Granville-Phillips® Series 385 Convectron®

Series 385
Granville-Phillips® Series 385 Convectron®

ATM Vacuum Gauge Module
Instruction Manual
Instruction manual part number 385008
Revision A - August 2010
Series 385
This Instruction Manual is for use with all

Granville-Phillips Series 385 Convectron ATM
Vacuum Gauge Modules.
A list of applicable catalog numbers is
provided on the following page.
To order products online, visit www.brooks.com

For customer service, 24 hours per day, 7 days per week, every
day of the year including holidays, toll-free within the USA,
phone 1-800-367-4887
For customer service within the USA, 8 AM to 5 PM
weekdays excluding holidays:
• Toll-free phone: 1-800-776-6543
• Phone: 1-303–652-4400
• FAX: 1-303-652-2844
• Email: [email protected]
• Web: www.brooks.com
Instruction Manual
© 2007-2010 Brooks Automation, Inc. All rights reserved.
Granville-Phillips® and Convectron® are registered trademarks of Brooks Automation Inc.
All other trademarks and registered trademarks are the properties of their respective
owners.
Catalog numbers for Series 385 Convectron ATM Modules

Power supply and cable are not included.
Analog output - no display: 385001 - G #

RS-485 interface - no display: 385002 - G # - #
RS-485 interface - with digital display: 385003 - G # - #
DeviceNet interface - no display: 385009 - G # - # and 385010 - G # - #
DeviceNet interface - with digital display: 385007 - G # - # and 385011 - G # - #
Flange/Fitting:
1/8 NPT, 1/2 inch tubulation P
1/4 inch VCR-type female Q
1/2 inch VCR-type female R
NW16KF D
NW25KF E
NW40KF K
1.33 inch (NW16CF) Conflat-type F
2.75 inch (NW35CF) Conflat-type G
Measurement Units:
Torr T
mbar M
pascal P
Conflat is a registered trademark of Varian Associates

VCR ia a registered trademark of Swagelok Company
Table of Contents
Chapter 1 Before You Begin .................................... 9

1.1 About these instructions . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
1.2 Caution and warning statements . . . . . . . . . . . . . . . . . . . . . 9
1.3 Reading and following instructions . . . . . . . . . . . . . . . . . . . 10
1.4 Definitions of terms . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
1.5 Customer service . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
Chapter 2 Installation .......................................... 15

2.1 Module components . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
2.2 Installation procedure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
Step 1 Install pressure relief devices . . . . . . . . . . . . . . . . 16
Step 2 Locate and orient the module . . . . . . . . . . . . . . . . 16
Locate the module . . . . . . . . . . . . . . . . . . . . . . . . 16
Orient the module . . . . . . . . . . . . . . . . . . . . . . . . 17
Step 3 Attach module to vacuum chamber . . . . . . . . . . . 18
1/8 NPT pipe thread . . . . . . . . . . . . . . . . . . . . . . . 18
VCR type fitting . . . . . . . . . . . . . . . . . . . . . . . . . . 18
KF flange . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 18
ConFlat flange . . . . . . . . . . . . . . . . . . . . . . . . . . . 18
Step 4 Assemble and connect the wiring . . . . . . . . . . . . . 19
CE Mark compliance . . . . . . . . . . . . . . . . . . . . . . 19
Module power supply . . . . . . . . . . . . . . . . . . . . . . 19
DeviceNet wiring . . . . . . . . . . . . . . . . . . . . . . . . . 19
Output and relay wiring . . . . . . . . . . . . . . . . . . . . 20
Grounding . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22
Step 5 Configure setpoint relays for the application . . . . . 23
Step 6 Calibrate the Convectron gauge . . . . . . . . . . . . . . 24
Atmospheric pressure calibration . . . . . . . . . . . . . 24
Vacuum pressure calibration . . . . . . . . . . . . . . . . 24
2.3 Eliminating radio frequency interference . . . . . . . . . . . . . . . 24
Chapter 3 Operation Overview .................................. 25

3.1 Analog, DeviceNet, and RS-485 outputs and relays . . . . . . 25
3.2 Analog operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25
3.3 DeviceNet operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 26
3.4 RS-485 operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 27
Chapter 4 Analog Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29

4.1 Preparing to operate the analog module . . . . . . . . . . . . . . . 29
4.2 Module front panel . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30
4.3 Reading the vacuum pressure analog output . . . . . . . . . . . . 32
N2 or air . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32
Convectron®ATM Instruction Manual - 385008 - Rev. A 5

Table of Contents
Commonly used gases other than N2 or air . . . . . . . . . . . . . 32

Other gases . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32
4.4 Reading the differential pressure analog output . . . . . . . . . . 40
4.5 Setpoint relays . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 41
Setpoint 1: Convectron gauge . . . . . . . . . . . . . . . . . . . . . . . 42
Setpoint 2: differential pressure sensor . . . . . . . . . . . . . . . . 46
4.6 Reading relay status . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 47
4.7 Calibrating Convectron gauge at atmospheric pressure . . . . 48
4.8 Calibrating Convectron gauge at vacuum pressure . . . . . . . 49
4.9 Modules operating below 10–3 Torr . . . . . . . . . . . . . . . . . . . 50
4.10 Calibrating differential pressure sensor zero . . . . . . . . . . . . 50
4.11 Factory settings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 51
Chapter 5 DeviceNet Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 53

5.1 Preparing to operate the DeviceNet module . . . . . . . . . . . . 53
5.2 Module front and back panels . . . . . . . . . . . . . . . . . . . . . . . 54
5.3 LED status indicator . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 55
5.4 NET and MOD LEDs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 56
5.5 Performance with DeviceNet protocol . . . . . . . . . . . . . . . . 57
5.6 DeviceNet protocol for the Convectron ATM module . . . . . 58
5.7 Operational tasks . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 58
5.8 DeviceNet switches and indicators . . . . . . . . . . . . . . . . . . . 58
Address switches . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 59
Rate switch . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 60
5.9 DeviceNet communication configuration . . . . . . . . . . . . . . 60
5.10 Pressure units and values . . . . . . . . . . . . . . . . . . . . . . . . . . 63
Set or get pressure unit . . . . . . . . . . . . . . . . . . . . . . . . . . . . 64
Data conversion . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 64
Get vacuum pressure or differential pressure . . . . . . . . . . . . 65
5.11 Process control relays . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 72
Get relay setpoints . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 78
Get enable/disable status of relays . . . . . . . . . . . . . . . . . . . 78
Get activation or deactivation status of relays . . . . . . . . . . . 79
Get relay hysteresis . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 79
Get relay assignments . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 80
5.12 Calibrate Convectron gauge at atmospheric pressure . . . . . 80
5.13 Calibrate Convectron gauge at vacuum pressure . . . . . . . . . 81
5.14 Calibrate differential pressure sensor zero . . . . . . . . . . . . . . 82
5.15 Reset module to power-up state . . . . . . . . . . . . . . . . . . . . . 82
5.16 Get firmware version . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 82
5.17 Factory defaults . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 83
5.18 DeviceNet error codes . . . . . . . . . . . . . . . . . . . . . . . . . . . . 83
Using polled I/O . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 83
Using explicit messages . . . . . . . . . . . . . . . . . . . . . . . . . . . 84
6 Convectron®ATM Instruction Manual - 385008 - Rev. A

Table of Contents
Chapter 6 RS-485 Operation .................................... 87

6.1 Preparing to operate the RS-485 module . . . . . . . . . . . . . . . 87
6.2 Module front and back panels . . . . . . . . . . . . . . . . . . . . . . . 88
6.3 Operational tasks . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 89
6.4 Error responses . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 89
6.5 Address . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 89
6.6 RS-485 physical layer . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 90
6.7 Data timing and response . . . . . . . . . . . . . . . . . . . . . . . . . . 91
6.8 RS-485 commands . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 92
Command structure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 92
Symbols used in this manual . . . . . . . . . . . . . . . . . . . . . . . . 92
6.9 RS-485 command set . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 93
Chapter 7 Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 111

7.1 Customer service . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 111
Damage requiring service . . . . . . . . . . . . . . . . . . . . . . . . . . 111
7.2 Troubleshooting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 112
Precautions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 112
Symptoms, causes, and solutions . . . . . . . . . . . . . . . . . . . . 113
7.3 RS-485 error responses . . . . . . . . . . . . . . . . . . . . . . . . . . . . 114
7.4 DeviceNet error codes . . . . . . . . . . . . . . . . . . . . . . . . . . . . 116
Using polled I/O . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 116
Using explicit messages . . . . . . . . . . . . . . . . . . . . . . . . . . . 117
7.5 Convectron gauge test . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 117
7.6 Convectron gauge removal and replacement . . . . . . . . . . . 118
Removing the Convectron gauge . . . . . . . . . . . . . . . . . . . . 118
Replacing the Convectron gauge . . . . . . . . . . . . . . . . . . . . . 119
7.7 Returning a damaged module . . . . . . . . . . . . . . . . . . . . . . . 120
Appendix A Specifications ........................................ 121
Appendix B Theory of Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 129

B.1 Piezo resistive diaphragm sensor . . . . . . . . . . . . . . . . . . . . . 129
B.2 Convectron heat-loss Pirani gauge . . . . . . . . . . . . . . . . . . . 130
B.3 Wheatstone bridge circuit description . . . . . . . . . . . . . . . . . 130
Appendix C Messaging Summary ................................. 133
Index . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 145

Table of Contents

Before You Begin
Chapter 1 Before You Begin
1.1 About these instructions These instructions explain how to install, operate, and maintain the
Granville-Phillips® Convectron® ATM vacuum gauge module.
• This chapter explains caution and warning statements, which must be
adhered to at all times; explains your responsibility for reading and
following all instructions; defines the terms that are used throughout this
Installation
instruction manual; and tells you how to contact customer service.
• Chapter 2 explains how to install the module.
• Chapter 3 is an operational overview of the module.
• Chapter 4 explains how to operate the analog version of the module,
which has two programmable setpoint relays.
• Chapter 5 explains how to operate the DeviceNet® version of the
module, which has four programmable setpoint relays.
Operation Overview
• Chapter 6 explains how to operate the RS-485 version of the module,
which has four programmable setpoint relays.
• Chapter 7 explains troubleshooting; Convectron gauge testing, removal
and replacement; and module return procedures.
• Appendix A provides specifications for the module.
• Appendix B explains terminology and explains how the Convectron
convection-enhanced Pirani heat-loss gauge and Piezo resistive
diaphragm sensor measure pressure.
• Appendix C summarizes DeviceNet polled I/O and explicit messages.
Analog Operation
1.2 Caution and warning This manual contains caution and warning statements with which you must
statements comply to prevent inaccurate measurement, property damage, or personal
injury.
CAUTION
Caution statements alert you to hazards or unsafe
practices that could result in minor personal injury or
property damage.
Each caution statement explains what you must do to prevent or DeviceNet Operation
avoid the potential result of the specified hazard or unsafe
practice.
RS-485 Operation

Chapter 1
WARNING
Warning statements alert you to hazards or unsafe
practices that could result in severe personal injury or
death due to electrical shock, fire, or explosion.
Each warning statement explains what you must do to prevent
or avoid the potential result of the specified hazard or unsafe
practice.
Caution and warning statements comply with American Institute of

Standards Z535.1-2002 through Z535.5-2002, which set forth voluntary
practices regarding the content and appearance of safety signs, symbols,
and labels.
Each caution or warning statement explains:
a. The specific hazard that you must prevent or unsafe practice that you
must avoid,
b. The potential result of your failure to prevent the specified hazard or
avoid the unsafe practice, and
c. What you must do to prevent the specified hazardous result.
1.3 Reading and following You must comply with all instructions while you are installing, operating,
instructions or maintaining the module. Failure to comply with the instructions violates
standards of design, manufacture, and intended use of the module. Brooks
Automation, Inc./Granville-Phillips disclaim all liability for the customer's
failure to comply with the instructions.
• Read instructions – Read all instructions before installing or operating the
product.
• Retain instructions – Retain the instructions for future reference.
• Follow instructions – Follow all installation, operating and maintenance
instructions.
• Heed warnings and cautions – Adhere to all warnings and caution
statements on the product and in these instructions.
• Parts and accessories – Install only those replacement parts and
accessories that are recommended by Brooks Automation,
Inc./Granville-Phillips. Substitution of parts is hazardous.

Before You Begin
Before You Begin
1.4 Definitions of terms Table 1-1 lists terms used throughout this manual in reference to the
Convectron ATM vacuum gauge module.
Table 1-2 lists terms describing DeviceNet protocol.
Table 1-3 lists terms describing DeviceNet data types.
Table 1-1 Terms describing Convectron ATM module and components
Installation
Term Description
Module The Convectron ATM vacuum gauge module, which contains a Convectron
convection-enhanced Pirani heat-loss pressure gauge and a Piezo resistive
diaphragm pressure sensor and electronics.
Electronics assembly An assembly that contains the electronic circuitry, signal processing
microcircuitry, and differential pressure sensor.
Convectron gauge The Convectron convection-enhanced Pirani heat-loss gauge, which measures
Operation Overview
pressure within the vacuum chamber.
Differential pressure sensor The Piezo resistive diaphragm sensor, which measures the pressure differential
between atmospheric and vacuum pressures.
Vacuum pressure The pressure of the process gas inside the vacuum chamber, measured by the
Convectron gauge.
Atmospheric pressure The ambient air pressure of the atmosphere outside the module, measured by the
differential pressure sensor.
Differential pressure The difference between atmospheric pressure and vacuum pressure. Differential
pressure zero is the pressure value at which vacuum pressure equals atmospheric
Analog Operation
pressure.
DeviceNet Operation
RS-485 Operation

Chapter 1
Table 1-2 Terms describing DeviceNet protocol
Term Description
Class Referred to in DeviceNet language as an “object”. The DeviceNet protocol is

divided into various objects that describe behaviors, attributes, or information.
For example, class 1 is the identity object that includes information about the
identity of the product, such as the vendor identification, product type, product
ID, serial number, and firmware revisions.
Instance Within a class there may be multiple instances. Within the Convectron ATM
module there are four possible I/O instances (1–4). For example, the format for
polled I/O data is instance 2 in class 5.
Attribute Data that can be read from the device or written to the DeviceNet network.
Attributes exist for each instance within a class. For example, the serial number is
attribute 6, instance 1 in class 1 (the identity object).
Master data The messages sent from the network to the device to set conditions or values in
the device.
Device data The messages sent from the Convectron ATM module to the network to
communicate values, attributes, or other information.
Data rate The rate at which data is transmitted (125, 250, or 500 kbaud, switch selectable).
Explicit messages Messages that are used for request/response communications enabling module
configuration and problem diagnosis. Explicit messages provide multi-purpose,
point-to-point communication paths between two modules or other devices.
Polled I/O messages Messages that are used for time-critical, control-oriented data. Polled I/O
messages provide a dedicated, special-purpose communication path between a
producing application (host) and one or more consuming applications (modules
or other devices).
Address The address of a device on the DeviceNet network.

Before You Begin
Before You Begin
Table 1-3 Terms describing DeviceNet data types
Term Description
Data type The form of the data communicated from the Convectron ATM module or another
node on the network. The module supports BOOL, BYTE, STRUCT, SSTRING,
REAL, INT, UINT, USINT, EPATH, and WORD data types.
Installation
BOOL data A single ON/OFF bit, where 1 = ON (true), 0 = OFF (false).
BYTE data An 8-bit string, from most significant to least significant bit.
STRUCT data A string of bits, each of which can be set to ON (true) = 1 or OFF (false) = 0.
SSTRING data A character string, one byte per character, with one byte length indicator.
REAL data A 32-bit floating point value in single precision IEEE 754 format.
INT data A 2-byte (16-bit) integer value from –32767 to +32767.
Operation Overview
UINT data A 16-bit unsigned integer value from 0 to 65535.
USINT data An 8-bit unsigned integer value from 0 to 255.
EPATH DeviceNet path segments requiring abstract syntax encoding.

WORD data A 16-bit string.
1.5 Customer service For customer service:

• Phone 1-303-652-4400 or 1-800-776-6543 within the USA.
• Phone 1-800-367-4887 24 hours per day, 7 days per week within the
Analog Operation
USA.
• Email [email protected]
• For Global Customer Support, go to www.brooks.com, click on Contact
Us, then click on Global Offices to locate the Brooks Automation office
nearest you.
DeviceNet Operation
RS-485 Operation

Before You Begin
Chapter 2 Installation
2.1 Module components The Convectron ATM module contains a Convectron convection-enhanced
Pirani heat-loss gauge, a Piezo resistive diaphragm sensor, and electronics.
WARNING
Using the module to measure the pressure of flammable
Installation
or explosive gases can cause a fire or explosion resulting
in severe property damage, personal injury, or death.
Do not use the module to measure the pressure of flammable or
explosive gases.
The analog and RS-485 modules are shipped with an instrument

screwdriver and a 15-pin female, high-density subminiature D connector
that mates to the male connector on the module.
Operation Overview
2.2 Installation procedure The module installation procedure includes the following steps:
1. Installing appropriate pressure relief devices in the vacuum system.
2. Locating and orienting the module.
3. Attaching the module vacuum chamber fitting to its mate on the
vacuum chamber.
4. Assembling and connecting module wiring.
5. Configuring the setpoint relays to the desired voltage levels (analog
Analog Operation
version) or digital pressure values (DeviceNet and RS-485 versions).
6. Calibrating the Convectron gauge at atmospheric and vacuum
pressures.
This chapter also explains what to do if radio frequency interference (RFI)
disrupts operation of the RS-485 version of the module.
WARNING
Failure to use accurate pressure conversion data for N2
DeviceNet Operation
or air to other gases can cause an explosion due to
overpressurization.
If the module will measure any gas other than N2 or air, before
putting the module into operation, adjust relays for the process
gas that will be used.
RS-485 Operation

Chapter 2
Step 1 Install pressure relief devices
Before you install the module, install appropriate pressure relief devices in
the vacuum system.
Brooks Automation/Granville-Phillips does not supply pressure relief valves
or rupture disks. Suppliers of pressure relief valves and rupture disks are
listed in the Thomas Register under “Valves, Relief” and “Discs, Rupture.”
CAUTION
Operating the module above 1000 Torr (1333 mbar, 133
kPa) true pressure could cause pressure measurement
error or product failure.
To avoid measurement error or product failure due to
overpressurization, install pressure relief valves or rupture
disks in the system if pressure exceeds 1000 Torr (1333 mbar,
133 kPa).
Step 2 Locate and orient the module
To locate and orient the module, refer to Figure 2-1 on page 17 and follow
the instructions below.
Locate the module • For greatest accuracy and repeatability, locate the module in a stable,
room-temperature environment. Ambient temperature should never
exceed 40 °C (104 °F) operating, non-condensing, or 85 °C (185 °F)
non-operating.
• Locate the module away from internal and external heat sources and in
an area where ambient temperature remains reasonably constant.
• Do not locate the module where it requires long lengths of tubing or has
constricted tubing. Length of tubing depends on the application. Longer
lengths will affect vacuum pressure limit and response time.
• Do not locate the module near the pump, where gauge pressure might be
lower than normal vacuum pressure.
• Do not locate the module near a gas inlet or other source of
contamination, where inflow of gas or particulates causes atmospheric
pressure to be higher than system atmosphere.
• Do not locate the module where it will be exposed to corrosive gases
such as mercury vapor or fluorine.
• Do not locate the module where it will vibrate. Vibration causes
convection cooling, resulting in inaccurate high pressure readings.

Before You Begin
Installation
Orient the module For proper operation of the module above 1 Torr (1.33 mbar, 133 pascal),
orient the module so the axis is horizontal (see Figure 2-1). Although the
Convectron gauge will read correctly below 1 Torr (1.33 mbar, 133 pascal)
with the module mounted in any position, inaccurate readings will result at
pressures above 1 Torr (1.33 mbar, 133 pascal) if the module axis is not
horizontal.
Installation
Figure 2-1 Module orientation
Mount module axis horizontally to ensure accurate

measurement above 1 Torr (1.33 mbar, 133 pascal)
Vacuum chamber
Operation Overview
Vacuum
Vacuum chamber
Vacuum chamber
Analog Operation
Vacuum chamber
Va
cu
Va
um
cu
u m
ch
ma
be
DeviceNet Operation
r
Recommended Not recommended

RS-485 Operation

Chapter 2
Step 3 Attach module to vacuum chamber
Attach the module vacuum chamber fitting to its mate on the vacuum
chamber.
1/8 NPT pipe thread The 1/8 NPT pipe thread accommodates a standard 1/8 NPT female fitting.
a. Wrap the threads of the port to the vacuum chamber with Teflon® tape.
b. Without using a wrench or other tool, tighten the module just enough
to achieve a seal.
VCR type fitting VCR-type fitting

a. Remove the plastic or metal bead protector cap from the fitting.
b. If a gasket is used, place the gasket into the female nut.
c. Assemble the components and tighten them to finger-tight.
d. While holding a back-up wrench stationary, tighten the female nut 1/8
turn past finger-tight on 316 stainless steel or nickel gaskets, or 1/4 turn
past finger-tight on copper or aluminum gaskets.
KF flange The KF mounting system requires O-rings and centering rings between
mating flanges.
a. Tighten the clamp wing nut to compress the mating flanges together.
b. Seal the O-ring.
ConFlat flange To minimize the possibility of leaks with ConFlat flanges, use high strength
stainless steel bolts and a new, clean OFHC copper gasket. Avoid
scratching the seal surfaces. To avoid contamination, install metal gaskets.
a. Finger tighten all bolts.
b. Use a wrench to continue tightening 1/8 turn at a time in crisscross
order (1, 4, 2, 5, 3, 6) until flange faces make contact.
c. Further tighten each bolt about 1/16 turn.

