Vacuum Technology Book II Part 3 2 PDF

The
Vacuum
Technology
Book
Volume II
Vacuum measurement,
analysis, leak detection
Part
3.2
Vacuum measurement, analysis,

leak detection
Page 2 / Part 3.2
www.pfeiffer-vacuum.com
3.2 Vacuum measurement, analysis, leak detection
Contents
Vacuum solutions from a single source
Know-how book
3.1
Vacuum generation
Addresses sales and service . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
Rotary vane pumps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
Diaphragm vacuum pumps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 124
Screw pumps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 142
Multi-stage Roots pumps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 158
Roots pumps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 210
Side channel vacuum pumps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 260
Turbopumps . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 266
Index . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 460
3.2
Vacuum measurement, analysis, leak detection

Addresses sales and service . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
Measurement equipment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
Analytical equipment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 86
Leak detectors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 120
Contamination management. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 170
System technology . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 178
Index . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 190
3.3
Chambers and components

Addresses sales and service . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4
Vacuum chambers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
Components . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 40
Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 218
Feedthroughs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 298
Manipulators . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 354
Index . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 384
Part 3.2 / Page 3
3.2 Vacuum measurement, analysis, leak detection / Addresses sales and service
Addresses sales
Argentina
Chile
Estonia
Bermat S. A.
Sales Agency Santiago
Santiago
T +56 2 231 8877
F +56 2 231 4294
[email protected]
UAB Vildoma
Sales Agency Vilnius
Vilnius
T +37 05 236 36 56/57
F +37 05 236 36 55
[email protected]
Scitek Australia Pty. Ltd.

Sales Agency/ServicePoint Sydney
Sydney
T +61 2 9420 0477
F +61 2 9418 3540
[email protected]
China
Finland
Hakuto Enterprises Ltd.

Hong Kong
T +852 2512 5717
F +852 2807 0511
[email protected]
SV Vacuumservice Oy
Sales Agency Helsinki
Helsinki
T +358-9-774 55 30
F +358- 9 774 55 330
[email protected]
Austria
Pfeiffer Vacuum (Shanghai) Co., Ltd.

Shanghai
T +86-(0)21-33933940
F +86-(0)21-33933944
[email protected]
RUVAC S.R.L.
Sales Agency Buenos Aires
C. F. Buenos Aires
T +54 11 4501 5129
F +54 11 4504 4122
[email protected]
Australia
Pfeiffer Vacuum Austria GmbH

Sales and Service Company Austria
Wien
T +43 1 894 17 04
F +43 1 894 17 07
[email protected]
Belgium
Pfeiffer Vacuum Benelux B.V.
Culemborg
T +31 345 478 400
F +31 345 531 076
[email protected]
Bolivia
APP Machines Ltda.
Sales Agency Bogot
Bogot
T +57 1 704 2311
F +57 1 703 8648
[email protected]
Bosnia and Herzegovina

SCAN, d.o.o., Preddvor
Kranj, Slovenia
T +386 4 27 50 200
F +386 4 27 50 240
[email protected]
Brazil
AVACO Tecnologia em Vcuo
Sales Agency So Paulo
So Paulo SP
T +55 11 4436 6994
F +55 11 4438-7571
[email protected]
Pfeiffer Vacuum Brasil Ltda.
Sales and Service Company Brazil
So Paulo SP
T +55 11 3130 7999
F +55 11 3130 7979
[email protected]
Bulgaria
Astel Ltd
Sales Agency/ServicePoint Sofia
Sofia
T +359 2 958 78 85
F +359 2 958 78 90
[email protected]
Byelorussia
BLM Synergie
Moscow
T +7 495 781 39 39
F +7 495 781 35 91
[email protected]
Canada
Pfeiffer Vacuum Inc.
ServiceCenter Nashua
Nashua
T +1 (800) 248-8254
F +1 (888) 658-7983
[email protected]
Page 4 / Part 3.2

ServiceCenter Wuxi
Wuxi
T +86-(0)510-85498888
F +86-(0)510-82239070
[email protected]
Colombia
APP Machines Ltda.
Sales Agency Bogot
Bogot
T +57 1 704 2311
F +57 1 703 8648
[email protected]
Croatia
Kranj, Slovenia
T +386 4 27 50 200
F +386 4 27 50 240
[email protected]
France
adixen Vacuum Products SAS
Sales and Service Company France
Annecy
T +33 4 50 65 77 77
F +33 4 50 65 77 89
[email protected]
Germany
Pfeiffer Vacuum GmbH
Headquarters
Asslar
T +49 6441 802-0
F +49 6441 802-1202
[email protected]
Trinos Vakuum-Systeme GmbH
Gttingen
T +49 551 99963-0
F +49 551 99963-3010
[email protected]
Great Britain
Cyprus
Pfeiffer Vacuum Ltd

Livingston
T +44 1506 418000
F +44 1506 418002
[email protected]
Analytical Instruments S.A.

Chalandri/Athens
T +30 210 67 48 973
F +30 210 67 48 978
[email protected]
Newport Pagnell
T +44 1908 500600
F +44 1908 500601
[email protected]
Norm Electronics ltd.

Athens
T +30 210 3237698
F +30 210 3237780
[email protected]
Greece
Chalandri/Athens
T +30 210 67 48 973
F +30 210 67 48 978
[email protected]
Czech Republic
Pfeiffer Vacuum Austria GmbH, Office
Prague
Praha 4
T +420 257 923 888
F +420 257 923 014
[email protected]

Athens
T +30 210 3237698
F +30 210 3237780
[email protected]
Hungary
Denmark
Pfeiffer Vacuum Scandinavia AB
Taastrup
T +45 43 523 800
F +45 43 523 850
[email protected]
Ecuador
APP Machines Ltda.
Sales Agency Bogot
Bogot
T +57 1 704 2311
F +57 1 703 8648
[email protected]
Indonesia
APP Systems Services Pte. Ltd.
Jakarta
T +6221 745 1687
F +6221 745 3337
[email protected]
Ireland
Pfeiffer Vacuum Ltd
Newport Pagnell
T +44 1908 500600
F +44 1908 500601
[email protected]
Israel
ODEM Scientific Applications Ltd.
Rehovot
T +972 8 9480780
F +972 8 9480781
[email protected]
Italy
Pfeiffer Vacuum Italia S.p.A.
Paderno Dugnano (MI)
T +39 02 93 99 051
F +39 02 93 99 05 33
[email protected]
Japan
Hakuto Co., Ltd.
Headoffice
Tokyo
T + 81 3 32 258 910
F + 81 3 32 259 011
[email protected]
Kazakhstan
BLM Synergie
Moscow
T +7 495 781 39 39
F +7 495 781 35 91
[email protected]
Korea
adixen Vacuum Technology Korea
Hwasung-Si, Gyeonggi-Do
T +82 31 8014 7200
F +82 31 8014 7227
[email protected]
Pfeiffer Vacuum Korea Ltd.
Yongin-City, Kyungki-Do
T +82 31 266 0741
F +82 31 266 0747
[email protected]
Kosovo
Kranj, Slovenia
T +386 4 27 50 200
F +386 4 27 50 240
[email protected]
Latvia
Magnificat Vacuum Kft.

Budapest
T +3612317030
F +3612317035
[email protected]
UAB Vildoma
Vilnius
T +37 05 236 36 56/57
F +37 05 236 36 55
[email protected]
Iceland
Lithuania

Upplands Vsby
T +46 8 590 748 10
F +46 8 590 748 88
[email protected]
UAB Vildoma
Vilnius
T +37 05 236 36 56/57
F +37 05 236 36 55
[email protected]
India
Pfeiffer Vacuum India Ltd.
Secunderabad
T +91 40 2775 0014
F +91 40 2775 7774
[email protected]
Luxembourg
Peru
South Africa
Venezuela

Culemborg
T +31 345 478 400
F +31 345 531 076
[email protected]
APP Machines Ltda.

Sales Agency Bogot
Bogot
T +57 1 704 2311
F +57 1 703 8648
[email protected]
Air & Vacuum Technologies (Pty) Ltd.

Gauteng
T + 27 11 318 3240/5
F + 27 (0)86 522 9188
[email protected]
Secotec S.A.
Sales Agency Caracas
Caracas
T +58 212 573 8687
F +58 212 573 1932
[email protected]
Macedonia (FYROM)
Kranj, Slovenia
T +386 4 27 50 200
F +386 4 27 50 240
[email protected]
Spain
Philippines
Manila
T +63 2 846 84 17
F +63 2 846 84 20
[email protected]
Malaysia
APP Engineering Sdn. Bhd.
Office Kuala Lumpur
Kuala Lumpur
T +60 3 7984 6611
F +60 3 7984 6616
[email protected]
Office Kuching
Kuching, Sarawak
T +60 82 363182
F +60 82 362078
[email protected]
Office Penang
Penang
T +60 4 646 7758
F +60 4 646 7759
[email protected]
Mexico
INTERCOVAMEX
ServicePoint Cuernavaca Morelos
Cuernavaca Morelos
T +52 777 313 2260
F +52 777 317 2701
[email protected]
APVACUUM Sp.z o.o.

Sales Agency/ServicePoint
Suchy Las, k. Poznania
T +48 61 6563530
F +48 61 6100312
[email protected]
Portugal
Tecnovac Tecnologia de Vacio S.L.
Tres Cantos (Madrid)
T +34 91 804 1134
F +34 91 804 3091
[email protected]
Romania
VACUSERV srl
Sales Agency Romania
Bucharest
T +40 744 500 119
F +40 21 314 0034
[email protected]
Russia
BLM Synergie
Moscow
T +7 495 781 39 39
F +7 495 781 35 91
[email protected]
Serbia
Kranj, Slovenia
T +386 4 27 50 200
F +386 4 27 50 240
[email protected]
Netherlands
Culemborg
T +31 345 478 400
F +31 345 531 076
[email protected]
Singapore
Pfeiffer Vacuum Singapore Pte. Ltd.
Singapore
T +65 6254 0828
F +65 6254 7018
[email protected]
New Zealand
ServicePoint Sydney
Lane Cove West
T +61 2 9420 0477
F +61 2 9418 3540
[email protected]
Slovakia
Pfeiffer Vacuum Austria GmbH, Office
Prague
Praha 4, CZ
T +420 257 923 888
F +420 257 923 014
[email protected]
Norway
VakuumConsult AS
Sales Agency Norway
Oslo
T +47 22 16 32 00
F +47 22 16 32 01
[email protected]
Paraguay
RUVAC S.R.L.
C. F. Buenos Aires
T +54 11 4501 5129
F +54 11 4504 4122
[email protected]
Vietnam
Ho Chi Minh City
T +848 3933 0177
F +848 3933 0178
[email protected]
Sweden
Poland
Montenegro
Kranj, Slovenia
T +386 4 27 50 200
F +386 4 27 50 240
[email protected]

Alcobendas (Madrid)
T +34 91 804 1134
F +34 91 804 3091
[email protected]
Slovenia
Kranj, Slovenia
T +386 4 27 50 200
F +386 4 27 50 240
[email protected]

Upplands Vsby
T +46 8 590 748 10
F +46 8 590 748 88
[email protected]
Switzerland
Pfeiffer Vacuum (Schweiz) AG
Zrich
T +41 44 444 22 55
F +41 44 444 22 66
[email protected]
Taiwan R.O.C.
Pfeiffer Vacuum Taiwan Corporation
Hsin Chu
T 886-3-5599230
F 886-5599231
[email protected]
Thailand
Hakuto (Thailand) Ltd.
Bangkok
T +662 255 8910
F +662 255 8911
[email protected]
Turkey
An-Ka Analiz Ltd.
Istanbul
T +90 212 274 97 10
F +90 212 274 97 22
[email protected]
Ukraine
BLM Synergie
Moscow
T +7 495 781 39 39
F +7 495 781 35 91
[email protected]
PV Systems
Moscow
T +7 (495) 411 7962
F +7 (495) 411 7962 108
[email protected]
Uruguay
RUVAC S.R.L.
C. F. Buenos Aires
T +54 11 4501 5129
F +54 11 4504 4122
[email protected]
USA
Headquarters
Nashua, NH 03063-1988
T +1 (800) 248-8254
F +1 (603) 578-6550
[email protected]
Part 3.2 / Page 5
Addresses service
Argentina
China
France
Great Britain
RUVAC S.R.L.
ServicePoint Buenos Aires
C. F. Buenos Aires
T +54 11 4501 5129
F +54 11 4504 4122
[email protected]

ServiceCenter Shanghai
Shanghai
T +86-(0)21-33933940
F +86-(0)21-33933944
[email protected]

ServiceCenter Annecy
Annecy
T +33 4 50 65 76 07
F +33 4 50 65 75 77
[email protected]
Pfeiffer Vacuum Ltd

ServiceCenter Livingston
Livingston
T +44 1506 418000
F +44 1506 418002
[email protected]
Australia
Hakuto Enterprises Ltd.

ServicePoint Hong Kong
Hong Kong
T +852 2690 2543
F +852 2690 2034
[email protected]

ServiceCenter Paris
Saclay
T +33 1 69 30 92 86
F +33 1 69 30 92 94
[email protected]
Pfeiffer Vacuum Ltd

ServiceCenter Newport Pagnell
Newport Pagnell
T +44 1908 500600
F +44 1908 500601
[email protected]

ServiceCenter Wuxi
Wuxi
T +86-(0)510-85498888
F +86-(0)510-82239070
[email protected]
Germany
Greece

Headquarters
Asslar
T +49 6441 802-1852
F +49 6441 802-1202
[email protected]

ServicePoint Athens
Chalandri/Athens
T +30 210 67 48 973
F +30 210 67 48 978
[email protected]
APP Machines Ltda.

ServicePoint Bogot
Bogot
T +57 1 704 2311
F +57 1 703 8648
[email protected]

ServiceCenter Berlin
Berlin-Adlershof
T +49 6441 802 1852
F +49 6441 802 1202
[email protected]

ServicePoint Greece
Athens
T +30 210 3237698
F +30 210 3237780
[email protected]
Croatia
DREEBIT GmbH
ServiceCenter Dresden
Dresden
T +49 6441 802 1852
F +49 6441 802 1202
[email protected]
Hungary

ServicePoint Sydney
Sydney
T +61 2 9420 0477
F +61 2 9418 3540
[email protected]
Austria
Pfeiffer Vacuum Austria GmbH
ServiceCenter Vienna
Wien
T +43 1 894 17 04
F +43 1 894 17 07
[email protected]
Belgium
ServiceCenter Culemborg
T +31 345 478 400
F +31 345 531 076
[email protected]
Bolivia
APP Machines Ltda.
ServicePoint Bogot
Bogot
T +57 1 704 2311
F +57 1 703 8648
[email protected]
Colombia

Kranj, Slovenia
Preddvor
T +386 4 27 50 200
F +386 4 27 50 240
[email protected]
Cyprus
Bosnia and Herzegovina
Kranj, Slovenia
T +386 4 27 50 200
F +386 4 27 50 240
[email protected]
Brazil
Pfeiffer Vacuum Brasil Ltda.
Sales and Service Company Brazil
So Paulo SP
T +55 11 3130 7999
F +55 11 3130 7979
[email protected]

ServicePoint Athens
Chalandri/Athens
T +30 210 67 48 973
F +30 210 67 48 978
[email protected]
ServicePoint Greece
Athens
T +30 210 3237698
F +30 210 3237780
[email protected]
Czech Republic
AVACO Tecnologia em Vcuo
ServicePoint So Paulo
So Paulo SP
T +55 11 4436 6994
F +55 11 4438-7571
[email protected]
Vakuum Servis S.R.O.

ServiceCenter Roznov
Roznov p. R.
T +420 571 115 656
F +420 571 843 166
[email protected]
Bulgaria
Denmark
Astel ltd
Sales Agency/ServicePoint Sofia
Sofia
T +359 2 958 78 85
F +359 2 958 78 90
[email protected]

ServiceCenter Stockholm
Upplands Vsby
T +46 8 590 748 15
F +46 8 590 748 88
[email protected]
Byelorussia
Ecuador
BLM Synergie
ServicePoint Moscow
Mytischi
T +7 (495) 781 39 39
F +7 (495) 781 35 91
[email protected]
APP Machines Ltda.

ServicePoint Bogot
Bogot
T +57 1 704 2311
F +57 1 703 8648
[email protected]
Canada
Estonia

Nashua, NH 03063-1988
T +1 (800) 248-8254
F +1 (888) 658-7983
[email protected]
UAB Vildoma
Upplands Vsby
T +46 8 590 748 15
F +46 8 590 748 88
[email protected]
Chile
Finland
Bermat S. A.
ServicePoint Santiago
Santiago
T +56 24122800
F +56 2 231 4294
[email protected]
SV Vacuumservice Oy
ServicePoint Helsinki
Helsinki
T +358-9-774 55 30
F +358- 9 774 55 330
[email protected]
Page 6 / Part 3.2

ServiceCenter Wertheim
Wertheim
T +49 9342 9610 0
F +49 9342 9610 3810
[email protected]
MassTech GmbH
ServicePoint Bremen
Bremen
T +49 6441 802 1852
F +49 6441 802 1202
[email protected]
ServicePoint Karlsruhe
Karlsruhe
T +49 6441 802 1852
F +49 6441 802 1202
[email protected]
ServicePoint Mnchen
Mnchen
T +49 6441 802 1852
F +49 6441 802 1202
[email protected]
ServicePoint Aachen
Aachen
T +49 6441 802 1852
F +49 6441 802 1202
[email protected]
ServicePoint Nrnberg
Nrnberg
T +49 6441 802 1852
F +49 6441 802 1202
[email protected]
ServicePoint Hamburg
Hamburg
T +49 6441 802 1852
F +49 6441 802 1202
[email protected]
Magnificat Vacuum Kft

ServicePoint Budapest
Budapest
T +3612317030
F +3612317035
[email protected]
Iceland
Upplands Vsby
T +46 8 590 748 15
F +46 8 590 748 88
[email protected]
India
Pfeiffer Vacuum India Ltd.
ServiceCenter Secunderabad
Secunderabad
T +91 40 2775 0014
F +91 40 2775 7774
[email protected]
Indonesia
ServicePoint Jakarta
T +62 21 745 1687
F +62 21 745 3337
[email protected]
Ireland
Pfeiffer Vacuum Ltd
ServiceCenter Newport Pagnell
Newport Pagnell
T +44 1908 500600
F +44 1908 500601
[email protected]
Israel
ODEM Scientific Applications Ltd.
ServicePoint Rehovot
Rehovot
T +972 8 9480780
F +972 8 9480781
[email protected]
Italy
ServiceCenter Milano
Paderno Dugnano (MI)
T +39 02 93 99 051
F +39 02 93 99 05 33
[email protected]
ServiceCenter Catania
Catania (CT)
T +39 095 523257
F +39 095 523268
[email protected]

ServiceCenter Agrate
Agrate Brianza (MB)
T +39 039 6899718
F +39 039 6899718
[email protected]
Macedonia (FYROM)
Poland
Sweden

Kranj, Slovenia
T +386 4 27 50 200
F +386 4 27 50 240
[email protected]
APVACUUM Sp.z o.o.

ServicePoint
Suchy Las, k. Poznania
T +48 61 656 35 30
F +48 61 6100312
[email protected]

Upplands Vsby
T +46 8 590 748 15
F +46 8 590 748 88
[email protected]

ServiceCenter Roma
Pomezia (RM)
T +39 335 5284142
[email protected]
Malaysia
Office Kuala Lumpur
ServicePoint Kuala Lumpur
Kuala Lumpur
T +60 3 7984 6611
F +60 3 7984 6616
[email protected]
Portugal

ServicePoint Gothenburg
Hisings Backa
T +46 31 52 60 60
F +46 31 52 80 61
[email protected]

Office Penang
ServicePoint Penang
Penang
T +60 4 646 7758
F +60 4 646 7759
[email protected]
Romania
Mexico
Russia
INTERCOVAMEX
ServicePoint Cuernavaca Morelos
Cuernavaca Morelos
T +52 777 313 2260
F +52 777 317 2701
[email protected]
BLM Synergie
ServicePoint Moscow
Mytischi
T +7 (495) 781 39 39
F +7 (495) 781 35 91
[email protected]
Montenegro
Serbia

Kranj, Slovenia
T +386 4 27 50 200
F +386 4 27 50 240
[email protected]
SCAN, d.o.o., ServicePoint Preddvor

Kranj, Slovenia
T +386 4 27 50 200
F +386 4 27 50 240
[email protected]
Hakuto (Thailand) Ltd.

ServicePoint Bangkok
Bangkok
T +662 255 8910
F +662 255 8911
[email protected]
Netherlands
Singapore
Turkey

T +31 345 478 400
F +31 345 531 076
[email protected]
Pfeiffer Vacuum Singapore Pte. Ltd.

ServiceCenter Singapore
Singapore
T +65 6254 0828
F +65 6254 7018
[email protected]
An-Ka Analiz Ltd.

ServicePoint Istanbul
Istanbul
T +90 212 274 97 10
F +90 212 274 97 22
[email protected]
Slovakia
Ukraine
Vakuum Servis S.R.O.

ServiceCenter Roznov
Roznov p. R.
T +420 571 842 314
F +420 571 843 166
[email protected]
BLM Synergie
ServicePoint Moscow
Mytischi
T +7 (495) 781 39 39
T +7 (495) 781 35 91
[email protected]
Slovenia
Uruguay

ServicePoint Preddvor
Kranj, Slovenia
T +386 4 27 50 200
F +386 4 27 50 240
[email protected]
RUVAC S.R.L.
C. F. Buenos Aires
T +54 11 4501 5129
F +54 11 4504 4122
[email protected]
South Africa
USA
Air & Vacuum Technologies (Pty) Ltd.

ServicePoint South Africa
Gauteng
T + 27 (0)861 822 832
F + 27 (0)86 522 9188
[email protected]

Nashua, NH 03063-1988
T +1 (800) 248-8254
F +1 (888) 658-7983
[email protected]
Spain
Venezuela

ServicePoint Madrid
Alcobendas (Madrid)
T +34 91 804 1134
F +34 91 804 3091
[email protected]
Secotec S.A.
ServicePoint Caracas
Caracas
T +58 212 573 8687
F +58 212 573 1932
[email protected]
Japan
Hakuto Co., Ltd., Vacuum Scientific,
Instruments Division
ServiceCenter Isehara
Isehara
T +81 463 96 2005
F +81 463 96 2021
[email protected]
Hakuto Co., Ltd.
ServicePoint Kansai
Hyogo-ken
T +81 72 784 8268
F +81 72 784 8286
[email protected]
Hakuto Co., Ltd.
ServicePoint Nagoya
Nagoya
T +81 52 794 8970
F +81 52 794 8975
[email protected]
Kazakhstan
BLM Synergie
Moscow
T +7 495 781 39 39
F +7 495 781 35 91
[email protected]
Korea
Pfeiffer Vacuum Korea Ltd.
ServiceCenter Seoul
Yongin-City, Gyeonggi-Do
T +82 31 266 0741
F +82 31 266 0747
[email protected]
adixen Vacuum Technology Korea
ServiceCenter Hwasung
Hwasung-Si, Gyeonggi-Do
T +82 31 8014 7202
F +82 31 8014 7203
[email protected]
Kosovo
Kranj, Slovenia
T +386 4 27 50 200
F +386 4 27 50 240
[email protected]
Latvia
UAB Vildoma
Upplands Vsby
T +46 8 590 748 15
F +46 8 590 748 88
[email protected]
Lithuania
UAB Vildoma
Upplands Vsby
T +46 8 590 748 15
F +46 8 590 748 88
[email protected]
Luxembourg
T +31 345 478 400
F +31 345 531 076
[email protected]

ServicePoint Madrid
Alcobendas (Madrid)
T +34 91 804 1134
F +34 91 804 3091
[email protected]
Switzerland
VACUSERV srl
ServicePoint Romania
Bucharest
T +40 744 500 119
F +40 21 314 0034
[email protected]
Pfeiffer Vacuum (Schweiz) AG

ServiceCenter Zrich
Zrich
T +41 44 444 22 55
F +41 44 444 22 66
[email protected]
Taiwan R.O.C.
Pfeiffer Vacuum Taiwan Corporation
ServiceCenter Taiwan
Hsin Chu
T 886-3-5599230
F 886-3-5599231
[email protected]
Thailand
New Zealand
ServicePoint Sydney
Sydney
T +61 2 9420 0477
F +61 2 9418 3540
[email protected]
Norway
VakuumConsult AS
ServicePoint Oslo
Oslo
T +47 22 16 32 00
F +47 22 16 32 01
[email protected]
Paraguay
RUVAC S.R.L.
C. F. Buenos Aires
T +54 11 4501 5129
F +54 11 4504 4122
[email protected]
Peru
APP Machines Ltda.
ServicePoint Bogot
Bogot
T +57 1 704 2311
F +57 1 703 8648
[email protected]
Philippines
ServicePoint Manila
Cupang Muntinlupa City
T +63 2 850 6665
F +63 2 850 6665
[email protected]
Vietnam
ServicePoint Ho Chi Minh City
Ho Chi Minh City
T +84 8 3933 0177
F +84 8 3933 0178
[email protected]
Part 3.2 / Page 7
Measurement equipment
Vacuum gauges for all vacuum areas and applications
Page 8 / Part 3.2
Contents
Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8
Overview of series and applications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
Features at a glance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10
DigiLine
14
Piezo resistive transmitter CPT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

Piezo/Pirani transmitter RPT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Pirani transmitter PPT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Pirani/cold catheter transmitter MPT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Pirani/Bayard Alpert transmitter HPT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Controller DPG. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
ActiveLine
30
Piezo transmitter APR . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

Capacitative transmitter CMR, temperature compensated, hPa . . . . . . . . . . . . . . . . . . .
Capacitative transmitter CMR, temperature regulated, hPa . . . . . . . . . . . . . . . . . . . . . . .
Capacitative transmitter CCR, temperature compensated, Torr . . . . . . . . . . . . . . . . . . . .
Capacitative transmitter CCR, temperature regulated, Torr . . . . . . . . . . . . . . . . . . . . . . .
Pirani/capacitative transmitter PCR. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Pirani transmitter TPR . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Cold cathode transmitter IKR . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Pirani/cold catheter transmitter PKR . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Hot cathode transmitter IMR . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Pirani/Bayard Alpert transmitter PBR . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
SingleGauge measuring equipment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
DualGauge measuring equipment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Pirani and Pirani/Piezo hand measuring equipment TPG . . . . . . . . . . . . . . . . . . . . . . . . .
Controllers TPG . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Software for ActiveLine . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
ModulLine
32
36
38
40
42
44
46
50
54
56
58
60
61
62
64
67
68
Pirani vacuum gauges TPR . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

Cold cathode vacuum gauges IKR . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Vacuum gauge accessories. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Measurement boards . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
Interface and relay board . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
TPG 300 basic unit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
TPG 300 complete measurement units. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
16
18
20
22
24
28
70
72
74
76
79
80
82
Part 3.2 / Page 9
3.2 Vacuum measurement, analysis, leak detection / Measurement equipment
Vacuum gauges for all vacuum areas and applications
Many vacuum applications operate only in a specific

pressure range. Analog and digital total vacuum or
pressure measurement instruments are used to measure
and control the total pressure in a vacuum system.
Pfeiffer Vacuum offers three different lines of total
pressure gauges.
The criteria for selecting a vacuum gauge are based
upon various conditions:
Q The pressure range to be detected
Q Gas composition (inert or corrosive)
Q Required accuracy and repeatability
Q Ambient conditions such as ionizing radiation
Each series separately covers the entire pressure range.
Pfeiffer Vacuum provides you with the best solution
for your total pressure measurement tasks based on the
relevant application.
DigiLine
Q Total pressure vacuum gauge with digital signal outlet
ActiveLine
Q Total pressure vacuum gauge with analog signal outlet
ModulLine
Q Total pressure measurement in areas with ionizing
radiation
Page 10 / Part 3.2
Overview of series and applications

Coating
Industry
R&D
Page
Q = recommended
Semiconductors
Electron microscopy
Leak detection
Mass spectrometry
Surface analysis
Plasma monitoring
Residual gas analysis
Lithography
PVD (Physical Vapor Deposition)
CVD (Chemical Vapor Deposition)
Plasma etching
Implantation source
Implantation beamline
Inspection
Bonding
MBE (Molecular Beam Epitaxy)
Load locks, transfer chambers, handling systems
Flat panel displays (FPD)
LED / OLED
Hard disk coating
Photovoltaics
Glass coating (PVD)
CD, DVD, Blu-ray production (PVD)
Optical coating (PVD)
Wear protection (PVD, CVD)
Hard coating
Medical technology
Industrial leak detection
Electron beam welding
Insulation vacuums
Bulb and tube manufacture
Heat treatment
Vacuum drying
Vacuum furnaces
Nuclear research
Fusion technology
Plasma research
Particle accelerators
Space simulation
Low temperature research
Elementary particle physics
Nanotechnology
Biotechnology
Analytics
Measuring equipment and controllers

DigiLine
Transmitter
Piezo
Q Q Q Q Q Q
Piezo / Pirani
Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q
Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q
Q Q Q Q Q
18
Pirani
Q Q Q Q Q
20
Pirani /
Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q
Cold cathodes
Q Q Q Q Q
22
Pirani /
Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q
Bayard-Alpert
24
Q Q Q Q
16
Q Q Q Q
Q Q Q
ActiveLine
Transmitter
Piezo
32
Capacitative
temperature Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q
compensated
Q Q Q
36
Capacitive
temperature
controlled
Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q
Q Q Q
38
Pirani /
Capacitive
Q Q Q Q Q
44
Pirani
Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q
Q Q Q Q Q Q Q Q Q
Q Q Q Q Q
46
Cold cathode Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q
Q Q Q Q Q Q Q Q Q Q
Q Q Q
50
Pirani /
Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q
Cold cathode
Q Q Q Q Q Q Q Q Q Q
Q Q Q Q Q
54
Hot cathodes Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q
Q Q Q
56
Pirani /
Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q
Bayard-Alpert
Q Q Q
58
Q Q Q Q
Q Q Q Q
ModulLine
Vacuum gauges
Pirani
Q Q
Cold cathode
Q Q
70
72
Part 3.2 / Page 11
Features at a glance
Pressure range
Ultra-high
Vacuum
hPa
-11
10
-10
10
10
-9
10
High
-8
10
-7
-6
10
10
-5
Medium
-4
10
10
-3
10
-2
10
-1
Rough
10
101
102
103
104
Model
Page
Piezo resistive transmitter
CPT 200
16
Piezo/Pirani transmitter RP
RPT 200
18
Pirani transmitter
PPT 200
20
Pirani/Cold cathode transmitter
MPT 200
22
Pirani/Bayard Alpert transmitter
HPT 200
24
Gauges
DigiLine
ActiveLine
Piezo transmitter
APR 250
32
APR 260
32
APR 262
32
APR 265
32
APR 266
32
APR 267
32
CMR 361
36
CMR 362
36
CMR 363
36
CMR 364
36
CMR 365
36
CMR 371
38
CMR 372
38
CMR 373
38
CMR 374
38
CMR 375
38
Pirani/Capacitive transmitter
PCR 280
44
Pirani transmitter
TPR 280
46
TPR 281
48
IKR 251
50
IKR 261
50
IKR 270
52
PKR 251
54
PKR 261
54
Hot cathode transmitter
IMR 265
56
Pirani/Bayard Alpert transmitter
PBR 260
58
Capacitive transmitter
Temperature compensated
Capacitive transmitter
Temperature controlled
Cold cathode transmitter
Pirani/Cold cathode transmitter
ModulLine
Pirani vacuum gauge
Cold cathode transmitter
TPR 010
70
TPR 017
70
TPR 018
70
IKR 050
72
IKR 060
72
IKR 070
72
Depending on the measuring principle the measurement precision will decline at the area limits.
Page 12 / Part 3.2
Customer benefits
Q
Q
Q
Q
Q
Easy integration
Flexible use
Low installation effort
Secure data transmission
Proven long life
Part 3.2 / Page 13
DigiLine
Innovative vacuum measurement for the digital age
Page 14 / Part 3.2
DigiLine
The DigiLine series is designed for industrial and research
applications that need wiring that is easy to install and
reliable. The series covers the entire technically relevant
vacuum range with measuring principles encompassing
Piezo, Pirani, and hot and cold cathode vacuum gauges.
All transmitters have an RS-485 interface which can be
used to connect up to 16 measuring points to a controller.
An additional voltage outlet that is proportional to the
pressure and two switch-points as well as Profibus and
DeviceNet interfaces are available as options. Protection
class IP 54 and DIN M12 connector assemblies qualify
these vacuum gauges for usage in heavy-duty environments.
Customer benefits
Q Pressure range 5 10-10 to 2,000 hPa covers the entire
vacuum range.
Q Digital outlet signal for error-free data transmission
Q Transmission of numerical pressure values saves
characteristics and recalculations
Q Protection class IP 54 and DIN M12 connector
assemblies for reliable operation in heavy-duty
environments.
Q Remote control for easy adjustment.
Q Optional Profibus and DeviceNet fieldbus interfaces
meeting industrial standards
Space simulation
Typical applications
Q Hard disk coating
Q PVD coating
Q Solar cell production
Q Space simulation
Q Vacuum drying / Heat treatment
Q Electron beam welding
Q Surface coating
Q Fusion technology
Vacuum drying
Solar cell production
Part 3.2 / Page 15
3.2 Vacuum measurement, analysis, leak detection / Measurement equipment / DigiLine
Measurement
3.2 Vacuum measurement, analysis, leak detection/Measurement/DigiLine/Transmitters/Piezo-resistive Gauge CPT 200 (1 2000 hPa)
3.2 Vacuum measurement, analysis, leak detection/Measurement /DigiLine /Transmitters /Piezo-resistive Gauge CPT 200
(1 2000 hPa)
Piezo-resistive Gauge CPT 200 (1 2000 hPa)
1 to 2000 hPa
Robust sensor
Gas type independent measurement
Profibus DP Interface (optional)
DeviceNet Interface (optional)
Analog output and set points (optional)
Dimensions (in mm)
98
66
30
45
Technical data
CPT 200,
DN 16 ISO-KF,
RS-485
CPT 200,
DN 16 ISO-KF,
RS-485, analog
CPT 200,
DN 16 ISO-KF,
RS-485, Profibus
CPT 200,
DN 16 ISO-KF,
RS-485, DeviceNet
Flange (in)
Seal
Pressure max.
Full scale
Accuracy
DN 16 ISO-KF
FPM
400 kPa
2000
1-1200 hPa:
0.1 % F.S.;
>1200 hPa: 1 % F.S.
190 g
Ceramic, stainless
steel, FPM
2000 hPa
1 hPa
1000 m
Diaphragm,
piezoresistive (gas
type independent)
10 ms
Digital RS-485 ; M12,
5-pole
IP 54
70 C
5-60 C
-40-+65 C
24 V DC
1.5 W
DN 16 ISO-KF
FPM
400 kPa
2000
1-1200 hPa:
0.1 % F.S.;
>1200 hPa: 1 % F.S.
190 g
Ceramic, stainless
steel, FPM
2000 hPa
1 hPa
100 m
Diaphragm,
piezoresistive (gas
type independent)
10 ms
5-pole; Analog 0-10 V;
2 SP; M12, 8-pole
IP 54
70 C
5-60 C
-40-+65 C
24 V DC
2.2 W
DN 16 ISO-KF
FPM
400 kPa
2000
1-1200 hPa:
0.1 % F.S.;
>1200 hPa: 1 % F.S.
190 g
Ceramic, stainless
steel, FPM
2000 hPa
1 hPa
100 m
Diaphragm,
piezoresistive (gas
type independent)
10 ms
Digital RS-485 , M12,
5-pole, Profibus DP,
M12, 5-pole
IP 54
70 C
5-60 C
-40-+65 C
24 V DC
3.0 W
DN 16 ISO-KF
FPM
400 kPa
2000
1-1200 hPa:
0.1 % F.S.;
>1200 hPa: 1 % F.S.
190 g
Ceramic, stainless
steel, FPM
2000 hPa
1 hPa
100 m
Diaphragm,
piezoresistive (gas
type independent)
10 ms
5-pole, DeviceNet,
M12, 5-pole
IP 54
70 C
5-60 C
-40-+65 C
24 V DC
2.0 W
PT R36 130
PT R36 131
PT R36 132
PT R36 133
Centering ring with poral filter, Pore size: 20 m, PF 117 216 -T

