Add Info B-63525EN 02

ADDITIONAL INFORMATION
Alarm for FANUC SERVO MOTOR β series I/O Link Option

(FANUC Series 16i/18i/160i/180i/160is/180is – MA MAINTENANCE MANUAL))
(FANUC Series 16i/160i/160is – MB,18i/180i/180is – MB5,18i/180i/180is – MB MAINTENANCE MANUUAL)
１．Type of applied technical documents
FANUC Series 16i/18i/21i/20i/160i/180i/210i – MODEL A MAINTENANCE MANUAL

Name
FANUC Series 16i/160i/160is/18i/180i/180is/21i/210i/210is – MODEL B MAINTENANCE MANUAL
Spec. Ｂ－６３００５ＥＮ／０２、Ｂ－６３５２５ＥＮ／０２
No./Version
２．Summary of Change
New,Add Applicable
Group Name／Outline Correct, Date
Delete
Basic
Function
Optional ALARM FOR FANUC SERVO MOTOR β series Add Immediate

Function I/O Link Option
Unit
Maintenance
Parts
Notice
Correction
Another
ALARM FOR FANUC SERVO MOTOR β series I/O Link OPTION (FANUC Series
16i/18i/21i/20i/160i/180i/210i– MODEL A MAINTENANCE MANUAL),(FANUC Series

TITLE 16i/160i/160is/18i/180i/180is/21i/210i/210is – MODEL B MAINTENANCE MANUAL)
01 020228 DRAW B-63005EN/02-2, B-63525EN/02-1
EDIT DATE DISIGNE APPROV. DESCRIPTION FANUC LTD SHEET 1/8

Please add the following description in ”APPENDIX A.1 LIST OF ALARM CODES” .
Case of B-63005EN/02-2
(12) ALARM FOR FANUC SERVO MOTOR β series I/O Link Option
Case of B-63525EN/02-1
(14) ALARM FOR FANUC SERVO MOTOR β series I/O Link Option
Alarm for FANUC SERVO MOTOR β series I/O Link Option can be confirmed by Power Mate CNC Manager
function.
Number Alarm type

000 to 299 Program or setting alarm
300 to 399, 401 Pulse coder alarm
400 to 499 (except 401) Servo alarm
500 to 599 Overtravel alarm
- System alarm or I/O Link alarm
Program or setting alarms (PS alarms)

No. LED display Description Countermeasure
A parameter that requires power-down has Turn the power off, then back on.
000
been specified.
The specified feedrate is zero. Check the feedrate parameter specified with a
011
function code.
The specified feedrate (maximum feedrate) is Check the value of parameter No.043, which
013 zero. indicates the maximum feedrate that can be
specified.
More than 32 blocks have been registered for Reduce the number of registered blocks to 32.
070
a buffering operation.
Reference position setting cannot be executed Move the tool in the direction of reference
normally. position return in jog mode at a speed that
090 causes the servo position error to exceed 128.
Then, specify another reference position
setting.
A first to third reference position return cannot Set the reference position.
093 be executed because the reference position
has not yet been established.
The reference position has not yet been Set the reference position.
224 established. This occurs only when the ZRTN
bit of parameter No.001 is set to 0.
Input data 1 is invalid. Check input data 1, specified with a function
250
code.

DRAW B-63005EN/02-2, B-63525EN/02-1

Input data 2 is invalid. Check input data 2, specified with a function
251
code.
A function code or mode is invalid. Check the command code, specified with a
254
function code. Check the mode.
Operation cannot be activated because an Check the mode. Check whether a block is
255 invalid mode is specified or because block being executed.
execution is in progress.
The interface switch signal (DRC) was Switch the signal after block execution stops.
290
switched during block execution.
The speed of an axial movement specified by Check the speed specified by the external
an external pulse has exceeded the upper pulse. Check the magnification of the external
291
limit. This occurs only when the EPEXA bit of pulse (parameters No.062 and 063).
parameter No.001 is set to 1.
A checksum error for the non-volatile memory Parameters are cleared. Set the parameters
292 was detected. again. If this alarm subsequently recurs,
replace the unit.
Pulse coder alarms

A communication error (DTER) for the serial Check the connection of the signal cable. If the
pulse coder was detected. cable is normal, the pulse coder may be
300 defective. Turn the power off. If the alarm
recurs when the power is reapplied, replace
the serial pulse coder, together with the motor.
A communication error (CRCER) for the serial Check the connection of the signal cable. If the
pulse coder was detected. cable is normal, the pulse coder or servo
301
amplifier unit may be defective. This error can
also be caused by external noise.
A communication error (STBER) for the serial Check the connection of the signal cable. If the
pulse coder was detected. cable is normal, the pulse coder or servo
302
amplifier unit may be defective. This error can
also be caused by external noise.
An LED disconnection (LDAL) was detected in Turn the power off. If this alarm recurs when
303 the serial pulse coder. the power is reapplied, replace the motor.
A mispulse alarm (PMAL) for the serial pulse Turn the power off. If this alarm recurs when
304
coder was detected. the power is reapplied, replace the motor.
A miscount alarm (CMAL) for the serial pulse Turn the power off. If the alarm recurs when
coder was detected. the power is reapplied, replace the motor.
305
If the alarm does not recur, restart the
operation from reference position return.
The motor has overheated (OHAL). This alarm is issued when the motor has
overheated, causing the thermostat to trip.
Possible causes include an excessively high
ambient temperature and excessively strict
306
operating conditions. Check the actual cause.
If it occurs again when the motor is cooled, the
motor or servo amplifier may have failed.
Replace the faulty motor or servo amplifier.

DRAW B-63005EN/02-2, B-63525EN/02-1

A soft phase alarm (SPHAL) was detected. Turn the power off. This alarm may be caused
308
by noise.
When the absolute pulse coder is used, the Rotate the motor through more than one turn
319 motor has not yet rotated through more than in jog feed mode, then turn the power off then
one turn after the first power-up. back on.
The battery voltage of the absolute pulse Replace the battery.
350 coder is low. Restart the operation from reference position
return.
The battery voltage of the absolute pulse Replace the battery.
351
coder is low. (warning)
A communication error was detected in the Check the connection of the pulse coder signal
serial pulse coder. cable. If the cable is normal, the pulse coder
401
or servo amplifier unit may be defective. This
error can also be caused by external noise.
Servo alarms
The servo motor has overheated (estimated The motor operation condition may be too
400 value). severe. Check the operation condition.
SVU-12 The cooling fins have overheated. The load on the motor may be too high.
SVU-20 (hardware detection) Re-examine the load conditions.
403
SVU-40 This alarm will not be issued.
SVU-80
The regenerative discharge unit has This alarm is issued when the average
overheated. regenerative discharge energy is too high
(when the acceleration/deceleration frequency
is too high, for example).
(1) When the separate regenerative discharge resistor is not used: For the SVU-12 and the
SVU-20, check whether the CX11-6 connector is short-circuited with a dummy connector;
for the SVU-40 and the SVU-80, check whether the CX20 and CX23 connectors are
short-circuited with a dummy connector.
(2) The average regenerative discharge energy may be too high. Decrease the
acceleration/deceleration frequency.
404 (3) The separate regenerative discharge unit may not be connected properly. Check the
connection.
(4) The thermostat of the separate regenerative discharge unit may be defective. Disconnect
the separate regenerative discharge unit, then check the thermostat. If the thermostat is
open even through the separate regenerative discharge unit is cool, replace the separate
regenerative discharge unit.
(5) The resistor of the separate regenerative discharge unit may be defective. Disconnect the
separate regenerative discharge unit, then check the resistance. If it does not fall in the
range of the predetermined resistance ±20%, replace the separate regenerative discharge
unit.
(6) If (1) to (5) are not the cause of the alarm, replace the servo amplifier unit.
Reference position return could not be Re-execute reference position return.
executed correctly.
405 If a value in the range of 4 to 96 is set for parameter No. 032 (CMR), an alarm may be issued.
In this case, prevent an alarm from being issued by setting N405 (bit 4 of parameter No. 001) to
“1”.

DRAW B-63005EN/02-2, B-63525EN/02-1

The servo position error in the stop state is Determine the mechanical cause of the large
410 larger than the value specified in parameter position error. If no mechanical cause is found,
No.110. specify a larger value for the parameter.
The servo position error during movement is Determine the mechanical cause of the large
larger than the value specified in parameter position error. If no mechanical cause is found,
No.182. apply any of the following countermeasures:
411
• Specify a larger value for the parameter.
• Specify a lower feedrate.
• Increase the time constants.
[SVU-12, SVU-20] This alarm is issued when an excessively large
An overcurrent alarm is issued. current flows in the main circuit.
(1) Check whether a valid motor number is specified in parameter No.30.
(2) Check whether the standard values are specified in the current control parameters for servo
control.
Correct current control is possible only when the standard values are specified for the
following parameters:
No.70, 71, 72, 78, 79, 84, 85, 86, 87, 88, 89, 90
(3) Disconnect the power line from the servo amplifier unit connector. Then, release the
emergency stop state.
- If the overcurrent alarm continues to be issued, replace the servo amplifier unit.
- If no overcurrent alarm is issued, go to (4).
(4) Check the insulation between the ground and each of U, V, and W. If the insulation is
satisfactory, go to (5).
412
- If a short-circuit is detected, disconnect the power line from the motor connector. Then,
check the insulation between the ground and each of U, V, and W of the motor.
- If a short-circuit is found between the ground and U, V, or W of the motor, replace the
motor.
- If the insulation is satisfactory, replace the power line.
(5) Connect the power line. Observe the waveform of the motor current (IR, IS) while the motor
is accelerating or decelerating.
- If the motor current (IR, IS) does not show a normal sine wave, replace the servo
amplifier unit.
(6) Check if the motor current (IR, IS) waveforms include noise.
- When noise is included, take an action such as making a connection to shield ground.
- When noise is not included, replace the servo amplifier unit.
(7) If (1) to (4) above are not the cause of the alarm, the pulse coder, command cable, or
internal hardware of the CNC may be defective.

DRAW B-63005EN/02-2, B-63525EN/02-1

[SVU-40, SVU-80] This alarm is issued in the following cases:
An overcurrent alarm or IPM alarm is issued. • This alarm is issued when an excessively
large current flows in the main circuit.
• This alarm is issued when an error
(overcurrent, overheat, low IPM control
power supply voltage) is detected in the IPM
(semiconductor driving the motor).
(1) Check whether a valid motor number is specified in parameter No.30.
(2) Check whether the standard values are specified in the current control parameters for
servo control.
Correct current control is possible only when the standard values are specified for the
following parameters:
No.70, 71, 72, 78, 79, 84, 85, 86, 87, 88, 89, 90
(3) Turn off the servo amplifier unit for about ten minutes, then release the emergency stop
state. If no overcurrent alarm is issued, The IPM protection function (against overheat)
may be operating. Possible causes of overheat include a high ambient temperature and a
too severe motor operating condition. Check the cause.
- If an overcurrent alarm is issued, go to (4).
(4) Disconnect the power line from the servo amplifier unit connector. Then, release the
412 emergency stop state.
- If an overcurrent alarm is issued, the IPM protection function (against overcurrent, low
control power supply voltage, overheat) may be operating or defective. Replace the
IPM or servo amplifier unit.
- If no overcurrent alarm is issued, go to (5).
(5) Disconnect the power line from the amplifier connector. Check the insulation between the
ground and each of U, V, and W.
- If a short-circuit is found between the ground and U, V, or W of the motor, replace the
motor.
- If the insulation is satisfactory, replace the power line.
(6) Connect the power line. Observe the waveform of the motor current (IR, IS) while the motor
is accelerating or decelerating.
- If the motor current (IR, IS) does not show a normal sine wave, replace the servo
amplifier unit.
(7) Check whether the waveform of the motor current (IR, IS) contains noise.
- If it contains noise, take appropriate measures against noise, such as grounding the
shield.
- If it does not contain noise, replace the servo amplifier unit.
(8) If (1) to (7) above are not the cause of the alarm, the pulse coder, command cable, or
internal hardware of the CNC may be defective.
A DC link overvoltage alarm is issued. This alarm is issued when the DC voltage of
the main circuit power is too high.
(1) When SVU-12 or SVU-20 is used, and a separate regenerative discharge unit is not used,
check the specification to see if regenerative energy per one time does not exceed the
allowable regenerative energy of the servo amplifier unit.
(2) For the SVU-40 and the SVU-80, when the separate regenerative discharge resistor is not
used, check whether the CX23 connector is short-circuited with a dummy connector.
413 (3) The supply voltage for dynamic power may exceed the rated value. Check the voltage. If the
voltage is too high, reduce the voltage to an appropriate level.
(4) The regenerative discharge unit may not be properly connected. Check the connection.
(5) The resistance of the separate regenerative discharge unit may be abnormal. Disconnect
the separate regenerative discharge unit, then check the resistance. If the resistance is not
within ±20% of the predetermined resistance, replace the separate regenerative discharge
unit.
(6) If (1) to (5) are not the cause of the alarm, replace the servo amplifier unit.

DRAW B-63005EN/02-2, B-63525EN/02-1

A DC link low voltage alarm is issued. This alarm is issued when the DC voltage of
the main circuit power is too low.
(1) 190 ms or longer may pass from the time when both the *ESP of the built-in DI and the
*ESP of the I/O link interface signal are canceled until the external magnetic contactor
inserted into the input for motive power turns on(including the operating time of the magnetic
414 contactor). The magnetic contactor must turn on within 100 ms.
(2) The external circuit breaker may be turned off. Check the circuit breaker.
(3) The supply voltage for dynamic power is lower than the rated value. Check the voltage. If
the voltage is too low, increase it to an appropriate level.
(4) The external magnetic contactor may not be connected properly. Check the connection.
If (1) to (4) are not the cause of the alarm, replace the servo amplifier unit.
A parameter has been specified incorrectly. Check the following parameters:
No.30: Is the specified motor type correct?
No.31: Is the specified direction of rotation of
the motor correct?
417
No.106: Is the denominator of the number of
pulses per single revolution of the motor 0?
No.180: Is the specified reference counter
capacity 0 or a negative value?
A DO alarm is issued. Replace the servo amplifier unit.
418
The specified speed exceeds 32767000 Re-examine the CMR and speed settings.
423 detection units per second.
The cooling fan has stopped. This alarm is issued when the fan motor built
into the servo amplifier unit has failed.
The fan motor is consumable.
425
(1) Check that the fan is not clogged with something.
(2) Check that the power connector of the fan is connected properly.
(3) Replace the fan or servo amplifier unit.
The external pulse input line is disconnected. Connect the external pulse input signal
446 correctly.
The velocity deviation is too high (velocity Check the actual velocity.
447 control) See the settings of parameter No. 136.
Overtravel alarms
The positive stroke limit has been exceeded. Check whether *+OT and *-OT are connected
500 correctly. Check whether a correct move
command is specified. Move the tool in the
The negative stroke limit has been exceeded. opposite direction in jog mode, then perform a
501
reset.
The positive soft stroke limit has been Check whether appropriate values have been
510
exceeded. specified for parameters No.142 and 143.
Check whether a valid move command is
The negative soft stroke limit has been
511 specified. Move the tool in the opposite
exceeded.
direction in jog mode, then perform a reset.

DRAW B-63005EN/02-2, B-63525EN/02-1

System alarms
An error was detected in the RAM write/read Replace the servo amplifier unit.
-
test at power-up.
An error was detected in the data collation Turn the power off then back on. Then,
- check for the non-volatile memory. re-enter the parameters. If this alarm recurs,
replace the servo amplifier unit.
A data transfer alarm for the non-volatile Replace the servo amplifier unit.
-
memory has been issued.
A watchdog alarm was issued. Turn the power off then back on. If this alarm
-
recurs, replace the servo amplifier unit.
A checksum alarm for the control software Replace the servo amplifier unit.
-
ROM is issued.
A checksum alarm for the ROM that is built Replace the servo amplifier unit.
-
into the CPU is issued.
An error was detected in the control circuit. Replace the servo amplifier unit.
-
I/O link alarm

A FANUC I/O Link error occurred. Any unit Turn off the power to all units connected to the
- connected to the line was turned off. line. Then, turn on the slave devices, followed
by the master device.
No LED display
The control circuit is not operating normally. (1) Check the 24-VDC control supply voltage.
If the voltage is low, increase the voltage to
No indicators an appropriate level.
lit (2) Check whether a fuse in the servo amplifier
-
unit has blown. If a blown fuse is found,
replace it.
If (1) and (2) are not the cause, replace the
servo amplifier.

