Index

A Ahuninum powder 254

Ammonia 161
Abrasion coatings 298 Ammonium-0x0 complex 253
Abrasive 138 Anisotropy 214, 233, 234
Abrasives 3 19 Antireflection coating 287
Acceptor 120 Applications 1, 110, 116, 142,
Acetonitrile 283 195, 249, 276, 309
Acetylides 15 boron carbide 152
Achesonprocess 138, 151 electronic 289
Acoustic wave devices 245 grinding 250
Actinide carbides 15 large-volume 3 11
Actinides 3, 161 machining and grinding 237
Activated reactive evaporation 295 polishing 250
Adiabatic temperature 254 production 3 18
Aerospace 3, 312, 317 silicon carbide 152
Aircraft 314 structural 289
Al-N wear 287
phasediagram 237 ARE 295
Alkali metals 16 1 Argon 287, 296
Alkaline-earth metals 16 1 Atom
Alkoxides 256 volume per 29, 31
Allotropes 212 Atomicbonding 15, 41, 210
AlN 252, 295 Atomic characteristics 9
Aluminum 211, 237 Atomic fuel particles 74
Aluminum carbide 15 Atomic number 165
Aluminumnitride 2, 161, 185, 209, Atomic radii ratio 36, 169
216-218, 223, 229, 231, Atomicradius 11, 12, 119, 159, 210
237, 243, 245, 257, 288, Atomic spacing 39, 215
322, 324 ofSiC 123, 132
production 16 1 Atomic structure 51, 119

331
332 Handbook of Refractov Carbides and Nitrides

Autenitizing temperature 320 Boron-carbon phase diagram 134

Automotive 3, 312 Boron icosahedra 130
Boronnitride 150, 161, 209, 212,
B 213, 216, 223, 224, 231,
232, 233, 243, 244, 291
B,O, 253
Boron-nitrogen phase diagram 212, 234
B& 132, 270
Breeding reactors 322
Ballbearings 311, 316
Brillouin zone 148
Bandstructure 42, 44, 48, 175
Brittle 149
Bandgap 148
Brittle fracture 231
energy 324
Brittleness 65, 314
indirect 147
j3SiC 147
Bariumnitride 161
Bulk processes 250
bee structure 39, 172
Bending test 66 C
Benzene 286
Beryllium carbide 14, 15 C-MO phase diagram 110
Beryllium nitride 16 1 C-Ta phase diagram 97
Beryllium oxide 324 C-Ti phase diagram 72
Blast nozzle 310 Calcium carbide 15
Boat form 217 Carbide formation 11, 12
Body-centered cubic 3 1 Carbide formers 237
Boiling point 292 Carbides 8,9, 58, 68, 120, 144, 248
Bond dissociation 12 formation of 9
Bondenergy 61, 85, 122, 123, ofGroup VI 101
132, 176, 215, 218, 220 andnitrides 3
Bond formation 12, 24 titanium 1
Bondlength 213, 215, 220 tungsten 1
Bond strength 43 Carbon 120, 147
of PSiC 127 Carbon allotropes 2 12
Bonding 12, 22, 42, 46, 51, Carbon vacancies 59
119, 132, 174, 179, 210, Carbon-atom orbitals 2 1
214, 220, 227 Carbon-atom vacancies 50
boron carbide 132 Carbon-carbon 15, 315
electronic 159 Carbon-silicon
silicon carbide 122 phase diagram 127
Bonding characteristics 9 Carbonitrides 3, 266
Bonding effect 167 Carborundum 1, 137
Bonding energy 42, 290 Carbosilane 256
Bonding orbitals 175 Carburization of molybdenum oxide 112
Bonding schemes 42 Cemented
Bonding system 4 1 carbides 107, 115, 195, 317, 320
Bomzene 256 Ceramic composites 3 16
Borides 3, 56, 144 Ceramic industry 2
Boron 2, 120, 128, 147, 211 Ceramic materials 32 1
Boroncarbide 14, 118, 128, 131, Ceramics 65, 3 13
132, 137, 142, 149, 150, Chair form 217
151, 286, 321, 322, 324 Char yield 256
production process 152 Chemical precursors 279
 Index 333

