Rem Con 32

F
LEO SEM
Remote Control User’s Guide
RemCon32
LEO SEM
Remote Control User's Guide
RemCon32
Abstract
This document provides a guide to the RS232 Remote Control protocol for LEO-32 software, running on
LE0 1400,1500, EVO, Supra and 1500XB series of SEM's.
This is a restricted document, which is ONLY provided under a confidential disclosure agreement.
All reasonable steps have been taken to ensure that this publication is correct and complete, but should any user
be in doubt about any detail, clarification may be sought from LEO Electron Microscopy Ltd, or their accredited
representative. The information in this document is subject to change without notice and should not be construed
as a commitment by LEO Electron Microscopy Ltd. LEO Electron Microscopy Ltd accepts no responsibility for
any errors that may appear in this document.
Copyright © LEO Electron Microscopy Ltd, Cambridge, England, 1997 - 2004
All rights reserved. The contents of this publication may not be reproduced in any form, or communicated to a
third party without prior written permission of LEO Electron Microscopy Ltd.
Where it applies; Microsoft and MS-DOS are registered trademarks and Windows is a trademark of the
Microsoft Corporation.
Part Number: 885705
Date: 20th February 2004
Issue: 14
Printed in England
Page i
Table of Contents
.
1. INTRODUCTION ....................................................................................................................................... 1
2. PHYSICAL INTERFACE .......................................................................................................................... 2

2.1. COMMAND INTERFACE ........................................................................................................................... 2
3. COMMAND STRUCTURE ....................................................................................................................... 2
3.1. HEADER ................................................................................................................................................. 3
3.2. PARAMETERS ......................................................................................................................................... 3
3.3. TERMINATOR .......................................................................................................................................... 4
3.4. RESPONSE FORMAT................................................................................................................................. 4
4. CONTROL SEQUENCE ............................................................................................................................ 5
4.1. VALID COMMAND ACKNOWLEDGE .......................................................................................................... 5
4.2. INVALID COMMAND ACKNOWLEDGE ....................................................................................................... 5
4.3. SUCCESSFUL COMPLETION REPORT ......................................................................................................... 5
4.4. UNSUCCESSFUL COMPLETION REPORT .................................................................................................... 6
4.5. DEFINITION OF FORMAT .......................................................................................................................... 6
4.6. ABORT COMMAND ................................................................................................................................. 6
4.7. TIMEOUTS .............................................................................................................................................. 6
4.8. STAGE COMMANDS ................................................................................................................................ 6
5. ERROR REPORTING................................................................................................................................ 7
5.1. ABORT BY LEO SEM............................................................................................................................. 7
6. USER INTERFACE .................................................................................................................................... 8
6.1. MAIN WINDOW....................................................................................................................................... 8
6.2. COMMUNICATION SETTINGS ................................................................................................................... 8
6.3. PROPERTIES MENU ................................................................................................................................. 9
6.4. LOGGING REMOTE CONTROL COMMANDS .............................................................................................. 9
6.5. TRANSMIT A TEXT FILE ......................................................................................................................... 9
6.6. PHONE DIALLING .................................................................................................................................... 9
6.7. COMMAND LINE ARGUMENTS ............................................................................................................... 10
6.7.1. Set the Comm Port....................................................................................................................... 10
6.7.2. Open port and minimise on startup ............................................................................................. 10
6.7.3. Other command line parameters ................................................................................................. 10
7. LEO SEM COMMAND SET ................................................................................................................... 11
7.1. NULL COMMAND .................................................................................................................................. 11
7.2. VERSION NUMBER ................................................................................................................................ 11
7.3. ABORT.................................................................................................................................................. 12
7.4. AUTO GUN RUN UP .............................................................................................................................. 12
7.5. BEAM ON/OFF ...................................................................................................................................... 12
7.6. SET EHT .............................................................................................................................................. 13
7.7. REQUEST EHT...................................................................................................................................... 13
7.8. REQUEST GUN STATUS ......................................................................................................................... 13
7.9. BEAM BLANKING ON/OFF .................................................................................................................... 14
7.10. GET BEAM BLANKING STATUS ......................................................................................................... 14
7.11. EMISSION IMAGING........................................................................................................................... 14
7.12. GUN TILT ALIGNMENT...................................................................................................................... 14
7.13. GUN SHIFT ALIGNMENT .................................................................................................................... 15
7.14. AUTO GUN ALIGNMENT SEARCH ...................................................................................................... 15
7.15. AUTO GUN ALIGNMENT PEAK .......................................................................................................... 15
7.16. AUTO GUN ALIGN STATUS ............................................................................................................... 15
7.17. SCAN RATE....................................................................................................................................... 16
7.18. REQUEST SCAN RATE ....................................................................................................................... 16
7.19. FRAME INTEGRATE ........................................................................................................................... 16
Part Number: 885705 / 4 Remote Control User’s Guide
Page ii
7.20. FRAME AVERAGE ............................................................................................................................. 16

7.21. FREEZE ............................................................................................................................................. 17
7.22. REQUEST STORE ACQUISITION / INTEGRATION STATUS .................................................................... 17
7.23. SET STIGMATORS.............................................................................................................................. 17
7.24. SET STIGMATORS EXPLICITLY .......................................................................................................... 17
7.25. AUTO STIGMATION ........................................................................................................................... 18
7.26. AUTO STIGMATE STATUS ................................................................................................................. 18
7.27. SET BRIGHTNESS TARGET ................................................................................................................ 18
7.28. GET BRIGHTNESS LEVEL ................................................................................................................... 18
7.29. SET CONTRAST LEVEL...................................................................................................................... 19
7.30. GET CONTRAST LEVEL ..................................................................................................................... 19
7.31. AUTO BRIGHTNESS ON/OFF.............................................................................................................. 19
7.32. AUTO CONTRAST ON/OFF ................................................................................................................ 19
7.33. SET AUTO BRIGHTNESS / CONTRAST ................................................................................................ 20
7.34. GET AUTO BRIGHTNESS / CONTRAST STATUS................................................................................... 20
7.35. SET MAGNIFICATION ........................................................................................................................ 20
7.36. REQUEST MAGNIFICATION................................................................................................................ 20
7.37. SET FOCUS ....................................................................................................................................... 21
7.38. REQUEST WORKING DISTANCE......................................................................................................... 21
7.39. COARSE AUTO FOCUS ...................................................................................................................... 21
7.40. FINE AUTO FOCUS ............................................................................................................................ 21
7.41. AUTO FOCUS STATUS ....................................................................................................................... 22
7.42. SET DISPLAY MODE ......................................................................................................................... 22
7.43. SET SPOT MODE ............................................................................................................................... 22
7.44. START LINE PROFILE ........................................................................................................................ 22
7.45. NORMAL MODE ................................................................................................................................ 23
7.46. SET ANNOTATION POSITION ............................................................................................................. 23
7.47. SET IMAGE ANNOTATION ................................................................................................................. 23
7.48. CLEAR ANNOTATION ........................................................................................................................ 23
7.49. REQUEST DETECTOR ........................................................................................................................ 24
7.50. REQUEST VACUUM STATUS.............................................................................................................. 24
7.51. SELECT IMAGE SOURCE .................................................................................................................... 24
7.52. REQUEST RECORD SEQUENCE STATUS ............................................................................................. 24
7.53. REQUEST PHOTO NUMBER ............................................................................................................... 25
7.54. INITIALISE STAGE ............................................................................................................................. 25
7.55. STAGE STATUS ................................................................................................................................. 25
7.56. SET STAGE POSITION (XYZ) ............................................................................................................ 26
7.57. REQUEST STAGE POSITION (XYZ).................................................................................................... 26
7.58. SET STAGE POSITION (6 AXES) ......................................................................................................... 26
7.59. REQUEST STAGE POSITION (6 AXES)................................................................................................. 27
7.60. SET STAGE BACKLASH ON/OFF ........................................................................................................ 27
7.61. CENTRE BEAM.................................................................................................................................. 27
7.62. SET BEAM POSITION ......................................................................................................................... 28
7.63. REQUEST PIXEL SIZE ........................................................................................................................ 28
7.64. SET GUN ALIGN ................................................................................................................................ 28
7.65. SET APERTURE ALIGN ...................................................................................................................... 28
7.66. PIXEL NOISE REDUCTION ................................................................................................................. 29
7.67. CONTINUOUS AVERAGE.................................................................................................................... 29
7.68. CLEAR ERROR .................................................................................................................................. 29
7.69. EXTERNAL SCANNING ON/OFF ......................................................................................................... 29
7.70. GET THE EXTERNAL SCANNING STATUS ........................................................................................... 30
7.71. SET DETECTOR ................................................................................................................................. 30
7.72. SPECIMEN CURRENT METER ON / OFF ............................................................................................. 30
7.73. READ PROBE CURRENT .................................................................................................................... 30
7.74. SELECT APERTURE ........................................................................................................................... 31
7.75. GET APERTURE ................................................................................................................................ 31
7.76. SET FILAMENT CURRENT.................................................................................................................. 31
7.77. SET PROBE CURRENT ....................................................................................................................... 31
7.78. LINE INTEGRATE............................................................................................................................... 31
7.79. INITIATE A FAST RECORD SEQUENCE............................................................................................... 32
7.80. INITIATE A SLOW RECORD SEQUENCE ............................................................................................. 32
Remote Control User’s Guide Part Number: 885705 / 4
Page iii
7.81. VARIABLE PRESSURE ON / OFF ........................................................................................................ 32