DRAW B-63005EN/02-2, B-63525EN/02-1

FANUC Series 16i/18i/21i/160i/180i/210i/160is/180is/210is-MODEL B MAINTENANCE
MANUAL
Description addition to Appendix A. ALARM LIST
1.Type of applied technical documents
FANUC Series 16i/18i/21i/160i/180i/210i/160is/180is/210is-MODEL B

Name
MAINTENANCE MANUAL
Spec.No./Ed. B-63525EN/02
2.Summary of Change
New, Add,
Applicable
Group Name/Outline Correct,
Date
Delete
Basic Description addition to Appendix A. “ALARM LIST” Addition Immediately
Optional
Function
Unit
Maintenance
Parts
Notice
Correction
Another
16i/18i/21i/160i/180i/210i/160is/180is/210is -
TITLE MODEL B MAINTENANCE MANUAL
01 Mar.17 ’03 Newly Registered No. B-63525EN/02-2
EDT. DATE DESIGN DESCRIPTION PAGE 1/9

Attached new alarm list is added to Appendix A. “ALARM LIST”.
Concretely,
3/9 and 4/9 are added at the end of “(1) Program errors / Alarms on program and operation (P/S
alarm)“ in “A.1 LIST OF ALARM CODES (CNC)”.
5/9, 6/9, and 7/9 are added at the end of “(6) Servo alarms (1/2)” in “A.1 LIST OF ALARM CODES
(CNC)”.
8/9 is added at the end of “(8) Servo alarms” in “A.1 LIST OF ALARM CODES (CNC)”.
9/9 is added at the end of “(11) Serial spindle alarms” in “A.1 LIST OF ALARM CODES (CNC)”.
16i/18i/21i/160i/180i/210i/160is/180is/210is -
TITLE MODEL B MAINTENANCE MANUAL
01 Mar.17 ’03 Newly Registered No. B-63525EN/02-2
EDT. DATE DESIGN DESCRIPTION PAGE 2/9

Program errors / Alarms on program and operation (P/S alarm)
Number Message Contents
5312 ILLEGAL COMMAND The mistake is found in the command format among G11 from G10 L75
IN G10 L75 / 76 / L76 / L77, or the instruction value exceeds the range of data.
Please modify the program.
5316 TOOL TYPE NUMBER The tool with specified tool type number is not found.
NOT FOUND Please modify the program or register the tool.
5317 ALL TOOL LIFE IS OVER The life of all tools with specified tool type number has been reached.
Change the tools.
5318 DIGITIZING PARAMETER ALARM Digitizing probe present signal (PRBST: G006#5) or parameter PRB
(M series) (No.0001#5) became 1 when one or some following parameters were
illegal.
Or digitizing function was called through FOCAS1 interface when one or
some following parameters were illegal.
This alarm can be cleared by reset operation.
No.1022,No.1905#6,No.1905#7,No.1910~No.1919,No.1970~No.1979,
No.2016#4,No.2223#1,No.7501#4,No.7501#5,No.7501#6,No.7510,
No.8706#0, No.8706#1
5319 DIGITIZING PROBE IS NOT SET Digitizing function was called through FOCAS1 interface when both
(M series) Digitizing probe present signal (PRBST: G006#5) and parameter PRB
(No.0001#5) were 0.
This alarm can be cleared by reset operation.
5320 DIA. / RAD. MODE CAN NOT BE In the function of switching the diameter / radius mode, the state of the
SWITCHED input signal for switching the diameter / radius mode has been changed
while the axis which specified the diameter / radius switching is moving.
5322 FAD OF SPINDLE IS INVALID Spindle Fine Acceleration / Deceleration (FAD) is invalid because
spindle amplifier does not support FAD.
Update the spindle amplifier or turn off the parameter of FAD.
5323 SPEED EXCESSIVE ERROR The speed exceeded the value specified in parameter No.1436.
(T series)
5324 ILLEGAL OPERATION The manual reference point returned in the
IN 3D MODE three-dimensional coordinate conversion mode.
5325 SERIAL DCL: 1. The amount of follow-up is more than 2147483647 or less than
FOLLOW-UP ERROR -2147483648 on detection unit. To reduce the follow-up amount,
please adjust the position where follow-up is begun.
2. The value of parameter (No.1884) is out of range.
5326 SERIAL DCL: The amount of movement for establish reference position was
REF-POS ESTABLISH ERR exceeded the amount of parameter (No.14010).
Please try again or change parameter (No.14010) larger.
5327 SERIAL DCL: Master / slave axes of simple synchronized control, one of them is the
MISMATCH (SSYNC CTRL) linear scale with distance-coded reference marks (serial), and the other
(M series) of them is not the linear scale with distance-coded reference marks
(serial). Please establish reference position with the input signal
SYNCJn <G140> setting to zero.
5328 SERIAL DCL: On angular axis control, one of the angular / perpendicular axes is the
MISMATCH (ANGL-AXIS) scale with ref-pos, and the other of them is not the scale with ref-pos.
Such system is not admired.
5329 M98 AND NC COMMAND The sub program call (M98) and another NC command were
IN SAME BLOCK commanded in the same block during canned cycle.
Modify the program.
5330 G50.9 FORMAT ERROR 1. Coordinate value was not commanded at G50.9 block.
(T series) 2. M code and B code were not commanded at G50.9 block.
3. Improper G-code (G28, etc.) was commanded after G50.9 block.
4. G50.9 block was commanded during canned cycle mode.
5. Three G50.9 blocks were commanded continuously.
5331 ILLEGAL COMMANDED Moving block has not reached the commanded position. Coordinate
POSITION (T series) value at G50.9 block or moving command is wrong.
5333 SPINDLE IS BUSY The commanded spindle is busy for constant surface speed control in
FOR ANOTHER G96 another path. Command again after constant surface speed control
(T series) mode (G96) is finished.
3/9
Program errors / Alarms on program and operation (P/S alarm)
5334 CS AXIS REF. RETURN Cs axis reference return is incomplete.
INCOMPLETE
5339 FORMAT ERROR 1. The value of P/Q commanded at G51.4 / G50.4 / G51.5 / G50.5 /
(T series) G51.6 / G50.6 block is not set to parameter No.12600.
2. The values of parameter No.12600 are overlapped.
5345 WRITE ERROR To change the parameter was attempted on condition that the
(T series) parameter could not be changed.
5441 ILLEGAL RESTART After the manual intervention had been done in the state of the manual
(NANO SMOOTHING) (M series) absolute on, the drive was restarted by the Nano smoothing.
5442 TOO MANY COMMAND BLOCK The active program exceeded the number of blocks which was able
(M series) continuously to be instructed in the Nano smoothing mode.
5443 ILLEGAL CMD G43,G44,G49,G54.2P_ were instructed in the Nano smoothing.
IN NANO SMOOTHING (M series)
5444 CAN NOT CONTINUE The instruction or the operation that the continuation of the Nano
NANO SMOOTHING (M series) smoothing becomes impossible was done.
5456 TOO MANY G68.2 NESTING A feature coordinate system set command was issued more than once.
To newly set a feature coordinate system, cancel the previous
commands, then newly issue a feature coordinate system command.
5457 G68.2 FORMAT ERROR In a feature coordinate system set command block, the I, J, and K
commands are all 0s.
5458 ILLEGAL USE OF G53.1 1. A tool axis direction control command was issued before a feature
coordinate system set command.
Issue the tool axis direction control command in a block after the
feature coordinate system set command.
2. There is no angle solution for setting the tool axis direction to the
+Z-axis direction of the feature coordinate system.
Specify a feature coordinate system that can produce an angle
solution.
5459 ILLEGAL PARAMETER A parameter (No.19680 to No.19714 or No.19665 to No.19667) for
OF MACHINE COMPONENT configuring the machine is incorrect.
5460 ILLEGAL USE OF G41.4 / G42.4 1. Any of the parameters No.19720 to 19726, related to the tool
radius compensation for 5-axis machining, is not correct.
2. At the start of the rotary table support of cutter compensation
(G41.4 / G42.4), axes other than those specified for parameters
No.19720 to 19722 were selected as a plane.
3. In the mode of the tool radius compensation for 5-axis machining
(G41.4 / G42.4), a move command other than G00 / G01 (such as
G02) was issued.
5461 ILLEGAL USE OF G41.5 / G42.5 1. The parameters (No.19720 to No.19726) related to tool radius
compensation for 5-axis machining are not specified properly.
2. An attempt was made to issue the G39 command in the mode of
three-dimensional tool radius compensation for 5-axis
machining(G41.5 / G42.5).
3. An attempt was made to issue a move command other than G00
and G01, such as G02, at the startup of three-dimensional tool
radius compensation for 5-axis machining(G41.5 / G42.5).
5462 ILLEGAL COMMAND (G68.2 / G69) 1. Improper modal G-code (G68.2 / G69).
(M series) 2. G68 can not be specified in G68.2 mode.
5470 G40.1-G42.1 PARAMETER MISS The normal line direction control axes parameter settings are
(M series) erroneous.
1. Set the normal line direction control axis setting in NDC parameter
(No. 5480). Only one axis can be set ; this is not possible for multiple
axes.
2. Set the axis for which NDC parameter (No. 5480) is set to axis of
rotation (ROT parameter No. 1006#0=1, and parameter No.
1022=0).
3. Set the feedrate when rotation of the normal line direction control
axis is set to parameter (No. 5481) within the range 1 to 15000
degrees / min.
4/9
Servo alarms (1/2)
406 SERVO ALARM : Position control system fault. Due to an NC or servo system fault in the
N AXIS WRONG ZRN reference position return of the n-th axis (axis 1-8), there is possibility
that reference position return could not be executed correctly. Try again
from the manual reference position return.
408 SERVO ALARM : AXIS LIMIT OVER Too many numbers of axes are set in parameter.
428 PROBE DISCONNECTION The feedback data from the digitizing probe is disconnected.
(M series) This alarm can be cleared by power cycle but not by reset operation.
454 n AXIS : ILLEGAL ROTOR POS The pole position detection stops illegally.
DETECT The pole position can not be detected because motor can not move.
470 n AXIS : ILLEGAL RAM (MNT) An error occurred in a monitor RAM check.
Replace the axis control card.
471 n AXIS : SPC SOFT DISCONNECT The monitor detected an alpha pulse coder signal error on axis n (axis 1
(MNT) to axis 8). Replace the α pulse coder.
473 n AXIS : SOFT PHASE ALARM The monitor detected an abnormal data skip in a velocity feedback
(INT / MNT) signal on axis n (axis 1 to axis 8). Replace the α pulse coder, or take
measures to correct noise on the feedback cable.
474 n AXIS : EXCESS ERROR The monitor detected that the positional deviation during a stop on axis
(STOP : MNT) n (axis 1 to axis 8) exceeded the setting (parameter No. 1829) in safety
signal mode C (state in which a guard open request is input, and the
guard is open). Confirm a proper value is set to parameter No. 1829.
475 n AXIS : EXCESS ERROR The monitor detected that the positional deviation during movement on
(MOVE : MNT) axis n (axis 1 to axis 8) exceeded the setting (parameter No. 1838) in
safety signal mode C (state in which a guard open request is input, and
the guard is open). Confirm a proper value is set to parameter No.
1838.
476 n AXIS : SAFETY SPEED OVER The monitor detected that the specified speed on axis n (axis 1 to axis
(MNT) 8) exceeded the safe speed (parameter No. 1942) in safety signal mode
C (state in which a guard open request is input, and the guard is open).
When the guard is open, confirm a proper value is set to parameter No.
1942, and the operation is done within the safe speed. If an alarm is
issued in safety signal mode C, the movement of the machine
immediately stops, and a pulse for adjusting the coordinates is
generated. Accordingly, this alarm can be issued.
477 n AXIS : ILLEGAL MACHINE POS. The monitor detected that the machine position on axis n (axis 1 to axis
(MNT) 8) is not in the safety area (parameter No. 1943 and No. 1944) in safety
guard is open). When the guard is open, confirm proper values is set to
parameter No. 1943 and No. 1944, and operation is done in the safety
area. A machine position check is carried out just on a linear axis on
which the reference position has already been established. No machine
position check is made on a rotation axis or a linear axis on which the
reference position has not yet been established.
478 n AXIS : ILLEGAL AXIS DATA The monitor detected that an error occurred on axis n (axis 1 to axis 8)
(MNT) during axis data transfer. If the alarm occurs after performing axis
number setting for the servo amplifier, set parameter No.2212#4 to 1,
and reset the bit to 0, and then turn off the power of the entire system.
In the other case, replace the servo amplifier in which the alarm
occurred.
479 ILLEGAL SAFETY DI (MNT) The monitor detected a mismatch exceeding the set time (parameter
No. 1945) between a safety input signal via the PMC and the same
signal via the FSSB. Check the safety input signals via the PMC and via
the FSSB are equal.
5/9
Servo alarms (1/2)
480 n AXIS : ILLEGAL SAFETY MODE The monitor detected that safety signal mode D (state in which the
(MNT) guard is open although no guard open request is input) was set, or the
guard is open when guard unlock signal (*LGD) is not output. In the
former, the alarm is issued for all axes. In the latter, the alarm is issued
only for the first servo axis (axis for which parameter No.1023 is set to 1
or, for tool post 2 under two-CPU two-path control or two-CPU
three-path control, an axis for which parameter No.1023 is set to 9).
Check if the guard state signal(SGD) is correctly connected. If an alarm
is issued in safety mode C (state in which a guard open request is input
and the guard is open), guard unlocking is disabled. Accordingly, this
alarm may be issued.
481 n AXIS : SAFETY PARAM ERROR The monitor detected that a safety parameter error occurred with axis n
(MNT) (axis 1 to axis 8). Set the safety parameters again.
Relative parameters are as follows.
No.1023,No.1829,No.1838,No.1942,No.1943,No.1944,No.1945,
No.1947, No.1948,No.1950
482 n AXIS : AXIS NUMBER NOT SET The monitor detected that the axis number of axis n (axis 1 to axis 8) is
(MNT) not set with the servo amplifier. Turn off the power of the entire system.
Then an axis number is automatically set.
483 MONITOR SAFETY FUNCTION An error occurred in safety functions of monitor :
ERROR 1. Monitor or CNC detected the inexecution of monitor safety
functions.
2. A mismatch between the monitor results of the safety functions
and the servo software or CNC results of them occurred.
3. An error occurred in a monitor CPU test.
484 n AXIS : SERVO SAFETY An error occurred in safety functions of servo software :
FUNCTION ERR 1. Servo software or CNC detected the inexecution of servo software
safety functions.
2. A mismatch between the servo software results of the safety
functions and the monitor results of them occurred.
3. An error occurred in a servo RAM test.
4. An error occurred in a servo CPU test.
485 ILLEGAL SAFETY DO (MNT) The monitor detected a mismatch exceeding the set time (parameter
No.1945) between a safety output signal via the PMC and the same
signal via the FSSB. Check the safety output signals via the PMC and
via the FSSB are equal.
486 ILLEGAL SAFETY DI (CNC) The CNC detected a mismatch exceeding the set time (parameter No.
1945) between a safety input signal input via the PMC and the same
signal input via the FSSB. Check the safety input signals via the PMC
and via the FSSB are equal.
487 ILLEGAL SAFETY MODE (CNC) The CNC detected that safety signal mode D (state in which the guard
is open although no guard open request is input) was set, or the guard
is open when guard unlock signal (*LGD) is not output. Check if the
guard state signal(SGD) is correctly connected. If an alarm is issued in
safety mode C (state in which a guard open request is input and the
guard is open), guard unlocking is disabled. Accordingly, this alarm may
be issued.
488 SAFE TEST OVER TIME A MCC off Test was not completed within the set time (parameter No.
1946). Check the MCC contact.
489 SAFETY PARAM ERROR (CNC) The CNC detected a safety parameter error.
Set the safety parameters again.
Relative parameters are as follows.
No.1023,No.1829,No.1838,No.1904,No.1942,No.1943,No.1944,
No.1945,No.1946,No.1947,No.1948,No.1950,No.4372
6/9
Servo alarms (1/2)
490 CNC SAFETY FUNCTION ERROR An error occurred in safety functions of CNC :
1. CNC or monitor detected the inexecution of CNC safety functions.
2. A mismatch between the CNC results of the safety functions and
the monitor or spindle results of them occurred.
3. An error occurred in a CNC RAM test.
4. An error occurred in a CNC CPU test.
5. Test at power-up was not executed.
Replace the CPU card.
491 LOCAL BUS TEST ERROR An error occurred in a local bus test. The mother board may be faulty.
Replace the mother board.
492 F-BUS TEST ERROR An error occurred in an F-BUS test. The mother board or option board
may be faulty. The F-BUS test is carried out if a sub-CPU board or
loader board is used.
493 ILLEGAL SAFETY DO (CNC) The CNC detected a mismatch exceeding the set time (parameter
No.1945) between a safety output signal via the PMC and the same
signal via the FSSB. Check the safety output signals via the PMC and
via the FSSB are equal.
Or a parameter for the safe position switch that is output from FSSB I/O
extension module is set in the system with no FSSB I/O extension
module. Use FSSB I/O extension module or set 0 to the parameter
(No.13880 ~ No.13911).
494 n AXIS : SAFETY SPEED OVER The CNC detected that the specified speed on axis n (axis 1 to axis 8)
(CNC) exceeded the setting (parameter No. 1942) in safety signal mode C
(state in which a guard open request is input, and the guard is open).
When the guard is open, confirm a proper value is set to parameter No.
1942, and the operation is done within the safe speed. If an alarm is
issued in safety signal mode C, the movement of the machine
immediately stops, and a pulse for adjusting the coordinates is
generated. Accordingly, this alarm can be issued.
495 n AXIS : ILLEGAL MACHINE POS. The CNC detected that the machine position on axis n (axis 1 to axis 8)
(CNC) is not in the safety area (parameter No. 1943 and No. 1944) in safety
guard is open). When the guard is open, confirm proper values is set to
parameter No. 1943 and No. 1944, and operation is done in the safety
area. A machine position check is carried out just on a linear axis on
which the reference position has already been established. No machine
position check is made on a rotation axis or a linear axis on which the
reference position has not yet been established.
496 n AXIS:ILLEGAL AXIS DATA (CNC) The CNC detected that an error occurred on axis n (axis 1 to axis 8)
during axis data transfer. If the alarm occurs after performing axis
number setting for the servo amplifier, set parameter No.2212#4 to 1,
and reset the bit to 0, and then turn off the power of the entire system.
In the other case, replace the servo amplifier in which the alarm
occurred.
497 n AXIS : SAFETY PARAM TRANS A safety parameter transfer error occurred on axis n (axis 1 to axis 8).
ERROR Replace the CPU card or the axis control card.
498 n AXIS : AXIS NUMBER NOT SET The CNC detected that the axis number of axis n (axis 1 to axis 8) is not
(CNC) set with the servo amplifier. Turn off the power of the entire system.
Then an axis number is automatically set.
7/9
Servo alarms (2/2)
608 n AXIS : INV. COOLING SVM : The internal stirring fan failed.
FAN FAILURE (After the generation of this warning alarm, servo alarm 444 is
generated in addition.)
609 n AXIS: INV. RADIATOR FAN The external dissipator stirring fan failed.
FAILURE (After the generation of this warning alarm, servo alarm 601 is
610 n AXIS : CNV. COOLING FAN 1. PSM : The internal stirring fan failed.
FAILURE 2. PSMR : The internal stirring fan failed.
3. βseries SVU : The internal stirring fan failed.
(After the generation of this warning alarm, servo alarm 443 is
611 n AXIS: CNV. RADIATOR FAN 1. PSM : The external dissipator stirring fan failed.
FAILURE 2. PSMR : The external dissipator stirring fan failed.
612 n AXIS : CNV. OVERLOAD 1. PSM : Overheat occurred.
2. βseries SVU : Overheat occurred.
613 n AXIS: CNV. SINGLE PHASE 1. PSM : Input voltage is in the open–phase condition.
FAILURE 2. PSMR : Input voltage is in the open–phase condition.
616 SERVO SPEED TOO SMALL It doesn’t meet the value that the number of actual rotation is set up in
parameter No.12291 in servo rotation number check.
8/9
Serial spindle alarms
755 SPINDLE-1 SAFETY FUNCTION An error occurred in any spindle safety functions on the first spindle.
ERROR 1. CNC detected that some spindle safety functions were not executed.
2. A safety parameter transfer error occurred.
Replace the CPU card or spindle amplifier module.
756 SPINDLE-1 ILLEGAL AXIS DATA For the first spindle, the CNC detected a mismatch between the spindle
amplifier connection state and spindle amplifier hardware setting. Check
the spindle amplifier connection state and spindle amplifier hardware
setting. Replace the CPU card or spindle amplifier module. If this alarm
is issued because the spindle amplifier configuration is changed, correct
the setting on the spindle amplifier side.
757 SPINDLE-1 SAFETY SPEED For the first spindle, the CNC detected that the speed of the spindle
OVER motor exceeded the safe speed (parameter No. 4372) in safety signal
mode C (state in which a guard open request is input, and the guard is
open). Alternatively, for the first spindle, the CNC detected a mismatch
between the CNC and spindle software, as to which of the speed of the
spindle motor and the safe speed (parameter No. 4372) is greater.
When the guard is open, perform operation at a speed not exceeding
the safe speed. Check the safe speed parameter (No.4372). Replace
the CPU card or spindle amplifier module.
765 SPINDLE-2 SAFETY FUNCTION Same as alarm No. 755. (For the second spindle)
ERROR
766 SPINDLE-2 ILLEGAL AXIS DATA Same as alarm No. 756. (For the second spindle)
767 SPINDLE-2 SAFETY SPEED Same as alarm No. 757. (For the second spindle)
OVER
775 SPINDLE-3 SAFETY FUNCTION Same as alarm No. 755. (For the third spindle)
ERROR
776 SPINDLE-3 ILLEGAL AXIS DATA Same as alarm No. 756. (For the third spindle)
777 SPINDLE-3 SAFETY SPEED Same as alarm No. 757. (For the third spindle)
OVER
785 SPINDLE-4 SAFETY FUNCTION Same as alarm No. 755. (For the fourth spindle)
ERROR
786 SPINDLE-4 ILLEGAL AXIS DATA Same as alarm No. 756. (For the fourth spindle)
787 SPINDLE-4 SAFETY SPEED Same as alarm No. 757. (For the fourth spindle)
OVER
9/9
FANUC Series 16i/18i/21i/160i/180i/210i/160is/180is/210is - MODEL B
MAINTENANCE MANUAL
About the operations of memory clearing