Chemical processing industry 302 Covalent radius 120

Chemical properties 68 Q&2 101, 110
Chemical resistance 107, 110, 192, Cracking 65
232, 291, 320 Cracks 280
Chemical-vapor infiltration 3 16 Creep rate 229
Chemically resistant 232 Cro2C12 252
Chlorides Crucible 239
of refractory metals 284 Cryogenic pumps 296
Chlorosilanes 256 Crystal orientation 190
chromium 15, 100, 110, 164 Crystal structure 2 10
Chromiumcarbide 15, 36, 101, Crystalline forms 2 12
107, 284, 302 Crystalline structure 119
Classitication 8 Crystals 15
Close packing 27 CTE 280
Close-packed interstitial carbide 36 Cubic boron nitride 123, 150,
Close-packed layers 123 212, 216, 235
Close-packedstructure 39, 171 production 16 1
Closed-shell structure 13 1 Cutting tools 2, 72, 107, 116,
Coating failure 280 156, 200, 277, 281, 295,
Coatings 249, 276, 279 297, 319, 320
Cobalt 15 Cutting-tool materials 282
Cobalt binder 302 CVD 253, 264, 268, 278, 279,
Cobalt nitride 161 284, 287
Colors 319 CVD-Sic fibers 266, 269
Comminution 253 CVI 316
Composites 276, 317
Conduction 64 D
Conductivity 58, 85, 146, 147,
D-block elements 26
149, 184, 226, 235, 237
D-gun 300
Conductors 62, 87, 104, 187
Decomposition 145
Contaminant gases 296
Decorative applications 3 19
Contamination 280
Decorative coatings 205, 295, 298
Conversion factors 327
Defect structures 49
Coordination
Delamination 280
number 29, 31, 122, 171, 172
Delocalized electrons 14
Corrosion resistant 200, 236
Density 56, 57, 83, 102, 182, 291
cost 311
ofgSiC 127
Covalence 25
Density of metals 40
Covalent bond energy 123, 132
Density of states 42, 175
Covalent bonding 46, 175
Density of the interstitial
Covalent bonds 12, 13, 25,
mononitrides 174
122, 167, 214, 220
Deposition rate 290
Covalent carbides 8, 9, 10, 12,
Deposition reactions 284
14, 118, 119, 137, 144-146
Deposition temperature 283, 289
mechanical properties 149
Detonation gun 300
Covalent materials 2
Diamond 123, 324
Covalentnitrides 156, 158, 161,
Dibomne 287
209, 223, 224, 226, 227,
Diboride 321
232, 244
334 Handbook of Refractory Carbides and Nitrides

