose
display OUT is changed.
target. An area where the target exists appears in red
and the other in green.

The indicator at the position display blinks.
POSITION
OUT HH TIM TOP
HI
GO
3
LO
LL ZERO Blinking
OUT HH TIM
HI
GO
LO
ZERO
Basic Operations
LL
OUT HH TIM
HI
GO

LO
LL ZERO
The display OUT selection screen appears and the

OUT HH TIM
HI
GO BOTTOM
OUT number blinks. LO
ZERO 1 2 3 4
LL
HEAD
PROGRAM
SYNC ASYNC 1
PROG
2
DISP
3
L-INS
TIM
+Y
2 displayed,
TIM
4
O- SEL
5
H-SEL
6
2 D -POS
RESET Press the [ ] or [ ] key to select the head to be
-X
and then press the [ENT] key.
+X
FUNC 7
LIMIT
8
CAL
9
SCAL
ZERO
The position of the target of the selected head
appears in red.
LOCK - 0 ENT ESC
-Y
POSITION
OUT HH TIM TOP
LS - D1000 HI
GO
LO
LL ZERO
3 Press
OUT HH TIM
the [ ] or [ ] key to select OUT to be HI
GO
displayed, and then press the [ENT] key. LO

LL ZERO Target
OUT HH TIM
yyThe OUT numbers not set cannot be
HI
GO
LO
selected. LL ZERO
OUT yyYou can hide the measurement values HH

HI
TIM
by selecting blank. GO
LO
BOTTOM
Head number of the
ZERO 1 2 3 4
LL
HEAD
selected head
PROGRAM
SYNC ASYNC 1
PROG
2
DISP
3
L-INS
TIM
+Y
TIM
When the selected head does not exist,
4 5 6 RESET
O- SEL H-SEL 2 D -POS
-X +X the entire indicator appears in red.
FUNC 7
LIMIT
8
CAL
9
SCAL
ZERO
LOCK - 0 ENT ESC

-Y
LS - D1000


2D Position Display Setting Screen yyWhen any OUT not used is selected,
This section describes how to select the OUT numbers the OUT does not appear in the 2D
to be respectively displayed on the X and Y axes in the position display.
2D position display. yyWhen [--------] (OFF) is selected for the
X axis, the 2D position display is limited
1 Press the [FUNC] key and then [6] key. to on the Y axis.
yyWhen [--------] (OFF) is selected for the
The 2D position display setting screen appears.
Y axis, the 2D position display is limited
to on the X axis.
zz
Selecting OUT to be displayed on the X and Y axes yyWhen [--------] (OFF) is selected for both
2 Press the [ ] or [ ] key to select [AXIS], and

then press the [ENT] key.
the X and Y axes, no OUT appears in
the 2D position display. 3
Basic Operations
5 Press the [ ] or [ ] key to select [CONTINUE],
The X/Y axis selection screen appears.
3 press
Press the [ ] or [ ] key to select [AXIS], and then
the [ENT] key. The screen returns to the 2D position display setting
screen.
6 Follow the steps 2 to 4 again to select OUT to be

displayed on the Y axis.
The X axis display target OUT selection screen

appears.
4 displayed,
Press the [ ] or [ ] key to select OUT to be

zz
Setting the center positions of the X and Y axes 6 Follow the steps 2 to 4 again to set the center
position for the Y axis.
2 Press the [ ] or [ ] key to select [CENTER], and
then press the [ENT] key. zz
Setting the display ranges of the X and Y axes
You can set the ranges of the X and Y axes in the
2D position by ±.
Example:
CENTER (X): 0 mm/RANGE (X): 10 mm
CENTER (Y): 10 mm/RANGE (Y): 20 mm,
the 2D position displays the information below:
3 X axis: ±10 mm, and

Y axis: -10 to 30 mm
2 Press the [ ] or [ ] key to select [RANGE], and

Basic Operations
The X/Y axis selection screen appears. then press the [ENT] key.
3 press
Press the [ ] or [ ] key to select [X], and then
the [ENT] key.
The X/Y axis selection screen appears.
The X axis center position input screen appears.

3 press
Press the [ ] or [ ] key to select [X], and then
the [ENT] key.
4 enter,
Use the [ ] and [ ] keys to switch the digit to
the numeric key to enter the values, and
The X axis display range selection screen appears.
4 enter,
Use the [ ] and [ ] keys to switch the digit to
the numeric key to enter the values, and
5 Press the [ ] or [ ] key to select [CONTINUE],
The default display range depends on the

setting of the minimum display unit.
The screen returns to the 2D position display setting
screen.

5 Press
POSITION
the [ ] or [ ] key to select [CONTINUE],

Key Lock Check Screen/Password Entry
OUT HH
HI
GO
TIM TOP
and then press the [ENT] key. Screen

LO
LL ZERO
OUT HH TIM
HI
zz
Locking the keys
GO
LO
LL ZERO
OUT HH TIM
1 Press
HI
GO
and hold the [LOCK] key (2 seconds or LO

LL ZERO
more).
OUT HH
HI
TIM
GO BOTTOM
The keys on the display panel are locked. LO

LL ZERO 1 2 3 4
HEAD
PROGRAM
SYNC ASYNC 1 2 3 TIM
+Y
3
PROG DISP L-INS
TIM
4
O- SEL
5
H-SEL
6
2 D -POS
RESET
-X +X
FUNC 7
LIMIT
8
CAL
9
SCAL
ZERO
The screen returns to the 2D position display setting
Basic Operations
- 0 -Y
screen. LOCK
L-CAL SET
ENT ESC
2D -POSITION
LS- D1000
Lighting on
6 Follow the steps 2 to 4 again to select the display
range for the Y axis.
While the keys are locked, the [LOCK] button lights
up in red. When you operate any key while the
keys are locked, the key lock confirmation screen
appears.
7 After setting the display OUT, the center
positions, and the display ranges for both X and
Y axes, press the [ ] or [ ] key to select [EXIT],
and press the [ENT] key.
The settings are applied to the 2D position display,

and the screen returns to the 2D position display
setting screen.
yyEven when you switch the program, the
2D position display settings are held.
yyThe 2D position display settings are
initialized only when:
yythe minimum display unit is changed
in the current program,
yythe minimum display unit is different
from the one for the switched
program, and
yyall the settings of the controller are
initialized.

zz
Canceling the key lock (when no password is set.)
5 buzzer
Use the [ ], [ ], [
setting.
], and [ ] keys to switch the
1 Press and hold the [LOCK] key (2 seconds or

more) when the keys are locked.
The key lock is canceled.
zz
Canceling the key lock (when the password is set.)
1 Press and hold the [LOCK] key (2 seconds or
3 more) when the keys are locked.

The password entry screen appears.
2 Enter the password by the numeric keys. 6 Press the [ENT] key.
Basic Operations

All Setting Initialization Screen
This section describes how to restore all the program
and environmental settings to the factory default.
To initialize only the program (restore to the
factory default), please read “Initializing
the program setting” (page 5-19).
The key lock is canceled and the last screen

appears.
1 Press
power.
and hold the [ESC] key and turn on the
The password can be set only from LS-Navigator2. The all setting initialization screen appears.
“Password” (page 7-7)

Buzzer Setting Screen
This section describes how to set the ON/OFF of the
buzzer during the operation of the display panel.

2 Press the [ ] or [ ] key to select [ENV], and then
press the [ENT] key.
3 then
Press the [ ] or [ ] key to select [BUZZER], and 2 Press the [ ] or [ ] key to select [EXECUTE],
Initialization starts up, and after the initialization the
completion screen appears.
4 The buzzer ON/OFF selection screen appears.
3 Press the [ENT] or [ESC] key.

The screen returns to the measurement screen.

Basic Operations of LS-Navigator2
[Open setting file]

Startup
The [Open file] dialog will appears. The setting file
This section describes the procedure for starting up stored in the PC beforehand is read.
LS-Navigator2.
For details, refer to “Reading Setting
1 Double-click
File” (page 3-18).
the [LS-Navigator2] shortcut icon
on the desktop or select the start menu → [All
Program] → [Keyence Applications] → [LS- [Monitor controller]
Navigator2], to start up the software. The main window appears and monitoring starts.
The current settings of the controller is read.
For details, refer to “6 Checking the
Measurement Results” (page 6-1). 3
Basic Operations
This screen appears.
[PC communication set]
The [PC communication set] dialog appears.
For details, refer to “PC

communication configuration” (page
7-2).
When the check box of [Do not show

again] is checked, the startup menu does
not appear at the next startup.
The startup menu appears next.
To show the startup menu at the startup,
2 Select the items to be set.

refer to “Displaying the start-up menu”
(page 7-19).
yyNew setting
yyRead from controller
yyOpen setting file
yyMonitor controller
3 Perform some operations such as displaying
measurements, communicating the setting
yyPC communication set parameters, and saving and backup of the setting
file.
[New setting]
The [Program setting] screen appears.
For details, refer to “[Program Setting]
Screen” (page 5-17).
[Read from controller]

[Program setting] screen appears.
The current settings of the controller appear.

Shutdown Sending/Reading Settings

This section describes the procedure for exiting LS-
Sending the settings to the controller
Navigator2.
This section describes the procedure for sending
(applying) the program settings created with LS-
1 Select the [File] menu and then [Exit] to exit LS-
Navigator2.
Navigator2 to the controller.
1 Display the [Program setting] screen and set up

the program.
3
Change the settings arbitrary.
Basic Operations
2 Click the [Send to controller] button.

The measurement screen closes and LS-Navigator2
exits.
The sending completion dialog appears.
3 Click the [OK] button.

The items set on LS-Navigator2 are applied to the
controller.


Reading Settings from Controller Saving and Reading Setting File
This section describes the procedure for reading out the
settings of the controller.
Saving the setting file
1 Display the LS-Navigator2 screen. This section describes the procedure for saving the
created program settings in a file.
2 Click the [Read from controller] button.
1 Display the [Program setting] screen and set up
the program.
Change the settings arbitrary.
3
Basic Operations
2 Click the [Save setting file] button.
[Program setting] screen appears.

The program settings set in the controller are read
and reflected to the [Program setting] screen.
The [Save as] dialog appears.
3 Enter the file name and click the [Save] button.
The setting file is saved.

Reading Setting File

From Main Screen

From Startup Menu
1 Select the [File] menu and then [Open setting
file].
1 Click the [Open setting file] button.
3
Basic Operations
The [Open] dialog appears.

2 Select the setting file and click the [Open] button.
The [Program setting] screen appears, to which the

content of the setting file has been applied.
The [Program setting] screen appears, to which the

content of the setting file has been applied.


From [Program setting] Screen Displaying Objective Screen
1 Click the [Open setting file] button. You can display each screen to check the measurement
results from the [Display] menu.
1 Select the screen name to display from the

[Display] menu.
The screen being displayed has the icon
displayed at the left of the screen name.
When an image in the sub menu is displayed, the
icon appears at the left of the screen name.
3
Basic Operations
For the details of each screen that can be

displayed from the [Display] menu, refer
to “Measurement Screen Outline and
Switching Screens” (page 6-2).
The content of the setting file is applied to the

[Program setting] screen.

How to Use Help
(1) (2)
3 (3)
Basic Operations
(1) [?] Icons

By clicking the [?] icon at the left of the item name,
descriptions of the item appear in the help display
area of (2).
(2) Help display area
When the [?] icon is clicked, descriptions for the
function appear.
(3) [More detailed] link
By clicking the link, more detailed description of the
function appear in a new window.

4
This chapter describes how to set measurements.
Easy Setting Guide
Flow of Measurement................................................ 4-2

Outer Diameter Measurement (1 head)................... 4-4
Outer Diameter Measurement (2 Axes)................... 4-5
Outer Diameter / Width Measurement (Large
Diameter Measurement by Using 2 Heads)............. 4-6
Inner Diameter / Gap Measurement......................... 4-7
Outer Diameter / Runout Measurement................... 4-8
Edge Position Measurement.................................... 4-9
Edge Position Measurement
(Transparent Target)................................................ 4-10
Pitch Measurement................................................. 4-11
Group Determination............................................... 4-12
Statistical Processing............................................. 4-13

Flow of Measurement
Flow of Measurement
1 Select the measurement type in the measurement setting.

On clicking the [Add target] button, the [Target] window appears.
Select [Top edge] and click [OK] button.
4
Easy Setting Guide
2 Select the OUT number to display the measurement value.

On clicking [Add OUT], [OUT2] is displayed.
Select [Target 2] for OUT2 target measurement.

Flow of Measurement
3 Send the setting to the controller.

Click [Send to controller].
Easy Setting Guide

4 Display the measurement value.
Click [Start monitor] to display the measurement value.

Outer Diameter Measurement (1 head)
Outer Diameter Measurement (1 head)
The diameter is measured by one head in one axis.

The measurement result is displayed in OUT1.
4 The diameter is measured in one axis.

Easy Setting Guide

Setting values
Setting Setting values

Setting the
Head 1 Target 1 Outer diameter
measurement target
OUT setting OUT1 Target 1
“Outer diameter” (page 5-22)

“OUT setting” (page 5-34)

Outer Diameter Measurement (2 Axes)
Outer Diameter Measurement (2 Axes)
The average outer diameter of two axes is measured.

D=
X+Y
2
4
Easy Setting Guide

The diameter is measured in two axes.

Setting values
Setting the Head 1 Target 1 Outer diameter

measurement target Head 2 Target 2 Outer diameter
[Target 1],
OUT setting OUT1 Average
[Target 2]

“Combined calc.” (page 5-36)

Outer Diameter / Width Measurement (Large Diameter Measurement by Using 2 Heads)
Outer Diameter / Width Measurement (Large

Diameter Measurement by Using 2 Heads)
You can use two heads to measure width of a target that cannot be placed between two heads.
When you measure width.
Head 1
4
Head 2
Easy Setting Guide
When you measure diameter.
Head 1
Head 2

Setting values
Setting the Head 1 Target 1 Bottom edge

measurement target Head 2 Target 2 Bottom edge
Combined calculation [Target 1] × (-1) + [Target 2] × (-1)
OUT setting OUT1
Offset Dimension of the master target
Calibration and
Scaling setting Set up as needed.
scaling setting

Steps
1. Set up as above.
2. Place the master target in the measurement area.
3. Perform the auto zero function.
4. Perform the scaling as needed.
“Top edge/Bottom edge” (page 5-23)

“Combined calc.” (page 5-36)
“Offset” (page 5-36)
“Scaling setting” (page 5-59)

Inner Diameter / Gap Measurement
Inner Diameter / Gap Measurement
The inner diameter of the measurement target is measured.

The target is moved and the maximum value of the measurement is measured as the inner diameter.
Easy Setting Guide

Setting values

Setting the Select edge (pitch) number
Head 1 Target 1
measurement target (+1E, +2E)
- Target 1
OUT setting OUT1
Measure Mode Peak hold
“Edge (pitch) number setting” (page 5-24)

“Peak hold” (page 5-37)

Outer Diameter / Runout Measurement
Outer Diameter / Runout Measurement
The target is rotated to measure its outer diameter and runout.

The measurement results are displayed in OUT1 and OUT2.
Runout
Outer diameter
4
Easy Setting Guide

Setting values
Setting the Target 1 Outer diameter

Head 1
measurement target Target 2 Center position
- Target 1
OUT1
Measure mode Average hold
OUT setting
- Target 2
OUT2
Measure mode Peak to Peak hold
Calibration and
Scaling setting Set up as needed.
scaling setting

Steps
1. Place the target in the measurement area.
2. Rotate the target, then input the TIMING specified for the swing period to be measured.
“Set measure target” (page 5-22)

“Average hold” (page 5-37)
“Peak-to-peak hold” (page 5-37)

The edge position of the target is measured.

Easy Setting Guide

Setting values

Setting the
Head 1 Target 1 Bottom edge
measurement target
OUT setting OUT1 - Target 1


Edge Position Measurement (Transparent Target)
Edge Position Measurement (Transparent

Target)
The edge position of a transparent object is measured.
4
Easy Setting Guide

Setting values

Setting the
Head 1 Target 1 Top edge
measurement target
Edge detection 70% (depends on the
Common setting Edge detection Head 1
threshold value transparency)
* Change the edge detection threshold value depending on the light volume (light intensity) at the receiver.
The light intensity can be checked using the target viewer function.

“Average hold” (page 5-37)
“Edge detection threshold” (page 5-64)

Pitch Measurement
Pitch Measurement
The pitch of the pins can be measured.

The measurement result can be displayed for each pair.
Easy Setting Guide

Two center pitches can be measured
simultaneously.

Setting values

Select edge (pitch) number
Target 1
Setting the (+2P, +4P)
Head 1
measurement target Select edge (pitch) number
Target 2
(+2P, +4P)
OUT1 - Target 1
OUT setting
OUT2 - Target 2
“Edge (pitch) number setting” (page 5-24)


Group Determination
Group Determination
This process calculates a mean value from the measurements of a group consisting of multiple targets, and determines
acceptance and rejection on the basis of the mean value.
The determination can also be made by the maximum or minimum value.
The group determination result is displayed in OUT16.
4
Easy Setting Guide
Acceptance or rejection is determined by the

mean value of 12 shafts.

Setting values

Setting the
measurement target
OUT1 - Target 1
OUT setting
OUT16 - -
Calculation content Average
Group calculation Original calculation
Common setting OUT1
function OUT
Calculation point 12 pts (depends on the work point)
* The group determination function is calculated on the basis of the value fixed by the TIMING input.

“Group calculation” (page 5-86)

Statistical Processing
Statistical Processing
From the measurements, the following are continuously calculated: maximum value, minimum value, mean value,
maximum value - minimum value, standard deviation, no. of N (measurements), no. of HH judgements, no. of HI
judgements, no. of GO judgements, no. of LO judgements and no. of LL judgements.
The measurement result can be checked either by LS-Navigator2 or by connecting with RS-232C.
Easy Setting Guide

The outer diameters of 96 sampled parts are
measured and the results are continuously
calculated.

Setting values

Setting the
measurement target
Statistical processing
Terminal or command
control method
Statistical processing No. of statistical 96 pts (varies according to the number
Common setting
setting processing of work points)
Statistical processing
OUT1
Ch
* The result of the statistical processing is calculated on the basis of the value fixed by the TIMING input.

“Statistic process settings” (page 5-110)

Group Determination
MEMO
4
Easy Setting Guide

5
This chapter describes the contents and setup procedure
for the program setting.
Program Setting
Flow of the Program Setting..................................... 5-2

List of Initial Values and Setting Ranges................ 5-3
Combined limitation for analog scaling
(Ref. val mode) and minimum display unit........... 5-15
Function Restriction of Each Head Model............ 5-16
[Program Setting] Screen....................................... 5-17
[Basic settings] Tab: Set Measurement Target..... 5-21
[Basic settings] Tab: OUT Setting.......................... 5-32
[Calibration, Scaling] Tab: Calibration Setting..... 5-52
[Calibration, Scaling] Tab: Scaling Setting........... 5-57
[Common setting] Tab: Edge Detection................ 5-62
[Common setting] Tab: Interference Prevention.... 5-72
[Common setting] Tab: Sync Setting..................... 5-75
[Common setting] Tab: Data Storage.................... 5-77
[Common setting] Tab: Group Calculation........... 5-84
[Common setting] Tab: I/O Terminal Setting......... 5-89
[Common setting] Tab: Stat Process................... 5-109
[Setting list] Tab..................................................... 5-114

Flow of the Program Setting
Flow of the Program Setting
Measurement programs explained in this chapter refer to the settings as shown in the figure below of all the settings
stored in the Controller.
Entire settings
Program 15
Program 01
Program 00
Setting the measurement target
5
OUT setting
Calibration and Scaling setting

Program Setting
Common measurement setting (Edge detection, Sync setting, I/O

communication setting, etc.)
Environment setting
RS-232C communication setting, Ethernet communication setting,
Date/Time setting, etc.
You can edit the common measurement and program settings to obtain optimum measurement results.
zz
Program 00 to Program 15
A [Program] combines the sequence of settings from the basic settings to common settings to define the
measurement operation.
This unit can store up to 16 programs from which you can select the program you wish to use for the measurement.
You can also switch to another program while the measurement is in progress.
If you wish to create new program settings

In the Main screen if you click on the [New setting] button, the [Program setting] screen will appear.
If you wish to edit existing program settings

If you click on the [Read from controller] button in the Main screen, the [Program setting] screen to which the settings
read from the controller were applied will appear.

List of Initial Values and Setting Ranges
Basic settings

Set measure target
Item name Default setting Setting value

Target Target 1 Target 1 to Target 16
Head used Head 1 Head 1 to Head 4
Outer diameter, Top edge, Bottom edge,
Edge, Select pitch number, Ultrafine outer
Area type Outer diameter
DIA, Ultrafine gap, Tx-Rx Pos, Center
position
Edge (pitch) number
Edge (pitch) start number +2E -31E(P) to +31E(P)
Edge (pitch) finish number +3E -31E(P) to +31E(P)
Tilt correction*
Delay
OFF
OFF
ON, OFF
OFF, 1 to 1023
5
Median filter OFF OFF, 7, 15, 31
Program Setting
* Available on LS-9006M/LS-9030M. When using this item on other model, the measurement value will be output
waiting.

OUT setting

0.1 mm, 0.01 mm, 0.001 mm, 0.0001 mm,
Minimum display unit 0.0001 mm
0.00001 mm, 1 µm, 0.1 µm, 0.01 µm
Tolerance mode Ref value Ref value, Threshold value
OUT OUT1 OUT1 to OUT16
OUT name OUT_xx In 24 one-byte/two-byte characters
Calculation method
Calculation mode No calculation No calculation, Combined calc, Average
Calculation mode = No calculation
Target Target 1 Target 1
Calculation mode = Combined calc.
Coefficient +1 9 kinds of 0, ±1, ±1/2, ±1/3 and ±1/4
Coefficient 0 9 kinds of 0, ±1, ±1/2, ±1/3 and ±1/4
Target Unused Target 1 to Target 16


Calculation mode = Averaging
Target 1 ON ON, OFF
Target 2 OFF ON, OFF
… (omitted) … OFF ON, OFF
Offset 0.0000 mm Minimum display unit: mm
Measurement mode
Normal, Peak measurement,
Bottom measurement, Peak-to-peak
measurement, Auto peak measurement,
Measurement mode Normal Auto bottom measurement, Auto
5 peak-to-peak measurement, Average

measurement, Sample measurement,
Self-timing measurement
Program Setting
Hold mode Hold 1 Hold 1, Hold 2, Hold 3

Self-timing period 1000 ms 1 to 9999 ms
Filter
Filter Moving average Moving average, Simple average
1, 2, 4, 8, 16, 32, 64, 128, 256, 512,
Averaging times 2048
1024, 2048, 4096, 8192, 16384, 32768
Tolerance
Tolerance mode=Ref value
UPPER +1.0000 mm
STANDARD +10.0000 mm
LOWER -1.0000 mm
Tolerance mode=Threshold
HH +40.0000 mm
HI +30.0000 mm
LO 0.0000 mm
LL -10.0000 mm
Difference function OFF ON, OFF
Outlier exclusion
Outlier exclusion function OFF ON, OFF
Output waiting
Exclusion method Output waiting data, Prev val hold
data
No continuous outlier 1 1 to 4095
Upper limit +1.0000 mm
Lower limit -1.0000 mm


Abnormal value canceling function
Abnormal value canceling function OFF ON, OFF
Pts before cancellation 0 0 to 4095
Pts after cancellation 0 0 to 4095
Cancelling upper limit +1.0000 mm
Cancellation lower limit -1.0000 mm
Program Setting

Calibration and Scaling

Calibration setting
Calibration target Target 1 Target 1 to Target 16
OFF, 1 point, 2 pts, 3 pts, 4 pts, 5 pts, 6
Calibration pts OFF
pts, 7 pts, 8 pts
Input 1 -
Displayed 1 -
Input 2 -
Displayed 2 -
5
…
Input 8 -
Displayed 8 -
Program Setting
Scaling
OUT OUT1 OUT1 to OUT16
OFF, 1 point, 2 pts, 3 pts, 4 pts, 5 pts, 6
Scaling pts OFF
pts, 7 pts, 8 pts
Input 1 -
Displayed 1 -
Input 2 -
Displayed 2 -
…
Input 8 -
Displayed 8 -

Common setting

Edge detection

Head Head 1 Head 1 to Head 4
Edge detection threshold T1 50% 1 to 99% (at 1% increments)
Edge detection threshold T2 setting OFF ON, OFF
Edge detection threshold T2 50% 1 to 99% (at 1% increments)
Calibration of received light intensity (None) (None)
Mask setting
Mask setting OFF ON, OFF
-9999.99 to +9999.99 (at 0.01 mm
Mask position M1 0.00
5
increments)
-9999.99 to +9999.99 (at 0.01 mm
Mask position M2 0.00
increments)
Program Setting
Check No. of edges pts OFF OFF, 2 to 31
FOCUS monitor setting* 5 0 to 9
* Not available on LS-9006D/LS-9030D/LS-9120M.

Interference prevention

Interference prevention func. OFF OFF, AB-ON, ABC-ON
In the order of
For Heads 1 to 4, one of Group A, Group
Interference prevention group setting ABCA from Head
B and Group C can be selected.
1

Sync setting

For OUT1 to OUT16, either ON or OFF
Sync measure OUT All OFF
can be selected.

Data storage

Data storage
Storage points 30000 1 to 400,000 pts
x1, x2, x5, x10, x20, x50, x100, x200,
Storage cycle 1 point x500, x1000, 1sec, TIMING sync, Storage
trigger sync.
Storage control method Command Terminal, Command
Storage target OUT All OUT: ON
can be selected.
Fail storage OFF ON, OFF


Group calculation

Group calculation
Group calc. func OFF ON, OFF
Maximum value, Minimum value, Max-
Group calc. content Maximum value
Min, Average
OUT1 to OUT16
Original calc. OUT OUT1 (Select from OUTs which have been set
for use.)
Group calc pts 2 2 to 4095

I/O terminal setting
5 Encoder setting
1-ph 1 TM, 2-ph 1 TM, 2-ph 2 TM, 2-ph
Input mode 1-ph 1 TM
Program Setting
4 TM
Sampling OFF OFF, 2 to 1000 pulses
No unit
Pitch unit No unit, µm, mm
Pitch interval 0.10 0.01 to 100 (at 0.01 increments)

Encoder TIMING func OFF ON/OFF
Pulse count preset function
Positive-true logic, Negative-true logic,
Preset function OFF
OFF
Preset value 0 32-bit signed integer
Control input and Judgment output settings
2 ms, 5 ms, 10 ms, 20 ms, 50 ms,
Strobe time 2 ms
100 ms, 200 ms, 500 ms
0, 2 ms, 5 ms, 10 ms, 20 ms, 50 ms,
Off-delay time 0
100 ms, 200 ms, 500 ms, Hold
Total judgment setting All ON
can be selected.
No. of control Ch 2 2, 3, 4
OUT1 to OUT16
Control Ch 1 OUT1 (Select from OUTs which have been set
for use.)
OUT1 to OUT16
for use.)
OUT1 to OUT16
for use.)
OUT1 to OUT16
for use.)


Analog output terminal setting ch1 to ch4
OUT1 to OUT16
Analog output terminal OUT setting OUT1 (Select from OUTs which have been set
for use.)
Tolerance mode=Ref value 1, 2, 5, 10, 20, 50, 100, 200, 500, 1000,
1000 [um/V]
Analog scaling value 2000, 5000, 10000 [um/V]
Analog scaling value +30.0000 mm
+10V
Analog scaling value 0.0000 mm
-10V
Vol of output waiting data -10.8 V -10.8 V, +10.8 V, 0 V, Prev val hold
Status output ch1 to ch4
Output waiting data, Continuous outlier,
5
FOCUS, Insufficient light, Check No.
Program Setting
Select function FOCUS
of edges: Fail, Stat processing, Pulse
frequency error
OUT No. OUT1 OUT1 to OUT16
Head No. Head 1 Head 1 to Head 4
Stat ch. No. Ch1 ch1, ch2
BCD unit settings
BCD output, Binary output, Judgment
Output function selection BCD output
output
OUT selection method Controller settings Controller settings, BCD unit terminal
Ch1 to Ch4 OUT1 OUT1 to OUT16
2 ms, 5 ms, 10 ms, 20 ms, 50ms, 100ms,
Strobe time 2 ms
200ms, 500ms

Stat process

Stat process
Stat control method Command Terminal, Command
No. of stat proc 2 2 to 999999
OUT1 to OUT16
Stat proc ch1 OUT No. OUT1 (Select from OUTs which have been set
for use.)
OUT1 to OUT16
Stat proc ch2 OUT No. OUT1 (Select from OUTs which have been set
for use.)

Setting a different range and initial value for the minimum display unit
Minimum display unit
0.1 mm 0.01 mm
Settings affected by the minimum Range for values Range for values
Default setting Default setting
display unit setting that can be set that can be set
Calibration (*1) -9999.9 mm -9999.99 mm
Input 1 to to
+9999.9 mm +9999.99 mm
Displayed 1
Input 2
Displayed 2
…
Input 8
Displayed 8
5
Outlier exclusion
Upper limit +1.0 mm +1.00 mm
Lower limit -1.0 mm -1.00 mm
Cancelling function
Program Setting
Cancelling upper limit +1.0 mm +1.00 mm

Cancellation lower limit -1.0 mm -1.00 mm
Scaling (*1)
Input 1
Displayed 1
Input 2
Displayed 2
…
Input 8
Displayed 8
Offset 0.0 mm 0.00 mm
Tolerance
UPPER +1.0 mm +1.00 mm
STANDARD +10.0 mm +10.00 mm
LOWER -1.0 mm -1.00 mm
HH +40.0 mm +40.00 mm
HI +30.0 mm +30.00 mm
LO 0.0 mm 0.00 mm
LL -10.0 mm -10.00 mm
Analog scaling value
+10V value +100.0 mm +30.00 mm
-10V value -100.0 mm 0.00 mm
*1 For initial value in case 1 to 8 points have been set in the Calibration and Scaling, refer to “Different Initial
Value for Setting Calibration and Scaling Points” (page 5-14)


0.001 mm 0.0001 mm
Calibration (*1) -9999.999 mm -999.9999 mm
Input 1 to to
+9999.999 mm +999.9999 mm
Displayed 1
Input 2
Displayed 2
…
Input 8
Displayed 8
Outlier exclusion
Upper limit +1.000 mm +1.0000 mm
5
Lower limit -1.000 mm -1.0000 mm
Cancelling function
Cancelling upper limit +1.000 mm +1.0000 mm
Program Setting
Cancellation lower limit -1.000 mm -1.0000 mm
Scaling (*1)
Input 1
Displayed 1
Input 2
Displayed 2
…
Input 8
Displayed 8
Offset 0.000 mm 0.0000 mm
Tolerance
UPPER +1.000 mm +1.0000 mm
STANDARD +10.000 mm +10.0000 mm
LOWER -1.000 mm -1.0000 mm
HH +40.000 mm +40.0000 mm
HI +30.000 mm +30.0000 mm
LO 0.000 mm 0.0000 mm
LL -10.000 mm -10.0000 mm
+10V value +30.000 mm +30.0000 mm
-10V value 0.000 mm 0.0000 mm


0.00001 mm 1 µm
Calibration (*1) -99.99999 mm -9999999 µm
Input 1 to to
+99.99999 mm +9999999 µm
Displayed 1
Input 2
Displayed 2
…
Input 8
Displayed 8
Outlier exclusion
Upper limit +1.00000 mm +1000 µm
5
Lower limit -1.00000 mm -1000 µm
Cancelling function
Cancelling upper limit +1.00000 mm +1000 µm
Program Setting
Cancellation lower limit -1.00000 mm -1000 µm

Scaling (*1)
Input 1
Displayed 1
Input 2
Displayed 2
…
Input 8
Displayed 8
Offset 0.00000 mm 0 µm
Tolerance
UPPER +1.00000 mm +1000 µm
STANDARD +10.00000 mm +10000 µm
LOWER -1.00000 mm -1000 µm
HH +40.00000 mm +40000 µm
HI +30.00000 mm +30000 µm
LO 0.00000 mm 0 µm
LL -10.00000 mm -10000 µm
+10V value +30.00000 mm +30000 µm
-10V value 0.00000 mm 0 µm


0.1 µm 0.01 µm
Calibration (*1) -999999.9 µm -99999.99 µm
Input 1 to to
+999999.9 µm +99999.99 µm
Displayed 1
Input 2
Displayed 2
…
Input 8
Displayed 8
Outlier exclusion
Upper limit +1000.0 µm +1000.00 µm
5
Lower limit -1000.0 µm -1000.00 µm
Cancelling function
Cancelling upper limit +1000.0 µm +1000.00 µm
Program Setting
Cancellation lower limit -1000.0 µm -1000.00 µm
Scaling (*1)
Input 1
Displayed 1
Input 2
Displayed 2
…
Input 8
Displayed 8
Offset 0.0 µm 0.00 µm
Tolerance
UPPER +1000.0 µm +1000.00 µm
STANDARD +10000.0 µm +10000.00 µm
LOWER -1000.0 µm -1000.00 µm
HH +40000.0 µm +40000.00 µm
HI +30000.0 µm +30000.00 µm
LO 0.0 µm 0.00 µm
LL -10000.0 µm -10000.00 µm
+10V value +30000.0 µm +30000.00 µm
-10V value 0.0 µm 0.00 µm

Different Initial Value for Setting Calibration and Scaling Points

Minimum display unit: mm
Calibration/Scaling pts
OFF 1 point 2 point 3 point 4 point 5 point 6 point 7 point 8 point
Input 1, 0 0 0 0 0 0 0 0
Output 1 (mm) (mm) (mm) (mm) (mm) (mm) (mm) (mm)
Input 2, 10 5 2 1 0.2 0.2 0.1
Output 2 (mm) (mm) (mm) (mm) (mm) (mm) (mm)
Input 3, 10 5 2 1 0.5 0.2
Output 3 (mm) (mm) (mm) (mm) (mm) (mm)
Input 4, 10 5 2 1 0.5
Output 4 (mm) (mm) (mm) (mm) (mm)
Input 5, 10 5 2 1
5 Output 5
Input 6,
(mm) (mm)
10
(mm)
5
(mm)
2
Output 6 (mm) (mm) (mm)
Program Setting
Input 7, 10 5
Output 7 (mm) (mm)
Input 8, 10
Output 8 (mm)
Minimum display unit:µm

Calibration/Scaling pts
OFF 1 point 2 point 3 point 4 point 5 point 6 point 7 point 8 point
Input 1, 0 0 0 0 0 0 0 0
Output 1 (µm) (µm) (µm) (µm) (µm) (µm) (µm) (µm)
Input 2, 10000 5000 2000 1000 200 200 100
Output 2 (µm) (µm) (µm) (µm) (µm) (µm) (µm)
Input 3, 10000 5000 2000 1000 500 200
Output 3 (µm) (µm) (µm) (µm) (µm) (µm)
Input 4, 10000 5000 2000 1000 500
Output 4 (µm) (µm) (µm) (µm) (µm)
Input 5, 10000 5000 2000 1000
Output 5 (µm) (µm) (µm) (µm)
Input 6, 10000 5000 2000
Output 6 (µm) (µm) (µm)
Input 7, 10000 5000
Output 7 (µm) (µm)
Input 8, 10000
Output 8 (µm)

Combined limitation for analog scaling (Ref. val mode) and minimum display unit
Combined limitation for analog scaling (Ref.

val mode) and minimum display unit
Limitation for combined analog scaling (Ref. val mode) and minimum display unit
○ : Output is possible
× : +10.8 V fixed
Output Setting the minimum display unit

µm/V
range 0.01 µm 0.1 µm 1 µm 0.00001 mm 0.0001 mm 0.001 mm 0.01 mm 0.1 mm
1 ± 10.0 µm ○ × × ○ × × × ×
2 ± 20.0 µm ○ ○ × ○ ○ × × ×
5 ± 50.0 µm ○ ○ × ○ ○ × × ×
10 ± 100.0 µm ○ ○ × ○ ○ × × ×
20 ± 200.0 µm ○ ○ ○ ○ ○ ○ ○ ○
50 ± 500.0 µm ○ ○ ○ ○ ○ ○ ○ ○
100 ± 1mm ○ ○ ○ ○ ○ ○ ○ ○
200
500
± 2mm
± 5mm
○
○
○
○
○
○
○
○
○
○
○
○
○
○
○
○
5
Program Setting
1000 ± 10mm ○ ○ ○ ○ ○ ○ ○ ○
2000 ± 20mm ○ ○ ○ ○ ○ ○ ○ ○
5000 ± 50mm ○ ○ ○ ○ ○ ○ ○ ○
10000 ± 100mm ○ ○ ○ ○ ○ ○ ○ ○

Function Restriction of Each Head Model

○: Available
×: Not available
Head model
Function
LS-9006 LS-9006M LS-9030 LS-9030M LS-9006D LS-9030D LS-9120M
Target viewer × ○ × ○ × × ○
Tilt correction × ○ × ○ × × ×
Ultrafine outer DIA,
○ ○ ○ ○ × × ○
Ultrafine gap
Tx-Rx Pos ○ ○ ○ ○ × × ×
FOCUS monitor ○ ○ ○ ○ × × ×
5
Program Setting

[Program Setting] Screen
This section describes the [Program Setting] screen.
(1) (2) (3) (4) (5)
(7)
(6)
Program Setting
No. Name Description
Sends the program settings to the controller.
(1) [Send to controller] button
“Sending the settings to the controller” (page 3-16)
Reads the program settings from the controller.
(2) [Read from controller] button
“Reading Settings from Controller” (page 3-17)
Saves the program setting contents in the personal computer.
(3) [Save setting file] button
“Saving the setting file” (page 3-17)
Opens the program setting contents stored in the personal computer.
(4) [Open setting file] button
“Reading Setting File” (page 3-18)
(5) [Help] button This opens the digital manual of this system.
(6) [Program selection] dropdown list Select the program to be edited.
(7) [Edit program list] button Either copies or initializes the program setting contents.

[Edit program list] dialog Basic Operations of LS-Navigator2

(1) (2) (3)
Switching the program setting
1 Select the program to be switched from [Program

selection] drop down list.
The [Program setting] screen turns to the contents
of the selected program setting.
Changing the program name
1 Click the [Edit program list] button.

5
The [Edit program list] dialog appears.
2 Click the program name to be changed from the

[Program name] list.
Program Setting
The selected program name will be highlighted to

show that the program is ready to be edited.
3 Enter the program name from the keyboard and

click the [OK] button.
(4) (5) The program name is now modified and the display
returns to the [Program setting] screen.
Copies the selected program
(1) [Copy] button
setting.
Pastes the copied program
(2) [Paste] button setting into the selected
program setting.
[Program name] Enter the program setting
(3)
setting name.
[Initialize all] Sets all program settings to
(4)
button the initial values.
[Set to default] Sets the selected program
(5)
button setting to the initial value.

Copying the program setting Settings on the Display Panel
1 Click the [Edit program list] button. Copying the program setting
2 Select the source program of copying and click

the [Copy] button.
1 Press the [FUNC] key, then press the [0] key.
3 Select the destination program of copying and 2 press

Select [ENV] by pressing the [
the [ENT] key.
] or [ ] key, then
click the [Paste] button.
The confirmation dialog appears.

The [Edit program list] dialog returns.

The program setting is now copied and the 5
[Program setting] screen returns.
Program Setting
Initializing the program setting 3 Select the program to be set, then press the
[ENT] key.
1 Click the [Edit program list] button.

2 Select the program to be initialized and click the

[Initialize] button.
The confirmation dialog appears.
When the [Initialize all] button is clicked,
all the program settings will be initialized.

4 Select [COPY], then press the [ENT] key.
The [Edit program list] dialog returns.

The program setting is now initialized and the
The “Calibration of received light intensity”
will not be initialized. If you want to
initialize the “Calibration of received light
intensity”, performthe “Return calibration
of received light intensity to the factory
setting” function. (page 5-67) 5 Select the source program of copying, then press
the [ENT] key.

6 Select the destination program of copying, then

4 Select [INIT], then press the [ENT] key.
5 Select the program to initialize, then press the

7 When [EXECUTE] appears, press the [ENT] key. [ENT] key.
5
Program Setting
When [COMPLETE] appears, the setting operation

is completed. 6 When [EXECUTE] appears, press the [ENT] key.
Initializing the program setting

2 press
Select [ENV] by pressing the [
the [ENT] key.
] or [ ] then

is completed.
3 Select a [PROGRAM] to be set, then press the

[ENT] key.

[Basic settings] Tab: Set Measurement Target
Select the [Basic settings] tab of the [Program setting]

screen to display the basic settings.
Used to switch the method of
[Set measure target] area [Head order]
displaying the measurement
(1) target shown in the [Set
button
(3) (1) (2) measure target] area in the
order of head numbers.
Used to switch the method of
displaying the measurement
[Target order]
(2) target shown in the [Set
button
measure target] area in the
order of target numbers.
Used to add another
measurement target.
[Add target]
(3) Clicking on this button makes
button
the [Set measure target]
window appear.
(4)
[Edit target]
Used to edit the
measurement target.
5
button
Program Setting
(5)
the [Set measure target]
window appear.
[Delete target] Used to delete the
(5)
button measurement target.

[Target] window Set measure target

(1) Measurement target
This is the setting to specify the area you wish to
measure.
If any target is placed in the measurement area, two
portions, one of which is where the light reaches to the
receiver and the other is where the light is blocked by
the target to make its shadow, are generated as shown
in the figure below.
The boundary between the portions where it is
irradiated and where it is shaded is called an "edge".
An edge across which the shaded portion alters to the
irradiated portion, if viewed from the top end of the
head, is called a rising edge while the other across
(2) which the altering is the reverse is called a falling edge.
You can set such an area as divided by the edge or
5
edge itself as the target of measurement.
(3)
a rising edge
Program Setting
(4) a falling edge

Outer diameter
(5) a rising edge
(6) a falling edge

(7)
each of them can be measured
as a target

Outer diameter
No. Name Description Select this for measuring the outer diameter of any
[Head used] Used to select a head to be cylindrical target such as a round bar, shaft, etc.
(1) To do this, measure a width from the first falling edge to
dropdown list used for measurement.
last rising edge as viewed from the top end of the head.
[Target] radio Used to select the kind of
(2)
button measurement target.
If you have selected the
[Edge (pitch) "Edge (pitch) number" as the
(3)
number] setting target, then enter the edge
(pitch) number here.
Used to switch between
[Optional
(4) display and non-display of
setting] button
the optional setting area.
[Tilt correction] Used to select the application
(5)
radio button of tilt correction.
Used to set an appropriate
(6) [Delay] setting
delay.
[Median filter] Used to select the median
(7)
dropdown list filter.


Top edge/Bottom edge Bottom edge: ‌Measure a width from the last rising
edge to last falling edge as viewed
Select this for positioning any sheet or film-like material.
from the top end of the head. Calculate
the measurement if these two edges
continue.
In the following cases, the measurement display enters

the output waiting (------) condition.
yyThe last rising edge is not followed by the last falling
edge (masked).
Program Setting
Top edge: ‌Measure a width from the first rising edge to
first falling edge as viewed from the top end
of the head. Calculate the measurement if yyThe first rising edge is masked.
these two edges are successive.
In the following cases, the measurement display enters

the output waiting (------) condition.
yyThe first rising edge is not followed by the first falling
edge (masked).
yyThe first falling edge is masked.


Edge (pitch) number setting zz
If you wish to count the edges in the order from the
bottom of the head, specify the edge numbers in
Use this to measure a distance between or positions of
negative values.
any edges (pitches).
For the edge (pitch) selection, "E (edge) mode" and Measure the middle point between two edges.
"P (pitch) mode" are available. There is also an "Edge
0" used for measurement with a virtual center in the
optical axis.
If the specified number of edge or pitch does
not exist, the measurement display enters the
waiting data condition.
zz
Selectable range
There are the following five pitch points in the example
yySelectable edge (pitch) numbers are from -31 to +31. of the figure shown below.
yyIf the same edge (pitch) numbers are specified, the With these pitches measure the center-to-center pitch
measurement will result in zero (0). of the measurement target.
yyIf the order of edge (pitch) selection is reversed, the
5 zz
measurement takes a negative value.
E (edge) mode
Measurement will be performed taking an edge as the
Program Setting
datum.
Center-to-center pitch
Center-to-center pitch: Width from 2P to 4P
To count the edges in the order from the top of the

head, specify the edge numbers in positive values. zz
Edge 0
Measure the following portions in the example of the "Edge 0" is a measurement method using the center
figure shown below. of the optical axis as the virtual origin. With "0" entered
as the edge number, it is possible to select this method
disregarding the existence of any measurement target.
Select this for positioning or measuring the amount of
travel or deflection (runout) of the measurement target,
Outer dia. 1 etc.
the top
Gap
Outer dia. 2 the center of 1E

Edge 0
the optical
axis 2E
the bottom
Outer dia. 1: Width from 2E to 3E
Outer dia. 2: Width from 4E to 5E Target edge plane position: Width from 000-E to 001-E
Gap: Width from 3E to 4E Edge 0 can be used irrespective of the difference
between the E (edge) mode and P (pitch) mode.
To count the edges in the order from the
bottom of the head, specify the edge yyUse of Edge 0 makes it possible to
numbers in negative values. measure at a higher repeatability.
yyEdge 0 can not be the subject of the Edge
number check function.
"Check No. of edges" (page 5-65)


Ultrafine outer DIA
Tx-Rx Pos
Select this to measure the outer diameter of an ultra Select this for measuring "Tx-Rx Pos.", This means
thin wire material. the position of a cylindrical target such as a shaft or
wire material placed in between the transmitter and the
receiver.
The origin of this Tx-Rx Pos is determined by taking the
position of the receiver as the datum. A measurement
value will take a positive value if the target is
approaching the transmitter, and take a negative value
if it is approaching the receiver, respectively.
yyMultiple thin wires cannot be measured at the same
time.
yyIf there is anything other than the measurement
target in the measurement range, use the mask
setting to exclude it from the measurement target.
"Mask setting" (page 5-65)
yyBoth the ultrafine outer diameter measurement and
Origin Pos.
5
ultrafine gap measurement can not be performed at
yyLS-9006/LS-9006M: 30 mm from the receiver
the same time within the same head.
If doing so, the measurement value from the yyLS-9030/LS-9030M: 80 mm from the receiver
measurement area with a smaller target number will While the interference prevention setting is
Program Setting
be displayed as the output waiting data. used, the obtained measurement is displayed
yyWhen using Ultrafine outer DIA with the LS-9120M, as the output waiting data.
use the master workpiece to perform calibration.
"Calibration" (page 5-52)
The detection ranges are shown below.
If the measurement value is not displayed, LS-9006/LS9006M: 4 mm (horizontal) ×
it may not have been possible to 5 mm (vertical)
recognize the edges. In this situation, * You cannot use the LS with targets that
adjust the edge detection threshold. have diameters of 5 mm or more.
"Edge detection" (page 5-64) LS-9030/LS9030M: 20 mm (horizontal) ×
24 mm (vertical)

Ultrafine gap * You cannot use the LS with targets that
Select this to measure the width of a single ultrafine have diameters of 24 mm or more.
gap. The measurement value corresponds
to the center between the transmitter
and receiver with the direction toward
the transmitter being positive and the
direction toward the receiver being
negative.
Not available on LS-9120M, LS-9006D and

yyMultiple gaps can not be measured at the same time. LS-9030D. The measurement value will be
yyIf there is anything other than the measurement output waiting.
target in the measurement range, use the mask
setting to exclude it from the measurement target.
Center position
yyBoth the ultrafine outer diameter measurement and Measure the center position of the measurement target.
ultrafine gap measurement can not be performed at This is used for position control or feedback for wire
the same time within the same head. material, and deflection (runout) measurement of the
If doing so, the measurement value from the target, etc.
measurement area with a smaller target number will
be displayed as the output waiting data.
yyWhen using Ultrafine gap with the LS-9120M, use the
master workpiece to perform calibration.
"Calibration" (page 5-52)
If the measurement value is not displayed,
it may not have been possible to
recognize the edges. In this situation,
adjust the edge detection threshold.
"Edge detection" (page 5-64)

Optional setting
Median filter
This is effective for restricting the influence of dust and

Tilt correction dirt which may cause any measurement to suddenly
This can be set where the measurement method is jump and reduces the errors in the measurements.
"Outer diameter" or "Ultrafine outer diameter". Setting range: OFF, 7, 15, 31
In this case, perform your measurement while
correcting the tilt of the target. An example measurement using 7-point median
yyON....................... Enables the tilt correction. filter
yyOFF......................Disables the tilt correction. Sort 7 measurement values in the descending order
and take the center value as the measurement.
Measuring
times (1) (2) (3) (4) (5) (6) (7) (8) (9)
Measurement
Measurement value value 1.1 1.0 1.0 1.5 0.9 1.0 1.0 1.0 1.1
Measurement value before correction
after correction
5 1.0
1st median
2nd
1.0
Program Setting
median
Tilt correction recognizes tilt in the following ranges
according to the above figure, so do not position 3rd
anything other than the target in these ranges. median 1.0
LS-9006M: ±0.7 mm (horizontal), ±3 mm (vertical)
LS-9030M: ±1.8 mm (horizontal), ±15 mm (vertical)
Since, after the 1st median, the following order results if
Mask setting is disabled for Tilt correction. (1) to (7) are sorted,
The correction factor of angle can be updated 1.5 1.1 1.0 1.0 1.0 1.0 0.9
maximum 40 times/s.
the center value of 1.0 will be taken as the
This is available only on LS-9006M and measurement.
LS-9030M.
When using this item on other model, the yyIf any output waiting data is included in the
measurement value will be output waiting. points of measurement for filtering, take the
latest data which is not applied with median

Delay processing as the measurement.
Use this setting with the combined calculation function. yyAfter starting measurement, and until the
The subject measurement will be delayed as much as specified points of data for applying the
the specified number of sampling times. median processing are gathered, use the
By calculating between measurement targets which are latest data as the measurement.
different in the delay time setting, it is possible to check
the difference between before and after the certain
process.
Turn the check box to ON and specify the number of
times.
Setting range: 0 to 1023
"Combined calc." (page 5-36)
Core wire
After Coating
coating machine

Basic Operations of LS-Navigator2 Editing the measurement target
Adding more measurement targets 1 Click the [Edit target] button of the measurement
target for which the setting is to be changed.
The [Target] window appears.
1 Click the [Add target] button.
2 Edit the setting of the measurement target.
The setting for the target is now modified and the
Deleting any measurement target

When only one measurement target is used,
it can not be deleted. 5
Program Setting
1 Click the [Delete target] button of the
measurement target you wish to delete.
When the display method of measurement If the measurement target is being used in the
target is set to "Head order", click the [Add program setting, click the [OK] button in the
target] button of the head to which you displayed confirmation dialog for deletion.
wish to add another target.
The measurement target is deleted.
The [Target] window appears.
2 Select any head to which another target is added. Switching the display method of target
If the display method of target is
"Head order", this addition can not
be designated. In this case, either try 1 Click either the [Head order] button or the [Target
order] button.
to add another target after changing
the display method to "Target number Display method of the measurement target switches
order" or change the head for use in to either head order or target order.
the [Edit target] screen after setting the
conditions for other than the head.
3 Select the measurement target.