Name
MAINTENANCE MANUAL
2.Summary of Change
New, Add,
Applicable
Date
Delete
Correction of “1.12 LIST OF OPERATIONS”
Basic Correction of Correct Immediately
“APPENDIX F.3.2.1 Functions on the IPL screen”
Optional
Function
Unit
Maintenance
Parts
Notice
Correction
Another
16i/18i/21i/160i/180i/210i/160is/180is/210is-MODEL B
Title MAINTENANCE MANUAL
Draw
B-63525EN/02-3
No.
Ed. Date Design Description Sheet 1/4

Date June 1.’04 Desig. Apprv.
The table "Clear"(pp.118) in "1.12 LIST OF OPERATIONS " is replaced with the following table.
Data
Func-
prote- Param-
Function Mode tion Operation Cleared data
ction eter write=1
key
key
Memory all clear At － Single-path system All data on SRAM
power ＜RESET＞AND＜DELETE＞ (Fixed form sentence, tool data and
ON Multi-path system operation history data used in
All path : ＜RESET＞AND＜DELETE＞ MANUALGUIDEi are included)
Path2 only : ＜CAN＞AND＜2＞
Path3 only : ＜CAN＞AND＜3＞
System with loader
Loader only : ＜CAN＞AND＜5＞
Parameter/offset clear ○ At － Single-path system Parameter
power : ＜RESET＞ Offset
ON Multi-path system Workpiece coordinate system
Path1 only : ＜RESET＞AND＜1＞ shifting amount (T series only)
Path2 only : ＜RESET＞AND＜2＞ Setting data of waveform diagnostic
Path3 only : ＜RESET＞AND＜3＞ function
System with loader Setting data of scheduling function
Loader only : ＜RESET＞AND＜5＞ Setting data of graphic function
Group data of M code group check
function
Pitch error compensation data
Alarm history
Program clear ○ At － Single-path system Program
power : ＜DELETE＞ P-code macro variable
ON Multi-path system (Measure condition and calibration
Path1 only : ＜DELETE＞AND＜1＞ data used in MANUALGUIDEi are
Path2 only : ＜DELETE＞AND＜2＞ included)
Path3 only : ＜DELETE＞AND＜3＞
System with loader
Loader only : ＜DELETE＞AND＜5＞
Clearing a program under －－＜PROG＞AND＜RESET＞ Program at which PS101 alarm is
edition at power off(PS101) occurred
Clearing PMC nonvolatile At － Main CPU : ＜Z＞AND＜O＞ PMC parameter
memory*1 power （＜O＞:alphabet） Setting data on PMC setting screen
ON Loader side : ＜Z＞AND＜5＞ Setting data about PMC screen
display
Clearing SRAM area for C － Changing the value of parameter No.8661 or No.8662 Variable area for C language
language executor executor
(By changing the value of No.8661)
SRAM Disk area for C language
executor
(By changing the value of No.8662)
*1 PMC ladder program in FROM is not cleared.
* In case of OPEN CNC, these clearing operations are done on the IPL screen. Clearing operations on the IPL screen are
described at “APPENDIX.F.3.2.1 Functions on the IPL screen”.
Draw
B-63525EN/02-3
No.

The tables (pp.959-960) in "F.3.2.1 Functions on the IPL screen " are replaced with the following tables.
Corresponding MDI key

operation at power-on
Title on IPL screen
(operation with a standard
CNC)
0.EXIT
1.MEMORY 0.CANCEL
CLEAR 1.ALL MEMORY 0.CANCEL
1.ALL <DELETE>+<RESET>
2.SUB <CAN>+<2>
3.LOADER <CAN>+<5>
2.PARAMETER AND 0.CANCEL
OFFSET 1.ALL <RESET>
2.SUB <RESET>+<2>
3.LOADER <RESET>+<5>
3.ALL PROGRAM 0.CANCEL
1.ALL <DELETE>
2.MAIN <DELETE>+<1>
3.SUB <DELETE>+<2>
4.LOADER <DELETE>+<5>
4.ADDITIONAL SRAM 0.CANCEL
1.ALL *None
2.MAIN *None
3.SUB *None
5.PMC 0.CANCEL
1.PARAMETER 0.CANCEL
1.CNC <Z>+<O> (<O>:alphabet)
2.LOADER <Z>+<5>
2.PROGRAM 0.CANCEL
1.CNC *None
2.LOADER *None
6.CAP-II 0.CANCEL
1.SUB MEMORY <SP>
2.CONVERSATIONAL <I> (<I>:alphabet)
DATA
Draw
B-63525EN/02-3
No.

Corresponding MDI key
operation at power-on
Title on IPL screen
(operation with a standard
CNC)
2.SETTING 0.CANCEL
1.IGNORE OVER 0.CANCEL
TRAVEL ALARM 1.CNC <CAN>+<P>
2.LOADER <CAN>+<L>
2.START WITHOUT 0.CANCEL
LADDER 1.CNC SIDE <CAN>+<Z>
2.LOADER SIDE <.>+<5>
3.C LANGUAGE 0.CANCEL
EXECUTOR 1.MAKE VOID C-EXEC <M>+<0> (<0>:number)
2.BOOTS UP C-EXEC <M>+<3>
APL
9.OTHERS 0.CANCEL
1.P-CODE LOADER <CAN>+<PROG>
Draw
B-63525EN/02-3
No.

MAINTENANCE MANUAL
About the error messages of Embedded Ethernet

Name
MAINTENANCE MANUAL
2.Summary of Change
New, Add,
Applicable
Date
Delete
Basic Correction of “8.9 ERROR MESSAGES” Correct Immediately
Optional
Function
Unit
Maintenance
Parts
Notice
Correction
Another
Draw
B-63525EN/02-5
No.

Date Oct.29.2004 Desig. Apprv.
8.9 ERROR MESSAGES
If an error occurs with the embedded Ethernet function, the log screen of
the embedded Ethernet function displays an error message.
This section describes error messages displayed on the log screen.
The major error messages are described below.
If an error occurs, display the log screen and check the error message to
identify the cause of the error.
Multiple error messages may be displayed for an error. So, check the
display times of error messages.
8.9.1 EMB_ETH MASTER CTRL LOG Screen
OWN IP ADDRESS IS NOTHING

The IP address of the local node is not set. Set an IP address correctly.
OWN IP ADDRESS(%s) IS INVALID

The setting(%s) of the IP address of the local node is incorrect. Correct
the IP address.
SUBNET MASK IS NOTHING

The subnet mask of the local node is not set. Set a correct subnet mask.
SUBNET MASK(%s) IS INVALID

The setting(%s) of the subnet mask of the local node is incorrect. Correct
the subnet mask.
ROUTER IP ADDRESS(%s) IS INVALID

The setting(%s) of the IP address of the router is incorrect. Correct the
IP address of the router.
TCP PORT NUMBER(%d) IS INVALID

The setting(%d) of the TCP port number for FOCAS1/Ethernet is
incorrect. Correct the TCP port number.
UDP PORT NUMBER(%d) IS INVALID

The setting(%d) of the UDP port number is incorrect. Correct the TCP
port number.
UDP INTERVAL TIME(%d) IS INVALID

The setting(%d) of the time interval for UDP transmission is incorrect.
Correct the time interval.
FACTOLINK IP ADDRESS(%s) IS INVALID

The setting(%s) of the IP address for FACTOLINK server is incorrect.
Correct the IP address.
Draw
B-63525EN/02-5
No.

FACTOLINK PORT NUMBER(%d) IS INVALID
The setting(%d) of the TCP port number for FACTOLINK server is
FtpTransfer#%d IP ADDRESS(%s) IS INVALID

The setting(%s) of the IP address for FTP transfer is incorrect. Correct
the IP address.
DNS SERVER IP ADDRESS(%s) IS INVALID

The setting(%s) of the IP address for DNS server is incorrect. Correct the
IP address.
SETTING ERROR BECAUSE DHCP IS RUNNING

The setting parameters cannot be inputted manually because the DHCP
function is active. If you want to input the setting parameters manually,
make the DHCP function unavailable.
Another host has the same IP address!

There is the communication unit which has the same IP address on the
same network. Check the settings of the IP address.
Embedded LANC IntSrc Error [%04xH]

An error was detected in the LAN controller. It seems that the network
traffic was busy.
Consider separating the network into two parts by using the router and
so on.
DNS CLIENT ERROR [%d]

An error occurred in the DNS function. The error code is [%d].
Check the settings of the DNS server.
UNKNOWN HOST
The host name could not be resolved by the DNS server. Check the host
name.
RESPONSE IS NOT SENT BACK FROM DNS SERVER

The response was not received from the DNS server. Check the DNS
server is activated normally.
UNEXPECTED RESPONSE IS SENT BACK FROM DNS SERVER

The unexpected response was received from the DNS server.
Check the settings of the DNS server.
DHCP CLIENT ERROR [%d]

An error occurred in the DHCP function. The error code was [%d].
Check the settings of the the DHCP server.
RESPONSE IS NOT SENT BACK FROM DHCP SERVER

The response was not received from the DHCP server. Check the DHCP
server is activated normally.
Draw
B-63525EN/02-5
No.

GETTING PARAMETER FROM DHCP SERVER
The network parameters are gotten from the DHCP server.
This is not an error message.
SET DEFAULT FOCAS1/ETHERNET PARAMETER

The default parameter of FOCAS1/Ethernet function was set.
SET DEFAULT DNC1/ETHERNET PARAMETER

The default parameter of DNC1/Ethernet function was set.
CHANGED (%s) BY DHCP SERVER

The network parameter[%s] was changed by the DHCP server.
8.9.2 EMB_ETH FACTOLINK LOG Screen
FACTOLINK IP ADDRESS(%s) IS INVALID

The setting(%s) of the IP address for FACTOLINK server is incorrect.
Correct the IP address.
FACTOLINK PORT NUMBER(%d) IS INVALID

The setting(%d) of the TCP port number for FACTOLINK server is
FACTOLINK SERVER ISN'T ALIVE

The FACTOLINK server cannot be found on the network. Check if the
FACTOLINK server is connected to the network correctly.

ROUTER ISN'T ALIVE

The router cannot be found on the network. Check if the router is
connected to the network correctly.
Ping Error (%d)

An error(%d) occurred when the PING command was sent to the
FACTOLINK server.
Err NOT CONNECTED

A disconnection request or data send request was issued to a
non-connected port. Connect to the FACTOLINK server again.
Err ALREADY CONNECTED

Connection request was issued again to the already connected port.
Draw
B-63525EN/02-5
No.

Err FAIL TO CONNECT SOCKET
Failed to connect to the FACTOLINK server.
Check the FACTOLINK server is activated normally.
8.9.3 EMB_ETH FOCAS1/ETHER LOG Screen

EMB_ETH PMC LOG Screen
TCP PORT NUMBER(%d) IS INVALID

The setting(%d) of the TCP port number for FOCAS1/Ethernet is
UDP PORT NUMBER(%d) IS INVALID

The setting(%d) of the UDP port number is incorrect. Correct the TCP
port number.
UDP INTERVAL TIME(%d) IS INVALID

The setting(%d) of the time interval for UDP transmission is incorrect.
Correct the time interval.
ALL TASKS(C%d) ARE BUSY

The FOCAS1/Ethernet function is already engaged in communication
with five applications. Terminate the communication with unnecessary
applications on the personal computer.
Err TakeOutPduHeader()
An error occurred under waiting the receiving data.
Err TakeOutPduContents()
An error occurred under receiving the data.
Err recv() [%d]

A reception error(%d) occurred.
Err EthInitiateDownload() [%d]

An error occurred when starting download data. The error code is [%d].
Err EthAbortDownload() [%d]

An error occurred when aborting download data. The error code is [%d].
Err EthTerminateDownload() [%d]

An error occurred when terminating download data. The error code is
[%d].
Err EthInitiateUpload() [%d]

An error occurred when starting upload data. The error code is [%d].
Draw
B-63525EN/02-5
No.

Err EthAbortUpload() [%d]
An error occurred when aborting upload data. The error code is [%d].
Err EthUploadSegment() [%d]

An error occurred when sending upload data. The error code is [%d].
8.9.4 EMB_ETH FTP TRANSFER LOG Screen
Parameters are invalid

The port number or IP address of the host computer set on the
parameter setting screen are incorrect. Check the settings of the port
number and IP address.
Login User is invalid

The setting of the user name or password is incorrect. Check the user
name and password.
FTP SERVER ISN'T ALIVE

The FTP server cannot be found on the network. Check if the FTP server
is connected to the network correctly.

ROUTER ISN'T ALIVE

The router cannot be found on the network. Check if the router is
connected to the network correctly.
Ping Error(%d)
An error(%d) occurred when the PING command was sent to the FTP
server.
Cannot establish connection[%d]

Failed to connect to the FTP server. The error code was [%d].
Check that the FTP server is executing in the personal computer.
Login failed[%d]
Filed to log in to the FTP server. The error code was [%d].
Check the user name and the password.
Cannot change work directory[%d]

Failed to change the working directory. The error code was [%d].
Download Error[%d]
An error occurred under reading the NC data from the personal
computer to the CNC memory. The error code was [%d].
Draw
B-63525EN/02-5
No.

Upload Error[%d]
An error occurred under punching the NC data from the CNC memory to
the personal computer. The error code was [%d].
Delete Error[%d]
An error occurred under deleting the file from the personal computer.
The error code was [%d].
File List Error[%d]

An error occurred under getting the file list from the personal computer.
The error code was [%d].
8.9.5 DETAIL OF ERROR CODES

The major error codes are described below.
Error codes about Ethernet communication
Error means
Code
202 The specified file or directory does not exist.
224 Too many Ethernet connections were used or the
Ethernet function was not initialized.
Check the states of the connection and the settings
of the basic parameters such as the IP address.
254 The connection was turn off. (Note)
257 The connection was not connected. (Note)
258 The connection was already disconnected. (Note)
260 The connection was turn off by timeout. (Note)
261 The connection was denied.
265 The route for the specified host computer was not
detected.
Check that the specified host computer exists
actually or the settings of the IP address or subnet
mask was corrected.
Note
An electrical noise causes resetting the connection with PC. If the
connection is reset unexpectedly, check the electrical noise.
Draw
B-63525EN/02-5
No.

1. Type of applied technical documents
Name FANUC Series 16i/160i/160is-MODEL B

FANUC Series 18i/180i/180is-MODEL B
MAINTENACE MANUAL
Spec.No./Version B-63525EN/02
2. Summary of change
Group Name / Outline New, Add, Applicable

Correct, Date
Delete
Basic
Function
Optional
Function
Unit
Maintenance
parts
Notice
Correction There are two corrections.

Correction of servo alarm details at 1.8.2.
Correction of servo alarm details at APPENDIX A.1 (6).
Another
TITLE FANUC Series 16i/160i/160is-MODEL B

MAINTENANCE MANUAL Correction of servo alarm
CUST.
01 05/08/02 Hada New issue DRAW. NO. B-63525EN/02-6
Edit. DATE Design Description SHEET 1/2

1.8.2 Contents Displayed
Detail of serial pulse coder
Correct item "DGN 0201" as follow.
#7 #6 #5 #4 #3 #2 #1 #0
DGN 0201 ALD EXP
Amplifier overheat
0 - - -
Overload Motor overheat
alarm Motor overheat
1 - - -
Amplifier overheat
1 - - 0 Built-in pulse coder (hand hard)
Disconnection of separated type
Disconnection 1 - - 1
pulse coder (hard)
alarm
Disconnection of pulse coder
0 - - 0
(software)
APPENDIX
A.1 LIST OF ALARM CODES(CNC)
6) Servo alarms
Detail of servo alarm
Correct item "diagnosis display No.201" as follow.
#7 #6 #5 #4 #3 #2 #1 #0
0201 ALD EXP
When OVL equal 1 in diagnostic data No.200:
ALD 0: Motor overheating Amplifier overheating

1: Amplifier overheating Motor overheating
TITLE
CUST.
DRAW. NO. B-63525EN/02-6

FANUC Series 16i/160i/160is/18i/180i/180is/21i/210i/210is-MODEL B AINTENANCE MANUAL
Addition of the option information file
Name FANUC Series 16i/160i/160is/18i/180i/180is/21i/210i/210is-MODEL B MAINTENANCE MANUAL
Spec. No.
B-63525EN/02
/ Version
New, Add., Applicable

Group Name / Outline
Correct, Del. Date
Basic
Function
Optional
Function
Unit
Maintenance
Parts
The section 5.12 and NOTE in APPENDIX C.2.1 are added.
Notice
Correction
Another
TITLE
03 10/02/25 Y.Sone 2,4/4
FS16i/160i /160i s/18i/180i/180i s/21i/210i/210i s -B
02 06/07/14 ANDO 2,3/4 Noda MAINTENANCE MANUAL
DRAW. NO
CUST.
01 06/06/13 ANDO New issue Noda B-63525EN/02-07
“The option information file” is added as the section 5.12.
5.12 The option information file
FANUC Series 16i/18i/21i-MODEL B is applied to the “FANUC REMOTE OPTION SYSTEM”,
from July, 2006, and the setting method of option parameters is changed.
Before this is applied, as the option parameters are stored in the SRAM, the option
parameter will be lost in case the SRAM data is broken.
After the setting method of the option parameters is changed, the option parameter will not
be lost, as the option parameters are stored in the option information file (file name: “OPRM
INF”) in the FROM.
In case of applied series, “OP” is printed behind the following spcification number of Basic
units printed on the nameplate. Please refer to the next page.
MODEL BASIC UNIT
Series 16i/160i/160is-B A02B-0281-B500,B502, B503, B504
A02B-0281-B600,B602, B603, B604
A02B-0281-B801,B803
Series 18i/180i/180is-MB5 A02B-0297-B500,B502, B503, B504
A02B-0297-B600,B602, B603, B604
A02B-0297-B801,B803
A02B-0283-B600,B602, B603, B604
A02B-0283-B801,B803
Series 21i/210i/210is-B A02B-0285-B500,B502
A02B-0285-B600,B602
A02B-0285-B801,B803
The note in the restoration of the option information file

1) Please also back up the option information file (file name: “OPRM INF”) in the FROM, when
you back up the SRAM memory and the user files. This is for easy recovery in case of data
loss.
2) If once the option information file is restored, P/S alarm No.5523 (WAITING THE OPTION
CERTIFICATION) occurs when the power is turned on. Then, the certification of the option
parameters by FANUC Service is required within the expiration date (30 days (720 hour)
after Alarm occures.).
(The P/S alarm No.5523 can be canceled by reset within the expiration date.)
Request FANUC Service to certify the option parameters.
TITLE
03 10/02/25 Y.Sone Alter this page

DRAW. NO. CUST.
02 06/07/14 ANDO Modify part of 2 B-63525EN/02-07
Confirmation of NC with capability of software option setting
“OP” is printed behind the specification number of Basic units printed on nameplate for unit.
Nameplate for unit in LCD mounted type 16i series CNC
Example of nameplate for unit

FANUC Series 16i–TB
TYPE A02B-0281-B500 OP NO. E06700001
DATE 2006-07 C US
FANUC LTD MADE IN JAPAN
”OP”, which indicates capability of

software option setting, is printed.
Nameplate for unit
Nameplate for unit in Stand-alone type 16i series CNC
Example of nameplate for unit stick on the side of Basic units

TYPE A02B-0281-B801 OP NO. E06700001
DATE 2 0 0 6 - 0 7 C US
FANUC LTD MADE IN JAPAN
Nameplate for unit

TYPE
A02B-0281-B801 OP
NO. E06700001
Example of nameplate for unit stick on the front of Basic units
TITLE
DRAW. NO. CUST.