Dichlorosilane 289 Expansion 185

Dielectric 62, 232, 245 thermal 61, 85, 104, 147, 227
Diesel engines 302, 3 13
Diethyl aluminum azide 289 F
Dit%sionbaniers 195, 200, 287,
Face-centered cubic close-packed 28
289, 297, 3 11, 323, 324
Failure mechanism 65, 189
Diode sputtering 297
fccstructure 37, 171
Dissociation energy 2 14
Fermi level 48
Divalent 22
Fiberglass 32 1
Doped diamond 147
Fibers 249, 262, 264, 269, 279
Ductile-brittle transition 88, 106, 189
Fifth period 26
Ductile-to-brittle 66, 150, 231
Forbidden-energy gap 147
E Fourthperiod 26
Fracturemechanism 88, 106
Early transition metals 172 Fracture toughness 65, 259
Early-transition elements 164 Friction 3 16
ECR 290 Fuel rods 322
EDM 259 Furnaces 2
Electrical conductors 104 Fusion devices 322
Electrical discharge machining 259
Electrical insulator 324 G
Electrical properties 187
Gallium arsenide 148, 244, 324
Electron beam 292
Gas turbines 240
Electron conduction 64
Gas-turbine components 302
Electron wave function 20
Glow characteristics 147
Electronegativity 8, 9, 10, 14, 15,
Glow discharge 295
46, 119, 157, 158, 179,
Glow plugs 257
210, 214
Graded-composition coatings 28 1
Electronic bonding 159
Graphite 282
Electronic configuration 119, 175, 210
Graphite-like structure 209
Electronic devices 245
Green fibers 265
Electronic energy spectra 48
Grinding 253
Electronic industry 237
Grinding tools 72, 156, 3 19
Electronic shell
Groundstate 20, 21, 61
tilling 26
Grouplll 161
Electronic structure 18
GroupW 161
of nitrides 165
GroupIV 33, 34, 39, 40, 44, 46,
Electronics 3
47, 55, 58, 62, 66, 68,
Electrostatic attraction 12, 123
164, 172, 178, 179, 181,
Energy of formation 292
182, 190
Engines 313
mechanical properties 64, 65
Enthalpy 58, 83, 102
Group IV nitrides I77
Entropy 58
GroupV 33, 34, 39, 40, 42,
Equipment 3 17
44, 46, 61, 66, 68, 81,
high temperature 300
82, 164, 172, 178, 181,
Evaporation 292, 293
182, 190
Exothermic 254, 284
Group V carbides 104
Group V nitrides 177
 Index 335

GroupVl 33, 34, 36, 40, 42, 44, Hydrogen 15, 280
46, 100, 101, 164, 172, 178 Hydrolysis 16 1
Group VI carbides 104, 106 Hyperstoichiometric compositions 182
Group VI nitrides 158
GroupW 161 I
GroupVlII 161
IEMD 298
GroupsIV 42
Icosahedron 128
H Industrial applications 309
Industrialmaterials 137, 156, 161,
Hahium 55, 164, 181 163, 195, 223, 259, 286, 289
Hathiumcarbide 76, 78, 284 Industrial use 302
Hatniumchloride 284 Infrared 325
Hathiumnitride 198, 288 Insulation 237
HQg’s structures 17 Insulators 62, 147, 214, 227, 289, 324
Hall constant 87, 105 Integrated circuits 324
Hall effect 64 Interatomic spacing 6 1
Hard coatings 295 Intermediate carbides 9, 36
Hardmetal 115, 317 Intermetallic bonds 175
Hardest carbide 106 Interstital mononitrides 176
Hardness 66, 88, 106, 142, 150, 189, Interstitial carbides 8, 9, 10, 12, 14,
190, 232, 235, 277, 291 17, 18, 25, 26, 37, 41,
Hazardous 279 48, 49, 56, 82, 101, 118
hcp structure 172 Interstitial materials 2
Heat offormation 44, 58, 178, 280 Interstitial mononitrides 175
Heat sinks 237 Interstitial nitrides 56, 156, 158,
Hex 31 159, 163, 168, 169, 181,
Hex structure 172 187, 288
Hexagonal boron nitride 2 12 Interstitial sites 34, 169
Hexagonal close-packed 28 Interstitial structure 34
Hexagonal structure 31, 36 Ion beam assisted deposition 298
Hf-csystem 77 Ion plating 292, 298
Hf-N phase diagram 199 Ionic bond energy 123, 132
HGN systems 172 Ionicbonding 46, 175, 179
HlN 190, 252 Ionicbonds 12, 122
HfN coatings 200 Ionic radius 48
High temperature equipment 300 Iron 15
High-voltage power devices 148 Iron nitride 161
Hipping 258 Isoelectronic 2 12
Host metals 4 1 Isomorphism 194, 195, 200, 204, 205
Host metal atoms 17 Isotypical structures 9 1, 200
Hot isostatic pressing 258
HPZ 266 J
HVOF 300
Jewelry 205, 295, 319
Hybrid atomic orbitals 22
Hybrid circuits 297 K
Hybridization 120, 167, 211
Hydridopolysilazane polymer 266 K shell 19
Hydrocarbons 15, 284 Kevlar 321
336 Handbook of Refractov Carbides and Nitrides

