K575XD Turbo Sputter Coater

Instruction Manual

For technical and applications advice plus our on-line shop for
spares and consumable parts visit www.quorumtech.com
K575XD Manual-Iss8

Quorum Technologies Ltd

South Stour Avenue
Ashford
Kent
TN23 7RS Tel: +44 (0) 1233 646332
UK Fax: +44 (0) 1233 640744
Email: [email protected]
Website: http:///www.quorumtech.com

For further information regarding any of the other products designed and manufactured by Quorum
Technologies, contact your local representative or directly to Quorum Technologies at the address
above.

C E Declaration:
This Equipment of this Design and manufacture and marked CE, conforms to the requirements of
the European Directives EMC 89/336/EEC & LVD 73/23/EEC.

This Equipment will “fail safe” in the presence of excessive RF, Electrostatic Discharge or Mains
Transients. While a loss of function could occur under extreme circumstances the Equipment’s
operation will be fully recoverable under normal operating conditions.

Mains Lead.

This Equipment must be Earthed and fitted with the correct lead for the country of
operation. This will normally be achieved from the correct mains supply socket

Earth Connector.

This Equipment is normally supplied from 3-pin supply including Earth. If only 2-
pin supply is available a separate Earth must be fitted. The supplementary Earth
stud can be used to facilitate this requirement.

Output:

This is for the pump supply only and is at the mains voltage at a maximum of
8Amps.

Disclaimer

The components and packages described in this document are mutually compatible and
guaranteed to meet or exceed the published performance specifications. No performance
guarantees, however, can be given in circumstances where these component packages are used
in conjunction with equipment supplied by companies other than Quorum Technologies Ltd.

Quorum Emitech is a wholly owned business of Quorum Technologies Limited. Registered offices Unit 19 Charlwoods
Road, East Grinstead, West Sussex. RH19 2HL. Registered in England and Wales, company No. 4273003.

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K575XD Manual-Iss8

INDEX

1. DESCRIPTION ............................................................................................................................................. 4
2. INSTALLATION .......................................................................................................................................... 5
2.1 Preliminary Checks............................................................................................................................. 5
2.2 Connections. ....................................................................................................................................... 5
3. Operation ....................................................................................................................................................... 7
3.1 Controls: Refer to Front Panel Diagram Fig 1 ................................................................................... 7
3.2 Settings ............................................................................................................................................... 7
3.3 Initial Operating Checks ..................................................................................................................... 8
3.4 Sequence ............................................................................................................................................. 9
3.4.1 Start............................................................................................................................................. 9
3.4.2 Pumping To High Vacuum ......................................................................................................... 9
3.4.3 Pump Hold ................................................................................................................................ 10
3.4.4 Bleeding Gas Into Chamber ...................................................................................................... 10
3.4.5 Cleaning Oxidised Target ......................................................................................................... 10
3.4.6 Coating Now ............................................................................................................................. 11
3.4.7 Coating Finished, completing the cycle. ................................................................................... 11
4. SERVICE AND MAINTENANCE ............................................................................................................. 12
4.1 Maintenance...................................................................................................................................... 12
4.1.1 To Change Target(s). ................................................................................................................ 12
4.2 Service .............................................................................................................................................. 13
4.3 Turbo Pump ...................................................................................................................................... 14
5. SPARES AND ACCESSORIES.................................................................................................................. 15
6. APPENDICES ............................................................................................................................................. 16
6.1 Front Panel diagram (Figure 1)......................................................................................................... 16
6.2 Rear Panel diagram (Figure 2) .......................................................................................................... 17
6.3 Default settings ....................................................................................................................................... 19
6.4 Electrical Supplies World-Wide ............................................................................................................. 20
6.5 Fuses For The K575XD .......................................................................................................................... 21
6.6 Pump plug wiring.............................................................................................................................. 22
6.7 Sputtering Deposition Rate ............................................................................................................... 23
7 SUPPLEMENT (FOR OPTIONS)............................................................................................................... 25
7.1 Film Thickness Monitor F.T.M. (Option) ........................................................................................ 25
7.1.1 Parameters................................................................................................................................. 25
7.1.2 Operation .................................................................................................................................. 25
7.2 Vacuum Shutdown (Option) ............................................................................................................. 26
7.3 Twin Flow meter. (Option) .............................................................................................................. 26

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K575XD Manual-Iss8

1. DESCRIPTION

• The K575XD System employs Dual magnetron target assemblies, which enhance the efficiency
of the process using low voltages, and giving a fine grain, cool sputtering.

• An integral shutter and stage assembly is fitted as standard, which allows a sputter cleaning
and the sputter coating cycle to be carried out sequentially while maintaining the vacuum.

• It can be used to sputter coat targets such as Gold, and also targets that may need pre-cleaning
for the removal of oxide layers, such as Chromium.