If you have selected the "Edge (pitch) number",
specify the edge (pitch) number in the [Edge (pitch)
number] area.
4 In"Delay"
the [Display setting] area, set "Tilt correction",
and "Median filter".
"Tilt correction" can be set where "Outer

diameter" or "Ultrafine outer diameter" is used.

The target is now added and the [Program setting]
screen returns.
In the number setting of the measurement
target to be added, the smallest number
of all the unused numbers will be
assigned to it.

Display Panel Setting Method 5 Press the [ESC] key to display the setting item
selection screen.
Target setting method 6 then

Select [APPLY] by pressing the [
] or [ ] key,
1 Press the [FUNC] key, then press the [0] key. 7 When [EXECUTE] appears, press the [ENT] key.
2 Select [TARGET] by pressing the [

] or [ ] key,
5 When [COMPLETE] appears, the setting operation

is completed.
Program Setting
Setting multiple measurement targets

3 Select any target on which the setting is to be
performed, then press the [ENT] key.
4 Perform the settings according to your purpose.

Refer to the following items:
2 then
Select [COMMON] by pressing the [
] or [ ] key,
As the selection screens from [A] to [H] are

displayed, then select [A] and press the [ENT]
key.
A: HEAD (Used head setting)

B: TYPE (Measurement content)
C: TILT-COR (TILT Correction)
D: MEDIAN (Median filter)
E: DELAY (Delay)

3 Turn the target item used for measurement to

[ON] by pressing the [ ] or [ ] key. Selecting the measuring head
Make selection for all from [A-TGT-1] (Target 1)
through [A-TGT-16] (Target 16).
Return to the screen of Step 2.
1 Select [Head setting], then press the [ENT] key.
"Target setting method" (page 5-28)
4 Press the [ESC] key to display the setting item

2 Select
5
the head to use for measurement by
selection screen. pressing the [ ] or [ ] key, then press the [ENT]
key.
5 then
Select [APPLY] by pressing the [ ] or [ ] key,
Program Setting
6 When [EXECUTE] appears, press the [ENT] key.

is completed.

Setting the measurement method

Switching the edge/pitch setting
Selected [EP-CALC] from mesurement methods which
may require specification of two points of edge/pitch as
1 Select [TYPE], then press the [ENT] key. the measurement targets.
zz
Edge setting
1 Display the [Segment start/finish setting]

selection screen.
2 Select [START] by pressing the [

key, then press the [ENT] key.
], [ ], [ ] or [ ]
Select the first edge, here.
2 Use the [ ], [ ], [ ] or [ ] key to select the
5 measurement method, then press the [ENT] key.

Program Setting
3 [Switch the setting by pressing the [

] key, then press the [ENT] key.
], [ ], [ ] or
The settable measurement methods are as follows:

yyEDGE
The settable measurement methods are as follows:
yyPITCH
yyDIA (Outer diameter)
yyT-EDGE (Top edge)
yyB-EDGE (Bottom edge)
yyEP-CALC (Edge (pitch) number)
yyTR-POS (Tx-Rx Pos.)
yyUF-DIA (Ultrafine outer diameter)
yyUF-GAP (Ultrafine gap)
yyCENTER (Center position)
The [Number selection (start)] screen appears.
4 Select an input digit by pressing the [ ] or [ ]

key, input a value with a numeric key, then press
the [ENT] key.
This returns us to the [Segment start/finish setting]

selection screen.
5 Return to Step 2 to select [END], and repeat the

same procedure as required.
Select the second edge, now.

Setting up the tilt correction 4 Use the numeric keys to enter the delay times,
1 Select [TILT-COR], then press the [ENT] key.

Setting up the median filter
2 Select [ENABLE], then press the [ENT] key. 1 Select [MEDIAN], then press the [ENT] key.
"Target setting method" (page 5-28) 5
Program Setting
Setting up the delay
2 Switch the setting by pressing the [
[ ] key, then press the [ENT] key.
], [ ], [ ] or
1 Select [DELAY], then press the [ENT] key.

2 Select [ENABLE], then press the [ENT] key.
3 The [Delay times setting] screen appears.

[Basic settings] Tab: OUT Setting
Select the [Basic settings] tab of the [Program setting]

screen to display the basic settings.
[Min display
Select the minimum display
[OUT setting] area (1) unit] dropdown
unit.
list
Perform the OUT setting.
[Tolerance
(3) (1) (4) (2)
(2) mode] Select the tolerance mode.
dropdown list
[Add OUT]
(3) Add another OUT setting.
button
[Delete OUT] Used to delete any OUT
(4)
button setting.
Edit the OUT settings in the
(5)
list screen.
[Edit OUT list]
(7) (6) button
the [Edit OUT list] dialog
5 (6) [OUTx] tab

appear.
Used to switch the OUT
setting to display.
Program Setting
[OUT name]
(7) Enter the OUT setting name.
setting
(9) (8)
(10) [Calculation Used to set the calculation
(8)
method] setting method.
(11) (9) Offset setting Enter the set offset value.
(12) Set the measurement mode.
[Measure mode] Clicking on this button makes
(10)
button the [Measure mode] window
(13) appear.
(11) Filter setting Set the filter to apply.
[Tolerance] Enter the tolerance limit
(12)
setting values.
Select any optional setting.
[Optional Clicking on this button makes
(13)
setting] button the [OUT optional setting]
window appear.

[Edit OUT list] dialog [Measure mode] window

(1) (2) (3) (1)
(2)
(3)
5
Program Setting
No. Name Description [Measure mode] Used to select the

(1)
radio button measurement mode.
Used to copy the selected
(1) [Copy] button [Hold mode] Used to select the hold
OUT setting. (2)
radio button mode.
Used to paste the copied
[Self-timing Use this to enter the self-
(2) [Paste] button OUT setting to the selected (3)
period] setting timing period.
OUT setting.
[OUT name]
(3) Enter the OUT setting name.
setting

[OUT option setting] window OUT setting

(1) "OUT" means the setting relating to the display and
processing of measurement values.
Assign the measurement target to each OUT so that
(2) the dimension of the area specified for the target and
(3) edge position, etc. can be measured and displayed.
(4) Thus obtained measurement can be further subject to
(5)
filtering and calculation.
(6)
It is possible to set maximum 16 OUTs.
Increasing the number of OUTs to use makes the
sampling frequency longer.
Number of OUTs to use

1 to 4 5 to 12 13 to 16
(7)
(8) Sampling
(9) 62.5 125 187.5
frequency
5
(10)
(11)
Unit:µs
"Interference prevention function" (page 5-73)
Program Setting

Minimum display unit
Determine the minimum display unit for measurements.
This is applied commonly to all OUTs.
[Difference
Select the use of difference Setting range: 0.1 mm, 0.01 mm, 0.0001 mm,
(1) function] radio
function. 0.00001 mm, 1 µm, 0.1 µm, 0.01 µm
button
According to the selected minimum display unit, the
[Outlier number of significant digits, unit, and setting contents of
exclusion Used to select the use of a numeric value to be displayed for [Offset], [Tolerance],
(2)
function] check outlier exclusion function. [Calibration setting], [Scaling], [OUT option setting], and
box [Analog output terminal option setting] will change as
follows:
[Exclusion
Select the exclusion method yyChanges from Display panel or RS-232C
(3) method]
to apply. All will be initialized.
dropdown list
yyChanges from LS-Navigator2
[No continuous Enter the continuous outlier Those settings which can be displayed in the
(4)
outlier] setting counts. minimum display unit after modification can be taken
[High limit over, while those which can not be done so will be
(5) Enter the upper limit value. initialized.
value] setting
[Lower limit
(6) Enter the lower limit value.
value] setting
[Abnormal value Used to select the use of
(7) cancellation] abnormal value canceling
check box function.
[Pts before
Enter the points before
(8) cancellation]
cancellation.
setting
[Pts after
Enter the points after
(9) cancellation]
cancellation.
setting
[High limit
(10) Enter the upper limit value.
value] setting
[Lower limit
(11) Enter the lower limit value.
value] setting


Tolerance mode zz
Threshold
Select the tolerance setting method. Specify the tolerance in absolute values.
This can be selected from [Ref. value] and [Threshold].
Depending on the tolerance mode setting, the analog
output terminal setting method varies accordingly.
"Analog output" (page 5-97)
zz
Ref. value
Set an appropriate tolerance based on the reference
value.
Measurement values will be judged into one of the five

results of HH/HI/GO/LO/LL.
With the tolerance setting procedure, set [HH] (Highest
limit), HI (Upper limit), LO (Lower limit), and [LL]
(Lowest limit), respectively.
5
Tolerance and judgment results are as follows.
Judgment
Criteria
Measurement values will be judged into one of the result
Program Setting
three results of HI/GO/LO. Measurement value is "Output waiting Output
With the tolerance setting procedure, set [Ref. value], data" waiting
[Upper limit] and [Lower limit], respectively.
With the tolerance setting procedure, set [Ref. value], HH setting value < Measurement value HH
[Upper limit] and [Lower limit], respectively. HI setting value < Measurement value
HI
≤ HH setting value
Judgment
Criteria
result LO setting value ≤ Measurement value
GO
≤ HI setting value
Measurement value is "Output waiting Output
data" waiting LL setting value ≤ Measurement value
LO
< LO setting value
(Ref.value + Upper limit) <
HI
Measurement value Measurement value < LL setting value LL
(Ref.value + Lower limit) ≤
Measurement value ≤ (Ref.value + GO
Upper limit)
Add OUT
Measurement value < (Ref.value + Used to add another OUT setting.
LO
Lower limit)

Delete OUT
Used to delete any OUT setting. When only one OUT is
used, it can not be deleted.

Edit OUT list
Used to edit the OUT settings in the list screen. When
only one OUT is used, the [Edit OUT list] can not be
specified.

OUTx
Used to switch the OUT setting to display.

OUT name
This is the name of OUT setting.
You can assign an arbitrary name to each OUT.


Calculation method
Offset
Configure the setting to link the measurement results This is a function to add an optional value to the
with the OUT concerned. After any calculation method measurement value. Combined use with the auto zero
is set, the appropriate measurement value can be function can turn the current measurement value to an
obtained. offset value.
This is useful for master alignment, etc.
zz
No calculation
The raw measurement value of the target will be
displayed.
Display value Execute ZERO
10.000
(Reference
value)
5 zz
Combined calc.
t
Obtain the calculation result of the following:

Program Setting
yyEven when the difference function is set

(Measurement target A x Factor A) + (Measurement to ON in the OUT option setting, the offset
target B x Factor B) … Maximum 4 measurement processing will be performed.
targets can be specified.
yyThis offset processing will not be applied to
the output waiting data.

Measurement target
Select any target to be used for calculation from the
dropdown list.

factor
Select any factor from the dropdown list.
If any output waiting data is included in
the measurement values to be used for
combined calculation, the calculation result
will be the output waiting data.
zz
Average
Used to obtain the mean of the measurement values
from the selected target.
If any output waiting data is included in

the measurement values to be used for
averaging, the calculation result will be the
output waiting data.


Measurement mode zz
Peak hold
Select this mode if you wish to perform measurement Outputs the maximum value in the sampling period.
continuously or display the result of calculation
specified for the data under sampling period which is
specified by the TIMING input.
The auto zero function is effective for the
measurement values which measured under
the Measurement mode. (Except for "Peak-
to-peak hold" and "Auto Peak-to-peak hold".)
zz
Normal
Outputs measurement values continuously.
zz
Bottom hold
Outputs the minimum value in the sampling period.
Program Setting
zz
Self-timing hold
After automatically detecting the target, the
measurement concerned will be performed as to follow zz
Peak-to-peak hold
the self-timing period. Outputs the maximum value - minimum value in the
sampling period.
zz
Sample hold
Outputs measurement values in synchronization with zz
Average hold
the TIMING input. Outputs the mean (average) value in the sampling
period.

zz
Auto Peak hold
Hold 3
Continues updating the Max (maximum) value until this From measurement start to rise of timing signal.
setting is reset. However, such a period that the timing is ON is not
included in the sampling period.
zz
Self-timing period
Set the wait time after the target is inserted in the
measurement range and until the measurement starts.
Output interval should be entered in msec.
zz
Auto Bottom hold
Setting range: 1 to 9999 msec
Continues updating the Min (minimum) value until this
setting is reset.

Filter
5 For stabilizing measurement this is used to determine
the method and number of times of averaging
measurement values.
Program Setting
zz
Moving average
Used to apply moving average on measurement values.
Measurement values will be updated at every sampling
frequency.
Setting range:‌1, 2, 4, 8, 16, 32, 64, 128, 256, 512,
1024, 2048, 4096, 8192, 16384, 32768
As the result of averaging four times, the measurement
zz
Auto Peak-to-peak hold
values will be as follows:
Continues updating the Max and Min values and
outputs the Max-Min values until this setting is reset. Sampling frequency
1 2 3 4 5 6 7
1. Measurement
averaging period
Internal data 2. Measurement

averaging period
3. Measurement
averaging period
Output data A B C
zz
Hold mode
Set an appropriate sampling period. Update

Hold 1
From rise to rise of timing signal 1. Averages Data 1 to 4 and outputs Data A.
2. Averages Data 2 to 5 and outputs Data B.
3. Averages Data 3 to 6 and outputs Data C.
yyAfter starting measurement, and until the
specified number of averaging times of data
are gathered, the output waiting data will be
outputted.

Hold 2
yyIf any output waiting data is included in
From fall to rise of timing signal the target values of calculating the moving
average, the output waiting data will be
outputted.

zz
Simple average
Tolerance
Used to apply simple average on measurement values. Determine the value (tolerance limit) for applying GO/
Measurement values will be updated every time of NG judgment on measurements. Settable values will
averaging period. vary depending on the selected tolerance mode.
Setting range:‌1, 2, 4, 8, 16, 32, 64, 128, 256, 512,
1024, 2048, 4096, 8192, 16384, 32768
zz
Where "Ref. value" is selected for [Tolerance mode]

Upper / Upper limit
As the result of averaging four times, the measurement
values will be as follows: This is the upper limit of tolerance value.
Sampling frequency
Standard / Ref value
This is the standard value of tolerance value.
1 2 3 4 5 6 7 8 9 10 11 12 13 14
Lower / Lower limit
1. Measurement This is the lower limit of tolerance value.
averaging period
Internal 2. Measurement zz
Where "Threshold" is selected for [Tolerance mode]
data averaging period

HH / Highest limit
3. Measurement
This is the highest limit of tolerance value.
5
averaging period
/ Upper limit
HI
This is the upper limit of tolerance value.
Output A A A A B B B B C C C / Lower limit
Program Setting
LO
data
This is the lower limit of tolerance value.
Update Update / Lowest limit
LL
This is the lowest limit of tolerance value.
1. Averages Data 1 to 4 and outputs Data A.
2. Averages Data 5 to 8 and outputs Data B.
3. Averages Data 9 to 12 and outputs Data C.
yyAfter starting measurement, and until the
specified number of averaging times of data
are gathered, the output waiting data will be
outputted.
yyIf any output waiting data is included in
the target values of calculating the simple
average, the output waiting data will be
outputted.


OUT option setting
Continuous outlier counts
Outlier values are substituted according to the value
zz
Difference function of the setting value N as follows. The data after
This is a function to detect a rapid change in the substitution are determined by "exclusion method".
measurement value such as a protrusion formed on In case that 1 ≤ N ≤ 4094
electric wires, etc. Consecutive N time(s) of outlier values from the last
The difference between the current measurement normal value are substituted. The consecutive data
and the previous measurement will be outputted as a from the N+1 time are not substituted.
measurement value. In case that N = 4095
All of outlier values are substituted.
Setting range: ON, OFF

Upper/Lower limit
zz
Outlier exclusion function
Tolerance mode : Threshold
This function is used to perform a measurement by Any measurement value exceeding the upper
excluding outlier values. (lower) limit is taken as an outlier value.
Outlier value means the measurement value exceeding Tolerance mode : Ref val
the upper and lower limits, and the output waiting data. Any measurement value exceeding [Tolerance Ref

Exclusion method val] + [Upper (lower) limit] is taken as an outlier
5 Handle with either of the following methods:

yyOutput waiting data: Substitutes outlier values with
output waiting data.
value.
When an outlier value is detected, the status output
can be turned to ON.
"Outlier continue" (page 5-98)
Program Setting
Measurement
value
Upper limit
Points
yyHold the previous value: Substitutes outlier values

with the last measured
normal value.
Measurement
value
Upper limit
Points
If the previous measurement falls in the

output waiting data, the output waiting
data will be outputted.

zz
Abnormal value canceling function
In this function, an abnormal value (measurement
outside the specified range) and optional points of
measurements before and after the abnormal value
are taken as the output waiting data. This is used for Setting the minimum display unit
measuring targets such as having a "D-shape" cut or
deflection due to protrusion, etc.
1 Select the minimum display unit to be applied
from the [Minimum display unit] dropdown list.
Setting the tolerance mode
1 Select the tolerance mode to be applied from the

[Tolerance mode] dropdown list.
Depending on the selected tolerance

mode, the [Tolerance] display items will
vary 5
Program Setting
Measurement Add OUT setting
value Data used for measurement
Output waiting
data 1 Click the [Add OUT] button.
The selected OUT setting is added and its [OUT
setting] tab will be displayed.
To the OUT setting number of the
Lower limit OUT setting to be added, the smallest
number of all the unused numbers will be
assigned.
Number of points
Pts before Pts after cancellation
cancellation

Pts before cancellation
Such the data that has been measured before the
specified number of points assuming one reference
point from which the judgment of abnormality starts
will be taken as the output waiting data.

Pts after cancellation
Such the data that has been measured after the
specified number of points assuming one reference
point at which the judgment of abnormality ends will
be taken as the output waiting data.

Upper limit
Any data exceeding the upper limit is taken as an
outlier value.

Lower limit
Any data exceeding the lower limit is taken as an
outlier value.

Edit OUT setting Copy OUT setting
1 Click the tab of the OUT setting to be edited. When the OUT setting being used is only
one, the [Edit OUT list] button is disabled,
and, the list of OUT setting can not be edited.
2 Enter the OUT setting name.
3 Select the measurement method, then set the
contents.
1 Click the [Edit OUT list] button.
The [Edit OUT list] dialog appears.
4 Enter the offset value. 2 Select and copy the required OUT setting.
5 Set the measurement mode. 3 Paste
copy.
it to the OUT setting at the destination of
6 Select the filter and its contents. The confirmation dialog appears.
5 7 Enter the tolerance limit values. 4 Click the [OK] button.

This makes the OUT setting copied.
8 Select the OUT optional setting. 5 Click the [OK] button.

Program Setting
The [Program setting] screen returns.
Delete OUT setting

Modifying the OUT setting name in the
When the existing OUT setting is only one,
the [Delete OUT] button is disabled, and, the edit list operation
setting can not be deleted.
1 Click the [Edit OUT list] button.
1 Select the tab of the OUT setting to be deleted. The [Edit OUT list] dialog appears.
2 Click the [Delete OUT] button. 2 Click the [OUT name] column of the OUT setting
whose name it to be modified.
This makes the OUT setting deleted. The selected OUT setting is highlighted, and the
As to take the place of the deleted OUT [OUT name] column is ready for entering any text.
setting, the tab of the OUT setting at the
right will be displayed.
When the OUT setting at the rightmost
3 Enter the new OUT name.
place is deleted, the tab of the OUT
setting at the left will be displayed instead.
The [Program setting] screen returns.

Display Panel Setting Method 5 Press the [ESC] key to display the setting item
selection screen.
OUT setting method 6 then

] or [ ] key,
1 Press the [FUNC] key, then press the [0] key. 7 When [EXECUTE] appears, press the [ENT] key.
2 then
] or [ ] key,

is completed.
5
Program Setting
Setting multiple OUTs
3 Select any OUT on which the setting is to be
performed, then press the [ENT] key.

2 then
] or [ ] key,

displayed, then select [B] and press the [ENT]
key.
A: TGT-CALC (combined calculation)

B: OUTLIER (Outlier exclusion function)
C: FILTER (Filter)
D: DIF-FUNC (Difference function)
E: A-CANCEL (Abnormal value canceling function)
F: OFFSET (Offset)
G: M-MODE (Measurement mode)
H: TOL (Tolerance)

3 Turn the target item used for measurement to

[ON] by pressing the [ ] or [ ] key. Calculation setting
Set up all for from [B-OUT-2] (OUT2) to [B-OUT-16]
(OUT16).
1 Select [TGT-CALC], then press the [ENT] key.
"OUT setting method" (page 5-43)
4 Press the [ESC] key to display the setting item 2 Select the calculation method by pressing the
5 selection screen. [ ], [ ], [ ] or [ ] key, then press the [ENT] key.

The settable calculation methods are as follows:
5 Select [APPLY] by pressing the [ ] or [ ] key, yyNO CALC (No calculation)
Program Setting
then press the [ENT] key. yyCOMBO (combined calculation)

yyAVERAGE (averaging)
6 When [EXECUTE] appears, press the [ENT] key.

No calculation setting
1 Select [NO CALC], then press the [ENT] key.

is completed.
2 Select the area which is not the target of

calculation by pressing the [ ], [ ], [ ] or [ ] key,
The Function selection screen appears.


Combined calculation setting
Average setting
1 Select [COMBO], then press the [ENT] key. 1 Select [AVERAGE], then press the [ENT] key.
There are eight combined calculation setting
screens numbered from F0 to F7.
With F0 to F3 set the applicable factors.
With F4 to F7 set the measurement target
(TARGET).
2 Select [ON], then press the [ENT] key.

5
2 [Select the factor by pressing the [ ], [ ], [ ] or
Program Setting
Field 2 will be displayed.
3 Infactor
the similar way as Step 2, determine each
for Fields 1 to 3, then press the [ENT] key.
Field 4 will be displayed. When the [ENT] key is pressed, the screen changes
to that for the next measurement target (TARGET).
4 Select the measurement target (TARGET) which
is the subject of calculation by pressing the [ ],
If you press the [ENT] key after setting the last
measurement target (TARGET), the Function
[ ], [ ] or [ ] key, then press the [ENT] key. selection screen will appear.
Those measurement targets whose target
setting for use is ON can only be selected
as the measurement target (TARGET).

5 As in Step 4, set the measurement target
(TARGET) for Fields 5 to 7, then press the [ENT]
key.
2 then
Press the [ ] and [ ] keys to select [COMMON],

3 press
Use the [ ] and [ ] keys to select [UNIT], then
the [ENT] key. Outlier exclusion function

Outlier exclusion enable setting
1 Select [OUTLIER], then press the [ENT] key.

4 Perform the settings according to your purpose,

5 2 Select [ENABLE], then press the [ENT] key.

The [Outlier exclusion method setting] screen
appears.
Program Setting
3 [Select the exclusion method by pressing the [

], [ ] or [ ] key, then press the [ENT] key.
],
yyIf this is selected, the outlier will be replaced with

the output waiting data.
yyIf this is selected, the outlier will be replaced with
F-0: 0.1MM the previous data and held as-is.
F-1: 0.01MM
F-2: 0.001MM
F-3: 0.0001MM
F-4: 0.00001MM
F-5: 1UM
F-6: 0.1UM
F-7: 0.01UM

selection screen.
The [Continuous outlier counts setting] screen
appears.
6 then
Select [APPLY] by pressing the [ ] or [ ] key,
4 Enter the continuous outlier counts. Select an
input digit by pressing the [ ] or [ ] key, input a
7 When [EXECUTE] appears, press the [ENT] key. value with a numeric key, then press the [ENT]
key.

is completed. The [Outlier exclusion upper limit setting] screen
appears.

5 Enter the outlier exclusion upper limit value.

Select an input digit by pressing the [ ] or [ ] Filter setting
the [ENT] key.
1 Select [FILTER], then press the [ENT] key.
The [Outlier exclusion lower limit setting] screen

appears.
2 Select the filter to apply by pressing the [ ], [ ],
6 Enter the outlier exclusion lower limit value.
Select an input digit by pressing the [ ] or [ ]
[ ] or [ ] key, then press the [ENT] key.
yyMOV - AVE (Moving average) 5
key, input a value with a numeric key, then press yySMPL-AVE (simple averaging times)
Program Setting
the [ENT] key.
The [Averaging times setting] screen appears.

3 [Select the averaging times by pressing the [
],
Difference function setting
1 Select [DIF-FUNC], then press the [ENT] key.

2 [Select [ENABLE] by pressing the [

], [ ], [ ] or

Abnormal value canceling function 4 Enter the points after cancellation. Select an
setting value with a numeric key, then press the [ENT]
key.
1 Select [A-CANCEL], then press the [ENT] key.

The [Outlier exclusion upper limit setting] screen

appears.
5 2 [Select [ENABLE] by pressing the [

], [ ], [ ] or 5 Enter the upper limit value. Select an input digit
by pressing the [ ] or [ ] key, input a value with a
numeric key, then press the [ENT] key.
Program Setting
The [Pts before cancellation setting] screen

appears. The [Outlier exclusion lower limit setting] screen
appears.
3 Enter the points before cancellation. Select an
value with a numeric key, then press the [ENT]
6 Enter the lower limit value. Select an input digit
key. numeric key, then press the [ENT] key.
The [Pts after cancellation setting] screen appears. The Function selection screen appears.

zz
Switching the hold mode
Offset setting When any of [P-HOLD], [B-HOLD], [PP-HOLD], [AVE-
HOLD] and [S-HOLD] is selected for the measurement
1 Select [OFFSET], then press the [ENT] key. mode, the Hold mode selection screen will appear.
3 Select the Hold mode by pressing the [
or [ ] key, then press the [ENT] key.
], [ ], [ ]
Selectable items will vary depending on the selected

setting contents.
Case of [P-HOLD], [B-HOLD], [PP-HOLD], or [AVE-
HOLD]:HOLD1, HOLD2, HOLD3
Case of [S-HOLD]: HOLD1, HOLD2
2 Enter the offset value. Select an input digit by

pressing the [ ] or [ ] key, input a value with a
numeric key, then press the [ENT] key. 5
The Function setting screen appears.
Program Setting
Measurement mode setting
zz
Setting the self-timing period
1 Select [M-MODE], then press the [ENT] key. When [ST-HOLD] is selected for the measurement
mode, then the [Self-timing period setting] screen will
appear.
3 Use this to enter the self-timing period. Select an

key.
2 Select the measurement mode by pressing the

[ ], [ ], [ ] or [ ] key, then press the [ENT] key.
yyNORMAL (Normal)
yyP-HOLD (Peak hold)
yyB-HOLD (Bottom hold)
yyPP-HOLD (Peak-to-peak hold) The Function selection screen appears.
yyAVE-HOLD (Average hold)
yyS-HOLD (Sample hold)
yyAP-HOLD (Auto peak hold)
yyAB-HOLD (Auto bottom hold)
yyAPP-HOLD (Auto peak-to-peak hold)
yyST-HOLD (Self-timing hold)

Tolerance setting zz
Where the tolerance setting mode is "Ref. value"

Switching the tolerance mode
1 Select [TOL], then press the [ENT] key.
The [Measurement item setting] screen appears.
2 Display the [Tolerance setting] screen.

5 2 then
Press the [ ] and [ ] keys to select [COMMON],
Program Setting
displayed, then select [E] and press the [ENT] key.
3 Enter the reference value. Select an input digit by

The [Enter upper limit] screen appears.
3 mode,
Press the [ ] and [ ] keys to select the tolerance 4 Enter the upper limit value. Select an input digit
[REF]: Reference value
[THR]: Threshold The [Enter lower limit] screen appears.

4 Press the [ESC] key to go back to procedure 2

screen of "OUT setting method" (page 5-43).

zz
Where the tolerance setting mode is "Threshold"
1 Select [TOL], then press the [ENT] key.

2 Display the [Tolerance setting] screen.

5
Program Setting
3 Enter the upper limit value. Select an input digit
The [Enter upper limit] screen appears.
4 Enter the upper limit value. Select an input digit

The [Enter lower limit] screen appears.



[Calibration, Scaling] Tab: Calibration Setting
Depending on the mounting angle and position of sensor heads or the presentation angle and position of the target
to be measured, there may be small errors produced in the measurement values. Such a setting that is used for
correcting these errors is the calibration setting. This calibration is performed using maximum eight (8) points which are
different in the location (dimension) of one target as the reference.
After this calibration, it is possible to calculate each value of span (tilt) and shift, which are then used to convert the
display before calibration to the display after calibration.
Since each value of span and shift is calculated respectively from two neighboring calibration points, these values will
be effective for measurements obtained from between these two points. It is possible to configure calibration setting
for each measurement target.
Measurement value after
calibration (thick line)
Display value
Ideal straight line (broken line)
After calibrating P4
Measurement value before

Before calibrating P4
calibration (thin line)
5 After calibrating P3
Program Setting
Before calibrating P1 Target dimension
P1 P2 P3 P4
If a single measurement target is used for more than one OUT, such a setting as resulting from one time of
alignment with the master may be reflected on them.
Therefore, unlike the scaling setting, it is not always necessary to perform correction for each OUT.
This calibration process will not be applied to the output waiting data.

[Calibration setting] area
(3)
(1)
(4)
(2)
5
Program Setting
(1) [Calibration setting] button Displays the Calibration setting area.
Select any target for which the calibration setting is registered.
(2) [Target x] button Clicking on this button makes the calibration setting for the measurement
target appear in the Calibration setting display area.
Used to register the calibration setting for the selected measurement target.
(3) [Register calib set] button
Clicking on this button makes the [Calibration setting] dialog appear.
Displays the calibration setting contents of the selected measurement
(4) Calibration setting display area
target.

[Calibration setting] dialog Calibration setting

Set from actual
(1) (2) Actual (current) measurement value can be acquired
and displayed on the screen, and can be set as an
input value.
On clicking [Set from actual] button, the confirmation
(3) (4) dialog appears.
Click the [OK] button to display the actual measurement
value.
yyThe measurement value used for
calibration is the value before Auto Zero,
Offset or Filter processing is applied.
yyTo acquire stable numerical values, display
values that 2048 times moving average
has been applied to, regardless of the Filter
5
processing.
(7)
(5) (6)
Calibration pts
Program Setting
Select the required number of calibration points from

No. Name Description the dropdown list.
According to the selected number of calibration points,
If this button is clicked to configuration of the calibration settings becomes
make it enable, the current available.
[Set from
(1) measurement value will be yyOFF
actual] button
acquired and displayed in the
yy1 pt to 8 pts
[Actual measurement] area.
The current measurement zz
Input 1 to Input 8
Actual Enter an appropriate input value (measurement value).
value will be displayed when
(2) measurement If the following conditions are not satisfied, the input
the [Set from actual] button is
area value will be taken as an error and displayed in red
turned to ON.
characters.
[Calibration pts] Select the number of
(3) Case of correcting with more than two points of k-point.
dropdown list calibration points.
yyInput value [k] - Input value [k - 1] > 0
When this button is clicked,
[Set to default] the entered setting will be (Displayed value [k] - Displayed value [k - 1]) ≤ 2
(4) �
button cleared and restored to its (Input value [k] - Input value [k - 1])
initial value.
Enter the input value
zz
Set
[Input value x] This designation is effective when the [Set from actual]
(5) (measurement) to be
setting is set to ON.
calibrated.
Clicking on this button makes the actual (current)
The current measurement measurement value entered as the required input.
value will be taken as the
(6) [Set] button
input value if the [Set from zz
Displayed 1 to Displayed 8
actual] button is enabled. Enter an appropriate displayed value (theoretical
value).
[Display value Enter the display value If the set displayed value is invalid, it will be shown in
(7) x] setting (theoretical value) to red characters.
calibrate with.

Basic Operations of LS-Navigator2 7 Click the [OK] button.

The calibration setting is now established and the
Registering the calibration setting If the set input value or displayed value is
invalid, the corresponding error dialog will
appear.
1 Select any target for which the calibration setting
is registered.
As the [Calibration setting] dialog returns
if the [OK] button is clicked, correct the
The calibration setting contents of the selected input value or displayed value shown in
measurement target will be displayed at the right of red characters.
the [Calibration setting] area.
2 Click the [Register calib set] button.

The [Calibration setting] dialog appears.
Restoring the calibration setting to its
The number of significant digits and unit initial value
of the currently displayed measurement
value will vary depending on the minimum
display unit selected by [Minimum display
unit] of the [Basic setting] tab.
1 During the registration of calibration setting, click
the [Set to default] button.
5
The input value and displayed value will be restored
Program Setting
to their initial values.
3 When setting the input value from the any actual
measurement, click the [Set from actual] button.
With the [Set from actual] button turned Canceling the registration of calibration
ON, the [Set] button effects according setting
to the number of points selected with
[Calibration pts].
1 Select any measurement target for which the
calibration setting is registered.
4 Select the number of calibration points. The calibration setting contents of the selected
measurement target will be displayed at the right of
If the number of calibration points is the [Calibration setting] area.
modified on a half way of establishing the
calibration setting (in such a case where
more than one input values or displayed
2 Click the [Register calib set] button.
The [Calibration setting] dialog appears.
values are changed from their initial
3 Select
value), the Confirmation dialog appears to
[OFF] from the [Calibration pts] dropdown
initialize the contents having been set. If
this is the case, click the [OK] or [Cancel] list.
button, as required.
The calibration setting is now cancelled and the
5 Enter the input value. In case of setting the input
value from any actual measurement, click the
[Set] button.
For the input value, use a value larger

than the previous input value.
6 Enter the displayed value.

Use a calibration span within a range of
±2.0.

Display Panel Setting Method 4 Set the displayed value. Select an input digit by
Registering the calibration setting
1 Press the [8] key after pressing the [FUNC] key,

select the target to be calibrated and then press
the [ENT] key.
5 Repeat the setting of input value and displayed

value as many times as the number of calibration
points set with Step 2.
5 When you complete the settings as many as the
number of calibration points, the Measurement
The Calibration points setting screen appears. screen will return.
Program Setting
These settings will be reflected on the Controller.

2 Select the number of calibration points by
pressing the [ ], [ ], [ ] or [ ] key, then press
the [ENT] key.
The Calibration value setting screen appears.

If you do not perform calibration, select [OFF].
3 Enter the input value. Select an input digit by

The Displayed value setting screen appears.

In case of setting the input value from any
actual measurement, press the [TIM] key.

[Calibration, Scaling] Tab: Scaling Setting
Depending on the surface conditions and application environment, etc. of the measurement target, there may be
small errors produced in the measurement values. Such a setting that is used for correcting these errors is the scaling
setting. This scaling is performed using a maximum of eight (8) points which are different in the location (dimension) of
one target as the reference.
After this scaling, it is possible to calculate each value of span (tilt) and shift, which are then used to convert the display
before scaling to the display after calibration.
Since each value of span and shift is calculated respectively from two neighboring scaling points, these values will be
effective for measurements obtained from between these two points. It is possible to configure the scaling setting for
each OUT.
Measurement value after scaling
(thick line)
Display value
Ideal straight line (broken line)
After scaling P4
Before scaling P4 Measurement value before scaling
5
After scaling P3 (thin line)
Before scaling P3
Program Setting
After scaling P2
Before scaling P2
After scaling P1
Before scaling P1 Target dimension
P1 P2 P3 P4
Use this method in such a case where multiple targets having a large diameter are measured using 2 heads
and you wish to apply scaling to the calculation results obtained from them.
This scaling process will not be applied to the output waiting data.

[Scaling] area
(3)
(1)
(4)
5 (2)
Program Setting

(1) [Scaling] button Used to display the [Scaling] area.
Select any OUT for which the scaling setting is registered.
(2) [OUTx] button Clicking on this button makes the scaling for the OUT appear in the Scaling
display area.
Used to register the scaling setting for the selected OUT. Clicking on this
(3) [Register scaling] button
button makes the [Scaling] dialog appear.
(4) Scaling display area In this area the scaling setting contents of the OUT will be displayed.

[Scaling] dialog Scaling setting

Set from actual
(1) (2) Actual (current) measurement value can be acquired
and displayed on the screen, and can be set as an
input value.
On clicking [Set from actual] button, the confirmation
(3) (4) dialog appears.
Click the [OK] button to display the actual measurement
value.
yyThe measurement value used for scaling is
the value before Auto Zero, Offset or Filter
processing is applied.
yyTo acquire stable numerical values, display
values that 2048 times moving average
has been applied to, regardless of the Filter
5
processing.
(7)
(5) (6)
Scaling pts
Program Setting
Select the number of scaling points from the dropdown
No. Name Description list.
According to the selected number of scaling points, it is
On clicking this to enable it, now possible to establish the scaling setting.
the current measurement yyOFF
[Set from
(1) value will be acquired and
actual] button yy1 pt to 8 pts
displayed in the [Actual
measurement] area. zz
Input 1 to Input 8
The current measurement Enter an appropriate input value (measurement value).
Actual If the following conditions are not satisfied, the input
value will be displayed when
(2) measurement value will be taken as an error and displayed in red
the [Set from actual] button is
area characters.
turned to ON.
[Scaling pts] Select the number of scaling Case of correcting with more than two points of k-point.
(3) yyInput value [k] - Input value [k - 1] > 0
dropdown list points.
On clicking this button, (Displayed value [k] - Displayed value [k - 1]) ≤ 2
�
[Set to default] the entered setting will be (Input value [k] - Input value [k - 1])
(4)
button cleared and restored to its
initial value. zz
Set
This designation is effective when the [Set from actual]
[Input value x] Enter the input value
(5) is set to ON.
setting (measurement) to be scaled.
Clicking on this button makes the actual (current)
The current measurement measurement value entered as the required input.
value will be taken as the
(6) [Set] button
input value if the [Set from zz
Displayed 1 to Displayed 8
actual] button is enabled. Enter an appropriate displayed value (theoretical
value).
Enter the display value If the set displayed value is invalid, it will be shown in
[Displayed
(7) (theoretical value) to apply red characters.
value x] setting
scaling to.

Basic Operations of LS-Navigator2 7 Click the [OK] button.

The scaling setting is now established and the
Register the scaling setting If the set displayed value or displayed

value is invalid, the corresponding error
dialog will appear.
1 Select the OUT number for which the scaling
setting is registered.
As the [Scaling setting] dialog returns
if the [OK] button is clicked, correct the
The scaling setting contents of the selected OUT input value or displayed value shown in
number will be displayed at the right of the [Scaling red characters.
setting] area.
2 Click the [Register scaling] button.

The [Scaling setting] dialog appears.
The number of significant digits and unit Restoring the scaling setting to its initial
of the currently displayed measurement value
5 value will vary depending on the minimum
display unit selected by [Minimum display
unit] of the [Basic setting] tab. 1 During the registration of scaling setting, click the
[Set to default] button.
Program Setting
The input value and displayed value will be restored

3 When setting the input value from the any actual
measurement, click to enable the [Set from
to their initial values.
actual] button.
With the [Set from actual] button turned Canceling the registration of scaling
ON, the [Set] button is enabled according setting
to the number of points selected with
[Scaling pts].
1 Select the OUT number for registering a scaling
setting.
4 Select the number of scaling points. The scaling setting contents of the selected
measurement target will be displayed at the right of
If the number of scaling points is modified the [Scaling setting] area.
on a half way of establishing the scaling
setting (in such a case where more than
one input values or displayed values
2 Click the [Register scaling] button.
The [Scaling setting] dialog appears.
are changed from their initial value), the
Confirmation dialog appears to initialize
the contents having been set. If this is the 3 Select [OFF] from the [Scaling pts] dropdown list.
case, click the [OK] or [Cancel] button, as
required. 4 Click the [OK] button.
The scaling setting is now cancelled and the
5 Enter the input value. In case of setting the input
value from any actual measurement, click the
[Set] button.
For the input value, use a value larger

than the previous input value.
6 Enter the displayed value.

Display Panel Setting Method 4 Set the displayed value. Select an input digit by
Register the scaling setting
1 Press the [9] key after pressing the [FUNC] key,

select the OUT number for scaling and then
5 Repeat the setting of input value and displayed

value as many times as the number of scaling
points set with Steps 3 and 4.
When you complete the settings as many as the
number of scaling points, the Measurement screen
5
The [Scaling setting] screen appears. will return.
Program Setting
These settings will be reflected on the Controller.
2 Select the number of scaling points by pressing
the [ ], [ ], [ ] or [ ] key, then press the [ENT]
key.
The Scaling value setting screen appears.

If you do not perform scaling, select [OFF].
3 Enter the input value. Select an input digit by

The Displayed value setting screen appears.

In case of setting the input value from any
actual measurement, press the [TIM] key.

[Common setting] Tab: Edge Detection
Select the [Common setting] tab in the [Program setting] screen to display the common settings.
Display the [Edge detection] area by clicking on the [Edge detection] button, and then perform setting for received light
waveform and edge detection.
[Edge detection] area
(3) (7) (8)
(9)
(1)
5
(2) (4)
Program Setting
(5)
(6)
(10)
(11)

(1) [Edge detection] area Use this button to display the edge detection setting area.
Select a head where to set edge detection. Clicking the button allows edge
(2) [Head x] button
detection settings to appear.
(3) [Edge detection threshold] setup Select a check box to enter an edge detection threshold.
(4) [Mask setting] setup Select this check box to enter a mask setting.
(5) [Check No. of edges] setting Select this check box to set an OK/NG threshold for the number of
edges.
(6) [FOCUS monitor] setup Set the detection sensitivity of FOCUS monitor.
[Continuous acq waveforms] Click this button to continuously acquire received light waveforms from the
(7)
button head periodically and show them in the received light waveform display area.
Click this button to once acquire received light waveforms from the head
(8) [One-time acq waveforms] button
and show them in the received light waveform display area.
(9) [Overwrite waveforms] check box Select this check box to overwrite received light waveforms.
Received light waveform display
(10) This area shows received light waveforms.
area


[Calibration of received light This button performs calibration of received light intensity. Clicking the
(11)
intensity] button button allows the [Calibration of received light intensity] dialog to appear.
[Calibration of received light intensity] dialog
(1)
5
Program Setting
(2)

[Perform calibration of received
(1) This button performs calibration of received light intensity.
light intensity] button
[Return calibration of received
Use this button to return calibration of received light intensity to the factory
(2) light intensity to the factory
setting.
setting] button
Perform calibration of received light intensity without a target between the receiver and transmitter.

Edge detection
Received light waveform

Edge detection threshold 0 50 80 100
You can set a threshold (ratio to the maximum received
light intensity) for edge detection.
Change the threshold according to the light
transmittance of a target to be measured such as a
transparent body. Up to two edge-detection thresholds
can be set.
This is usable particularly when the width of a coating
Coating Transparent sheet
on a transparent sheet and that of the sheet are
width width
measured at the same time.
To measure an opaque object, set the edge detection
threshold to 50%.
5 Threshold value T1
Threshold value T2
Program Setting
Transparent sheet
If the check box of [Edge detection
threshold] is deselected, the entered
threshold is cleared.
When the check box is selected next time,
the threshold is returned to the default value.
zz
Threshold value T1
Enter a threshold value in units of %.
Coating (opaque)
zz
Threshold value T2
Select this check box , then enter a threshold value
in units of %.


Mask setting
Check No. of edges
Select this check box to specify the range of If the number of edges being detected differs from that
masking (neglecting) edges in units of mm. you have set with the Check No. of edges function,
Some edges you want to eliminate from a measurement data is kept as output waiting data.
measurement target may appear depending on a target Select this check box to enter the number of edges
to be measured. to be detected.
Use this mask function to neglect such edges not to be
used for such measurement. If this check box is deselected, the entered
number of edges is cleared.
zz
In case of start point (M1) > end point (M2)
When the check box is selected next time,
Masking ranges are set on both outsides of boundaries. the number of edges is returned to the default
value.
Masking range
As long as the mask setting is effective,
edges included in the mask range are not
counted.
Mask
Measuring range
5
range
Program Setting
Masking range
zz
In case of start point (M1) < end point (M2)
A masking range is set at the inside between
boundaries.
Measuring range
Masking range
Mask
range
Measuring range
zz
In case of start point (M1) = end point (M2)
The entire range is used for measurement (no masking
range is set).
yyAfter acquiring received light waveforms,
you can change the masking range by
dragging and dropping the tag of [M1] and/
or [M2] being displayed in the received light
waveform area.
yyA masking range is displayed in yellow
rectangle.
yyIf the check box has been selected, the
line and tag in the mask position will appear
in the received light waveform display area.


FOCUS monitor zz
This function is used in combination with status output
“FOCUS”. The FOCUS monitor function is usable Focus value Target position X
when measuring cylindrical objects such as a shaft and +9 +13.5 mm < X ≤ +15 mm
a wire.
If a target to be measured is not included in the FOCUS +8 +12 mm < X ≤ +13.5 mm
monitor range, status output is turned to ON. +7 +10.5 mm < X ≤ +12 mm
“Status output” (page 5-98)
+6 +9 mm < X ≤ +10.5 mm
yyThe FOCUS monitor function is only
+5 +7.5 mm < X ≤ +9 mm
enabled when a round bar is measured.
yyIf the Interference prevention function is +4 +6 mm < X ≤ +7.5 mm
used, the FOCUS monitor is treated as +3 +4.5 mm < X ≤ +6 mm
focus NG.
yyThis is not available on LS-9120M, +2 +3 mm < X ≤ +4.5 mm
LS‑9006D and LS-9030D. If used, it will be +1 +1.5 mm < X ≤ +3 mm
recognized as focus NG.
0 -1.5 mm < X ≤ +1.5 mm
5 FOCUS display OFF FOCUS display ON

-1
-2
-3 mm ≤ X < -1.5 mm
-4.5 mm ≤ X < -3 mm
Program Setting
-3 -6 mm ≤ X < -4.5 mm
-4 -7.5 mm ≤ X < -6 mm
-5 -9 mm ≤ X < -7.5 mm
-6 -10.5 mm ≤ X < -9 mm
Measurement center position
-7 -12 mm ≤ X < -10.5 mm
zz
For LS-9006/LS-9006M -8 -13.5 mm ≤ X < -12 mm
-9 -15 mm ≤ X < -13.5 mm
Focus value Target position X
+9 +2.7 mm < X ≤ +3.0 mm
+8 +2.4 mm < X ≤ +2.7 mm
+7 +2.1 mm < X ≤ +2.4 mm
+6 +1.8 mm < X ≤ +2.1 mm
+5 +1.5 mm < X ≤ +1.8 mm
+4 +1.2 mm < X ≤ +1.5 mm
+3 +0.9 mm < X ≤ +1.2 mm
+2 +0.6 mm < X ≤ +0.9 mm
+1 +0.3 mm < X ≤ +0.6 mm
0 -0.3 mm < X ≤ +0.3 mm
-1 -0.6 mm ≤ X < -0.3 mm
-2 -0.9 mm ≤ X < -0.6 mm
-3 -1.2 mm ≤ X < -0.9 mm
-4 -1.5 mm ≤ X < -1.2 mm
-5 -1.8 mm ≤ X < -1.5 mm
-6 -2.1 mm ≤ X < -1.8 mm
-7 -2.4 mm ≤ X < -2.1 mm
-8 -2.7 mm ≤ X < -2.4 mm
-9 -3 mm ≤ X < -2.7 mm


Acquiring received light waveforms
This instrument acquires received light waveforms
from the head and shows them in the received light
waveform display area.
Setting edge detection
yyThe items for which the check boxes
of [Edge detection threshold] and [Mask
setting] are selected appear in the received
1 Select a head where to set edge detection.
The edge detection settings of a selected head are
light waveform display area. displayed to the right of the [Edge detection] area.
yyAfter acquiring received light waveforms,
you can change the thresholds and mask
positions by dragging the tag of [T1], [T2], 2 Acquire the received light waveform as
necessary.
[M1] and/or [M2] being displayed in the
received light waveform area.
3 Set edge detection thresholds.
zz
One-time acq waveforms yyAfter acquiring the received light waveform,
5
Received light waveforms are acquired once and you can change the threshold(s) by
shown in the received light waveform display area. dragging and dropping the tag of [T1] and/
or [T2] being displayed in the received light
zz
Continuous acq waveforms waveform area.
Received light waveforms are acquired continuously
Program Setting
yyThe line and tag in the threshold(s) of
and periodically, and shown in the received light which the check box has been selected
waveform display area. will appear in the received light waveform
zz
Overwrite waveforms display area.
Received light waveforms can be overwritten by
4 Set mask settings.

selecting this check box .

