E4191-378 010611

MICROSOPE UNITS AND OBJECTIVES
Optical Measuring
(UV, NUV, VISIBLE & NIR REGION)
Catalog No. E14020

Many of todays ultra-microscopic manufacturing technologies require sub-micron accuracy.
Mitutoyo produces microscope systems with advanced features that combine optical and precision
measurement technologies developed by us over a long period of time.
Mitutoyo microscopes can be integrated into manufacturing systems, research and development equipment,
and product inspection lines.
Contact your nearest Mitutoyo Sales Office for further details on standard product specifications as well as
custom-designed microscopes to best fit your application.
Ref.: Microbio-World Ver.7,

(http://elfe.miyakyo-u.ac.jp/opac/2008/03/cd_2.html)
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3
A wealth of Applications
System with digital camera System for IR analysis/inspection
Digital microscopic system using VMU-V

By installing a digital camera on a microscope the VMU provides a simple and Optical systems using Mitutoyo M Plan Apo NIR objectives that cover a wide
compact system which allows microphotography and simultaneous external range of wavelength from visible to infrared are providing solutions on the
monitor observations. The VMU can be used in vertical and inverted positions production line and in the laboratory. Nondestructive inspection is made
according to your application requirements. possible by using an infrared source.
> Microphotography and observation of metallic, resinous and printed surfaces > Thickness measurement of LCD thin-film and silicon board film
> Micro-fluid analysis > Internal inspection/analysis and 3D evaluation of MEMS devices
> Cell and microorganism observation/analysis > Internal observation of IC packages, void inspection/evaluation of wafer
Dual-camera systems featuring high and low magnification and differential junctions, spectral characteristics analysis using infrared
interference observation are also available. >Femtosecond laser applications
Systems for laser applications System for dual-camera

(high & low magnification) observation
2/3 Camera
2/3
(low magnification)

1/2 Camera
1/2
(high magnification)

Flaking of polyimide membrane
By mounting two Cameras on VMU-L you

UV laser application using VMU-L4B
can observe the same area at different
(Source of photographs: V-Technology Co.,Ltd.)
magnifications simultaneously.
SEM photograph of IC surface

after removing upper layer
System for analysis
UV laser application using VMU-L4B

(Source of photographs: HOYA CANDEO Color filter working
OPTRONICS CORPORATION)
Microscope unit and objectives compatible with YAG lasers (1064nm, 532nm,
355nm and 266nm) allow high precision and quality working.
Probe (positioner tip)
> Peeling off protective films and organic thin-films
> Cutting of IC wiring (Au, Al) and exposure of lower layer pattern
> FPD defects repair The Mitutoyo M Plan Apo objectives provide a long working distance.
> Photomask repair This allows you to design an optical system for defects evaluation of
> Marking, trimming, patterning, spot annealing and scribing semiconductor integrated circuits and precise repair with YAG lasers.
The optical system for direct observation is also available.
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Contents
Video Microscope Unit
VMU 6
Wide-field Video Microscope Unit
WIDE VMU 10
Fine Scope Unit
FS70 14
Objectives for Bright Field (long working distance)
M Plan Apo/M Plan Apo HR 18
Objectives for Bright Field (long working distance)
M Plan Apo SL 20
Objectives for Bright Field (with cover-glass thickness compensation
G Plan Apo 21
Objectives for Bright/Dark Field (long working distance)
BD Plan Apo/BD Plan Apo HR 22
Objectives for Bright/Dark Field (ultra-long working distance)
BD Plan Apo SL 23
Near-infrared Objectives for Bright Field
M Plan Apo NIR/M Plan Apo NIR HR 24
Near-infrared Objectives for Bright Field (with cover-glass thickness compensation)
M Plan Apo NIR B, LCD Plan Apo NIR 25
Near-ultraviolet Objectives for Bright Field
M Plan Apo NUV/M Plan Apo NUV HR 26
Near-ultraviolet Objectives for Bright Field (with cover-glass thickness compensation)
LCD Plan Apo NUV/LCD Plan Apo NUV HR 27
Ultraviolet Objectives for Bright Field
VMU WIDE VMU M Plan UV 28
Ultraviolet Objectives for Bright Field (LCD)
MLCD Plan UV 28
Tube lens
MT 29
Objectives for Measuring Microscopes
ML 30
Objective lenses Objectives for Centering microscopes
CF 31
Wide field of view Eyepieces & Reticles
WF/UWF 32
Optional accessories of VMU, FS70 and VM-Zoom
Stand, Stage, Illumination Unit 33
Dimensions (VMU/WIDE/VMU/FS70) 34
Reference:
Specifications of Objective Threads/
Transmission of Mitutoyo Objectives 36
Commentary:
Laser Operating Method and Precautions 37
Glossary 38
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Video Microscope Unit
VMU
VMU-V VMU-H VMU-LB VMU-L4B
*Objectives shown mounted on tubes are optional.
Features
> Small, lightweight microscope unit designed for a camera observation system
Suitable for observing a wide range of objects: metal, resin, printed surfaces, minute mechanisms, etc.
> Compatible with YAG lasers (1064nm, 532nm, 355nm and 266nm)
Suitable for cutting, trimming, repair and marking of IC wiring (Au, Al), removing and processing thin-film (insulating film) and repair of color filters (defects
repair).
> Compatible with infrared optical system
Available for internal observation of IC packages and spectral characteristics analysis using an infrared source and camera.
> Standard of telecentric reflective illumination system with aperture diaphragm
This is the best illumination system for image processing applications (e.g. dimension measurement, form inspection and positioning) which require even
lighting.
> Extending the VMU series with high rigidity/performance VMU-LB and VMU-L4B models.
> Available for dual-camera (high & low magnification) observation (VMU-LB and VMU-L4B).
Specifications
Model No. VMU-V VMU-H VMU-LB VMU-L4B
Order No. 378-505 378-506 378-513 378-514
Camera mounting orientation Vertical Horizontal Vertical (rotatable) Vertical (rotatable)
Observation BF, erect image BF, inverted image BF, erect image
Camera Optical features Magnification: 1X; Wavelength (): visible radiation
port Mount C-mount (centering and parfocal adjustment) C-mount with centering and parfocal adjustment and green filter switch
Tube lens (correction range) 1X (visible - NIR) 1X (NUV - visible - NIR) 1X (UV - visible - NIR)
Magnification: 1X Magnification: 1X
Optical features
Optical : 355/532/1064m : 226/355/532/1064m
tube Laser port Mount With parfocal adjustment
Suitable YAG Fundamental, second and third- Fundamental and second, third

laser type*2 harmonic mode and fourth-harmonic mode
Available for observation and laser Available for observation and laser
Polarizer*1 Available for observation
applications applications
For observation M Plan Apo/HR/SL, G Plan Apo
Suitable objective M/LCD Plan Apo NIR,
(optional) M/LCD Plan Apo NIR,
For laser cutting M/LCD Plan Apo NUV,
M/LCD Plan Apo NUV
M Plan UV
Suitable camera 2/3 or smaller C-mount compatible type
Optical system illumination Telecentric reflective with aperture diaphragm
Fiber-optic illuminator (optional) 12V/100W (378-700D), 12V/150W (178-316D)
Mass (Dimensions: Refer to page 27.) 650g 750g 1270g 1300g
*1: M Plan Apo 1X objective should be used together with the polarizer (378-710 or 378-715).
*2: When mounting a laser, ensure all safety precautions are observed and be aware of laser output power, beam energy density and the unit's weight. Please consult Mitutoyo if in doubt.
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System diagram
C-mount compatible analog camera or digital camera

Third-party YAG lasers*5
Fixed-magnication monitoring
camera mount
2X TV adapter unit 0.5X TV adapter unit *1 (378-087) P.8 *4
(378-703) (378-704) P.8
VMU-V VMU-H VMU-LB VMU-L4B

(378-505) (378-506) (378-513) (378-514)
Polarizer Manual turret nosepiece unit Self-aligning motorized turret Polarizer (B)
(378-710) (for BF) *2 nosepiece unit (for BF) *3 (378-715) P.8
P.8 (378-707) P.8 Quad (378-713)
P.8
Quintuple
Fiber-optic illumination unit
100W (378-700)
Objectives
M Plan Apo series (for observation):
150W (176-316)
All types on P.18 to P.20
G Plan Apo series (for observation): Focusing unit A Focusing unit B *2
P.33 All types on P.21 (378-705) P.8 (378-706) P.8
M/LCD Plan Apo NIR series on P.24 to P.25

Filters (for ber-optic (for fundamental/second harmonic laser
illumination unit machining): Used for LB Simple stand
Transmitted light unit
No.378-700) (for near-infrared observation): Used for V/H/L (378-730)
(378-736)
M/LCD Plan Apo NUV series on P.26 to P.27 P.33 P.33
12AAB251 ND2 (for second/third harmonic laser machining):
12AAB252 ND8 Used for LB
12BAA583 GIF M Plan UV series on P.28
12BAA584 LB80 (for second/fourth harmonic laser machining): Fiber-optic illumination unit
Used for L4B 100W (378-700) X-Y stage (5050mm) Third-party motorized
(378-020) X-Y stages
(5050mm)*6
150W (176-316)
*1: Compatible with 1/2-inch or less C-mount cameras. P.33
*2: Use focusing unit B (378-706) if the distance between the mounting position and VMU main unit is
P.33
desired to be as small as possible.
If the manual turret nosepiece unit (378-707) is used concurrently, mount the unit in front of the
VMU main unit. For details on mounting position, refer to the gures on page 9. Filters (for ber-optic
*3: This turret nosepiece unit cannot be used with focusing unit B (378-706). For details on mounting illumination unit
position, refer to the gures on page 9. No.378-700)
*4: Use this mount when mounting a C-mount camera using the laser port. Use this mount for 2/3-inch
or smaller cameras. 12AAB251 ND2
*5: Mitutoyo does not handle these lasers. Consult Mitutoyo for more information. 12AAB252 ND8
*6: An adapter may be required when mounting any of these stages. Consult Mitutoyo for more 12BAA583 GIF
information. 12BAA584 LB80
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Optional Accessories for VMU
Manual turret Power turret

Has 4-objective mounts and can be fixed in the desired position relative Has 5 objective mounts and can be fixed in the desired position relative
(inward, outward, etc.) to the mounting surface. (inward, outward, etc.) to the mounting surface.
Order No. 378-707

Observation method Bright field
No. of objective mounts 4
Mass 780g
Console box
Installed on VMU-V with optional objectives
Installed on VMU-V with optional objectives
Order No. 378-713

Observation method Bright field
Focus unit A and B No. of objective mounts 5, with centering adjustment
View field adjustment 0.5mm
Manual focus units for the VMU. Positioning accuracy 2=3m
An optional stand (378-730) and XY Durability (life-time) 1 million repositioning operations
stage (378-020) are provided to be Drive method DC motor
used in combination. Power supply AC100V - 240V, 10W
A power focus unit is also available. Output interface RS-232C* for external PC control
Cable length 3m
Refer to page 12.
Turret: 130x47x186mm, 1.8kg,
Dimensions (WxHxD) and mass
Console box: 108x63x176mm, 810g
Focus unit A mounted on VMU-V with an optional *Optional RS-232C Cable: 12AAA807
objective
Polarizer and Analyzer

Focus unit A Focus unit B Provides simplified polarized light observation. Also enhances contrast of
Order No. 378-705 378-706 low-magnification objectives.
Travel range 50mm
Coarse/fine feed Coarse: 3.8mm/rev., Fine: 0.1mm/rev.
378-710: For VMU-V and VMU-H
Loading capacity Approx. 17.4kg Approx. 17.7kg 378-715: For VMU-LB and VUM-L4B
Mass 2.9kg 2.7kg
TV adapter unit No.378-710

C-mount adapters for changing to a higher or lower magnification.
Installed on
VMU-L4B
No.378-715
Order No. 378-710 VMU-V VMU-H

2X TV adapter unit 0.5X TV adapter unit
Order No. 378-715 VMU-LB VMU-L4B
2X TV adapter unit 0.5X TV adapter unit
Order No. 378-703 378-704
Camera mount
Magnification 2X 0.5X
Suitable camera 2/3 or smaller type 1/2 or smaller type Can be attached to the laser
Mass 25g 25g mount (VMU-LB and VMU-L4B)
for dual-camera system. It is
compatible with 2/3 or smaller
C-mount cameras.
378-087 Mass: 180g
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Dimensions of Optional Accessories for VMU Series
Manual MAX 130*

76.5
MAX 78*
Power turret
turret MAX 130* MAX 78*
27 76.5
76 27 27 27
(Parfocal distance) 27 27 27 27
27
76 27 27 27
M200.5
27
27 27 27 27
27
76
27
27
32
M200.5
76 27
(Parfocal distance)
27
95 76
95 76
32
32
(Parfocal distance)
Mount unit
(Parfocal distance)
53.7
(Parfocal distance)
(Parfocal distance)
76
76
Workpiece
surface
32
95
95
88.6 87 136 Workpiece surface
53.7
distance)
Mount unit
distance)
Workpiece Workpiece Workpiece

surface MAX130* MAX78*
95 (Parfocal 95
surface
95 (Parfocal 95
* Where M Plan Apo 100X (378-815) is used surface

88.6 87 * Where M Plan Apo136
100X (378-815) is used
Workpiece surface
Workpiece the turret on VMU-V or VMU-H
When mounting Workpiece MAX130* MAX78*
surface
M Plan Apo surface When mounting the turret on VMU-V or VMU-H
* Where
Note 1: The lens mount must be removed from100X
VMU.(378-815) is used * Where M Plan Apo 100X (378-815) is used
Note 1: The lens mount must be removed from VMU.
Note 2: The turret can be fixed
MAXin126*
the desiredMAX
position
77* relative (inward, outward, etc.) to the Note 2: The turret can be fixed in the desired position relative (inward, outward, etc.) to the
mounting surface. 78(VMU-H only) 108
mounting surface. (VMU-H only)
MAX 126* MAX 77* 27
78 108 27
27
27 27
76 27 27 27
76 27 27 27
27
27
2776 27 27 27
76 27 27 27
27 M200.5
41.5 2741.5 27
27
27
distance) 32
41.5 2741.5 27
M200.5
(Parfocal distance)
Intermediate
27
95 76
95 76
lens tube
32
(Parfocal32
Intermediate
53.7
(Parfocal distance)
(Parfocal distance)
95 (Parfocal distance)
lens tube Mount unit

Intermediate
(Parfocal distance)
Workpiece
76
76
lens tube Workpiece

Mount unit surface
32
surface
95
95
Intermediate 88.6 87 136

53.7
distance)
Workpiece Mount unit

Workpiece lens tube Workpiece MAX126* MAX77* Workpiece

surface surface
95 (Parfocal 95
* Where M Plan Apo NIR HR100X (378-864-5) is used surface

Mount unit 88.6 87* Where M Plan Apo136
NIR HR100X (378-864-5) is used surface
Workpiece Workpiece MAX126* MAX77*

surface surface
* Where M Plan Apo NIR HR100X (378-864-5) is used * Where M Plan Apo NIR HR100X (378-864-5) is used
When mounting the turret on VMU-LB or VMU-L4B When mounting the turret on VMU-LB or VMU-L4B
Note 1: The middle optical tube and lens mount must be removed from VMU. Note 1: The middle optical tube and lens mount must be removed from VMU.
Note 2: The turret can be fixed at 45 intervals around the optical axis. Note 2: The turret can be fixed in the desired position relative to the optical axis.
Focus unit A and B Polarizer and Analyzer

117 (37) Hole positions for mounting onto the main unit 28
Vertical travel 5-M4 screw holes, depth 8
229 Vertical illumination
63.5 unit with aperture
27 27 4.5
(4)
25 25
diaphragm Main body

56
Analyzer
27 27
152.5
70
69
Illuminated
126.5
149
144
140
lens tube
41.5 15
89.5
247.5
76
20.5
63.5 Polarizer
7.5
23.5 56.5 73 1
distance)
(Parfocal
94 (4)
95
80 Focusing unit A 102

87.6 (37) Hole positions for mounting onto the main unit
Vertical travel 229 5-M4 screw holes, depth 8 Workpiece surface
63.5
Installing the polarizer and analyzer on VMU-V or VMU-H
27 27 4.5
(4)
25 25
Note: The analyzer is installed by opening the main body mirror head. The polarizer is installed by
56
removing the illumination tube.

70
69
126.5
149
144
140
89.5
Vertical illumination Main body

63.5 Analyzer tube with aperture
7.5
23.5 26.5 73 1 94 (4) diaphragm

27 27
50 Focusing unit B 102
TV adapter unit Camera mount

41.5 27
Cover ring
68.5
76
20.5
Intermediate image position Intermediate image position 75

17.5
C mount Intermediate image position

17.5
C mount Polarizer
distance)
(Parfocal
17.5
2X adapter 0.5X adapter

the case where no adapter lens
the case where no adapter lens
95
(Difference in dimension from
lens unit
(Difference in dimension from
lens unit
Workpiece
unit is used: 18.2mm)
surface
170.7
64.2
60.5
unit is used: 0mm)
152.5
When installing the polarizer on VMU-LB or VMU-L4B

Note 1: The analyzer is installed by loosening the cover ring. The polarizer is installed by removing
the illumination tube.
38+0.05
0
Dimensions with the 2X TV adapter Dimensions with the 0.5X TV adapter
unit mounted unit mounted 56
9
Wide-field Video Microscope Unit
WIDE VMU
WIDE VMU-V WIDE VMU-H WIDE VMU-BDV WIDE VMU-BDH
*Objectives shown mounted on tubes are optional.
Features
Incorporates a wide-field image sensor (APS-C format or Bulk inspections covering a wide area can be performed with
smaller size) providing seven times greater viewing area than multiple units in a high-density configuration.
the VMU Series for greatly enhanced inspection efficiency.
Mounting WIDE VMU-V and WIDE VMU-H
units alternately prevents interference
Image sensor between image sensors.
7 Optical fiber
for bright-field
illumination
VMU
Image sensor Optical fiber

WIDE VMU for dark-field
illumination
In addition to normal bright-field observation, this series
supports dark-field
observation for scratch
inspection, etc., and
polarized light observation
for increased contrast
when viewing certain
specimens.
WIDE VMU dark-field
Specifications
For Bright-field Observation For Bright-/Dark-field Observation
Model No. WIDE VMU-V WIDE VMU-H WIDE VMU-BDV WIDE VMU-BDH
Order No. 378-515 378-516 378-517 378-518
Camera mounting orientation Vertical Horizontal Vertical Horizontal
Bright field and Dark field/Erect Bright field and Dark field/Inverted
Observation Bright field/Erect image Bright field/Inverted image
image image
Optical system Magnification: 1X Visible light
Camera Mount F-Mount, C-Mount (with aligning and parfocal adjustment mechanism)
Optical tube Imaging forming (tube) lens Built-in 1X tube lens (Correcting wavelength range: 436 - 656nm)
Image field 30
Polarized unit* Mountable
Objective lens (required option) M Plan Apo, M Plan Apo HR, M Plan Apo SL, G Plan Apo BD Plan Apo, BD Plan Apo HR, BD Plan Apo SL
Applicable camera APS-C format or smaller size
Telecentric illumination, Bright-field illumination optical tube Telecentric illumination, Bright/Dark-field illumination optical tube
Reflected illumination optical system (Dual-port fiber-optic illumination)
(Single-port fiber-optic illumination) Bright/Dark-field switching with light source on-off
Illumination unit (optional) Fiber-optic illumination unit (12V, 100W) (No. 378-700)/ (12V, 150W) (No. 176-316)
Main unit mass 1800g 1950g 2000g 2150g
*Polarized observation by Bright-field illumination
10
System diagram
F-mount compatible analog camera or digital camera C-mount compatible analog camera or digital camera
C-mount adapter
WIDE VMU-V WIDE VMU-H WIDE VMU-BDV WIDE VMU-BDH

(378-515) (378-516) (378-517) (378-518)
Polarizer (C) Bright eld turret Bright eld motorized turret Bright/Dark eld turret Bright/Dark eld motorized turret
(378-719) (378-724) (378-726) (378-725) (378-727)
P.12 P.12 Quad P.12 Quintuple P.12 Quad P.12 Quad
A
A B
B
C
Fiber-optic illumination unit C D

D
E
100W (378-700)
150W (176-316) Objectives Objectives

M Plan Apo series (for observation) BD Plan Apo series (for observation)
All types on P.18 to 19 All types on P.22 to 23
P.33
G Plan Apo series (for observation)
All types on P.21 Focusing unit C
Filters (378-718)
(for ber-optic illumination P.12
unit No.378-700)
Transmitted light unit Simple stand

12AAB251 ND2 (378-736) (378-730)
12AAB252 ND8 P.33 P.33
12BAA583 GIF
12BAA584 LB80
Fiber-optic illumination unit

100W (378-700)
X-Y stage (5050mm) Third-party motorized
(378-700) X-Y stages
(5050mm) *1
150W (176-316) P.25
P.33
P.33
Filters
(for ber-optic illumination
unit No.378-700)
12AAB251 ND2
12AAB252 ND8
12BAA583 GIF
*1: An adapter may be required when mounting any of these stages. Consult Mitutoyo for more information. 12BAA584 LB80
11
Optional Accessories for WIDE VMU series
Bright field turret Bright field motorized turret

Bright/Dark field turret Bright/Dark field motorized turret
Has 4-objective mounts and can be fixed in the desired position relative Has 5-objective mounts for Bright field motorized turret and 4-objective
(inward, outward, etc.) to the mounting surface. mounts for Bright/Dark field motorized turret. It can be fixed in the desired
position relative (inward, outward, etc.) to the mounting surface.
Control box
Installed on WIDE VMU with optional objectives Installed on WIDE VMU with optional objectives
Order No. 378-724 378-725 Order No. 378-726 378-727

Observation method Bright field Bright/Dark field Observation method Bright field Bright/Dark field
No. of objective mounts 4 4 5 (1 reference hole and 4 holes
No. of objective mounts 4
Mass 825g 755g with centering adjustment)
WIDE VMU-V WIDE VMU-BDV View field adjustment 0.5mm
Applicable models WIDE VMU-H WIDE VMU-BDH 2 = 3m
Positioning accuracy
1 million repositioning
Durability (life-time)
operations
Drive method DC motor
Focus unit C AC100V - 240V AC100V - 240V
Power supply Max. power consumption is Max. power consumption is
Manual focus units for the WIDE VMU. approx. 10W approx. 6W
When an optional stand (378-730) is Output interface RS-232C* for external PC control
mounted, center of stage and optical Cable length 2.9m (connection of motorized turret and control box)
axis are matched. A power focus unit is Turret: 13047186mm, Turret: 16465137mm,
Dimension: WHD (mm) 1.8kg, 1.8kg,
also available. Refer to page 16. Mass Control box: 10863176mm, Control box: 10872193mm,
810g 810g
WIDE VMU-V WIDE VMU-BDV
Applicable models WIDE VMU-H WIDE VMU-BDH
*Optional RS-232C Cable: 12AAA807
Focus unit C mounted on -WIDE VMU with an optional objective

Polarizer and Analyzer (C)
Focus unit C
Provides simplified polarized light observation. Also enhances contrast of
Order No. 378-718
low-magnification objectives.
Travel range 50mm
Coarse/fine feed Coarse: 3.8mm/rev., Fine: 0.1mm/rev.
Loading capacity Approx. 17.4kg
Mass 2.7kg
Applicable models WIDE VMU (all models)
No.378-719
Order No. 378-719 WIDE VMU (all models)
12
Dimensions of Optional Accessories
for WIDE VMU Series
Bright field turret Bright/Dark field turret
MAX 130 MAX 78 MAX 132 MAX 81
76.5 76.5
27 27
54
54
54
54
95(Parfocal distance) 85
85
29.1
29.1
Single mount unit Single mount unit
95(Parfocal distance)
When mounting the turret on WIDE VMU When mounting the turret on WIDE VMU
Note 1: Turret is installed by removing the single mount unit, but the distance between Note 1: Turret is installed by removing the single mount unit, but the distance between
the mounting position of WIDE VMU main unit and the stage is unchanged. the mounting position of WIDE VMU main unit and the stage is unchanged.
Note 2: Turret mounting direction is limited to the direction indicated in the above figure. Note 2: Turret mounting direction is limited to the direction indicated in the above figure.
Bright field motorized turret Bright/Dark field motorized turret

MAX 130 MAX 78 MAX 132 MAX 80
87 88
27 27
54
54
54
54
29.1
29.1
Single mount unit Single mount unit
When mounting the turret on WIDE VMU When mounting the turret on WIDE VMU
Note 1: Turret is installed by removing the single mount unit, but the distance between Note 1: Turret is installed by removing the single mount unit, but the distance between
the mounting position of WIDE VMU main unit and the stage is unchanged. the mounting position of WIDE VMU main unit and the stage is unchanged.
Note 2: Turret mounting direction is limited to the direction indicated in the above figure. Note 2: Turret mounting direction is limited to the direction indicated in the above figure.
Focus unit C Polarizer and Analyzer (C)

117 (37)
5
Camera lens tube
45
5-M4 screw holes, Analyzer Analyzer

depth 8
Vertical travel 229 Illuminated lens tube
30 6
4.5
63.5 Cover ring

25 25
41 2
(4)
Polarizer
54
56
Polarizer
69
70
157
126.5
144
140
98.5
32 48 73 1 63.5
7.5
80 94 (4)
102
When mounting the turret on WIDE VMU

Note: The polarizer is installed by loosening the cover ring. The analyzer is installed by
removing the camera lens tube.
13
Microscope unit
FS70
FS70Z FS70L FS70L4
*Objectives and eyepieces shown mounted are optional.
Features
> Compact microscope unit with trinocular eyepiece tube
Suitable for observation of many different types of object: metal surfaces, semiconductors, LCDs, resins, etc.
> Compatible with YAG lasers (1064nm, 532nm, 355nm and 266nm)
Suitable for cutting, trimming, repair and marking of IC wiring (Au, Al), removing and processing thin-films (insulating film) and repair of color filters (defects
repair). Also ideal as the microscope unit of a prober station for semiconductor substrates.
> Compatible with infrared optical systems
Available for inner observation of silicon package and spectral characteristics analysis by using infrared light source and camera.
> Available for various observations in bright field, dark field*, simplified polarized and differential interference contrast (DIC).
*Made-to-order
> Telecentric reflective illumination system with aperture diaphragm.
> High operability due to the inward turret design and long-working-distance objectives.
Specifications
Standard head type Model No. FS70Z (FS70Z-S) FS70ZD (FS70ZD-S) FS70L (FS70L-S) FS70L4 (FS70L4-S)
(w/short focus unit) Order No. 378-165-1 (-2) Made-to-order 378-166-1 (-2) 378-167-1 (-2)
Model No. FS70Z-TH FS70ZD-TH FS70L-TH FS70L4-TH
Tilting head type
Order No. 378-165-3 Made-to-order 378-166-3 378-167-3
BF/simplified polarized/DIC, erect BF/DF/simplified polarized/DIC,
Observation BF/simplified polarized, erect image
image erect image
Applicable eyepiece (optional) 10X (field number 24), 15X (field number 16), 20X (field number 12),
Field number 24
Puiple distance Siedentopf type, adjustment range: 51 to 76mm
Tilt angle 0 to 20, displacement of eye point: 114mm (only for tilting head type)
Trinocular
tube Optical pass ratio Eyepiece: Camera mount = 50%: 50% (fixed) Eyepiece: Camera mount = 100%: 0% or 0%: 100% (switchable)
C-mount with parfocal adjustment* C-mount with parfocal adjustment and green filter switch*
Camera mount
Optical *In combination with an optional adapter B *Only for FS70-L4, L4-S and L4-TH
tube Protective filter Laser cutting filter
Tube lens (correction range) 1- 2X zoom (visible) 1X (NUV - visible - NIR) 1X (UV - visible)
Magnification: 1X Magnification: 1X
Optical features
: 355/532/1064m : 226/532m
Laser port
Suitable YAG laser Fundamental and second and Second and fourth-harmonic

type*2 third-harmonic waves waves
Focus Coarse/fine feed Coaxial feeding knob (right and left), Coarse feed: 3.8mm/rev., Fine feed: 0.1mm/rev.
unit Travel range 50mm
4-mount manual or 5-mount 4-mount manual or 4-mount
Suitable turret (optional) 4-mount manual or 5-mount power turret
power turret power turret
For observation*1 M Plan Apo/HR/SL, G Plan Apo BD Plan Apo/HR/SL M Plan Apo/HR/SL, G Plan Apo
Suitable objective
(optional) M/LCD Plan Apo NIR,
For laser cutting M Plan UV
M/LCD Plan Apo NUV
Optical system of illumination Koehler reflective illumination with aperture diaphragm
Fiber-optic illuminator (optional) 12V/100W (378-700D), 12V/150W (178-316D)
Loading capacity of camera mount Approx. 14kg (tilting head type: 13.2kg) Approx. 13kg (tilting head type: 13.1kg)
Mass (Dimension: Refer to page 28.) 6.6kg (tilting head type: 7.4kg) 6.7kg (tilting head type: 7.5kg)
Mass 6.6kg (-TH: 7.4kg) 6.7kg (-TH: 7.5kg)
*1: M Plan Apo 1x objective should be used together with the polarizer (378-092 or 378-094).
*2: When mounting a laser, ensure all safety precautions are observed and be aware of laser output power, beam energy density and the unit's weight. Please consult Mitutoyo if in doubt.
14
System diagram
C-mount compatible analog camera or digital camera Third-party YAG lasers*3
Differential interference
contrast unit
0.5X TV adapter unit (378-076,
(375-054) 378-078,
P.12 378-079, 378-080) P.12
Eyepieces P.25 Adapter B Polarizer (A)*2 Polarizer (C)*1

WF10/24 (378-856) (378-042) P.12 (378-092) (378-094)
WF15/16 (378-857) P.12 P.16
WF20/12 (378-858)
FS70ZD FS70Z FS70L FS70L4

(378-165-1) (378-166-1) (378-167-1)
FS70ZD-TH FS70Z-TH FS70L-TH FS70L4-TH

(378-165-3) (378-166-3) (378-167-3)
Motorized focusing unit Simple stand

(378-061) P.12 (378-730)
P.26
Manual turret nosepiece unit Motorized turret nosepiece unit Self-aligning motorized turret Self-aligning motorized turret
(for BF/DF) (for BF/DF) nosepiece unit (for BF) nosepiece unit (for BF)
(176-211) (176-210) P.16 (378-018) Quad (378-016)
P.16 P.16 Quintuple (378-116)
Quad Quad P.16
A
B
C
Quad
D
Quintuple
Transmitted light unit
(378-736)
P.33
Fiber-optic illumination unit Objectives Objectives Link cable 0.6m
100W (378-700) (12AAB283)
BD Plan Apo series M Plan Apo series (for observation):
(for observation): P.18 to 20 P.18 to 19
G Plan Apo series (for observation): Fiber-optic illumination unit
150W (176-316)
P.21 100W (378-700)
M/LCD Plan Apo NIR series on P.24 to 25 X-Y stage (5050mm) Third-party motorized
P.33 (378-020) X-Y stages
(for fundamental/second harmonic laser
machining): Used for L 150W (176-316) (5050mm) *4
Filters (for ber-optic (for near-infrared observation): Used for L
illumination unit P.33
No.378-700) M/LCD Plan Apo NUV series on P.26 to 27 P.33
(for second/third harmonic laser machining):
Used for L
12AAB251 ND2 Filters (for ber-optic
12AAB252 ND8 M Plan UV series on P.28 illumination unit
12BAA583 GIF (for second/fourth harmonic laser machining): No.378-700)
12BAA584 LB80 Used for L4
*1: This unit is only applied to 1/2-inch or less CCD cameras. 12AAB251 ND2
*2: Focusing unit A (378-705) can be attached to the simple stand (378-730). 12AAB252 ND8
*3: Mitutoyo does not handle these lasers. Consult Mitutoyo for more information. 12BAA583 GIF
*4: An adapter may separately be required when mounting any of these stages. Consult Mitutoyo for more information. 12BAA584 LB80
15
Optional Accessories for FS70
Console box
378-016
Order No. 378-018 378-211 Order No. 378-116 378-016 378-210

Observation method Bright field Bright/dark field Observation method Bright field Bright/dark field
No. of objective mounts 4, with centering and parfocal adjustment (378-018) 5, with centering
No. of objective mounts 4 4
View field adjustment 0.5mm adjustment
Parfocal adjustment 0.5mm View field adjustment 0.5mm
Mass 1.9kg 1.2kg Positioning accuracy 2=3m
1 million 1 million
Durability (life-time) repositioning repositioning
operations operations
Polarizer and analyzer Drive method DC motor
Power supply AC100V - 240V, 10W
For simplified polarized-light observation. Also suitable for enhancing Output interface RS-232C* for external PC control
contrast of low-magnification objectives. Cable length 3m
Turret: 164x65x137mm, 1.4kg
Dimensions (WxHxD) (378-116: 130x47x186mm, 1.8kg)
and mass Console box: 108x72x193mm, 810g
For FS70Z For FS70L FS70L4 (378-116: 108x63x176mm, 810g)
378-092 378-094 *Optional RS-232C Cable: 12AAA807
DIC unit
Used for differential interference contrast observation in conjunction with the
polarizer.
Order No. Magnification
378-076 100X, SL80X, SL50X
378-078 50X, SL20X
378-079 20X
378-080 10X, 5X
Adapter B 0.5X TV adapter unit

Used for mounting a C-mount Allows observation over a wide field
camera. of view on the monitor (2X wide)
45 due to the 0.5X relay optics.
Intermediate image position It is used in conjunction with the
optional adapter B.
17.5
45 23
67.3
62.1
38 +0.05
0
54
122.6
74.1
378-042 Mass: 170g 378-054

View field of image: 11mm
Mass: 300g
16
Dimensions of Optional Accessories for FS70

378-018 378-116
111
47
50
A B C D E
50.7 130
176-211 176-210
POWER T UR R E T
108
S T AT US POWER
50
65
A B C D
48
164
Optional objective adapter: 378-026-1 Focus point adjust shim set

This objective adapter allows mounting the bright field objective on the Order No. Use Details
bright/dark field turret (176-211 and 176-210) while maintaining the focus 378-089 For bright field turret The focus point adjust shim set includes
position (parfocal). 50m, 30m and 20m thickness SUS
378-090 For bright/dark field turret rings
Order No. 378-026-1
Microscopes mounted with the bright/dark field
Applicable models manual turret or motorized turret
(MF-U, HyperMF-U) Short focus unit type
Applicable
M Plan Apo, M Plan Apo SL, Manual Focus Unit S can be mounted on the main unit 68mm higher than
G Plan Apo, M Plan Apo NIR,
objective lens M Plan Apo NUV, M Plan UV
the standard focus unit without changing the eye-point position. The order
numbers in the following table represent the FS70-series main units on which
this focus unit has previously been mounted.
324 324
Tilting head type 154 154
Mitutoyo's FS70-series lineup adopts a tilting head specification that allows
the user to adjust the head to an appropriate eye point according to personal
(126.5)
physical attributes when looking through the microscope eyepiece.

(293.5)
126.5
293.5
451
68 (89.5)
154
(157.5)
89.5
Intermediate image position

Vertical travel
79.6
31.5
25
25 153 1 153 1
Standard focusing unit mounting dimensions Manual focusing unit S mounting dimensions
93.4
212
Model FS70Z-S FS70L-S FS70L4-S

355
Objective mounting surface Order No. 378-165-2 378-166-2 378-167-2

Travel range 50mm
(Parfocal distance)
95
82
Coarse/fine feed Coarse feed: 3.8mm/rev., Fine feed: 0.1mm/rev.

MAX130 Loading capacity of camera mount*2 Approx. 14.0kg Approx. 13.9kg Approx. 13.9kg
FS70Z-TH 153 (Mounting
surface) 1
154
Mass 6.6kg 6.7kg 6.7kg
(FS70Z-TH with optional eyepieces, objectives, and turret.)
*Mass of turret, objective, and eyepiece are excluded.
17
Objectives for Bright Field Observation
(long working distance)
M Plan Apo /
M Plan Apo HR
VMU WIDE VMU FS70 MF-U Hyper MF-U
Features > Infinity corrected

> Bright field observation
> Long working distance
> Plan-Apochromat
Dimensions
M Plan Apo 1 M Plan Apo 10 M Plan Apo HR 5
(Working distance) (Working distance) (Working distance)
11 1/4 Retardation plate
2 34 3.7 25.5
34
34
34
24.8
28.2
32.2
32.2
38
41
84 61 69.5
5 95 (Parfocal distance) 5 95 (Parfocal distance) 5 95 (Parfocal distance)

1.4 34 1.5 20 7.5 15
39
34
34
27.5
32.2
29.2
32.2
24.7
26
29
37
61 75 80

1.6 34 1.5 13 2 5.2
34
34
34
32.2
32.2
28.2
32.2
29.2
25
23
61 82 89.8
M Plan Apo 7.5 M Plan Apo 100 M Plan Apo HR 100

35 4.7 6 2 1.3
34
34
34
32.2
32.2
32.2
28.2
29.2
17.8
25
24
60 89 93.7
18
Specifications
f (mm) R (m) Real FOV (mm) Mass
Model Order No. N.A. W.D. (mm) DOF (m)
(=550nm) (=550nm) 24 eyepiece 1/2" camera (g)
M Plan Apo
M Plan Apo 1 *1 378-800-3 0.025 11.0 200 11.0 440 24 4.86.4 300
M Plan Apo 2 *2 378-801-6 0.055 34.0 100 5.0 91 12 2.43.2 220
M Plan Apo 5 378-802-6 0.14 34.0 40 2.0 14 4.8 0.961.28 230
M Plan Apo 7.5 378-807-3 0.21 35.0 26.67 1.3 6.2 3.6 0.640.85 240
M Plan Apo 10 378-803-3 0.28 34.0 20 1.0 3.5 2.4 0.480.64 240
M Plan Apo 20 378-804-3 0.42 20.0 10 0.7 1.6 1.2 0.240.32 270
M Plan Apo 50 378-805-3 0.55 13.0 4 0.5 0.9 0.48 0.100.13 290
M Plan Apo 100 378-806-3 0.70 6.0 2 0.4 0.6 0.24 0.050.06 320
M Plan Apo HR
M Plan Apo HR 5 *3 378-787-4 0.21 25.5 40 1.3 6.2 4.8 0.961.28 285
M Plan Apo HR 10 *3 378-788-4 0.42 15.0 20 0.7 1.60 2.4 0.480.64 460
M Plan Apo HR 50 378-814-4 0.75 5.2 4 0.4 0.49 0.48 0.100.13 400
M Plan Apo HR 100 378-815-4 0.90 1.3 2 0.3 0.34 0.24 0.050.06 410
Lens set
Lens set B1 378-911 A set of M Plan Apo 10x, 20x, 50x, and 100x
Lens set B2 378-912 A set of M Plan Apo 2x, 5x, 10x, and SL20x
Lens set B3 378-913 A set of M Plan Apo 5x, 10x, 20x, and 50x
Every resolution and single objective's focal depth in the above table is a value determined on the basis of a reference wavelength (=0.55m).
*1: An appropriate polarizer should be used with this lens.
*2: It is recommended that this lens be used with the 1/4 wavelength plate A (02ALN370) and appropriate polarizer. (Working distance will be shortened by 4mm).
*3: These specifications apply to the objectives in isolation and may not apply when a lens is mounted in the turret of a microscope, depending on the design of that microscope. In the case where the
illumination system is provided by the user it is important to balance the various optical parameters so that optimum illumination of the target surface is obtained. Contact your local Mitutoyo sales
Office for information on how this may be achieved.
*Made-to-order
19
(Ultra-long working distance)
M Plan Apo SL

> Ultra-long working distance
> Plan-Apochromat
Dimensions
M Plan Apo SL20 M Plan Apo SL80 M Plan Apo SL200
1.5 30.5 2.5 15 4 13
39
34
34
25.2
32.2
24.8
32.2
27.5
21.6
30
37
24
64.5 80 82
M Plan Apo SL50 M Plan Apo SL100

(Working distance) (Working distance)
3.9 20.5 1.4 13
34
34
25.2
32.2
23.9
32.2
23.5
22
74.5 82
5 95 (Parfocal distance) 5 95 (Parfocal distance)
Specifications
M Plan Apo SL
M Plan Apo SL20 378-810-3 0.28 30.5 10 1.0 3.5 1.2 0.240.32 240
M Plan Apo SL50 378-811-3 0.42 20.5 4 0.7 1.6 0.48 0.100.13 280
M Plan Apo SL80 378-812-3 0.50 15.0 2.5 0.6 1.1 0.3 0.060.08 280
M Plan Apo SL100 378-813-3 0.55 13.0 2 0.5 0.9 0.24 0.050.06 290
M Plan Apo SL200 378-816-3 0.62 13.0 1 0.4 0.7 0.12 0.0250.03 490
20
(with cover-glass thickness compensation)
G Plan Apo

> Plan-Apochromat
> Designed to observe a specimen through a 3.5mm cover glass.
> Design enables high-power observation through a cover glass.
* Contact Mitutoyo to custom-order a specific cover-glass to suit
your application if required. Thickness, material and refractive
index are all specifiable within usual limits.
Dimensions
G Plan Apo 20 G Plan Apo 50
(Working distance): Glass thickness 3.5mm (Working distance): Glass thickness 3.5mm
1.58 30.6 2 15.08
34
34
32.2
28.2
32.2
25
24
65.59 Glass 81.11 Glass

5 96.19 5 96.19
Specifications
G Plan Apo
G Plan Apo 20 (t3.5) 378-847 0.28 29.42 10 1.0 3.5 1.2 0.240.32 270
G Plan Apo 50 (t3.5) 378-848-3 0.50 13.89 4 0.6 1.1 0.48 0.100.13 320
21
Objectives for Bright/Dark Field Observation
(long working distance)
BD Plan Apo /
BD Plan Apo HR
FS70 WIDE VMU MF-U Hyper MF-U

> Bright/dark field observation
Suited to the observation of scratches, concavity and convexity
on a surface
> Plan-Apochromat
Dimensions
BD Plan Apo 2 BD Plan Apo 10 BD Plan Apo 100
4 34 4 34 10 6
44
44
44
31.5
40
42
40
42
40
42
37
37
61 61 89
BD Plan Apo5 BD Plan Apo 20 BD Plan Apo HR 50

4 34 7 20 4.8 5.2
44
44
44
40
42
40
42
40
42
37
32
32
61 75 89.9
BD Plan Apo 7.5 BD Plan Apo 50 BD Plan Apo HR 100

4 34 8.5 13 4.7 1.3
44
44
44
40
42
40
42
40
42
37
32
32
61 82 93.7
Specifications
BD Plan Apo
BD Plan Apo 2 *1 378-831-7 0.055 34.0 100 5.0 91 12 2.43.2 340
BD Plan Apo 5 378-832-7 0.14 34.0 40 2.0 14 4.8 0.961.28 350
BD Plan Apo 7.5 378-830-7 0.21 34.0 26.67 1.3 6.2 3.6 0.640.85 350
BD Plan Apo 10 378-833-7 0.28 34.0 20 1.0 3.5 2.4 0.480.64 350
BD Plan Apo 20 378-834-7 0.42 20.0 10 0.7 1.6 1.2 0.240.32 400
BD Plan Apo 50 378-835-7 0.55 13.0 4 0.5 0.9 0.48 0.100.13 440
BD Plan Apo 100 378-836-7 0.70 6.0 2 0.4 0.6 0.24 0.050.06 460
BD Plan Apo HR
BD Plan Apo HR 50 378-845-7 0.75 5.2 4 0.4 0.49 0.48 0.100.13 530
BD Plan Apo HR 100 378-846-7 0.90 1.3 2 0.3 0.34 0.24 0.050.06 545
Lens set
Lens set D1 378-931 A set of BD Plan Apo 10x, 20x, 50x and 100x
Lens set D2 378-932 A set of BD Plan Apo 2x, 5x, 10x, and SL20x
Lens set D3 378-933 A set of BD Plan Apo 5x, 10x, 20x, and 50x
*1: It is recommended to be used together with the 1/4 wavelength plate B (02ALN380) and appropriate polarizer for the microscope used (Working distance will be shortened 4mm).
22
Objectives for Bright/Dark Field Observation
(Ultra-long working distance)
BD Plan Apo SL
FS70 WIDE VMU MF-U Hyper MF-U

> Bright/dark field observation
Suited to the observation of scratches, concavity and convexity
on a surface
> Plan-Apochromat
Dimensions
BD Plan Apo SL20 BD Plan Apo SL80
7.5 30.5 8.5 13
44
44
40
42
40
42
31
32
64.5 82
BD Plan Apo SL50 BD Plan Apo SL100

7 20 8.5 13
44
44
40
42
40
42
32
32
75 82
Specifications
BD Plan Apo SL
BD Plan Apo SL20 378-840-7 0.28 30.5 10 1.0 3.5 1.2 0.240.32 350
BD Plan Apo SL50 378-841-7 0.42 20.0 4 0.7 1.6 0.48 0.100.13 410
BD Plan Apo SL80 378-842-7 0.50 13.0 2.5 0.6 1.1 0.3 0.060.08 430
BD Plan Apo SL100 378-843-7 0.55 13.0 2 0.5 0.9 0.24 0.050.06 440
23
Near-infrared radiation range objectives
for bright field observation
M Plan Apo NIR /
M Plan Apo NIR HR
VMU FS70

> Suitable for bright field observation and laser applications
> Plan-Apochromat
> Wavelength correction from visible to near-infrared (1800nm)
> Available high-power type (M Plan Apo NIR HR)
Dimensions
M Plan Apo NIR 5 M Plan Apo NIR 50 M Plan Apo NIR HR 50
37.5 17 10
39
34
34
23.8
32.2
24.4
32.2
37
23
24
57.5 78 85
M Plan Apo NIR 10 M Plan Apo NIR 100 M Plan Apo NIR HR 100
1 30.5 12 10
39
34
34
32.2
25.2
32.2
24.8
24.6
25
28
37
27
64.5 83 85
M Plan Apo NIR 20

(Working distance)
20
34
32.2
75
5 95 (Parfocal distance)
Specifications
M Plan Apo NIR
M Plan Apo NIR 5 378-822-5 0.14 37.5 40 2.0 14.0 4.8 0.961.28 220
M Plan Apo NIR 10 378-823-5 0.26 30.5 20 1.1 4.1 2.4 0.480.64 250
M Plan Apo NIR 20 378-824-5 0.40 20.0 10 0.7 1.7 1.2 0.240.32 300
M Plan Apo NIR 50 378-825-5 0.42 17.0 4 0.7 1.6 0.48 0.100.13 315
M Plan Apo NIR 100 378-826-5 0.50 12.0 2 0.6 1.1 0.24 0.050.06 335
M Plan Apo NIR HR
M Plan Apo NIR HR 50 378-863-5 0.65 10.0 4 0.4 0.7 0.48 0.100.13 450
M Plan Apo NIR HR 100 378-864-5 0.70 10.0 2 0.4 0.6 0.24 0.050.06 450
Note: If the wavelength used is 1100nm or longer, the focal point may deviate slightly from that in visible radiation.
24
Near-infrared radiation range objectives
for bright field observation
M Plan Apo NIR B VMU FS70

> Plan-Apochromat
> A high-transmission laser type objective suited to the
fundamental and second harmonic of the YAG laser. Corrected
over the visible (420nm) to near-infrared (1064nm) spectrum.
> This series of objective has greatly improved in operability
thanks to the achievement of an ultra-long working distance of
25.5mm while maintaining the NA of the NIR series 20X/50X.
Dimensions M Plan Apo NIR B 20 M Plan Apo NIR B 50
25.5 (Working distance) 25.5 (Working distance)
37
37
37
37
69.5 69.5
Specifications 5 95 (Parfocal distance) 5 95 (Parfocal distance)

M Plan Apo NIR B
M Plan Apo NIR B 20 378-867-5 0.40 25.5 10 0.7 1.7 1.2 0.240.32 350
M Plan Apo NIR B 50 378-868-5 0.42 25.5 4 0.7 1.6 0.48 0.100.13 375
Note: If the wavelength used is 1100nm or longer, the focal point may deviate slightly from that in visible radiation.
Near-infrared radiation range objectives for bright field

observation (with cover-glass thickness compensation)
LCD Plan Apo NIR VMU FS70

> Suitable for bright field observation and laser applications through the LCD glass
> Plan-Apochromat
> Designed to observe a specimen through glass 1.1mm or
0.7mm thick.
> This makes suitable for high-power observation through a sheet of glass.
* Mitutoyo is ready to design and manufacture a specific sheet of glass
according to a specified glass thickness and material (or refractive index).
Dimensions LCD Plan Apo NIR 20t1.1 LCD Plan Apo NIR 100t1.1
20.35 (Working distance) 12.5 (Working distance)
34
34
32.2
24.6
32.2
25
75.02 82.87
5 95.37 5 95.37
LCD Plan Apo NIR 50t1.1t0.7 LCD Plan Apo NIR 100t0.7
17.5 (Working distance) 12 (Working distance)
34
34
24.4
24.6
32.2
32.2
25
24
77.87/ 77.74 83.24

Specifications 5 95.37/95.24 5 95.24

LCD Plan Apo NIR
LCD Plan Apo NIR 20 (t1.1) 378-827-5 0.40 19.98 10 0.7 1.7 1.2 0.240.32 305
LCD Plan Apo NIR 50 (t1.1) 378-828-5 0.42 17.13 3.9 0.7 1.6 0.48 0.100.13 320
LCD Plan Apo NIR 50 (t0.7) 378-829-5 0.42 17.26 3.9 0.7 1.6 0.48 0.100.13 320
LCD Plan Apo NIR 100 (t1.1) * 378-752-5 0.50 12.13 2 0.6 1.1 0.24 0.050.06 335
LCD Plan Apo NIR 100 (t0.7) 378-754-5 0.50 11.76 2 0.6 1.1 0.24 0.050.06 335
*Made-to-order
25
Near-ultraviolet radiation range
objectives for bright field observation
M Plan Apo NUV /
M Plan Apo NUV HR
VMU FS70

> Plan-Apochromat
> Performance optimized for near-ultraviolet (355nm) to visible
> High-power type available (M Plan Apo NUV HR)
Dimensions
M Plan Apo NUV 10 M Plan Apo NUV 50 M Plan Apo NUV HR 50
30.5 15 10
39
34
34
32.2
32.2
24.8
25.2
37
64.5 80 85
M Plan Apo NUV 20 M Plan Apo NUV 100

17 1.8 11
34
34
32.2
32.2
25
24
78 84
Specifications
M Plan Apo NUV
M Plan Apo NUV 10 378-809-5 0.28 30.5 20 1 3.5 2.4 0.480.64 255
M Plan Apo NUV 20 378-817-6 0.40 17.0 10 0.7 1.7 1.2 0.240.32 340
M Plan Apo NUV 50 378-818-6 0.42 15.0 4 0.7 1.6 0.48 0.100.13 350
M Plan Apo NUV 100 378-819-4 0.50 11.0 2 0.6 1.1 0.24 0.050.06 380
M Plan Apo NUV HR
M Plan Apo NUV HR 50 378-888-6 0.65 10.0 4 0.42 0.65 0.48 0.100.13 500
26
Near-ultraviolet radiation range objectives for bright field
observation (with cover-glass thickness compensation)
LCD Plan Apo NUV /
LCD Plan Apo NUV HR
VMU FS70

> Ultra-Long working distance
> Plan-Apochromat
> Designed to observe a specimen through glass 1.1mm or
0.7mm thick.
Dimensions
LCD Plan Apo NUV 20t0.7 LCD Plan Apo NUV 100t1.1
17.2 1.77 11.4
34
34
32.2
32.2
24
25
78.04 83.97
5 95.24 (Parfocal distance) 5 95.37 (Parfocal distance)
LCD Plan Apo NUV 50t1.1t0.7 LCD Plan Apo NUV HR 50t0.7
14.9/15 10.24
39
34
32.2
37
80.47/80.24 85
5 95.37/95.24 (Parfocal distance) 5 95.24 (Parfocal distance)
Specifications
LCD Plan Apo NUV
LCD Plan Apo NUV 20 (t0.7) 378-890-6 0.40 16.96 10 0.7 1.7 1.2 0.240.32 340
LCD Plan Apo NUV 50 (t1.1) * 378-753-6 0.42 14.53 4 0.7 1.6 0.48 0.100.13 350
LCD Plan Apo NUV 50 (t0.7) 378-820-6 0.42 14.76 4 0.7 1.6 0.48 0.100.13 350
LCD Plan Apo NUV 100 (t1.1) * 378-751-4 0.50 11.03 2 0.6 1.1 0.24 0.050.06 380
LCD Plan Apo NUV HR
LCD Plan Apo NUV HR 50 (t0.7) 378-891-6 0.65 9.76 4 0.4 0.7 0.48 0.100.13 500
*Made-to-order
27
Ultraviolet radiation range objectives for
bright field observation
M Plan UV
VMU FS70

> Plan
> Performance optimized for ultraviolet (266nm) and visible wavelengths
> High-transmittance in the ultraviolet range
Dimensions M Plan UV 10 (Working distance)
20
M Plan UV 50 (Working distance)
12
34
34
32.2
32.2
75 83
M Plan UV 20 (Working distance) M Plan UV 80 (Working distance)

15 10
34
34
32.2
22.7
32.2
80 85
Specifications 5 95 (Parfocal distance) 5 95 (Parfocal distance)

f266 f550 (=550nm) 24 eyepiece 1/2" camera (g)
M Plan UV
M Plan UV 10 378-844-15 0.25 20.0 20 20.3 1.1 4.4 2.4 0.480.64 310
M Plan UV 20 378-837-7 0.36 15.0 10 10.4 0.8 2.1 1.2 0.240.32 330
M Plan UV 50 378-838-8 0.41 12.0 4 4.5 0.7 1.6 0.48 0.100.13 400
M Plan UV 80 378-839-5 0.55 10.0 2.5 2.9 0.5 0.9 0.3 0.060.08 380
When projecting a mask image on a specimen by using a YAG laser system mounted on a Mitutoyo microscope unit, the mask image will be scaled by the factor f/200 times (f=200mm, Mitutoyo tube lens).
Since the focal length (f) in ultraviolet radiation (=266nm) is slightly smaller than that in visible radiation (=550nm) as above, the working area in ultraviolet radiation also becomes slightly smaller than the
mask image in visible radiation.
Ultraviolet radiation range objectives for bright field observation

(with cover-glass thickness compensation)
LCD Plan UV
VMU FS70

> Plan
> Designed to observe a specimen through glass 0.7mm thick.
Dimensions LCD Plan UV 20 (Working distance)
15.22
LCD Plan UV 50 (Working distance)
12.62
34
34
32.2
32.2
80 82.6
Specifications 5 95.22 (Parfocal distance) 5 95.22 (Parfocal distance)

f 266 f 550 (=550nm) 24 eyepiece 1/2" camera (g)
LCD Plan UV
LCD Plan UV 20 (t0.7) 378-892-7 0.36 15.0 10 10.4 0.8 2.1 1.2 0.240.32 330
LCD Plan UV 50 (t0.7) 378-893-8 0.41 12.4 4 4.5 0.7 1.6 0.48 0.100.13 400
When projecting a mask image on a specimen by using a YAG laser system mounted on a Mitutoyo microscope unit, the mask image will be scaled by the factor f/200 times (f=200mm, Mitutoyo tube lens).
Since the focal length (f) in ultraviolet radiation (=266nm) is slightly smaller than that in visible radiation (=550nm) as above, the working area in ultraviolet radiation also becomes slightly smaller than the
mask image in visible radiation.
28
Tube Lens
MT
Aberration correction range MT-1, 2, 40: Visible wavelength range (435.8 656.3nm)
MT-L: Near-ultraviolet (355nm) to near-infrared (1064nm)
MT-L4: Ultraviolet (266nm) to visible (620nm).
Dimensions
MT-1 MT-2 MT-40 MT-L MT-L4
16.4
16.4
36 36
3-2.4 3-2.4
throu mm throu mm
g
(evenly h holes
gh ho
(evenlyles Intermediate Intermediate Intermediate
Intermediate separated at 12 Intermediate separated at 12
Refer to JIS B7141.

image position 0) image position 0) image position image position image position
26 threads 36
Mounting ring
Mounting ring
21 35 35
170
240.2
240.2
M3 20.5
M3 20.5
176.4
176.4
15 12.5 1.5
29.5
0.009 0.009
3.5
3.5
33g 6 33g 6
28
3
0.025 0.025
30 -0.01
30 -0.01 34
2.5
23.6
3.5
-0.05 -0.05
4.5
3.5
25
Half-reecting mirror Half-reecting mirror
Refer to JIS B7141.

76.5
76.5
134
(for reected (for reected 35
134
35
26 threads 36
Main unit
Main unit
illumination) illumination)
166.4
243.31
704.2
225.8
226.5
Objective mounting Objective mounting Objective mounting Objective mounting
position (see below) Workpieces side position (see below) position (see below) position (see below)
focal position
Workpiece surface Workpiece surface Workpiece surface Workpiece surface Workpiece surface
Workpieces side Workpieces side Workpieces side Workpieces side

focal position focal position focal position focal position
Specifications
Order No. Focal length (mm) Magnification (tube lens) Image field (mm) Effective lens dia. (mm) Dimensions (mm) Mass (g)
970208 200 1X 30 24.0 40x32.5 43
970209 400 2X 30 18.0 40x32.0 42
378-010 200 1X 24 11.2 34x27.5 45
378-008 200 1X 24 22.0 35x32.0 30
378-009 200 1X 24 23.0 35x30.6 30
Note: A distance of 76.5mm in 970208 and 970209 drawings is for an image field of 30 (without vignetting). For an image field of 24 or 11 (the latter is the image field of a 2/3-inch camera), use the formula
(1) and (2) below to calculate the distance.
Reference: Placement of Objective and Tube Lens

Mitutoyos long working-distance objective lenses are designed to cover a field of view of up to 30mm (24mm), when
the tube lens 970208 or 970209 (378-008, 378-009 or 378-010) is placed at the specified distance from the objective. Image eld
However, use the following formula to calculate the approximate distance, when a distance other than that as specified is
required in order to insert your own optical system or other optical elements:
= (2 1) f2 / [mm] (1) 1 : Objective exit pupil diameter (mm)

2 : Effective diameter of tube lens (mm)
1 = 2 f N.A. [mm] (2)
f2 : Focal length of tube lens
: Image field diameter
Tube lens f2
Example: What is the distance (L), when using M Plan Apo 10X* (378-803-3) and tube lens** (970208) to cover
2
an image field of 24?
*f=20mm, N.A.=0.28 (Refer to page 15.) ** 2 =24mm, f 2 =200mm (Refer to the above chart.)
From formula (2): 1 =2x20x0.28

=11.2 (mm)
From formula (1) : L = (2411.2) x 200/24 1
Objective f1
=106.6 (mm)
Therefore a distance (L) up to 106mm can cover an image field of 24 without shading.
NA
In other words a distance (L) smaller than the specification does not affect optical performance. Workpiece surface
Contact Mitutoyo for detailed information.
29
Tube Lens
ML
MF Hyper MF
Features > Finite-correction

(image-object distance: 280mm, parfocal length: 110mm)
> Telecentric for lenses lower than 10X magnification
Dimensions
ML 1 ML 5 ML 20 ML 100
31.5
16.5
30
17
25
28
30
33
39
39
33
49 61 49 61
90 20 104 6
10 110 (Working distance) 10 110 (Working distance) 14.5 110 14.1 110
(Parfocal distance) (Parfocal distance) (Parfocal distance) (Parfocal distance)
ML 3 ML 10 ML 50
14.5
30
18
30
28
39
25
30
33 77 59 51 97 13 33
10 110 10 110 14.7 110
(Parfocal distance) (Parfocal distance) (Parfocal distance)
Note: The parfocal distance is a nominal value.
Specifications
R (m) Real FOV (mm) Mass
(=550nm) 24 eyepiece 1/2" camera (g)
ML 1 375-036-2 0.03 61.0 9.2 306 24 4.8 6.4 80
ML 3 375-037-1 0.09 77.0 3.06 34 8 1.6 2.1 55
ML 5 375-034-1 0.13 61.0 2.12 16.3 4.8 0.96 1.28 60
ML 10 375-039 0.21 51.0 1.31 6.2 2.4 0.48 0.64 95
ML 20 375-051 0.42 20.0 0.65 1.6 1.2 0.24 0.32 310
ML 50 375-052 0.55 13.0 0.5 0.9 0.48 0.10 0.13 350
ML 100 375-053 0.70 6.0 0.4 0.6 0.24 0.05 0.06 380
30
Tube Lens
CF
CF

> Available zoom type
Dimensions
CF 1 CF 2 CF 3 CF Zoom 1 - 5
37.2
21.5
25
25
25
25
30
34
30
26
30
22
36.3 73.7 18 92 32.2 77.8 60 50

(Working distance) (Working distance) (Working distance) (Working distance)
5 110 12 110 5 110 11.5 110
(Parfocal distance) (Parfocal distance) (Parfocal distance) (Parfocal distance)
Note: The parfocal distance is a nominal value.
Specifications
R (m) Real FOV (mm) Mass
Model Mag. Order No. N.A. W.D. (mm) DOF (m)
(=550nm) 24 eyepiece 1/2" camera (g)
CF 1 375-031 0.03 73.7 9.2 306 24 4.8 6.4 45
CF 2 375-032 0.06 92.0 4.6 76 12 2.4 3.2 35
CF 3 375-033 0.07 77.8 3.9 56 8 1.6 2.1 35
1 0.04 6.9 171 24 4.8 6.4
CF Zzoom 1 5 3 375-038 0.1 50.0 2.75 27 8 1.6 2.1 200
5 0.1 2.75 27 4.8 0.96 1.28
31
Wide Field of View Eyepieces and Reticles
WF / UWF
MF MF-U Hyper MF Hyper MF-U FS70

> Telecentric for lenses lower than 10X magnification
Dimensions
UWF 10/ 30 WF 10/ 24 WF 15/16 WF 20/12
Diopter adjustment range
4 3.5 10 Intermediate image 10 Intermediate image 10 Intermediate image 10 Intermediate image
Eye point position Eye point position Eye point position Eye point position
35 -0.02
-0.05
41.4
WF 10/24
WF 15/16
WF 20/12
30
38
30
38
35
32
30
38
43.9 17 22.2 17 14.6 17
10X eyepiece 10X eyepiece 15X eyepiece 20X eyepiece
Specifications
Mass
Order No. (2pcs.) Model Magnification Field number Visibility adjustment Eye point Reticle (g)
378-851 Ultra-wide field of view eyepiece UWF10/30 10 30 -8D to +4D High eye point 250
378-866 Wide field of view eyepiece WF10/24 10 24 -10D to +5D High eye point Available 150
378-857 Wide field of view eyepiece WF15/16 15 16 -8D to +5D Normal Available 40
378-858 Wide field of view eyepiece WF20/12 20 12 -8D to +5D Normal Available 55
Note: The above lenses are provided as a set of 2.
Reticles
Features > Wide field of view, especially the UWF 10X type (30 field number)
> External focusing system* allows installing an optional reticle. *Except for UWF 10X
Dimensions
No.516848 No.516576 No.516578 No.516577 No.516849 No.516850 No.516851
Specifications
Order No. 516848 516576 516578 516577 516849 516850 516851
Concentric circles Solid crosshairs with
90 and 60 broken 10mm scale with 5mm scale with 1mm grid on 10mm
Remarks Solid crosshairs (1.2-18mm) with scale graduated
crosshairs 0.1mm graduations 0.05mm graduations square
solid crosshairs 0.1mm/20mm
32
Optional Accessories
for VMU, WIDE VMU, and FS70
Stand XY stage
For mounting the VMU, WIDE VMU, or FS70 microscope unit. Can be 4-5mm through holes,
110 countersunk 8
combined with an XY stage, stage illumination unit and fiber-optic 70 4-M4 screw holes, depth 10
illuminator to work as a compact microscope for surface observation.
120
152
110
96
40
70
Order No. 378-730
Mass 6.7kg
Order No. 378-020
96 32
180 59
Travel range 50x50mm
13
7 Handle feed 34mm/rev.
Mass 3.3kg
47
3
6.5
108 Note: Each wheel functions as a
Stand with XY stage and stage illumination 58 T-groove detailed drawing single-axis drive.
unit mounted on FS70Z with optional
objectives and eyepieces
Stage illumination unit

346
95 156 95 Attaches to the stand to provide contour illumination in conjunction with a
fiber-optic illuminator (100W or 150W).
200
132
Order No. 378-736

Mass 0.8kg
39
Stage glass top

185
437
452
135
44
15
76.4
23 25
328
15
114 361
Fiber-optic cable inlet
Fiber-optic illuminator (100W) Fiber-optic illuminator (150W)

39
1500
7
21
53
10
25
10 25
7
10
10 245 76
35.2
120
110
60
15 227 15 97
9
257 120
Order No. 378-700D
Light source 12V/100W parabolic-type halogen bulb (517181), 100h service life
Order No. 176-316D
Light guide Fiber-optic cable (1.5m length, 5mm dia.)
15V/100W parabolic-type halogen bulb (12BAJ076),
Brightness Adjustable by volumn Long-life type
500h service life
LB80 Color temperature conversion filter (12BAA584) Light source
15V/100W parabolic-type halogen bulb (12BAJ075),
High-brightness type
Filter ND2 For 1/2 light intensity (12AAB251) 50h service life
(optional) ND8 For 1/8 light intensity (12AAB252) Light guide Fiber-optic cable (1.5m length, 5mm dia.)
GIF Green filter (12BAA253) Brightness Adjustable by rotary control
33
Dimensions
14 (Compatible with third-party ber-optic cables)
Adapter for Mitutoyo 10 (Compatible with Mitutoyo ber-optic cable)

ber-optic cable
19
(2)
12
10
Fiber-optic cable end position
Detail of fiber mount

VMU series
VMU-V 59.5 19 VMU-H 6-M40.7 screw holes, depth 6
43.5 (equal numbers of holes
3 47 at the same positions on the opposite side)
17.5
50
Intermediate C mount 59.5 19 Fiber-optic cable
image position 17.5 63 43.5 mounting position
50 3 47
6-M40.7 screw holes, depth 6 Fiber-optic cable C mount
(equal numbers of holes 27 (Emblem)
mounting position
at the same positions on the opposite side)
35
27
152.5
27
113.5
113.5
27
27
106
106
89.5
(Emblem)
76
27
76
247.5
43
43
20.5
20.5
Objective Objective
(optional) (optional)
VMU-LB VMU-L4B
Intermediate image Intermediate image Intermediate image Intermediate image
position position 23.2 position position 23.2
79.6
79.6
56 3 56 3
50 Laser mount 50 Laser mount
17.5
17.5
Intermediate image Intermediate image

13.6
13.6
Intermediate image position Intermediate image position
position C mount 6-M40.7 screw holes, depth 6 position C mount 6-M40.7 screw holes, depth 6
50 50
(equal numbers of holes 49.5 49.5 (equal numbers of holes
at the same positions on the opposite side) at the same positions on the opposite side)
102.5
101.5
portion
Fiber-optic cable mounting position portion
Fiber-optic cable mounting position
214.5
3 47 3 47
213.5
27 27
27 27
213.4
213.4
(Emblem) (Emblem)
308.4
308.4
27 27
94.5
106
94.5
106
76
76
Objective Objective
43 mount 43.5 43 mount 43.5
20.5
20.5
Objective Objective
120 59.5 19 120 59.5 19
Workpiece surface Workpiece Workpiece surface Workpiece
surface surface
FS70 series 27.2
FS70Z (FS70ZD) FS70L

63.5
63.5
38
229
229
102
102
63.5
63.5
324 324
154 154
Intermediate image Intermediate image
position position Laser mount
79.6
38
79.6
38 Vertical travel
Vertical travel
25 25
25
40.4
25
31.7
93.4
93.4
212
212
353
353
Objective mounting Objective mounting

surface surface
distance)
distance)
(Parfocal
(Parfocal
95
95
82
82
MAX MAX130 MAX MAX130

78 153 (Mounting surface) 1 78 153 (Mounting surface) 1
154 154
27.2
4-M4 screw holes, depth 6
34
63.5
38
51
14 (Compatible with third-party ber-optic cables)
Adapter for Mitutoyo 10 (Compatible with Mitutoyo ber-optic cable)
ber-optic cable
Hexagon socket set screw (M4)
for clamping ber light guide
19
(2)
12
10
Fiber-optic cable end position
(Fiber effective diameter of 5 or greater)
Detail of fiber mount

WIDE VMU series
32 83.5
WIDE VMU-V 60 3 64 WIDE VMU-H
110 83.5
46.5
F mount
46.5 63.5 60 3 64
F mount
146.2
Fiber-optic cable Fiber-optic cable
Intermediate image
6-M40.7 screw holes, depth 6 mounting position mounting position
(equal numbers of holes
285.2
426.7
253.7
position
221.7
64 64
380.2
54
54
348.7
27 (Emblem) 27 (Emblem)
164.2
164.2
4-M40.7 screw holes, depth 6
85
95 (Parfocal distance) 85
(equal numbers of holes

50
50
Objective Objective
mount mount
Objective Objective
27.2
Workpiece Workpiece Workpiece Workpiece
63.5
63.5
38
surface surface surface surface
WIDE VMU-BDV WIDE VMU-BDH

229
229
102
102
32 146.5
60 70.5 3 64
63.5
63.5
Intermediate image position Intermediate image
324
position 110 146.5 324
46.5
F mount
154 46.5 63.5 60 70.5 154 3 64
Intermediate image F mount Intermediate image
4-M40.7 screw holes, depth 6
position 4-M40.7
position screw holes, depth
Laser 6mount
79.6
(equal numbers of holes 38 Vertical travel (equal numbers of holes

38
79.6
146.2
at the same positions on the opposite side)25 Vertical travel

25
Fiber mounting Fiber mounting
Intermediate image
25
40.4
25
31.7
position (BF) position (BF)
285.2
93.4
93.4
253.7
Fiber mounting Fiber mounting
position
64 64
221.7
426.7
380.2
position (DF) position (DF)
212
212
54
353
54
353
27 27
348.7
(Emblem) (Emblem)
164.2
164.2
Objective mounting Objective mounting

surface surface
92.5
92.5
85
95 (Parfocal distance) 85
distance)
distance)
(Parfocal
(Parfocal
50
95
95
50
82
82
Objective Objective
mount mount
MAX MAX130 MAX MAX130

78 Objective 153 (Mounting surface) 1 78 Objective 153 (Mounting surface) 1
154 (optional) 154
(optional)
Workpiece surface Workpiece surface Workpiece surface Workpiece surface
27.2
4-M4 screw holes, depth 6
FS70L4
63.5
38
30 51
229
102
208
126.5
109
63.5
324 63.5
7.5
14
154 94
Intermediate image
position
38
Laser mount
Back of standard focus unit (for all models)
79.6
Vertical travel
25
25
31.7
+0.1
10 +0.05
93.4
7.5 Fiber-optic cable end position

212
353
14
Objective mounting
surface
10
distance)
(Parfocal
95
82
MAX MAX130
78 153 (Mounting surface) 1
154
Detail of fiber mount (for all models)
35
Reference: Specifications of Objective Threads
1. Scope These specifications are applied to the threads of Mitutoyo microscope objectives.
2. The thread forms and dimensions are specified as follows conforming to JIS B-7141-1994.
Standard thread External thread External thread
(Lower tol.)0
(Upper tol.) 12
(Lower tol.) 12
(Upper tol.) 12
P Permissible range
Permissible range
Internal thread Standard thread
55
H
6
D =D (Min. limit)
tol.) 2
(Upper 1
27.527.5
D (Max. limit)
H
2
tol.) 2
tol.) 2
(Lower 1
(Upper 1
H
H1
d or D
D 2 (Max. limit)
D 2 (Min. limit)
(Lower tol.)0
R
External thread
d 2 or D 2
d 2 (Max. limit)
d 2 (Min. limit)
H
d (Max. limit)
2
tol.) 2
tol.) 2
d (Min. limit)
(Upper 1
(Lower 1
H
6
D1 (Max. limit)
D1 (Min. limit)
d 1 or D1
d2
(Lower tol.)12
(Upper tol.) 12
d
Standard thread
d1 (Max. limit)
d1 (Min. limit)
D1
d1
Bright-field Objectives
Measuring Microscope/Centering Microscope Objectives
Nominal Dimensions Unit: mm Permissible Limits of Size and Dimensional Tolerance Unit: mm
External thread External thread Internal thread
Thread peak OD Pitch Root Applicable dimensions OD Pitch Root Root Pitch ID
Nominal Number of Pitch & valley (d) diameter (d2) diameter (d1) (d) diameter (d2) diameter (d1) diameter (D) diameter (D2) (D1)
thread threads curvature
diameter (per 25.4mm) P radius Internal thread Permissible Max. limit 25.896 25.502 25.050 26.076 25.624 25.230
n R Root Pitch ID limits Min. limit 25.820 25.426 24.974 26.000 25.548 25.154
diameter (D) diameter (D2) (D1) Upper
Dimensional tolerance 0.104 0.046 0.046 +0.076 +0.076 +0.134
26 36 0.706 0.097 26.000 25.548 25.096
tolerance Lower 0.180 0.122 0.122 0 0 +0.058
tolerance
Bright/Dark-field Objectives
Nominal Dimensions Unit: mm Permissible Limits of Size and Dimensional Tolerance Unit: mm
External thread External thread Internal thread
Thread peak OD Pitch Root Applicable dimensions OD Pitch Root Root Pitch ID
Nominal Number of Pitch & valley (d) diameter (d2) diameter (d1) (d) diameter (d2) diameter (d1) diameter (D) diameter (D2) (D1)
thread threads curvature
diameter (per 25.4mm) P radius Internal thread Permissible Max. limit 39.896 39.502 39.050 40.076 39.624 39.230
n R Root Pitch ID limits Min. limit 39.820 39.426 38.974 40.000 39.548 39.154
diameter (D) diameter (D2) (D1) Upper 0.104 0.046 0.046 +0.076 +0.076 +0.134
40 36 0.706 0.097 40.000 39.548 39.096 Dimensional tolerance
tolerance Lower
tolerance 0.180 0.122 0.122 0 0 +0.058
Reference: Transmission of Mitutoyo Objectives

Mitutoyos long working-distance objectives are grouped by working wavelength range: ultraviolet, near-ultraviolet, visible, and near-infrared. The M Plan
UV series (for ultraviolet), M Plan Apo NUV series (for near-ultraviolet), and M Plan Apo NIR series (for near-infrared) are designed especially for YAG laser
working applications in cutting thin films. Each series is designed for optimal spectral transmission factor within its respective wavelength range.
M (BD) Plan Apo series: Wavelength range 436nm to 656nm
M Plan Apo NIR series: Wavelength range 480nm to 1800nm
M Plan Apo NUV series: Wavelength range 355nm to 620nm
M Plan UV series: Optimized for wavelengths of 266nm and 550nm
Spectral transmission characteristics of 100X objective Spectral transmission characteristics of M Plan UV 80X
100 100
Spectral transmission factor (%)
Spectral transmission factor (%)
M Plan Apo NIR 100x

M Plan Apo SL 100x
80 80
M Plan Apo NUV 100x
60 60
40 40
20 20
0 0
300 600 900 1200 1500 1800 200 266 300 400 500 550 600 700 800
Wavelength (nm) Wavelength (nm)
N.A.: Numerical aperture W.D.: Working distance f: Focal length R: Resolving power DOF: Depth of field FOV: Real field of view
36
Commentary: Laser Operating Method and Precautions
Each VMU and FS70 series of Mitutoyo microscope units uses a built-in laser [mainly, Nd-YAG laser fundamental wave (1064nm), second harmonic
(532nm), third harmonic (355nm) and fourth harmonic (266nm)] to allow laser machining. In laser machining with a laser-equipped microscope unit
and a microscope objective, high-power laser irradiation is not allowed for the purpose of microfabrication.
IMPORTANT: Review laser safety precautions prior to use.
Laser Input Conditions of Laser-equipped Microscope Unit

Determine the upper limit value of laser input under the following conditions. Laser radiation incident on the optical system shall be axial and non-
polarized.
VMU Series
Applicable model VMU-LB VMU-L4B
Wavelength used (nm) 1064 532 355 1064 532 355 266
Pulse laser
Upper input limit (J/cm2) 0.099 0.075 0.025 0.11 0.080 0.035 0.015
Pulse width (10ns)
Upper limit to CW laser input
0.22 0.18 0.07 0.2 0.19 0.05 0.05
(kW/cm2)
FS70 Series
Applicable model FS70L FS70L4
Wavelength used (nm) 1064 532 355 532 266
Pulse laser
Upper input limit (J/cm2) 0.090 0.075 0.018 0.075 0.015
Pulse width (10ns)
0.23 0.18 0.06 0.2 0.05
(kW/cm2)
Upper Limit to Objective Laser Input

Determine the upper limit value of laser input under the following conditions if the laser radiation directly enters the objective.
Laser radiation incident on the optical system shall be axial.
VMU Series
M Plan Apo NIR series
Applicable objective M Plan Apo NIR series M Plan Apo NUV series M Plan Apo NUV series M Plan UV series
M Plan UV series
Wavelength used (nm) 1064 532 355 266
Pulse laser
Upper input limit (J/cm2) 0.2 0.1 0.05 0.04
Pulse width (10ns)
0.5 0.25 0.16 0.12
(kW/cm2)
Note: If the pulse width of the laser is shortened, reduce the irradiation energy density by the square root of the ratio of the new pulse width to the initial pulse width.
Example: If the pulse width decreases to 1/4 of the initial width, reduce the energy density to approximately 1/2.
Therefore when using a laser with a wavelength of 1064nm and a pulse width of 2.5ns, the upper limiting value of input will be 0.1J/cm2.
37
Glossary
1. N.A. (Numerical Aperture) 7. F (Focal Length)

N.A. determines resolving power, depth of field, and luminosity of the Distance between a principal point and a focal point. f1 is a focal length
image. The larger the N.A. the higher is the resolving power and smaller is of an objective, f2 is a focal length of a tube lens. Magnification is
the depth of field. determined by the ratio of the focal length of the tube lens to that of the
N.A. = n Sin objective. (For an infinity-corrected optical system.)
n is the index of refraction of the medium in which the lens is working. Focal length of tube lens
Magnification of objective =
n=1.0 for air. Focal length of objective
is the half-angle of the maximum cone of light that can enter or exit 200 (mm) 200 (mm)
the lens. (Ex.) 1X = (Ex.) 10X =
Objective 200 (mm) 20 (mm)
Air (n=1)
Workpiece
8. Field number and FOV (Real Field of View)
Stage glass
The field number of an eyepiece is determined by the field stop diameter
of the eyepiece and it is expressed in mm.
2. R (Resolving Power) FOV is the area of specimen observable and is determined by the field number
Minimum distance between points or lines that are just distinguishable as of the eyepiece and magnification of the objective.
separate entities.
Resolving power is determined by N.A. and wavelength . Field number of eyepiece
FOV (mm)=
Magnification of objective
R (m) =
2 N.A.
(Ex. Using an eyepiece of field number 24)
24
3. W.D. (Working distance) FOV for 1X objective = = 24 (mm)
1
Distance between the surface of the specimen and the front face of the
objective when in focus. 24
FOV for 10X objective = = 2.4 (mm)
10
4. Parfocal Length Area of specimen observable on TV monitor

Distance between the surface of the specimen and the objective Area of specimen Area of camera image element (VxH)
=
mounting position when in focus. observable on TV monitor Magnification of objective
Indication magnification on TV monitor

Diagonal line length
Parfocal distance Indication magnification = Magnification x of monitor indication
Working distance on TV monitor of objective Diagonal line length of
camera image element
5. Infinity-corrected system * Size of camera image element (V x H x Diagonal)
An optical system in which the image is formed by an objective and 1/3 inch image element: 3.6x4.8x6.0mm 1/2 inch image element: 4.8x6.4x8.0mm
a tube lens with an 'Infinity Space' between them, into which optical 2/3 inch image element: 6.6x8.8x11.0mm
accessories can be inserted.
Innity space
Objective 9. DOF (Depth of Field)
Imaging (tube) lens Vertical distance in the specimen, measured from above and below the
Objective focal point Imaging lens focal point exact plane of focus, which still yields an acceptable image.
(object point) (image point) The larger the N.A., the smaller the depth of field.
f1 f2 Magnication = f2/f1 Eyepiece observation (Formula of Berek)
x 250.000
DOF (m) = + = Radiation wavelength
6. Finite-corrected optical system N.A. x M 2x(N.A.)2
An optical system in which the image is formed only by an objective.
: Resolution of human eye (Visual angle: 5 minute)
Objective M: Total magnification (Objective mag. x Eyepiece mag.)
Object point Image point
TV monitor observation

L1 L2 Magnication = L2/L1 DOF (m) = =550nm (Standard wavelength)
2x(N.A.)2
38
10. Bright field illumination and dark field illumination 16. Plan
Bright field illumination directly lights the specimen with a solid cone Denotes an objective lens that produces a flat (planar) image by
of rays and is the simplest method available. Dark field illumination correcting the spherical aberration/curvature of the field of an
uses a hollow cone of rays formed by an opaque stop at the center of achromatic lens or an apochromatic lens. All Mitutoyo FS series
the condenser large enough to prevent direct light from entering the objectives are plan apochromat.
objective. The specimen is placed at the concentration of the light cone,
and is seen with light scattered or diffracted by it, therefore scratches
and dents on the specimen surface are illuminated while the rest
17. Vignetting
This unwanted effect is the reduction of an image's brightness or
remains dark.
saturation at the periphery compared to the image center. May be
caused by external (lens hood) or internal features (dimensions of a
11. Apochromatic objective and achromatic objective multi-element lens).
An apochromatic objective is corrected for chromatic aberration at the
red, blue, and yellow wavelengths. An achromatic objective is corrected 18. Flare
for chromatic aberration at the red and yellow wavelengths only. Lens flare is typically seen as several starbursts, rings, or circles in a
row across the image or view, caused by unwanted image formation
12. Koehler illumination mechanisms, such as internal reflection and scattering of light.
Khler illumination overcomes the disadvantages of other schemes by
causing parallel rays to light the specimen so that, because they will not 19. Double image
be in focus, the image of the specimen will not include an image of the An image degrading a phenomenon in which an image appears as
light source. if it is a double image due to redundant light projection and optical
Imaging system Aperture interference within the optical system.
Relay lens Field stop diaphragm Condenser lens Fiber-optic cable
Beam splitter
20. Pupil Diameter and Spot Diameter of an Objective
Pupil diameter
Denotes the maximum diameter of a parallel light flux along the optical
axis that can enter an objective from the rear. The pupil diameter is
calculated according to the following expression.
Pupil diameter
95
Objective
mm = 2 x N.A. x f
Illuminated eld of view
13. Telecentric illumination Beam spot diameter

This illuminating optical system is designed so that principal light passes
Spot diameter
through the focal point. This system has the advantage of retaining
If a beam of light with a uniformly distributed intensity enters an
the size of the image center even if it is out of focus (although the
objective from the rear, the beam is condensed to a spot of finite size.
circumference of the image is defocused). This illumination system
This size is known as the spot diameter. The approximate value of a
provides an even illumination intensity over the entire field of view.
spot diameter is calculated from the following expression.
14. Aperture diaphragm m = 1.22 x

This diaphragm adjusts the amount of light passing through and is N.A.
related to the brightness and resolving power of an optical system.
This diaphragm is especially useful in width dimension measurement of However, the above expression cannot be applied if the light source is a
cylindrical objects with contour illumination, and provides the highest laser beam of which the intensity forms a Gaussian distribution on the
degree of correct measurement/observation by suppressing diffraction cross section. The diameter of a laser beam is generally indicated by 1/e2
in an optimal aperture. of the peak value, i.e. 13.5% of the peak value. The spot diameter of a
laser beam is calculated from the following expression.
15. Field stop
4xxf
This diaphragm is used for blocking out unwanted light and thereby m =
preventing it from degrading the image. xD
39
200 1607 (1) A-(CH)HS , Printed in Japan
Coordinate Measuring Machines Vision Measuring Systems Form Measurement Optical Measuring
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supports you from start to finish.
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measuring products but one that also offers qualified
support for the lifetime of the equipment, backed up
by comprehensive services that ensure your staff can
make the very best use of the investment.
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Sensor Systems Digital Scale and DRO Systems Apart from the basics of calibration and repair,
and Seismometers and Data Management
Mitutoyo offers product and metrology training,
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Find additional product literature

and our product catalogue
http://www.mitutoyo.co.jp/global.html
Mitutoyo Corporation
20-1, Sakado 1-Chome,
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Kanagawa 213-8533, Japan
Note: Product illustrations are without obligation. Product descriptions, in particular any and all technical
specifications, are only binding when explicitly agreed upon. T +81 (0) 44 813-8230
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MICROSOPE UNITS AND OBJECTIVES

Catalog No. E14020

Ref.: Microbio-World Ver.7,

System with digital camera System for IR analysis/inspection

Digital microscopic system using VMU-V

Systems for laser applications System for dual-camera

Flaking of polyimide membrane

By mounting two Cameras on VMU-L you

SEM photograph of IC surface

UV laser application using VMU-L4B

VMU-V VMU-H VMU-LB VMU-L4B

*Objectives shown mounted on tubes are optional.

C-mount compatible analog camera or digital camera

VMU-V VMU-H VMU-LB VMU-L4B

M/LCD Plan Apo NIR series on P.24 to P.25

Manual turret Power turret

Order No. 378-707

Order No. 378-713

Polarizer and Analyzer

TV adapter unit No.378-710

Order No. 378-710 VMU-V VMU-H

378-087 Mass: 180g

Manual MAX 130*

Workpiece Workpiece Workpiece

* Where M Plan Apo 100X (378-815) is used surface

lens tube Mount unit

lens tube Workpiece

Intermediate 88.6 87 136

Workpiece Mount unit

Workpiece lens tube Workpiece MAX126* MAX77* Workpiece

* Where M Plan Apo NIR HR100X (378-864-5) is used surface

Workpiece Workpiece MAX126* MAX77*

Focus unit A and B Polarizer and Analyzer

diaphragm Main body

80 Focusing unit A 102

removing the illumination tube.

Vertical illumination Main body

23.5 26.5 73 1 94 (4) diaphragm

50 Focusing unit B 102

TV adapter unit Camera mount

Intermediate image position Intermediate image position 75

C mount Intermediate image position

2X adapter 0.5X adapter

the case where no adapter lens

When installing the polarizer on VMU-LB or VMU-L4B

WIDE VMU-V WIDE VMU-H WIDE VMU-BDV WIDE VMU-BDH

*Objectives shown mounted on tubes are optional.

Image sensor Optical fiber

WIDE VMU-V WIDE VMU-H WIDE VMU-BDV WIDE VMU-BDH

Fiber-optic illumination unit C D

150W (176-316) Objectives Objectives

Transmitted light unit Simple stand

Fiber-optic illumination unit

Bright field turret Bright field motorized turret

Order No. 378-724 378-725 Order No. 378-726 378-727

Focus unit C mounted on -WIDE VMU with an optional objective

Order No. 378-719 WIDE VMU (all models)

Bright field motorized turret Bright/Dark field motorized turret

Eyepieces P.25 Adapter B Polarizer (A)2 Polarizer (C)1