SmartTrak 100HP

Ultra-High Pressure
Digital Gas Mass Flow
Meters & Controllers
FEATURES

nn Ideal for pilot plants, hydrogenation reactors, and

autoclave processes
nn Measure and control gas mass flow rates over an
inlet pressure range of 500 to 5000 psig (34.5 to
345 barg) DESCRIPTION
nn Flow ranges from 100 sccm to 20 slpm
recision flow measurement and control at
nn High accuracy +/- 1.0% of full scale; repeatability
P very high gas pressures is among the most

®
+/- 0.2% of full scale
challenging applications in the flow industry.
nn Wide differential pressure range from Leaks, gas behavioral changes, and unpredictable
0.345 bard (5 psid) to 345 bard (5000 psid) valve control can all lead to reduced performance.
nn Innovative new ValFlex™ control valve design for
precision control over a wide range of pressures Designed to overcome these challenges, the 100HP
and flow rates combines the high performance of the SmartTrak®
nn Leak-by of as little as 4 sccm at 5000 psid with a wider, more robust flow body, all-welded
(345 bard), depending on orifice sensor seals, an innovative new valve design called
nn Inert, carbon-reinforced polyamide valve seat ValFlex™, and a state-of-the-art high pressure
increases valve durability and precision calibration facility. The result is an instrument with
increased application flexibility and accuracy in high
nn Special high pressure rated seals minimize gas
permeability pressure gas flow control applications.

nn Add Sierra’s Compod™ to run small-scale

To increase valve performance and accuracy under
pilot plants or control high pressure reactors
high pressures, Sierra’s proprietary ValFlex™ valve
and autoclave processes without the expense
of DCS or PLC systems. seat technology uses a flexible, high-impact, carbon-
reinforced polyamide valve seat material to assure
nn Proprietary high pressure calibration facility,
smooth interaction with the valve orifice. The result
directly traceable to NIST
is precision control over a wide range of flows
nn 24 VDC input power reduces installation cost from 100 sccm to 20 slpm with an industry leading
and complexity leak-by as little as 4 sccm at 5000 psid (345 bard),
nn Unique Pilot Module (mounted or hand-held) lets dependant on the orifice used.
you view and change critical control functions
nn Choose from multiple analog or digital signals Because traditional valve seat elastomers like Viton,
nn Supports Modbus, Profibus DP, Foundation Neoprene and Kalrez swell and deform under high
Fieldbus pressures, the 100HP uses harder, denser seals to
minimize gas permeability.
nn CE approved
To ensure the 100HP delivers precise, high pressure
measurement and control, each unit is calibrated
on our proprietary NIST traceable high-pressure
calibration facility using a gas booster, high-pressure
accumulator tanks, and mirrored precision pressure
gauges, yielding highly accurate inlet and outlet
pressures to match the customer’s application
perfectly.
w w w. s i e r r a i n s t r u m e n t s . c o m
An instrument designed with purpose, the 100HP is
a versatile solution for the most challenging high-
pressure gas mass flow applications.
 PERFORMANCE SPECIFICATIONS PRESSURE SPECIFICATIONS 2
Accuracy Gas Inlet Pressure
± 1.0% of full scale including linearity under calibration 500 to 5000 psig (34.5 to 345 barg); See the SmartTrak 100
conditions series for pressures up to 500 psig (34.5 barg).

