118843-P1

Rev C, 2/99
Instruction Manual

MKS Type 253B

Throttling Valve

Six Shattuck Road Fax: (978) 975-0093

Andover, MA 01810-2449 E-mail: [email protected]
(800) 227-8766 or (978) 975-2350 Web site: http://www.mksinst.com
 WARRANTY
Type 253B Equipment

MKS Instruments, Inc. (MKS) warrants that the equipment described above (the
“equipment”) manufactured by MKS shall be free from defects in materials and
workmanship for a period of one year from date of shipment and will for a period of two
years from the date of shipment, correctly perform all date-related operations, including
without limitation accepting data entry, sequencing, sorting, comparing, and reporting,
regardless of the date the operation is performed or the date involved in the operation,
provided that, if the equipment exchanges data or is otherwise used with equipment,
software, or other products of others, such products of others themselves correctly
perform all date-related operations and store and transmit dates and date-related data
in a format compatible with MKS equipment. THIS WARRANTY IS MKS’ SOLE
WARRANTY CONCERNING DATE-RELATED OPERATIONS.

For the period commencing with the date of shipment of this equipment and ending one
year later in the case of defects in materials and workmanship, but two years later in the
case of failure to comply with the date-related operations warranty, MKS will, at its
option, either repair or replace any part which is defective in materials or workmanship
or with respect to the date-related operations warranty without charge to the purchaser.
The foregoing shall constitute the exclusive and sole remedy of the purchaser for any
breach by MKS of this warranty.

The purchaser, before returning any equipment covered by this warranty, which is
asserted to be defective by the purchaser, shall make specific written arrangements
with respect to the responsibility for shipping the equipment and handling any other
incidental charges with the MKS sales representative or distributor from which the
equipment was purchased or, in the case of a direct purchase from MKS, with the MKS
home office in Andover, Massachusetts, USA.

This warranty does not apply to any equipment which has not been installed and used
in accordance with the specifications recommended by MKS for the proper and normal
use of the equipment. MKS shall not be liable under any circumstances for indirect,
special, consequential, or incidental damages in connection with, or arising out of, the
sale, performance, or use of the equipment covered by this warranty.

MKS recommends that all MKS pressure and flow products be calibrated periodically
(typically every 6 to 12 months) to ensure accurate readings. When a product is
returned to MKS for this periodic re-calibration it is considered normal preventative
maintenance not covered by any warranty.

THIS WARRANTY IS IN LIEU OF ALL OTHER RELEVANT WARRANTIES,

EXPRESSED OR IMPLIED, INCLUDING THE IMPLIED WARRANTY OF
MERCHANTABILITY AND THE IMPLIED WARRANTY OF FITNESS FOR A
PARTICULAR PURPOSE, AND ANY WARRANTY AGAINST INFRINGEMENT OF
ANY PATENT.

11-98 118843-P1
 118843-P1
Rev C, 2/99

MKS Type 253B

Exhaust Throttle Valve
Please Note:
MKS Instruments provides these documents as the latest version for the revision indicated.
The material is subject to change without notice, and should be verified if used in a critical
application.

Copyright © 1999 by MKS Instruments, Inc.

All rights reserved. No part of this work may be reproduced or transmitted in any form or by
any means, electronic or mechanical, including photocopying and recording, or by any
information storage or retrieval system, except as may be expressly permitted in writing by MKS
Instruments, Inc.
Printed in the United States of America
Parker is a registered trademark of Parker Seals, Lexington, KY
Viton is a registered trademark of E.I. DuPont de Nemours Co., Inc., Wilmington, DE
Protected by U.S. Patent No. 4,327,894
 Table of Contents

Table of Contents

Valve Safety Information ....................................................................................................... 1

Symbols Used in This Instruction Manual.................................................................. 1
Symbols Found on the Unit ....................................................................................... 2
Safety Procedures and Precautions ............................................................................. 3

Sicherheitshinweise für das Ventil.......................................................................................... 5

In dieser Betriebsanleitung vorkommende Symbole ................................................... 5
Erklärung der am Gerät angebrachten Symbole .......................................................... 6
Sicherheitsvorschriften und Vorsichtsmaßnahmen...................................................... 7

Informations relatives à la sécurité pour la valve..................................................................... 9

Symboles utilisés dans ce manuel d'utilisation ........................................................... 9
Symboles apparaissant sur l'unité............................................................................... 10
Mesures de sécurité et précautions ............................................................................. 11

Medidas de seguridad de la válvula ........................................................................................ 13

Símbolos usados en este manual de instrucciones....................................................... 13
Símbolos hallados en la unidad .................................................................................. 14
Procedimientos y precauciones de seguridad .............................................................. 15

Chapter One: General Information......................................................................................... 17

Introduction ............................................................................................................... 17
How This Manual is Organized.................................................................................. 18
Customer Support ...................................................................................................... 18

Chapter Two: Installation ...................................................................................................... 19

How To Unpack the Type 253 Unit ........................................................................... 19
Unpacking Checklist ..................................................................................... 19
Interface Cables ......................................................................................................... 20
System Interface Cables ................................................................................ 20
Generic Shielded Cables................................................................................ 21
Setup ......................................................................................................................... 22
Flanges.......................................................................................................... 22

iii
Table of Contents

Dimensions....................................................................................................23
O-Ring Material.............................................................................................26
Mounting Instructions....................................................................................26
Connectors .................................................................................................................27
15-Pin Type “D” Connector ...........................................................................27
Labels ........................................................................................................................28
Pump Label ...................................................................................................28
Serial Number Label ......................................................................................28

Chapter Three: Operation and Theory of Operation................................................................29

Operation ...................................................................................................................29
Theory of Operation ...................................................................................................29

Chapter Four: Maintenance....................................................................................................31

General Information ...................................................................................................31
Maintenance...............................................................................................................31
How To Clean the Unit ..................................................................................31

Appendix A: Product Specifications.......................................................................................33

Valve Specifications...................................................................................................33
ASA Flange Specifications.........................................................................................34
KF Style ISO Flange Specifications ...........................................................................36
NW Style ISO Flange Specifications ..........................................................................37
CF Flange Specifications............................................................................................38
JIS Flange Specifications............................................................................................40

Appendix B: Model Code Explanation...................................................................................41

Model Code ...............................................................................................................41

Index ......................................................................................................................................45

iv
 List of Figures and Tables

List of Figures and Tables

Figures

Figure 1: Type 253 Valve with an ASA Flange ..................................................................... 23

Figure 2: Type 253 Valve with a KF Style ISO Flange .......................................................... 24
Figure 3: Type 253 Valve with a NW Style ISO Flange......................................................... 24
Figure 4: Type 253 Valve with a CF Flange .......................................................................... 25
Figure 5: Type 253 Valve with a JIS Flange .......................................................................... 25
Figure 6: Pump Label............................................................................................................ 28
Figure 7: Serial Number Label .............................................................................................. 28

Tables

Table 1: Definition of Symbols Found on the Unit .....................................................................2

Tabelle 2: Bedeutung der am Gerät angebrachten Symbole.........................................................6
Tableau 3: Définition des symboles apparaissant sur l'unité ......................................................10
Tabla 4: Definición de los símbolos hallados en la unidad ........................................................14
Table 5: System Interface Cables..............................................................................................20
Table 6: 15-Pin Type “D” Connector Pinout.............................................................................27

v
List of Figures and Tables

vi
Valve Safety Information Symbols Used in This Instruction Manual

Valve Safety Information

Symbols Used in This Instruction Manual

Definitions of WARNING, CAUTION, and NOTE messages used throughout the manual.

Warning The WARNING sign denotes a hazard to personnel. It calls

attention to a procedure, practice, condition, or the like,
which, if not correctly performed or adhered to, could result
in injury to personnel.

Caution The CAUTION sign denotes a hazard to equipment. It calls

attention to an operating procedure, practice, or the like, which, if
not correctly performed or adhered to, could result in damage to or
destruction of all or part of the product.

Note The NOTE sign denotes important information. It calls attention to a

procedure, practice, condition, or the like, which is essential to highlight.

1
Symbols Found on the Unit Valve Safety Information

Symbols Found on the Unit

The following table describes symbols that may be found on the unit.