Before You Begin
Installation
Step 4 Assemble and connect the wiring
CE Mark compliance For CE mark compliance, use the following cable types (or equivalent):
Analog, RS-485, or DeviceNet module setpoint connector

Install shielded cable with aluminum jacket.
On the module end of the cable, install a metal housing, so the shield is
Installation
continuous from the cable to the gauge housing. Do not ground the shield
at the receiver or output device.
Acceptable raw cable parts:
• Belden cable 9541.
• Alpha cable 6307.
Acceptable connectors:
• Tyco series ADK for standard 15-pin subminiature-D connectors.
Operation Overview
• Norcomp type 979-015-030-121.
DeviceNet module I/O connector

For the DeviceNet module, install cable that has aluminum foil-shielded
signal and power wires.
Acceptable cable is DeviceNet shielded cable type 572 from Turck.
Module power supply On analog or RS-485 versions of the module, connect the 11.5 to 26.5 Vdc
power supply to terminals 3 and 4.
Analog Operation
• Terminal 4 (ground) is negative (–).
• Terminal 3 (input) is positive (+).
Power inputs are reverse-bias protected.
For grounding instructions, see page 22.
DeviceNet wiring The module has a DeviceNet 5-pin micro connector for interfacing through
the customer supplied DeviceNet network cable. See Figure 2-2. The
DeviceNet connection is a standard 5-pin DeviceNet receptacle that
DeviceNet Operation
accepts a standard micro 5-pin female cable connection.
The module will use terminals 2 (Vdc return) and 3 (24 Vdc) on the 5-pin
DeviceNet micro connector for the network power supply.
• The DeviceNet interface requires 24 Vdc (11 to 26.4) at 0.2 A maximum.
• Maximum inrush current is 0.25 A.
• Power inputs are reverse-bias protected.
RS-485 Operation

Chapter 2
Figure 2-2 DeviceNet 5-pin micro connector
CAN_H 4 3 (–) Vdc return
Shield 1 2 (+) 24 Vdc

5 CAN_L
Output and relay wiring • Figure 2-3 illustrates the D subminiature terminals for the analog version
of the module.
• Figure 2-4 illustrates the D subminiature terminals for the DeviceNet
version of the module.
• Figure 2-5 illustrates the D subminiature terminals for the RS-485 version
of the module.
Figure 2-3 Analog male I/O connector on module end panel
Vacuum pressure analog output 5 15 Relay 1 common

Power ground 4 14 Relay 1 normally closed
11–26 V power input 3 13 Relay 2 normally closed
Setpoint 2 adjust 2 12 Relay 2 common
Setpoint 1 adjust 1 11 Relay 2 normally open
10 Relay 1 normally open

9 No connection
8 No connection
7 Differential pressure analog output
6 Signal ground

Before You Begin
Installation
Figure 2-4 DeviceNet male I/O connector on module end panel
No connection 5 15 Relay 1 common

No connection 3 13 No connection
Installation
No connection 1 11 Relay 2 normally open

8 No connection
7 Relay 3 common
Operation Overview
Figure 2-5 RS-485 male I/O connector on module end panel

Power ground 4 14 Relay 4 common
11–26 V power input 3 13 No connection
RS-485 B line 2 12 Relay 2 common
RS-485 A line 1 11 Relay 2 normally open
Analog Operation
8 RS-485 ground
7 Relay 3 common
DeviceNet Operation
RS-485 Operation

Chapter 2
Grounding
WARNING
Improper grounding could cause product failure,
serious personal injury, or death.
To reduce the risk of product failure, serious personal injury, or
death, follow ground network requirements for the facility.
• Maintain all exposed conductors at earth ground.
• Ground the module housing to the vacuum chamber as
instructed below.
• Make sure the vacuum port to which the module is mounted
is properly grounded.
Chassis ground
If the fitting allows continuous metal-to-metal contact between the housing
base and the vacuum chamber, the module is properly grounded via the
fitting. If the fitting requires a rubber gasket, rubber O-ring, Teflon tape, or
other material that prevents metal-to-metal contact between the housing
base and the vacuum chamber, refer to Figure 2-6 and follow these
instructions to ground the module to the vacuum chamber:
a. Attach a metal hose clamp or other metal clamp to the gauge stem of
the housing.
b. Install a 3.31 mm2 (12 AWG) or larger copper wire between the clamp
and a metal ground lug, bolt, or stud on the vacuum chamber.
Figure 2-6 Ground connection to vacuum chamber
Gauge stem 3.00 mm2 (12 AWG) or larger ground wire
Metal hose clamp or other metal clamp

Ground lug, bolt, or stud
Fitting
Vacuum chamber

Before You Begin
Installation
DeviceNet ground
The DeviceNet module contains two separate and isolated grounds: the
DeviceNet ground, and the chassis ground.
• Typical isolation between DeviceNet and chassis grounds is 1 mΩ, up to
500 Vdc, if the DeviceNet drain is grounded.
• Above 500 Vdc the isolation approaches 0 Ω.
Installation
The DeviceNet wiring will be properly grounded via the DeviceNet 5-pin
micro connector.
Step 5 Configure setpoint relays for the application
• To configure setpoint relays for the analog version of the module, see
pages 41–45.
• To configure setpoint relays for the DeviceNet version of the module, see
Operation Overview
pages 72–77.
• To configure setpoint relays for the RS-485 version of the module, see
pages 95–100.
If the module will measure the pressure of a gas other than N2 or air, you
must adjust relay setpoints for the process gas. The true pressure of a gas
other than N2 or air may be substantially different from the pressure that the
output indicates. For example, outputs might indicate a pressure of 10 Torr
(13.3 mbar, 1.33 kPa) for argon, although the true pressure of the argon is
250 Torr (333 mbar, 33.3 kPa). Such a substantial difference between
indicated pressure and true pressure can cause overpressurization resulting
Analog Operation
in an explosion.
WARNING
overpressurization.
connecting relays to system control devices, adjust setpoints for
DeviceNet Operation
the process gas that will be used.
RS-485 Operation

Chapter 2
Step 6 Calibrate the Convectron gauge
Calibration improves the accuracy and repeatability of the Convectron

gauge.
• To calibrate the Convectron gauge for the analog version of the module,
see pages 48–50.
• To calibrate the Convectron gauge for the DeviceNet version of the
module, see pages 80–82.
• To calibrate the Convectron gauge for the RS-485 version of the module,
see pages 107–108.
Atmospheric pressure An atmospheric calibration is performed on the Convectron gauge, using

calibration N2, at the factory before the module is shipped. The factory calibration sets
the atmospheric calibration point to 760 Torr (1013 mbar, 101.3 kPa) of N2.
Because performance varies depending on the process gas, you may wish
to reset the atmospheric calibration point if a gas other than N2 or air is
being used. Periodic resets of the atmospheric calibration point also
improve the accuracy and repeatability of the Convectron gauge near
atmospheric pressure, even if the process gas is N2 or air.
Vacuum pressure Periodic resets of the vacuum pressure calibration point improve the
calibration accuracy and repeatability of the Convectron gauge.
2.3 Eliminating radio The module has been tested and found to comply with U.S. Federal
frequency interference Communications Commission (FCC) limits for a Class A digital device,
pursuant to Part 15 of the FCC rules. These limits provide reasonable
protection against harmful interference when the module operates in a
commercial environment.
The RS-485 and DeviceNet versions of the module can radiate radio
frequency energy and, if not installed and used in accordance with the
instructions in this manual, may cause harmful interference to radio and
television communications. However, there is no guarantee that
interference will not occur in a particular installation. If operating the
module in a residential area causes interference, the customer will be
required to eliminate the interference at the customer’s own expense. If the
module causes interference to radio or television reception, which can be
determined by turning the module OFF and ON, use one of the following
methods to eliminate the interference:
• Reorient or relocate the receiving antenna.
• Increase the separation between the module and the receiver.
• Connect the module into an outlet on a circuit that is not the circuit to
which the receiver is connected.
• Consult an experienced radio or television technician for help.

Before You Begin
Chapter 3 Operation Overview
3.1 Analog, DeviceNet, and The module has two analog outputs, one RS-485 output, or one DeviceNet
RS-485 outputs and output. The module with analog outputs has two trip point relays. The
relays module with an RS-485 output or DeviceNet output has four trip point
relays.
3.2 Analog operation Table 3-1 lists tasks that may be performed using the analog outputs. One
Installation
output represents vacuum pressure, and the other output represents
differential pressure.
Table 3-1 Tasks and page references for analog module operation
Task Instructions
Read vacuum pressure analog output Page 32
Read differential pressure analog output Page 40
Operation Overview
Program relay setpoints Page 41
Set relay activation direction Page 42
Read activation or deactivation status of relays Page 47
Calibrate Convectron gauge at vacuum pressure Page 48

Calibrate Convectron gauge at atmospheric pressure Page 49
Calibrate differential pressure sensor zero Page 50
Reset parameters to factory defaults Page 51
Analog Operation
DeviceNet Operation
RS-485 Operation

Chapter 3
3.3 DeviceNet operation • Table 3-2 lists tasks that may be performed using DeviceNet polled I/O.
• Table 3-3 lists tasks that may be performed using DeviceNet explicit
messages.
• For a complete list of DeviceNet messages used by the module, see
Appendix C.
Table 3-2 Tasks and page references for DeviceNet polled I/O
Task Instructions:
Read vacuum pressure Page 65
Read differential pressure Page 65
Table 3-3 Tasks and page references for DeviceNet explicit messages
Task Instructions:
Configure DeviceNet communications Page 60
Set or get pressure unit Page 64
Get vacuum pressure Page 65
Get differential pressure Page 65
Set relay setpoints Page 72
Set relay activation direction Page 72
Set relay hysteresis Page 72
Set relay assignments Page 72
Set disabled/enabled state of relays Page 72
Get relay trip points Page 78
Get disabled/enabled state of relays Page 78
Get activation or deactivation status of relays Page 79
Get relay hysteresis Page 79
Get relay assignments Page 80
Calibrate Convectron gauge at atmospheric pressure Page 80
Calibrate Convectron gauge at vacuum pressure Page 81
Calibrate differential pressure zero Page 82
Get firmware version for module Page 82
Get status alarms and warnings Page 83

Before You Begin
Operation Overview
3.4 RS-485 operation Table 3-4 lists tasks that may be performed using the RS-485 output.
Table 3-4 Tasks and page references for RS-485 module operation
Command Task Instructions:
SB Set baud rate Page 94
SP Set parity Page 94
Installation
PC Set or relay setpoints and activation direction Page 95
PCG Set relay assignments Page 100
PCO Disable an operable relay Page 100
RPG Read relay assignments Page 101

RPCS Read activation or deactivation status of relays Page 101
SU Set pressure unit Page 101
Operation Overview
RU Read pressure unit Page 101
RD Read vacuum pressure Page 102
RDD Read differential pressure Page 106
SD Set optional display for vacuum pressure or differential pressure page 106
TS Calibrate Convectron gauge at atmospheric pressure Page 107
TZ Calibrate Convectron gauge at vacuum pressure Page 107
TO Calibrate differential pressure sensor zero Page 108
Analog Operation
VER Read firmware version for module Page 108
FAC Reset parameters to factory defaults Page 109
DeviceNet Operation
RS-485 Operation

Before You Begin
Chapter 4 Analog Operation
4.1 Preparing to operate the This chapter explains how to operate the Convectron ATM module with
analog module non-linear analog outputs.
WARNING
Installation
explosive gases.
Before putting the module into operation, you must perform the following
procedures:
Operation Overview
1. Install the module in accordance with the instructions on pages 15-24.
2. Develop a logic diagram of the process control function.
3. Use Table 4-1 to record the proposed setpoint in volts and
corresponding pressure setting in Torr for each relay.
• Relay 1 activates with decreasing vacuum chamber pressure
• Relay 2 activates with increasing differential pressure.
Table 4-1 Relay setpoint voltage and corresponding pressure
Relay Setpoint (V) Pressure corresponding to setpoint (Torr)
Analog Operation
Relay 1
Relay 2
4. Draw a circuit schematic that specifies exactly how each piece of

system hardware will connect to the module relays.
5. Attach a copy of the process control circuit diagram to this manual for
future reference and troubleshooting.
DeviceNet Operation
6. If the module will measure the pressure of a gas other than N2 or air,
you must adjust the relay 1 setpoint for the process gas that will be
used. See pages 41–45.
If you need application assistance, phone a Brooks Automation, Inc./
Granville-Phillips application engineer at 1-303-652-4400 or
1-800-776-6543 within the USA, or mail [email protected].
Once the module is operating, you may use the module front panel and the
jumpers inside the module to perform the tasks listed in Table 3-1 on
page 25.
RS-485 Operation

Chapter 4
4.2 Module front panel • Figure 4-1 illustrates the analog version front panel.
• Table 4-2 lists features of the front panel.
Figure 4-1 Analog version front panel
Power ON indicator
Setpoint Test points Setpoint indicators

potentiometers
DIAPHRAGM ATM ZERO

ADJUST potentiometer
CONVECTRON
potentiometers

Before You Begin
Analog Operation
Table 4-2 Front panel features
Feature Description Measure at: Set to:
CONVECTRON ATM Enables Convectron gauge calibration at CONVECTRON ANALOG 5.534 V at

ADJUST potentiometer atmospheric pressure and COMMON test points 760 Torr (1013 mbar,
101.3 kPa) of N2
CONVECTRON VAC Enables Convectron gauge calibration at CONVECTRON ANALOG 0.375 V at
Installation
ADJUST potentiometer vacuum pressure and COMMON test points 1 x 10–4 Torr
(1.33 x 10–4 mbar,
1.33 x 10–2 pascal)
of N2
DIAPHRAGM ATM Enables calibration of differential DIAPHRAGM ZERO and 4.000 V

ZERO adjust pressure sensor zero COMMON test points
potentiometer
SP1 ADJ potentiometer Enables setting of vacuum pressure at SETPOINT1 and Application specific
Operation Overview
which relay 1 activates and deactivates COMMON test points
SP2 ADJ potentiometer Enables setting of differential pressure at SETPOINT2 and Application specific
which relay 2 activates and deactivates COMMON test points
Test points Enable checking of values for: See cells above in this Application specific
• Setpoint 1 voltage column
• Setpoint 2 voltage
• Convectron gauge calibration at
atmospheric pressure
• Convectron gauge calibration at
vacuum pressure
Analog Operation
• Differential pressure sensor zero
calibration
Setpoint indicators • SETPOINT1 is green when relay 1 is Not applicable (used for Not applicable
activated monitoring relays)
• SETPOINT2 is green when relay 2 is
activated
Power ON indicator Is green when module power supply is Not applicable (used for Not applicable
ON monitoring module power
supply)
DeviceNet Operation
RS-485 Operation

Chapter 4
4.3 Reading the vacuum The module contains a convection-enhanced Pirani thermal conductivity
pressure analog output gauge. The gauge measures the heat loss from a heated, gold-plated
tungsten sensing wire that is maintained at a constant temperature.
The vacuum pressure indicated by the gauge depends on the gas type, gas
density (pressure), and the module orientation. The module is factory
calibrated for N2. (Air has approximately the same calibration.) For gases
other than N2 or air, heat loss varies at any given pressure, and you must
apply an appropriate correction factor.
N2 or air Refer to Table 4-3 on page 33 to calculate pressure in Torr (y) as a function
of output voltage (x). Figure 4-2 and Figure 4-3 on pages 34–35 are graphs
that represent true pressure for N2 or air (y axis) versus voltage (x axis).
• Output impedance is 100 Ω.
• The output is normalized to 0.375 Vdc at vacuum pressure and to
5.659 Vdc at 1000 Torr (1333 mbar, 133.3 kPa) for N2 or air.
Commonly used gases Refer to Table 4-4 on page 36 for pressure versus output voltage for 10
other than N2 or air commonly used process gases other than N2 or air.
Refer to Figure 4-4, Figure 4-5, or Figure 4-6 on pages 37–39 to determine
true pressure versus indicated pressure for the gas that is being used.
Other gases If the gas being used is not included in Table 4-4, or for a gas mixture, you
will need to generate a calibration curve using a gas-independent transfer
standard such as a capacitance manometer.

Before You Begin
Analog Operation
Table 4-3 Equations for calculating N2 or air pressure versus analog output voltage
• To convert Torr to mbar, multiply “y” by 1.333

• To convert Torr to pascal, multiply “y” by 133.3
Segment Output voltage Equation where y = pressure in Torr and x = voltage Coefficients
1 0.375 to 2.842 V 2 3 4 5 a –0.02585

y = a + bx + cx + dx + ex + fx
Installation
b 0.03767
c 0.04563
d 0.1151
e –0.04158
f 0.008737
Operation Overview
2 a 0.1031
a + cx + ex
2 2.842 to 4.945 V y = --------------------------------------------
2
-
3
1 + bx + dx + fx
b –0.3986
c –0.02322
d 0.07438
e 0.07229
Analog Operation
f –0.006866
a + cx a 100.624
3 4.94 to 5.659 V y = ------------------------------2-
1 + bx + dx
b –0.37679
c –20.5623
d 0.0348656
DeviceNet Operation
RS-485 Operation

Chapter 4
Figure 4-2 Analog output voltage vs. indicated N2 or air pressure, 1 mTorr to 100 mTorr
100
50
Pressure in mTorr for N2 or air
20
10
1
0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0
Analog Output - VDC

Before You Begin
Analog Operation
Figure 4-3 Analog output voltage vs. indicated N2 or air pressure, 100 mTorr to 1000 Torr
1000
500
Installation
200
100
50
Torr
Pressure in mTorr and Torr for N2 or air
Operation Overview
20
10
Analog Operation
2
500
mTorr
DeviceNet Operation
200
100
0 1.0 2.0 3.0 4.0 5.0 6.0 7.0
Analog Output - VDC

RS-485 Operation

36
Table 4-4
Chapter 4
True pressure
in Torr/mTorr N2 (air) Argon Helium O2 CO2 KR Freon12 Freon22 D2 Ne CH4
0 .375 .375 .375 .375 .375 .375 .375 .375 .375 .375 .375
.1 mTorr .376 .3757 .3755 .376 .376 .3755 .376 .376 .376 .3757 .3766
.2 mTorr .377 .376 .3765 .377 .377 .3768 .378 .378 .377 .3763 .3780
.5 mTorr .379 .378 .379 .380 .381 .3772 .382 .381 .381 .3782 .3825
1 mTorr .384 .381 .382 .384 .385 .379 .388 .388 .386 .381 .3896
2 mTorr .392 .387 .389 .392 .395 .384 .401 .400 .396 .388 .403
5 mTorr .417 .403 .409 .417 .412 .395 .437 .432 .425 .405 .438
10 mTorr .455 .429 .441 .453 .462 .415 .488 .480 .470 .433 .492
20 mTorr .523 .477 .497 .521 .536 .451 .581 .566 .549 .484 .584
50 mTorr .682 .595 .637 .679 .705 .544 .778 .764 .727 .608 .796
100 mTorr .876 .745 .814 .868 .900 .668 1.009 .990 .944 .768 1.053
200 mTorr 1.155 .962 1.068 1.141 1.179 .847 1.315 1.291 1.265 1.002 1.392
500 mTorr 1.683 1.386 1.589 1.664 1.668 1.194 1.826 1.805 1.914 1.469 2.014
1 Torr 2.217 1.818 2.164 2.195 2.172 1.536 2.257 2.247 2.603 1.976 2.632
2 Torr 2.842 2.333 2.939 2.814 2.695 1.921 2.647 2.666 3.508 2.631 3.313
5 Torr 3.675 3.028 4.387 3.672 3.316 2.429 3.029 3.090 5.059 3.715 –
10 Torr 4.206 3.480 5.774 4.225 3.670 2.734 3.204 3.330 6.361 4.605 4.699
Voltages (VDC) for commonly used gases, 0.1 mTorr to 1000 Torr
20 Torr 4.577 3.801 7.314 4.620 3.903 2.966 3.308 3.414 – 5.406 5/172
50 Torr 4.846 4.037 – 4.916 4.071 3.075 3.430 3.509 – 6.159 5.583
100 Torr 4.945 4.122 – 5.026 4.154 3.134 3.618 3.660 – 6.483 5.720
200 Torr 5.019 4.192 – 5.106 4.336 3.269 3.827 3.883 – 6.661 5.860
300 Torr 5.111 4.283 – 5.200 4.502 3.384 3.938 4.005 – 6.726 –
400 Torr 5.224 4.386 – 5.315 4.621 3.466 4.016 4.088 – 6.767 6.103
500 Torr 5.329 4.477 – 5.422 4.708 3.526 4.076 4.151 – 6.803 –
600 Torr 5.419 4.550 – 5.515 4.775 3.573 4.124 4.203 – 6.843 6.342
700 Torr 5.495 4.611 – 5.592 4.830 3.613 4.166 4.247 – 6.890 –
760 Torr 5.534 4.643 – 5.633 4.860 3.632 4.190 4.271 – 6.920 –
800 Torr 5.558 4.663 – 5.658 4.877 3.645 4.203 4.286 – 6.942 6.519
900 Torr 5.614 4.706 – 5.713 4.919 3.674 4.237 4.321 – 7.000 –
1000 Torr 5.659 4.745 – 5.762 4.955 – 4.270 4.354 – 7.056 6.642
Convectron®ATM Instruction Manual - 385008 - Rev. A

Before You Begin
Analog Operation
Figure 4-4 True pressure versus indicated pressure for commonly used gases, 10–4 to 10–1 Torr
Installation
Operation Overview
True pressure in Torr
Analog Operation
Convectron gauge axis
must be horizontal
Pressure unit equivalents:
1 µm Hg = 1 mTorr = 1 x 10–3 Torr
1000 µm Hg = 1 Torr
1 mbar = 100 pascal
DeviceNet Operation
Indicated pressure in Torr

(Nitrogen equivalent)
RS-485 Operation

Chapter 4
Figure 4-5 True pressure versus indicated pressure for commonly used gases, 10–1 to 1000 Torr

must be horizontal
1 mbar = 100 pascal


Before You Begin
Analog Operation
Figure 4-6 True pressure versus indicated pressure for commonly used gases, 10–1 to 1000 Torr
Installation
Operation Overview
Analog Operation
must be horizontal
1 mbar = 100 pascal
DeviceNet Operation

RS-485 Operation

Chapter 4
4.4 Reading the differential The module contains a Piezo resistive diaphragm sensor. The sensor
pressure analog output measures differential pressure using a gas-independent diaphragm.
Use the following equation or the data in Figure 4-7 to determine the analog
output voltage that corresponds to differential pressure, in Torr:
V Output – 4.00
P Differential = -----------------------------------
-
0.004
Figure 4-7 Differential pressure sensor analog output voltage

Before You Begin
Analog Operation
4.5 Setpoint relays The module includes two single-pole, double throw (SPDT) relays. Each
relay has a programmable setpoint. The setpoint is a voltage level that
corresponds to a specified pressure at which the relay activates and
deactivates. See Table 4-5.
Relay 1 activates with decreasing vacuum pressure and deactivates at a
higher pressure than the activation pressure, as illustrated in Figure 4-8.
Installation
Relay 2 activates with increasing differential pressure and deactivates at a
lower pressure than the activation pressure, as illustrated in Figure 4-9 on
page 42.
Table 4-5 Setpoint relay activation direction, range, and hysteresis
Relay Assignment Activation direction Range Hysteresis

Setpoint 1 Vacuum pressure Decreasing pressure 1 x 10–4 to 9.99 x 102 Torr 30 mV
1.33 x 10–4 13.3 x 102 mbar
Operation Overview
1.33 x 10–2 13.3 x 104 pascal
Setpoint 2 Differential pressure Increasing pressure –750 to +125 Torr 8 Torr

–999 to + 166.6 mbar 10.6 mbar
–99.9 to + 16.6 kPa 1.06 kPa
Figure 4-8 Setpoint relay 1 behavior
Time
Analog Operation
Deactivate
30mV
Vacuum pressure
hysteresis
Activate
Relay activated
DeviceNet Operation
Activated
Deactivated
RS-485 Operation

Chapter 4
Figure 4-9 Relay 2 behavior
Time
Activate
8 Torr
Differential pressure
hysteresis
Deactivate
Relay
activated
Activated
Deactivated
Setpoint 1: Convectron If the module will measure the pressure of any process gas other than N2 or
gauge air, you must adjust setpoint 1 for the process gas that will be used.
The true pressure of a gas other than N2 or air may be substantially different
from the pressure that the output indicates. For example, outputs might
indicate a pressure of 10 Torr (13.3 mbar, 1.33 kPa) for argon, although the
true pressure of the argon is 250 Torr (333 mbar, 33.3 kPa). Such a
substantial difference between indicated pressure and true pressure can
cause overpressurization resulting in an explosion.
WARNING
overpressurization.
Test points on the module front panel, Table 4-4 on page 36, and
Figure 4-11 and Figure 4-12 on pages 44–45 enable you to determine the
amount of voltage that corresponds to a specific pressure.