• K575XD features a rotating sample table / shutter support arm which ensures even depositions.
This method allows standard targets to be utilised, and avoids the necessity of special large
profile targets.

• It features a turbo-molecular pump backed by a rotary vacuum pump.

• The Instrument is fitted with a 54mm diameter quick-change targets giving optimum
consumable cost performance. Alternative target materials are available.

• The integrated Instrument panel and plug-in electronics maximise 'up-time' and, with user-
friendly designs, ensures satisfactory multi-user discipline.

• The sputtering parameters for each target can be pre-set, including the gas bleed needle valve,
which has electromagnetic valve back-up.

• The independent vacuum pump is controlled by the instrument throughout the fully automatic
coating cycle.

• The system can also be fitted with a film thickness monitor (FTM) as an "optional extra" for
certain applications.

• The system can also be fitted with a vacuum shutdown option allowing the instrument to be
pumped down and switched off, with the chamber left under vacuum.

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K575XD Manual-Iss8

2. INSTALLATION

It is important that this equipment is installed and operated by skilled personnel in accordance with
these Instructions. Failure to do so may result in damage, and impair protection provided. 'If in
doubt - ASK'.

A suitable location should be provided for the unit - either operated on a bench or the recommended
trolley. The total weight of the system is 27kg.
The system operating environment ambient temperature range is 15ºC to 25ºC in a non-condensing
relative humidity of not more than 75%. Sufficient ventilation is required, and positioning should be
out of direct sunlight. The system is rated for continuous operation other than those supplies
specified. See Section 3.1

2.1 Preliminary Checks

Remove Instrument from packing and place on appropriate operational position. Carry out visual
inspection for any signs of transit damage. Remove Accessories Pack, and check contents against
K575XD Accessories Pack shipping list.

Ensure that all areas of the Instrument are free of loose packaging material. Check specifically the
instrument chamber, glass cylinder, and gaskets. (Do not use vacuum grease on gaskets).

Where a vacuum pump has been supplied, carry out preliminary checks in accordance with
manufacturers recommendations. (Refer to: Appendix 6 for pump plug wiring.)
NOTE: If you are using existing or alternative vacuum pump, and have any difficulty with
connections, please advise.

WARNING: This equipment can produce high voltages and high vacuums in its
operation.

2.2 Connections.
Connections should only be made in accordance with Instructions.

UNDER NO CIRCUMSTANCES SHOULD ANY OTHER CONNECTIONS OR OUTLETS/INLETS

BE USED FOR ANY OTHER EQUIPMENT OR SERVICES. (Refer to: Rear Panel Diagram Fig 2.)

Title Function

Power Inlet / Main power inlet socket, with integral on/off switch and
Power on rocker Switch fuseholder. For Fuse ratings - See Appendix 6.2
Power out to pump controlled by Instrument.
If the pump has it’s own ON/OFF switch, ensure that this is in
Pump Electrical Supply Outlet
the ON position so that the control can be performed by the
instrument
Argon Gas Inlet Process gas inlet supply from low pressure regulator

Nitrogen Gas Inlet Pre-regulated purging gas inlet supply.

Vacuum Outlet Vacuum connection from turbo pump to backing pump

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K575XD Manual-Iss8

NOTES:

1. For full connection details of optional units where provided please refer to separate instructions.
2. Any other items on rear panel not listed are for common manufacturing and are not available for
this Instrument.

NOTE:

A single-phase ac supply with Earth is required - selected to the correct voltage for the country of
operation, either nominal 230V or nominal 115V. The voltage and frequency range is:

NOMINAL 240 MAX. CURRENT 10A 200 - 264V 47Hz TO 63Hz

NOMINAL 120 MAX. CURRENT 20A 90V - 132V 47Hz TO 63Hz

Carry out process gas connections to rear panel (Refer to: Appendix 6.1, Figure 2) with tubing and
connectors provided. The connector is push-fit and will 'snap' into a locked position. It can be
released by depressing the metal tongue.

Argon gas is recommended at a nominal pressure of 0.7bar (10psi) for sputtering. Nitrogen gas is
recommended at a nominal pressure of 0.7bar (10psi) for purging.

NOTES:

1. If only Argon is available then a 'T' piece should be used to connect both gas inlets. (It is NOT
recommended to purge with air).
2. The unit is fitted with an internal pressure regulator inside the unit on the argon, which is set at
0.35bar (approx. 5psi). However it is still necessary to provide the regulated input for the gas at
0.7bar (approx. 10psi).

The electrical input to the instrument is made with the power lead provided. The instrument
connection is standard, and the lead is fitted with the appropriate plug for the country of operation.
Ensure the plugs are firmly located.

Check the voltage is correct for the country of operation, which should correspond to the voltage
label on the Instrument. The appropriate electrical supplies for countries are given in Appendix 6.3.

The vacuum connection is made by 1.5metre length of vacuum hosing. This is a push-on fit to the
Instrument. See Section 6.1, Figure 3: Vacuum hose connections. Ensure that this is firmly in
place to the full length of the vacuum connector.