02 06/07/14 ANDO Add this page B-63525EN/02-07
NOTE is added in APPENDIX C.2.1 “SYSTEM DATA LOADING Screen”.
C.2.1 SYSTEM DATA LOADING

Screen
NOTE
Option parameters of CNC applied to the “FANUC REMOTE OPTION SYSTEM” are stored
in the option information file (File name : "OPRM INF") in FROM of CNC. If this file is alternated,
then option parameter setting will be changed, and the certification of the option parameters by
FANUC Service will be required.
TITLE
CUST.
03 10/02/25 Y.Sone Alter NOTE DRAW. NO. B-63525EN/02-07
FANUC Series 16i/160i/160is/18i/180i/180is/21i/210i/210is-MODEL B
The additional matter of MAINTENANCE MANUAL (B63525EN/02)
Spec. No.
B-63525EN/02
/ Version

Correct, Del. Date
Basic
Function
Optional
Function
Unit
Additional information of printed circuit

Maintenance
boards. Add Immediately
Parts
Notice
Correction
Another
TITLE
Additional matter of MAINTENANCE MANUAL
(B-63525EN/02)
DRAW. NO
01 07/02/01 Miyazaki New issue B-63525EN/02-09 CUST.
Edit. DATE Design Description SHEET 1 / 25

Information of printed circuit boards is reviewed in MAINTENANCE MANUAL for FANUC
Series 16i/160i/160is/18i/180i/180is/21i/210i/210is-MODEL B.
The lists of printed circuit boards is replaced in 2.4.1, 2.4.4, 2.4.5, 2.4.7, 2.5.4, 3.4, 3.7, 4.4.1, 4.4.2,
4.4.3, 4.4.4, 4.4.5, 4.4.15, 4.5.2, 4.5.6.
2.4.1 FS16i/18i/21i Main board
P.178
No. Name Specification Function Remarks
(1) Axis control card A20B-3300-0033 Axis control 2 axes Applicable servo software:
A20B-3300-0032 Axis control 4 axes Series 9090/9096 (21i)
A20B-3300-0623 Axis control 2 axes Applicable servo software:
A20B-3300-0622 Axis control 4 axes Series 90B6 (21i) HRV3 function is not available.
A20B-3300-0393 Series 90B0/90B1/90B6
A20B-3300-0242 Axis control 4 axes
A20B-3300-0392
A20B-3300-0391
A20B-3300-0390
A20B-3300-0398 Series 90B0/90B1/90B6
A20B-3300-0245 Axis control 6 axes (High-speed HRV)
A20B-3300-0395
A20B-3300-0394
for Dual Check Safety
A20B-3300-0246 Learning-control axis Applicable servo software:
A20B-3300-0396 control Series 90B3/90B7
A20B-3300-0247 Learning-control axis Applicable servo software:
A20B-3300-0397 control Series 90B3/90B7 (High-speed HRV)
TITLE
P.179
DRAW. NO. B-63525EN/02-09 CUST.

(2) Display control card A20B-3300-0280 10.4” color LCD with Graphic software 60V6 series, embedded
graphic function and Ethernet control software series 656A
embedded Ethernet
A20B-3300-0281 8.4” color LCD with
graphic function and
embedded Ethernet
A20B-3300-0282 9.5” monochrome LCD
with graphic function and
embedded Ethernet
with graphic function and
embedded Ethernet
A20B-3300-0300 9.5” monochrome LCD Embedded Ethernet control software series
with embedded Ethernet 656A
with embedded Ethernet
A20B-3300-0302 9.5” monochrome
LCD
A20B-3300-0303 7.2” monochrome
LCD
(3) CPU card A20B-3300-0310 DRAM 16MB for Old specification
Series 16i/18i (Old specification is
A20B-3300-0311 DRAM 32MB for not compatible with
Series 16i/18i new specification.)
A20B-3300-0291 DRAM 16MB for
Series 21i
A20B-3300-0290 DRAM 32MB for
Series 21i
A20B-3300-0312 DRAM 16MB for When embedded
Series 21i Ethernet function is
A20B-3300-0313 DRAM 32MB used with Series 21i
Series 21i
A20B-3300-0600 DRAM 16MB for New specification
Series 16i/18i (New specification is
A20B-3300-0601 DRAM 32MB for not compatible with
Series 16i/18i old specification.)
A20B-3300-0295 DRAM 16MB for
Series 21i
A20B-3300-0294 DRAM 32MB for
Series 21i
A20B-3300-0602 DRAM 16MB for When embedded
Series 21i Ethernet function is
A20B-3300-0603 DRAM 32MB used with Series 21i
Series 21i
(4) Power supply unit A20B-8100-0720
A20B-8101-0180
TITLE
P.180

(1) FROM/SRAM A20B-3900-0160 FROM 16MB Various control software
module A20B-3900-0220 SRAM 1MB programs are stored in the
A20B-3900-0161 FROM 16MB FROM module.
A20B-3900-0221 SRAM 2MB The SRAM is a
A20B-3900-0162 FROM 16MB battery-backed memory
module.
A20B-3900-0222 SRAM 3MB
A20B-3900-0163 FROM 32MB
A20B-3900-0223 SRAM 1MB
A20B-3900-0164 FROM 32MB
A20B-3900-0224 SRAM 2MB
A20B-3900-0165 FROM 32MB
A20B-3900-0225 SRAM 3MB
A20B-3900-0180 FROM 16MB
A20B-3900-0230 SRAM 256kB
A20B-3900-0169 FROM 16MB
A20B-3900-0181 SRAM 512kB
A20B-3900-0229
A20B-3900-0182 FROM 32MB
A20B-3900-0232 SRAM 256kB
A20B-3900-0183 FROM 32MB
A20B-3900-0233 SRAM 512kB
(2) Analog spindle Analog spindle
A20B-3900-0170
module position coder
TITLE
2.4.4 Sub-CPU board

P.193
Name Specification
Sub-CPU Board A20B-8002-0190
A20B-8002-0191
P.194
A20B-3300-0393 Series 90B0/90B1/90B6
A20B-3300-0392
A20B-3300-0391
A20B-3300-0390
A20B-3300-0398 Series 90B0/90B1/90B6
A20B-3300-0395
A20B-3300-0394
A17B-3300-0500 Axis control 8axes
A20B-3300-0246 Learning-control axis control Applicable servo software:
A20B-3300-0396 Series 90B3/90B7
A20B-3300-0247 Learning-control axis control Applicable servo software:
A20B-3300-0397 Series 90B3/90B7
(High-speed HRV)
(2) CPU card A20B-3300-0310 DRAM 16MB
A20B-3300-0311 DRAM 32MB
TITLE
2.4.5 RISC Board

P.197
(1) CPU card A20B-3300-0102 Standard type
A17B-3300-0401 High-speed type
A17B-3300-0403
TITLE
2.4.7 Loader Control Board

P.204
Name Specification Remarks
Loader control Board A20B-8100-0830
A20B-8100-0831 For Dual Check Safety
P.205
A20B-3300-0032 Axis control 4 axes Series 9090/9096
A20B-3300-0392 for Dual Check Safety Series 90B0/90B1/90B6
A20B-3300-0391 for Dual Check Safety
(2) CPU card A20B-3300-0291 With DRAM 16MB
A20B-3300-0260 For Dual Check Safety DRAM module is needed.
(A20B-3900-0151: 16MB)
TITLE
2.5.4 Printed Circuit Boards

P.223
Name Drawing number ID Remarks
Main board for 16i A20B-8100-0660 3x08
Main board for 18i A20B-8100-0661 3x09
Main board for 21i A20B-8100-0662 0x0A
(without Ethernet function, PMC-SA1)
(without Ethernet function, PMC-SB7)
(with Ethernet function, PMC-SA1)
(with Ethernet function, PMC-SB7)
CPU card A20B-3300-0310 CPU: 11 Old specification
(16i/18i, DRAM 16MB) DRAM: A9 (Old specification is
CPU card A20B-3300-0311 CPU: 11 not compatible with
(16i/18i, DRAM 32MB) DRAM: AA new specification.)
CPU card A20B-3300-0312 CPU: 11 When the embedded Ethernet
(21i, DRAM 16MB) DRAM: A9 function is used with 21i.

(21i, DRAM 32MB) DRAM: AA function is used with 21i.
CPU card A20B-3300-0290 CPU: 09

(21i, DRAM 32MB) DRAM: 8A
CPU card A20B-3300-0291 CPU: 09 Used also for the loader control
(21i, DRAM 16MB) DRAM: 89 board
CPU card A20B-3300-0600 CPU: 11 New specification

(16i/18i, DRAM 16MB) DRAM: A9 (New specification is
CPU card A20B-3300-0601 CPU: 11 not compatible with
(16i/18i, DRAM 32MB) DRAM: AA old specification.)
(21i, DRAM 16MB) DRAM: A9 function is used with 21i.

(21i, DRAM 32MB) DRAM: AA function is used with 21i.
CPU card A20B-3300-0294 CPU: 09

(21i, DRAM 32MB) DRAM: 8A
CPU card A20B-3300-0295 CPU: 09
(21i, DRAM 16MB) DRAM: 89
CPU card A20B-3300-0102 -
(standard type for RISC board)
CPU card A17B-3300-0401 -
(high-speed type for RISC board) A17B-3300-0403
Display control card A20B-3300-0280 0C
(10.4" color LCD, graphic function, embedded
Ethernet function)
Display control card A20B-3300-0281 08
(8.4" color LCD, graphic function, embedded
Ethernet function)
(9.5" monochrome LCD, graphic function,
embedded Ethernet function)
TITLE
P.224

(7.2" monochrome LCD, graphic function,
embedded Ethernet function)
(9.5" monochrome LCD, embedded Ethernet
function)
(7.2" monochrome LCD, embedded Ethernet
function)
(9.5” monochrome LCD)
(7.2” monochrome LCD)
Axis control card A20B-3300-0033 00 Applicable servo software:
(2 axes) xx Series 9090/9096
xx 21i, Loader control
(4 axes) xx Series 9090/9096
xx 21i, Loader control
(2 axes) 06 Series 90B6
0x 21i, HRV3 function is not available.
(4 axes) 06 Series 90B6
(2 axes) 02 Series 90B0/90B1/90B6
A20B-3300-0393 0x
(4 axes) 02 Series 90B0/90B1/90B6
A20B-3300-0392 1x
(6 axes) 02 Series 90B0/90B1/90B6
A20B-3300-0391 2x
(8 axes) 02 Series 90B0/90B1/90B6
A20B-3300-0390 3x
(4 axes, high-speed HRV) 02 Series 90B0/90B1/90B6
A20B-3300-0398 5x
A20B-3300-0395 6x
A20B-3300-0394 7x
Axis control card 08 Applicable servo software:
(8 axes, for Dual Check Safty) A17B-3300-0500 02 Series 90B0/90B1/90B6
fx
(Learning-control axis control) 00 Series 90B3/90B7
A20B-3300-0396 3x
(Learning-control axis control, high-speed HRV) 00 Series 90B3/90B7
A20B-3300-0397 7x
Power supply unit A20B-8100-0720 -
A20B-8101-0180
FROM/SRAM module A20B-3900-0160 FROM: C1 A20B-3900-016x: Old specification
(FROM 16 MB, SRAM 1MB) A20B-3900-0220 SRAM: 03 A20B-3900-022x: New specification
FROM/SRAM module A20B-3900-0161 FROM: C1
(FROM 16 MB, SRAM 2MB) A20B-3900-0221 SRAM: 04 New specification is compatible
FROM/SRAM module A20B-3900-0162 FROM: C1 with old specification.
(FROM 16 MB, SRAM 3MB) A20B-3900-0222 SRAM: 05
TITLE
P.225

FROM/SRAM module A20B-3900-0163 FROM: C2 A20B-3900-016x: Old specification
(FROM 32MB, SRAM 1MB) A20B-3900-0223 SRAM: 03 A20B-3900-022x: New specification
(FROM 32MB, SRAM 2MB) A20B-3900-0224 SRAM: 04 A20B-3900-018x: Old specification
FROM/SRAM module A20B-3900-0165 FROM: C2 A20B-3900-023x: New specification
(FROM 32MB, SRAM 3MB) A20B-3900-0225 SRAM: 05

New specification is compatible with
old specification.
(FROM 16MB, SRAM 256kB) A20B-3900-0230 SRAM: 01
Analog spindle module A20B-3900-0170 -
DRAM module (4MB) A20B-3900-0042 85 For option board
DRAM module (16MB) A20B-3900-0151 A9
PMC - RE board A20B-8100-0150 1xCD
C language board A20B-8100-0261 0xCD
Serial communication board A A20B-8100-0262 2xCD Remote buffer/DNC2
Serial communication board B A20B-8100-0263 3xCD DNC1
Symbol CAP iT board A20B-8100-0264 4xCD
Sub CPU board A20B-8002-0190 1xCE Old specification
A20B-8002-0191 1xCE
RISC board A20B-8002-0040 xxCA
DATA SERVER board A20B-8100-0271 3xDB
ADD - ON board A20B-2002-0960 -
FAST DATA SERVER board A20B-8100-0770 0x8E
ADD - ON board A20B-2002-0960 -
Loader control board A20B-8100-0830 1xD3
A20B-8100-0831 1xD3 For Dual Check Safety
HSSB interface board A20B-8001-0641 ExAA
I/O Link - II board A20B-8100-0250 0x95
PRROFIBUS board A20B-8100-0430 0xBB
ADD - ON board A20B-2100-0430 -
Ethernet board A20B-8100-0271 3xDB 10BASE - T
FAST Ethernet board A20B-8100-0770 0x8E 100BASE - T
DeviceNet interface board A20B-8001-0880 1xF3
Back panel (2 slots) A20B-2003-0150 -

TITLE
3.4 FS160is/180is/210is MAIN BOARD

P.250
No. Name Code Function Remarks
(1) Axis control card A20B-3300-0033 Axis control 2-axes Servo software Series 9090/9096
A20B-3300-0032 Axis control 4-axes
A20B-3300-0623 Axis control 2-axes Servo software Series 90B6
A20B-3300-0622 Axis control 4-axes 21i, HRV3 function is not available.
A20B-3300-0243 Axis control 2-axes Servo software Series 90B0/90B1/90B6
A20B-3300-0393
A20B-3300-0392
A20B-3300-0391
A20B-3300-0390
A20B-3300-0248 Axis control 4-axes Servo software Series 90B0/90B1/90B6
A20B-3300-0398 (High-speed HRV)
A20B-3300-0395
A20B-3300-0394
Axis control 8-axes,
A17B-3300-0500
for Dual Check Safty
A20B-3300-0246 Learning controlled axis control Servo software Series 90B3/90B7
A20B-3300-0396
A20B-3300-0247 Learning controlled axis control Servo software Series 90B3/90B7
A20B-3300-0397 (High-speed HRV)
(2) CE CE card 1 A20B-3300-0330 For 10.4" color LCD
card CE card 2 A20B-3300-0320 Win CE CPU
TITLE
P.251

(3) CPU card A20B-3300-0310 For Series 160is/180is Old specification
DRAM 16MB (Old specification is not
A20B-3300-0311 For Series 160is/180is compatible with new
DRAM 32MB specification.)
A20B-3300-0291 For Series 210is
DRAM 16MB
DRAM 32MB
A20B-3300-0312 For Series 210is When the series 210is uses the
DRAM 16MB PC's embedded Ethernet feature
DRAM 32MB
A20B-3300-0600 For Series 160is/180is New specification
DRAM 16MB (New specification is
A20B-3300-0601 For Series 160is/180is not compatible with old
DRAM 32MB specification.)
DRAM 16MB
DRAM 32MB
A20B-3300-0602 For Series 210is When the series 210is uses the
DRAM 16MB PC's embedded Ethernet feature
DRAM 32MB
A20B-8101-0180
P.252
(1) FROM/SRAM A20B-3900-0160 FROM 16MB FROM contains various types of control
module A20B-3900-0220 SRAM 1MB software.
A20B-3900-0161 FROM 16MB SRAM is battery-backed memory.
A20B-3900-0221 SRAM 2MB
A20B-3900-0162 FROM 16MB
A20B-3900-0222 SRAM 3MB
A20B-3900-0163 FROM 32MB
A20B-3900-0223 SRAM 1MB
A20B-3900-0164 FROM 32MB
A20B-3900-0224 SRAM 2MB
A20B-3900-0165 FROM 32MB
A20B-3900-0225 SRAM 3MB
A20B-3900-0180 FROM 16MB
A20B-3900-0230 SRAM 256kB
A20B-3900-0181 FROM 16MB
A20B-3900-0231 SRAM 512kB
A20B-3900-0182 FROM 32MB
A20B-3900-0232 SRAM 256kB
A20B-3900-0183 FROM 32MB
A20B-3900-0233 SRAM 512kB
(2) Analog spindle module A20B-3900-0170 Analog spindle
position coder
TITLE
3.7 LIST OF UNITS AND PRINTED CIRCUIT BOARDS