L Metal halide 252, 284, 288

Metal-atom vacancies 164
L shell 20 Metal-carbon bond 47
Lanthanide carbides 15 Metal-carbon bonding 4 1
Lanthanides 3, 161 Metal-ceramic composites 3 17
Late-transition metals 16 1 Metal-to-metal atomic spacing 39, 172
Lattice constants 124, 132 Metallic bonding 48, 175
Lattice parameters 49, 133, 182 Metallicbonds 12, 14
OfAlN 218 Metals 3
ofPSiC 127 Meteorites 248
Lattice substitution 280 Methane 282, 284
LED 2 Methanides 15
Liquid-phase sintering 257 Methyl silane 286
Low-E 325 Methyl trichlorosilane 253, 286
Lubricants 232, 244 Microwave activation 290
Lubricating 195 Microwave devices 148
Lubrication 3 16 Military 321
Millimeter-wave devices 148
M
MN 173
MC 42 Ma-C 107
M-C bond strength 43 ~-MO& 112
M-Cbonds 48, 66, 88, 106 MO& 101
M-M 39, 42, 48 Mobility 148
M-M bond strength 43 MOCVD 280, 282, 289, 291
M-Mspacing 41, 174 Modulus 229
M-N bonding 189 Molded shapes 137
M,C 81 Molecular beam epitaxy 295
M,N 172, 173 Molybdenum 100, 164, 282
Machinery 317 Molybdenum carbide 107, 110
Magnetic susceptibity 63 Molybdenum oxide 112
Magnetron sputtering 297 Monocarbide NbC 95
Manganese 15 Monocarbide phases 8 1
Manganese nitride 16 1 Monocarbides 36, 39, 41, 47, 68, 91
MBE 295 Monolithic 32 1
MC 81 Monolithic components 279
MC structure 39 Monolithic processes 250
Mean-free path 297 Monolithics 3 19
Mechanical properties Mononitrides 68, 171, 173, 177, 182
of covalent nitrides 228 Mutual solubility 68
ofGroup IV 64
N
ofGroup V 88
of Croup VI 106 NaCl 81, 173, 218
Mechnaical properties 188 Na$OY 314
Melting point 2, 9, 15, 42, 44, Nb-N phase diagram 204
56, 57, 83, 102, 145, NbC 95
158, 164, 176, 182, 224 NbN 182, 190, 252
Metal carbides 64 NbN/TiN 190
 Index 337

Needle structure 259 P

Neon 20
Neutron absorber 322 Packing of atoms 27
Neutron absorption 15 1 Passivation 3 11, 324
Nextel 265 Peritectic reaction temperature 127
NHdV03 253 Phase diagram 72
Nicalon 265, 266 Phenacite-type structure 2 19
Nickel 15 Phonon-assisted hopping 148
Nickel nitride 16 1 Phonons 59
Niobium 81, 164, 181 Phosphides 3
Niobiumcarbide 92, 284 Phosphorus 16 1
Niobiumnitride 202, 288 Physical vapor deposition 320
Nitride powders 254 Pibond 214
Nitrides 56, 144, 156, 163, Piezoelectric 245
169, 181, 187, 210, 223, Planetary 292
227, 244, 248 Plasma 295
atomic characteristics 158 Plasma reactor 282, 290
covalent 16 1 Plasma spray 300
formation 158, 159 Plasma torch 254, 300
ret&tory 156 Plasma-based ion plating 298
structure of 159 Plutonium nitride 16 1
Nitrogen 156, 165 Poisoning 297
radius of atom 169 Polar optical phonons 59
Nitrogen atom 168 Polarons 148
Nitrogen compounds 166 Polycarbosilane 265, 266
Nitrogen content 171 Polycrystalline materials 64
Nitrogen pressure 182 Polydimethyl silane 256
Nitrogen-to-metal ratio 164 Polymorphs 123, 212
Nuclear applications 151 Polysilanes 256
Nuclear fission power plants 74 Polytypes 123
Nuclear fission reactors 322 Powder production 254
Nuclear industry 142 Powders 137, 249, 250, 253, 257, 279
submicron 116
0 Precious metals 16 1
Precipitation 29 1
Octahedral sites 36, 169, 173 Precursor material 256
Octahedron 35 Precursors 264, 279, 282
Optical products 322 Preform 259
Optics 3 Pressing 257, 258
Orbital state 120 Propane 282, 284, 286
Orbitals 20, 21 Propene 284
Organic solvents 236 Puckeredlayers 214, 218, 219
Osbornite 248 Puckered rings 2 19
Oxidation 315 PVD 278, 279, 291
Oxides 3 Pyrolysis 289
oxy-fuel 300 Pyrolytic boron nitride 234
Oxygen 51, 164, 280
Oxyhalide 252
338 Handbook of Refractory Carbides and Nitrides