Repeatability Rated Burst Pressure

± 0.2% of full scale 7500 psig (517 barg)

Temperature Coefficient Pressure Drop Across a Meter

± 0.025% of full scale per °F (± 0.05% of full scale per °C)

Pressure Coefficient Typical Pressure Drop for Nitrogen

± 0.01% of full scale per psi (± 0.15% of full scale per bar), Mass Flow Meters
or better Pressure Differential in psi (mbar)
Flow Rate (slpm) ¼-inch Fittings
Response Time
5 seconds (typical) to within ± 2% of final value 0.1 0.36 (24.5)

0.5 0.36 (24.5)

OPERATION SPECIFICATIONS
1 0.37 (25.4)

Mass Flow Rates 10 0.46 (31.7)

C100L High Pressure Full Scale: 100 sccm to 20 slpm 20 0.66 (45.7)
Flow ranges specified are for an equivalent flow of nitrogen at
760 mm Hg and 21 °C (70°F); other ranges in other units are Note: Tested at 21°C, outlet at ambient pressure
available (e.g., nlpm, scfh, nm3/h, kg/h)
Differential Pressure Requirement for Controllers
For measuring and controlling a wide range of flow rates,
please consider the SmartTrak 100 series.
Minimum Differential Pressure Requirement for
For measuring or controlling flows below 5 sccm, please
Mass Flow Controllers
consider the MicroTrak™ 101.
Pressure Differential in psi (mbar)
For controlling flows requiring ultra low pressure drop, please
consider SmartTrak® 140. ¼-inch Fittings
Flow Rate (slpm)
For controlling flows in industrial (IP67) applications, please
consider the MaxTrak® 180. 0.1 5 (345)

Control Range 1 7.5 (517)

5–100% of full scale flow; automatic shut-off at 4.9%.
10 30 (2068)
Gases 20 60 (4137)
All clean gases including corrosives and toxics; specify when
ordering. Note: Tested at 21°C, outlet at ambient pressure

Maximum Gas Flow Rates Leak Integrity

5 X 10-9 atm cc/sec of helium or better
Gas Max Flow Rate (slpm)
Maximum Differential Pressure (∆P)
Air 20
345 bard (5000 psid) to atmosphere
Argon (Ar) 27.96

Carbon Dioxide (CO2) 14.74

VALVE DESIGN

Carbon Monoxide (CO) 20 Proprietary ValFlex™ Valve Design

Methane (CH4) 15 Assures valve seat/orifice compliance for smooth control.
Inert, carbon-reinforced Polyamide material (compatible with
Helium (He) 27.96 most gases) increases valve durability and precision.
Hydrogen (H2) 20
Industry best, leak-by of as little as 4 sccm at 5000 psid (345
Nitrogen (N2) 20 bard), depending on the orifice used.
Nitrous Oxide (N2O) 14.32

Gas and Ambient Temperature

32°F to 122°F (0°C to 50°C)

Warranty
1 year
 PHYSICAL SPECIFICATIONS SOFTWARE 3
Dimensions Free user software to allow for full configuration and readout
Height: 5.40 in (137.2 mm) of the instrument.
Width: 6.06 in (154 mm*)
Depth: 1.47 in (37.3 mm) HIGH PRESSURE CALIBRATION
*with ¼-inch compression fittings

Weight High Pressure Calibration Facility

4 lbs 3 oz (1.9 kg) Each unit is calibrated on our proprietary NIST traceable high
pressure calibration facility using laboratory grade nitrogen
Wetted Material gas. The facility consists of a gas booster, high-pressure
316 stainless steel or equivalent; 416 stainless steel accumulator tanks, a burst test outlet manifold, and a
90A Viton® seals and Polyamide valve seat (MFC only) calibration outlet manifold.
Approvals
CE approved

POWER REQUIREMENTS

Input Power
(ripple should not exceed 100 mV peak-to-peak)
For meter: 15-24 VDC ±10% (230 mA, regulated)
For controller: 24 VDC ±10% (500 mA, regulated)

ANALOG AND DIGITAL OUTPUTS

Analog Output Signal

Linear 0/4–20 mA, 500 ohms maximum loop resistance
and one of the following (user selectable):
Linear 0–5 VDC, 1000 ohms minimum load resistance
Linear 0-10 VDC, 1000 ohms minimum load resistance
Linear 1-5 VDC, 1000 ohms minimum load resistance

Command Signal
Analog (choice of one):
Linear 0-20 mA, 0/4-20 mA, 0-5 VDC, 0-10 VDC, 1-5 VDC