FPM/stainless steel, DN 16 ISO-KF
PF 117 216 -T
PF 117 216 -T
PF 117 216 -T
Fine filter, pore size 4 m, DN 16 ISO-KF
PT 120 132 -T
PT 120 132 -T
PT 120 132 -T
Weight
Materials in contact with media
Measurement range max.
Measurement range min.
Sensor cable length max.
Method of measurement
Measuring cycle
Interface: Connection
Protection category
Temperature: Bakeout
Temperature: Operating
Temperature: Storage
Supply: Voltage
Supply: Power consumption max.
Order number
CPT 200, DN 16 ISO-KF
Accessories
PT 120 132 -T
Further accessories see controller DPG 202
Page 16 / Part 3.2
Technical data
CPT 200,
G 1/4",
RS-485
CPT 200,
G 1/4",
RS-485, analog
Flange (in)
Seal
Pressure max.
Full scale
Accuracy
G 1/4"
FPM
400 kPa
2000
1-1200 hPa:
0.1 % F.S.;
>1200 hPa: 1 % F.S.
190 g
Ceramic, stainless
steel, FPM
2000 hPa
1 hPa
100 m
Diaphragm,
piezoresistive (gas
type independent)
10 ms
5-pole
G 1/4"
FPM
400 kPa
2000
1-1200 hPa:
0.1 % F.S.;
>1200 hPa: 1 % F.S.
190 g
Weight
Measuring cycle
Protection category
Supply: Voltage
CPT 200,
G 1/4",
RS-485, Profibus
CPT 200,
G 1/4",
RS-485, DeviceNet
IP 54
70 C
5-60 C
-40-+65 C
24 V DC
1.5 W
G 1/4"
FPM
400 kPa
2000
1-1200 hPa:
0.1 % F.S.;
>1200 hPa: 1 % F.S.
190 g
Ceramic, stainless
steel, FPM
2000 hPa
1 hPa
100 m
100 m
Diaphragm,
Diaphragm,
piezoresistive (gas
piezoresistive (gas
type independent)
type independent)
10 ms
10 ms
Digital RS-485 ; M12, Digital RS-485 , M12,
5-pole; Analog 0-10 V; 5-pole, Profibus DP,
2 SP; M12, 8-pole
M12, 5-pole
IP 54
IP 54
70 C
70 C
5-60 C
5-60 C
-40-+65 C
-40-+65 C
24 V DC
24 V DC
2.2 W
3.0 W
G 1/4"
FPM
400 kPa
2000
1-1200 hPa:
0.1 % F.S.;
>1200 hPa: 1 % F.S.
190 g
Ceramic, stainless
steel, FPM
2000 hPa
1 hPa
100 m
Diaphragm,
piezoresistive (gas
type independent)
10 ms
5-pole, DeviceNet,
M12, 5-pole
IP 54
70 C
5-60 C
-40-+65 C
24 V DC
2.0 W
PT R36 210
PT R36 211
PT R36 213
Order number
CPT 200 , G 1/4"
PT R36 212
Part 3.2 / Page 17
Measurement
3.2 Vacuum measurement, analysis, leak detection/Measurement/DigiLine/Transmitters/Piezo-resistive Gauge CPT 200 (1 2000 hPa)
Measurement
3.2 Vacuum measurement, analysis, leak detection/Measurement/DigiLine/Transmitters/Piezo/Pirani Gauge RPT 200 (1 10-4 1200 hPa)
3.2 Vacuum measurement, analysis, leak detection/Measurement /DigiLine /Transmitters /Piezo/Pirani Gauge RPT 200 (1
10-4 1200 hPa)
Piezo/Pirani Gauge RPT 200 (1 10-4 1200 hPa)
1 10-4 to 1200 hPa

Combination of two sensors
High accuracy up to atmospheric pressure
Dimensions (in mm)
98
107
66
45
30
RPT 200, DN 16 ISO-KF
66
45
34
RPT 200, DN 16 CF-F
Technical data
RPT 200,
DN 16 ISO-KF,
RS-485
Flange (in)
Seal
Pressure max.
Full scale
Accuracy
DN 16 ISO-KF
Metal
400 kPa
1200
< 2 10-3 factor 2;
2 10-3 - 10 hPa:
10 %; 10-1200 hPa:
0.3 % F.S.
195 g
Stainless steel,
Tungsten, gold,
silicon oxide, glass
1200 hPa
1 10-4 hPa
100 m
Piezo/Pirani
10 ms
5-pole
RPT 200,
DN 16 ISO-KF,
RS-485, Profibus
RPT 200,
DN 16 ISO-KF,
RS-485, DeviceNet
DN 16 ISO-KF
Metal
400 kPa
1200
< 2 10-3 factor 2;
2 10-3 - 10 hPa:
10 %; 10-1200 hPa:
0.3 % F.S.
195 g
Stainless steel,
Tungsten, gold,
1200 hPa
1 10-4 hPa
100 m
Piezo/Pirani
10 ms
2 SP; M12, 8-pole
IP 54
IP 54
125 C
125 C
+5 - +60 C
+5 - +60 C
-40-+65 C
-40-+65 C
24 V DC
24 V DC
2.5 W
3.2 W
10-1200 hPa: 0.1% 10-1200 hPa: 0.1%
F.S.; 1 10-3 - 1 hPa: F.S.; 1 10-3 - 1 hPa:
1%
1%
DN 16 ISO-KF
Metal
400 kPa
1200
< 2 10-3 factor 2;
2 10-3 - 10 hPa:
10 %; 10-1200 hPa:
0.3 % F.S.
195 g
Stainless steel, Tungsten, gold,
1200 hPa
1 10-4 hPa
100 m
Piezo/Pirani
10 ms
M12, 5-pole
IP 54
125 C
+5 - +60 C
-40-+65 C
24 V DC
4.0 W
10-1200 hPa: 0.1%
F.S.; 1 10-3 - 1 hPa:
1%
DN 16 ISO-KF
Metal
400 kPa
1200
< 2 10-3 factor 2;
2 10-3 - 10 hPa:
10 %; 10-1200 hPa:
0.3 % F.S.
195 g
Stainless steel,
Tungsten, gold,
1200 hPa
1 10-4 hPa
100 m
Piezo/Pirani
10 ms
5-pole, DeviceNet,
M12, 5-pole
IP 54
125 C
+5 - +60 C
-40-+65 C
24 V DC
2.9 W
10-1200 hPa: 0.1%
F.S.; 1 10-3 - 1 hPa:
1%
PT R37 130
PT R37 131
PT R37 132
PT R37 133

PF 117 216 -T
PF 117 216 -T
PF 117 216 -T
PT 120 132 -T
PT 120 132 -T
PT 120 132 -T
Weight

Measuring cycle
Protection category
Supply: Voltage
Repeatability: % of measurement
RPT 200,
DN 16 ISO-KF,
RS-485, analog
Order number
RPT 200, DN 16 ISO-KF
Accessories
PT 120 132 -T
Page 18 / Part 3.2
Technical data
RPT 200,
DN 16CF-F,
RS-485
Flange (in)
Seal
Pressure max.
Full scale
Accuracy
DN 16 CF-F
Metal
400 kPa
1200
< 2 10-3 factor 2;
2 10-3 - 10 hPa:
10 %; 10-1200 hPa:
0.3 % F.S.
225 g
Stainless steel,
Tungsten, gold,
1200 hPa
1 10-4 hPa
100 m
Piezo/Pirani
10 ms
5-pole
Weight

Measuring cycle
Protection category
Supply: Voltage
RPT 200,
DN 16 CF-F,
RS-485, analog
RPT 200,
DN 16 CF-F,
RS-485, Profibus
RPT 200,
DN 16 CF-F,
RS-485, DeviceNet
DN 16 CF-F
Metal
400 kPa
1200
< 2 10-3 factor 2;
2 10-3 - 10 hPa:
10 %; 10-1200 hPa:
0.3 % F.S.
225 g
Stainless steel,
Tungsten, gold,
1200 hPa
1 10-4 hPa
100 m
Piezo/Pirani
10 ms
2 SP; M12, 8-pole
IP 54
IP 54
125 C
125 C
+5 - +60 C
+5 - +60 C
-40-+65 C
-40-+65 C
24 V DC
24 V DC
2.5 W
3.2 W
10-1200 hPa: 0.1% 10-1200 hPa: 0.1%
F.S.; 1 10-3 - 1 hPa: F.S.; 1 10-3 - 1 hPa:
1%
1%
DN 16 CF-F
Metal
400 kPa
1200
< 2 10-3 factor 2;
2 10-3 - 10 hPa:
10 %; 10-1200 hPa:
0.3 % F.S.
225 g
Stainless steel,
Tungsten, gold,
1200 hPa
1 10-4 hPa
100 m
Piezo/Pirani
10 ms
M12, 5-pole
IP 54
125 C
+5 - +60 C
-40-+65 C
24 V DC
4.0 W
10-1200 hPa: 0.1%
F.S.; 1 10-3 - 1 hPa:
1%
DN 16 CF-F
Metal
400 kPa
1200
< 2 10-3 factor 2;
2 10-3 - 10 hPa:
10 %; 10-1200 hPa:
0.3 % F.S.
225 g
Stainless steel,
Tungsten, gold,
1200 hPa
1 10-4 hPa
100 m
Piezo/Pirani
10 ms
5-pole, DeviceNet,
M12, 5-pole
IP 54
125 C
+5 - +60 C
-40-+65 C
24 V DC
2.9 W
10-1200 hPa: 0.1%
F.S.; 1 10-3 - 1 hPa:
1%
PT R37 310
PT R37 312
PT R37 313
Order number
RPT 200, DN 16 CF-F
PT R37 311
Part 3.2 / Page 19
Measurement
3.2 Vacuum measurement, analysis, leak detection/Measurement/DigiLine/Transmitters/Piezo/Pirani Gauge RPT 200 (1 10-4 1200 hPa)
Measurement
3.2 Vacuum measurement, analysis, leak detection/Measurement/DigiLine/Transmitters/Pirani Gauge PPT 200 (1 10-4 1000 hPa)
3.2 Vacuum measurement, analysis, leak detection/Measurement /DigiLine /Transmitters /Pirani Gauge PPT 200 (1 10 -4
1000 hPa)
Pirani Gauge PPT 200 (1 10-4 1000 hPa)
1 10-4 to 1000 hPa

High protection level for industrial applications
Pulsed sensor for improved accuracy
Dimensions (in mm)
98
107
66
45
30
PPT 200, DN 16 ISO-KF
66
45
34
PPT 200, DN 16 CF-F
Technical data
PPT 200,
DN 16 ISO-KF,
RS-485
Flange (in)
Seal
Pressure max.
Accuracy: % of measurement
DN 16 ISO-KF
Metal
400 kPa
< 2 10-3 hPa:
< factor 2, 2 10-3 20 hPa: 10 %,
20 - 1000 hPa: 30 %
190 g
Tungsten, stainless
steel, glass
1000 hPa
1 10-4 hPa
100 m
Pirani
10 ms
5-pole
PPT 200,
DN 16 ISO-KF,
RS-485, Profibus
PPT 200,
DN 16 ISO-KF,
RS-485, DeviceNet
DN 16 ISO-KF
Metal
400 kPa
< 2 10-3 hPa:
< factor 2, 2 10-3 20 hPa: 10 %,
20 - 1000 hPa: 30 %
190 g
Tungsten, stainless
steel, glass
1000 hPa
1 10-4 hPa
100 m
Pirani
10 ms
2 SP; M12, 8-pole
IP 54
IP 54
125 C
125 C
+5 - +60 C
+5 - +60 C
-40-+65 C
-40+70 C
24 V DC
24 V DC
2.5 W
3.2 W
2 10-3 - 10 hPa: 2 % 2 10-3 - 10 hPa: 2 %
DN 16 ISO-KF
Metal
400 kPa
< 2 10-3 hPa:
< factor 2, 2 10-3 20 hPa: 10 %,
20 - 1000 hPa: 30 %
190 g
Tungsten, stainless
steel, glass
1000 hPa
1 10-4 hPa
100 m
Pirani
10 ms
M12, 5-pole
IP 54
125 C
+5 - +60 C
-40+70 C
24 V DC
4.0 W
2 10-3 - 10 hPa: 2 %
DN 16 ISO-KF
Metal
400 kPa
< 2 10-3 hPa:
< factor 2, 2 10-3 20 hPa: 10 %,
20 - 1000 hPa: 30 %
190 g
Tungsten, stainless
steel, glass
1000 hPa
1 10-4 hPa
100 m
Pirani
10 ms
5-pole, DeviceNet,
M12, 5-pole
IP 54
125 C
+5 - +60 C
-40+70 C
24 V DC
2.9 W
2 10-3 - 10 hPa: 2 %
PT R38 130
PT R38 131
PT R38 132
PT R38 133

PF 117 216 -T
PF 117 216 -T
PF 117 216 -T
PT 120 132 -T
PT 120 132 -T
PT 120 132 -T
Weight
Measuring cycle
Protection category
Supply: Voltage
PPT 200,
DN 16 ISO-KF,
RS-485, analog
Order number
PPT 200, DN 16 ISO-KF
Accessories
PT 120 132 -T
Page 20 / Part 3.2
Technical data
PPT 200,
DN 16 CF-F,
RS-485
Flange (in)
Seal
Pressure max.
DN 16 CF-F
Metal
400 kPa
< 2 10-3 hPa:
< factor 2, 2 10-3 20 hPa: 10 %,
20 - 1000 hPa: 30 %
220 g
Tungsten, stainless
steel, glass
1000 hPa
1 10-4 hPa
100 m
Pirani
10 ms
5-pole
Weight
Measuring cycle
Protection category
Supply: Voltage
PPT 200,
DN 16 CF-F,
RS-485, analog
PPT 200,
DN 16 CF-F,
RS-485, Profibus
PPT 200,
DN 16 CF-F,
RS-485, DeviceNet
DN 16 CF-F
Metal
400 kPa
< 2 10-3 hPa:
< factor 2, 2 10-3 20 hPa: 10 %,
20 - 1000 hPa: 30 %
220 g
Tungsten, stainless
steel, glass
1000 hPa
1 10-4 hPa
100 m
Pirani
10 ms
2 SP; M12, 8-pole
IP 54
IP 54
125 C
125 C
+5 - +60 C
+5 - +60 C
-40+70 C
-40+70 C
24 V DC
24 V DC
2.5 W
3.2 W
2 10-3 - 10 hPa: 2 % 2 10-3 - 10 hPa: 2 %
DN 16 CF-F
Metal
400 kPa
< 2 10-3 hPa:
< factor 2, 2 10-3 20 hPa: 10 %,
20 - 1000 hPa: 30 %
220 g
Tungsten, stainless
steel, glass
1000 hPa
1 10-4 hPa
100 m
Pirani
10 ms
M12, 5-pole
IP 54
125 C
+5 - +60 C
-40+70 C
24 V DC
4.0 W
2 10-3 - 10 hPa: 2 %
DN 16 CF-F
Metal
400 kPa
< 2 10-3 hPa:
< factor 2, 2 10-3 20 hPa: 10 %,
20 - 1000 hPa: 30 %
220 g
Tungsten, stainless
steel, glass
1000 hPa
1 10-4 hPa
100 m
Pirani
10 ms
5-pole, DeviceNet,
M12, 5-pole
IP 54
125 C
+5 - +60 C
-40+70 C
24 V DC
2.9 W
2 10-3 - 10 hPa: 2 %
PT R38 310
PT R38 312
PT R38 313
Order number
PPT 200, DN 16 CF-F
PT R38 311
Part 3.2 / Page 21
Measurement
3.2 Vacuum measurement, analysis, leak detection/Measurement/DigiLine/Transmitters/Pirani Gauge PPT 200 (1 10-4 1000 hPa)
Measurement
3.2 Vacuum measurement, analysis, leak detection/Measurement/DigiLine/Pirani/Cold Cathode Gauge MPT 200 (5 10-9 1000 hPa)
Pirani/Cold Cathode Gauge MPT 200 (5 10-9 1000 hPa)
3.2 Vacuum measurement, analysis, leak detection/Measurement /DigiLine /Pirani/Cold Cathode Gauge MPT 200 (5 10-9
1000 hPa) /
5 10-9 to 1000 hPa

Insensitive to gas inrush
Customizable to vacuum application
Dimensions (in mm)
138
138
53
66
45
66
40
MPT 200, DN 25 ISO-KF
45
55
Technical data
MPT 200,
DN 25 ISO-KF,
RS-485
MPT 200,
DN 25 ISO-KF,
RS-485, analog
MPT 200,
DN 25 ISO-KF,
RS-485, Profibus
MPT 200,
DN 25 ISO-KF,
RS-485, DeviceNet
Flange (in)
Seal
Pressure max.
DN 25 ISO-KF
Metal
400 kPa
1 10-8 - 2 10-3 hPa:
25 %, 2 10-3 10 hPa: 10 %,
10-100 hPa: 30 %;
100-1000 hPa: 50 %
555 g
Tungsten, stainless
steel, nickel,
molybdenum, glass
1000 hPa
5 10-9 hPa
100 m
Pirani/Cold cathode
10 ms
RS-485,
D-Sub-socket,
9-pole
IP 54
Cold cathode
sensor can be
switched on and
off via interface
180 C
+5 - +60 C
-40-+65 C
24 V DC
3.0 W
9.5 cm
1 10-8 - 1 10-2 hPa:
7 %; 1 10-2 10 hPa: 2 %
DN 25 ISO-KF
Metal
400 kPa
1 10-8 - 2 10-3 hPa:
25 %, 2 10-3 10 hPa: 10 %,
10-100 hPa: 30 %;
100-1000 hPa: 50 %
555 g
Tungsten, stainless
steel, nickel,
molybdenum, glass
1000 hPa
5 10-9 hPa
100 m
Pirani/Cold cathode
10 ms
2 SP; M12, 8-pole
IP 54
Cold cathode
sensor can be
switched on and
off via interface
180 C
+5 - +60 C
-40-+65 C
24 V DC
3.7 W
9.5 cm
1 10-8 - 1 10-2 hPa:
7 %; 1 10-2 10 hPa: 2 %
DN 25 ISO-KF
Metal
400 kPa
1 10-8 - 2 10-3 hPa:
25 %, 2 10-3 10 hPa: 10 %,
10-100 hPa: 30 %;
100-1000 hPa: 50 %
555 g
Tungsten, stainless
steel, nickel,
molybdenum, glass
1000 hPa
5 10-9 hPa
100 m
Pirani/Cold cathode
10 ms
M12, 5-pole
IP 54
Cold cathode
sensor can be
switched on and
off via interface
180 C
+5 - +60 C
-40-+65 C
24 V DC
4.5 W
9.5 cm
1 10-8 - 1 10-2 hPa:
7 %; 1 10-2 10 hPa: 2 %
DN 25 ISO-KF
Metal
400 kPa
1 10-8 - 2 10-3 hPa:
25 %, 2 10-3 10 hPa: 10 %,
10-100 hPa: 30 %;
100-1000 hPa: 50 %
555 g
Tungsten, stainless
steel, nickel,
molybdenum, glass
1000 hPa
5 10-9 hPa
100 m
Pirani/Cold cathode
10 ms
5-pole, DeviceNet,
M12, 5-pole
IP 54
Cold cathode
sensor can be
switched on and
off via interface
180 C
+5 - +60 C
-40-+65 C
24 V DC
3.4 W
9.5 cm
1 10-8 - 1 10-2 hPa:
7 %; 1 10-2 10 hPa: 2 %
PT R40 140
PT R40 141
PT R40 142
PT R40 143
Weight

Measuring cycle
Protection category
Cold cathode sensor control
Temperature: Bakeout (electronics removed)

Supply: Voltage
Volume
Order number
Page 22 / Part 3.2
Technical data
MPT 200,
DN 40 ISO-KF,
RS-485
MPT 200,
DN 40 ISO-KF,
RS-485, analog
MPT 200,
DN 40 ISO-KF,
RS-485, Profibus
MPT 200,
DN 40 ISO-KF,
RS-485, DeviceNet
Flange (in)
Seal
Pressure max.
DN 40 ISO-KF
Metal
400 kPa
1 10-8 - 2 10-3 hPa:
25 %, 2 10-3 10 hPa: 10 %,
10-100 hPa: 30 %;
100-1000 hPa: 50 %
580 g
Tungsten, stainless
steel, nickel,
molybdenum, glass
1000 hPa
5 10-9 hPa
100 m
Pirani/Cold cathode
10 ms
RS-485,
D-Sub-socket,
9-pole
IP 54
Cold cathode
sensor can be
switched on and
off via interface
180 C
+5 - +60 C
-40-+65 C
24 V DC
3.0 W
9.5 cm
1 10-8 - 1 10-2 hPa:
7 %; 1 10-2 10 hPa: 2 %
DN 40 ISO-KF
Metal
400 kPa
1 10-8 - 2 10-3 hPa:
25 %, 2 10-3 10 hPa: 10 %,
10-100 hPa: 30 %;
100-1000 hPa: 50 %
580 g
Tungsten, stainless
steel, nickel,
molybdenum, glass
1000 hPa
5 10-9 hPa
100 m
Pirani/Cold cathode
10 ms
2 SP; M12, 8-pole
IP 54
Cold cathode
sensor can be
switched on and
off via interface
180 C
+5 - +60 C
-40-+65 C
24 V DC
3.7 W
9.5 cm
1 10-8 - 1 10-2 hPa:
7 %; 1 10-2 10 hPa: 2 %
DN 40 ISO-KF
Metal
400 kPa
1 10-8 - 2 10-3 hPa:
25 %, 2 10-3 10 hPa: 10 %,
10-100 hPa: 30 %;
100-1000 hPa: 50 %
580 g
Tungsten, stainless
steel, nickel,
molybdenum, glass
1000 hPa
5 10-9 hPa
100 m
Pirani/Cold cathode
10 ms
M12, 5-pole
IP 54
Cold cathode
sensor can be
switched on and
off via interface
180 C
+5 - +60 C
-40-+65 C
24 V DC
4.5 W
9.5 cm
1 10-8 - 1 10-2 hPa:
7 %; 1 10-2 10 hPa: 2 %
DN 40 ISO-KF
Metal
400 kPa
1 10-8 - 2 10-3 hPa:
25 %, 2 10-3 10 hPa: 10 %,
10-100 hPa: 30 %;
100-1000 hPa: 50 %
580 g
Tungsten, stainless
steel, nickel,
molybdenum, glass
1000 hPa
5 10-9 hPa
100 m
Pirani/Cold cathode
10 ms
5-pole, DeviceNet,
M12, 5-pole
IP 54
Cold cathode
sensor can be
switched on and
off via interface
180 C
+5 - +60 C
-40-+65 C
24 V DC
3.4 W
9.5 cm
1 10-8 - 1 10-2 hPa:
7 %; 1 10-2 10 hPa: 2 %
PT R40 150
PT R40 151
PT R40 152
PT R40 153
Weight

Measuring cycle
Protection category

Supply: Voltage
Volume
Order number
Part 3.2 / Page 23
Measurement
Measurement
Pirani/Cold Cathode Gauge MPT 200 (5 10-9 1000 hPa)
5 10-9 to 1000 hPa

Insensitive to gas inrush
Customizable to vacuum application
Dimensions (in mm)
155
66
45
70
MPT 200, DN 40 CF-F
Page 24 / Part 3.2
Technical data
MPT 200,
DN 40 CF-F,
RS-485
MPT 200,
DN 40 CF-F,
RS-485, analog
MPT 200,
DN 40 CF-F,
RS-485, Profibus
MPT 200,
DN 40 CF-F,
RS-485, DeviceNet
Flange (in)
Seal
Pressure max.
DN 40 CF-F
Metal
400 kPa
1 10-8 - 2 10-3 hPa:
25 %, 2 10-3 10 hPa: 10 %,
10-100 hPa: 30 %;
100-1000 hPa: 50 %
850 g
Tungsten, stainless
steel, nickel,
molybdenum, glass
1000 hPa
5 10-9 hPa
100 m
Pirani/Cold cathode
10 ms
RS-485,
D-Sub-socket,
9-pole
IP 54
Cold cathode
sensor can be
switched on and
off via interface
180 C
+5 - +60 C
-40-+65 C
24 V DC
3.0 W
9.5 cm
1 10-8 - 1 10-2 hPa:
7 %; 1 10-2 10 hPa: 2 %
DN 40 CF-F
Metal
400 kPa
1 10-8 - 2 10-3 hPa:
25 %, 2 10-3 10 hPa: 10 %,
10-100 hPa: 30 %;
100-1000 hPa: 50 %
850 g
Tungsten, stainless
steel, nickel,
molybdenum, glass
1000 hPa
5 10-9 hPa
100 m
Pirani/Cold cathode
10 ms
2 SP; M12, 8-pole
IP 54
Cold cathode
sensor can be
switched on and
off via interface
180 C
+5 - +60 C
-40-+65 C
24 V DC
3.7 W
9.5 cm
1 10-8 - 1 10-2 hPa:
7 %; 1 10-2 10 hPa: 2 %
DN 40 CF-F
Metal
400 kPa
1 10-8 - 2 10-3 hPa:
25 %, 2 10-3 10 hPa: 10 %,
10-100 hPa: 30 %;
100-1000 hPa: 50 %
850 g
Tungsten, stainless
steel, nickel,
molybdenum, glass
1000 hPa
5 10-9 hPa
100 m
Pirani/Cold cathode
10 ms
M12, 5-pole
IP 54
Cold cathode
sensor can be
switched on and
off via interface
180 C
+5 - +60 C
-40-+65 C
24 V DC
4.5 W
9.5 cm
1 10-8 - 1 10-2 hPa:
7 %; 1 10-2 10 hPa: 2 %
DN 40 CF-F
Metal
400 kPa
1 10-8 - 2 10-3 hPa:
25 %, 2 10-3 10 hPa: 10 %,
10-100 hPa: 30 %;
100-1000 hPa: 50 %
850 g
Tungsten, stainless
steel, nickel,
molybdenum, glass
1000 hPa
5 10-9 hPa
100 m
Pirani/Cold cathode
10 ms
5-pole, DeviceNet,
M12, 5-pole
IP 54
Cold cathode
sensor can be
switched on and
off via interface
180 C
+5 - +60 C
-40-+65
24 V DC
3.4 W
9.5 cm
1 10-8 - 1 10-2 hPa:
7 %; 1 10-2 10 hPa: 2 %
PT R40 350
PT R40 351
PT R40 352
PT R40 353
Weight

Measuring cycle
Protection category

Supply: Voltage
Volume
Order number
MPT 200, DN 40 CF-F
Part 3.2 / Page 25
Measurement
Measurement
3.2 Vacuum measurement, analysis, leak detection/Measurement/DigiLine/Pirani/Bayard-Alpert Gauge HPT 200 (5 10-10 1000 hPa)
3.2 Vacuum measurement, analysis, leak detection/Measurement /DigiLine /Pirani/Bayard-Alpert Gauge HPT 200 (5 10-10
1000 hPa) /
Pirani/Bayard-Alpert Gauge HPT 200

(5 10-10 1000 hPa)
5 10-10 to 1000 hPa

High security by two filaments
High accuracy
Dimensions (in mm)
145
141
66
45
55
HPT 200, DN 40 ISO-KF
66
HPT 200, DN 40 CF-F
Technical data
HPT 200,
DN 40 ISO-KF,
RS-485
Flange (in)
Number of filaments
Seal
Pressure max.
Filament
DN 40 ISO-KF
2
Metal
400 kPa
Iridium yttriated,
twice
1 10-8 - 1 hPa:
10 %, 20-1000
hPa: 30 %
475 g
Tungsten, stainless
steel, nickel, glass,
ceramics
1000 hPa
5 10-10 hPa
100 m
Pirani/Bayard-Alpert
10 ms
5-pole
Weight

Measuring cycle
Protection category
Supply: Voltage
70
45
HPT 200,
DN 40 ISO-KF,
RS-485, analog
HPT 200,
DN 40 ISO-KF,
RS-485, Profibus
HPT 200,
DN 40 ISO-KF,
RS-485, DeviceNet
DN 40 ISO-KF
2
Metal
400 kPa
Iridium yttriated,
twice
1 10-8 - 1 hPa:
10 %, 20-1000
hPa: 30 %
475 g
Tungsten, stainless
ceramics
1000 hPa
5 10-10 hPa
100 m
10 ms
2 SP; M12, 8-pole
IP 54
IP 54
180 C
180 C
+5 - +60 C
+5 - +60 C
-40-+65 C
-40-+65 C
24 V DC
24 V DC
8.0 W
8.7 W
1 10-8 - 1 10-2 hPa: 1 10-8 - 1 10-2 hPa:
5%; 1 10-2 - 10 hPa: 5%; 1 10-2 - 10 hPa:
2%
2%
DN 40 ISO-KF
2
Metal
400 kPa
Iridium yttriated,
twice
1 10-8 - 1 hPa:
10 %, 20-1000
hPa: 30 %
475 g
Tungsten, stainless
ceramics
1000 hPa
5 10-10 hPa
100 m
10 ms
M12, 5-pole
IP 54
180 C
+5 - +60 C
-40-+65 C
24 V DC
9.5 W
1 10-8 - 1 10-2 hPa:
5%; 1 10-2 - 10 hPa:
2%
DN 40 ISO-KF
2
Metal
400 kPa
Iridium yttriated,
twice
1 10-8 - 1 hPa:
10 %, 20-1000
hPa: 30 %
475 g
Tungsten, stainless
ceramics
1000 hPa
5 10-10 hPa
100 m
10 ms
5-pole, DeviceNet,
M12, 5-pole
IP 54
180 C
+5 - +60 C
-40-+65 C
24 V DC
8.4 W
1 10-8 - 1 10-2 hPa:
5%; 1 10-2 - 10 hPa:
2%
PT R39 150
PT R39 152
PT R39 153
Order number
HPT 200, DN 40 ISO-KF
PT R39 151
Page 26 / Part 3.2
Technical data
HPT 200,
DN 40 CF-F,
RS-485
HPT 200, ,
DN 40 CF-F,
RS-485, analog
HPT 200,
DN 40 CF-F,
RS-485, Profibus
HPT 200,
DN 40 CF-F,
RS-485, DeviceNet
Flange (in)
Number of filaments
Seal
Pressure max.
Filament
DN 40 CF-F
2
Metal
400 kPa
Iridium yttriated,
twice
1 10-8 - 1 hPa:
10 %, 20-1000
hPa: 30 %
670 g
Tungsten, stainless
ceramics
1000 hPa
5 10-10 hPa
100 m
10 ms
RS-485,
D-Sub-socket,
9-pole
IP 54
180 C
+5 - +60 C
-40-+65 C
24 V DC
8.0 W
1 10-8 - 1 10-2 hPa:
5%; 1 10-2 - 10 hPa:
2%
DN 40 CF-F
2
Metal
400 kPa
Iridium yttriated,
twice
1 10-8 - 1 hPa:
10 %, 20-1000
hPa: 30 %
670 g
Tungsten, stainless
ceramics
1000 hPa
5 10-10 hPa
100 m
10 ms
2 SP; M12, 8-pole
IP 54
180 C
+5 - +60 C
-40-+65 C
24 V DC
8.7 W
1 10-8 - 1 10-2 hPa:
5%; 1 10-2 - 10 hPa:
2%
DN 40 CF-F
2
Metal
400 kPa
Iridium yttriated,
twice
1 10-8 - 1 hPa:
10 %, 20-1000
hPa: 30 %
670 g
Tungsten, stainless
ceramics
1000 hPa
5 10-10 hPa
100 m
10 ms
M12, 5-pole
IP 54
180 C
+5 - +60 C
-40-+65 C
24 V DC
9.5 W
1 10-8 - 1 10-2 hPa:
5%; 1 10-2 - 10 hPa:
2%
DN 40 CF-F
2
Metal
400 kPa
Iridium yttriated,
twice
1 10-8 - 1 hPa:
10 %, 20-1000
hPa: 30 %
670 g
Tungsten, stainless
ceramics
1000 hPa
5 10-10 hPa
100 m
10 ms
5-pole, DeviceNet,
M12, 5-pole
IP 54
180 C
+5 - +60 C
-40-+65 C
24 V DC
8.4 W
1 10-8 - 1 10-2 hPa:
5%; 1 10-2 - 10 hPa:
2%
PT R39 350
PTR 39 351
PT R39 352
PT R39 353
Weight

Measuring cycle
Protection category
Supply: Voltage
Order number
HPT 200, DN 40 CF-F
Part 3.2 / Page 27
Measurement
3.2 Vacuum measurement, analysis, leak detection/Measurement/DigiLine/Pirani/Bayard-Alpert Gauge HPT 200 (5 10-10 1000 hPa)
Measurement
3.2 Vacuum measurement, analysis, leak detection/Measurement/DigiLine/Transmitters/Controllers
3.2 Vacuum measurement, analysis, leak detection/Measurement /DigiLine /Transmitters /Controllers
DPG 202, controller
Simple operation
For 2 transmitter
Intuitive calibration
2 two-way contacts
Dimensions (in mm)
128.4
70.8
172
189
Technical data
DPG 202,
controller
for 2 transmitter
Dimensions w x h x d
(19"-rack,
14TE/3HE) ;
71 x 128 x 178 mm
DIN M12
LCD-Graphic display,
backlit
2 Hz
0.75 kg
max. 25 (gauges
included) W
mbar, bar, Pa, hPa,
mTorr, Torr
25 Hz
50/60 Hz
95-265 V AC
250 V AC, 4 A ;
45 V DC, 2 A
2 pieces
IP 20
0.8 A T
5-50 C
-20-+60 C
Connections for gauge

Display
Display rate
Weight
Power consumption
Unit of measure
Measurement rate
Mains requirement: frequency (range)
Mains requirement: voltage (range)
Set point: Voltage max.
Set point: Changeover contact, potential-free
Protection category
Fuse
Order number
DPG 202, controller
Page 28 / Part 3.2
PT G12 020
3.2 Vacuum measurement, analysis, leak detection/Measurement /DigiLine /DigiLineTM accessories
Software DokuStar
System requirements:
Software: Windows XP, Windows Vista, Windows 7 (requires administrator rights)
Hardware: Pentium-PC (1000 MHz or more), 256 MB RAM (512 MB recommended), 150 MB free
hard drive space, Super VGA monitor (with 1024x768 resolution), small letter adjustment),
24 Bit Tru Color, free COM or USB port, mouse
Visualization and data storage
Technical data
Software
DokuStar
Software
DokuStar Plus
For
DPS 101, DPS 109

and DPG 202
DPG / DPS 109 and

direct connection
Measuring channel
up to 2
up to 16
PC min.
Pentium 160 MHz
Pentium 160 MHz
RAM
64 MB
64 MB
Interface
RS-232 or USB
RS-232 or USB
Interfaces
RS-232 or USB
RS-232 or USB
Memory
15 MB free
HD memory
15 MB free
HD memory
PT 882 500
PT 882 501
Order number
Software DokuStar
Further accessories
Power cords
Order number
Mains cable, US plug, 2.5 m
P4 564 309 YX
Mains cable, U.K. plug, 2.5 m
P4 564 309 Y1
Mains cable, Swiss plug, 2.5 m
P4 564 309 YR
Mains cable, Euro-style safety plug, 2.5 m
P4 564 309 YU
Interface cable
Order number
Interface cable, M12 m/M12 m, 0,7 m
PM 061 281 -T
Interface cable, M12 m/M12 m, 1.0 m
PM 061 282 -T
Interface cable, M12 m straight / M12 m straight, 3.0 m
PM 061 283 -T
Interface cable, M12 m/M12 m, 5.0 m
PM 061 284 -T
Interface cable, M12 m/M12 m, 10 m
PM 061 285 -T
PM 061 286 -T
PM 061 287 -T
PM 061 289 -T
Further accessories
Order number
Connector M12 to RS-485
PM 061 270 -X
Plug-in bus termination for RS-485, M12 5-pole
PT 348 105-T
Y-Connector M12 to RS-485
P 4723 010
USB converter to RS-485 interface
PM 061 207 -T
Adapter M12/M12 (only RS-485, no power)
PM 348 132 -T
Gauge adapting cable RS-485, D-Sub 9-pole/M12 5-pole
PT 348 131 -T
Connection cable, RS-485, M12/D-sub 9-pole, 3.0 m
PT 348 223 -T
Part 3.2 / Page 29
Measurement
3.2 Vacuum measurement, analysis, leak detection/Measurement/DigiLine/Transmitters/DigiLineTM accessories
ActiveLine
A wide range of proven vacuum transmitters to cover all applications
Page 30 / Part 3.2
ActiveLine
The ActiveLine series offers a wide range of vacuum
gauges that work on a variety of measuring principles
and have a classic analog outlet. The series thus covers
the technically relevant vacuum range from ultra-high
vacuum to overpressure. The outlet voltage of the
transmitter, that is proportional to the pressure, can be
displayed as pressure on the three controllers or
read into controllers through analog inputs for further
processing.
The series includes high precision capacitance vacuum
gauges in SI units (CMR) for process monitoring
and control as well as corresponding Torr types (CCR)
for direct use in semiconductor processes without
controllers.
Customer benefits
Q Covers the entire vacuum range
Q Suitable for all requirement profiles
Q Space saving installation due to compact design
Q Optimum cost-benefit ratio
Q Universally usable due to integrated electronic
drive unit
Q Easy self-diagnosis
Q Avoids installation errors through controllers with
automatic transmitter recognition
Q Easy wiring for all transmitters through uniform
standard cables
Semiconductor development and production
Q Research facilities
Q Analysis equipment
Q Research and production coating facilities
Q Leak detection systems
Q Semiconductor development and production
Q Photovoltaics
Q Industrial vacuum process systems
Coating
Research facilities
Part 3.2 / Page 31
3.2 Vacuum measurement, analysis, leak detection / Measurement equipment / ActiveLine
Measurement
3.2 Vacuum measurement, analysis, leak detection/Measurement/ActiveLine/ActiveLine transmitters
3.2 Vacuum measurement, analysis, leak detection/Measurement /ActiveLine /ActiveLine transmitters
Piezo transmitters APR (1 10-1 - 55000 hPa)
Measurement range from 0.1 hPa to 1100 hPa