7.82. SET TARGET PRESSURE .................................................................................................................... 32
7.83. REQUEST VARIABLE PRESSURE STATUS ........................................................................................... 33
7.84. COLUMN CHAMBER VALVE OPEN / CLOSE....................................................................................... 33
7.85. AIRLOCK VENT / PUMP...................................................................................................................... 33
7.86. REQUEST AIRLOCK STATUS .............................................................................................................. 33
7.87. SELECT USER AREA ......................................................................................................................... 34
7.88. READ USER AREA ............................................................................................................................ 34
7.89. CREATE USER AREA......................................................................................................................... 34
7.90. DELETE USER AREA ......................................................................................................................... 34
7.91. APERTURE ALIGNMENT .................................................................................................................... 35
7.92. STIGMATION STATUS ........................................................................................................................ 35
7.93. EXECUTE REMCON MACRO ........................................................................................................... 35
7.94. READ USER OBJECT ......................................................................................................................... 36
7.95. READ USER OBJECT STATUS ............................................................................................................ 36
7.96. DELETE USER OBJECT ...................................................................................................................... 37
7.97. ENABLE SCAN ROTATION ................................................................................................................. 37
7.98. SET SCAN ROTATION ........................................................................................................................ 37
7.99. GET SCAN ROTATION ....................................................................................................................... 38
7.100. GET FIB FOCUS................................................................................................................................ 38
7.101. GET FIB PROBE CURRENT ............................................................................................................... 38
7.102. GET FIB APERTURE ......................................................................................................................... 39
7.103. GET FIB MODE ................................................................................................................................ 39
7.104. GET FIB GUN ON/OFF....................................................................................................................... 40
7.105. GET FIB EMISSION CURRENT ........................................................................................................... 40
7.106. GET FIB BEAM BLANKED ................................................................................................................ 40
7.107. GET FIB STIGMATION ...................................................................................................................... 40
7.108. GET FIB BEAM SHIFT....................................................................................................................... 40
7.109. GET FIB SCAN ROTATION ................................................................................................................ 41
7.110. SET FIB FOCUS ................................................................................................................................ 41
7.111. SET FIB PROBE CURRENT ................................................................................................................ 41
7.112. SET FIB MODE ................................................................................................................................. 42
7.113. SET FIB GUN ON/OFF ....................................................................................................................... 42
7.114. SET FIB BEAM BLANKED ................................................................................................................. 42
7.115. SET FIB STIGMATION ....................................................................................................................... 43
7.116. SET FIB BEAM SHIFT ....................................................................................................................... 43
7.117. SET FIB SCAN ROTATION ................................................................................................................. 43
7.118. GET SEM DRIFT CORRECTION STATUS ............................................................................................ 43
7.119. DO SEM DRIFT CORRECTION ........................................................................................................... 44
7.120. SET JOYSTICK DISABLE .................................................................................................................... 44
7.121. GET JOYSTICK DISABLE .................................................................................................................... 44
7.122. SET HARD PANEL DISABLE............................................................................................................... 44
7.123. GET HARD PANEL DISABLE .............................................................................................................. 45
7.124. GET NANOTECHNIK POSITION .......................................................................................................... 45
7.125. SET NANOTECHNIK POSITION ........................................................................................................... 45
8. ERRORS .................................................................................................................................................... 46
8.1. LEO SEM ERROR NUMBERS ............................................................................................................... 46
8.1.1. Remote Command Errors 600 to 699 .......................................................................................... 46
APPENDIX A: STAGE MOVEMENT............................................................................................................ 47
APPENDIX B: PROTOCOL SUMMARY ..................................................................................................... 48
APPENDIX C: CHANGES MADE TO REMCON32.................................................................................... 51

Page 1
1. Introduction
The Remote Control of LEO 32 software uses a communications protocol, which is
based entirely on printable ASCII characters. The external device is considered as the
“Master” and the LEO SEM the “Slave”, with all transactions initiated by the external
device.
This protocol is supported by all LEO SEMs running LEO 32. However certain
commands are only applicable to certain instruments in each series. These restrictions
are documented in Appendix B.
Commands are composed of a 4 character header (mnemonic) in which the fourth

character may be a white space, an optional parameter list separated by space or
comma and terminated by carriage return
LEO-32 responds immediately to each command with either an acknowledgement or

an error. Acknowledge indicates that the command has been accepted. Error indicates
that the command has failed and reports an error number. No further commands are
expected until the current command has been executed.
LEO-32 issues a completion message when the command has been executed (e.g.
stage movement complete, EHT value set) or if the command was invalid. This
completion message indicates the success or failure of the requested action. Some
commands may return immediately to indicate that the specified action has started
rather than finished (e.g. auto focus).
Error messages issued by LEO-32 include a numeric error code.
The protocol has been deliberately designed with simplicity in mind, particularly in
respect of debugging which can be performed using a local terminal to replace one
end of the link or using the Local Mode feature within the RemCon32 application, to
initiate commands to the LEO SEM.

Page 2
2. Physical interface
2.1. Command Interface
Interface
Commands and data are transmitted through a standard RS232 serial interface.
The connection is made via a standard PC 9-way D-Type connector.
The RS232 port on the LEO SEM is set during the Windows 95 boot up - to whatever
configuration is set-up within the RemCon32 application.
The default RS232 communication settings for RemCon32 are:

Baud Rate : 9600
Data Bits : 8
Stop Bits : 1
Parity : None
Local Echo : Off
Flow Control : None
(unless using modem option, in which
case use Xon/RTS)
3. Command Stru
Structure
cture
Commands are composed of a 4 character header (mnemonic) in which the fourth
character may be a space, an optional parameter list separated by space or comma and
terminated by carriage return.
The maximum number of characters in the command string (and each response) is 80
including terminator.
This particular format has been chosen such that, a local terminal could be used to
issue commands to the LEO SEM e.g.:
EHT 10
EDX 1
AALN 60 40 or
BRGT 0.48 0.45

Page 3
3.1. Header
The first four characters of the message define the command to be executed. The
fourth character of the header may be a space to allow the use of mnemonics such as
“EHT”. In commands with no parameters, a trailing space in the header may be
omitted, as it will be assumed to be absent, e.g.
ABC<terminator>
will be interpreted as
ABC <terminator>
There is one special case that is the “NULL Command”. This occurs where the
message is completely empty and consists solely of <terminator>. This is treated by
the LEO SEM as a valid command and is acknowledged as such.
The header may actually contain more than 4 non-numeric characters although only
the first 4 will be checked, as the LEO-32 parser will skip all non-numeric characters
after the header.
Query commands, that is commands requesting a response, will be denoted as such by

having a header whose last character is “_?”.
3.2. Parameters
Parameters are ASCII encoded in one of 4 fixed formats:
1. Integer
2. Fixed point real
3. Exponential (E-format)
4. String
The format used in any given command is always the same.
For input into LEO-32, an integer may be given where a real is expected, as parser
will adopt a “flexible” approach to input number conversion.
Parameters output by LEO-32 will however adopt a more strict approach and returned
parameters in any given command will all be of the same type, although fixed point
real and exponential formats may be used interchangeably.
Parameters are separated by leading space(s) or a trailing comma, or both.
ABCD1234,56<terminator>
and
ABCD 1234 56<terminator>
and
ABCD 1234, 56<terminator>
are all valid.

Page 4
3.3. Terminator
The command terminator is <return>, (0D hex). A line feed (0A hex) may follow
which will be ignored. The provision for an optional line feed arises from the use of
local terminals for test purposes. LEO-32 will always append line feed to <return> but
this is optional for the external device.
3.4. Response format

The format of responses issued by LEO-32 as a result of read parameter requests is
completion code, parameter(s) and terminator.

Page 5
4. Control Sequence
The control sequence can be described as follows:
• External device issues a command.

