NOTICE: This standard has either been superseded and replaced by a new version or discontinued.

Contact ASTM International (www.astm.org) for the latest information.

Designation: F 50 – 92 (Reapproved 1996)

Standard Practice for

Continuous Sizing and Counting of Airborne Particles in
Dust-Controlled Areas and Clean Rooms Using Instruments
Capable of Detecting Single Sub-Micrometre and Larger
Particles1
This standard is issued under the fixed designation F 50; the number immediately following the designation indicates the year of original
adoption or, in the case of revision, the year of last revision. A number in parentheses indicates the year of last reapproval. A superscript
epsilon (e) indicates an editorial change since the last revision or reapproval.

1. Scope the scope of this practice; however, sampling practices shall be

1.1 This practice covers the determination of the particle stated that take into account potential spatial and statistical
concentration, by number, and the size distribution of airborne variations of suspended particles in clean rooms.
particles in dust-controlled areas and clean rooms, for particles NOTE 2—General references to cleanroom classifications follow Fed-
in the size range of approximately 0.01 to 5.0 µm. Particle eral Standard 209, latest revision. Where airborne particles are to be
concentrations not exceeding 3.5 3 106 particles/m3(100 000/ characterized in dust-controlled areas that do not meet these classifica-
ft3) are covered for all particles equal to and larger than the tions, the latest revision of the pertinent specification for these areas shall
minimum size measured. be used.
1.2 This practice uses an airborne single particle counting 1.6 This standard does not purport to address all of the
device (SPC) whose operation is based on measuring the signal safety concerns, if any, associated with its use. It is the
responsibility of the user of this standard to establish appro-
iTeh Standards
produced by an individual particle passing through the sensing
zone. The signal must be directly or indirectly related to priate safety and health practices and determine the applica-
particle size. bility of regulatory limitations prior to use. For specific hazards
(https://standards.iteh.ai)
NOTE 1—The SPC type is not specified here. The SPC can be a
conventional optical particle counter (OPC), an aerodynamic particle
2. Referenced Documents
statements, see Section 8.

Document2.1D Preview
sizer, a condensation nucleus counter (CNC) operating in conjunction with
ASTM Standards:
a diffusion battery or differential mobility analyzer, or any other device
1356 Terminology Relating to Atmospheric Sampling
capable of counting and sizing single particles in the size range of concern
and of sampling in a cleanroom environment. and Analysis2
1.3 Individuals performing tests in accordance with ASTMthis F50-92(1996)
F 328 Practice for Determining Counting and Sizing Accu-
practicehttps://standards.iteh.ai/catalog/standards/sist/be15c1fc-b73d-4212-ad39-dd0c9ba5823a/astm-f50-921996
shall be trained in use of the SPC and shall understand racy of an Airborne Particle Counter using Near-
its operation. Monodisperse Spherical Particulate Materials3
1.4 Since the concentration and the particle size distribution F 649 Practice for Secondary Calibration of Airborne Par-
of airborne particles are subject to continuous variations, the ticle Counter using Comparison Procedures3
choice of sampling probe configuration, locations and sam- F 658 Practice for Defining Size Calibration, Resolution,
pling times will affect sampling results. Further, the differences and Counting Accuracy of a Liquid-Borne Particle Counter
in the physical measurement, electronic and sample handling using Near-Monodisperse Spherical Particulate Materials3
systems between the various SPCs and the differences in 2.2 U.S. Federal Standard:
physical properties of the various particles being measured can Federal Standard No. 209D, Clean Room and Work Station
contribute to variations in the test results. These differences Requirements, Controlled Environment4
should be recognized and minimized by using a standard
3. Terminology
method of primary calibration and by minimizing variability of
sample acquisition procedures. 3.1 Definitions of Terms Specific to This Standard:
1.5 Sample acquisition procedures and equipment may be 3.1.1 dust-controlled area—a clean room or clean work
selected for specific applications based on varying cleanroom space in which airborne and deposited particulate contamina-
class levels. Firm requirements for these selections are beyond tion levels, or both, are controlled on the basis of a documented
standard such as Federal Standard 209D.
1
This practice is under the jurisdiction of ASTM Committee E-21 on Space
2
Simulation and Applications of Space Technology and is the direct responsibility of Annual Book of ASTM Standards, Vol 11.03.
3
Subcommittee E21.05 on Contamination. Annual Book of ASTM Standards, Vol 15.03.
4
Current edition approved May 15, 1992. Published July 1992. Originally Available from U.S. General Services Administration, Federal Supply Service,
published as F 50 – 65 T. Last previous edition F 50 – 83 (1989)e1 Standardization Division, Washington, DC 20406.

Copyright © ASTM, 100 Barr Harbor Drive, West Conshohocken, PA 19428-2959, United States.