NOTE:

If you are using existing or alternative vacuum pump, and have any difficulty with connections,
please ask for advice. For rotary pump plug wiring refer to diagram section 6.6.

If the instrument is NOT going to be vented into an extraction system, then an Oil Mist Filter with
metal adapter should be fitted to outlet of vacuum pump. Check that the vacuum pump is filled with
correct oil. If the vacuum pump is fitted with an on/off switch, ensure that it is left in the 'on' position,
as the instrument will carry out recommended control.

As the K575XD is able to coat two target materials sequentially the default setting is with an
oxidising target fitted to the right hand target position and noble to the left this may be overridden.

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K575XD Manual-Iss8

when setting coating parameters and oxidising or noble targets may fitted in either position.

3. Operation

3.1 Controls: Refer to Front Panel Diagram Fig 1

Title Function

Start Non-latching switch starts the instrument cycle

Non-latching switch, terminates the instrument cycle or parameter

Stop
editing, or when idle initiates a chamber purge period

Enter Non-latching button used to enter new settings.

Used to increase or decrease a setting i.e. current, time etc, or to

Up
and Down  Arrows
change the current option from a menu of items

This is a latching switch mounted at the front of the instrument

Emergency stop button
and is operated by pressing at any time. It cuts the power to the
(Option)
instrument. To reset the switch it must be pulled up

When the power is switched on at the rocker switch located on rear panel of Instrument.
and the instrument hardware and software has been initialised the main opening screen will be
displayed, which is shown below.

Press ENTER to change parameters

Press START to run when ready

3.2 Settings
It is possible for the user to change some of the parameters, which affect the running of the
instrument. Pressing the ENTER key from the opening menu will enter the parameter select menu.
The display will look similar to that below. The settings are subdivided into those that affect the
sputtering directly i.e. sputter time and sputter current etc., FTM parameters (for those instruments
that are not fitted with this option ‘FTM enabled’ is the only item of interest and this should be set to
Disabled), and the Miscellaneous parameters which include Stage rotate enable etc. A full list of
the settings that can be changed, their default values and the menu they appear in can be seen in
the appendices of this document.

Press ENTER to change parameters

Press START to run when ready
> Sputter Coating < Miscellaneous
FTM
Assuming that it is required to change the sputter current, the ENTER key is pressed to select the
item highlighted by the arrows. The required item to be changed can be accessed by stepping
through the parameters using the ENTER key. When the required item is shown on the display use
the UP or DOWN arrow keys to change as desired.

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K575XD Manual-Iss8

The display will look like that below

UP or DOWN key to ALTER

ENTER to accept, STOP to return

Cycle Type manual multi target

The parameters have pre-programmed maximum and minimum values. If say the maximum is
reached and the UP key is pressed again the value will rollover to the minimum, and vice-versa.
When the required new value has been reached press the ENTER key to accept it. At any time it is
possible exit the change parameter menu back to the opening screen by pressing the STOP key.
Any parameters that are changed will retain their new value in an internal battery backed memory
when the instrument is switched off.

3.3 Initial Operating Checks

These should be made having become familiar with the controls. Refer To:
6.1 Front Panel diagram (Figure 1). For the first run, it is best if the instrument is tested with the
factory set default parameters.

From the top-level menu it is possible to check the purge gas by pressing stop button. Check input
pressure remains at 0.7bar (10psi). The process gas cylinder output gauge will drop slightly. Now
try and run a test cycle by pressing the start button. If the instrument has been specified to have
vacuum shutdown capability then the screen will produce a menu allowing the choice of running a
sputter cycle or a vacuum shutdown cycle (as shown below), otherwise the instrument will
immediately commence running the cycle

UP or DOWN key to ALTER

ENTER to accept, STOP to return
> Sputter Coat <
Vacuum Shutdown

When this display is shown the initial choice always defaults to sputter coating. Press ENTER to
accept this and allow unit to run through a cycle. The actual sections of the cycle are described in
the next section.

When the instrument has pumped down and the valve is opened to bleed in the process gas, note
-2 -3
the vacuum reading, a vacuum between 1x10 and 5x10 should be achieved by the time the
-3
sputter clean cycle commences, approximately 7x10 mbar is ideal. If necessary adjust needle
valve (located at the rear of the box on the top plate) to achieve this unless using twin flow meter
option then see section 7.3. The vacuum may fall slightly to mbar during coating.

Observe Instrument completes the full automatic cycle, and afterwards vents the chamber
sufficiently so that the chamber lid can be lifted.