Before You Begin
Analog Operation
1. Make sure the module is properly installed, the axis is horizontal (see
page 17), and the power supply is ON.
2. Figure 4-11 and Figure 4-12 are graphs that show test point voltage
versus pressure for N2 or air. Table 4-4 on page 36 lists test point
voltage versus pressure for 12 commonly used process gases, including
N2 and air.
Installation
If you are using Figure 4-11 or Figure 4-12, find the point at which the
horizontal line representing the desired trip point for N2 or air pressure
intercepts the vertical line representing test point voltage. For example:
• in Figure 4-11, a test point voltage of 0.64 V represents an N2 or air
pressure of 40 mTorr (0.005 mbar, 0.5 pascal).
• In Figure 4-12, a test point voltage of 4.8 V indicates an N2 or air
pressure of 40 Torr 53.3 mbar, 5.33 kPa).
If the gas being used is not included in Table 4-4, or for a gas mixture,
Operation Overview
you will need to generate a calibration curve using a gas-independent
transfer standard such as a capacitance manometer.
3. Use a high-precision, high-input impedance (Zin > 1 MΩ) digital
voltmeter (DVM) to measure the voltage across the SETPOINT1 and
COMMON or SETPOINT2 and COMMON test points on the module
front panel. Figure 4-10 illustrates SETPOINT2 and COMMON test
points.
4. Use a flat-head instrument screwdriver to adjust the SETPOINT1
potentiometer for the desired setpoint voltage at which relay 1 will
Analog Operation
activate and deactivate. (See Figure 4-10.)
5. A built-in 30 mV hysteresis prevents oscillation around the setpoint.
Hysteresis depends on the vacuum pressure at which the setpoint has
been established.
Figure 4-10 Test points and potentiometer for setpoint relay 1
SETPOINT1 test point COMMON test point

SP1 ADJ potentiometer
DeviceNet Operation
RS-485 Operation

Chapter 4
Figure 4-11 Example test point voltage: 0.64 V equals 40 mTorr of N2 or air
100
50
40
mTorr
Pressure in mTorr for N2 or air
20
10
1
0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0
0.64 V
Test Point Voltage

Before You Begin
Analog Operation
Figure 4-12 Example test point voltage: 4.8 V equals 40 Torr of N2 or air
1000
500
Installation
200
100
50
Torr
Pressure in mTorr and Torr for N2 or air
40
Operation Overview
Torr
20
10
Analog Operation
2
500
mTorr
DeviceNet Operation
200
100
0 1.0 2.0 3.0 4.0 5.0 6.0 7.0
4.8 V
Test Point Voltage
RS-485 Operation

Chapter 4
Setpoint 2: differential Refer to Figure 4-13 and use a a high-precision, high-input impedance
pressure sensor (Zin > 1 MΩ) DVM to adjust relay 2.
1. Use the following equation or the data in Figure 4-13 to determine the
analog output voltage that corresponds to the differential pressure, in
Torr, at which relay 2 will activate and deactivate:
Output voltage = 4.000 + P differential × 0.004 V
Figure 4-13 Setpoint relay 2 (differential pressure sensor) analog voltage
2. Use a high-precision, high-input impedance (Zin > 1 MΩ) DVM to

measure the setpoint voltage across the SETPOINT2 and COMMON
test points on the module front panel. Figure 4-14 illustrates
SETPOINT2 and COMMON test points.
3. Use a flat-head instrument screwdriver to adjust the SETPOINT2
potentiometer for the desired setpoint voltage at which relay 2 will
activate and deactivate. (See Figure 4-14.)
A built-in 8 Torr (10.6 mbar, 1.06 kPa) hysteresis prevents oscillation
around the setpoint.

Before You Begin
Analog Operation
Figure 4-14 Test points and potentiometer for setpoint relay 2

SETPOINT2 test point COMMON test point
SP2 ADJ potentiometer
Installation
4.6 Reading relay status Use the setpoint indicators, illustrated in Figure 4-15, to read
Operation Overview
activation/deactivation status of relays.
• The ON indicator is green when the module power supply is ON.
• The SETPOINT1 indicator is green when relay 1 is activated.
• The SETPOINT2 indicator is green when relay 2 is activated.
Figure 4-15 Power ON and setpoint indicators
Power ON indicator Setpoint indicators
Analog Operation
DeviceNet Operation
RS-485 Operation

Chapter 4
4.7 Calibrating Convectron An atmospheric pressure calibration is performed on the Convectron gauge,
gauge at atmospheric using N2, at the factory before the module is shipped. The factory
pressure calibration sets the atmospheric calibration point for N2 to 760 Torr
(1013 mbar, 101.3 kPa) of N2.
Regardless of the process gas that is being used, you should always use N2
or air to calibrate the Convectron gauge at atmospheric pressure.
1. Shut off the pump and, using N2 or air, allow the vacuum pressure to
increase to the value at which the atmospheric pressure point will be
set.
2. Refer to Figure 4-16 and use a high-precision, high-input impedance
(Zin > 1 MΩ) DVM to measure the voltage across the CONVECTRON
ANALOG and COMMON test points on the module front panel.
3. Use a flat-head instrument screwdriver to adjust the CONVECTRON
ADJUST ATM potentiometer to a voltage that corresponds to the
atmospheric pressure at your location. Table 4-6 on page 49 lists
typical atmospheric pressure at altitude/pressure/voltage relationships.
Figure 4-16 Atmospheric pressure calibration test points and potentiometers

CONVECTRON ANALOG COMMON
test point test point
CONVECTRON ADJUST
ATM potentiometer

Before You Begin
Analog Operation
Table 4-6 Typical atmospheric pressures at altitude/pressure/voltage relationships
Pressure of N2 or air
Altitude (ft. above sea level) Torr mbar kPa Analog output voltage (VDC)
0 760 1013 101.3 5.534
1000 733 977 97.7 5.513
Installation
2000 707 942 94.2 5.493
3000 681 907 90.7 5.473
4000 656 875 87.5 5.454
5000 632 842 84.2 5.435
6000 609 812 81.2 5.417
7000 586 781 78.1 5.399
Operation Overview
8000 564 752 75.2 5.382
9000 543 724 72.4 5.366
10,0000 523 697 69.7 5.350
4.8 Calibrating Convectron Periodic resets of the vacuum chamber calibration point improve the
gauge at vacuum accuracy and repeatability of the Convectron gauge.
pressure
Regardless of the process gas that is being used, you should always use N2
or air to calibrate the Convectron gauge at vacuum pressure.
Analog Operation
1. Turn on the pump and, using N2 or air, allow vacuum pressure to
descend to a pressure that is lower than 10–4 Torr.
(Zin > 1 MΩ) DVM to measure the voltage across the CONVECTRON
ANALOG and COMMON test points on the module front panel.
3. Use a flat-head instrument screwdriver to adjust the CONVECTRON
ADJUST VAC potentiometer to a reading of 0.375 Vdc.
DeviceNet Operation
RS-485 Operation

Chapter 4
Figure 4-17 Vacuum pressure calibration test points and potentiometers
CONVECTRON ANALOG COMMON

CONVECTRON ADJUST
VAC potentiometer
4.9 Modules operating below During a fast pumpdown from atmospheric pressure, thermal effects
10–3 Torr temporarily prevent the module from measuring pressure accurately below
10–3 Torr. After approximately 15 minutes, pressure indications the 10–4
Torr range will be accurate and response will be rapid.
When pressure indication in the 10–4 Torr range has stabilized, a
Convectron gauge calibration at vacuum pressure may be performed. The
calibration may be performed at a higher pressure if readings in the 10–4
Torr range are not required. In the 10–4 Torr range, resolution is ±0.1
millitorr, if the Convectron gauge has been properly calibrated at vacuum
pressure. If the module frequently operates in the 10–4 Torr range,
Convectron gauge calibration at vacuum pressure should be performed
frequently.
4.10 Calibrating differential The differential pressure sensor is factory calibrated to produce a 4.000
pressure sensor zero VDC output at zero differential pressure. Any offset in this value may be
adjusted in the field.
An offset error is 1 Torr per 4 mV error in the analog output. For example,
if output voltage equals 4.040 V, the zero error for the differential pressure
sensor is +10 Torr. (Temperature and hysteresis stability is ±0.020 V, or
approximately 5 Torr.)

Before You Begin
Analog Operation
1. Allow atmospheric and vacuum pressures to achieve the same value.

This is a pressure differential of zero, which should be represented by
a 4.000 V output across the DIAPHRAGM ZERO and COMMON test
points.
(Zin > 1 MΩ) DVM to measure the voltage across the DIAPHRAGM
ZERO and COMMON test points on the module front panel.
Installation
3. With the Convectron gauge port exposed to ambient atmospheric
pressure, use a flat-head instrument screwdriver to adjust the
DIAPHRAGM ZERO ADJUST potentiometer to 4.000 V.
Figure 4-18 Differential pressure sensor zero test points and potentiometers
DIAPHRAGM ZERO COMMON

Operation Overview
DIAPHRAGM ATM ZERO
ADJUST potentiometer
Analog Operation
4.11 Factory settings Table 4-7 lists factory relay setpoint values and activation direction.
Table 4-7 Factory settings for relays
Relay Default setting
Relay 1 • Setpoint: Below 0.0 Torr vacuum pressure

• State: Deactivated (resets relay 1 to deactivated state)
• Returning pressure hysteresis: 30 mV, not programmable
DeviceNet Operation
• Activation direction: Activates below vacuum pressure setpoint (–), not programmable
Relay 2 • Setpoint: Activates at 0.0 Torr differential between Convectron gauge and atmospheric pressures
• State: Deactivated (resets relay 2 to deactivated state)
• Returning pressure hysteresis: 8 Torr, not programmable
• Activation direction: Activates above differential pressure setpoint (+), not programmable
RS-485 Operation

Before You Begin
Chapter 5 DeviceNet Operation
5.1 Preparing to operate the This chapter explains how to operate the Convectron ATM module with a
DeviceNet module DeviceNet digital output.
WARNING
Installation
explosive gases.
procedures:
Operation Overview
1. Install the module in accordance with the instructions on pages 15–24.
3. Use Table 5-1 to record the proposed activation and deactivation
setpoints, in Torr, and assignments for each relay.
Table 5-1 Relay setpoints and assignments
Relay Activation setpoint (Torr) Deactivation setpoint (Torr) Relay assignment

Relay 1 F Vacuum pressure
F Differential pressure
Analog Operation


4. Develop a circuit schematic that specifies exactly how each piece of
DeviceNet Operation
6. Set the module communication parameters as instructed on pages
60–63.
you must adjust relay setpoints for the process gas that will be used. See
pages 72–76.
RS-485 Operation

Chapter 5
If you need application assistance, phone a Brooks Automation, Inc./

1-800-776-6543 within the USA, or email [email protected].
5.2 Module front and back • Figure 5-1 illustrates the DeviceNet version front panel. The optional LED
panels pressure display can indicate vacuum pressure or differential pressure in
±XX±Y format.
• Figure 5-2 illustrates the DeviceNet version back panel. Use the pressure
display toggle switch on the back panel to set the display for vacuum
pressure or differential pressure.
• Table 5-2 lists features of the front and back panels.
Figure 5-1 DeviceNet version front panel

Pressure unit indicators Status indicator indicates module status
Use the pressure display toggle

switch to set the optional LED
display for or vacuum chamber
or differential pressure
Optional LED
pressure display
(±XX±Y format)
Figure 5-2 DeviceNet version back panel
MOD status LED indicates if

module has power or is
functioning properly
Rate switch LSD (least significant digit)

(see page 60) address switch (see page 59)
NET status LED indicates if network MSD (most significant digit)
has power or is functioning properly address switch (see page 59)

Before You Begin
DeviceNet Operation
Table 5-2 Front and back panel features
Front panel feature Description
Optional LED pressure display • Pressure range: 1.0 x 10–4 Torr to 9.9 x 102 Torr
• Can indicate vacuum pressure measured by Convectron gauge or differential
pressure measured by differential pressure sensor
• Pressure value: two significant digits, 1-digit exponent, and + or – sign for the
Installation
exponent, in ±XX±Y format
• If differential pressure is indicated, + or – sign to left of 2-digit window indicates
positive or negative pressure differential, and + or – sign to left of 1-digit window
is for the exponent
• If vacuum pressure is indicated, + or – sign to left of 2-digit window does not
illuminate, and + or – sign to left of 1-digit window is for the exponent
Pressure unit indicators Indicate pressure measurement unit (pascal, mBar, or Torr)
Status indicator Indicates status of module
Operation Overview
Pressure display toggle switch Toggles optional display to vacuum pressure or differential pressure
Back panel feature Description
Address switches • Used for setting MSD (most significant digit) and LSD (least significant digit) in
module address
• Valid addresses are 0 to 63
Rate switch Used for setting data rate (125, 250, or 500 kbaud)
MOD status LED Indicates if module has power or is functioning properly
NET status LED Indicates if network has power or is functioning properly
Analog Operation
5.3 LED status indicator • Figure 5-3 illustrates the LED status indicator on the front panel. The LED
behavior indicates the status of the module.
• Table 5-3 lists states indicated by the LED.
Figure 5-3 LED status indicator

Status indicator
DeviceNet Operation
RS-485 Operation

Chapter 5
Table 5-3 LED status indications
LED behavior Indicated condition:
OFF Module power supply is OFF
Solid green Power is ON

Blinking green Electronics may be defective; return module to factory (see page 120)
5.4 NET and MOD LEDs Figure 5-4 illustrates the LEDs labeled NET and MOD.
• The MOD (module) LED indicates if the module has power or is
functioning properly.
• The NET (DeviceNet network) LED indicates if the DeviceNet network
has power and is functioning properly.
Table 5-4 and Table 5-5 list states for each LED and the corresponding
network or module status.
Figure 5-4 Network and module status LEDs
MOD status LED indicates if

module has power or is
functioning properly
NET status LED indicates if network

has power or is functioning properly
Table 5-4 NET (DeviceNet network) LED status
NET LED state Network status Description
OFF Not powered • The module is not on line

• The module has not completed the DUP_MAC_ID test
Blinking green/red Self test Module is in self test

Blinking green On line, not connected The module has passed the DUP_MAC_ID test and is on line,
but has not established connection with master node
Solid green On line, connected • The module is allocated to a master

• The device is operating normally

Before You Begin
DeviceNet Operation
Table 5-4 NET (DeviceNet network) LED status
NET LED state Network status Description
Blinking red Connection time out All connections have timed out
Solid red Critical link failure The module has detected an error that has made it incapable
of communicating on the network
Installation
Table 5-5 MOD (module) LED status
MOD LED state Module status Description
OFF Power OFF No power applied to module
Blinking green/red Self test Module is in self test
Solid green Operational Module is operating normally
Operation Overview
Solid red Unrecoverable fault Module has detected a fault
5.5 Performance with Table 5-6 lists performance characteristics for the Convectron ATM module
DeviceNet protocol using DeviceNet protocol.
Table 5-6 Convectron ATM module performance characteristics with DeviceNet protocol
Network feature Performance
Network size Up to 64 nodes (00 to 63)

Network length End-to-end network distance varies with speed
Analog Operation
Baud rate Distance
• 125 kbaud • 1,640 feet (500 m)
• 250 kbaud • 820 feet (250 m)
• 500 kbaud • 328 feet (100 m)
Bus topology • Linear (trunkline/dropline)

• Power and signal on the same network cable
Bus addressing • Master/slave

• Polled or change-of-state (exception-based)
DeviceNet Operation
System features • Module can be removed and replaced while network power supply is ON
• Module can be programmed while network power supply is ON (program
changes will take effect after power has been cycled)
RS-485 Operation

Chapter 5
5.6 DeviceNet protocol for the The Convectron ATM module is based on the Open DeviceNet Vendors
Convectron ATM module Association (ODVA) and S-Analog Sensor Object Class Subclass 01
(Instance Selector) standards. The Convectron ATM module command set
includes public and vendor-specific classes, services, and attributes.
DeviceNet communication requires identifier fields for the data. The use of
identifier fields provides the means for multiple priority levels, efficient
transfer of I/O data, and multiple consumers. As a node in the network, the
module produces data on the network with a unique address. All devices
on the network that need the data listen for messages. When other devices
on the network recognize the module’s unique address, they use the data.
For a complete list of DeviceNet messages used by the module, see
Appendix C. The instructions in this chapter explain how to use the module
command set to operate the module.
5.7 Operational tasks DeviceNet protocol conveys three types of messages, as defined in
Table 5-7.
Once the module is operating, you may use polled I/O or explicit messages
to perform the tasks listed in Table 3-2 and Table 3-3 on page 26.
Table 5-7 DeviceNet message types
Message type Message purpose

Polled I/O messages • Used for time critical, control oriented data
• Provide a dedicated, special purpose communication path between a producing
application and one or more consuming applications
Change of state I/O messages • Used for time critical, control oriented data
• Data transfer initiated by the producing application
• Provide a dedicated, special purpose communication path between a producing
application and one or more consuming applications
Explicit messages • Provide multipurpose, point-to-point communication paths between two

devices
• Provide typical request/response oriented network communications used for
performing node configuration and problem diagnosis
5.8 DeviceNet switches and The module has address switches for setting the network address and a data
indicators rate switch for setting the baud rate.

Before You Begin
DeviceNet Operation
Address switches Use the address switches to set the media access control identifier
(MAC ID), which the network master uses to address the module. When the
device powers up or is reset by the network, the device firmware will read
the address switch settings. Figure 5-5 illustrates the address switches.
Specific address values range from 0 to 63.
• Set the switch labeled “MSD,” to a value of 0 to 6 for the most significant
Installation
(first) digit.
• Set the switch labeled “LSD,” to a value of 0 to 9 for the least significant
(second) digit.
If a valid address between 0 and 63 is set, and it differs from the current
address stored in non-volatile RAM (NVRAM), the new address will be
saved in memory. If the data rate switch is set to the PGM setting, the
firmware will use the data rate that is stored in NVRAM.
Upon connection to the DeviceNet network, the module requests a
Operation Overview
duplicate address check.
• If another device on the network has the same address as the module, the
module will not join the network.
• If the address is unique, the module will join the network and the net
status indicator will blink green until a connection to the master node is
established.
Figure 5-5 Address switches

Valid addresses: 0 to 63
Analog Operation
• Set most significant digit (MSD) to a value of 0 to 6
• Set least significant digit (LSD) to a value of 0 to 9
DeviceNet Operation
MSD (most significant digit)
address switch
LSD (least significant digit)
address switch
RS-485 Operation

Chapter 5
Rate switch Use the rate switch to select the rate at which data is sent and received on
the network.
• You may select a data rate of 125 kbaud (setting 1), 250 kbaud (setting 2),
or 500 kbaud (setting 5).
• When the device powers up or is reset by the network, the device
firmware will read the rate switch setting.
If the selected data rate differs from the value stored in NVRAM, the new
data rate will be saved in memory. If the rate switch is set to the P setting,
the firmware will use the data rate that is stored in NVRAM.
Figure 5-6 Rate switch
Valid data rates:

• 125 kbaud (setting 1)
Rate switch
5.9 DeviceNet 1. Turn the external power supply OFF.

communication
2. Set the address switches to the desired address (0 to 63). See page 59.
configuration
3. Set the data rate switch to the desired setting (125, 250, or 500 kbaud).
See page 60.