• LEO-32 acknowledges receipt of valid command.
• If the command is not recognised, a negative completion error is returned,
completing the transaction.
• On receipt of a valid command LEO-32 loads the input data into an internal
parameter block, ready for passing to the LEO-32 Server.
• When the command has been executed, LEO-32 issues a completion report, which
indicates the success or failure of the command. This completion report is always
issued following receipt of a valid command, irrespective of how long it takes to
execute the command.
• If the command requires a response the response follows the completion code in
the completion report. The external device does not acknowledge this response.
(Reaction to error is left to the implementation).
• If the command failed for some reason a completion failed code is sent followed
by the relevant error number.
• Issue of the completion report completes the transaction.
4.1. Valid command acknowledge

The valid command acknowledge is of the form
<acknowledge string><terminator>
4.2. Invalid command acknowledge

The invalid command acknowledge is of the form
<negative acknowledge string><terminator>
4.3. Successful completion report

The completion report is used to indicate that the action specified in the current
command has been executed and that LEO-32 is ready for another command. There
may be a few commands for which the significance of this report is different. For
example, commands which take a long time to complete (such as running the gun)
may return immediately once the process has started, rather than when it has finished.
The successful completion report is of the form
<completion OK string><terminator>
If parameters are returned by the command the completion report is of the form
<completion OK string>[param1] [param2]..[paramN]<terminator>

Page 6
4.4. Unsuccessful completion report

The unsuccessful completion report is of the form
<completion not OK string><error code><terminator>
4.5. Definition of format

The control strings returned are single character strings defined as follows:-
Valid command acknowledge : @
Invalid command : #
Successful completion : >
Unsuccessful completion : *
The error code will be a decimal integer in the range 1 to 999 and the terminating and
line feed are as follows :-
Terminating Char : <return> (0D Hex)
Optional Line Feed Char : (0A Hex)
4.6. Abort Command

The only command, which may legally be issued by the external device before
completion of the previous one, is the ABORT command. This may be used to force
the completion of the current command or in the case of timeout. The abort command
may also be given when there is no outstanding action.
4.7. Timeouts
The only timeout at the LEO SEM end is on failure to receive a complete command
once reception has started. LEO-32 will ignore the input but will not issue a negative
acknowledge.
The timeout sequence at the external device is not defined here as it is application
specific. Typically, the external device might timeout on command acknowledge and
command completion messages and retry or abort as appropriate.
4.8. Stage Commands

When sending commands to move the stage (STG, C95) it is important to wait for one
move to complete before sending a subsequent move command. However there is a
potential problem if the stage status is queried too quickly following a stage move
command, in that it might not have started to move and thus return ‘Idle’ as its state.
The correct sequence is:
1. Issue Move command
2. Wait 1 second
3. Check stage status
4. Repeat previous step until stage state is idle
5. Issue next move command

Page 7
5. Error reporting
Errors associated with the current command are indicated by either the invalid
command acknowledge or the failure completion report, in each case with a numeric
error code tag field. There is one other error condition where LEO-32 detects an error
independently of the current command e.g. EHT failure during a stage move
command. In this case, LEO-32 converts the current command acknowledge or
completion report to an error report with a code to indicate that some other error has
occurred
Error codes are of the following form:

Error Code Meaning
1 Other error condition present
In some cases, the returned error code may be equivalent to a standard LEO-32 error
code.
5.1. Abort by LEO SEM

The LEO SEM also has an abort facility, which may be used to abort the current
operation and force manual control. When Abort is pressed, LEO-32 will respond to
the next command from the external device with an error code.

Page 8
6. User Interface
6.1. Main Window
Unlike previous versions of RemCon, RemCon32 has a new Windows 95 User
Interface. There are various new features and options from setting the communications
port to even using RemCon32 over a modem; thus providing the ability to directly
access the SEM (remotely from another location) by simply issuing remote control
commands down the modem.
6.2. Communication Settings

The communication settings dialog allows the facility of setting various RS232
options for communicating via the SEM’s comms port. The default settings are shown
in Chapter 2: Physical Interface.

Page 9
On Startup – Open port and minimise : Use this option to automatically open
the previously opened comms port and minimise RemCon32 when starting the
application up.
6.3. Properties Menu

The Properties menu is intended for internal LEO diagnostics only. Advance users
may also use these facilities, but LEO recommends leaving them at their default
settings. It should not be necessary to use any of the features shown within this menu.
6.4. Logging Remote Control Commands

RemCon32 now provides the feature of logging all remote control commands to a log
file, for either reference purposes or for diagnostics. Use the FILE → OPEN menu
command to bring up the Open dialog box and enter a filename or use the default log
filename. The log file is a standard text file, which can be viewed by any text editor,
e.g. Notepad.
6.5. Transmit A Text File

After opening a comms port, RemCon32 allows the option of transmitting a text file to
the comms port. Should a modem be attached to this comms port (and
communications are already present to another modem) the text file will be
transmitted to a remote PC.
6.6. Phone Dialling

Again, after successfully opening up a comms port on the SEM, it is possible to dialup
a remote PC (via a modem). Simply enter the phone number and RemCon32 will
automatically make a connection to the remote modem/PC.
NOTE
Page 10
Depending on your modem, you will probably require Xon/RTS ENABLED in

the communications settings dialog to successfully make a connection to a remote
PC.
6.7. Command line arguments

In order to run RemCon32.exe from the command line or from a Macro, simply type
<PATH>\RemCon32
Where <PATH> is probably the LEO-32 directory and path, e.g.:
<PATH> = C:\Program Files\LEO Electron Microscopy

Ltd\Leo-32
6.7.1. Set the Comm Port
Use the /cp or /commsport flags, followed by a value 1 – 6. For example:
<PATH>\RemCon32 /cp 1
or
<PATH>\RemCon32 /commsport 1
Sets the Comm Port to COM1. Both flags are equally valid. If you select an invalid
port then a message box will pop up that says “Invalid Port Number”. These command
line flags take precedence over any registry settings or changes the user may make in
the “Settings” dialog.
6.7.2. Open port and minimise on startup
Use the /os or /onstartup flags, followed by “1” to open the selected port and
minimise the program on startup. Use the parameter “0” to bring up the program
normally without opening the Comm Port. For example:
<PATH>\RemCon32 /os 1
or
<PATH>\RemCon32 /onstartup 1
These command line flags take precedence over any registry settings or changes the
user may make in the “Settings” dialog.
6.7.3. Other command line parameters
The user can supply and ID that displays in the RemCon32 window caption. This is
useful if there are several instances of RemCon32 running and you want to distinguish
between these processes. For instance type the command:
<PATH>\Remcon32 TestID
and the text “RemCon32:TestID” will appear in the caption. If you use this optional
ID in combination with other flags then you need to put it first, because the program
will just take the first non-flag string of text to be the ID.
<PATH>\Remcon32 TestID /onstartup 0 /commsport 1

Page 11
7. LEO SEM Command Set

LEO SEM commands fall into three categories:
• Commands that are actioned and a reply message sent on completion. These
actions are usually completed within ten seconds of receiving the command.
• Commands that take much longer to be executed, these issue a reply once the
command has been initiated. This type of command is only for actions requiring
more than ten seconds to complete.
• Status request commands - these are requests from the remote controller to be
passed back status information about LEO SEM parameters or the state of a
previously initiated command. They are executed immediately.
Where reply parameters are sent the associated header mnemonics will be the same as
those used for the command header.
7.1. Null Command

This provides a check to see if the LEO SEM “is there”, it simply consists of a
carriage return. LEO-32 reports back success if there are no errors outstanding.
Command Mnemonics -
Command Parameters Type Range
None - -
Reply Parameters Type Range

None - -
7.2. Version Number

Number
This command returns the current version number of RemCon32 (which is different to
the version number of the LEO-32 software).
Command Mnemonics - VER?

None - -

Version Number STRING -

Page 12
7.3. Abort
This allows time consuming commands such as Auto Focus, Auto Stigmation and
stage movement, to be aborted.
Command Mnemonics - ABO

None - -

None - -
7.4. Auto Gun Run Up

This initiates automatic gun run up to the previously set target acceleration voltage
and filament current. Its action is the same as that provided by the run up function on
the toolbar.
Command Mnemonics - AGR

None - -

None - -
7.5. Beam On/Off

This command switches the beam on or off. If the parameter is 0 (off) gun is shut
down. If the parameter is 1 (on) the EHT and gun is turned on and the filament current
can be controlled from the EHT and FIL commands (FIL not available on 1500). The
LEO SEM handles ramping of the filament current. A value of 2 (EHT off) just turns
the EHT off, but leaves the gun running.
Command Mnemonics - BMON

Action INTEGER 0 (Off) to 1 (On)
2 (EHT Off)

None - -

Page 13
7.6. Set EHT

Command to set the EHT to a specified value. A reply is sent upon completion of the
command (within a few seconds). This command is only available if the Beam State
has been set to on with the BMON command or the gun is already run up.
Command Mnemonics - EHT

EHT Value REAL 0.0 to 40.0 (kV)

None - -
The upper limit of kV will vary depending on which SEM is being controlled and
which software options are installed.
7.7. Request EHT

This command requests the current value of EHT. It returns the status immediately.
Command Mnemonics – EHT?

None - -

EHT Value REAL 0.0 to 40.0 (kV)
The upper limit of kV will vary depending on which model is being considered and
which EHT set is fitted.
7.8. Request Gun Status

This command requests the current values of the gun parameters. It returns the status
immediately.
Command Mnemonics – GUN?