Digital Communication
RS-232 standard, RS-485 optional
Pilot Module Display optional High-Pressure Accumulator Tank and Burst Test Manifold
Digital Communication Protocols
Profibus DP The facility features the highest quality regulators to minimize
Modbus the droop effect, providing flat pressure profiles across a large
Foundation Fieldbus flow range. The burst test outlet manifold is rated to and
able to produce pressures at or above the 100HP rated burst
pressure of 7500 psig (517 barg).
OPTIONAL COMPOD
The calibration outlet manifold features mirrored precision
Sierra’s CompodTM pressure gauges, yielding highly accurate inlet and outlet
Add Sierra’s Compod™ to run small-scale pilot plants or pressures to match each application.
control high pressure reactors and autoclave processes
without the expense of DCS or PLC systems.

Fully, network-enabled RS-485 communication with Modbus

RTU protocol allows digital multi-drop networks; optional LCD
display and flow totalizer with adjustable pulse output; two
configurable digital outputs & one analog input.
 PHYSICAL DIMENSIONS 4
DIMENSION L
Length with Fittings in Inches (mm)
Fittings

¼ compression 6.02 (154)

¼ VCO 5.56 (143)

¼ VCR 5.88 (151)

6 mm compression 6.04 (156)

M100HP-L & C100HP-L Front View M100HP-L & C100HP-L Inlet View M100HP-L & C100HP-L Bottom View

(47.3) (A) (B)

1.87 #8 – 32 UNC– 2B x .25 DP M6 – 1 x 6 DP
Shade valve Valve*
Shade valve
Shade valve

INLET (25.4)
1.00
(118.3)
4.66 (6.1)
(137.2) (52.7) (50.8) .24
5.40 2.075 2.00

(37.3)
(112.3) 1.47
4.425
L (37.3)
1.47

*Valve on C100HP-L controller only; not present on M100HP-L meter

All dimensions are in inches with (mm) in brackets. Certified drawings are available on request.

Mass Flow Controller Calibration: Valve Adjustment Gauge for High-Pressure Accumulator Tank Used
During Calibration
 ORDERING THE SMARTTRAK 100 HIGH PRESSURE 5
Features Options

Parent - - - - - - - - -
1 2 3 4* 5 6 7 8 1 2
Instructions: To order a 100HP-L, please fill in each number block by selecting the codes from the corresponding features below. *MFC only

Parent Number
C100HP-L High pressure mass flow controller, digital high performance with pressure 500 to 5000 psig (34.5 to 345 barg); flow 100 sccm to 20 slpm. Standard
configuration includes: flow body and sensor constructed of 316 stainless steel, electromagnetic valve, digital electronics mounted on flow body, 90A
Viton® "O"-rings and polyamide valve seats. Linear analog and RS-232 output signals; miniature 15-pin D electrical connector; requires 24 VDC and a
command signal. This signal can come from the Pilot Module Display/Interface, the RS-232 port or any external 0-5, 0-10, 1-5 VDC or 0/4-20 mA source.
SmartTrak® Software available http://www.sierrainstruments.com/products/100_software/st2_v2.52.zip. Note: No Dial-A-Gas available.

M100HP-L High pressure mass flow meter pressure 500 to 5000 psig (34.5 to 345 barg); flow 100 sccm to 20 slpm. Standard configuration includes: flow body and sensor
constructed of 316 stainless steel, digital electronics mounted on flow body, 90A Viton® "O"-rings. Linear analog and RS-232 output signals; miniature 15 pin
D electrical connector; requires 15-24 VDC SmartTrak® Software available http://www.sierrainstruments.com/products/100_software/st2_v2.52.zip. Note: No
Dial-A-Gas available.