Definition of Symbols Found on the Unit

|
Protective earth
On (Supply) Off (Supply) Earth (ground) (ground)
IEC 417, No.5007 IEC 417, No.5008 IEC 417, No.5017 IEC 417, No.5019

Frame or chassis Equipotentiality Direct current Alternating current

IEC 417, No.5020 IEC 417, No.5021 IEC 417, No.5031 IEC 417, No.5032

Both direct and Three phase

alternating current Class ll equipment alternating current
IEC 417, No.5033-a IEC 417, No.5172-a IEC 617-2 No.020206

Caution, refer to
accompanying Caution, risk of
documents electric shock Caution, hot surface
ISO 3864, No.B.3.1 ISO 3864, No.B.3.6 IEC 417, No.5041

Table 1: Definition of Symbols Found on the Unit

2
Valve Safety Information Safety Procedures and Precautions

Safety Procedures and Precautions

Observe the following general safety precautions during all phases of valve operation. Failure
to comply with these precautions or with specific warnings elsewhere in this manual violates
safety standards of intended use of the valve and may impair the protection provided by the
equipment. MKS Instruments, Inc. assumes no liability for the customer’s failure to comply
with these requirements.

Warning Moving parts in the valve create a risk of personal injury until
the valve is securely incorporated into a system. To avoid
injury, keep all bodily parts away from any valve opening.

1. Do not insert objects into openings where contact with

moving parts is possible.

2. Isolate the valve from any electrical or pneumatic power

supply before handling the valve.

DO NOT SUBSTITUTE PARTS OR MODIFY VALVE

Do not install substitute parts or perform any unauthorized modification to the valve. Return the
valve to an MKS Calibration and Service Center for service and repair to ensure that all safety
features are maintained.

SERVICE BY QUALIFIED PERSONNEL ONLY

Operating personnel must not attempt component replacement and internal adjustments. Any
service must be performed by qualified service personnel only.

USE CAUTION WHEN OPERATING WITH HAZARDOUS MATERIALS

If hazardous materials are used, observe the proper safety precautions, completely purge the
valve when necessary, and ensure that the material used is compatible with the wetted materials
in this product, including any sealing materials.

PURGE THE VALVE

After installing the unit, or before removing it from a system, purge the unit completely with a
clean, dry gas to eliminate all traces of the previously used flow material.

USE PROPER PROCEDURES WHEN PURGING

This valve must be purged under a ventilation hood, and gloves must be worn for protection.

3
Safety Procedures and Precautions Valve Safety Information

DO NOT OPERATE IN AN EXPLOSIVE ENVIRONMENT

To avoid explosion, do not operate this product in an explosive environment unless it has been
specifically certified for such operation.

USE PROPER FITTINGS AND TIGHTENING PROCEDURES

All valve fittings must be consistent with valve specifications, and compatible with the intended
use of the valve. Assemble and tighten fittings according to manufacturer’s directions.

CHECK FOR LEAK-TIGHT FITTINGS

Carefully check all vacuum component connections to ensure leak-tight installation.

OPERATE AT SAFE INLET PRESSURES

Never operate the valve at pressures higher than the rated maximum pressure (refer to the product
specifications for the maximum allowable pressure).

INSTALL A SUITABLE BURST DISC

When operating from a pressurized gas source, install a suitable burst disc in the vacuum system
to prevent system explosion should the system pressure rise.

KEEP THE UNIT FREE OF CONTAMINANTS

Do not allow contaminants to enter the unit before or during use. Contamination such as dust,
dirt, lint, glass chips, and metal chips may permanently damage the unit or contaminate the
process.

KEEP AWAY FROM VALVE OPENING

Keep fingers, other body parts, and other materials away from the valve opening when the valve
is in operation.

4
Sicherheitshinweise für das Ventil In dieser Betriebsanleitung vorkommende Symbole

Sicherheitshinweise für das Ventil

In dieser Betriebsanleitung vorkommende Symbole

Bedeutung der mit WARNUNG!, VORSICHT! und HINWEIS gekennzeichneten Absätze in

dieser Betriebsanleitung.

Warnung! Das Symbol WARNUNG! weist auf eine Gefahr für das
Bedienpersonal hin. Es macht auf einen Arbeitsablauf, eine
Arbeitsweise, einen Zustand oder eine sonstige Gegebenheit
aufmerksam, deren unsachgemäße Ausführung bzw.
ungenügende Berücksichtigung zu Verletzungen führen kann.

Vorsicht! Das Symbol VORSICHT! weist auf eine Gefahr für das Gerät hin. Es
macht auf einen Bedienungsablauf, eine Arbeitsweise oder eine
sonstige Gegebenheit aufmerksam, deren unsachgemäße Ausführung
bzw. ungenügende Berücksichtigung zu einer Beschädigung oder
Zerstörung des Gerätes oder von Teilen des Gerätes führen kann.

Hinweis Das Symbol HINWEIS macht auf wichtige Informationen bezüglich eines
Arbeitsablaufs, einer Arbeitsweise, eines Zustands oder einer sonstige
Gegebenheit aufmerksam.

5
Erklärung der am Gerät angebrachten Symbole Sicherheitshinweise für das Ventil

Erklärung der am Gerät angebrachten Symbole

Nachstehender Tabelle sind die Bedeutungen der Symbole zu entnehmen, die am Gerät
angebracht sein können.

Bedeutung der am Gerät angebrachten Symbole

|
Ein (Energie) Aus (Energie) Erdanschluß Schutzleiteranschluß
IEC 417, No.5007 IEC 417, No.5008 IEC 417, No.5017 IEC 417, No.5019

Aquipotential-
Masseanschluß anschluß Gleichstrom Wechselstrom
IEC 417, No.5020 IEC 417, No.5021 IEC 417, No.5031 IEC 417, No.5032

Durchgängige Dreileiter-
Gleich- oder doppelte oder Wechselstrom
Wechselstrom verstärkte Isolierung (Drehstrom)
IEC 417, No.5033-a IEC 417, No.5172-a IEC 617-2, No.020206

Warnung vor einer

Gefahrenstelle Warnung vor Höhere Temperatur
(Achtung, Dokumen- gefährlicher an leicht
tation beachten) elektrischer Spannung zugänglichen Teilen
ISO 3864, No.B.3.1 ISO 3864, No.B.3.6 IEC 417, No.5041

Tabelle 2: Bedeutung der am Gerät angebrachten Symbole

6
Sicherheitshinweise für das Ventil Sicherheitsvorschriften und Vorsichtsmaßnahmen

Sicherheitsvorschriften und Vorsichtsmaßnahmen

Folgende allgemeine Sicherheitsvorschriften sind während allen Betriebsphasen dieses Ventils

zu befolgen. Eine Mißachtung der Sicherheitsvorschriften und sonstiger Warnhinweise in
dieser Betriebsanleitung verletzt die für dieses Ventil und seine Bedienung geltenden
Sicherheits-standards, und kann die eingebauten Schutzvorrichtungen wirkungslos machen.
MKS Instruments, Inc. haftet nicht für Mißachtung dieser Sicherheitsvorschriften seitens des
Kunden.

Warnung! Solange das Ventil nicht fest in ein System eingebaut ist,
besteht Verletzungsgefahr aufgrund von beweglichen Teilen.
Daher Finger und andere Körperteile unbedingt von allen
Ventilöffnungen fernhalten

1. Niemals Fremdkörper in Öffnungen einführen, in denen ein

Kontakt mit beweglichen Teilen möglich ist.

2. Das Ventil vor dem Hantieren stets von allen elektrischen

und pneumatischen Kraftquellen trennen.

Niemals Teile austauschen oder Änderungen am Ventil vornehmen!

Ersetzen Sie keine Teile mit baugleichen oder ähnlichen Teilen, und nehmen Sie keine
eigenmächtigen Änderungen am Ventil vor. Schicken Sie das Ventil zwecks Wartung und
Reparatur an den MKS-Kalibrierungs- und -Kundendienst ein. Nur so wird sichergestellt, daß
alle Schutzvorrichtungen voll funktionsfähig bleiben.

Wartung nur durch qualifizierte Fachleute!

Das Auswechseln von Komponenten und das Vornehmen von internen Einstellungen darf nur
von qualifizierten Fachleuten durchgeführt werden, niemals vom Bedienpersonal.

Vorsicht beim Arbeiten mit gefährlichen Stoffen!