None - -

Current EHT Value REAL 0.0 to 40.0 (kV)
Target Filament Current REAL 0.0 to 5.0 (Amps)
Filament State REAL 0 (Off), 1 (On), 2
(Ramp Up), 3
(Ramp Down)

Page 14
7.9. Beam Blanking On/Off

Command to blank the beam on or off according to the command parameter. Its
actions are the same as those provided by the front panel toggle switch except that a
parameter specifies whether to blank/unblank the beam. The command is actioned
immediately.
Command Mnemonics - BBLK

Blanking State INTEGER 0 (Off) to 1 (On)

None - -
7.10.Get
7.10.Get Beam Blanking status
Function to find out whether the beam is blanked or not.
Command Mnemonics – BBL?

None - -

Blanking State INTEGER 0 (Off) to 1 (On)
7.11.Emission
7.11.Emission Imaging
Command to switch the SEM in or out of the emission imaging mode selected. The
command is actioned immediately.
Command Mnemonics - EMIS

Emission Imaging State INTEGER 0 (Off) to 1 (On)

None - -
7.12.Gun
7.12.Gun Tilt Alignment
This command sets the gun tilt alignment according to the parameters passed. It is
actioned immediately.
Command Mnemonics - GTLT

X Tilt REAL -1.00 to 1.00
Y Tilt REAL -1.00 to 1.00

None - -

Page 15
7.13.Gun
7.13.Gun Shift Alignment
This command sets the gun shift alignment according to the parameters passed. It is
Command Mnemonics - GSHF

X Shift REAL -1.00 to 1.00
Y Shift REAL -1.00 to 1.00

None - -
7.14.Auto
7.14.Auto Gun Alignment
Alignment Search
This command initiates an auto gun alignment search operation. This command
returns immediately.
Command Mnemonics - AGAS

None - -

None - -
7.15.Auto
7.15.Auto Gun Alignment Peak
This command initiates an auto gun alignment peak operation. This command returns
immediately.
Command Mnemonics - AGAP

None - -

None - -
7.16.Auto
7.16.Auto Gun Align Status
This command is used to establish whether AGA Search (AGAS) or AGA Peak
(AGAP) has completed.
Command Mnemonics - AGA?

None - -

AGA Status INTEGER 0 (Complete)
1 (Incomplete)

Page 16
7.17.Scan
7.17.Scan Rate
This command sets the scan rate to that specified as a parameter. It is actioned
immediately. The parameter is the scan rate number.
Command Mnemonics - RATE

Scan Rate INTEGER 0 to 15

None - -
7.18.Request
7.18.Request Scan Rate
This requests the scan rate to be returned as a reply parameter.
Command Mnemonics - RAT?

None - -

Scan Rate INTEGER 0 to 15
7.19.Frame
7.19.Frame Integrate
This command initiates a frame integration sequence. A reply is sent after initiation of
the integration sequence. The status of the integration sequence may be monitored
using the INT? command.
Command Mnemonics - FINT

Frame Count INTEGER 1 to 256

None - -
7.20.Frame
7.20.Frame Average
This command sets the noise reduction into frame average mode with the specified K
Factor. It is actioned immediately.
Command Mnemonics - FAVE

K Factor INTEGER 0 to 8

None - -

Page 17
7.21.Freeze
7.21.Freeze
This command freezes any current live stores. It is actioned immediately.
Command Mnemonics - FREZ

None - -

None - -
7.22.Request
7.22.Request Store Ac
Acquisition
quisition / Integration Status
Request the state of the store (is it frozen or live?). This provides a test to check
whether an integration sequence has been completed. It is actioned immediately.
Command Mnemonics - INT?

None - -

Store Status INTEGER 0 (Live) to 1 (Frozen)
7.23.Set
7.23.Set Stigmators
This command sets the stigmation correction coils to the specified values. It is
Command Mnemonics - STIG

Stigmator X% REAL 0 to 100.0
Stigmator Y% REAL 0 to 100.0

None - -
7.24.Set
7.24.Set Stigmators Explicitly
This command sets the stigmation correction coils explicitly to the specified values. It
is actioned immediately.
Command Mnemonics - STIM

Stigmator X% REAL -100.0 to 100.0
Stigmator Y% REAL -100.0 to 100.0

None - -

Page 18
7.25.Auto
7.25.Auto Stigmation
This command initiates an auto stigmation compensation sequence. This command
returns immediately.
Command Mnemonics - ASTG

None - -

None - -
7.26.Auto
7.26.Auto Stigmate Status
This command is used to establish whether Auto Stigmation has completed.
Command Mnemonics - AST?

None - -

Auto Stig Status INTEGER 0 (Complete)
1 (Incomplete)
7.27.Set
7.27.Set Brightness Target
If auto brightness is active this sets the target brightness level, the LEO SEM tracks
this level only if the target tracking mode of auto brightness is enabled. If auto
brightness is not active this sets the signal offset level.
Command Mnemonics - BRGT

Brightness Level % REAL 0.0 to 100.0

None - -
7.28.Get
7.28.Get Brightness level
Gets the signal offset (brightness) level.
Command Mnemonics – BGT?

None - -

Brightness Level % REAL 0.0 to 100.0

Page 19
7.29.Set
7.29.Set Contr
Contrast
ast Level
If auto contrast is active this sets the target level for the peak brightness, the LEO
SEM tracks this only if the target tracking mode of auto contrast is enabled. If auto
contrast is not active it sets the signal gain level.
Command Mnemonics - CRST

Contrast Level % REAL 0.0 to 100.0

None - -
7.30.Get
7.30.Get Contrast Level
Gets the signal gain (contrast) level.
Command Mnemonics – CST?

None - -

Contrast Level % REAL 0.0 to 100.0
7.31.Auto
7.31.Auto Brightness On/Off
This enables/disables the autobrightness control. A response is sent immediately
although the algorithm may require a few scan frames to achieve stable signal levels.
Command Mnemonics - ABGT

On or Off INTEGER 0 (Off) to 1 (On)

None - -
7.32.Auto
7.32.Auto Contrast On/Off
This enables/disables the autocontrast control. A response is sent immediately
although the algorithm may require a few scan frames to achieve stable signal levels.
Command Mnemonics - ACST


None - -

Page 20
7.33.Set
7.33.Set Auto Brightness / Contrast
This function achieves the same as the above functions, i.e. you can switch to either
Auto Brightness or Auto Contrast, or switch them Off, but with the additional
possibility to switch both of them On.
Command Mnemonics - ABC

Off, Brightness, Contrast, B+C INTEGER 0 (Off), 1 (B), 2 (C),
3 (B+C)

None - -
7.34.Get
7.34.Get Auto Brightness / Contrast status
This function gets the Auto Brightness / Contrast status.
Command Mnemonics – ABC?

None - -

Off, Brightness, Contrast, B+C INTEGER 0 (Off), 1 (B), 2 (C),
3 (B+C)
7.35.Set
7.35.Set Magnification
This command sets the image magnification to the specified value. It is actioned
immediately. The lower limit of the magnification value is dependent on the working
distance.
Command Mnemonics - MAG

Magnification REAL 5.0 to 500E3

None - -
7.36.Request
7.36.Request Magnification
This issues a request for the current magnification value to be returned in the reply. It
Command Mnemonics - MAG?

None - -

Magnification REAL 5.0 to 500E3

Page 21
7.37.Set
7.37.Set Focus
This command sets the focus of the final lens by specifying a value for the working
distance. It is actioned immediately.
Command Mnemonics - FOCS

Working Distance REAL 0.0 to 121.0 (mm)

None - -
7.38.Request
7.38.Request Working Distance
This issues a request to return the current working distance in the reply message. It is
Command Mnemonics - FOC?

None - -

Working Distance REAL 0.0 to 121.0 (mm)
7.39.Coarse
7.39.Coarse Auto Focus
This command initiates a coarse auto focus operation. This command returns
immediately.
Command Mnemonics - CAF

None - -

None - -
7.40.Fine
7.40.Fine Auto Focus
This command initiates a fine auto focus operation. This command returns
immediately.
Command Mnemonics - FAF

None - -

None - -

Page 22
7.41.Auto
7.41.Auto Focus Status
This command is used to establish whether Coarse Auto Focus (CAF) or Fine Auto
Focus (FAF) has completed.
Command Mnemonics - AFO?