NOTE:

The sputter cycle is rated for a maximum 150mA for 4 minutes, with a duty cycle of 50% (off time - 4
minutes). The default settings of 125mA and 30 seconds should give sufficient coatings of
Chromium for most SEM work. See also deposition chart section 6.7

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K575XD Manual-Iss8

3.4 Sequence

The type of cycle run depends on two settings. The first ,the Cycle Type option, in the
sputtering menu has settings ’ manual multi target’, ‘Auto target A’ ,‘Auto Target B’, ’Auto target A-B’
and ‘Auto target B-A’.
If it is set to normal cycle then a standard automatic cycle is used. The exact type of cycle
and the target used depends on the next parameter ‘Target A type’ or @target B type’ with options
of noble or oxidising. (NOTE this variable is ignored in twin head cycle mode).

3.4.1 Start

The rotary pump is started to ‘rough pump’ the chamber for 10 seconds, then the purge valve will
open to flush the chamber with gas for 25 seconds. After the flush time the gas valves will close
and pumping to high vacuum will start.

3.4.2 Pumping To High Vacuum

Pumping will commence with the rotary pump switching on; after five seconds the turbo pump will
start. The display will look like that shown below.
NOTE: If peltier cooling of the sputter heads is fitted and enabled, cooling will commence at this
point, and the sensed temperature will be displayed as shown below.

Pumping to 5x10-1 mbar

Vacuum 9x10+1 mbar Turbo Speed 35 %

When the target vacuum has been reached pumping will continue for a further 3 minutes 30
seconds, to improve the vacuum and allow the turbo pump to reach full speed. The display will
show a countdown of the remaining time as shown below.

Improving Vacuum
Time Remaining: 00:02:47

Vacuum 9x10+1 mbar Turbo Speed 35 %

When the full 3 minutes, 30 seconds has elapsed, if pump hold is enabled this is executed. (See
Section 3.4.3)
Otherwise if running a normal auto cycle the cycle continues with gas bleed. By this time, the
vacuum should have reached “High Vacuum”, depending on the type of specimen.
In auto mode the cycle will perform the same operations as per the twin head mode without user
intervention and for the single pre-selected target material.

If running a dual head cycle then a menu is presented prompting for a choice of which target to use

UP or DOWN key to ALTER

ENTER to accept, STOP to return
> Noble Cycle <
Oxidising Cycle

Use the up and down arrow keys to select the required target and the press ENTER. If you wish to
abort the cycle press the STOP key
If an FTM is used then you will be prompted to enter the required termination thickness at this point.
The FTM will then be programmed with the terminate value and the stored density for the chosen
target.

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K575XD Manual-Iss8

At this point the bleed cycle commences (See Section 3.4.4) the bleed valve opens and time is
allowed for the vacuum to stabilise.
After this, if a noble target material cycle has been selected the shutter is closed to place the
specimen under the noble target and the shutter under the oxidising target.

At this point, if a noble target had been chosen the sputtering will take place.

If an oxidising target had chosen the target will be cleaned by sputtering onto the shutter After
cleaning the target the shutter will now rotate to place the specimen under the oxidising target ready
for the sputtering to take place. (See Section 3.4.5)

After an oxidising sputter operation has taken place the shutter is moved back under the oxidising
target.
After the sputtering process has completed the following screen will be shown. This allows the
instrument to reset itself ready for the next coat cycle. The time for this is 3 minutes, and is not
programmable.

Preparing for next coat cycle

Time Remaining 00:02:21 H:M:S

If you wish to abort the process, you can do so at this point then you can do so by pressing the
ENTER key.

When this time has expired the target select menu is displayed again ready for the next coating.

These can be repeated as desired.

3.4.3 Pump Hold

Pump hold allows pumping to continue for a pre-determined time or until a key is pressed. When a
key press is detected the cycle will then proceed as normal

Pump Holding, Press a key to continue

Time Remaining: 03:05:47

Vacuum 9x10+1 mbar Turbo Speed 35 %

The maximum time that pump hold can be set for is 8 hours.

3.4.4 Bleeding Gas Into Chamber

At this point the process gas valve opens and bleeds argon into the chamber through the needle
-
valve located on the top plate. If necessary this should be adjusted to give approximately 7x10
3
mbar. The gas bleeds for a time to allow the vacuum to stabilise before the plasma comes on.
The factory default for this time is 20 seconds. If the cycle is for a noble target material the coat
cycle commences straight after the bleed gas period.

3.4.5 Cleaning Oxidised Target

With the shutter in place the plasma cleans the target. The factory default setting for the current is
125mA and for a time of 30 seconds. The coating current is measured and displayed to the nearest
5mA value.

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K575XD Manual-Iss8

Cleaning Targets at 150mA

Vac: 7x10-3 mbar Turbo 100%
Current Time Remaining.
125 00:28
Once the target has been cleaned, the shutter opens; moving clear of the targets and the coat cycle
commences.

3.4.6 Coating Now

The argon gas continues to bleed in the vacuum may drop slightly. The factory default settings for
coating are 125mA for 30 seconds. The display will look like that below.