Wenn gefährliche Stoffe verwendet werden, muß der Bediener die entsprechenden
Sicherheitsvorschriften genauestens einhalten, das Ventil, falls erforderlich, vollständig spülen,
sowie sicherstellen, daß der Gefahrstoff die von ihm benetzten, im Ventil verwendeten
Materialien, insbesondere Dichtungen, nicht angreift.

7
Sicherheitsvorschriften und Vorsichtsmaßnahmen Sicherheitshinweise für das Ventil

Spülen des Ventils mit Gas!

Nach dem Installieren oder vor dem Ausbau aus einem System muß das Ventil unter Einsatz
eines reinen Trockengases vollständig gespült werden, um alle Rückstände des
Vorgängermediums zu entfernen.

Anweisungen zum Spülen des Ventils!

Das Ventil darf nur unter einer Ablufthaube gespült werden. Schutzhandschuhe sind zu tragen.

Nicht zusammmen mit explosiven Stoffen, Gasen oder Dämpfen benutzen!

Um der Gefahr einer Explosion vorzubeugen, darf dieses Produkt niemals zusammen mit
explosiven Stoffe aller Art eingesetzt werden, sofern es nicht ausdrücklich für diesen Zweck
zugelassen ist.

Anweisungen zum Installieren der Armaturen!

Alle Ventilanschlußstücke und Armaturenteile müssen mit den Ventilspezifikationen
übereinstimmen, und mit dem geplanten Einsatz des Ventils kompatibel sein. Der Einbau,
insbesondere das Anziehen und Abdichten, muß gemäß den Anweisungen des Herstellers
vorgenommen werden.

Ventil auf Undichtigkeiten prüfen!

Überprüfen Sie sorgfältig alle Verbindungen auf undichte Stellen.

Nur unter zulässigen Anschlußdrücken betreiben!

Betreiben Sie das Ventil niemals unter Drücken, die den maximal zulässigen Druck (siehe
Produktspezifikationen) übersteigen.

Geeignete Berstscheibe installieren!

Wenn mit einer unter Druck stehenden Gasquelle gearbeitet wird, sollte eine geeignete
Berstscheibe in das Vakuumsystem installiert werden, um eine Explosionsgefahr aufgrund von
steigendem Systemdruck zu vermeiden.

Verunreinigungen vermeiden!
Stellen Sie sicher, daß Verunreinigungen jeglicher Art weder vor dem Einsatz noch während des
Betriebs in das Innere gelangen können. Staub- und Schmutzpartikel, Glassplitter oder
Metallspäne können das Produkt dauerhaft beschädigen oder Prozeß und Meßwerte verfälschen.

Hände weg von der Ventilöffnung!

Körperteile, insbesondere Finger, sowie Fremdobjekte während des Betriebes von der
Ventilöffnung fernhalten.

8
Informations relatives à la sécurité pour la valve Symboles utilisés dans ce manuel d'utilisation

Informations relatives à la sécurité pour la valve

Symboles utilisés dans ce manuel d'utilisation

Définitions des indications AVERTISSEMENT, ATTENTION, et REMARQUE utilisées dans

ce manuel.

Avertissement L'indication AVERTISSEMENT signale un danger pour le

personnel. Elle attire l'attention sur une procédure, une
pratique, une condition, ou toute autre situation
présentant un risque d'accident pour le personnel, en
cas d'exécution incorrecte ou de non respect des
consignes.

Attention L'indication ATTENTION signale un danger pour l'appareil.

Elle attire l'attention sur une procédure d'exploitation, une
pratique, ou toute autre situation, présentant un risque
d'endommagement ou de destruction d'une partie ou de la
totalité de l'appareil, en cas d'exécution incorrecte ou de non
respect des consignes.

Remarque L'indication REMARQUE signale une information importante. Elle

attire l'attention sur une procédure, une pratique, une condition, ou
toute autre situation, présentant un intérêt particulier.

9
Symboles apparaissant sur l'unité Informations relatives à la sécurité pour la valve

Symboles apparaissant sur l'unité

Le tableau suivant décrit les symboles pouvant apparaître sur l'unité.

Définition des symboles apparaissant sur l'unité

|
Marche Terre de protection
(sous tension) Arrêt (hors tension) Terre (masse) (masse)
IEC 417, No.5007 IEC 417, No.5008 IEC 417, No.5017 IEC 417, No.5019

Masse Equipotentialité Courant continu Courant alternatif

IEC 417, No.5020 IEC 417, No.5021 IEC 417, No.5031 IEC 417, No.5032

Courant continu et Courant alternatif

alternatif Matériel de classe II triphasé
IEC 417, No.5033-a IEC 417, No.5172-a IEC 617-2, No.020206

Attention : se reporter Attention : risque de Attention : surface

à la documentation choc électrique brûlante
ISO 3864, No.B.3.1 ISO 3864, No.B.3.6 IEC 417, No.5041

Tableau 3: Définition des symboles apparaissant sur l'unité

10
Informations relatives à la sécurité pour la valve Mesures de sécurité et précautions

Mesures de sécurité et précautions

Prendre les précautions générales de sécurité suivantes pendant toutes les phases d'exploitation
de la valve. Le non respect des ces précautions ou des avertissements contenus dans ce manuel
constitue une violation des normes de sécurité relatives à l'utilisation de la valve et peut
diminuer la protection fournie par l'appareil. MKS Instruments, Inc. n'assume aucune
responsabilité concernant le non respect des consignes par les clients.

Avertissement Les pièces mobiles de la valve peuvent être une cause

d'accident tant que la valve n'est pas solidement
incorporée dans un système. Pour éviter tout accident,
tenir toute partie du corps à distance de toute ouverture
de la valve.

1. Ne pas insérer des objets dans les ouvertures où le

contact avec des pièces mobiles est possible.

2. Isoler la valve de toute source d'alimentation

électrique ou pneumatique pendant la manipulation de
la valve.

PAS DE SUBSTITUTION DE PIÈCES OU DE MODIFICATION DE LA VALVE

Ne pas installer des pièces de substitution ou effectuer des modifications non autorisées sur la
valve. Renvoyer la valve à un centre de service et de calibrage MKS pour tout dépannage ou
réparation afin de garantir le l'intégrité des dispositifs de sécurité.

DÉPANNAGE UNIQUEMENT PAR DU PERSONNEL QUALIFIÉ

Le personnel d'exploitation ne doit pas essayer de remplacer des composants ou de faire des
réglages internes. Tout dépannage doit être uniquement effectué par du personnel qualifié.

PRÉCAUTION EN CAS D'UTILISATION AVEC DES PRODUITS DANGEREUX

Si des produits dangereux sont utilisés, prendre les mesures de précaution appropriées, purger
complètement la valve quand cela est nécessaire, et s'assurer que les produits utilisés sont
compatibles avec les composants liquides de l'appareil, y compris les matériaux d'étanchéité.

PURGE DE LA VALVE
Après l'installation de l'unité, ou avant son enlèvement d'un système, purger l'unité complètement
avec un gaz propre et sec afin d'éliminer toute trace du produit de flux utilisé précédemment.

11
Mesures de sécurité et précautions Informations relatives à la sécurité pour la valve

UTILISATION DES PROCÉDURES APPROPRIÉES POUR LA PURGE

Cette valve doit être purgée sous une hotte de ventilation, et il faut porter des gants de protection.

PAS D'EXPLOITATION DANS UN ENVIRONNEMENT EXPLOSIF

Pour éviter toute explosion, ne pas utiliser cet appareil dans un environnement explosif, sauf en
cas d'homologation spécifique pour une telle exploitation.

UTILISATION D'ÉQUIPEMENTS APPROPRIÉS ET PROCÉDURES DE SERRAGE

Tous les équipements de la valve doivent être cohérents avec ses spécifications, et compatibles
avec l'utilisation prévue de la valve. Assembler et serrer les équipements conformément aux
directives du fabricant.

VÉRIFICATION DE L'ÉTANCHÉITÉ DES CONNEXIONS

Vérifier attentivement toutes les connexions des composants pour le vide afin de garantir
l'étanchéité de l'installation.

EXPLOITATION AVEC DES PRESSIONS D'ENTRÉE NON DANGEREUSES

Ne jamais utiliser la valve avec des pressions supérieures à la pression nominale maximum (se
reporter aux spécifications de l'unité pour la pression maximum admissible).