Before You Begin
DeviceNet Operation
4. Turn the external power supply ON.

5. Refer to Table 5-8 and Table 5-9 to allocate a connection for the
module to the network master. You must set the bit to 1 (polled) or 0
(explicit messages) to perform tasks explained in this chapter.
• Set the bit contents to 1 to enable polled I/O.
• Set the bit contents to 0 to enable explicit messages.
Installation
Table 5-8 Network master connection
Service Class Instance Attribute Data type Allocation choice bits
4Bhex 3 1 None STRUCT 0 = Explicit message

1 = Polled
2 = Bit strobed(a)
3 = Reserved(a)
4 = Change of state(b)
Operation Overview
5 = Cyclic(b)
6 = Acknowledge suppression(a)
7 = Connection(a)
(a) Not supported, value = 0.

(b) Supported, but value should always = 0 to perform tasks explained in this chapter.
Table 5-9 Network master connections allocation choice bits
Assembly
number STRUCT data: One byte format
Analog Operation
1 Bit 7 Bit 6 Bit 5 Bit 4 Bit 3 Bit 2 Bit 1 Bit 0
Connection Acknowledge Cyclic Change of Reserved Bit Polled Explicit
suppression state strobed message
DeviceNet Operation
RS-485 Operation

Chapter 5
6. Refer to Table 5-10 to configure the expected packet rate for messages.
The expected packet rate is the rate at which the module expects to
send data to and receive a packet of data from the network.
• The default expected packet rate for explicit messaging is 2500 msec
(2.5 sec.).
• For polled I/O, set the expected packet rate to 0 (none).
• If data will be requested at a rate slower than every 2500 msec, you
must change or disable the expected packet rate to prevent the
connection from timing out.
Table 5-10 Expected packet rate
Expected packet rate for explicit messaging

Service Class Instance Attribute Master data Data type Description
10hex 5 1 9 data such as UINT Rate at which module sends data to and
09 C4hex receives data from network
(default) • Default is 2500 msec (2.5 sec.)
• Valid time is ≤ 2500 msec (2.5 sec.)
Expected packet rate for polled I/O

10hex 5 2 9 00 00 UINT Disable expected packet rate
7. If the connection allocation bit 1 (polled) is cleared at Step 5 on

page 61, refer to Table 5-11 to configure the polled data input format
and status byte.
• You may configure the module to send data to the network in
unsigned integer (UINT) or floating point data (REAL) formats with or
without a status byte and setpoint status byte.
• The default configuration sends pressure in floating point data format
with one byte of status data.

Before You Begin
DeviceNet Operation
Table 5-11 Configuring polled input I/O data format
Format Service Class Instance Attribute UINT data
2 bytes UINT vacuum pressure 10hex 4 0 65hex 01
1 BYTE exception status 10hex 4 0 65hex 02

2 bytes UINT vacuum pressure
Installation
1 BYTE setpoint status
4 bytes REAL vacuum pressure 10hex 4 0 65hex 04
Default configuration: 10hex 4 0 65hex 05

1 BYTE exception status
4 bytes REAL vacuum pressure
2 bytes UINT vacuum pressure 10hex 4 0 65hex 0F
Operation Overview
2 bytes INT differential pressure


4 bytes REAL vacuum pressure 10hex 4 0 65hex 12
Analog Operation
4 bytes REAL differential pressure


DeviceNet Operation
5.10 Pressure units and values You may use explicit messages to set the pressure unit.
You may use explicit messages or input polled I/O to read values that
represent measured pressure. You must calculate measured pressure from
the values represented by the explicit message or input polled I/O.
If you get pressure using input polled I/O or from the assembly object using
explicit messaging, values are available with or without warning and alarm
status or setpoint status.
RS-485 Operation

Chapter 5
Set or get pressure unit Use the explicit messages listed in Table 5-12 to set or get the unit of
pressure.
Table 5-12 Pressure measurement units
Typical
Service Class Instance Attribute device data Data type Description
0Ehex 31hex 1 4 01 03 UINT Get pressure unit for Convectron gauge
10hex 31hex 1 4 01 03 UINT Set pressure unit for Convectron gauge

• 769 = Torr
• 776 = mbar
• 777 = pascal
0Ehex 31hex 2 4 01 03 UINT Get pressure unit for differential pressure

10hex 31hex 2 4 01 03 UINT Set pressure unit for differential pressure
• 769 = Torr
• 776 = mbar
• 777 = pascal
Data conversion Refer to Table 5-13 to convert explicit message or input polled I/O data to
meaningful values representing exception status, setpoint status, vacuum
pressure, or differential pressure.
Table 5-13 Converting BYTE, UINT, INT, or REAL data to exception status, setpoint status, or pressure values
Represented value Data type Converting data to exception status, setpoint status, or pressure value
Exception status BYTE 8-bit string, from most significant to least significant bit:
• Bit 1 = Alarm
• Bit 5 = Warning
Setpoint status BYTE 8-bit string, from most significant to least significant bit:
• Bit 0 = Relay 1 is activated
• Bit 1 = Relay 2 is activated
Vacuum pressure UINT 16-bit unsigned integer value from 0 to 65535, from integer count:
( Integer counts ⁄ 2000 ) – 12.6249
Vacuum pressure = 10
Differential pressure INT 2-byte (16-bit) integer value from –32767 to +32767, from integer count:
Integer counts
Differential pressure = ------------------------------------
10
Vacuum pressure or REAL 32-bit floating point value in single precision IEEE 754 format, in pressure unit
differential pressure defined by the user (Torr, mbar, or pascal).

Before You Begin
DeviceNet Operation
Get vacuum pressure or The graphs on pages 66–68 enable you to determine the indicated N2 or air
differential pressure pressure that corresponds to a specific true pressure of 10 other commonly
used process gases.
Refer to Table 5-14 to find the appropriate graph:
Table 5-14 Appropriate graphs and tables for reading pressure
Installation
Figure or table number, page Pressure range in Torr Gases
Figure 5-7, page 66 1 mTorr to 100 mTorr All 12 process gases
Figure 5-8, page 67 100 mTorr to 1000 Torr Ar, CO2, CH4, freon 12, He, N2 or air
Figure 5-9, page 68 0.1 mTorr to 1000 Torr D2, freon 22, Kr, Ne, O2, N2 or air
Find the point at which the horizontal line representing true pressure
intercepts the vertical line representing indicated N2 (nitrogen equivalent)
Operation Overview
pressure. For example:
• in Figure 5-7, an indicated N2 or air pressure of 10–2 Torr corresponds to
a true He pressure of 1.5 x 10–2 Torr.
• In Figure 5-8, an indicated N2 or air pressure of 20 Torr corresponds to a
true Ar pressure of 700 Torr.
true Freon 22 pressure of 200 Torr.
If the gas being used is not included among those listed on pages 66–68, or
for a gas mixture, you will need to generate a calibration curve using a
Analog Operation
gas-independent transfer standard such as a capacitance manometer.
DeviceNet Operation
RS-485 Operation

Chapter 5
Figure 5-7 Reading true pressure values, 10–4 to 10–1 Torr
1.5 x 10–2 Torr


must be horizontal
1 mbar = 100 Pa
10–2 Torr
Indicated pressure in Torr (Nitrogen equivalent)

Before You Begin
DeviceNet Operation
Figure 5-8 Reading true pressure values, 10–1 to 1000 Torr
700 Torr
Installation
Operation Overview
Analog Operation
must be horizontal
1 mbar = 100 Pa
DeviceNet Operation
20 Torr

RS-485 Operation

Chapter 5
200 Torr

must be horizontal
1 mbar = 100 Pa
6 Torr

Before You Begin
DeviceNet Operation
You may use explicit messages or input polled I/O to read values that
represent measured pressure. You must calculate measured pressure from
the values represented by the explicit message or input polled I/O.
If you get pressure using input polled I/O or from the assembly object using
explicit messaging, values are available with or without warning and alarm
status or setpoint status.
Installation
Using DeviceNet explicit messages:
You may read measured pressure in the assembly object, analog sensor
object (instance 0), analog sensor object Convectron gauge (instance 1), or
analog sensor object differential pressure (instance 3).
• The explicit messages for each object are listed in Table 5-15.
• You must refer to Table 5-13 to convert the BYTE, UINT, STRUCT, or
REAL data to meaningful values representing exception status, setpoint
status, vacuum pressure, or differential pressure.
Operation Overview
Analog Operation
DeviceNet Operation
RS-485 Operation

Chapter 5
Table 5-15 Explicit messages for measured pressure values

Pressure values are transmitted in low byte to high byte order.
Service Class Instance Attribute Typical device data Data type Description
0Ehex 31hex 0 5Ehex 00 00 3E 44hex REAL Get REAL vacuum pressure (760 Torr)
0Ehex 31hex 1 6 00 00 3E 44hex REAL Get REAL vacuum pressure from
Convectron gauge (760 Torr)
0Ehex 31hex 2 6 00 00 23 79hex REAL Get REAL differential pressure
(–1 Torr)
0Ehex 4 1 3 23 79hex UINT Get UINT vacuum pressure (760 Torr)
0Ehex 4 2 3 00 STRUCT Get BYTE exception status
23 79hex Get UINT vacuum pressure
00 Get BYTE setpoint status
23 79hex Get UINT vacuum pressure
0Ehex 4 4 3 00 00 3E 44hex REAL Get REAL vacuum pressure (760 Torr)
00 00 3E 44hex Get REAL vacuum pressure
0Ehex 4 15 3 2379hex UINT Get UINT vacuum pressure (760 Torr)
F6 FFhex INT Get INT differential pressure (–1 Torr)
00 00 00 00 Placeholders
0Ehex 4 16 3 00 BYTE Get BYTE exception status
2379hex UINT Get INT vacuum pressure
F6 FFhex INT Get INT differential pressure
00 BYTE Get BYTE setpoint status
2379hex UINT Get UINT vacuum pressure
F6 FFhex INT Get INT differential pressure
0Ehex 4 18 3 00 00 3E 44hex REAL Get REAL vacuum pressure
00 00 80 BFhex REAL Get REAL differential pressure
00 00 00 00 00 00 00 00 Placeholders
00 00 3E 44hex REAL Get REAL vacuum pressure
00 00 00 00 00 00 00 00 Placeholders
00 00 3E 44hex REAL Get REAL vacuum pressure
00 00 00 00 00 00 00 00 Placeholders

Before You Begin
DeviceNet Operation
Using input polled I/O:

When a master polls the module for measured pressure, the format of the
returned pressure value depends on the data type. See Table 5-16.
• To configure the data format for input polled I/O, see Step 7 on page 62.
• You must refer to Table 5-13 to convert the BYTE, UINT, INT, STRUCT,
or REAL data to meaningful values representing exception status, setpoint
Installation
status, vacuum pressure, or differential pressure.
Table 5-16 Input polled I/O for pressure values

Pressure values are transmitted in low byte to high byte order.
Instance Typical device data Data type Description
1 23 79hex UINT UINT vacuum pressure (760 Torr)
2 00 STRUCT BYTE exception status
23 79hex UINT vacuum pressure
Operation Overview
3 00 STRUCT BYTE exception status
23 79hex UINT vacuum pressure
4 00 00 3E 44hex REAL REAL vacuum pressure
5 (default) 00 STRUCT BYTE exception status
00 00 3E 44hex REAL vacuum pressure (760 Torr)
15 2379hex UINT UINT vacuum pressure (760 Torr)
F6 FFhex INT INT differential pressure (–1 Torr)
16 00 BYTE BYTE exception status
2379hex UINT UINT vacuum pressure
Analog Operation
F6 FFhex INT INT differential pressure
00 BYTE BYTE setpoint status
2379hex UINT UINT vacuum pressure
F6 FFhex INT INT differential pressure
18 00 00 3E 44hex REAL REAL vacuum pressure
00 00 80 BFhex REAL REAL differential pressure
00 00 00 00 00 00 00 00 Placeholders
19 00 BYTE BYTE exception status DeviceNet Operation
00 00 3E 44hex REAL REAL vacuum pressure
00 00 00 00 00 00 00 00 Placeholders
00 00 3E 44hex REAL REAL vacuum pressure
00 00 00 00 00 00 00 00 Placeholders
RS-485 Operation

Chapter 5
5.11 Process control relays You may use explicit messages to perform the following tasks:
• Setting or getting relay setpoints
• Setting or getting relay activation direction (polarity)
• Setting or getting relay hysteresis
• Setting or getting relay assignments
• Setting or getting disabled/enabled state of relays
The module includes four single-pole, single throw (SPST) relays. Each relay
has programmable activation and deactivation setpoints. The setpoint is a
programmable value representing an N2 or air pressure at which the relay
activates or deactivates.
• When the module is shipped from the factory, relay setpoints are out of
range, disabled, and will not operate.
• You must configure relays to make them operable.
If the module will measure the pressure of any process gas other than N2 or
air, you must adjust setpoints for the process gas that will be used.
must adjust setpoints for the process gas. The true pressure of a gas other
than N2 or air may be substantially different from the pressure that the
for argon, although the true pressure of the argon is 250 Torr. Such a
WARNING
overpressurization.

Before You Begin
DeviceNet Operation
1. Make sure the module is properly installed and the axis is horizontal.
(See page 17.)
2. Figure 5-7, Figure 5-8, and Figure 5-9 on pages 66–68 are graphs that
show true pressure versus indicated pressure for 12 commonly used
process gases, including N2 and air. Refer to Table 5-17 to find the
appropriate graph:
Installation
Table 5-17 Appropriate true pressure versus indicated pressure graphs
Figure number, page Pressure range in Torr Gases
Figure 5-7, page 66 1 x 10–4 to 1 x 10–1 Torr All 12 common gases
Figure 5-8, page 67 1 x 10–1 to 1 x 1000 Torr Ar, CO2, CH4, Freon 12, He
Figure 5-9, page 68 1 x 10–1 to 1 x 1000 Torr D2, Freon 22, Kr, Ne, O2
Operation Overview
In default mode, relays 1 and 3 are assigned to the Convectron gauge
and are set to activate with decreasing vacuum pressure and deactivate
at a higher pressure than the activation pressure, as illustrated in
Figure 5-10.
In default mode, relays 2 and 4 are assigned to the differential pressure
sensor and are set to activate with increasing differential pressure and
deactivate at a lower pressure than the activation pressure, as
illustrated in Figure 5-11.
Table 5-18 Relay default activation, range, and hysteresis
Analog Operation
Relays Assignment Activation direction Range Hysteresis
Setpoints Vacuum pressure Decreasing pressure • Operating range: Dependent on activation

1 and 3 1.0 x 10–4 to 9.99 x 102 and deactivation pressures
Torr
• Default setting is out of
range, relay inoperable
Setpoints Differential pressure Increasing pressure • Operating range: Dependent on activation

2 and 4 –750 to +125 Torr and deactivation pressures
DeviceNet Operation
range, relay inoperable RS-485 Operation

Chapter 5
Figure 5-10 Relay 1 and 3 default behavior
Time
Deactivate
Software-
Vacuum pressure
defined
hysteresis
Activate
Relay activated
Activated
Deactivated
Time
Activate
Software-
defined
hysteresis
Deactivate
Relay
activated
Activated
Deactivated

Before You Begin
DeviceNet Operation
Table 5-19 lists minimum hysteresis for relays based on the relay
assignment.
Table 5-19 Relay assignments and minimum hysteresis
Relay assignment Hysteresis
Vacuum pressure 5%
Installation
Differential pressure 5 Torr
6.66 mbar
666.6 pascal
• If the you assign a relay to vacuum pressure, you may change the
deactivation pressure by entering REAL data that represents hysteresis as
a percentage of the activation pressure.
Operation Overview
• If you assign a relay to differential pressure, you may change deactivation
pressure by entering REAL data that represents hysteresis as a differential
pressure value.
Use the explicit messages listed in Table 5-20 to configure relays.
Analog Operation
DeviceNet Operation
RS-485 Operation

Chapter 5
Table 5-20 Relay configuration commands
Relay 1
Service Class Instance Attribute Typical master data Data type Description
10hex 35hex 1 5 BD 37 86 35hex REAL Set pressure at which relay 1 activates

(1 x 10–6)
10hex 35hex 1 6 0 BOOL 1 = Enable relay 1

0 = Disable relay 1
10hex 35hex 1 8 0 BOOL 0 = Activate with decreasing pressure

1 = Activate with increasing pressure
10hex 35hex 1 0Ahex 00 00 70 41hex REAL Set hysteresis

(15%) • Percentage of activation pressure if
relay 1 represents vacuum pressure
• Pressure value if relay 1 represents
differential pressure
10hex 35hex 1 0Ehex 24 01 EPATH Set relay 1 assignment

• 24 01= Vacuum pressure
• 24 02= Differential pressure
Relay 2

(1 x 10–6)

0 = Disable relay 2




Before You Begin
DeviceNet Operation
Table 5-20 Relay configuration commands (continued)
Relay 3

(1 x 10–6)
Installation
0 = Disable relay 3


Operation Overview

Relay 4
Analog Operation
(1 x 10–6)

0 = Disable relay 4


DeviceNet Operation

RS-485 Operation

Chapter 5
Get relay setpoints Use the explicit messages listed in Table 5-21 to get the pressure value at
which a relay activates.
Table 5-21 Relay setpoints
0Ehex 35hex 1 5 BD 37 86 35hex REAL Get pressure at which relay 1 activates

(1 x 10–6)

(1 x 10–6)

(1 x 10–6)

(1 x 10–6)
Get enable/disable status Use the explicit messages listed in Table 5-22 to get the enabled or disabled
of relays status of a relay.
After relays have been made operable, you may use explicit messages to
disable any specified relay. If you disable a relay, you must re-enable it to
make it operable. You must reconfigure the relay to re-enable it. See pages
72–77.
Table 5-22 Relay enabled/disabled status
0Ehex 35hex 1 6 0 BOOL 0 = Relay 1 is disabled

1 = Relay 1 is enabled




Before You Begin
DeviceNet Operation
Get activation or Use the explicit messages listed in Table 5-23 to get the activation or
deactivation status of deactivation state of a relay.
relays
Table 5-23 Relay activation/deactivation status
Installation
0Ehex 35hex 1 7 0 BOOL 0 = Relay 1 is deactivated
1 = Relay 1 is activated



Operation Overview
Get relay hysteresis Use the explicit messages listed in Table 5-24 to get the hysteresis for a
relay.
• The returned value is a percentage of activation pressure if the relay
represents vacuum pressure.
• The returned value is a pressure value if the relay represents differential
pressure.
Table 5-24 Relay hysteresis
Analog Operation
0Ehex 35hex 1 0Ahex 00 00 70 41hex REAL • Percentage of activation pressure if

(15%) relay 1 represents vacuum pressure

0Ehex 35hex 3 0Ahex 00 00 70 41hex REAL • Percentage of activation pressure if DeviceNet Operation

RS-485 Operation

Chapter 5
Get relay assignments Use the explicit messages listed in Table 5-25 to get the assignment for a
relay.
Table 5-25 Relay assignments
0Ehex 35hex 1 0Fhex 00 00 24 00 REAL Get input data from analog sensor object
• 24 01 = Relay 1 is assigned to
vacuum pressure
vacuum pressure
vacuum pressure
vacuum pressure
5.12 Calibrate Convectron An atmospheric pressure calibration is performed on the Convectron gauge,
gauge at atmospheric using N2, at the factory before the module is shipped.
pressure
• Regardless of the process gas that is being used, you should always use
N2 or air to calibrate the Convectron gauge at atmospheric pressure.
• You must send the command in the pressure unit that has been
programmed for the module. See page 64.
increase to the atmospheric pressure. Atmospheric pressure must be
higher than 400 Torr (5.332 mbar, 533.2 pascal).
2. Use the explicit message listed in Table 5-26 to perform the
atmospheric pressure calibration. Set the command bit to 1.