None - -

Autofocus Status INTEGER 0 (Complete)
1 (Incomplete)
7.42.Set
7.42.Set Display Mode
This command is used to set the display mode to either Normal left, normal right, or
split screen as requested.
Command Mnemonics - DISP

Display Mode INTEGER 0 (Normal Left),
1 (Normal Right),
2 (Split)

None - -
7.43.Set
7.43.Set Spot Mode
This command turns off normal raster scanning of the beam and leaves the beam
positioned at the screen co-ordinates provided with the displayed image frozen. It
returns immediately but ‘INT?’ may be used to establish that the store has been
frozen. If Spot Mode was already active the beam is simply positioned at the new co-
ordinates.
Command Mnemonics - SPOT

X Position INTEGER 0 to 1023
Y Position INTEGER 0 to 767

None - -
7.44.Start
7.44.Start Line Profile
The first call of LPR will initialise the line profile mode (the Y cursor position is still
required but will be ignored on this occasion). Further calls to LPR will initiate the
requested line profile at the given Y cursor position. The command returns
immediately.
Command Mnemonics - LPR

Y Cursor Position INTEGER 0 to 767

Page 23

None - -
7.45.Normal
7.45.Normal Mode
This command resets the LEO SEM from the Line Profile, Spot modes or Soft Scan. It
Command Mnemonics - NORM

None - -

None - -
7.46.Set
7.46.Set Annotation Position
This command specifies the top left-hand corner position (X, Y co-ordinate) for the
image annotation string. The command returns immediately.
Command Mnemonics - ANXY

X Co-ordinate INTEGER 0 to 1023
Y Co-ordinate INTEGER 0 to 767

None - -
7.47.Se
7.47.Set
Set Image Annotation
This command allows the image to be annotated. The given string is placed at the
current image annotation position specified by ANXY. The String may not contain the
comma character as this has been reserved as a string parameter separator. The
command is actioned immediately.
Command Mnemonics - IANN

Text STRING -

None - -
7.48.Clear
7.48.Clear Annotation
This command clears any image annotation present. It is actioned immediately.
Command Mnemonics - CANN

None - -

None - -

Page 24
7.49.Request
7.49.Request Detector
This command returns the current detector text displayed in the data zone. It is
Command Mnemonics - DET?

None - -

Detector Text STRING
7.50.Request
7.50.Request Vacuum Status
This requests the current vacuum parameters to be returned as reply parameters. If
either the column vac or the chamber vac pressure parameters are unity then the
vacuum pressure will not have been low enough for reading.
Command Mnemonics - VAC?

None - -

Chamber Vacuum REAL 1.0 (unavailable), 1.8E-4 to 2E-8
Gun Vacuum REAL 1.0 (unavailable), 1.8E-4 to 2E-8
Column Valve REAL 0 (Closed), 1 (Open), 2 (Error)
7.51.Select
7.51.Select Image Source
This command determines the image source for record sequences. Record sources
may be the left displayed image, right displayed image (for stores, 2 VDUs) or the
current live image.
Command Mnemonics - ISRC

Source INTEGER 0 (Live), 1 (Left), 2
(Right)

None - -
7.52.Request
7.52.Request Record Sequence Status
This command returns the status of a record sequence.
Command Mnemonics - REC?

None - -

Page 25
Record Sequence Status INTEGER 0 (Complete),

1 (Incomplete)
7.53.Request
7.53.Request Photo Number
This command returns the current photo number. It is actioned immediately.
Command Mnemonics - PHN?

None - -

Photo Number INTEGER 1 to 99999
7.54.Initialise
7.54.Initialise Stage
This command initialises the stage co-ordinates. There are two modes of operation for
this. Mode one is that LEO-32 accepts the co-ordinates passed as the current stage co-
ordinates. In the other mode LEO-32 drives the stage to its limits to use as references.
To activate the latter mode; negative stage co-ordinates should be passed. If “any” of
the three co-ordinates are negative values, then all three axes are initialised. A reply is
not issued until the stage movement has completed.
NOTE: Mode one above will ONLY work correctly if the stage motors are present
and enabled on the SEM, and the stage is not a Cartesian95 or any other motorised
stage – with five or more axes.
Command Mnemonics - ISTG

X Position (mm) REAL 5.0 to 95.0 or -ve
Y Position (mm) REAL 5.0 to 95.0 or -ve
Z Position (mm) REAL 5.0 to 25.0 or -ve

None - -
7.55.Stage
7.55.Stage Status
This command returns the stage type and initialisation status.
Command Mnemonics - IST?

None - -

Stage Type INTEGER 0 (Cartesian), 1 (Eucentric),
2 (Cartesian 95), 3 (Makro),
4 (Fjeld 6”),
5-7 (Undefined)
Stage Initialised INTEGER 0 (Yes), 1 (No)

Page 26
7.56.Set
7.56.Set Stage Position (XYZ)
This command initiates a motorised stage XYZ movement to the specified co-
ordinates. The command returns immediately.
NB: See APPENDIX A, for the stage limits allowed, according to the type of
stage/chamber fitted on the SEM.
Command Mnemonics - STG

X Position (mm) REAL 5.0 to 95.0 or -ve
Y Position (mm) REAL 5.0 to 95.0 or -ve
Z Position (mm) REAL 5.0 to 25.0 or -ve

None - -
7.57.Request
7.57.Request Stage Position (XYZ)
This command returns the current XYZ stage position and the current move status.
Command Mnemonics - STG?

None - -

X Position (mm) REAL 5.0 to 95.0
Y Position (mm) REAL 5.0 to 95.0
Z Position (mm) REAL 5.0 to 25.0
Move Status REAL 0.0 (Complete),
1.0 (Stage is Moving)
7.58.Set
7.58.Set Stage Position (6 axes)
This command initiates a motorised stage movement (to the specified co-ordinates)
for a stage that has FOUR or more axes. All six-stage positions MUST be supplied,
irrespective of how many axes are fitted to the stage.
A value of zero MUST be supplied for any axis not fitted to the stage in use.
This command returns immediately.
Command Mnemonics - C95

X Position (mm) REAL 0.0 to 152.0 mm
Y Position (mm) REAL 0.0 to 152.0 mm
Z Position (mm) REAL 0.0 to 40.0 mm
T Position (degrees) REAL 0.0 to 90.0 degrees
R Position (degrees) REAL 0.0 to 360.0 degrees
M Position (mm) REAL 0.0 to 10.0 mm
Page 27

None - -
7.59.Request
7.59.Request Stage Position (6 axes)
This command returns the current stage position for all six axes and the current move
status.
Command Mnemonics - C95?

None - -

X Position (mm) REAL 0.0 to 152.0 mm
Y Position (mm) REAL 0.0 to 152.0 mm
Z Position (mm) REAL 0.0 to 40.0 mm
T Position (degrees) REAL 0.0 to 90.0 degrees
R Position (degrees) REAL 0.0 to 360.0 degrees
M Position (mm) REAL 0.0 to 10.0 mm
Move Status REAL 0.0 (Complete),
1.0 (Stage is Moving)
7.60.Set
7.60.Set Stage Backlash On/Off
This command sets the stage backlash on or off dependent on the parameter passed. It
Command Mnemonics - BLSH

Backlash State INTEGER 0 (Off) to 1 (On)

None - -
7.61.Centre
7.61.Centre Beam
This command resets the beam position back to the centre. It is executed immediately.
Command Mnemonics - CTRB

None - -

None - -

Page 28
7.62.Set
7.62.Set Beam Position
This command sets the beam position to the specified co-ordinates. It is executed
immediately.
Command Mnemonics - BEAM

X Position REAL -1.00 to 1.00
Y Position REAL -1.00 to 1.00

None - -
7.63.Request
7.63.Request Pixel Size
This issues a request for the current pixel size in nano-metres. It is actioned
immediately.
Command Mnemonics - PIX?

None - -

Pixel Size in (nM) REAL 0 to 50000
7.64.Set
7.64.Set Gun Align
This command sets the gun alignment according to the parameters passed. It is
Command Mnemonics - GALN

X Gun Align Position REAL -100.00 to 100.00
Y Gun Align Position REAL -100.00 to 100.00

None - -
7.65.Set
7.65.Set Aperture Align
This command sets the aperture alignment according to the parameters passed. It is
Command Mnemonics - AALN

X Alignment Position REAL -100.00 to 100.00
Y Alignment Position REAL -100.00 to 100.00

None - -

Page 29
7.66.Pixel
7.66.Pixel Noise Reduction
This command resets the LEO SEM from Line Profile, Spot mode or Soft Scan to
Pixel Noise Reduction. It is executed immediately.
Command Mnemonics - PXNR

None - -

None - -
7.67.Continuous
7.67.Continuous Average
This command places the LEO SEM into Continuous Average mode. It is executed
immediately.
Command Mnemonics - CTAV

None - -

None - -
7.68.Clear
7.68.Clear Error
This command has been added to maintain compatibility with earlier version of the
LEO remote control protocol. Internally, RemCon32 takes no specific action when
this command is received; it simply acknowledges the command and returns the valid
and successful completion characters.
Command Mnemonics - CERR

None - -

None - -
7.69.External
7.69.External Scanning On/Off
This command switches the LEO SEM into external scanning mode. It is actioned
immediately.
Command Mnemonics - EDX


None - -

Page 30
7.70.Get
7.70.Get the External Scanning status
Function to check whether external scanning is on.
Command Mnemonics – EXS?

None - -

7.71.Set
7.71.Set Detector
This command switches the LEO SEM detector according to the string value specified
as the parameter. It is actioned immediately.
Note that the detector name string is case sensitive.
Command Mnemonics - DET

Detector STRING Depends on Config

None - -
7.72.Specimen
7.72.Specimen Current Meter On / Off
This command switches the specimen current meter on and off. When enabled the
specimen current can be read using the 'PRB?' command. It is actioned immediately.
Command Mnemonics - SCM


None - -
7.73.Read
7.73.Read Probe Current
This command reads the probe current from the specimen current meter. It is only
valid if the specimen current meter is active. It is actioned immediately.
Command Mnemonics - PRB?