INSTALLATION D'UN DISQUE D'ÉCHAPPEMENT ADAPTÉ

En cas d'exploitation avec une source de gaz pressurisé, installer un disque d'échappement adapté
dans le système à vide afin d'éviter une explosion du système en cas d'augmentation de la
pression.

MAINTIEN DE L'UNITÉ À L'ABRI DES CONTAMINATIONS

Ne pas laisser des produits contaminants pénétrer dans l'unité avant ou pendant l'utilisation. Des
produits contaminants tels que des poussières et des fragments de tissu, de glace et de métal
peuvent endommager l'unité d'une manière permanente ou contaminer le processus.

PRÉCAUTION AVEC L'OUVERTURE DE LA VALVE

Éviter tout contact des mains, toute autre partie du corps, ou tout autre matériel avec l'ouverture
de la valve quand celle-ci est en fonctionnement.

12
Medidas de seguridad de la válvula Símbolos usados en este manual de instrucciones

Medidas de seguridad de la válvula

Símbolos usados en este manual de instrucciones

Definiciones de los mensajes de advertencia, precaución y de las notas usados en el manual.

Advertencia El símbolo de advertencia indica la posibilidad de que se

produzcan daños personales. Pone de relieve un
procedimiento, práctica, estado, etc. que en caso de no
realizarse u observarse correctamente puede causar
daños personales.

Precaución El símbolo de precaución indica la posibilidad de producir daños

al equipo. Pone de relieve un procedimiento operativo, práctica,
estado, etc. que en caso de no realizarse u observarse
correctamente puede causar daños o la destrucción total o parcial
del equipo.

Nota El símbolo de notas indica información de importancia. Este símbolo

pone de relieve un procedimiento, práctica o condición cuyo
conocimiento es esencial destacar.

13
Símbolos hallados en la unidad Medidas de seguridad de la válvula

Símbolos hallados en la unidad

La tabla siguiente contiene los símbolos que puede hallar en la unidad.

Definición de los símbolos hallados en la unidad

|
Encendido Apagado
(alimentación eléctrica) (alimentación eléctrica) Puesta a tierra Protección a tierra
IEC 417, N° 5007 IEC 417, N° 5008 IEC 417, N° 5017 IEC 417, N° 5019

Caja o chasis Equipotencialidad Corriente continua Corriente alterna

IEC 417, N° 5020 IEC 417, N° 5021 IEC 417, N° 5031 IEC 417, N° 5032

Corriente continua y Corriente alterna

alterna Equipo de clase II trifásica
IEC 417, N° 5033-a IEC 417, N° 5172-a IEC 617-2, N° 020206

Precaución. Consulte
los documentos Precaución. Riesgo Precaución. Superficie
adjuntos de descarga eléctrica caliente
ISO 3864, N° B.3.1 ISO 3864, N° B.3.6 IEC 417, N° 5041

Tabla 4: Definición de los símbolos hallados en la unidad

14
Medidas de seguridad de la válvula Procedimientos y precauciones de seguridad

Procedimientos y precauciones de seguridad

Las precauciones generales de seguridad descritas a continuación deben observarse durante

todas las etapas de funcionamiento de la válvula. La falta de cumplimiento de dichas
precauciones o de las advertencias específicas a las que se hace referencia en el manual,
constituye una violación de las normas de seguridad establecidas para el uso previsto de la
válvula y podría anular la protección proporcionada por el equipo. Si el cliente no cumple
dichas precauciones y advertencias, MKS Instruments, Inc. no asume responsabilidad legal
alguna.

Advertencia Hasta que la válvula sea incorporada en forma segura al

sistema, las piezas en movimiento presentes en la misma
pueden causar daños personales. Para evitarlo, mantenga
todo el cuerpo alejado de la abertura de válvula.

1. No introduzca por las aberturas objetos que puedan

entrar en contacto con piezas en movimiento.

2. Antes de tocar la válvula, aíslela de toda fuente de

alimentación neumática o eléctrica.

NO UTILICE PIEZAS NO ORIGINALES O MODIFIQUE LA VÁLVULA

No instale piezas que no sean originales o modifique la válvula sin autorización. Para asegurar el
correcto funcionamiento de todos los dispositivos de seguridad, envíe la válvula al Centro de
servicio y calibración de MKS toda vez que sea necesario efectuar reparaciones o tareas de
mantenimiento.

LAS REPARACIONES DEBEN SER EFECTUADAS ÚNICAMENTE POR TÉCNICOS

AUTORIZADOS
Los operarios no deben intentar reemplazar los componentes o realizar tareas de ajuste en el
interior. Las tareas de mantenimiento o reparación deben ser realizadas únicamente por personal
autorizado.

TENGA CUIDADO CUANDO TRABAJE CON MATERIALES TÓXICOS

Cuando se utilicen materiales tóxicos, los operarios deberán cumplir las medidas de seguridad
correspondientes, purgar totalmente la válvula cuando sea necesario y comprobar que el material
utilizado sea compatible con los materiales humedecidos del instrumento e inclusive, con los
materiales de sellado.

PURGUE LA VÁLVULA
Una vez instalada la unidad o antes de retirarla del sistema, purgue completamente la unidad con
gas limpio y seco para eliminar todo resto de la sustancia líquida empleada anteriormente.

15
Procedimientos y precauciones de seguridad Medidas de seguridad de la válvula

USE PROCEDIMIENTOS ADECUADOS PARA REALIZAR LA PURGA

La válvula debe purgarse debajo de una campana de ventilación y deben utilizarse guantes
protectores.

NO HAGA FUNCIONAR LA VÁLVULA EN UN AMBIENTE CON RIESGO DE

EXPLOSIONES
Para evitar que se produzcan explosiones, no haga funcionar este producto en un ambiente con
riesgo de explosiones, excepto cuando el mismo haya sido certificado específicamente para tal
uso.

USE ACCESORIOS ADECUADOS Y REALICE CORRECTAMENTE LOS

PROCEDIMIENTOS DE AJUSTE
Todos los accesorios de la válvula deben cumplir las especificaciones de la misma y ser
compatibles con el uso que se debe dar a la válvula. Arme y ajuste los accesorios de acuerdo con
las instrucciones del fabricante.

COMPRUEBE QUE LAS CONEXIONES SEAN A PRUEBA DE FUGAS

Inspeccione cuidadosamente las conexiones de los componentes de vacío para comprobar que
hayan sido instalados a prueba de fugas.

HAGA FUNCIONAR LA VÁLVULA CON PRESIONES DE ENTRADA SEGURAS

No haga funcionar nunca la válvula con presiones superiores a la máxima presión nominal (en las
especificaciones del instrumento hallará la presión máxima permitida).

INSTALE UNA CÁPSULA DE SEGURIDAD ADECUADA

Cuando el instrumento funcione con una fuente de gas presurizado, instale una cápsula de
seguridad adecuada en el sistema de vacío para evitar que se produzcan explosiones cuando suba
la presión del sistema.

MANTENGA LA UNIDAD LIBRE DE CONTAMINANTES

No permita el ingreso de contaminantes en la unidad antes o durante su uso. Los productos
contaminantes tales como polvo, suciedad, pelusa, lascas de vidrio o virutas de metal pueden
dañar irreparablemente la unidad o contaminar el proceso.

MANTÉNGASE ALEJADO DE LA ABERTURA DE LA VÁLVULA

Cuando la válvula esté funcionando, mantenga los dedos, otras partes del cuerpo y otros
materiales alejados de la abertura.

16
Chapter One: General Information Introduction

Chapter One: General Information

Introduction

The MKS Type 253B Exhaust Throttle Valve is a butterfly valve designed to regulate (and in the
case of a sealing valve, to shutoff) the removal of gas from a vacuum chamber when used with a
MKS controller.
The 253 valve can be used with the Type 651, 652, 152G, or 252 (revision D or later) controllers.
If you are retrofitting the 253B valve into an existing system with hex connector cables, an
adapter cable is required (refer to Table 5, page 20).
The 253 valve is normally mounted to a Roots blower, diffusion, turbo, cryo, or other high
vacuum pump. The valve’s butterfly is positioned to modulate the gas flow (pumping speed as
seen by the chamber), thereby controlling pressure within the vacuum chamber. A special feature
of the valve is a nonlinear actuator placed between the butterfly shaft and the motor drive shaft
whose function is to generate a linear valve transfer characteristic1. Practically speaking, the
MKS controller will need little gain and phase lead adjustment as it operates the valve from the
full closed to the full open position. This is of extreme importance when systems are
automatically programmed to change flows and pressures as a process is carried out within the
chamber.

