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    Fe-Sem For True Surface Imaging and Analysis

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    A V Rama Krishna
    The document discusses a new field emission scanning electron microscope (SEM) called the Gemini that achieves high resolution at low beam energies. It has four key design principles: 1) it has no crossover points in the electron beam path, 2) it uses the shortest possible column to minimize electron-electron interactions, 3) it incorporates a beam booster to maintain a high beam energy throughout the column even at low probe energies, and 4) it uses a compound magnetic-electrostatic objective lens that reduces chromatic aberration. This new design allows for true surface imaging and nanoanalysis of non-conductive materials without the need for coating.

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    Fe-Sem For True Surface Imaging and Analysis

    Uploaded by

    A V Rama Krishna
    125 views2 pages
    The document discusses a new field emission scanning electron microscope (SEM) called the Gemini that achieves high resolution at low beam energies. It has four key design principles: 1) it has no crossover points in the electron beam path, 2) it uses the shortest possible column to minimize electron-electron interactions, 3) it incorporates a beam booster to maintain a high beam energy throughout the column even at low probe energies, and 4) it uses a compound magnetic-electrostatic objective lens that reduces chromatic aberration. This new design allows for true surface imaging and nanoanalysis of non-conductive materials without the need for coating.

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    Fe-sem for True Surface Imaging and Analysis

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    The document discusses a new field emission scanning electron microscope (SEM) called the Gemini that achieves high resolution at low beam energies. It has four key design principles: 1) it has no crossover points in the electron beam path, 2) it uses the shortest possible column to minimize electron-electron interactions, 3) it incorporates a beam booster to maintain a high beam energy throughout the column even at low probe energies, and 4) it uses a compound magnetic-electrostatic objective lens that reduces chromatic aberration. This new design allows for true surface imaging and nanoanalysis of non-conductive materials without the need for coating.

    Copyright:

    Attribution Non-Commercial (BY-NC)
    Download as PDF, TXT or read online from Scribd
    Download as pdf or txt
    125 views2 pages

    Fe-Sem For True Surface Imaging and Analysis

    Uploaded by

    A V Rama Krishna
    The document discusses a new field emission scanning electron microscope (SEM) called the Gemini that achieves high resolution at low beam energies. It has four key design principles: 1) it has no crossover points in the electron beam path, 2) it uses the shortest possible column to minimize electron-electron interactions, 3) it incorporates a beam booster to maintain a high beam energy throughout the column even at low probe energies, and 4) it uses a compound magnetic-electrostatic objective lens that reduces chromatic aberration. This new design allows for true surface imaging and nanoanalysis of non-conductive materials without the need for coating.

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    of 2

    MICROSCOPY

    FIELD EMISSION SEM


    for true surface imaging and analysis
    by Heiner Jaksch*
    ev el o per s an d worsening the chromatic An innovative electron optical column gives high researchers into aberration, which in turn resolution at low acceleration voltages, allowing novel materials for degrades resolution. All of detailed surface imaging and nano x-ray analysis use in nanotechnology, these effects are exacerbatpolymerscience, semiconed as the acceleration volductors and ceramics tage is lowered. For these demand high resolution reasons four major compoSEM images at both low and high accelnents and principles characterise the ineration voltages together with analytical struments new design: V1 V0 data. Any coating or metallisation on non No cross-over in the raypath between conductive materials produces arte-facts the electron source and the sample Elektromagnetischer and may disguise fine structural detail. Use of the shortest column available Blendenwechsler For many materials, especially polymers minimising stochastic electron-electron Feldlinse and other carbon-hydrogen compounds, interactions true surface information can only be seen A beam booster incorporated in the Ringfrmiger SE-Detektor using the lowest beam energies and in an column to maintain a beam energy in the VB Beschleuniger uncoated condition. 10 kV range throughout the full length Traditionally, high beam energies of the column, even if much lower probe Elektromagnetische have been used in order to achieve good Linse energies are selected resolution and small probe diameters Compound magnetic/electrostatic when non-conductive materials have objective lens with an achromatical Ablenkspulen been coated, to avoid charging probfunction. Elektrostatische Linse lems. However, for many modern mateFigure 1 displays the main optical elePrparat rials, these traditional techniques are no ments and components of the Gemini longer applicable. column. The beam booster, which acceFigure 1 The main electron-optical components in the There is a strong need for a high perlerates the electrons in the column to a Gemini column formance SEM which achieves a small high potential, can be seen in dark outprobe diameter and high probe currents at line. This has two main effects firstly, low beam energies. For analytical applisensitivity to a poor environment (eg cations and for high resolution imaging, high strayfields) is minimised andsethe instrument should also provide excelcondly, beam broadening is further relent high-voltage performance. The new duced by intercepting all superfluous technology in the Gemini electron optical electrons. As a result, no loss in beam column and the LEO 982 gives high resobrightness is observed, even at the lolution imaging SEM with optimised anawest electron probe energies. lytical capabilities for EDX nanoanalysis. In figure 2 the cross-over free raypath is shown shematically. The achromatical Instrument design function of the compound magnetic-elecLateral resolution in a scanning electron trostatic objective lens is shown as an microscope depends, principally, on three achromatical lens triplet, which is well factors: known from high quality light optical len The probe diameter at the sample surface ses. The electron optical function is simi the smaller the probe the better the resolar to the function of the light optical lens lution (this is the main limiting factor) triplet it reduces the chromatical aberra The probe current the higher the curtion factor (Cc), which is one of the main Figure 2 The raypath with no cross-over rent the better the signal to noise ratio resolution limiting factors at low beam The depth of penetration of the primary energies. As a result, Cc becomes better making conventional SEMs very tall. At electron beam into the specimen surface with reducing beam energy. beam cross-overs, electrons interact with the deeper the penetration the larger Highly efficient detection of the secondary each other to produce the so-called Boersch the interaction volume and the greater electron signal emitted by the specimen is effect. This increases the energy spread of the tendency to degrade resolution. one of several advantages of the Gemini the beam electrons and so contributes to Classically designed SEM columns have column concept. As stated, the beam is beam cross-overs along the beam path. accelerated to a high potential (10keV) *Heiner Jaksch is at LEO Elektronenoptik Each cross-over requires a lens to control it, in the full length of the column. In GmbH Oberkochen, Germany
    Reprinted from Materials World October 1996

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