Coating Sample at 150 milliamps

Vac: 7x10-3 mbar Turbo 100%
Current Time Remaining.
125 00:28

If enabled the stage will rotate while the sample is being coated. If the FTM option fitted and is
enabled the current sample deposition will be displayed, there is a maximum time limit allowed for
the desired deposition to be reached. If the deposition is not reached in this allowed time an error
will be shown at the end of the cycle.

3.4.7 Coating Finished, completing the cycle.

When coating time period has finished plasma, the process gas, and the turbo pump will switch off
and, if fitted the peltier head cooling will also switch off. After a 10 seconds delay which allows for
the turbo to run down slightly, the rotary pump switches off, then the purge valve will pulse on and
off to help the turbo pump to slow down before opening fully to vent the chamber, approximately 5
seconds later. This pulsing is at 20% duty cycle.
NOTE: Sputtering rates will vary for different applications and changes in vacuum and target
condition. Typically the rate at 125mA is 15nm per minute and this can be used to give estimates of
thickness. See also Deposition Chart Section 6.7.

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4. SERVICE AND MAINTENANCE

4.1 Maintenance

Procedure Monthly/Weekly

Check and clean the glass chamber and the 'L' gaskets as required, using Lint-
free tissue and foam cleanser, or similar. Monthly
Do not use vacuum grease on 'L' gaskets.

Check the condition of the target material. The wear will depend on use. This
Monthly
is mainly over an outer annulus, accounting for some 70% of the surface area.

The Dark space shield should be cleaned regularly to prevent build up of

Weekly
deposited material, which would cause shorting to Earth.

NOTE: A replacement insulator spares kit is available from EM Technologies Ltd.

NOTE: A replacement target exchange service is offered for precious metal recovery. On return of
your used target (Noble Metals only not Chromium), a discount made against your new purchase.

4.1.1 To Change Target(s).

Note the targets themselves may be fragile and may not be attached to a support. Care should be
taken when replacing and centring the new target.

To Access the targets remove the dark space shield by removing the 4 M3 countersunk screws.

See notes on maintenance. It is important the dark space shield does not short against the targets

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K575XD Manual-Iss8

therefore it should be cleaned inside regularly. When re assembling always fix with all four screws.

When changing Targets unscrew the outer metal ring. The target can be removed together with the
backing plate. When reassembling targets always ensure the retaining ring is screwed fully down
there should be a gap of 1.5mm between the target and the dark space shield.

The standard target thickness can be up to 0.3 mm thick depending upon material.
If for example a 1.5mm thick Chromium target is used an spacer for the dark space shield should
be fitted to maintain the 1.5 mm gap. these spacers are provided as part of the accessory pack if
in doubt please contact Emitech.

Procedure Weekly/Monthly

Inspect electrical power cords and plugs for general condition. Regularly

Change oil using 1 litre of supergrade 'A' (See Section 5). 6 Monthly
6 Monthly or more
Check oil mist filter for saturation. (See Section 6.) (This is a disposable
regularly as
plastic filter and cannot be reactivated.)
required.
Check vacuum pump oil level Monthly
Yearly
NOTE: This is a
Replace Turbo Pump Oil Capsule as required depending upon pump type
condition of the
(refer to manufacturers documentation)
Turbo Pump
Warranty
CAUTION: Ensure mains electrical power is off during any maintenance and service activities.
NOTE:
Consumable items can be obtained from Quorum Technologies or approved Distributor. Only
Quorum Technologies recommended items should be used. For technical assistance and advice -
contact Quorum Technologies.

Quorum Technologies,
South Stour Avenue,
Ashford,
Kent TN23 7RS
England.
Tel: +44 (0) 1233 646332
Fax: +44 (0) 1233 640744

**If approved distributor not known - please contact Quorum Technologies direct for details.

4.2 Service
Routine service should not be necessary. In the event of non-operation, carry out the following
checks.

IMPORTANT: Depending on nature of problem, disconnect power cord BEFORE carrying out any
servicing activities.

1. Check power to Instrument, neon on rear should be illuminated.

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K575XD Manual-Iss8

2. Check electronic supplies, LED should be illuminated on the stop or start button.

3. Check fuses, Refer to Appendix 6.2.

4. Check vacuum pump local switch should be in 'on' position.

5. Check chamber seating for vacuum leaks.

6. Check operating conditions of Instrument controls.

7. Check target and connections.

8. Check correct conditions for sputtering have been set.

9. Check all connections.

4.3 Turbo Pump

The instruments may be fitted with a number of alternative turbo pump types. Each type may use a
different drive control and power supply. Refer to manufacturers details supplied with instrument for
more information.

NOTE: Spare items can be obtained from Quorum Technologies or approved Distributor. Only
Quorum Technologies recommended items should be used. For technical assistance and advice -
contact Quorum Technologies.