1 U.S. Patent No. 4,327,894

17
How This Manual is Organized Chapter One: General Information

How This Manual is Organized

This manual is designed to provide instructions on how to set up, install, and operate a Type 253
unit.
Before installing your Type 253 unit in a system and/or operating it, carefully read and
familiarize yourself with all precautionary notes in the Safety Messages and Procedures
section at the front of this manual. In addition, observe and obey all WARNING and
CAUTION notes provided throughout the manual.

Chapter One, General Information, (this chapter) introduces the product and describes the
organization of the manual.
Chapter Two, Installation, explains the environmental requirements and describes how to mount
the instrument in your system.
Chapter Three, Operation and Theory of Operation, gives a description of the instrument and its
functionality.
Chapter Four, Maintenance, lists any maintenance required to keep the instrument in good
working condition.
Appendix A, Product Specifications, lists the specifications of the instrument.
Appendix B, Model Code Explanation, describes the instrument’s ordering codes.

Customer Support

Standard maintenance and repair services are available at all of our regional MKS Calibration
and Service Centers, listed on the back cover. In addition, MKS accepts the instruments of other
manufacturers for recalibration using the Primary and Transfer Standard calibration equipment
located at all of our regional service centers. Should any difficulties arise in the use of your Type
253 instrument, or to obtain information about companion products MKS offers, contact any
authorized MKS Calibration and Service Center. If it is necessary to return the instrument to
MKS, please obtain an ERA Number (Equipment Return Authorization Number) from the MKS
Calibration and Service Center before shipping. The ERA Number expedites handling and
ensures proper servicing of your instrument.
Please refer to the inside of the back cover of this manual for a list of MKS Calibration and
Service Centers.

Warning All returns to MKS Instruments must be free of harmful,

corrosive, radioactive, or toxic materials.

18
Chapter Two: Installation How To Unpack the Type 253 Unit

Chapter Two: Installation

How To Unpack the Type 253 Unit

MKS has carefully packed the Type 253 unit so that it will reach you in perfect operating order.
Upon receiving the unit, however, you should check for defects, cracks, broken connectors, etc.,
to be certain that damage has not occurred during shipment.

Note Do not discard any packing materials until you have completed your
inspection and are sure the unit arrived safely.

If you find any damage, notify your carrier and MKS immediately. If it is necessary to return the
unit to MKS, obtain an ERA Number (Equipment Return Authorization Number) from the MKS
Service Center before shipping. Please refer to the inside of the back cover of this manual for a
list of MKS Calibration and Service Centers.

Unpacking Checklist

Standard Equipment:
• Type 253 Unit
• Type 253 Instruction Manual (this book)

Optional Equipment:
• Electrical Connector Accessories Kit (includes a mate for the electrical connector should
you choose to make your own cable):
253B-1-K1
253B-2-K1
• Interface cables (refer to Table 5, page 20)

19
Interface Cables Chapter Two: Installation

Interface Cables

As of January 1, 1996, most products shipped to the European Community must comply with the
EMC Directive 89/336/EEC, which covers radio frequency emissions and immunity tests. In
addition, as of January 1, 1997, some products shipped to the European Community must also
comply with the Product Safety Directive 92/59/EEC and Low Voltage Directive 73/23/EEC,
which cover general safety practices for design and workmanship. MKS products that meet
these requirements are identified by application of the CE Mark.

To ensure compliance with EMC Directive 89/336/EEC, an overall metal braided shielded cable,
properly grounded at both ends, is required during use. No additional installation requirements
are necessary to ensure compliance with Directives 92/59/EEC and 73/23/EEC.

Note 1. Overall metal braided shielded cables, properly grounded at both

ends, are required to meet CE specifications.
2. To order metal braided shielded cables, add an “S” after the cable
type designation. For example, to order a standard cable to connect
the 253 unit to a Type 651 controller, use part number CB651-30-x;
for a metal braided shielded cable, use part number CB651S-30-x
(where x = length in feet).

System Interface Cables

The system interface cables include cables to connect the 253 unit to a controller, or to retrofit
the unit into an existing system.

System Interface Cables

To Connect the 253 Unit To... Use the MKS Cable...*
Standard Shielded
651, 652, 152G CB651-30-x CB651S-30-x
252D, 252E CB252-16-x CB252S-16-x
Existing System** CB651-31-1 CB651S-31-1
* x = length in feet
** If you are retrofitting the 253B valve into an existing system with hex connector cables, an
adapter cable is required. Use adapter cable CB651-31-1 to replace the 253A valve with the
253B valve.

Table 5: System Interface Cables

20
Chapter Two: Installation Interface Cables

Generic Shielded Cables

MKS offers a full line of cables for all MKS equipment. Should you choose to manufacture your
own cables, follow the guidelines listed below:
1. The cable must have an overall metal braided shield, covering all wires. Neither aluminum
foil nor spiral shielding will be as effective; using either may nullify regulatory compliance.
2. The connectors must have a metal case which has direct contact to the cable’s shield on the
whole circumference of the cable. The inductance of a flying lead or wire from the shield to
the connector will seriously degrade the shield’s effectiveness. The shield should be
grounded to the connector before its internal wires exit.
3. With very few exceptions, the connector(s) must make good contact to the device’s case
(ground). “Good contact” is about 0.01 ohms; and the ground should surround all wires.
Contact to ground at just one point may not suffice.
4. For shielded cables with flying leads at one or both ends; it is important at each such end, to
ground the shield before the wires exit. Make this ground with absolute minimum length. (A
¼ inch piece of #22 wire may be undesirably long since it has approximately 5 nH of
inductance, equivalent to 31 ohms at 1000 MHz). After picking up the braid’s ground, keep
wires and braid flat against the case. With very few exceptions, grounded metal covers are
not required over terminal strips. If one is required, it will be stated in the Declaration of
Conformity or in the instruction manual.
5. In selecting the appropriate type and wire size for cables, consider:
A. The voltage ratings;
2
B. The cumulative I R heating of all the conductors (keep them safely cool);
C. The IR drop of the conductors, so that adequate power or signal voltage gets to the
device;
D. The capacitance and inductance of cables which are handling fast signals, (such as data
lines or stepper motor drive cables); and
E. That some cables may need internal shielding from specific wires to others; please see
the instruction manual for details regarding this matter.

21
Setup Chapter Two: Installation

Setup

Flanges
The 253 valve is available with the following flange types:
• ASA
• NW Style ISO
• KF Style ISO
• CF
• JIS

Examples of each flange type are shown in Dimensions, page 23. Refer to Appendix A: Product
Specifications, page 33, for detailed information on each flange type.

22
Chapter Two: Installation Setup

Dimensions

Note 1. All dimensions are listed in inches with millimeters referenced in

parentheses.
2. The actual dimensions for the Inner Diameter (A), Outside Diameter
(B), Thickness (C), and Bolt Hole Diameter (D, where applicable),
are listed in Appendix A: Product Specifications, page 33.

3.75 Square
(95.25) TYP
5.00
(127) TYP 15-Pin Type "D"
Connector
4.45
(113) TYP

0.39
(9.9)
Driver/Gear
Assembly
B A
DIA DIA

O-Ring
Supplied
D
with Valve
DIA Hole Through
C

Type 253B-3-3-2 Shown

Figure 1: Type 253 Valve with an ASA Flange

23
Setup Chapter Two: Installation

Driver/Gear 15-Pin Type "D"

Assembly Connector

1.44
(36.5)
B A
DIA DIA

Type 253B-2-50-2 Shown

Figure 2: Type 253 Valve with a KF Style ISO Flange

15-Pin Type "D"

Driver/Gear Connector
Assembly

0.39
(9.9)

B A
DIA DIA

D
DIA Hole Through
C

Type 253B-3-80-2 Shown

Figure 3: Type 253 Valve with a NW Style ISO Flange

24
Chapter Two: Installation Setup

Driver/Gear 15-Pin Type "D"

Assembly Connector

B A
DIA DIA
D
DIA Hole Through C

Type 253B-2-3CF-2 Shown

Figure 4: Type 253 Valve with a CF Flange

15-Pin Type "D"

Driver/Gear Connector
Assembly

1.44
(36.5)

B A
DIA DIA

D
DIA Hole Through C
O-Ring Supplied
by Customer

Type 253B-2-50J-2 Shown

Figure 5: Type 253 Valve with a JIS Flange

25
Setup Chapter Two: Installation

O-Ring Material
Valves that have an O-ring sealed flapper are called sealing butterfly valves. This design ensures
closed leak rates less than 1.3 x 10-7 scc/sec when new. Ensure that the O-ring material is
compatible with the gases it will be exposed to in the system.