Calibration of received light intensity
This button performs calibration of received light 5 Set the Check No. of edges function.
intensity.
Perform this calibration in cases where the transmitter 6 Enter FOCUS monitor data.
and receiver are used with those removed from the TR
base and the transmitter and receiver get soiled with
time due to contamination.
Clicking the button makes the [Calibration of received Acquiring received light waveforms
light intensity] dialog to appear.
Perform calibration of received light intensity without
a target to be measured between the receiver and 1 Click the [Continuous acq waveforms] button or
[One-time acq waveforms] button.
transmitter.
zz
Perform calibration of received light intensity
This button allows the calibration of received light
2 Select the check box of the [Overwrite
waveforms] button as necessary.
intensity to run.
Click the [OK] button in the dialog indicating completion
of received light intensity calibration that appears after
execution to restore the [Calibration of received light
intensity] dialog.
zz
Return calibration of received light intensity to the
factory setting
This button returns the calibration of received light
intensity to the factory setting.
Click the [OK] button in the dialog indicating restoration
of received light intensity calibration to the factory-
setting that appears after execution to restore the
[Calibration of received light intensity] dialog.

Performing calibration of received light Display Panel Setting Method

intensity
Edge detection setup
1 Click the [Calibration of received light intensity]
button.
The [Calibration of received light intensity] dialog 1 Press the [0] key after pressing the [FUNC] key,
select [HEAD] and then press the [ENT] key.
appears.
2 Click the [Perform calibration of received light
intensity] button or [Return calibration of received
light intensity to the factory setting] button.
Message “Under calibration of received light
intensity” appears on the Main window.

5 4 Click the [Close] button.
2 Select
Program Setting
the HEAD number for which to perform

setting, then press the [ENT] key.
3 Perform setting for any purpose.

A: EDGE-THRE (Edge detection threshold)

B: MASK (Mask setting)
C: EDGE-CHK (Check No. of edges)
D: FOCUS-M (FOCUS monitor)

selection screen.
5 then
] or [ ] key,

6 When [EXECUTE] appears, press the [ENT] key. 3 Set edge detection thresholds. Select an input
digit by pressing the [ ] or [ ] key, input a value
with a numeric key, then press the [ENT] key.

is completed.
Setting edge detection
1 Select [EDGE-THR], then press the [ENT] key.

Setting a mask range
5
“Edge detection setup” (page 5-68) 1 Select [MASK], then press the [ENT] key.
Program Setting
“Edge detection setup” (page 5-68)
2 Set edge detection thresholds. Select an input

digit by pressing the [ ] or [ ] key, input a value
with a numeric key, then press the [ENT] key.
], [ ], [ ] or
The Threshold B setting screen appears.

3 Set a value of mask M1. Select an input digit by
4 Set a value of mask M2. Select an input digit by


Setting the Check No. of edges function Setting FOCUS monitor
1 Select [EDGE-CHK], then press the [ENT] key. 1 Select [FOCUS monitor] setup, then press the
[ENT] key.
2 [Select [ENABLE] by pressing the [ ], [ ], [ ] or
5 ] key, then press the [ENT] key. 2 Select an input digit by pressing the [ ] or [ ]
key, input a value with a numeric key,then press
the [ENT] key.
Program Setting
The Set No. of edges screen appears.
3 Set the number of edges. Select an input digit by


Performing calibration of received light 5 Press the [ENT] key.

The Measurement screen appears.
intensity
1 Press the [FUNC] key, then press the [-] key.

The [Calibration of received light intensity] screen
appears.
2 Select a head number by pressing the [

] or [ ]
Program Setting
3 Select [START] by pressing the [
] or [ ] key,
Check that no fixture or target exists within the

measuring range.
4 then
Select [EXECUTE] by pressing the [
] or [ ] key,
This executes calibration of received light intensity.

After execution the Completion screen appears.

[Common setting] Tab: Interference Prevention
[Common setting] Tab: Interference

Prevention
Click the [Interference prevention] button to display the [Interference prevention] area, and then perform interference
prevention setting.
If multiple heads are used concurrently and if LED light emitted from each head comes into other heads, an error may
be observed in measurement data. This function is used to prevent such measuring errors.
[Interference prevention] area
(2)
5 (3)
(1)
Program Setting

(1) [Interference prevention] button Use this button to display the [Interference prevention] area.
[Interference prevention func]
(2) This list is used to select a type of interference prevention function.
drop-down list
(3) [Head-Group] setting Specify a group to which each head belongs.

Interference prevention function Basic Operations of LS-Navigator2

This function shifts the timing of light emission of
multiple heads to be used by dividing them into 2
or 3 groups. Use this function if LED light from the
1 Select interference prevention function.
heads interferes with each other and adversely affects
measurements. 2 Group multiple heads.
yyHeads classified in the same group emit
Display Panel Setting Method
light in the same timing.
yyIf another setting item is selected from
the drop-down list, the entered grouping
settings are cleared.
1 Press [FUNC] key, then press [0] key.
Select settings screen appears.
When this item is selected again, grouping
settings return to the default values.
yyIf the Interference prevention function is 2 then
] or [ ] key,
used, position measurement data between
the transmitter and receiver always
becomes output waiting data.
5

AB-ON
Program Setting
The measurement timing is divided into 2 groups.
Divide multiple heads into 2 groups of group A and
group B.
Click and select one of group name radio buttons to
which each head is grouped.

ABC-ON 3 Select [PRV-INT] by pressing the [
], [ ], [ ] or
The measurement timing is divided into 3 groups.

Divide multiple heads into 3 groups of group A, group
B, and group C.
Click and select one of group name radio buttons to
which each head is grouped.
A sampling frequency varies depending on
the number of OUTs to use and interference
prevention function setting.
Number of function
OUTs to
use OFF AB-ON
ABC- 4 Select the number of axes by pressing the [
[ ], [ ] or [ ] key, then press the [ENT] key.
],
ON
1 to 4 62.5 125 187.5
5 to 12 125 125 187.5
13 to 16 187.5 250 187.5
Unit:µs
[2-AXIS] AB-ON
[3-AXIS] ABC-ON

5 [Assign HEAD-1 to a group by pressing the [

],
Values that can be set in the Group setting screen

differ depending on the selected head grouping.
2-AXIS 3-AXIS
HEAD1: A HEAD1: A
5 Initial value
HEAD2: B
HEAD3: A
HEAD4: B
HEAD2: B
HEAD3: C
HEAD4: A
Program Setting
Setting
A, B A, B, C
value
6 Apply the same settings in procedure 5 to HEAD-

2 to HEAD-4.
7 Press the [ESC] key, the settings screen

appears.
8 then
] or [ ] key,
9 Press the [ENT] key when [EXECUTE] appears.
The process is complete when [COMPLETE] is

displayed.

[Common setting] Tab: Sync Setting
Click the [Sync setting] button to display the [Sync setting] area, and then perform synchronization setting.
[Sync setting] area
(2)
(1) 5
Program Setting
(1) [Sync setting] button Use this button to display the Sync setting area.
(2) [Sync measure OUT] check box Select Sync measure outputs for which timing synchronization is enabled.

Sync measure target 4 key,

Select [ON] by pressing the [ ], [
], [ ] or [ ]
Select target outputs (from among OUT1 to OUT16)

for which sync timing, sync zero, and sync reset are
enabled.
The sync signals can be entered from the external
terminal, display panel, RS-232C, and LS-Navigator2.
1 Select outputs to be a target for the TIMING sync

processing.
Then, the OUT setting screen appears.
Only the outputs for which any sync
Display Panel Setting Method setting is currently enabled are displayed
in the OUT setting screen.
5 1 Press the [FUNC] key, then press the [0] key.

5 Select Sync measure outputs for which timing
2 then
Select [COMMON] by pressing the [ ] or [ ] key, synchronization is enabled by pressing the [ ],
Program Setting
press the [ENT] key. [ ], [ ] or [ ] key, then press the [ENT] key.
When setting of all targeted outputs has been
finished, the Function selection screen appears.
6 Display the select setting items screen by

pressing the [ESC] key.
7 then
] or [ ] keys,
8 When
key.
[EXECUTE] is displayed, press the [ENT]
3 Select [SYNC] by pressing the [

] or [ ] key, then
The setting is complete when [COMPLETE] is

displayed.

[Common setting] Tab: Data Storage
Click the [Data storage] button to display the [Data storage] area, and then perform data storage setting.

In case of storage cycle “x1”
1. 4.
Sampling frequency
Storage start / stop start Stop
2. 5.
Storage timing
3.
Storage in the internal
memory
1. Storage starts according to the [storage start condition].

2. A measurement value to be stored is determined for each [sampling frequency].
5
3. A measurement result is stored in the internal memory.
Program Setting
4. Storage stops according to the [storage stop condition].
5. No measurement value is stored under the stop condition.

In case of storage cycle “TIMING sync” or “Storage trg sync”
1. 4.
Storage start / stop start Stop
2. 5.
Storage timing
TIMING input or STTRG
input
3.
Storage in the internal
memory
1. Storage starts according to the [storage start condition].

2. A measurement value to be stored is determined according to the [TIMING input].
TIMING1 input, input from the RS232C interface, and TIM button entry of LS-D1000 are available as TIMING input.
3. A measurement result is stored in the internal memory.
4. Storage stops according to the [storage stop condition].
5. No measurement value is stored under the stop condition.

[Data storage] area
(2)
(3)
(4)
5
(5)
(1)
(6)
Program Setting

(1) [Data storage] button Use this button to display the data storage area
(2) [Storage points] setting Input the number of points to be stored in data storage.
(3) [Storage cycle] drop-down list Select a storage cycle to be stored in data storage.
[Storage control method] radio
(4) Select a method to control storage.
buttons
[Storage target OUT] check Select outputs (from among OUT1 to OUT16) where to store measurement
(5)
boxes data.
(6) [Fail storage] radio buttons Select a setting for fail storage.

Data storage
Storage cycle
Select a type of timing to store measurement data.
Set up a method of storing measurement data in the
internal memory of this main unit. Start data storage setting to store
With LS-Navigator2, retrieving and analyzing stored measurement data.
data, outputting them to an Excel file, etc. are available.
You can use 4 types of timing in which measurement
data is stored.
zz
Multiples of sampling frequency
The following data is stored. Data is stored in a frequency of a selected multiple of

sampling frequency.
yyMeasurement value
Setting range: x1, x2, x5, x10, x20, x50, x100, x200,
yyJudgment value
x500, x1000
yyPulse count value
yyTime If the data update cycle is longer than a
Since the storage data is saved for each program, selected storage cycle, the same data is
switching programs will not clear the storage data stored until it is updated.
saved before the switch.
Also, the storage data clear instruction by LS-
zz
TIMING sync
5
Navigator2, etc. will only clear the storage data stored
Measurement data is stored in synchronization with
in the currently used program.
TIMING signal input.
zz
Storage start condition
Measurement data is stored in all OUTs
Program Setting
yyThe STEN terminal is turned from OFF to ON. selected with “Storage target OUT” check
yyA storage start command is received. boxes in timing for TIMING signal input.
yyThe storage start command from LS-Navigator2 is
received.
zz
1sec
zz
Storage stop condition Storage target OUT data is stored every second (1
yyA specified number of points of data are stored. sec).
yyThe STEN terminal is turned from ON to OFF.
yyA storage stop command is received.
zz
Storage trg sync
Updated data is stored in timing for STTRG terminal
yyThe storage stop command from LS-Navigator2 is input or instruction by the communication command.
received.
zz
Storage data clear condition
Storage control method
yyThe STCLR terminal inputs a command under the This setting specifies the method of data storage start,
storage stop condition. stop and clear.
yyThe Setting reflection command is transmitted.
yyClearing stored data from LS-Navigator2
zz
Terminal
Data storage is started when the SREN terminal is ON
yyOperation to restore factory-setting is performed.
and stopped when it is OFF.
yyPower is turned OFF. “I/O Terminal Names and Functions” (page 8-7)

Storage points zz
Command
Set the number of points of measurement data to be Commands from LS-Navigator2 or via RS-232C
stored by the Data storage function. communication are used.
“RS-232C interface commands” (page 9-2)
Setting range: 1 to 400,000 points

Storage target OUT
Select outputs (from among OUT1 to OUT16) where to
store measurement data.

Fail storage
Measurement data is stored only if a total judgment
result is not “GO”,
“Total judgment setting” (page 5-97)

Basic Operations of LS-Navigator2 Display Panel Setting Method
1 Enter the number of points of data to be stored in

the Storage points box. Setting data storage
2 Select a storage cycle from the drop-down list. 1 Press the [FUNC] key, then press the [0] key.
3 Select one of the storage control methods. 2 then

Select [COMMON] by pressing the [ ] or [ ] key,
4 Select
storage target outputs (from among OUT1
to OUT16).
5 Select a setting for fail storage.
5
Program Setting
3 Select [STORAGE] by pressing the [

] or [ ] key,

H-0: POINTS (Storage points)

H-1: CYCLE (Storage cycle)
H-2: CONTROL (Storage control method)
H-3: OUT (Setting storage target OUT)
H-4: NG-STRG (Fail storage)

selection screen.

6 then
] or [ ] key,
Setting storage cycle
7 When [EXECUTE] appears, press the [ENT] key. 1 Select [CYCLE], then press the [ENT] key.
“Setting data storage” (page 5-80)

is completed.
2 Select a storage cycle by pressing the [ ], [ ],
5
Setting storage points
Program Setting
1 Select [POINTS], then press the [ENT] key.
Setting range: ‌1, 2, 5, 10, 20, 50, 100, 200, 500,

1000, 1SEC, TIM-SYNC, TRG-SYNC
2 Enter the number of points of data to be stored.

the [ENT] key.

Setting storage control Setting storage target OUT
1 Select [CONTROL], then press the [ENT] key. 1 Select [OUT], then press the [ENT] key.
“Setting data storage” (page 5-80) “Setting data storage” (page 5-80)
2 Select a storage control method by pressing the 2 Select [ON] with the [ ], [ ], [ ] or [ ] key, then
5 [ ], [ ], [ ] or [ ] key, then press the [ENT] key.
Storage control methods that can be set are as
follows.
Program Setting
yyCOMMAND (Control with a command)

yyTERMINAL (Terminal control)
Perform the same setting as used in OUT1 for

OUT2 to OUT16.

Setting fail storage
1 Select [NG-STRG], then press the [ENT] key.

2 Select [ENABLE] with the [ ], [ ], [ ] or [ ] key,

5
Program Setting

[Common setting] Tab: Group Calculation
Click the [Group calculation] button to display the [Group calculation] area and then perform group calculation setting.
An average value, maximum value and others are calculated from measurement values of a group consisting of
multiple targets to be measured. Based on these values, GO/NG judgment is performed. A group calculation result is
displayed in OUT16.
10.
7.
4.
1.
2.
3.
5 1. 2. 3. 4. 5. 6. 7.
Program Setting
Timing pulse input
Calculation value 1 2 3 4 5 6 7
Group calculation Group calculation
Group calculation
1 2
result

[Group calculation] area
(2)
(3)
(4)
(5)
(1)
5
Program Setting
(1) [Group calculation] button Use this button to display the [Group calculation] area.
(2) [Group calc. func] check box Select this check box to use the Group calculation function.
(3) [Calc. content] drop-down list Select a calculation processing content from this list.
[Original calc. OUT] drop-down
(4) Select an original calculation OUT from this list.
list
(5) [Calc. point] setting Enter the number of calculation points.

Group calculation Basic Operations of LS-Navigator2

This function outputs the maximum value, average
value, etc. of measurement data for the specified
number of times. This function uses OUT16 to display
1 Enable the group calculation function by selecting
the check box.
a group calculation result. Apply this function when you
2 Select
measure multiple parts on the same target, make a GO/
a calculation processing content from this
NG judgment from those results or GO/NG judgment on
each lot of targets. list.
yyThe group calculation function uses

measurement values that has been 3 Select an original calculation OUT from this list.
determined by TIMING input.
yyOutput waiting data is counted as one of 4 Enter the number of calculation points.
calculation points, but measurement data is
not used for calculation.
yyWhile the group calculation function is
being used, an auto-zero timing input to
5 OUT16 is disabled.
yyThe group calculation function can not be
switched ON when OUT 16 is being used.
Program Setting

Calc. content
Specify one of the following pieces of data to be
outputted by the group calculation function.
zz
Maximum value
Outputs the maximum value from among pieces of data
for the number entered in Calc. point setting.
zz
Minimum value
Outputs the minimum value from among pieces of data
zz
Maximum value - Minimum value
Outputs the maximum value minus minimum value from
among pieces of data for the number entered in Calc.
point setting.
zz
Average value
Outputs an average value from among pieces of data

Original calc. OUT
Select an original calculation OUT to be used for group
calculation.

Calc. point
Specify the number of pieces of measurement data to
be used for group calculation.

Display Panel Setting Method 5 Select the target OUT number for a group
calculation by pressing the [ ], [ ], [ ] or [ ] key,
Setting group calculation

2 then
] or [ ] key,
Select an OUT number to be available

except for OUT16.
5
The group calculation item selection screen
appears.
6 Select a calculation processing item by pressing
Program Setting
the [ ], [ ], [ ] or [ ] key, then press the [ENT]
key.
3 Select [GRP-CALC], then press the [ENT] key.
The group calculation point selection screen

appears.
], [ ], [ ] or
7 Enter the number of calculation points. Select an
key.
The group calculation target OUT selection screen

appears.
8 Display the select setting items screen by

pressing the [ESC] key.
9 then
] or [ ] keys,

10 When
key.

displayed.
5
Program Setting

[Common setting] Tab: I/O Terminal Setting
Click the [I/O terminal setting] button to display the [I/O terminal setting] area and then perform I/O terminal setting.
[I/O terminal setting] area
(2)
(3)
(4)
(5)
(6)
5
Program Setting
(1)

(1) [I/O terminal setting] button Use this button to display the I/O terminal setting area.
(2) [Encoder set] button Use this button to display the Encoder set area.
(3) [I/O setting] button Use this button to display the I/O setting area.
(4) [Analog output] button Use this button to display the Analog output area.
(5) [Status output] button Use this button to display the Status output area.
(6) [BCD unit] button Use this button to display the BCD unit area.

[Encoder set] area [I/O setting] area
(1) (1)
(2) (2)
(3) (3)
(4)
(5)
(4)
(6)
5 (5)
Program Setting
No. Name Description No. Name Description

[Input mode] drop- Select an input mode of [Strobe time] drop- Select a strobe time from
(1) (1)
down list the encoder from this list. down list this list.
Enter the number of [Off-delay time] Select an off-delay time
(2) [Sampling] setting (2)
sampling points. drop-down list from this list.
[Pitch unit] drop- Select a pitch unit from Select the number of
(3) [No. of control Ch]
down list this list. (3) control channels from this
drop-down list
list.
[Pitch interval] Enter a pitch interval by
(4)
setting selecting from the list. Select an OUT number
where to output a
[Encoder TIMING Select encoder TIMING
(5) [Control Chx] drop- judgment result and an
func] radio button function. (4)
down list OUT number where to
[Pulse count Set the pulse count preset reflect TIMING/ZERO/
(6)
preset] setting function. RESET1 input.
[Total judgment Select outputs (OUT1 to
(5) setting] check OUT16) where to output a
boxes total judgment.

[Analog output] area [Status output] area
(1) (2) (1) (2)
Program Setting
No. Name Description No. Name Description
Select an output (OUT1 to [Output term Chx] Select a status to output
(1)
[Output term Chx] OUT16) where to output drop-down list from each output terminal.
(1)
drop-down list analog data from each
[Head x] drop- Select a head from this
output terminal. (2)
down list list.
Use this button to display
[Optional setting]
(2) the [Analog output
button
terminal setting] window.
[Analog output terminal setting] window
(1)
(2)

[Analog scaling Select an analog scaling
(1)
val] drop-down list value from this list.
[Vol of output
Select a voltage of output
(2) waiting data] drop-
waiting data from this list.
down list

[BCD unit] area
(1)
(2)
(3)
(4)
5
Program Setting
[Select output Selects the signal type to

(1) func] drop down be output from the output
list connector.
[OUT select] Select the OUT number

(2)
dropdown list selection method.
[Chx] drop down
(3) Select the OUT number.
list
[Strobe time] drop
(4) Select the strobe time.
down list

Encoder set
This is the function to use pulses inputted from the encoder for measurement.
This function inputs TIMING signals using input pulses (Encoder TIMING func) and stores measurement value by tying
the number of pulses to a measurement value (Data storage func).
“[Common setting] Tab: Data Storage” (page 5-77)
“Pulse frequency error” (page 5-98)
“[Common setting] Tab: Sync Setting” (page 5-75)

Input mode
Select a method of updating a pulse count value from the pull-down list.
zz
1-ph 1 TM
Irrespective of phase B pulse, signal input is recognized on the rising edge of phase A pulse, and a pulse count is
counted up.
Phase A
5
Program Setting
Phase B
Pulse count value
0 1 2 3 4 5 6 7
zz
2-ph 1 TM
In case of phase B pulse OFF:
yySignal input is recognized on the rising edge of phase A pulse and a pulse count is counted up.
yySignal input is recognized on the falling edge of phase A pulse and a pulse count is counted down.
In case of phase B pulse ON, signal input is not recognized and a pulse count value will not be updated.
Phase A
Phase B
Pulse count value

0 1 2 3 2 1 0

zz
2-ph 2 TM
In case of phase B pulse ON:

yySignal input is recognized on the rising edge of phase A pulse and a pulse count is counted down.
yySignal input is recognized on the falling edge of phase A pulse and a pulse count is counted up.
Phase A
Phase B
5 Pulse count value
0 1 2 3 4 5 6 5 4 3 2 1 0
Program Setting
zz
2-ph 4 TM
In case of phase B pulse ON:

yySignal input is recognized on the rising edge of phase A pulse and a pulse count is counted down.
yySignal input is recognized on the falling edge of phase A pulse and a pulse count is counted up.
In case of phase A pulse OFF:

yySignal input is recognized on the rising edge of phase B pulse and a pulse count is counted down.
yySignal input is recognized on the falling edge of phase B pulse and a pulse count is counted up.
In case of phase A pulse ON:

yySignal input is recognized on the rising edge of phase B pulse and a pulse count is counted up.
yySignal input is recognized on the falling edge of phase B pulse and a pulse count is counted down.
Phase A
Phase B
Pulse count value
0 1 2 3 4 5 6 7 8 9 10 11 12 11 10 9 8 7 6 5 4 3 2 1 0 -1


Sampling
Encoder TIM func
This is used in combination with the Encoder TIM This is the function to convert a pulse input from the
function. encoder, etc. to a TIM input.
Specify a pulse count value necessary for inputting the A TIMING signal is turned ON every time a pulse count
TIMING signal once. value is updated.
If sampling has been set up, a TIMING signal is turned

Pitch unit ON when pulse count values change specified number
of times since the encoder TIMING was ON last time.
This is used in combination with the Encoder TIM
If encoder TIMING is issued multiple times in a
function.
sampling frequency, a pulse frequency error will result
This setting allows display of horizontal axis values in
and no pulse input is accepted.
pitch unit when displaying measurement values with the
Data storage function.
“Data storage” (page 5-79) You can check whether a pulse frequency
error occurs with the specified status output.
zz
No unit
When a pulse frequency error is output, the
No unit is set. off-delay is disabled.
zz
5
µm
The unit of μm is used for the encoder. Sampling: None
3
zz
mm
Program Setting
The unit of mm is used for the encoder. 2
1

Pitch interval Pulse count
0
value
Shows the distance of the TIM interval of the encoder.
-1
-2
TIMING
Sampling: 2 times
3
2
1
Pulse count
0
value
-1
-2
TIMING
If the Encoder TIMING function is enabled,

no TIMING input through the terminal or
command will not be accepted.

Pulse count preset
This is the function to enter a pulse count value as a
setting value upon Z-axis input of the encoder.
When power is turned on, a pulse count value is set to
0.
yyPositive-true logic:‌A Z-axis input is recognized with
the OFF-to-ON (rising) edge of a
pulse and then an encoder pulse
count value is preset.
yyNegative-true logic:‌A Z-axis input is recognized with
the ON-to-OFF (falling) edge of a
pulse and then an encoder pulse
count value is preset.

zz
In case where No. of control Ch is 2
I/O setting
Pin Judgment output channel

Strobe time
This setting is usable when the Measure mode is SIG1 HH
used for OUTs which are outputted from the STRB1/ SIG2 HI
STRB2 terminal. Set the length of a strobe signal to be
outputted when a measurement value is updated. SIG3 Ch1 GO
Setting range: 2 ms, 5 ms, 10 ms, 20 ms, 50 ms, SIG4 LO
100 ms, 200 ms, 500 ms
SIG5 LL
“I/O Terminal Names and Functions” (page 8-7)
SIG6 HH

Off-delay time SIG7 HI
Set a time period during which to prolong the ON state
SIG8 Ch2 GO
of judgment output and Output waiting.
SIG9 LO
Setting range: 0, 2 ms, 5 ms, 10 ms, 20 ms, 50 ms,
100 ms, 200 ms, 500 ms, Hold SIG10 LL
5 zz
0
The judgment terminal is turned ON or OFF according
If the tolerance judgment mode is set to “Ref value
mode”, OFF is always outputted from the SIG terminals
to a sampling frequency.
Program Setting
of HH and LL.
zz
Hold
zz
This setting retains the ON state of judgment output.
Upon input of the RESET signal, a judgment signal is Pin Judgment output channel
set to OFF.
SIG1 HH/HI

No. of control Ch SIG2 Ch1 GO
Select the number of OUTs to output judgment results SIG3 LL/LO
from among SIG1 to SIG10.
SIG terminal output data changes according to the SIG4 HH/HI
selected number. SIG5 Ch2 GO
zz
Control Ch1 to Ch4 SIG6 LL/LO
Select a Ch number of OUT where to output a judgment SIG7 HH/HI
result from the drop-down list.
SIG8 Ch3 GO

Control Ch1/Control Ch2
yySTRB1/STRB2 is outputted according to the SIG9 LL/LO
measurement result of the OUT that has been set SIG10 STATUS3
in Control Ch1/Ch2.
yySignal input from TIMING1/RESET1/ZERO1 is STATUS3 is used for status output.
reflected to the OUT that has been set in Control
Ch1.
yySignal input from TIMING2/RESET2/ZERO2 is
reflected to the OUT that has been set in Control
Ch2.
yyIf sync setting is performed for the OUT that has
been selected in Control Ch1, each input from the
TIMING1/RESET1/ZERO1 terminal is reflected to
all sync-set OUTs.

zz
Analog output
Pin Judgment output channel This output function converts measurement values of
SIG1 HH/HI/LO/LL selected OUTs to analog voltages within the range of
Ch1 ±10.5 V. The output method depends on the tolerance
SIG2 GO mode.
SIG3 HH/HI/LO/LL Current value from the analog current output (4 to
Ch2 20mA) can be converted to voltage value by the
SIG4 GO following calculation formula.
SIG5 HH/HI/LO/LL Voltage value(V) = (Current value(mA) - 12mA) / 0.8
Ch3 “Tolerance mode” (page 5-35)
SIG6 GO
SIG7 HH/HI/LO/LL
Ref value mode
Ch4 A voltage to be outputted when a measurement value
SIG8 GO
equals the reference value is assumed as 0V in this
SIG9 STATUS4 mode.
SIG10 STATUS3 This function outputs the difference of a measurement
STATUS3/4 is used for status output.

value from the reference value with + or - voltage.
Scaling can be changed in 13 steps.
Above the plus limit range
5

Program Setting
Total judgment setting Voltage (Current) +10.8V (20.64mA)
Select outputs (OUT1 to OUT16) to be used for total +10.5V (20.4mA)

judgment. +10V (20mA)
If all the output values of “Non-output waiting OUTs”
among selected OUTs are GO, the total judgment result
will be GO. 0V (12mA)
“Total Judgment” (page 6-12)
zz
OUT1 to OUT 16 -10V (4mA)
Select the check boxes of OUTs to be included in -10.5V (3.6mA)
total judgment outputs.
Below the minus limit range Measurement
-10.8V (3.36mA) value [mm]
Reference value set for tolerance

Threshold mode
This mode allows setting of a measurement value to
output as +10 V and that to output as -10 V.
Set these measurement values so as to meet the
following condition.
│(Measurement value at +10 V) -
(Measurement value at -10 V)│ ≥ 2000 x (Minimum
display unit)
+10 V: +5 mm
In case of
-10 V: -5 mm
Above the plus limit range
Voltage (Current) +10.8V (20.64mA)
+10.5V (20.4mA)
+10V (20mA) Point 2
0V (12mA)
-10V (4mA) Point 1

-10.5V (3.6mA)
-5 0 +5 Measurement
Below the minus limit range value [mm]
-10.8V (3.36mA)

yyIf a measurement value does not fall within

Status output
the range of ±10.5 V, it is referred to as the
following. This is a setting for STATUS outputs.
If a measurement value exceeds +10.5 You can check statuses of such as OUT, head and
V, it is referred to as “above the plus limit signal input from a maximum of 4 terminals.
range”. If a measurement value exceeds Statuses to be checked are allocated to each terminal.
-10.5 V, it is referred to as “below the minus “No. of control Ch” (page 5-96)
limit range”.
In such cases, analog voltages to be
Output waiting
outputted are as follows. The status output is turned ON if a target OUT to be
yyAbove the plus limit range: +10.8 V selected is in the Output waiting state.
yyBelow the minus limit range: -10.8 V
yyIf no OUT is allocated to an analog output
Outlier continue
terminal or if no measurement mode
The status output is turned ON if the OUT (data prior
of OUT is set, the analog voltage to be
to outlier values processing) selected as target is an
outputted is -10.8 V.
outlier value.
“State Table” (page 11-20)
5
“Outlier exclusion function” (page 5-40)

FOCUS
The status output is turned ON if a measurement
Program Setting
Set a voltage to be outputted from each analog output

target of the selected head is not in the vicinity of the
terminal.
reference position.
A permissible setting range differs depending on the
This threshold can be set in the “FOCUS monitor”
tolerance mode.
setting.
yyTolerance mode: Reference value “FOCUS monitor” (page 5-66)
Not available on LS-9120M, LS-9006D and

LS-9030D.

Insufficient light
Setting range [m/V], [mm/V]:‌1, 2, 5, 10, 20, 50, 100, The status output is turned ON if the maximum light
200, 500, 1000, 2000, intensity of the received light of the selected head has
5000, 10000 fallen below 50%.
An output voltage depends on the setting of
minimum display unit.
Check No. of edges: Fail
“Combined limitation for analog scaling (Ref. val The status output is turned ON if the Check No. of
mode) and minimum display unit” (page 5-15) edges function of the selected head is failed.
“Check No. of edges” (page 5-65)
Example when analog current output is in
use: Select 1000 μm/V to output the voltage
as 1000 μm/0.8 mA.
Stat processing
The status output is turned ON if a selected target Stat
yyTolerance mode: Threshold process Ch is under calculation.
“[Common setting] Tab: Stat Process” (page 5-109)

Pulse frequency error
The status output is turned ON if the Pulse frequency
error occurs. (The off-delay is disabled.)
“Encoder set” (page 5-93)
Setting range:‌Values compatible with upper limit
value [+10V] / lower limit value [-10V]

Volt of output waiting data
Select a voltage to be outputted if a measurement value
is output waiting data from the drop-down list.
Setting range: -10.8 V, +10.8 V, 0 V, last hold value

BCD unit

BCD strobe time
Sets the output time of the strobe signal set up in the

Output selection function BCD unit.
Selects the signal type to be output from the output It is enabled when measurement mode has been
connector of the BCD unit. You can select from the selected for the selected OUT.
following three types: BCD_STROBE1 to BCD_STROBE4 are all supported.
Setting range: 2 ms, 5 ms, 10 ms, 20 ms, 50 ms,
zz
BCD output 100 ms, 200 ms, 500 ms
Outputs the measurement values in 29-bit (signed)
BCD format.
zz
Binary output
Outputs the measurement values in 25-bit (negative
value = a complement representation of 2) Binary
format.
zz
Judgment output
Outputs the judgment result of each OUT.
If "Judgment output" has been selected in the
output selection function, the STROBE signal
5
from the BCD unit will be output when the
Program Setting
following OUTs are updated.
BCD_STROBE1 = OUT set in Ch1
For details on the output, refer to page 8-26.

OUT selection method
Selects the method to be used to determine the OUT
number for outputting signals from the output connector
of the BCD unit.
zz
Controller settings
This method is used when you wish to fix the output
OUT number. Also, set the OUT number to be output.
You can perform this setting from the display panel, LS-
Navigator2, and RS-232C.

Ch1 to Ch4
Select the OUT number to be output. Ch1
corresponds to output connector 1.
zz
BCD unit terminal
This method is used when you wish to change the
output OUT number via specification from terminals.
“BCD unit Expansion connector” (page 8-21)

Basic Operations of LS-Navigator2 Setting status output
Setting the encoder 1 Select a status to output to the output terminal.

1 Select an input mode of the encoder. 2 Select a target head.
2 Enable the Sampling function.
BCD unit
3 Select a pitch unit.
4 Set a pitch interval. 1 Select the output function.
5 Enable the Encoder TIMING function. 2 Select the OUT selection method.
5 6 Enable the Pulse count preset function. 3 Select the BCD strobe time.
Program Setting
Setting judgment output
1 Select a strobe time.

2 Select an off-delay time.
3 Select the number of control channels.
4 Select an OUT to output to the output terminal.
5 Perform total judgment setting.
Setting analog output
1 Select an OUT to output to the output terminal.

2 Click the [Optional setting] button to set optional
data as necessary.
The [Analog output terminal setting] window
appears.
(1) Set an analog scaling value.
(2) Select a voltage of output waiting data.

Setting the display panel 6 Upon

key.
display of [EXECUTE], press the [ENT]
1 Press
key.
the [0] key while holding down the [FUNC]
2 Select [IO] by pressing the [

] or [ ] key, then
When message [COMPLETE] appears, this

completes item selection setup.
Setting the encoder

5
1 Select [ENCODER], then press the [ENT] key.
Program Setting
“I/O terminal setting” (page 5-101)

Refer to the following items.

Input mode setting
1 Select [INPUT], then press the [ENT] key.

A: TOTAL-J (Total judgment setting)
B: STROBE (Strobe time setting)
C: OFFDELAY (Off-delay time setting)
D: IO-CH (I/O setting)
E: ANALOG (Analog output)
F: STATUS (Status output)
G: ENCODER (Encoder set)
H: BCD UNIT (Bcd unit)

selection screen.
5 then
] or [ ] key,

2 orSelect an input mode by pressing the [

], [ ], [ ] 3 key,
input a value with a numeric key, then press
Input modes that can be set are as follows. the [ENT] key.
yy1-1 (1-ph 1 TM)
yy2-1 (2-ph 1 TM)
yy2-2 (2-ph 2 TM)
yy2-4 (2-ph 4 TM)

Encoder TIM func setting
5 The setting item selection screen appears.

1 Select [TIM-FUNC], then press the [ENT] key.

Pulse count preset
Program Setting
1 Select [PRESET], then press the [ENT] key.

], [ ], [ ] or
2 Select the desired input method by pressing the

[ ], [ ], [ ] or [ ] key, then press [ENT] key.
yyENABLE-P Positive-true logic

yyENABLE-N Negative-true logic
yyDISABLE OFF
The Preset screen appears.


Sampling setting
I/O setting output
1 Select [SAMPLING], then press the [ENT] key.
Strobe time
1 Select [STROBE], then press the [ENT] key.


], [ ], [ ] or
2 Select a strobe output time by pressing the [

[ ], [ ] or [ ] key, then press the [ENT] key.
],
5
Program Setting
The Sampling point setting screen appears.
3 Set the number of sampling points. Select an

input digit by pressing the [ ] or [ ] key, input a The Function selection screen appears.
key.
Off-delay time
1 Select [OFFDELAY], then press the [ENT] key.

2 Select an off-delay by pressing the [

], [ ], [ ] or


No. of control Ch 4 Select an OUT number by pressing the [
], [ ],
1 Select [IO-CH], then press the [ENT] key.

The Channel selection screen appears.

The used OUT numbers are only
2 Select the number of control channels by

pressing the [ ], [ ], [ ] or [ ] key, then press
displayed as candidates for selection.
5 the [ENT] key.

Program Setting
The Channel selection screen appears.
3 [Select a channel by pressing the [

], [ ], [ ] or
The Output target OUT selection screen appears.

This OUT selection screen will appear
repeatedly for the number of channels
selected in procedure 2.

Setting analog output 5 [Select [SCALING] by pressing the [

], [ ], [ ] or
1 Select [ANALOG], then press the [ENT] key.

zz
In case where the tolerance mode is the reference
value mode
2 Select an analog output channel by pressing the

6 Select a scaling value by pressing the [ ], [ ],
[ ], [ ], [ ] or [ ] key, then press the [ENT] key. [ ] or [ ] key, then press the [ENT] key.
5
Program Setting
The setting item selection screen appears. The setting item selection screen appears.
3 Select [OUT] by pressing the [

], [ ], [ ] or [ ] zz
In case where the tolerance mode is the threshold
mode
6 key,
input a value with a numeric key, then press
the [ENT] key.
4 Select an OUT number by pressing the [

], [ ],

the [ENT] key.
The used OUT numbers are only

displayed as candidates for selection.

7 [Select [WAIT-VOL] by pressing the [

], [ ], [ ] or
Setting status output
1 Select [STATUS], then press the [ENT] key.
The Output waiting value setting screen appears.
8 Select a voltage of output waiting data by

pressing the [ ], [ ], [ ] or [ ] key, then press 2 Select the number of control channels by
the [ENT] key. pressing the [ ], [ ], [ ] or [ ] key, then press
5 the [ENT] key.

Program Setting

The Status function selection screen appears.
3 Select a status function by pressing the [

], [ ],
Status functions that can be set are as follows.

yyWAIT (Output waiting)
yyOUTLIER (Outlier continue)
yyFOCUS (FOCUS)
yyDARK (Insufficient light)
yyEDGE-CHK (Check No. of edges: Fail)
yySTAT-RUN (Stat processing)
yyFREQ-ERR (Pulse frequency error)


Upon selection of WAIT or OUTLIER
BCD unit
4 Select an OUT number by pressing the [ ], [ ], 1 Select [BCD UNIT] and press the [ENT] key.
The Status output channel setting screen appears. 2 keys,

Select the item to set using the [ ] [
][ ][ ]

Upon selection of FOCUS, DARK, or EDGE-
CHK
The functions you can set are:
yyOUT-FUNC (Output function setting) 5
yyINPUT (OUT selection input)
The Output head selection screen appears.
Program Setting
yyCH (ch)
yySTROBE (BCD strobe time)
4 Select an output head number by pressing the

When OUT-FUNC is selected
3 keys,
Select the item to set using the [ ] [
][ ][ ]
The functions you can set are:

yyBCD (BCD output)
yyBIN (Binary output)
yyJUDGE (Judgment output)
The Status output channel setting screen appears.

Upon selection of STAT-RUN
The Output statistic channel selection screen
appears.
4 Select an output statistic channel by pressing the


Upon selection of FREQ-ERR


When INPUT is selected
When STROBE is selected
3 keys,
Select the input method using the [ ] [
][ ][ ] 3 [Select the BCD strobe time to set using the [ ]
] [ ] [ ] keys, and then press the [ENT] key.
The functions you can set are: The values you can set are:
yySTATIC (Controller settings) yy2MS (2ms)
yyTERMINAL (BCD unit terminal) yy5MS (5ms)
yy10MS (10ms)
yy20MS (20ms)
yy50MS (50ms)
yy100MS (100ms)
yy200MS (200ms)
yy500MS (500ms)
5
When CH is selected
Program Setting
3 keys,
Select the Ch number using the [ ] [
][ ][ ]
4 Select the OUT number to be output, and then


[Common setting] Tab: Stat Process
Click the [Stat process] button to display the [Stat process] area, and then perform statistic process setting.
[Stat process] area
(2)
(3)
5
(4)
Program Setting
(1)

(1) [Stat process] button Use this button to display the statistic process setting area.
(2) [Stat control method] button Use this button to select one of the statistic process control methods.
(3) [No. of stat proc] setting Used to set the number of statistic processes.
(4) [Stat process Chx] drop-down list Use this button to select the OUT to be used in stat process.

Statistic process settings

Stat control method
Select a method of starting, stopping or clearing
Statistical processing is performed for measurement statistical processing.
values of a maximum of 2 OUTs.
Measurement values used for statistical processing are zz
Terminal
those to be retained by a TIMING signal. Stat control terminals are used for control of statistical
yyAverage processing.
yyMaximum value
yyMinimum value Control Ch1 Control Ch2
yyMaximum value - Minimum value Stat start / stop SDO1 SDO2
yyStandard deviation Stat clear SCLR1 SCLR2
yyParameter (Number of pieces of data used for
statistical processing)
yyNumber of instances of HH zz
Command
yyNumber of instances of HI Commands from LS-Navigator2 or via RS-232C
yyNumber of instances of GO communication are used for control of statistical
yyNumber of instances of LO processing.
5 yyNumber of instances of LL

No. of stat proc
If any measurement value is in output waiting data, Enter the number of pieces of statistical processing.
Program Setting
it is not targeted for statistical processing. It is also During the statistic process period, statistic values are
excluded from the number of pieces of data used for updated whenever necessary. When the number of
statistical processing. measurement values used for statistical processing has
Any statistical value will be kept retained until it is reached the specified No. of stat proc, the statistical
cleared. processing is complete.
The conditions for clearing a statistical value are as
follows.
yyIf a statistic control method is using a terminal: STAT_

Stat process Ch1 to Ch2
Select a target OUT to calculate statistic values from
CLEAR terminal input is performed.
the drop-down list.
yyIf a statistic control method is using a command:
yyStat process clear is performed from LS-
Navigator2.
yyThe Stat process clear command is received.
yyStat process clear is performed through panel
operation.
yyPower is turned OFF.
yyA program No. is changed.

Setting LS-Navigator2 Setting the display panel
1 Select one of the statistic process control

methods. Statistical processing
2 Set the number of pieces of statistical 1 Press

key.
the [0] key while holding down the [FUNC]
processing.
3 Select the OUT to be used in stat process.

2 press
Select [STAT] by pressing the [ ] or [ ] key, then
the [ENT] key.
Program Setting
Refer to the following items.
A: ST-CTRL (Stat control method)

B: ST-NUM (No. of stat proc)
C: ST-CH (Stat process Ch)

selection screen.
5 then
] or [ ] key,

6 Upon
key.
display of [EXECUTE], press the [ENT]
Setting No. of stat proc
1 Select [ST-NUM], then press the [ENT] key.

“Statistical processing” (page 5-111)
When message [COMPLETE] appears, this

completes item selection setup.
2 Select an input digit by pressing the [ ] or [ ]

5 Stat control method key, input a value with a numeric key, then press
the [ENT] key.
1 Select [ST-CTRL], then press the [ENT] key.
Program Setting
2 Select a statistic control method by pressing the

[ ], [ ], [ ] OR [ ] key, then press the [ENT] key.
Statistic control methods that can be set are as
follows.
yyTERMINAL (Terminal control)
yyCOMMAND (Control with a command)

Stat process settings
1 Select [ST-CH], then press the [ENT] key.

2 Select a stat process target channel by pressing

the [ ], [ ], [ ] OR [ ] key, then press the [ENT]
key. 5
Program Setting
The target OUT selection screen appears.
3 Select a target OUT by pressing the [

OR [ ] key, then press the [ENT] key.
], [ ], [ ]

[Setting list] Tab
[Setting list] Tab
Select the [Setting list] tab in the [Program setting] screen to display the Setting list.
5
Program Setting
(1) (2)
(3)

(1) Setting item display area This area lists setting item names.
(2) Setting content display area This area lists the setting contents of each item.
(3) [Copy to clipboard] button This button copies the setting lists of items and contents to a clipboard.

[Setting list] Tab
Items in which any setting is updated Setting list

The Setting list screen lists the current settings of the
Program setting.
Updated items are displayed blue.
The Program settings during editing, if not
synchronized to the controller even once, use
initial settings.
Setting LS-Navigator2
Checking settings before update
1 Place the mouse cursor on an item being

displayed blue. 5
The setting value before update is displayed on a
Program Setting
tool tip.
Copying list of settings
1 Click the [Copy to clipboard] button.

The contents of settings displayed in the Setting list
screen are copied to a clipboard.
The setting contents copied to the clipboard are of
tab-delimited text.
(1)

Updated contents of item
Setting-updated
(1) settings are displayed
item
blue.

[Setting list] Tab
MEMO
5
Program Setting

6
This chapter describes how to read the setup screen and
operation procedure of functions available during the
measurement.
Checking the
Measurement Results

Screens...................................................................... 6-2
Head Information....................................................... 6-3
Display Measurement Value..................................... 6-4
Total Judgment........................................................ 6-12
Target Viewer........................................................... 6-14
Trend Graph............................................................. 6-16
Data Storage............................................................ 6-20
Oval Display............................................................. 6-28
2D Position Display................................................. 6-30
Display Stat Process............................................... 6-32
SPC........................................................................... 6-34
Event Logging.......................................................... 6-42
Display Terminal Status.......................................... 6-44

Measurement Screen Outline and Switching Screens

Screens
Measurement screen outline
[Data storage] screen
The screen displays the measurement value stored by
LS-9000 series provides several screens for checking the storage function.
the measurement results. The screen can start/stop the storage and read and
The following types of measurement screens are display the stored data. The read data can be stored in
available. Each measurement screen can be called a file.
from the [Display] menu of the main screen. “Data Storage” (page 6-20)

[Oval display] screen
The screen displays the storage data in a circular
pattern.
The screen can start/stop the storage and read and
display the stored data.
“Oval Display” (page 6-28)

[2D position display] screen
The screen plots the measurements of specified OUT
on a graph by the X and Y axes.
“2D Position Display” (page 6-30)
6
[Display stat process] screen
The screen displays the statistical result of the
measurement values.
Checking the Measurement Results
This section outlines each screen. The screen also displays number of judgment results
Please refer to the following items for details of each other than the maximum and minimum values.
screen. “Display Stat Process” (page 6-32)

[Head information] screen
[SPC] screen
The screen displays the status of all heads connected The screen displays the Statistical Process Control
to the controller. The screen displays the head status information on the basis of the measurement values of
in green when the status is "normal", black while the specified OUT.
monitoring has ceased, and red in other cases. “SPC” (page 6-34)
“Head Information” (page 6-3)

[Event logging] screen

[Display measurement value] screen
The screen displays the log of the events occurred at
The screen displays the measurement value set by the the controller and LS-Navigator2.
program setting. The screen displays the OUT names, “Event Logging” (page 6-42)
judgment results, measurement values, auto-zero
status, and timing input status.
“Display Measurement Value” (page 6-4)

[Display terminal status] screen
The screen displays the terminal status of the controller.
You can output test data for checking the status of

[Total judgment] screen
wiring of the terminals and check the signal input.
The screen displays the total judgment result. “Display Terminal Status” (page 6-44)
Depending on the content of [Total judgment result],
the screen displays "OK" in green in case of "GO" and
"NG" in red in case of "NG".
“Total Judgment” (page 6-12)

[Target viewer] screen
The screen displays the monitor image while
monitoring.

[Trend graph] screen
The screen arranges the measurement values in time
series to display the trend of the data.
“Trend Graph” (page 6-16)

Head Information
Head Information
The head information can be displayed on the measurement screen.

(1) (2)
No. Names Description

(1) Head indicator The head indicator shows the status of each head.
(2) Common indicator The common indicator shows the status common to the heads.
Head information
Head indicator
The head indicator lights up in green and shows
6
"Normal" when each head is in the normal status,

and lights up in red and shows a warning message
when in an abnormal status.
While monitoring has ceased, the indicator appears
in black.

Head status
The statuses below are considered as abnormal.
When these statuses occur at the same time, the
upper status is output first.
yyAn abnormal value is present (this status is
displayed on all heads related to the detected
OUT).
yyInsufficient light intensity of the received light.
When monitoring ceases, "---" appears.
Common indicator
The common indicator lights up in green and shows
"Normal" when each head is in the normal status,
and lights up in red and shows a warning message
when in an abnormal status.
When monitoring ceases, the indicator appears in
black.

Head common status
The head common status detects the following
status as abnormal.
yyPulse maximum frequency rate error
When monitoring ceases, "---" appears.

Display Measurement Value
[Display measurement value] screen

The screen displays the measurement value on the measurement screen.
(1) (2) (3)
(4) (5) (8) (9) (11) (12)
(6)
(7)
(13)
(10)
(14)
(15)
6
(16) (17) (18)

(1) [Sync ZERO] button The button alternately turns ON/OFF the synchronous auto zero signal.
(2) [Sync RESET] button The button inputs the synchronous reset signal.
(3) [Sync TIMING] button The button alternately turns ON/OFF the synchronous timing signal.
(4) [OUT display setting] button The button displays the [OUT display setting] dialog.
(5) [Excel transfer] button The button displays the [Logging setting] dialog.
(6) OUT number The OUT number is displayed.
(7) OUT name The OUT name is displayed.
The indicator lights up in yellow when the timing is on.
(8) [TIM] indicator
The indicator turns off when OFF.
The indicator lights up in light blue when the auto zero is on.
(9) [ZERO] indicator
The indicator turns off when OFF.
The contents of the synchronization setting are displayed.
(10) [Sync ON] / [Sync OFF] OUT selected at "Synchronization setting" is displayed as "Sync. ON".
This OUT is a target of Sync. ZERO/Sync. RESET/Sync. TIMING.
The indicator shows the result of the judgment whether the measurement
(11) Tolerance indicator is within the tolerance or not. The indicator lights up in green in case of
GO, and in red in other cases.
The tolerance values are displayed. No values appear during the simple
(12) Tolerance setting
display mode.
The filter type and its setting are displayed. It is not displayed in simple
(13) Filter display mode.
“Filter” (page 5-38)


The area shows the measure mode. It is not displayed in simple display
(14) Measure mode mode.
“Measurement mode” (page 5-37)
The measurement value is displayed. The color of the characters
depends on the result of the judgment whether the measurement is within
the tolerance or not.
(15) Measurement value
- Within the tolerance: Green
- Out of the tolerance: Red
- Output waiting: White (-----)
(16) [ZERO] button The button alternately turns ON/OFF the auto zero signal.
(17) [RESET] button The button inputs the reset signal.
(18) [TIMING] button The button alternately turns ON/OFF the timing signal.