Before You Begin
DeviceNet Operation
5.13 Calibrate Convectron During a fast pumpdown from atmospheric pressure, thermal effects
gauge at vacuum temporarily prevent the module from measuring pressure accurately below
pressure 10–3 Torr. After approximately 15 minutes, pressure indications the 10–4
Installation
Convectron gauge calibration at vacuum pressure should be performed
frequently.
Periodic resets of the vacuum chamber calibration point also improve the
accuracy and repeatability of the Convectron gauge.
Operation Overview
N2 or air to calibrate the Convectron gauge at vacuum pressure.
• The highest allowable calibration pressure is 1 x 10–1 Torr
(1.33 x 10–1 mbar, 133.3 x 10–1 pascal).
1. Turn on the pump and allow the vacuum chamber to decrease to the
pressure at which the vacuum pressure point will be set. Pressure must
be lower than 1 x 10–1 Torr (1.33 x 10–1 mbar, 133.3 x 10–1 pascal).
Analog Operation
2. Use the explicit message listed in Table 5-26 to perform the vacuum
pressure calibration. Set the command bit to 0.
Table 5-26 Vacuum pressure or atmospheric pressure calibration command
4Bhex 31hex 1 None None None Calibrate module at vacuum pressure
4Chex 31hex 1 None 00003E44hex Real Calibrate module at atmospheric pressure
DeviceNet Operation
RS-485 Operation

Chapter 5
5.14 Calibrate differential Setting the differential pressure sensor zero decreases measurement error of
pressure sensor zero the sensor. Differential pressure sensor zero is the pressure offset error for
the sensor when atmospheric and vacuum pressures are equal (the pressure
differential is zero).
This is a pressure differential of zero.
2. Use the explicit message listed in Table 5-26 to set the differential
pressure zero. Set the command bit to 0.
Table 5-27 Differential pressure zero command
4Bhex 31hex 2 None None None Set differential pressure zero
5.15 Reset module to Use the explicit message listed in Table 5-28 to reset the module to
power-up state power-up status.
Resetting the module to power-up status has the same effect as cycling
power to the module. Communication is re-enabled two seconds after
you’ve sent the explicit message.
Table 5-28 Reset to power-up state command

05hex 1 1 None 00 USINT Reset module to power-up state
5.16 Get firmware version Use the explicit messages listed in Table 5-29 to get the firmware version
for the module.
Table 5-29 Firmware version command
Service Class Instance Attribute Device data Data type Description
0Ehex 1 1 4 01 01 None Get firmware version

Before You Begin
DeviceNet Operation
5.17 Factory defaults Convectron ATM modules are shipped with the default settings listed in
Table 5-30. If options in your application require settings different from the
factory defaults listed in Table 5-30, you may change the settings.
• Some settings can be changed only through the DeviceNet interface.
• You may reconfigure options before or after completing the basic setup
procedures described in this chapter.
Installation
Table 5-30 Factory default settings
Parameter Default setting
Digital communication Baud rate: 500 kbaud
Vacuum calibration pressure 1 x 10–4 Torr (1.33 x 10–4 mbar, 1.33 x 10–2 pascal)
Atmospheric calibration pressure 760 Torr (1013 mbar, 1.01 x 105 pascal)
Differential pressure zero 760 Torr (1013 mbar, 1.01 x 105 pascal)
Operation Overview
Relay 1 setpoint pressure 0 Torr (0 mbar, 0 pascal)
Relay polarity • 10% hysteresis

• Polarity default set for decreasing pressure
Unit of measure As specified by the catalog number:
Analog Operation
• T = Torr
• M = mbar
• P = pascal
5.18 DeviceNet error codes You may use DeviceNet explicit messages or polled I/O to find out if an
alarm or warning has been reported. To select polled I/O or explicit
messages, see page 60.
Using polled I/O An alarm or warning is indicated by the status byte in the input assembly,
instance 2 or instance 5. An alarm is bit weight 1, and a warning is bit
DeviceNet Operation
weight 5, as listed in Table 5-31.
Table 5-31 Module alarm and warning status for polled I/O
Instance BYTE data: One byte format
2 or 5 Bit 7 Bit 6 Bit 5 Bit 4 Bit 3 Bit 2 Bit 1 Bit 0

0 0 Warning 0 0 0 Alarm 0
RS-485 Operation

Chapter 5
Using explicit messages Alarms, warnings, and status messages are available from the objects listed
in Table 5-32.
For detailed information about alarms, warnings, and status messages, see
pages 84–86.
Table 5-32 DeviceNet explicit messages indicating alarms, warning, or status
Object Service Class Instance Attribute
Identity object 0Ehex 1 1 5
Device supervisor object 0Ehex 30hex 1 0Chex
Analog sensor object, instance 1, Convectron gauge 0Ehex 31hex 1 5
Analog sensor object, instance 2, differential pressure 0Ehex 31hex 2 5

Table 5-33 Status and fault information from identity object
0Ehex 1 1 5 00 00 WORD Status and fault information
Troubleshooting status and fault information

Instance Attribute Bit Cause Solution
1 5 0 An object is allocated. No solution necessary.
1 5 2 Device is configured. No solution necessary.
1 5 8 • Convectron gauge cannot be • If Convectron gauge cannot be calibrated at

calibrated at atmospheric atmospheric pressure, make sure vacuum
pressure. pressure = atmospheric pressure, then
• Convectron gauge cannot be recalibrate (see page 80).
calibrated at vacuum pressure. • If Convectron gauge cannot be calibrated at
vacuum pressure, make sure vacuum
pressure ≤ 1 x 10–4 Torr (1.33 x 10–4 mbar,
1.33 x 10–2 pascal), then recalibrate (see
page 81).
1 5 11 Convectron gauge or differential Replace gauge assembly (see page 118).

pressure sensor is inoperable.

Before You Begin
DeviceNet Operation
Table 5-34 Exception status from device supervisor object
0Ehex 30hex 1 0Chex 0 BYTE Get exception status
Troubleshooting exception status

Installation
1 0Chex 1 Convectron gauge or differential Replace gauge assembly (see page 118).
pressure sensor is inoperable.
1 0Chex 5 • Convectron gauge cannot be • If Convectron gauge cannot be calibrated at

calibrated at atmospheric atmospheric pressure, make sure
pressure. atmospheric pressure > 400 Torr
• Convectron gauge cannot be (5.332 mbar, 533.2 pascal), then recalibrate
calibrated at vacuum pressure. (see page 80).
• If Convectron gauge cannot be calibrated at
Operation Overview
vacuum pressure, make sure vacuum
pressure > 1 x 10–1 Torr (1.33 x 10–1 mbar,
133.3 x 10–1 pascal), then recalibrate (see
page 81).
Table 5-35 Reading valid, status, alarm, and warning information from analog sensor object, instance 1, Convectron gauge
0Ehex 31hex 1 5 1 BOOL Get reading valid, 0 or 1
0Ehex 31hex 1 7 0 BYTE Get status, alarm or warning
Analog Operation
Troubleshooting reading valid, status, alarm, and warning information
1 5 0 Reading is valid, Convectron gauge 0 = Get status from instance 1, attribute 7.

is operating normally. 1 = No solution necessary.
1 7 0 Convectron gauge is inoperable. Replace gauge assembly (see page 118).
1 7 1 Convectron gauge is operating No solution necessary.

normally.
1 7 2 Convectron gauge cannot be Make sure atmospheric pressure > 400 Torr DeviceNet Operation
calibrated at atmospheric pressure. (5.332 mbar, 533.2 pascal), then recalibrate
(see page 80).
1 7 3 Convectron gauge cannot be Make sure vacuum pressure > 1 x 10–1 Torr
calibrated at vacuum pressure. (1.33 x 10–1 mbar, 133.3 x 10–1 pascal), then
recalibrate (see page 81).
RS-485 Operation

Chapter 5
Table 5-36 Reading valid, status, alarm, and warning information from analog sensor object, instance 2, differential pressure
0Ehex 31hex 2 5 1 BOOL Get reading valid, 0 or 1
0Ehex 31hex 2 7 0 BYTE Get status, alarm or warning
Troubleshooting reading valid, status, alarm, and warning information

2 5 0 Reading is valid, differential No solution necessary.

pressure sensors are operating
normally.
2 7 0 Differential pressure sensor failure. 0 = No solution necessary.

1 = Replace gauge assembly (see page 118).
2 7 2 Convectron gauge cannot be 0 = No solution necessary.

calibrated at atmospheric pressure. 1 = Make sure vacuum pressure =
atmospheric pressure, then recalibrate (see
page 80).
2 7 3 Convectron gauge cannot be Make sure vacuum pressure ≤ 1 x 10–4 Torr

calibrated at vacuum pressure. (1.33 x 10–4 mbar, 1.33 x 10–2 pascal), then
recalibrate (see page 81).

Before You Begin
Chapter 6 RS-485 Operation
6.1 Preparing to operate the This chapter explains how to operate the Convectron ATM module with an
RS-485 module RS-485 digital output.
WARNING
Installation
explosive gases.
procedures:
Operation Overview
1. Install the module in accordance with the instructions on pages 15–24.
3. Use Table 6-1 to record the proposed activation and deactivation
setpoints, in Torr, and assignments for each relay.
Table 6-1 Relay setpoints and assignments
Relay Activation setpoint (Torr) Deactivation setpoint (Torr) Relay assignment

Analog Operation


4. Develop a circuit schematic that specifies exactly how each piece of
DeviceNet Operation
6. Set the module address, baud rate, and parity as instructed on pages
89–94.
you must adjust relay setpoints for the process gas that will be used. See
pages 95–99.
RS-485 Operation

Chapter 6
If you need application assistance, phone a Brooks Automation, Inc. /

1-800-776-6543 within the USA, or mail [email protected].
6.2 Module front and back • Figure 6-1 illustrates the RS-485 version front panel. The optional LED
panels pressure display can indicate vacuum pressure or differential pressure in
±XX±Y format.
• Figure 6-2 illustrates RS-485 version back panel. Use the pressure display
toggle switch on the back panel to set the display for vacuum pressure or
differential pressure.
• Table 6-2 lists features of the front and back panels.
Figure 6-1 RS-485 version front panel

Pressure unit indicators Setpoint activation indicators
Optional LED
pressure display
(±XX±Y format)
Figure 6-2 RS-485 version back panel
Use the pressure display toggle switch to

set the optional LED display for or
vacuum chamber or differential pressure.
LSD (least significant digit)

address switch (see page 90).
MSD (most significant digit)
address switch (see page 90).

Before You Begin
RS-485 Operation
Table 6-2 Front and back panel features
Front panel feature Description
Optional LED pressure display • Pressure range: 1.0 x 10–4 Torr to 9.9 x 102 Torr
• Can indicate vacuum pressure measured by Convectron gauge or differential
pressure measured by differential pressure sensor
• Pressure value: two significant digits, 1-digit exponent, and + or – sign for the
Installation
exponent, in ±XX±Y format
• If differential pressure is indicated, + or – sign to left of 2-digit window indicates
positive or negative pressure differential, and + or – sign to left of 1-digit window
is for the exponent
• If vacuum pressure is indicated, + or – sign to left of 2-digit window does not
illuminate, and + or – sign to left of 1-digit window is for the exponent
Pressure unit indicators Indicate pressure measurement unit (pascal, mBar, or Torr)
Setpoint activation indicators • Setpoint indicators are ON (green) when relays are activated
Operation Overview
• Activation state for relays is determined by relay configuration
Back panel feature Description
Pressure display toggle switch Toggles optional display to vacuum pressure or differential pressure.
Address switches • Used for setting MSD (most significant digit) and LSD (least significant digit) in
module address.
• Valid addresses are 0 to 255.
6.3 Operational tasks Once the module is operating, you may use RS-485 commands to perform
the tasks listed in Table 3-4 on page 27.
Analog Operation
6.4 Error responses If a command cannot be processed, the module returns one of the error
responses listed in Section 7.3.
6.5 Address You must assign an address to enable the module to communicate with the
host.
Use the rotary switches, located on the module back panel, to set a
hexadecimal value of 0 to 255 for the address. Figure 6-3 on page 90
illustrates the switches. The switch includes rotary settings for the most
significant digit (MSD) and the least significant digit (LSD).
1. Set the MSD switch to the hexadecimal value that is the most DeviceNet Operation
significant digit in the module address.
2. Set the LSD switch to the hexadecimal value that is the least significant
digit in the module address.
Set a switch on a mark for the values 1, 3, 5, 7, 9, B, D, or F. Set a switch
between marks for the values 0, 2, 4, 6, 8, A, C, or E.
RS-485 Operation

Chapter 6
Figure 6-3 Address switches on RS-485 module back panel
2. Set LSD switch to value for

least significant digit.
1. Set MSD switch to value for
most significant digit.
6.6 RS-485 physical layer Table 6-3 lists specifications for the RS-485 physical layer.
Table 6-3 RS-485 physical layer specifications
Function Description
Arrangement 2-wire half duplex
Address range 0 to FF
Default address 01
Method for setting module address Use address switches (see page 90)
Maximum cable length • 4000 feet (1610 meters)

• A common ground wire should connect all network
devices for long cable runs
Maximum number of devices in network 256 devices
Default baud rate 19200 baud (19.2 kbaud)
Data bits 8 data bits
Stop bits and parity 1 stop bit, no parity

Before You Begin
RS-485 Operation
6.7 Data timing and response The module communicates using half-duplex mode. Neither the module
nor the host can send and receive signals at the same time. The host issues
a command then waits for a response from the module.
Figure 6-4 illustrates the request and response data timing sequence,
including:
• The request sent by the host, response sent by the module.
Installation
• Minimum and maximum time duration from the end of the receipt of the
request to the start of the response (TD).
• Time required for the module to process and respond with the data (TR).
• Time for the module to switch between transmit and receive modes (D).
Table 6-4 lists data timing and response delay limits. The time required for
the module to process and send the response depends on the baud rate, as
listed in Table 6-9.
Operation Overview
The minimum response time of the module to a request is 2 msec. The host
must switch from transmit to receive mode in 0.5 msec or less to ensure
proper receipt of response data packets from the module. The host must
wait a minimum of 200 µsec after receiving the response before sending a
new request command.
Figure 6-4 Data timing and response delays
Analog Operation
Table 6-4 Data timing and response delay limits
DeviceNet Operation
Timing segment Time limit
Time TD (time for host to switch from transmit to receive) 2.0 msec minimum
12.0 msec maximum
Time TR (data processing and response time) 1

------------- × 130
Baud
Time D (time for module to switch from transmit to receive) 200 µsec
Total response time
Time T D + ⎛ ------------- × 130⎞ + Time D
1
⎝ Baud ⎠
RS-485 Operation

Chapter 6
Table 6-5 Baud rate and data response time
Baud rate Data response time (TR)
1200 baud 108 msec
2400 baud 54 msec

4800 baud 27 msec
9600 baud 13.5 msec
19200 baud (default) 6.75 msec
38400 baud 3.3 msec
6.8 RS-485 commands RS-485 commands require entry of integer values, hex code values (such as
“0F”), values in engineering notation (such as “2.00E+02”), and
alphanumeric character strings.
Command structure Table 6-6 explains the RS-485 command structure. The command should
not include a line feed with the carriage return. Including a line feed adds
an extra character and may cause a garbled response from the module.
Each response includes 13 characters, beginning with the asterisk (*) and
ending with carriage return.
Symbols used in this The ↵ symbol at the end of the command represents the carriage return
manual (CR), which is entered as hex code 0D or, if you’re using a terminal, by
simultaneously pressing the “Control” and “M” keys.
Table 6-6 RS-485 command structure
Address field Command field Data field Carriage return
#XX Character string for Character string data required to ↵

command from host execute command
“XX” is 2-digit address First character is: Data may include: • Enter hex code “0D”
• PC = process control • Hex code • Simultaneously press
• S = set • Pressure value in engineering “Control” and “M” keys
• T = calibrate notation
• R = read • Alphanumeric character string

Before You Begin
RS-485 Operation
6.9 RS-485 command set Table 6-7 lists RS-485 commands that provide pressure values or other
information without affecting module operation.
Table 6-8 lists RS-485 commands that may affect module operation and
have default values.
The instructions on pages 94–108 explain how to use the RS-485 command
set to configure and operate the module.
Installation
Table 6-7 RS-485 command set for values not affecting module operation
Command Set by command Non-volatile Change after reset Data returned Can be locked
RD No No No Vacuum pressure No
RDD No No No Differential pressure No
RU No No No Pressure unit No
RPCS No No No Relay state No
Operation Overview
VER No Yes No Software version No
Table 6-8 RS-485 command set for commands affecting module operation
Set by Can be
Command command Non-volatile Default Change after reset Data returned locked
SB Yes Yes 19200 baud Yes Confirm Yes
SU Yes Yes Torr No Confirm Yes
SD Yes Yes Vacuum pressure No Confirm No
Analog Operation
PC Yes Yes Out of range No Confirm or state No
PCG Yes Yes Disabled No Confirm or state No
PCE Yes Yes Disabled No Confirm or state No
TS Yes Yes 760 Torr No Confirm No
1013 mbar
1.01 x 105 pascal
TZ Yes Yes 1 x 10–4 Torr No Confirm No
1.33 x 10–4 mbar
DeviceNet Operation
1.33 x 10–2 pascal
RST Yes No Values at last power-up Yes None No
FAC Yes Yes Factory defaults Yes Confirm Yes
RS-485 Operation

Chapter 6
SB Set baud rate The example set baud rate (SB) command sequence sets the baud rate to
2400 baud:
Example SB command from host: #01SB2400↵
Response from module: *01 PROGM OK↵
Allowable SB values are 1200, 2400, 4800, 9600, 19200 (default), or
38400 baud.
The response time from the module depends on the baud rate and the task
that the host commands the module to perform.
Table 6-9 lists baud rates and corresponding response times.
The module driver automatically shuts OFF 80 µsec after returning its
response to the host.
Table 6-9 Baud rate and data response time
Baud rate Data response time (TR)
1200 baud 108 msec
2400 baud 54 msec
4800 baud 27 msec
9600 baud 13.5 msec
19200 baud (default) 6.75 msec
38400 baud 3.3 msec
SP Set parity The example set parity (SP) command sequence sets parity at seven data
bits, odd parity:
Example SP command from host: #01SPO↵
• An SPO command sets parity at seven data bits, odd parity.
• An SPE command sets parity at seven data bits, even parity.
• An SPN command sets parity at eight data bits, no parity. This is the
default parity.

Before You Begin
RS-485 Operation
PC Process control relays The module includes four single-pole, single throw (SPST) relays. Each relay
has programmable activation and deactivation setpoints. The setpoint is a
programmable value representing an N2 or air pressure at which the relay
activates or deactivates.
• When the module is shipped from the factory, relays setpoints are out of
any acceptable operating range, and relays will not operate.
Installation
• You must configure relays to make them operable.
• After a relay has been made operable, you may send an PCO command
to disable the relay (see page 100). The PCO command disables the relay
by setting relay setpoints to values that are outside the acceptable
operating range.
If the module will measure the pressure of any process gas other than N2 or
air, you must adjust setpoints for the process gas that will be used.
Operation Overview
must adjust setpoints for the process gas. The true pressure of a gas other
than N2 or air may be substantially different from the pressure that the
for argon, although the true pressure of the argon is 250 Torr. Such a
WARNING
Analog Operation
overpressurization.
DeviceNet Operation
RS-485 Operation

Chapter 6
1. Make sure the module is properly installed and the axis is horizontal.
(See page 17.)
2. Figure 6-7, Figure 6-8, and Figure 6-9 on pages 103–105 are graphs
that show true pressure versus indicated pressure for 12 commonly
used process gases, including N2 and air. Refer to Table 6-10 to find
the appropriate graph:
Table 6-10 Appropriate true pressure versus indicated pressure graphs
Figure number, page Pressure range in Torr Gases
Figure 6-7, page 103 1 x 10–4 to 1 x 10–1 Torr All 12 common gases
Figure 6-8, page 104 1 x 10–1 to 1 x 1000 Torr Ar, CO2, CH4, Freon 12, He
Figure 6-9, page 105 1 x 10–1 to 1 x 1000 Torr D2, Freon 22, Kr, Ne, O2
3. Refer to the following example process control (PC) command

sequence to program indicated pressures at which the relay will
activate and deactivate:
The example PC command sequence causes relay 1 to deactivate
when indicated vacuum pressure increases to 2.00 x 10–1 Torr and to
activate when indicated vacuum pressure decreases to 1.01 x 10–1
Torr.
Example PC command from host: #01PC1A+1.01E–01↵
Example PC command from host: #01PC1D+2.00E–01↵
The “PC1” value identifies process control relay 1.
The “A” (activation) and “D” (deactivation) pressure values determine
activation and deactivation pressures at which the relay switches
states.
• If the “D” value is greater than the “A” value, the relay will always
activate with decreasing pressure and deactivate with increasing
pressure. See Figure 6-5 on page 97.
• If the “A” value is greater than the “D” value, the relay will always
activate with increasing pressure and deactivate with decreasing
pressure. See Figure 6-6 on page 98.
• If you enter equal “A” and “D” values, the module software will
increase the “D” value by the minimum software defined hysteresis.

Before You Begin
RS-485 Operation
In default mode, relays 1 and 3 are assigned to the Convectron gauge

and are set to activate with decreasing vacuum pressure and deactivate
at a higher pressure than the activation pressure, as illustrated in
Figure 6-5.
In default mode, relays 2 and 4 are assigned to the differential pressure
sensor and are set to activate with increasing differential pressure and
deactivate at a lower pressure than the activation pressure, as
Installation
illustrated in Figure 6-6.
Table 6-11 Relay default activation, range, and hysteresis
Relays Assignment Activation direction Range Hysteresis

Setpoints Vacuum pressure Decreasing pressure • Operating range: Dependent on activation
1 and 3 1.0 x 10–4 to 9.99 x 102 and deactivation pressures
Torr
Operation Overview
Setpoints Differential pressure Increasing pressure • Operating range: Dependent on activation

2 and 4 –750 to +125 Torr and deactivation pressures
Analog Operation
Time
Deactivate
Software-
Vacuum pressure
defined
hysteresis
Activate
DeviceNet Operation
Relay activated
Activated
Deactivated
RS-485 Operation

Chapter 6
Time
Activate
Software-
defined
hysteresis
Deactivate
Relay
activated
Activated
Deactivated
The plus (+) or minus (–) sign that precedes the pressure value is
meaningful only if the relay will indicate differential pressure.
If the relay is assigned to vacuum pressure, you should not enter a + or
– sign preceding the “A” and “D” pressure values.
• If you enter a + sign, the sign will be disregarded.
• If you enter a – sign, the module will return a RANGE ER response.
If the relay is assigned to differential pressure, enter a + sign or a – sign
preceding the “A” and/or “D” pressure values.
• The + sign will cause the relay to switch states when differential
pressure is positive (when vacuum pressure is greater than
atmospheric pressure).
• The – sign will cause the relay to switch states when differential
pressure is negative (when atmospheric pressure is greater than
vacuum pressure).
The + or – that follows the pressure value is the exponent. For example:
• A pressure value of “2.00E–2” equals 2 x 10–2 Torr, or 0.020 Torr.
• A pressure value of “2.00E+2” equals 2 x 102 Torr, or 200 Torr.