Q Shapes 249, 257

complex 258
Qualltlmlmlmbers 19 SHS 254
Quatemary systems 68 SI system 327
Si-N
R
phase diagram 240
Radiation damage 297 S&N, 297
Radii ratio 169, 173 Sialons 219, 243
Radio-frequency plasma torch 254 aSiC 123
Radioactive 15 1 SSiC 123
Ramsdell notation 123 PSiC to aSiC 127
Rare-earth elements 3 Sic 286, 295, 317
Reaction sintering 258 thermal decomposition 145
Reaction temperatures 282 Sic crystal 121
Reactive evaporation 292, 293 Sic whisker 272
Reactive ion plating 298 Sigma bond 24, 2 14
Reactive sputtering 297 Sigma orbital 24
Refractory 2, 9, 158 Silane 256, 286
Ret&tory carbide powders 250 Silazanes 256
Refractory carbides 118, 248, 254 Silicides 3
Refractory compounds 224 Silicon 2, 120, 147, 161, 211
Refractory covalent nitrides 223 Siliconcarbide 14, 118, 121, 122,
Refractory nitride powders 252 124, 137, 151, 216, 229,
Refractory 248, 315, 322, 324
nitrides 156, 163, 209, 248, 254 Silicon carbide fibers 262
Refractory transition-metal nitrides 181 Silicon dioxide 3 15
Resistivity 63, 87, 104, 187 Silicon halides 253
RF sputtering 297 Siliconnitride 161, 209, 216, 219,
Rhombohedral ororthorhombic 220, 221, 223, 225, 229,
structures 172 231, 239, 245, 259, 289,
Rhombohedron 130 290, 311, 314, 316, 320,
Rotors for turbochargers 3 12 322, 324
Rupture strength 66 production 16 1
Silicon nitride blast nozzle 3 10
S Silicon oxynitride 2 19
Silicon tetrachloride 289
Saliniccarbides 15 Silyl amine 256
Salinic nitrides 16 1 Sintering 257
Salt-like carbides 9, 13, 15 Sintering additives 161, 258
Salt-like nitrides 158, 16 1 Sintering agents 259
Sawdust 151 Sintering process 259
Seebeck coefficient 149 Sixth period 26
Self-diffusion of nitrogen 259 Sodium chloride 13
Semiconductor 148, 211, 295, 311, 322 Sol-gel 116, 264, 265
Semiconductor applications 297 Sol-gel process 256
Semiconductor devices 2, 195, Solid lubricant 3 16
289, 323 Solid solutions 3, 91, 200
Semiconductor properties 147 Solubility 68, 19 1
Semiconductors 3, 156 OfWC 107
 Index 339