P.264
Name Drawing number
Main board 160is A20B-8100-0790
180is A20B-8100-0791
210is (SA1) A20B-8100-0794
210is (SB7) A20B-8100-0795
CE card CE card 1 A20B-3300-0330
CE card 2 A20B-3300-0320
Power Supply unit A20B-8100-0720
A20B-8101-0180
Printed circuit board of Inverter A20B-8001-0920
Printed circuit board of backup unit A20B-2100-0820
TITLE
4.4.1 Main Board of Series 16i/18i/21i/160i/180i/210i/160is/180is/210is


P.283
No. Item Code Function Remarks
(1) CPU card A20B-3300-0310 DRAM 16MB Old specification
For Series 16i/18i/160i/180i/ (Old specification
160is/180is is not compatible
A20B-3300-0311 DRAM 32MB with new
For Series 16i/18i/160i/180i/ specification.)
160is/180is
A20B-3300-0291 DRAM 16MB
For Series 21i/210i/210is
A20B-3300-0290 DRAM 32MB
A20B-3300-0312 DRAM 16MB When the embedded Ethernet is
For Series 21i/210i/210is used with Series 21i/210i/210is
A20B-3300-0313 DRAM 32MB
A20B-3300-0600 DRAM 16MB New specification
For Series 16i/18i/160i/180i/ (New specification
160is/180is is not compatible
A20B-3300-0601 DRAM 32MB with old
For Series 16i/18i/160i/180i/ specification.)
160is/180is
A20B-3300-0295 DRAM 16MB
A20B-3300-0294 DRAM 32MB
A20B-3300-0602 DRAM 16MB When the embedded Ethernet is
For Series 21i/210i/210is used with Series 21i/210i/210is
A20B-3300-0603 DRAM 32MB
(2) Display control A20B-3300-0340 LCD/MDI
card Embedded ethernet
A20B-3300-0360 Display link
Embedded ethernet
A20B-3300-0362 MDI
Embedded ethernet
A20B-3300-0364 Without display unit
Embedded ethernet
A20B-3300-0341 LCD/MDI When the embedded Ethernet is not used with Series
A20B-3300-0361 Display link 21i/210i/210is
A20B-3300-0363 MDI
(3) Axis control card A20B-3300-0033 Axis control 2-axes Servo software
A20B-3300-0032 Axis control 4-axes Series 9090/9096 (21i)
A20B-3300-0623 Axis control 2-axes Servo software
A20B-3300-0622 Axis control 4-axes Series 90B6 (21i) HRV3 function is not available.
A20B-3300-0393 Series 90B0/90B1/90B6
A20B-3300-0392
A20B-3300-0391
A20B-3300-0390
A20B-3300-0398 Series 90B0/90B1/90B6
A20B-3300-0245 Axis control 6-axes (High-speed HRV)
A20B-3300-0395
A20B-3300-0394
For Dual Check Safty
A20B-3300-0246 Learning controlled axis control Servo software
A20B-3300-0396 Series 90B3/90B7
A20B-3300-0397 Series 90B3/90B7
(High-speed HRV)
TITLE
P.284

(4) Power unit A20B-8100-0851
A20B-8101-0191
(5) Analog spindle A20B-3900-0170 Analog spindle position coder
module
(6) FROM/SRAM A20B-3900-0160 FROM 16MB FROM stores various control
module A20B-3900-0220 SRAM 1MB software products. SRAM is
A20B-3900-0161 FROM 16MB backed up by a battery.
A20B-3900-0221 SRAM 2MB
A20B-3900-0162 FROM 16MB
A20B-3900-0222 SRAM 3MB
A20B-3900-0163 FROM 32MB
A20B-3900-0223 SRAM 1MB
A20B-3900-0164 FROM 32MB
A20B-3900-0224 SRAM 2MB
A20B-3900-0165 FROM 32MB
A20B-3900-0225 SRAM 3MB
A20B-3900-0180 FROM 16MB
A20B-3900-0230 SRAM 256kB
A20B-3900-0181 FROM 16MB
A20B-3900-0231 SRAM 512kB
A20B-3900-0182 FROM 32MB
A20B-3900-0232 SRAM 256kB
A20B-3900-0183 FROM 32MB
A20B-3900-0233 SRAM 512kB
TITLE

4.4.2 Sub-CPU board
P.289
Item Code
Sub-CPU board A16B-2203-0751
A16B-2203-0754
P.290
(1) CPU card A20B-3300-0310 DRAM 16MB
A20B-3300-0311 DRAM 32MB
(2) Axis control card A20B-3300-0243 Axis control 2 axes Servo software
A20B-3300-0393 Series 90B0/90B1/90B6
A20B-3300-0392
A20B-3300-0391
A20B-3300-0390
A20B-3300-0248 Axis control 4 axes Servo software
A20B-3300-0398 Series 90B0/90B1/90B6
A20B-3300-0395
A20B-3300-0394
A17B-3300-0500 Axis control 8 axes,
A20B-3300-0396 Series 90B3/90B7
A20B-3300-0397 Series 90B3/90B7
(High-speed HRV)
TITLE

4.4.3 RISC Board, Data server Board, RISC + Data Server Board
P.294
(1) CPU card A20B-3300-0102 Standard type
A17B-3300-0401 High-speed type
A17B-3300-0403
TITLE

4.4.4 Loader Control Board
P.299
Name Specification Remarks
Loader Control Board A16B-2203-0740

A16B-2203-0741 For Dual Check Safety
P.300
(1) CPU card A20B-3300-0291 CNC control With DRAM 16MB
A20B-3300-0260 For Dual Check Safety DRAM module is needed.
(A20B-3900-0151: 16MB)
(2) Axis control card A20B-3300-0033 Axis control 2 axes Servo software
A20B-3300-0032 Axis control 4 axes Series 9090/9096
A20B-3300-0242 Axis control 2 axes, Servo software
A20B-3300-0392 for Dual Check Safety Series 90B0/90B1/90B6
A20B-3300-0391 for Dual Check Safety
TITLE

4.4.5 C Board, Serial Communication Board
P.302
Item Code
C board A20B-8100-0330
Serial communication board R.B./DNC2 : RS232C I/F A20B-8100-0334
A20B-8101-0514
R.B./DNC2 : RS422 I/F A20B-8100-0335
A20B-8101-0515
DNC1 : RS485 I/F A20B-8100-0336
A20B-8101-0516
TITLE

4.4.15 Main Board of CNC Display Unit for is Series
P.320
No. Item Code Remarks
(1) CE card CE card 1 A20B-3300-0330 10.4" color LCD
CE card 2 A20B-3300-0320
A20B-8101-0180
TITLE

4.5.2 Printed Circuit Boards of Control Unit
P.324
Type Item Drawing No. ID Remarks
Master PCB Main board A16B-3200-0420 3X0C 16i/160i/160is
A16B-3200-0421 3X0D 18i/180i/180is
A16B-3200-0425 3X0E 21i/210i/210is
Card PCB CPU card A20B-3300-0310 CPU: 11 Old specification 16i/18i/160i/180i/
DRAM: A9 (Old specification is 160is/180is
A20B-3300-0311 CPU: 11 not compatible with 16i/18i/160i/180i/
DRAM: AA new specification.) 160is/180is
A20B-3300-0312 CPU: 11 21i/210i/210is
DRAM: A9 When the embedded
A20B-3300-0313 CPU: 11 Ethernet is used
DRAM: AA
A20B-3300-0290 CPU: 09 21i/210i/210is
DRAM: 8A
A20B-3300-0291 CPU: 09 21i/210i/210is
DRAM: 89
A20B-3300-0600 CPU: 11 New specification 16i/18i/160i/180i/
DRAM: A9 (New specification is 160is/180is
A20B-3300-0601 CPU: 11 not compatible with 16i/18i/160i/180i/
DRAM: AA old specification.) 160is/180is
A20B-3300-0602 CPU: 11 21i/210i/210is
DRAM: A9 When the embedded
A20B-3300-0603 CPU: 11 Ethernet is used
DRAM: AA
A20B-3300-0294 CPU: 09 21i/210i/210is
DRAM: 8A
A20B-3300-0295 CPU: 09 21i/210i/210is
DRAM: 89
A20B-3300-0102 - RISC board (standard type)
A17B-3300-0401 - RISC board (high-speed type)
A17B-3300-0403
TITLE

P.325
Type Item Drawing NO. ID Remarks
Card PCB Display control card LCD/MDI A20B-3300-0340 -
For CRT LINK A20B-3300-0360 -
MDI only A20B-3300-0362 -
No display A20B-3300-0364 -
LCD/MDI A20B-3300-0341 - 21i/210i/210is
For CRT LINK A20B-3300-0361 - When the embedded Ethernet is not
MDI only A20B-3300-0363 - used
Axis control card 2 axes A20B-3300-0033 00 Servo software
xx Series 9090/9096,
xx 21i/ 210i/210is, Loader control
4 axes A20B-3300-0032 01
xx
xx
2 axes A20B-3300-0623 08 Applicable servo software:
06 Series 90B6
4 axes A20B-3300-0622 08
06
1x
2 axes 08 Servo software
A20B-3300-0243
02 Series 90B0/90B1/90B6
A20B-3300-0393 0x
4 axes A20B-3300-0242 08
02
A20B-3300-0392
1x
6 axes A20B-3300-0241 08
02
A20B-3300-0391
2x
8 axes A20B-3300-0240 08
02
A20B-3300-0390
3x
4 axes, High-speed HRV 08 Servo software
A20B-3300-0248
02 Series 90B0/90B1/90B6
A20B-3300-0398 5x
6 axes, High-speed HRV A20B-3300-0245 08
02
A20B-3300-0395
6x
8 axes, High-speed HRV A20B-3300-0244 08
02
A20B-3300-0394
7x
8 axes, High-speed HRV, A17B-3300-0500 08
for Dual Check Safty 02
fx
Learning controlled axis A20B-3300-0246 08 Servo software
control 00 Series 90B3/90B7
A20B-3300-0396
3x
Learning controlled axis A20B-3300-0247 08
control, High-speed HRV 00
A20B-3300-0397
7x
Display control card 10.4” color A20B-3300-0280 - Graphic
(LCD unit side) 9.5” monochrome A20B-3300-0282 - Graphic
9.5” monochrome A20B-3300-0302 - Character only
Power supply Power Supply unit A20B-8100-0851 -
unit A20B-8101-0191
TITLE

P.326
DIMM FROM/SRAM module A20B-3900-0160 FROM: C1 FROM 16MB, A20B-3900-016x: Old specification
module A20B-3900-0220 SRAM: 03 SRAM 1MB A20B-3900-022x: New specification
A20B-3900-0161 FROM: C1 FROM 16MB,
A20B-3900-0221 SRAM: 04 SRAM 2MB A20B-3900-018x: Old specification
A20B-3900-0162 FROM: C1 FROM 16MB, A20B-3900-023x: New specification
A20B-3900-0222 SRAM: 05 SRAM 3MB
A20B-3900-0163 FROM: C2 FROM 32MB, New specification is compatible with
old specification.
A20B-3900-0223 SRAM: 03 SRAM 1MB
A20B-3900-0164 FROM: C2 FROM 32MB,
A20B-3900-0224 SRAM: 04 SRAM 2MB
A20B-3900-0165 FROM: C2 FROM 32MB,
A20B-3900-0225 SRAM: 05 SRAM 3MB
A20B-3900-0180 FROM: C1 FROM 16MB,
A20B-3900-0230 SRAM: 01 SRAM 256kB
A20B-3900-0169 FROM: C1 FROM 16MB,
A20B-3900-0181 SRAM: 02 SRAM 512kB
A20B-3900-0229
A20B-3900-0182 FROM: C2 FROM 32MB,
A20B-3900-0232 SRAM: 01 SRAM 256kB
A20B-3900-0183 FROM: C2 FROM 32MB,
A20B-3900-0233 SRAM: 02 SRAM 512kB
Analog spindle module A20B-3900-0170
TITLE

P.327
Option Sub-CPU board A16B-2203-0751 1xC0 Old specification
PCB A16B-2203-0754 1xC0
Loader control board A16B-2203-0740 1x97
A16B-2203-0741 1x97 For Dual Check Safety
RISC + data server board A16B-3200-0390 0x81
3xF5
RISC board A16B-3200-0391 0x81
Data server board A16B-3200-0352 3xF5
RISC + FAST data server board A16B-3200-0460 1x81
0x4E
FAST data server board A16B-3200-0462 0x4E
ATA card adapter A20B-2100-0500 - For data server
Serial communication board A20B-8100-0334 1xE1
(RB/DNC2, RS232C I/F) A20B-8101-0514
Serial communication board A20B-8100-0335 2xE1
(RB/DNC2, RS422C I/F) A20B-8101-0515
Serial communication board (DNC1) A20B-8100-0336 3xE2
A20B-8101-0516
C board A20B-8100-0330 xxE0
HSSB interface board A20B-8001-0730 xxAA
Symbol CAP iT board A20B-8100-0560 xx1F
I/O Link - II board A20B-8100-0381 xxF9
Ethernet board A20B-8100-0450 xxE6 10BASE - T
FAST Ethernet board A20B-8100-0670 0x96 100BASE - T
DeviceNet board A20B-8100-0491 xxEF
DeviceNet board C A20B-8100-0650 xxBF
PROFIBUS Master board A20B-8100-0470 xxFC
PROFIBUS Slave board A20B-8100-0440 xxE3
FL - net board A20B-8100-0530 xx59
Back Back panel A20B-2003-0270 - 1 slot
panel A20B-2003-0280 - 3 slots
TITLE

4.5.6 CNC Display Unit for is series CNC
P. 334
Name Drawing number
Main board A20B-8100-0800
CE card CE card 1 A20B-3300-0330
CE card 2 A20B-3300-0320
Power supply unit A20B-8100-0720
A20B-8101-0180
Printed circuit board of Inverter A20B-8001-0920
Printed circuit board of backup unit A20B-2100-0820
TITLE

Descriptions for maintenance of the Motor, the Sensor and the Amplifier
1. Type of applied documents
Name FANUC Series 16i/160i/160is/18i/180i/180is/21i/210i/210is-MODEL B

MAINTENANCE MANUAL
Spec. No. / Ver. B-63525EN/02
2. Summary of Change
New, Add, Applicable

Correct, Del. Date
Basic Function
Optional Function
Unit
Maintenance Parts
Notice
Correction
For our end-users, add descriptions for maintenance of the

Others Add Immediate
Motor, the Sensor and the Amplifier.
TITLE
Descriptions for maintenance of the

Motor, the Sensor, and the Amplifier
DRAWING No.
01 30.06.2009 Y. Yamada, Add descriptions of the Servo maintenance

B-63525EN/02-12
T. Tamai
SHEET
EDITION DATE DESIGN DESCRIPTION 1/25
MOTOR/DETECTOR/AMPLIFIER PREVENTIVE MAINTENANCE
Contents
1 MOTOR/DETECTOR/AMPLIFIER PREVENTIVE MAINTENANCE······································································· 3
1.1 LIST OF MANUALS RELATED TO MOTORS AND AMPLIFIERS ·················································3
1.2 PREVENTIVE MAINTENANCE OF MOTORS AND DETECTORS ·················································4
1.2.1 Warnings, Cautions, and Notes on Preventive Maintenance of Motors and Detectors ···················· 4
1.2.2 Preventive Maintenance of a Motor (Common to All Models) ····················································· 5
1.2.2.1 Main inspection items ···································································································· 5
1.2.2.2 Periodic cleaning of a motor ···························································································· 7
1.2.2.3 Notes on motor cleaning ································································································· 8
1.2.2.4 Notes on the cutting fluid (informational) ········································································· 8
1.2.3 Preventive Maintenance of a Built-in Spindle Motor and Spindle Unit ········································ 8
1.2.3.1 Routine inspection of the FANUC-NSK spindle unit ··························································· 9
1.2.3.2 Maintenance of the FANUC-NSK spindle unit ··································································· 9
1.2.3.3 Test run of the FANUC-NSK spindle unit ········································································· 9
1.2.3.4 Storage method of the FANUC-NSK spindle unit ······························································10
1.2.4 Preventive Maintenance of a Linear Motor ············································································10
1.2.4.1 Appearance inspection of the linear motor (magnet plate)···················································10
1.2.5 Maintenance of a Detector ···································································································11

1.2.5.1 Alarms for built-in detectors (αi and βi Pulsecoders) and troubleshooting actions ···················11
1.2.5.2 Alarms for separate detectors and troubleshooting actions··················································11
1.2.5.3 Detailed troubleshooting methods ···················································································12

1.2.5.4 Maintenance of βiS motor Pulsecoders ·············································································14
1.3 PREVENTIVE MAINTENANCE OF SERVO AMPLIFIERS ························································· 15
1.3.1 Warnings, Cautions, and Notes on Preventive Maintenance of Servo Amplifiers··························15
1.3.2 Preventive Maintenance of a Servo Amplifier ·········································································18
1.3.3 Maintenance of a Servo Amplifier ·························································································19
1.3.3.1 Display of the servo amplifier operation status ·································································19
1.3.3.2 Replacement of a fan motor····························································································21
1.4 REPLACING BATTERY FOR ABSOLUTE PULSECODERS ························································ 23
1.4.1 Overview ··························································································································23
1.4.2 Replacing Batteries ············································································································23

1.4.3 Replacing the Batteries in a Separate Battery Case·································································24
1.4.4 Replacing the Battery Built into the Servo Amplifier ·······························································24
-2-
1 MOTOR/DETECTOR/AMPLIFIER
PREVENTIVE MAINTENANCE
1.1 LIST OF MANUALS RELATED TO MOTORS AND AMPLIFIERS
Details of individual motors and amplifiers are described in the manuals listed in the table below. Before performing periodic
inspection or any other maintenance work, consult with the machine tool builder and, if necessary, obtain the latest version of the
corresponding manual shown in the list. The information about the specifications of each device, such as the weight and winding
resistance value, is given in the relevant "DESCRIPTIONS" manual.
Specification
Manual name Type of manual
number
FANUC AC SERVO MOTOR αi series DESCRIPTIONS B-65262EN
FANUC AC SERVO MOTOR βis series DESCRIPTIONS B-65302EN
FANUC SYNCHROUNOUS BUILT-IN SERVO MOTOR DiS series DESCRIPTIONS B-65332EN
FANUC LINEAR MOTOR LiS series DESCRIPTIONS B-65382EN
FANUC AC SPINDLE MOTOR αi series DESCRIPTIONS B-65272EN
FANUC AC SPINDLE MOTOR βi series DESCRIPTIONS B-65312EN
FANUC BUILT-IN SPINDLE MOTOR BiI series DESCRIPTIONS B-65292EN
FANUC SYNCHROUNOUS BUILT-IN SPINDLE MOTOR BiS
DESCRIPTIONS B-65342EN
series
FANUC - NSK SPINDLE UNIT series DESCRIPTIONS B-65352EN
FANUC SERVO AMPLIFIER αi series DESCRIPTIONS B-65282EN
FANUC SERVO AMPLIFIER βi series DESCRIPTIONS B-65322EN
FANUC AC SERVO MOTOR αi series
FANUC AC SERVO MOTOR βi series
PARAMETER MANUAL B-65270EN
FANUC LINEAR MOTOR LiS series
FANUC SYNCHRONOUS BUILT-IN SERVO MOTOR DiS series
FANUC AC SPINDLE MOTOR αi/βi series
PARAMETER MANUAL B-65280EN
BUILT-IN SPINDLE MOTOR Bi series
FANUC AC SERVO MOTOR αis/αi series
AC SPINDLE MOTOR αi series MAINTENANCE MANUAL B-65285EN
SERVO AMPLIFIER αi series
FANUC AC SERVO MOTOR βis series
AC SPINDLE MOTOR βi series MAINTENANCE MANUAL B-65325EN
SERVO AMPLIFIER βi series
FANUC SERVO AMPLIFIER βi series MAINTENANCE MANUAL B-65395EN
FANUC SERVO GUIDE OPERATOR’S MANUAL B-65404EN
FANUC AC SERVO MOTOR αis/αi/βis series SERVO TUNING
B-65264EN
PROCEDURE (BASIC)
-3-
1.2 PREVENTIVE MAINTENANCE OF MOTORS AND DETECTORS
1.2.1 Warnings, Cautions, and Notes on Preventive Maintenance of

Motors and Detectors
This subsection contains the safety precautions for motor and detector preventive maintenance, which are classified into
"warnings", "cautions", and "notes" according to their bearing on safety. Make sure that you understand and comply with these
precautions when carrying out the maintenance work.
WARNING
• Make sure that you are safely dressed and have a safe working environment when performing preventive
maintenance for a motor.
- Be dressed safely, e.g. by wearing gloves and safety shoes, to protect against injury due to an edge or protrusion and
electric shock.
- Have the work done by more than one person, where possible, so that immediate action can be taken if an accident
occurs when handling a motor.
- A motor is heavy. When moving it, use a crane or other appropriate equipment to protect against injury. For
information about the weight of the motor, refer to its DESCRIPTIONS manual (shown earlier).
- Clothes or fingers can be caught in a rotating motor or come into contact with a moving part of it. Standing in the
direction of motor rotation (direction of motion) can pose a risk of injury. Before rotating a motor, check that there is
no object that is thrown away by motor rotation.
• Be careful about electric shock, fire, and other accidents.