Quorum Technologies,
South Stour Avenue,
Ashford,
Kent TN23 7RS,
England

Tel: +44 (0) 1233 646332

Fax: +44 (0) 1233 640744

** If approved Distributor not known - please contact Quorum Technologies direct for details.

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K575XD Manual-Iss8

5. SPARES AND ACCESSORIES

The following are available from Quorum Technologies, or your local Distributor, and are featured in
more detail in the current Quorum Technologies Consumables Catalogue. Copies can be sent on
request.

Spares For K575XD Turbo Sputter Coater

Catalogue
Description Quantity
Number
Glass Cylinder 6.5" diameter x 127mm high G6260 Each

Gaskets To Suit G6261 Pair

Oil Mist Filter O7803 Each

Supergrade 'A' Rotary Pump Oil O7802 1 Litre

Quorum Technologies can supply a wide range of target materials and thicknesses. Please
enquire for details.

Useful Accessories For K575XD Turbo Sputter Coater

Catalogue
Description Quantity
Number

Amberclens Foam Cleanser C5427 Each

Conductive Paint A5001 3g Bottle

Silver Loaded Epoxy A5002 2x15g

Cyanoacrylate Adhesive Grade C2 A5003 5x5g

Cyanoacrylate Adhesive Grade C4 A5004 5x5g

Cyanoacrylate 'Superglue' A5005 3g Tube

Double Sided Tape T8803 20mtr Roll

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K575XD Manual-Iss8

6. APPENDICES

6.1 Front Panel diagram (Figure 1)

Figure 1

K575X Front Panel Diagram

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K575XD Manual-Iss8

6.2 Rear Panel diagram (Figure 2)

Voltage
Selector
ARGON FLOW CONTROL

Power On/Off

Power In

ARGON

Pump Outlet

NITROGEN

Figure 2
K575X Rear Panel Diagram

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K575XD Manual-Iss8

6.3 Default settings

Name Menu Default Minimum Maximum Comment
Value Value Value
Cycle Type Sputter Manual N/A N/A
Coating mult target

Target A Type Sputter Noble Oxidising Noble

Coating
Target A Sputter 25 0 150
Current (mA) Coating

Target A Sputter 0:0:30 0:0:0 0:04:0

Sputter Time(h:m:s) Coating
Target A Sputter 1 1 10
No.Cycles Coating
Target B Type Sputter Oxidising Oxidising Noble
Coating
Target B Sputter 150 0 150
Current (mA) Coating

Target B Sputter 0:0:30 0:0:0 4:0:0

Sputter Time(h:m:s) Coating
Target B Sputter 1 1 10
No.Cycles Coating
Pump Hold Enabled Sputter No No Yes
Coating
Pump Hold time Sputter 08:00:00 00:00:00 08:00:00
(h:m:s) Coating
Enable Vacuum Miscellan No No Yes Only enable this
Shutdown eous if the hardware
is fitted to the
instrument
(external)
Use Turbo Pumping Miscellan Yes No Yes
eous
Stage Rotate Disabled Disabled Disabled Disabled

FTM enabled FTM No No Yes This and below

are only shown
Terminate Value A FTM 5.0 0.1 999.9 if the FTM
hardware is
Terminate Value B FTM 5.0 0.1 999.9 fitted and
enabled
Target A Density FTM 19.32 2.70 21.45 (internal)
(Gold) (Aluminium (Platinum)
)

Target A Tool factor FTM 1.0 0.1 10

Target B Density FTM 7.19 2.70 21.45
(Chromium) (Aluminium (Platinum)
)
Target B Tool factor FTM 1.0 0.1 10
FTM Operating FTM Manual Manual Automatic
Mode

There are other parameters, which affect the instrument cycle, however these are not customer
accessible.

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K575XD Manual-Iss8

6.4 Electrical Supplies World-Wide

Country Voltage Frequency

Australia 240V 50Hz

Brazil 115V / 230V 60Hz

Canada 115V 60Hz

Finland 230V 50Hz

France 230V 50Hz

Germany 230V 50Hz

India 230V 50Hz

Ireland 230V 50Hz

Israel 230V 50Hz

Italy 230V 50Hz

Korea (south)_ 230V 50Hz

Japan 115V 50 / 60Hz

Netherlands 230V 50Hz

Norway 230V 50Hz

Pakistan 230V 50Hz

Portugal 230V 50Hz

Scandinavia 230V 50Hz

Singapore 230V 50Hz

Spain 230V 50Hz

Taiwan 115V 60Hz

Turkey 230V 50Hz

United Kingdom 230V 50Hz

United States of America 115V 60Hz

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 K575XD Manual-Iss8

6.5 Fuses For The K575XD

Replaceable Fuses

Main Instrument Inlet (Located External, To Rear Of Unit 115V 15A Slo Blo (1.25" X 0.25") Ceramic*
in mains Inlet Assembly) 240V T10A (1.25" X 0.25") Ceramic

Service Technical Replaceable Only. – The following fuses are not intended to be user changed. This
should only be attempted by a qualified Service Technician.