Mounting Instructions

Warning The moving parts in the valve create a risk of personal injury
until the valve is securely incorporated into a system. To
avoid injury keep all objects away from any valve opening.

• Do not insert objects into openings where contact with moving parts is possible.
• Isolate the equipment from any electrical or pneumatic power supply before handling the
valve.

The valve may be mounted in any position by clamping its KF style flanges or through bolting its
flanges to a pair of mating flanges. Install the valve with the PUMP label (refer to Figure 6, page
28), oriented towards the high vacuum pump. Consideration should be given to providing proper
clearances for valve removal, as routine cleaning may be necessary due to buildup of process
contaminants.

26
Chapter Two: Installation Connectors

Connectors

Note Overall metal braided shielded cables, properly grounded at both ends,
are required to meet CE specifications.

15-Pin Type “D” Connector

The 15-pin Type “D” connector, located at the end of the 6” pigtail cable, is used to connect the
253 valve to a controller. The system interface cables are listed in Table 5, page 20.

15-Pin Type “D” Connector Pinout

Pin Assignment
1 No Connection
2 No Connection
3 Limit Switch Common
4 Open Limit Switch
5 Close Limit Switch
6 No Connection
7 No Connection
8 Winding A
9 Winding A'
10 Winding A Common
11 No Connection
12 No Connection
13 Winding B
14 Winding B'
15 Winding B Common

Table 6: 15-Pin Type “D” Connector Pinout

Note The “No Connection” pin assignment refers to a pin with no internal
connection.

27
Labels Chapter Two: Installation

Labels

There are two labels on the 253 valve; a pump label and a serial number label. The labels are
located on opposite sides of the driver/gear assembly (refer to Figures 1 to 5, pages 23 to 25).

Pump Label
The pump label, shown in Figure 6 indicates which side of the valve should be oriented towards the
high vacuum pump during installation.

Figure 6: Pump Label

Serial Number Label

The serial number label, shown in Figure 7, lists the serial number and the product model
number, and displays the CE mark signifying compliance with the European CE regulations.

Serial #:
123456789
Model #:
253B-2-2-1

MKS Instruments, Inc. Made in the USA

Figure 7: Serial Number Label

Refer to Appendix B: Model Code Explanation, page 41, for more information.

28
Chapter Three: Operation and Theory of Operation Operation

Chapter Three: Operation and Theory of Operation

Operation

MKS products are designed and tested to provide the highest degree of safety attainable. To use
your 253 valve safely, you must always conform to the following instructions:

Caution When operating this valve with high vacuum diffusion pumps, it is
important to make certain the pressure above the oil vapor jet does
not exceed 0.5 milliTorr, as this leads to unstable pump performance.
This unstable (oscillating) pump characteristic will manifest itself as
a seemingly unstable control loop and no amount of adjustment of
the lead and gain will correct the situation. The only solution is to
lower flow rates so that the diffusion pump may operate in its correct
pressure range.

Refer to the appropriate Instruction Manual for complete setup instructions for your MKS controller.

Theory of Operation

A butterfly valve’s flow rate is very nonlinear with respect to shaft position; that is, the percent
change in flow rate ranges from very large values when the valve is near closed, to zero when it
is near fully open. This very large change in transfer characteristic means that for optimum
performance, gain and phase lead must be reset each time a valve operates at a different position.
In a processing situation, this is intolerable and MKS has introduced a special actuator
mechanism which changes the transfer characteristics to a more linear relationship. The special
“cosine generator” actuator introduces a second nonlinear motion which cancels the butterfly’s
nonlinear characteristics by giving a very slow initial opening characteristic (theoretically zero)
rising as a sine (cosine) function and reaching a maximum when the valve is fully open. This
gives the system near constant resolution throughout the valve’s throughput range, enabling one
lead and gain setting to be used over the operating range of the valve.

29
Theory of Operation Chapter Three: Operation and Theory of Operation

This page intentionally left blank.

30
Chapter Four: Maintenance General Information

Chapter Four: Maintenance

General Information

If the 253 valve fails to operate properly upon receipt, check for shipping damage, and check the
cables for proper continuity. Any damage should be reported to the carrier and MKS Instruments
immediately. If it is necessary to return the unit to MKS, obtain an ERA number (Equipment
Return Authorization Number) from a MKS Service Center before shipping. Please refer to the
inside back cover of this manual for a list of MKS Calibration and Service Centers.

Maintenance

Periodically check for wear on the cables and inspect the valve for visible signs of damage.
Difficulties encountered in the use of valves generally are caused by process chemistry,
contamination of wetted parts, or mechanical wear. Contact any authorized MKS Service Center for
repair instructions if you encounter any difficulties you cannot correct.

How To Clean the Unit

Periodically wipe down the unit with a cloth dampened with deionized water.

31
Maintenance Chapter Four: Maintenance

This page intentionally left blank.

32
Appendix A: Product Specifications Valve Specifications

Appendix A: Product Specifications

Valve Specifications

CE Mark Compliance
Electromagnetic Compatibility2 EMC Directive 89/336/EEC
Machinery Machinery Directive 89/392/EEC
Differential Pressure Across Valve 1 atm. (15 psig) max.
Driver/Gear Assembly Width 3.75” square (95 mm)
External Leakage at Shaft Seal 1 x 10-7 scc/sec He
Materials Exposed to Process 316L SS, Viton® **
Heater Operating Temperature* 80° to 90° C (176° to 194° F) for 20° to 40° C
(68° to 104° F) ambient
Power Input* ±15 VDC, 1 Amp (30 Watts) nominal, user-
(for valve body heater) supplied
Note: DC input is used for safety purposes.
Resolution Standard: 1/10,000
Fast Motor Option: 1/2800***
Shaft Seal Viton**
Speed (open to close) Standard: 7.5 sec
Optional: < 2 sec***
Valve Body Operating Temperature 0° to 90° C (32° to 194° F) max.
Valve Motor Ambient Operating Temperature 0° to 70° C (32° to 158° F) max.
Warm-up Time* 1 hour to 80° C (176° F),
2 hours to steady state
* Applicable only to KF style ISO valves that are equipped with the heater option.
** Where Viton is used, other materials are available; consult factory.
*** Fast Motor Option offered on select sizes; consult factory for ordering code.

2 An overall metal braided shielded cable, properly grounded at both ends, is required during use.

33
ASA Flange Specifications Appendix A: Product Specifications

ASA Flange Specifications

Valve Type Number 253B- 253B- 253B- 253B- 253B- 253B- 253B-
2-2-1 2-2-2 60-2-1 60-2-2 3-2-2 3-3-2 4-3-2
Inside Diameter (A)*
Inches 1.88 1.950 2.362 2.362 3.025 3.025 3.965
(mm) (47.8) (49.5) (60.0) (60.0) (76.8) (76.8) (100.7)
Mounting Flange ASA 2” ASA 2” ASA 2” ASA 2” ASA 2” ASA 3” ASA 3”
Outside Diameter (B)*
Inches 5.95 5.95 5.95 5.95 5.95 7.40 7.40
(mm) (151) (151) (151) (151) (151) (188) (188)
Controllable
Conductance (l/sec)
min 0.35 0.70 TBD 0.80 1.00 1.00 1.50
max 300 300 TBD 375 500 500 950
Closed Leakage
(Torr l/sec) <10-7 N/A <10-7 N/A N/A N/A N/A
Flapper Seal** Viton None Viton None None None None
Thickness (C)*
Inches 0.75 0.75 0.75 0.75 0.75 0.88 0.88
(mm) (19.1) (19.1) (19.1) (19.1) (19.1) (22.4) (22.4)
Overall Height
Inches 10.79 10.79 10.79 10.79 10.79 12.24 12.24
(mm) (274.1) (274.1) (274.1) (274.1) (274.1) (310.9) (310.9)
No. of Bolt Holes 4 4 4 4 4 4 4
Bolt Hole
Diameter (D)*
Inches 0.75 0.75 0.75 0.75 0.75 0.75 0.75
(mm) (19.1) (19.1) (19.1) (19.1) (19.1) (19.1) (19.1)
Bolt Circle Diameter
Inches 4.750 4.750 4.750 4.750 4.750 6.000 6.000
(mm) (120.7) (120.7) (120.7) (120.7) (120.7) (152.4) (152.4)
Flange O-ring groove
ID
In 3.365 3.365 3.365 3.365 3.365 4.475 4.475
(mm) (85.5) (85.5) (85.5) (85.5) (85.5) (113.7) (113.7)
Parker® No. or 2-237 2-237 2-237 2-237 2-237 2-349 2-349
Size (JIS)