- Do not handle a motor with a wet hand.
- To prevent electric shock, make sure that no conductive object, such as a terminal, is exposed when the motor is
powered on.
- Before touching a motor or any surrounding part, check that the power is shut off and take appropriate safety
precautions.
- High voltage remains across power line terminals of a motor even after the power is shut off (for at least five minutes).
Do not touch a motor in such a condition or connect it to other equipment.
- A loose or disconnected terminal, short-circuited terminals, or a terminal connected to the ground can cause
overheating, spark, fire, or damage to the motor. Take appropriate precautions to prevent these accidents.
- When placed near any inflammable object or material, a motor can be ignited, catch fire, or explode. Avoid placing it
near such object or material.
• Do not disassemble or modify a motor.

Motors such as linear motors, synchronous built-in servo motors, and synchronous built-in spindle motors contain very
strong magnets. If electronic medical apparatus comes near, these motors can cause the apparatus to malfunction, potentially
putting the user's life in danger. Also, disassembling or modifying a motor can cause a failure, regardless of the type of
motor. Do not disassemble or modify a motor in any way not specified by FANUC.
CAUTION
• Ensure that the specified cooling conditions are met.

If the specified cooling conditions are not met (the motor is insufficiently or excessively cooled), the motor can fail.
Problems that can cause a motor failure, such as liquid piping clog, leakage, and fan motor trouble, should be eliminated
through periodic inspection. Do not drive the motor when the cooling system is in an abnormal condition.
• Do not change the system configuration.

Do not change the configuration of the system when it is running normally. Doing so can cause an accident or failure. If
you disconnect a cable for maintenance or some other purpose, take an appropriate measure, such as putting a mark on it,
to ensure you can restore the original state.
• Use the tapped holes of a motor only to move the motor.

-4-
Do not use the tapped holes of a motor to lift or move any other object along with the motor. Doing so can damage the
motor. Depending on the type of motor, the place and direction in which the motor can be lifted may be predetermined. For
details, refer to the DESCRIPTIONS manual of the motor (shown earlier).
• Do not touch a motor when it is running or immediately after it stops.

A motor may get hot when it is running. Do not touch the motor before it gets cool enough. Otherwise, you may get
burned.
NOTE
• Do not remove a nameplate from a motor.

The nameplate is used to identify the motor during maintenance work. If a nameplate comes off, be careful not to lose it.
• Do not step or sit on a motor, and avoid applying shock to a motor.

Any of these acts can deform or break the motor or affect its component, crippling the normal motor operation. Do not put a
motor on top of another motor.
• Comply with the specified conditions when conducting an electric test (winding resistance test,
insulation resistance test, etc.) for a motor or other device or supplying power.
- Conduct an electric test according to the specified method. Conducting such a test by any method that is not specified
can damage the motor.
- Do not conduct a dielectric strength test or insulation test for a Pulsecoder or other detector, or do not apply a
commercial power source voltage. Doing so can destroy the internal elements.
• Perform preventive maintenance (inspection of the external appearance, measurement of winding

resistance, insulation resistance, etc.) and cleaning on a regular basis.
To use a motor safely throughout its entire service life, perform preventive maintenance and cleaning on a regular basis. Be
careful, however, because excessively severe inspection (dielectric strength test, etc.) can damage its windings. For
information about winding resistance values, refer to the DESCRIPTIONS manual of the motor (its specification number is
shown in this manual). Information about insulation resistance is given later in this manual.
NOTE
• This manual is focused on the preventive maintenance work to be performed for a single FANUC motor or
detector alone. The information contained herein may not apply depending on the type or configuration of the
machine. When reading this manual, refer to the manual of the machine as well. If you have any questions or
doubts, do not act on your own; please contact the machine tool builder or FANUC.
• For detailed information about a motor, see the manual list shown earlier and, if necessary, obtain the latest
version of the corresponding manual.
1.2.2 Preventive Maintenance of a Motor (Common to All Models)

This subsection describes the common preventive maintenance items to be handled regardless of the model of the motor. For the
items specific to a particular motor model, see one of the subsequent subsections that pertains to that particular motor model.
CAUTION
• The preventive maintenance method differs from machine to machine in many respects. Depending on the
machine in use, it may be difficult for the user to perform periodic inspection or cleaning. If you are not sure
about anything as to preventive maintenance, consult with the machine tool builder and ensure that you can
perform periodic inspection and cleaning.
• The machine should be used within the scope of specification defined by the machine tool builder. Using the
machine in any way that is outside the specified scope can reduce the motor's service life or cause a failure.
1.2.2.1 Main inspection items

The following table summarizes the main inspection items for a motor. If any of these items is found to be abnormal, stop the
use of the machine immediately and fix the abnormal part by repairing or replacing it. At the same time, identify and
-5-
remove the cause and take a measure to prevent its recurrence. If it is difficult to take a preventive measure or to prevent its
recurrence, consult with the machine tool builder or FANUC.
Appearance of the Crack or - Check the motor for any scar, crack, deformation, bulge, etc.
motor deformation - If the interior of the motor is visible or there is interference with a
peripheral component, it is imperative to replace the motor or the
peripheral component.
- A light peel-off or scar of the surface may be repairable; consult
with FANUC.
Wet or dirty part - If you find any wet or dirty part, clean it immediately.
- A preventive measure is needed if the part in question remains wet
continually due to cutting fluid or dew condensation.
Operating conditions Temperature, - Comply with the operating conditions of the machine. For details of
humidity, etc. the operating conditions of a specific motor, refer to the
corresponding DESCRIPTIONS manual. Generally, the ambient
temperature should be 0°C to 40°C (or 30°C for a spindle unit)
and dew condensation is not allowed. In a place subject to severe
vibration, the components of the motor may be broken.
Connection state Cable - Check for any cable sheath damage, exposed conductor, damaged
conduit or cable bearing, abnormal bending, loose terminal, etc.
- If there is any trace of fluid flowing, the fluid may have entered the
inside of the motor or connector. It is necessary to make a check
and take a measure to prevent recurrence.
Connector/terminal - Check for any cracked, exposed, loose, or removed terminal or
connector, etc.
- Fluid causes a failure; be sure to remove fluid.
- A scarred or damaged connector or terminal needs to be replaced.
In the case of a resin molded motor, such as a linear motor, the
motor needs to be replaced.
Operation of the Noise/vibration - Check for any abnormal noise or vibration not only when the motor
motor is running (the spindle is rotating) but also when it is stopped.
- Abnormal noise heard when the motor is rotating indicates an
abnormality of the bearing or a failure inside the motor.
Movement - Check that the motor operates normally and smoothly.
- If the circuit breaker trips at the same time the motor starts to
operate, it indicates abnormal motor windings.
Heat Check whether the motor does not overheat during the normal
operation cycle.
Note: While the motor is running or immediately after it is stopped, the
motor surface may become very hot. Instead of touching the motor
directly by hand, use a thermolabel, surface thermometer, etc.
Electric Winding resistance If the resistance value exceeds the specified range, the motor needs
characteristics of the to be replaced.
motor Note: When conducting winding resistance measurement, disconnect
the motor from the amplifier and measure the resistance at the power
line or connector closest to the motor.
Insulation For the measuring method and judgment criteria, see the table that
resistance follows.
Cooling fan Noise/vibration - Check that the fan blows air normally without causing abnormal
(for a model with a noise or vibration.
fan motor) - If abnormal noise is heard even when the motor is stopped, it
indicates a fan motor failure.
-6-
Movement - If the power is on and if the fan does not operate or the fan blades
cannot be moved even manually, or if the fan blades are rotating
but no cooling wind is blown out, the fan motor may have cutting
chips or sludge accumulated in it and needs to be cleaned.
- If the fan does not operate normally for any other reason, the fan
motor needs to be replaced.
Forcible cooling unit Dew condensation - Check that forcible cooling does not cause dew condensation on
(when using an (over-cooling) the motor surface. Dew condensation is likely particularly when the
external cooling unit cooling unit continues to run after the machine is stopped. In that
such as liquid case, be sure to make this check.
cooling unit) - Dew condensation or water drop on the motor surface can reduce
the motor's service life. It is necessary to wipe it dry and take a
measure to prevent recurrence.
Liquid leakage/clog - Check the cooling pipe for leakage or clog. Do not drive the motor
unless the leakage or clog is fixed.
- Liquid leakage from a spindle motor with a through hole indicates a
failure of the coolant joint. In this case, the joint needs to be
replaced.
- In the case of liquid leakage from a linear motor (coil slider), the
linear motor (coil slider) needs to be replaced.
- If the motor gets wet due to liquid leakage or any other cause, it is
necessary to clean and dry the motor and perform electric
characteristic checks (winding resistance/insulation resistance).
Insulation resistance measurement

The following table shows the judgment criteria to be applied when measuring insulation resistance between winding and frame
using a megohmmeter (500 VDC).
Insulation resistance Judgment
100 Ω or higher Acceptable
The winding has begun deteriorating. There is no problem with the performance at
10 to 100 Ω
present. Be sure to perform periodic inspection.
The winding has considerably deteriorated. Special care is in need. Be sure to perform
1 to 10 Ω
periodic inspection.
Lower than 1 Ω Unacceptable. Replace the motor.
If insulation resistance drops sharply during a short period of time or if the circuit breaker trips, the cutting fluid or other foreign
matter may have entered the inside of the motor or cable. In that case, contact the machine tool builder or FANUC for
instructions.
CAUTION
• Let the motor dry and cool to room temperature before winding or insulation resistance is measured.
Otherwise, not only an accurate measurement cannot be performed but also the motor may be damaged.
• The winding or insulation resistance measurement should be performed on the motor alone, with its power
line disconnected.
Measuring insulation resistance with the motor connected to the amplifier may damage the amplifier.
• During insulation resistance measurement, applying voltage to the motor for a long time may further
deteriorate the insulation of the motor. Therefore, the measurement of insulation resistance should be
performed in a minimum amount of time where possible.
• When disconnecting the power line and other cables, take an appropriate measure, such as labeling, to
ensure that they can be restored to their original state.
1.2.2.2 Periodic cleaning of a motor

Periodic cleaning is necessary to remove an accumulation of cutting chips or sludge that may eventually cause a failure. Also,
leaving the cutting fluid or other chemical substance attached for a long time can reduce the motor's service life substantially.
When forcible cooling is provided by a liquid or air cooling unit, check the unit for pipe clog, fan failure, etc. and perform
cleaning periodically to ensure that the coolant flows smoothly and that the motor is cooled properly.
-7-
WARNING
Depending on the type of motor, the handling may involve a risk and require safety education in advance.
Also, some machines are difficult for users to clean on their own. If you are to clean the motor, consult with
the machine tool builder in advance with regard to the cleaning method, safety education, etc.
1.2.2.3 Notes on motor cleaning

A motor is an electric product, which is incompatible with most kinds of fluid. When removing cutting chips, sludge, cutting
fluid, etc. during cleaning, note the following.
Note on cleaning Measure

Do not sprinkle or spray detergent or any other fluid over the motor (including its
Do not sprinkle fluid.
peripheral components), or do not wash the motor by submerging it in such fluid.
Do not wash by
When cleaning the motor, use a cloth moistened with a small amount of neutral
submerging.
detergent so that the fluid does not enter the inside the motor.
Solvent may damage the motor; do not use one. If the dirt is difficult to remove with
neutral detergent, use a cloth moistened with a small amount of industrial alcohol
Do not use solvent.
(e.g., IPA). Be careful, however, because rubbing with force or repeatedly may
damage the coated or resin surface.
If the motor is wet or moistened after cleaning, dry it before supplying power and
Do not leave the motor before performing electric tests. When drying the motor in an oven, make sure that
wet or moistened. the temperature is below 40°C and that hot air does not blow directly against the
motor.
1.2.2.4 Notes on the cutting fluid (informational)

Depending on the type of cutting fluid used, the motor and amplifier may be affected greatly. Take due care because, even if you
ensure that they do not come into direct contact with the fluid, a mist or atmosphere of the fluid can cause the problems
described below.
Type of cutting fluid requiring Expected problem

care
Some types of cutting fluid contain highly active sulfur. If such cutting fluid
Cutting fluid containing highly
enters the inside of the motor or amplifier, it causes copper, silver, and other
active sulfur
kinds of metal to corrode, leading to a component failure.
Some types of cutting fluid containing such substance as polyalkylene glycol
Synthetic cutting fluid with high
have very high permeability. Such cutting fluid permeates into the inside of
permeability
the motor, causing insulation deterioration or component failure.
Some types of cutting fluid that enhance their alkaline property using such
substance as alkanolamine remain highly alkaline - pH10 or higher - when
Highly alkaline, water-soluble
diluted. If such cutting fluid is left attached for a long time, its chemical
cutting fluid
change will deteriorate the resin and other materials of the motor and
amplifier.
Other types of cutting fluid not mentioned above may cause various unexpected problems. If any problem arises for which the
cutting fluid is thought to be responsible, consult with the machine tool builder or FANUC.
1.2.3 Preventive Maintenance of a Built-in Spindle Motor and Spindle

Unit
This subsection contains the safety precautions you need to bear in mind when performing preventive maintenance for a built-in
spindle motor (BiI or BiS Series) or the FANUC-NSK spindle unit. In some cases, the work may involve a life-threatening risk
or cause substantial damage. Make sure that you fully understand these safety precautions before carrying out the work.
-8-
WARNING
• Do not disassemble the spindle. Particularly, the rotor of a synchronous built-in spindle motor (BiS Series)
uses strong permanent magnets. The strong magnet force may cause injury or medical appliance
malfunction.
• Do not operate a synchronous built-in spindle motor with an external engine. Doing so is very dangerous
because it makes the motor act as a power generator, generating high voltage. A power outage is also
dangerous because the motor runs freely and, again, generates high voltage. As a safety precaution, a sub
module SM (SSM) is connected between motor and amplifier. Do not disconnect the SSM under any
circumstances. Also, connect the machine frame to the ground to prevent electric shock.
• A synchronous built-in spindle motor may perform a pole position detection operation when it receives the
first rotation command after it is powered on or recovers from an alarm. The pole position detection operation
takes 20 to 60 seconds to complete, during which the spindle behaves oddly, e.g., rotating clockwise and
counterclockwise alternately in rapid succession. This phenomenon is not abnormal. During the detection
operation, do not touch or look down at the spindle, which is a dangerous act.
CAUTION
Performing a test run described in Chapter 3, "TEST RUN METHOD", in Part IV, of "FANUC - NSK
SPINDLE UNIT series DESCRIPTIONS (B-65352)" and the inspection and maintenance work described in
this manual is the condition for guaranteeing the operation of the FANUC-NSK spindle unit. Be sure to
perform the test run and inspection and maintenance work as instructed.
1.2.3.1 Routine inspection of the FANUC-NSK spindle unit

Perform the following routine inspections every day at the start of operation so that stable performance can be obtained from the
spindle.
Item Check
1 Check if the axis, when turned manually, rotates lightly and smoothly.
WARNING When turning the axis manually, be sure to turn off the power to the machine.
2 Check if cuttings and coolant residuals are attached to the periphery of a slinger.
3 Check if dust such as cuttings is attached to the spindle taper portion.
4 For operation at 15,000 min-1 or more immediately after power-up, increase the speed gradually
by using the spindle override function. (This substitutes for a simple test run.)
5 Check if an abnormal sound is generated.
6 Check if an abnormal vibration is generated.
7 Check if an abnormal heat is generated.
1.2.3.2 Maintenance of the FANUC-NSK spindle unit

A FANUC-NSK spindle unit with a grease unit requires periodical maintenance for consumable/wear parts, such as supplying
grease. Depending on the use frequency of and damage to parts, maintenance generally becomes necessary after two years of
machine operation or 10,000 hours of spindle operation. Contact FANUC or the machine tool builder when maintenance
becomes necessary. Also, an effective way to reduce the machine down time due to maintenance is to prepare spare parts;
consult with the machine tool builder.
1.2.3.3 Test run of the FANUC-NSK spindle unit

If any of the following cases applies, be sure to contact the machine tool builder and perform a test run as described in Chapter
3, "TEST RUN METHOD", in Part IV, of "FANUC - NSK SPINDLE UNIT series DESCRIPTIONS (B-65352EN)".
- If the spindle unit is rotated for the first time after it is unpacked or attached to the machine
- If the machine or spindle unit has undergone transportation or relocation
- If the spindle unit alone has been stored for a period longer than six months or has not been used for one month or more
after installation
-9-
CAUTION
FANUC assumes no responsibility for any damage resulting from the failure to perform a
test run or improper use of the spindle unit.
1.2.3.4 Storage method of the FANUC-NSK spindle unit