Instrument Power Supply Internal Fuse 4A 250V

(Located Inside Unit, on Power Supply Module) Cooper Part No. S501
Schurter Part No. SP 0001.1010
Littlefuse Part No. 216004

Peltier PCB 115V T2A (20x5) Ceramic

(Located Inside Unit, on Peltier Drive PCB) 230V T1A (20x5) Ceramic

T10A preferred fuse may be substituted for 10A Slo-Blo fuse - non preferred.

Fuse Standard IEC 127, CEE4.

Fuse Standard CSA C22.2/UL 198G *

Replacement fuses can be supplied by Quorum Technologies, or the approved Distributor**

Quorum Technologies,
South Stour Avenue,
Ashford,
Kent, TN23 7RS,
ENGLAND
Tel: +44 (0) 1233 646332
Fax: +44 (0) 1233 640744

** If approved Distributor not known - please contact Quorum Technologies direct for details.

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K575XD Manual-Iss8

6.6 Pump plug wiring

Pump plug wiring U.S.A and Canada

Green
(Earth)

Black White
(Live or Hot Wire) (Neutral)

Pump plug wiring U.K. and Europe

Green/Yellow
(Earth)

Brown Blue
(Live) (Neutral)

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 K575XD Manual-Iss8

6.7 Sputtering Deposition Rate

Sputtering Deposition Rate Using Gold

(Using Argon @ 1x10-1mbar, target to sample spacing = 30mm)
35

30
Deposition Rate (nm/minute)

25

20

15

10

0
10 20 30 40 50 60 70 80 90 100
Deposition Current (mA)

Sputtering Deposition Rate Using Chromium

(Using Argon @ 1x10-2mbar, target to sample spacing = 30mm)
35

30
Deposition Rate (nm/minute)

25

20

15

10

0
50 60 70 80 90 100 110 120 130 140 150
Deposition Current (mA)

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K575XD Manual-Iss8

K575XD Sputter deposition rate using Aluminium

Using Argon @1x10 -2 mbar target to sample 30mm

20
Deposition Rate

15
nm/Minute

10 Series1

0
66 85 105 120 165
Deposition Current (mA)

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K575XD Manual-Iss8

7 SUPPLEMENT (FOR OPTIONS)

7.1 Film Thickness Monitor F.T.M. (Option)

The FTM option is fitted internally as a PCB module which fits into the lowest board position of
the interconnect PCB rack. The crystal oscillator will be connected internally to this board.

7.1.1 Parameters
The FTM parameters can be changed from the K675XX front panel. These allow the density
of the material to be selected, the desired coating thickness, the tool factor (multiplier) and whether the
FTM mode of operation is automatic or manual.
The method is slightly different from the main parameter editing functions. When editing the
coating terminate thickness or tool factor use the UP or DOWN arrow keys as normal but each digit is
edited separately, using the ENTER key to proceed to the next digit and ENTER again to accept the
final value.
When editing the density, the most commonly used sputtering / evaporating materials are
stored internally and using the arrow keys it is possible to step through each one. When the User
Defined value is reached to edit this figure it is necessary to press either the START and UP key or
START and the DOWN key. On doing this the actual value is edited in the same manner as is the
terminate value, by doing each digit separately.

7.1.2 Operation
The FTM has two modes of operation, Auto mode where the normal timer is overridden and
the FTM stops the coating process when either the desired terminate thickness has been reached, or
the safety time-out limit has been exceeded. This safety time-out is to limit the on-time of the H.T.
supply if for some reason the FTM is not measuring any deposition. The other mode is Manual mode
where the FTM measures and displays the deposition thickness but the normal timer is used to limit
the coating time.
At the beginning of each coating cycle when the FTM is enabled any existing count in the FTM
is reset to zero.

Density
Material 3
g/cm
Aluminium 2.70
Carbon 2.25
Titanium 4.54
Chromium 7.19
Nickel 8.90
Copper 8.96
Silver 10.50
Palladium 12.02
Gold / Palladium (Au/Pd) (60:40 mix) 16.40
Tungsten 19.30
Gold 19.32
Platinum / Palladium (Pt/Pd) (60:40 mix) 19.56
Platinum 21.45
Iridium 22.40
User Defined allowable range 1.00 - 23.00

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K575XD Manual-Iss8

7.2 Vacuum Shutdown (Option)

This option allows the instrument to be pumped down and the chamber left under vacuum. It
involves the fitting of two valves, one valve is fitted after the turbo pump to isolate the chamber, and
the other is fitted to the line between the isolating valve and the rotary pump. This is to allow the
rotary pump to vent so there is no risk of oil being sucked back.

If this option has been ordered then it will be enabled when the instrument leaves the factory. To
initiate this press the START key and the menu below will be displayed.

UP or DOWN key to ALTER

ENTER to accept, STOP to return
> Sputter Coat <
Vacuum Shutdown

Using the arrow keys select the Vacuum Shutdown option and press ENTER. The rotary pump and
turbo pumps will start and the screen below will be displayed.

Pumping to 1x10-0 mbar

Vacuum 9x10+1 mbar Turbo Speed 35 %

Once the vacuum has been reached, the turbo pump, and rotary pumps will be stopped, the
isolating valve will close. After a 1 second delay the anti-suckback valve will open venting the line
between the isolating valve and the rotary pump. The screen display will look like that below.

You may now switch off power

at main switch

When this is displayed the chamber is under vacuum and the power may be switched off.

NOTES:

1. Once this point has been reached no further operations can be performed with the instrument
unless the main power is switched off and then on again.

The Isolating valve is a power to open valve. If for some reason it was required to have access to
the chamber, which was under vacuum, and there was no power, the valve can be operated
manually. This is achieved by removing the access plate (see Rear panel Diagram Fig2) from the
rear panel, and pressing the small grey button located on the valve body until the chamber has
vented.

7.3 Twin Flow meter. (Option)

This option allows two gases to be proportionally mixed and introduced during the sputtering
process. The flow meters are calibrated for Nitrogen but a table of alternative gas flows is available.
Two 200 mm flow meters are mounted on a bracket on the Right hand side of the instrument the
common outlet from these meters is connected to the inlet marked Argon on the rear of the
instrument.
The needle valve at the rear of the instrument should be unscrewed fully anticlockwise so that it has
no effect when using twin flow meters.
It is the responsibility of the user to ensure compatibility of gasses used with these flow meters.

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K575XD Manual-Iss8

Safety information for the return of Preparation Equipment and Accessories.

General Introduction

The employer (user) is responsible for the health and safety of his employees. This also applies to
all those persons who come into contact with the Preparation Equipment and Accessories either at
the user or manufacturer’s premises during repair of service. The contamination of Preparation
Equipment and Accessories has to be declared and the Health and Safety Declaration form
completed.

Health and Safety Declaration

Those persons carrying out repair or service have to be informed of the condition of the
components. This is the purpose of the ‘Declaration of Contamination of Preparation Equipment
and Accessories.’

Despatch

When returning equipment the procedures set out in the Operating Instructions must be followed.
For example:

- Drain the vacuum pumps.

- Neutralise the flushing with gas.
- Remove filter elements.
- Seal all outlets.
- Pack glass components safely.
- Pack loose attachments securely for example stages.
- Seal in heavy-duty polythene or a bag,
- Despatch in suitable transport container.

Return Address:
F.A.O.: The Service Manager,
Quorum Technologies,
South Stour Avenue,
Ashford,
Kent. TN23 7RS.

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K575XD Manual-Iss8
Declaration of Contamination of Preparation Equipment and Accessories.
The repair and/or service of Preparation Equipment and Accessories can only be carried out if a correctly completed declaration
has been submitted. Non-completion will result in delay. The manufacturer reserves the right to refuse acceptance of
consignments submitted for repair or maintenance work where the declaration has been omitted.

This declaration may only be completed and signed by authorised and qualified staff.

1. Description of component 2. Reason for return:

- Equipment type/model: ____________________________ ___________________________________________________

- Code No:. ___________________________________ ___________________________________________________
- Serial No.: ___________________________________ ___________________________________________________
- Invoice No. (if known) ___________________________ ___________________________________________________
- Delivery Date.: (if known)___________________________ ______________________________________________

3. Equipment condition 4. Process related contamination of Equipment/

Accessories.
- Has the equipment been used? Yes/No
- What type of operating medium was used? - Toxic Yes/No
_______________________________________________ - Corrosive Yes/No
- Explosive* Yes/No
- Is the equipment free from potentially - Microbiological* Yes/No
harmful substances? Yes/No - Radioactive* Yes/No
- Other harmful substances Yes/No
(If Yes go to Section 5)
(If No go to Section 4)

* We will not accept any Equipment/Accessories which have been radioactively, explosively, or microbiologically contaminated
without written evidence that such Equipment/Accessories have been decontaminated in the prescribed manner.

Please list all harmful substances, gases and dangerous by-products which have come into contact with the Preparation
Equipment and Accessories.

Trade name Chemical name and Danger class Precautions associated First aid measures in
Product name symbol with substance. the event of an
Manufacturer accident.
1.
2.
3.
4.
5.

5. Legally Binding Declaration.

I hereby declare that the information supplied on this form is complete and accurate. The despatch will be in accordance with
the appropriate regulations covering Packaging, Transportation and Labelling of Dangerous Substances.

Name of Organisation: __________________________________________________________________________________

Address: _____________________________________________________________________________________________

_______________________________________ Post Code: _______________________________

Tel.: _______________________________________ Fax.: _______________________________

Name: _______________________________________ Job Title: ________________________________

Date: _______________________________________ Company Stamp: _______________________________

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