Before You Begin
RS-485 Operation
Table 6-12 explains the PC command structure.
Table 6-12 Command structure for relay settings
Activation pressure
deactivation pressure, Increasing/decreasing
Address field Command field or OFF differential pressure Pressure value
Installation
#XX PC1 or A or D or O + or – sign X.XXE+Y or
PC2 or X.XXE–Y
PC3 or
PC4
“XX” is 2-digit • PC1: relay 1 Enter “A” value in one Include + or – sign if relay is • 2 significant digits
address • PC2: relay 2 command and “D” value in assigned to differential • “E” constant
• PC3: relay 3 another command or enter pressure • Signed exponent
• PC4: relay 4 “O” for OFF: • + for positive differential (+ or –)
• A: activation pressure pressure • 1-digit exponent
Operation Overview
• D: deactivation pressure • – for negative differential
• O: relay OFF (disabled) pressure
RPC Read setpoints The example read process control (RPC) command sequence causes the
module to return values indicating that relay 1 activates at 1.01 x 10–1 Torr
and deactivates at 2.00 x 10–1 Torr:
Example RPC command from host: #01RPC1A↵
Example response from module: *01 1.01E–01↵
Example RPC command from host: #01RPC1D↵
Analog Operation
Response from module: *01 2.00E–01↵
The “RPC1” value identifies relay 1.
The “A” or “D” value in the PC command designates the setpoint that is
being read:
• The “A” (activation) value is the indicated pressure at which relay 1
activates.
• A “D” (deactivation) value is the indicated pressure at which relay 1
deactivates.
DeviceNet Operation
The same command structure applies to all four process control relays
(RPC1, RPC2, RPC3, and RPC4). RS-485 Operation

Chapter 6
PCG Set relay assignments In default mode, relays 1 and 3 are assigned to the Convectron gauge, and
relays 2 and 4 are assigned to the differential pressure sensor. RS-485
commands enable you to assign any relay to the Convectron gauge or to the
WARNING
Failure to adjust relays for the gas that is being used can
cause an explosion due to overpressurization.
If relays are re−assigned, do not use the module to measure the
pressure of gases other than N2 or air without adjusting relay
setpoints for the process gas that will be used.
The example process control gauge (PCG) command sequence assigns

relays 1 and 2 to the Convectron gauge and relays 3 and 4 to the differential
pressure sensor:
Example PCG command from host: #01PCGCCDD↵
The 4-digit value following “PCG” assigns relays in ascending numerical
order. In this example, “CC” is the assignment for relays 1 and 2, and “DD”
is the assignment for relays 3 and 4.
• A “C” value assigns the specified relay to the Convectron gauge.
• A “D” value assigns the specified relay to the differential pressure sensor.
PCO Disable an operable relay If relays have been made operable, you may send an O command to disable
any specified relay. The example command disables relay 1 by resetting the
setpoint to a value that is outside the acceptable operating range.
Example PC command from host: #01PC1O↵
The command includes the alpha characters “P,” “C”, and “O” and the
numeric value (1, 2, 3, or 4) representing the relay that will be disabled.
If you disable a relay, you must reconfigure it to make it operable.

Before You Begin
RS-485 Operation
RPG Read relay assignments The example read process gauge (RPG) command causes the module to
return a value indicating that relays 1 and 2 are assigned to the Convectron
gauge (vacuum pressure) and relays 3 and 4 are assigned to the differential
pressure sensor:
RPG command from host: #01RPG↵
Example response from module: *01 CCDD ↵
Installation
The returned value indicates relay assignments in ascending numerical
order. In this example, “CC” is the assignment for relays 1 and 2, and “DD”
is the assignment for relays 3 and 4.
• A “C” value means the relay is assigned to the Convectron gauge.
• A “D” value means the relay is assigned to the differential pressure
sensor.
RPCS Read relay The read process control relay status (RPCS) command causes the module
Operation Overview
activation/deactivation to return a character string that represents the status of all four relays.
status
The example RPCS command causes the module to return a character string
indicating that relays 1 and 3 or activated and relays 2 and 4 are
deactivated.
RPCS command from host: #01RPCS↵
Example response from module: *01 0101 ↵
• A value of 1 means the specified relay (1, 2, 3, or 4) is activated.
• A value of 0 means the specified relay (1, 2, 3, or 4) is deactivated.
Analog Operation
SU Set pressure unit The example set unit (SU) command sets the pressure unit to Torr:
Example SU command from host: #01SUT↵
• An SUT command sets the pressure unit to Torr.
• An SUM command sets the pressure unit to mBar.
• An SUP command sets the pressure unit to pascal.
RU Read pressure unit The example read unit (RU) command causes the module to return the
DeviceNet Operation
character string “TORR”, which designates Torr as the pressure unit for
outputs and the optional display:
Example RU command from host: #01RU↵
Example response from module: *01 TORR ↵
• A “TORR ” response designates Torr as the pressure unit.
• An “MBAR ” response designates mbar as the pressure unit.
• A “PASCAL” response designates pascal as the pressure unit.
RS-485 Operation

Chapter 6
RD Read vacuum pressure The graphs on pages 103–105 enable you to determine the indicated N2 or
air pressure that corresponds to a specific true pressure of 10 other
commonly used process gases.
Refer to Table 6-13 to find the appropriate graph:
Table 6-13 Appropriate graphs and tables for reading pressure
Figure or table number, page Pressure range in Torr Gases
Figure 6-7, page 103 1 mTorr to 100 mTorr All 12 process gases
Figure 6-8, page 104 100 mTorr to 1000 Torr Ar, CO2, CH4, freon 12, He, N2 or air
Figure 6-9, page 105 0.1 mTorr to 1000 Torr D2, freon 22, Kr, Ne, O2, N2 or air
Find the point at which the horizontal line representing true pressure
intercepts the vertical line representing indicated N2 (nitrogen equivalent)
pressure. For example:
• in Figure 6-7, an indicated N2 or air pressure of 10–2 Torr corresponds to
a true He pressure of 1.5 x 10–2 Torr.
true Ar pressure of 700 Torr.
true Freon 22 pressure of 200 Torr.
If the gas being used is not included among those listed on pages 103–105,
or for a gas mixture, you will need to generate a calibration curve using a
gas-independent transfer standard such as a capacitance manometer.

Before You Begin
RS-485 Operation
Figure 6-7 Reading true pressure values, 10–4 to 10–1 Torr
Installation
Operation Overview
1.5 x 10–2 Torr
Analog Operation
must be horizontal
1 mbar = 100 Pa
DeviceNet Operation
10–2 Torr

RS-485 Operation

Chapter 6
700 Torr

must be horizontal
1 mbar = 100 Pa
20 Torr

Before You Begin
RS-485 Operation
Installation
200 Torr
Operation Overview
Analog Operation
must be horizontal
1 mbar = 100 Pa
DeviceNet Operation
6 Torr

RS-485 Operation

Chapter 6
The example read pressure (RD) command causes the module to return a
value that indicates vacuum pressure is 1.50 x 10–2:
Example RD command from host: #01RD↵
Example response from module: *01 1.50E–02↵
The returned value is in the pressure unit that you’ve set for the module.
If the returned value is not a valid representation of pressure, see page 109.
RDD Read differential The example read differential pressure (RDD) command causes the module
pressure to return a value indicating a negative differential of 7.34 x 102 between
vacuum and atmospheric pressures:
Example RD command from host: #01RDD↵
Example response from module: *01–7.34E+02↵
The returned value is in the pressure unit that you’ve set for the module.
See page 101.
In the response, the + or – sign that precedes the pressure value indicates
whether the pressure differential is positive or negative.
• A + sign indicates a positive pressure differential (vacuum pressure is
greater than atmospheric pressure).
• A – sign indicates a negative pressure differential (vacuum pressure is less
than atmospheric pressure).
The + or – that follows the “E” character is the sign of the exponent. For
example, a pressure value of “2.00E–2” equals 2 x 10–2 pressure units, and
a pressure value of “2.00E+2” equals 2 x 102 pressure units.
If the returned value is not a valid representation of pressure, see page 109.
SD Set optional display The example set display (SD) command causes the optional display to
indicate vacuum pressure:
Example SD command from host: #01SDC↵
• An SDC command sets the optional display to indicate Convectron gauge
pressure.
• An SDD command sets the optional display to indicate the differential
between atmospheric and vacuum pressures.

Before You Begin
RS-485 Operation
TS Calibrate module at An atmospheric pressure calibration is performed on the Convectron gauge,

atmospheric pressure using N2, at the factory before the module is shipped.
Installation
N2 or air to calibrate the Convectron gauge at atmospheric pressure.
increase to the atmospheric pressure. Atmospheric pressure must be
higher than 400 Torr (5.332 mbar, 533.2 pascal).
Operation Overview
2. Send a calibration at system (TS) command such as the command in
the example command sequence, which sets the atmospheric
calibration point to 760 Torr:
Example TS command from host: #01TS7.60E+02↵
Example response from module: *01 PROGM OK↵
If the module returns a message other than “*01 PROGM OK↵” in response
to the TS command, the atmospheric calibration has failed. See page 109 to
troubleshoot the problem.
During a fast pumpdown from atmospheric pressure, thermal effects
Analog Operation
TZ Calibrate module at
vacuum pressure temporarily prevent the module from measuring pressure accurately below
10–3 Torr. After approximately 15 minutes, pressure indications the 10–4
Convectron gauge calibration at vacuum pressure should be performed DeviceNet Operation
frequently.
RS-485 Operation

Chapter 6
Periodic resets of the vacuum chamber calibration point also improve the
accuracy and repeatability of the Convectron gauge.
N2 or air to calibrate the Convectron gauge at vacuum pressure.
• The highest allowable calibration pressure is 1 x 10–1 Torr
(1.33 x 10–1 mbar, 133.3 x 10–1 pascal).
1. Turn on the pump and allow the vacuum chamber to decrease to the
pressure at which the vacuum pressure point will be set. Pressure must
be lower than 1 x 10–1 Torr (1.33 x 10–1 mbar, 133.3 x 10–1 pascal).
2. Send a calibration at vacuum pressure (TZ) command:
Example TZ command from host: #01TZ1.00E–4↵
to the TZ command, the vacuum pressure calibration has failed. See
page 109 to troubleshoot the problem.
TO Calibrate differential Setting the differential pressure sensor zero decreases measurement error of
pressure sensor zero the sensor. Differential pressure sensor zero is the pressure offset error for
the sensor when atmospheric and vacuum pressures are equal (the pressure
differential is zero).
This is a pressure differential of zero.
2. Send a calibration at zero (TO) command:
TO command from host: #01TO↵
The last character in the TO command is the capital letter “O”, not a zero.
to the TO command, the differential pressure sensor zero calibration has
failed. See page 109 to troubleshoot the problem.
VER Read firmware version The example read firmware version (VER) command causes the module to
return a value that represents the Brooks Automation, Inc. internal part
number 016400 and firmware revision 01 for the module:
Example VER command from host: #01VER↵
Example response from module: *01 16400–01↵
• The first five digits (preceding the dash) are the internal part number.
• The last two digits (following the dash) are the firmware version.

Before You Begin
RS-485 Operation
FAC Reset values to Table 6-14 lists default settings for the RS-485 version of the module. After
factory defaults you’ve reconfigured the module, you may restore all parameters to their
default values by cycling power to the module or by sending a factory reset
(FAC) command.
FAC command from host: #01FAC↵
Installation
Reset command from host: #01RST↵
Response from module: None
Table 6-14 Factory default settings for RS485 module
Parameter Default setting
Digital communication • Parity: 8 data bits, no parity, 1 stop bit

• Baud rate: 19.2 kBaud
• Module address: 01
Operation Overview
Relays 1, 2, 3, and 4 State: Deactivated
Optional display • Pressure value: vacuum pressure

• Pressure unit: Torr
Analog Operation
DeviceNet Operation
RS-485 Operation

Chapter 6

Maintenance
Chapter 7 Maintenance
7.1 Customer service For customer service:

USA.
Installation
nearest you.
Damage requiring service Shut off power to the module and refer servicing to qualified service
personnel under the following conditions:
Operation Overview
a. If any liquid has been spilled onto, or objects have fallen into, the
module.
b. If a circuit board is faulty.
c. If the Convectron gauge sensing wire is open or the gauge is
contaminated.
d. If the module has been exposed to moisture.
e. If the module does not operate normally even if you follow the
operating instructions. Adjust only those controls that are explained in
this instruction manual. Improper adjustment of other controls may
Analog Operation
result in damage and will often require extensive work by a qualified
technician to restore the module to its normal operation.
f. If the module has been dropped or the enclosure has been damaged.
g. If the module exhibits a distinct change in performance.
If the module requires repair:
• See pages 112–115,
• Phone 1-303-652-4400 or 1-800-776-6543 within the USA, or
DeviceNet Operation
nearest you.
RS-485 Operation

Chapter 7
7.2 Troubleshooting If any of the conditions described on page 111 have occurred,
troubleshooting is required to determine the repairs that are necessary.
Precautions Because the Convectron gauge contains static-sensitive electronic parts,

follow these precautions while troubleshooting:
• Use a grounded, conductive work surface. Wear a high impedance
ground strap for personal protection.
• Do not operate the module with static sensitive devices or other
components removed from the product.
• Do not handle static sensitive devices more than absolutely necessary,
and only when wearing a ground strap.
• Rely on voltage measurements for troubleshooting module circuitry. Do
not use an ohmmeter.
• Use a grounded, electrostatic discharge safe soldering iron.
WARNING
Substitution or modifying parts can result in serious
product damage or personal injury due to electrical
shock or fire.
• Install only those replacement parts that are specified by
Brooks Automation, Inc. / Granville−Phillips.
• Do not install substitute parts or perform any unauthorized
modification to the module.
• Do not use the module if unauthorized modifications have
been made.
WARNING
Failure to perform a safety check after the module has
been repaired can result in serious property damage or
personal injury due to electrical shock or fire.
If the module has been repaired, before putting it back into
operation, make sure qualified service personnel perform a
safety check.

Maintenance
Maintenance
Symptoms, causes, and Table 7-1 on page 113 lists failure symptoms, causes, and solutions
solutions indicated by something other than an RS-485 error message from the
module.
Table 7-2 on page 115 lists failure symptoms, causes, and solutions
indicated by an RS-485 error message from the module.
Table 7-1 Failure symptoms, causes, and solutions
Installation
Symptom Possible causes Solution
Output voltage = 0 V 11.5 to 26.5 V power supply cable is Repair or replace power supply cable
improperly connected or faulty. (page 19).
Pressure reading is too high. • Conductance in connection to • If conductance is inadequate,

vacuum chamber is inadequate. reconnect Convectron gauge port to
• Plumbing to module leaks or is vacuum chamber (page 18).
contaminated. • If plumbing leaks or is contaminated,
• Chamber pressure is too high due to clean, repair or replace plumbing.
Operation Overview
leak, contamination, or pump failure. • If pump failed, repair or replace it.
• Power supply or output cable is • If cable is improperly connected or
improperly connected or faulty. faulty, repair or replace cable
(page 19).
Pressure reading is inaccurate. • Module is not calibrated for the • If Convectron gauge is out of
process gas that is being used. calibration, recalibrate it for the
• Module is not mounted horizontally. process gas that is being used
• Convectron gauge or differential (page 48, page 80, or page 107).
pressure sensor is damaged (for • If module is not mounted
example, by reactive gas) or horizontally, re-mount it (page 17).
contaminated. • If Convectron gauge is damaged,
Analog Operation
• Temperature or mechanical vibration replace it (page 118).
is extreme. • If Convectron gauge is contaminated,
return it to factory (page 48, page 80,
or page 107).
• If temperature or vibration is extreme,
relocate module or eliminate source
of heat or vibration.
Indicated pressure is different than • Process gas is a not the gas that the • If the process gas is not what was
pressure indications from other user anticipated using in the system. anticipated, calibrate Convectron
DeviceNet Operation
measurement devices. • Convectron gauge is defective. gauge for gas that is being used (see
page 48, page 80, or page 107).
• If Convectron gauge is defective,
return it to factory (page 120).
Relay LED indicator is ON, but relay is Relay contacts are defective. Make sure relay load is within specified
not functioning. rating and is non-inductive (page 122).
• Relay will not activate. • A circuit board is faulty. Return module to factory (page 120).
• Output voltage is < 0.10 V. • Convectron gauge sensing wire is
open.
RS-485 Operation

Chapter 7
7.3 RS-485 error responses Table 7-2 on page 115 lists failure symptoms, causes, and solutions that are
indicated by any of the following responses from the module:
• A defective or contaminated Convectron gauge.
• Excessive system pressure.
• Failure to install the module according to the instructions on pages 15-24.
• Unacceptable vacuum pressure or atmospheric pressure while a pressure
calibration is being performed.
Table 7-3 on page 116 lists error messages that the module returns if you
enter a command improperly or if the module non-volatile memory
(NOVRAM) cannot process a command.

Maintenance
Maintenance
Table 7-2 Troubleshooting RS-485 error messages
Message from
module Possible causes Solution
DEF SNSR • Convectron gauge is defective. • If Convectron gauge or differential pressure sensor is
• Differential pressure sensor is defective. defective, return module to factory (see page 120).
• Pressure is > 1000 Torr. • If pressure is higher than 1000 Torr, decrease pressure.
Installation
• Process gas is a not the gas that the user • If process gas is not the gas that the user anticipated,
anticipated using in the system. adjust relays indicating vacuum pressure for gas that is
being used (see page 95).
HI ATM V • Atmospheric pressure is > pressure • If atmospheric pressure is too high, decrease pressure,
represented in TS command. then re-send TS command (see page 107).
• TO command was sent while atmospheric • If atmospheric pressure is < 400 Torr (5.332 mbar, 533.2
pressure < 400 Torr (5.332 mbar, 533.2 Pa) pascal), increase pressure, then re-send TO command
• Convectron gauge is contaminated. (see page 108).
• Module is too near a gas inlet. • If Convectron gauge is contaminated, return it to factory
Operation Overview
(see page 120).
• If module is too close to a gas inlet, relocate module
farther away from inlet (see page 16).
LO ATM V • Atmospheric pressure is < pressure • If atmospheric pressure is too low, increase atmospheric
represented in TS command. pressure, then re-send TS command (see page 107).
• TO command was sent while atmospheric • If atmospheric pressure was too low, increase pressure,
pressure was > high limit of measurement then re-send TO command (see page 108).
range. • If module is too near pump, relocate module farther
• Module is too near the pump. away from pump (see page 16).
GAIN LIM TS command was sent while atmospheric Decrease atmospheric pressure, then re-send TS command
Analog Operation
pressure was > high limit of measurement (see page 107).
range.
HI VAC V Vacuum pressure is > pressure represented in Decrease vacuum pressure, then re-send TZ command
TZ command. (see page 107).
LO VAC V Vacuum pressure is < pressure represented in Increase vacuum pressure, then re-send TZ command (see
TZ command. page 107).
OFST LIM • TZ command was sent while vacuum • If vacuum pressure < low limit of measurement range,
pressure was < low limit of measurement increase vacuum pressure, then re-send TZ command
range. (see page 107).
DeviceNet Operation
• TO command was sent while differential • If differential pressure was outside measurement range,
pressure was outside measurement range. increase pressure, then re-send TO command (see
page 108).
MIN HYS Relay activation and deactivation pressures do Send PC command to reprogram activation and
not meet minimum hysteresis requirements. deactivation pressures (see page 95).
RS-485 Operation

Chapter 7
Table 7-3 RS-485 error responses related to data entry or inability to process a command
Response Possible causes Solution
RANGE ER Pressure value in TS or TZ calibration • Make sure atmospheric pressure > 400 Torr
command is outside valid limits. (5.332 mbar, 533.2 pascal), then re-send TS command
(see page 107).
• Make sure vacuum pressure 1 x 10–1 Torr
(1.33 x 10–1 mbar, 133.3 x 10–1 pascal), then re-send
TZ command (see page 107).
SYNTX ER • Command was improperly entered. Re-enter command using proper character string
• Module does not recognize command (see page 92).
syntax.
9.99E+09 Module cannot indicate a valid pressure • Send RS command to determine module status (see
value. page 109).
• If necessary, replace gauge assembly (see page 118).
INVALID Convectron gauge is defective. Replace gauge assembly (see page 118).
COMM ER • Baud rate is improperly configured. • Make sure baud rate matches baud rate for host
• Parity is improperly configured. controller (see page 94).
• Make sure parity matches parity for host controller (see
page 94).
NVRAM ER Non-volatile memory is defective. Return module to factory (see page 120).
7.4 DeviceNet error codes You may use DeviceNet explicit messages or polled I/O to find out if an
alarm or warning has been reported. To select polled I/O or explicit
messages, see page 60.
Using polled I/O An alarm or warning is indicated by the status byte in the input assembly,
instance 2 or instance 5. An alarm is bit weight 1, and a warning is bit
weight 5, as listed in Table 7-4.
Table 7-4 Module alarm and warning status for polled I/O
Instance BYTE data: One byte format
2 or 5 Bit 7 Bit 6 Bit 5 Bit 4 Bit 3 Bit 2 Bit 1 Bit 0

0 0 Warning 0 0 0 Alarm 0

Maintenance
Maintenance
Using explicit messages Alarms, warnings, and status messages are available from the objects listed
in Table 7-5.
For detailed information about alarms, warnings, and status messages, see
page 83.
Table 7-5 DeviceNet explicit messages indicating alarms, warning, or status
Installation
Object Service Class Instance Attribute
Identity object 0Ehex 1 1 5
Device supervisor object 0Ehex 30hex 1 0Chex
Operation Overview
7.5 Convectron gauge test
CAUTION
Performing a Convectron gauge test with instruments
that apply more than 0.1 V with the gauge at vacuum
pressure can result in property damage.
Do not perform a Convectron gauge test with an instrument that
Analog Operation
applies more than 0.1 V of electromotive force.
Even a small amount of voltage can damage the small diameter sensing wire
inside the Convectron gauge.
To determine if the Convectron gauge sensing wire has been damaged,
follow these instructions:
1. Remove the Convectron gauge as instructed on pages 118–119.
2. Use a low-voltage (maximum 0.1 V) ohmmeter to check resistance
DeviceNet Operation
values across the pins on the base of the gauge. Pin numbers are
embossed on the base. Figure 7-1 illustrates the base of the gauge.
The resistance across the pins should be within the ranges listed in
Table 7-6. If resistance across pins 1 and 2 is not approximately 20 to 30 Ω
or if other listed resistance values are greater than the listed values, the
gauge is defective. Install a replacement Convectron gauge as instructed on
page 119.
RS-485 Operation

Chapter 7
Figure 7-1 Convectron gauge base
2 3
5
4 1
Table 7-6 Convectron gauge resistance values
Pins Normal resistance (Ω)

Pins 1 to 2 15 to 25 Ω
Pins 2 to 3 50 to 60 Ω
Pins 1 to 5 175 to 190 Ω
7.6 Convectron gauge

removal and replacement
WARNING
Removing or replacing the Convectron gauge in a
high−voltage environment can cause an electrical
discharge through a gas or plasma, resulting in serious
property damage or personal injury due to electrical
shock or fire.
Vent the vacuum chamber to atmospheric pressure and shut off
power to the module before you remove or replace the
Convectron gauge.
Removing the Convectron To avoid contaminating the Convectron gauge, wear sterile gloves during
gauge the removal procedure. Refer to Figure 7-2 and follow these instructions:
1. Vent the vacuum chamber to atmospheric pressure and shut off power
to the module.
2. Use the fitting to detach the module from the vacuum chamber.
3. Remove the four Phillips-head screws from both module end plates,
but do not remove the hex nuts that hold the 15-pin connector in place.
4. Remove the end plate that does not have a connector, then remove
both sides of the blue housing.