Apply rust-proof oil to the surface of the spindle unit, pack the spindle unit, and store the packed spindle unit at a location that
satisfies the conditions described below. Also, follow the "This Side Up" and "No Pile Up" instructions indicated on the pack
surface.
- Indoor well ventilated place not exposed to direct sunlight (place where the temperature varies little, the room temperature is
within 5°C to 40°C, and the humidity is 35% to 85% RH)
- Place on the shelf subject to little vibration and dust (Do not place the spindle unit directly on the floor; vibration and dust
can damage the bearing or other parts of the spindle.)
Before using the spindle unit after a storage period of one month or more, make necessary checks, such as measuring winding
and insulation resistance, examining the appearance for rust and other problems, and checking whether the axis can be turned
manually. Depending on the storage period, a test run may be necessary (described earlier).
1.2.4 Preventive Maintenance of a Linear Motor

The magnet plate of a linear motor contains very strong magnets. When performing the maintenance work, make sure all those
engaged in the work fully understand the potential risks involved.
WARNING
• The FANUC linear motors use very strong magnets. Improper handling of the motor is very dangerous and
can lead to a serious accident. Particularly, a person wearing a pacemaker or other medical apparatus
should stay away from the linear motor; otherwise, the apparatus may malfunction, potentially resulting in a
life-threatening accident.
• Those who will come near or touch a linear motor for maintenance work should receive safety education in
advance. For details, contact the machine tool builder or FANUC.
1.2.4.1 Appearance inspection of the linear motor (magnet plate)

Perform an appearance inspection as well during cleaning or other maintenance work. A crack, chip, deformation, or any other
abnormality in appearance of the motor can lead to a serious failure in the not-so-distant future. If you find any such abnormality,
be sure to report it to the machine tool builder. A scratch or other slight scar on the motor surface can also be a sign of future
trouble and needs to be addressed with care. Some suggested appearance inspection items for the magnet plate are described
below.
* For the coil slider (the side to which the power line is connected), see "Main inspection items" earlier in this manual.
Appearance of the magnet plate (which may have a stainless cover)

Appearance inspection item Measure
Crack or chip in the magnet plate resin The magnet plate needs to be replaced. If unattended, it can
Deformation or bulge of the magnet plate or cause trouble in the not-so-distant future. If the problem is
softening of the resin extremely minor, consult with the machine tool builder or FANUC.
The magnet is exposed, or the resin or
The magnet plate needs to be replaced urgently.
magnet is floating
Foreign matter may have entered into the motor, or interference
Scratch on the magnet plate between parts is likely. It is necessary to eliminate the cause and
take a measure to prevent recurrence.
Floating, bulging, or deformed stainless
The cover or magnet plate needs to be replaced.
cover
- 10 -
1.2.5 Maintenance of a Detector
CAUTION
• Detectors such as Pulsecoders are precision equipment. When handling a detector, avoid applying shock to
it. Also, exercise care to prevent cutting powder, dust, cutting fluid, or other foreign matter from attaching to
it.
• Make sure that all connectors are connected properly and securely. A connection failure can cause an alarm
or some other problem.
• If the detector and/or connectors are not installed securely, cutting fluid may enter the inside of the detector,
making it necessary to replace the detector. In that case, contact the machine tool builder or FANUC.
NOTE
If you use a detector not manufactured by FANUC, contact the machine tool builder or detector
manufacturer for detailed information on the detector.
1.2.5.1 Alarms for built-in detectors (αi and βi Pulsecoders) and

troubleshooting actions
These alarms concern built-in detectors that are connected directly to the control unit (CNC/servo amplifier).
Based on the alarm number and description, take an appropriate action as described in the following subsection, "Detailed
troubleshooting methods".
Detailed
Alarm No.: Alarm Description Possible cause Action troubleshooting
method
- Communication
361: ABNORMAL PHASE error in the - Pulse coder failure Replace the (3)
DATA(INT) Pulsecoder - Noise Pulsecoder. (4)
- ID data error
Check the effect
364: SOFT PHASE - Noise of noise. (1)
Position data alarm
ALARM(INT) - Entry of cutting fluid Replace the (3)
Pulsecoder.
Replace the
365: BROKEN LED(INT) LED disconnection - Pulse coder failure (3)
Pulsecoder.
Small internal signal - Pulse coder failure Replace the (3)
366: PULSE MISS(INT)
amplitude - Noise Pulsecoder. (4)
Position data count - Pulse coder failure Replace the (3)
367: COUNT MISS(INT)
error - Noise Pulsecoder. (4)
- Cable disconnection Check the cable. (2)
368: SERIAL DATA Communication
- Pulse coder failure Replace the (3)
ERROR(INT) interruption
- Noise Pulsecoder. (4)
369: DATA TRANS. Communication Check the effect
- Noise (1)
ERROR(INT) data alarm of noise.
453: SPC SOFT Position - pole data - Pulse coder failure Replace the
(3)
DISCONNECT ALARM error - Entry of cutting fluid Pulsecoder.
1.2.5.2 Alarms for separate detectors and troubleshooting actions

These alarms concern separate detectors that are connected to the control unit via a separate detector interface unit (SDU).
Based on the alarm number and description, take an appropriate action as described in the following subsection, "Detailed
troubleshooting methods".
- 11 -
Detailed
Alarm No.: Alarm Description Possible cause Action troubleshooting
method
380: BROKEN LED(EXT) LED disconnection
Position data count
382: COUNT MISS(EXT)
error
Replace the
Small internal - Detector failure (4)
383: PULSE MISS(EXT) detector.
signal amplitude
384: SOFT PHASE
Position data alarm
ALARM(EXT)
Check the cable.
- Cable disconnection Check the effect (2)
385: SERIAL DATA Communication
- Noise of noise. (1)
ERROR(EXT) interruption
- Detector failure Replace the (4)
detector.
386: DATA TRANS. Communication Check the effect
- Noise (1)
ERROR(EXT) data alarm of noise.
381: ABNORMAL PHASE
(EXT)
For details, contact the machine tool builder or detector manufacturer.
387: ABNORMAL
ENCODER(EXT)
1.2.5.3 Detailed troubleshooting methods

(1) Checking the effect of noise
Check the value on the diagnostics screen DGN356 (for a built-in detector) or DGN357 (for a separate detector) of the CNC unit.
Normally, 0 is displayed. However, if the position data from the Pulsecoder becomes unstable due to noise or some other factor,
this value is incremented. The value is cleared when the CNC unit is powered off. Immediately after the power is turned on, 0 is
displayed.
(2) Checking the cable

Check whether the feedback cable is not disconnected and whether the connector is properly plugged.
(3) Replacing the Pulsecoder

× Do not loosen
(3)-1 Pulse coder replacement procedure Bolt fastening the Pulsecoder cover M3
<1> Remove the four M4 hexagon socket head cap screws

fastening the Pulsecoder. The M3 bolts fastening the ○ Remove
Pulsecoder cover do not need to be loosed. (See the figure Bolt fastening the Pulsecoder M4
at right.)
<2> Remove the Pulsecoder and Oldham's coupling (see the following figure).
Oldham's coupling
<3> Set the new Pulsecoder and Oldham's coupling on the motor.
Adjust the direction of the mate Oldham's coupling to that of
the Oldham's coupling so that the teeth are engaged.
Push in the Pulsecoder until the O ring fits in the joint between
the motor and Pulsecoder. Take care so that the O ring of the
Pulsecoder is not bitten.
O ring
Mate Oldham's coupling
Adjust the connector direction

- 12 -
Thermistor connector
Attach the Pulsecoder in such a direction that the power

connector of the servo motor and the feedback cable of the
Pulsecoder face the same direction or that the thermistor
connection parts of the servo motor and Pulsecoder match each
other (see the figure at left).
Adjust the connection parts
Pulse coder Servo motor
<4> Fastening the Pulsecoder with the four M4 hexagon socket head cap screws in the reverse order of removing the Pulsecoder
(<1>). (Appropriate torque: 1.5 Nm)
- 13 -
(3)-2 Feedback cable plugging procedure
Plug in the feedback cable connector, as instructed in the procedure

below, and check that the connector is securely connected.
<1> Check the plugging side and key direction.

Check that the plugging side is free of foreign matter, such as dirt
and oil. Main key Coupling nut
Straight type Right angle type

<2> Plug in the feedback cable connector.
Hold the connector, as shown in the figure at right. Plug in
the connector until you hear a click.
Caution)
Do not hold the coupling nut.
<3> Check the connection condition.

1. Check that the arrow mark of the connector is at the
center, as shown in the figure at right. If the arrow
mark is not at the center, turn the coupling nut
manually until the mark comes to the appropriate
position.
2. Hold the connector by the same part as in <2>, and pull it lightly toward you to check that the connector does not come
off. Do not pull the connector with force.
(4) If troubleshooting is difficult for the user

If the problem is difficult for the user to troubleshoot because it is due to a detector failure or noise, consult with the machine
tool builder or FANUC.
1.2.5.4 Maintenance of βiS motor Pulsecoders
Problems concerning the Pulsecoders of the motors listed in the table below require the maintenance
(replacement) of the entire motor (it is not possible to maintain the Pulsecoder alone).
Motor model Motor specification Remarks

βiS 0.2/5000 A06B-0111-Bx03 x=1,2,4,5
βiS 0.3/5000 A06B-0112-Bx03
βiS 0.4/5000 A06B-0114-Bx03#0y00 x=1,2,4,5 y=0,1
βiS 0.5/6000 A06B-0115-Bx03#0y00
βiS 1/6000 A06B-0116-Bx03#0y00
- 14 -
1.3 PREVENTIVE MAINTENANCE OF SERVO AMPLIFIERS
1.3.1 Warnings, Cautions, and Notes on Preventive Maintenance of

Servo Amplifiers
This subsection contains the safety precautions on preventive maintenance of a servo amplifier (a generic term to refer to the
power supply, servo amplifier, spindle amplifier, and other sub modules of a motor drive unit). These precautions are classified
into "warnings", "cautions", and "notes" according to their bearing on safety. Make sure that you understand and comply with
these precautions when carrying out the maintenance work.
WARNING
• Make sure that you are safely dressed and have a safe working environment when performing preventive
maintenance for a servo amplifier.
- Be dressed safely, e.g. by wearing gloves and safety shoes, to protect against injury due to an edge or protrusion and
electric shock.
- Have the work done by more than one person, where possible, so that immediate action can be taken if an accident
occurs when handling a motor.
- A servo amplifier and AC reactor contain heavy components. Be careful when transporting them or mounting them on
the power magnetic cabinet. Also be careful not to get your fingers caught between the power magnetics cabinet and
servo amplifier.
• Before turning on the power, check that the door of the power magnetics cabinet and all other doors.
- Ensure that the door of the power magnetics cabinet containing the servo amplifier, as well as all other doors, are
closed and locked except during maintenance work.
• When the need arises to open the door of the power magnetics cabinet, only a person trained in the maintenance of
the corresponding machine or equipment should do the task after shutting off the power supply to the power
magnetics cabinet by opening both the input circuit breaker of the power magnetics cabinet and the factory switch
used to supply power to the cabinet.
• Be careful about electric shock, fire, and other accidents.

- If the machine must be operated with the door open for adjustment or some other purpose, the operator must keep his or
her hands and tools well away from any dangerous voltages. Such work must be done only by a person trained in the
maintenance of the machine or equipment.
- Ensure that the door of the power magnetics cabinet is locked so that the door cannot be opened by anyone, except
service personnel or a qualified person trained in maintenance to prevent electric shock, when the servo amplifier is
powered on.
- When the need arises for an operator to open the door of the power magnetics cabinet and perform an operation, ensure
that the operator is sufficiently educated in safety or that a protective cover is added to prevent the operator from
touching any dangerous part.
- The servo amplifier contains a large-capacity electrolytic capacitor in it and remains charged for a while after the power
is shut off. Before touching the servo amplifier for maintenance or some other purpose, measure the residual voltage of
the DC link connection using a tester and check that the red LED for indicating charging is in progress is not lit, in
order to ensure safety.
- After wiring, be sure to close the servo amplifier cover.
- A loose screw or poor connector contact can cause a motor malfunction or overheating, connection to ground, or
short-circuit. Be extremely careful with power supply lines, motor power lines, and DC link connections through which
a large electric current flows, because a loose screw or poor connector contact may lead to a fire. Tighten screws and
connectors using the specified screw tightening torque.
- The surfaces of the regenerative discharge unit and heat radiator may become very hot. Do not touch them directly by
hand.
• When operating the machine for the first time after preventive maintenance, check that the machine
operates as instructed.
- To check whether the machine operates as instructed, first specify a small value for the motor and then increase the
value gradually. If the motor operates abnormally, perform an emergency stop immediately.
- 15 -
- When pressing the emergency stop button, check that the motor stops immediately and that the power being supplied to
the amplifier is shut off by the magnetic contactor.
• Notes on alarms
- If the machine stops due to an alarm, check the alarm number. Depending on the alarm issued, if the power is supplied
without replacing the failed component, another component may be damaged, making it difficult to identify the original
cause of the alarm.
- Before resetting an alarm, ensure that the original cause of the alarm has been removed.
• If the motor causes any abnormal noise or vibration while operating, stop it immediately.
- Using the motor in spite of the abnormal noise or vibration may damage the servo amplifier.
• Do not disassemble or modify a servo amplifier.

Do not disassemble or modify a servo amplifier in any way not specified by FANUC; doing so can lead to a failure.
CAUTION
• Notes on servo amplifier replacement and wiring
- The work of servo amplifier replacement and wiring should be carried out by a person trained in the maintenance of the
machine and equipment concerned.
- When replacing a servo amplifier, check that the combination of the amplifier and the motor is appropriate.
- Check that the servo amplifier is securely mounted on the power magnetics cabinet. If there is any clearance between
the power magnetics cabinet and the surface on which the amplifier is mounted, dust entering the gap may hinder the
normal operation of the servo amplifier.
- Ensure that the power supply lines, motor power lines, and signal lines are each connected to the correct terminal or
connector.
- Unless otherwise instructed, do not unplug a connector and plug it back with the power on; doing so may cause the
servo amplifier to fail.
- When mounting or unmounting the servo amplifier, exercise care not to get your fingers caught between the servo
amplifier and power magnetics cabinet.
- Take care not to lose track of removed screws. Turning on the power with any lost screw left in the unit may damage
the machine.
- Exercise care to prevent the power supply lines and motor power lines from being connected to the ground or being
short-circuited.
- Protect the lines from any stress such as bending. Handle the line ends appropriately.
• Be careful about the handling of a servo amplifier.

- Do not disassemble a servo amplifier. Doing so poses the risk of electric shock, because the capacitor may remain
charged.
- Do not apply shock to a servo amplifier. Doing so may damage its components, potentially causing the amplifier to
malfunction.
- Do not apply an excessively large force to plastic parts. If a plastic section breaks, it may damage internal parts, thus
hindering normal operation or leading to a risk of injury due to a broken section.
• Be careful about the operating environment of a servo amplifier.

- Prevent conductive, combustible, or corrosive foreign matter, mist, or drops of water from entering the inside of the
unit. The entry of any such material may cause the unit to explode, break, malfunction, etc.
- Exercise care to prevent cutting fluid, oil mist, cutting chips, or other foreign matter from attaching to the radiator or
fan motor exposed to the outside of the power magnetics cabinet. Otherwise, the servo amplifier may become unable to
meet its specifications. The service lives of the fan motor and semiconductors can also be reduced.
• Clean the heat sink and fan motor on a regular basis.

- Replace the filter of the power magnetics cabinet on a regular basis.
- Before cleaning the heat sink, shut down the power and ensure that the temperature of the heat sink is as cool as the
room temperature. The heat sink is very hot immediately after power shutdown, touching it may cause burn injury.
- When cleaning the heat sink by blowing air, be careful about dust scattering. Conductive dust attached to the servo
amplifier or its peripheral equipment can lead to a failure.
- 16 -
NOTE
• Make sure that there is sufficient maintenance clearance around the doors of the machine and
equipment.
• Do not step or sit on the servo amplifier, or do not apply shock to it.
• Do not remove a nameplate from a motor.

