Imprint Lithography with 25-Nanometer Resolution (Q29031406)
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scientific article (publication date: 5 April 1996)
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Imprint Lithography with 25-Nanometer Resolution |
scientific article (publication date: 5 April 1996) |
Statements
Imprint Lithography with 25-Nanometer Resolution (English)
1 reference
S. Y. Chou
1 reference
P. R. Krauss
1 reference
P. J. Renstrom
1 reference
5 April 1996
1 reference
1 reference
272
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5258
1 reference
85-87
1 reference