1
 F 50
3.1.2 dynamic range—the particle size range, expressed as a the SPC. Each particle produces a signal that can be related to
multiple of the minimum measured size, over which the SPC particle size. An electronic system sorts and counts the pulses,
can measure particles with size resolution of 10 % or less. registering the number of particles of various sizes that have
3.1.3 particle concentration—the number of individual par- passed through the sensing zone during passage of a known gas
ticles per unit volume of ambient temperature and pressure air, volume. The concentration and particle size data can be
particles/m3 or particles/ft3. displayed, printed or otherwise processed, locally or remotely.
3.1.4 particle size—equivalent diameter of a particle de-
tected by an SPC. 5. Significance and Use
3.1.4.1 Discussion—The equivalent diameter is the diam- 5.1 The primary purpose of this practice is to describe a
eter of a reference sphere of known size and physical charac- procedure for collecting near real-time data on airborne particle
teristics (for example, refractive index when using an OPC; concentration and size distribution in clean areas as indicated
density when using an aerodynamic particle sizer; etc) and by single particle counting techniques. Implementation of
generating the same response in the SPC sensing zone as the some government and industry specifications requires acquisi-
particle being measured. Spherical particles are used for tion of particle size and concentration data using an SPC.
calibration of the SPCs considered here. The SPC response is 5.2 The processing requirements of many products manu-
related to the size, shape, orientation and physical properties of factured in a clean room involves environmental cleanliness
the particle passing through the SPC sensing zone. If an optical levels so low that a single particle counter with capability for
particle counter is used, the geometry of the optical system, as detecting very small particles is required to characterize clean
well as the spectral distribution of the illuminating light room air. Real-time information on concentration of airborne
influences the reported particle size. If a condensation nucleus particles in size ranges from less than 0.1 µm to 5 µm and
counter with a size-fractionation device is used, the SPC greater can be obtained only with an SPC. Definition of
operating parameters and the particle properties that affect the particles larger than approximately 0.05 µm may be carried out
nucleation efficiency and, for example, the diffusion coeffi- with direct measurement of light scattering from individual
cient, will influence reported data. The SPC instruction manual particles; other techniques may be required for smaller par-
ticles, such as preliminary growth by condensation before
iTeh Standards
should make the user aware of the effects of such factors on the
indicated particle size data. particle measurement.
3.1.5 primary calibration—calibration with standard refer- 5.3 Particle size data are referenced to the particle system
(https://standards.iteh.ai)
ence particles for particle size and (optionally) concentration.
Initially carried out by the SPC manufacturer.
used to calibrate the SPC. Differences in detection, electronic
and sample handling systems among the various SPCs may

Document Preview
3.1.6 resolution—the capability of the SPC to differentiate contribute to differences in particle characterization. Care must
between particles with small difference in size. be exercised in attempting to compare data from particles that
3.1.6.1 Discussion—It can be quantified as the ratio of the vary significantly in composition or shape from the calibration
square root of the difference between the measured and actual base material. Variations may also occur between instruments
variances of a monosized particle size distribution to theASTM
mean F50-92(1996)
using similar particle sensing systems with different operating
diameterhttps://standards.iteh.ai/catalog/standards/sist/be15c1fc-b73d-4212-ad39-dd0c9ba5823a/astm-f50-921996
of those monosize particles, using procedures as parameters. These effects should be recognized and minimized
shown in Practice F 658. by using standard methods for SPC calibration and operation.
3.1.7 standardization—secondary calibration of electronic 5.4 In applying this practice, the fundamental assumption is
system voltage and signal response threshold levels using the made that the particles in the sample passing through the SPC
reference system built into the SPC. are representative of the particles in the entire dust-controlled
3.1.7.1 Discussion—The SPC should be capable of carrying area being analyzed. Care is required that good sampling
out this procedure with a simple, rapid manual operation or by procedures are used and that no artifacts are produced at any
internal timed or microprocessor controlled components. point in the sample handling and analysis process; these
3.2 For definitions of other terms used in this practice, see precautions are necessary both in verification and in operation
Terminology D 1356 and Federal Standard 209D. of the SPC.
4. Summary of Practice 6. Interferences
4.1 Satisfactory primary calibration within the manufactur- 6.1 Since the SPC is typically a high sensitivity device, it’s
er’s recommended time period and routine standardization response may be affected by internally or externally generated
should be verified as a first step. noise. The SPC should not be operated at a sensitivity level so
4.2 A sample acquisition program is established on the basis high that internal noise produces more than 5 % of the data
of the cleanliness level that is to be verified or monitored. This signals.
program will include sample point identification, sample size 6.2 Precautions should also be taken to ensure that the test
definitions and sampling frequency, specification of the sam- area environment does not exceed the radio frequency or
pler inlet and sample transport system, definition of the particle electromagnetic interference capabilities of the SPC.
size ranges to be measured, and any other parameters of 6.3 Operation at acceptably low levels of internal noise can
concern in the dust-controlled area or clean room. be verified by drawing a sample into the SPC through a filter
4.3 Air samples are passed through the SPC and the particle or other gas cleaning device that will positively remove at least
content of each sample is defined by the SPC. Particles 99.97 % of all particles of size equal to and greater than that
contained in the sampled air pass through the sensing zone of which the SPC will measure. After a short stabilization period,