[OUT display setting] dialog Display mode

Simple display
(1)
(2) (4)
(3)
(5)
Compared with the detailed display, the simple display

omits the following items from the screen.
yyTolerance value
No. Names Description yyFilter
6 (1)
[OUT display
setting] check
box
The selected OUT appears
on the [Display measurement
value] screen.
yyMeasurement mode
Detailed display (small-size)

The button checks all the

[Select all]
(2) [OUT display setting] check
button
boxes.
The button un-checks all the
[Clear all]
(3) [OUT display setting] check
button
boxes.
The button checks the check
[Check OUT
(4) boxes of all OUT being used
used] button
by the running program.
The button selects the display
[Display mode]
(5) mode of OUT in the [Display
radio button
measurement value] screen.
The detailed display is the default display mode.

Detailed display (large-size)
The detailed display (large size) has a different layout

and text size from those of the detailed display (small
size), except the items displayed with "detailed display
(small size)".

MEMO

[Excel transfer - Logging settings] dialog

(1) (2) (3) (10) (9) (11)
(12)
(13)
(4)
(14)
(15)
(16)
(17)
(5)
(19)
(18)
6
(20)
(6) (8) (7) (21) (22)

(1) [Transfer setting] check box The check box selects the items to be transferred to Excel.
(2) [Start] The area displays the start cell on Excel of the transfer item (*1).
(3) [Transfer item] The area displays the items to be transferred to Excel.
Clicking the button moves the transfer item in the selected line one line
(4) button up.
(5) button down.
(6) [Select all] button Clicking the button checks the check boxes of all the transfer items.
(7) [Clear all] button Clicking the button un-checks the check boxes of all the transfer items.
The area displays the number of transfer items whose check boxes are
(8) [No. of transfer]
checked.
The check box selects whether to use a template (Excel file) for the Excel
(9) [Templates] check box
sheet to which the items are transferred.
When any template has been specified, the area displays its file path.
(10) [File]
Entries can be up to 256 characters.
(11) [Reference] button Clicking the button displays the reference dialog to specify the template.
The work sheet name can be entered, to which the transfer is performed.
(12) [Sheet name] setting
(13) [Column] setting Enter the first column to which the transfer item is written (*2).
(14) [Row] setting Enter the first row to which the transfer item is written (*3).
(15) [Transfer item name] check box The check box selects whether to transfer the item or not.


The check box sets the condition that shifts the columns or rows to which
(16) [Cell shift condition] check box data are transformed every time when the specified number of data are
transferred.
(17) [No. of data] setting Enter the number of data whose cell is shifted (*3).
(18) [Column] setting Enter the number of columns whose cell is shifted (*2).
(19) [Row] setting Enter the number of rows whose cell is shifted (*3).
The button selects the method for logging.
Click logging:‌Every time when the [Click logging] button is clicked, the
(20) [Select function] radio button transfer item is transferred to the Excel file.
Trigger logging:‌In response to the input from the TIMING terminal, the
measurement value is transferred to the Excel file.
Clicking the button displays the [Excel transfer] dialog.
The [Excel transfer] dialog (click logging) or the [Excel transfer] dialog
(21) [Start Excel transfer] button (trigger logging) appears depending on the selection of the [Select
function] radio button.
The Excel file automatically starts up.
6
(22) [Cancel] button The button closes the dialog.
*1: ‌All the transfer items may not be displayed on the Excel because of limitation in the display area of Excel. In this
case, "--" appears and an error occurs.

*2: ‌The range you can enter is:
- Excel 2007 or later: 1 to 16384
- Excel 2003 or older: 1 to 256

[Excel transfer] dialog (Click logging) [Excel transfer] (Click logging/Trigger

logging)

Writing format to Excel
(1) yyThe transfer item "time (year, month, date, hours,
minutes, and seconds)" is written as a text.
(2) yyThe transfer item "time (under seconds)" is written as
a value after the decimal point.
(3)

When any abnormal value exists
When any abnormal value exists, the data is written as
No. Names Description below.
The area displays the number
(1) [Transferred]
of data transferred to Excel. zz
Output waiting data, Minus-range on the minus side
The data is written as the minimum value of the
Clicking the button writes minimum display unit.
data at that time onto Excel (Example)
[Click logging]
(2) according to the setting on When the minimum display unit is 0.01μm: -99999.99
button
the [Excel transfer - Logging
setting] dialog. zz
Plus-range on the plus side
6
The data is written as the maximum value of the
Clicking the button deletes
[Previous] minimum display unit.
(3) the latest transferred item
button (Example)
from Excel.
When the minimum display unit is 0.01μm: 99999.99
In the following cases, the error message

[Excel transfer] dialog box (Trigger appears and no data is written.
yyWhen you are going to write data exceeding
logging) the input range of Excel.
yyIn the click logging, the [Click logging]
button and the [Previous] button appears
in gray.
(1) yyIn the trigger logging, "An error occurred"
appears in the logging information display
(2) area.
yyWhen you have edited the Excel file to
which the data have been transferred.
No. Names Description yyWhen you have terminated Excel.
The screen displays the

Logging status of the trigger logging.
(1) information While the TIMING input is
display being accepted, "Trigger
logging ..." appears.
The area displays the number
(2) [Transferred]
of data transferred to Excel.

MEMO

Total Judgment
Total Judgment
[Total judgment] screen

The total judgment appears on the measurement
screen.
“Total judgment setting” (page 5-97)

When the total judgment is "Pass"

When the total judgment is "Fail"
6

Total Judgment
MEMO

Target Viewer
Target Viewer
[Target viewer] screen

The target viewer appears on the measurement screen.
(1) (2) (16) (2)
(12)
(17)
(7)
(11)
(19)
(9)
(3)
(18)
6 (10)
(20)
(4) (8)
(5)
(13) (21)
(6) (14) (24)

(15) (25)
(22) (23)

(1) [Pause] button The button suspends updates of the monitor screen and the waveform.
[Display waveform]/[Hide
(2) The button switches display/hide of the waveform on the target viewer.
waveform] button
The area displays the measurement targets that have been set.
(3) [List of targets] area Turning the check box on displays the selected targets on the target
viewer.
The area displays a number showing the Tx-Rx position of the target.
(4) [FOCUS] The number appears in black when the number is within the [Focus
monitor] setting, in red when out of the setting.
(5) [Edges] The area displays the number of edges detected.
(6) [Head type] The image measured by the displayed type appears on the target viewer.
(7) Target viewer/Monitor screen The screen displays the image captured by the camera in the head.
(8) Target viewer/Scan line The line shows the position where the target is measured.
(9) Target viewer/0E line The line shows the position of the 0 edge.
(10) Target viewer/Target area The area displays information showing the target.
(11) Target viewer/Grid The grid shows the monitor screen size.

Target Viewer

(12) Target viewer/Grid scale The area displays the grid resolution.
(13) [Copy monitor image] button The button copies the displayed monitor image to the clipboard.
The check box is active when the target is the outer diameter and uses
the correction function.
(14) Display setting/[Tilt]
Turning the check box on displays the target area after the tilt
correction.
(15) Display setting/[Grid] Turning the check box on displays the grid on the target viewer.
(16) Waveform image/Waveform The area displays the waveform measured.
(17) Edge No. tag This displays the line showing the edge no. and the position detected.
(18) Pitch No. tag This displays the line showing the pitch no. and the position detected.
The line displays the current edge detection threshold on the waveform.
(19) Threshold
“Edge detection threshold” (page 5-64)
The area shows the mask area set on the waveform.
(20) Mask area
“Mask setting” (page 5-65)
(21) [Copy waveform] button The button copies the waveform to the clipboard.
(22)
Display set of waveform/
[Pitch No.]
Turning the check box on
image.
displays the pitch no. tag on the waveform 6

Display set of waveform/ Turning the check box on displays the edge no. tag on the waveform
(23)
[Edge No.] image.
Display set of waveform/ Turning the check box on displays the edge detection threshold on the
(24)
[Threshold] waveform image.
(25) Display set of waveform/[Mask] Turning the check box on displays the mask area on the waveform
image.

Trend Graph
Trend Graph
This function automatically acquires the latest measurements and plots them on the graph. The function is used for
monitoring the trend of the measurements.
[Trend graph] Screen

(2) (3) (4) (5) (6) (7) (8) (9) (10) (11) (12) (13) (14)
(1)
6

(1) OUT display setting Select OUT to display the trend graph.
(2) [Arranged display] button The button arranges the OUT graphs vertically.
[Layered display (individual The button cascades the OUT graphs.
(3)
scale)] button The scale of the vertical axis depends on the graph.
[Layered display (same scale)] The button overlays the OUT graphs.
(4)
button The scale of the vertical axis is common to all the graphs.
[Enlarge in vertical direction] The button enlarges the vertical axis of the selected graph.
(5)
button The area per grid narrows.
[Reduce in vertical direction] The button reduces the vertical axis of the selected graph.
(6)
button The area per grid widens.
[Automatic adjustment in vertical
(7) The button automatically adjusts the vertical axis of the selected graph.
direction] button
[Automatic adjustment in vertical The button automatically adjusts the vertical axis of all the graphs. When
(8) direction (batch)] the graph is displayed by [Layered display (same scale)], the adjustment
button is done such that data of all the graphs are displayed.
The button scrolls the selected graph upward. When the graph is
(9) [Move up the graph] button displayed by [Layered display (same scale)], the button scrolls all the
graphs.
The button scrolls the selected graph downward. When the graph is
(10) [Move down the graph] button displayed by [Layered display (same scale)], the button scrolls all the
graphs.
The button switches display/hide of the tolerance value, a line and area
(11) [Tolerance display] button
showing the tolerance value.

Trend Graph

[Inversion of background color]
(12) The button inverts the background color of the graph display area.
button
Select the time range of the graph displayed on one screen of the display
(13) [Time/view] drop-down list
area.
(14) Graph display area The area displays the graph.
Graph display area

Graph display area

[Time/view] drop-down list zz
Vertical axis
Select the time range of the graph displayed on one The division number of the grid depends on the number
screen of the display area from the following. of the graphs to be displayed.
yy1 minute
zz
Horizontal axis
yy2 minutes
The number and interval of the measurement points to
yy5 minutes be plotted on one screen depends on the time/view.
yy10 minutes
Plot points of
6
yy30 minutes
Time/view Plot interval
yy1 hour one screen
yy2 hours 1 minute 0.5 seconds 120 points
yy6 hours

2 minutes 0.5 seconds 240 points
yy12 hours
yy24 hours 5 minutes 0.5 seconds 600 points
10 minutes 0.5 seconds 1200 points
30 minutes 1 second 1800 points
1 hour 2 seconds 1800 points
2 hours 4 seconds 1800 points
zz
OUT tag
Clicking the OUT tag selects the graph.
Dragging the OUT tag scrolls the graph vertically.
When the graphs are overlaid, the selected OUT tag
appears to the front of the display. When no OUT tag is
selected, the OUT tag with smaller OUT no. appears to
the front of the display.

Trend Graph
zz
Tolerance
A line showing the tolerance is displayed.
HH and LL are indicated by dotted lines.
HI, LO, UPPER, and LOWER are indicated by solid
lines.
The backgrounds of the areas of the tolerance appear
in different colors.
Tolerance mode: Reference value
UPPER
LOWER
6
Tolerance mode: Threshold
HH
HI
LO
LL
Tolerance Area
zz
Graph information
Putting the mouse cursor on the graph you desired to
check displays the following information in a pop up
window.
yyTarget OUT
yyAcquisition date
yyPulse count
yyMeasurement value
yyDecision value

Trend Graph
MEMO

Data Storage
Data Storage
[Data storage] Screen

(1) (2) (3) (4) (5) (6) (7) (8) (35)
(31)
(32)
(33)
(34)
6
(36)
(9) (11) (13) (15) (17) (19)
(10) (12) (14) (16) (18) (20)
(21) (23) (25) (27) (29)
(22) (24) (26) (28) (30)

(1) [Start reading] button The button reads the data.
(2) [Stop] button The button stops reading the data.
(3) [Start storage] button The button extracts the stored data.
(4) [Stop storage] button The button stops extracting the stored data.
(5) [Erase stored data] button The button clears the stored data.
The button reads the data previously stored in a file and displays the
(6) [Open storage file] button
graph.
(7) [Save in file] button The button saves the storage data displayed in a storage file.

Data Storage

[Open data storage setting] Reads the current settings in use from the controller and opens the data
(8)
button storage settings.
(9) [Arranged display] button The button displays the storage data for each OUT vertically.
[Layered display (individual The button layers and displays the stored data of all OUTs at respective
(10)
scale)] button scales on one graph display area.
[Layered display (same scale)] The button layers and displays the stored data of all OUTs at the same
(11)
button scale on one graph display area.
[Enlarge in vertical direction]
(12) The button enlarges the vertical axis of the selected graph.
button
[Reduce in vertical direction]
(13) The button reduces the vertical axis of the selected graph.
button
[Enlarge in horizontal direction]
(14) The button enlarges the horizontal axis of the selected graph.
button
[Reduce in horizontal direction]
(15) The button reduces the horizontal axis of the selected graph.
button
6
[Horizontal direction to cursor
(16) The button aligns the grid of the horizontal axis with the cursors A and B.
AB] button
(17) The button automatically adjusts the vertical axis of the selected graph.
direction] button

(18) The button automatically adjusts the vertical axis of all the graphs.
direction (batch)] button
(19) [Move up the graph] button The button scrolls the selected graph upward.
(20) [Move down the graph] button The button scrolls the selected graph downward.
(21) [Hide cursor] button The button hides the cursor on the graph display area.
(22) [Select cursor A] button The button displays the cursors A and B, and activates the cursor A.
(23) [Select cursor B] button The button displays the cursors A and B, and activates the cursor B.
The button displays and activates the cursors A and B. The cursors A and
(24) [Select cursor AB] button
B moves together by dragging.
The button displays the tolerance area on the graph display area.
(25) [Tolerance display] button
“Tolerance” (page 5-39)
button
(27) [Excel transfer] button The button displays the [Excel transfer setting] dialog.
The button switches the screen to display the data read from the
(28) [Controller] button
controller.
The button switches the screen to display the data read from the storage
(29) [File data] button
file.
(30) [Set comparison] button The button displays the [Set comparison] window.
(31) Count The area displays the number of stored data acquired.
The area displays the current storage status. The statuses to be displayed
are:
yyStoring
(32) State yyStop
yyNot connected
yyFile (the status where a file selected from [Open storage file] has been
opened.)
(33) Graph display area The area displays the graph of the storage.
(34) [OUT display setting] area Selects OUT to display the trend graph.

Data Storage

(35) [Data search] button The button displays the [Data search] dialog.
(36) Data display area The area displays the data of the storage.
Graph display area Data display area

Vertical axis
[Target]
The measurement value is displayed. OUT is displayed.
When you click the [Enlarge in vertical direction] or
[Reduce in vertical direction] button, the range per grid
[OUT name]
narrows or widens.
The OUT name is displayed.

Horizontal axis

[Cursor A]
The horizontal axis displays 50000 points of data.
The measurement value of the position of the cursor A
When you click the [Horizontal direction to cursor AB]
is displayed.
button and if the number of data points between the
cursors A and B is smaller than 100 points, 100 points "------" appears in case of the output waiting
from the left end between the cursors A and B becomes data.
6
the display area.
OUT tag
Judgment result of the cursor A position
Click an OUT tag to select the corresponding graph. The judgment result of the position of the cursor A is
Dragging the OUT tag scrolls the graph vertically. displayed.
When the graphs are overlaid, the selected OUT tag
appears to the front of the display. When no OUT tag is "------" appears in case of the output waiting
selected, the OUT tag with smaller OUT no. appears to data.
the front of the display.

Tolerance
[Cursor B]
A line showing the tolerance is displayed. The measurement of the position of the cursor B is
HH and LL are drawn by the dotted lines. displayed.
HI, LO, UPPER, and LOWER are drawn by solid lines. "------" appears in case of the output waiting
The backgrounds of the tolerance area to be displayed data.
is translucent.

Cursors A and B
Judgment result of the cursor B position
The cursors A and B appear. The judgment result of the position of the cursor B is
You can check the measurement information at an displayed.
arbitrary point by dragging the cursor.
If the cursors A and B are overlapped each other when "------" appears in case of the output waiting
you click the [Select cursor A] or [Select cursor B] data.
button, the selected cursor appears to the front.
If the cursors A and B are overlapped each other when
you click the [Select cursor AB] button, the cursor A
appears to the front.

Data Storage

[Cursor A-B]
The value after subtracting the measurement of the
cursor B position from that of the cursor A position is
displayed.

[Max A-B]
The maximum value between the cursors A and B is
displayed.

[Min A-B]
The minimum value between the cursors A and B is
displayed.

[Avg A-B]
The average of measurements between the cursors A
and B is displayed.

[A-B deviation]
The standard deviation of measurements between the

cursors A and B is displayed.
[Acq date]
6

Date and time (year, month, date, hour, minute, and
second) when the measurements of the positions of the
cursors A and B are displayed.

[Pulse count]
The pulse count of the positions of the cursors A and B
are displayed when the encoder is used.
“[Encoder set] area” (page 5-90)

Data Storage
[Excel transfer settings] dialog

(1) (2) (3) (10) (9) (11)
(12)
(13)
(4)
(14)
(15)
(5) (16)
6
(6) (8) (7) (17) (18) (19)

(1) [Transfer setting] check box The check box selects the items to be transferred to Excel.
(2) [Start] The area shows the start cell on Excel of the transfer item (*1).
(3) [Transfer item] The area displays the items to be transferred to Excel.
(4) button up.
(5) button down.
(6) [Select all] button Clicking the button checks the check boxes of all the transfer items.
(7) [Clear all] button Clicking the button un-checks the check boxes of all the transfer items.
The area displays the number of transfer items whose check boxes are
(8) [No. of transfer]
checked.
The check box selects whether to use a template (Excel file) for the Excel
(9) [Templates] check box
sheet to which the items are transferred.
When any template is specified, the area displays its file path. Entries can
(10) [File]
be up to 256 characters.
(11) [Reference] button Clicking the button displays the reference dialog to specify the template.
The work sheet name can be entered, to which the transfer is performed.
(12) [Sheet name] setting
(13) [Column] setting Enter the first column to which the transfer item is written (*2).
(14) [Row] setting Enter the first row to which the transfer item is written (*3).

Data Storage

(15) [Transfer item name] check box The check box selects whether to transfer the item or not.
The button specifies the range of data to be transferred to Excel.
yyAll range: All the accumulated data are transferred.
yyWithin window display range: Data displayed on the screen are
(16) [Transfer range] radio button transferred.
yyVertical cursor range: ‌Data between the cursors A and B are transferred.
This option can be selected when both the cursors
A and B are displayed on the graph display area.
(17) [Save in CSV file] button The button saves the measurements in a CSV file.
(18) [Start Excel transfer] button Send measurement value to Excel.
(19) [Cancel] button The button closes the dialog.
*1: ‌All the transfer items may not be displayed on the Excel because of limitation in the display area of Excel. In this
case, "--" appears and an error occurs.
6

Data Storage
[Data search] dialog [Set comparison] window

The window displays the setting for the search of the
file selected from [Open storage file].
(2) (1) (2)

(1)
(3)
(4) (5)
6 No. Names Description

The buttons select the (3) (4)
condition to search the
measurements. No. Names Description

[AND]: ‌Search the
[AND] and measurements [Send to The button sends the
(1) [OR] radio meeting all the search (1) controller] displayed settings to the
buttons conditions set. button controller.
[OR]: ‌Search the [Program The program name is
measurements meeting (2)
name] displayed.
any of the search
conditions set. The list displays the settings
(3) Setting list
(*1).
[Search prev] The button searches previous
(2) The button copies the
button data.
contents displayed on the
[Search next] The button searches next [Copy to
(3) setting list screen to the
button data. (4) clipboard]
clipboard. The setting list is
button
Target OUT OUT to be searched is copied in a tab-delimited text
(4) format.
drop-down list selected from the list.
Judgment The judgment result of the *1: ‌Updated items are displayed in blue. When you put
(5) result drop- search target is selected from the mouse cursor on the item in blue, in case there
down list the list. is communication with the controller, the controller
setting before the change appears as a tooltip.
* When the measurements meeting the condition exist When no synchronization has ever been done in
continuously, the change point of the condition is case there is communication with the controller,
detected. the running program uses the default value for the
setting. Also, no comparison is done for the setting
change.

Data Storage
MEMO

Oval Display
Oval Display
The oval display is used together with the data storage function. The oval display displays the measurement result on
the oval graph. 360 degrees is evenly divided by "Storage points" of the data storage setting, and the measurements are
plotted for each point.
[Oval display] screen

(1) (2) (3) (4) (5)
(6) (7)
(8)
(9)
6
(11)
(10)
(12)

(1) [Start reading] button The button starts storing the data.
(2) [Stop] button The button stops storing the data.
(3) [Start storage] button The button reads the storage data.
(4) [Stop storage] button The button stops reading the storage data.
(5) [Erase stored data] button The button clears the storage data.
(6) [Auto adjust] button The button adjusts the graph's radial axis so as to display all data.
(7) [Tolerance] button The button puts the radial axis in line with the tolerance.
(8) [Count] The area displays the number of storage data acquired.
The area displays the current storage status.
The statuses to be displayed are:
(9) [State] - Storing
- Stop
- Not connected
Select which OUT to display in the oval graph. You can display one OUT
(10) [OUT display setting] area
at a time.
(11) Oval display area The area displays the oval graph.
(12) Data display area The area displays the data of the oval graph displayed.

Oval Display
Oval display area

Radial axis
The radial axis is a graph's scale shown by the radius
of the oval graph.
The scale is calculated and displayed by the stored
data or the tolerance.

Tolerance
A line to show the tolerance is displayed.
“Tolerance” (page 6-18)
Data display area

[Target]
Which OUT is displayed.

[OUT name]
The name of the OUT to be displayed.

[Max value]
The maximum value of the data storage is displayed.
6

[Min value]
The minimum value of the data storage is displayed.

[p-p value]
The difference between the maximum and minimum
values is displayed.

[Avg value]
The average value of the data storage is displayed.

2D Position Display
2D Position Display
The function checks and adjusts the positional relationship between the target and the sensor head.
The function assigns OUT to the X and Y axes of the display screen and displays the objective position.
[2D position display] screen

(1) (2) (3) (5) (4)
6
(6)
(7) (8) (9) (10)
(12)
(11) (13) (14)

(1) Enlarge button The button enlarges the graph.
(2) Reduce button The button reduces the graph.
(3) [Copy image] button The button copies the graph image to the clipboard.
Turning the check box on draws the record points up to 6000. After that,
(4) [Overwrite] check box
the old record points are overwritten.
The positional information corresponding to the measurements of OUT1/
(5) 2D position graph
OUT2 are plotted.
Display setting area display/hide
(6) This button switches between display/hide of the display setting area.
button
OUT to be displayed on the X axis of the 2D position graph is selected
(7) [X] drop-down list
from the drop-down list.

2D Position Display

OUT to be displayed on the Y axis of the 2D position graph is selected
(8) [Y] drop-down list
from the drop-down list.
(9) [X inversion] check box Turning the check box on inverts the displayed X axis.
(10) [Y inversion] check box Turning the check box on inverts the displayed Y axis.
Turning the check box on displays the target circle on the basis of the
(11) [Target circle] check box numeric values entered in [Display size] and [Center position]. The target
circle appears in translucent red on the 2D position graph.
(12) [Display size] setting Enter the radius of the target circle.
(13) [Center position X] setting Enter the X coordinate of the center of the 2D graph (target circle).
(14) [Center position Y] setting Enter the Y coordinate of the center of the 2D graph (target circle).

Display Stat Process
“Statistic process settings” (page 5-110)
[Display stat process] screen

(1) (2) (3)
(4)
(5) (7)
6 (6)

(1) [Start stat process] button The button starts the statistical processing.
(2) [Stop] button The button stops the statistical processing.
(3) [Erase] button The button clears the statistical data.
The area displays the current status.
The statuses are as below.
(4) [State] yyProcessing
yyStop
yyComplete
(5) OUT OUT to be processed statistically is displayed.
Statistical information display
(6) The area displays the statistical information.
area
The button copies the statistical information displayed on the statistical
(7) [Copy] button
information display area to the clipboard.

Statistical information display area

The stat process takes place with the data that was
confirmed during the TIMING input. Several kinds of
results are displayed for the acquired data.
The number of data that the statistical
processing can acquire is 999999 at
maximum.

[Average]
The average value is displayed.

[Maximum value]
The maximum value is displayed.

[Minimum value]
The minimum value is displayed.

6
[Max-Min]
A value after subtraction of the minimum value from the
maximum value is displayed.

[Deviation]
The standard deviation is displayed.

[Parameter]
The total number of the data used for the statistics is
displayed.

[HH]
The number of data points whose judgment is HH.

[HI]
The number of data points whose judgment is HI.

[GO]
The number of data points whose judgment is GO.

[LO]
The number of data points whose judgment is LO.

[LL]
The number of data points whose judgment is LL.

SPC
SPC
The screen performs the statistical process control (SPC) for one arbitrary OUT. Use SPC to check the process
performance of a target manufactured continuously.
[SPC] screen
(1) (2) (3) (12) (13)
(10)
6
(11)
(14)
(4) (5) (7) (9)
(6) (8)

(1) [SPC sample start] button The button starts the acquisition of samples for SPC.
(2) [Stop] button The button stops the acquisition of the samples for SPC.
(3) [Pause] button The button suspends the acquisition of the samples for SPC.
The button displays the dialog to set the collection of SPC and the display
(4) [SPC setting] button
of the graph.
[Enlarge in horizontal direction] The button enlarges the horizontal axis of the graph. The area per grid
(5)
button narrows.
[Reduce in horizontal direction] The button reduces the horizontal axis of the graph. The area per grid
(6)
button widens.
(7) [Hide cursor] button The button hides the cursor on the graph display area.

SPC

The button displays and activates the cursors A in the graph display area.
(8) [Select cursor A] button You can check the measurement information at an arbitrary point by
dragging the cursor.
button
(10) [SPC collect require] display area The area displays the collection conditions for SPC.
(11) [SPC information] display area The area displays the collected SPC information.
(12) [Copy SPC information] button The button copies the SPC information to the clipboard.
(13) Graph display area The area displays the graph of the collected SPC information.
(14) Cursor data display area The area displays the SPC information at a cursor position on the graph.
SPC information
Vertical axis
The measurement value is displayed.
Graph display area

Horizontal axis
The horizontal axis displays 10000 points of data at
6
maximum.
Average UCL/LCL Out of spec

The initial status of the display range depends on [Max.
plot pts] set by the [SPC setting] dialog. When the
maximum point is smaller than 100, the display range
becomes 100 points.

X bar tag
The tags show the values displayed at the right and left
ends on the Xbar graph.

R tag
The R tags show the values displayed at the right and
Vertical Horizontal axis left ends on the R graph.
axis
Xbar tag Xbar tag
Average
R tag R tag The averages of the Xbar and R are displayed by bold
lines, respectively.

Upper Control Limit (UCL) / Lower Control
Limit (LCL)
UCLs/LCLs of Xbar and R are displayed by dotted
lines, respectively.

Out of spec
The area (translucent) shows an area out of the
specification.

SPC
Data display area

[X bar UCL]
Upper Control Limit (UCL) of Xbar is displayed.

[Target OUT] The calculation formula for Xbar UCL is as below:
The OUT number to which SPC is performed is Xbar UCL = Xbar average + (K×R average)
displayed.
SPC group points K

[Data acq interval]
2 1.880
The acquisition interval for the data used for SPC is
displayed. 3 1.023
Setting range: 0.5 to 12 seconds 4 0.729

5 0.577

[SPC group points]
6 0.483
Xbar and R are calculated from the number of points
set. 7 0.419
8 0.373

[SPC group interval]
9 0.337
The interval to display Xbar and R are set.
10 0.308

[Copy SPC information] button
6 The button copies the SPC information displayed on the

data display area to the clipboard.

[X bar LCL]
Lower Control Limit (LCL) of Xbar is displayed.
The calculation formula for Xbar LCL is as below:

[No. of groups]
The number of data points to be plotted on the Xbar Xbar LCL = Xbar average - (K×R average)
and R graphs is displayed.
SPC group points K

[Valid No. of groups] 2 1.880
The number of valid values (abnormal value not 3 1.023
included) plotted on the Xbar and R graphs is
4 0.729
displayed.
5 0.577

[Last acq date] 6 0.483
Date and time (year, month, date, hour, minute, and
7 0.419
second) of the data acquired lastly is displayed from
among the data plotted on the Xbar and R graphs. 8 0.373
9 0.337

[Final pulse count]
10 0.308
The pulse count of the last data acquired is displayed
from among the data plotted on the Xbar and R graphs.

[X bar up standard]
[X bar average]
The upper limit of the Xbar standard is displayed. The average value of the data plotted on the Xbar is
displayed.

[X bar low standard]

[X maximum value]
The lower limit of the Xbar standard is displayed.
The maximum value of the data plotted on the Xbar is
displayed.

[X minimum value]
The minimum value of the data plotted on the Xbar is
displayed.

SPC

[Deviation]
[R UCL]
The standard deviation of the data plotted on the Xbar UCL of the data plotted on the R graph is displayed.
is displayed. The calculation formula for R UCL is as below:
The calculation formula for the standard deviation is as R UCL = D×R average
below:
σ = R average/d SPC group points D
2 3.267
SPC group points d
3 2.574
2 1.128
4 2.282
3 1.693
5 2.114
4 2.059
6 2.004
5 2.326
7 1.924
6 2.534
8 1.864
7 2.704
9 1.816
8 2.847
10 1.777
9 2.970
6
10 3.078

[R average]

[CpK] The average value of the data plotted on the R graph is

displayed.
OUT is displayed.
Among the following calculation results, the smaller one
is CpK.
[Acq date]
yy(Xbar up standard - Xbar average)/3σ The acquisition date of the position of the cursor A is
yy(Xbar average - Xbar low standard)/3σ displayed.
Depending on the calculation result, the

following appears:

[Pulse count]
yyFor 10000000 or more: "+INF" The pulse count of the position of the cursor A is
displayed.
yyFor -10000000 or smaller: "-INF"
yyWhen the standard deviation is very small
and the formula nearly equals division by
[Group No.]
zero: "*****" The group number of the position of the cursor A is
displayed.

[Cp]

[X bar]
Cp is displayed.
The calculation formula for Cp is as below: Xbar of the position of the cursor A is displayed.
When one data within the group includes an abnormal
(Xbar up standard - Xbar low standard)/6σ value, the following appears.
Even a single case of [***] : [***]
Depending on the calculation result, the
No [***], but even a single case of [---] : [---]
following appears:
1 or more cases of +OVER(-OVER) only : +OVER(-
yyFor 10000000 or more: "+INF"
OVER)
yyFor -10000000 or smaller: "-INF" In case of both +OVER and -OVER : ***
yyWhen the standard deviation is very small
and the formula nearly equals division by
zero: "*****"

[R]
R of the position of the cursor A is displayed.
When one data within the group includes an abnormal

[R up standard] value, the following appears.
The upper limit of the R standard is displayed. Even a single case of [***] : [***]
The calculation formula for the R standard upper limit is No [***], but even a single case of [---] : [---]
either one of the following. It depends on the selection One or more cases of +OVER or -OVER : ***
of [Standard] in the [SPC setting] dialog.
yyTarget OUT tolerance "HI - LO"
yyXbar up standard - Xbar low standard

SPC
[SPC setting] dialog
(1)
(2)
(3)
(4)
(5)
(6)
(7)
6 (8)
(9)
(10)
(11) (12)

(1) [Target OUT] drop-down list Select OUT to be a base for SPC calculation.
(2) [Data acq interval] setting Enter the interval to acquire the data.
(3) [Group points] setting Xbar and R are calculated from the data of the set points.
(4) [Group interval] setting Set the interval to display Xbar and R.
(5) [Max. plot pts] setting Set the upper value of the plot points to be displayed on the graph.
[Do not display invalid data]
(6) Select whether or not to display invalid data on the graph display area.
check box
(7) [Vertical scale ] radio button Select the method to draw the vertical axis.
(8) [Standard] radio button Select the standard value.
(9) [Vertical scale ] radio button Select the method to draw the vertical axis.
(10) [Standard] radio button Select the standard value.
(11) [OK] button Fix the SPC setting after editing.
(12) [Cancel] button Cancel the SPC setting after editing.

SPC
SPC setting
Target OUT
OUT not used for the program setting appears in gray.
[SPC collection setting] area

Data acq interval
This area sets the collection of SPC. The acquisition interval for the data used for SPC is
You can set the SPC collection setting only when the displayed.
sample acquisition is suspended. Setting range: 0.5 to 1.2
zz
Screen examples of SPC
The following four relationship are shown as below.

Group points
yyData acq interval Xbar and R are calculated from the data of the set
yyGroup points points.
yyGroup interval Setting range: 2 to 10
yyXbar, R graph

Group interval
When Group points: 3, and Group interval: 2, Set the data interval to display Xbar and R on the
Measurement value graph.
Data acq interval Setting range: 0 to 1000

6
For SPC Max. plot pts
calculation
Group points Max. plot pts is the upper limit value of the points to be
Original data
OUT x
displayed on the graph. When the points reaches the

upper limit, oldest points are deleted.
Group A Group B Group C
Time
Group interval
Xbar or R of the group A

Xbar or R
Xbar or R of the group C
Xbar or R of the group B
Time

SPC
[X bar graph] area

Settings for displaying the graph.

Vertical scale
zz
[Auto (±UCL)]
The graph is automatically plotted in accordance with
the upper and lower limit of UCL.
zz
[With standard]
The graph is plotted relative to the standard.

Standard
zz
[With tolerance]
The standard related to the tolerance is used.
zz
[Design value]
The values entered in [High limit value] and [Low limit
value] are used as the standard.
Set the value so as to keep the relationship "[High limit
6 value] > [Low limit value]".

[R graph] area
Settings for displaying the R graph.

Vertical scale
zz
[Auto (±UCL)]
The graph is automatically plotted in accordance with
UCL.
zz
[With standard]
The graph is plotted relative to the standard.

Standard
zz
[With tolerance]
The standard related to the tolerance is used.
zz
[Design value]
The value entered in [High limit value] is used as the
standard.

SPC
MEMO

Event Logging
Event Logging
The event logging function records the setting changes and changes in the measurement condition.
The condition change is continually stored in the controller and automatically displayed when the event logging window
is opened.
[Event logging] screen

(1) (2)
6 (3) (4)

(1) [Clear event log] button The button clears the event log displayed.
(2) [Copy] button The button copies the displayed event log to the clipboard.
Time and date of the occurred event is displayed with year, month, date,
(3) [Time and Date]
hour, minute, and second.
(4) [Event] The content of the occurred event is displayed.

Event Logging
Event logging
When the following changes occur, the changes are
logged as the event log data.
Event name Contents

"No event" is logged when no event
No event
has occurred.
Clear event log "Clear event log data" is logged
data when the event log data is cleared.
"Change time and date" is logged
when time and date are changed.
Change time and
This event is logged according to
date
the setting before the change of
time and date.
"Program setting change" is logged
Program setting
when the setting of the running
change
program is changed.
"Program switching" is logged when
6
Program switch
the program is switched.
"Clear key lock" is logged when
Clear key lock the key lock of the display panel is

cleared.
"Auto zero" is logged when the auto
Auto zero
zero is turned on or off.
"Status output generation" is logged
Status output when the status output turns on or
generation off. The status change is monitored
every second.
"Out of tolerance" is logged when
the tolerance is out of the tolerance
Out of tolerance
range. The status change is
monitored every second.
"Light intensity calibration" is logged
Light intensity when "Stop (restore to the factory
calibration default)" or "Stop (save)" of the light
intensity calibration is performed.
"Disconnection detection" is logged
when disconnection (coming off) of
Disconnection the following devices is detected.
detection yyHead - Controller
yyExpansion unit - Controller
yyExtension unit - Controller
Up to 100 logs can be stored in the controller. When

LS-Navigator2 and the controller communicate and
the event logging screen is opened, the log data in the
controller is automatically read.
LS-Navigator2 can log up to 1000 events.

Display Terminal Status
The display provides a function to check the state of the input and output terminals.
The input signal shows ON/OFF of the signal from an external device. The output signal outputs the test signal of ON/
OFF to check the status.
[Display terminal status] screen
[Controller] tab
(1) (2) (3) (7) (4) (5) (6) (9)
6
(8) (10) (11)

(1) [Term number] The area displays the input terminal number.
(2) [Input terminal name] The area displays the input terminal name.
(3) [Input status] The area displays the input status.
(4) [ON] button Turn on the button when you use the test data output function.
(5) [OFF] button Turn off the button when you stop use of the test data output function.
(6) [Output check] button The button outputs the test data.
(7) [Term number] The area displays the output terminal number.
(8) [Output terminal name] The area displays the output terminal name.
(9) [Test output status] The area displays the data from the output terminal.
(10) [Select all] button The button checks the check boxes of all the output terminals.
(11) [Clear all] button The button clears the check boxes of all the output terminals.

[BCD Unit] tab

(1) (2) (3) (12) (4) (5) (13) (6)

(7) (10) (11) (8) (9)

(1) [Term number] The area displays the input terminal number.
(2) [Input terminal name] The area displays the input terminal name.
(3) [Input status] The area displays the input status.
(4) [ON] button Turn on the button when you use the test data output function.
(5) [OFF] button Turn off the button when you stop use of the test data output function.
(6) [Output check] button The button outputs the test data.
(7) [Term number] The area displays the output terminal number.
(8) [Output terminal name] The area displays the output terminal name.
(9) [Test output status] The area displays the data from the output terminal.
(10) [Select all] button The button checks the check boxes of all the output terminals.
(11) [Clear all] button The button clears the check boxes of all the output terminals.
(12) [Numerical value input] setting Enter the numerical values to be output as the test data.
[Test output status] will be selected according to the number entered in
(13) [Value set] button
the [Numerical value input] setting.

Outputting test data
Outputting test data
1 Click the [OK] button of the test data output item.

2 Check
status.
or clear the check box of the test output
yyWhen you enter a numeric value into

the [Numerical value input] field and
then pressing the [Value set] button, the
BCD code corresponding to the numeric
value will be set in the checkbox field.
yyClicking the [Select all] button checks
the check boxes of all the terminals.
yyClicking the [Clear all] button clears the
check boxes of all the terminals.
6 3 Click the [Output check] button.

The test data are output such that the terminal
whose [Test output status] is ON becomes High,

and the terminal of OFF becomes Low.

7
This section describes the details and setting procedures
for the PC communication configuration, instrument
information setting and other options.
Environment Setting
PC communication configuration............................ 7-2

Instrument information display setting................... 7-5
Optional settings..................................................... 7-18
Language setting..................................................... 7-21
Help........................................................................... 7-22

PC communication configuration
Configures the communication settings for connecting

Communicate via Ethernet
the PC and the controller. LS-Navigator2 is used to
perform the setting. This section describes the setting procedure for
You can select from the following communication connecting the PC to the controller using Ethernet.
modes:
yyUSB “Communicate via USB” (page 7-2) 1 Select [PC communication set] under the
[Environment setting] menu.
yyEthernet ”Communicate via Ethernet” (page 7-2)
Communicate via USB

This section describes the setting procedure for
connecting the PC to the controller using USB.
1 Select [PC communication set] under the

[Environment Setting] menu. The [PC communication set] screen appears.
2 Select [Ethernet].
The [PC communication set] screen appears.
7 2 Select [USB].
Environment Setting
If you are connecting to the controller using

Ethernet for the first time (i.e. in the factory default
state), either use a BOOTP server or configure the
communication setting using the included IP Setting
Tool.
The following describes the procedure for starting
and setting the IP Setting Tool.
If the controller you wish to connect is

shown in the [Connection device] field,
3 Click the [OK] button. proceed to 9.

3 Click the [IP Setting Tool active] button. 5 Anostart-up of BOOTP on an Ethernet device with
allocated IP address will be detected and
displayed on the screen. Select the controller you
wish to connect to, and click the [Setup IP addr.]
button.
If the IP Setting Tool is not installed, If the controller you wish to connect to is
the [IP Setting Tool active] button will not shown, check the following:
be grayed out. The IP Setting Tool is yyCheck whether the PC and the
included on the LS-H2 CD-ROM. Install controller are properly connected to the
the IP Setting Tool and then open the network.
[PC communication set] screen again. yyMake sure that the firewall of the PC is
not blocking the IP Setting Tool.
The IP Setting Tool starts and the [Network setup] yyMake sure that the [The next power-on
screen is displayed. operation] setting of the controller is not
7
set to [Fixed IP address].
4 Select a network card and click the [OK] button. To check this, you need to connect the
PC to the controller using USB.
‌“Setting at next power ON” (page
Environment Setting
7-11)
6 Click the [Search available IP addresses] button

to search for available IP addresses. When an
available IP address is found, enter it in the [IP
addr. (required)] field and click the [OK] button.
You can perform this setting when the PC

has two or more Ethernet connectors.

7 When the screen showing that the IP address

was successfully set appears, click the [OK]
10 When you select the controller you wish to
connect from the [Connection device] field, the
button. IP address will be set to [IP address (controller)].
Click the [OK] button to close the screen.
8 Click
Tool.
the [Exit] button to shut down the IP Setting
9 Click the [Update list] button to show the

controller you have just set in the [Connection
device] field.
7
Environment Setting

Instrument information display setting
This section describes the items that can be configured

on the [Display instrument info] screen. LS-Navigator2 setting method
The [Instrument Information display setting] can be set
only when the controller is communicating with PC.

Saving the device settings file
(1) (2) (3)

1 Click the [Save settings file] button.
(4) (7)
(5)
(6)
(8) The [Save As] dialog will appear.
Number Description 2 Enter a file name and click the [Save] button.
1 Sends the settings to the controller.
2 Saves the device settings file.
Loads a device settings file from the PC
7
and reflects the settings to the on-screen
Environment Setting
3 items.
The device settings files have the .lsus
extension.
Sets the program switching method and
4
panel lock.
5 Sets the date and time.
6 Set the Ethernet communication settings. The device settings file is saved.
7 Sets the RS-232C communication settings.
Resets the settings of the connected
8
controller to their default values.


Loading the device settings file
Initializing the controller setting
1 Click the [Open setting file] button. 1 Click the [Initialize] button.
The [Open] dialog will appear. A confirmation dialog will appear.
2 Select
button.
a settings file, and then click the [Open] 2 Click the [OK] button.
The settings of the controller will be initialized to
their factory default values.
A completion dialog will appear.
7 3 Click the [OK] button.

You will return to the [Display instrument info]
screen.
Environment Setting
The “Calibration of received light intensity”

will not be initialized. If you want to initialize
the “Calibration of received light intensity”,
performthe “Return calibration of received
light intensity to the factory setting” function.
(page 5-67)
The content of the device settings file will be
reflected to the [Display instrument info] screen.

[Common] tab LS-Navigator2 setting method
1 Select [Display instrument info] under the

[Environment Setting] menu.
The [Display instrument info] screen will appear.
2 Click the [Common] tab.

Program setting switching method
Select the program setting switching method.
The items you can set are:
zz
Terminal
Switch the program from the P1 to P4 terminal.
“Input terminal block 1” (page 8-7)
zz
Panel/Command
Switch the program from the display panel, via an RS-
7
232C command, or using LS-Navigator2.
Environment Setting

Panel lock
You can specify the panel operations to be locked.
The items you can specify are: 3 Set the [Switch method of prog set].
zz
All
All keys will be locked.
zz
Part
yyDisplay switching ([FUNC]+[2])
yyTolerance setting ([FUNC]+[7])
yyTIMING input
yyPanel unlock
All keys other than the above will be locked.

Password
Checking this check box will allow you to set a
password required to cancel the panel lock.
Specify a 4-digit number for the password.
The password can only be set in LS-
Navigator2.

4 Set the [Panel lock]. Display panel setting method

Method for Setting up the Environment
Settings
1 Press [FUNC] key then press [0] key.

2 Press the [ ] or [ ] keys to select [ENV] and

5 Set the [Password].

Set a password only if it should be required to
cancel the panel lock.
3 Configure
key.
desired settings and then press [ENT]
7 Refer to the subsequent items.

Environment Setting
6 Click the [Send to controller] button. A: PROG-SET (Program switching settings)

B: LOCK-SET (Panel lock settings)
The setting will be sent to the destination controller.
C: RS-232C (RS232C settings)
D: ETHERNET (ETHERNET settings)
E: PROGRAM (Edit program settings)
F: BUZZER (Buzzer settings)
4 Press the [ESC] key, and then the setting item

selection screen appears.
5 Press the [ ] or [ ] keys to select [APPLY] and


6 When
key.
Panel lock setting
1 Select [LOCK-SET] and press the [ENT] key.

“Method for Setting up the Environment Settings”
(page 7-8)

displayed.

Program switching setting
2 [Switch the panel lock setting using the [ ], [ ],

1 Select [PROG-SET] and press the [ENT] key. ], and [ ] keys.
“Method for Setting up the Environment Settings” yyAll
(page 7-8) yyPART
Environment Setting
2 orSet[ the program switching using the [
] keys.
], [ ], [ ],
3 Press the [ENT] key.

The function settings screen appears.
yyPANEL
yyTERMINAL

The function settings screen appears.

[Time and Date] tab 2 Click the [Time and Date] tab.

Time and Date setting 3 Set the [Time and Date set].
You can set the date/time in the controller.

Daylight savings time setting
Checking this check box will allow you to set the
Daylight savings time setting.
7
The time specified in [Offset time] will be added to the
current time, starting from the date specified in [Start
date rule] until the date specified in [End date rule].
The date/time and Daylight savings time
Environment Setting
settings can only be set in LS-Navigator2.

When setting date/time while the Daylight
savings time setting is set, set it in
accordance with standard time.
4 Check the [Daylight savings time setting] check

box, and then set the [Start date], [End date], and
LS-Navigator2 setting method [Offset time].
This option should only be enabled when using

LS-Navigator2 in an environment where Daylight
savings time is used.


[Ethernet] tab yyThe following IP addresses are treated

as invalid IP addresses:
yy0.0.0.0
yy224.0.0.0 to 255.255.255.255
yyThe following addresses are treated as
invalid subnet masks:
yyThere are no consecutive “1” bits
from the beginning (Example:
255.255.255.64 = 11111111.11111111.111
11111.01000000 is an error)
yyThe following addresses are treated as
invalid gateway:
yy224.0.0.0 to 255.255.255.255

TCP port number
The changes to the Ethernet setting will Set the port number to be used by the controller for
take effect after you restart the controller. sending and receiving commands.

Setting at next power ON
UDP port number
You can set how the controller will acquire the IP This is the port number to be used by the controller
address at the next power-on.
7
for sending and receiving commands. The UDP port
number is a fixed number and cannot be edited.
zz
BOOTP → Fix
Once you start the controller using the IP address,
subnet mask and gateway acquired from BOOTP, the
Environment Setting
acquired values will be stored as the network setting of LS-Navigator2 setting method
the controller. At the next power ON, those information
will be used as the [Fixed IP address] setting.
zz
Fixed IP add 1 Select [Display instrument info] under the
The system will start using the set IP address, subnet
mask and gateway.
zz
BOOTP
The system will ignore the set IP address, subnet mask
and gateway and will start automatically acquiring a
new network setting.

IP address/Subnet mask/Gateway
Set the IP address, subnet mask, and gateway of the
controller at the next power ON. 2 Click the [Ethernet] tab.
These are only valid when [Setting at next
power ON] is set to [Fixed IP add].

3 Set the [Setting at next power ON]. Display panel setting method

Setting the ETHERNET
1 Select [ETHERNET], then press the [ENT] key.

“Method for Setting up the Environment Settings”
(page 7-8)
If you have selected [Fixed IP address] then also set

the [IP address], [Subnet mask], and [Gateway].

Refer to the subsequent items.
7
Environment Setting
yyIPCONFIG (Setting at next power ON)

yyIP (IP setting)
4 Set the [TCP port number]. yySUBNET-M (Subnetmask setting)
yyGATEWAY (GATEWAY setting)
yyTCP-PORT (TCP port number setting)
3 Press the [ESC] key twice to show the settings

screen.
4 then
Select [APPLY] by pressing the[
] or [ ] keys,
5 When
key.

The process is complete when [COMPLETE] is

displayed.


Setting the operation at next power ON
Setting the IP address
1 Select [IPCONFIG] and press the [ENT] key. 1 Select [IP] and press the [ENT] key.
”Setting the ETHERNET” (page 7-12)
2 Specify the IP address specification method at

the next power ON using the [ ], [ ], [ ], and [
keys.
] 2 Set the first segment of the IP address. Select an
value with a numeric key.
Environment Setting
yyBTP → FIX (BOOTP -> Fix)
yyFIXED IP (fixed IP add)
yyBOOTP 3 Press the [ENT] key.
The [ETHERNET Setting] screen appears.
The screen for setting the second segment of the IP

address will appear.
4 Enter the second, third and fourth segments of

the IP address in the same manner as in steps 2
to 3.
5 Once you have entered all four segments, press

the [ENT] key.
The [ETHERNET setting] screen will appear.