- The nameplate is necessary to identify the servo amplifier during maintenance work.
- If a nameplate comes off, be careful not to lose it.
NOTE
• This manual is focused on the preventive maintenance work to be performed for a FANUC servo amplifier.
The information contained herein may not apply depending on the type or configuration of the machine.
When reading this manual, refer to the manual of the machine as well. If you have any questions or doubts,
do not act on your own; please contact the machine tool builder or FANUC.
• For detailed information about a servo amplifier, see the manual list shown earlier and, if necessary, obtain
the latest version of the corresponding manual.
- 17 -
1.3.2 Preventive Maintenance of a Servo Amplifier
To use a servo amplifier safely throughout its entire service life, perform daily and periodic inspections.
CAUTION
• The preventive maintenance method differs from machine to machine in many respects. Depending on the
machine in use, it may be difficult for the user to perform periodic inspection or cleaning. If you are not sure
about anything as to preventive maintenance, consult with the machine tool builder and ensure that you can
perform periodic inspection and cleaning.
• The machine should be used within the scope of specification defined by the machine tool builder. Using the
machine in any way that is outside the specified scope can reduce the servo amplifier's service life or cause
a failure.
Inspection Inspection interval

Inspection item Judgment criterion
part Routine Periodic
Around the power magnetics cabinet: 0°C -
45°C
Ambient temperature V
Inside the power magnetics cabinet: 0°C -
55°C
90% or below RH (dew condensation not
Humidity V
allowed)
There shall be no dust or oil mist attached near
Dust/oil mist V
the servo amplifier.
Operating
The cooling fan shall be operating normally
environment Cooling air path V
without the air flow being interrupted.
- No abnormal noise or vibration shall be
present that has not been experienced in
Abnormal
V the past.
vibration/noise
- Vibration near the servo amplifier shall be
0.5 G or less.
200-V input type: Within 200 - 240 V
Supply voltage V
400-V input type: Within 400 - 480 V
There shall be no abnormal noise or smell, and
General V
there shall be no dust or oil mist attached.
Screw V There shall be no loose screw.
- There shall be no abnormal vibration or
Servo (NOTE 1, 2) noise, and the fan blades shall be rotating
Fan motor V
amplifier normally.
- There shall be no dust or oil mist attached.
Connector V There shall be no loose or broken connector.
There shall be no sign of overheating or sheath
Cable V
deterioration (discoloration pr crack).
The machine operator's panel or screen shall
Absolute (NOTE 2)
CNC V not display the alarm indicating the battery
Pulse coder battery
voltage of the absolute Pulsecoder is low.
Magnetic contactor V The contactor shall not rattle or chatter.
External
Ground fault interrupter V The interrupter shall be able to trip.
equipment
AC reactor V There shall be no hum.
NOTE
1 Fan motors are periodic-replacement parts. It is recommended to inspect fan motors on a routine basis and
replace them in a preventive manner.
2 Fan motors and batteries are periodic-replacement parts. It is recommended to keep spare parts.
- 18 -
1.3.3 Maintenance of a Servo Amplifier
1.3.3.1 Display of the servo amplifier operation status

The STATUS LEDs on the front of the servo amplifier indicate the operation status of the servo amplifier (whether it is
operating normally, the type of alarm, etc.). Use these LEDs for maintenance, inspection, troubleshooting, etc.
CAUTION
A servo amplifier failure may arise from a combination of multiple causes, in which case it can be difficult to
identify all those causes. Handling the failure in an improper way may worsen the problem. It is therefore
important to analyze the failure status minutely and identify the true cause or causes of the failure. There
may be cases in which the failure appears to have been fixed but later recurs or cause a more serious
trouble. If you are not sure about the root cause of or corrective action for a failure, do not act on your own;
please contact the machine tool builder or FANUC for instructions on proper action.
[αi series]
(1) Power supply

STATUS
STATUS LED position Description
display
The STATUS LED is off.
Control power has not been supplied, cable is faulty, or control power
circuit is defective.
Nameplate Not ready status
The main circuit is not supplied with power (magnetic contactor is off);
emergency stop state.
Ready status
The main circuit is supplied with power (magnetic contactor is on); the
power supply is ready for operation.
Warning state (The dot at the lower right lights.)
The power supply has failed; an alarm has occurred after a certain
time of operation.
The warning type is indicated by the character displayed.
Alarm status
The alarm type is indicated by the character displayed.
(2) Servo amplifier

STATUS LED STATUS
Description
position display
Control power has not been supplied, cable is faulty, or control
Nameplate power circuit is defective.
The control power is short-circuited (- blinks).
Blink
Cable failure
Waiting for the READY signal from the CNC.
Ready status
The servo motor is excited.
Alarm status
- 19 -
(3) Spindle amplifier
STATUS LED STATUS
Description
position display
Control power has not been supplied, cable is faulty, or control
power circuit is defective.
After control power is turned on, the spindle software series is
displayed (for approx. 1 second).
The last two digits of the spindle software series number are
Nameplate
displayed.
The spindle software version is displayed (for approx. 1 second
following the display of the spindle software series).
[Display] 01,02,03,･･･ → [Version] A, B, C,･･･
The CNC is not powered on (- - blinks).
Blink Blink
Waiting for serial communication and parameter loading completion.
Parameter loading completed
The motor is not excited.
Ready status
The spindle motor is excited.
Alarm status
Error status (invalid sequence or parameter setting error)
The error type is indicated by the character displayed.
- 20 -
[βi SV series]
(yellow)
(yellow)
(yellow)
(green)
(yellow)
(green)
STATUS LED Description

Control power has not been supplied, cable is faulty, or
None of the LEDs is on.
control power circuit is defective.
Alarm status
The ALM LED (yellow) is on.
Communication between CNC and servo amplifier is
The LINK LED (green) is on.
progressing normally.
The POWER LED (green) is on. The control power of the servo amplifier (5 V) is normal.
1.3.3.2 Replacement of a fan motor

[αi series]
(1) Fan motor for internal cooling

Replace the internal fan motor, according to the procedure shown in the figure below.
When replacing the fan motor, be careful about the direction of the fan motor (air blow direction), the direction of the
connector, etc.
Air blow direction
Fan unit
(1) Hold the two tabs (2) Remove the fan
and get the fan unit unit by pulling it White Black Red
off the latch. upward.
Fan unit (60-mm-wide)
Tab Tab
Be careful about the

connector key direction.
Red
Black
White
Be careful about the
connector key direction.
* Be careful about the fan motor and connector directions.
- 21 -
(2) Fan motor for cooling external heat sink
<1> Remove the two sheet metal mounting screws (for the 60-mm-wide model only), and detach the fan motor from the unit
together with the sheet metal.
<2> Remove the fan motor mounting screws (two for one fan motor and four for two fan motors).
<3> Remove the connector mounting screws (two and four for the 300-mm-wide model).
connector, etc.
Sheet metal mounting screws
Fan motor Fan motor Fan motor

Connector mounting screw mounting screw Connector mounting screw mounting screw Connector mounting screw mounting screw
Air blow Air blow Air blow

direction direction direction
60 mm wide/90 mm wide 150 mm wide 300 mm wide
[βi series]
Replace the fan motor, according to the procedure shown in the figure below.
connector, etc.
Fan motor mounting notch Air blow direction

Fan connector
Fan unit
Fan unit
(2) Pull the fan unit
(1) Push the hooks to set White Black Red
upward.
the fan unit loose.
Top view of the amplifier

Air blow direction Be careful about the
(4) Lift the fan unit connector key direction.
Fan connector
toward you.
(1) Pull up the fan

connector to
remove it.
(3) Set the fan unit Air blow

(2) Push down direction
the fan unit loose.
to get it off
(1) Remove four M4
the hooks.
screws.
Fan unit (2) Pull out the fan

unit.
βiSV4, 20 (internal fan) βiSV40, 80 (internal fan) βiSV40, 80 (external fan)
- 22 -
1.4 REPLACING BATTERY FOR ABSOLUTE PULSECODERS
1.4.1 Overview
• When the voltage of the batteries for absolute Pulsecoders becomes low, alarm 307 or 306 occurs, with the following
indication in the CNC state display at the bottom of the CNC screen.
Alarm 307 (alarm indicating the voltage of the battery becomes low) :
The indication "APC" blinks in reversed display.
Alarm 306 (battery zero alarm) :
The indication "ALM" blinks in reversed display.
• When alarm 307 (alarm indicating the voltage of the battery becomes low) occurs, replace the battery as soon as possible. In
general, the battery should be replaced within one or two weeks, however, this depends on the number of Pulsecoders used.
• When alarm 306 (battery zero alarm) occurs, Pulsecoders are reset to the initial state, in which absolute positions are not
held. Alarm 300 (reference position return request alarm) also occurs, indicating that reference position return is required.
• In general, replace the batteries periodically within the service life listed below.
- A06B-6050-K061 or D-size alkaline dry cells (LR20) : Two years (for each six-axis configuration)
- A06B-6073-K001 : Two years (for each three-axis configuration)
- A06B-6114-K504 : One year (for each three-axis configuration)
NOTE
The above values indicate the estimated service life of batteries used with FANUC absolute Pulsecoders.
The actual battery service life depends on the machine configuration based on, for example, detector types.
For details, contact the machine tool builder.
1.4.2 Replacing Batteries

To prevent absolute position information in absolute Pulsecoders from being lost, turn on the machine power before replacing
the battery. The replacement procedure is described below.
<1> Ensure that the power to the servo amplifier is turned on.
<2> Ensure that the machine is in the emergency stop state (the motor is inactive).
<3> Ensure that the DC link charge LED of the servo amplifier is off.
<4> Detach the old batteries and attach new ones.
The replacement of the batteries in a separate battery case and the replacement of the battery built into the servo amplifier are
described below in detail.
WARNING
• The absolute Pulsecoder of each of the αi/αi S series servo motors and the βi S series servo motors (βi
S0.4 to βi S22) has a built-in backup capacitor. Therefore, even when the power to the servo amplifier is off
and the batteries are replaced, reference position return is not required if the replacement completes within
less than 10 minutes. Turn the power on and replace the batteries if the replacement will take 10 minutes or
more.
• To prevent electric shock, be careful not to touch metal parts in the power magnetics cabinet when replacing
the batteries.
• Because the servo amplifier uses a large-capacitance electrolytic capacitor internally, the servo amplifier
remains charged for a while even after the power is turned off. Before touching the servo amplifier for
maintenance or other purposes, ensure your safety by measuring the residual voltage in the DC link with a
tester and confirming that the charge indication LED (red) is off.
• Be sure to replace the batteries with specified ones. Pay attention to the battery polarity. If a wrong type of
battery is used or a battery is installed with incorrect polarity, the battery may overheat, blow out, or catch
fire, or the absolute position information in the absolute Pulsecoders may be lost.
• Ensure that the battery connector is inserted in the correct position.
- 23 -
1.4.3 Replacing the Batteries in a Separate Battery Case
Use the following procedure to replace the batteries in the battery case.
<1> Loosen the screws on the battery case and detach the cover.
<2> Replace the batteries in the case (pay attention to the polarity).
<3> Attach the cover to the battery case.
Battery case (with a cover)

A06B-6050-K060
Batteries
Four A06B-6050-K061 batteries or
D-size alkaline dry cells
CAUTION
• Four D-size alkaline dry cells (LR20) that are commercially available can be used as batteries. A set of four
A06B-6050-K061 batteries is optionally available from FANUC.
• Replace all the four batteries with new ones. If old and new batteries are mixed, the absolute position
information in the absolute Pulsecoders may be lost.
1.4.4 Replacing the Battery Built into the Servo Amplifier

Use the following procedure to replace the special lithium battery.
<1> Detach the battery cover.
<2> Replace the special lithium battery.
<3> Attach the battery cover.
CAUTION
• Purchase the battery from FANUC because it is not commercially available. It is therefore recommended that
you have a backup battery.
• When the built-in battery is used, do not connect BATL (B3) of connector CXA2A/CXA2B. Also, do not
connect two or more batteries to the same BATL (B3) line. These connections are dangerous because
battery output voltages may be short-circuited, causing the batteries to overheat.
• Install the battery in the servo amplifier in a direction that allows slack in the cable. If the battery cable is
under tension, a bad connection may occur.
• If the +6 V pin and 0 V pin are short-circuited, the battery may overheat, blow out, or catch fire, or the
absolute position information in the absolute Pulsecoders may be lost.
• When inserting the connector, align it to the connector pins.
[Connecting the battery]

The battery for the βiSV4 and βiSV20 series amplifiers is mounted in the battery case on the underside of each of the amplifiers.
The battery for the other βi series amplifiers and the αi series amplifiers is mounted at the front of each of the amplifiers.
- 24 -
[αi series][βi series βi SV40, βi SV80] [βi series βi SV4, βi SV20]
Insertion direction Cable side Insertion direction

Cable side
Red: +6 V Red: +6 V
Connector Black: 0 V Connector Black: 0 V
CX5X CX5X
Battery
+6 V Battery case +6 V
0V Battery 0V
Battery case
[Battery sets and outlines]

Battery case
Battery ordering Manufacturer
Applicable servo amplifier ordering drawing Outline
drawing number model number
number
BR-2/3AGCT4A αi series 60/90 mm width A06B-6114-K505
A06B-6114-K504 (Panasonic) αi series 150/300 mm width A06B-6114-K506
(Note) βi series βi SV
A06B-6114-K505
(two-axis model)
BR-AGCF2W βi series βiSV4, βiSV20 A06B-6093-K002
A06B-6093-K001
(Panasonic) βi series βiSV40, βiSV80 A06B-6093-K002
NOTE
When an old type BR-CCF2TH battery is used, order a battery case that accommodates battery
A06B-6114-K504.
Used batteries
Old batteries should be disposed as "INDUSTRIAL WASTES" according to the regulations of the country or autonomy where
your machine has been installed.
- 25 -
FANUC Series 16i/160i/160is/18i/180i/180is/21i/210i/210is-MODEL B AINTENANCE MANUAL
Spec. No.
B-63525EN/02
/ Version

Correct, Del. Date
Basic
Function
Optional
Function
Unit
Maintenance
Parts
The section 5.12 and NOTE in APPENDIX C.2.1 are added.
Notice
Correction
Another
TITLE
03 10/02/25 Y.Sone 2,4/4
02 06/07/14 ANDO 2,3/4 Noda MAINTENANCE MANUAL
DRAW. NO
CUST.
01 06/06/13 ANDO New issue Noda B-63525EN/02-07
“The option information file” is added as the section 5.12.
5.12 The option information file
FANUC Series 16i/18i/21i-MODEL B is applied to the “FANUC REMOTE OPTION SYSTEM”,
from July, 2006, and the setting method of option parameters is changed.
Before this is applied, as the option parameters are stored in the SRAM, the option
parameter will be lost in case the SRAM data is broken.
After the setting method of the option parameters is changed, the option parameter will not
be lost, as the option parameters are stored in the option information file (file name: “OPRM
INF”) in the FROM.
In case of applied series, “OP” is printed behind the following spcification number of Basic
units printed on the nameplate. Please refer to the next page.
MODEL BASIC UNIT
A02B-0281-B600,B602, B603, B604
A02B-0281-B801,B803
Series 18i/180i/180is-MB5 A02B-0297-B500,B502, B503, B504
A02B-0297-B600,B602, B603, B604
A02B-0297-B801,B803
A02B-0283-B600,B602, B603, B604
A02B-0283-B801,B803
Series 21i/210i/210is-B A02B-0285-B500,B502
A02B-0285-B600,B602
A02B-0285-B801,B803
The note in the restoration of the option information file

1) Please also back up the option information file (file name: “OPRM INF”) in the FROM, when
you back up the SRAM memory and the user files. This is for easy recovery in case of data
loss.
2) If once the option information file is restored, P/S alarm No.5523 (WAITING THE OPTION
CERTIFICATION) occurs when the power is turned on. Then, the certification of the option
parameters by FANUC Service is required within the expiration date (30 days (720 hour)
after Alarm occures.).
(The P/S alarm No.5523 can be canceled by reset within the expiration date.)
TITLE
03 10/02/25 Y.Sone Alter this page

DRAW. NO. CUST.
02 06/07/14 ANDO Modify part of 2 B-63525EN/02-07
Confirmation of NC with capability of software option setting
“OP” is printed behind the specification number of Basic units printed on nameplate for unit.
Nameplate for unit in LCD mounted type 16i series CNC
Example of nameplate for unit

TYPE A02B-0281-B500 OP NO. E06700001
DATE 2006-07 C US
FANUC LTD M ADE IN JAPAN

Nameplate for unit
Nameplate for unit in Stand-alone type 16i series CNC
Example of nameplate for unit stick on the side of Basic units

TYPE A02B-0281-B801 OP NO. E06700001
DATE 2 0 0 6 - 0 7 C US
FANUC LTD M ADE IN JAPAN
Nameplate for unit

TYPE
A02B-0281-B801 OP
NO. E06700001
Example of nameplate for unit stick on the front of Basic units
TITLE
DRAW. NO. CUST.

02 06/07/14 ANDO Add this page B-63525EN/02-07
NOTE is added in APPENDIX C.2.1 “SYSTEM DATA LOADING Screen”.
C.2.1 SYSTEM DATA LOADING

Screen
NOTE
Option parameters of CNC applied to the “FANUC REMOTE OPTION SYSTEM” are stored
in the option information file (File name : "OPRM INF") in FROM of CNC. If this file is alternated,
then option parameter setting will be changed, and the certification of the option parameters by
FANUC Service will be required.
TITLE
CUST.
03 10/02/25 Y.Sone Alter NOTE DRAW. NO. B-63525EN/02-07

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ADDITIONAL INFORMATION

Alarm for FANUC SERVO MOTOR β series I/O Link Option

１．Type of applied technical documents

FANUC Series 16i/18i/21i/20i/160i/180i/210i – MODEL A MAINTENANCE MANUAL

Optional ALARM FOR FANUC SERVO MOTOR β series Add Immediate

16i/18i/21i/20i/160i/180i/210i– MODEL A MAINTENANCE MANUAL),(FANUC Series

01 020228 DRAW B-63005EN/02-2, B-63525EN/02-1

EDIT DATE DISIGNE APPROV. DESCRIPTION FANUC LTD SHEET 1/8

Number Alarm type

Program or setting alarms (PS alarms)

16i/18i/21i/20i/160i/180i/210i– MODEL A MAINTENANCE MANUAL),(FANUC Series

DRAW B-63005EN/02-2, B-63525EN/02-1

EDIT DATE DISIGNE APPROV. DESCRIPTION FANUC LTD SHEET 2/8

Pulse coder alarms

16i/18i/21i/20i/160i/180i/210i– MODEL A MAINTENANCE MANUAL),(FANUC Series

DRAW B-63005EN/02-2, B-63525EN/02-1

EDIT DATE DISIGNE APPROV. DESCRIPTION FANUC LTD SHEET 3/8

16i/18i/21i/20i/160i/180i/210i– MODEL A MAINTENANCE MANUAL),(FANUC Series

DRAW B-63005EN/02-2, B-63525EN/02-1

EDIT DATE DISIGNE APPROV. DESCRIPTION FANUC LTD SHEET 4/8

16i/18i/21i/20i/160i/180i/210i– MODEL A MAINTENANCE MANUAL),(FANUC Series

DRAW B-63005EN/02-2, B-63525EN/02-1

EDIT DATE DISIGNE APPROV. DESCRIPTION FANUC LTD SHEET 5/8

16i/18i/21i/20i/160i/180i/210i– MODEL A MAINTENANCE MANUAL),(FANUC Series

DRAW B-63005EN/02-2, B-63525EN/02-1

EDIT DATE DISIGNE APPROV. DESCRIPTION FANUC LTD SHEET 6/8

16i/18i/21i/20i/160i/180i/210i– MODEL A MAINTENANCE MANUAL),(FANUC Series

DRAW B-63005EN/02-2, B-63525EN/02-1

EDIT DATE DISIGNE APPROV. DESCRIPTION FANUC LTD SHEET 7/8

I/O link alarm

16i/18i/21i/20i/160i/180i/210i– MODEL A MAINTENANCE MANUAL),(FANUC Series

DRAW B-63005EN/02-2, B-63525EN/02-1

EDIT DATE DISIGNE APPROV. DESCRIPTION FANUC LTD SHEET 8/8

1.Type of applied technical documents

FANUC Series 16i/18i/21i/160i/180i/210i/160is/180is/210is-MODEL B

01 Mar.17 ’03 Newly Registered No. B-63525EN/02-2

EDT. DATE DESIGN DESCRIPTION PAGE 1/9

01 Mar.17 ’03 Newly Registered No. B-63525EN/02-2

EDT. DATE DESIGN DESCRIPTION PAGE 2/9

1.Type of applied technical documents

FANUC Series 16i/18i/21i/160i/180i/210i/160is/180is/210is - MODEL B

Ed. Date Design Description Sheet 1/4

described at “APPENDIX.F.3.2.1 Functions on the IPL screen”.

Ed. Date Design Description Sheet 2/4

Corresponding MDI key

Ed. Date Design Description Sheet 3/4

Ed. Date Design Description Sheet 4/4

1.Type of applied technical documents

FANUC Series 16i/18i/21i/160i/180i/210i/160is/180is/210is - MODEL B

Basic Correction of “8.9 ERROR MESSAGES” Correct Immediately

Ed. Date Design Description Sheet 1/7

8.9.1 EMB_ETH MASTER CTRL LOG Screen

OWN IP ADDRESS IS NOTHING

OWN IP ADDRESS(%s) IS INVALID

SUBNET MASK IS NOTHING

SUBNET MASK(%s) IS INVALID

ROUTER IP ADDRESS(%s) IS INVALID

TCP PORT NUMBER(%d) IS INVALID