Pressure measurement independent of type of gas
Corrosion- resistant
Maximum pressure applies to inert gases and temperatures of less than 55 C
Dimensions (in mm)
APR 250, DN 16 ISO-KF
Page 32 / Part 3.2
APR 260, DN 16 ISO-KF
Technical data
APR 250,
DN 16 ISO-KF,
2 % F.S.
APR 260,
DN 16 ISO-KF,
1 % F.S.
APR 260,
DN 16 CF-F,
1 % F.S.
Flange (in)
DN 16 ISO-KF
DN 16 ISO-KF
DN 16 CF-F
Output signal: Sensor error below
0.4 V
0.4 V
0.4 V
Output signal: Pressure range
1.0 - 9.8 V
1.0 - 9.8 V
1.0 - 9.8 V
Output signal: Minimum load
10 k
10 k
10 k
Bakeout temperature
80 C
80 C
80 C
Pressure max.
300 kPa
300 kPa
300 kPa
Stability of sensitivity
0.5 %/year
0.2 %/year
0.2 %/year
Accuracy
2 % F.S.
1 % F.S.
1 % F.S.
Weight
120 g
120 g
150 g
Linearity and hysteresis
0.5 % F.S.
0.2 % F.S.
0.2 % F.S.
1100 hPa
1100 hPa
1100 hPa
1 10-1 hPa
1 10-1 hPa
1 10-1 hPa
Sensor cable length
50 m
50 m
50 m
Zero stability
0.5 % F.S./year
0.3 % F.S./year
0.3 % F.S./year
Protection category
IP 65
IP 65
10-80 C
10-80 C
10-80 C
-40-+80 C
-40-+80 C
-40-+80 C
Thermal sensitivity drift
0.5 %
0.5 %
0.5 %
Thermal zero drift
0.5 % F.S.
0.2 % F.S.
0.2 % F.S.
Supply: Voltage
13-30 V DC
13-30 V DC
13-30 V DC
0.2 W
0.2 W
0.2 W
Volume
2 cm3
2 cm3
6 cm3
Material
Stainless steel
Stainless steel
Stainless steel
P 5215 102 TF
P 5215 112 TF
P 5215 114 TF
Sensor cable, 3 m
PT 448 250 -T
PT 448 250 -T
PT 448 250 -T
Mating connector
B 4707 283 MA
B 4707 283 MA
B 4707 283 MA
Measurement
Order number
Piezo Gauges APR 250/260
(1 10-1 - 1100 hPa)
Accessories
Part 3.2 / Page 33
Measurement
Piezo transmitters APR (1 10-1 - 55000 hPa)

Corrosion-resistant
Maximum pressure applies to inert gases and temperatures of less than 55 C
Dimensions (in mm)
APR 262, G1/4"

APR 265, G1/4"
APR 266, G1/4"
Page 34 / Part 3.2
APR 267, G1/4"
Technical data
APR 262, G1/4",

2200 hPa
APR 265, G1/4",

5500 hPa
APR 266, G1/4",

11000 hPa
APR 267, G1/4",

55000 hPa
Flange (in)
G 1/4"
G 1/4"
G 1/4"
G 1/4"
0.4 V
0.4 V
0.4 V
0.4 V
1.0 - 9.8 V
1.0 - 9.8 V
1.0 - 9.8 V
1.0 - 9.8 V
10 k
10 k
10 k
10 k
Bakeout temperature
80 C
80 C
80 C
80 C
Pressure max.
400 kPa
750 kPa
1500 kPa
7500 kPa
Stability of sensitivity
0.2 %/year
0.2 %/year
0.2 %/year
0.2 %/year
Accuracy
2 % F.S.
2 % F.S.
2 % F.S.
2 % F.S.
Weight
120 g
120 g
120 g
120 g
Linearity and hysteresis
0.5 % F.S.
0.5 % F.S.
0.5 % F.S.
0.5 % F.S.
2200 hPa
5500 hPa
11000 hPa
55000 hPa
2 10-1 hPa
0.5 hPa
1 hPa
5 hPa
Sensor cable length
50 m
50 m
50 m
50 m
Zero stability
0.5 % F.S./year
0.5 % F.S./year
0.5 % F.S./year
0.5 % F.S./year
Protection category
IP 65
IP 65
IP 65
IP 65
10-80 C
10-80 C
10-80 C
10-80 C
-40-+80 C
-40-+70 C
-40-+80 C
-40-+80 C
Thermal sensitivity drift
0.5 %
0.5 %
0.5 %
0.5 %
Thermal zero drift
0.5 % F.S.
0.5 % F.S.
0.5 % F.S.
0.5 % F.S.
Supply: Voltage
13-30 V DC
13-30 V DC
13-30 V DC
13-30 V DC
0.2 W
0.2 W
0.2 W
0.2 W
Volume
0.5 cm3
0.5 cm3
0.5 cm3
0.5 cm3
Material
Stainless steel
Stainless steel
Stainless steel
Stainless steel
P 5215 120 TF
P 5215 126 TF
P 5215 132 TF
P5 215 138 TF
Sensor cable, 3 m
PT 448 250 -T
PT 448 250 -T
PT 448 250 -T
PT 448 250 -T
Mating connector
B 4707 283 MA
B 4707 283 MA
B 4707 283 MA
B 4707 283 MA
Order number
Piezo Gauges APR 262/265/266/267
(2 10-1 - 55000 hPa)
Accessories
Part 3.2 / Page 35
Measurement
Measurement
Capacitance transmitters CMR (1 10-5 - 1100 hPa)

temperature compensated
Sensor in ceramic technology

No memory effects
Materials employed have identical temperature coefficients
Excellent temperature compensation
Resistant to corrosive gases
Excellent zero stability
69
23
23
Dimensions (in mm)
44
55
44
69
55
DN 16 ISO-KF
OD1/2"
55
44
69
55
44
69
23
DN 16 ISO-KF
23
Pipe OD 1/2"
DN 16 CF-R
8 VCR
female
DN 16 CF-R
Page 36 / Part 3.2
Cajon 8 VCR
Technical data
CMR 361,
1000 hPa F.S.
CMR 362,
100 hPa F.S.
CMR 363,
10 hPa F.S.
CMR 364,
1 hPa F.S.
CMR 365,
0.1 hPa F.S.
Resolution
0.003 % F.S.
0.003 % F.S.
0.003 % F.S.
0.003 % F.S.
0.003 % F.S.
Output signal: Sensor error above
> 9.8 V
> 9.8 V
> 9.8 V
> 9.8 V
> 9.8 V
< 0.4 V
< 0.4 V
< 0.4 V
< 0.4 V
< 0.4 V
1 - 9.8 V
1 - 9.8 V
1 - 9.8 V
1 - 9.8 V
1 - 9.8 V
10 k
10 k
10 k
10 k
10 k
Bakeout temperature max.

at the flange
110 C
110 C
110 C
110 C
110 C
Pressure max.
3 bar
2 bar
2 bar
2 bar
1.3 bar
Accuracy
0.2 % of reading
0.2 % of reading
0.2 % of reading
0.2 % of reading
0.5 % of reading
Membrane and measuring chamber Ceramics

(Al2O3 99,5 %)
Ceramics
(Al2O3 99,5 %)
Ceramics
(Al2O3 99,5 %)
Ceramics
(Al2O3 99,5 %)
Ceramics
(Al2O3 99,5 %)
1100 hPa
110 hPa
11 hPa
1.1 hPa
0.11 hPa
1 10-1 hPa
1 10-2 hPa
1 10-3 hPa
1 10-4 hPa
1 10-5 hPa
Sensor cable length
120 m
120 m
120 m
120 m
120 m
Response time
30 ms
30 ms
30 ms
30 ms
130 ms
Pipe and flange
Stainless steel
Stainless steel
Stainless steel
Stainless steel
Stainless steel
Protection category
IP 30
IP 30
IP 30
IP 30
IP 30
5-50 C
5-50 C
5-50 C
5-50 C
5-50 C
Temperature effect: on span
0.01 %
of reading/C
0.01 %
of reading/C
0.01 %
of reading/C
0.01 %
of reading/C
0.03 %
of reading/C
Temperature effect: on zero
0.005 % F.S./C
0.005 % F.S./C
0.005 % F.S./C
0.015 % F.S./C
0.02 % F.S./C
-40-+65 C
-40-+65 C
-40-+65 C
-40-+65 C
-40-+65 C
Supply: Voltage
14-30 V DC
14-30 V DC
14-30 V DC
14-30 V DC
14-30 V DC
1W
1W
1W
1W
1W
Volume
3.6 cm3
3.6 cm3
3.6 cm3
3.6 cm3
3.6 cm3
CMR 361,
1000 hPa F.S.
CMR 362,
100 hPa F.S.
CMR 363,
10 hPa F.S.
CMR 364,
1 hPa F.S.
CMR 365,
0.1 hPa F.S.
Flange (in)
Pipe OD 1/2"
Pipe OD 1/2"
Pipe OD 1/2"
Pipe OD 1/2"
Pipe OD 1/2"
Weight
310 g
310 g
310 g
310 g
310 g
Order number
PT R24 600
PT R24 610
PT R24 620
PT R24 630
PT R24 640
Flange (in)
DN 16 ISO-KF
DN 16 ISO-KF
DN 16 ISO-KF
DN 16 ISO-KF
DN 16 ISO-KF
Weight
330 g
330 g
330 g
330 g
330 g
Order number
PT R24 601
PT R24 611
PT R24 621
PT R24 631
PT R24 641
Flange (in)
DN 16 CF-R
DN 16 CF-R
DN 16 CF-R
DN 16 CF-R
DN 16 CF-R
Weight
350 g
350 g
350 g
350 g
350 g
Order number
PT R24 602
PT R24 612
PT R24 622
PT R24 632
PT R24 642
Flange (in)
Cajon 8 VCR
Cajon 8 VCR
Cajon 8 VCR
Cajon 8 VCR
Cajon 8 VCR
Weight
370 g
370 g
370 g
370 g
370 g
Order number
PT R24 603
PT R24 613
PT R24 623
PT R24 633
PT R24 643
Sensor cable, 3 m
PT 448 250 -T
PT 448 250 -T
PT 448 250 -T
PT 448 250 -T
PT 448 250 -T
Mating connector
B 4707 283 MA
B 4707 283 MA
B 4707 283 MA
B 4707 283 MA
B 4707 283 MA
Accessories
Part 3.2 / Page 37
Measurement
Measurement
Capacitance transmitters CMR (1 10-5 - 1100 hPa)

temperature regulated
Sensor in ceramic technology

No memory effects
Materials employed have identical temperature coefficients
Resistant to corrosive gases
Additional protection against pollution by sensor shield
15,7
16
141,8
110,1
2,3
17,8
Dimensions (in mm)
ZERO
82
41
STATUS
Page 38 / Part 3.2
Technical data
CMR 371,
1000 hPa F.S.
CMR 372,
100 hPa F.S.
CMR 373,
10 hPa F.S.
CMR 374,
1 hPa F.S.
CMR 375,
0.1 hPa F.S.
Resolution
0.003 % F.S.
0.003 % F.S.
0.003 % F.S.
0.003 % F.S.
0.003 % F.S.
> 9.8 V
> 9.8 V
> 9.8 V
> 9.8 V
> 9.8 V
< 0.4 V
< 0.4 V
< 0.4 V
< 0.4 V
< 0.4 V
1.0 - 9.8 V
1.0 - 9.8 V
1.0 - 9.8 V
1.0 - 9.8 V
1.0 - 9.8 V
> 10 k
> 10 k
> 10 k
> 10 k
> 10 k

at the flange
110 C
110 C
110 C
110 C
110 C
Pressure max.
300 kPa
2 bar
2 bar
2 bar
1,3 bar
0.15
0.15
0.15
0.15
0.15
Weight
900 g
900 g
900 g
900 g
900 g
Membrane and measuring

chamber
Ceramics
(Al2O3 99,5 %)
Ceramics
(Al2O3 99,5 %)
Ceramics
(Al2O3 99,5 %)
Ceramics
(Al2O3 99,5 %)
Ceramics
(Al2O3 99,5 %)
1100 hPa
110 hPa
11 hPa
1.1 hPa
0.11 hPa
1 10-1 hPa
1 10-2 hPa
1 10-3 hPa
1 10-4 hPa
1 10-5 hPa
Response time
30 ms
30 ms
30 ms
30 ms
130 ms
Pipe and flange
Stainless steel
Stainless steel
Stainless steel
Stainless steel
Stainless steel
Protection category
IP 40
IP 40
IP 40
IP 40
IP 40
10-40 C
10-40 C
10-40 C
10-40 C
10-40 C
0.01 %
of reading/C
0.01 %
of reading/C
0.01 %
of reading/C
0.01 %
of reading/C
0.01 %
of reading/C
0.0025 % F.S./C
0.0025 % F.S./C
0.0025 % F.S./C
0.0025 % F.S./C
0.005 % F.S./C
-40-+65 C
-40-+65 C
-40-+65 C
-40-+65 C
-40-+65 C
Temperature stabilization
45 C
45 C
45 C
45 C
45 C
Supply: Voltage
14-30 V DC
14-30 V DC
14-30 V DC
14-30 V DC
14-30 V DC
12 W
12 W
12 W
12 W
12 W
Volume
4.2 cm3
4.2 cm3
4.2 cm3
4.2 cm3
4.2 cm3
CMR 371,
1000 hPa F.S.
CMR 372,
100 hPa F.S.
CMR 373,
10 hPa F.S.
CMR 374,
1 hPa F.S.
CMR 375,
0.1 hPa F.S.
Flange (in)
Tube OD 1/2"
Tube AD 1/2"
Tube OD 1/2"
Tube OD 1/2"
Tube OD 1/2"
Order number
PT R25 100
PT R25 110
PT R25 120
PT R25 130
PT R25 140
Flange (in)
DN 16 ISO-KF
DN 16 ISO-KF
DN 16 ISO-KF
DN 16 ISO-KF
DN 16 ISO-KF
Order number
PT R25 101
PT R25 111
PT R25 121
PT R25 131
PT R25 141
Flange (in)
DN 16 CF-R
DN 16 CF-R
DN 16 CF-R
DN 16 CF-R
DN 16 CF-R
Order number
PT R25 102
PT R25 112
PT R25 122
PT R25 132
PT R25 142
Flange (in)
Cajon 8 VCR
Cajon 8 VCR
Cajon 8 VCR
Cajon 8 VCR
Cajon 8 VCR
Order number
PT R25 103
PT R25 113
PT R25 123
PT R25 133
PT R25 143
Sensor cable, 3 m
PT 448 250 -T
PT 448 250 -T
PT 448 250 -T
PT 448 250 -T
PT 448 250 -T
Mating connector
B 4707 283 MA
B 4707 283 MA
B 4707 283 MA
B 4707 283 MA
B 4707 283 MA
Accessories
Part 3.2 / Page 39
Measurement
Measurement
Capacitance transmitters CCR (1 10-5 - 1000 Torr)

temperature compensated
Accuracy: 0.2 % of measurement

Supply voltage: 14-30 V
Output signal: 0-10 V
Ceramic technology sensor
No memory effects
Output signal and connector compatible with MKS Baratron.
Dimensions (in mm)
55
44
69
44
69
55
OD1/2"
DN 16 ISO-KF
Tube OD 1/2"
DN 16 ISO-KF
55
44
44
69
69
55
DN 16 CF-R
8 VCR
female
DN 16 CF-R
Page 40 / Part 3.2
Cajon 8 VCR
Technical data
CCR 361,
1000 Torr F.S.
CCR 362,
100 Torr F.S.
CCR 363,
10 hPa F.S.
CCR 364,
1 Torr F.S.
CCR 365,
0.1 Torr F.S.
Resolution
0.003 % F.S.
0.003 % F.S.
0.003 % F.S.
0.003 % F.S.
0.003 % F.S.
0-10 V
0-10 V
0-10 V
0-10 V
0-10 V
> 10 k
> 10 k
> 10 k
> 10 k
> 10 k

at the flange
110 C
110 C
110 C
110 C
110 C
Pressure max.
300 kPa
2 bar
2 bar
2 bar
130 kPa
Accuracy
0.20 % of reading
0.20 % of reading
0.20 % of reading
0.20 % of reading
0.5 % of reading
Weight
370 g
370 g
370 g
370 g
370 g

chamber
Ceramics
(Al2O3 99,5 %)
Ceramics
(Al2O3 99,5 %)
Ceramics
(Al2O3 99,5 %)
Ceramics
(Al2O3 99,5 %)
Ceramics
(Al2O3 99,5 %)
1333 hPa
133 hPa
13.3 hPa
1.33 hPa
0.13 hPa
1.33 10-1 hPa
1.33 10-2 hPa
1.33 10-3 hPa
1.33 10-4 hPa
1 10-5 hPa
Sensor cable length
100 m (0.14 mm 100 m (0.14 mm

conductor)
conductor)
100 m (0.14 mm
conductor)
100 m (0.14 mm
conductor)
100 m (0.14 mm
conductor)
Response time
30 ms
30 ms
30 ms
30 ms
130 ms
Pipe and flange
Stainless steel
Stainless steel
Stainless steel
Stainless steel
Stainless steel
Protection category
IP 30
IP 30
IP 30
IP 30
IP 30
5-50 C
5-50 C
5-50 C
5-50 C
5-50 C
0.01 %
of reading/C
0.01 %
of reading/C
0.01 %
of reading/C
0.01 %
of reading/C
0.03 %
of reading/C
0.0050 % F.S./C
0.005 % F.S./C
0.0050 % F.S./C
0.015 % F.S./C
0.02 % F.S./C
-40-+65 C
-40-+65 C
-40-+65 C
-40-+65 C
-40-+65 C
Supply: Voltage
14-30 V DC
14-30 V DC
14-30 V DC
14-30 V DC
14-30 V DC
1W
1W
1W
1W
1W
Volume
3.6 cm3
3.6 cm3
3.6 cm3
3.6 cm3
3.6 cm3
CCR 361,
1000 Torr F.S.
CCR 362,
100 Torr F.S.
CCR 363,
10 hPa F.S.
CCR 364,
1 Torr F.S.
CCR 365,
0.1 Torr F.S.
Flange (in)
Tube OD 1/2"
Tube OD 1/2"
Tube OD 1/2"
Tube OD 1/2"
Tube OD 1/2"
Order number
PT R27 600
PT R27 610
PT R27 620
PT R27 630
PT R27 640
Flange (in)
DN 16 ISO-KF
DN 16 ISO-KF
DN 16 ISO-KF
DN 16 ISO-KF
DN 16 ISO KF
Order number
PT R27 601
PT R27 611
PT R27 621
PT R27 631
PT R27 641
Flange (in)
DN 16 CF-R
DN 16 CF-R
DN 16 CF-R
Order number
PT R27 622
PT R27 632
PT R27 642
Flange (in)
Cajon 8 VCR
Cajon 8 VCR
Cajon 8 VCR
Cajon 8 VCR
Cajon 8 VCR
Order number
PT R27 603
PT R27 613
PT R27 623
PT R27 633
PT R27 643
Part 3.2 / Page 41
Measurement
Measurement
Capacitance transmitters CCR (1 10-5 - 1000 Torr)

temperature regulated

Outstanding long-term and temperature stability
Only marginal zero drift
Corrosion-resistant ceramic technology
Additional protection against pollution by Sensorshield
Transmitter cannot be connected to controllers TPG 261, TPG 262 and TPG 256 A
Output signal and connector compatible with MKS Baratron.
STATUS
SP2
SP ZERO
38,8
15,7
16
141,8
110,1
3,8
Dimensions (in mm)
82
SP1
Page 42 / Part 3.2
Technical data
CCR 371,
1000 Torr F.S.
CCR 372,
100 Torr F.S.
CCR 373,
10 Torr F.S.
CCR 374,
1 Torr F.S.
CCR 375,
0.1 Torr F.S.
Resolution
0.003 % F.S.
0.003 % F.S.
0.003 % F.S.
0.003 % F.S.
0.003 % F.S.
0-10 V
0-10 V
0-10 V
0-10 V
0-10 V
> 10 k
> 10 k
> 10 k
> 10 k
> 10 k

at the flange
110 C
110 C
110 C
110 C
110 C
Pressure max.
300 kPa
200 kPa
200 kPa
2 bar
1.3 bar
0.15
0.15
0.15
0.15
0.15
Weight
900 g
900 g
900 g
900 g
900 g

chamber
Ceramics
(Al2O3 99,5 %)
Ceramics
(Al2O3 99,5 %)
Ceramics
(Al2O3 99,5 %)
Ceramics
(Al2O3 99,5 %)
Ceramics
(Al2O3 99,5 %)
1333 hPa
133 hPa
13.3 hPa
1.3 hPa
0.13 hPa
1.33 10-1 hPa
1.33 10-2 hPa
1.33 10-3 hPa
1,33 10-4 hPa
1.33 10-5 hPa
Response time
30 ms
30 ms
30 ms
30 ms
130 ms
Pipe and flange
Stainless steel
Stainless steel
Stainless steel
Stainless steel
Stainless steel
Protection category
IP 40
IP 40
IP 40
IP 40
IP 40
10-40 C
10-40 C
10-40 C
10-40 C
10-40 C
0.01 %
of reading/C
0.01 %
of reading/C
0.01 %
of reading/C
0.01 %
of reading/C
0.01 %
of reading/C
0.0025 % F.S./C
0.0025 % F.S./C
0.0025 % F.S./C
0.0025 % F.S./C
0.0025 % F.S./C
-40-+65 C
-40-+65 C
-40-+65 C
-40-+65 C
-40-+65 C
Supply: Voltage
14-30 V DC
14-30 V DC
14-30 V DC
14-30 V DC
14-30 V DC
12 W
12 W
12 W
12 W
12 W
Volume
4.2 cm3
4.2 cm3
4.2 cm3
4.2 cm3
4.2 cm3
CCR 371,
1000 Torr F.S.
CCR 372,
100 Torr F.S.
CCR 373,
10 Torr F.S.
CCR 374,
1 Torr F.S.
CCR 375,
0.1 Torr F.S.
Flange (in)
Tube OD 1/2"
Tube OD 1/2"
Tube OD 1/2"
Tube OD 1/2"
Tube OD 1/2"
Order number
PT R28 100
PT R28 110
PT R28 120
PT R28 130
PT R28 140
Flange (in)
DN 16 ISO-KF
DN 16 ISO-KF
DN 16 ISO-KF
DN 16 ISO-KF
DN 16 ISO-KF
Order number
PT R28 101
PT R28 111
PT R28 121
PT R28 131
PT R28 141
Flange (in)
DN 16 CF-R
DN 16 CF-R
DN 16 CF-R
DN 16 CF-R
DN 16 CF-R
Order number
PT R28 102
PT R28 112
PT R28 122
PT R28 132
PT R28 142
Flange (in)
Cajon 8 VCR
Cajon 8 VCR
Cajon 8 VCR
Cajon 8 VCR
Cajon 8 VCR
Order number
PT R28 103
PT R28 113
PT R28 123
PT R28 133
PT R28 143
Part 3.2 / Page 43
Measurement
Measurement
Pirani/Capacitance transmitters PCR (5 10-5 - 1500 hPa)
Measurement range: 5 10-5 to 1500 hPa

Bakeout temperature: 80 C
Output signal: 1,2 - 8,68 V logarithm of pressure
Voltage supply: 15 - 30 V DC
Metal-sealed, without plug
Dimensions (in mm)

30
22.5
20
45
DN 16 ISO-KF
30.9
14.5
79.5
16.5
DN 16 CF-F
Page 44 / Part 3.2
Measurement
Technical data
PCR 280,
80 C,
DN 16 ISO-KF
PCR 280,
80 C,
DN 16 CF-F
Flange (in)
DN 16 ISO-KF
DN 16 CF-F
1.2 - 8,68 V
1.2 - 8.68 V
10 k
10 k
Bakeout temperature
80 C
80 C
Seal
Metal
Metal
Pressure max.
5 bar
500 kPa
Feedthrough
Glass
Glass
Feature
Stainless steel,
metal sealed
Stainless steel,
metal sealed
Flange
Stainless steel
Stainless steel
Accuracy
5 10-4 - 1 10-3 hPa:

50 % ;
1 10-3 - 100 hPa:
15 % ;
100 - 950 hPa:
5%;
950 - 1100 hPa:
2,5 %
5 10-4 - 1 10-3 hPa:

50 % ;
1 10-3 - 100 hPa:
15 % ;
100 - 950 hPa:
5%;
950 - 1050 hPa:
2,5 %
Weight
120 g
120 g
Filament
Tungsten
Tungsten
1500 hPa
1500 hPa
5 10-5 hPa
5 10-5 hPa
Sensor cable length
100 m
100 m
10-50 C
10-50 C
-20-+65 C
-20-+65 C
Supply: Voltage
15-30 V DC
15-30 V DC
2.5 W
2.5 W
Volume
4.7 cm3
4.7 cm3
2%
2%
PT R26 855
PT R26 856
-3
Repeatability: 10 - 1100 hPa

Order number
Pirani/capacitance gauge PCR 280
(5 10-5 - 1500 hPa)
Accessories

PF 117 216 -T
Sensor cable, 3 m
PT 448 250 -T
PT 448 250 -T
Mating connector
B 4707 283 MA
B 4707 283 MA
Part 3.2 / Page 45
Measurement
Pirani transmitter TPR (5 10-4 - 1000 hPa)
Flange size: DN 16 ISO-KF

Measurement range from 5 10-4 to 1000 hPa
Compact and rugged
Fast, stable measurement
For general vacuum applications
Maximum pressure refers to inert gases
Dimensions (in mm)

20.5
(0.81")
69
(2.72")
16
(0.63")
22.5
(0.89")
14
(0.55")
33
(1.30")
15
(0.58")
69
(2.72")
16
(0.63")
20.5
(0.81")
33
(1.30")
115
(4.53")
116
(4.57")
DN 16 ISO-KF DN 16 CF-R
TPR 280, 80 C
Page 46 / Part 3.2
TPR 280, 250 C
Technical data
TPR 280,
80 C
TPR 280,
250 C
Resolution
1 % of reading
1 % of reading
0.5 V
0.5 V
2.2 - 8.5 V
2.2 - 8.5 V
10 k
10 k
Bakeout temperature
80 C
250 C
Seal
Metal
Metal
Pressure max.
1000 kPa
1000 kPa
Feedthrough
Glass
Glass
Feature
Stainless steel,
metal sealed
Stainless steel,
metal sealed
Flange
Stainless steel
Stainless steel
Accuracy: 10-3 - 102 hPa
15 %
15 %
Filament
Tungsten
Tungsten
1000 hPa
1000 hPa
5 10-4 hPa
5 10-4 hPa
200 m
200 m
Response time
80 ms
80 ms
Protection category
IP 40
IP40
5-60 C
5-60 C
-20-+65 C
-20-+65 C
Supply: Voltage
14-30 V DC
14-30 V DC
1W
1W
Repeatability: 10-3 - 102 hPa
2%
2%
TPR 280,
80 C
TPR 280,
250 C
Flange (in)
DN 16 ISO-KF
DN 16 ISO-KF
Weight
80 g
130 g
Volume
1.5 cm3
10 cm3
Order number
PT R26 950
PT R26 960
Flange (in)
DN 16 CF-R
DN 16 CF-R
Weight
100 g
140 g
Volume
1.5 cm3
10 cm3
Order number
PT R26 951
PT R26 961
Flange (in)
1/8" NPT
Weight
70 g
Volume
2 cm3
Order number
PT R26 952
Flange (in)
8 VCR
Weight
130 g
Volume
2 cm3
Order number
PT R26 953
Accessories

PF 117 216 -T
Mating connector
B 4707 283 MA
B 4707 283 MA
Sensor cable, 3 m
PT 448 250 -T
PT 448 250 -T
PT 120 132 -T
PT 120 132 -T
Part 3.2 / Page 47
Measurement
Measurement
Pirani transmitter TPR (5 10-4 - 1000 hPa)

Compact and rugged
Fast, stable measurement
For corrosive media
Maximum pressure refers to inert gases
Dimensions (in mm)

20.5
(0.81")
69
(2.72")
16
(0.63")
22.5
(0.89")
14
(0.55")
33
(1.30")
15
(0.58")
69
(2.72")
16
(0.63")
20.5
(0.81")
33
(1.30")
115
(4.53")
116
(4.57")
TPR 281, 80 C
Page 48 / Part 3.2
TPR 281, 250 C
Technical data
TPR 281,
80 C
TPR 281,
250 C
Resolution
1 % of reading
1 % of reading
0.5 V
0.5 V
2.2 - 8.5 V
2.2 - 8.5 V
10 k
10 k
Bakeout temperature
80 C
250 C
Seal
Metal
Metal
Pressure max.
1000 kPa
1000 kPa
Feedthrough
Glass
Glass
Feature
For corrosive media
For corrosive media
Flange
Stainless steel
Stainless steel
15 %
15 %
Filament
Nickel
Nickel
1000 hPa
1000 hPa
5 10-4 hPa
5 10-4 hPa
200 m
200 m
Response time
80 ms
80 ms
Protection category
IP 40
IP 40
5-60 C
5-60 C
-20-+65 C
-20-+65 C
Supply: Voltage
14-30 V DC
14-30 V DC
1W
1W
2%
2%
TPR 281,
80 C
TPR 281,
250 C
Flange (in)
DN 16 ISO-KF
DN 16 ISO-KF
Weight
80 g
130 g
Volume
1.3 cm3
10 cm3
Order number
PT R21 950
PT R21 960
Flange (in)
DN 16 CF-R
DN 16 CF-R
Weight
100 g
140 g
Volume
1.5 cm3
10 cm3
Order number
PT R21 951
PT R21 961
Accessories

PF 117 216 -T
Mating connector
B 4707 283 MA
B 4707 283 MA
Sensor cable, 3 m
PT 448 250 -T
PT 448 250 -T
PT 120 132 -T
PT 120 132 -T
Part 3.2 / Page 49
Measurement
Measurement
Cold Cathode transmitters IKR (5 10-11 - 0.01 hPa)

Measurement range from 2 10-9 to 0.01 hPa
Cold cathode (inverted magnetron)
Rugged and dependable
Insensitive to air ingress
Corrosion-resistant
Maximum pressure refers to inert gases and temperatures of less than 55 C
Dimensions (in mm)
DN 25/40 ISO-KF
IKR 251, FPM sealed
DN 40 CF-F
IKR 261, metal sealed
IKR 261, metal sealed, long case
Page 50 / Part 3.2
Technical data
IKR 251,
FPM sealed
IKR 261,
metal
sealed
IKR 261,
metal
sealed,
long case
Anode
Molybdenum
Molybdenum
Molybdenum
0.5 V
0.5 V
0.5 V
1.8 - 8.5 V
1.8 - 8.5 V
1.8 - 8.5 V
10 k
10 k
10 k
Bakeout temperature
150 C,
electronic
removed
250 C,
electronic
removed
250 C
Seal
FPM
Ag
Ag
Pressure max.
1000 kPa
10 bar
10 bar
Feedthrough
Al2O3
Al2O3
Al2O3
Feature
Interior
FPM sealed
Metal sealed
Metal sealed
Flange
Stainless steel
Stainless steel
Stainless steel
Accuracy: 10-8 - 10-3 hPa
30 %
30 %
30 %
0.01 hPa
0.01 hPa
0.01 hPa
2 10-9 hPa
2 10-9 hPa
2 10-9 hPa
Sensor cable length
500 m
500 m
500 m
5-55 C
5-55 C
5-55 C
-40-+65 C
-40-+65 C
-40-+65 C
Supply: Voltage
15-30 V
15-30 V
15-30 V
2W
2W
2W
Volume
20 cm3
20 cm3
20 cm3
5%
5%
5%
IKR 251,
FPM sealed
IKR 261,
metal
sealed
IKR 261,
metal
sealed,
long case
-8
-3
Flange (in)
DN 25 ISO-KF
Weight
700 g
Order number
PT R25 500
Flange (in)
DN 40 ISO-KF
DN 40 ISO-KF
Weight
700 g
700 g
Order number
PT R25 501
PT R25 750
Flange (in)
DN 40 CF-F
DN 40 CF-F
DN 40 CF-F
Weight
950 g
950 g
1200 g
Order number
PT R25 502
PT R25 751
PT R25 761
Sensor cable, 3 m
PT 448 250 -T
PT 448 250 -T
PT 448 250 -T
Mating connector
B 4707 283 MA
B 4707 283 MA
B 4707 283 MA
Measurement
Accessories
Part 3.2 / Page 51
Measurement
Cold Cathode transmitters IKR (5 10-11 - 0.01 hPa)
Flange size: DN 40 CF-F

Measurement range from 5 10-11 to 0.01 hPa
Cold cathode (inverted magnetron)
Rugged and dependable
Insensitive to air ingress
Corrosion-resistant
Dimensions (in mm)
DN 25/40 ISO-KF
IKR 270, metal sealed
Page 52 / Part 3.2
DN 40 CF-F
IKR 270, metal sealed, long case
Technical data
IKR 270,
metal sealed,
DN 40 CF-F
IKR 270,
metal sealed,
long case,
DN 40 CF-F
Anode
Molybdenum
Molybdenum
Flange (in)
DN 40 CF-F
DN 40 CF-F
0.5 V
0.5 V
1.8 - 8.5 V
1.8 - 8.5 V
10 k
10 k
Bakeout temperature
250 C,
electronic
removed
250 C
Seal
Ag
Ag
Pressure max.
1000 kPa
1000 kPa
Feedthrough
Al2O3
Al2O3
Feature
Metal sealed
Metal sealed
Flange
Stainless steel
Stainless steel
30 %
30 %
Weight
950 g
1200 g
Cable length
500 m
500 m
0.01 hPa
0.01 hPa
5 10-11 hPa
5 10-11 hPa
5-55 C
5-55 C, in the
bakeout range
-40-+65 C
-40-+65 C
Supply: Voltage
15-30 V
15-30 V
2W
2W
Volume
20 cm3
20 cm3
Repeatability: 10-9 - 10-3 hPa
5%
5%
PT R21 251
PT R21 261
Sensor cable, 3 m
PT 448 250 -T
PT 448 250 -T
Mating connector
B 4707 283 MA
B 4707 283 MA
Order number
Cold Cathode Gauges IKR 270
(5 10-11 - 0,01 hPa)
Accessories
Part 3.2 / Page 53
Measurement
Measurement
Pirani/Cold Cathode transmitters PKR (5 10-9 - 1000 hPa)

Two gauge heads (Pirani and cold cathode) in a single case (inverted magnetron)
A single flange from atmospheric pressure to UHV
Corrosion-resistant
63.5
122.5
18
32
15.5
57
20
Dimensions (in mm)
DN 25 ISO-KF
PKR 261, metal sealed
63.5
128.5
15.5
DN 40 ISO-KF
24
18.5
32
123
57
20
PKR 251, FPM sealed
DN 40 ISO CF
PKR 261, metal sealed
Page 54 / Part 3.2
Measurement
Technical data
PKR 251,
FPM sealed
PKR 261,
metal
sealed
Anode
Molybdenum
Molybdenum
9.5 V
9.5 V
0.5 V
0.5 V
1.8 - 8.6 V
1.8 - 8.6 V
10 k
10 k
Bakeout temperature
150 C,
electronic
removed
150 C,
electronic
removed
Seal
FPM
Ag, Cu
Pressure max.
1000 kPa
1000 kPa
Feedthrough
Al2O3, Glass
Al2O3, Glas
Feature
Interior
FPM sealed
Metal sealed
Flange
Stainless steel
Stainless steel
30 %
30 %
Filament
Tungsten
Tungsten
1000 hPa
1000 hPa
5 10-9 hPa
5 10-9 hPa
Sensor cable length
300 m
300 m
5-55 C
5-55 C, up to
150 C on
flange
(horizontal
installation)
-40-+65 C
-40-+65 C
Supply: Voltage
15-30 V DC
15-30 V DC
2W
2W
Volume
20 cm3
20 cm3
5%
5%
PKR 251,
FPM sealed
PKR 261,
metal
sealed
Flange (in)
DN 25 ISO-KF
DN 25 ISO-KF
Weight
700 g
700 g
Order number
PT R26 000
PT R26 250
Flange (in)
DN 40 ISO-KF
DN 40 ISO-KF
Weight
700 g
750 g
Order number
PT R26 001
PT R26 251
Flange (in)
DN 40 CF-F
DN 40 CF-F
Weight
950 g
995 g
Order number
PT R26 002
PT R26 252
Sensor cable, 3 m
PT 448 250 -T
PT 448 250 -T
Mating connector
B 4707 283 MA
B 4707 283 MA
Accessories
Part 3.2 / Page 55
Measurement
Hot Cathode transmitters IMR (2 10-6 - 1000 hPa)

Two gauge heads (Pirani and hot cathode) in a single case
Highly accurate
Excellent reproducibility
Automatic cathode protection
A single flange from atmosphere to UHV
Corrosion-resistant
Dimensions (in mm)
IMR 265, DN 16 CF-F
IMR 265, DN 25 ISO-KF
IMR 265, DN 40 CF-F
Page 56 / Part 3.2
Technical data
IMR 265,
High Pressure
Hot Cathode
Output signal: Sensor error
0.5 V
Output signal: Pressure range Ioni
1.5 - 7.5 V
Output signal: Pressure range Pirani
8.5 - 9.75 V
10 k
Bakeout temperature
150 C,
electronic
removed
Pressure max.
500 kPa
Electron collector
Stainless steel
Flange
Stainless steel
10-5 - 1 hPa: 15 %
Filament holder
Molybdenum,
Platinum
Ion collector
Stainless steel
Isolator
Glass
Filament
Iridium yttriated
1000 hPa
2 10-6 hPa
Sensor cable length
100 m
Pirani measurement element
Copper, Tungsten
0-50 C
-20-+70 C
Supply: Voltage
20-30 V DC
16 W
Volume
20 cm3
-1
30 % reading
2 % reading
Measurement
IMR 265,
High Pressure
Hot Cathode
Flange (in)
DN 16 ISO-KF
Weight
270 g
Order number
PT R26 504
Flange (in)
DN 25 ISO-KF
Weight
285 g
Order number
PT R26 500
Flange (in)
DN 40 ISO-KF
Weight
315 g
Order number
PT R26 501
Flange (in)
DN 16 CF-F
Weight
400 g
Order number
PT R26 502
Flange (in)
DN 40 CF-F
Weight
550 g
Order number
PT R26 503
Accessories
Sensor cable, 3 m
PT 448 250 -T
Mating connector
B 4707 283 MA
Part 3.2 / Page 57
Measurement
Pirani/Bayard-Alpert transmitters PBR (5 10-10 - 1000 hPa)

