Dr. M.S.

DHARMAPRAKASH
Professor
Department of Chemistry Mobile: +91 973126 5431
BMS College of Engineering
Bangalore- 560 019
Karnataka E-mail: [email protected],
INDIA [email protected]

Present status

Have obtained Ph.D degree from Materials Research Centre, Indian Institute of Science,
Bangalore, India during 2005. The Ph.D thesis deals with the development, synthesis and
application of metalorganic complexes of Zr, Hf, and Cr for the deposition of oxide thin films by
CVD and other techniques. These films were characterized for their structural, electrical and optical
properties. The studies showed that the films are suitable for the application as alternate gate
dielectric materials (ZrO2 and HfO2) in CMOS circuits, and thicker coatings of these oxides obtained
by spin coating and dip coating are tested as protective coatings on mild steel and stainless steel
against corrosion.

Worked as Post-Doctoral Fellow in Australian Nuclear Science and Technology Organisation

(ANSTO) Menai, NSW 2234, AUSTRALIA, sponsored by Australian National University (ANU)
and Australian Research Council (ARC) during April 2007-April 2008.

Presently working as a Professor in the Department of Chemistry, BMS College of

Engineering, Bangalore-560 019, INDIA. Served as Nodal officer (Procurement), in TEQIP-II
during 2012-16.
Also serving as Member, Steering Committee for NAAC, BMSCE and Nodal Officer,
TEQIP-III.
Qualifications

Doctor of Philosophy (Ph. D.) in the Faculty of Science

Title of thesis: Development and Synthesis of Metalorganic complexes of Zr, Hf, and Cr
for application to CVD and sol-gel synthesis of oxide thin films
Year: Oct. 2004
Materials Research Centre, Indian Institute of Science, Bangalore-560 019, INDIA.

Master of Science (M. Sc.) in Chemistry

Specialization: Organic chemistry
Year: 1986-88: I Class
Department of Chemistry, Bangalore University, Bangalore-560 001, INDIA.

Bachelor of Science (B. Sc.) in P.C.M

Year: 1983-86: I Class
Bangalore University, Bangalore-560 001, INDIA.
Research Experience

1. Institution : Australian Nuclear Science and Technology Organization (ANSTO)

and Australian National University (ANU) –CAMS fellow.
Position held : Post Doctoral Fellow
Nature of Work : Characterization of Nanomaterials using Nuclear Probes and studies
on absorption heavy metals by silk and wool powders
Duration : April 2007 – April 2008.

2. Institution : Materials Research Centre, Indian Institute of Science, Bangalore-

560 019, INDIA
Position held : Doctoral Fellow
Nature of Work: Development, Synthesis and characterization of Metalorganic
complexes of Cu, Co, Ti, V, Zr, Hf, and Cr for application to CVD
and sol-gel synthesis of oxide thin films.
Have synthesized nanoparticles of oxides of Ti, Zr, Fe, Co, Cu and
Al and cobalt ferrite and nickel ferrites by microwave processing of
corresponding metalorganic complexes.
Duration : August 1999 – January 2005.

Teaching Experience

Institution : Department of Chemistry,

BMS College of Engineering, Bangalore-560 019,
INDIA
Position held : Lecturer in Chemistry
Duration : August 1988 – 2005, Professor thereafter

Academic positions held

• Served as Head of the Department of Chemistry during June 2015-May-2017

• Served as Chairman, Board of Studies (BOS) and Board of Examinationin (BOE)
in Chemistry, BMSCE.
• Served as a Member of Academic Council, BMSCE
• Serving as Member of Board of Advisors for Research and Development-
Department of Chemistry and BOE member, SIT, Tumkur
• Serving as BOS member at RVCE and MSRIT, Bengaluru
• Served as Member, Board of Studies (BOS) in Chemistry, Presidency University
during 2015-18.

Technical Experience

Experience in synthesis of metalorganic complexes, and Characterization of the complexes

by various spectroscopic techniques such as FTIR, NMR, UV-Vis, MS and Elemental Analysis and
Thermal analysis of the complexes by TG/DTA. The construction of CVD experimental setup
for thin film deposition; working knowledge of operating various physical and chemical methods
of thin film deposition techniques such as spray pyrolysis, metalorganic chemical vapour deposition
(MOCVD), spin coating and dip coating. Nanomaterials synthesis and characterization and
correlation of structure-property in nanomaterials.

2
 Ongoing Funded Research Projects

Fluoride removal in potable water using Zirconia based hybrid nanomaterials -A remedy
for the fluoride water treatment-VGST K-FIST (L2)/2017/269/GRD541 worth Rs. 40.00
Lakhs

Present Research Interests

General research interest is in the synthetic organic chemistry and synthesis of metalorganic/
organometallic complexes of different metals to use them as precursors for developing
nanomaterials, functional ceramics and oxide thin-films. The specific interests of application
research are dielectric oxides, solar cells, transparent thin film transistors, electro-chromic
display, LEDs and magnetic materials for memory devices.

• Fluoride removal in potable water using Zirconia based hybrid nanomaterials -A

remedy for the fluoride water treatment-VGST ongoing research project.
• Synthesis and characterization of nano particles of pure and doped (Ce3+/4+, Gd3+, Eu3+)
ZrO2 for applications to LEDs.
• Sensors-Conducting Polymers (polyaniline) doped with gold nanoparticles - sensor for
biological applications
• Coating /thin films by sol-gel and microwave assisted techniques, analysis of evolution of
microstructure and property correlation.
• Synthesis of metalorganic complexes (precursors) for synthesis of Nanomaterials-Metals
nanoparticles, Oxide nanomaterials.
• Synthesis and characterization of technologically important oxides such as ZnO, TiO2,
doped ZrO2, Ferrites and their applications
• Geopolymers as alternative materials for construction activities. ,

Number of students guiding for PhD: Awarded- 04

Guiding- 02
Patents
1. Indian Patent Application Number: 2859/CHE/2012 (Provisional)
Title: BIOLOGICAL SENSORS COMPRISING CONDUCTING
POLYMER, AND SYSTEMS THEREFROM
Date of Filing: 14th July, 2012
Status: Patent is Under Examination.
2. Indian Patent Application Number: 21150/CHE/2017 (Provisional)
Title: METHOD FOR FABRICATING A NITRITE SENSOR USING
BIORENEWABLE BASED PRECURSOR
Date of Filing: June, 2017
Status: Patent Pending.

3
Publications

1. Santhosh Bullapura Matt, Manjunatha Shivanna, Shivakumar Manjunath, Manjappa

Siddalinganahalli, and Dharmaprakash Mallenahalli Siddalingappa. Electrochemical Detection of
Serotonin Using t-ZrO2 Nanoparticles Modified Carbon Paste Electrode. Journal of The
Electrochemical Society, 2020, 167, 155512.
2. Santhosh Bullapura Matt, S. Raghavendra, Manjunatha Shivanna, Manjappa Sidlinganahalli,
Dharmaprakash Mallenahalli Siddalingappa. Electrochemical Detection of Paracetamol
by Voltammetry Techniques Using Pure Zirconium Oxide Nanoparticle Based Modifed Carbon Paste
Electrode. Journal of Inorganic and Organometallic Polymers and Materials
https://doi.org/10.1007/s10904-020-01743-y, Springer Science-a part of Springer Nature 2020
3. Manjunatha Shivanna, Nanda Nagappa & Dharmaprakash Mallenahally
Siddalingappa, Structural, Morphological and Photoluminescence Studies of Pure
ZrO2 and ZrO2: Eu+3 Nanophosphors Synthesised by Microwave-Assisted
Hydrothermal Technique, Plasmonics (2020).
4. M. Shivakumar, M. S. Dharmaprakash, S. Manjappa & K. L. Nagashree, Green
synthesis of silver nanoparticles (SNPs)-modified electrode for electrochemical
detection of nitrobenzene Journal of the Iranian Chemical Society volume 17,
pages893–900(2020).
5. Santhosh B. M., Manjunatha S., Shivakumar M., Dharmaprakash M. S. and
Manjappa S. Electrochemical Investigation of Caffeine by Cerium Oxide
Nanoparticle Modified Carbon Paste Electrode, Journal of The Electrochemical
Society, Volume 167, Number 4,(2020).
6. H. T. Dinesh, M. Shivakumar, M. S. Dharmaprakash & R. V. Ranganath “Influence
of reactive SiO2 and Al2O3 on mechanical and durability properties of geopolymers”,
Asian Journal of Civil Engineering, Building and Housing ISSN 1563-0854, Asian J
Civ Eng, DOI 10.1007/s 42107-019-00167-5.
7. Santhosh Bullapura Matt, Shivakumar. Manjunatha, S. Manjunatha,
Dharmaprakash M. Sidlingappa,*and Manjappa Sidlingappa Synthesis of cerium
doped zirconia nanoparticles for the electrochemical detection of dopamine by
modifiedcarbon paste electrode” in the refereed journal, Chemistry Select 2019, 4,
5839-5844, a Wiley-VCH Publication.
8. S Manjunatha, MS Dharmaprakash Thermal stability, optical and
Photoluminescence properties of spherical Ce x Zr1− x O2 (x= 0.05) crystalline blue-
emitting nanophosphors synthesized by microwave method. Materials Research
Express 5 (3), 035043, 2018.
9. S. Manjunatha, R. Hari Krishna, Tiju Thomas, B.S. Panigrahi, and M. S.
Dharmaprakash, Moss-Burstein effect in stable, cubic ZrO2: Eu+3 nanophosphors
derived from rapid microwave-assisted solution-combustion technique, Accepted for
publication in Materials Research Bulletin, 98 (2018) 139–147.
10. M. Shivakumar, K.L. Nagashree, S. Manjappa, and M. S. Dharmaprakash,
‘Corrosion Inhibition performance of lignin extract of Black liquor on Mild Steel in
0.5M H2SO4 acid media’ Port. Electrochim. Acta 35 (2017) 351-359.
11. M. Shivakumar, K. L. Nagashree, S. Manjappa, and M. S. Dharmaprakash
Electrochemical detection of nitrite using glassy carbon electrode modified with
silver nanospheres (AgNS) obtained by green synthesis using pre-hydrolysed liquor.
Electroanalysis, 29, 2017, 1–10.
12. S. Manjunatha, M.S. Dharmaprakash, Eu+3 Ion as a Luminescent Probe in ZrO2:
Gd+3 Co-Doped Nanophosphor, International Journal of Chemical, Molecular,
Nuclear, Materials and Metallurgical4Engineering Vol:11, No:1, 2017,56-59.
13. M.Shivakumar, K.L Nagashree,S. Yallappa,S Manjappa,K S Manjunath, and M S
Dharmaprakash, Biosynthesis of silver nanoparticles using pre-hydrolysis liquor of
Eucalyptus wood and its effective antimicrobial activity, Enzyme and Microbial
Technology 97,(2017),55-62.
14. S.Manjunatha, and M S Dharmaprakash Microwave assisted synthesis of cubic
Zirconia nanoparticles and study of optical and photoluminescence properties,
Journal of Luminescence,180,(2016),20-24.
15. S.Manjunatha, and M S Dharmaprakash, Synthesis and characterization of Cerium
doped ZrO2 blue-green emitting nanophosphors, Materials Letters, 164, (2016), 476–
479.
16. Sree Harsha, KR,Suchetha AV, Udaya Simha L, B M Nagabhushana and M S
Dharmaprakash, Experimental Studies on ZnO nanoparticles to treat pathogenic
bacteria in waste water, J. Institution of Public Health Engineers, India No.4, Vol.1,P
48-51, 2015.
17. A. Usha, B. Ramachandra and M. S. Dharmaprakash “Design and Development of
Bio-Signal Conditioning and Processing Electronic System by Employing AD -549
and LabVIEW”, Published on Springer LNEE (Lecture Notes in Electrical Engg.),
Online ISBN 978-81-322-1157-0; pp (789-799) Vol 248; series ISSN 1876-1100,
January 2014.
18. A. Usha, B. Ramachandra and M. S. Dharmaprakash Design and Development of
Biosignal Conditioning and Processing Electronic System by Employing AD-549 and
LabVIEW, Journal of Emerging Research in Electronics, and Computer Science,
978-81-322-1157-0_80, Springer India 2014
19. P. Usha, Ramachandra, and Dharmaprakash. M S, Design of Bio-Sensor for
Leukocyte counts for real time Applications using Conducting Polymers and NANO-
Composites in NAROSA Publications: ISBN 978-81-8487-160-9, Vol 01, Page no.
(108-111): December 2011: Publications Journal.
20. P. Usha, Ramachndra, and Dharmaprakash. M S, Optimized Design of Bio- Sensor
using Conducting Polymers and NANO-Composites International Journal of
Engineering, Science & Technology), ISSN: 0975-5462, Vol 03, No. 4 Published on-
line April 2011 .
21. Radhika Naik, Guing Wen, Dharmaprakash. MS, Sabrina Hureau, Akira
Uedono, Xungai Wang, Xin Liu, Peter Cookson, Suzanne V. Smith. Metal Ion
Binding Properties of Novel Wool Powders. Journal of Applied Polymer Science,
Vol.115 (3), 1642, 2010.
22. Sukanya Dhar, M. S. Dharmaprakash and S. A. Shivashankar MOCVD of ZrO2
films from bis(t-butyl-3-oxobutanato)zirconium(IV): some theoretical
(thermodynamic) and experimental aspects. Bull. Mater. Sci., Vol.31, No. 1,2008,
23. M. S. Dharmaprakash, Thamotharan, Gururaj M. Neelgund and S. A. Shivashankar
Tris(tert-butyl-3-oxo-butanoato)aluminium(IV). Acta Cryst., E 62, (2006), m436.
24. M. S. Dharmaprakash and S. A. Shivashankar, Synthesis and characterization of
novel ketoesterate complexes of zirconium for MOCVD of ZrO2 thin films J. of Cryst.
Growth.
25. M. S. Dharmaprakash and S. A. Shivashankar, Development, synthesis and
application of 2,2,6,6-tetramethyl-3,5-heptadionatohafnium(IV), a novel inorganic-
organic hybrid complex of hafnium, as precursor for MOCVD of HfO2 thin films
Advn. Mater.

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 26. E. Elangovan, M. P. Singh, M. S. Dharmaprakash and K. Ramamurthi, Some
physical properties of spray deposited SnO2 thin films. Journal of Optoelectronics
and Advanced Materials, 6 (2004) 197.
27. G. C. Deepak, M. S. Dharmaprakash, Navakanta Bhat and S. A. Shivashankar.
Electrical characterization of MOCVD-grown HfO2 thin films for gate dielectric
application. Physics of Semiconductor Devices, 1, (2004), 456.
28. M. S. Dharmaprakash and S. A. Shivashankar. MOCVD of ZrO2 thin films from
two different -diketonate precursors: Dependence of microstructure and growth
kinetics on the precursor. Journal Electrochemical Society, PV 8, (2003), 164.
29. Usha K. Urs, M. S. Dharmaprakash, S. A. Shivashankar and T. N. Guru
Row. Tetrakis(tert-butyl-3-oxo-butanoato)zirconium(IV). Acta Cryst., E 59,
(2003),m83.
30. Usha K. Urs, M. S. Dharmaprakash, S. A. Shivashankar and T. N. Guru
Row. Nitratotris(2,2,6,6-tetramethyl-3,5-heptadionato)hafnium(IV). Acta Cryst.,
E 59, (2003),m95.
31. M. S. Dharmaprakash and S. A. Shivashankar. Effect of nature of the precursor on
the crystallinity and microstructure of MOCVD-grown ZrO2 thin films. Mat. Res.
Symp. Proc. V 745, (2002), N 5.14.
32. M. B. Sahana, M. S. Dharmaprakash and S. A. Shivashankar. Microstructure
and Properties of VO2 thin films deposited by MOCVD from
vanadylacetylacetonate. J. Mater. Chem., 12, (2002), 333.
33. S. Mahapatra, M. S. Dharmaprakash and S. A. Shivashankar. MOCVD of thin films
of transparent, p-type-conducting CuCrO2 with delafossite structure, using
acetylacetonates of copper and chromium as precursors. Journal Electrochemical
Society, PV 8, (2003), 186.
34. Anil U. Mane, M. S. Dharmaprakash, A. Chakraborty, V. Venkataraman and S.
A.Shivashankar. Atomic Layer Deposition of ZrO2 thin films: Study of Growth
kinetics and dielectric behavior. Journal Electrochemical Society, PV 11, (2002), 189.
35. CVD of thin films of cobalt and copper from different precursors: Growth kinetics
and microstructure. Mat. Res. Symp. Proc. V 614, (2000), G 6.11.

Conference Presentations

1. Manjunatha S, Dharmaprakash MS A Comparative Study of the Conventional and

Microwave Assisted Combustion Synthesis of ZrO2 and Rare Earth (Eu+3 & Gd+3)
doped ZrO2 Nanophosphors on Structural Optical and Photoluminmescence
Properties, presented a Poster and a oral presentation in the National Symposium on
Nano Science & Technology(NSNST-2016) held on 29-30 June, 2016 at IISc,
Bangalore.
2. Manjunatha S, Dharmaprakash MS presented a research paper(Oral presentation) “
Ultra fast Synthesis of Cubic stabilized ZrO2: Eu+3 Nano phosphors and study of
photoluminescence Property”in the International Conference on Advanced Materials
and Applications (ICAMA 2016) 2016 held on 15-17 June, 2016 at BMSCE,
Bangalore
3. Shivakumar M, Dharmaprakash MS, Nagashree K L & Manjappa S, presented a
research paper (Oral presentation) titled Green synthesis of Silver nanoparticles using
Pre-hyolysis Liquor(PHL)”in the International Conference on Advanced Materials and
Applications (ICAMA 2016) 2016 held on 15-17 June, 2016 at BMSCE, Bangalore
6
4. Dinesh HT, Dharmaprakash MS, Ranganath RV and Praveen Nayak S S,
Characterization & Durability Properties of Concrete made with ultrafine Slag and
Micro Silica- a Performance Optimization based Comparative Study in 2nd
International Conference on Advances in Steel, Power and Construction Technology
during March 17-19, 2016 - Oral presentation.
5. Manjunatha S and Dharmaprakash MS, “A Comparative study of porosity and
phase formation of ZrO2 nanoparticles synthesized by microwave and conventional
combustion route” in International conference on Nanoscience, Nanotechnology and
Advanced materials (NANOS 2015) held during December14-17,2015 at GITAM
UNIVERSITY,Vizag.-Oral presentation
6. Shivakumar, Dharmaprakash MS and, Manjappa S, Physiochemical Investigation
of Pre-hydrolysis Liquor, „1st International conference on „Recent Advances in Bio-
Energy Resarch‟ (ICRABR-2015) held at SSSNIRE, Kapurthala, Punjab during
March 14-17, 2015.-Oral presentation
7. 4. Shivakumar M, Manjunatha S, Nagashree K L, Manjappa S and
Dharmaprakash MS, Lignin extracted from prehydrolysis (PHL) liquor of pulp
and paper industries as corrosion inhibitor for mild steel in sulphuric acid, National
Symposium on Electrochemical Science and Technology , (NSET-2015) held at
IISc.,during July 24 -15,2015, Bangalore
8. Dharmaprakash. MS and Shivakumar M, Physiochemical analysis of pulp and
paper industries pre hydrolysis liquor, National conference on advancement in
materials science (AMS2014), 26th and 27th September 2014
9. Manjunatha S, Siddanagouda, and Dharmaprakash MS, Sol-gel synthesis of Ce4+
doped zirconia nanoparticles and study of its photoluminescence properties (ABS-
44- ICA), Page No. 39 IUMRS-ICA international conference held at IISc,
Bangalore, during 16-20 December 2013.
10. A. Usha, B. Ramachandra and Dharmaprakash M S Design and Development of
Biosignal Conditioning and Processing Electronic System by Employing AD-549 and
LabVIEW December 2012-Oral presentation

11. P.Usha, Ramachandra and Dharmaprakash M S, synthesis and

characterization of sensor for biological real time applications using conducting
polymers, nanocomposites and signal processing technique" at International
Conference :CERA, (Computer Applications in Electrical Engineering: Recent
Advances) : IIT Roorkee : March 2010.
12. P. Usha,Ramachandra and Dharmaprakash M S, Design of Bio-Sensor for Leukocyte
counts for real time Applications using Conducting Polymers and NANO-
Composites" at IEEE Sponsored International Conference ICEDSP , (International
conference on Electronic Design and Signal Processing) at MIT Manipal:
December2009.
13. M. S. Dharmaprakash, Rangam Rajakhowa, R. Naik R. Naik,S. Huraeu, Lijing Wang,
Suzanne V Smith, Heavy metal absorption properties by silk powders using Seventh
International Conference on Nuclear and Radiochemistry, Budapest Hungary,24-
28,August 2008.-Oral presentation
14. Radhika Naik, Guiqing Wen, Dharmaprakash.MS, S. Huraeu, Peter Cookson, Xin Liu,
Suzanne V Smith Metal binding properties of processed wool. Seventh International
Conference on Nuclear and Radiochemistry, Budapest Hungary,24-28 August 2008.-
Oral presentation
15. M. S. Dharmaprakash, Gururaj M. Neelgund, C. S. Sanmathi and S. A.
7
 Shivashankar. Microwave-Assisted synthesis of nanoparticles of binary and ternary
oxides from metalorganic complexes. All India Seminar on Vistas of
NanoApplications, held at Institution of Engineers, Bangalore during 6-7 January
2006.- Oral presentation
16. M. S. Dharmaprakash, E. Elangovan, M. P. Singh and S. A. Shivashankar, Materials
Research Society of India - Fifteenth Annual General Meeting, Bhanarus Hindu University,
Varanasi – 2004, February 9-11, p. 76.
17. G. C. Deepak, M. S. Dharmaprakash, Navakanta Bhat and S. A. Shivashankar. Electrical
characterization of MOCVD-grown HfO2 thin films for gate dielectric application. Twelfth
International Workshop on the Physics of Semiconductor Devices, Chennai, INDIA, 4-
8th Dec‟ 2003.
18. M. S. Dharmaprakash and S. A. Shivashankar. MOCVD of ZrO2 thin films from two
different - diketonate precursors: Dependence of microstructure and growth kinetics on the
precursor. Sixteenth International conference on CVD/EUROCVD-IV, 203 ECS conference
held in PARIS, FRANCE during 27th April-2nd May 2003.
19. M. S. Dharmaprakash and S. A. Shivashankar. Effect of nature of the precursor
on crystallinity and microstructure of MOCVD-grown ZrO2 thin films. MRS Fall meeting
2002,BOSTON, USA 2-6 Dec‟2002.

20. Anil U. Mane, M. S. Dharmaprakash, A. Chakraborthy, V. Venkataraman and S. A.

Shivashankar. ALD of ZrO2 thin films: Study of growth kinetics and dielectric
behaviour201th meeting of ECS, Philedelphia, 12-17 May 2002.-Oral presentation
21. M. S. Dharmaprakash and S. A. Shivashankar Synthesis and characterization of Novel
zirconium complexes and their application to the MOCVD of zirconia thin films. MRSI 13th
AGM (2002).
22. 19. S. Mahapatra, M. S. Dharmaprakash and S. A. Shivashankar MOCVD of thin films
of transparent, p-type-conducting CuCrO2 with delafossite structure, using the
acetylacetonates of copper and chromium as precursors. MRSI 13th AGM (2002).
23. 20. Anil U. Mane, M. S. Dharmaprakash and S. A. Shivashankar. Atomic Layer CVD of
ZrO2,MRSI 13th AGM (2002).
24. A.U. Mane, K. Shalini, D. Anjana, R. Lakshmi, M.S. Dharmaprakash, Mandar Paranjape,
and S. A. Shivashankar. CVD of thin films of cobalt and copper from different precursor:
Growth kinetics and microstructure. Spring meeting of MRS, San Francisco, April 2000.

Highlights of Present and Post-Doctoral Research Work

• Evaluation of Geopolymers as alternative materials in construction activities.

• Development of Microwave-assisted technique for Synthesis of oxide nanomaterials like
TiO2, ZrO2 and nanoparticles of Nobel metals like Au, Pd, Pt and Ag and successfully
employing them as sensors, water treatment and in dye degradation..
• Synthesis and characterization of N a n o particles p u r e and doped (Ce 3+/4+ , Gd3+, Eu3+)
ZrO2 for applications to LEDs.
• Sensors-Conducting Polymers (polyaniline) dopped with gold nanoparticles - sensor for
biological applications
• Thin films by sol-gel and microwave assisted techniques, analysis of evolution of
microstructure and property correlation.
• Development of Nuclear Probes for characterization of Nanomaterials.
• Heavy Metal binding properties of processed wool and silk powders.
8
Highlights of the Ph.D. Thesis Work

MOCVD experimental setup was constructed and was employed for the deposition of
thin films presented in the thesis work. The primary aim of the thesis work was to
develop, synthesize and characterize metalorganic complexes of various metals to be
used as precursors for deposition of oxide thin films by CVD and other chemical
techniques, on different substrates and characterize the films/coatings for their structural,
electrical and optical properties.

The thesis consists of development of -diketonate and -ketoesterate complexes of Zr,

Hf and Cr as precursors and deposition of respective oxide thin films by CVD as well as by
sol-gel techniques.

The metalorganic complexes, viz., -diketonate and -ketoesterate complexes of Zr, Hf

and Cr metals have been synthesized and characterized by different spectroscopic
methods such as FTIR, NMR, MS, Elemental Analysis and Single Crystal structure
analysis. Volatility and stability of the complexes were studied by TG/DT Analysis.

Development of Novel -ketoesterate complexes of Zr and Cr and an organic-inorganic

hybrid complex of Hf, Hf(thd)3NO3 as CVD precursors.

-ketoesterate complexes are found to be more volatile than -diketonates as revealed by

TG/DTA.

Deposition of carbon-free oxide thin films from these novel precursors at relatively low
temperatures. Thin films of ZrO2 and HfO2 on Si(100) substrate show excellent C-V
characteristics.

Investigation of decomposition reaction pathways of the precursors leading to oxide film

formation on the substrate, in a CVD process.

Sol-gel synthesis (spin and dip coating) of Coatings of TiO2, ZrO2 and HfO2 using some
of these complexes.