Setting the subnet mask
Setting the gateway
1 Select [SUBNET-M] and press the [ENT] key. 1 Select [GATEWAY] and press the [ENT] key.
”Setting the ETHERNET” (page 7-12) ”Setting the ETHERNET” (page 7-12)
2 Set the subnet mask in the same manner as in

“■Setting the IP address”.
2 Set the gateway in the same manner as in
“■Setting the IP address”.
7
Environment Setting
3 Once you have entered all four segments of the

subnet mask, press the [ENT] key.
3 Once you have entered all four segments of the
gateway, press the [ENT] key.
The [ETHERNET setting] screen will appear. The [ETHERNET setting] screen will appear.


Setting the TCP port number [RS232C] tab
1 Select [TCP-PORT] and press the [ENT] key.

”Setting the ETHERNET” (page 7-12)
2 Set the TCP port number. Select an input digit by

numeric key.

Communication speed
Set the baud rate for the RS-232C communication
Setting range (bps): 9600, 19200, 38400, 57600,
115200

Parity
Set the parity of the RS-232C communication.
Setting range: None, Even, Odd 7
Environment Setting

Data send mode
Set the data send mode for the RS-232C
3 Press the [ENT] key. communication.

Setting range: OFF, S1, S2

LS-Navigator2 setting method 4 Set the [Parity].

2 Click the [RS232C] tab.

5 Set the [Data send mode].
7
Environment Setting
3 Sets the communication speed.

6 Click the [Send setting to controller] button.

Display panel setting method 6 Switch the transmission mode setting using the
[ ], [ ], [ ], and [ ] keys.
1 Select [RS-232C] and press the [ENT] key.

”Method for Setting up the Environment Settings”
(page 7-8)

You will return to the [Function selection] screen.
2 Switch the baud rate setting using the [

[ ], and [ ] keys.
], [ ],
Environment Setting
The parity settings screen will appear.
4 Switch the parity setting using the [

and [ ] keys.
], [ ], [ ],
yyNON (None)
yyEVEN (Even)
yyODD (Odd)

The transmission mode settings screen will appear.

Optional settings
Optional settings
This section describes the items that can be configured

on the [Option] screen.
2 Click the OUT display color you wish to change.
(1)
(3) (2)
(4)
The [Color] screen will appear.
Clicking the [Initialize] button will initialize
Number Description the OUT display color setting.
1 Sets the display color for each OUT.
2 Initializes the OUT display color setting.
3 Select the color you wish to change, and then
click the [OK] button.
3 Initializes the window layout.
Displays the start-up menu if enabled.
4
“Startup” (page 3-15)
7
Changing the OUT display color
Environment Setting
You can change the display color of the trend graph

and the graphs on the data storage screen and the oval
display screen for each OUT.
Clicking the [Initialize] button will initialize the OUT
display color setting.
You can only set the OUT display color in
LS-Navigator2.
LS-Navigator2 setting method

You will return to the [Option] screen.
1 Select [Option] under the [Environment Setting]
menu. 4 Click the [OK] button.
If the trend graph, the data storage screen
or the oval display screen is currently
being shown, the OUT display color of the
corresponding graph will change to the
new color.
The [Option] screen will appear.

Optional settings
Initializing the screen layout Displaying the start-up menu

If you check the [Initialize window layout] check box, If you check the [Display activation menu] check box,
the display position setting of the main screen and the the start-up menu will be displayed at the next start-up
display and display position settings of the following of LS-Navigator2. If you un-check the check box, LS-
screens will be initialized at the next start-up of LS- Navigator2 will start with the [Monitor controller] option
Navigator2: selected.
yy[Display measurement value] screen
yy[Overall judgment] screen
yy[Target viewer]
yy[Display trend graph] Screen
yy[Data storage] screen
yy[Oval display] screen
yy[2D position display] screen
yy[Statistics processing display] screen
yy[SPC] screen
yy[Event logging] screen
yy[Terminal condition check] screen
You can only initialize the screen layout in

LS-Navigator2.
The start-up menu will not be displayed if

LS-Navigator2 is started using the following
LS-Navigator2 setting method methods:
yyIf LS-Navigator2 was launched by double-
clicking the LS-Navigator2 settings file or
7
1 Select [Option] under the [Environment Setting] data storage file
Environment Setting
menu. yyIf LS-Navigator2 was launched by dragging
& dropping an associated file onto the LS-
Navigator2 executable file or its shortcut
2 Check the [Initialize window layout] check box.

4 Restart LS-Navigator2.

Optional settings
LS-Navigator2 setting method
1 Select
menu.
[Option] under the [Environment Setting]
2 Check
box.
the [Displaying the start-up menu] check
7
Environment Setting

Language setting
Language setting
Switching the display language

The LS-9000 series supports a variety of languages.
Available languages are:
yyEnglish
yyDeutsch
yyJapanese
yySimplified Chinese
yyTraditional Chinese
When the system is started for the first time,

it will follow the language setting of the
operating system.
1 Go to the [Language] menu and select the

language you wish to switch to.
7
A dialog indicating that the selected language will be
Environment Setting
active from the next start-up will appear.

3 Restart LS-Navigator2.

Help
Help
Manual
You can view the manual of this device.
1 Select [Manual] under the [Help] menu.
Version information
You can view the version information of the system
software.
1 Select
menu.
[Version information] under the [Help]
The [LS-Navigator2 version information] dialog will
7 appear.
Environment Setting

8
This section describes the specifications of the
communication interface and I/O terminals.
Communication Interface
and I/O Terminals
Ethernet Interface...................................................... 8-2

USB Interface............................................................. 8-3
RS-232C Interface...................................................... 8-4
I/O Terminal Names and Functions.......................... 8-7

Ethernet Interface
Ethernet Interface
Basic specifications/Connector specifications

The IP address, port number, subnet mask, gateway, etc. in the system settings of the controller will be used.
See "[Ethernet] tab" (page 7-11) for details.
zz
Basic specifications
yyConnector: RJ-45
yyMedium: 100BASE-TX/1000BASE-T
yyCommunication protocol:
- TCP/IP (Free transmission)
- UDP (Free transmission)
zz
Connector specifications
The specifications of the Ethernet port of this unit are as shown below.
8
100BASE-TX 1000BASE-T
No.
Signal Signal direction Signal Signal direction
1 TX + Output TRX + I/O
2 TX - Output TRX - I/O
8
3 RX + Input TRX + I/O
4 Not used ─ TRX + I/O
5 Not used ─ TRX - I/O
Communication Interface and I/O Terminals
6 RX - Input TRX - I/O

7 Not used ─ TRX + I/O
8 Not used ─ TRX - I/O

USB Interface
USB Interface
Basic specifications/Connector specifications
zz
Basic specifications
yyConnector: Type B female connector
yyStandards: USB Ver.2.0 compliant; High-Speed supported (USB Ver.1.1 Full-Speed compatible)
zz
The specifications of the USB port of this unit are as shown below.
1 4
2 3
No. Signal Signal description Signal direction

1 VBUS VBUS ─
2 D- Differential signal - I/O
3 D+ Differential signal + I/O
4 GND GND ─

RS-232C Interface
RS-232C Interface
Communication specifications
EIA RS-232C compliant (Modem defined)
Communication mode Full duplex

Synchronization mode Start-stop synchronization
Transmission code ASCII
Data length 8 bit
Stop length 1 bit
Parity * None (Initial value), Even, Odd
Baud rate* 9600 (Initial value), 19200, 38400, 57600, 115200 bps
Data Delimiter CR
Flow control None
*: The parity and baud rate in the system settings of the controller will be used.
"[RS232C] tab" (page 7-15)
Compatible connector specifications: Modular 6-pin plug connector
A 2.5 m RS-232C straight-through cable (OP-96368) is provided.
"Option list" (page 1-5)
8
Controller side
RS-232C connector
1
2
3
4
5
6
Terminal No. Signal name Contents

1 (Not used) ―
2 (Not used) ―
3 SD (TXD) Receive from external instrument (Input)
4 SG (GND) GND
5 RD (RXD) Send to external instrument (Output)
6 (Not used) ―
*: Do not use unused terminals as it may result in a malfunction.

*: 24 V DC (-) and SG (GND) are insulated.
*: SD will be receiving (input to this unit) and RD will be sending (output from this unit) respectively as defined by the
modem.

RS-232C Interface
Connection with the PLC link unit or PC

Dedicated cables OP-96368 (Straight-through cable, 2.5 m) and OP-26401 (D-sub, 9 pins) are used in combination for
the connections.
Before connecting the instruments, read the instruction manuals of the PC and the PLC link unit.
"Option list" (page 1-5)
PC side
LS-9000 series side OP-26401 Signal name

RD (RXD) 5 2 RD (RXD)
SG (GND) 4 5 SG (GND)
SD (TXD) 3 3 SD (TXD)
PC
7 RS (RTS)
8 CS (CTS)
OP-26401
6 DR (DSR)
CD (DCD)
4 ER (DTR)
PLC link unit
OP-96368
8
OP-96368 OP-26401

RS-232C Interface
Outputting measurement values and changing settings using commands

By connecting this unit to external instruments such as the PC or PLC link unit, you can export measurement values
and modify the settings of this unit.
When creating a control program, check the reply command from this unit and then send the
following command to the unit.

Command types
The following four types of commands are available:
zz
Measurement control commands
These commands are used for controlling the measurement. You can perform operations such as measurement
value output, timing input, auto zero input, reset etc.
"Measurement control command list" (page 9-8)
zz
Settings control commands
These commands are used for controlling the settings. You can perform operations such as setting save request,
setting save completion check, program initialization, program switching, etc.
"Setting control command list" (page 9-13)
zz
Settings change command
These commands are used for editing the measurement program settings. You can change the filter setting,
measurement mode setting, and tolerance setting.
"Settings change command list" (page 9-14)
8 zz
Setting check command
These commands are used for checking the measurement program settings.
"Setting check command list" (page 9-34)

Command format
This unit performs the controls specified in the command received from the external instruments, and then returns a
reply command to the external instrument.
A CR (carriage return) is used for separating the received and reply command data.
"Command format" (page 9-2)
After switching on the power and RS-232C communication starts, clear the external
device communication buffer. Unnecessary data may be received in the external device
after the power is switched on.

I/O Terminal Names and Functions
This section describes the names of the I/O terminals (Input terminal block 1, Input terminal block 2, Encoder signal
input terminal block, Output terminal block 1, Output terminal block 2, Analog voltage terminal block, 24 V power
supply terminal block) of this unit and their arrangements.
Input terminal block 1

yyCompatible socket block: FK-MC0.5/9-ST-2.5 (Phoenix contact)
yyCompatible cable specification: AWG20 to 28, Tip processing length 8 mm
SDO1 1
SDO2 2
SCLR
1 3
SCLR
2 4
P1 5
P2 6
P3 7
P4 8
COM_I 9
Terminal Circuit diagram

No. Signal name Signal description
symbol LS-9501 LS-9501P
Statistics 1 execution input
1 SDO1 STATISTICS_DO1
The statistics processing will be executed
when the signal is ON. If you are starting the 8
statistics processing from the terminal, set

the [Statistics processing control method] to
[Terminal].
Statistics 2 execution input
The statistics processing will be executed
when the signal is ON. If you are starting the
2 SDO2 STATISTICS_DO2
statistics processing from the terminal, set
the [Statistics processing control method] to Non-voltage
[Terminal]. Voltage input
input
STATISTICS_ Statistics 1 clear input
3 SCLR1
CLEAR1 Clears the statistics processing contents.
STATISTICS_ Statistics 2 clear input
4 SCLR2
CLEAR2 Clears the statistics processing contents.
5 P1 P1
Program No. switching input
6 P2 P2 If you are switching programs from the
7 P3 P3 terminal, set the [Program setting switching
method] to [Terminal].
8 P4 P4
9 COM_I COM_IN Common for input ─ ─
"[Common setting] Tab: Stat Process" (page 5-109)

"[Program Setting] Screen" (page 5-17)
No insulation exists between each I/O circuit. Exercise caution to prevent a potential difference from
occurring.
"Insulated condition between each I/O circuit" (page 8-33)

To switch between the program numbers, maintain P1 to P4 terminals in the following states:
Program No. P4 P3 P2 P1
00 OFF OFF OFF OFF
01 OFF OFF OFF ON
02 OFF OFF ON OFF
03 OFF OFF ON ON
04 OFF ON OFF OFF
05 OFF ON OFF ON
06 OFF ON ON OFF
07 OFF ON ON ON
08 ON OFF OFF OFF
09 ON OFF OFF ON
10 ON OFF ON OFF
11 ON OFF ON ON
12 ON ON OFF OFF
13 ON ON OFF ON
14 ON ON ON OFF
15 ON ON ON ON
yyLS-9501 (NPN type)
8 ON: Short circuit with the COM_I terminal

OFF: Open state
yyLS-9501P (PNP type)
ON: Voltage applied state

OFF: Open state

Input terminal block 2

Compatible socket block: FK-MC0.5/12-ST-2.5 (Phoenix contact)
Compatible cable specification: AWG20 to 28, Tip processing length 8 mm
COMI 10
N.C. 11
ST
TRG 12
STEN 13
ST
CLR 14
COMI 15
ZERO
1 16
TIM1 17
RST1 18
ZERO
2 19
TIM2 20
RST2 21

10 COMI COM_IN Common for input ─ ─
11 N.C. ─ Not used ─ ─
STORAGE_ The measurement values will be
12 STTRG
8
TRIGGER accumulated after each trigger input.
Storage start input
STORAGE_ Non-voltage
13 STEN The storage will be executed when the Voltage input
ENABLE input

signal is ON.
STORAGE_ Storage clear input
14 STCLR
CLEAR Clears the storage data.
15 COMI COM_IN Common for input ─ ─
Auto zero 1 input
The auto zero signal will be input to the
OUT selected in control Ch 1 and all its
16 ZERO1 ZERO1 synchronized OUTs (if synchronization is
enabled for the selected OUT).
Auto zero will be cleared if it is ON for two Non-voltage
seconds or longer. Voltage input
input
Timing 1 input
The TIMING signal will be input to the
17 TIM1 TIMING1 OUT selected in control Ch 1 and all its
synchronized OUTs (if synchronization is


Reset 1 input
The reset signal will be input to the
OUT selected in control Ch 1 and all its
synchronized OUTs (if synchronization is
18 RST1 RESET1
The measurement data will be output
waiting data until the measurement value is
updated.
Auto zero 2 input
The auto zero signal will be input to the OUT
19 ZERO2 ZERO2 selected in the control Ch2. Non-voltage
Auto zero will be cleared if it is ON for two Voltage input
input
seconds or longer.
Timing 2 input
20 TIM2 TIMING2 The TIMING signal will be input to the OUT
selected in the control Ch2.
Reset 2 input
The reset signal will be input to the OUT
selected in the control Ch2.
21 RST2 RESET2
The measurement data will be output
waiting data until the measurement value is
updated.
8
"[Common setting] Tab: Data Storage" (page 5-77)
"[I/O setting] area" (page 5-90)
occurring.

Encoder signal input terminal block

Compatible socket block: FK-MCP1.5/15-ST-3.5 (Phoenix contact)
24V 1
12V 2
5V 3
(+) 4
COM
(-) 5
24V 6
12V 7
5V 8
(+) 9
COM
(-) 10
24V 11
12V
12
5V 13
(+) 14
COM
(-) 15

1 24 V ENCODER_A + (24 V) Encoder phase A input (24 V)
Encoder input circuit
2 12 V ENCODER_A + (12 V) Encoder phase A input (12 V) (Open collector output
support)
3 5V ENCODER_A + (5 V) Encoder phase A input (5 V)
4 (+) ENCODER_A +
Encoder phase A input
(Line driver)
(Line driver output
8
supported)

5 COM(-) ENCODER_A - Encoder phase A input (-) Encoder input circuit
6 24 V ENCODER_B + (24 V) Encoder phase B input (24 V)
7 12 V ENCODER_B + (12 V) Encoder phase B input (12 V) (Open collector output
support)
8 5V ENCODER_B + (5 V) Encoder phase B input (5 V)
Encoder phase B input
9 (+) ENCODER_B + (Line driver output
(Line driver)
supported)
10 COM(-) ENCODER_B - Encoder phase B input (-) Encoder input circuit
11 24 V ENCODER_Z + (24 V) Encoder phase Z input (24 V)
12 12 V ENCODER_Z + (12 V) Encoder phase Z input (12 V) (Open collector output
support)
13 5V ENCODER_Z + (5V) Encoder phase Z input (5 V)
Encoder phase Z input
14 (+) ENCODER_Z+ (Line driver output
(Line driver)
supported)
15 COM(-) ENCODER_Z- Encoder phase Z input (-) Encoder input circuit
"[Encoder set] area" (page 5-90)
occurring.

Output terminal block 1

COMO 1
STRB
1 2
SIG1 3
SIG2 4
SIG3 5
SIG4 6
SIG5 7
STA1 8

1 COMO COM_OUT Common for output ─ ─
Strobe output
2 STRB1 STROBE1 This signal will be output in synchronization
with the updating of the measurement value.
8 3
4
SIG1
SIG2
SIGNAL1
SIGNAL2
NPN
Open
PNP
Open
The output signal will be determined by the Collector Collector

5 SIG3 SIGNAL3
no. of control Ch setting. Output Output
6 SIG4 SIGNAL4
7 SIG5 SIGNAL5
8 STA1 STATUS1 Status output 1
occurring.
The STRB1/STRB2 signals operate in the following manner:

yyWhen the measurement mode is Normal
Share the same timing input.
yyWhen the measurement mode is other than Normal
STRB1: Operates in the timing when the OUT value selected in control Ch1 is finalized.

Output terminal block 2

STA2 9
SIG6 10
SIG7 11
SIG8 12
SIG9 13
SIG
10 14
GO 15
FULL 16
STRB
2 17
ERR 18
COMO 19

9 STA2 STATUS2 Status output 2
10 SIG6 SIGNAL6
11 SIG7 SIGNAL7
12
13
SIG8
SIG9
SIGNAL8
SIGNAL9
The output signal will be determined by the no.
of control Ch setting. 8

14 SIG10 SIGNAL10
NPN PNP
15 GO GO Overall judgment output Open Open
Collector Collector
Memory full output
Output Output
16 FULL MEMORY_FULL This signal will be output when the data storage
memory is full.
Strobe output 2
17 STRB2 STROBE2 This signal will be output in synchronization
with the updating of the measurement value.
System error output (N.C.)
18 ERR ERROR It is output when the power is switched on and
when a system error occurs.
19 COMO COM_OUT Common for output 2 ─ ─
occurring.
The STRB1/STRB2 signals operate in the following manner:

yyWhen the measurement mode is Normal
Share the same timing input.
yyWhen the measurement mode is other than Normal

Based on the no. of control Ch setting, the signal output from SIG1 to SIG10 will be designated as shown below.
Set the OUT numbers to be output from each channel in the control/judgment output setting.
Set the STATUS output from the status output setting.
Pin name No. of controlled Ch = 2 No. of controlled Ch = 3 No. of controlled Ch = 4

SIG1 HH HH/HI HH/HI/LO/LL
Ch1
SIG2 HI Ch1 GO GO
SIG3 Ch1 GO LO/LL HH/HI/LO/LL
Ch2
SIG4 LO HH/HI GO
SIG5 LL Ch2 GO HH/HI/LO/LL
Ch3
SIG6 HH LO/LL GO
SIG7 HI HH/HI HH/HI/LO/LL
Ch4
SIG8 Ch2 GO Ch3 GO GO
SIG9 LO LO/LL STATUS4
SIG10 LL STATUS3 STATUS3
"[I/O setting] area" (page 5-90)

"[Status output] area" (page 5-91)
8

Analog output terminal block

1:V 1
1:A 2
0 3
2:V 4
2:A 5
0 6

Analog voltage output + side terminal for CH1
1 1: V CH1_(V)
The output will be within the range ±10.5 V.
Analog current output + side terminal for CH1
2 1: A CH1_(A) The output will be within the range of 3.36 mA
8
to 20.64 mA.
3 0 GND1 Analog GND for CH1 Analog voltage output/
Analog current output
Analog voltage output + side terminal for CH2 circuit

4 2: V CH2_(V)
The output will be within the range ±10.5 V.
5 2: A CH2_(A) The output will be within the range of 3.36 mA
to 20.64 mA.
6 0 GND2 Analog GND for CH2
occurring.

24V power input terminal block

1 24 V DC (+) 24 V DC (+) 24 V input for the power supply ─ ─
2 24 V DC (-) 24 V DC (-) 0 V input for the power supply ─ ─
occurring.
8

Head expansion unit
0 6
4:A 5
4:V 4
0 3
3:A 2
3:V 1

Analog voltage output + side terminal for CH3
1 3: V CH3_(V) The output will be ±10.5 V of the displayed
value.
2 3: A CH3_(A) The output will be 3.36 mA to 20.64 mA of the
displayed value.
Analog voltage output/
8
Analog current output
Analog voltage output + side terminal for CH4 circuit
4 4: V CH4_(V) The output will be ±10.5 V of the displayed

value.
5 4: A CH4_(A) The output will be 3.36 mA to 20.64 mA of the
displayed value.
occurring.

BCD unit Input terminal block 1

N8 1
N4 2
N2 3
N1 4
N8 5
N4 6
N2 7
N1 8
COMI 9
Terminal
No. Signal name Signal description Circuit diagram
symbol
1 N8 IN_NUM-8_1
8 2
3
N4
N2
IN_NUM-4_1
IN_NUM-2_1
Corresponds to output connector 1.
4 N1 IN_NUM-1_1
BCD unit Non-voltage

5 N8 IN_NUM-8_2
input
6 N4 IN_NUM-4_2
7 N2 IN_NUM-2_2
8 N1 IN_NUM-1_2
9 COMI COM_IN Common for input
Selects the OUT number using which the measurement values will be output from the output connector. If you are
determining the OUT number from the terminal, set the [OUT selection method] to [BCD unit terminal].
occurring.

BCD unit Input terminal block 2

N8 10
N4 11
N2 12
N1 13
N8 14
N4 15
N2 16
N1 17
COMI 18
Terminal
No. Signal name Signal description Circuit diagram
symbol
10 N8 IN_NUM-8_3
11
12
N4
N2
IN_NUM-4_3
IN_NUM-2_3
8
13 N1 IN_NUM-1_3

BCD unit Non-voltage
14 N8 IN_NUM-8_4
input
15 N4 IN_NUM-4_4
16 N2 IN_NUM-2_4
17 N1 IN_NUM-1_4
18 COMI COM_IN Common for input
Selects the OUT number using which the measurement values will be output from the output connector. If you are
determining the OUT number from the terminal, set the [OUT selection method] to [BCD unit terminal].
occurring.

To switch between the OUT numbers, maintain N8 to N1 terminals in the following states:
I/O OUT N8 N4 N2 N1
1 OFF OFF OFF OFF
2 OFF OFF OFF ON
3 OFF OFF ON OFF
4 OFF OFF ON ON
5 OFF ON OFF OFF
6 OFF ON OFF ON
7 OFF ON ON OFF
8 OFF ON ON ON
9 ON OFF OFF OFF
10 ON OFF OFF ON
11 ON OFF ON OFF
12 ON OFF ON ON
13 ON ON OFF OFF
14 ON ON OFF ON
15 ON ON ON OFF
16 ON ON ON ON
ON: Short circuited with the COMI terminal
8
OFF: Open state

BCD unit Expansion connector

Compatible connector: FX2B-40SA-1.27R (Hirose Electric Co., Ltd.)
I/O extension cable (OP-51657: Cable length 3 m)
Pin number
occurring.

Output connector 1
Signal description 8
When Code

No. Terminal name When BCD When Binary Circuit
Judgment color
output is output is
output is
selected selected
selected
1 COM_OUT COM_OUT Brown
2 BCD_STROBE1 BCD_strobe output 1 Red
3 OUT_POLE_1 Ch1 sign N.O. Orange
4 OUT_D7-8_1 Ch1 DIGIT7-8 OUT16 HH Yellow
N.O.
5 OUT_D7-4_1 Ch1 DIGIT7-4 OUT16 H Green
6 OUT_D7-2_1 Ch1 DIGIT7-2 OUT16 GO Blue
7 OUT_D7-1_1 Ch1 DIGIT7-1 Ch1 binary(24) OUT16 L Purple
8 OUT_D6-8_1 Ch1 DIGIT6-8 Ch1 binary(23) OUT16 LL Grey
9 OUT_D6-4_1 Ch1 DIGIT6-4 Ch1 binary(22) OUT15 HH White NPN open
10 OUT_D6-2_1 Ch1 DIGIT6-2 Ch1 binary(21) OUT15 H Black collector output
11 OUT_D6-1_1 Ch1 DIGIT6-1 Ch1 binary(20) OUT15 GO Brown

12 COM_OUT COM_OUT Red
13 OUT_D5-8_1 Ch1 DIGIT5-8 Ch1 binary(19) OUT15 L Orange
14 OUT_D5-4_1 Ch1 DIGIT5-4 Ch1 binary(18) OUT15 LL Yellow
15 OUT_D5-2_1 Ch1 DIGIT5-2 Ch1 binary(17) OUT14 HH Green
16 OUT_D5-1_1 Ch1 DIGIT5-1 Ch1 binary(16) OUT14 H Blue
17 OUT_D4-8_1 Ch1 DIGIT4-8 Ch1 binary(15) OUT14 GO Purple
18 OUT_D4-4_1 Ch1 DIGIT4-4 Ch1 binary(14) OUT14 L Grey

Signal description
When Code
Judgment color
output is output is
output is
selected selected
selected
19 OUT_D4-2_1 Ch1 DIGIT4-2 Ch1 binary(13) OUT14 LL White
20 OUT_D4-1_1 Ch1 DIGIT4-1 Ch1 binary(12) OUT13 HH Black
22 OUT_D3-8_1 Ch1 DIGIT3-8 Ch1 binary(11) OUT13 H Red
23 OUT_D3-4_1 Ch1 DIGIT3-4 Ch1 binary(10) OUT13 GO Orange
24 OUT_D3-2_1 Ch1 DIGIT3-2 Ch1 binary(9) OUT13 L Yellow
25 OUT_D3-1_1 Ch1 DIGIT3-1 Ch1 binary(8) OUT13 LL Green
26 OUT_D2-8_1 Ch1 DIGIT2-8 Ch1 binary(7) OUT12 HH Blue
27 OUT_D2-4_1 Ch1 DIGIT2-4 Ch1 binary(6) OUT12 H Purple
28 OUT_D2-2_1 Ch1 DIGIT2-2 Ch1 binary(5) OUT12 GO Grey
NPN open
29 OUT_D2-1_1 Ch1 DIGIT2-1 Ch1 binary(4) OUT12 L White
collector output
30 COM_OUT COM_OUT Black
31 OUT_D1-8_1 Ch1 DIGIT1-8 Ch1 binary(3) OUT12 LL Brown
32 OUT_D1-4_1 Ch1 DIGIT1-4 Ch1 binary(2) OUT11 HH Red
33 OUT_D1-2_1 Ch1 DIGIT1-2 Ch1 binary(1) OUT11 H Orange
8 34
35
OUT_D1-1_1
OUT_NUM-8_1
Ch1 DIGIT1-1
Ch1 OUT number-8
Ch1 binary(0) OUT11 GO
OUT11 L
Yellow
Green
36 OUT_NUM-4_1 Ch1 OUT number-4 OUT11 LL Blue

37 OUT_NUM-2_1 Ch1 OUT number-2 Purple
N.O.
38 OUT_NUM-1_1 Ch1 OUT number-1 Grey
39 COM_OUT COM_OUT White
40 N.C. Black Not used

Output connector 2
Signal description
When Code
Judgment color
output is output is
output is
selected selected
selected
3 OUT_POLE_2 Ch2 sign N.O. Orange
N.O.
5 OUT_D7-4_2 Ch2 DIGIT7-4 OUT10 H Green NPN open
collector output
9 OUT_D6-4_2 Ch2 DIGIT6-4 Ch2 binary(22) OUT9 HH White

Signal description
When Code
Judgment color
output is output is
output is
selected selected
selected
10 OUT_D6-2_2 Ch2 DIGIT6-2 Ch2 binary(21) OUT9 H Black
15 OUT_D5-2_2 Ch2 DIGIT5-2 Ch2 binary(17) OUT8 HH Green
16 OUT_D5-1_2 Ch2 DIGIT5-1 Ch2 binary(16) OUT8 H Blue
17 OUT_D4-8_2 Ch2 DIGIT4-8 Ch2 binary(15) OUT8 GO Purple
18 OUT_D4-4_2 Ch2 DIGIT4-4 Ch2 binary(14) OUT8 L Grey
24 OUT_D3-2_2 Ch2 DIGIT3-2 Ch2 binary(9) OUT7 L Yellow NPN open
25
26
OUT_D3-1_2
OUT_D2-8_2
Ch2 DIGIT3-1
Ch2 DIGIT2-8
Ch2 binary(8)
Ch2 binary(7)
OUT7 LL
OUT6 HH
Green
Blue
collector output
8

27 OUT_D2-4_2 Ch2 DIGIT2-4 Ch2 binary(6) OUT6 H Purple
28 OUT_D2-2_2 Ch2 DIGIT2-2 Ch2 binary(5) OUT6 GO Grey
29 OUT_D2-1_2 Ch2 DIGIT2-1 Ch2 binary(4) OUT6 L White
31 OUT_D1-8_2 Ch2 DIGIT1-8 Ch2 binary(3) OUT6 LL Brown
32 OUT_D1-4_2 Ch2 DIGIT1-4 Ch2 binary(2) OUT5 HH Red
33 OUT_D1-2_2 Ch2 DIGIT1-2 Ch2 binary(1) OUT5 H Orange
34 OUT_D1-1_2 Ch2 DIGIT1-1 Ch2 binary(0) OUT5 GO Yellow
35 OUT_NUM-8_2 Ch2 OUT number-8 OUT5 L Green
36 OUT_NUM-4_2 Ch2 OUT number-4 OUT5 LL Blue
N.O.


Output connector 3
Signal description
When Code
Judgment color
output is output is
output is
selected selected
selected
3 OUT_POLE_3 Ch3 sign N.O. N.O. Orange
5 OUT_D7-4_3 Ch3 DIGIT7-4 OUT4 H Green
9 OUT_D6-4_3 Ch3 DIGIT6-4 Ch3 binary(22) OUT3 HH White
10 OUT_D6-2_3 Ch3 DIGIT6-2 Ch3 binary(21) OUT3 H Black

8 15
16
OUT_D5-2_3
OUT_D5-1_3
Ch3 DIGIT5-2
Ch3 DIGIT5-1
Ch3 binary(17)
Ch3 binary(16)
OUT2 HH
OUT2 H
Green
Blue
17 OUT_D4-8_3 Ch3 DIGIT4-8 Ch3 binary(15) OUT2 GO Purple NPN open

18 OUT_D4-4_3 Ch3 DIGIT4-4 Ch3 binary(14) OUT2 L Grey collector output

24 OUT_D3-2_3 Ch3 DIGIT3-2 Ch3 binary(9) OUT1 L Yellow
25 OUT_D3-1_3 Ch3 DIGIT3-1 Ch3 binary(8) OUT1 LL Green
26 OUT_D2-8_3 Ch3 DIGIT2-8 Ch3 binary(7) N.O. Blue
27 OUT_D2-4_3 Ch3 DIGIT2-4 Ch3 binary(6) Purple
28 OUT_D2-2_3 Ch3 DIGIT2-2 Ch3 binary(5) Grey
29 OUT_D2-1_3 Ch3 DIGIT2-1 Ch3 binary(4) White
31 OUT_D1-8_3 Ch3 DIGIT1-8 Ch3 binary(3) N.O. Brown
32 OUT_D1-4_3 Ch3 DIGIT1-4 Ch3 binary(2) Red
33 OUT_D1-2_3 Ch3 DIGIT1-2 Ch3 binary(1) Orange
34 OUT_D1-1_3 Ch3 DIGIT1-1 Ch3 binary(0) Yellow

Signal description
When Code
Judgment color
output is output is
output is
selected selected
selected
35 OUT_NUM-8_3 Ch3 OUT number-8 N.O. Green
36 OUT_NUM-4_3 Ch3 OUT number-4 Blue
NPN open
collector output

Output connector 4
Signal description
When Code
Judgment color
output is output is
output is
selected selected
selected
3 OUT_POLE_4 Ch4 sign N.O. N.O. Orange
4
5
OUT_D7-8_4
OUT_D7-4_4
Ch4 DIGIT7-8
Ch4 DIGIT7-4
Yellow
Green
8

6 OUT_D7-2_4 Ch4 DIGIT7-2 Blue
10 OUT_D6-2_4 Ch4 DIGIT6-2 Ch4 binary(21) Black

NPN open
11 OUT_D6-1_4 Ch4 DIGIT6-1 Ch4 binary(20) Brown collector output
13 OUT_D5-8_4 Ch4 DIGIT5-8 Ch4 binary(19) N.O. Orange
15 OUT_D5-2_4 Ch4 DIGIT5-2 Ch4 binary(17) Green
16 OUT_D5-1_4 Ch4 DIGIT5-1 Ch4 binary(16) Blue
20 OUT_D4-1_4 Ch4 DIGIT4-1 Ch4 binary(12) Black

Signal description
When Code
Judgment color
output is output is
output is
selected selected
selected
22 OUT_D3-8_4 Ch4 DIGIT3-8 Ch4 binary(11) N.O. Red
25 OUT_D3-1_4 Ch4 DIGIT3-1 Ch4 binary(8) Green
26 OUT_D2-8_4 Ch4 DIGIT2-8 Ch4 binary(7) Blue
30 COM_OUT COM_OUT Black NPN open
31 OUT_D1-8_4 Ch4 DIGIT1-8 Ch4 binary(3) N.O. Brown collector output
32 OUT_D1-4_4 Ch4 DIGIT1-4 Ch4 binary(2) Red

35 OUT_NUM-8_4 Ch4 OUT number-8 Green
36 OUT_NUM-4_4 Ch4 OUT number-4 Blue
8 37
38
OUT_NUM-2_4
OUT_NUM-1_4
Ch4 OUT number-2
Ch4 OUT number-1
Purple
Grey

[BCD POLE (sign) output]

OFF: Positive data
ON: Negative data
[BCD DIGIT output]

Outputs the BCD numeric value of each digit. (The decimal point is ignored.)
Negative-true logic ("1" when the NPN open collector output is ON)
Output waiting status (all digits "-"): All digits = 0xB (1011), sign bit = 0
Above the plus limit range: All digits = 0xF (1111), sign bit = 0
Below the minus limit range: All digits = 0xF (1111), sign bit = 1
[BCD OUT number output]

The same as terminals N1 to N8 on page 8-20.
[Binary output]
Outputs the measurement value as binary data. The two's complement is output using 25 bits. (The decimal point is
ignored.)
Negative-true logic ("1" when the NPN open collector output is ON)
Output waiting status (all digits "-"): 0x01500000
Above the plus limit range: 0x00AA0000
Below the minus limit range: 0x01560000
[Binary output, OUT number output]

The same as terminals N1 to N8 on page 8-20.
The "Display Terminal Status" function is useful in checking the output status. (page 6-44)

I/O circuit

LS-9501 (NPN type)
zz
Non-voltage input
+5 V +5 V ON voltage 1 V or lower
2.2 kΩ
OFF current 0.6 mA or less
1 kΩ Short-circuit current
2 mA
(Typ.)
Internal circuit
Non-voltage
input Poly switch
COM IN
A connection example for an NPN output PLC that is connected to the unit's non-voltage input.
+5V +5V
2.2kΩ
1kΩ
OUT IN 8
Internal circuit
Poly switch

COM(-) COM
PLC (NPN output) Unit's input circuit

zz
NPN open collector output
+5 V Maximum applied voltage 40 V

Output
Maximum sink current 50 mA
Poly switch
1 kΩ 1.0 V or lower (50 mA)
Residual voltage
0.5 V or lower (20 mA)
Internal circuit
1 kΩ
Leak current 0.1 mA or less
COM OUT
Poly switch
A connection example for inputting the unit's NPN output into the PLC via the positive common terminal.
+5V OUT IN
Poly switch
1kΩ
Internal circuit
1kΩ
Poly switch COM COM(+)
8 Unit's output circuit PLC input circuit positive

common terminal
A connection example for inputting the unit's NPN output into the relay.
+5V OUT
Poly switch
1kΩ Load
Internal circuit
1kΩ
Poly switch COM
Unit's output circuit Relay


LS-9501P (PNP) type
zz
Voltage input
+5 V Maximum rated input 26.4 V
ON voltage 10.8 V or higher
4.7 kΩ
ON current (Typ.) 2 mA or more
Voltage
Internal circuit
input Poly switch OFF current 0.6 mA or less
1.5 kΩ
COM IN
Poly switch
A connection example for an PNP output PLC that is connected to the unit's voltage input.
+5V
IN 4.7kΩ
Internal circuit
Poly switch
1.5kΩ
COM(+)
COM
Poly switch 8
Unit's input circuit

OUT
PLC (PNP output)

zz
PNP open collector output
Maximum applied voltage 30 V

+5 V
COM OUT
Maximum source current 50 mA
Poly switch
6.8 kΩ Residual voltage
Internal circuit
6.8 kΩ Leak current 0.1 mA or less
Output
Poly switch
A connection example for inputting the unit's PNP output into the PLC via the negative common terminal.
+5V Poly switch COM COM(-)
6.8kΩ
Internal circuit
6.8kΩ
Poly switch OUT IN
8 Unit's output circuit PLC input circuit negative

common terminal
A connection example for inputting the unit's PNP output into the relay.
+5V Poly switch COM
*
Load
6.8kΩ
Internal circuit
6.8kΩ
Poly switch OUT
Unit's output circuit Relay
* Make the ground of the external power supply and the ground of the unit's power supply common.


Common for LS-9501/LS-9501P/LS-HA100 Voltage output
±10.8 V
zz
Analog voltage output/Analog current output Output range
(Measurement value: ±10.5 V)
Resolution 2 mV
Current output
Internal circuit
±0.05% of F.S. (F.S. = 20 V;

47 Ω 47 Ω Accuracy Accuracy against displayed
Voltage output
value)
0V Output impedance Approx. 100 Ω
Approx. 2 μs (after updating
Response delay time
the measurement value)
Current output
3.36 to 20.64mA
Output range (Measurement data: 3.6 to
20.4mA)
Resolution 40 μA
±0.25% of F.S.
Accuracy (F.S. = 16 mA; Accuracy
against displayed value)
Matched load Max. 350 Ω
Approx. 20 μs (after updating
Response delay time
the measurement value)

CB-BD100
zz
Non-voltage input
+5 V +5 V ON voltage 1 V or lower
8
OFF current 0.6 mA or less

Poly switch Short-circuit current
1 kΩ 2 mA
(Typ.)
Internal circuit
Non-voltage
input Poly switch
COM IN
A connection example for an NPN output PLC that is connected to the unit's non-voltage input.
+5V +5V
2.2kΩ
1kΩ
OUT IN
Internal circuit
Poly switch
COM(-) COM
PLC (NPN output) Unit's input circuit

zz
NPN open collector output
+5 V Maximum applied
Output 30 V
voltage
Poly switch
5.1 kΩ Maximum sink current 30 mA
Residual voltage 0.5V or less
Internal circuit
Leak current 0.1 mA or less

5.1 kΩ
COM OUT
Poly switch
A connection example for inputting the unit's NPN output into the PLC via the positive common terminal.
+5V OUT IN
Poly switch
1kΩ
Internal circuit
1kΩ
Poly switch COM COM(+)
8
Unit's output circuit PLC input circuit positive
common terminal

zz
Insulated condition between each I/O circuit
LS-9501 (NPN open collector type)
Head expansion unit
Analog voltage output Analog voltage output circuit Analog voltage output circuit Analog voltage output
Head expansion unit
Analog voltage output 0 V
Input terminal block input Input circuit Input circuit BCD unit Input terminal block input
COM IN BCD unit COM IN
Output terminal block output Output circuit Output circuit BCD output terminal block output
COM OUT BCD unit COM OUT
24 DC (-)
USB port shell and GND
Ethernet port shell

Head connector
Internal GND
ENCODER input Encoder input circuit
RS-232C signal line RS-232C driver circuit
GND of RS-232C
yyThe Ethernet port shell and the head connector are coupled with the internal GND and the capacitor, respectively.
8
yyRS-232C and ENCODER inputs are insulated from the internal GND.
24 V DC (-), COM_IN, COM_OUT, analog voltage output 0 V, head expansion unit analog
voltage output 0 V, BCD unit COM_IN and BCD unit COM_OUT are not insulated.

Also, 24 V DC (-), the metallic USB port shell and GND are not insulated.
Exercise caution to avoid a potential difference between the common internal terminals
due to the + grounding environment or potential difference between the instruments.
It may result in malfunction of the unit or the external instruments connected to the unit
such as the PC.

LS-9501P (PNP open collector type)

Head expansion unit
Analog voltage output Analog voltage output circuit Analog voltage output circuit Analog voltage output
Head expansion unit
Input terminal block input Input circuit Input circuit BCD unit Input terminal block input
COM IN BCD unit COM IN
Output terminal block output Output circuit Output circuit BCD output terminal block output
COM OUT BCD unit COM OUT
24 DC (-)
USB port shell and GND
Ethernet port shell

Head connector
Internal GND
ENCODER input Encoder input circuit
RS-232C signal line RS-232C driver circuit
GND of RS-232C
yyThe Ethernet port shell and the head connector are coupled with the internal GND and the capacitor, respectively.
yyRS-232C and ENCODER inputs are insulated from the internal GND.
8 BCD unit is an NPN open collector type.

24 V DC (-), COM_IN, analog voltage output 0 V, head expansion unit analog voltage
output 0 V, BCD unit COM_IN and BCD unit COM_OUT are not insulated.
Also, 24 V DC (-), the metallic USB port shell and GND are not insulated.
Exercise caution to avoid a potential difference between the common internal terminals
due to the + grounding environment or potential difference between the instruments.
It may result in malfunction of the unit or the external instruments connected to the unit
such as the PC.

Encoder input
Electric specifications and input circuit example of encoder input
Encoder input specifications
Encoder input Open collector power voltage

Line driver
channels 24 V DC 12 V DC 5V DC
Maximum rated input 26.4 V DC 13.2 V DC 5.5 V DC
Minimum ON voltage 21.6 V DC 10.8 V DC 3.5 V DC
Equivalent to AM26LS31
Maximum OFF voltage 3.6 V DC 2.4 V DC 1.0 V DC
Minimum ON current 2 mA
The encoder input circuit diagram is common for phase A, phase B, and phase Z.
3 kΩ
ENCODER +24 V
1.6 kΩ
ENCODER +12 V
220 Ω
ENCODER +5 V
120 Ω
ENCODER + (Line driver)
Internal Poly switch
1 kΩ
circuit 150 Ω
ENCODER -
Poly switch
Connection example : When the encoder is an NPN open collector output
ENCODER +24V
Shielded pair of
twisted cables
12V *
8

ENCODER +12V *
ENCODER +5V
ENCODER +
(Line driver)
circuit
OUT
ENCODER - A-phase/
Poly switch
B-phase/
Unit's input circuit Z-phase
COM(-)
* 12 V are used in this example. Match the power with the 5 V/12 V/24 V. Encoder's NPN open
collector output
Connection example : When the encoder is an PNP open collector output

Shielded pair of A-phase/
ENCODER +24V twisted cables B-phase/
Z-phase
ENCODER +12V *
ENCODER +5V
ENCODER +
(Line driver)
circuit
COM(+)
ENCODER - 12V *
Poly switch
Unit's input circuit
OUT
* 12 V are used in this example. Match the power with the 5 V/12 V/24 V. Encoder's PNP open
collector output

Connection example : When the encoder is a line driver output
ENCODER +24V
Shielded pair of A-phase/

ENCODER +12V twisted cables B-phase/
ENCODER +5V Z-phase +
ENCODER +
(Line driver)
circuit
ENCODER - A-phase/
Poly switch
B-phase/
Unit's input circuit Z-phase -
Encoder's Line
driver output
8

9
This section describes the RS-232C communication
commands.
RS‑232C
RS-232C interface commands.................................. 9-2

RS-232C interface commands
This section describes the commands that may be sent or received on this unit.
Command format
This unit performs the controls specified in the command received from the external instruments, and then returns a
reply command to the external instrument.
A CR (carriage return) is used for separating the received and reply command data.
After switching on the power and RS-232C communication starts, clear the external
device communication buffer. Unnecessary data may be received in the external device
after the power is switched on.
Received command format

[ , … ] CR
Main command
Reply command format

[ , … ][ , … ] CR
The received main command and/or identifier will be appended as the header.
9
RS-232C

Reply command format in the event of an error

E R , , CR
Error code
Main command
Error code Contents

00 Command error
01 Status error
20 Command length error
21 Parameter error
22 Parameter error (OUT number)
23 Parameter error (Measurement target number)
40 Head not connected error
41 Head mismatch error
70 Consistency error in display units
71 Consistency error in setting (Scaling)
72 Consistency error in setting (Calibration)
73 Consistency error in setting (Tolerance setting)
74 Consistency error in setting (Analog scaling)
88 Timeout error
9
99 Another error
“Error messages in the RS-232C/display panel” (page A-21)
RS-232C

Measurement value formats

Sign Integer part Decimal point Decimal part
It has a fixed total length of 8 characters. The decimal point counts as one character.
The position of the decimal point differs depending on the setting.
The measurement value will be right-aligned.
It has a fixed total length of 1 character with a + or - sign.

Measurement value format examples
Displayed value Output format

1.23450 +01.23450
-123.450 -0123.450
1.2 +000001.2
-0.120 -0000.120
+OVER +99.99999 (*)
- OVER -99.99999 (*)
-------- -99.99999 (*)
* The position of the decimal point differs depending on the minimum unit display setting. If the minimum display
unit has no decimal point (e.g. 1 µm), the output will be aligned to the right, i.e. “+09999999”.
9 Setting numeric value formats

Sign Value
RS-232C
It has a fixed total length of 7 characters. There is no decimal point.
It has a fixed total length of 1 character with a + or - sign.

Examples of setting numeric value formats
Set numerical value Format

1.23450 +0123450

Specification of the automatic transmission

yyThe measurement values will be output without requiring a received command.
yyOnly the synchronized OUTs will output measurement values.
yyNo measurement values will be output if there are no synchronized OUTs.
yyMeasurement values are output in synchronization with the input from the TIMING1 terminal (does not synchronize
with the TIMING input from LS-Navigator2).
yyThe measurement control commands cannot be used if the automatic transmission function has
been enabled.
yyThe trigger logging function cannot be used in LS-Navigator2 if the automatic transmission
function has been enabled.
yyDo not confirm the next measurement value while outputting a measurement value from RS-232C.
The measurement value will not be output even if it has been confirmed.

Output format
The setting can be modified from the “Data transmission mode” in the environment setting.
“Data send mode” (page 7-15)
zz
Data transmission mode: OFF
The automatic transmission function will be disabled.
zz
Data transmission mode: S1
All confirmed measurement values will be output.
zz
Data transmission mode: S2
Of the confirmed measurement values, only those with a judgment result other than GO will be output.
9
M J , o o , m m m m m m m m m , v , j j CR
oo : OUT number (01 to 16)

mmmmmmmmm : Measurement value formats
v : Measurement result information (0 =Normal value, 1 = Over-range data, 2 = Output waiting data)
RS-232C
jj : Judgment result (HH/HI/GO/LO/LL/WT)


When output measurement values in synchronization with the TIMING1 terminal
Make sure that "Measurement mode = Self timing hold" is not included in the synchronized OUTs.
ON
TIMING1
OFF
Measurement
RS-232C data output
value
zz
If Sample hold 2 is not included in the synchronized OUTs
t = T7+7 ms
zz
If Sample hold 2 is included in the synchronized OUTs
t = T7+T5+7 ms
T5 : [Sampling frequency] × ([Averaging times] - 1)
T7 : Max 2ms
If the controller is processing commands (such as when communicating with LS-Navigator2) or connected to a display
panel, the response speed may be slower than shown above.

When outputting measurement values using the “Self timing hold” mode
Set the synchronization setting as follows:

yySet the synchronization setting ON for only one OUT.
yySet the measurement mode for the OUT to “Self timing hold”.
9 The measurement value output will start 5 ms after the values have been confirmed in the “Self timing hold” mode.
RS-232C

ASCII code table

Upper order 4 bits
Lower bit
RS-232C

Measurement control command list

This section describes the details of the measurement control commands that are sent/received by the controller on
the measurement screen (i.e. measurement in progress).
There are two types of measurement control commands: received commands and reply commands. Reply commands
are sent (returned) when the received commands were processed correctly.
The symbols with a background color in the command list are also explained in the table below.
Measurement control command

“Measurement value output (Single)” (page 9-8)
“Measurement value output (Multiple)” (page 9-9)
“Measurement value output (ALL)” (page 9-9)
“Timing ON/OFF (Single)” (page 9-10)
“Timing ON/OFF (Multiple)” (page 9-10)
“Timing ON/OFF (Synchronization)” (page 9-10)
“Auto zero ON/OFF (Single)” (page 9-10)
“Auto zero ON/OFF (Multiple)” (page 9-11)
“Auto zero ON/OFF (Synchronization)” (page 9-11)
“Reset (Single)” (page 9-11)
“Reset (Multiple)” (page 9-11)
“Reset (Synchronization)” (page 9-12)
“Statistics data output” (page 9-12)
“Statistics start” (page 9-12)
“Statistics stop” (page 9-12)
9
“Statistics clear” (page 9-13)

Measurement value output (Single)
RS-232C
Only outputs a single specified OUT value.
Received command M S , r , o o CR
Reply command M S , m m m m m m m m m , v , j j CR
yy r : Indicates the output content.

yy0: Measurement value only
yy1: Measurement value + Measurement result information
yy2: Measurement value + Measurement result
yy3: Measurement value + Measurement result information + Decision result
Parameter yy o o : Indicates the OUT number (01 to 16).
description yy m m m m m m m m m : Measurement format is displayed.
yy v : Measurement result information is displayed.
yy0: Normal value
yy1: Over range data
yy2: Output waiting data
yy j j : Judgement result (HH/HI/GO/LO/LL/WT) is displayed.