Two gauge heads (Pirani and BA hot cathode) in a single case
Bayard-Alpert sensor ON/OFF automatically controlled by Pirani sensor
Highly accurate
A single flange from atmosphere to UHV
Corrosion-resistant
Dimensions (in mm)
PBR 260, DN 25 ISO-KF
Page 58 / Part 3.2
PBR 260, DN 40 CF-R
Technical data
PBR 260,
Pirani/BayardAlpert,
DN 25 ISO-KF
PBR 260,
DN 40 ISO-KF
PBR 260,
DN 40 CF-R
Flange (in)
DN 25 ISO-KF
DN 40 ISO-KF
DN 40 CF-R
0.5 V
0.5 V
0.5 V
0.774 - 10 V
0.774 - 10 V
0.774 - 10 V
10 k
10 k
10 k
Bakeout temperature
150 C,
electronic
removed
150 C,
electronic
removed
150 C,
electronic
removed
Pressure max.
200 kPa
200 kPa
200 kPa
Flange
Stainless steel
Stainless steel
Stainless steel
15 % reading
15 % reading
15 % reading
Weight
285 g
315 g
550 g
Filament
Tungsten
Tungsten
Tungsten
Filament
Iridium yttriated
Iridium yttriated
Iridium yttriated
Cu, W, glass,
NiFe, Mo,
Stainless Steel, NiCr
Cu, W, glass,
NiFe, Mo,
Stainless steel, NiCr
Cu, W, glass,
NiFe, Mo,
Stainless steel, NiCr
1000 hPa
1000 hPa
1000 hPa
5 10-10 hPa
5 10-10 hPa
5 10-10 hPa
Sensor cable length
100 m
100 m
100 m
0-50 C
0-50 C
0-50 C
-20-+70 C
-20-+70 C
-20-+70 C
Supply: Voltage
20-28 V DC
20-28 V DC
20-28 V DC
16 W
16 W
16 W
Volume
24 cm3
24 cm3
25 cm3
5 % reading
5 % reading
5 % reading
PT R27 000
PT R27 001
PT R27 002
Sensor cable, 3 m
PT 448 250 -T
PT 448 250 -T
PT 448 250 -T
Mating connector
B 4707 283 MA
B 4707 283 MA
B 4707 283 MA
Measurement
Order number
Pirani/Bayard-Alpert Gauge PBR 260,
(5 10-10 - 1000 hPa)
Accessories
Part 3.2 / Page 59
Measurement
3.2 Vacuum measurement, analysis, leak detection/Measurement/ActiveLine/Measurement equipment
3.2 Vacuum measurement, analysis, leak detection/Measurement /ActiveLine /Measurement equipment
SingleGauge measurement equipment TPG 261

SingleGauge measurement unit TPG 261
Length: 3 m
Dimensions (in mm)
Technical data
SingleGauge
measurement
equipment
TPG 261, 1 TPR 280,
3 m cable
SingleGauge
measurement
equipment
TPG 261, 1 IKR 251,
3 m cable
SingleGauge
measurement
equipment
TPG 261, 1 PKR 251,
3 m cable
Flange (in)
DN 16 ISO-KF
DN 25 ISO-KF
DN 25 ISO-KF
Connections for transmitter
1000 hPa
0.01 hPa
1000 hPa
5 10-4 hPa
2 10-9 hPa
5 10-9 hPa
Gauge head
1 TPR 280
1 IKR 251
1 PKR 251
90-250 V, 50/60 Hz
90-250 V, 50/60 Hz
90-250 V, 50/60 Hz
Interface
RS-232-C
RS-232-C
RS-232-C
PT 441 930-T
PT 441 933-T
PT 441 935 -T
Order number
Accessories
Technical data
SingleGauge
measurement
equipment
TPG 261, 1 PKR 251,
3 m cable
SingleGauge
measurement
equipment
TPG 261, 1 PKR 251,
3 m cable
SingleGauge
measurement
equipment
TPG 261, 1 PBR 260,
3 m cable
Flange (in)
DN 40 ISO-KF
DN 40 CF-F
DN 25 ISO-KF
1000 hPa
1000 hPa
1000 hPa
5 10-9 hPa
5 10-9 hPa
5 10-10 hPa
Gauge head
1 PKR 251
1 PKR 251
1 PBR 260
90-250 V, 50/60 Hz
90-250 V, 50/60 Hz
90-250 V, 50/60 Hz
Interface
RS-232-C
RS-232-C
RS-232-C
PT 441 936 -T
PT 441 937 -T
PT 441 938 -T
Order number
Page 60 / Part 3.2
Measurement
3.2 Vacuum measurement, analysis, leak detection/Measurement/ActiveLine/Measurement equipment
DualGauge measurement equipment TPG 262

DualGauge measurement unit TPG 262
Length: 3 m
Dimensions (in mm)
Technical data
DualGauge
measurement
equipment
TPG 262, 2 TPR 280,
3 m cable
DualGauge
measurement
equipment
TPG 262, 1 TPR 280,
1 IKR 251,
3 m cable
DualGauge
measurement
equipment
TPG 262, 2 PKR 251,
3 m cable
DualGauge
measurement
equipment
TPG 262, 1 TPR 280,
1 PKR 251,
3 m cable
Flange (in)
DN 16 ISO-KF
DN 16 ISO-KF/
DN 25 ISO-KF
DN 25 ISO-KF
DN 16 ISO-KF/
DN 25 ISO-KF
1000 hPa
1000 hPa
1000 hPa
1000 hPa
5 10-4 hPa
2 10-9 hPa
5 10-9 hPa
5 10-9 hPa
Gauge head
2 TPR 280
1 TPR 280, 1 IKR 251 2 PKR 251
1 TPR 280, 1 PKR 251
90-250 V, 50/60 Hz
90-250 V, 50/60 Hz
90-250 V, 50/60 Hz
90-250 V, 50/60 Hz
Interface
RS-232-C
RS-232-C
RS-232-C
RS-232-C
PT 441 940-T
PT 441 943-T
PT 441 945-T
PT 441 948-T

PF 117 216 -T
Order number
DualGauge measurement equipment TPG 262
Accessories
PF 117 216 -T
Part 3.2 / Page 61
Measurement
3.2 Vacuum measurement, analysis, leak detection/Measurement/ActiveLine/Controllers
3.2 Vacuum measurement, analysis, leak detection/Measurement /ActiveLine /Controllers
TPG 201, Pirani Handheld Vacuum Gauge

TPG 202, Piezo/Pirani Handheld Vacuum Gauge
Battery-operated manual measurement unit

Data logging function
Data readout by PC
Scope of delivery: Battery not included
Dimensions (in mm)
122
30
122
30
60
60
25
60
60
25
47,5
TPG 201, Pirani manual measurement unit
Page 62 / Part 3.2
62,5
TPG 202, Pirani manual measurement unit
Technical data
TPG 201,
Pirani manual
measurement unit
TPG 202,
Pirani manual
measurement unit
Connection: Vacuum side
DN 16 ISO-KF
DN 16 ISO-KF
Battery type
9 V AlMn E bloc,
6 LR6 ; 9 V Lithium
E bloc
9 V AlMn E bloc,
6 LR6 ; 9 V Lithium
E bloc
Seal
Metal
Metal
Pressure max.
400 kPa
200 kPa
Accuracy 10 - 100 hPa: % of measurement
approx. 30
Accuracy 10-2 - 10 hPar: % of measurement
approx. 10
Accuracy
1200 - 1000 hPa:

0,3 % Full Scale ;
10-2 10-3
of reading ;
2 10-3 hPa :
factor 2 of
reading
Weight
0.195 kg
0.230 (battery
included) kg
Nickel, stainless steel, Stainless steel, gold,

tungsten, glassnickel, tungsten,
feedthroughs
glass, FPM
1000 hPa
1200 hPa
5 10-4 hPa
5 10-4 hPa
Pirani
Piezo and Pirani
Protection category
IP 40
IP 40
5-40 C
+5-+50 C
PT G28 201
PT G28 202
PT 350 102 -T
PT 350 102 -T
Order number
TPG 201, Pirani Handheld Vacuum Gauge
Accessories
Accessories kit with AC adapter, battery,
USB cable, DocuStar software
Part 3.2 / Page 63
Measurement
Measurement
TPG 261, controller for 1 gauge

For operation of one ActiveLine transmitter
Simple to operate
Easy readable display
Dimensions (in mm)
Technical data
TPG 261,
controller
for 1 transmitter
Display rate
10 1/s
Error signal: Working contact, potential-free
1 piece
Error signal: Switching voltage max.
60 V DC
Filter time constant
1.2/0.4/0.02 s
Weight
1.1 kg
55000 hPa
5 10-11 hPa
Measurement rate
50 1/s
50/60 Hz
Mains requirement: power consumption
45 VA
90-250 V
60 V DC
Set point: Current max.
1A
2 pieces
Interface
RS-232-C
Protection category
IP 30
Safety
EN61010-1 /
EN 50081-1 /
EN50082-2 /
IEC1010
Signal output: Measuring value, analog
0-10 V
5-50 C
-20-+65 C
Order number
TPG 261, controller for 1 gauge
PT G28 030
Accessories
Page 64 / Part 3.2
Sensor cable, 1 m
PT 448 248 -T
Sensor cable, 3 m
PT 448 250 -T
Sensor cable, 6 m
PT 448 251 -T
Sensor cable, 10 m
PT 448 252 -T
Sensor cable, 15 m
PT 448 253 -T
Sensor cable, 20 m
PT 448 254 -T
Sensor cable, 25 m
PT 448 255 -T
Sensor cable, 30 m
PT 448 256 -T
Sensor cable, 35 m
PT 448 257 -T
Sensor cable, 40 m
PT 448 258 -T
Sensor cable, 45 m
PT 448 259 -T
Sensor cable, 50 m
PT 448 260 -T
Measurement
TPG 262, controller for 2 gauges

For operation of two ActiveLine transmitters
Simple to operate
Easy readable display
Dimensions (in mm)
Technical data
TPG 262
controller
for 2 transmitter
Display rate
10 1/s
Automatic changeover: Pirani-cold cathode
6 10-3 hPa
1 piece
1.2/0.4/0.02 s
Weight
1.1 kg
55000 hPa
5 10-11 hPa
Measurement rate
50 1/s
50/60 Hz
45 VA
90-250 V
60 V DC
1A
4 pieces
Interface
RS-232-C
Protection category
IP 30
Safety
EN61010-1 /
EN 50081-1 /
EN50082-2 /
IEC1010
0-10 V
5-50 C
-20-+65 C
Order number
TPG 262, controller for 2 gauges
PT G28 280
Accessories
Sensor cable, 1 m
PT 448 248 -T
Sensor cable, 3 m
PT 448 250 -T
Sensor cable, 6 m
PT 448 251 -T
Sensor cable, 10 m
PT 448 252 -T
Sensor cable, 15 m
PT 448 253 -T
Sensor cable, 20 m
PT 448 254 -T
Sensor cable, 25 m
PT 448 255 -T
Sensor cable, 30 m
PT 448 256 -T
Sensor cable, 35 m
PT 448 257 -T
Sensor cable, 40 m
PT 448 258 -T
Sensor cable, 45 m
PT 448 259 -T
Sensor cable, 50 m
PT 448 260 -T
Part 3.2 / Page 65
Measurement
TPG 256 A, controller for 6 gauges

For operating 6 ActiveLine transmitters
Dimensions (in mm)
Technical data
TPG 256 A
MaxiGauge
controller, seriell
interface
TPG 256 A
MaxiGauge
controller, seriell
interface isolated
6 (max. 3 IMR 265 /

PBR 260 / CMR 27x)
6 (max. 3 IMR 265 /

PBR 260 / CMR 27x)
Display rate
4 1/s
4.0 1/s
1 piece
1 piece
Error signal: Switching voltage max.
60 V DC
60 V DC
Error signal: Switching current max.
3A
3A
2.1/0.32/0.1 s
2.1/0.32/0.1 s
Weight
2.1 kg
2.1 kg
55000 hPa
55000 hPa
5 10-11 hPa
5 10-11 hPa
Measurement rate
100 1/s
100 1/s
50-60 Hz
50-60 Hz
60 VA
60 VA
90-250 V
90-250 V
60 V DC
60 V DC
3A
3A
6 pieces
6,0 pieces
Switching voltage
240 V with RI 256
240 V with RI 256
Interface
RS-232-C, RS-422
RS-232-C, RS-422,
RS-422 isolated,
RS-485 isolated
Protection category
IP 30
IP 30
Safety
EN61010-1 / IEC 1010, EN61010-1 / IEC 1010,

EN60950, EN 50081-1 / EN60950,
EN50082-1
EN 50081-1&2
Signal output: Output resistance
660
660
0-10 V DC
0-10 V DC
5-40 C
5-40 C
-20-+60 C
-20-+60 C
PT G28 760
PT G28 761
Sensor cable, 1 m
PT 448 248 -T
PT 448 248 -T
Sensor cable, 3 m
PT 448 250 -T
PT 448 250 -T
Sensor cable, 6 m
PT 448 251 -T
PT 448 251 -T
Sensor cable, 10 m
PT 448 252 -T
PT 448 252 -T
Sensor cable, 15 m
PT 448 253 -T
PT 448 253 -T
Sensor cable, 20 m
PT 448 254 -T
PT 448 254 -T
Sensor cable, 25 m
PT 448 255 -T
PT 448 255 -T
Sensor cable, 30 m
PT 448 256 -T
PT 448 256 -T
Sensor cable, 35 m
PT 448 257 -T
PT 448 257 -T
Sensor cable, 40 m
PT 448 258 -T
PT 448 258 -T
Sensor cable, 45 m
PT 448 259 -T
PT 448 259 -T
Sensor cable, 50 m
PT 448 260 -T
PT 448 260 -T
Order number
TPG 256 A, controller for 6 gauges
Accessories
Page 66 / Part 3.2
Software for display and data logging for Active Line
For the following controller: TPG 261, TPG 262, TPG 265 A and TPG 300
Simple to operate
Up to 6 channels simultaneous presentable
Data is convertible in Excel
System requirements:
Software: Windows 7, Windows XP, Windows Vista
(administrator authorisation is required)
Hardware: Pentium-PC (1000 MHz or higher recommended), 256 MB RAM
(512 MB recommended), 150 MB free hard disc storage unit, Super VGA-Monitor
(with 1024 x 768 screen definition, small font adjustment), 24 Bit True Color, Free COM Port
Order number
Software for display and data logging for
Active Line
PT 882 550 -T
Part 3.2 / Page 67
Measurement
ModulLine
For challenging applications in research and development
Page 68 / Part 3.2
ModulLine
The ModulLine series includes three Pirani TPR vacuum
gauges with a measuring range of 1,000 to 8 10-4 hPa
and three IKR cold cathode vacuum gauges with a
measuring range of 5 10-3 to 10-11 hPa. Since these
vacuum gauges do not contain any electronics, they are
suitable for use in high-radiation environments. An
extensive range of cables, including high-temperature
cables and cables with double shielding, as well as a
controller complete this measurement equipment line.
The individually configurable controller can have
two measuring boards for up to four vacuum gauges.
Another socket is for an interface board for serial
interfaces RS-232/RS-485 and relay contacts; connection
to fieldbuses is possible as well.
Customer benefits
Q Proven long life
Q Allows for challenging applications
Q Sensors and electronics can be located separately
Accelerators
Q Accelerators
Q UHV applications
Q Applications with exposure to radiation
Applications with exposure to radiation
Part 3.2 / Page 69
3.2 Vacuum measurement, analysis, leak detection / Measurement equipment / ModulLine
Measurement
3.2 Vacuum measurement, analysis, leak detection/Measurement/ModulLine/Gauge heads/Pirani gauge heads
3.2 Vacuum measurement, analysis, leak detection/Measurement /ModulLine /Gauge heads /Pirani gauge heads
Pirani gauge heads

TPR 010
For general applications
TPR 017
For corrosive media
TPR 018
For UHV
Limited measurement and switching accuracy above 100 and below 10-3 hPa
Dimensions (in mm)
TPR 010
TPR 017
TPR 018
TPR 018, UHV
Page 70 / Part 3.2
Technical data
Pirani
gauge head
TPR 010
Pirani
gauge head
TPR 017,
corrosion resistant
Pirani
gauge head
TPR 018
Bakeout temperature
100 C
250 C
250 C
0-120 C
0-120 C
Operating temperature: high temperature

sensor cable
Operating temperature: standard sensor cable
0-70 C
0-80 C
0-80 C
Weight
0.14 kg
0.6 kg
0.6 kg
Isolator
FPM
Al2O3
Al2O3
1000 hPa
1000 hPa
1000 hPa
8 10-4 hPa
8 10-4 hPa
8 10-4 hPa
Filament/holder
T/Ni
Ni/Ni
T/Ni
Chamber wall, inside
AlSiMg
Stainless steel
Stainless steel
Protective filter
Sintered bronze
1 104 Gy
1 104 Gy
Pirani
gauge head
TPR 017,
corrosion resistant
Pirani
gauge head
TPR 018
Flange (in)
DN 16 ISO-KF
DN 16 ISO-KF
Order number
PT R13 270
PT R15 010
Flange (in)
DN 16 CF-F
DN 16 CF-F
Order number
PT R13 271
PT R15 011
Radiation resistance
Pirani
gauge head
TPR 010
Flange (in)
DN 10 ISO-KF
Order number
PT R02 270
Flange (in)
DN 40 CF-F
Order number
PT R15 014
Measurement
Accessories
Sensor cable, TPR 010, 3.0 m, 80 C
PT 548 402-T
PT 548 403-T
Sensor cable, TPR 017/018, 3.0 m, 80 C
PT 548 308-T
PT 548 308-T
PT 548 309-T
PT 548 309-T
Extension for sensor cable, TPR 010/017/018,

30 m, 80 C
PT 548 470-T
Part 3.2 / Page 71
Measurement
Cold cathode gauge heads

IKR 050 coaxial
For general applications
IKR 060 coaxial
For UHV
Radiation-resistant
IKR 070 coaxial
For UHV
Radiation-resistant
Dimensions (in mm)
IKR 050 coaxial
IKR 050, coaxial

IKR 060
IKR 070 coaxial
Page 72 / Part 3.2
Technical data
Cold cathode
gauge head
IKR 050,
coaxial,
FPM seal
Cold cathode
gauge head
IKR 060,
coaxial,
metal seal
Cold cathode
gauge head
IKR 070,
triaxial,
metal seal
Bakeout temperature
150 C
250 C
250 C
Operating temperature: high temperature

sensor cable
5-150 C
5-250 C
Operating temperature: standard sensor cable
5-80 C
5-80 C
5-80 C
Internal seal
FPM
Silver
Silver
Flange
Stainless steel
Stainless steel
Stainless steel
Isolator
Al2O3
Al2O3
Al2O3
5 10-3 hPa
5 10-3 hPa
5 10-3 hPa
2 10-9 hPa
1 10-10 hPa
1 10-11 hPa
1 107 Gy
1 107 Gy
Cold cathode
gauge head
IKR 060,
coaxial,
metal seal
Cold cathode
gauge head
IKR 070,
triaxial,
metal seal
Radiation resistance
Cold cathode
gauge head
IKR 050,
coaxial,
FPM seal
Flange (in)
DN 25 ISO-KF
Weight
0.6 kg
Order number
PT R18 500
Flange (in)
DN 40 ISO-KF
DN 40 ISO-KF
DN 40 ISO-KF
Weight
0.6 kg
0.6 kg
0.6 kg
Order number
PT R18 501
PT R18 753
PT R20 501
Flange (in)
DN 40 CF-F
DN 40 CF-F
DN 40 CF-F
Weight
0.85 kg
0.85 kg
0.85 kg
Order number
PT R18 502
PT R18 751
PT R20 502
Sensor cable, IKR 050/060, 3.0 m, 80 C
PT 548 406-T
PT 548 406-T
PT 548 407-T
PT 548 407-T
Measurement
Accessories
Sensor cable, IKR 070, 3.0 m, 80 C
PT 548 306-T
PT 548 317-T
Part 3.2 / Page 73
Measurement
3.2 Vacuum measurement, analysis, leak detection/Measurement/ModulLine/Gauge heads/Gauge head accessories
3.2 Vacuum measurement, analysis, leak detection/Measurement /ModulLine /Gauge heads /Gauge head accessories
Page 74 / Part 3.2
Gauge head accessories

Sensor cables
Order number
PT 548 308-T
PT 548 309-T
Sensor cable, TPR 017/018, 10 m, 80 C
PT 548 456-T
PT 548 457-T
PT 548 458-T
PT 548 459-T
PT 548 460-T
PT 548 461-T
PT 548 462-T
PT 548 463-T
PT 548 464-T
PT 548 401-T
PT 548 402-T
PT 548 403-T
Sensor cable, TPR 010, 30 m, 80 C
PT 548 415-T
PT 548 416-T
PT 548 417-T
PT 548 450-T
PT 548 451-T
PT 548 452-T
PT 548 453-T
PT 548 454-T
PT 548 455-T
PT 548 406-T
PT 548 407-T
Sensor cable, IKR 050/060, 10 m, 80 C
PT 548 419-T
PT 548 422-T
PT 548 483-T
PT 548 484-T
PT 548 485-T
PT 548 486-T
PT 548 487-T
PT 548 488-T
PT 548 489-T
PT 548 306-T
PT 548 317-T
Sensor cable, IKR 070, 10 m, 80 C
PT 548 490-T
PT 548 491-T
PT 548 492-T
PT 548 493-T
PT 548 494-T
PT 548 495-T
BP 229 748-T
Extension for sensor cables
Order number
Extension for sensor cable, TPR 010/017/018, 10 m, 80 C
PT 548 466-T
PT 548 468-T
PT 548 470-T
PT 548 472-T
PT 548 474-T
High-temperature sensor cables
Order number
High-temperature sensor cable, TPR 017/018, 3.0 m, 250 C
PT 548 414-T
High-temperature sensor cable, TPR 017/018, 6.0 m, 250 C
PT 548 465-T
High-temperature sensor cable, TPR 017/018, 10 m, 250 C
PT 448 047-T
PT 448 043-T
PT 448 044-T
High-temperature sensor cable, IKR 050/060, 3.0 m, 250 C
PT 548 542-T
High-temperature sensor cable, IKR 050/060, 6.0 m, 250 C
PT 548 543-T
High-temperature sensor cable, IKR 050/060, 10 m, 250 C
PT 448 045-T
PT 548 989-T
PT 448 046-T
Part 3.2 / Page 75
Measurement
3.2 Vacuum measurement, analysis, leak detection/Measurement/ModulLine/Gauge heads/Gauge head accessories
Measurement
3.2 Vacuum measurement, analysis, leak detection/Measurement/ModulLine/Measurement boards/Pirani measurement board
3.2 Vacuum measurement, analysis, leak detection/Measurement /ModulLine /Measurement boards /Pirani measurement
board
Pirani measurement board

For 2 TPR 010/018
Measurement range from 1000 to 8 10-4 hPa
Dimensions (in mm)
Technical data
Pirani measurement
board
PI 300 D,
for 2 TPR 010/018
Pirani measurement
board
PI 300 DN,
for 2 TPR 017s
Number of measuring circuits
For gauge
TPR 010, TPR 018
TPR 017
Weight
0.14 kg
0.14 kg
1000 hPa
1000 hPa
8 10-4 hPa
8 10-4 hPa
Sensor cable length
100 m
100 m
Measurement board
Pirani measurement
board
Pirani Measurement
board
Reaction time of the output signal: Decay
600 ms
600 ms
Reaction time of the output signal: Rise
50 ms
50 ms
PT 546 920 -T
PT 549 214 -T
Order number
Pirani measurement board
Page 76 / Part 3.2
Measurement
Cold cathode measurement board

Measurement range from 1 10-9 to 5 10-3 hPa
For 2 IKR 050
Dimensions (in mm)
Technical data
Cold cathode
measurement board
PE 300 DC9,
for 2 IKR 050s
For gauge
IKR 050
Weight
0.26 kg
5 10-3 hPa
1 10-9 hPa
Sensor cable length
100 m
Measurement board
Cold cathode
measurement board
16 ms
Order number
Cold cathode measurement board
PT 441 375 -T
Part 3.2 / Page 77
Measurement
Pirani/cold cathode measurement board

CP 300 T11L
For 1 TPR 010/018 and 1 IKR 070
Max. sensor cable length: 500 m
CP 300 C9
For 1 TPR 010/018 and 1 IKR 050
CP 300 T11
For 1 TPR 010/018 and 1 IKR 070
CP 300 C10
For 1 TPR 010/018 and 1 IKR 060
Dimensions (in mm)
Technical data
Pirani/cold cathode
measurement board
CP 300 T11L,
for 1 TPR 010/018,
1 IKR 070
Pirani/cold cathode
measurement board
CP 300 C9,
for 1 TPR 010/018,
1 IKR 050
Pirani/cold cathode
measurement board
CP 300 T11,
for 1 TPR 010/018,
1 IKR 070
Pirani/cold cathode
measurement board
CP 300 C10,
for 1 TPR 010/018,
1 IKR 060
1 each
1 each
1 each
For gauge
TPR 010, TPR 018,

IKR 070
TPR 010, TPR 018,

IKR 050
TPR 010, TPR 018,

IKR 070
TPR 010, TPR 018,

IKR 060
Weight
0.21 kg
0.21 kg
0.25 kg
0.23 kg
1000 hPa
1000 hPa
1000 hPa
1000 hPa
1 10-11 hPa
5 10-9 hPa
1 10-11 hPa
1 10-10 hPa
Sensor cable length
500 m
100 m
100 m
100 m
Measurement board
Pirani/cold cathode
measurement board
Pirani/cold cathode
measurement board
Pirani/cold cathode
measurement board
Pirani/Cold cathode
measurement board
< 50 ms
10 ms
50 ms
50 ms
PT 441 122 -T
PT 441 000 -T
PT 441 080 -T
PT 441 114 -T
Order number
Pirani/cold cathode measurement board
Page 78 / Part 3.2
3.2 Vacuum measurement, analysis, leak detection/Measurement /ModulLine /Interface and relay boards /Interface and
relay board
Measurement
3.2 Vacuum measurement, analysis, leak detection/Measurement/ModulLine/Interface and relay boards/Interface and relay board
Interface and relay board

With RS-232-C interface
5 relays, maximum switching voltage 50 V AC
AC = Alternating Current
DC = Direct Current
Dimensions (in mm)
Technical data
Interface and relay

board
IF 300 A, RS-232-C,
45 W, 75 VA
Interface and relay

board
IF 300 B, RS-232-C,
120 W, 1000 VA
Interface and relay

board
IF 300 C, RS-422,
50 V AC / DC
Interface and relay

board
IF 300 P,
Profibus-DP,
45 W, 75 VA
Weight
0.14 kg
0.15 kg
0.14 kg
0.16 kg
Relay: Connector 15 pole (pins)
D-Sub
GdsA-H, DIN 41612
D-Sub
D-Sub
Relay: Number
5 pieces
5 pieces
5 pieces
5 pieces
Relay: Switching capacity
45 W, 75 VA
120 W, 1000 VA
45 W, 75 VA
45 W, 75 VA
Relay: Switching voltage
30 V DC / 50 V AC
30 V DC / 250 V AC
50 V AC / DC
50 V AC / DC
Relay: Switching current
1.5 A
4A
1.5 A
1.5 A
Relay: Changeover contacts, potential-free,

per relay
1 piece
1 piece
1 piece
1 piece
Relay: Resistance (with connector)
125 m
70 m
125 m
125 m
Interface
RS-232-C
RS-232-C
RS-422
Profibus-DP
D-sub connector,
9-pole, pins
Cable with
D-sub connector,
9-pole, pins
D-sub connector,
9-pole, sockets
D-sub connector,
9-pole, pins
Interface: Baud rates
300, 1200, 2400,

4800, 9600
300, 1200, 2400,

4800, 9600
300, 1200, 2400,

4800, 9600
12 Mbaud
Interface: Data format
ASCII, 1 start bit,

ASCII, 1 start bit,
ASCII, 1 start bit,
8 data bits, 1 stop bit, 8 data bits, 1 stop bit, 8 data bits, 1 stop bit,
no parity bit
no parity bit
no parity bit
Interface: Cable length max.
30 m
30 m
1200 m
1200 m
Interface: Type
RS-232-C
asynchronus
RS-232-C
asynchronus
RS-422
asynchronus
Profibus-DP
PT 441 130-T
PT 441 250-T
PT 441 390-T
PT 441 395-T
Order number
Interface and relay board
Accessories
D-Sub mating connector, female, 15-pin,
for IF 300 A/C, relay output
PT 441 129-T
D-Sub mating connector, female,

for IF 300 A, RS-232-C
PT 441 128-T
PT 441 129-T
Interface cable, for IF 300 B, RS-232-C, 0.4 m
PT 548 932-T
Relay connector, complete, for IF 300 B
PT 546 999-T
Part 3.2 / Page 79
Measurement
3.2 Vacuum measurement, analysis, leak detection/Measurement/ModulLine/Controllers/TPG 300, basic unit
3.2 Vacuum measurement, analysis, leak detection/Measurement /ModulLine /Controllers /TPG 300, basic unit
TPG 300, basic unit

Basic unit with power supply and 3 free slots for measurement, interface and relay boards
Dimensions (in mm)
Page 80 / Part 3.2
Technical data
TPG 300,
basic unit
Display rate
5s
Error display
1 LED, red
16 ms, 160 ms
(standard), 1.6 s
Weight: without boards
1.4 kg
Limit frequency
10 Hz, 1 Hz
(standard), 0.1 Hz
Unit of measure
mbar, Torr, Pa
1000 hPa
1 10-11 hPa
Measurement rate
100 1/s
Measured value display
15 mm high numbers
50/60 Hz
55 VA
90-264 V AC
Safety
IEC 384, class 1,

VDE 0411, part 2.80
5-50 C
-40-+65 C
Measurement
Order number
TPG 300, basic unit
PT 546 900 -T
Accessories
Blank panel, for measurement board
PT 441 259
Blank panel, for IF 300
PT 441 017
Part 3.2 / Page 81
Measurement
TPG 300, complete units with measurement boards

and power cords
Dimensions (in mm)
2,5 m
Page 82 / Part 3.2
Technical data
TPG 300,
complete units with
measurement
boards and power
cords
Display rate
5 1/s
Error display
1 LED, red
16 ms, 160 ms
(standard), 1.6 s
1.4 kg
Limit frequency
10 Hz, 1 Hz
(standard), 0.1 Hz
Unit of measure
mbar, Torr, Pa
Measurement rate
100 s
15 mm high numbers
50-60 Hz
55 VA
90-264 V AC
Safety
IEC 384, class 1,

VDE 0411, part 2.80
5-50 C
-40-+65 C
Technical data
TPG 300,
complete
measurement unit,
incl. PI 300 D
TPG 300,
complete
measurement unit,
incl. PI 300 D,
IF 300 B
TPG 300,
complete
measurement unit,
incl. 2 PI 300 D
TPG 300,
complete
measurement unit,
incl. 2 PI 300 D,
IF 300 B
1000 hPa
1000 hPa
1000 hPa
1000 hPa
8 10-4 hPa
8 10-4 hPa
8 10-4 hPa
8 10-4 hPa
Measurement board
PI 300 D for
2 Pirani Gauge
TPR 010/018
PI 300 D for
2 Pirani Gauge
TPR 010/018
2 PI 300 D for
4 Pirani Gauge
TPR 010/018
2 PI 300 D for
4 Pirani Gauge
TPR 010/018
30 V DC / 250 V AC
30 V DC / 250 V AC
Set point
5 pieces
5 pieces
Interface
RS-232-C, IF 300 B
RS-232-C, IF 300 B
Order number
TPG 300, complete units with measurement
boards and power cords
PT G25 250
PT G25 251
PT G25 252
PT G25 253
Technical data
TPG 300,
complete
measurement unit,
incl. CP 300 C10
TPG 300,
complete
measurement unit,
incl. CP 300 C10,
IF 300 B
TPG 300,
complete
measurement unit,
incl. PI 300 D,
CP 300 C10
TPG 300,
complete
measurement unit,
incl. PI 300 D,
CP 300 C10,
IF 300 B
1000 hPa
1000 hPa
1000 hPa
1000 hPa
1 10-10 hPa
1 10-10 hPa
1 10-10 hPa
1 10-10 hPa
Measurement board
CP 300 C10 for

1 Pirani- and
1 Cold Cathode
Gauge
TPR 010/018,
IKR 060
CP 300 C10 for

1 Pirani- and
1 Cold Cathode
Gauge
TPR 010/018,
IKR 060
PI 300 D, CP 300 C10

for 3 Pirani- and
1 Cold Cathode
Gauge
TPR 010/018,
IKR 060
PI 300 D, CP 300 C10

for 3 Pirani- and
1 Cold Cathode
Gauge
TPR 010/018,
IKR 060
30 V DC / 250 V AC
30 V DC / 250 V AC
Set point
5 pieces
5 pieces
Interface
RS-232-C, IF 300 B
RS-232-C, IF 300 B
Order number
PT G25 256
PT G25 257
PT G25 262
PT G25 263
Technical data
TPG 300,
complete
measurement unit,
incl. CP 300 C9
TPG 300,
complete
measurement unit,
incl. CP 300 C9,
IF 300 B
TPG 300,
complete
measurement unit,
incl. PI 300 D,
CP 300 C9
TPG 300,
complete
measurement unit,
incl. PI 300 D,
CP 300 C9,
IF 300 B
1000 hPa
1000 hPa
1000 hPa
1000 hPa
5 10-9 hPa
5 10-9 hPa
5 10-9 hPa
5 10-9 hPa
Measurement board
CP 300 C9 for
1 Pirani- and
1 Cold Cathode
Gauge
TPR 010/018,
IKR 050
CP 300 C9 for
1 Pirani- and
1 Cold Cathode
Gauge
TPR 010/018,
IKR 050
PI 300 D, CP 300 C9
for 3 Pirani- and
1 Cold Cathode
Gauge
TPR 010/018,
IKR 050
PI 300 D, CP 300 C9
for 3 Pirani- and
1 Cold Cathode
Gauge
TPR 010/018,
IKR 050
30 V DC / 250 V AC
30 V DC / 250 V AC
Set point
5 pieces
5 pieces
Interface
RS-232-C, IF 300 B
RS-232-C, IF 300 B
Order number
PT G25 290
PT G25 291
PT G25 292
PT G25 293
Part 3.2 / Page 83
Measurement
Measurement

and power cords
Dimensions (in mm)
2,5 m
Page 84 / Part 3.2
Technical data
TPG 300,
complete units
with measurement
boards and power
cords
Display rate
5 1/s
Error display
1 LED, red
16 ms, 160 ms
(standard), 1.6 s
1.4 kg
Limit frequency
10 Hz, 1 Hz
(standard), 0.1 Hz
Unit of measure
mbar, Torr, Pa
Measurement rate
100 s
15 mm high numbers
50-60 Hz
55 VA
90-264 V AC
Safety
IEC 384, class 1,

VDE 0411, part 2.80
5-50 C
-40-+65 C
Technical data
TPG 300,
complete
measurement unit,
incl. 2 CP 300 C9
TPG 300,
complete
measurement unit,
incl. 2 CP 300 C9,
IF 300 B
TPG 300,
complete
measurement unit,
incl. PI 300 D,
CP 300 C9,
IF 300 A
1000 hPa
1000 hPa
1000 hPa
5 10-9 hPa
5 10-9 hPa
5 10-9 hPa
Measurement board
2 CP 300 C9 for
2 Pirani- and
2 Cold Cathode
Gauge
TPR 010/018,
IKR 050
2 CP 300 C9 for
2 Pirani- and
2 Cold Cathode
Gauge
TPR 010/018,
IKR 050
PI 300 D, CP 300 C9
for 3 Pirani- and
1 Cold Cathode
Gauge
TPR 010/018,
IKR 050
30 V DC / 250 V AC
30 V DC / 50 V AC
Set point
5 pieces
5 pieces
Interface
RS-232-C, IF 300 B
RS-232-C, IF 300 A
Measurement
Order number
PT G25 294
PT G25 295
PT G25 302
Technical data
TPG 300,
complete
measurement unit,
incl. PI 300 D,
IF 300 A
TPG 300,
complete
measurement unit,
incl. CP 300 C9,
IF 300 A
TPG 300,
complete
measurement unit,
incl. 2 PI 300 D,
IF 300 A
1000 hPa
1000 hPa
1000 hPa
8 10-4 hPa
5 10-9 hPa
8 10-4 hPa
Measurement board
PI 300 D for
2 Pirani Gauge
TPR 010/018
CP 300 C9 for
1 Pirani- and
1 Cold Cathode
Gauge
TPR 010/018,
IKR 050
2 PI 300 D for
4 Pirani Gauge
TPR 010/018
30 V DC / 50 V AC
30 V DC / 50 V AC
30 V DC / 50 V AC
Set point
5 pieces
5 pieces
5 pieces
Interface
RS-232-C, IF 300 A
RS-232-C, IF 300 A
RS-232-C, IF 300 A

PT G25 306
PT G25 307
PT G25 310
Technical data
TPG 300,
complete
measurement unit,
incl. 2 CP 300 C9,
IF 300 A
TPG 300,
complete
measurement unit,
incl. CP 300 C10,
IF 300 A
TPG 300,
complete
measurement unit,
incl. PI 300 D,
CP 300 C10,
IF 300 A
1000 hPa
1000 hPa
1000 hPa
5 10-9 hPa
1 10-10 hPa
1 10-10 hPa
Measurement board
2 CP 300 C9 for
2 Pirani- and
2 Cold Cathode
Gauge
TPR 010/018,
IKR 050
CP 300 C10 for

1 Pirani- and
1 Cold Cathode
Gauge
TPR 010/018,
IKR 060
PI 300 D, CP 300 C10

for 3 Pirani- and
1 Cold Cathode
Gauge
TPR 010/018,
IKR 060
30 V DC / 50 V AC
30 V DC / 50 V AC
30 V DC / 50 V AC
Set point
5 pieces
5 pieces
5 pieces
Interface
RS-232-C, IF 300 A
RS-232-C, IF 300 A
RS-232-C, IF 300 A
PT G25 311
PT G25 312
PT G25 313
Order number
Order number
Part 3.2 / Page 85
Analytical equipment
Mass spectrometers for vacuum and gas analysis
Page 86 / Part 3.2
3.2 Vacuum measurement, analysis, leak detection / Analytical equipment
Contents
Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 88
Overview of series and applications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 89
Features at a glance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 90
Residual gas analysis in high vacuum
100
Residual gas analysis in ultra-high vacuum

100
PrismaPlus with C-SEM-detector . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 100
Gas analysis
Gas analysis in the pressure range of up to 1,000 hPa
104
OmniStar . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 106
ThermoStar . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 106
Gas analysis in the pressure range of up to 50 hPa
108
HPA 220. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 110

Gas analysis in the pressure range of up to 10 -2 hPa
112
SPM 220 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 112

Gas analysis in the pressure range of up to 10 -4 hPa
114
HiQuad . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 116
Part 3.2 / Page 87
PrismaPlus with Faraday detector . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 100
Mass spectrometers for vacuum and gas analysis
Knowing the gas composition is the key to understanding

and controlling many vacuum processes. Pfeiffer Vacuum
offers an extensive range of analyzers for gas determination in a vacuum process. From residual gas analyzers
to complex analysis systems, Pfeiffer Vacuum will work
with you to find the right solution for gas analysis in
the ultra-high vacuum range right up to atmospheric
pressure.
The criteria for selecting an analytical system are based
upon application requirements:
Q Pressure range of gas to be analyzed
Q Mass range of the gases to be detected
Q Minimum concentration to be detected
Q Speed at which changes in the gas composition
must be detected
The analytical equipment is based on quadrupole mass
spectrometers; the PrismaPlus series (QMG 220) for
most analytical tasks and HiQuad (QMG 700) for the
highest requirements.
Page 88 / Part 3.2

Industry
R&D
Coating
Page
Q = recommended
Semiconductors
Electron microscopy
Leak detection
Mass spectrometry
Surface analysis
Plasma monitoring
Lithography
Plasma etching
Implantation source
Inspection
Bonding
Flat panel displays (FPD)
LED / OLED
Hard disk coating
Photovoltaics
Glass coating (PVD)
CD, DVD, Blu-ray production (PVD)
Hard coating
Medical technology
Insulation vacuums
Bulb and tube manufacturing
Heat treatment
Vacuum drying
Vacuum furnaces
Nuclear research
Fusion technology
Plasma research
Space simulation
Nanotechnology
Biotechnology
Analytics

PrismaPlus
with Faraday Q Q Q
detector
Q Q Q Q Q Q Q Q Q Q
Q Q Q
Q Q Q Q Q Q Q Q Q
Q Q Q Q Q Q 100
100
Residual gas analysis in ultra-high vacuum

PrismaPlus
with C-SEM- Q Q Q
detector

OmniStar
Q Q
Q Q Q Q Q
Q Q 106
ThermoStar
Q Q
Q Q Q Q Q
Q Q 106

Q
HPA 220
Q Q Q Q Q
Q Q Q Q Q Q Q Q Q Q Q
Q Q Q Q
110
Q Q Q Q
112
Gas analysis in the pressure range of up to 10-2 hPa

Q
SPM 220
Q Q Q Q Q

HiQuad
Q Q Q Q
Q Q Q Q Q Q Q Q
Q Q Q
Q Q
Q Q
Q Q Q Q Q Q
Q Q Q 116
Part 3.2 / Page 89
Ionic source /
optics
Detector
Detection limit
Page
Maximum
inlet
pressure
Electron multiplier + Faraday

5 10-16 (SEM 217/Faraday)
1 10-14 (C-SEM)
2 10-14 (C-SEM)
4 10-14 (C-SEM)
1 10-12 (Faraday)
2 10-12 (Faraday)
4 10-12 (Faraday)
5 10-12 (Faraday)
1 10-11 (Faraday)
2 10-11 (Faraday)
0.1 ppm (C-SEM)
1 ppm (C-SEM)
20 ppm (Faraday)
40 ppm (Faraday)
100 ppm (Faraday)
Mass range
Capillary
1-100 u
1-128 u
1-200 u
1340 u
1-300 u
1-512 u
1-1,024 u
1-2,048 u
1 10-5 hPa (C-SEM)
1 10-4 hPa (Faraday)
10 hPa
50 hPa
1,000 hPa
Axial
Cross-beam
Cross beam, gas tight
Open ion source
Gas tight ion source
Grid ion source
Ion optics
Faraday
Flange (CF-F)
Inlet

PrismaPlus QMG 220 F1 Q
100
Q
100
Q
100
Residual gas analysis in ultra high vacuum

PrismaPlus
QMG 220 M1
PrismaPlus
QMG 220 M2
PrismaPlus
QMG 220 M3
Q
Q
Q
Q Q
Q Q Q
Q Q
Q Q
Q Q Q
Q Q
Q Q
Q Q Q
Q Q
Q Q
Q Q
Q Q
Q Q
Q Q
Q Q
Q Q
Q Q
100
Q
100
Q
100

OmniStar GSD 320 O1,
1100 u
Q Q

1200 u

1300 u
ThermoStar GSD 320 T1,

1100 u
Q Q

1200 u

1300 u
Q
Q
Q
Q
106
Q
106
Q 106
106
106
Q 106

HPA 220, 1100 u
HPA 220, 1200 u
HPA 220, 1300 u
Q
Q
Q
Q Q
Q Q
Q Q
Q
Q
110
Q
110
Q
110

SPM 220, 1100 u
SPM 220, 1200 u
Q
Q
Q Q
112
Q Q
112

HiQuad, QMG 700,
with QMA 410, 16 mm
Mo-rod system, 1128 u
HiQuad, QMG 700,

with QMA 410, 16 mm
Mo-rod system, 1340 u
HiQuad, QMG 700,

with QMA 430, 8 mm
Q
stainless steel rod system
HiQuad, QMG 700,
with QMA 400, 8 mm
Mo-rod system
Q Q
Q Q Q
Q Q Q Q Q
Q Q
Q Q Q
Q Q Q Q
Q Q
Q Q Q
Q Q Q Q Q
Q Q Q
116
Q Q Q Q
116
116
116
The HiQuad series is a modular system that can be very flexibly adapted to any given application.
PPM plasma monitors are also available on request for energy analysis as are EPD end point detectors for etching processes.
Page 90 / Part 3.2
Customer benefits
Q
Q
Q
Q
Q
Easily adapted to meet a variety of measurement tasks

Easy to operate even during quantitative gas analysis
Easy, flexible system integration
Highly sensitive, quick measurements
Precise process monitoring
Part 3.2 / Page 91
Overview of technologies
With the compact PrismaPlus and the high-resolution

HiQuad, Pfeiffer Vacuum offers two basic models of
quadrupole mass spectrometers, which have excellent
technological advantages.
Filament
e-
+ 75 V DC
Ionization
+ 150 V DC
Biased ionization chamber

The high electrical potential of the ionization chamber
results in an extremely low background signal. The
electron-emitting filament is positively biased relative
to ground. This design prevents desorption of gas
particles from the chamber walls, and thus the generation of an undesired background signal by electron
stimulated desorption.
Mass filter
Ions
Ions
Ionization
(10 eV energy)
100 eV
energy
+ 150 eV
+160 V
Field-axis technology
One of the most important factors for the performance
of a mass spectrometer is the transfer of ions from
the ion source to the mass filter. With the aid of fieldaxis technology, the ions are able to cross the peripheral
fields of the separating system without any noteworthy
interaction. It is thus possible to achieve higher sensitivities (A/hPa) without pre and post filters.
Page 92 / Part 3.2
QUADERA mass spectrometer software
Operation of quadrapole mass spectrometers including the

display, evaluation and saving of data is carried out on
a PC. The QUADERA software with its modular structure
offers a clear and user-friendly platform and pre-configured
measuring procedures allowing for the presentation of
measured data as well as the handling of parameter
settings with a few mouse clicks. Complete measuring
procedures can be generated with no programming skills.
QUADERA can be used with PrismaPlus and HiQuad
as well as any mass spectrometer systems based on these
devices. The PC is connected via Ethernet to the mass
spectrometer. It provides networking capacity, freely adjustable line length and the opportunity to operate the mass
spectrometer from various PC work stations. The software
generates the interface between the mass spectrometer
and the user for settings and measurements. The simple,
clear controls and ability to display external signals together
with mass spectrometer data are what really matters to
the user.
Unit selection
Selection window
Tools, aids
Templates
Calibration and tuning
Part 3.2 / Page 93
Measurement modes
The window interface of the Quadera software may be
freely configured. Different user-defined views of a
measurement can be displayed simultaneously. Prepared
templates are available at a mouse click for typical
measurement tasks such as the scan of a mass range as
analog or bar graph, scan of certain masses, residual
gas analysis or leak detection.
The mass spectrometer must be calibrated before

quantitative analysis can be performed. If this involves
recurring processes, such as calibration with subsequent
quantitative analysis, these processes can be automated
using a scripting language (VSTA = Visual Studio for
Applications)*. Since pre-configured modules may be
used to do so, an extensive measurement project can be
generated quickly.
* Microsoft Copyright
Bargraph portrayal of the ion current and its curve as a

function of time
Leak detection with helium Visualization as a function of time

Page 94 / Part 3.2
Analog spectrum of air
Analysis of air as ion current and concentration as a function of time
Measurement of different masses vs. time

Display as partial pressure in hPa
Part 3.2 / Page 95
Gas analysis
Quadrupole mass spectrometers require a working pressure of less than 1 10-4 hPa under high vacuum. To
analyze gases at higher pressures, as are encountered in
many vacuum processes, a perfectly coordinated system
is required, consisting of a mass spectrometer, a gas inlet
with a separation-free pressure reducing valve, vacuum
pumping stations and total pressure measurement.
With its quadrupole mass spectrometer-based products,
Pfeiffer Vacuum provides the perfect solution for analyzing every gas in the ultra-high vacuum range right up to
atmospheric pressure.
Owing to the modular design and the use of high-quality,
proven components, these instruments can be ideally
adapted to cope with practically every measuring task.
Our experienced product and applications specialist
are available to assist you in selecting a suitable analytical
system for your particular application.
60 sek
High measurement speed up to 125 s/u

With the HiQuad mass spectrometer very fast measurements can be made. This example shows the mass
spectrometer response during respiration analysis. N2, O2
and CO2 were detected with a very fast cycle time.
Xe
Wide dynamic range

The figure shows a spectrum for air. In addition to the
primary components of N2, O2, Ar and CO2 even the
smallest concentrations of Xe are detected. The ion
current at mass 136 is equivalent to a concentration of
7.8 ppb Xe in the air. However, the ion current is several
decades above the background noise level, allowing
large dynamic range of 10 decades to be achieved.
Page 96 / Part 3.2
90 off-axis secondary electron multiplier (SEM)

The task of the secondary electron multiplier is to
increase the sensitivity of the mass spectrometer.
In the HiQuad, the multiplier is attached in the vacuum
at a right angle to the rod system. This prevents weak
X-rays and photons from reaching the detector and
generating background noise. In combination with an
ion-counting arrangement, it is possible to generate
very low background noise level and a wide dynamic
range. The spectrum shown displays a very low count
of ArH+-Ions, which were generated in a plasma.
Faraday cup
Mass filter
Inlet port
Deflection unit
90 off axis SEV
Housing
SEV
217/218
Counts per second [CPS]
Ions from a DC-Argon plasma
Ar40+
1000000
100000
ArH +
10000
Ar36+
1000
100
10
Noise level below 0.1 CPS
1
(1 CPS = 1.6 10 -19 ampere)
0.1
32
34
36
38
40
42
Mass number [u]
Part 3.2 / Page 97
PrismaPlus
The perfect solution for mass spectrometry
Page 98 / Part 3.2
3.2 Vacuum measurement, analysis, leak detection / Analytical equipment / Residual gas analysis / PrismaPlus
PrismaPlus
The combination of high sensitivity, stability and
intelligent controls make the PrimaPlus the perfect
solution for mass spectrometry.
Its modular design offers you a variety of application

options in industrial and analytical environments, in
research & development, in leak detection and semiconductor production, as well as in coating technology.
The PrismaPlus is the ideal solution for applications
ranging from quality assurance and residual gas analysis
right through to complex, quantitative tasks.
The wide selection of interfaces such as digital and
analog inputs and outputs and the connection facility
for DigiLine and ActiveLine transmitters allow for easy
system integration.
Customer benefits
Q Ideal adjustment capability for wide-ranging
measurement tasks
Q Easy installation due to its compact dimensions
and 90 degree version
Q Networkable through Ethernet
Q Intuitive operation using QUADERA software
Accelerators
Q Qualification of vacuum systems
Q Leak detection on vacuum chambers
Q Determination of outgassing rates
Research & Development
Part 3.2 / Page 99
PrismaPlus QMG 220

Q
Q
Dimensions (in mm)
118
128
55,1
37
141
37
DN 40 CF-F
DN 40 CF-F
28,5
313
118
DN 40 CF-F
6,7
229,7
172
37
6,7
Crossbeam ion source
60 10 10
QMG 220 F 0
QMG 220 F 90
83*
130
128
55,1
141
37
DN 40 CF-F
37
Robust and economic residual gas analysis and

vacuum process monitoring in the high vacuum range
Interchangeability of analyzers and electronics
Two filaments mean maximum up-time
184
28,5
DN 40 CF-F
6,7
313
130
DN 40 CF-F
83*
229,7
37
6,7
60 10 10
QMG 220 M 0
QMG 220 M 90
Scope of delivery
+
I/O-Module 220
(optional)
Page 100 / Part 3.2
Electronics unit
QME 220
0 or
90 connection
+
Analyzer
QMA 200
Faraday or
C-SEM/Faraday
SP 220 power supply

including mains cable
Software
Technical data
PrismaPlus
QMG220 F1
PrismaPlus
QMG220 F2
PrismaPlus
QMG220 F3
Detector
Faraday
Faraday
Faraday
Mass range
1 100 u
1 200 u
1 300 u
Rod system, diameter/length
6 mm / 100 mm
6 mm / 100 mm
6 mm / 100 mm
-12
Min. detection limit, Faraday
1 10
1)
Ar sensitivity, Faraday
2)
hPa
-12
2 10
hPa
4 10-12 hPa
-3
1 10 A/hPa
-4
6 10 A/hPa
3 10-4 A/hPa
-4
-4
1 10 hPa
1 10 hPa
1 10-4 hPa
Contribution to adjacent mass (40/41)
< 10 ppm
< 30 ppm
< 50 ppm
Operating temperature, analyzer
150 C
150 C
150 C
Operating temperature, electronics
0 40 C
0 40 C
0 40 C
Operating pressure, max , Faraday operation

1)
3)
Bakeout temperature, analyzer
200 C/300 C
200 C/300 C
200 C/300 C
Connection flange
DN 40 CF-F
DN 40 CF-F
DN 40 CF-F
Resolution at 10 % peak height
0.5 2.5 u
0.5 2.5 u
0.5 2.5 u
Measuring speed, analog/bargraph scan
20 ms 60 s/u
20 ms 60 s/u
20 ms 60 s/u
Measuring speed, Stair
2 ms 60 s/u
2 ms 60 s/u
2 ms 60 s/u
Measuring speed, MID
2 ms 60 s/u
2 ms 60 s/u
2 ms 60 s/u
Number of measuring channels in MID
128 pieces
128 pieces
128 pieces
Reproducibility of peak ratio3)
0.5 %
0.5 %
0.5 %
Interface
Ethernet
Ethernet
Ethernet
Input, digital
External protection,
24 V
24 V
24 V
Supply voltage
90 260 V AC,
50/60 Hz
90 260 V AC,
50/60 Hz
90 260 V AC,
50/60 Hz
Weight4)
2.4 kg
2.4 kg
2.4 kg
Technical data
PrismaPlus
QMG220 M1
PrismaPlus
QMG220 M2
PrismaPlus
QMG220 M3
Detector
C-SEM/Faraday
C-SEM/Faraday
C-SEM/Faraday
Mass range
1 100 u
1 200 u
1 300 u
Rod system, diameter/length
6 mm / 100 mm
6 mm / 100 mm
6 mm / 100 mm
Min. detection limit, Faraday1)
5 10-12 hPa
1 10-11 hPa
2 10-11 hPa
Min. detection limit, C-SEM1)
1 10-14 hPa
< 2 10-14 hPa
< 4 10-14 hPa
1)
-4
Ar sensitivity, Faraday
1)
-4
5 10 A/hPa
3 10 A/hPa
1,5 10-4 A/hPa
Ar sensitivity, C-SEM
200 A/hPa
200 A/hPa
100 A/hPa
Operating pressure, max.2), Faraday operation
1 10-4 hPa
1 10-4 hPa
1 10-4 hPa
Operating pressure, max, C-SEM operation
1 10-5 hPa
1 10-5 hPa
1 10-5 hPa
Contribution to adjacent mass (40/41)
< 10 ppm
< 20 ppm
< 50 ppm
Operating temperature, analyzer
150 C
150 C
150 C
Operating temperature, electronics
0 40 C
0 40 C
0 40 C
Bakeout temperature, analyzer3)
200 C/300 C
200 C/300 C
200 C/300 C
Connection flange
DN 40 CF-F
DN 40 CF-F
DN 40 CF-F
Resolution at 10 % peak height
0.5 2.5 u
0.5 2.5 u
0.5 2.5 u
Measuring speed, analog/bargraph scan
20 ms 60 s/u
20 ms 60 s/u
20 ms 60 s/u
Measuring speed, Stair
2 ms 60 s/u
2 ms 60 s/u
2 ms 60 s/u
Measuring speed, MID
2 ms 60 s/u
2 ms 60 s/u
2 ms 60 s/u
Number of measuring channels in MID
128 pieces
128 pieces
128 pieces
1)
3)
Reproducibility of peak ratio
0.5 %
0.5 %
0.5 %
Interface
Ethernet
Ethernet
Ethernet
Input, digital
24 V
24 V
24 V
Supply voltage
90 260 V AC,
50/60 Hz
90 260 V AC,
50/60 Hz
90 260 V AC,
50/60 Hz
Weight4)
3.8 kg
3.8 kg
3.8 kg
1)
2)
3)
4)
For open ion sources

For ion currents reduced to 0.2 mA: 1 103 hPa
Defined by order number
For version with electronics and analyzer on one axis (0)
Part 3.2 / Page 101
1)
I/O module - connection options

Analog outputs
Analog input
Digital outputs
Digital inputs
Number
16
Specification
0 10 V
-10 +10 V
Vout = 24 V
Vin = 24 V
Resolution
12 bit
14 bit
Application examples
Reading in external
values, e. g. pressure,
temperature, gas flow
Measured values,
e. g. ion currents
Ratios (concentrations)
Data transfer to
higher-level systems
Free assignment
of switchpoints
Valve actuation
Starting or stopping of
measurement tasks by
means of external signal
Total pressure
measurement with
DigiLine
Total pressure measurement

with ActiveLine
Ethernet
SP 220 power supply

L x W x H:
145 x 75 x 40 mm
24 V DC
Cable length: 3 m
Weight: 0.7 kg
Voltage: 90 260 V AC
Frequency: 50 60 Hz
Page 102 / Part 3.2
Order number matrix

PrismaPlus
Detector version1)
Order number
PT M0 a b c d e f g
a
Faraday
only for leak detection and high-vacuum residual gas analysis
C-SEM/Faraday;
C-SEM = Continuous secondary electron multiplier for fast
and sensitive residual analysis in the UHV, analytical tasks
and leak detection
Mass range
1100 u
1200 u
1300 u
Ion source
Open ion source

for high-vacuum residual gas analysis; high sensitivity
and good linearity
Gas-tight ion source

for combination with gas inlet systems; low gas
consumption, high signal-to-noise ratio

for direct gas beam inlet without interaction with the walls
of the ion sources; electron energy adjustable from
0 to 100 eV
Grid ion source2)

for UHV residual gas analysis; minimum outgassing and
desorption rates
Open ion sources for high-vacuum residual gas analysis;

high sensitivity and good linearity; electron energy
adjustable from 0 to 100 eV
Filament
Tungsten;
for UHV applications
Yttriated iridium:
low filament temperature; high resistance to air inrushes
Bakeout temperature3)
to 200 C
to 300 C
Connection4)
0 (on one axis)
90 off axis
I/O interface5) and VSTA software extension
Without option
With I/O module for control and signal interchange via

analog and digital inputs/outputs
With VSTA software extension for programming program

sequences and for exchanging commands and data with
other programs
with I/O module and VSTA software extension
1)
1)
Only with open ion source

Grid ion source with tungsten filament only
3)
Electronics removed
4)
See dimensions page 100
5)
See page 102
2)
Part 3.2 / Page 103
OmniStar / ThermoStar
Gas analysis at atmospheric pressure
Page 104 / Part 3.2
3.2 Vacuum measurement, analysis, leak detection / Analytical equipment / Gas analysis / OmniStar/ThermoStar
Customer benefits
Q Qualitative and quantitative gas analysis,
connection for calibrating gas inlet
Q Low detection limit ( < 1 ppm)
even for condensable gases
Q Compact, easy-to-operate analysis unit
Q Heated capillary inlet up to 350 C
Q Small footprint
Q Easy to use even for quantitative gas analysis
Q Gas analysis under varying sample pressures
pressure-regulated gas inlet (optional)
OmniStar and ThermoStar, compact bench top analyzers

are two ideal complete solutions for sample gases
present at atmospheric pressure. They are based on the
PrismaPlus quadrupole mass spectrometer and a dry
pumping station, composed of a diaphragm vacuum
pump MVP and a HiPace turbopump. They have a heated
and temperature controlled gas inlet system and are
suitable for the qualitative and quantitative analysis of
gases.
Chemical applications
Q Chemical analysis
Q Fermentation
Q Catalysis
Q Laser technology
Q Environmental analysis
Q Fuel cells
Laser
Thermo balances
Part 3.2 / Page 105
Q
Q
Q
Q
Qualitative and quantitative gas analysis, connection

port for calibrating gas inlet systems
Low detection limit ( < 1 ppm) even for condensable
gases
Compact, easy-to-operate analysis unit
Heated capillary inlet up to 350 C
Bakeable all-metal sealed high vacuum chamber for low
backgrounds
Dimensions (in mm)

45
500
395
305
Page 106 / Part 3.2
Technical data
OmniStar
ThermoStar
Mass ranges
1100 u
1-200 u
1-300 u
1100 u
1200 u
1300 u
Gas connection
Stainless steel
capillary
Quartz glass
capillaries
Gas inlet
via software or user

interface-controlled
inlet valve
continuously open
Pressure reduction
2-stage,
segregation-free
2-stage,
segregation-free
Gas flow rate
12 sccm
12 sccm
Sample gas pressure
Up to 1,000 hPa
Up to 1,000 hPa
Capillary operating temperature
Up to 350 C
Up to 350 C
Analyzer
QMA 200 M
QMA 200 M
Rod system, material/diameter/length
Stainless
steel/6/100 mm
Stainless
steel/6/100 mm
Detector
C-SEM/Faraday
C-SEM/Faraday
Mass spectrometer electronics
QME 220 M
QME 220 M
Software
Quadera
Quadera
Contribution to neighboring mass: 40 41

1 100 / 200 / 300 U
< 10 ppm / < 20 ppm < 10 ppm / < 20 ppm

/ < 50 ppm
/ < 50 ppm
Min. detection limit, C-SEM

1 100 / 200 / 300 U
< 1 ppm / < 1 ppm /

< 1 ppm
Min. detection limit, Faraday

1 100 / 200 / 300 U
< 20 ppm / < 40 ppm < 20 ppm / < 40 ppm

/ < 100 ppm
/ < 100 ppm
Resolution, settable at 10% peak height
0.5 2.5 u
Dimensions (L x W x H)
545 x 305 x 395 mm 545 x 305 x 395 mm
Weight
35 kg
35 kg
100 230 VAC
100 230 VAC
Interface
Ethernet
Analog input:
5 x 10 V / 12 bit
Analog output: 4 x
0...10 V / 12 bit
Digital input: 4 x
Digital output: 7 x
optical insulated, 24 V
Ethernet
Analog input:
5 x 10 V / 12 bit
Analog output: 4 x
0...10 V / 12 bit
Digital input: 4 x
Digital output: 7 x
optical insulated, 24 V
< 1 ppm / < 1 ppm /

< 1 ppm
0.5 2.5 u
Order number matrix

Order number
System
OmniStar
ThermoStar
Analyzer/Filament
bc
Filament: Yttriated iridium, integrated option for mass calibration
01
Filament: Yttriated iridium
02
Filament: Tungsten, integrated option for mass calibration
05
Filament: Tungsten
06
Filament: Yttiriated iridium, integrated option for mass calibration,

corrosive gas version with inert gas inlet
11
Filament: Yttiriated iridium, corrosive gas version with inert gas inlet
12
Filament: Tungsten, integrated option for mass calibration,

corrosive gas version with inert gas inlet
15
Filament: Tungsten, corrosive gas version with inert gas inlet
16
Gas inlet system
def
ThermoStar, Quartz, 1 m temperature-regulated gas sampling line, 200 C
111
112
113
OmniStar, quartz (special), 1 m temperature-regulated gas sampling line, 200 C
151
OmniStar, quartz (special), 2 m temperature-regulated gas sampling line, 200 C
152
OmniStar, stainless steel, 1 m temperature-regulated gas sampling line, 200 C
171
172
173
-3
Pressure-regulated gas inlet, 5 decades, 5 10 hPa up to atmospheric pressure
PT M a bc def g h
555
Mass range
1100 u
1200 u
1300 u
Front panel
OmniStar
ThermoStar
Heated gas inlet chamber
Temperature-regulated
gas sampling line (capillary)
Heater for analysis
chamber conditioning
Mass spectrometer
PrismaPlus
Turbopump
HiPace 80
Diaphragm pump
MVP 030-3
User interface
Temperature-regulated
gas sampling line (capillary)
Quadera An INFICON product

VSTA A Microsoft product
Part 3.2 / Page 107
HPA 220 and SPM 220
Gas analysis for vacuum processes
Page 108 / Part 3.2
3.2 Vacuum measurement, analysis, leak detection / Analytical equipment / Gas analysis / HPA 220 and SPM 220
HPA 220 and SPM 220

Many vacuum processes take place in the medium
vacuum range. To analyze these processes,
Pfeiffer Vacuum offers two compact systems based
on the quadrupole mass spectrometer PrismaPlus
and a HiPace turbopumping station.
Realtime sputter process gas analysis

The Sputter Process Monitor SPM 220 provides the perfect solution for qualitative and quantitative gas analyses
of sputter processes. The specially developed SPM
ion source enables precise up-to-the-minute process gas
analysis up to a pressure of 10-2 hPa. An optional version
with differentially pumped orifice flange for pressures
of up to 10 hPa is available.
Gas analysis up to low vacuum range

The High Pressure Analyzer HPA 220 is a modular and
flexible mass spectrometer system with a dry
turbopumping station for gas analysis in a vacuum up
to pressures of 50 hPa. Depending on its use, with
the HPA 220, five different electropneumatic as well as
manually operated gas inlet valves can be selected.
Glass coating
Customer benefits
Exact real time process monitoring
Q Easy, flexible system integration
Q Excellent detection limits for
H2, O2, H2O as well as CO2
Q Optimal adaptation to numerous measurement tasks
Q Easy, flexible system integration
Q Control of several devices via a single PC
Q
Q Architecture and optical glass coating
Q Thin-film solar cell production
Q Semiconductor production
Q Hard coatings
Q Metallurgy
Q Vacuum furnaces
Q Research & development
Semiconductors
Metallurgy
Part 3.2 / Page 109
3.2 Vacuum measurement, analysis, leak detection / Analytical equipment / Gas analysis / HPA 220
HPA 220
Q
Q
Q
Provides great flexibility due to its 5 manually or

electropneumatically operated gas inlet options
for analyzing, monitoring and controlling processes
up to a pressure of 50 hPa
Easy and flexible system integration through a variety
of digital and analog inputs and outputs
Multiplex operation allows data evaluation of several
mass spectrometer software systems with a single PC
Compact dimensions for flexible integration
Dimensions (in mm)

D
UDV 040
DN 40 CF
VCR 1/4,
female
Version
HPI 040 H
290 mm
380 mm
415 mm
HPI 040, P
350 mm
290 mm
380 mm
415 mm
Double gate valve, manual
290 mm
380 mm
446 mm
Double gate valve, pneumatic
350 mm
290 mm
380 mm
446 mm
UDV 040
290 mm
380 mm
479 mm
System overview
Mass spectrometer
PrismaPlus
1 100 u
1 200 u
1 300 u
Vacuum gauge
ActiveLine PKR 251
for monitoring the pressure
and protecting the filaments
Page 110 / Part 3.2
Gas inlet system

1,2) Valve interface HPI 040
3,4) Double gate valve
5) Gas dosing valve UDV 040
Valve control unit

VCU 220
for electropneumatic
gas inlet systems
Turbopump
HiPace 80 with
TC 110 RS
with 4 accessory ports +
backing pump MVP 030-3
(not shown)
19" rack unit

BRU 220
Integrated power supply pack
TPS 311. Additional options:
Heating control, display and
control units (DCU for turbopumps
and TPG for vacuum gauges)
3.2 Vacuum measurement, analysis, leak detection / Analytical equipment / Gas analysis / HPA 220
Order number matrix

HPA 220
Order number
Mass range
1 100 u
1 200 u
1 300 u
Ion source and filament
Open ion source, filament: yttriated iridium
Open ion source, filament: tungsten
Gas inlet system
HPI 040 P, bellows-sealed gate valve, DN 40 CF, electropneumatically

operated, two bypass valves with 0.1 mm and 0.3 mm orifices,
0.03 mm third orifice included
HPI 040 P, bellows-sealed gate valve, DN 40 CF, electropneumatically

operated, two bypass valves with 0.1 mm and 0.3 mm orifices,
0.03 mm third orifice included
Double gate valve, DN 40 CF, manually operated, one gate opens

to release full cross-section, one gate with 0.1 mm orifice
Double gate valve, DN 40 CF, electropneumatically operated,

one gate opens to release full cross-section, one gate with 0.1 mm orifice
UDV 040, gas dosing valve, manually operated, VCR 1/4
Cable length and accessory option
3 m, without option
3 m, with TPG display and control unit
3 m, with DCU display and control unit
3 m, with TPG and DCU display and control units
10 m, without option
PT M 5 a b c d
1, 2) Valve interface HPI 040

Manually or electropneumatically operated. Consists of three
valves, a bellows-sealed gate valve with a nominal diameter
of DN 40 CF for residual gas analysis or leak detection up to
< 1 10-4 hPa and two valves with exchangeable orifices
in the bypass. One 0.03 mm orifice for extending the range to
8 hPa (N2) is enclosed.
1,2)
3, 4) Double gate valve

Manually or electropneumatically operated. Consists of two
bellows-sealed gate valves which are welded together.
One gate with a nominal diameter of DN 40 CF for residual gas
analysis or leak detection up to < 1 10-4 hPa and a second
gate with an exchangeable orifice. Delivered ready fitted with a
0.1 mm orifice for the pressure range 0.1 to 1 hPa (N2).
3,4)
5) Gas dosing valve UDV 040

Manually adjustable gas dosing valve for pressure adjustment
up to 50 hPa. The maximum possible and reasonable pressure
range is determined particularly by the increasing gas
segregation which occurs at progressively high pressures.
5)
Part 3.2 / Page 111
3.2 Vacuum measurement, analysis, leak detection / Analytical equipment / Gas analysis / SPM 220
SPM 220
Q
Q
Q
Q
Q
Q
Q
Q
SPM ion source for instantaneous process monitoring

Excellent detection limits for H2, O2, H2O and CO2
Minimized background influence on the measurement
result
For directly analyzing, monitoring and controlling
processes up to 10-2 hPa
Differentially pumped version for pressures of up
to 10 hPa
Multiplex operation allows data evaluation of several
mass spectrometer software systems with a single PC
Compact dimensions for flexible integration
Easy and flexible system integration through a variety
of digital and analog inputs and outputs
Dimensions (in mm)

D
Version
without addition
290 mm
380 mm
with SVV 040 safety valve
350 mm
290 mm
380 mm
416 mm
with a flange with orifice
290 mm
380 mm
395 mm
System overview
Gas inlet system

Safety valve SVV 040
Orifice flange (differentially pumped)
Mass spectrometer
PrismaPlus
1100 u
1200 u
Vacuum gauge
ActiveLine PKR 251
for monitoring the pressure
and protecting the filaments
Page 112 / Part 3.2
Valve control unit

VCU 220
for electropneumatic safety
valve SVV 040
Turbopump
HiPace 80 with
TC 110 RS
with 4 accessory ports +
backing pump MVP 030-3
(not shown)
19" rack unit

BRU 220
Integrated power supply pack
TPS 311. Additional options:
Heating control, display and
control unit (DCU for turbopumps and TPG for vacuum
gauges)
3.2 Vacuum measurement, analysis, leak detection / Analytical equipment / Gas analysis / SPM 220
Order number matrix

SPM 220
Order number
Mass range
1 100 u
1 200 u
Ion source and filament
SPM ion source, filament: yttriated iridium
SPM ion source, filament: tungsten
Gas inlet system
Without
Safety valve SVV 040 PM, electropneumatically operated
Differentially pumped DN 40 CF flange with orifice for a pressure range

of up to 10 hPa
Cable length and accessory option
3 m, without option
10 m, without option
PT M 5 a b c d
Part 3.2 / Page 113
HiQuad
High end mass spectrometer for gas and ion analysis
Page 114 / Part 3.2
3.2 Vacuum measurement, analysis, leak detection / Analytical equipment / Gas analysis / HiQuad
HiQuad
HiQuad is a modular system whose highly precise

components can be optimally selected to build a system
for gas and ion analysis in many applications. HiQuad
offers the highest sensitivity and a dynamic range
of 10 decades allowing simultaneous measurement of
ppb 100 x and impressive measurement speeds of
up to 125 s/mass. The QUADERA software makes
it particularly easy to operate the mass spectrometer.
The HiQuad can be flexibly configured:
Q Mass ranges of 1128 u to 12048 u
Q Rod systems of various lengths and diameters
Q Ion source for UHV, high pressure and beam analysis
Q Ion optics for plasma processes
Q Secondary electron multiplier and ion counter
Q Various interface options
Pfeiffer Vacuum application specialists are happy to
put together the best solution for your application.
Accelerators
Customer benefits
Q Highly sensitive measurements
Q Wide dynamic range
Q High measuring speed
Q Excellent long-term stability
Q Residual gas analysis in ultra-high vacuum
Q Environmental trace analysis
Q Pharmaceutical research
Q Analysis of plasma processes
Nanotechnology
Pharmaceutics
Part 3.2 / Page 115
HiQuad OMG 700
The modular solution for mass spectrometry

Q Modular, flexible design
Q Simple operation with Quadara software
Q Extremely high measurement speed
Q Maximum sensitivity and wide dynamic range
Q Outstanding long-term stability
Q Ethernet interface
Q Integrated internet browser and OPC server for
communication with PC-based programs
Dimensions (in mm)
*
Axial ion source = 26 mm
Grid ion source = 27 mm
Cross beam ion source =
35.5 mm (23.55 to the center
of the sensitive volume)
Gas tight cross beam ion source
= 48 mm (axial gas connection)
Three-lens ion optics = 129 mm
Cross beam ion source with axial
ion optics = 43.5 mm
Cross beam ion source with
three-lens ion optics = 171 mm
Analyzer QMA 410 with 90 off axis SEM
*
Axial ion source = 26 mm
Grid ion source = 27 mm
Cross beam ion source = 35.5
mm (23.55 to the center of the
sensitive volume)
= 48 mm (axial gas connection)
Three-lens ion optics = 129 mm
Cross beam ion source with axial
ion optics = 43.5 mm
Cross beam ion source with
three-lens ion optics = 171 mm
Analyzer QMA 400, QMA 430 with 90 off axis SEM
Page 116 / Part 3.2
HiQuad OMG 700

1128 u
HiQuad OMG 700

1 340 u
HiQuad OMG 700

1 300 u
Mass range
1128 u
1 340 u
1 300 u
Min. detection limit
5 10-16 hPa
1 10-15 hPa
2 10-15 hPa
Ar sensitivity, min1)
1 10-3 A/hPa
5 10-4 A/hPa
2 10-4 A/hPa
-4
-4
Operating pressure, max. Faraday, max.

SEM, max.
1 10 hPa
1 10-5 hPa
1 10 hPa
1 10-5 hPa
1 10-4 hPa
1 10-5 hPa
Partial pressure ratio with SEM
< 0.3 ppb
< 0.5 ppb
< 1 ppb
Analyzer
QMA 410
QMA 410
QMA 430
Rod system, material/diameter
Mo/16 mm
Mo/16 mm
Stainless steel/8 mm
Radio frequency generator (RF)
QMH 400-1
QMH 410-3
QMH 400-5
Electrometer preamplifier
EP 422
EP 422
EP 422
Operating temperature/analyzer
150 C
150 C
150 C
Bakeout temperature/analyzer
4002) C
4002) C
4002) C
Connection flange
DN 100 CF-F
DN 100 CF-F
DN 63 CF-F
Technical data
HiQuad OMG 700

1 5123) u
HiQuad OMG 700

1 1,024 u
HiQuad OMG 700

1 2,048 u
Mass range
1 512 u
1 1,024 u
1 2,048 u
-15
Min. detection limit
1 10
Ar sensitivity, min1)
5 10-4 A/hPa
2 10-4 A/hPa
1 10-4 A/hPa
Operating pressure, max. Faraday, max.

SEM, max.
1 10-4 hPa
1 10-5 hPa
1 10-4 hPa
1 10-5 hPa
1 10-4 hPa
1 10-5 hPa
Partial pressure ratio with SEM
< 0.5 ppb
< 5 ppb
< 20 ppb
Analyzer
QMA 400
QMA 400
QMA 400
Rod system, material/diameter
Mo/8 mm
Mo/8 mm
Mo/8 mm
Radio frequency generator (RF)
QMH 400-5
QMH 410-1
QMH 410-2
Electrometer preamplifier
EP 422
EP 422
EP 422
Operating temperature/analyzer
150 C
150 C
150 C
Bakeout temperature/analyzer
4002) C
4002) C
4002) C
Connection flange
DN 63 CF-F
DN 63 CF-F
DN 63 CF-F
hPa
1)
Faraday in the deflection unit, standard resolution, cross beam ion source with magnet, emission 1 mA
With magnet, max. 300 C
3)
Excellent performance data: Stability < 0.1 % over eight hours, contribution to adjacent mass < 0.1 ppm for the mass
40 and 41 u
2)
System overview
CP 400
EP 422
Analyzer
QMA 400
QMA 410
QMA 430
Preamplifier
and ion counter
RF generator
QMH 400
QMH 410
Control unit
HiQuad
Software
Part 3.2 / Page 117
Technical data
Selection aid typical applications and solutions
01
Preamplifier and
ion counter
Interface options
Filament
Applications
Detector and high-voltage

power supply
bc
Ion source/ion optics
Analyzer/mass range
PTQ1
General gas analysis
3, 5
1, 2, 3
1, 4
1, 2, 3
Particle-beam and general gas analysis
2, 3, 4, 5, 6, 71) 02, 03
1, 2
1, 3
1, 4
1, 2, 3
Analysis of gases or gas mixtures; for trace analysis;

less residual gas influence than with open ion sources
2, 3, 5
04, 05
1, 2
1, 2
1, 4
1, 2, 3
Plasma technology, SIMS, photoionization
11
1, 2
1, 2
1, 2, 3, 4
1, 2, 3
UHV residual gas analysis, desorption measurements
4, 5, 61)
062)
1, 2
1, 2
1, 2, 3
Thermally desorbed ions, electron-induced desorption,

SIMS, photoionization, plasma ions
3, 5, 6
10, 11
1, 2, 3
1)
2)
For the mass range 1 to 2,048 u, analyzer QMA 400 with SEM 218 and HV 702 and EP 422.
With tungsten filament only
a Analyzer/ Mass range

The combination of analyzer and RF generator defines
the mass range. The smallest suitable mass range for the
application should be selected. The larger-diameter,
precision-manufactured rod system affords improved
transmission and higher sensitivity.
Q QMA 410: Molybdenum, 16 mm rod system
Q QMA 430: Stainless steel, 8 mm rod system for
mass range of up to 300 u
Q QMA 400: Molybdenum, 8 mm rod system
bc Ion source /ion optics
Selection of the correct ion source is a crucial factor in
the measurements.
Q Axial ion source: High sensitivity and good linearity
Q Cross beam ion source: For a direct gas beam inlet
without wall interaction
Q Cross beam with magnet: High sensitivity
Q Cross beam gas tight: Low gas consumption,
high signal-to-noise ratio
Q Grid ion source: Low outgassing and desorption rate
Q Three-lens ion optics with beam stop:
For detection of positive and negative ions
Q Ion optics with cross beam ion source:
For detecting of neutrals and ions
e Detector and high-voltage power supply

Q SEM 217 + HV 701: Secondary electron multiplier
in combination with a high-voltage power supply for
detecting positive ions
Q SEM 217 + HV 702: For measuring positive and
negative ions
Q SEM 218 + HV 702: Secondary electron multiplier
with conversion dynode to detect high masses
f Preamplifier and ion counter
Q EP 422: Fast and sensitive preamplifier
Q CP 400: Ion counting down to 1 count per
10 seconds, wide dynamic range
g Interface options
Q IO 700 module with 8 analog inputs and 8 analog o
utputs; 0 to 10 V, 12-bit resolution, 32 digital inputs
and 32 digital outputs
Q CAN Open Fieldbus
Q IO 720 module with
16 digital outputs and
4 digital inputs;
4 analog outputs and
5 analog inputs and
1 connection for ActiveLine transmitter or
connection for DigilLine transmitter.
d Filament
Q Tungsten: For UHV applications
Q Yttriated iridium: Low temperatures,
high resistance to air inrushes
Q Rhenium: For residual gas analysis
Page 118 / Part 3.2
Order number matrix

HiQuad
Order number
Analyzer/mass range
QMA 410 / 1128 u / QMH 400-1
QMA 410 / 1 340 u / QMH 410-3
QMA 430 / 1 300 u / QMH 400-5
QMA 400 / 1 512 u / QMH 400-5
QMA 400 / 1 1,024 u / QMH 410-1
QMA 400 / 1 2,048 u / QMH 410-2
Ion source/ ion optics
bc
Axial ion source
01
Cross beam ion source
02
Cross beam ion source with magnet
03
04
Gas tight cross beam ion source with magnet
05
Grid ion source
06
Two-lens ion optics
10
Three-lens ion optics
11
Two-lens ion optics with cross beam ion source
12
Three-lens ion optics with cross beam ion source
13
Filament
Without
Tungsten
Yttriated iridium
Rhenium
Detector and high-voltage power supply
SEM 217 + HV 701
SEM 217 + HV 702
SEM 218 + HV 702
Preamplifier and ion counter
None
EP 422
CP 400
EP 422 + CP 400
2 x EP 422
Interface options
None
IO 700
CAN Open
IO 720
PT Q1 a bc d e f g
Part 3.2 / Page 119
Leak detectors
Leak detectors
The widest offer of leak testing solutions,

using helium and hydrogen
Page 120 / Part 3.2
3.2 Vacuum measurement, analysis, leak detection / Leak detectors
Leak detectors
Leak detectors
Contents
Part 3.2 / Page 121
Leak detectors
The widest offer of leak testing solutions,
using helium and hydrogen
Leak detectors
Pfeiffer Vacuum leak detectors find any leaks. No leak is

too small or too large to escape from our leak detectors.
It doesnt matter whether you are looking for water, oil,
fuel, gas or vacuum leaks. From miniature electronic units
right up to large-volume vessels, from media escaping
from vacuum systems to gases entering them the
requirements for leak detection are as wide as the range
of industrial products.
Leak detectors for various demands:
Our portable leak detectors are used both for mobile leak
detection on site, as well as for worldwide service jobs
in a variety of different locations. They stand out above all
due to their high performance combined with low weight.
Multipurpose leak detectors are used mainly for stationary
applications to localize leaks and to check leak tightness.
They are also movable thanks to a dedicated cart. These
compact leak detectors are used in wide range of industries, from heavy industry right up to cleanroom applications. In this latter case, the dry version of the leak detectors is used.
High-performance leak detectors are used where extremely
short cycle times and fast reduction of helium background
are required. From testing of industrial components in high
throughput production up to highly sensitive applications
in vacuum and medical technology or in research and
development.
Page 122 / Part 3.2
Industry
R&D
Q recommended
Portable
MiniTest 300
ASM 310
Q Q Q Q
Q
Q
Multipurpose
ASM 340
ASM 340 D
Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q
Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q
Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q 138
Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q 138
Q Q Q Q Q Q Q Q Q Q Q Q Q
Q Q
Q Q Q Q Q
High performance Compact

ASM 182 T
Q Q Q Q
Q
Q
ASM 182 TD+ Q Q Q Q
Q Q
Q Q
Q Q Q
Q Q Q Q Q Q Q Q Q Q Q Q Q Q Q
Q Q Q Q Q
Q
Q Q Q Q Q Q Q Q
146
146
High performance Console

ASM 192 T
ASM 192 T2D+
Q
Q
Q Q Q Q Q Q Q Q
150
150
Q Q Q Q
Q Q Q Q
High performance Mobile

ASM 380
Q Q Q Q
130
Q Q Q Q Q
Q Q Q Q
Q Q Q Q Q

Q Q Q Q
Q Q Q Q
Q
Q Q Q Q Q Q Q Q Q Q Q Q 134
Q
Q Q Q Q Q Q Q Q Q Q Q Q
Workstation
ASM 1002
Q Q Q
Q Q Q Q Q Q Q Q Q 142
Q Q
154
158
Modular
ASI 30
Sniffing
ASM 102 S
Q Q Q Q Q Q Q Q
162
Part 3.2 / Page 123
Leak detectors
Coating
Page
Semiconductors
Electron microscopy
Leak detection
Mass spectrometry
Surface analysis
Plasma monitoring
Lithography
Plasma etching
Implantation source
Inspection
Bonding
Flat Panel Display (FPD)
LED / OLED
Hard disk coating
Photovoltaics
Glass coating (PVD)
CD / DVD / Blu-ray production (PVD)
Hard coating
Medical technology
Insulation vacuums
Bulb and tube manufacturing
Heat treatment
Vacuum drying
Vacuum furnaces
Nuclear research
Fusion technology
Plasma research
Space simulation
Nanotechnology
Biotechnology
Analytics
Page
50m3/h
40m3/h
35m3/h
25m3/h
20m3/h
15m3/h
3.4m3/h
Backing capacity
1.7m3/h
oil-sealed
dry
He
without
He, 3He, H2
5 10-13Pa m3/s
Minimum
De- Backing
detectable
tectpump
leak rate
able
for helium
gases
(vacuum leak
detection)
1 10-12Pa m3/s
5 10-10Pa m3/s
5 10-9Pa m3/s
Minimum detectable
leak rate for helium
(sniffing leak
detection)
1 10-8Pa m3/s
DN 50 ISO-KF
DN 40 ISO-KF
DN 25 ISO-KF
DN 16 ISO-KF
Sniffing
Vacuum leak detection
Vacuum and sniffing leak detection
Leak detectors
Test
Connecmethod tion flange
(inlet)
Portable
Q
MiniTest 300
ASM 340
ASM 340 D
ASM 310
130
Q
134
Multipurpose
Q
138
138

ASM 380
142

ASM 182 T
ASM 182 TD+
146
Q
146

ASM 192 T
ASM 192 T2D+ Q
Q
Q
Q
Q
150
Q 150
Workstation
ASM 1002
Q 154
Modular
ASI 30
158
Sniffing
ASM 102 S
Page 124 / Part 3.2
162
Leak detectors
Customer benefits
Portable:
Q Ultralight and easy to operate
Q Ideal for global servicing work
Q Remote controlled for comfortable operation
Multipurpose:
Q Suitable for a large variety of leak detection applications
Q Powerful and dependable
Q Simple design for easy operation
High-performance:
Q Extremely short pump down times even on large volumes
Q Designed for ultra sensitive leak detection limits whatever size
and volume of the test parts
Q High reliability in clean processes as well as rough environments
Workstation:
Q Ideal for testing in mass production with short cycle times
Q Fully automatic leak detection on seated components
Q Ergonomic design and operation, for seated operators
Modular:
Q Easy and flexible integration into leak detection systems
Q Low maintenance for continuous operation
Q Broad selection of interfaces to answer all common industry standards
Sniffing:
Q Ideal solution for accurately coating mirror leaks
Q Status messages by voice synthesizer for the user's convenience
Q Remote controlled for comfortable operation
Part 3.2 / Page 125
Series at a glance
Portable
Leak detectors
MiniTest 300
ASM 380
Workstation
ASM 1002
Page 126 / Part 3.2
Multipurpose
ASM 310
ASM 182 T
ASM 182 TD+
Modular
ASI 30
ASM 340
ASM 340 D
ASM 192 T
ASM 192 T2D+
Sniffing
ASM 102 S
Leak detectors
Part 3.2 / Page 127
Leak detectors
Six test methods for leak detection
Leak detectors
Leak localization
Applications in production and maintenance as well as quality control
Method
Vacuum test:
Spraying test
Sniffing test
For leak localization on parts

under vacuum
For leak localization on

pressurized parts
Description
The leak detector evacuates

the air inside the test part.
After that, the tracer gas is
sprayed on the external surface of the part. The detector
measures the gas flow
through the leak channel in
the wall of the test part.
The leak can be localized.
The test part is pressurized

with tracer gas. After that,
the sniffer probe is moved
around the part. If a leak is
present, the leak detector will
detect the escaping tracer
gas, allowing to locate the
leak.
Customer benefits
Q
Q
Q
Q
Page 128 / Part 3.2
Localization of the leak

Very high sensitivity
Easy to perform
Local or integral test
Q
Q
Q
Localization of the leak

Not necessary to put the
test part under vacuum
Easy to perform
Vacuum test:
Spraying test
Sniffing test
Integral
vacuum test
Vacuum test:
Bombing test
Integral test of
enclosed parts
under vacuum
Sniffing test:
Integral test at
athomspheric
pressure
MiniTest
ASM 310
ASM 340/340 D
ASM Graph / Graph D
ASM 380
ASM 182 T / TD+
ASM 192 T / T2D+
ASM 1002
ASI 30
ASM 102 S
Integral test
Industrial applications and quality control
11
12
Step 2
11
4
7
12
10
3
6 5
2
3
9
8
4
7
6 5
Leak detectors
Step 1
10
9
Integral vacuum test
Vacuum test:
Bombing test
Integral test of enclosed

parts under vacuum
Sniffing test:
Integral test at
atmospheric pressure
Used in production
environments
The test part is sealed and

cannot be evacuated or
pressurized.
It needs to be tested
whether tracer gas can
enter into the part.
The test part can withstand overpressure and

needs to be tested as a
complete product.
The test part is placed in a

vacuum test chamber
and filled with tracer gas.
Should a leak be present,
the tracer gas will escape
from the part into the
test chamber and will be
measured by the leak
detector.
Place the test part in a

specific chamber and
pressurize it with tracer
gas (bombing chamber).
Should a leak be present,
the tracer gas is forced
into the part due to the
gas pressure. After that,
the part is placed in a
vacuum chamber which is
evacuated.
Any tracer gas that was
forced inside the part will
now escape and be measured by the leak detector.
Inside a test chamber, the

part is connected to a leak
detector and evacuated.
The chamber is filled with
tracer gas. Should a leak
be present, the tracer gas
will penetrate the part and
be measured by the leak
detector.
The test part is pressurized

with tracer gas in a simple
accumulation chamber
which is under atmospheric
pressure. After an accumulation time, the detector
analyzes the air inside the
chamber and determines
if an increase in the tracer
gas concentration can be
measured.
Q
Q
Q
Q
Q

High throughput
Easy to integrate into a
production line
Easy calibration
High repeatability
The only solution to test

sealed components with
high sensitivity
High repeatability
Q
Q
Q
Q
High automation
level possible
High throughput
High repeatability
Easy to integrate into a

production line
Part 3.2 / Page 129
MiniTest 300
Leak detectors
Portable helium leak detector for industrial use
Page 130 / Part 3.2
3.2 Vacuum measurement, analysis, leak detection / Leak detectors / Portable / MiniTest 300
MiniTest 300
The MiniTest 300 helium leak detector weighs only a
sensational 5 kg. It is the first vacuum leak detector on
the market which works with a quartz window sensor.
Thanks to this innovative technology, it stands out due
to its lightweight design and small footprint.
The MiniTest 300 can work at a high inlet pressure of
up to 200 hPa and is not sensitive to water vapor. This
makes it the ideal solution for leak detection in power
plants, vacuum furnaces and vacuum systems as well
as in heat exchangers.
The uncomplicated operation and optional wireless
remote control, with a range of up to 100 meters, enable
helium leak detection to be carried out even in large
systems by only one person. The data measured can be
easily read out on a 3.5 inch touchscreen and saved on
the remote control.
Pharmaceutics
Leak detectors
Since it is practically maintenance-free, the MiniTest 300

is also cost-efficient both in operation and in long-term
use.
Customer benefits
Q Vacuum leak detection with a quartz window sensor
for localizing and quantifying even the smallest of
leaks
Q Ideal for servicing work due to compact size and light
weight (5 kg)
Q Wireless remote control with extensive range and
memory
Q Easy touchscreen operation with intuitive menu
navigation
Q Graphic display
Q Direct connection possible to systems with a
maximum working pressure of up to 200 hPa
Q Leaks of up to 5 10-8 Pa m/s detectable with a
pumping speed of 1 l/s
Q Low maintenance costs
Q Vacuum furnaces
Q Lamp manufacturing
Q Vacuum coating systems
Q Air conditioning and refrigeration
Q Pharmaceutics
Q Power engineering
Q Chemistry
Air conditioning and refrigeration
Vacuum furnaces
Part 3.2 / Page 131
MiniTest 300
Q
Q
Q
Q
Q
Q
Q
Compact size and light weight (approx.5 kg)

Detection limit of 5 10-8 Pa m/s (S = 1 l/s)
Good water vapor tolerance
Inlet pressure up to 200 hPa abs.
Remote control, wireless or with cable,
with data logging and USB port
Connection of an external Compact gauge
Low maintenance costs
Dimensions (in mm)

265,2
15
224,8
306,8
Leak detectors
26,8
204,8
Page 132 / Part 3.2
Technical data
MiniTest 300
Flange (in)
DN 25 KF
Noise level
< 70 dB (A)
Power consumption
max. 30 VA
Power input
max. 2 A
Installation altitude, max.
2,000 m
Ready for operation after
30 min
Maximum inlet test pressure
200 hPa absolute
Weight
5 kg
Minimum detectable leak rate for 4He

(to AVS 2.1)
5 10-8 Pa m/s1)
Interfaces
RS-485, gauge,
remote control,
radio transmitter, I/O
D-Sub 9
Operating temperature
+10 to +35 C
Storage temperature
-10 to +55 C
Power supply
100-240 V, 50/60 Hz
Backing pump
without
1)
at a pumping speed of the system pump of S = 1 l/s
MiniTest 300
Leak detectors
Order number
PT L03 000
Accessories
Remote control RC 500 WL, wireless
PT 445 420-T
Remote control RC 500
PT 445 421-T
Test leak in pin-type casing with adapter

DN 16 ISO-KF
Leak rate 3 10-4 Pa m/s
PT 445 425
PT 445 426
PT 445 427
Transport case
PT 445 428
Extension cable
PT 445 402
Helium spray gun
BG 512 125 - T
Centering ring with poral filter
PF 117 225 - T
Part 3.2 / Page 133
ASM 310
Leak detectors
Combining light weight with superior performance
Page 134 / Part 3.2
3.2 Vacuum measurement, analysis, leak detection / Leak detectors / Portable / ASM 310
ASM 310
The portable ASM 310 provides high performance
wherever it is needed at only half the weight, half the
footprint and half the size of standard desktop leak
detectors. At only 21 kg it is still a complete vacuum
system incorporating the same detector technology as
larger models.
Thanks to its clean, oil-free pumping system, the
ASM 310 is the right choice for leak-test maintenance
of systems which do not tolerate any contamination.
Light weight and universal voltage enable the ASM 310
to be easily operated anywhere in the world. A transport
case to safeguard against shipping damage as well as a
cart are available as accessories.
The ASM 310 can also be operated with the wireless
remote control RC 500 WL. This allows remote operation
at a distance of up to 100 meters.
Semiconductor industry
Q Semiconductors
Q Analytics and research
Q Industrial applications
Q Power plants
Leak detectors
Customer benefits
Q Lightweight and portable, only 21 kg
Q Smart design with retractable handle
Q Easy to move
Q Detachable control panel
Q On-demand operating interface
Q Intuitive and customizable menu
Q Small footprint, small size
Q Can be operated in any position
Q Large bright color touchscreen
Q Color graphics functionality
Q Password-protected display
Q Integrated SD memory card for data recording,
downloading and parameter setting
Q Voice synthesizer
Industrial applications
Part 3.2 / Page 135
ASM 310
Q
Q
Q
Q
Q
Oil-free pumping system, backing capacity 1.7 m3/h

Ultralight, only 21 kg and portable
Large bright color touchscreen
Intuitive and customizable menu
Integrated SD memory card for data recording and
downloading capabilities
Dimensions (in mm)
Leak detectors
62
81
START
448
414,5
STAND-BY
254
Page 136 / Part 3.2
350
Technical data:
ASM 310
Test methods
Vacuum and sniffing

leak detection
Minimum detectable leak rate for helium

(vacuum leak detection)
5 10-13 Pa m3/s

(sniffing leak detection)
1 10-8 Pa m3/s
Detectable gases
15 hPa
Backing pump capacity
1.7 m3/h
Pumping speed for He
1.1 l/s
Flange (in)
DN 25 ISO-KF
Start-up time (20C)
< 2 min. (< 3.5 min.

with autocalibration)
Response time (sniffing leak detection)
<1s
Interface
RS-232, analog
I/O interfaces
Digital input
Analog output
(mantissa)
Analog output
(exponent)
350 x 245 x 414 mm
Weight:
21 kg
Universal voltage
100-240 V AC
50/60 Hz
Maximum power consumption
300 W
Helium background suppression
Auto / manual
Operator interface
Color touchscreen
Selectable languages
English,
French,
German,
Italian,
Spanish,
Russian,
Japanese,
Chinese,
Korean
Leak detectors
He, 3He, H2
Order number
ASM 310
BSAA0000MM9A
Accessories
Country-specific power cables
UK
104411
Italy
104758
Switzerland
103718
PT 445 420-T
Trolley
114820
Transportation case
119594
Part 3.2 / Page 137
ASM 340
Leak detectors
Best in class compact multipurpose leak detectors for any

application in maintenance or production environments
Page 138 / Part 3.2
3.2 Vacuum measurement, analysis, leak detection / Leak detectors / Multipurpose / ASM 340
ASM 340
For maintenace applications as well as small production
environments, our ASM 340 offers top performance in
vacuum or sniffing leak detection. This dependable leak
detector can be used both for qualitative localization of
leaks as well as for quantitative integral or local testing.
The ASM 340 is distinguished by its powerful backing
pump which is available in oil-sealed and dry versions.
Easy operation, ultra-fast response times and a short
recovery time are among the outstanding features of this
compact multipurpose unit.
The ASM 340 can be adapted to specific applications
with the aid of extensive accessories. Existing accessories for leak detectors in our ASM and HLT series are
also compatible with the ASM 340.
Refrigeration and air conditioning
Leak detectors
Customer benefits
Q Suitable for maintenance and small production
applications for example in Industry,
R&D and Analytics
Q High backing capacity for versatile use
(in oil-sealed or dry version)
Q Fast response time
Q 25 hPa inlet test pressure and capability to locate
leaks from ~100 hPa
Q Intuitive menu easy to navigate
Q SD memory card for storage capabilities and easy
post-processing of leak test results
Q Rugged design and low maintenance
Q Research and development
Q Aeronautic industry
Q Mechanical engineering
Q Measuring technology
Q Refrigeration
Q Air conditioning
Q Semiconductor technologie
Research and development
Semiconductor technology
Part 3.2 / Page 139
ASM 340
Q
Q
Q
Q
Q
Q
Q
Q
Q
The fastest Time to Test in its class

Powerful backing capacity for versatile use, valid for
oil-sealed version as well as for dry version
Effective 2.5 l/s helium pumping speed for a rapid
response time
Unique leak detector with the capability to locate big
leaks from 100 hPa
Detachable control panel for the best ergonomics
Wireless remote control for operating range of up to
100 meters
Basic or Smart sniffer probes available with various
nozzle types and hose lengths
SD memory card storage capabilities
Low maintenance and rugged design
Leak detectors
Dimensions (in mm)

139
393
253
350
547
375
Page 140 / Part 3.2
Technical data
ASM 340
Test methods
Vacuum and sniffing Vacuum and sniffing

leak detection
leak detection

< 5 10-13 Pa m3/s
< 5 10-13 Pa m3/s

5 10-10 Pa m3/s
5 10-10 Pa m3/s
Detectable gases
Oil-sealed or dry
Diaphragm pump
25 hPa
25 hPa
2.5 l/s
2.5 l/s
He, 3He, H2
Flange (in)
DN 25 ISO-KF
DN 25 ISO-KF
Interface
RS-232 and other

optional interfaces
(Ethernet, USB,
Bluetooth, WiFi)
RS-232 and other

optional interfaces
(Ethernet, USB,
Bluetooth, WiFi)
I/O interfaces
Digital inputs and

outputs, analog
outputs
Digital inputs and

outputs, analog
outputs
390 x 546 x 375 mm 390 x 546 x 375 mm
Weight
56 kg
Supply
110 130 V, 50/60 Hz Universal

200240 V, 50/60 Hz 200240 V, 50/60 Hz
Power consumption, max.
850 W
600 W
045C (Vacuum)
040C (Sniffing)
035C
User interface
Color touchscreen
Color touchscreen
English,
French,
German,
Italian,
Spanish,
Russian,
Japanese,
Chinese,
Korean
English,
French,
German,
Italian,
Spanish,
Russian,
Japanese,
Chinese,
Korean
Great Britain
104411
104411
Italy
104758
104758
Switzerland
103718
103718
Remote control, leak rate in mbar l/s,

legend in English, 5 m cable
106688
106688
Remote control, leak rate in Pa m3/s

legend in English, 5 m cable
108880
108880
Remote control RC 500 WL
PT 445420 - T
PT 445420 - T
Spray gun, standard
112535
112535
Spray gun Elite-Kit, spray gun with additional

accessories in a compact case
109951
109951
Sniffer probe, 5 m hose length,

rigid 9 cm nozzle
SNC1E1T1
SNC1E1T1
LP 505, sniffer probe with standard tip, 5 m
BG449208 - T
BG449208 - T
Profibus interface
121645
121645
Bypass option with EU cable
PT 445 411 -T
PT 445 411 -T
Bypass option with US cable
PT 445 413 -T
PT 445 413 -T
45 kg
Zubehr
Country-specific power cord
Part 3.2 / Page 141
Leak detectors
He, 3He, H2
ASM 340 D
ASM 380
Leak detectors
Mobile high performance leak detector for rapid pumpdown

and short response times
Page 142 / Part 3.2
3.2 Vacuum measurement, analysis, leak detection / Leak detectors / High performance Mobile / ASM 380
ASM 380
The ASM 380 mobile high-performance leak detector
from Pfeiffer Vacuum is optimized for rapid pumpdown
and short response times on large test objects. Equipped
with a dry ACP 40 backing pump in combination with
a powerful high vacuum pump, it provides you with the
ideal solution for maximum testing sensitivity in analytics, laboratories, solar panel and semiconductor industry.
The slim design and compact size set up on a cart with
large wheels and a low center of gravity make the
ASM 380 mobile and safe to handle.
Solar industry
Leak detectors
The ASM 380 with its low noise level of only 53 dB(A) is
unusually quiet for a leak detector of its class. The color
display panel with full 360 viewing can be read from
any position. An integrated SD memory card makes it
easy to save test data and settings parameters. The
ASM 380 has an integrated lockable storage compartment
for tools, spare parts and accessories. Thanks to its
convenient bottle-holder, it is even possible to attach and
safely transport a tracer gas bottle.
Customer benefits
Q High performance, sensitivity and mobility in the
smallest footprint
Q High roughing capacity using clean,
particle free and dry ACP pump
Q Suitable for use in cleanrooms
Q High crossover pressure for a rapid entry into
measurement mode
Q Optional communication interfaces
Q Color touchscreen with full 360 viewing offering
excellent visibility
Q Intuitive menu easy to navigate, available in
9 languages
Q Semiconductor industry
Q Large area coating
Q Solar industry
Q Accelerators
Q Vacuum components, feedthroughs,
valves, bellows, expansion joints
Q Laser technology
Q High purity media supply systems
Q Electronics
Q Aeronautic and aerospace industry
Q Medical technology
Accelerators
Semiconductor industry
Part 3.2 / Page 143
ASM 380
Q
Q
Q
Q
Q
High backing capacity (35 m3/h) and high helium

pumping speed
Fast time to test: unrivaled performances from small
to large volumes
Narrow design and highly maneuverable
Customizable operator interface with 360 viewing
Integrated SD memory card for data processing
Dimensions (mm)
348
124
808
796
936
1025
34
Leak detectors
334
455
Page 144 / Part 3.2
Technical data:
ASM 380
Flange (in)
DN 40 ISO-KF
Test method
Vacuum and sniffing

leak detection
Detectable gases

1 10-8 Pa m/s

5 10-13 Pa m/s
7 l/s
Noise level
< 53 dB (A)
Power supply
90 240 V, 50/60 Hz
Power consumption max.
1,500 W
Power consumption
700 W
15 hPa
Start-up time (20C) without calibration
< 4.5 min
Start-up time (20C) with calibration
< 5.5 min
I/O interfaces
1 Digital input
(Start cycle);
2 Digital outputs
(Test mode ok,
Helium signal
above reject set
point); 3 Analog
outputs (Configurable: Helium signal
log, Mantissa, Exponent, Inlet pressure )
Interface
RS-232
10 to 35 C
Roughing capacity
35 m3/h
Weight
110 kg
English,
French,
German,
Italian,
Spanish,
Russian,
Japanese,
Chinese,
Korean
Leak detectors
He, 3He, H2
Order number
ASM 380, universal voltage
PSGB00E0MM9A
ASM 380, universal voltage,

integrated Bluetooth
PSGB00E1MM9A
ASM 380, universal voltage,

configurable I/O interface board
PSGB00E2MM9A
ASM 380, universal voltage, configurable

I/O interface board, integrated WiFi
PSGB00E3MM9A
ASM 380, universal voltage, configurable

I/O interface board, Ethernet
PSGB00E4MM9A
Accessories
Bottle holder for ASM 380
118444
Inlet filter, 20 m, DN 40/40 ISO-KF
105842
PT445420-T
Locking clamp, DN 40 KF
118801
Part 3.2 / Page 145
ASM 182 T, ASM 182 TD+
Leak detectors
The perfect combination of high performance and easy operation

for exceptional reliability even in the harshest industrial applications
Page 146 / Part 3.2
3.2 Vacuum measurement, analysis, leak detection / Leak detectors / High performance Compact / ASM 182 T, ASM 182 TD+

The high-performance leak detectors in the ASM 182
series are available in oil-lubricated and dry versions.
Both versions are equipped with a high backing capacity.
The small footprint of these leak detectors enables them
to be easily integrated into production lines. Our powerful
ASM 182 can be used for leak detection on parts of
varied sizes and volumes. Whether used in the automotive industry, the aeronautic and aerospace or in semiconductor industry, these leak detectors fit the bill with
their high performance and reliability.
Aeronautic and aerospace industry
Leak detectors
Customer benefits
ASM 182 T
Q Extremely short cycle times due to largest
backing pump in its class
Q Important status messages delivered by
voice synthesizer
Q Low helium background even with large test parts
Q Easy maintenance due to the fold-out feature of its
front and rear housing
Customer benefits
ASM 182 TD+
Q The test pressure is attained rapidly even with large
or strongly outgassing test parts
Q Fast response time and short test cycles thanks to
high helium pumping speed
Q Ultra-small background signals and rapid signal
reduction, for the most demanding tests
Q Leak detection systems
Q Automotive industry
Q Aeronautic and aerospace industry
Q Laser technology
Q Sensors
Q Vacuum components, feedthroughs,
valves, bellows, expansion joints
Q Electronics
Q Mechanical components
Q Heat exchangers
Automotive industry
Leak detection system
Part 3.2 / Page 147
ASM 182 T
Q
Q
Powerful rotary vane pump with 20 m3/h

roughing capacity
4.4 l/s helium pumping speed
ASM 182 TD+

Q
Q
Frictionless ACP dry pump with 25 m3/h

roughing capacity
Dimensions (mm)
170
Anschlussansch DN 40
421
421
Leak detectors
444
227
408
434
Technical data:
Page 148 / Part 3.2
594
ASM 182 T
Standard
ASM 182 TD+

Standard
Flange (in)
DN 40 ISO-KF
DN 40 ISO-KF
Test methods

leak detection
leak detection
Detectable gases

1 10-8 Pa m/s
1 10-8 Pa m/s

5 10-13 Pa m/s
5 10-13 Pa m/s
4.4 l/s
4.4 l/s
Noise level
< 54 dB (A)
< 65 dB (A)
He
He
Supply
200240 V, 50/60 Hz 200240 V, 50/60 Hz
1,000 W
6 hPa
6 hPa
20 m3/h
25 m3/h
3 min
< 4 min.
4.5 min
< 5.5 min.
I/O interfaces
Digital inputs (Start,

Vent, Calibration);
Digital outputs
(Test modes, Cycle
in progress, Helium
signal above reject
set point); Analog
outputs (Helium
signal log,
Inlet pressure)

Vent, Calibration);
Digital outputs
(Test modes, Cycle
in progress, Helium
signal above reject
set point); Analog
outputs (Helium
signal log,
Inlet pressure)
1,500 W
Interface
RS-232
RS-232
10 to 40 C
10 to 40 C
Weight
76 kg
88 kg
Order number matrix

abcdefghij0
a
ASM 182 T
D2
ASM 182 TD+ without cart
D1
ASM 182 TD+ with cart
D7
Detectable gases
Helium (4He)
3 masses ( He, He, H2)
Seals for vacuum module and analyzer cell
Elastomer
Metal
Control panel
Standard
Graphic color touchscreen
Detection option
ASM 182 T (not available)
ASM 182 TD+ Standard
ASM 182 TD+ with gas line option
Test chamber
without
Small test chamber
Medium test chamber
Large test chamber
Cover
Painted
UCT (stainless steel housing and frame), ASM 182 TD+ only
Language
French
English
German
Japanese
Supply
100 130 V, 50/60 Hz
220 240 V, 50/60 Hz
Cable and plug type
USA
France/Germany
UK
Italy
Switzerland
Without plug
Leak detectors
Leak detectors
Order number
Part 3.2 / Page 149
ASM 192 T, ASM 192 T2D+
Leak detectors
Ultra sensitive detection limits on large-volume components,

ergonomic unit for standing operators
Page 150 / Part 3.2
3.2 Vacuum measurement, analysis, leak detection / Leak detectors / High performance Console / ASM 192 T, ASM 192 T2D+
ASM 192 T, ASM 192 T2D+

High-performance leak detectors in the ASM 192 series
provide high reliability even harsh applications. Extremely
short pumpdown times even on large chambers as well
as ultra short cycle times are the outstanding features of
these console units. The vacuum system incorporating a
powerful high vacuum pump reduces helium background
fast and makes for short recovery times even after big
leaks.
With one or two backing pumps operating in parallel,
system configurations can be ideally adapted to meet
any production throughput requirements. Oil-lubricated
rotary vane pumps as well as dry ACP pumps are available for use as backing pumps for the ASM 192 series.
Accelerators
Leak detectors
The console units have an ergonomic working height

designed for standing operators and the remote control
is fixed on an articulated arm for the operators convenience. The work surface is grounded and provides
generous space for putting on large test objects, useful
small parts and installation components.
Customer benefits
Q Ideal for industrial applications
Q Robust and reliable in the harshest environments
Q Fast response time thanks to very high helium
pumping speed
Q Various languages and operating voltages available
for worldwide use
Q Graphic color touchscreen
Q Test chambers can be mounted on the inlet flange
Q Laser technology
Q Aeronautics and aerospace
Q Space simulation
Q Electronics
Q Nuclear technology
Q Accelerators
Q Semiconductor technology
Q Research and development
Q Coating
Q Vacuum technology, large chambers
Semiconductor technology
Aeronautics and aerospace
Part 3.2 / Page 151
ASM 192 T
Q
Q
Powerful rotary vane pump(s) with 20 m3/h (40 m3/h)

backing capacity
ASM 192 T2D+

Q
Q
Frictionless ACP dry pump(s) with 25 m3/h (50 m3/h)

backing capacity
20 l/s helium pumping speed
Dimensions (mm)
594
387
170
215
519
Leak detectors
933
461
Anschlussansch
498
692
734
Page 152 / Part 3.2
Technical data:
ASM 192 T
Standard
ASM 192 T2D+

Standard
Flange (in)
DN 40 ISO-KF
DN 50 ISO-KF
Test methods

leak detection
leak detection
Detectable gases
He
He
-8

1 10 Pa m /s
1 10-8 Pa m3/s

5 10-13 Pa m3/s
5 10-13 Pa m3/s
4.4 l/s
20 l/s
Noise level
< 54 dB (A)
< 66 dB (A)
Supply
200240 V, 50/60 Hz 200240 V, 50/60 Hz
1,300 W
6 hPa
30 hPa
20 m3/h
25 m3/h
3 min.
3.5 min.
4.5 min.
5 min.
I/O interfaces

Vent, Calibration);
Digital outputs
(Test modes, Cycle
in progress, Helium
signal above reject
set point);
Analog outputs
(Helium signal log,
Inlet pressure)

Vent, Calibration);
Digital outputs
(Test modes, Cycle
in progress, Helium
signal above reject
set point);
Analog outputs
(Helium signal log,
Inlet pressure)
1,000 W
Interface
RS-232
RS-232
10 to 40 C
10 to 40 C
Weight
125 kg
157 kg
Order number matrix

ASM 192 T, ASM 192 T2D+
abc0defghi0
a
ASM 192 T
D4
ASM 192 T2D+
D3
Detectable gases
Helium (4He)
3 masses (4He, 3He, H2)
Elastomer
Metal
Backing pump
One backing pump

(ASM 192 T: 20 m3/h, ASM 192 T2D+: 25 m3/h
ASM 192 T Two backing pumps: 40 m3/h
ASM 192 T2D+ Two backing pumps: 50 m3/h
Test chamber
Without
Small test chamber
Medium test chamber
Large test chamber
Measuring units
mbar l/s
Torr l/s
Pa m /s
Language
French
English
German
Japanese
Supply
100 130 V, 50/60 Hz1)
220 240 V, 50/60 Hz
Cable and plug type
USA 15 A
France/Germany
UK
Italy
Switzerland
Without plug
USA 30 A2)
1)
2)
Leak detectors
Leak detectors
Order number
Not under 110 V if operated with two backing pumps

If the voltage is lower than 110 V, choose cable type 8 : USA 30A
Part 3.2 / Page 153
ASM 1002
Leak detectors
For leak testing of various objects where high production

throughput is required
Page 154 / Part 3.2
3.2 Vacuum measurement, analysis, leak detection / Leak detectors / Workstation / ASM 1002
ASM 1002
The ASM 1002 leak detector combines high performance
with user-friendliness. The powerful vacuum system
provides a backing capacity of up to 50 m/h and guarantees fast reduction of helium background between
measurements. These performance characteristics along
with its reliability and long-term stability make the
ASM 1002 the ideal solution for even the most demanding applications such as leakage testing of pacemakers.
The ASM 1002 enables automatic leak detection to be
carried out on sealed components. By closing the test
chamber, the test procedure starts and a red / green
light indicates the test result at the end. If necessary, the
test chamber can simply be exchanged for a standard
vacuum flange or a part-specific holding fixture. This
allows the same leak detector to be used for testing
open parts, too.
Lamp technology
Leak detectors
Customer benefits
Q Short time to test thanks to a powerful pumping package: One or two rotary vane pumps (25 or 50 m/h)
to evacuate the test object and one rotary vane pump
(20 m/h) as fore pump for the high-vacuum pump
Q The fastest unit of its category: less than 5 seconds
to achieve 1 10-10 Pa m/s in a mass production
Q Unique ergonomics for operator's comfort
Q Two tests methods: Standard test or special Pass/Fail
menu for semi-automatic testing with high throughput
Q Rugged and highly reliable unit to meet high volume
production needs
Q Low maintenance
Q Electronic components
Q Pharmaceutics
Q Food technology
Q Lamp technology
Q Vacuum technology, large components
Food technology
Part 3.2 / Page 155
ASM 1002
Q
Q
Backing pump(s) with 25 m3/h (50 m3/h) capacity

and high vacuum pump 200 l/s
4 l/s helium pumping speed
Dimensions (mm)
697
924
145
349
F2
F3
NEXT
RESET
Leak detectors
1007
1244
AUTO CAL
867
Page 156 / Part 3.2
Technical data:
ASM 1002
Flange (in)
DN 25 ISO-KF
Test method
Vacuum and sniffing

leak detection
Detectable gases

1 10-8 Pa m/s

1 10-12 Pa m/s
He
4 l/s
Noise level
< 55 dB (A)
25 m3/h
Supply
110 130 / 200 240 V,

50/60 Hz
Power consumption
< 1,500 W
2,300 W
100 hPa
< 3.5 min
< 4.5 min
I/O interfaces
Analog outputs
(Helium signal log,
Inlet pressure);
Specific analog
outputs to recover
the light status in
Pass/Fail
Interface
RS-232
10 to 40 C
Weight
190 kg
Order number matrix

ASM 1002
Order number
Leak detectors
ASM 1002
Detectable gases
Helium (4He)
Elastomer
Metal
Backing pump
One backing pump, 25 m3/h
Two backing pumps, 50 m3/h
Test chamber
Inlet flange DN 25
Small test chamber
Medium test chamber
Large test chamber
Remote control
Without
mbar l/s
Torr l/s
Pa m3/s
Pa m3/s, Japan
Language
French
English
Supply
100 130 V, 50/60 Hz1)
220 240 V, 50/60 Hz
Cable and plug type
USA/Japan
France/Germany
UK
Italy
Switzerland
Without plug
1)
Leak detectors
abc0de0fghi0
not below 110 V for operation with two backing pumps
Part 3.2 / Page 157
ASI 30
Leak detectors
Easy and quick integration into industrial leak detection systems
Page 158 / Part 3.2
3.2 Vacuum measurement, analysis, leak detection / Leak detectors / Modular / ASI 30
ASI 30
The ASI 30 modular leak detector combines high
performance, reliability and repeatability with minimum
maintenance and maximum up-time. It offers easy
operation for accurate leak test results under all leak
test conditions.
The ASI 30 is specially adapted to meet the requirements
of machine builders and their end users. Thanks to its
modular design the ASI 30 is optimized for minimum
space requirements and maximum integration options.
The vacuum module can be installed in any position and
all the other modules are compatible with 1/2 19 inch
rack format. The leak detector can be controlled without
a control panel simply through a PC or PLC as it has a
wide range of interfaces and complies with all industrial
standards.
The components are specifically designed for ease of
installation with just a 2 cables hookup (with adaptable
lengths) between the vacuum module and the electronic
module.
Automotive
Q Compressors
Q Condensers
Q Packaging industry
Q Gas generators
Q Fire extinguishers
Q Refrigeration and air conditioning
Leak detectors
Customer benefits
Q Easy integration
Q Simple configuration
Q Easy operation
Q Small footprint
Q Rugged design and maximized up-time
Q Low maintenance requirements
Q Interfacing to industrial standards
Q Selectable I/O to meet any requirements
Q Optional control panel
Q 40 hPa gross leak crossover
Q 4 hPa normal leak crossover
Refrigeration and air conditioning
Packaging industry
Part 3.2 / Page 159
ASI 30
Q
Q
Q
Q
Q
Easy installation and fast hookup

Fully configurable I/O interface (37 pin D-Sub),
with current status display on the control panel
Profibus and RS-232 available as serial interfaces
Limited access to the settings menu to prevent any
inadvertent changes while system is in operation
Universal voltage: no risk of mistake, no matter what
country the leak detection system is prepared and
installed in
Dimensions (in mm)
Leak detectors
190
87
60
247
Vacuum module
427
170
104
95
69
9
64
130
120
Electronic module
110
305
190
203
Control panel
188
132
37
241
54
Page 160 / Part 3.2
Technical data:
ASI 30
Test methods
Vacuum and sniffing

leak detection

5 10-8 Pa m/s
(Gross leak test mode)
5 10-13 Pa m/s (Normal leak test mode)

5 10-9 Pa m/s
Detectable gases
40 hPa (Gross leak

test mode) 4 hPa
(Normal leak test
mode)
Start-up time
< 3 min
Response time (sniffing leak detection)
< 0.5 s
Flange (in)
DN 16 ISO-KF
Interface (see the order matrix for complete

options configuration)
RS-232, Ethernet,
Profibus, USB
I/O interfaces
Digital inputs, Analog

outputs, Relay outputs, Transistor (open
collector) outputs
Weight:
8.5 kg
4.5 kg
1.3 kg
Vacuum module:
Electronic module:
Control panel (optional):
Supply
90 240 V AC, 50/60

Hz
150 W
5 40 C
Order number
Order number matrix

ASI 30
L a b c 000 d MM9a
Industrial control panel and associated cable length
Without control panel
1.8 m
5m
10 m
Cable length for electronic module
3.5 m
5m
10 m
20 m
Sniffing option
With
Without
Interface board
Basic 15 pins I/O
Basic 15 pins I/O + Bluetooth
37 pins I/O
37 pins I/O + Wifi
37 pins I/O + Ethernet
37 pins I/O + Bluetooth
Profibus
Profibus + Bluetooth
Leak detectors
He, 3He, H2
Part 3.2 / Page 161
ASM 102 S
Leak detectors
Portable sniffing leak detectors locate even the smallest leaks

accurately and fast
Page 162 / Part 3.2
3.2 Vacuum measurement, analysis, leak detection / Leak detectors / Sniffing / ASM 102 S
ASM 102 S
Our ASM 102 S sniffing leak detector is the ideal solution
for accurately locating minor leaks. This unit has a wide
measuring range from 0.1 ppm to up to 100 % helium.
With a detection limit of up to 1 10-8 Pa m3/s, leaks are
detected accurately and fast.
This leak detector is very easy to operate and even inexperienced users achieve reliable results. Delivery of
important status messages by voice synthesizer and a
remote control facility are additional features for the
user's convenience.
The ASM 102 S sniffing leak detector with its 18 kg
lightweight design and small footprint is ideally suited
for maintenance applications in restricted spaces or
outdoors. This leak detector works completely oil-free
and can be operated in any position.
Underground cables and pipes
Leak detectors
Besides its voice synthesizer and remote control features,

this unit has a sniffer probe with a 5 m long tube.
Longer tubes can also be supplied upon request. The
leak detector has an interior storage box which can
accommodate all the unit's accessories.
Customer benefits
The perfect unit for maintenance of pressurized
systems
Q Portable sniffer leak detector, only 18 kg
Q Easy operation
Q Various languages and operating voltages available
for worldwide use
Q A specific hand held remote control is supplied with
the leak detector, cable length to be selected in the
order matrix
Q A sniffer probe with 5 m hose length and rigid 9 cm
nozzle (order number SNC1E1T1) is supplied with the
leak detector
Q
Q Laser using helium as gas
Q Aeronautic and aerospace industry (fuels)
Q Underground cables and pipes
Q Gas installations in semiconductor fabs
Part 3.2 / Page 163
ASM 102 S
Q
Q
Specific remote control for sniffing leak detectors

supplied
Sniffer probe, 5 m hose length and rigid 9 cm nozzle
(order number SNC1E1T1) supplied
Dimensions (in mm)
440,1
430
165
147,5
480,5
Leak detectors
494
Page 164 / Part 3.2
Technical data:
ASM 102 S
Test method
Sniffing leak
detection
Detectable gases

1 10-8 Pa m3/s
Measurement range
1 10-8 to
1 10-1 Pa m3/s
helium (0.1 ppm to
100 % helium)
Noise level
56 dB (A)
Supply
110130 V, 50/60 Hz
200240 V, 50/60 Hz
100 W
1.5 min
I/O interfaces
Digital inputs (Start

sniffer, Calibration
(on external leak),
Zero); Digital outputs (Sniffing test
in progress, Helium
signal above sniffer
reject set point,
Default); Analog
outputs (Mantissa,
Exponent)
Interface
RS-232
He, 3He, H2
0 to 45 C
Weight
18 kg
Order number matrix

ASM 102 S
Order number
Leak Detector
ASM 102 S
Detectable gases
Helium (4He)
Remote control cable length
5m
10 m
15 m
Measuring unit
mbar l/s
Torr l/s
Pa m3/s
Language
French
English
German
Spanish
Supply
100 130 V, 50/60 Hz
200 240 V, 50/60 Hz
Cable and plug type
USA/Japan
France/Germany
UK
Italy
Switzerland
Without plug
Leak detectors
a b 000 c d e f g 0
Part 3.2 / Page 165
3.2 Vacuum measurement, analysis, leak detection / Leak detectors / Accessories
Accessories
Remote control
Standard remote control
The standard remote control allows to control and display
values of the leak detector from a distance of up to 5 m.
Order number
Remote control, leak rate in mbar l/s,
legend in English
106688
Remote control, leak rate in Torr l/s,

legend in English
108881

legend in English
108880

legend in Japanese
106690
Leak detectors
Remote control for sniffer leak detectors

Remote control dedicated to sniffing applications,
especially to the ASM 102 S. The value is displayed in
the unit set on the leak detector.
Order number
Remote control for sniffer leak detectors with
5 m cable
112747
Connection cable for remote control

Cables with more than 5 m length to connect the remote
control to the leak detector. The remote control is not
included.
Order number
Connection cable for remote control, 10 m
110881
Connection cable for remote control, 15 m
110882
Other cable lengths are available upon request.
Sniffer probe
Sniffer probe for leak detection in sniffing mode. Easy
connection to the leak detectors by external coupling.
Order number
rigid 9 cm nozzle
SNC1E1T1

rigid 9 cm nozzle
SNC1E2T1

rigid 9 cm nozzle
SNC1E2T1

flexible 15 cm nozzle
SNC1E3T1

SNC1E4T1

rigid 30 cm nozzle
SNC2E2T1

SNC2E3T1

SNC2E4T1
Other hose lengths are available upon request.

For ASM 310 only order number SNC1E1T1 is suitable.
Page 166 / Part 3.2
Calibrated leak
Q
Q
Q
Q
Helium calibrated leak from 10-10 Pa m3/s to

10-5 Pa m3/s, including gas reservoir.
Supplied with certificate of calibration, 10 % accuracy
on standard values
Can be equipped with manually operated valve (mandatory for leak values greater than 8 10-7 Pa m3/s)
Possibility to deliver a specific value according to
customer need
Calibrated leak
Order number
Isolation valve
Without
1)
Values
between 1 and 3 10-10 Pa m/s
With
-7
between 1 and 3 10 Pa m/s
Flange
DN 16
DN 25
DN 40
DN 50
2
2)
Special value
Yes
No
1)
2)
Leak detectors
Fa4bcd
The isolation valve is mandatory for values greater than 8 10-7 Pa m/s
DN 50 not available for the decades 10-6 and 10-5 Pa m/s
Notes:
Temperature coefficient 3 % per C for any value
< 8 10-7 Pa m3/s, 0,2 % per C for greater value
Q Loss 2 % per year for any value < 8 10-7 Pa m3/s
Q For specific values, due to the technology used, we can
only guarantee an effective nominal value within 20 %
of the requested nominal value.
Q
Part 3.2 / Page 167
Spray gun
To be connected to a gas bottle or gas line for spraying
tracer gas easily.
Order number
Spray gun, standard
112535
Spray gun Elite-Kit, spray gun with additional

accessories in a compact case
109951
Inlet filters
Connected to the inlet flange, these dust filters prevent
large quantities of dust from getting into the leak detector
Leak detectors
Order number
105841
105842
105843
105845
105846
Bombing chambers
Chambers equipped with valve and manometers for
bombing test on sealed components
Order number
Bombing chamber, volume 3.5 liters (150 mm
diameter, 200 mm height), 10 bars max.
786396
Bombing chamber, volume 6.4 liters (100 mm

diameter, 800 mm height), 25 bars max.
786397
Sniffing calibration accessory

To be used to connect the calibrated test leak to the
sniffer probe for a more accurate calibration for sniffing
applications
Order number
Page 168 / Part 3.2
Sniffing calibration accessory, DN 16 ISO-KF
110715
Sniffing calibration accessory, DN 25 ISO-KF
110716
Gas line type calibrated leak

Permeation membrane for calibration in gas lines,
DN16, VCR 1/4 inch
Order number
Gas line type calibrated leak,
value between 1 and 5 10-10 Pa m/s
803922

value around 1 10-9 Pa m/s
103372

103373

103374
Sniffer probe for liquids
Leak detectors
Sniffer probe to connect to the inlet of the leak detector

to measure the helium concentration in water or other
liquids. Leak rate for 100 % helium: 2 10-5 Pa m/s
Order number
Sniffer probe for liquids, DN 40 ISO-KF,
1.5 m tube length
67683
Locking clamp
Clamp with specific tool for locking any accessory on a
DN 40 flange
Order number
Locking clamp, DN 40 KF
118801
Part 3.2 / Page 169
Contamination management solutions
Contamination
management solutions
Perfect vacuum solutions for molecular contamination

monitoring and management
Page 170 / Part 3.2
3.2 Vacuum measurement, analysis, leak detection / Contamination management solutions
Contents

Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 172
174
APR 4300
176
Contamination
APA 302
Part 3.2 / Page 171

Solutions for contamination management from
Pfeiffer Vacuum improve the yield of semiconductor manufacturing
Systems for contamination management are the newest

developments specifically for the semiconductor industry.
Pfeiffer Vacuums many years of experience as a provider
of vacuum technology have shaped our know-how and
understanding of the processes, equipment and environment of semiconductor production systems. Based on
this knowledge, we have developed solutions to minimize
contamination and increase yield.
Contamination
How does contamination occur?

Wafers emit reaction by-products during transport and
waiting times. Airborne Molecular Contamination,
(in short AMC), such as evaporated fluorine, react in the
tight interstices of the transport boxes (POD systems)
with oxidants from the ambient air (H2O and O2). During
these reactions, undesired crystal growth on structured
wafers is triggered, which leads to a decline in quality
and a decreased production yield.
Page 172 / Part 3.2
Contamination
3.2 Vacuum measurement, analysis, leak detection / Contamination management solutions
Customer benefits
Q
Q
Q
Q
Specially developed for the semiconductor industry

In-Line Monitoring
Significantly improved yield learning
Delivery possible using overhead hoist transportation (OHT)
systems commonly used in semiconductor fabs
Part 3.2 / Page 173
APA 302
Solutions for contamination management from
Pfeiffer Vacuum improve the yield of semiconductor manufacturing
The APA 302 is a unique in-line monitoring tool for

advanced chip manufacturing in a cleanroom environment. This innovative equipment measures the airborne
molecular contamination (in short AMC) in a FOUP and
in the surrounding environment.
Moisture and airborne molecular contamination such as
elemental desorbing fluorine are released inside the
FOUP space during queue times between the individual
process steps. These elements can generate crystal
growth on patterned wafers which leads to yield loss
and performance degradation.
Contamination
The FOUP can be delivered either manually or through

overhead hoist transportation (OHT) to the two load
ports. The APA 302 takes gas samples through the FOUP
filters. The high sensitivity measurement with detection
limits in the ppbv-range takes only 2 minutes. When
there is no FOUP on the load ports, the APA 302 monitors
the surrounding cleanroom environment.
Thus, the queue times between the individual process
steps can be optimized, increased contamination values
immediately recognized and yields increased.
Page 174 / Part 3.2
3.2 Vacuum measurement, analysis, leak detection / Contamination management solutions / APA 302
1720
838
Dimensions (in mm)
1300
Analyzer
NH31)
Response time
within 2 min.
0 200 ppbv
< 0.2 ppbv
> 80 %
0 200 ppbv
< 0.2 ppbv
> 80 %
0 200 ppbv
< 0.2 ppbv
> 90 %
SO2
0 500 ppbv
< 0.5 ppbv
> 85 %
H2O
0 100 % RH
5%
> 90 %
Total Volatile Organics
0 99 ppmv
< 25 ppbv
> 90 %
1)
Q
Q
Q
Q
Limit of detection
Total acids1)
Total amines
Customer value
1)
Scale
Based on IMS technology, includes Ni63 source (< 0.005 microcuries)

Other options available: please contact us.
No FOUP modification needed

Throughput > 16 FOUP/h (with OHT)
Real time measurement
High sensitivity
Part 3.2 / Page 175
Contamination
Technical data
APR 4300
The Pod Regenerator for yield enhancement and
airborne molecular contamination management
The APR 4300 is a system for the decontamination of

wafers and for the protection from contamination
during queue time. Airborne Molecular Contamination
(in short AMC) lowers the yield and quality in semiconductor production.
Contamination
The APR 4300 effectively prevents the adsorption of contaminated organic or inorganic molecules on the surface
of a wafer and the transport box. Through the evacuation of chambers in the APR 4300, the adsorption probability is massively reduced. The yield of a fab can be
increased significantly in this way and the queue times
between the individual process steps can be optimized.
Page 176 / Part 3.2
3.2 Vacuum measurement, analysis, leak detection / Contamination management solutions / APR 4300
3455
Dimensions (in mm)
3060
1450
Pressure (mbar)
Pressure
(hPa)
Technical data
1000
100
Conditioning to working pressure (~ 5 min)
Vacuum purge process: P < 0.1 hPa
N2 purge to atmospheric pressure
Contamination
10
2
0,1
0,01
Vacuum
purge duration
Vacuum purge duration
Customer value
Q
Q
Q
Q
Flexible configuration
SEMI S2/S8 compliance
4 FOUPs/cycle
Yield enhancement of up to 7 %
Part 3.2 / Page 177
System technology
System technology
Vacuum systems from Pfeiffer Vacuum
Page 178 / Part 3.2
3.2 Vacuum measurement, analysis, leak detection / System technology
Contents
System technology
Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 180
182
Helium recovery units
184
Vacu2
188
System technology
Helium leak detection systems
Part 3.2 / Page 179
System technology
Vacuum systems from Pfeiffer Vacuum. Customized. Powerful. Innovative.
Even back in 1890 when our company was founded, forwardthinking products in the field of vacuum technology were
at the heart of our engineering and entrepreneurial activities.
Always aligned toward the forward-thinking ideas of our
partners and customers, Pfeiffer Vacuum manufactures
vacuum solutions that satisfy even the most challenging
demands. These solutions range from the production
of individual components and products right through to
complete vacuum systems. In doing so, we always strive
for complete customer satisfaction. Our vacuum systems
support both everyday products as well as high quality,
complex high-tech products. Reliability and competence
in our advice, planning, design, manufacturing, implementation and service are what customers can naturally
expect from Pfeiffer Vacuum.
We develop the matching vacuum solutions for a wide variety
of market segments, designed to satisfy our customers
high demands. In this connection, the potential applications
for our vacuum systems and technologies range from
coating high-stress tools and eyeglasses right through to
the production of solar cells, thermal insulation glass
and DVDs. Custom pumping stations and leak detection
systems, are also among our spectrum of products and
services. Our vacuum systems are employed, in parti-cular,
in high vacuum, sputtering and plasma processes, where
they are used in the following fields of application: Optics,
microelectronics, display manufacturing, photovoltaics
and medical technology.
System technology
Pfeiffer Vacuum offers state-of-the-art engineering and

vacuum knowledge when it comes to developing and
implementing customized solutions and vacuum systems.
With our engineering expertise, Pfeiffer Vacuum can
create vacuum systems and products that serve as the
foundation for your forward-thinking ideas. High quality
manufactured components with high functionality is what
we can offer for your system.
Page 180 / Part 3.2
Customer benefits
Q
Q
Q
Q
System technology
3.2 Vacuum measurement, analysis, leak detection / System technology
Reduced operating costs

Optimized processes
Improved quality
High uptime
Part 3.2 / Page 181
System technology
The best-in-class technology for your quality assurance
Page 182 / Part 3.2
3.2 Vacuum measurement, analysis, leak detection / System technology / Helium leak detection systems

Are you looking for the ideal system for your application?
Whether integrated in a production line or as standalone testing station, we develop and construct helium
leak detection systems that are tailored to your needs.
The numerous systems sold for the automotive industry,
refrigeration/air conditioning and packaging technology
are indicative of our know-how.
We build complete systems for you, with our vacuum
components such as a helium leak detector as the
centerpiece. With pumping unit, test chamber, control
technology, including all handling systems and full
documentation.
In terms of environmental certification in compliance
with DIN EN ISO 14001, we are happy to quote the
appropriate helium recovery system in the package.
Customer benefits
Q High sensitivity in detecting the smallest leaks
Q Dry testing instead of bubble testing
Q Automated measurement method
Q Minimizes testing times and operating costs
Q Compliance with quality and environmental
requirements
Q Fully automated test procedure
Automotive industry
(e.g. airbags, aluminum rims, fuel system components,
components for air conditioning and air suspension
system components)
Q Refrigeration/air conditioning
(e. g. evaporators, compressors)
Q Vacuum and pressurization technology
(e. g. valves, fittings)
Q Packaging technology
(e. g. for pharmaceutical products, foods)
System technology
Packaging technology
Refrigeration/air conditioning
Part 3.2 / Page 183
Helium recovery units (HRU)
System technology
Perfect Pfeiffer Vacuum technology for reducing helium costs
Page 184 / Part 3.2
3.2 Vacuum measurement, analysis, leak detection / System technology / Helium recovery units (HRU)
Helium recovery units (HRU)

Helium as test gas for destruction-free testing is an
increasingly rare resource and is thus becoming
more expensive. The recovery of used helium will
become even more important in the future.
Particularly in terms of environmental certification in
accordance with DIN EN ISO 14001 and required
resource conservation, the recovery of previously
expended helium makes sense. The systems are
designed to be stand-alone and can recover the helium
regardless of the leak detection system used.
Customer benefits
Q Minimized operating costs
Q Reduced dependency on fluctuations in supply on
the world market
Q Stand-alone system, independent of the attached
test systems
Q Compliance with environmental regulations such
as DIN EN ISO 14001
Q Fully automated
Q High recovery rate through automatic evacuation
of the test specimens by the attached testing system
Airbags
(e.g. airbags, aluminum rims, fuel system
components, components for air conditioning
and air suspension system components)
Q Refrigeration/air conditioning
(e.g. evaporators, compressors)
Q Vacuum and pressurization technology
(e.g. valves, fittings)
Q Packaging technology
(e.g. for pharmaceutical products, foods)
Q Power technology
(e.g. for medium voltage switch gear, surge absorbers)
Q Research facilities and labs
Q Accelerators
System technology
Pharmaceutical products
Pressurization technology
Part 3.2 / Page 185
3.2 Vacuum measurement, analysis, leak detection / System technology / Helium recovery units (HRU)
Operating principle
The helium returned from the leak detection system is
initially collected within the system. At the same time
or subsequently, the concentration is tested and mixed
to meet the preset concentration. The gas mixture is
then compressed to the required process pressure and
fed back to the test equipment.
Depending on the process conditions, the recovery rate
can be up to 98 % for helium concentrations of 10 95 %.
The actual figure depends on the type or version of
helium recovery system, as well as the parameter settings
and helium leak tightness of the attached test systems.
The possible maximum operating pressures in the system
are 10 bar, 35 bar, 55 bar and 200 bar. The maximum
helium throughput is 170 550 NI per minute depending
on the pressure level and version.
Container, small system
Two fundamental principles of helium recovery are

available: balloon recovery and container recovery.
Balloon recovery has a very good cost-performance
ratio, while container recovery is characterized by very
high tightness requirements and works on a dry
compression principle. In addition customer specific
solutions can be generated upon request.
Technical data
Feature
Balloon HRU
Type
CB13-35
CB11-55
CB10-200
Max. throughput
210 Nl/min
180 Nl/min
170 Nl/min
Max. working
pressure
35 bar
55 bar
200 bar
Compression
Oil lubricated Oil lubricated Oil lubricated
Recovery rate
Up to 95 %
Feature
Container HRU
Type
CV12-10
CV16-55
CV33-55
Max. throughput
200 Nl/min
260 Nl/min
550 Nl/min
Max. working
pressure
10 bar
55 bar
55 bar
up to 95 %
up to 95 %
System technology
Balloon system
Compression
Oil lubricated Dry
Dry
Recovery rate
Up to 98 %
up to 98 %
Up to 98 %
Container, large system
Page 186 / Part 3.2
System technology
3.2 Vacuum measurement, analysis, leak detection / System technology / Helium recovery units (HRU))
Part 3.2 / Page 187
Vacu2
System technology
Multi-stage vacuum process. The revolution in die casting!
Page 188 / Part 3.2
3.2 Vacuum measurement, analysis, leak detection / System technology / Vacu2
Vacu2
In our Vacu2 multi-stage vacuum process the shot sleeve
and mold cavities are evacuated in two stages. During
the first phase, the air is discharged directly from the
shot sleeve via a wide cross-section line. This enables
the desired pressure to be quickly achieved in the shot
sleeve and mold. In the second evacuation phase, air
is evacuated from the mold as in conventional methods.
Since the desired pressure was achieved in the first stage,
the second stage merely serves to maintain the pressure
by pumping down air that leaks into the mold. Pressure
is measured in four locations at different times during
the casting process and turned into process relevant
data by the control unit. This affords precise information
about the current status of the system. Should any
limits, some of them can be defined by the user, be
exceeded or not reached, the system responds with
warning signals. This avoids unnecessary rejects.
Die cast parts
Customer benefits
Q High uptime
Q Quality enhanced die cast products
Q Cost savings through reliable process monitoring
Q Savings in mold design and vent valves
Q Automotive industry (structural components,
motor blocks, gearboxes)
System technology
Motor blocks
Part 3.2 / Page 189
Product index
Index
A
A 100 L / A 100 L ES,
Multi-stage Roots Pumps, Compact . . . . . . . . . .Part 3.1 / Page 180
A 100 L and A 180 L,
Multi-stage Roots Pumps, Compact . . . . . . . . . .Part 3.1 / Page 178
A 180 L, Multi-stage Roots Pumps, Compact . . . . . .Part 3.1 / Page 178
A 203 H, Multi-stage Roots Pumps,
Harsh Duty Applications . . . . . . . . . . . . . . . . . . .Part 3.1 / Page 202
A 203 P, Multi-stage Roots Pumps,
Medium Duty Applications . . . . . . . . . . . . . . . . .Part 3.1 / Page 196
A3H Serie - Harsh Duty Applications,
Multi-stage Roots Pumps . . . . . . . . . . . . . . . . . .Part 3.1 / Page 200
A3P Serie - Medium Duty Applications,
Multi-stage Roots Pumps . . . . . . . . . . . . . . . . . .Part 3.1 / Page 194
A4 Serie, Multi-stage Roots Pumps . . . . . . . . . . . . . .Part 3.1 / Page 206
Accessories for D-Sub Feedthroughs,
Electrical Feedthroughs . . . . . . . . . . . . . . . . . . .Part 3.3 / Page 327
Accessories for Glass Retainers, Components,
Viewports . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .Part 3.3 / Page 209
Accessories for Round Socket,
Electrical Feedthroughs . . . . . . . . . . . . . . . . . . .Part 3.3 / Page 328
Accessories package for HPU, Turbopumps,
Hybrid Bearing, HiPace Accessories. . . . . . . . . .Part 3.1 / Page 365
Accessories, Components . . . . . . . . . . . . . . . Part 3.3 / from Page 212
Burst Disk . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .Part 3.3 / Page 214
Custom Components . . . . . . . . . . . . . . . . . . . . .Part 3.3 / Page 216
ISO-K Hose Clamp . . . . . . . . . . . . . . . . . . . . . . .Part 3.3 / Page 215
ISO-KF Hose Clamp . . . . . . . . . . . . . . . . . . . . . .Part 3.3 / Page 215
Pressure Relief Valves. . . . . . . . . . . . . . . . . . . . .Part 3.3 / Page 214
Sealants . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .Part 3.3 / Page 213
Thread Lubricant . . . . . . . . . . . . . . . . . . . . . . . . .Part 3.3 / Page 212
Vacuum Greases and Oils . . . . . . . . . . . . . . . . . .Part 3.3 / Page 212
Accessories, Turbopumps, Hybrid Bearing,
HiPace Accessories. . . . . . . . . . . . . . . . . . . . . . .Part 3.1 / Page 378
ACG 600, Multi-stage Roots Pumps, Industrial . . . . .Part 3.1 / Page 190
ACP 120, Multi-stage Roots Pumps, Industrial . . . . .Part 3.1 / Page 186
ACP 120/ACG 600, Multi-stage Roots Pumps,
Industrial . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .Part 3.1 / Page 184
ACP 15, Multi-stage Roots Pumps, Air cooled . . . . .Part 3.1 / Page 166
ACP Serie - Light Duty Applications,
Multi-stage Roots Pumps, Air cooled . . . . . . . . .Part 3.1 / Page 164
ActiveLine, Measurement . . . . . . . . . . . . . . . . .Part 3.2 / from Page 30
Capacitance transmitters CCR,
temperature compensated, Torr . . . . . . . . . . Part 3.2 / Page 40
Capacitance transmitters CCR,
temperature controlled, Torr . . . . . . . . . . . . . Part 3.2 / Page 42
Capacitance transmitters CMR,
temperature compensated, hPa. . . . . . . . . . . Part 3.2 / Page 36
Capacitance transmitters CMR,
temperature controlled, hPa . . . . . . . . . . . . . Part 3.2 / Page 38
Cold Cathode transmitters IKR . . . . . . . . . Part 3.2 / from Page 50
Controllers TPG . . . . . . . . . . . . . . . . . . . . . .Part 3.2 / from Page 64
DualGauge measurement equipment . . . . . . . . . . Part 3.2 / Page 61
Handheld Vacuum Gauge TPG . . . . . . . . . . . . . . . Part 3.2 / Page 62
Hot Cathode transmitters IMR . . . . . . . . . . . . . . . Part 3.2 / Page 56
Piezo-Transmitter APR . . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page 32
Pirani transmitter TPR . . . . . . . . . . . . . . . . Part 3.2 / from Page 46
Pirani/Bayard-Alpert transmitters PBR . . . . . . . . . Part 3.2 / Page 58
Page 190 / Part 3.2
Pirani/Capacitance transmitters PCR . . . . . . . . . . Part 3.2 / Page 44