Maintenance
Maintenance
5. Carefully unplug the Convectron gauge from the vertical PC board by

pulling the gauge housing away from the board.
6. Allow the differential pressure sensor tube to slide out of the port on
the Convectron gauge housing.
Figure 7-2 Removing the Convectron gauge
Installation
1. Vent vacuum chamber to atmosphere and shut off power to the module.
2. Detach module from vacuum chamber.
3. Remove this end plate, then 4. Remove four Phillips-head

remove blue module housing. screws from both module end
plates, but do not remove hex
nuts that hold 15-pin
6. Allow sensor tube to slide out connector in place.
of port on gauge housing.
Operation Overview
5. Carefully unplug
gauge housing from
vertical PC board.
Replacing the Convectron To avoid contaminating the Convectron gauge, wear sterile gloves during
gauge the replacement procedure. Refer to Figure 7-3 and follow these
Analog Operation
instructions:
1. Shut off power to the module.
2. Remove the differential pressure sensor port cover from the top of the
Convectron gauge.
3. Carefully reconnect the replacement Convectron gauge to the
differential pressure sensor by inserting the differential pressure tube
into the port on the top of the gauge.
4. Align the gauge pins so they mate with connections on the vertical PC
DeviceNet Operation
board. Carefully insert the Convectron gauge pins into the mating
connections on the vertical PC board.
5. Position the end plates and put both blue parts of the housing into
place, making sure the gauge grounding springs and cradles are in line
with the gauge envelope.
6. Re-install the Phillips-head screws into the end plates.
7. Use the fitting to re-attach the module to the vacuum chamber.
RS-485 Operation

Chapter 7
Figure 7-3 Installing the replacement Convectron gauge
1. Shut off power to the module.

2. Remove differential pressure sensor port cover from Convectron gauge.
3. Carefully insert tube

5. Put both parts of blue housing from sensor into port on
gauge.
into place around end plates.
4. Carefully insert gauge

6. Re-install Phillips-head screws pins into the mating
into end plates. connectors on vertical
PC board.
7. Re-attach module to vacuum
chamber.
7.7 Returning a damaged If the module must be returned for service, request a Return Authorization
module (RA) from Brooks Automation, Inc. / Granville-Phillips. Do not return
products without first obtaining an RA. In some cases a hazardous materials
document may be required. The Brooks Automation / Granville-Phillips
Customer Service Representative will advise you if the hazardous materials
document is required.
When returning equipment to Brooks Automation Inc. / Granville-Phillips,
be sure to package the products to prevent shipping damage. Circuit boards
and modules separated from the controller chassis must be handled using
proper anti-static protection methods and must be packaged in anti-static
packaging. Brooks Automation, Inc. / Granville-Phillips will supply return
packaging materials at no charge upon request. Shipping damage on
returned products as a result of inadequate packaging is the Buyer's
responsibility.Before you return the module, obtain an RA number by
contacting Granville-Phillips customer service:
USA.
For Global Customer Support, go to www.brooks.com, click on Contact Us,
then click on Global Offices to locate the Brooks Automation office nearest
you.

Appendix A Specifications
Specifications for analog, DeviceNet, and RS-485 versions
Vacuum pressure measurement

Measurement range for air Torr 1 x 10–4 to 1000
or N2 mBar 1.33 x 10–4 to 1333
pascal 1.33 x 10–2 pascal to 133 kPa
Resolution Resolution is a function of range and is 1 x 10–4 Torr (1 x 10–4 mbar, 1 x 10–2
pascal) or better than 0.35% of reading, whichever is greater
Setpoint range 1 x 10–3 to 1000 Torr
Measurements will change with different gases and mixtures. Do not use the
module with flammable or explosive gases.The module is factory calibrated
for use on N2. It also measures the pressure of air correctly within the
accuracy specification for the instrument. If the module will measure the
pressure of a gas other than N2 or air, you must adjust relays for the process
gas.
Differential pressure measurement
Measurement range 750 Torr below atmospheric pressure to 250 Torr above
Accuracy ±(2.5 Torr + 2.5% of reading)
Setpoint range 750 Torr below atmospheric pressure to 125 Torr above
Temperature
Operating temperature +0 to +40 °C (+32 to +104 °F) ambient, non-condensing
Non-operating temperature –40 to +85 °C (–40 to +185 °F)
CE compliance
EMC directive 204/108/EEC; EN 55011, EN 61000-6-1, EN 61000-6-2, EN 61000-6-3,
EN 61000-6-4, EN 61326-1
Low-voltage directive 73/23/EEC; EN 61010-1
To obtain a declaration of conformity, phone 1-303-652-4400 or
1-800-776–-6543 within the USA, or email [email protected].

Appendix A
I/O connector 15-pin male, high-density subminiature D

Setpoint relays
Relay type Analog version relays are single-pole, double-throw (SPDT), Form A
DeviceNet and RS-485 version relays are single-pole, single-throw (SPST),
Form C
Contact rating 1 A, 30 VDC resistive, 30 VAC non-inductive
Power requirements 11.5 to 26.5 VDC
Analog version 1.6 W maximum at 12 Vdc
RS-485 version 3.3 W maximum
DeviceNet interface 24 VDC (11 to 26.4) at 0.2 A maximum
Mounting position Horizontal axis (see page 17)
Convectron sensing wire filament Gold-plated tungsten
Convectron gauge internal volume 40 cm3 (2.5 in.3)

Specifications
Physical characteristics
Case material Powder-coated extruded aluminum
Materials exposed to 304 stainless steel, gold, borosilicate glass, kovar, alumina, NiFe alloy,
vacuum polyimide, Pyrex® glass, ceramic, silicon, epoxy, RTV, nickel
Weight 340 g (12 oz.) with 1/8 NPT fitting
Dimensions Dimensions are in cm (in.)
11 4.1
(4.3) (1.6)
6.4
(2.5)
Dim. H
5.5
(2.2)
Dim. H
Vacuum connections cm in.
cm in.
1/8 NPT pipe thread, ½-inch inside diameter 2.2 0.9
½-inch 4 VCR® type fitting, female 3.0 1.2
½-inch 8 VCR type fitting, female 3.9 1.5
NW16KF flange 3.1 1.2

®
1.33-inch (NW16CF) ConFlat flange 3.8 1.5
2.75-inch (NW35CF) ConFlat flange 3.8 1.5

Appendix A
Specifications for analog output version
Analog output 0.375 to 5.659 Vdc for 0 to 1000 Torr, non-linear, absolute of N2
Setpoint relays Two single-pole, double-throw (SPDT) relays. Use potentiometers and test
points on the module front panel and jumpers inside the module to
configure relays.
Relay 1 • Relay 1 is assigned to the Convectron gauge, which indicates vacuum
pressure
• Relay 1 activates with decreasing and deactivates with increasing
vacuum pressure
• Hysteresis: 30 mV
• Range: 1 x 10–3 to 1000 Torr
Relay 2 • Relay 2 is assigned to the differential pressure sensor, which indicates
pressure differential between atmospheric and vacuum pressures
• In default mode, relay 2 activates with increasing and deactivates with
decreasing differential between atmospheric and vacuum pressures
• Hysteresis: 8 Torr
• Range: –750 to +125 Torr
Analog I/O male connector on module end panel
Vacuum pressure analog output 5 15 Relay 1 common

Power ground 4 14 Relay 1 normally closed
11–26 V power input 3 13 Relay 2 normally closed
Setpoint 2 adjust 2 12 Relay 2 common
Setpoint 1 adjust 1 11 Relay 2 normally open

9 No connection
8 No connection
7 Differential pressure analog output
6 Signal ground

Specifications
Specifications for DeviceNet version
Digital format Open DeviceNet Vendors Association (ODVA) and S-Analog Sensor Object
Class Subclass 01 (Instance Selector) standards
Wiring Standard 5-pin DeviceNet receptacle that accepts a standard micro 5-pin
female cable connection
Data rate 125, 250, or 500 (default) kbaud
Setpoint relays Four single-pole, single-throw (SPST) relays. Use explicit messages to
configure relays. Each relay can be assigned to the Convectron gauge or the
Relays 1 and 3 • In default mode, relays 1 and 3 are assigned to the Convectron gauge,
which indicates vacuum pressure
• Range: 10–3 to 1000 Torr
Relays 2 and 4 • In default mode, relays 2 and 4 are assigned to the differential pressure
sensor, which indicates pressure differential between atmospheric and
vacuum pressures
DeviceNet male I/O connector on module end panel

No connection 3 13 No connection
No connection 1 11 Relay 2 normally open

8 No connection
7 Relay 3 common

Appendix A
Specifications for RS-485 version
Digital format American Standard Code for Information Interchange (ASCII)

Protocol RS-485, 2-wire
Parity • 8 data bits, no parity, 1 stop bit (default)
• 7 data bits, odd parity, 1 stop bit
• 7 data bits, even parity, 1 stop bit
Baud rate 1200, 2400, 4800, 9600, 19200 (default), or 38400 baud
Setpoint relays Four single-pole, single-throw (SPST) relays. Use RS-485 commands to
configure relays. Each relay can be assigned to the Convectron gauge or the
Relays 1 and 3 • In default mode, relays 1 and 3 are assigned to the Convectron gauge,
which indicates vacuum pressure
• Range: 10–3 to 1000 Torr
Relays 2 and 4 • In default mode, relays 2 and 4 are assigned to the differential pressure
sensor, which indicates pressure differential between atmospheric and
vacuum pressures
RS-485 male I/O connector on module end panel

Power ground 4 14 Relay 4 common
11–26 V power input 3 13 No connection
RS-485 B line 2 12 Relay 2 common
RS-485 A line 1 11 Relay 2 normally open

8 RS-485 ground
7 Relay 3 common

Specifications
Specifications for optional display
The DeviceNet and RS-485 versions of the module are available with an
optional 3-digit green LED display
• Can indicate vacuum pressure measured by Convectron gauge or
differential pressure measured by differential pressure sensor
• Display value: two significant digits, 1-digit exponent, and + or – sign for
the exponent, in ±XX±Y format
• Pressure range: 1.0 x 10-4 Torr to 999 Torr
• If differential pressure is indicated, + or – sign to left of 2-digit window
indicates positive or negative pressure differential, and + or – sign to left
of 1-digit window is for the exponent
• If absolute pressure is indicated, + or – sign to left of 2-digit window does
not illuminate, and + or – sign to left of 1-digit window is for the exponent
• Also indicates of the pressure unit (Torr, mbar, or Pa)

Appendix B Theory of Operation
The module measures gas pressures from 1 x 10–4 Torr to 1000 Torr.
Vacuum pressure is measured by a Convectron convection-enhanced
Pirani heat-loss gauge. The differential between atmospheric and vacuum
pressures is measured by a Piezo resistive diaphragm sensor. Figure B-1
illustrates the Convectron gauge and diaphragm sensor.
Figure B-1 Convectron heat-loss gauge and Piezo resistive diaphragm sensor
Ribbon cable Piezo resistive diaphragm

Connects differential pressure sensor
sensor board to main PC board Measures differential between
atmospheric and vacuum
pressures
Convectron heat-loss Pirani gauge

Measures vacuum pressure as a function of
heat loss through sensing wire
B.1 Piezo resistive diaphragm The Piezo resistive diaphragm sensor measures the differential between
sensor atmospheric and vacuum pressures. Changes in the differential between
atmospheric and vacuum pressures cause the diaphragm to move.
The differential pressure sensor connects to the vacuum chamber through a
port on the Convectron gauge. A second port, extending from the sensor, is
open to atmosphere and provides the pressure comparison that enables
differential pressure measurement.
The differential pressure sensor provides a direct, accurate,
electromechanical measurement of differential pressure regardless of the
gas composition. Changes in pressure on the diaphragm cause activation
and deactivation of relays at programmable setpoints that correspond to
increasing and decreasing differential pressures.

Appendix B
B.2 Convectron heat-loss The Convectron gauge is a convection-enhanced Pirani gauge. It operates
Pirani gauge like a standard Pirani gauge, which employs the principle of a Wheatstone
bridge to convert pressure to voltage, but uses convection cooling to enable
accurate pressure measurement, when properly calibrated, from 10–4 to
1000 Torr.
The sensing wire is an ultra-fine strand of gold-plated tungsten, which is
corrosion resistant and has exceptionally stable heat transfer characteristics.
The heated sensing wire loses more heat as the ambient gas pressure
increases. The more molecules contact the sensing wire, the more power is
required to keep the sensing wire at a constant temperature. So, as pressure
increases, the voltage across the Wheatstone bridge also increases.
The large interior volume of the Convectron gauge enables convection
currents to develop, enabling greater measurement resolution at higher
pressures. The Convectron gauge has a temperature compensator, which
causes bridge voltage to remain unaffected by changes in ambient
temperature.
B.3 Wheatstone bridge circuit Figure B-2 is a block diagram of the module controller. The Convectron
description gauge sensing wire is designated R1 in the Wheatstone bridge circuit. The
temperature compensator is designated R2. At bridge null, the following
equation applies:
R2 + R3
R 1 = ------------------
-
R4

Theory of Operation
Bridge voltage is a non-linear function of pressure. This relationship is

illustrated in Figure B-2. If the ambient temperature does not change, R1
remains constant.
Figure B-2 Wheatstone bridge block diagram
R1 R3 Process
control
Vacuum
Amplifier Buffer and ATM
adjust
Vacuum
R2 R4 output
Bridge Control
As vacuum pressure decreases, the number of molecules in the vacuum

chamber and the resulting heat loss from the sensing wire also decrease.
Temperature and R1 resistance therefore increase.
The increased resistance through R1 causes the bridge to become
unbalanced and a voltage to develop across the null terminals. The bridge
controller senses the null voltage and decreases the voltage across the
bridge until the null voltage again equals zero. When the bridge voltage
decreases, the power dissipation in the sensing wire decreases, causing R1
resistance to decrease to its previous value.
A pressure increase causes an opposing series of occurrences, during which
the bridge controller increases the bridge voltage to maintain a zero null
voltage.

Appendix C Messaging Summary
C.1 Polled I/O messaging summary

Input I/O (to master)
Instance Master data Device data Data type Description Type
1hex None 00 00 UINT UINT vacuum pressure Open
2hex None 00 STRUCT BYTE exception status Open
00 00 UINT vacuum pressure
3hex None 00 STRUCT BYTE exception status Open
00 00 UINT vacuum pressure
4hex None 00 00 00 00 REAL REAL vacuum pressure Open
5hex None 00 STRUCT BYTE exception status
00 00 00 00 REAL vacuum pressure
0Fhex None 00 00 UINT UINT vacuum pressure Open
00 00 INT INT differential pressure
10hex None 00 BYTE BYTE exception status Open
00 00 UINT UINT vacuum pressure
00 00 UINT UINT vacuum pressure
12hex None 00 00 00 00 REAL REAL vacuum pressure Open
00 00 00 00 REAL REAL differential pressure
00 00 00 00 00 00 00 00 Placeholders
00 00 00 00 REAL REAL vacuum pressure
00 00 00 00 00 00 00 00 Placeholders
00 00 00 00 REAL REAL vacuum pressure
00 00 00 00 00 00 00 00 Placeholders

Appendix C
C.2 Explicit message summary

Identity object
Service Class Instance Attribute Master data Device data Data type Description Type
0Ehex 1 1 1 None 00 5Chex UINT Vendor identification Open
0Ehex 1 1 2 None 00 1Chex UINT Product type Open
0Ehex 1 1 3 None 00 07 UINT 385007 & 385011 product ID Open
0Ehex 1 1 4 None 01 01 STRUCT Firmware revision Open
0Ehex 1 1 5 None 00 00 WORD Status and fault information Open
0Ehex 1 1 6 None 00 00 00 00 UDINT Serial number Open
0Ehex 1 1 7 None “GP385” S_STRING Identification Open
05hex 1 1 None 00 None USINT Reset module to power-up state Open
DeviceNet object
0Ehex 3 0 1 None 00 02 UINT Object revision Open
0Ehex 3 1 1 None 0 USINT Get node address, range 0–63 Open
10hex 3 1 1 0 Success Set node address if switch set to “PGM” Open
0Ehex 3 1 2 None 0 USINT Get baud rate, range 0–2 Open
10hex 3 1 2 0 Success Set baud rate if switch set to “PGM” Open
0Ehex 3 1 3 None 0 BOOL Get bus-off interrupt, range 0–1 Open
0Ehex 3 1 4 None 0 USINT Get bus-off counter, range 0–255 Open
10hex 3 1 4 0 Success Set bus-off counter Open
0Ehex 3 1 5 None 00 00 STRUCT Get allocation choice, range 0–3 Open
Get master ID, range 0–63
4Bhex 3 1 None 03 00 Success STRUCT Set allocation choice, range 0–3 Open
Set master ID, range 0–63
4Chex 3 1 None 3 Success BYTE Release allocation, range 0–3 Open

Messaging Summary
Assembly object
Master
Service Class Instance Attribute data Device data Data type Description Type
0Ehex 4 0 65hex None 5 USINT Get I/O produced instance selection, Vendor
range 1–5 or 15–20
10hex 4 0 65hex 5 Success USINT Set I/O produced instance selection, range Vendor
1–5 or 15–20
0Ehex 4 1 3 None 00 00 UINT Get UINT vacuum pressure Open
0Ehex 4 2 3 None 00 STRUCT Get BYTE exception status Open
00 00 Get UINT vacuum pressure
00 Get BYTE setpoint status
00 00 Get UINT vacuum pressure
0Ehex 4 4 3 None 00 00 00 00 REAL Get REAL pressure Open
00 00 00 00 Get REAL vacuum pressure
0Ehex 4 0F 3 None 00 00 UINT Get UINT vacuum pressure Open
00 00 INT Get INT differential pressure
0Ehex 4 10 3 None 00 BYTE Get BYTE exception status Open
00 00 UINT Get UINT vacuum pressure
00 00 UINT Get UINT vacuum pressure
0Ehex 4 12 3 None 00 00 00 00 REAL Get REAL vacuum pressure Open
00 00 00 00 REAL Get REAL differential pressure
00 00 00 00 00 00 00 00 Placeholders
00 00 00 00 REAL Get REAL vacuum pressure
00 00 00 00 00 00 00 00 Placeholders
00 00 00 00 REAL Get REAL vacuum pressure
00 00 00 00 00 00 00 00 Placeholders

Appendix C
Connection object, explicit message connection

0Ehex 5 1 1 None 3 USINT Get state of the object, range 0–5 Open
0Ehex 5 1 2 None 0 USINT Get instance type, explicit Open
0Ehex 5 1 3 None 83hex BYTE Get transport class trigger Open
0Ehex 5 1 4 None FB 05 UINT Get produced connection ID Open
0Ehex 5 1 5 None FC 05 UINT Get consumed connection ID Open
0Ehex 5 1 6 None 21hex BYTE Get initial communication characteristics Open
0Ehex 5 1 7 None 18 00 UINT Get produced connection size Open
0Ehex 5 1 8 None 18 00 UINT Get consumed connection size Open
0Ehex 5 1 9 None C4hex 09 UINT Get expected packet rate, range 0–65535 Open
10hex 5 1 9 00 00 Success UINT Set expected packet rate Open
0Ehex 5 1 0Chex None 1 USINT Get watchdog timeout action, 1 or 3 Open
10hex 5 1 0Chex 0 Success UINT Set watchdog timeout action Open
0Ehex 5 1 0Dhex None 00 00 UINT Get produced connection path length Open
0Ehex 5 1 0Ehex None 4 EPATH Get produced connection path Open
0Ehex 5 1 0Fhex None 00 00 UINT Get consumed connection path length Open
0Ehex 5 1 10hex None 4 EPATH Get consumed connection path Open
0Ehex 5 1 11hex None 00 00 UINT Get production inhibit time Open
05hex 5 1 None None Success None Reset inactivity/watchdog timer Open
Connection object, I/O connection

0Ehex 5 2 1 None 3 USINT Get state of the object, range 0–5 Open
0Ehex 5 2 2 None 1 USINT Get instance type, I/O Open
0Ehex 5 2 3 None 82hex BYTE Get transport class trigger Open
0Ehex 5 2 4 None FF 03 UINT Get produced connection ID Open
0Ehex 5 2 5 None FD 05 UINT Get consumed connection ID Open
0Ehex 5 2 9 None 00 00 UINT Get expected packet rate, range 0–65535 Open
10hex 5 2 9 00 00 Success UINT Set expected packet rate Open
0Ehex 5 2 0Chex None 0 USINT Get watchdog timeout action Open
0Ehex 5 2 0Ehex None 5 EPATH Set produced connection path length, Open
1–5 or 15–20
0Ehex 5 2 10hex None 1 EPATH Get consumed connection path length, 0 Open