None - -

Specimen Current REAL ±1µA

Page 31
7.74.Select
7.74.Select Aperture
This command switches the aperture in use by the LEO SEM. It is actioned
immediately.
Command Mnemonics - APER

Aperture Number INTEGER 1-6

None - -
7.75.Get
7.75.Get Aperture
This command reads the aperture currently in use by the LEO SEM.
Command Mnemonics – APR?

None

Aperture Number - INTEGER -1 - 6
7.76.Set
7.76.Set Filament Current
Command to set the filament current to a specified value. The command initiates
ramping of the current to the specified value. A reply message is sent after initiation
and the status of the ramping may be monitored via the GUN? command. This
command is only available if the beam state has been set to on with the BMON
command.
Command Mnemonics - FIL

Filament Current REAL 0.0 to 5.0 (Amps)

None - -
7.77.Set
7.77.Set Probe Current
Command to set the probe current to a specified value. The command is actioned
immediately.
The lower limit on the probe current value will depend on the aperture selected.
Command Mnemonics – PROB

Probe Current REAL 1.0E-14 to 2.0E-5 (Amps)

None - -
7.78.Line
7.78.Line Integrate
This command initiates a line integration sequence. A reply is sent after initiation of
the integration sequence. The status of the integration sequence may be monitored
using the ‘INT?’ command.

Page 32
Command Mnemonics - LINT

Line Count INTEGER 1 to 256

None - -
7.79.Initiate
7.79.Initiate A Fast Record Sequence
This command initiates a fast record sequence with the record time and the film ASA
data set in the configuration file. The status of the record sequence may be monitored
using the request record status command (REC?).
Command Mnemonics - FREC

None - -

None - -
7.80.Initiate
7.80.Initiate A Slow Record Sequence
This command initiates a slow record sequence with the record time and film ASA
data set in the configuration file. The status of the record sequence may be monitored
using the request record status command (REC?).
Command Mnemonics - SREC

None - -

None - -
7.81.Variable
7.81.Variable Pressure On / Off
This command switches the Variable Pressure (VP) mode On or Off. The pressure
status may be monitored using the request VP status command (VPS?).
Command Mnemonics - VPON


None - -
7.82.Set
7.82.Set Target Pressure
This command sets the target pressure for the Variable Pressure mode to a specific
value. The actual pressure may be monitored using the request VP status command
(VPS?).
Command Mnemonics - VPTP

Target Pressure REAL 1.0 to 400.0 (Pascal)

Page 33
None - -
7.83.Request
7.83.Request Variable Pressure Status
This command returns the status of the Variable Pressure mode. It also returns the
actual pressure in the chamber
Command Mnemonics – VPS?

none - -

VP Status INTEGER 0 (at Air), 1 (going
to High Vacuum), 2
(at High Vacuum), 3
(going to VP), 4 (At
VP)
Chamber Pressure REAL
7.84.Column
7.84.Column Chamber Valve Open / Close
This command opens or closes the Column Chamber Valve. It is advisable to shut the
EHT off first before closing the valve.
Command Mnemonics - CCVO

Open or Close INTEGER 0 (Close) to 1 (Open)

None - -
7.85.Airlock
7.85.Airlock vent / pump
This command vents or pumps the airlock. Only valid if airlock automation is present.
Command Mnemonics - AIRL

Vent or Pump INTEGER 0 (Vent) to 1 (Pump)

None - -
7.86.Request
7.86.Request Airlock Status
This command requests the Airlock status. Only valid if airlock automation is present.
Command Mnemonics – ALS?

None - -

Ready or Not Ready INTEGER 0 (Not Ready) or 1 (Ready)
Page 34
7.87.Select
7.87.Select User Area
This command enables to select a User Area. First any existing area selection is
cleared. Any area display is removed. The ‘Area Select Mode’ is entered, waiting for
the user to click on the image and drag the mouse to define the area.
Command Mnemonics – SUA

None - -

None - -
7.88.Read
7.88.Read User Area
This command returns the status of the User Area. If valid, the rectangle data of the
selected user area are returned. Otherwise only zeros are returned.
Command Mnemonics – RUA?

None - -

Status INTEGER 0 (Invalid), 1 (Selecting), 2
Cancelled, 3 (Valid)
Left INTEGER 0 – 1020 screen pixels
Top INTEGER 0 – 765
Width INTEGER 0 – 1020
Height INTEGER 0 – 765
7.89.Create
7.89.Create User Area
This command enables a User Area to be defined by providing Rectangle data. The
mode parameter defines the operations that can be carried out on the user area.
Command Mnemonics – CUA

Mode INTEGER 0 (Fixed), 1 (movable), 2
(Movable and Sizeable)
Left INTEGER 0 – 1020 screen pixels
Top INTEGER 0 – 765
Width INTEGER 0 – 1020
Height INTEGER 0 – 765

None - -
7.90.Delete
7.90.Delete User Area
This command deletes the User Area and clears the user area data structure.
Command Mnemonics – DUA

Page 35

None - -

None - -
7.91.Aperture
7.91.Aperture Alignment
Alignment
This command returns the status of the aperture alignment.
Command Mnemonics – ALN?

None - -

7.92.S
7.92.Stigmation status
This command returns the status of the stigmators.
Command Mnemonics – STI?

None - -

7.93.Execute
7.93.Execute REMCON Macro
This command is used to cause a macro to be executed within LEO-32. This
command takes a single integer parameter, which is the macro name suffix. The macro
executed is:
REMCONx
where ‘x’ is the integer parameter. So
MAC 1
will execute macro REMCON1,
and
MAC 42
will execute macro REMCON42.
There is no limit to the number of different macros that can be executed. The search
path for the macros is defined in the macro editor help. If a macro is not defined then
an error will be returned. There is no space in the macro name between the
“REMCON” and the suffix.

Page 36
Command Mnemonics – MAC

Macro Suffix Integer 0 – 2^31 (2 power 31)

None - -
7.94.Read
7.94.Read User Object
This command is used to create an annotation tool.
Command Mnemonics – CUO

ID INTEGER 0-7
Tool Type INTEGER 1 = Rectangle,
2 = Trapezium,
3 = Circle
Point A X INTEGER 0 – 1023 screen pixels
Point A Y INTEGER 0 – 767 screen lines
Point B X* INTEGER 0 – 1023
Point B Y INTEGER 0 – 767
Point C X INTEGER 0 – 1023
Point C Y INTEGER 0 – 767
Point D X INTEGER 0 – 1023
Point D Y INTEGER 0 – 767

None
The ID specified the identity of the annotation tool created. If an object with that ID
already exists then its properties will be overwritten.
The CUA command can be used to create rectangles, trapeziums and circles according
to the value of the tool type parameter.
For rectangles and trapeziums the four points (A to D) represent the coordinates of the
corners of the object. A red line will identify the line AB on the object.
For circles point A represents the centre and Point B X is used to define the radius of
the circle. The other parameters are not used for circles.
For rectangles and trapeziums points C and D may be adjusted to obey consistency
rules.
The minimum object size is 5 pixels.
7.95.Read
7.95.Read User Object Status
This command is used to read the status of an annotation tool.
Command Mnemonics – RUO?

Page 37

ID INTEGER 0-7

Status INTEGER 0 = Invalid Read
1 = Invalid ID
2 = Invalid Type
3 = Valid Data
Tool Type INTEGER 1 = Rectangle,
2 = Trapezium,
3 = Circle
Point A X INTEGER 0 – 1023 screen pixels
Point A Y INTEGER 0 – 767 screen lines
Point B X* INTEGER 0 – 1023
Point B Y INTEGER 0 – 767
Point C X INTEGER 0 – 1030
Point C Y INTEGER 0 – 767
Point D X INTEGER 0 – 1030
Point D Y INTEGER 0 – 767
The object to be read is identified by the ID parameter. The return parameters have
the same meaning as the create user object parameters.
7.96.Delete
7.96.Delete User Object
This command is used to delete the annotation tool specified by the ID parameter.
Command Mnemonics – DUO

ID INTEGER 0-7

None
7.97.Enable
7.97.Enable Scan Rotation
Switch the Scan Rotation On or Off.
Command Mnemonics – SRON

On or Off INTEGER 0 (Off) – 1 (On)

None
7.98.Set
7.98.Set Scan Rotation
Set the value of the scan rotation.
Command Mnemonics – SRO

Page 38

Scan rotation REAL 0 – 360 degrees

None
7.99.Get
7.99.Get Scan Rotation
Get the value of the scan rotation.
Command Mnemonics – SRO?

None

Scan rotation REAL 0 – 360 degrees
7.100.Get
7.100.Get FIB F
Focus
ocus
Get the value of FIB focus
Command Mnemonics – FFC?

None

FIB focus REAL 0.0 – 20000.0 V
7.101.Get
7.101.Get FIB Probe Current
Get the value of the FIB probe current, the FIB image probe current and the FIB mill
probe current.
Command Mnemonics – FPB?