Measurement value output (Multiple)
Outputs the specified OUT values.
Received command M M , r , i i i i i i i i i i i i i i i i CR
M M , m m m m m m m m m , v , j j
Reply command , m m m m m m m m m , v , j j …
, m m m m m m m m m , v , j j CR

yy3: Measurement value + Measurement result information + Judgment result
yy i i i i i i i i i i i i i i i i : Indicates the OUT specification. Specify
[1] on the OUTPUT for the measurement and judgement result you want to output, and [0]
Parameter on the OUT you do not want to output. The latest OUT number comes to the front.
description Example: If you want to output the measurement and judgement results for OUT1 and OUT
5, specify [1000100000000000].
yy m m m m m m m m m : Measurement format is displayed.
yy0: Normal value

Measurement value output (ALL)
Outputs all the OUT measurement values currently in use.
Received command
9
M A , r CR
M A , m m m m m m m m m , v , j j
Reply command , m m m m m m m m m , v , j j …
RS-232C
, m m m m m m m m m , v , j j CR

yy3: Measurement value + Measurement result information + Judgment result
Parameter
description yy m m m m m m m m m : Measurement format is displayed.
yy0: Normal value


Timing ON/OFF (Single)
Switch ON/OFF one of the timings of specified OUT.
Received command T S , p , o o CR
Reply command T S CR
yy p : Indicates the ON/OFF specification.

Parameter yy0: OFF
description yy1: ON
yy o o : Indicates the OUT number (01 to 16).

Timing ON/OFF (Multiple)
Switch ON/OFF the timings of specified OUT.
Received command T M , p , i i i i i i i i i i i i i i i i CR
Reply command T M CR

yy0: OFF
yy1: ON
Parameter
description
[1] on the OUT whose TIMING you want to switch ON and [0] on the OUT you want to
switch OFF. The latest OUT number comes to the front.
Example: If you want to switch on the TIMING for OUT 1 and OUT 5, specify
[1000100000000000].

Timing ON/OFF (Synchronization)
9 Switch ON/OFF OUT Timings that have been set to synchronize.
Received command T p CR
RS-232C
Reply command T p CR

Parameter
description yy0: OFF
yy1: ON

Auto zero ON/OFF (Single)
Switch ON/OFF one of the auto zero in specified OUT.
Received command Z S , p , o o CR
Reply command Z S CR
yy p :Indicates the ON/OFF specification.

Parameter yy0: OFF
description yy1: ON


Auto zero ON/OFF (Multiple)
Switch ON/OFF the auto zeros in specified OUT.
Received command Z M , p , i i i i i i i i i i i i i i i i CR
Reply command Z M CR

yy0: OFF
yy1: ON
Parameter
description
[1] on the OUT that you want to switch the auto zero ON, and [0] on the OUT that you want
to switch the auto zero OFF. The latest OUT number comes to the front.
Example: If you want to switch ON the auto zero for OUT 1 and OUT 5, specify
[1000100000000000].

Auto zero ON/OFF (Synchronization)
Switch ON/OFF auto zeros of OUT that have been set to synchronize.
Received command Z p CR
Reply command Z p CR

Parameter
description yy0: OFF
yy1: ON

Reset (Single)
Reset one of the specified OUT.
Received command R S , o o CR
9
Reply command R S CR
RS-232C
Parameter
description yy o o : Indicates the OUT number (01 to 16).

Reset (Multiple)
Reset specified OUT.
Received command R M , i i i i i i i i i i i i i i i i CR
Reply command R M CR

Parameter [1] on the OUT you want to RESET and [0] on the OUT you do not want to RESET. The
description latest OUT number comes to the front.
Example: If you want to RESET OUT 1 and OUT 5, specify [1000100000000000].


Reset (Synchronization)
Reset OUT that have been set to synchronized.
Received command R 1 CR
Reply command R 1 CR
Parameter
-
description

Statistics data output
Outputs the statistics data.
Received command D O , a CR
D O , m m m m m m m m m MAX
, m m m m m m m m m MIN
, m m m m m m m m m AVE
, m m m m m m m m m PP
, m m m m m m m m m Standard deviation
Reply command , n n n n n n Count
, n n n n n n HH decision count
, n n n n n n HI decision count
, n n n n n n GO decision count
, n n n n n n LO decision count
, n n n n n n CR LL decision count
yy a : Statistics Ch number (1 to 2) are displayed.

Parameter yy m m m m m m m m m : Indicates the measurement format.
description yy n n n n n n : Displays the numbers in 6 integral digits.
9 Example: If the number is 12, [000012] is output.

Statistics start
RS-232C
Starts statistics processing.
Received command D S , a CR
Reply command D S CR
Parameter
description yy a : Indicates the statistics Ch number (1 to 2).

Statistics stop
Stops statistics processing.
Received command D P , a CR
Reply command D P CR
Parameter


Statistics clear
Clears statistics data.
Received command D Q , a CR
Reply command D Q CR
Parameter
Setting control command list

This section describes the details of the setting control commands that are sent/received by the controller on the
measurement screen (i.e. measurement in progress).
There are two types of setting control commands: received commands and reply commands. Reply commands are
sent (returned) when the received commands were processed correctly.
The symbols with a background color in the command list are explained in the table below.
Control Received command Reply command
Setting save requisition S S , b CR S S CR
Setting save completion check S M CR S M , c CR
Program initialization P I CR P I CR
Program No. check P R CR P R , p p CR
Program switching P W , p p CR P W CR
Symbol
Destination of the setting value is displayed.
b
yy0: Settings write area
yy1: Active measurement area 9
yy2: Save area
RS-232C
Saving flag is displayed.
c yy0: Not saving
yy1: Saving
p p Program No. (00 to 15) is displayed.
Explanation for operations that take place when each area is selected.
Settings write area Rewrites the values for Settings write area.
When rewriting or reading, the reset process does not take place and therefore there is
no impact on the measurement operation.
Active measurement area After rewriting the value for settings write area, the contents of settings write area are
reflected in the active measurement area.
When reflecting the settings, reset process takes place and the active settings change.
When reading the settings, reset process does not take place and therefore there is no
impact on the measurement operation.
When the power is switched off, the reflected settings are erased.
Save area After rewriting the value for settings write area, the contents of settings write area and
save area are reflected in the active measurement area.
When reflecting the settings, reset process takes place and the active settings change.
When reading the settings, reset process does not take place and therefore there is no
impact on the measurement operation.
Even when the power is switched off, the reflected settings are still maintained.
Switching off the power soon after reflecting the operation settings may cause the set data to break down.
If rewriting is done more than 100,000 times, the memory may break down.

Settings change command list

This section describes the setting change commands that are used for changing the settings.

“Edge detection threshold value” (page 9-15)
“Mask setting” (page 9-16)
“Head setting” (page 9-15)
“No. of edges check count” (page 9-16)
“Focus monitor” (page 9-16)
“Reference head” (page 9-17)
“Measurement types” (page 9-17)
“Edge (Pitch) number” (page 9-17)
“Setting the measurement target” (page 9-17)
“Tilt correction” (page 9-18)
“Median filter” (page 9-18)
“Delay” (page 9-18)
“Calculation method” (page 9-19)
“Filter” (page 9-19)
“Offset” (page 9-20)
“Difference output” (page 9-20)
“Outlier exclusion function” (page 9-20)
“Abnormal value cancellation” (page 9-21)
“Measurement mode” (page 9-21)
“Self timing period” (page 9-21)
9 “Tolerance setting” (page 9-22)

“Reference value mode” (page 9-22)
“Threshold value mode” (page 9-22)
“Calibration” (page 9-23)
RS-232C
“Calibration/Scaling” (page 9-23)

“OUT scaling” (page 9-23)
“Minimum display unit” (page 9-24)
“Tolerance mode” (page 9-24)
“Measurement target” (page 9-24)
“Common settings” (page 9-24) “Used OUT” (page 9-25)
“Mutual interference prevention” (page 9-25)
“OUT Synchronization” (page 9-25)
“Group calculation” (page 9-26)


“Analog output channel” (page 9-27)
“Reference value mode - Analog scaling” (page 9-27)
“Threshold value mode - Analog scaling” (page 9-27)
“Encoder input mode / Points to skip” (page 9-28)
“Encoder TIMING function” (page 9-28)
“Pulse count value preset function” (page 9-28)
“I/O terminal setting” (page 9-27) “Total judgment output” (page 9-29)
“Strobe output time” (page 9-29)
“Off delay time” (page 9-29)
“No. of control channels” (page 9-29)
“Control channel” (page 9-30)
“Status output” (page 9-30)
“BCD unit settings” (page 9-31)
“Storage target OUT” (page 9-31)
“Data storage” (page 9-31) “Accumulation cycle / Points / NG storage” (page 9-32)
“Storage control method” (page 9-32)
“Statistics processing target OUT” (page 9-33)
“Statistics processing” (page 9-33) “Statistics processing count” (page 9-33)
“Statistics processing control method” (page 9-33)

9
Head setting
zz
Edge detection threshold value
RS-232C
Received command S W , H T , b , h , t , d d CR
Reply command S W , H T CR
yy b : Indicates the destination of the setting value.

yy1: Active measurement area
yy2: Save area
yy h : Indicates the head number (1 to 4).
Parameter
description yy t : Indicates the threshold value T1, threshold value T2 selection.
yy0: Threshold value T1
yy1: Threshold value T2
yy d d : Indicates the edge detection threshold value.
yy00: OFF (Threshold value T1 cannot be set to OFF)
yy1 to 99: Edge detection threshold value (%)

zz
Mask setting
Received command S W , H M , b , h , f , s s s s s s s s , s s s s s s s s CR
Reply command S W , H M CR

yy2: Save area
Parameter
description yy h : Indicates the head number (1 to 4).
yy f : Indicate the function enable flag.
yy0: Invalid
yy1: Valid
yy s s s s s s s s : The format for the set numerical value is displayed.
zz
No. of edges check count
Received command S W , H E , b , h , e e CR
Reply command S W , H E CR

Parameter yy2: Save area
yy e e : Indicates the no. of edges.
yy00: No. of edges check function disabled
9 yy02 to 31: No. of edges

RS-232C
zz
Focus monitor
Received command S W , H F , b , h , F CR
Reply command S W , H F CR

yy F : Indicate the function enable flag.
yy0: Invalid
yy1: Valid


zz
Reference head
Received command S W , T H , b , t t , h CR
Reply command S W , T H CR

Parameter yy1: Active measurement area
description yy2: Save area
yy t t : Indicates the measurement target number (01 to 16).
zz
Measurement types
Received command S W , T Y , b , t t , y CR
Reply command S W , T Y CR

yy2: Save area
Parameter yy t t : Indicates the measurement target number (01 to 16).
description
yy y :Indicates the measurement type.
yy0: DIA yy4: Position between the transmitter and receiver
yy1: T-EDGE yy5: Ultrafine DIA
9
yy2: B-EDGE yy6: Ultrafine GAP
yy3: Select edge (Pitch) number yy7: Center position
RS-232C
zz
Edge (Pitch) number
Received command S W , T P , b , t t , d d d , e , d d d , e CR
Reply command S W , T P CR

yy2: Save area
Parameter yy t t : Indicates the measurement target number (01 to 16).
description yy d d d : Indicates the edge (pitch) number (-31 to +31. It consists of one sign digit and
two numeric digits.).
yy e : Indicates the edge (pitch) specification.
yy0: Edge
yy1: Pitch

zz
Tilt correction
Received command S W , T T , b , t t , f CR
Reply command S W , T T CR

description yy t t : Indicates the measurement target number (01 to 16).
yy0: Invalid
yy1: Valid
zz
Median filter
Received command S W , T M , b , t t , m CR
Reply command S W , T M CR

yy m : Indicates the median filter points.
yy0: OFF yy2: 15 points
yy1: 7 points yy3: 31 points
9
zz
Delay
RS-232C
Received command S W , T D , b , t t , d d d d CR
Reply command S W , T D CR

yy d d d d : Indicates the no. of delay points.
yy0000: OFF
yy0001 to 1023: No. of delay points


OUT setting
zz
Calculation method
S W , O C , b , o o , M , t t
Received command , c t t , c t t , c t t , c t t
, t t t t t t t t t t t t t t t t CR
Reply command S W , O C CR

yy2: Save area
yy M : Indicates the calculation method.
yy0: Combining calculations
yy1: Average calculation
Parameter yy2: No calculation
yy c : Indicates the calculation factor.
yy0: 0 yy3: +1/3 yy6: -1/2
yy1: +1 yy4: +1/4 yy7: -1/3
yy2: +1/2 yy5: -1 yy8: -1/4
yy t t t t t t t t t t t t t t t t : Indicates the OUT specification.

Specify [1] on the OUT to be used and [0] on the OUT not to be used accordingly. The latest
OUT number comes to the front.
Example: If you want to use OUT 1 and OUT 5, specify [1000100000000000].
zz
Filter 9
Received command S W , A V , b , o o , v , w w CR
RS-232C
Reply command S W , A V CR

yy2: Save area
Parameter yy v : Indicates the filter type.
description yy0: Moving average
yy1: Simple average
yy w w : Indicates the averaging count.
yy00: Once yy04: 16 times yy08: 256 times yy12: 4096 times
yy01: Twice yy05: 32 times yy09: 512 times yy13: 8192 times
yy02: 4 times yy06: 64 times yy10: 1024 times yy14: 16384 times
yy03: 8 times yy07: 128 times yy11: 2048 times yy15: 32768 times

zz
Offset
Received command S W , O F , b , o o , S S S S S S S S CR
Reply command S W , O F CR

yy S S S S S S S S : Indicates the setting value format.
zz
Difference output
Received command S W , D F , b , o o , f CR
Reply command S W , D F CR

yy f :Indicate the function enable flag.
yy0: Invalid
yy1: Valid
9 zz
S W , O E , b , o o , f , x , x x x x
Received command
RS-232C
, s s s s s s s s , s s s s s s s s CR
Reply command S W , O E CR

yy2: Save area
Parameter
description yy0: Invalid
yy1: Valid
yy x : Indicates the exclusion method.
yy0: Output waiting
yy1: Hold the previous value
yy x x x x : Indicates the no. of abnormal value continuation counts (0001 to 4095).
yy s s s s s s s s : Indicates the setting value format.

zz
Abnormal value cancellation
S W , O A , b , o o , f , b b b b , a a a a
Received command
Reply command S W , O A CR

yy2: Save area
Parameter
description yy f : Indicate the function enable flag.
yy0: Invalid
yy1: Valid
yy b b b b : Indicates the no. of points before cancellation (0000 to 4095).
yy a a a a : Indicates the no. of points after cancellation (0000 to 4095).
zz
Measurement mode
Received command S W , M M , b , o o , m m , d CR
Reply command S W , M M CR

yy2: Save area
Parameter
yy m m : Indicates the measurement mode.
9
description
yy00: Normal yy05: Auto bottom hold
RS-232C
yy01: Peak hold yy06: Auto peak to Peak hold
yy02: Bottom hold yy07: Average hold
yy3: Peak to Peak hold yy08: Sample hold
yy04: Auto peak hold yy09: Self timing hold
yy d : Indicates the hold mode (1, 2, 3).
zz
Self timing period
Received command S W , S T , b , o o , t t t t CR
Reply command S W , S T CR

yy t t t t : Indicates the self timing period (0001 to 9999 ms).


Tolerance setting
zz
Reference value mode
S W , U P , b , o o , s s s s s s s s CR
Received command S W , S D , b , o o , s s s s s s s s CR
S W , L W , b , o o , s s s s s s s s CR
S W , U P CR
Reply command S W , S D CR
S W , L W CR

zz
Threshold value mode
S W , H H , b , o o , s s s s s s s s CR
S W , H I , b , o o , s s s s s s s s CR
Received command
S W , L O , b , o o , s s s s s s s s CR
9 S W
S W
,
,
L
H
L
H CR
, b , o o , s s s s s s s s CR
RS-232C
S W , H I CR
Reply command
S W , L O CR
S W , L L CR



Calibration/Scaling
zz
Calibration
S W , T C , b , t t , p
, s s s s s s s s , s s s s s s s s
Received command , s s s s s s s s , s s s s s s s s
Reply command S W , T C CR

yy2: Save area
Parameter
yy p : Indicates the no. of points used.
yy0: OFF
yy1 to 8: No. of points used
zz
OUT scaling
S W , S C , b , o o , p
,
,
s
s
s
s
s
s
s
s
s
s
s
s
s
s
s
s
,
,
s
s
s
s
s
s
s
s
s
s
s
s
s
s
s
s 9
RS-232C
Received command , s s s s s s s s , s s s s s s s s
Reply command S W , S C CR

yy2: Save area
Parameter
yy p : Indicates the no. of points used.
yy0: OFF
yy1 to 8: No. of points used


Common settings
zz
Received command S W , M U , b , u u CR
Reply command S W , M U CR

description yy u u : Indicates the minimum display unit.
yy00: 0.1 mm yy04: 0.00001 mm
yy01: 0.01 mm yy05: 1 µm
yy02: 0.001 mm yy06: 0.1 µm
yy03: 0.0001 mm yy07: 0.01 µm
zz
Tolerance mode
Received command S W , L M , b , L CR
Reply command S W , L M CR

Parameter
yy L : Indicates the tolerance mode.
9
yy0: Reference value mode
yy1: Threshold value mode
RS-232C
zz
Measurement target
Received command S W , U T , b , t t t t t t t t t t t t t t t t CR
Reply command S W , U T CR

yy2: Save area
Parameter
yy t t t t t t t t t t t t t t t t : Indicates the measurement target
description
number specification.
Specify [1] on the measurement target to be used and [0] on the measurement target not to
be used. The latest measurement target number comes to the front.
Example: If you want to use the measurement target 1 and measurement target 5, specify
[1000100000000000]

zz
Used OUT
Received command S W , U O , b , i i i i i i i i i i i i i i i i CR
Reply command S W , U O CR

description
yy i i i i i i i i i i i i i i i i : Indicates the OUT specification.
Specify [1] on the OUT to be used and [0] on the OUT not to be used. The latest OUT
number comes to the front.
Example: If you want to use OUT 1 and OUT 5, specify [1000100000000000]
zz
Mutual interference prevention
Received command S W , M I , b , i , g g g g CR
Reply command S W , M I CR

yy2: Save area
yy i : Indicates the mutual interference prevention mode.
Parameter yy0: OFF
description yy1: AB-ON
yy2: ABC-ON
9
yy g g g g : Indicates the head group.
Specify [0] on group A Head, [1] on group B Head and [2] on group C head. The latest Head
Example: If Head 1 is group A, Head 2 and head 3 are group B, and Head 4 is group C,
RS-232C
specify [0112].
zz
OUT Synchronization
Received command S W , S Y , b , i i i i i i i i i i i i i i i i CR
Reply command S W , S Y CR

description
Specify [1] on the OUT to be synchronized and [0] on the OUT not to be synchronized. The
latest OUT number comes to the front.
Example: If you want to synchronize OUT 1 and OUT 5, specify [1000100000000000].

zz
Group calculation
Received command S W , G R , b , q q q q , Q , r r CR
Reply command S W , G R CR

yy2: Save area
yy q q q q : Indicates the calculation points.
yy0000: OFF
Parameter
yy0002 to 4095: calculation points
description
yy Q : Indicates the calculation contents.
yy0: Maximum value yy2: Maximum - Minimum value
yy1: Minimum value yy3: Average value
yy r r : Indicates the group calculation source OUT number (01 to 15).

*The group calculation result will be output to OUT16. You can select from OUT1 to OUT15
for the calculation source OUT.
9
RS-232C


zz
Analog output channel
Received command S W , A N , b , a , o o , w CR
Reply command S W , A N CR

yy2: Save area
Parameter
yy a : Indicates the analog Ch number (1 to 4).
description
yy w : Indicates the voltage of output waiting data.
yy0: -10.8 V yy2: 0 V
yy1: +10.8 V yy3: Hold the previous value
zz
Reference value mode - Analog scaling
Received command S W , A S , b , a , s s CR
Reply command S W , A S CR

yy2: Save area
Parameter yy a : Indicates the analog Ch number (1 to 4).
description yy s s : Indicates the analog scaling (Reference value mode).
Values from 00 to 12 correspond to the below.
yyIn case of mm/µm (Unit: µm/V)
9
RS-232C
yy00: 1 yy03: 10 yy06: 100 yy09: 1000 yy12: 10000
yy01: 2 yy04: 20 yy07: 200 yy10: 2000
yy02: 5 yy05: 50 yy08: 500 yy11: 5000
zz
Threshold value mode - Analog scaling
Received command S W , A T , b , a , s s s s s s s s , s s s s s s s s CR
Reply command S W , A T CR

yy a : Indicates the analog Ch number (1 to 4).

zz
Encoder input mode / Points to skip
Received command S W , E I , b , z , n n n n CR
Reply command S W , E I CR

yy2: Save area
Parameter yy z : Indicates the encoder input mode.
description yy0: 1-phase 1 TM yy2: 2-phase 2 TM
yy1: 2-phase 1 TM yy3: 2-phase 4 TM
yy n n n n : Indicates the no. of encoder skipping points.

yy0000: OFF
yy0002 to 1000: encoder skipping points
zz
Encoder TIMING function
Received command S W , E T , b , f CR
Reply command S W , E T CR

Parameter
9
yy0: Invalid
yy1: Valid
RS-232C
zz
Pulse count value preset function
Received command S W , P P , b , A , p p p p p p p p p p p CR
Reply command S W , P P CR

yy2: Save area
Parameter yy A : Indicate the function enable flag.
description yy0: Invalid
yy1: Valid (Positive-true logic)
yy2: Valid (Negative-true logic)
yy p p p p p p p p p p p : Indicates the pulse count value (-2147483648 to
+2147483647. It consists of one sign digit and ten numeric digits.).

zz
Total judgment output
Received command S W , T J , b , i i i i i i i i i i i i i i i i CR
Reply command S W , T J CR

description
Specify [1] on the OUT to be used and [0] on the OUT not to be used. The latest OUT
If you want to use OUT 1 and OUT 5 for the total Judgement, specify [1000100000000000]
zz
Strobe output time
Received command S W , S B , b , r CR
Reply command S W , S B CR

Parameter
yy2: Save area
description
yy r : Indicates the strobe output time.
yy0: 2 ms yy2: 10 ms yy4: 50 ms yy6: 200 ms
zz
Off delay time 9
Received command S W , O D , b , Y CR
RS-232C
Reply command S W , O D CR

Parameter
yy2: Save area
description
yy Y : Indicates the off delay time.
yy0: 0 yy2: 5 ms yy4: 20 ms yy6: 50 ms yy8: 200 ms
yy1: 2 ms yy3: 10 ms yy5: Hold yy7: 100 ms yy9: 500 ms
zz
No. of control channels
Received command S W , U J , b , u CR
Reply command S W , U J CR

Parameter
description yy1: Active measurement area
yy2: Save area
yy u : Indicates the no. of control Ch (2 to 4).

zz
Control channel
Received command S W , C J , b , j , o o CR
Reply command S W , C J CR

yy j : Indicates the control Ch number (1 to 4).
zz
Status output
Received command S W , C S , b , U , V , o o , h , s CR
Reply command S W , C S CR

yy2: Save area
yy U : Indicates the status output Ch number (1 to 4).
yy V : Indicates the status output function selection.
Parameter
description yy0: Output waiting yy4: Check No. of edges: Fail
yy1: Outlier continue yy5: Stat processing ON
yy2: FOCUS yy6: Pulse frequency error
yy3: Insufficient light
9 yy o o : Indicates the OUT number (01 to 16).

yy s : Indicates the statistics processing Ch number (1 to 2).
RS-232C

zz
BCD unit settings
S W , X T , b , X
Received command
, Xr , Xk , o o , o o , o o , o o CR
Reply command S W , X T CR

yy2: Save area
yy X : Indicates the output selection function.
yy0: BCD output
yy1: Binary output
yy2: Judgment output
Parameter
yy Xr : BCD strobe time
description
yy Xk : OUT selection method

yy0: Controller settings
yy1: BCD unit terminal
(Example) Output connector 1: OUT3 Output connector 2: OUT4 Output connector 3:
OUT6 Output connector 4: To specify OUT10, use “03,04,06,10”.

Data storage
zz
Storage target OUT
Received command S W , G T , b , i i i i i i i i i i i i i i i i CR
9
Reply command S W , G T CR
RS-232C
description yy i i i i i i i i i i i i i i i i : Indicates the OUT specification.
Specify [1] on the OUT that is a storage target and [0] on the OUT that is not a storage
target. The latest OUT number comes to the front.
Example: If you want to make OUT 1 and OUT 5 storage targets, specify
[1000100000000000].

zz
Accumulation cycle / Points / NG storage
Received command S W , G P , b , y y , g g g g g g , f CR
Reply command S W , G P CR

yy2: Save area
yy y y : Indicates the accumulation cycle.
yy00: ×1 yy05: ×50 yy10: 1 sec
Parameter yy01: ×2 yy06: ×100 yy11: Timing synchronization
description yy02: ×5 yy07: ×200 yy12: Storage trigger synchronization
yy03: ×10 yy08: ×500
yy04: ×20 yy09: ×1000
yy g g g g g g : Indicates the no. of accumulated points (000001 to 400000 points).

yy f : Indicate the NG storage enable flag.
yy0: Invalid
yy1: Valid
zz
Received command S W , G K , b , k CR
Reply command S W , G K CR

9 Parameter
description
yy2: Save area
yy k : Indicates the control method.
RS-232C
yy0: Terminal
yy1: Command


Statistics processing
zz
Statistics processing target OUT
Received command S W , S O , b , s , o o CR
Reply command S W , S O CR

yy s : Indicates the statistics processing Ch number (1 to 2).
zz
Statistics processing count
Received command S W , S P , b , q q q q q q CR
Reply command S W , S P CR

yy q q q q q q : Indicates the no. of statistics processing points (000002 to 999999
points).
9
zz
Statistics processing control method
Received command S W , S K , b , k CR
RS-232C
Reply command S W , S K CR

Parameter
yy k : Indicates the control method.
yy0: Terminal
yy1: Command

Setting check command list

This section describes the command format for checking the contents of the settings.

Head setting
Changes Received command Reply command

Edge detection threshold
S R , H T , b , h , t CR S R , H T , h , t , d d CR
value
S R , H M , h , f
Mask S R , H M , b , h CR , Setting value formats
, Setting value formats CR
No. of edges check

S R , H E , b , h CR S R , H E , h , e e CR
count
Focus monitor S R , H F , b , h CR S R , H F , h , F CR

Reference head S R , T H , b , t t CR S R , T H , t t , h CR
Measurement types S R , T Y , b , t t CR S R , T Y , t t , y CR
S R , T P , t t , d d d , e
Edge/Pitch number S R , T P , b , t t CR
, d d d , e CR
Tilt correction S R , T T , b , t t CR S R , T T , t t , f CR
Median filter
9
S R , T M , b , t t CR S R , T M , t t , m CR
Delay S R , T D , b , t t CR S R , T D , t t , d d d d CR
RS-232C

OUT setting
S R , O C , o o , M , t t , c t t
Calculation S R , O C , b , o o CR , c t t , c t t , c t t
, Select target CR
Filter S R , A V , b , o o CR S R , A V , o o , v , w w CR
Offset S R , O F , b , o o CR S R , O F , o o , Setting value formats CR
Difference function S R , D F , b , o o CR S R , D F , o o , f CR
S R , O E , o o , f , x , x x x x
Outlier exclusion
S R , O E , b , o o CR , Setting value formats
function
S R , O A , o o , f , b b b b
Abnormal value
S R , O A , b , o o CR , a a a a , Setting value formats
cancellation
Hold mode S R , M M , b , o o CR S R , M M , o o , m m , d CR
Self timing period S R , S T , b , o o CR S R , S T , o o , t t t t CR


Tolerance setting
S R , U P , b , o o CR S R , U P , o o , Setting value formats CR
Reference value S R , S D , b , o o CR S R , S D , o o , Setting value formats CR
S R , L W , b , o o CR S R , L W , o o , Setting value formats CR
S R , H H , b , o o CR S R , H H , o o , Setting value formats CR
S R , H I , b , o o CR S R , H I , o o , Setting value formats CR

Threshold value
S R , L O , b , o o CR S R , L O , o o , Setting value formats CR
S R , L L , b , o o CR S R , L L , o o , Setting value formats CR

Calibration/Scaling
S R , T C , t t , p
, Setting value formats , Setting value formats
Measurement target , Setting value formats , Setting value formats
S R , T C , b , t t CR
calibration , Setting value formats , Setting value formats
CR
S R , S C ,
,
o o , p
Setting value formats , Setting value formats
9
RS-232C
OUT scaling S R , S C , b , o o CR
CR

Common settings
Minimum display unit S R , M U , b CR S R , M U , u u CR
Tolerance mode S R , L M , b CR S R , L M , L CR
Measurement target S R , U T , b CR S R , U T , Measurement target number specification CR
Used OUT S R , U O , b CR S R , U O , OUT specification CR
Mutual interference
S R , M I , b CR S R , M I , i , g g g g CR
prevention
Sync measure OUT S R , S Y , b CR S R , S Y , OUT specification CR
Group calculation S R , G R , b CR S R , G R , q q q q , Q , r r CR



Analog output terminal
S R , A N , b , a CR S R , A N , a , o o , w CR
setting
Reference value mode -
S R , A S , b , a CR S R , A S , a , s s CR
Analog scaling
Threshold value mode - S R , A T , a , Setting value formats

S R , A T , b , a CR
Analog scaling , Setting value formats CR
Encoder input mode /

S R , E I , b CR S R , E I , z , n n n n CR
Points of skipping
Encoder TIMING
S R , E T , b CR S R , E T , f CR
function
Pulse count value preset
S R , P P , b CR S R , P P , f , Pulse count value CR
function
Overall judgment S R , T J , b CR S R , T J , OUT specification CR
Strobe output time S R , S B , b CR S R , S B , r CR
Off delay time S R , O D , b CR S R , O D , Y CR
No. of control channels S R , U J , b CR S R , U J , u CR
Control channel S R , M J , b , j CR S R , M J , j , o o CR
Status output channel S R , M S , b , U CR S R , M S , U , V , o o , h , s CR
S R , X T , b , X
BCD unit settings
9
S R , X T , b CR , Xr , Xk , o o , o o ,
o o , o o CR

RS-232C
Data storage
Storage target OUT S R , G T , b CR S R , G T , OUT specification CR
Accumulation cycle /
Points / NG storage S R , G P , b CR S R , G P , y y , g g g g g g , f CR
function
Storage control method S R , G K , b CR S R , G K , k CR


S R , S O , b , s CR S R , S O , s , o o CR
target OUT
S R , S P , b CR S R , S P , q q q q q q CR
count
S R , S K , b CR S R , S K , k CR
control method

Other commands
Control Received command Reply command

Execute calibration of
L C , S , h CR L C , S CR
light intensity
Initialize calibration of
L C , I , h CR L C , I CR
light intensity
List of command parameters
Symbol Summary Remarks

Destination of the setting 0: Settings write area, 1: Active measurement area, 2: Save
b
value area
h Head number 1 to 4
Threshold value T1-T2

t 0: Threshold value T1, 1: Threshold value T2
selection
Edge detection threshold
d d 00: OFF, 1 to 99%
value
f Function enable flag 0: Invalid, 1: Valid
s s s s s s s s
Setting value formats It consists of one sign digit and seven numeric digits.
( Setting value formats )
00: No. of edges check function disabled, 02 to 31: No. of
e e No. of edges
edges
t t
Focus range
Measurement target
0 to 9
01 to 16
9
number
RS-232C
0: DIA, 1: T-EDGE, 2: B-EDGE, 3: Select edge (pitch) number,
y Measurement types 4: Position between the transmitter and receiver, 5: Ultrafine
DIA, 6: Ultrafine GAP, 7: Center position
d d d Edge/Pitch number -31 to +31. It consists of one sign digit and two numeric digits.
e Edge/Pitch specification 0: Edge, 1: Pitch
m Median filter points 0: OFF, 1: 7 points, 2: 15 points, 3: 31 points
d d d d Delay points 0000: OFF, 0001 to 1023 points
o o OUT number 01 to 16
M Calculation method 0: Combining calculations, 1: Average, 2: No calculation
0: “0”, 1: “+1”, 2: “+1/2”, 3: “+1/3”, 4: “+1/4”, 5: “-1”, 6: “-1/2”, 7:

c Calculation factor
“-1/3”, 8: “-1/4”
1: ‘Output’ or 0: ‘Do not output’ is specified for each OUT. Set
i i i i i i i i
the sequence starting from the younger OUT number.
i i i i i i i i OUT specification
(Example)To output the values for OUT1 and OUT5, set the
( OUT specification ) parameter as “1000100000000000”.
v Filter types 0: Moving average, 1: Simple average


00: Once, 01: Twice, 02: 4 times, 03: 8 times, 04: 16 times,
05: 32 times, 06: 64 times, 07: 128 times, 08: 256 times, 09:
w w Averaging count
512 times, 10: 1024 times, 11: 2048 times, 12: 4096 times, 13:
8192 times, 14: 16384 times, 15: 32768 times
x Exclusion method 0: Output waiting, 1: Hold the previous value
Abnormal value
x x x x 0001 to 4095
continuation count
b b b b Points before cancellation 0000 to 4095
a a a a Points after cancellation 0000 to 4095
00: Normal, 01: Peak hold, 02: Bottom hold, 3: Peak to Peak
hold, 04: Auto peak hold, 05: Auto bottom hold, 06: Auto peak
m m Hold mode
to Peak hold, 07: Average hold, 08: Sample hold, 09: Self
timing hold
d Hold mode 1, 2, 3
t t t t Self timing period 0001 to 9999 ms
p No. of points used 0: OFF, 1 to 8 points
00: 0.1 mm, 01: 0.01 mm, 02: 0.001 mm, 03: 0.0001 mm, 04:
u u Minimum display unit
0.00001 mm, 05: 1 µm, 06: 0.1 µm, 07: 0.01 µm
L Tolerance mode 0: Reference value mode, 1: Threshold value mode
1 per target: ‘Output’ or 0: ‘Do not output’ is specified for

t t t t t t t t each OUT. Set the sequence starting from the younger
Measurement target
t t t t t t t t measurement target number.
number specification
9 ( Measurement target number specification ) (Example)To output Measurement target 1 and Measurement
target 5, set the parameter as “1000100000000000”.
Mutual interference
i 0: OFF, 1: AB-ON, 2: ABC-ON
RS-232C
prevention mode
0 per head: Group A, 1: Group B, 2: Group C is specified for
each head. Set the sequence starting from the younger head
g g g g Head group number.
(Example)Set the parameter as “0112” is head 1 is A, head 2/3
are B, and head 4 is C.
q q q q Group calculation points 0000: OFF, 0002 to 4095 points
0: Maximum value, 1: Minimum value, 2: Maximum - Minimum

Q Group calculation method
value, 3: Average value
01 to 15
Group calculation source
r r *The group calculation result will be output to OUT16. You can
OUT number
select from OUT1 to OUT15 for the calculation source OUT.
a Analog Ch number 1 to 4
Voltage of output waiting

w 0: -10.8 V, 1: +10.8 V, 2: 0 V, 3: Hold the previous value
data
Values from 00 to 12 correspond to the below.
Analog scaling
s s 00: 1, 01: 2, 02: 5, 03: 10, 04: 20, 05: 50, 06: 100, 07: 200,
(Reference value mode)
08: 500, 09: 1000, 10: 2000, 11: 5000, 12: 10000 [µm/V]
0: 1-phase 1 TM, 1: 2-phase 1 TM, 2: 2-phase 2 TM, 3:
z Encoder input mode
2-phase 4 TM
No. of encoder skipping
n n n n 0000: OFF, 0002 to 1000 pulse
points

p p p p p p p p
-2147483648 to +2147483647. It consists of one sign digit and
p p p Pulse count value
ten numeric digits.
( Pulse count value )
0: Invalid
A Pulse count preset 1: Valid( Positive-true logic)
2: Valid( Negative-true logic)
0: 2 ms, 1: 5 ms, 2: 10 ms, 3: 20 ms, 4: 50 ms, 5: 100 ms,
r Strobe output time
6: 200 ms, 7: 500 ms
0: 0, 1: 2 ms, 2: 5 ms, 3: 10 ms, 4: 20 ms, 5: Hold, 6: 50 ms,
Y Off delay time
7: 100 ms, 8: 200 ms, 9: 500 ms
u No. of judgment output Ch 2 to 4
Judgment output Ch
j 1 to 4
number
U Status output Ch number 1 to 4
0: Output waiting, 1: Abnormal value continuation, 2: FOCUS,

Status output function
V 3: Insufficient light volume, 4: No. of edges check NG, 5:
selection
Statistics processing in progress ON, 6: Pulse count preset
BCD unit output function
X 0: BCD output, 1: Binary output, 2: Judgment value output
selection
0: 2 ms, 1: 5 ms, 2: 10 ms, 3: 20 ms, 4: 50 ms, 5: 100 ms,
Xr BCD strobe time
6: 200 ms, 7: 500 ms
BCD unit OUT selection
Xk 0: Controller settings, 1: BCD unit terminal
method
9
00: ×1, 01: ×2, 02: ×5, 03: ×10, 04: ×20, 05: ×50, 06:
y y Accumulation cycle ×100, 07: ×200, 08: ×500, 09: ×1000, 10: 1 sec, 11: Timing
synchronization, 12: Storage trigger synchronization
Storage pts 000001 to 400000 points
RS-232C
g g g g g g
k Control method 0: Terminal, 1: Command
Statistics processing Ch
s 1 to 2
number
q q q q q q 000002 to 999999 points
count

Time delay in response when sending and receiving commands

Received Received
command command
Returned Returned
command command
t
Command Time delay in response (t)

Measurement control command t = 3ms or less
Request to save the
(*) Depends on where the set value is written
settings
Confirm that saving of the
t = 3ms or less
settings is complete
Measurement control
Initialize the program t = No. of heads x 250ms + 1800ms or less
Confirm program number t = 3ms or less
Switch program t = No. of heads x 250ms + 50ms or less
Change settings command (*) Depends on where the set value is written
Confirm settings command t = 16ms or less
Perform light intensity
t = No. of heads x 250ms + 4750ms or less
calibration
Others
Initialize light intensity
9
calibration
(*)
In case of writing the setting range t = 8ms or less
RS-232C
In case of range when in operation setting or range for

save setting
If the controller is processing a command (Communicating with LS-Navigator2 e.t.c.), the response speed will be
slower than as indicated in the above table.
The response delay time will be longer than shown above when communicating with LS-Navigator2 or connected to
the expansion unit.
yyWhen communicating with LS-Navigator2, when the display panel is connected, when CB-EP100 is connected, and
when CB-PN100 is connected: Max. approx. 100 ms
yyWhen BCD unit is connected: Max. 10 ms

10
This section describes the measurement mode and the I/O
terminal timing charts.
Timing Chart
Measurement overview........................................... 10-2

I/O details............................................................... 10-10

Measurement overview

Normal
The measurement will be performed continuously, displaying and outputting measurement values at all times.
Normal mode
measurement value
RESET process
Internal measurement value
Output waiting
HI Setting value
LO Setting value
t
ON
HI Output
OFF
ON
GO Output OFF
LO Output ON
OFF
ON
WAITING Output OFF
ON
TIMING Output OFF
ON
RESET Input/ZERO Input OFF
RS-232C OUTPUT/Data storage

Measurement value Measurement value
yyThe ON status of each output refers to the status in which the NPN/PNP open collector output is ON.
yyThe ON status of each input indicates a short-circuit between the COM terminals for LS-9501 (NPN type); and it
indicates a voltage-applied status between the COM terminals for LS-9501P (PNP type).
yyThe RS-232C output will be synchronized with the TIMING input when the "Data transmission mode" in the
environment setting is set to S1 or S2. “Data send mode” (page 7-15)
yyThe data storage will be saved in synchronization with the TIMING input when the “Accumulation cycle” in the data
storage is set to TIMING synchronization in the common settings.
yyIf the RESET input is switched ON while the TIMING input is ON, the measurement value will remain in the output
waiting status until the TIMING input is switched OFF.
yyOff delay time can be set for the judgment output. “Off-delay time” (page 5-96)
10 yyThe TIMING input, RESET input, and ZERO input can be controlled from RS-232C, LS-Navigator2, or the display
panel.
Timing Chart


Auto peak hold/Auto bottom hold/Auto peak to Peak hold
Hold mode Measurement value

Auto peak hold Calculates the maximum value of the measurement data.
Auto bottom hold Calculates the minimum value of the measurement data.
Calculates the maximum minus the minimum values of the
Auto peak to Peak hold
measurement data.
Measurement value ex) Auto Peak hold

Output waiting
ON
TIMING Input OFF
RESET
ON
RESET Input/ZERO Input OFF
ON
Judgement Output OFF Judgement Judgement
ON
WAITING Output OFF
ON
STROBE Output OFF

Measurement value
yyPeak (Bottom/Peak to Peak) will be updated continuously.
10
yyWhen the TIMING input turns ON, the last measurement value will be held.
yyIn the following cases, the measurement value will remain in the output waiting status until it is confirmed:
yyWhen the power is switched ON / When the setting is modified / When the program No. is changed
yyWhen RESET is input / When ZERO is input
Timing Chart
yyThe TIMING input, RESET input, and ZERO input can be entered from RS-232C, LS-Navigator2, or the display
panel.


Peak hold/Bottom hold/Peak to Peak hold/Average hold (Hold 1)
The measurement will be performed for the duration specified by the external TIMING input (sampling cycle). The
measurement values will then be displayed/output.

Peak hold Calculates the maximum value during the sampling cycle.
Bottom hold Calculates the minimum value during the sampling cycle.
Calculates the maximum minus the minimum values during the
Peak to Peak hold
sampling cycle.
Average hold Calculates the average value during the sampling cycle.
Measurement value ex) Peak hold
Output waiting
t
Sampling Sampling Sampling
Cycle Sampling Cycle Sampling Cycle Cycle Cycle
ON
TIMING Input
OFF
RESET
ON
RESET Input
OFF
ON
Judgement Output Judgement Judgement Judgement
OFF
WAITING Output ON
OFF
10
ON
STROBE Output
OFF

Timing Chart
Measurement value Measurement value Measurement value
yyThe sampling cycle will be from the rising of the TIMING input to the rising of the next TIMING input.
yyWhen the TIMING input rises, the peak of the last sampling cycle (Bottom/Peak to Peak/Average) will be output.
panel.



Peak to Peak hold
sampling cycle.
ex) Peak hold

Measurement value
Output waiting
t
Cycle Sampling Cycle Sampling Cycle Cycle Cycle
ON
TIMING Input OFF
RESET
ON
RESET Input
OFF
Judgement Output ON Judgement Judgement Judgement

OFF
ON
WAITING Output
OFF
10
ON
STROBE Output
OFF
Timing Chart
yyThe sampling cycle will be from the falling of the TIMING input to the rising of the next TIMING input.
yyWhen the TIMING input rises, the peak of the last sampling cycle (/Bottom/Peak to Peak/Average) will be output.
panel.



Peak to Peak hold
sampling cycle.
Measurement value
Output waiting
t
Sampling Cycle Sampling Cycle
ON
TIMING Input
OFF
RESET
RESET Input ON
OFF

OFF
WAITING Output ON
OFF
ON
10
STROBE Output
OFF

Timing Chart
yyThe sampling cycle will always be active except while the TIMING input is ON.
yyWhen the TIMING input rises, the peak of the last sampling cycle (/Bottom/Peak to Peak/Average) will be output.
panel.


Sample hold (Hold 1)
The measurement value at the instant specified by the external TIMING input will be displayed/output.
Output waiting
Measurement value
ON
TIMING Input
OFF
RESET Input ON
OFF

OFF
WAITING Output ON
OFF
STROBE Output ON
OFF

yyWhen the TIMING input rises, the measurement value at that instant will be output.
10
Timing Chart
panel.


The measurement will start from the instant specified by the external TIMING input; and the first confirmed
measurement value will be displayed/output.
Measurement value
Output waiting
t
Cycle Cycle Cycle
TIMING Input ON
OFF
ON
RESET Input OFF

OFF
ON
WAITING Output
OFF
STROBE Output ON
OFF

yyThe measurement value will be output by sampling the sampling cycle and measurement value from the rising point
of the TIMING signal.
yyThe sampling cycle will be determined by the filter setting. “Filter” (page 5-38)
10 yyThe ON status of each output refers to the status in which the NPN/PNP open collector output is ON.
Timing Chart
panel.


Self timing hold
The measurement will be triggered by the insertion of a target item into the measurement range. The measurement
values will then be displayed/output.
Eject the target
Insert the target object object Insert the target object
Output waiting
No Internal
No Internal Internal measurement t
measurement value measurement value value Internal measurement value
Sampling Sampling
ST Time Cycle ST Time Cycle
RESET Input ON
OFF
Judgement Output ON Judgement Judgement

OFF
WAITING Output ON
OFF
ON
STROBE Output
OFF

Measurement value Measurement value
10
yyThe measurement will be triggered by the change from “Internal measurement value" to “No internal measurement
Timing Chart
value" which occurs when the target item is inserted. Subsequently, the measurement values for the averaging count
specified after the set self timing (ST) time will be sampled. The final result will then be held and output.
panel.