Messaging Summary
Connection object, COS/cyclic connection

0Ehex 5 4 1 None 3 USINT Get state of the Object, range 0–5 Open
0Ehex 5 4 2 None 1 USINT Get instance type, I/O Open
0Ehex 5 4 3 None 0hex12 BYTE Get transport class trigger Open
0Ehex 5 4 4 None 7F 03 UINT Get produced connection ID Open
0Ehex 5 4 5 None FA 05 UINT Get consumed connection ID Open
0Ehex 5 4 9 None 00 00 UINT Get expected packet rate, range 0–65535 Open
10hex 5 4 00 00 Success Set expected packet rate Open
0Ehex 5 4 0Chex None 0 USINT Get watchdog timeout action Open
0Ehex 5 4 0Ehex None 5 EPATH Set produced connection path, Open
1 or 2 or 4 or 5
0Ehex 5 4 10hex None 1 EPATH Set consumed connection path, 0 or 1 Open
10hex 5 2 11hex 00 00 Success UINT Set production inhibit time Open
Acknowledge handler object

0Ehex 2Bhex 1 1 None 16 00 UINT Get acknowledge timer Open
10hex 2Bhex 1 1 16 00 Success + UINT Set acknowledge timer Open
data
0Ehex 2Bhex 1 2 None 1 USINT Get acknowledge retry limit Open
10hex 2Bhex 1 2 1 Success USINT Set acknowledge retry limit Open
0Ehex 2Bhex 1 3 None 1 UINT Get producing connection instance Open

Appendix C
Device supervisor object

0Ehex 30hex 1 3 None “CG” SSTRING Get device type, combination gauge Open
0Ehex 30hex 1 4 None “E54-0997” SSTRING Get revision level, SEMI S/A standard Open
0Ehex 30hex 1 5 None “” SSTRING Get manufacturer’s name, Open
“GRANVILLE-PHILLIPS”
0Ehex 30hex 1 6 None “385601” SSTRING Get manufacturer’s model number Open
0Ehex 30hex 1 7 None “1.01” SSTRING Get software revision level Open
0Ehex 30hex 1 8 None “1.01” SSTRING Get hardware revision level Open
0Ehex 30hex 1 0Bhex None 4 USINT Get device status Open
0Ehex 30hex 1 0Chex None 0 BYTE Get exception status Open
0Ehex 30hex 1 0Fhex None 0 BOOL Get alarm enable Open
10hex 30hex 1 0Fhex 0 Success Set alarm enable
0Ehex 30hex 1 10hex None 0 BOOL Get warning enable Open
10hex 30hex 1 10hex 0 Success Set warning enable
05hex 30hex 1 None None Success None Reset object service Open
06hex 30hex 1 None None Success None Start device execution Open
(No effect on device)
4Bhex 30hex 1 None None Success None Abort device activity (No effect on device) Open
4Chex 30hex 1 None None Success None Recover from abort state Open
(No effect on device)
4Dhex 30hex 1 None None Success None Perform diagnostics (No effect on device) Open
Analog sensor object, instance 0

0Ehex 31hex 0 5Ehex None 00 00 00 00 REAL Active value, vacuum pressure Open
0Ehex 31hex 0 5Fhex None 01 00 UINT Active instance number, 1 or 2 Open
0Ehex 31hex 0 60hex None 3 USINT Number of gauges, 2 or 3 Open
0Ehex 31hex 0 63hex None 1 UINT Instance selector, 1 for combination gauge Open

Messaging Summary
Analog sensor object, instance 1, Convectron gauge

0Ehex 31hex 1 3 None CAhex USINT Get data type Open
0Ehex 31hex 1 4 None 01 03 UINT Get pressure unit, 769 = Torr Open
10hex 31hex 1 4 None 01 03 UINT Set pressure unit, 769 or 776 or 777 Open
769 = Torr
776 = mbar
777 = pascal
0Ehex 31hex 1 5 None 1 BOOL Get reading valid, 0 or 1 Open
0Ehex 31hex 1 6 None 00 00 00 00 REAL Get pressure reading Open
0Ehex 31hex 1 7 None 0 BYTE Get status, alarm or warning Open
0Ehex 31hex 1 22hex None C8 00 UINT Get produce_trigger_delta Open
10hex 31hex 1 22hex C8 00 Success UINT Set produce_trigger_delta, 0 to 50000 Open
0Ehex 31hex 1 24hex None 1 USINT Get produce trigger delta data type Open
0Ehex 31hex 1 63hex None 02 00 UINT Get subclass number Open
0Ehex 31hex 1 67hex None 25 00 UINT Get maximum internal temperature Vendor
0Ehex 31hex 1 68hex None 25 00 UINT Get current internal temperature Vendor
4Bhex 31hex 1 None None None None Calibrate module at vacuum pressure Open
4Chex 31hex 1 None None None None Calibrate module at atmospheric pressure Open

Appendix C
Analog sensor object, instance 2, differential pressure

0Ehex 31hex 2 3 None CAhex USINT Get data type Open
0Ehex 31hex 2 4 None 01 03 UINT Get pressure unit, 769 = Torr Open
10hex 31hex 2 4 None 01 03 UINT Set pressure unit, 769 or 776 or 777 Open
769 = Torr
776 = mbar
777 = pascal
0Ehex 31hex 2 5 None 1 BOOL Get reading valid, 0 or 1 Open
0Ehex 31hex 2 6 None 00 00 00 00 REAL Get pressure reading Open
0Ehex 31hex 2 7 None 0 BYTE Get status, alarm or warning Open
0Ehex 31hex 2 22hex None C8 00 UINT Get produce_trigger_delta Open
10hex 31hex 2 22hex C8 00 Success UINT Set produce_trigger_delta Open
0Ehex 31hex 2 24hex None 01 USINT Get produce trigger delta data type, Open
percent
0Ehex 31hex 2 63hex None 03 00 UINT Get subclass number Open
0Ehex 31hex 2 67hex None 25 00 UINT Get maximum internal temperature Vendor
0Ehex 31hex 2 68hex None 25 00 UINT Get current internal temperature Vendor
4Bhex 31hex 2 None None None None Set differential pressure zero Open
4Chex 31hex 2 None None None None Set differential pressure gain adjust Open

Messaging Summary
Trip point object, instance 1, relay 1

0Ehex 35hex 1 5 None 00 00 00 00 REAL Get pressure at which relay 1 activates Open
10hex 35hex 1 5 00 00 00 00 Success REAL Set pressure at which relay 1 activates Open
0Ehex 35hex 1 6 None 0 BOOL Get relay 1 enabled/disabled status Open
0 = Relay 1 is disabled
10hex 35hex 1 6 0 Success BOOL Set relay 1 enabled/disabled status Open
0Ehex 35hex 1 7 None 0 BOOL Get relay 1 activation/deactivation status Open
0 = Relay 1 is deactivated
0Ehex 35hex 1 8 None 0 BOOL Get relay 1 polarity Open
0 = Activate with decreasing pressure
10hex 35hex 1 8 0 Success BOOL Set relay 1 polarity
0Ehex 35hex 1 9 None 0 USINT Get override status Open
0 = Normal
2 = Force false
0Ehex 35hex 1 0Ahex None 00 00 00 00 REAL Get relay 1 hysteresis as a percentage of Open
pressure if source path from analog object
= 24 00 or as a pressure value if source
path from analog object = 24 03
10hex 35hex 1 0Ahex 0 Success REAL Set relay 1 hysteresis Open
0Ehex 35hex 1 0Chex None 24 01 EPATH Get destination path, 01 Open
0Ehex 35hex 1 0Dhex None 0 BOOL Get output to output object Open
0Ehex 35hex 1 0Ehex None 24 00 EPATH Get source path from analog object Open
10hex 35hex 1 0Ehex None 24 01 EPATH Set relay 1 assignment Open
24 01 for vacuum pressure
24 02 for differential pressure
0Ehex 35hex 1 0Fhex None 00 00 24 00 REAL Get input data from analog sensor object Open
0Ehex 35hex 1 11hex None CAhex USINT Get data type, CAhex Open

Appendix C

10hex 35hex 2 5 00 00 00 00 Success REAL Set pressure at which relay 2 activates Open
10hex 35hex 2 6 0 Success BOOL Set relay2 enabled/disabled status Open
10hex 35hex 2 8 0 Success BOOL Set relay 2 polarity Open
0 = Normal
2 = Force false
10hex 2 0Ahex 0 Success REAL Set relay 2 hysteresis Open

Messaging Summary

10hex 35hex 3 5 00 00 00 00 Success Set pressure at which relay 3 activates Open
0 = Normal
2 = Force false

Appendix C

10hex 35hex 4 5 00 00 00 00 Success Set pressure at which relay 4 activates Open
0 = Normal
2 = Force false
Discrete output point object

0Ehex 09hex 1 3 None 0 BOOL Get output point value controlling relay 1 Open

Index
A BYTE 13
Address for RS-485 module 89 EPATH 13
Address switches 54, 59, 88, 90 INT 13
Alarms and warnings REAL 13
status using explicit messages 84, 117 SSTRING 13
status using polled I/O 83, 116 STRUCT 13
Appendixes UINT 13
DeviceNet Messaging Summary 133 USINT 13
Specifications 121 WORD 13
Theory of Operation 129 Defaults
atmospheric pressure calibration 83
C differential pressure zero 83
Calibration digital communication 83, 109
atmospheric pressure 48, 80, 107 factory 83, 109
Convectron gauge 24 relay polarity 83, 109
differential pressure zero 50, 82, 108 relay setpoint pressure 83, 109
vacuum pressure 49, 81, 107 RS-485 commands 93
Caution and warning statements 9 vacuum pressure calibration 83
CE Mark compliance 19, 121 Definitions
Chapters address 12
Analog Operation 29 attribute 12
Before You Begin 9 BOOL data 13
DeviceNet Operation 53 BYTE data 13
Installation 15 class 12
Maintenance 111 data rate 12
Operation Overview 25 data type 13
RS-485 Operation 87 device data 12
Connections to vacuum chamber 123 DeviceNet data types 13
Convectron gauge DeviceNet protocol 12
base 118 EPATH data 13
internal volume 122 explicit messages 12
removal 118 instance 12
replacement 119 INT data 13
sensing wire filament 122 master data 12
test 117 polled I/O messages 12
theory of operation 129 REAL data 13
Customer service 13, 111 SSTRING data 13
STRUCT data 13
UINT data 13
D
USINT data 13
Damage requiring service 111
WORD data 13
Data conversion 64
DeviceNet messaging summary
Data rate 60
Explicit messages 134
Data types
Polled I/O 133
BOOL 13
DeviceNet operation

Index
address switches 59 Error messages, troubleshooting 115

calibration at atmospheric pressure 80 Error responses 89
calibration at vacuum pressure 81 Explicit messages
communication configuration 60 alarm and warning status 84, 117
data conversion for pressure values 64 messaging summary 134
error codes 83
get firmware version 82 F
get relay activation/deactivation status 79 Factory settings for analog module 51
get relay assignments 80 Firmware version 82, 108
get relay enable/disable status 78 Fittings
get relay hysteresis 79 1/8 NPT pipe thread 18
get relay trip points 78 ConFlat flange fitting 18
get vacuum pressure 65 KF flange 18
module performance with 57 VCR type 18
pressure measurement unit measurement unit 64 Front panel
protocol for module 58 features of analog 31
rate switch 60 features of DeviceNet 55
reset to power-up state 82 features of RS-485 89
setpoint relays 72
status LEDs 56 G
switches and indicators 58 Ground
DeviceNet protocol connection to vacuum chamber 22
address switches 59 wiring 22
communication configuration 60
explicit messages summary 134
H
explicit messages, alarm and warning 84, 117
Hysteresis
module performance with 57
analog setpoint relays 41
NET (network) status LED 56
DeviceNet setpoint relays 73
polled I/O messaging summary 133
RS-485 setpoint relays 97
polled I/O, alarm and warning 83, 116
rate switch 60
switches and indicators 58 I
Differential pressure measurement 121 I/O connector 122
Differential pressure sensor analog module 20, 124
analog setpoint relay 2 46 DeviceNet module 21, 125
theory of operation 129 RS-485 module 21, 126
Digital format Indicators
DeviceNet module 125 analog setpoint and power on 47
RS-485 module 126 analog setpoints 31
Digital protocol power on 31
DeviceNet module 125 Installation 15
RS-485 module 126 attaching module to vacuum chamber 18
calibrating Convectron gauge 24
CE Mark compliance 19
E
configuring relays for application 23
Error codes 83, 116
DeviceNet wiring terminals 19

Index
eliminating radio frequency interference (RFI) 24 orientation 17

locating and orienting module 16 physical characteristics 123
module components 15 power supply 122
module power supply wiring 19 preparing analog module 29
mounting position 122 preparing DeviceNet module 53
pressure relief devices 16 preparing RS-485 module 87
replacement Convectron gauge 120 returning if damaged 120
wiring 19 RS-485 front and back panels 88
Instructions RS-485 optional display 106
about 9
analog module operation 29 O
DeviceNet module operation 53 Open DeviceNet Vendors Association (ODVA) 58,
installation 15 125
maintenance 111 Operation
reading and following 10 analog front panel 30
RS-485 module operation 87 analog module 29
analog setpoint relay 1 behavior 41
L analog setpoint relay 2 behavior 42
LED status indicator 55 below 10-3 Torr 50, 81, 107
Light emitting diode (LED) DeviceNet front and back panels 54
MOD (module) 57 DeviceNet module 53
NET (network) 56 DeviceNet setpoint relay 1 and 3 behavior 74
DeviceNet setpoint relay 2 and 4 behavior 74
M LED status indicator 55
Maintenance 111 overview 25
Convectron gauge base 118 preparing analog module 29
Convectron gauge removal 118 preparing DeviceNet module 53
Convectron gauge replacement 119 preparing RS-485 module 87
Convectron gauge test 117 RS-485 command structure 92
customer service 111 RS-485 commands 92
damage requiring service 111 RS-485 front and back panels 88
DeviceNet error codes 116 RS-485 module 87
failure symptoms, causes, and solutions 113 RS-485 module parity 94
returning a damaged module 120 RS-485 optional display 106
RS-485 error messages 114 RS-485 setpoint relay 1 and 3 behavior 97
troubleshooting 112 RS-485 setpoint relay 2 and 4 behavior 98
troubleshooting precautions 112 tasks and page references for analog 25
Module tasks and page references for DeviceNet 58
analog front panel 30 tasks and page references for RS-485 27
analog output specifications 124 Outputs
attaching to vacuum chamber 18 analog specifications 124
DeviceNet front and back panels 54 commonly used gases, analog 32
dimensions 123 N2 or air, analog 32
location 16 other gases, analog 32
operation below 10-3 Torr 50, 81, 107

Index
P VER 108
Parity for RS-485 module 94 RS-485 error responses 114
Piezo resistive diaphragm sensor 129 RS-485 physical layer specifications 90
Polled I/O
alarm and warning status 83, 116 S
messaging summary 133 Setpoint relays
Potentiometers activation direction 41, 73, 97
Convectron ATM adjust 31, 48 analog and power on indicators 47
Convectron VAC adjust 31, 50 analog module 41
Diaphragm ATM zero adjust 31, 51 analog relay 1 behavior 41
setpoint 1 adjust 31, 43 analog relay 2 behavior 42
setpoint 2 adjust 31, 47 analog test point for relay 1 43
Power supply 122 analog test point for relay 2 47
Precautions for troubleshooting 112 assignments 75, 100
Pressure configuring for application 23
measurement unit 64, 101 contact rating 122
reading true values 66, 103 DeviceNet module 72
relief devices 16 DeviceNet relay 1 and 3 behavior 74
true versus indicated 37, 66, 103 DeviceNet relay 2 and 4 behavior 74
versus analog output voltage 33 disabled/enabled state 78, 100
Pressure toggle switch for RS-485 display 88 hysteresis 41, 73, 97
Protocol for DeviceNet module 125 range 41, 73, 97
Protocol for RS-485 module 126 RS-485 module 99
RS-485 relay 1 and 3 behavior 97
R RS-485 relay 2 and 4 behavior 98
Radio frequency interference (RFI) 24 specifications for analog 124
Relief devices 16 specifications for DeviceNet 125
Returning a damaged module 120 specifications for RS-485 126
RS-485 command set 93 status 79, 101
RS-485 command structure 92 test point voltage versus pressure 44–45
RS-485 command symbols 92 type 122
RS-485 commands Specifications 121
address 89 analog module 124
FAC 109 analog output 124
PC 95 analog setpoint relays 124
PCG 100 CE Mark compliance 121
RD 102 Convectron gauge internal volume 122
RPCS 101 Convectron gauge sensing wire 122
RPG 101 DeviceNet module 125
RU 101 DeviceNet setpoint relays 125
SB 94 differential pressure measurement 121
SU 101 I/O connector 122
TO 82, 108 module dimensions 123
TS 107 mounting position 122
TZ 107 physical characteristics 123

Index
power supply 122 pressure measurement 121

RS-485 module 126 VCR type fitting 18
RS-485 optional display 127 Voltage
RS-485 physical layer 90 analog differential pressure 40, 46
RS-485 setpoint relays 126 example test point 44–45
setpoint relays 122
temperature 121 W
vacuum chamber pressure measurement 121 Wheatstone bridge 130
vacuum connections 123 Wiring
Status LED 56 ground connection to vacuum chamber 22
Switches for DeviceNet address 54 grounding 22
Switches for RS-485 address 88, 90 I/O connector for analog module 20, 124
Symbols in RS-485 commands 92 I/O connector for DeviceNet module 21, 125
I/O connector for RS-485 module 21, 126
T I/O connector specifications 122
Temperature installation 19
non-operating 121 module power supply 19
operating 121 power supply 122
Test points Wheatstone bridge 130
analog atmospheric pressure calibration 31, 48
analog setpoint relay 1 31, 43
analog setpoint relay 2 31, 47
analog vacuum chamber pressure calibration 31,
50
common 31, 43, 47, 48, 50, 51
diaphragm zero calibration 31, 51
Testing Convectron gauge 117
Theory of operation 129
Convectron gauge 129
Convectron heat-loss Pirani gauge 130
differential pressure sensor 129
Piezo resistive diaphragm sensor 129
Wheatstone bridge 130
Troubleshooting
failure symptoms, causes, and solutions 113
RS-485 error messages 115
V
Vacuum chamber
1/8 NPT pipe thread fitting 18
attaching module to 18
ConFlat flange 18
connections 123
ground connection to 22
KF flange fitting 18

Index

Series 385
6450 Dry Creek Parkway

Longmont, CO 80503 USA
Phone: 1-303-652-4400
15 Elizabeth Drive
Chelmsford, MA 01824 USA
Phone: 1-978-262-2400
Worldwide Customer Service/Support - 24/7
Phone: 1-800-367-4887
To obtain a copy of this instruction manual online,
visit our website at www.brooks.com
(Adobe® Reader® version 5.0 or higher required)
© 2007-2010 Brooks Automation, Inc.
Instruction Manual
Instruction manual part number 385008
Revision A - August 2010

Granville-Phillips® Series 385 Convectron®

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Series 385

Granville-Phillips® Series 385 Convectron®

This Instruction Manual is for use with all

To order products online, visit www.brooks.com

Catalog numbers for Series 385 Convectron ATM Modules

Analog output - no display: 385001 - G #

Conflat is a registered trademark of Varian Associates

Chapter 1 Before You Begin .................................... 9

Chapter 2 Installation .......................................... 15

Chapter 3 Operation Overview .................................. 25

Chapter 4 Analog Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29

Convectron®ATM Instruction Manual - 385008 - Rev. A 5

Commonly used gases other than N2 or air . . . . . . . . . . . . . 32

Chapter 5 DeviceNet Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 53

6 Convectron®ATM Instruction Manual - 385008 - Rev. A

Chapter 6 RS-485 Operation .................................... 87

Chapter 7 Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 111

Appendix A Specifications ........................................ 121

Appendix B Theory of Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 129

Appendix C Messaging Summary ................................. 133

Convectron®ATM Instruction Manual - 385008 - Rev. A 7

8 Convectron®ATM Instruction Manual - 385008 - Rev. A

Convectron®ATM Instruction Manual - 385008 - Rev. A 9

Caution and warning statements comply with American Institute of

10 Convectron®ATM Instruction Manual - 385008 - Rev. A

Table 1-1 Terms describing Convectron ATM module and components

Convectron®ATM Instruction Manual - 385008 - Rev. A 11

Table 1-2 Terms describing DeviceNet protocol

Class Referred to in DeviceNet language as an “object”. The DeviceNet protocol is

Address The address of a device on the DeviceNet network.

12 Convectron®ATM Instruction Manual - 385008 - Rev. A

Table 1-3 Terms describing DeviceNet data types

INT data A 2-byte (16-bit) integer value from –32767 to +32767.

USINT data An 8-bit unsigned integer value from 0 to 255.

EPATH DeviceNet path segments requiring abstract syntax encoding.

1.5 Customer service For customer service:

Convectron®ATM Instruction Manual - 385008 - Rev. A 13

The analog and RS-485 modules are shipped with an instrument

Convectron®ATM Instruction Manual - 385008 - Rev. A 15

Step 1 Install pressure relief devices

Step 2 Locate and orient the module

16 Convectron®ATM Instruction Manual - 385008 - Rev. A

Mount module axis horizontally to ensure accurate

Recommended Not recommended

Convectron®ATM Instruction Manual - 385008 - Rev. A 17

Step 3 Attach module to vacuum chamber

VCR type fitting VCR-type fitting

18 Convectron®ATM Instruction Manual - 385008 - Rev. A

Step 4 Assemble and connect the wiring

Analog, RS-485, or DeviceNet module setpoint connector

DeviceNet module I/O connector

Convectron®ATM Instruction Manual - 385008 - Rev. A 19

Figure 2-2 DeviceNet 5-pin micro connector

CAN_H 4 3 (–) Vdc return

Shield 1 2 (+) 24 Vdc

Figure 2-3 Analog male I/O connector on module end panel

Vacuum pressure analog output 5 15 Relay 1 common

10 Relay 1 normally open

20 Convectron®ATM Instruction Manual - 385008 - Rev. A

Figure 2-4 DeviceNet male I/O connector on module end panel