Page 39

None

FIB Probe Current LONG 0 – 15
FIB Image Probe Current LONG 0 - 15
FIB Mill Probe Current LONG 0 - 15
0 Undefined
1 1 pA
2 2 pA
3 5 pA
4 10 pA
5 20 pA
6 50 pA
7 100 pA
8 200 pA
9 500 pA
10 1 nA
11 2 nA
12 5 nA
13 10 nA
14 20 nA
15 50 nA
7.102.Get
7.102.Get FIB Aperture
Get the value of the FIB Apertures.
Command Mnemonics – FAP?

None

FIB Aperture Align X REAL -30000.0 - 30000.0
FIB Aperture Align Y REAL -30000.0 - 30000.0
7.103.Get
7.103.Get FIB Mode
Get the value of the scan rotation.
Command Mnemonics – FMD?

None
FIB Mode LONG 0–9
0 SEM
1 FIB
2 Milling
3 SEM + FIB
4 Mill + SEM
5 SEM Drift Correction
6 FIB Drift Correction
7 No Beam
8 External
9 External + SEM

Page 40
7.104.Get
7.104.Get FIB Gun on/off
Get the value of the FIB Gun state.
Command Mnemonics – FGN?

None
Gun State LONG 0–3
0 Off
1 On
2 Ramping
3 Error
7.105.Get
7.105.Get FIB Emission Current
Get the value of the FIB Emission Current.
Command Mnemonics – FEI?

None
Gun Emission current REAL
7.106.Get
7.106.Get FIB Beam Blanked
Get the value of the FIB Beam Blanked state.
Command Mnemonics – FGN?

None

FIB Beam Blanked state LONG 0–1
0 No
1 Yes
7.107.Get
7.107.Get FIB Stigmation
Get the value of FIB Stigmation
Command Mnemonics – FSG?

None

FIB Stigmation X REAL -100 – 100
FIB Stigmation Y REAL -100 – 100
7.108.Get
7.108.Get FIB Beam Shift
Get the value of the FIB Beam Shift.
Command Mnemonics – FBS?

Page 41

None

FIB Beam Shift X REAL -1000 - 1000 µ (may not be
attainable subject to
conditions)
FIB Beam Shift Y REAL -1000 - 1000 µ (may not be
conditions)
7.109.Get
7.109.Get FIB Scan Rotation
Get the value of the FIB scan rotation.
Command Mnemonics – FRT?

None

FIB Scan rotation REAL 0 – 360 degrees
7.110.Set
7.110.Set FIB Focus
Command to set the FIB focus to a specified value. The command is actioned
immediately.
Command Mnemonics – FFOC

Focus voltage REAL 0 – 20 KV

None - -
7.111.Set
7.111.Set FIB Probe
Probe Current
Command to set the FIB probe current to a specified value. The command is actioned
immediately.
Command Mnemonics – FPRB

FIB Probe Current or LONG 0 – 15
FIB Image Probe Current
or FIB Mill Probe Current
according to the value of
Selector
0 Undefined
1 1 pA
2 2 pA
3 5 pA
4 10 pA
5 20 pA
6 50 pA
7 100 pA
8 200 pA

Page 42
9 500 pA
10 1 nA
11 2 nA
12 5 nA
13 10 nA
14 20 nA
15 50 nA
Selector LONG 0–2
0 FIB Probe Current is
adjusted.
1 FIB Image Probe Current is
adjusted.
2 FIB Probe Current is
adjusted.
7.112.Set
7.112.Set FIB mode
Command to set the FIB mode to a specified value. The command is actioned
immediately.
Command Mnemonics – FMOD

FIB Mode LONG 0–9
0 SEM
1 FIB
2 Milling
3 SEM + FIB
4 Mill + SEM
5 Not Available
6 Not Available
7 Not Available
8 External
9 External + SEM
None - -
7.113.Set
7.113.Set FIB Gun on/off
Command to set the FIB gun state a specified value. The command is actioned
immediately.
Command Mnemonics – FGUN

Gun State LONG 0–3
0 Off
1 On
2 Ramping
3 Error
None - -
7.114.Set
7.114.Set FIB Beam Blanked
Command to set the FIB Beam Blanked state to a specified value. The command is
Command Mnemonics – FBLK

Page 43

FIB Beam Blanked state LONG 0–1
0 No
1 Yes
None - -
7.115.Set
7.115.Set FIB Stigmation
Command to set the FIB Stigmation to a specified value. The command is actioned
immediately.
Command Mnemonics – FSTG

FIB Stigmation X REAL -100 – 100
FIB Stigmation Y REAL -100 – 100
None - -
7.116.Set
7.116.Set FIB Beam Shift
Command to set the FIB Beam Shift to a specified value. The command is actioned
immediately.
Command Mnemonics – FBSH

FIB Beam Shift X REAL -1000 - 1000 µ (may not be
conditions)
FIB Beam Shift Y REAL -1000 - 1000 µ (may not be
conditions)
None - -
7.117.Set
7.117.Set FIB Scan Rotation
Command to set the FIB Scan Rotation to a specified value. The command is actioned
immediately.
Command Mnemonics – FROT

FIB Scan rotation REAL 0 – 360 degrees
None - -
7.118.Get
7.118.Get SEM Drift Correction status
Get the status of the SEM drift correction system.
Command Mnemonics – DCS?

Page 44

None
SEM Drift Correction Status LONG 0–5
0 Not available/Not licensed
1 Busy
2 No reference image defined
3 Ready, last correction failed
4 Ready, last succeeded
5 Ready
7.119.Do
7.119.Do SEM Drift Correction
This command initiates an SEM drift correction command. The status of the command
may be monitored using the request SEM drift correction status command (DCS?).
This command will fail if DCS? does not return a value of 3, 4 or 5. The drift
correction command uses a reference image to determine if the sample has drifted and
applies a change to the beam shift if it has, so that it is moved back to the original on-
screen position.
Command Mnemonics – DCOR

None - -

None - -
7.120.Set
7.120.Set Joystick Disable
Sets the disable state for the joystick. Note that 0 clears the state (enabling the
joystick) and 1 sets the state (disabling the joystick).
Command Mnemonics – JKD

Disable State LONG- 0–1
0 No
1 Yes
None - -
7.121.Get
7.121.Get Joystick Disable
Sets the disable state for the joystick. Note that 0 clears the state (enabling the
joystick) and 1 sets the state (disabling the joystick).
Command Mnemonics – JKD?

None

Disable State LONG 0–1
0 No
1 Yes
7.122.Set
7.122.Set Hard Panel Disable
Sets the disable state for the hard panel. Note that 0 clears the state (enabling the hard
panel) and 1 sets the state (disabling the joystick).
Page 45
Command Mnemonics – HPD

Disable State LONG- 0–1
0 No
1 Yes
None - -
7.123.Get
7.123.Get Hard Panel Disable
Sets the disable state for the hard panel. Note that 0 clears the state (enabling the hard
panel) and 1 sets the state (disabling the joystick).
Command Mnemonics – HPD?

None

Disable State LONG 0–1
0 No
1 Yes
7.124.Get
7.124.Get Nanotechnik Position
Reads the X/Y position of the Nanotechnik Piezo stage. The range will depend on the
exact configuration of the hardware option fitted. The results are returned in metres,
however scientific format is used to ensure nm accuracy is possible.
Command Mnemonics – NTP?

None

X Position REAL Depends on motor range
Y Position REAL (in metres using scientific
format)
7.125.Set
7.125.Set Nanotechnik Position
Sets the position for the Nanotechnik Piezo stage. Note that this command may take
several seconds to complete according to how far the movement is.
Command Mnemonics – NTP

X Position REAL Depends on motor range
Y Position REAL (in metres)
None

Page 46
8. ERRORS
As specified, in the serial link protocol, after completion/initiation of each valid
command a completion status report will be issued to the remote controller. This
indicates whether the command was successful or failed. If the command failed an
additional error number will be returned.
8.1. LEO SEM Error Numbers

The error numbers are arranged into groups, with each group relating to a different
aspect of instrument operation. Several errors may well require a rebooting of the
system; these errors are very rare and should never be encountered.
8.1.1. Remote Command Errors 600 to 699
These are internal errors, which may be encountered in response to commands sent to
the SEM.
Error Number Meaning

600 Unknown command
601 Invalid number of parameters
602 Invalid parameter type
603 Parameter out of range
604 Command timeout
605 Catastrophic error - reboot system
611 Unexpected external control abort
613 Parameter Unattainable
614 Option Not Fitted
615 Cannot change that parameter
616 Cannot execute that command
617 Command exceeded the max length of chars

Page 47
Appendix A: Stage Movement

This matrix shows the stage movements allowed for each axis, according to the type of stage and chamber fitted
on the SEM.
Stage (chamber) X Y Z T R Z′′

Type (mm (mm) (mm) (degrees) (degrees) (mm)
)
Eucentric (1420) 20 10 14 -20 to 90 360 5

(manual)
Cart95 100 125 35 0 to 90 360 N/A

(1430 & 1450)
Cart95 (1550) 125 100 35 0 to 90 360 N/A
Makro (1530) 75 75 25 -15 to 90 360 N/A