Soluble 194, 195, 199, 204, 205 Ternary carbides 107

Solvents 236 systems 68
@bond 24 Ternary carbides and nitrides 191
sps configuration 120 Ternary systems 3 14
@hybrid 22 Tetragonal orbital state 120
s$ orbital 22 Tetrahedral sites 35, 169
Specific heat 58, 84, 146, 226 Tetrahedron 34
Sphalerite 123, 214 Tetramethylsilane 253
Spirmerets 264 Textile machinery 2
Spray coatings 278 Thermal
Sputtering 292, 295, 296, 297 conductivity 85, 146, 184, 226
reactive 297 Thermal conductors 104
Stacking structure 124 Thermalexpansion 61, 85, 147, 185,
Standard entropy 44 227, 280
Steam turbines 302 Thermal tknctions 58
Steel 282 Thermal properties 57, 83, 102, 146,
Steel alloys 112 176, 183
Steelballs 312, 316 of covalent nitrides 225
Strength 67, 149, 229, 23 1, 267 Thermal spray 250, 279, 300
ofWC 106 Thermal-barrier coating 3 14
stress 280 Thermal-decomposition temperature 259
Structural characteristics 8 Thermoelectric power 149
Structural parts 257 Thin film process 295
Submicron powder 116 Thin films 137, 147, 278, 292, 325
Subshells 20 Thoria 74
Substoichiometric compositions 182 Thorium nitride 161
Substrates 282 TX 48
Superconducting coating 205 Ti-N phase diagram 194
Superconductivity 188 Ti(C,N) 68
Supersaturation 253 Ti(CN) 281
Surface properties 277 TiO.&GC 68
Switching 172 TiB, 270
TiC 41, 46, 270, 282, 298
T TiC,N,, 298
Ta-N phase diagram 205 TIN 171, 175, 179, 187, 190, 195,
TaC 95, 98 252, 293, 295, 297, 298
TaN 190, 252, 297 Titanium 55, 164, 181, 224
Tantalum 81, 164, 181 Titanium alkoxide 266
Tantalumcarbide 95, 284 Titaniumcarbide 49, 55, 68, 280, 316
production 98 Titanium carbonitride 1, 194, 282
Tantalum nitride 288 Titanium compounds 144
TTEAT 287 Titaniumnitride 163, 181, 193,
TDMAT 287 205, 248, 259, 277, 287,
Temperatures 320, 322, 325
deposition 289 Titanium silicide 323
reaction 282 Titanium tetrachloride 282, 287
Toluene 282, 284
Tensile properties 66
Tool coating industries 295
340 Handbook of Refractory Carbides and Nitrides

Toolsteel 195, 283 W

Toughness 277
Toxic 279 W-C 107
Transformation of bSiC to aSiC 127 Wave function 20
Transition elements 25, 26 sign 22
Transition metal carbides 64, 66 WC 101, 104, 107
Transition metal nitrides 172, 178, 18 1 WC structure 31
Transition metals 15, 118 Wear coatings 298
early 169 Wear resistance 68, 72, 110
Transition temperature 66 Wear resistant coatings 195
Trigonalprisms 36, 120, 172 Wear surf~s 156
Triode sputtering 297 Whiskers 249, 264, 271
Tungsten 100, 164 Wurtzite 124, 212, 218
Tungstencarbide 36, 101, 104,
X
113, 115, 116, 256, 282,
300, 302, 314, 317 X-ray lithography 244
Tungsten carbide cobalt 320
Tungsten mononitride 172 Y
Tungsten titanium carbide 107
Turbines 2, 302, 314 Young’s modulus 150
Turbochargers 311, 312
Z
Tyramro 265, 266
Znumber 165
U Zincsulfide 123, 124
Ultraviolet 325 Zincblende 123, 212, 214, 217, 218
Unit cell volume 133 Zirconia 3 14
Units 327 Zirconium 55, 164, 181
Urania 74 Zirconium carbide 73, 284, 322
Uranium nitride 161 Zirconium nitride 195, 197, 288
Zr-C phase diagram 74
V Zr-N phase diagram 195
Zr-N systems 172
V-C phase diagram 9 1 ZrC 41
V-N phase diagram 200 ZrN 190, 252
V,O, 253
Vacancies 48
Vacancy ordering 164
Vacuum-based ion plating 298
Valence concentration 48
Valence electrons 22, 26
Valence state 10
Van der Waal’s bond 214
Vanadium 81, 92, 164, 181
Vanadium nitride 200
vc 68, 92
VN 190, 192, 252
VN/T+J 190