(Continued on next page)

34
Appendix A: Product Specifications ASA Flange Specifications

ASA Flange Specifications (Continued)

Valve Type Number 253B- 253B- 253B- 253B- 253B- 253B-

4-4-2 6-4-2 6-6-2 8-6-2 8-8-2 10-10-2
Inside Diameter (A)*
Inches 3.965 5.781 5.781 7.501 7.501 10.000
(mm) (100.7) (146.8) (146.8) (190.5) (190.5) (254.0)
Mounting Flange ASA 4” ASA 4” ASA 6” ASA 6” ASA 8” ASA 10”
Outside Diameter (B)*
Inches 8.90 8.90 10.90 10.90 13.19 16.00
(mm) (226.1) (226.1) (276.9) (276.9) (335.0) (406.4)
Controllable
Conductance (l/sec)
min 1.50 TBD TBD TBD TBD TBD
max 950 TBD TBD TBD TBD TBD
Closed Leakage N/A N/A N/A N/A N/A N/A
(Torr l/sec)
Flapper Seal** None None None None None None
Thickness (C)*
Inches 0.88 0.88 0.94 0.94 0.94 0.94
(mm) (22.4) (22.4) (23.9) (23.9) (23.9) (23.9)
Overall Height
Inches 13.74 13.74 15.74 15.74 18.03 20.84
(mm) (349.0) (349.0) (399.8) (399.8) (458.0) (529.3)
No. of Bolt Holes 8 8 8 8 8 12
Bolt Hole
Diameter (D)* 0.75 0.75 0.88 0.88 0.88 1.00
Inches (19.1) (19.1) (22.4) (22.4) (22.4) (25.4)
(mm)
Bolt Circle Diameter
Inches 7.500 7.500 9.500 9.500 11.750 14.250
(mm) (190.9) (190.9) (241.3) (241.3) (298.5) (362.0)
Flange O-ring groove
ID
In 5.995 5.995 8.000 8.000 9.734 11.938
(mm) (152.3) (152.3) (203.2) (203.2) (247.2) (303.2)
Parker® No. or 2-258 2-258 2-266 2-266 2-273 2-278
Size (JIS)
* Refer to Figure 1, page 23.
** Where Viton is used, other materials are available; consult factory.

35
KF Style ISO Flange Specifications Appendix A: Product Specifications

KF Style ISO Flange Specifications

Valve Type Number 253B- 253B- 253B- 253B- 253B- 253B-

20-40-1 20-40-2 1-40-1 1-40-2 2-50-1 2-50-2
Inside Diameter (A)*
Inches 0.779 0.779 1.270 1.270 1.888 2.000
(mm) (19.8) (19.8) (32.3) (32.3) (48.0) (50.8)
Mounting Flange KF-40 KF-40 KF-40 KF-40 KF-50 KF-50
Outside Diameter (B)*
Unheated
Inches 2.75 2.75 2.75 2.75 3.25 3.25
(mm) (69.9) (69.9) (69.9) (69.9) (82.6) (82.6)
With heater option
Inches 3.00 3.00 3.00 3.00 3.50 3.50
(mm) (76.2) (76.2) (76.2) (76.2) (88.9) (88.9)
Controllable
Conductance (l/sec)
min 0.07 0.25 0.20 0.40 0.35 0.70
max 24 31 50 55 300 300
Closed Leakage
(Torr l/sec) <10-7 N/A <10-7 N/A <10-7 N/A
Flapper Seal** Viton None Viton None Viton None
Thickness (C)*
Inches 2.25 2.25 2.25 2.25 2.00 2.00
(mm) (57.2) (57.2) (57.2) (57.2) (50.8) (50.8)
Overall Height
Unheated
Inches 8.64 8.64 8.64 8.64 9.14 9.14
(mm) (219.5) (219.5) (219.5) (219.5) (232.2) (232.2)
With heater option
Inches 8.81 8.81 8.81 8.81 9.31 9.31
(mm) (223.8) (223.8) (223.8) (223.8) (236.5) (236.5)
No. of Bolt Holes N/A N/A N/A N/A N/A N/A
Bolt Hole Diameter (D) N/A N/A N/A N/A N/A N/A
Bolt Circle Diameter N/A N/A N/A N/A N/A N/A
Flange O-ring groove N/A N/A N/A N/A N/A N/A
ID
* Refer to Figure 2, page 24.
** Where Viton is used, other materials are available; consult factory.

36
Appendix A: Product Specifications NW Style ISO Flange Specifications

NW Style ISO Flange Specifications

Valve Type Number 253B- 253B- 253B- 253B- 253B- 253B- 253B-
60-63-1 60-63-2 3-80-2 4-100-2 6-160-2 8-200-2 10-250-2
Inside Diameter (A)*
Inches 2.362 2.362 3.000 3.875 5.750 7.650 9.700
(mm) (60.0) (60.0) (76.2) (98.4) (146.1) (194.3) (246.4)
Mounting Flange NW-63 NW-63 NW-80 NW-100 NW-160 NW-200 NW-250
Outside Diameter (B)*
Inches 5.95 5.95 5.95 7.40 8.90 11.22 13.19
(mm) (151.1) (151.1) (151.1) (188.0) (226.1) (285.0) (335.0)
Controllable
Conductance (l/sec)
min TBD 0.80 1.00 1.50 TBD TBD TBD
max TBD 375 500 900 TBD TBD TBD
Closed Leakage
(Torr l/sec) <10-7 N/A N/A N/A N/A N/A N/A
Flapper Seal** Viton None None None None None None
Thickness (C)*
Inches 0.81 0.81 0.81 0.94 0.94 0.94 0.94
(mm) (20.6) (20.6) (20.6) (23.9) (23.9) (23.9) (23.9)
Overall Height
Inches 10.79 10.79 10.79 12.24 13.74 16.06 18.03
(mm) (274.1) (274.1) (274.1) (310.9) (349.0) (407.9) (458)
No. of Bolt Holes 4 4 8 8 8 12 12
Bolt Hole
Diameter (D)* 0.35 0.35 0.35 0.35 0.43 0.43 0.43
Inches (8.89) (8.89) (8.89) (8.89) (10.9) (10.9) (10.9)
(mm)
Bolt Circle Diameter
Inches 4.330 4.330 4.920 5.710 7.870 10.240 12.200
(mm) (110.0) (110.0) (125.0) (145.0) (199.9) (260.1) (309.9)
Flange O-ring groove N/A N/A N/A N/A N/A N/A N/A
ID
* Refer to Figure 3, page 24.
** Where Viton is used, other materials are available; consult factory.