I/O details
I/O details

Normal mode, Auto peak hold/Auto bottom hold/Auto peak to Peak hold
T1 *1
Measurement value Output

Judgement Output Hold waiting Hold
Analog Output
T2 *2 T8+T1
T3 T3
ON
STROBE1/STROBE2 Output
OFF
T5
ON
WAITING Output
OFF
T7 T7
T4 T4 T4
ON T6
TIMING1/TIMING2 input
OFF
T4
ZERO1/ZERO2 ON
RESET1/RESET2 input OFF
T9
T25 T25
ON
P1 to P4
OFF
*1: The measurement value will be held at the value updated after the input response delay time T7 has elapsed after
the TIMING signal input.
*2: Depends on the STROBE output status when the ZERO1/ZERO2/RESET1/RESET2 signal is input.
When the STROBE signal is ON: Holds the value between T3s.
When the STROBE signal is OFF: Maintains the OFF status.
T1: Simple average: Sampling frequency x Averaging count
Moving average: Sampling frequency
T2: Max 30µs
T3: ‌T1-T2 (When T1-T2 < [Strobe time])
10 [Strobe time] (T1-T2 ≥ [Strobe time])

T4: Min 500µs
T5: [Sampling frequency] × ([Averaging times]-1)
Timing Chart
T6: Max 2 ms (When CB-EP100 or CB-PN100 is connected: Max 4 ms)

T7: Max 2 ms
T8: 200 ms+200 × [No. of head connections] ms
T9: Max 60 ms
T25: 1 ms

I/O details

Normal mode, Auto peak hold/Auto bottom hold/Auto peak to Peak hold (Hold 1 to Hold 3)
Measurement value Output Output
Judgement Output waiting waiting
Analog Output
T2 T3 T8+T1
STROBE1/STROBE2 Output ON
OFF
T5
WAITING Output ON
OFF
T7 T7 T7 T7
TIMING1/TIMING2 input ON
OFF
Sampling Cycle Sampling Cycle
HOLD 1
Sampling Sampling
HOLD 2 Cycle Cycle
Sampling Sampling Sampling Sampling Sampling Sampling
HOLD 3 Cycle Cycle Cycle T6 Cycle Cycle Cycle
T4
ZERO1/ZERO2 ON
T9
T25 T25
ON
P1 to P4
OFF
yyThe RESET signal will be enabled regardless of the TIMING ON/OFF status.
*1: The measurement value will be held at the value updated after the input response delay time T7 has elapsed after
the TIMING signal input.
*2: Varies depending on the STROBE output status when the ZERO1/ZERO2/RESET1/RESET2 signal is input.
When the STROBE signal is ON: Holds the value between T3s.
When the STROBE signal is OFF: Maintains the OFF status.
T2: Max 30 μs
[Strobe time] (T1-T2 ≥ [Strobe time])
T4: Min 500 μs
T7: Max 2 ms
10
Timing Chart
T9: Max 60 ms
T25: 1 ms

I/O details

T1 T5+T1 T8+T1
Measurement value
Judgement Output Output waiting Output waiting
Analog Output
T2 T3 T2
ON
STROBE1/STROBE2 output
OFF
ON
WAITING Output
OFF
T7 T7
ON T6
OFF
T4
ZERO1/ZERO2 ON
MAXT9
T25 T25
ON
P1 to P4
OFF

T2: Max 30 μs
10
T4: Min 500 μs
T7: Max 2 ms
Timing Chart

T9: Max 60 ms
T25: 1 ms

I/O details

*1 *2
T5 T5 T5 T8
Measurement value
Analog Output
T2 T3 T2 T3
ON
STROBE1/STROBE2 input
OFF
ON
WAITING Output
OFF
T7 T7
T6
ON
OFF
T4
ZERO1/ZERO2 ON
T9
T25 T25
ON
P1 to P4
OFF
*1: The TIMING input will be accepted after the RESET time has elapsed.
*2: The TIMING input will be accepted after the program switching time has elapsed.
T2: Max 30 μs
T4: Min 500 μs
10
T7: Max 2 ms
Timing Chart
T9: Max 60 ms
T25: 1 ms

I/O details

Self timing hold
*1
T5 T8
Measurement value
Analog Output
T2 T3
ON
STROBE1/STROBE2 output
OFF
ON
WAITING Output
OFF
Sampling Sampling
T10 T11 Cycle T10 T11 Cycle
With
With/Without Target
Without
T6
T4
ZERO1/ZERO2 ON
MAXT9
T25 T25
ON
P1 to P4
OFF
*1: The TIMING input will be accepted after the RESET time has elapsed.
T2: Max 30 μs
T4: Min 500 μs
T7: Max 2 ms
T8: 200 ms+200 × [No. of head connections]ms
10
T9: Max 60 ms
T10: 2 ms
T11: Self timing period
T25: 1 ms
Timing Chart

I/O details

Encoder input
zz
Encoder minimum input time (Single-phase [1-phase 1 TM])
MinT12
MinT13 MinT13
ON
Phase A/Phase B/ Phase Z
OFF
zz
Encoder minimum input time (2-phase n TM)
MinT14
ON
Phase A
OFF
ON
Phase B/Phase Z
OFF
MinT15 MinT15 MinT15 MinT15
T12: Encoder shortest cycle (Single-phase) 312.5 ns

T13: Minimum input time (Single-phase) 135 ns
T14: Encoder shortest cycle (2-phase n TM) 625 ns
T15: Encoder minimum input time (2-phase n TM) 125 ns
zz
Pulse count for 1-phase 1 TM (no dir.)
Counts the rising of phase A.
ON
10
Phase A
OFF
Timing Chart
Count Value
0 1 2 3 4 5

I/O details
zz
Pulse count for 2-phase 1 TM
When phase B is OFF, the count value will be incremented by the rising of phase A.
When phase B is OFF, the count value will be decremented by the falling of phase A.
ON
Phase A
OFF
ON
Phase B
OFF
Count Value 0 1 2 3 4 3 2 1 0
zz
When phase B is ON, the count value will be decremented by the rising of phase A.
When phase B is ON, the count value will be incremented by the falling of phase A.
ON
Phase A
OFF
ON
Phase B
OFF
Count Value 0 1 2 3 4 5 6 7 8 7 6 5 4 3 2 1 0
zz
When phase B is ON, the count value will be decremented by the rising of phase A.
10 When phase B is ON, the count value will be incremented by the falling of phase A.
When phase A is ON, the count value will be incremented by the rising of phase B.
When phase A is ON, the count value will be decremented by the falling of phase B.
Timing Chart
When phase A is OFF, the count value will be decremented by the rising of phase B.
When phase A is OFF, the count value will be incremented by the falling of phase B.
ON
Phase A
OFF
ON
Phase B
OFF
Count Value 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0

I/O details
zz
Phase Z input
Rising
Count input
falling
ON
Phase Z input
OFF
[Preset mode]
count maximum value
=4294967295
Count Value
[Preset mode]
count value
[ZERO reset mode]

count maximum value
=4294967295
Count value

Encoder TIMING input (Pulse frequency error)
Sampling : 3 times
Input Pulse count
T1
Input Encoder TIMING

10
Timing Chart
ON
TIMING
(Internal signal)
OFF
ON
STATUS 1/STATUS 2
(Pulse frequency error)
OFF *1
The TIMING input will become ON when the “Skipping” count setting pulse in the encoder setting is input.
*1: If the encoder TIM is put ON multiple times within a sampling frequency. it will be treated as the pulse frequency
error; and the corresponding status signal will be output. (If the status output for the pulse frequency error is set)
The off-delay is disabled.
T1: Sampling frequency

I/O details

T1
Measurement value
Judgement Output Hold Hold Hold
Analog Output
T2 T3
STROBE1/STROBE2 output ON
OFF
T7 T7 T7 T7 T7
ON
OFF
ON
SDO1/SDO2 input
OFF T4 T4
T4 T4
T9 T9 T4 T4
ON
SCLR1/SCLR2 input OFF T9
*1 T9 T9
STATUS1/STATUS2 output ON
(Stat processing) OFF
Statistic values
*1: The statistics processing will end one the specified number of statistics processing data have been accumulated.
The SCLR input will only be accepted while the SDO terminal is OFF.
T2: Max 30 μs
T4: Min 500 μs
T7: Max 2 ms
T9: Max 60 ms

Total judgement output
*1 T21
ON
10
OUT1 GO
OFF
ON
OUT2 GO
Timing Chart
OFF
*1 T21 *1 T21
ON
OUT3 GO
OFF
*1 T21
Total judgement output ON
Go OFF
yyThe overall judgment will be output based on the judgment result of each OUT before the off delay.
*1: When the off delay is set
T21: When the off delay is set “Off-delay time” (page 5-96)

I/O details

Data storage (Sampling frequency synchronization)
Sampling frequency Storage target Storage target Storage target

Measurement value
Judgement Output
Analog Output
T2 T3
STROBE1/STROBE2 ON
Output OFF
T7 T7
T7
T4 T4
ON
STEN input
OFF
*1
ON
MEM_FULL Output
OFF
T9
ON *2
STR_CLEAR input
OFF
T7
*1: The accumulation will stop while the MEM_FULL signal in ON, regardless of the input status of the STEN terminal.
*2: The accumulation will be started if the STEN terminal is ON at the timing when the internal memory has been
cleared.
- The measurement values will accumulated for each multiple of the accumulation cycle.
- The STR_CLEAR signal will be accepted in the following cases:
- When the STEN signal is OFF
- When MEM_FULL is ON
T2: Max 30 μs
T4: Min 500 μs
T7: Max 2 ms
T9: Max 60 ms
10
Timing Chart

I/O details

Data storage (TIMING synchronization/Storage trigger synchronization)
Sampling frequency Storage object Storage object Storage object

Measurement value
Judgement Output
Analog Output
T2 T3 Storage Storage
STROBE1/STROBE2 ON
Output OFF
T7 T7 T7
T4 T4
ON
STEN input
OFF
*1
MEM_FULL output ON
OFF T9
T4 T4
ON *2
STR_CLEAR input
OFF
T7
T7
T4 T4
TIMING1/TIMING2/ ON
STR_TRG input OFF
yyThe STR_CLEAR signal will be accepted in the following cases:

yyWhen the STEN signal is OFF
yyWhen MEM_FULL is ON
*1: The accumulation will stop while the MEM_FULL signal in ON, regardless of the input status of the STEN terminal.
*2: The accumulation will be started if the STEN terminal is ON at the timing when the internal memory has been
cleared.
T2: Max 30 μs
T4: Min 500 μs
T7: Max 2 ms
T9: Max 60 ms
10
Timing Chart

I/O details

Group calculation
Group A
T1
OUT n measurement value
Hold (1) Hold (n)
(Group calculation object)
OUT16 (Group
calculation Output) Group A calculation output
T2 T3
ON
STROBE Output
OFF
T2 T3
STROBE Output ON
(STROBE of OUT16) OFF
T7
T4 T4
TIMING1/TIMING2 input ON
OFF
T6
T4
ZERO1/ZERO2 ON

T2: Max 30 μs
T4: Min 500 μs
T7: Max 60 ms
10
Timing Chart

I/O details

BCD unit
(Example: For OUT1, OUT2 normal output)
Controller T1 T1
OUT1
Measurement value 1-1 1-2 1-3 1-4 1-5 1-6 1-7
Judgement output
Analog output
(Controller output) T2 T3 T2 T3
STROBE1 output ON
OFF
OUT2 T1’
Measurement value
Judgement output 2-1 2-2
Analog output
(Controller output) T2 T3
STROBE2 output ON
OFF
BCD
OUT-1 OUT-2 OUT-1
IN_NUM input
T24 T2
T24
OUT number
OUT-1 OUT-2 OUT-1
(BCD output)
OUTn
1-1 1-2 2-1 2-2 1-6 1-7
Measurement value/
Binary/Judgement output T2 T2 T2
(BCD output)
T22 T23 T22 T23 T22 T23 T2
OUTn_BCD_STROBE *1 *2
ON
OFF
*1: If the switching timing of the OUT number overlaps with the strobe update timing, the strobe time will be T23 or
less.
10 *2: STROBE does not become ON until OUT is updated after the switching.
When loading the measurement value immediately after the switching without using STROBE, wait at least
(T24+T2) after the IN_NUM input before you load the value.
yySwitching of OUTs using the IN_NUM input is only possible when the OUT selection method has been set to “BCD
Timing Chart
unit terminal”.
Read “OUT selection method” (page 5-99) for details.
yySwitching of OUT using the IN_NUM input is not possible when the output function has been set to “Judgment
output”.
You can set the corresponding relationships between the STROBE signal outputs from STROBE 1 to 4 and the
OUTs using the display panel or LS-Navigator2.
Read “Output selection function” (page 5-99) for details.
yyT23 (BCD strobe time) can be set independently of T3 (Strobe time).
Read “BCD strobe time” (page 5-99) for details.
T1: Simple average: Sampling frequency x Averaging count Moving average: Sampling frequency
T2: Max 30µs
T3: T1-T2 (When T1-T2 < [Strobe time])
[Strobe time] (When T1-T2 ≥ [Strobe time])
T22: Max 60µs
T23: T1-T2 (When T1-T2 < [BCD strobe time])
[BCD strobe time] (When T1-T2 ≥ [BCD strobe time])
T24: 2 ms

I/O details

Sampling frequency
units : μs
Mutual interference prevention setting
No. of used OUTs
OFF AB-ON ABC-ON
1 to 4 62.5 125 187.5
5 to 12 125 125 187.5
13 to 16 187.5 250 187.5
10
Timing Chart

I/O details
MEMO
10
Timing Chart

11
This chapter describes the specifications, characteristics
and dimensions of the LS-9000 Series.
Specifications
Specifications.......................................................... 11-2
Characteristics...................................................... 11-14
State Table.............................................................. 11-20
Dimensions............................................................ 11-23

Specifications
Specifications
Controller
Model LS-9501 LS-9501P

No. of connected heads Up to 2 units
Head compatibility Available
Minimum display unit 0.01 μm
Display Maximum display unit ±99999.99 μm ~ ±9999.9 mm
LED display POWER ON indicator, ERROR indicator
NPN open collector output / PNP open collector output (5 V/12 V/24 V),
Encoder input
line driver output
Timing 1, 2 input
Auto zero 1, 2 input
Reset 1, 2 input
Input
terminal Storage trigger input
Non-voltage input Voltage input
block Storage enable input
Storage data clear input
Statistics 1, 2 input
Statistics clear 1, 2 input
Program switching input Non-voltage input x 4 inputs Voltage input x 4 inputs
Analog voltage output ±10 V × 2 outputs; Output impedance 100 Ω
Analog current output 4 to 20 mA x 2 outputs Maximum matched load 350 Ω
NPN open collector output x 10 PNP open collector output x 10
General-purpose output (Tolerance judgment output can be (Tolerance judgment output can be
allocated) allocated)
Output
terminal Status 1, 2 output
Total judgment output
NPN open collector output PNP open collector output
Memory FULL output
Strobe 1, 2 output
11 Error output
Ethernet interface
NPN open collector output (N.C.) PNP open collector output (N.C.)
1000BASE-T / 100BASE-TX
Specifications
USB interface USB2.0 HI-SPEED supported (USB1.1 Full-SPEED compatible)

Measurement data output; Control I/O; Setting change
RS-232C Interface
(Baud rate setting up to 115200 bit/s can be selected)
Dedicated display panel interface Up to 4 LS-D1000 units are connectable
Power supply voltage 24 V DC ±10% Incl. ripple (P-P)
When LS-HA100 is not used : One head: 1.0 A or less
Rating Maximum current Two heads: 1.4 A or less
consumption*1 When LS-HA100 is used : Three heads: 2.0 A or less
Four heads: 2.3 A or less

Specifications
Model LS-9501 LS-9501P

Operating ambient When LS-HA100 is not used : 0 to +50 ºC
Environment temperature When LS-HA100 is used : 0 to +45 ºC
resistance Operating ambient
20 to 85% RH (No condensation)
humidity
Weight Approx. 1500 g
- The rating of the NPN open collector output is max. 50 mA (40 V or less) and 1 V or less residual voltage.
- The rating of the PNP open collector output is max. 50 mA (30 V or less) and 1 V or less residual voltage.
- The rating of the non-voltage input is ON voltage 1V or less and OFF current 0.6 mA or less.
- Thee rating of the voltage input is maximum input voltage 26.4 V, minimum ON voltage 10.8 V, and OFF current 0.6
mA or less.
* 1: ‌When connecting display panels or expansion units, add the current consumption for each of those devices.
When connecting LS-9006D or LS-9030D, it will be counted as 2 units.
11
Specifications

Specifications
Head

LS-9006M/LS-9006/LS-9030M/LS-9030/LS-9120M
LS-9006M LS-9006 LS-9030M LS-9030

Model
(with monitor) (without monitor) (with monitor) (without monitor)
Measurement range 0.04 mm (0.01 mm) to 6 mm 0.3 mm (0.08 mm) to 30 mm
Minimum object
0.04 mm (0.01 mm) 0.3 mm (0.08 mm)
sensitivity
Distance between
the transmitter and 60 ± 5 mm 160 ± 40 mm
receiver
Repeatability ± 0.03 µm*1 ± 0.1 µm*2
Measurement accuracy ± 0.5 µm*4 ± 2 µm*5
Sampling frequency*9 16000 times/sec
Detection
4 mm × 5 mm 20 mm × 24 mm
Detection range
of emitting Minimum
and object 0.04 mm 0.3 mm
receiving sensitivity
light Repeatability ± 0.02 mm*7 ± 0.2 mm*8
directions Sampling
4000 times/sec
frequency
Light source InGaN green LED
Monitor function Available Unavailable Available Unavailable
Operating
ambient 0 to + 50 ºC
temperature
Operating
ambient 20 to 85% RH (No condensation)
Environment humidity
resistance Ambient
Incandescent lamp/Fluorescent lamp: 3000 lx or less
luminance
Vibration
10 to 55 Hz, double amplitude 1.5 mm; 2 hrs in X, Y and Z directions
resistance
11
Impact
15 G/6 ms
resistance
Protective structure IP 67 (including the connector part)
Specifications
Material Aluminum
Transmitter: Transmitter: Transmitter: Transmitter:
Approx. 130 g Approx. 130 g Approx. 440 g Approx. 440 g
Weight
Receiver: Approx. 300 g Receiver: Approx. 280 g Receiver: Approx. 500 g Receiver: Approx. 440 g
Base: Approx. 180 g Base: Approx. 180 g Base: Approx. 430 g Base: Approx. 430 g
The values in the brackets ( ) are for cases where ultrafine mode was used for measuring. For details on the accuracy
of ultrafine mode, contact us.
*1: A ± 2σ margin of error when measuring φ1.0 mm round bars in the center of the measurement area using outer
diameter mode with the average measurement number set as 2048 times.
*2: A ± 2σ margin of error when measuring φ10 mm round bars in the center of the measurement area using outer
*3: A ± 2σ margin of error when measuring φ40 mm round bars in the center of the measurement area using outer
*4: Margin of error when a moving φ1.0 mm round bar is measured in the 2 mm × 4 mm measurement area using outer
diameter mode.
*5: Margin of error when a moving φ10 mm round bar is measured in the 10 mm × 20 mm measurement area using
outer diameter mode.
*6: Margin of error when a moving φ40 mm round bar is measured in the 40 mm × 120 mm measurement area using
outer diameter mode.

Specifications
LS-9120M
0.8 mm to 120 mm
0.8 mm
400 ± 100 mm
± 0.3 µm*3
± 8.0 µm*6
16000 times/sec
InGaN green LED

Available
0 to + 50 ºC
Incandescent lamp/Fluorescent lamp: 3000 lx or less
10 to 55 Hz, double amplitude 1.5 mm;

2 hrs in X, Y and Z directions
15 G/6 ms
IP 67 (including the connector part)

11
Specifications
Aluminum
Transmitter: Approx. 1,800 g

Receiver: Approx. 2,800 g
Base: Approx. 1,600 g
*7: A ± 2σ margin of error when measuring the outer diameter of φ1.0 round bars in the center of the measurement
area with the average measurement number set as 512 times.
*8: A ± 2σ margin of error when measuring the outer diameter of φ10 round bars in the center of the measurement area
with the average measurement number set as 512 times.
*9: The sampling frequency will vary according to the number of OUTs that have been set and the use of the mutual
interference prevention function.
See "OUT setting" (page 5-34), "Interference prevention function" (page 5-73) for details.

Specifications

LS-9006D/LS-9030D
Model LS-9006D LS-9030D

Measurement range 0.04 mm to 6 mm 0.3 mm to 30 mm
Minimum object sensitivity 0.04 mm 0.3 mm
Repeatability ± 0.03 µm*1 ± 0.1 µm*2
Measurement accuracy ± 0.5 µm*3 ± 2 µm*4
Sampling frequency*5 16000 times/sec
Light source InGaN green LED
Monitor function Unavailable
Operating ambient
0 to + 50 ºC
temperature
Operating ambient
Environment humidity
resistance
Ambient luminance Incandescent lamp/Fluorescent lamp: 3000 lx or less
Vibration resistance 10 to 55 Hz, double amplitude 1.5 mm; 2 hrs in X, Y and Z directions
Impact resistance 15 G/6 ms
Protective structure IP 67 (including the connector part)
Material Aluminum
Weight Approx. 4,800 g Approx. 9,000 g
*1: A ± 2σ margin of error when measuring the outer diameter of φ1.0 mm round bars in the center of the measurement
*2: A ± 2σ margin of error when measuring the outer diameter of φ10 mm round bars in the center of the measurement
*3: Margin of error when a moving φ1.0 mm round bar is measured in the 2 mm × 2 mm measurement area.
*4: Margin of error when a moving φ10 mm round bar is measured in the 10 mm × 10 mm measurement area.
*5: The sampling frequency will vary according to the number of OUTs that have been set and the use of the mutual
interference prevention function.
See "OUT setting" (page 5-34), "Interference prevention function" (page 5-73) for details.
11
Specifications

Specifications
Head expansion unit
Model LS-HA100
No. of connected heads 2 units (Each unit of LS-9006D and LS-9030D equal to 2 units.)
Head compatibility Available
LED display POWER ON indicator, ERROR indicator
Analog voltage output ±10 V × 2 outputs; Output impedance 100 Ω
Analog current output 4 to 20 mA x 2 outputs Maximum matched load 350 Ω
Power supply Supplied from the controller
Operating
ambient 0 to +45 ºC
Environment temperature
resistance
Operating
ambient humidity
BCD unit
Model CB-BD100
LED display POWER-ON LED
BCD output *1
NPN open collector output x 4 channels
STROBE output NPN open collector output x 4 channels
Output terminal
OUT selection
NPN open collector output x 4 channels
output
OUT selection
Input terminal Non-voltage input x 4 inputs
input
Maximum current
Rating 0.16 A or less
consumption
Environment
Operating
ambient 0 to +50 ºC 11
temperature
Specifications
resistance
Operating
ambient humidity
Weight 800g
yyOnly one unit of this product can be connected per controller.

yyRated NPN open collector output: Max. 30 mA (30 V or less), Residual voltage 0.5 V or less
yyRated non-voltage input: ON voltage 1 V, OFF current 0.6 mA or less
* 1: ‌You can select from "BCD output" (29-bit, signed), "Binary output" (25-bit; negative value = a complement
representation of 2), or "Judgment output".

Specifications
Name EtherNet/IP communication unit

Model CB-EP100
EtherNet/IP and displacement meter specific protocol
Compatible network
(Socket communication)
IEEE802.3 (10BASE-T)
Compatible standard
IEEE802.3u (100BASE-TX)
10Mbps (10BASE-T)
Transmission rate
100Mbps (100BASE-TX)
EtherNet Transmission STP, or UTP in category 3 or higher (10BASE-T)
medium STP, or UTP in category 5 or higher (100BASE-TX)
Max. cable length 100m (between the controller and EtherNet switch)
Max. number of 4 (10BASE-T)
connection stages*1 2 (100BASE-TX)
Cyclic communication (Implicit message)
Supported functions
Message communication (Explicit message), UCMM and Class3
Number of
64
connections
RPI 0.5 to 10000ms (by 0.5ms)
EtherNet/IP
Cyclic
communication 6000pps
allowable bandwidth
Message
UCMM and Class3
communication
Conformance test Version.A9 compatible
Connection LJ-V7000 series controller

Connectable units*2
of LS-9000 series controller
measuring Number of
unit 1
connectable units
11
Link/Activity (LINK/ACT): Green LED
Indicators Module status (MS): Two-color LED (Green/Red)
Network status (NS): Two-color LED (Green/Red)
DC24V ± 10%, ripple (P-P) included
Specifications
Power supply voltage

(supplied from the measuring unit controller)
Maximum current consumption 0.12A or less
Operating ambient
0 to +50°C
Environment temperature
resistance Operating ambient
20 to 85 % RH (No dew condensation)
humidity
Mass Approx. 470 g
*1: When a switching hub is used, the number of units to be connected has no restriction.
*2: The software of the controller must be Ver.3.00 or later.

Specifications
Name PROFINET communication unit

Model CB-PN100
Compatible network PROFINET IO communication
Compatible standard IEEE 802.3u*1
Transmission rate 100Mbps full duplex (100BASE-TX)
EtherNet Transmission
STP, or UTP cable in category 5e or higher
medium
Max. cable length 100m
Data I/O communication
Supported functions
Record data communication
Number of
connectable
1
PROFINET IO
controller
PROFINET Update Time 2ms to 2048ms
IO
GSDML Version V2.25
Conformance class Conformance Class A compatible
Conformance test
V2.2.4 compatible
version
Compatible
LLDP, DCP
protocols
Connection LJ-V7000 series controller

Connectable units*2
of LS-9000 series controller
measuring Number of
unit 1
connectable units
LINK/ACTIVITY indicator(LINK/ACT): Green LED
Indicators System Failure indicator(SF): Red LED
Bus Failure indicator(BF): Red LED
Power supply voltage
Maximum current consumption
24V ± 10% (supplied from the measuring unit controller)
0.12A or less
11
Specifications
Mass Approx. 170 g
*1:This machine supports IEEE 802.3u, and it is available to establish the 100Mbps full duplex communication with
AutoNegotiation function, but the AutoCrossOver function and AutoPolaroty function usually-needed for PROFINET
IO specification are not bundled. Select and connect the straight cable and crossing cable to suit to the connecting
Ethernet port.
*2:The software of the controller must be Ver.3.00 or later.

Specifications
Display panel
Model LS-D1000
Measurement value display: 2-color, 8 digits, 16SEG display
Measurement OUT number display: Single color, 2 digits, 7SEG display
value display part Tolerance judgment display: HH, HI, GO, LO, LL, Single-color display
Status output display: TIM, ZERO indicator, Single-color display
Program No.
Display interface Single color, 2 digits, 7SEG display
display part
Position monitor One-dimensional display: 2-color, 32-level display
display part Two-dimensional display: Single color, 7 x 7 matrix display
Display update
5 times/sec
cycle
Numeric keys, Function keys, Lock key, Timing input key, Zero input key,
Operation input interface part
Reset input key, Enter key, ESC key, Arrow keys ( x 4)
Dedicated display panel connection
2
port
Maximum current
Rating 0.19 A or less
consumption
Operating
temperature 0 to +50 ºC
Environment range
resistance
Operating
humidity range
Protection structure IP65 (During panel mounting; Front part only)
11
Specifications

Specifications
Cable
Head cable/Extension cable

Model CB-B3 CB-B10 CB-B5E CB-B10E CB-B20E
Cable type Head cable Extension cable
Cable length 3m 10 m 5m 10 m 20 m
Minimum bend R 22 mm
Protection structure *1
IP67 (IEC60529)
Material (External coat) PVC
Weight Approx. 250 g Approx. 750 g Approx. 400 g Approx. 800 g Approx. 1500 g
*1: This is only applicable when connected to the sensor head. However, the connector part on the controller side is
not included.
Extension of the cable: There should be a maximum of two CB-B*E connections, and the total length
should be kept under 30 m.
The cabling can be extended up to 40 m using the 40m connecting unit for cable extension CB-BR01.
Extension cable between the transmitter and receiver

Model OP-87686 OP-87687
Cable length 1m 3m
Protection structure*1 IP67 (IEC60529)
Weight Approx. 60 g Approx. 130 g
*1: This is only applicable when both T and R sides are connected.
Dedicated display panel cable 11

Model OP-87602 OP-87603 OP-87604 OP-87605
Specifications
Cable length 2m 5m 10 m 20 m
Protection structure Nothing
Weight Approx. 150 g Approx. 350 g Approx. 700 g Approx. 1400 g

Specifications
LS-H2 (LS-Navigator2) operating system environment
Item Required environment

Windows 10*1
Windows 7 (SP1 or later)*2
Supported OS
Windows Vista (SP2 or later)*3
Windows XP (SP3 or later)*4
Supported languages Japanese, English, German, Chinese (Simplified), Chinese (Traditional)
CPU Core2Duo 2 GHz or higher
Memory capacity 2 GB or more
L2 cache memory 2 MB or more
Free hard disk space 10 GB or more
Display resolution XGA (1024×768 pixels) or higher, 256 colors or more
USB USB2.0 HI-SPEED supported (USB1.1 Full-SPEED compatible)*5
PC interface
Ethernet 1000BASE-T / 100BASE-TX*6
yy*1 : Compatible with each edition of Home, Pro, and Enterprise.

yy*2 : Supports all Editions of Home Premium, Professional and Ultimate.
yy*3 : Supports all Editions of Ultimate, Business, Home Premium and Home Basic.
yy*4 : Supports Home Edition and Professional Edition.
yy*5 : Connection via USB hub is not guaranteed.
yy*6 : Connections via LAN and router are not guaranteed.
11
Specifications

Specifications
Other options

Model CB-BR01
Function Communication expansion between the sensor head and controller
Operating ambient temperature 0 to +50 ºC
Operating ambient humidity 20 to 85% RH (No condensation)
Protection structure Nothing

Model OP-87609 OP-87684 OP-87749 OP-87750
Material Aluminum (Main unit), SUS (Pulley part)
Weight Approx. 100 g Approx. 150 g Approx. 300 g
Display panel stand

Model OP-87610
No. of mountable display panels 1
Material Steel

11
Model OP-87757
Specifications
No. of mountable display panels 1

Material SUS

Characteristics
Characteristics
Measurement range and accuracy

LS-9006/LS-9006M
Unit: mm
30 30±5
40
±0.5 µm
6
±1.5 µm

LS-9030/LS-9030M
Unit: mm
80 80±40
35.5
11 ±2 µm
Specifications
±5 µm
20
30
10
20

Characteristics

LS-9120M
Unit: mm
200 200±100
89
±8 µm
±16 µm
120
40
80
11
Specifications

Characteristics

LS-9006D
Unit: mm
Zero point*1
d
er a
iv he
ce is
re -ax
Y
X- ce
ax ive
re
is r
he
ad
180±0.5
89±0.5
4
X-axis measurement
area 6 2
±0.5 µm
±1.5 µm
Y-axis measurement
11 area 6 2
4
Specifications
*1: Zero point is the intersection of the optical center of each X and Y axis measurement range.

Characteristics

LS-9030D
Unit: mm
Zero point*1
d
er a
iv he
ce is
re -ax
Y
X- ce
200±0.5
ax ive
re
is r
he
ad
145±0.5
20
X-axis measurement
area 30 10
±2 µm
±5 µm
Y-axis measurement
area 30
10
20
11
Specifications

Characteristics
Temperature characteristics
The following shows the typical examples of the temperature characteristics.

LS-9006/LS-9006M/LS-9006D
Temperature 0 ºC 10 ºC 20 ºC 30 ºC 40 ºC 50 ºC
Drift -0.18 -0.06 0.00 0.08 0.12 0.19
Unit: μm
* When a φ1 round bar is measured in the center of the measurement area with the measurement target set to "Outer
diameter" (20 ºC as reference)

LS-9030/LS-9030M/LS-9030D
Drift 0.28 0.14 0.00 -0.07 -0.25 -0.4
Unit: μm

LS-9120M
Drift 8.0 4.0 0.0 -4.0 -8.0 -12.0
Unit: μm
11
Specifications

Characteristics
MEMO
11
Specifications

State Table
State Table
Display panel Output
Statuses Decision
Measurement
Decision SIG1 to 10 STRB GO FULL STA
value
(*2)
Test data output in
progress
(Forced output from
Measurement Judgment Depends on the test data output
terminal)
"Display Terminal value result
Status" (page 6-44)
Normal
HI (Reference
value mode)
+ Over-range +OVER HH
(Threshold
value mode)
LO Depends When Depends Depends
Overall
(Reference on the judgment on the on the
Measuring judgment
- Over-range - OVER value mode) measurement result is measurement measurement
result
LL (Threshold value updated (*4) (*5)
value mode)
Output
waiting
-------- All OFF
Calibration of received
light intensity in progress
Updating settings Hold Hold
Error
Error occurring
display
All OFF
At power ON (Starting) -------- OFF
11 *1 ○ and × in the table have the following meanings. ○: Valid, x: Invalid. [Invalid] means that the input will be ignored.
*2 The output content can be specified by the corresponding setting.
*3 It will be ±10.8 V if ±10.5 V is exceeded.
Specifications
*4 This output becomes ON when the number of data storage points reaches the storage points.
*5 The output content can be specified by the corresponding setting. "Status output" (page 5-98)
*6 Enabled when the output function is “BCD output” or “Binary output”. N.O. (OFF) for “Judgment output”.
*7 Enabled when the output function is “Judgment output”. N.O. (OFF) for “BCD output” or “Binary output”.
*8 Enabled when the output function is “BCD output” or “Binary output” AND the OUT selection method is “BCD unit
terminal”.

State Table
Output Input (*1)
Analog output TIM/RST/ STEN

ERROR (N.C) ZERO STCLEAR SDO SCLR
voltage P1 to P4 STTRG
Depends on the
Depends on the ○ ○ ○ ○ ○ ○
test data output
output value (*3)
+10.8 V ○
○ ○ ○ ○ ○
-10.8 V ○
ON
Depends on the
×
settings
(Auto zero
(0 V/±10.8 V/
can be
Hold the previous
cancelled)
value)
× × × × × ×
Hold × × × × × ×
× × × × × ×
Value undefined OFF

until measurement × × × × × ×
start
11
Specifications

State Table
Output Input
Statuses BINARY/ OUT number

Judgment output
BCD output STROBE OUT-NUM selection
HH to LL
value IN-NUM
Test data output in

progress
(Forced output from
Depends on the test data output ○ (*8)
terminal)
"Display Terminal
Status" (page 6-44)
Normal
+ Over-range
Depends on the
When judgment
Measurement measurement
Measuring result ○ (*6) ○ (*8)
- Over-range value (*6) value
is updated
(*7)
Judgment
standby
Calibration of received
×
light intensity in progress
Updating settings Hold ×
Error occurring ×
At power ON (Starting) Value undefined until measurement start ×
*6 Enabled when the output function is “BCD output” or “Binary output”. N.O. (OFF) for “Judgment output”.
11 *7 Enabled when the output function is “Judgment output”. N.O. (OFF) for “BCD output” or “Binary output”.
*8 Enabled when the output function is “BCD output” or “Binary output” AND the OUT selection method is “BCD unit
terminal”.
Specifications

Dimensions
Dimensions
The CAD data can be downloaded from the KEYENCE web site.
Web page URL: http: //www.keyence.co.jp/cad
Controller
88.8 (70) 153.5 Unit: mm
DIN rail
mounting
part
Minimum bend
178 R22
35.9
83.3
4xM4 Depth 6.6
60
14.4
80 16.5
11
Specifications

Dimensions
Sensor Head

LS-9006/LS-9006M
Unit: mm
12.5 12.5
2xM2.5 Effective 2xM2.5 Effective
depth 2.5 13 φ21.5 depth 2.5 13 φ21.5
4xM4 10 10 4x φ 4.5
24
24
Through-hole Through-hole
Measuring
head
25
16
18
Receiver (Front View) Transmitter (Front View)
8
Measuring
position
12.5±0.2
3.5
4x8 Spot facing
20 20 Depth 4.5
(227)
124.5 *1(17.5) *1(23) 32 Measuring area

4(2) *2 8
2.5
R
22
6(5)*2
56
48
46
56
40±0.2
4
18
(85) (30)
3x φ 4 4 (60) 2x φ 4
(Mounting hole) 38.5 32.5 38 3.5 (Mounting hole)
Code length 400 mm 115 78 25
*1 : When mounting air purge unit

Base 24 *2 : The () value is when it is in the
ultrafine mode
3.5
18
2xM4 130 40 2xM4

Through-hole 157 70 Through-hole
When removing the TR base

12.5
15.5
2xM4 104 42.5 47 18 2xM4

Effective depth 2.5 Effective depth 2.5
11
Specifications

Dimensions

LS-9030/LS-9030M
Unit: mm
2xM3 2xM3
Effective Effective
depth 3 depth 3
15 15 4xM4
Effective depth 10
Measuring
55
55
head
38.3
26
8
8
26±0.2
Measuring
position
6
26 55 55 4xφ 4 .5 Through-hole 26
Receiver head (front) φ 8 Spot facing 4.5 Transmitter head (front)
*2(34) 109 *1(12) *1(12) 118.5

Measuring
20 area
30(24)*3
71.5
71.5
60
35.5±0.2
60
R2
2
19.5
5.5
5.5
80 Code length 520 mm
(85) 50 27 160 27 50
3x φ 5.5 3xφ5 .5
(Mounting hole) (Mounting hole)
*1 : When mounting the air purge unit

*2 : LS-9030M only
Base 38 *3 : The () value is when it is in the ultrafine mode
6
6
26
26
2xM4 135 135 2xM4
Through-hole 175 165 Through-hole
(48) 340 33.5
When removing the TR base

22
22
2xM4 38 113 113 38 2xM4

Effective depth 5 Effective depth 5
11
Specifications

Dimensions

LS-9120M
Unit: mm
4 x M3 4 x M3
Measuring
position 25 25
17±1
4 x M4
Effective depth 10
35
162
162
Measuring
150 150
head
55.6
4xφ 6.5 Through-hole

φ14 Spot facing 7
8
8
16 16
30.6 30.6
30 *1 30 *1
233 80 175
180
168
168
180
120
89±1
R22
6
6
59.2
20
200 Measuring area
3 x φ7.5 Code length 980 mm

400
Mounting hole 3 x φ7.5
145 15 15 125 Mounting hole
*1: When mounting the air purge unit
Base 55
4 x M6
288 272
Effective depth 10
35
10.3
11 (70.5) 706 (31.5)

Specifications
35
35
10.3
10.3
132 222 222 112

4 x M4 4 x M4

Dimensions

LS-9006D
Unit: mm
22.5
Measuring position
47
R22
)5
(8
Zero point *2
Air purge unit *1
10
M5 Effective depth 8
Screw for mounting fitting 4 x φ7
(Mounting hole)
316
93
180±0.5
147
87
(8
78 R22
5)
8 89±0.5
18 180
11
240
260
4 x M6
Effective depth 12
Specifications
17 24
24 134


Dimensions

LS-9030D
Unit: mm
36
Measuring position
62
Air purge unit *1

R22
)5
Zero point *2
(8
33.9
2 x M5 Effective depth 8

Screw for mounting fitting
4xφ7
(Mounting hole)
140
360
200±0.5
(8
5)
69.6 130
220.4 R22
13 145±0.5
20 255
316
330
4 x M6
Effective depth 12
11
40
13.5
Specifications
20 215


Dimensions
HMI Display panel

LS-D1000
168 Unit: mm
Panel thickness Mounting

18 147 bracket 75 4xM4
1.2 mm to 4.0 mm
Depth 8
Mounting screw
143.6
138 (Dimensions of 75
mounting bracket)
183 7.9 36.6
Panel cut dimensions

207
+1
169 0
+1
124 0
200
11
Specifications

Dimensions
Head expansion unit

LS-HA100
26.3 150.6 Unit: mm
DIN rail
mounting
part
Minimum
bend R22
153 35.9
83.3
6 (70)
2xM4 Depth 6.5
13.2
80 16.5
11
Specifications

Dimensions
BCD unit

CB-BD100
Unit: mm
51.8 13.2 150.6
DIN rail
153 35.9
79.6 83.3
6 4xM4
Depth 6.5
25.6
13.1
80 16.5
11
Specifications

Dimensions

26.3 150.6 Unit: mm
DIN rail mounting part
153 35.9
83.3
2xM4
Depth 6
13.2
80 16.5

26.3 150.6 Unit: mm
DIN rail mounting part
153 35.9
83.3
11 2xM4
Depth 6
Specifications
13.2
80 16.5

Dimensions

Cable between the controller and head CB-B3/CB-B10
41 Unit: mm
55
31 φ7.6
Cable length 3 m, 10 m 18
32 16.5
13

Head extension cable CB-B5E/CB-B10E/CB-B20E
Unit: mm
51 φ7.6 55
Cable length 5 m, 10 m, 20 m
14 18
16.5 16.5
CB-B cable side Sensor head side

Cable between the transmitter and receiver OP-87686 (1 m cable)/OP-87687 (3 m cable)
Unit: mm
φ 4 .8
Cable length 1 m, 3 m
12 10 12
11
6.7
Specifications
44.5 51

Dimensions

CB-BR01
112.6 Unit: mm
105
98
3.5
19 26
3.5 2xφ 3 .6
Through-hole
21
11 11.5
6 6

OP-87609 (For LS-9030)
2x φ 4.5 Unit: mm
Spot facing φ7.5, Depth 4.5
26
6
(13)
11 25.5 (19.5)
Specifications
100°
17 64
15 40
10.5 8
φ24
(35.3)
(38.3)
12.5
(16)
31.8
23.3
10.2 45 13
(55.2) 50

Dimensions

OP-87684 (For LS-9006)
2xφ 4 .5 Unit: mm
Spot facing φ7.5 Depth 4.5
2xφ10
16
18
3
4
(13)
12.5
(10) 22.5
32.5
100°
9 56
6 40
(10.5)
φ16
15.5
(26.5)
(41.9)
(44.9)
41.9
33.9
3
5 8
9.2 43 13
(52.2) 50

OP-87749 (For LS-9030D)
Unit: mm
27.5
11
(5.5)
100°
Specifications
96
17
36 40
15 φ 24
19 φ 24
4 x φ5.8
(97.8)
Spot facing φ11, Depth 13.5

85.8
77
16
7
24 7
38

Dimensions

OP-87750 (For LS-9006D)
Unit: mm
22.5
(3.5)
100°
9
88
6 φ16 φ16
23 54
18
4 x φ 5.4
(115)
106.9
108
Spot facing φ11,

Depth 20
20
8
20 8
36
Panel stand

OP-87610
Unit: mm
A
4
12
30° 175
5.5
180
11
12
30
.75
R2
82.5
Specifications
+1
169 0 42.5
244 118
5.5
175
φ1
12
6
35
7.5
(124)
50
5.5
82.5
8
35
1.7
R2
A
.75

Dimensions

OP-87757
Unit: mm
90 4 x φ 4.8
e)
le rang Mounting hole for
3 x φ 5.5 (Movab 75
35° LS-D1000
Mounting hole
74
52
75
90
26
11
(8)
nge)
vable ra
(Mo
35°
63
11
Specifications

Dimensions
MEMO
11
Specifications

Appendix
Measurement Conditions and Measurement Data

Flow........................................................................... A-2
LS-Navigator2 Saved File List................................. A-3
Transition diagram for the display panel operations
setting screen........................................................... A-4
Troubleshooting..................................................... A-15
Error Messages...................................................... A-18
Index........................................................................ A-23
Revision history..................................................... A-32
- LS-9000 Series User’s Manual - A-1

Measurement Conditions and Measurement Data Flow

Data Flow
Head processing
Head 1 measurement Head 2 measurement
Setting the target

Target 1 Target 2 Target 16
Median Median Median
Delay processing Delay processing …… Delay processing
Calibration Calibration Calibration
Measurement target calculation
OUT processing
OUT1 OUT2 OUT16
Scaling setting Scaling setting Scaling setting
Auto zero Auto zero Auto zero
Offset Offset Offset
Outlier exclusion Outlier exclusion Outlier exclusion
Abnormal value Abnormal value Abnormal value

……
cancellation cancellation cancellation
A Filter Filter Filter

Appendix
Difference Difference Difference
Hold mode Hold mode Hold mode
Tolerance judgment Tolerance judgment Tolerance judgment
Total judgement
Measurement value/Judgment output/Analog output/Statistics processing/Data storage
A-2 - LS-9000 Series User’s Manual -

LS-Navigator2 Saved File List
LS-Navigator2 Saved File List
Files Icons Extension Contents
This file contains the information of the device information

Device settings file .lsus
settings screen.
This file contains the information of the program settings

Program settings file .lsps
(16 settings in total).
This file contains the layout and display status of the main
Screen layout file .lswl
screen.
This file contains the stored data and the program setting
Data storage file .lsds
(1 setting) used for the data storage.
A
Appendix

Transition diagram for the display panel operations setting screen
Transition diagram for the display panel

operations setting screen
Use the [FUNC] + [0] keys to transit to the screen below.
HEAD HEAD1 to 4
Select head Target head setting
A-THR 2
A EDGE-THR A-THR 1
Setting threshold value
Edge detection threshold Setting threshold value 1
2
B MASK
Mask setting
B-0 DISABLE
Disable
B-M 2
B-1 ENABLE B-M1
Setting mask position
Enable Setting mask position M1
M2
C EDGE-CHK
Check No. of edges
C-0 DISABLE
Disable
C-1 ENABLE C-1-EDGE

Enable No. of edges setting
D FOCUS-M D-FOCUS
FOCUS monitor FOCUS monitor setting
(Continues)
A
Appendix

TARGET TARGET
Select measure Measure target setting
target (according to the settings of the measure target to use)
A-0 to 3
A HEAD
Select the measure target
Select the measure target head
head
B TYPE
Area type
B-0 DIA
Outer diameter
B-1 T-EDGE
Top edge
B-2 B-EDGE
Bottom edge
B-3 EP-CALC
Select edge (pitch) number
B-3-0 START
(omitted)
Select the edge/pitch (start)
B-3-1 END
(omitted)
Select the edge/pitch (exit)
B-4 TR-POS
Tx-Rx Pos
B-5 UF-DIA
Ultrafine outer DIA
B-6 UF-GAP
Ultrafine gap
B-7 CENTER
Center position
C TILT-COR
Tilt correction
A
Appendix
C-0 DISABLE
Disable
C-1 ENABLE
Enable
(Continues)

D MEDIAN
median
D-0 OFF
OFF
D-1
Times setting for median
E DELAY
delay
E-0 DISABLE
Disable
E-1 ENABLE E-1-DLY

Enable Times setting for delay
(Continues)
A
Appendix

OUT
OUT
OUT target setting
Select OUT
(according to the settings of the used OUT)
A TGT-CALC
Calculation setting
A-0 NO CALC
No calculation
A-1-F0 to 7
A-1 COMBO
Select calculation (omitted)
Combined calc.
target and Coefficient
A-2-A1 to A16
A-2 AVERAGE
Select calculation (omitted)
Average
target
B OUTLIER
B-0 DISABLE
Disable
B-1 ENABLE
Enable
B-1-0 WAIT
Exclusion method Output (omitted)
waiting
B-1-1 HOLD
Exclusion method Prev val (omitted)
hold
C FILTER
filter
C-0 MOV-AVE C-NUM

Moving average Averaging times setting
C-1 SMPL-AVE C-NUM

Simple average Averaging times setting
D DIF-FUNC
Difference function
A
Appendix
D-0 DISABLE
Disable
D-1 ENABLE
Enable
E A-CANCEL
Abnormal value cancellation
E-0 DISABLE
Disable
(Continues)

E-1-A to B E-UPPER
E-1 ENABLE
Pts before cancellation Upper limit
Enable
and Pts after cancellation value
E-LOWER
Lower limit
value
F OFFSET OFFSET
offset Offset value setting
G M-MODE
Measure mode
G-0 NORMAL
normal
G-1 P-HOLD G-HOLD

peak hold Selecting hold mode
G-2 B-HOLD G-HOLD

Bottom hold Selecting hold mode
G-3 PP-HOLD G-HOLD

peak to peak hold Selecting hold mode
G-4 AVE-HOLD G-HOLD

Average hold Selecting hold mode
G-5 S-HOLD G-HOLD

sample hold Selecting hold mode
G-6 AP-HOLD
Auto peak hold
G-7 AB-HOLD
Auto bottom hold
G-8 APP-HOLD
Auto Peak-to-peak hold
G-STIME
G-9 ST-HOLD
A
Self-timing hold period
Self-timing hold
setting
H TOL
Appendix
Tolerance setting
(according to the tolerance mode
selected)
H-LOWER
H-STD H-UPPER
Lower limit
Ref value High limit value
value
H-L
H-HH H-H
Lower limit
Highest limit High limit value
value
H-LL
Lowest limit
(Continues)

COMMN
common setting
A USE TGT A-TGT-1 to 16

Setting targets for use Setting targets for use
B USE OUT B-OUIT-1 to 16

Setting OUTs to be used Setting OUTs to be used
C PRV-INT
C-0 DISABLE
Disable
C-1 2-AXIS C-HEAD1 to 4

AB-ON Group setting
C-2 3-AXIS C-HEAD1 to 4

ABC-ON Group setting
D SYNC D-OUT-1 to 16
Sync setting Select Sync measure OUT
E TOL MODE
Select Tolerance mode
E-0 REF
Ref value
E-1 THR
Threshold
F UNIT
Setting min display unit
G GRP-CALC
Group calculation
G-0 DISABLE
Disable
G-1 ENABLE G-1-OUT G-1-CALC
A
Enable Select original calc. OUT Calc. content
G-1-POINTS
Calc. point
Appendix
(Continues)

H STRAGE
Data storage
H-0 POINTS
Storage points
H-1 CYCLE
Storage cycle
H-2 CONTROL
H-CTRL
COMMAND
H-CTRL
TERMINAL
H-3 OUT
(omitted)
Storage target OUT
H-4 NG-STRG
NG storage
H-NGSTRG DISABLE
Disable
H-NGSTRG ENABLE
Enable
(Continues)
A
Appendix

IO
Setting I/O terminal
A TOTAL-J
(omitted)
Setting Total judgement
B STROBE
Setting strobe time
C OFFDELAY
Setting off-delay time
D IO-CH D-CH-NUM D-CH1 to 4

Setting Control Ch No. of control Ch control Ch
E ANALOG E-CH1 to 4
Setting analog output term Select analog output channel
E-CH1 to 4-0
Select Output target OUT
E-CH1 to 4-1 SCALING

(omitted)
Analog scaling val
E-CH1 to 4-2 WAIT-VOL

Vol of output waiting data
F STATUS F-CH1 to 4
Setting status output Select status output Ch
F-CH1 to 4-0
(omitted)
Output waiting
F-CH1 to 4-1
Continue outlier
F-CH1 to 4-2
FOCUS
F-CH1 to 4-3
Insufficient light
F-CH1 to 4-4
A
Check No. of edges Fail
F-CH1 to 4-5
Stat processing
Appendix
F-CH1 to 4-6
Pulse frequency error
(Continues)

G ENCODER
(omitted)
Encoder setting
G-0 INPUT
Input mode
G-1 PRESET
Preset pulse count
G-1-0 DISABLE
Preset pulse count
G-1-1 ENABLE-P
Positive-true logic
G-1-2 ENABLE-N
Negative-true logic
G-2 TIM-FUNC
(omitted)
Encoder TIMING func
G-3 SAMPLING
Sampling
G-3-0 DISABLE
Disable
G-3-1 ENABLE G-3-SMPL

Enable number of sampling points.
H BCD UNIT
BCD unit settings
H-0 OUT-FUNC
(Omitted)
Output function selection
H-1 INPUT
(Omitted)
OUT selection method
H-2 CH
A
Ch selection
H-2-1 to 4
(Omitted)
CH1 to CH4
Appendix
H-3 STROBE
(Omitted)
STROBE
(Continues)

STAT
Stat process
A ST-CTRL
Stat control method
A-0 TERMINAL
Terminal
A-1 TERMINAL
command
B ST-NUM
Setting No. of stat proc
C ST-CH
Select stat process Ch
ENV
Environment setting
A PROG-SET
Method to switching the program
setting
A-0 PANEL
Panel/command
A-1 TERMINAL
Terminal
B LOCK-SET
Panel lock
B-0 ALL
All
B-1 PART
Part
C-BAUD-0 to 4
C RS-232C C-P-0 to 4 C-SEND-0
Communication
Setting RS232C parity Data send mode
speed
(Continue)
A
Appendix

D ETHERNET
ETHERNET
D-0 IPCONFIG
Setting at next power ON
D-0-0 BTP->FIX
BOOTP→fix
D-0-1 FIXED ID
Fixed IP address
D-0-2 BOOTP
BOOTP
D-1 IP
(omitted)
IP address setting
D-2 SUBNET-M
(omitted)
Subnet mask setting
D-3 GATEWAY
(omitted)
Gateway setting
D-4 TCP-PORT
(omitted)
Setting TCP port numbers
E PROGRAM
Edit program
E-0 COPY
(omitted)
Copy program
E-0 INIT
(omitted)
Initialize program
F BUZZER
Buzzer setting
F-0 DISABLE
Disable
A
F-1 ENABLE
Enable
APPLY EXECUTE
Appendix
Apply settings Execute

Troubleshooting
Troubleshooting
If a problem occurs
This section describes the troubles that may occur during the use of this device and their remedies. Make sure to check
the items covered below before calling Keyence.
Trouble Check item Remedy

The POWER ON LED Is the power cable connected properly? Connect the power cable properly.
and ERROR LED do
not light after switching Are you using a power supply that meets the Be sure to use a power supply that meets
ON the power of the specification range? the specification range.
controller.
Are instantaneous power interruptions Use a stable power supply with no
occurring? instantaneous power interruptions.
The power to the
controller drops suddenly. If the current capacity of the power supply
Does the capacity of the power supply meet
is insufficient, replace it with a power supply
the specification range?
with a greater capacity.
Take the necessary measures by following
An error is displayed on
- the instructions in the displayed error
the screen.
message.
The PC freezes while Does the system environment of the PC Be sure to use it under a system
using LS-Navigator2. meet the specification range? environment that meets the specifications.
Is the target located within the measurement Place the measurement target in the
range? measurement range correctly.
Do not block the point of measurement with
Is the entire measurement area blocked? any object other than the measurement
target.
Are the transmitter and receiver mounted in
Mount the transmitter and receiver correctly.
the correct position?
Is the measurement target setting set Set the measurement according to the point
correctly? of measurement.
Is there any dust or dirt on the cover glass of
Remove the dust or dirt on the cover glass.
the receiver or transmitter?
Are there any scratches or cracks on the
Replace the cover glass.
receiver or transmitter?
The measurement value Is timing control set correctly according to Set the timing control according to the hold
is not displayed. the hold mode setting? mode setting.
Is the display setting correct? Check the display setting.
Is there condensation (of dew)?