(manual)
Eucentric (1560) 152. 152.4 40 -15 to 65 360 10

4

Page 48
Appendix B: Protocol Summary

Valid for
Command 14XX 15XX, XB Comment
and SUPRA Specific
EVO and *
ULTRA
(Null) Y Y N
AALN N Y N
ABC Y Y N
ABC? Y Y N
ABGT Y Y N
ABO Y Y N
ACST Y Y N
AFO? Y Y N
AGA? Y Y N
AGAP Y N N
AGAS Y N N
AGR Y Y N
AIRL Y Y N Not supported on all airlocks
ALS? Y Y N
ALN? N Y N
ANXY Y Y N
APER N Y N
APR? Y Y N
AST? Y Y N
ASTG Y Y N
BBLK Y Y N
BBL? Y Y N
BEAM Y Y N
BGT? Y Y N
BLSH Y Y N
BMON Y Y N
BRGT Y Y N
C95 Y Y N
C95? Y Y N
CAF Y Y N
CANN Y Y N
CCVO N Y N
CERR Y Y N Compatibility only – no action
taken
CRST Y Y N
CST? Y Y N
CTAV Y Y N
CTRB Y Y N
CUA Y Y N
CUO Y Y N
DCOR Y Y N Requires licence to work
DCS? Y Y N
DET Y Y N Different detector lists for
1400 and 1500
DET? Y Y N

Page 49
DISP Y Y N
DUA Y Y N
DUO Y Y N
EDX Y Y N
EHT Y Y N
EHT? Y Y N
EMIS Y Y N
EXS? Y Y N
FAF Y Y N
FAP? N N Y
FAVE Y N N
FBLK N N Y
FBS? N N Y
FBSH N N Y
FEI? N N Y
FFOC N N Y
FGN? N N Y
FGUN N N Y
FIL Y N N
FINT Y Y N
FMD? N N Y
FMOD N N Y
FOC? Y Y N
FOCS Y Y N
FPB? N N Y
FPRB N N Y
FREC Y Y N
FREZ Y Y N
FROT N N Y
FRT? N N Y
FSG N N Y
FSTG N N Y
GALN N Y N
GSHF Y N N
GTLT Y N N
GUN? Y Y N
HPD Y Y Y
HPD? Y Y Y
IANN Y Y N
INT? Y Y N
ISRC Y Y N
IST? Y Y N
ISTG Y Y N
JKD Y Y Y
JKD? Y Y Y
LINT Y* Y* N * = Requires Uniplinth hardware
LPR Y Y N
MAC Y Y N
MAG Y Y N
MAG? Y Y N
NORM Y Y N
NTP N Y Y Requires hardware option to be

Page 50
NTP? N Y Y fitted
PHN? Y Y N
PIX? Y Y N
PRB? Y Y N
PROB Y N N
PXNR Y Y N
RAT? Y Y N
RATE Y Y N
REC? Y Y N
RUA? Y Y N
RUO? Y Y N
SCM Y Y N
SPOT Y Y N
SREC Y Y N
SRON Y Y N
SRO Y Y N
SRO? Y Y N
STG Y Y N
STG? Y Y N
STIG Y Y N
STI? Y Y N
STIM Y Y N
SUA Y Y N
VAC? Y Y N
VER? Y Y N
VPON Y N N VP only
VPS? Y N N
VPTP Y N N
* XB systems support the same command set as the 1500 series with the addition of these XB specific
commands.

Page 51
Appendix C: Changes made to RemCon32

This section contains the changes made to RemCon32 since version 1.00.
Version 1.01
Removed support for setting gun alignment, GALN, and aperture alignment, AALN. Added support for selecting
aperture, APER, specimen current meter, SCM. Added commands to support the LEO 400 series: set filament
current, FIL, set probe current, PROB, specimen current meter, SCM. Added command common to all electron
microscopes: read probe current, PRB, Set detector DET.
Version 2.00
No changes made.
Version 2.01
Added support for the LEO 1400 series. Added support for setting target pressure, VPTP, for the LEO EM
Variable Pressure series. Added support for the variable pressure status, VPS, and the airlock status, ALS to all
LEO EM.
Version 2.02
Added commands for reading, creating and deleting user area, RUA, CUA and DUA, respectively.
Version 2.03
Added command for aperture status, APR?.
Version 2.04
Added support for aperture alignment status, ALN?, for the LEO EM 15XX series, and stigmation status, STI?.
Added support for setting stigmators explicitly, STIM.
Version 3.01
Added annotation tool commands CUO, DUO and RUO? To create, delete and read the status of user objects.
LEO 400 series no longer supported.
Version 3.02
Added EXS? to query if external scanning is enabled. Added BGT? and CST? To get the values of brightness
and contrast. Added ABC and ABC? to set and get the Auto Brightness/Contrast state. Added BBL? to query if
beam is blanked. Added SRON to switch On or Off the scan rotation; added SRO and SRO? to set and get the
value of the scan rotation.
Added the command line flags /os or /onstartup to connect on startup and minimise the application, and the /cp or
/commsport flags to set the Comm Port.
Version 4.00
Added various FIB commands.
Added DCS? To get SEM drift correction status and DCOR to execute SEM drift correction.

Page 52
Added JKD and JKD? To set and get joystick disable state.
Added HPD and HPD? To get and set hard panel disable state.
Version 4.01
Add new commands for Nanotechnik motor control for Piezo stage

Page 53
LEO Electron Microscopy Ltd, 511 Coldhams Lane, Cambridge CB1 3JS, England
Telephone (44) 1223 414166 Fax (44) 1223 412776 E-mail info@leo-
em.co.uk
LEO Elektronenmikroskopie GmbH Carl Zeiss Strasse 56 D-73446 Oberkochen

Germany
Telephone (49) 73 64 20 6137 Fax (49) 73 64 20 4851
LEO Microscopie Electronique SARL 86 avenue du 18 juin 1940 F-92500

Rueil-Malmaison France
Telephone (33) 1 41 39 92 10 Fax (33) 1 41 39 92 29
LEO Electron Microscopy Inc One Zeiss Drive Thornwood New York 10594 USA
Telephone (1) 914 747 7700 Fax (1) 914 681 7443
Plus a worldwide network of dealers
Due to a policy of continuous development, we reserve the right to change specifications

without notice.
 by LEO Electron Microscopy Ltd Cambridge England 2003
Printed in the UK

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F

Copyright © LEO Electron Microscopy Ltd, Cambridge, England, 1997 - 2004

Part Number: 885705

Date: 20th February 2004

2. PHYSICAL INTERFACE .......................................................................................................................... 2

7.20. FRAME AVERAGE ............................................................................................................................. 16

7.81. VARIABLE PRESSURE ON / OFF ........................................................................................................ 32

APPENDIX B: PROTOCOL SUMMARY ..................................................................................................... 48

APPENDIX C: CHANGES MADE TO REMCON32.................................................................................... 51

Part Number: 885705 / 4 Remote Control User’s Guide

Commands are composed of a 4 character header (mnemonic) in which the fourth

LEO-32 responds immediately to each command with either an acknowledgement or

Error messages issued by LEO-32 include a numeric error code.

Part Number: 885705 / 4 Remote Control User’s Guide

The connection is made via a standard PC 9-way D-Type connector.

The default RS232 communication settings for RemCon32 are:

Remote Control User’s Guide Part Number: 885705 / 4

Query commands, that is commands requesting a response, will be denoted as such by

2. Fixed point real

The format used in any given command is always the same.

Parameters are separated by leading space(s) or a trailing comma, or both.

are all valid.

Part Number: 885705 / 4 Remote Control User’s Guide

3.4. Response format

Remote Control User’s Guide Part Number: 885705 / 4

• External device issues a command.

4.1. Valid command acknowledge

4.2. Invalid command acknowledge

<negative acknowledge string><terminator>

4.3. Successful completion report

The successful completion report is of the form

<completion OK string>[param1] [param2]..[paramN]<terminator>

Part Number: 885705 / 4 Remote Control User’s Guide

4.4. Unsuccessful completion report

<completion not OK string><error code><terminator>

4.5. Definition of format

4.6. Abort Command

4.8. Stage Commands

The correct sequence is:

1. Issue Move command

3. Check stage status

4. Repeat previous step until stage state is idle

5. Issue next move command

Remote Control User’s Guide Part Number: 885705 / 4

Error codes are of the following form:

5.1. Abort by LEO SEM

Part Number: 885705 / 4 Remote Control User’s Guide

6.2. Communication Settings

Remote Control User’s Guide Part Number: 885705 / 4

6.3. Properties Menu

6.4. Logging Remote Control Commands

6.5. Transmit A Text File

6.6. Phone Dialling

Depending on your modem, you will probably require Xon/RTS ENABLED in

6.7. Command line arguments

Where <PATH> is probably the LEO-32 directory and path, e.g.:

<PATH> = C:\Program Files\LEO Electron Microscopy

6.7.1. Set the Comm Port

Use the /cp or /commsport flags, followed by a value 1 – 6. For example: