Designation: E498/E498M – 11

Standard Practice for

Leaks Using the Mass Spectrometer Leak Detector or
Residual Gas Analyzer in the Tracer Probe Mode1, 2
This standard is issued under the fixed designation E498/E498M; the number immediately following the designation indicates the year
of original adoption or, in the case of revision, the year of last revision. A number in parentheses indicates the year of last reapproval.
A superscript epsilon (´) indicates an editorial change since the last revision or reapproval.

This practice has been approved for use by agencies of the Department of Defense.

1. Scope* 2.2 Other Documents:

1.1 This practice covers procedures for testing and locating SNT-TC-1A Recommended Practice for Personnel Qualifi-
the sources of gas leaking at the rate of 1 3 10−8 Pa m3/s cation and Certification in Nondestructive Testing5
(1 3 10−9 Std cm 3/s)3 or greater. The test may be conducted on ANSI/ASNT CP-189 ASNT Standard for Qualification and
any object to be tested that can be evacuated and to the other Certification of Nondestructive Testing Personnel5
side of which helium or other tracer gas may be applied. 3. Terminology
1.2 Three test methods are described:
1.2.1 Test Method A—For the object under test capable of 3.1 Definitions—For definitions of terms used in this prac-
being evacuated, but having no inherent pumping capability. tice, see Terminology E1316, Section E.
1.2.2 Test Method B—For the object under test with integral 4. Summary of Practice
pumping capability.
1.2.3 Test Method C—For the object under test as in Test 4.1 The tests in this practice require a helium leak detector
Method B, in which the vacuum pumps of the object under test that is capable of detecting a leak of 1 3 10−9 Pa m3/s
replace those normally used in the leak detector. (1 3 10−10 Std cm3/s).3
1.3 Units—The values stated in either SI or std-cc/sec units 4.2 Test Method A—This test method is used to helium leak
are to be regarded separately as standard. The values stated in test objects that are capable of being evacuated to a reasonable
each system may not be exact equivalents: therefore, each test pressure by the leak detector pumps in an acceptable length
system shall be used independently of the other. Combining of time. This requires that the object be clean and dry. Also to
values from the two systems may result in non-conformance cope with larger volumes or relatively “dirty” devices, auxil-
with the standard. iary vacuum pumps having greater capacity than those in the
1.4 This standard does not purport to address all of the mass spectrometer leak detector (MSLD) may be used in
safety concerns, if any, associated with its use. It is the conjunction with the MSLD. The leak test sensitivity will be
responsibility of the user of this standard to establish appro- reduced under these conditions.
priate safety and health practices and determine the applica- 4.3 Test Method B—This test method is used to leak test
bility of regulatory limitations prior to use. equipment that can provide its own vacuum (that is, equipment
that has a built-in pumping system) at least to a level of a few
2. Referenced Documents hundred pascals (a few torr) or lower.
2.1 ASTM Standards:4 4.4 Test Method C—When a vacuum system is capable of
E1316 Terminology for Nondestructive Examinations producing internal pressures of less than 2 3 10−2 Pa
(2 3 10−4 torr) in the presence of leaks, these leaks may be
1
located and evaluated by the use of either a residual gas
This practice is under the jurisdiction of ASTM Committee E07 on Nonde-
structive Testing and is the direct responsibility of Subcommittee E07.08 on Leak analyzer (RGA) or by using the spectrometer tube and controls
Testing Method. from a conventional MSLD, provided, of course, that the
Current edition approved July 1, 2011. Published July 2011. Originally approved leakage is within the sensitivity range of the RGA or MSLD
in 1973. Last previous edition approved in 2006 as E498 - 95 (2006). DOI:
under the conditions existing in the vacuum system.
10.1520/E0498_E0498M-11.
2
(Atmospheric pressure external, vacuum internal). This document covers the
Tracer Probe Mode described in Terminology E1316.
3
The gas temperature is referenced to 0°C. To convert to another gas reference
temperature, Tref, multiply the leak rate by (T ref + 273)/273.
4
For referenced ASTM standards, visit the ASTM website, www.astm.org, or
contact ASTM Customer Service at [email protected]. For Annual Book of ASTM
5
Standards volume information, refer to the standard’s Document Summary page on Available from American Society for Nondestructive Testing (ASNT), P.O. Box
the ASTM website. 28518, 1711 Arlingate Ln., Columbus, OH 43228-0518, http://www.asnt.org.

*A Summary of Changes section appears at the end of this standard.

Copyright. (C) ASTM International, 100 Barr Harbor Drive P.O. Box C-700 West Conshohocken, Pennsylvania 19428-2959, United States

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 E498/E498M – 11
5. Personnel Qualification 7.2 In general, the solution is in proper design to eliminate
5.1 It is recommended that personnel performing leak test- these conditions; however, when double seals must be used, an
ing attend a dedicated training course on the subject and pass access port between them should be provided for attachment to
a written examination. The training course should be appropri- the MSLD. Leaks may then be located from each side of the
ate for NDT level II qualification according to Recommended seal and after repair, the access port can be sealed or pumped
Practice No. SNT-TC-1A of the American Society for Nonde- continuously by a “holding” pump (large vacuum systems).
structive Testing or ANSI/ASNT Standard CP-189. 7.3 Temporarily plugged leaks often occur because of poor
manufacturing techniques. Water, cleaning solvent, plating,
6. Significance and Use flux, grease, paint, etc., are common problems. To a large
extent, these problems can be eliminated by proper preparation
6.1 Test Method A is the most frequently used in leak testing
of the parts before leak testing. Proper degreasing, vacuum
components which are structurally capable of being evacuated
baking, and testing before plating or painting are desirable.
to pressures of 0.1 Pa (approximately 10−3 torr). Testing of
7.4 In a device being tested, capillary tubing located be-
small components can be correlated to calibrated leaks, and the
tween the leak and the leak detector can make leak testing
actual leak rate can be measured or acceptance can be based on
extremely difficult as test sensitivity is drastically reduced and
a maximum allowable leak. For most production needs accep-
response time increased. If there is a volume at each end of the
tance is based on acceptance of parts leaking less than an
capillary, each such volume should be attached to the leak
established standard which will ensure safe performance over
detector during testing. If this is impossible, the device should
the projected life of the component. Care must be exercised to
be surrounded with a helium atmosphere while attached to the
ensure that large systems are calibrated with reference leak at
leak detector for a long time to assure leak tightness. When
a representative place on the test volume. Leak rates are
unusually long pumping times are necessary, the connections
determined by calculating the net gain or loss through a leak in
to the leak detector (and all other auxiliary connections) that
the test part that would cause failure during the expected life of
are exposed to the helium should be double-sealed and the
the device.
space between the seals evacuated constantly by a small
6.2 Test Method B is used for testing vacuum systems either
auxiliary roughing pump to avoid allowing helium to enter the
as a step in the final test of a new system or as a maintenance
system through seals that are not a part of the device to be
practice on equipment used for manufacturing, environmental
tested.
test or for conditioning parts. As the volume tends to be large,
a check of the response time as well as system sensitivity TEST METHOD A—HELIUM LEAK TESTING OF
should be made. Volume of the system in liters divided by the SMALL DEVICES USING THE MSLD
speed of the vacuum pump in L/s will give the response time
to reach 63 % of the total signal. Response times in excess of 8. Apparatus
a few seconds makes leak detection difficult.
8.1 Helium Mass Spectrometer Leak Detector, having a
6.3 Test Method C is to be used only when there is no
minimum detectable leak rate as required by the test sensitivity.
convenient method of connecting the leak detector to the outlet
8.2 Auxiliary Pumps, capable of evacuating the object to be
of the high vacuum pump. If a helium leak detector is used and
tested to a low enough pressure so that the MSLD may be
the high vacuum pump is an ion pump or cryopump, leak
connected.
testing is best accomplished during the roughing cycle as these
pumps leave a relatively high percentage of helium in the high NOTE 1—If the object under test is small and clean and the MSLD has
vacuum chamber. This will obscure all but large leaks, and the a built-in roughing pump, the auxiliary pumps are not required.
trace gas will quickly saturate the pumps. 8.3 Suitable Connectors and Valves, to connect to the
MSLD test port. Compression fittings and metal tubing should
7. Interferences be used in preference to vacuum hose.
7.1 Series leaks with an unpumped volume between them 8.4 Standard Leaks of Both Capsule Type (Containing its
present a difficult if not impossible problem in helium leak own Helium Supply) and Capillary Type (an Actual Leak which
testing. Although the trace gas enters the first leak readily is Used to Simulate the Reaction of the Test System to Helium
enough since the pressure difference of helium across the first Spray)—The leak rate from the capsule-type leak should be
leak is approximately one atmosphere, it may take many hours adequate to demonstrate the minimum allowable sensitivity of
to build up the partial pressure of helium in the volume the MSLD. The capillary type should be slightly smaller than
between the two leaks so that enough helium enters the vacuum the test requirement.
system to be detected by the MSLD. This type of leak occurs 8.5 Vacuum Gage, to read the pressure before the MSLD is
frequently under the following conditions: connected.
7.1.1 Double-welded joints and lap welds. 8.6 Helium Tank and Regulator, with attached helium probe
7.1.2 Double O-rings. hose and jet.
7.1.3 Threaded joints.
7.1.4 Ferrule and flange-type tubing fittings. 9. Calibration of MSLD
7.1.5 Casings with internal voids. 9.1 Attach the capsule leak to the MSLD and tune the
7.1.6 Flat polymer gaskets. MSLD to achieve maximum sensitivity in accordance with the
7.1.7 Unvented O-ring grooves. manufacturer’s instruction. Allow sufficient time for the flow

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 E498/E498M – 11
rate from the capsule leak to equilibrate. The capsule leak 10.8 After all leaks have been found and repaired, it is
should be stored with the shutoff valve (if present) open, and desirable to enclose the entire device in a helium envelope
the leak should be allowed to equilibrate to ambient tempera- (which can be a plastic bag or a large bell jar) to determine the
ture for several hours. total device integrity.
9.2 MSLD calibration shall be performed prior to and upon 10.9 This step could also be done first and would eliminate
completion of testing. the necessity for probing if no leakage is shown. However, if
there are any materials in the device that are pervious to
10. Procedure helium, doing this step first may build up the helium back-
10.1 Evacuate the device to be tested until near equilibrium ground to such a degree that subsequent probing would be
pressure is reached on the rough vacuum gage. Open the valve insufficiently sensitive.
to the leak detector and close the valve to the roughing pumps. 10.10 Write a test report or otherwise indicate the test
results as required.
NOTE 2—This procedure will be automatic where the device is rela-
tively small and clean and where an automatic MSLD is used without TEST METHOD B—HELIUM LEAK TESTING OF
external pumps. Do not allow the pressure in the spectrometer tube to VACUUM EQUIPMENT AND SYSTEMS THAT HAVE
exceed the manufacturer’s recommendation. This means in some cases INTEGRAL PUMPING SYSTEMS OF THEIR OWN
that the MSLD inlet valve can only be partially opened. Maximum test
sensitivity will be achieved with the inlet valve completely open and the 11. Apparatus
auxiliary pump valve completely closed. However, testing at reduced
sensitivity levels can be done as long as the inlet valve can be opened at 11.1 Helium MSLD—Same apparatus as Section 8.
all. 12. Calibration of MSLD
10.2 Adjust the helium probe jet so that a small flow of 12.1 See Section 9.
helium is coming from the tip.
10.3 Set the leak detector on the appropriate lowest range. 13. Preparation of Apparatus
10.4 Pass the tip of the helium probe by the end of the 13.1 Connect inlet valve of MSLD to foreline of object to be
standard capillary leak at a rate similar to the scan rate at which tested. If possible, insert a valve in the foreline between the
the object under test will subsequently be tested. Note the mechanical pump and the MSLD connection. All connections
deflection of the leak detector output meter. If the probing rate should have as high a conductance as is practical.
is increased, the test sensitivity will be decreased, and if the 13.2 Attach the standard capillary leak to the vacuum
probing rate is decreased, the test sensitivity will be increased. chamber of the object to be tested and as far as practical from
Consequently, when a leak is indicated during leak testing, it the inlet to the pumping system.
will be necessary to move the probe slowly backward until a 13.3 Operate the equipment until equilibrium vacuum is
maximum signal occurs. The approximate leak size can be reached in the vacuum chamber.
determined by multiplying the size of the standard leak by the 13.4 Slowly open inlet valve to MSLD. Do not allow the
maximum reading obtained from the located leak and dividing MSLD pressure to exceed manufacturer’s recommendations.
by the maximum reading obtained when the helium was 13.5 If inlet valve can be fully opened without exceeding
applied directly to the standard leak. the safe MSLD operating pressure, slowly close the equipment
10.5 Starting at the most suspect part of the object to be roughing pump valve. If this valve can be completely closed,
tested, spray the smallest amount of helium on the part that will maximum sensitivity of the test will be achieved.
give a signal when sprayed on the capillary leak. If there are
drafts, work up opposite to the direction of air flow. 14. Test Procedure
10.6 When a leak is pinpointed, it should be first evaluated 14.1 See Section 10.
if desired, then sealed either permanently (preferable) or TEST METHOD C—USE OF RGA OR OF HELIUM
temporarily in such a manner as to allow repair at a later time, MSLD SPECTROMETER TUBE AND CONTROL IN
before proceeding to look for additional leaks. If the leak is so LEAK TESTING (NO VACUUM SYSTEM IN THE
large that the MSLD output saturates (that is, goes to the top of MSLD)
the highest range), it can be evaluated by reducing the
sensitivity of the test until the signal from the standard leak is 15. Apparatus
barely readable. This can be done by opening the roughing 15.1 RGA or MSLD and controls tuneable to the trace gas.
valve and partially closing the MSLD inlet valve or by 15.2 Standard Capillary Leak, of approximately the size of
reducing the sensitivity of the leak detector itself if more the minimum leak to be located.
convenient. If the unknown leak still produces an off-scale 15.3 Suitable Fittings and Isolating Valve, for attachment to
signal, it will be necessary to use a larger standard leak and far the high vacuum chamber.
less test sensitivity or to use a reduced percentage of helium in 15.4 Liquid Nitrogen Traps, to be used if the system
the probe. (For instance, a probe gas concentration of 1 % contains vapors harmful to the RGA or the MSLD.
helium and 99 % nitrogen would reduce the apparent sensitiv-
ity by a factor of 100.) 16. Preparation of Apparatus
10.7 After the first leak has been found and sealed, the same 16.1 Attach the RGA or the MSLD tube to the high-vacuum
technique is continued until all leaks have been similarly section of the test object to be leak tested. The connection
treated. should be located near the pumped end of the system and

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 E498/E498M – 11
attached with as short and as large a diameter tube as practical. ments of the MSLD to peak the signal in accordance with the
Minimum test sensitivity is obtained when the high-vacuum manufacturer’s instructions.
pumps are throttled, by means of the highvacuum valve, so as 18.5 If trace gas is undetectable, and there is a valve
to maintain as high a pressure in the volume under test as is between the pumps and the object to be tested, gradually close
safe for the MSLD. If two diffusion pumps are used in series on the valve until a reasonable signal is observed. Check by
the system and the intermediate pressure is less than 1 3 10−2 removing the trace gas from the leak. If the output drops when
Pa (approximately 1 3 10−4 Torr), the detector should be trace gas is removed and rises when trace gas is applied, leaks
attached between the two pumps for maximum sensitivity. An of the size of the standard leak and larger can be detected by
isolation valve may be used between the detector and the applying trace gas to suspect joints in the system for a similar
system to allow servicing the detector without loss of vacuum length of time. If a very substantial signal is obtained from the
in the system and to protect the detector from contamination standard leak, smaller leaks may also be detected.
when not in use. A liquid nitrogen trap should be used between 18.6 Starting at the top of the system and working down (if
the detector and the system if vapors harmful to the detector are the trace gas is lighter than air) probe all suspect areas with
present in the system. trace gas, dwelling as long at each point as it took to obtain
16.2 Attach the standard capillary leak to the system as far unambiguous results from the standard leak. Repair or isolate
away from the pumps as possible. A small high-vacuum valve each leak as it is located to prevent spurious indications from
should be used between the standard leak and the system and trace gas drifting away from the area being probed.
a dust cap should be provided for the standard leak if it is to be 18.7 When the high-vacuum section of the system has been
left in place. tested, the diffusion pump, foreline hardware, and the mechani-
17. Calibration cal pumps can be tested by probing, although the response time
will be greater and the test sensitivity will be lower. Do not
17.1 See Section 9. probe the exhaust of the mechanical pump since the trace gas
18. Test Procedure will become entrapped in the pump, causing long-lasting
background problems.
18.1 Evacuate the object to be tested and the MSLD until
equilibrium pressure is reached. 18.8 Write a test report or otherwise indicate test results as
18.2 Turn on the MSLD and allow it to stabilize in required.
accordance with the manufacturer’s instructions.
18.3 Apply trace gas to the leak. Surround the leak with 19. Keywords
trace gas at small constant flow, but do not pressurize. 19.1 bell jar leak test; bomb mass spectrometer leak test;
18.4 When equilibrium pressure of the trace gas is reached helium lead testing; helium leak test; leak testing; mass
as shown by the MSLD output reading becoming stable after spectrometer leak testing; sealed object mass spectrometer leak
rising when trace gas was first applied, use the tuning adjust- test

SUMMARY OF CHANGES

Committee E07 has identified the location of selected changes to this standard since the last issue (E498 - 95
(2006)) that may impact the use of this standard. (July 1, 2011)

(1) Changed standard from Test Method to Practice. (5) Deleted Precision and Bias sectionl; and renumbered
(2) Added combined units statement as 1.3. Keywords section.
(3) Changed SI units of mol/s to Pa m3/s in 1.1, 4.1. (6) Deleted last sentence in 18.5 with reference to Bias.
(4) Added new 9.2 to define system calibration frequency. (7) Deleted the reference to a specific volume in 4.2.

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