Make sure to conduct the measurement
under a suitable environment. A
The light source will need to be replaced if
Appendix
the wiring is correct.

Is the transmitter’s LED lit?
Contact your nearest KEYENCE office for
repair.
Is the sensor head connected properly? Connect the cable properly.
Make sure that the measurement area is not
Is the mask setting being used?
being masked.
Use a 40m cable extension unit if the cable
Is the length of the cable between the head
between the head and controller is 40m
and controller 40 m?
long.

Troubleshooting

Set the averaging count to an appropriate
Is the averaging count set correctly?
value.
Is the target object located within the Place the measurement target object in the
measurement area? measurement range correctly.
Are there any scratches or cracks on the
Replace the cover glass.
cover glass of the receiver or transmitter?
Remove the dirt, dust, burrs, water droplets
Are there any dirt, dust, burrs, water
or oil droplets.
droplets, or oil droplets on the measurement
Use the abnormal value exclusion function
target?
and/or the no. of edges check function.
The measurement value Are there water and/or oil droplets in the
display is inconsistent. Remove the droplets using an air purge, etc.
operating ambient environment?
Use the mutual interference prevention
function.
Is there any mutual interference?
Mount the sensor head in a different
position.
Is there a strong light source near? Shield off the receiver from the ambient light.
Minimize the effect of the fluctuations using
the following methods:
Are there fluctuations in the air? yyPut a cover over the sensor head.
yyAgitate the air between the transmitter and
receiver with a fan, etc.
Is there sufficient amount of light reaching Check the light volume using the light
the receiver? amount inspection function.
Is the measurement target object located Place the measurement target object in the
within the measurement range? measurement range correctly.
Place the measurement target object in the
measurement range correctly.
Is the measurement target object tilted or
It the outer diameter measurement is being
displaced?
affected by a tilt, use the tilt correction
function.
A The measurement value

display is incorrect.
Are the transmitter and receiver mounted in
the correct position?
Mount the transmitter and receiver correctly.
Has the calibration been performed

Try performing the calibration again.
Appendix
correctly?
Are there rapid temperature changes in the Keep the operating ambient temperature
operating ambient environment? constant.
Is there sufficient amount of light reaching Check the light volume using the light
the receiver? amount inspection function.
Has the received light volume calibration Perform the received light volume calibration
been performed when the target object is in again when nothing is in the measurement
the measurement range? range.
Program No. cannot be Is the program switching method set Enter a setting that is suitable for the
changed. appropriately? program switching method.
The keys do not work. Is the key lock ON? Switch the key lock to OFF.

Troubleshooting

Check the wiring using the terminal block
Is the wiring correct?
monitor function.
Ensure that the tolerance mode and
The judgment output is
Is the tolerance judgment set correctly? tolerance judgment values are input
not output correctly.
correctly.
Enter a setting that will yield the desired
Is the I/O terminal setting set correctly?
output.
Is the wiring correct? Check and connect the wiring correctly.
Select a suitable tolerance setting for the
Is the tolerance mode set correctly?
desired output method.
The analog output is not Has the voltage exceeded +10.8 V or fallen Set the analog scaling correctly according to
output correctly. below -10.8 V? the measurement value.
The resolution may be lower for these
Are you using an oscilloscope and/or a fast-
instruments. Reduce its influence by
speed A/D board?
changing the analog scaling.
Is the communication cable connected
Connect the communication cable properly.
properly?
Configure the settings such that the
RS-232C communication
Is the communication setting set correctly? communication specifications of this unit and
does not work.
the external instrument are the same.
Verify that commands and delimiters can be
Is the communication program correct?
sent/received correctly.
The measurement target
Is the camera cable connected properly? Check the camera cable.
image is not displayed.
A
Appendix

Error Messages
Error Messages
System error message

System error messages appear when an error causing the measurement to stop has occurred.
If a message prompting you to replace the instrument appears, contact your nearest KEYENCE office.
Error code Displayed content Cause Remedy
0x0020 - There is an abnormality The internal memory of Replace the controller and switch the
0x0026 in the internal memory of the controller may be power back ON.
controller. malfunctioning. “Mounting the Controller” (page 2-15)
Replace the controller and The replaced controller requires an
cycle power. inspection and/or a repair. Contact your
nearest KEYENCE office.
0x0027 There is an abnormality in The internal timer of Replace the controller and switch the
the internal timer. the controller may be power back ON.
Replace the controller and malfunctioning. “Mounting the Controller” (page 2-15)
cycle power. The replaced controller requires an
inspection and/or a repair. Contact your
0x0028 There is an abnormality in The RS-232C Replace the controller and switch the
RS-232C communication communication device power back ON.
device of controller. of the controller may be “Mounting the Controller” (page 2-15)
Replace the controller and malfunctioning. The replaced controller requires an
0x0029 There is an abnormality The USB communication Replace the controller and switch the
in USB communication device of the controller may power back ON.
device of controller. be malfunctioning. “Mounting the Controller” (page 2-15)
0x002A There is an abnormality in The Ethernet Replace the controller and switch the
Ethernet communication communication device power back ON.
device of controller. of the controller may be “Mounting the Controller” (page 2-15)
Replace the controller and malfunctioning. The replaced controller requires an
0x002B There is an abnormality The internal device of Replace the controller and switch the
in the internal device of the controller may be power back ON.
controller. malfunctioning. “Mounting the Controller” (page 2-15)
cycle power. inspection and/or a repair.
A Contact your nearest KEYENCE office.

Appendix

Error Messages

0xA180 - Failed in communicating The connector in between Confirm the connection in between the
0xA181 with head expansion unit. the head expansion unit head expansion unit controller and turn
Confirm the connection controller connection on the power again. If the abnormality
and turn on the power is faulty, or the internal persists, change the head expansion unit
again. If the abnormality components of the head and turn on the power again.
persists, change the head expansion unit may be “Connecting the controller and the
expansion unit and then broken down. expansion unit” (page 2-24)
switch the power back ON. The replaced head expansion unit
requires inspection and/or repair.
Contact your nearest KEYENCE office.
0x0040 - There is an abnormality There may be a data Replace the controller and switch the
0x0045 in the internal data of abnormality due to noise, power back ON.
0x0060 - controller. or a component inside “Mounting the Controller” (page 2-15)
0x0061 Replace the controller and the controller may be The replaced controller requires an
cycle power. malfunctioning. inspection and/or a repair. Contact your
0x0046 - There is an abnormality There may be settings Return the controller to default settings
0x0047 in the setting data of data abnormality due to and turn on the power again. If the
controller. a power-off while writing abnormality persists, change the
settings data, noise and/or controller and turn on the power again.
the battery life of the back- “All Setting Initialization Screen”
up battery. (page 3-14)
The replaced controller requires
inspection and/or repair. Contact your
0x0K20 - There is an abnormality The internal memory Replace the head and switch the power
0x0K22 in the internal memory of of Head K may be back ON.
head K. malfunctioning. “Mounting the Head” (page 2-2)
Replace the head K and The replaced head requires an
0x0K23 - There is an abnormality The internal device of Head Replace the head and switch the power
0x0K24 in the internal device of K may be malfunctioning. back ON.
head K. “Mounting the Head” (page 2-2)
Replace the head K and The replaced head requires an
0x0K40 - There is an abnormality There may be a data Replace the head and switch the power
0x0K42 in the internal memory of abnormality due to back ON.
0x0K60 head K.
Replace the head K and
cycle power.
electrical noise, or a
component inside Head K
may be malfunctioning.
“Mounting the Head” (page 2-2)
The replaced head requires an
A
Appendix
0x0K80 Failed in initializing the The head cable may Check the connection between the head
head K. be disconnected or a and the controller, replace the cable, and
Confirm the connection or component inside Head K then switch the power back ON.
replace the cables, and may be malfunctioning. If the error persists after replacing the
cycle power. cable, replace Head K and then switch
If the abnormality persists the power back ON.
after replacing the cable, “Connecting the head and the
replace Head K and then controller” (page 2-22)
switch the power back ON. “Mounting the Head” (page 2-2)

Error Messages

0x0K81 - Failed in communicating The head cable may Check the connection between the head
0x0K82 with head K. be disconnected or a and the controller, replace the cable, and
Confirm the connection or component inside Head K then switch the power back ON.
replace the cables, and may be malfunctioning. If the error persists after replacing the
cycle power. cable, replace Head K and then switch
If the abnormality persists the power back ON.
after replacing the cable, “Connecting the head and the
replace Head K and then controller” (page 2-22)
switch the power back ON. “Mounting the Head” (page 2-2)
0x0K83 Temporary blackout of Electrical noise may have Take the necessary measures to prevent
head K was detected. entered Head K. noise from entering the head, and then
The system will be switch the power back ON.
rebooted.
0x8180 Failed in communicating The cable connection Check the connection between the
with the expansion unit. between the connector expansion unit and the controller, and
Confirm the connection, connecting the expansion then switch the power back ON.
and cycle power. unit and the controller may If the abnormality persists, replace the
If the abnormality persists, be broken, or a component expansion unit and switch the power
replace the expansion unit inside the expansion unit back ON.
and switch the power back may be malfunctioning. The replaced expansion unit requires an
ON. inspection and/or a repair.
Contact your nearest KEYENCE office.
K: Head number is recorded.

Example: In case of 0x0K20, if an error occurs at No. 3, 0x0320 is displayed.
yyWhen a system error occurs, the error output (Normal close) will become ON.
yyIf an error message other than the above appears, contact your nearest KEYENCE office.
A
Appendix

Error Messages
Error messages in the RS-232C/display panel

Error messages only appear on the display monitor. They do not appear on the LS-Navigator2 screen.
The controller will continue to function normally as these are not system errors of the controller.
In the table below, the interfaces in which each of the error codes appear are marked with “○”.
Remedies
Error Displayed RS- Display
Cause provided in the
code content 232C Panel
display panel
0000 Command This error will be displayed when a command Use a command
error not included in the command list is being ○ - defined in the
transmitted via RS-232C communication. command list.
0001 Status error This error will be displayed when the Retry the
operation performed on the display panel or communication
the command sent via RS-232C cannot be making sure that the
processed. The following status are possible: controller is able to
yyThe settings were reflected while the accept commands.
controller was calibrating the light volume.
yyThe settings were reflected while the
○ ○
controller was in system error status.
yyAn operation related to the light volume
calibration was performed on the display
panel, but the controller has already exited
the light volume calibration status (via
operation on another display panel or PC
application).
0020 Command This error is displayed when the no. of Retry the
length error characters of the transmitted command or communication
parameter is insufficient. using the no. of
○ -
characters specified
in the command
format.
0021 Parameter This error is displayed when the setting value Retry the
error sent via the display panel or RS-232C is communication
outside the possible setting range. using the settings
○ ○
value specified
in the command
format.
0022 Parameter This error is displayed when an unused OUT Specify an OUT
error number has been specified. number that has
○ ○
(OUT number) already been set to
0023 Parameter This error is displayed when an unused

the controller.
Specify a A
error measurement target number has been measurement target
Appendix
(Measurement specified. ○ ○ number that has

target number) already been set to
the controller.
0040 Head not This error is displayed when a light volume Specify a head that
connected calibration is attempted on a non-connected ○ ○ is connected to the
error head. controller.
0041 Head This error is displayed when a light volume Perform the light
mismatch calibration is attempted on a head while a volume calibration
○ ○
error light volume calibration on another head is still on one head at a
in progress. time.

Error Messages
Remedies
Error Displayed RS- Display
Cause provided in the
code content 232C Panel
display panel
0070 Consistency This error is displayed when the setting value Do not modify the
error in dispaly sent from the display panel does not match settings via RS-
units the display unit setting of the controller. 232C while the
- ○
settings are being
changed on the
display panel.
0071 Consistency This error is displayed when the scaling Enter a setting
error in setting setting does not satisfy the following which satisfies the
(Scaling) condition: condition described
When calibrating using two or more k points ○ ○ on the left.
yyInput value [k] - Input value [k-1]>0
(Displayed value [k] - Displayed value [k-1])
� (Input value [k] - Input value [k-1])
≤2

0072 Consistency This error is displayed when the calibration Enter a setting
(Calibration) condition: condition described
When calibrating using two or more k points ○ ○ on the left.
yyInput value [k] - Input value [k-1]>0
(Displayed value [k] - Displayed value [k-1])
� (Input value [k] - Input value [k-1])
≤2

0073 Consistency This error is displayed when the tolerance Enter a setting
(Tolerance condition: condition described
setting) Tolerance mode: Threshold value on the left.
yyWhen Threshold value HH > Threshold
value HI > Threshold value LI > Threshold
value LL is not satisfied
○ ○
yyTolerance mode: Reference value
yyWhen [Reference + Upper limit value] and
[Reference + Lower limit value] exceed the
input range for each minimum display unit
yyWhen [Reference + Upper limit value]
> [Reference + Lower limit value] is not
satisfied
0074 Consistency This error is displayed when the analog Enter a setting
error in setting scaling setting does not satisfy the following which satisfies the
A (Analog
scaling)
condition:
| (Measurement value at +10 V) -
(Measurement value at -10 V) | ≥ 2000 x
○ ○
condition described
on the left.
(Minimum display unit)

Appendix
0088 Timeout error This error is displayed when if no data is Verify that a reply
exchanged for 10 seconds or longer between command has been
○ -
when characters were sent to the controller returned to the input
until the next characters are sent. command.
0099 Another error Another error All errors other than
○ ○
the above
yyError messages briefly describe the error contents and countermeasures.

yyIf an error message other than the above appears, contact your nearest KEYENCE office.

Index
Index
Numerics [Basic settings] Tab: Set Measurement Target............... 5-21

Basic specifications/Connector specifications...........8-2, 8-3
2D Position Display........................................................ 6-30
BCD strobe time............................................................. 5-99
[2D position display] screen....................................6-2, 6-30
BCD unit.......... 1-15, 5-99, 5-100, 5-107, 10-22, 11-7, 11-31
2D Position Display Setting Screen................................ 3-11
BCD unit Expansion connector..................................... 8-21
24 V DC power supply...................................................... 1-6
BCD unit Input terminal block 1..................................... 8-18
24V power input terminal block...................................... 8-16
BCD unit Input terminal block 2..................................... 8-19
40m connecting unit for cable extension.... 1-4, 11-13, 11-34
[BCD unit] area............................................................... 5-92
[BCD Unit] tab................................................................ 6-45
A Buzzer Setting Screen.................................................... 3-14
ABC-ON.......................................................................... 5-73
[A-B deviation]................................................................ 6-23 C
Abnormal value canceling function setting..................... 5-48
Cable.............................................................................11-11
AB-ON............................................................................ 5-73
Cable between the controller and
[Acq date]..............................................................6-23, 6-37 head CB-B3/CB-B10.................................................... 11-33
Acquiring received light waveforms................................ 5-67 Cable between the transmitter and receiver
Adding more measurement targets................................ 5-27 OP-87686 (1 m cable)/OP-87687 (3 m cable).............. 11-33
Add OUT......................................................................... 5-35 Calc. content.................................................................. 5-86
Add OUT setting............................................................. 5-41 Calc. point...................................................................... 5-86
Air purge unit.................................................................... 1-7 Calculation method......................................................... 5-36
All Setting Initialization Screen....................................... 3-14 Calculation setting.......................................................... 5-44
Analog output................................................................. 5-97 Calibration and Scaling.................................................... 5-6
[Analog output] area....................................................... 5-91 Calibration of received light intensity.............................. 5-67
Analog output terminal block.......................................... 8-15 [Calibration of received light intensity] dialog................. 5-63
[Analog output terminal setting] window......................... 5-91 Calibration pts................................................................ 5-54
Analog scaling value...................................................... 5-98 Calibration/Scaling................................................9-23, 9-35
Appendix..........................................................................A-1 [Calibration, Scaling] Tab: Calibration Setting................ 5-52
ASCII code table.............................................................. 9-7 [Calibration, Scaling] Tab: Scaling Setting...................... 5-57
Attaching the Protective Sheet....................................... 2-14 Calibration setting........................................................... 5-54
Auto peak hold/Auto bottom hold/Auto peak to [Calibration setting] area................................................ 5-53
Peak hold....................................................................... 10-3 [Calibration setting] dialog.............................................. 5-54
Auto zero ON/OFF (Multiple).......................................... 9-11 Canceling the registration of calibration setting.............. 5-55
Auto zero ON/OFF (Single)............................................ 9-10 Canceling the registration of scaling setting................... 5-60
Auto zero ON/OFF (Synchronization)............................ 9-11
A
CB-BD100....................................................1-4, 8-31, 11-31
[Average]........................................................................ 6-33 CB-BR01...................................................................... 11-34
Average.......................................................................... 6-35 CB-EP100........................................................................ 1-4
Appendix
Average setting............................................................... 5-45 CB-PN100........................................................................ 1-4

[Avg A-B]......................................................................... 6-23 Center position............................................................... 5-25
[Avg value]...................................................................... 6-29 Changing the OUT display color..................................... 7-18
Changing the program name.......................................... 5-18
B Characteristics.............................................................. 11-14
Basic Operation Flow....................................................... 3-2 Checking settings before update.................................. 5-115
Basic Operation of Setting................................................ 3-3 Checking the Measurement Results................................ 6-1
Basic Operations.............................................................. 3-1 Checking the Package..................................................... 1-2
Basic Operations of LS-Navigator2.............3-15, 5-18, 5-27, Check No. of edges........................................................ 5-65

5-41, 5-55, 5-60, 5-67, 5-73, 5-76, 5-80, 5-86, 5-100 Check No. of edges: Fail................................................ 5-98
Basic Operations of the Display Panel............................. 3-3 Combined calculation setting......................................... 5-45
Basic settings................................................................... 5-3 Combined limitation for analog scaling
[Basic settings] Tab: OUT Setting................................... 5-32 (Ref. val mode) and minimum display unit..................... 5-15

Index
Command format.......................................................8-6, 9-2 [Data search] dialog....................................................... 6-26

Command types............................................................... 8-6 Data send mode............................................................. 7-15
Common for LS-9501/LS-9501P/LS-HA100.................. 8-31 Data storage......................................... 5-7, 5-79, 9-31, 9-36
Common indicator............................................................ 6-3 Data Storage.................................................................. 6-20
Common setting............................................................... 5-7 [Data storage] area......................................................... 5-78
Common settings..................................................9-24, 9-35 Data storage (Sampling frequency synchronization).... 10-19
[Common setting] Tab: Data Storage............................. 5-77 [Data storage] screen..............................................6-2, 6-20
[Common setting] Tab: Edge Detection.......................... 5-62 Data storage (TIMING synchronization/Storage trigger
[Common setting] Tab: Group Calculation...................... 5-84 synchronization)........................................................... 10-20
[Common setting] Tab: Interference Prevention............. 5-72 Daylight savings time setting.......................................... 7-10
[Common setting] Tab: I/O Terminal Setting................... 5-89 Dedicated display panel cable.......................................11-11
[Common setting] Tab: Stat Process............................ 5-109 Delay.............................................................................. 5-26
[Common setting] Tab: Sync Setting.............................. 5-75 Delete OUT..................................................................... 5-35
[Common] tab................................................................... 7-7 Delete OUT setting......................................................... 5-42
Common to LS-9006D/LS-9030D.................................. 2-20 Deleting any measurement target.................................. 5-27
Communicate via Ethernet............................................... 7-2 Description of Each Screen.............................................. 3-6
Communicate via USB..................................................... 7-2 Detailed display (large-size)............................................. 6-6
Communication Interface and I/O Terminals.................... 8-1 Detailed display (small-size)............................................. 6-6
Communication specifications.......................................... 8-4 [Deviation].............................................................6-33, 6-37
Communication speed.................................................... 7-15 Difference function setting.............................................. 5-47
Connecting the controller and the display panel............ 2-24 Different Initial Value for Setting Calibration and Scaling
Connecting the controller and the expansion unit.......... 2-24 Points............................................................................. 5-14
Connecting the controller and the PC............................ 2-25 Dimensions................................................................... 11-23
Connecting the head and the controller......................... 2-22 Displaying Objective Screen.......................................... 3-19
Connecting the power supply to the controller............... 2-26 Displaying the start-up menu.......................................... 7-19
Connecting the transmitter and the receiver Display Measurement Value............................................. 6-4
of the head..................................................................... 2-22 [Display measurement value] screen........................6-2, 6-4
Connecting using the Ethernet....................................... 2-25 Display mode.................................................................... 6-6
Connecting using USB................................................... 2-25 Display OUT Selection Screen......................................... 3-9
Connecting Various Components................................... 2-21 Display panel....................................................... 1-10, 11-10
Connection with the PLC link unit or PC.......................... 8-5 Display panel cable.......................................................... 1-5
Connector specifications.................................................. 8-4 Display panel setting method.........................7-8, 7-12, 7-17
Controller...............................................1-2, 1-9, 11-2, 11-23 Display Panel Setting Method........... 5-28, 5-43, 5-56, 5-61,
[Controller] tab................................................................ 6-44 5-68, 5-73, 5-76, 5-80, 5-87
A Copying list of settings................................................. 5-115

Copying the program setting.......................................... 5-19
Display panel stand............................................... 1-5, 11-13
Display panel support................................. 1-5, 11-13, 11-37
Copy OUT setting........................................................... 5-42 Display Setting Screen..................................................... 3-8
Appendix
[Copy SPC information] button....................................... 6-36 Display Stat Process...................................................... 6-32

[Cp]................................................................................. 6-37 [Display stat process] screen..................................6-2, 6-32
[CpK].............................................................................. 6-37 Display Terminal Status.................................................. 6-44
[Cursor A]....................................................................... 6-22 [Display terminal status] screen..............................6-2, 6-44
[Cursor A-B].................................................................... 6-23
[Cursor B]....................................................................... 6-22 E
Cursors A and B............................................................. 6-22
Easy Setting Guide........................................................... 4-1
Edge detection........................................................5-7, 5-64
D [Edge detection] area..................................................... 5-62
[Data acq interval].......................................................... 6-36 Edge detection setup...................................................... 5-68
Data acq interval............................................................ 6-39 Edge detection threshold................................................ 5-64
Data display area.........................................6-22, 6-29, 6-36 Edge (pitch) number setting........................................... 5-24

Index
Edge Position Measurement............................................ 4-9 From Main Screen.......................................................... 3-18

Edge Position Measurement (Transparent Body).......... 4-10 From [Program setting] Screen...................................... 3-19
Editing the measurement target..................................... 5-27 From Startup Menu........................................................ 3-18
Edit OUT list................................................................... 5-35 Function Restriction of Each Head Model...................... 5-16
[Edit OUT list] dialog....................................................... 5-33
Edit OUT setting............................................................. 5-42 G
[Edit program list] dialog................................................. 5-18
GO.................................................................................. 6-33
Encoder input......................................................8-35, 10-15
Graph display area.......................................6-17, 6-22, 6-35
Encoder set.................................................................... 5-93
Group calculation.........................................5-8, 5-86, 10-21
[Encoder set] area.......................................................... 5-90
[Group calculation] area................................................. 5-85
Encoder signal input terminal block................................ 8-11
Group Determination...................................................... 4-12
Encoder TIM func........................................................... 5-95
Group interval................................................................. 6-39
Encoder TIM func setting.............................................. 5-102
[Group No.]..................................................................... 6-37
Encoder TIMING input (Pulse frequency error)............ 10-17
Group points................................................................... 6-39
Entering numeric values................................................... 3-3
Environment setting.......................................................... 7-1
Error Messages..............................................................A-18
H
Error messages in the RS-232C/display panel..............A-21 Hard disk free space...................................................... 1-18
Ethernet cable.................................................................. 1-6 Head............................................................... 1-2, 1-11, 11-4
Ethernet Interface............................................................. 8-2 Head cable....................................................................... 1-4
EtherNet/IP communication unit................. 1-16, 11-8, 11-32 Head cable/Extension cable..........................................11-11
[Ethernet] tab.................................................................. 7-11 Head common status....................................................... 6-3
Event logging.................................................................. 6-43 Head expansion unit...................1-3, 1-14, 8-17, 11-7, 11-30
Event Logging................................................................ 6-42 Head extension cable................................................... 11-33
[Event logging] screen.............................................6-2, 6-42 Head extension cable CB-B5E/CB-B10E/CB-B20E..... 11-33
Examples of setting numeric value formats...................... 9-4 Head indicator.................................................................. 6-3
[Excel transfer] (Click logging/Trigger logging)............... 6-10 Head information.............................................................. 6-3
[Excel transfer] dialog box (Trigger logging)................... 6-10 Head Information.............................................................. 6-3
[Excel transfer] dialog (Click logging)............................. 6-10 [Head information] screen................................................ 6-2
[Excel transfer - Logging settings] dialog......................... 6-8 Head setting..........................................................9-15, 9-34
[Excel transfer settings] dialog....................................... 6-24 Head status...................................................................... 6-3
Expansion unit.................................................................. 1-4 Help................................................................................ 7-22
Extension cable between the transmitter Help file.......................................................................... 1-18
and receiver........................................................... 1-5, 11-11 [HH]................................................................................ 6-33
F
[HI].................................................................................. 6-33
HMI Display panel................................................. 1-3, 11-29
A
Appendix
Horizontal axis.......................................................6-22, 6-35

Fail storage..................................................................... 5-79
How to attach the protective sheet................................. 2-14
Filter................................................................................ 5-38
How to Use Help............................................................ 3-20
Filter setting.................................................................... 5-47
How to use the air purge unit........................................... 2-5
[Final pulse count].......................................................... 6-36
How to use the terminal block........................................ 2-26
Flow of Measurement....................................................... 4-2
Flow of the Program Setting............................................. 5-2
FOCUS........................................................................... 5-98 I
FOCUS monitor.............................................................. 5-66 If a light source is present near the head......................... 2-2
For LS-9006D................................................................. 2-11 If a problem occurs.........................................................A-15
For LS-9006/LS-9006M.........................................2-10, 2-12 If you wish to create new program settings...................... 5-2
For LS-9030D................................................................. 2-11 If you wish to edit existing program settings..................... 5-2
For LS-9030/LS-9030M.........................................2-10, 2-12 In case of storage cycle “TIMING sync” or
For LS-9120M................................................................ 2-13 “Storage trg sync”........................................................... 5-77

Index
In case of storage cycle “x1”.......................................... 5-77 LS-9006D...................................1-3, 1-13, 2-8, 11-16, 11-27
Initializing the controller setting........................................ 7-6 LS-9006D/LS-9030D...................................................... 11-6
Initializing the program setting...............................5-19, 5-20 LS-9006/LS-9006M.................... 1-2, 1-11, 2-5, 11-14, 11-24
Initializing the screen layout........................................... 7-19 LS-9006/LS-9006M/LS-9006D..................................... 11-18
Inner Diameter / Gap Measurement................................. 4-7 LS-9006M/LS-9006/LS-9030M/LS-9030/LS-9120M...... 11-4
Input mode..................................................................... 5-93 LS-9030D...................................1-3, 1-13, 2-9, 11-17, 11-28
Input mode setting........................................................ 5-101 LS-9030/LS-9030M.................... 1-2, 1-11, 2-6, 11-14, 11-25
Input terminal block 1....................................................... 8-7 LS-9030/LS-9030M/LS-9030D..................................... 11-18
Input terminal block 2....................................................... 8-9 LS-9120M........................1-2, 1-12, 2-7, 11-15, 11-18, 11-26
Installation and Connection.............................................. 2-1 LS-9501/LS-9501P........................................................... 1-2
Installation cautions.................................................2-2, 2-15 LS-9501 (NPN type)....................................................... 8-27
Installing LS-Navigator2................................................. 1-19 LS-9501P (PNP) type..................................................... 8-29
Instrument information display setting.............................. 7-5 LS-D1000.............................................................. 1-3, 11-29
Insufficient light............................................................... 5-98 LS-H2 (LS-Navigator2) operating system
Interference prevention.................................................... 5-7 environment.................................................................. 11-12
[Interference prevention] area........................................ 5-72 LS-HA100.............................................................. 1-3, 11-30
Interference prevention function..................................... 5-73 LS-Navigator2 Saved File List..........................................A-3
Introduction....................................................................... 1-1 LS-Navigator2 setting method...... 7-5, 7-7, 7-10, 7-11, 7-16,
I/O circuit........................................................................ 8-27 7-18, 7-19, 7-20
I/O details..................................................................... 10-10
I/O extension cable (3m) for BCD unit.............................. 1-7 M
I/O setting....................................................................... 5-96
Manual............................................................................ 7-22
[I/O setting] area............................................................. 5-90
Mask setting................................................................... 5-65
I/O setting output.......................................................... 5-103
[Max A-B]........................................................................ 6-23
I/O Terminal Names and Functions.................................. 8-7
[Maximum value]............................................................ 6-33
I/O terminal setting.................... 5-8, 5-93, 5-101, 9-27, 9-36
[Max-Min]........................................................................ 6-33
[I/O terminal setting] area............................................... 5-89
Max. plot pts................................................................... 6-39
IP address/Subnet mask/Gateway................................. 7-11
[Max value]..................................................................... 6-29
Items in which any setting is updated........................... 5-115
Data Flow.........................................................................A-2
J Measurement control command list................................. 9-8
Judgment result of the cursor A position........................ 6-22 Measurement mode....................................................... 5-37
Judgment result of the cursor B position........................ 6-22 Measurement mode setting............................................ 5-49
A
Measurement overview.................................................. 10-2
Measurement range and accuracy............................... 11-14
K
Measurement screen outline............................................ 6-2
Appendix
Key Lock Check Screen/Password Entry Screen.......... 3-13 Measurement Screen Outline and Switching Screens..... 6-2
Measurement value format examples.............................. 9-4
L Measurement value formats............................................. 9-4
Measurement value output (ALL)..................................... 9-9
Language setting............................................................ 7-21
Measurement value output (Multiple)............................... 9-9
[Last acq date]................................................................ 6-36
Measurement value output (Single)................................. 9-8
Light Intensity Inspection Screen..................................... 3-9
[Measure mode] window................................................ 5-33
Limitation for combined analog scaling (Ref. val mode)
and minimum display unit............................................... 5-15 Median filter.................................................................... 5-26
List of command parameters.......................................... 9-37 Method for Setting up the Environment Settings.............. 7-8
List of Initial Values and Setting Ranges.......................... 5-3 [Min A-B]......................................................................... 6-23
[LL]................................................................................. 6-33 Minimum display unit.............................................5-34, 5-45
[LO]................................................................................. 6-33 [Minimum value]............................................................. 6-33
Loading the device settings file........................................ 7-6 [Min value]...................................................................... 6-29

Index
Modifying the OUT setting name in the edit list Outlier exclusion enable setting..................................... 5-46
operation........................................................................ 5-42 Outlier exclusion function............................................... 5-46
Mounting LS-9006D/LS-9030D........................................ 2-4 [OUT name]...........................................................6-22, 6-29
Mounting method.............................................................. 2-3 OUT name...................................................................... 5-35
Mounting the Controller.................................................. 2-15 Out of spec..................................................................... 6-35
Mounting the controller to the DIN rail............................ 2-16 OUT option setting.......................................................... 5-40
Mounting the Head........................................................... 2-2 [OUT option setting] window........................................... 5-34
Mounting the Panel........................................................ 2-17 Output connector 1......................................................... 8-21
Mounting to the bottom panel......................................... 2-16 Output format................................................................... 9-5
Mounting without the TR base.......................................... 2-3 Output selection function................................................ 5-99
Mounting with the TR base............................................... 2-3 Output terminal block 1.................................................. 8-12
Multi-OUT Display............................................................ 3-6 Output terminal block 2.................................................. 8-13
Outputting measurement values and changing settings
N using commands.............................................................. 8-6
Outputting test data........................................................ 6-46
No calculation setting..................................................... 5-44
Output waiting................................................................ 5-98
No. of control Ch.................................................5-96, 5-104
OUT selection method.................................................... 5-99
[No. of groups]................................................................ 6-36
OUT setting.......................................... 5-3, 5-34, 9-19, 9-34
No. of stat proc............................................................. 5-110
[OUT setting] area.......................................................... 5-32
Normal............................................................................ 10-2
OUT setting method....................................................... 5-43
OUT tag.......................................................................... 6-22
Auto peak to Peak hold................................................ 10-10
OUTx.............................................................................. 5-35
Oval Display................................................................... 6-28
Auto peak to Peak hold (Hold 1 to Hold 3)................... 10-11
Oval display area............................................................ 6-29
[Oval display] screen...............................................6-2, 6-28
O
Off-delay time......................................................5-96, 5-103 P
Offset.............................................................................. 5-36
Panel lock......................................................................... 7-7
Offset setting.................................................................. 5-49
Panel lock setting............................................................. 7-9
OP-87609 (For LS-9030).............................................. 11-34
Panel stand.................................................................. 11-36
OP-87610..................................................................... 11-36
Panel switch..................................................................... 1-6
OP-87684 (For LS-9006).............................................. 11-35
[Parameter]..................................................................... 6-33
OP-87749 (For LS-9030D)........................................... 11-35
Parity.............................................................................. 7-15
OP-87750 (For LS-9006D)........................................... 11-36
A
Part Names and Functions............................................... 1-9
OP-87757..................................................................... 11-37
Password.......................................................................... 7-7
Operation Setting Screen................................................. 3-7
PC communication configuration...................................... 7-2
Optional setting.............................................................. 5-26
Appendix
PC software LS-H2........................................................... 1-4

Optional settings............................................................. 7-18
Option list......................................................................... 1-5
Average hold (Hold 1)..................................................... 10-4
Original calc. OUT.......................................................... 5-86
Other commands............................................................ 9-37
Other options................................................................ 11-13
[OUT display setting] dialog.............................................. 6-6
Outer diameter............................................................... 5-22
Performing calibration of received light intensity...5-68, 5-71
Outer Diameter Measurement (1 head)........................... 4-4
Pitch interval................................................................... 5-95
Outer Diameter Measurement (2 Axes)............................ 4-5
Pitch Measurement........................................................ 4-11
Outer Diameter / Runout Measurement........................... 4-8
Pitch unit......................................................................... 5-95
Outer Diameter / Width Measurement (Large Diameter
Position Display Head Selection Screen........................ 3-10
Measurement by Using 2 Heads)..................................... 4-6
[p-p value]....................................................................... 6-29
Outlier continue.............................................................. 5-98

Index
Preparation for the Installation....................................... 1-18 Sampling setting........................................................... 5-103

PROFINET communication unit................. 1-17, 11-9, 11-32 Saving and Reading Setting File.................................... 3-17
Program Setting............................................................... 5-1 Saving the device settings file.......................................... 7-5
[Program Setting] Screen............................................... 5-17 Saving the setting file..................................................... 3-17
Program setting switching method................................... 7-7 [Scaling] area................................................................. 5-58
Program Switching Screen............................................... 3-8 [Scaling] dialog............................................................... 5-59
Program switching setting................................................ 7-9 Scaling pts...................................................................... 5-59
Protective sheet................................................................ 1-7 Scaling setting................................................................ 5-59
[Pulse count]..........................................................6-23, 6-37 Screen transition.............................................................. 3-4
Pulse count preset...............................................5-95, 5-102 Selecting Items................................................................. 3-3
Pulse frequency error..................................................... 5-98 Selecting the measuring head........................................ 5-29
Self timing hold....................................................10-9, 10-14
R Sending/Reading Settings.............................................. 3-16
Sending the settings to the controller............................. 3-16
[R]................................................................................... 6-37
Sensor Head................................................................ 11-24
Radial axis...................................................................... 6-29
[Set comparison] window............................................... 6-26
[R average]..................................................................... 6-37
Set from actual......................................................5-54, 5-59
Reading Setting File....................................................... 3-18
Set measure target..................................................5-3, 5-22
Reading Settings from Controller................................... 3-17
[Set measure target] area............................................... 5-21
Received command format.............................................. 9-2
Setting a different range and initial value for
Ref value mode.............................................................. 5-97
the minimum display unit................................................ 5-10
Registering the calibration setting.........................5-55, 5-56
Setting a mask range..................................................... 5-69
Register the scaling setting...................................5-60, 5-61
Setting analog output........................................5-100, 5-105
Replacement glass unit.................................................... 1-7
Setting at next power ON............................................... 7-11
Replacing the Glass of the Transmitter / Receiver......... 2-12
Setting check command list............................................ 9-34
Reply command format.................................................... 9-2
Setting control command list.......................................... 9-13
Reply command format in the event of an error............... 9-3
Setting data storage....................................................... 5-80
Required system environment........................................ 1-18
Setting edge detection...........................................5-67, 5-69
Reset (Multiple).............................................................. 9-11
Setting fail storage.......................................................... 5-83
Reset (Single)................................................................. 9-11
Setting FOCUS monitor.................................................. 5-70
Reset (Synchronization)................................................. 9-12
Setting group calculation................................................ 5-87
Restoring the calibration setting to its initial value.......... 5-55
Setting judgment output............................................... 5-100
Restoring the scaling setting to its initial value............... 5-60
Setting list..................................................................... 5-115
[R graph] area................................................................ 6-40
[Setting list] Tab............................................................ 5-114
A RS-232C........................................................................... 9-1
RS-232C cable (2.5 m, straight)....................................... 1-6
Setting LS-Navigator2........................................5-111, 5-115
Setting multiple measurement targets............................ 5-28
RS-232C conversion adapter (9-pin, female)................... 1-6
Setting multiple OUTs..................................................... 5-43
Appendix
RS-232C Interface............................................................ 8-4

Setting No. of stat proc................................................. 5-112
RS-232C interface commands......................................... 9-2
Setting numeric value formats.......................................... 9-4
[RS232C] tab.................................................................. 7-15
Settings change command list....................................... 9-14
R tag............................................................................... 6-35
Settings on the Display Panel........................................ 5-19
[R UCL]........................................................................... 6-37
Setting status output..........................................5-100, 5-106
[R up standard]............................................................... 6-37
Setting storage control................................................... 5-82
Setting storage cycle...................................................... 5-81
S Setting storage points..................................................... 5-81
Sample hold (Hold 1)...........................................10-7, 10-12 Setting storage target OUT............................................. 5-82
Sample hold (Hold 2)...........................................10-8, 10-13 Setting the Check No. of edges function........................ 5-70
Sampling........................................................................ 5-95 Setting the display panel................................... 5-101, 5-111
Sampling frequency...................................................... 10-23 Setting the encoder...........................................5-100, 5-101

Index
Setting the ETHERNET.................................................. 7-12 Status output.................................................................. 5-98

Setting the gateway........................................................ 7-14 [Status output] area........................................................ 5-91
Setting the IP address.................................................... 7-13 Steps.........................................................................4-6, 4-8
Setting the measurement method.................................. 5-30 Storage control method.................................................. 5-79
Setting the measurement target............................9-17, 9-34 Storage cycle.................................................................. 5-79
Setting the minimum display unit.................................... 5-41 Storage points................................................................ 5-79
Setting the operation at next power ON......................... 7-13 Storage target OUT........................................................ 5-79
Setting the subnet mask................................................. 7-14 Strobe time..........................................................5-96, 5-103
Setting the TCP port number.......................................... 7-15 Suitable mounting for specific environments.................... 2-2
Setting the tolerance mode............................................ 5-41 Switching the display language...................................... 7-21
Setting up the delay........................................................ 5-31 Switching the display method of target........................... 5-27
Setting up the median filter............................................. 5-31 Switching the edge/pitch setting..................................... 5-30
Setting up the tilt correction............................................ 5-31 Switching the program setting........................................ 5-18
Setting up the unit horizontally....................................... 2-18 Switching the tolerance mode........................................ 5-50
Setting up the unit vertically........................................... 2-18 Sync measure target...................................................... 5-76
Setting values.....................4-4, 4-5, 4-6, 4-7, 4-8, 4-9, 4-10, Sync setting...................................................................... 5-7
4-11, 4-12, 4-13 [Sync setting] area.......................................................... 5-75
Shutdown....................................................................... 3-16 System Configuration....................................................... 1-8
Simple display.................................................................. 6-6 System error message...................................................A-18
Single OUT Display.......................................................... 3-6
Software Installation....................................................... 1-18 T
SPC................................................................................ 6-34
[Target]..................................................................6-22, 6-29
[SPC collection setting] area.......................................... 6-39
Target holder pulley.................................... 1-5, 11-13, 11-34
[SPC group interval]....................................................... 6-36
[Target OUT]................................................................... 6-36
[SPC group points]......................................................... 6-36
Target OUT..................................................................... 6-39
SPC information............................................................. 6-35
Target setting method..................................................... 5-28
[SPC] screen...........................................................6-2, 6-34
Target Viewer.................................................................. 6-14
SPC setting.................................................................... 6-39
[Target viewer] screen.............................................6-2, 6-14
[SPC setting] dialog........................................................ 6-38
[Target] window.............................................................. 5-22
Specification of the automatic transmission..................... 9-5
TCP port number............................................................ 7-11
Specifications........................................................ 11-1, 11-2
Temperature characteristics......................................... 11-18
Standard......................................................................... 6-40
Threshold mode............................................................. 5-97
Startup............................................................................ 3-15
Tilt correction.................................................................. 5-26
Stat control method........................................... 5-110, 5-112
State Table.................................................................... 11-20
Statistical information display area................................. 6-33
Time and Date setting.................................................... 7-10
[Time and Date] tab........................................................ 7-10 A
Time delay in response when sending and receiving
Statistical processing.....................................................5-111
Appendix
commands...................................................................... 9-40
Statistical Processing..................................................... 4-13
[Time/view] drop-down list.............................................. 6-17
Statistic process settings.............................................. 5-110
Timing chart.................................................................... 10-1
Statistics clear................................................................ 9-13
Timing ON/OFF (Multiple).............................................. 9-10
Statistics data output...................................................... 9-12
Timing ON/OFF (Single)................................................. 9-10
Statistics processing...................................9-33, 9-36, 10-18
Timing ON/OFF (Synchronization)................................. 9-10
Statistics start................................................................. 9-12
Tolerance......................................................5-39, 6-22, 6-29
Statistics stop................................................................. 9-12
Tolerance mode.............................................................. 5-35
Stat process..................................................................... 5-9
Tolerance setting..........................................5-50, 9-22, 9-35
[Stat process] area....................................................... 5-109
Top edge/Bottom edge................................................... 5-23
Stat process Ch1 to Ch2.............................................. 5-110
Total judgement output................................................. 10-18
Stat processing............................................................... 5-98
Total Judgment............................................................... 6-12
Stat process settings.................................................... 5-113
[Total judgment] screen...........................................6-2, 6-12

Index
Total judgment setting.................................................... 5-97 Windows environment and installation destination......... 1-18
Transition diagram for the display panel operations Writing format to Excel................................................... 6-10
setting screen...................................................................A-4
Trend Graph................................................................... 6-16 X
[Trend graph] screen...............................................6-2, 6-16
[X bar]............................................................................. 6-37
Troubleshooting..............................................................A-15
[X bar average]............................................................... 6-36
Tx-Rx Pos....................................................................... 5-25
[X bar graph] area.......................................................... 6-40
[X bar LCL]..................................................................... 6-36
U
[X bar low standard]....................................................... 6-36
UDP port number............................................................ 7-11 X bar tag......................................................................... 6-35
Ultrafine gap................................................................... 5-25 [X bar UCL]..................................................................... 6-36
Ultrafine outer DIA.......................................................... 5-25 [X bar up standard]......................................................... 6-36
Uninstalling LS-Navigator............................................... 1-20 [X maximum value]......................................................... 6-36
Upon selection of FOCUS, DARK, or EDGE-CHK....... 5-107 [X minimum value].......................................................... 6-36
Upon selection of FREQ-ERR...................................... 5-107
Upon selection of STAT-RUN....................................... 5-107
Upon selection of WAIT or OUTLIER........................... 5-107
Upper Control Limit (UCL) /
Lower Control Limit (LCL).............................................. 6-35
USB cable (2 m)............................................................... 1-6
USB Interface................................................................... 8-3
Using Shortcuts................................................................ 3-3
Using the 40m connecting unit for cable extension........ 2-23
Using the Air Purge Unit................................................... 2-5
Using the Display Panel Stand....................................... 2-18
Using the Display Panel Support.................................... 2-20
Using the Pulley Jig........................................................ 2-10
Using the switches (OP-87611)...................................... 2-19
V
[Valid No. of groups]....................................................... 6-36
Version information......................................................... 7-22
Vertical axis...........................................................6-22, 6-35
A Vertical scale.................................................................. 6-40

Volt of output waiting data.............................................. 5-98
Appendix
W
When any abnormal value exists................................... 6-10
When CH is selected.................................................... 5-108
When INPUT is selected.............................................. 5-108
When OUT-FUNC is selected...................................... 5-107
When output measurement values in synchronization
with the TIMING1 terminal................................................ 9-6
When outputting measurement values using the
“Self timing hold” mode.................................................... 9-6
When STROBE is selected.......................................... 5-108
When the total judgment is "Fail".................................... 6-12
When the total judgment is "Pass"................................. 6-12

Index
MEMO
A
Appendix

Revision history
Date of Version
Revision contents
printing number
January, 2013 2nd edition
April, 2013 3rd edition yyAddition of the BCD unit
July, 2013 2nd revision yyHandling of Ethernet/IP unit, PROFINET unit

1st edition yyChange of the abnormal value exclusion specifications function
November, 2013 2nd revision

2nd edition
February, 2014 3rd revision

1st edition
March, 2014 3rd revision

2st edition
January, 2015 3rd revision

3rd edition

4th edition
March, 2016 3rd revision

5th edition
May, 2016 3rd revision

6th edition
November, 2016 3rd revision

7th edition

8th edition
March, 2019 4th revision

1st edition
October, 2020 4th revision

2nd edition
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EVEN IF KEYENCE OR ONE OF ITS AFFILIATED ENTITIES WAS ADVISED OF A POSSIBLE THIRD PARTY’S
CLAIM FOR DAMAGES OR ANY OTHER CLAIM AGAINST BUYER. In some jurisdictions, some of the foregoing
warranty disclaimers or damage limitations may not apply.
BUYER’S TRANSFER OBLIGATIONS:

If the Products/Samples purchased by Buyer are to be resold or delivered to a third party, Buyer must provide
such third party with a copy of this document, all specifications, manuals, catalogs, leaflets and written information
provided to Buyer pertaining to the Products/Samples.
E 1101-3
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What safety precautions should be taken when using this device?

What safety precautions should be taken when using this device?

What symbols are used in the manual and what do they indicate?

What symbols are used in the manual and what do they indicate?

MLS19GB

Read this manual before use.

Read this user’s manual before use.

It indicates cautions and limitations that must be followed during operation.

It indicates additional information on proper operation.

It indicates tips for better understanding or useful information.

It indicates the reference pages and items in this manual.

Observe the following cautions to prevent malfunction of the LS-9000 series

Precautions for use

2 - LS-9000 Series User’s Manual -

- LS-9000 Series User’s Manual - 3

Precautions on Regulations and Standards

4 - LS-9000 Series User’s Manual -

Software product license agreement 3. Restrictions.

- LS-9000 Series User’s Manual - 5

6 - LS-9000 Series User’s Manual -

Structure of the Manual

7 Environment Setting communication configuration, device information setting, and other

- LS-9000 Series User’s Manual - 7

Introduction Head expansion unit............................................. 1-14

8 - LS-9000 Series User’s Manual -

Connecting the controller and the PC................... 2-25 

Basic Operation Flow.........................................3-2

Outer Diameter / Runout Measurement.............4-8 

- LS-9000 Series User’s Manual - 9

10 - LS-9000 Series User’s Manual -

Setting group calculation.................................. 5-87

- LS-9000 Series User’s Manual - 11

Display Measurement Value...............................6-4 Statistical information display area....................... 6-33

[Target viewer] screen........................................... 6-14

[Oval display] screen............................................ 6-28

12 - LS-9000 Series User’s Manual -

[Event logging] screen.......................................... 6-42

Version information............................................... 7-22

- LS-9000 Series User’s Manual - 13

Chapter 10 Timing Chart 

14 - LS-9000 Series User’s Manual -

- LS-9000 Series User’s Manual - 15

16 - LS-9000 Series User’s Manual -

Checking the Package.............................................. 1-2

- LS-9000 Series User’s Manual - 1-1

Checking the Package

1 nearest KEYENCE office.

1-2 - LS-9000 Series User’s Manual -

HMI Display panel

Head expansion unit

- LS-9000 Series User’s Manual - 1-3

40m connecting unit for cable extension

1-4 - LS-9000 Series User’s Manual -

OP-87684 : For LS-9006 OP-87609 : For LS-9030

OP-87750 : For LS-9006D OP-87749 : For LS-9030D

- LS-9000 Series User’s Manual - 1-5

1-6 - LS-9000 Series User’s Manual -

OP-87696 (For LS-9006/LS-9006M) OP-87695 (For LS-9030/LS-9030M)

OP-87751 (For LS-9030D)

Connecting the controller and the PC................... 2-25

Outer Diameter / Runout Measurement.............4-8

Chapter 10 Timing Chart

*Different models can be used

*1 Compatible with each edition of Home, Pro, and Enterprise.

2 Mount the head.