Note: All slpm flow ranges are also available in nlpm

Feature 1: Pilot Module Display

NR No display/interface. If option 2 digital communications are selected, NR must be selected
DD Pilot module display/Interface mounted on the enclosure
RD Remote display pilot module display/interface. Includes 10 foot (3 meter) CAT 5 cable. Optional cables up to 50 feet (15 meters) may be used. May be
used with digicomms but not simultaneously
CMNR Compod with RS-485 Modbus communication mounted on the enclosure
CMDD Compod with RS-485 Modbus communication and display mounted on the enclosure
CMNRRelays CMNR with 2 analog relays; installed in the Compod
CMDDRelays CMDD with 2 analog relays; installed in the Compod

Note: Only one option may be selected for Feature 1.

Feature 2: Inlet/Outlet Fittings Feature 3: Flow Body Elastomers Feature 4: Valve Seat (required Feature 5: Input Power
2 1/4-inch compression (standard). (required for MFM and MFC) MFC only) PV1M 15-24 VDC for meters
5 1/4-inch VCO OV1 90A Viton® elastomers VX1 ValFlex™ inert, carbon-reinforced (optional)
Polyamide
8 1/4-inch VCR OV1-F Viton® (For phosphine only) PV2 24 VDC for all
instruments (standard)
10 6 mm compression

Feature 7: External Setpoint Signals (MFC only)

Feature 6: Output Signal
S0 Pilot Module/RS-232 (standard for S3 0-10 VDC, linear
V1 0-5 VDC and 0/4-20 mA linear output signals Pilot Module/digital operation) (MFC only)
V2 1-5 VDC and 0/4-20 mA linear output signals S1 0-5 VDC, linear, standard for analog S4 4-20 mA, linear
V3 0-10 VDC and 0/4-20 mA linear output signals operation (MFC only)
S2 1-5 VDC, linear (MFC only) S5 0-20 mA, linear
Note: Alternate among V1, V2, V3 with Pilot Module display/interface or SmartTrak Software (MFC only)

Feature 8: Electrical Connection

C0 15-pin mating connector with no cable C10 10-foot (3 m) 100-Analog Cable. 15 conductor cable with D-connector on one end,
fly leads on the other.
C1 1-foot (300 mm) 100-Analog Cable. 15 conductor cable with D-connector C25 25-foot (8 m) 100-Analog Cable. 15 conductor cable with D-connector on one end,
on one end, fly leads on the other. fly leads on the other.
C3 3-foot (1 m) 100-Analog Cable. 15 conductor cable with D-connector on C() 100-Analog Cable (): Custom length communication cable. Specify cable length in
one end, fly leads on the other. feet in parenthesis. Maximum length 50 feet (16 meters). Fixed price any length.

Option 1: Digital Communications Option 2: Certificates

MB See Compod options under Feature 2 FF Foundation Fieldbus full device MC Material certificates--US Mill certs on all wetted flow body parts
description (NR only)
DP Profibus DP (NR Only) CC Certificate of Conformance

Note: Pilot Module not available with digital communications

 ORDERING THE SMART TRAK 100 (continued) 6

High-Pressure Mass Flow Controller – Actual Size

™ ValFlex, Compod are trademarks and ® SmartTrak is a registered trademark of Sierra Instruments, ® Nylon, Viton, Neoprene,
Kalrez are registered trademarks of DuPont, ® Windows is a registered trademark of Microsoft

Sierra Instruments, North America • 5 Harris Court, Building L • Monterey, California • (800) 866-0200 • (831) 373-0200 • Fax (831) 373-4402 • www.sierrainstruments.com
Sierra Instruments, Europe • Bijlmansweid 2 • 1934RE Egmond aan den Hoef • The Netherlands • +31 72 5071400 • Fax: +31 72 5071401
Sierra Instruments, Asia • Second Floor Building 5 Senpu Industrial park • 25 Hangdu Road Hangtou Town • Pu Dong New District • Shanghai, P.R. China 200122 • +8621 5879 8521/22 • Fax: +8621 5879 8586
100HP B 11/17