sans2017 Wet scrubber for ehaust gas clearing
Wet scrubber for exhaust gas cleaning
Wet Exhaust Gas Cleaning
A wet scrubber is a simple method to clean exhaust air or exhaust gas and remove toxic
or smelling compounds. In the flue gas scrubber, the gas gets in close contact with fine
water drops in a co-current or counter current flow. This method is more effective when
the water drop size gets smaller and the total surface between water or washing fluid
and the gas gets larger. The water or washing fluid is recirculated normally in order to
‘save water and reduce the amount of waste water.
INLET ExHAusT
FLOW PRESSURE PRESSURE
‘CIRCULATION
PUMP
The following components can be removed from the exhaust gas:
+ Water soluble substances will be dissolved.
+ Dust will be precipitated.
+ Chemicals that can be hydrolised are decomposed.
+ Steam will be condensed.
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The result is decontamination, detoxification, dedusting or dust removal,
dehumidification, as well as removal of smelling for the benefit of our environment.
Especially water soluble components can be removed very well from the gas. By
dissolving those components, the water or washing liquid will be contaminated in many
cases. The dissolved components are frequently acid or basic chemicals like hydogen
chloride HCl, nitric / nitrogen oxide NO / NO2 or ammonia NH3. By an optional
neutralization unit, installed in the wet scrubber it is possible to keep the pH value of the
washing liquid and the waste water at a neutral level. Furthermore absorption of acid
components is improved by using basic washing liquid and removal of basic chemicals
is more effective by using acid washing liquid.
Dust is precipitated and if larger amounts are created then this will lead to slurry
accumulation in the waste water, which has to be removed by filtering. The filter cake
might be special waste and has to be treated accordingly
Compounds which hydrolyze decompose in contact with water. During the chemical
reaction new soluble compounds might be created which are then removed immediately,
by the spray water. Solid reaction products might end up in the waste water as slurry
and have to be filtered out and disposed. In the semiconductor industry wet scrubber
are used e.g. for the removal of TEOS (Tetraethoxysilane), TiC, Titan tetrachloride or
HMDSO (Hexamethyldisiloxane) from the exhaust gas.
A wet scrubber can be combined also with other flue gas cleaning methods. Gases can
be first cleaned by a washer, then treated by a thermal reactor and then treated again
by a wet scrubber. You can find such combined exhaust gas cleaners in our SBW and
SWB gas scrubber.
SemiAn scrubber for process gas cleaning
SemiAn offers gas scrubber which have been developed for cleaning exhaust gas from
single process tools, as they are used in the semiconductor and LCD industry.
Therefore our gas cleaner are sized for a gas flowin the range of 100 - 1.200 sim or 6 -
72 mh. Of course, we can also offer gas scrubber of that size for other applications
also, Our equipment is reliable and cost effective.
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SpecificationSSW 200Watermax. 4 sim, 2~3 kgfcm?,1/4" fittingNitrogenmax. 25 sim, 4~6 kgfcm?,1/4"
fittingDimensions400(W) x 500(D) x 1500(H)Weight200 kg
Gas extraction for etching bathes
A special application is the gas extraction and gas cleaning for acid or caustic etchers
or etching bathes. Also solvent bathes which contain water soluble solvents like alcohols
or aceton can be extracted. The exhaust air contains in this case rather low amounts of
acid, lye or solvent, However the amount of extracted gas is rather high. SemiAn can
offer scrubbers also for this application, e.g. the model SSW5S00.
Central Exhaust Gas Washer
For cleaning of large amounts of exhaust gas, industrial exhaust gas or collected
exhaust gas from several process tools, usually large washer are installed beside the
building or on top of the roof of a building. We can also offer such exchaust gas
washers on request
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Crystec Technology Trading GmbH will be pleased to further discuss details with you.
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