37
CF Flange Specifications Appendix A: Product Specifications

CF Flange Specifications

Valve Type Number 253B- 253B- 253B- 253B- 253B-

20-2CF-1 20-2CF-2 1-2CF-1 1-2CF-2 2-3CF-1
Inside Diameter (A)*
Inches 0.779 0.779 1.270 1.270 1.888
(mm) (19.79) (19.79) (32.3) (32.3) (48.0)
Mounting Flange 2¾” CF 2¾” CF 2¾” CF 2¾” CF 33/8” CF
Outside Diameter (B)*
Inches 2.75 2.75 2.75 2.75 3.25
(mm) (69.9) (69.9) (69.9) (69.9) (82.6)
Controllable
Conductance (l/sec)
min 0.07 0.25 0.20 0.40 0.35
max 24 31 50 55 300
Closed Leakage
(Torr l/sec) <10-7 N/A <10-7 N/A <10-7
Flapper Seal** Viton None Viton None Viton
Thickness (C)*
Inches 1.25 1.25 1.25 1.25 1.06
(mm) (31.8) (31.8) (31.8) (31.8) (26.9)
Overall Height
Inches 8.64 8.64 8.64 8.64 9.14
(mm) (219.5) (219.5) (219.5) (219.5) (232.2)
No. of Bolt Holes 6 6 6 6 8
Bolt Hole
Diameter (D)* 0.26 0.26 0.26 0.26 0.33
Inches (6.60) (6.60) (6.60) (6.60) (8.38)
(mm)
Bolt Circle Diameter
Inches 2.312 2.312 2.312 2.312 2.850
(mm) (58.7) (58.7) (58.7) (58.7) (72.4)
Flange O-ring groove N/A N/A N/A N/A N/A
ID

(Continued on next page)

38
Appendix A: Product Specifications CF Flange Specifications

CF Flange Specifications (Continued)

Valve Type Number 253B 253B 253B 253B 253B

2-3CF-2 2-4CF-1 2-4CF-2 3-6CF-2 4-6CF-2
Inside Diameter (A)*
Inches 2.000 1.888 2.000 3.000 3.875
(mm) (50.8) (48.0) (50.8) (76.2) (98.4)
Mounting Flange 2¾” CF 4½” CF 4½” CF 6” CF 6” CF
Outside Diameter (B)*
Inches 3.25 4.47 4.47 7.40 7.40
(mm) (82.6) (113.5) (113.5) (188.0) (188.0)
Controllable
Conductance (l/sec)
min 0.70 TBD 0.70 1.00 1.50
max 300 TBD 300 500 900
Closed Leakage
(Torr l/sec) <10-7 <10-7 N/A N/A N/A
Flapper Seal** Viton Viton None None None
Thickness (C)*
Inches 1.25 1.00 1.00 0.81 0.94
(mm) (31.8) (25.4) (25.4) (20.6) (23.9)
Overall Height***
Inches 1.06 1.00 1.00 0.81 0.94
(mm) (26.9) (25.4) (25.4) (20.6) (23.9)
No. of Bolt Holes 6 8 8 16 16
Bolt Hole
Diameter (D)*
Inches 0.33 0.33 0.33 0.33 0.33
(mm) (8.38) (8.38) (8.38) (8.38) (8.38)
Bolt Circle Diameter
Inches 2.859 3.628 3.628 5.128 5.128
(mm) (72.6) (92.2) (92.2) (130.3) (130.3)
Flange O-ring groove N/A N/A N/A N/A N/A
ID
* Refer to Figure 4, page 25.
** Where Viton is used, other materials are available; consult factory.

39
JIS Flange Specifications Appendix A: Product Specifications

JIS Flange Specifications

Valve Type Number 253B- 253B 253B

2-50J-1 2-50J-2 4-100J-2
Inside Diameter (A)*
Inches 1.888 2.000 3.875
(mm) (48.0) (50.8) (98.4)
Mounting Flange 2¾” CF JIS 50 mm JIS 100 mm
Outside Diameter (B)*
Inches 4.47 4.47 7.40
(mm) (113.5) (113.5) (188.0)
Controllable
Conductance (l/sec)
min 0.35 0.70 1.50
max 300 300 900
Closed Leakage <10-7 N/A N/A
(Torr l/sec)
Flapper Seal** Viton None None
Thickness (C)*
Inches 1.00 1.00 0.94
(mm) (25.4) (25.4) (23.9)
Overall Height
Inches 10.36 10.36 13.29
(mm) (263.0) (263.0) (337.6)
No. of Bolt Holes 6 4 8
Bolt Hole Diameter (D)*
Inches 0.39 0.39 0.47
(mm) (9.91) (9.91) (11.9)
Bolt Circle Diameter
Inches 3.937 3.937 6.299
(mm) (100) (100) (160)
Flange O-ring groove ID
In 2.766 2.766 2.766
(mm) (70.26) (70.26) (70.26)
Parker® No. or 2.765 x 0.157 2.765 x 0.157 2.765 x 0.157
Size (JIS) (70 x (4) (70 x (4) (70 x (4)
* Refer to Figure 5, page 25.
** Where Viton is used, other materials are available; consult factory.
Due to continuing research and development activities, these product specifications are subject to change without notice.

40
Appendix B: Model Code Explanation Model Code

Appendix B: Model Code Explanation

Model Code

The options for your valve are identified in the model code when you order the unit.

Type Number
The type number designates the model number of the valve.

Type 253 with ASA Flanges

Type Nominal Inside ASA Flange Flapper

Number Diameter Size O-Ring
inches (mm)
253B-2-2-1 1.888 (48) 2” Yes
253B-2-2-2 1.950 (50) 2” No
253B-60-2-1 2.362 (60) 2” Yes
253B-60-2-2 2.362 (60) 2” No
253B-3-2-2 3.025 (77) 2” No
253B-3-3-2 3.025 (77) 3” No
253B-4-3-2 3.965 (101) 3” No
253B-4-4-2 3.965 (101) 4” No
253B-6-4-2 5.781 (147) 4” No
253B-6-6-2 5.781 (147) 6” No
253B-8-6-2 7.501 (191) 6” No
253B-8-8-2 7.501 (191) 8” No
253B-10-10-2 10.000 (254) 10” No

41
Model Code Appendix B: Model Code Explanation

Type 253 with KF or NW ISO Flanges

Type Nominal Inside ISO Flange Flapper

Number Diameter Size O-Ring
inches (mm)
253B-20-40-1* 0.779 (20) KF-40 Yes
253B-20-40-2* 0.779 (20) KF-40 No
253B-1-40-1* 1.270 (32) KF-40 Yes
253B-1-40-2* 1.270 (32) KF-40 No
253B-2-50-1* 1.888 (48) KF-50 Yes
253B-2-50-2* 2.000 (51) KF-50 No
253B-60-63-1 2.362 (60) NW-63 Yes
253B-60-63-2 2.362 (60) NW-63 No
253B-3-80-2 3.000 (76) NW-80 No
253B-4-100-2 3.875 (98) NW-100 No
253B-6-160-2 5.750 (146) NW-160 No
253B-8-200-2 7.650 (194) NW-200 No
253B-10-250-2 9.700 (246) NW-250 No
* Available with optional heater; consult factory for more information.

42
Appendix B: Model Code Explanation Model Code

Type 253 with CF Flanges

Type Nominal Inside CF Flange Size Flapper

Number Diameter O-Ring
inches (mm)
253B-20-2CF-1 0.779 (20) 2¾” Yes
253B-20-2CF-2 0.779 (20) 2¾” No
253B-1-2CF-1 1.270 (32) 2¾” Yes
253B-1-2CF-2 1.270 (32) 2¾” No
253B-2-3CF-1 1.888 (48) 33/8” Yes
253B-2-3CF-2 2.000 (51) 33/8” No
253B-2-4CF-1 2.000 (51) 4½” Yes
253B-2-4CF-2 2.000 (51) 4½” No
253B-3-6CF-2 3.000 (76) 6” No
253B-4-6CF-2 3.875 (98) 6” No

Type 253 with JIS Flanges

Type Nominal Inside JIS Flange Size Flapper

Number Diameter O-Ring
inches (mm)
253B-2-50J-1 1.888 (48) JIS-50 Yes
253B-2-50J-2 2.000 (51) JIS-50 No
253B-4-100J-2 3.875 (98) JIS-100 No

43
Model Code Appendix B: Model Code Explanation

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44
Index

Index

A K

ASA flanges KF ISO flanges

dimensions, 23 dimensions, 24
model codes, 41 model codes, 42
specifications, 34–35 specifications, 36

C M

Cables Maintenance, 31
generic shielded, 21 Manual organization, 18
part numbers, 20 Model codes, 41–43
CF flanges Mounting instructions, 26
dimensions, 25
N
model codes, 43
specifications, 38–39 NW ISO flanges
Connectors dimensions, 24
15-pin Type, 27 model codes, 42
Customer support, 18 specifications, 37

D O

Dimensions, 22–25 Operation, 29

O-rings, sealing valves, 26
F
P
Flanges, 22–25, 41–43
Pump label, 28
J
R
JIS flanges
dimensions, 25 Returning the product, 18, 19
model codes, 43
S
specifications, 40
Safety information, 1–16
Sealing valves, 26

45
 Index

Serial number label, 28

Specifications
flanges, 34–40
standard valve, 33

Valve
operation, 29
theory of operation, 29

46