Pirani/Cold Cathode transmitters PKR . . . . . . . . . Part 3.2 / Page 54
SingleGauge measurement equipment . . . . . . . . Part 3.2 / Page 60
Software for display and data logging for
ActiveLine . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page 67
Software, ActiveLine . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page 67
AD73 KH, Multi-stage Roots Pumps . . . . . . . . . . . . Part 3.1 / Page 208
Adsorption filter, Rotary Vane Pumps, Two-stage,
DuoLine Accessories . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page 78
AGB 4, Rotary Vane Pumps, Two-stage,
Pascal Accessories, Automatic gas ballast . . . . Part 3.1 / Page 117
AGB 36, Rotary Vane Pumps, Two-stage,
Pascal Accessories, Automatic gas ballast . . . . Part 3.1 / Page 118
Air cooled multi-stage Roots Pumps . . . . . . . Part 3.1 / from Page 164
ACP 15 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page 166
ACP 28 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page 170
ACP 40 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page 174
ACP Serie - Light Duty Applications . . . . . . . . . Part 3.1 / Page 164
Air cooling, Turbopumps, Hybrid Bearing,
HiPace Accessories . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page 370
Air venting valve and further accessories, Turbopumps,
Magnetically Levitated, ATH Accessories . . . . . Part 3.1 / Page 434
All-metal angle valves, Valves . . . . . . . . . . . . Part 3.3 / from Page 233
Electropneumatic, with position indicator (PI),
with pilot valve (PV) . . . . . . . . . . . . . Part 3.3 / from Page 234
with pilot valve (PV), normally open . . . . . . Part 3.3 / Page 246
Pneumatic, with position indicator (PI),
without pilot valve (PV). . . . . . . . . . . Part 3.3 / from Page 240
Pneumatic, without position indicator (PI),
without pilot valve (PV). . . . . . . . . . . . . . . . Part 3.3 / Page 244
Solenoid actuated . . . . . . . . . . . . . . . . . . Part 3.3 / from Page 248
UVH CU, flange sizes DN 16 CF to DN 63 CF . . Part 3.3 / Page 233
All-metal gas dosing valve UDV, Valves. . . . . . . . . . Part 3.3 / Page 284
Analysis Equipment . . . . . . . . . . . . . . . . . . . . . Part 3.2 / from Page 86
Gas analysis . . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / from Page 104
Residual gas analysis. . . . . . . . . . . . . . . . . Part 3.2 / from Page 98
Angle valves manual actuated, Valves . . . . . . Part 3.3 / from Page 228
Anti-twist Lock for Rotary/Linear
Feedthroughs DS . . . . . . . . . . . . . . . . . . Part 3.3 / from Page 348
Feedthroughs MDD . . . . . . . . . . . . . . . . Part 3.3 / from Page 347
Feedthroughs MDM. . . . . . . . . . . . . . . . Part 3.3 / from Page 349
APA 302, Contamination Management Solutions . . Part 3.2 / Page 174
APR 250, Measurement, ActiveLine,
APR 4300, Contamination Management Solutions . Part 3.2 / Page 176
ASI 30, Leak Detectors, Modular . . . . . . . . . . . . . . . Part 3.2 / Page 158
ASM 102S, Leak Detectors, Sniffing . . . . . . . . . . . . Part 3.2 / Page 162
ASM 182 T, Leak Detectors,
High performance - Compact . . . . . . . . . . . . . . Part 3.2 / Page 146
ASM 182 TD+, Leak Detectors,
High performance - Compact . . . . . . . . . . . . . . Part 3.2 / Page 146
ASM 192 T, Leak Detectors,
High performance - Console . . . . . . . . . . . . . . . Part 3.2 / Page 150
ASM 192 T2D+, Leak Detectors,
High performance - Console . . . . . . . . . . . . . . . Part 3.2 / Page 150
ASM 310, Leak Detectors, Portable . . . . . . . . . . . . . Part 3.2 / Page 134
ASM 340, Leak Detectors, Multipurpose . . . . . . . . . Part 3.2 / Page 138
ASM 340 D, Leak Detectors, Multipurpose . . . . . . . Part 3.2 / Page 138
Product index
142
154
244
244
246
248
250
404
406
412
418
422
426
430
434
430
433
435
432
434
431
433
431
435
432
426
117
117
118
248
248
234
236
228
228
B
Backing pump control, Turbopumps, Hybrid Bearing,
HiPace Accessories . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page
Ball valve, 3-way, manual, Valves . . . . . . . . . . . . . . Part 3.3 / Page
DN 16 to 40 ISO-KF . . . . . . . . . . . . . . . . . . . . . . Part 3.3 / Page
Ball valve, manual, Valves . . . . . . . . . . . . . . .Part 3.3 / from Page
Brass, DN 10 to 40 ISO-KF . . . . . . . . . . . . . . . . Part 3.3 / Page
Stainless steel, DN 10 to 40 ISO-KF . . . . . . . . . Part 3.3 / Page
Bellows-sealed Linear Feedthrough . . . . . . . .Part 3.3 / from Page
Bellows-sealed Precision Linear
Feedthrough . . . . . . . . . . . . . . . . . . . . . Part 3.3 / from Page
Bellows-sealed Precision Linear
Feedthrough Motorized . . . . . . . . . . . . . Part 3.3 / from Page
Bellows-sealed Rotary Feedthrough . . . . . . . Part 3.3 / from Page
Bellows-sealed Rotary Feedthrough,
Pneumatic . . . . . . . . . . . . . . . . . . . . . . . Part 3.3 / from Page
Borosilicate Float Glass, Components, Viewports . . Part 3.3 / Page
Burst Disk, Components, Accessories . . . . . . . . . . . Part 3.3 / Page
Butterfly valves, Valves . . . . . . . . . . . . . . . . Part 3.3 / from Page
Manual, DN 16 KF to DN 50 KF, aluminum . . . Part 3.3 / Page
Manual, DN 16 KF to DN 50 KF, stainless steel Part 3.3 / Page
Manual, DN 63 ISO-F, aluminum . . . . . . . . . . . Part 3.3 / Page
Manual, DN 63 ISO-F, stainless steel . . . . . . . . Part 3.3 / Page
372
294
294
295
296
295
350
351
352
340
341
209
214
259
259
260
261
262
C
Calcium Fluoride, Components, Viewports. . . . . . . . Part 3.3 / Page 210
Capacitance transmitters CCR, temperature compensated,
Torr, Measurement, ActiveLine . . . . . . . . . . . . . . Part 3.2 / Page 40
CCR 361 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page 40
CCR 362 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page 40
CCR 363 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page 40
CCR 364 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page 40
CCR 365 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page 40
Capacitance transmitters CCR, temperature controlled,
Torr, Measurement, ActiveLine . . . . . . . . . . . . . . Part 3.2 / Page 42
CCR 371 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page 42
CCR 372 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page 42
CCR 373 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page 42
CCR 374 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page 42
CCR 375 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page 42
Capacitance transmitters CMR, temperature compensated,
hPa, Measurement, ActiveLine . . . . . . . . . . . . . . Part 3.2 / Page 36
CMR 361 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page 36
CMR 362 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page 36
CMR 363 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page 36
CMR 364 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page 36
CMR 365 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page 36
Capacitance transmitters CMR, temperature controlled,
hPa, Measurement, ActiveLine . . . . . . . . . . . . . . Part 3.2 / Page 38
CMR 371 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page 38
CMR 372 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page 38
CMR 373 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page 38
CMR 374 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page 38
CMR 375 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page 38
CCR 361, Measurement, ActiveLine,
Capacitance transmitters . . . . . . . . . . . . . . . . . . . Part 3.2 / Page 40
Centering rings, Turbopumps, Hybrid Bearing,
CF Ports, Vacuum Chambers . . . . . . . . . . . . . . . . . . . Part 3.3 / Page 28
CF Quick-Access-Door, Vacuum Chambers . . . . . . . . Part 3.3 / Page 33
CF Shutter, Manual, Components, Viewports . . . . . Part 3.3 / Page 206
CF Shutter, Pneumatic, Components, Viewports . . . Part 3.3 / Page 207
CF Viewport, Components, Viewports . . . . . . . . . . . Part 3.3 / Page 204
CF, Components . . . . . . . . . . . . . . . . . . . . . . .Part 3.3 / from Page 144
CF 4-Way Cross . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.3 / Page 186
CF 4-Way Reducer Cross . . . . . . . . . . . . . . . . . . Part 3.3 / Page 187
CF 90 Elbow . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.3 / Page 183
CF Blank Flange . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.3 / Page 153
CF Blank Flange, Rotatable . . . . . . . . . . . . . . . . Part 3.3 / Page 157
CF Blank Flange, Rotatable, 316LN ESR . . . . . . Part 3.3 / Page 158
CF Blank Flange, with Thread . . . . . . . . . . . . . . Part 3.3 / Page 154
CF Blank Flange, with Thread, 316LN ESR . . . . Part 3.3 / Page 156
CF Copper Gasket . . . . . . . . . . . . . . . . . . . . . . . Part 3.3 / Page 144
CF Cube . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.3 / Page 191
Part 3.2 / Page 191
Index
ASM 380, Leak Detectors,

High performance - Mobile . . . . . . . . . . . . . . . . Part 3.2 / Page
ASM 1002, Leak Detectors, Workstation. . . . . . . . . Part 3.2 / Page
ATEX, Roots Pumps . . . . . . . . . . . . . . . . . . . . Part 3.1 / from Page
Okta 500 ATEX . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page
Okta 1000 ATEX . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page
ATH 1600-2300 M, Turbopumps,
Magnetically Levitated . . . . . . . . . . . . . . Part 3.1 / from Page
ATH 1603 M . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page
ATH 2303 M . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page
ATH 2800 M . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page
ATH 3200 M . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page
ATP 2300 M. . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page
ATH Accessories, Turbopumps,
Air venting valve and further accessories . . . . . Part 3.1 / Page
Drive electronics . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page
Heater band cables and water valve cables . . . Part 3.1 / Page
Inlet screen kit . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page
Interconnecting cable between pump and
external drive electonics (Magpower) . . . . Part 3.1 / Page
Mains cable . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page
Mains pack . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page
Mounting bolts . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page
Remote control . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page
Rotatable flange . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page
Valve cable (Magpower external drive electronics
to venting valve) . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page
ATP 2300 M, Turbopumps, Magnetically Levitated . Part 3.1 / Page
Automatic gas ballast, Rotary Vane Pumps, Two-stage,
Pascal Accessories . . . . . . . . . . . . . . . . .Part 3.1 / from Page
AGB 4 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page
AGB 36 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page
AVC MA, flange sizes DN 16 ISO-KF to
DN 40 ISO-KF, All-metal angle valves . . . . . . . . Part 3.3 / Page
AVC MX, flange sizes DN 16 ISO-KF to
DN 40 ISO-KF, All-metal angle valves . . . . . . . . Part 3.3 / Page
AVC PA, flange sizes DN 16 ISO-KF to
DN 40 ISO-KF, All-metal angle valves . . Part 3.3 / from Page
AVC PX, flange sizes DN 16 ISO-KF to
DN 40 ISO-KF, All-metal angle valves . . Part 3.3 / from Page
AVC SA, flange sizes DN 16 ISO-KF to
DN 40 ISO-KF, Angle valves, Manual actuated. Part 3.3 / Page
AVC SX, flange sizes DN 16 ISO-KF to
DN 40 ISO-KF, Angle valves, Manual actuated. Part 3.3 / Page
Index
Product index
CF Elastomer Gasket FKM . . . . . . . . . . . . . . . . .Part 3.3 / Page 148

CF Flange Cap. . . . . . . . . . . . . . . . . . . . . . . . . . .Part 3.3 / Page 177
CF Full Nipple . . . . . . . . . . . . . . . . . . . . . . . . . . .Part 3.3 / Page 182
CF Half Nipple . . . . . . . . . . . . . . . . . . . . . . . . . . .Part 3.3 / Page 168
CF Half Nipple, Rotatable . . . . . . . . . . . . . . . . . .Part 3.3 / Page 170
CF Half Nipple, Rotatable, with Thread . . . . . . .Part 3.3 / Page 171
CF Half Nipple, with Thread . . . . . . . . . . . . . . . .Part 3.3 / Page 169
CF Hexagon Head Screw Set for Flanges with
Tapped Holes . . . . . . . . . . . . . . . . . . . . . . . .Part 3.3 / Page 150
CF Hexagon Head Screw Set for Flanges with
Through-holes . . . . . . . . . . . . . . . . . . . . . . .Part 3.3 / Page 149
CF Hexagon Head Screw Set for
Spacer Flanges. . . . . . . . . . . . . . . . . . . . . . .Part 3.3 / Page 150
CF Hexagon Head Screw Set with
Horseshoe Nuts . . . . . . . . . . . . . . . . . . . . . .Part 3.3 / Page 152
CF Plate Nut Sets . . . . . . . . . . . . . . . . . . . . . . . .Part 3.3 / Page 151
CF Quick-Access-Door . . . . . . . . . . . . . . . . . . . .Part 3.3 / Page 176
CF Reducer Flange . . . . . . . . . . . . . . . . . . . . . . .Part 3.3 / Page 174
CF Reducer Flange, 316LN ESR . . . . . . . . . . . . .Part 3.3 / Page 175
CF Reducer Nipple, Straight . . . . . . . . . . . . . . . .Part 3.3 / Page 190
CF Reducer Tee. . . . . . . . . . . . . . . . . . . . . . . . . .Part 3.3 / Page 185
CF Silver-plated Copper Gasket . . . . . . . . . . . . .Part 3.3 / Page 145
CF Silver-plated, Vacuum-annealed
Copper Gasket . . . . . . . . . . . . . . . . . . . . . . .Part 3.3 / Page 147
CF Spacer Flange . . . . . . . . . . . . . . . . . . . . . . . .Part 3.3 / Page 172
CF Spacer Flange with Bore Holes . . . . . . . . . . .Part 3.3 / Page 172
CF Spacer Flange with Bore Holes and Port(s) . .Part 3.3 / Page 173
CF Stud Screw Set with Hexagon Nut . . . . . . . .Part 3.3 / Page 151
CF Tee . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .Part 3.3 / Page 184
CF Vacuum-annealed Copper Gasket . . . . . . . . .Part 3.3 / Page 146
CF Weld Flange. . . . . . . . . . . . . . . . . . . . . . . . . .Part 3.3 / Page 159
CF Weld Flange, 316LN ESR . . . . . . . . . Part 3.3 / from Page 155
CF Weld Flange, Rotatable . . . . . . . . . . . . . . . . .Part 3.3 / Page 163
CF Weld Flange, Rotatable, 316LN ESR . . . . . . .Part 3.3 / Page 165
CF Weld Flange, Rotatable, with Thread . . . . . .Part 3.3 / Page 164
CF Weld Flange, Rotatable, with Thread,
316LN ESR . . . . . . . . . . . . . . . . . . . . . . . . . .Part 3.3 / Page 166
CF Weld Flange, with Thread . . . . . . . . . . . . . . .Part 3.3 / Page 160
CF Weld Flange, with Thread, 316LN ESR . . . . .Part 3.3 / Page 162
CF Weld-On Flange, 316LN ESR. . . . . . . . . . . . .Part 3.3 / Page 167
CF-Swagelok Adapter . . . . . . . . . . . . . . . . . . . .Part 3.3 / Page 178
CF-VCR Adapter, Male and Female . . . . . . . . . .Part 3.3 / Page 179
ISO-CF Corrugated Hose, Flexible . . . . . . . . . . .Part 3.3 / Page 192
ISO-CF Spring Bellows . . . . . . . . . . . . . . . . . . . .Part 3.3 / Page 193
ISO-K/CF Adapter . . . . . . . . . . . . . . . . . . . . . . . .Part 3.3 / Page 181
ISO-KF/CF Adapter . . . . . . . . . . . . . . . . . . . . . . .Part 3.3 / Page 180
Chamber feet for Standard Vacuum Chamber,
Cubical (KBH), Vacuum Chambers . . . . . . . . . . . . Part 3.3 / Page 26
Clamping Device for Rotary/Linear
Feedthroughs . . . . . . . . . . . . . . . . . . . . . Part 3.3 / from Page 347
CMR 361, Measurement, ActiveLine,
Page 192 / Part 3.2
Coarse gas dosing valve EVD 010 H, Valves,

Gas dosing valves . . . . . . . . . . . . . . . . . . . . . . . Part 3.3 / Page 282
Coaxial Feedthrough, Flanged, BNC,
Electrical Feedthroughs . . . . . . . . . . . . . . . . . . . Part 3.3 / Page 306
Coaxial Feedthrough, Flanged, MHV,
Coaxial Feedthrough, Flanged, SHV,
Coaxial Feedthrough, Weld Adapter,
COF, Components. . . . . . . . . . . . . . . . . . . . . Part 3.3 / from Page 194
COF Blank Flange . . . . . . . . . . . . . . . . . . . . . . . Part 3.3 / Page 196
COF Blank Flange, with Domed
Stainless Steel Disk or Dished Head. . . . . . Part 3.3 / Page 197
COF Copper Wire Seal . . . . . . . . . . . . . . . . . . . . Part 3.3 / Page 195
COF Elastomer Seal . . . . . . . . . . . . . . . . . . . . . . Part 3.3 / Page 195
COF Screw Set. . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.3 / Page 194
COF Weld Flange . . . . . . . . . . . . . . . . . . . . . . . . Part 3.3 / Page 198
Cold cathode gauge heads IKR, Measurement,
ModulLine . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page 72
IKR 050, coaxial . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page 72
Cold cathode measurement board, Measurement,
ModulLine . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page 77
Cold Cathode transmitters IKR, Measurement,
ActiveLine . . . . . . . . . . . . . . . . . . . . . . . . .Part 3.2 / from Page 50
IKR 251 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page 50
IKR 261 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page 50
IKR 270 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page 52
Combi-Feedthroughs, Flanged, Electrical and
Thermocouple, Type K,
Thermocouple Feedthroughs. . . . . . . . . . . . . . . Part 3.3 / Page 330
Compact Multi-stage Roots Pumps . . . . . . . Part 3.1 / from Page 178
A 100 L / A 100 L ES . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page 180
A 100 L and A 180 L . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page 178
A 180 L. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page 178
Components . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.3 / from Page 40
Accessories . . . . . . . . . . . . . . . . . . . . . . . Part 3.3 / from Page 212
CF. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.3 / from Page 144
COF . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.3 / from Page 194
ISO-K / ISO-F . . . . . . . . . . . . . . . . . . . . . . Part 3.3 / from Page 106
ISO-KF . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.3 / from Page 52
Viewports. . . . . . . . . . . . . . . . . . . . . . . . . Part 3.3 / from Page 200
Condensate separators, Rotary Vane Pumps,
Two-stage, DuoLine Accessories. . . . . . . . . . . . . Part 3.1 / Page 76
Condensate trap CT 25, Rotary Vane Pumps,
Two-stage, Pascal Accessories . . . . . . . . . . . . . Part 3.1 / Page 116
Contact Clamp for Wire Conductor and
Coaxial Feedthroughs, Electrical Feedthroughs Part 3.3 / Page 329
Contamination Management Solutions . . . . . Part 3.2 / from Page 170
APA 302 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page 174
APR 4300 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page 176
Control and display units, Turbopumps,
Hybrid Bearing, HiPace Accessories . . . . . . . . . Part 3.1 / Page 364
Control unit RVC 300 for EVR 116 and RME 005 A,
Valves, Gas dosing valves . . . . . . . . . . . . . . . . . Part 3.3 / Page 292
Control unit RVG 050 C for UDV 140 and UDV 146,
Valves, Gas dosing valves . . . . . . . . . . . . . . . . . Part 3.3 / Page 290
Controllers DPG, Measurement, DigiLine. . . . . . . . . . Part 3.2 / Page 28
DPG 202. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page 28
Controllers TPG, Measurement, ActiveLine . . Part 3.2 / from Page 64
TPG 256 A, controller for 6 gauges . . . . . . . . . . . Part 3.2 / Page 66
TPG 261, controller for 1 gauge. . . . . . . . . . . . . . Part 3.2 / Page 64
TPG 262, controller for 2 gauges . . . . . . . . . . . . . Part 3.2 / Page 65
Convection cooled Roots Pumps . . . . . . . . . . Part 3.1 / from Page 220
Okta 250 / M . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page 220
Okta 500 / M . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page 222
Okta 1000 / M . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page 224
Okta 2000 / M . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page 226
Okta 4000 / M . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page 228
Product index
D
D-Sub Feedthroughs, Flanged,
Electrical Feedthroughs. . . . . . . . . . . . . . . . . . . Part 3.3 / Page 323
D-Sub Feedthroughs, Weld Adapter, Male,
Electrical Feedthroughs. . . . . . . . . . . . . . . . . . . Part 3.3 / Page 325
DCU 002, Turbopumps, Hybrid Bearing,
DCU with integrated power supply, Turbopumps,
DE 1, Rotary Vane Pumps, Two-stage,
Pascal Accessories, External oil filter . . . . . . . . Part 3.1 / Page 121
DE 2, Rotary Vane Pumps, Two-stage,
Pascal Accessories, External oil filter . . . . . . . . Part 3.1 / Page 122
Diaphragm Pumps MVP. . . . . . . . . . . . . . . . . Part 3.1 / from Page 124
Diaphragm valves, manual, flange size
DN 16 KF to DN 40 KF. . . . . . . . . . . . . . . . . . . . Part 3.3 / Page 258
DigiLine Accessories, Measurement, DigiLine. . . . . . . Part 3.2 / Page 29
DigiLine, Measurement . . . . . . . . . . . . . . . . . . Part 3.2 / from Page 14
Controllers DPG . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page 28
DigiLine Accessories . . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page 29
Piezo-resistive Gauge CPT. . . . . . . . . . . . . . . . . . . Part 3.2 / Page 16
Piezo/Pirani Gauge RPT . . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page 18
Pirani Gauge PPT. . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page 20
Pirani/Bayard-Alpert Gauge HPT . . . . . . . . . . . . . . Part 3.2 / Page 24
Pirani/Cold Cathode Gauge MPT . . . . . . . . . . . . . . Part 3.2 / Page 22
Software DokuStar . . . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page 29
DPG 202, Measurement, DigiLine, Controllers DPG . .Part 3.2 / Page 28
Drive electronics, Turbopumps, Magnetically Levitated,
ATH Accessories . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page 430
DualGauge measurement equipment, Measurement,
ActiveLine . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page 61
TPG 262 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page 61
DuoLine, Rotary Vane Pumps, Two-stage . . . . Part 3.1 / from Page 46
Duo 1.6 / 1.6 M . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page 48
Duo 3 / 3 M . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page 50
Duo 6 / 5 M . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page 52
Duo 11 / 11 M . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page 54
Duo 20 M. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page 56
Duo 20 MC . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page 58
Duo 35 / 35 M . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page 60
Duo 65 / 65 M . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page 62
Duo 125 / 125 M . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page 64
Duo 255 / 255 M . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page 66
DuoLine Accessories, Rotary Vane Pumps,
Two-stage . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / from Page 68
Adsorption filter. . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page 78
Condensate separators . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page 76
Dust separators . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page 81
Exhaust pressure switch . . . . . . . . . . . . . . . . . . . .Part 3.1 / Page 83
Oil filter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page 80
Oil mist filter . . . . . . . . . . . . . . . . . . . . . . .Part 3.1 / from Page 68
Operating fluid level monitoring . . . . . . . . . . . . . . Part 3.1 / Page 82
Operations monitoring unit . . . . . . . . . . . . . . . . . . Part 3.1 / Page 82
Pressure monitoring . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page 83
Temperature monitoring . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page 83
Dust separators, Rotary Vane Pumps, Two-stage,
DuoLine Accessories . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page 81
DVC PX, flange sizes DN 16 ISO-KF to
DN 40 ISO-KF, Inline-Valves . . . . . . . . . Part 3.3 / from Page 252
DVC SX, flange sizes DN 16 ISO-KF to

DN 40 ISO-KF, Inline-Valves. . . . . . . . . . . . . . . . Part 3.3 / Page 251
E
Elastomer-sealed Rotary Feedthrough
DN 16 - 40 ISO-KF . . . . . . . . . . . . . . . . . Part 3.3 / from Page
DN 63 ISO-K . . . . . . . . . . . . . . . . . . . . . . Part 3.3 / from Page
Elastomer-sealed Rotary/Linear
Feedthrough DS . . . . . . . . . . . . . . . . . . . Part 3.3 / from Page
Feedthrough Long Version MDD . . . . . . Part 3.3 / from Page
Electrical Feedthroughs, Feedthroughs . . . . . Part 3.3 / from Page
Accessories for D-Sub Feedthroughs . . . . . . . . Part 3.3 / Page
Accessories for Electrical Feedthroughs
Round Socket . . . . . . . . . . . . . . . . . . . . . . . Part 3.3 / Page
Coaxial Feedthrough, Flanged, BNC . . . . . . . . . Part 3.3 / Page
Coaxial Feedthrough, Flanged, MHV . . . . . . . . . Part 3.3 / Page
Coaxial Feedthrough, Flanged, SHV . . . . . . . . . Part 3.3 / Page
Coaxial Feedthrough, Weld Adapter . . . . . . . . . Part 3.3 / Page
Contact Clamp for Wire Conductor and
Coaxial Feedthroughs . . . . . . . . . . . . . . . . . Part 3.3 / Page
D-Sub Feedthroughs, Flanged . . . . . . . . . . . . . . Part 3.3 / Page
D-Sub Feedthroughs, Weld Adapter, Male . . . . Part 3.3 / Page
Electrical Feedthrough (Wire Conductor),
Flanged, 1 kV, 20 A . . . . . . . . . . . . . . . . . . . Part 3.3 / Page
Flanged, 3 kV, 600 A . . . . . . . . . . . . . . . . . . Part 3.3 / Page
Flanged, 12 kV, 150 A . . . . . . . . . . . . . . . . . Part 3.3 / Page
Electrical Feedthrough Round Socket, Flanged . Part 3.3 / Page
Electrical Feedthroughs (Wire Conductor),
Flanged, with Silicone Plug. . . . . . . . . . . . . Part 3.3 / Page
Electrical Feedthroughs (Wire Conductor),
with Outside Plug, Flanged . . . . . . . . . . . . . Part 3.3 / Page
Plug Atmosphere Side . . . . . . . . . . . . . . . . . . . . Part 3.3 / Page
Plug-on Connectors for Wire Conductor and
Coaxial Feedthroughs . . . . . . . . . . . . . . . . . Part 3.3 / Page
Electropneumatic, Mini angle valves . . . . . . . . . . . . Part 3.3 / Page
Mini angle valves, without position indicator (PI),
DN 5 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.3 / Page
with pilot valve (PV), normally open, Valves,
All-metal angle valves . . . . . . . . . . . . . . Part 3.3 / from Page
DN 40 ISO-KF . . . . . . . . . . . . . . . . . . . . . . . Part 3.3 / Page
with pilot valve (PV), normally open, Valves,
Inline-Valves . . . . . . . . . . . . . . . . . . . . . . Part 3.3 / from Page
with pilot valve (PV), Valves,
All-metal angle valves . . . . . . . . . . . . . . Part 3.3 / from Page
343
342
348
346
306
327
328
306
308
310
312
329
323
325
314
321
315
319
316
317
320
318
326
322
324
313
329
276
276
246
246
246
246
256
234
234
236
Part 3.2 / Page 193
Index
Okta 6000 / M . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page 230

Okta 8000 / M . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page 232
Okta 18000 / M . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page 234
Cooling accessories, Turbopumps, Hybrid Bearing,
CPT 200, Measurement, DigiLine,
Piezo-resistive Gauge CPT. . . . . . . . . . . . . . . . . . . Part 3.2 / Page 16
Custom Chambers, Vacuum Chambers . . . . . . . . . . . . Part 3.3 / Page 36
Custom Components . . . . . . . . . . . . . . . . . . . . . . . . Part 3.3 / Page 216
Custom Manipulators . . . . . . . . . . . . . . . . . . . . . . . . Part 3.3 / Page 382
Product index
EVB PA, flange sizes DN 63 to DN 160 ISO-K . .Part 3.3 / Page 238
EVB PX, flange sizes DN 63 to DN 160 ISO-K . .Part 3.3 / Page 238
Electropneumatically, Valves,
HV gate valves . . . . . . . . . . . . . . . . . . . .Part 3.3 / from Page 265
SVV PA, flange sizes DN 16 ISO-KF to
DN 40 ISO-KF. . . . . . . . . . . . . . . . . . . . . . . .Part 3.3 / Page 265
Electropneumatically, Valves,
UHV gate valves . . . . . . . . . . . . . . . . . . . Part 3.3 / from Page 265
SVV PF, flange sizes DN 63 CF-F to
DN 200 CF-F. . . . . . . . . . . . . . . . . . . . . . . . .Part 3.3 / Page 272
SVV PM, flange size DN 40 CF-F . . . . . . . . . . . .Part 3.3 / Page 272
EVB PA, flange sizes DN 63 to DN 160 ISO-K,
All-metal angle valves . . . . . . . . . . . . . . .Part 3.3 / from Page 238
EVB PA, flange sizes DN 63 to DN 160 ISO-K,
All-metal angle valves . . . . . . . . . . . . . . . Part 3.3 / from Page 238
EVB PX, flange sizes DN 63 to DN 160 ISO-K,
EVB PX, flange sizes DN 63 to DN 160 ISO-K,
EVB SA, flange sizes DN 63 ISO-K to DN 100 ISO-K,
Angle valves . . . . . . . . . . . . . . . . . . . . . . . . . . . .Part 3.3 / Page 230
EVB SX, flange sizes DN 63 ISO-K to DN 100 ISO-K,
Angle valves . . . . . . . . . . . . . . . . . . . . . . . . . . . .Part 3.3 / Page 230
EVC 110 M, flange size DN 10 ISO-KF,
All-metal angle valves . . . . . . . . . . . . . . . . . . . . .Part 3.3 / Page 250
EVD 010 H, Coarse gas dosing valve. . . . . . . . . . . . .Part 3.3 / Page 282
EVN 116, Gas dosing valve with
separate shut-off valve . . . . . . . . . . . . . . . . . . . .Part 3.3 / Page 283
Exhaust pressure switch, Rotary Vane Pumps,
Two-stage, DuoLine Accessories . . . . . . . . . . . . . Part 3.1 / Page 83
External drive units, Turbopumps, Hybrid Bearing,
External oil filter, Rotary Vane Pumps, Two-stage,
Pascal Accessories . . . . . . . . . . . . . . . . . Part 3.1 / from Page 121
DE 1 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .Part 3.1 / Page 121
DE 2 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .Part 3.1 / Page 122
F
Feedthroughs . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.3 / from Page
Electrical Feedthroughs . . . . . . . . . . . . . Part 3.3 / from Page
Fluid Feedthroughs . . . . . . . . . . . . . . . . . Part 3.3 / from Page
Isolators . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .Part 3.3 / Page
Linear Feedthroughs . . . . . . . . . . . . . . . . Part 3.3 / from Page
Pipe Feedthroughs . . . . . . . . . . . . . . . . . . . . . . .Part 3.3 / Page
Rotary Feedthroughs . . . . . . . . . . . . . . . Part 3.3 / from Page
Rotary/Linear Feedthroughs . . . . . . . . . .Part 3.3 / from Page
Thermocouple Feedthroughs . . . . . . . . .Part 3.3 / from Page
Fluid Feedthroughs, Feedthroughs . . . . . . . . Part 3.3 / from Page
Fluid Feedthroughs CF . . . . . . . . . . . . . . . . . . . .Part 3.3 / Page
Fluid Feedthroughs ISO-KF . . . . . . . . . . . . . . . . .Part 3.3 / Page
Fluid Feedthroughs,
Thermally Insulated CF . . . . . . . . . . . . . . . .Part 3.3 / Page
Fluid Feedthroughs,
Thermally Insulated ISO-KF . . . . . . . . . . . . .Part 3.3 / Page
Fused Silica (Synthetic Amorphous Quartz),
Components, Viewports . . . . . . . . . . . . . . . . . . .Part 3.3 / Page
298
306
334
338
350
339
340
346
330
334
335
334
337
336
210
Index
G
Gas analysis, Analysis Equipment . . . . . . . . . Part 3.2 / from Page
Gas analysis in the pressure range up to 10-4 hPa,
Analysis Equipment . . . . . . . . . . . . . . . . Part 3.2 / from Page
HiQuad . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .Part 3.2 / Page
Gas analysis in the pressure range up to 10-2 hPa,
Analysis Equipment . . . . . . . . . . . . . . . . . . . . . .Part 3.2 / Page
SPM 220, 1-100 u . . . . . . . . . . . . . . . . . . . . . . . .Part 3.2 / Page
SPM 220, 1-200 u . . . . . . . . . . . . . . . . . . . . . . . .Part 3.2 / Page
Gas analysis in the pressure range up to 50 hPa,
Analysis Equipment . . . . . . . . . . . . . . . . Part 3.2 / from Page
HPA 220, 1-100 u . . . . . . . . . . . . . . . . . . . . . . . .Part 3.2 / Page
HPA 220, 1-200 u . . . . . . . . . . . . . . . . . . . . . . . .Part 3.2 / Page
HPA 220, 1-300 u . . . . . . . . . . . . . . . . . . . . . . . .Part 3.2 / Page
Page 194 / Part 3.2
104
114
116
112
112
112
108
110
110
110
Gas analysis in the pressure range up to 1.000 hPa,

Analysis Equipment . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page 104
OmniStar . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page 104
ThermoStar . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page 104
Gas dosing valve with separate shut-off valve,
Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.3 / Page 283
EVN 116 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.3 / Page 283
Gas dosing valves, Valves. . . . . . . . . . . . . . . . Part 3.3 / from Page 282
All-metal gas dosing valve. . . . . . . . . . . . . . . . . Part 3.3 / Page 284
Coarse gas dosing valve . . . . . . . . . . . . . . . . . . Part 3.3 / Page 282
Control unit RVC 300 for EVR 116 and
RME 005 A . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.3 / Page 292
Control unit RVG 050 C for UDV 140 and
UDV 146 . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.3 / Page 290
Gas dosing valve with separate shut-off valve . Part 3.3 / Page 283
Gas regulating valve . . . . . . . . . . . . . . . . Part 3.3 / from Page 286
Gas regulating valve, Valves,
Gas dosing valves . . . . . . . . . . . . . . . . . . Part 3.3 / from Page 286
Gas regulating valve EVR 116 . . . . . . . . . . . . . . Part 3.3 / Page 286
Gas regulating valve RME 005 A . . . . . . . . . . . . Part 3.3 / Page 288
Gas-circulation-cooled Roots Pumps . . . . . . . Part 3.1 / from Page 236
Okta 500 G . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page 236
Okta 1500 G . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page 238
Okta 4000 G . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page 240
Okta 8000 G . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page 242
Gate valve with Linear feedthrough,
HV gate valves . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.3 / Page 266
SVV PA, flange sizes DN 63 ISO-F to
DN 250 ISO-F . . . . . . . . . . . . . . . . . . . . . . . Part 3.3 / Page 266
Gate valve with Rotary Feedthrough,
HV gate valves . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.3 / Page 268
DN 250 ISO-F . . . . . . . . . . . . . . . . . . . . . . . Part 3.3 / Page 268
Gauge head accessories, Measurement, ModulLine . Part 3.2 / Page 74
GSD 320 O1, Analysis Equipment, Gas Analysis . . . Part 3.2 / Page 104
GSD 320 T1, Analysis Equipment, Gas Analysis . . . Part 3.2 / Page 104
H
Handheld Vacuum Gauge TPG, Measurement,
ActiveLine . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page 62
TPG 201 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page 62
TPG 202 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page 62
Heater band cables and water valve cables,
Turbopumps, Magnetically Levitated,
Heating accessories, Turbopumps, Hybrid Bearing,
Helium Leak Detection Systems,
System Technology . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page 182
Helium-Recovery-Unit (HRU), System Technology . Part 3.2 / Page 184
HenaLine, Rotary Vane Pumps, Single-stage . . Part 3.1 / from Page 14
Hena 25 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page 16
Hena 40 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page 18
Hena 60 i . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page 20
Hena 100 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page 22
Hena 200 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page 24
Hena 300 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page 26
Hena 400 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page 28
Hena 630 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page 30
Hena 1000 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page 32
Hena 1600 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page 34
HeptaDry, Screw Pumps . . . . . . . . . . . . . . . . Part 3.1 / from Page 142
Hepta 100 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page 148
Hepta 200 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page 150
Hepta 300 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page 152
Hepta 400 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page 154
Hepta 600 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page 156
Product index
452
450
456
146
146
146
150
150
150
142
142
280
282
286
290
298
312
320
328
384
398
386
390
394
336
338
344
350
354
360
378
365
370
372
380
364
370
364
362
367
371
365
366
374
374
380
376
376
377
380
360
361
369
368
368
379
370
116
116
116
116
116
QMG 700, 1-340 u . . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page 116

QMG 700, 1-512 u . . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page 116
Hot Cathode transmitters IMR, Measurement,
ActiveLine. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page 56
IMR 265 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page 56
HPA 220, 1-100 u, Analysis Equipment, Gas analysis
in the pressure range up to 50 hPa . . . . . . . . . . Part 3.2 / Page 110
HPT 200, Measurement, DigiLine,
Pirani/Bayard-Alpert Gauge HPT . . . . . . . . . . . . . Part 3.2 / Page 24
HPU 001, Turbopumps, Hybrid Bearing,
HV gate valves, Valves . . . . . . . . . . . . . . . . . . Part 3.3 / from Page 263
Electropneumatically . . . . . . . . . . . . . . . . . . . . . Part 3.3 / Page 265
Gate valve with Linear feedthrough . . . . . . . . . . Part 3.3 / Page 266
Gate valve with Rotary Feedthrough . . . . . . . . . Part 3.3 / Page 268
Manual . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.3 / from Page 263
Hybrid Bearing, Turbopumps . . . . . . . . . . . . .Part 3.1 / from Page 278
HiPace 10-800 l/s . . . . . . . . . . . . . . . . . . .Part 3.1 / from Page 280
HiPace 1200-2300 l/s . . . . . . . . . . . . . . . .Part 3.1 / from Page 336
HiPace Accessories . . . . . . . . . . . . . . . . . Part 3.1 / from Page 360
I
IKR 050, coaxial, Measurement, ModulLine,
Cold cathode gauge heads. . . . . . . . . . . . . . . . . . Part 3.2 / Page 72
IKR 251, Measurement, ActiveLine,
Cold Cathode transmitters . . . . . . . . . . . . . . . . . . Part 3.2 / Page 50
IMR 265, Measurement, ActiveLine,
Hot Cathode transmitters. . . . . . . . . . . . . . . . . . . Part 3.2 / Page 56
Inlet dust filter DFT 25, Rotary Vane Pumps,
Two-stage, Pascal Accessories . . . . . . . . . . . . . Part 3.1 / Page 112
Inlet screen kit, Turbopumps,
Inline-Valves, Valves . . . . . . . . . . . . . . . . . . . . Part 3.3 / from Page 251
with pilot valve (PV), normally open . . . . . . Part 3.3 / Page 256
Manual actuated . . . . . . . . . . . . . . . . . . .Part 3.3 / from Page 251
without pilot valve (PV) . . . . . . . . . . . . . . . . Part 3.3 / Page 254
Interconnecting cable between pump and
external drive electonics (Magpower),
Turbopumps, Magnetically Levitated,
Interface and relay boards, Measurement,
ModulLine, Measurement boards . . . . . . . . . . . . Part 3.2 / Page 79
ISO-F Ports, Vacuum Chambers . . . . . . . . . . . . . . . . . Part 3.3 / Page 32
ISO-F Quick-Access-Door, Vacuum Chambers . . . . . . Part 3.3 / Page 34
ISO-F Viewport, Components, Viewports . . . . . . . . . Part 3.3 / Page 205
ISO-K / ISO-F, Components. . . . . . . . . . . . . . .Part 3.3 / from Page 106
ISO-F Blank Flange. . . . . . . . . . . . . . . . . . . . . . . Part 3.3 / Page 115
ISO-F Measurement Flange . . . . . . . . . . . . . . . . Part 3.3 / Page 122
ISO-F Quick-Access-Door. . . . . . . . . . . . . . . . . . Part 3.3 / Page 121
ISO-F Weld Flange . . . . . . . . . . . . . . . . . . . . . . . Part 3.3 / Page 117
ISO-K 6-Way Cross. . . . . . . . . . . . . . . . . . . . . . . Part 3.3 / Page 130
ISO-K 90 Elbow, Mitered . . . . . . . . . . . . . . . . . Part 3.3 / Page 125
ISO-K 90 Elbow, Radius . . . . . . . . . . . . . . . . . . Part 3.3 / Page 124
ISO-K Blank Flange . . . . . . . . . . . . . . . . . . . . . . Part 3.3 / Page 114
ISO-K Centering Ring with Outer Ring . . . . . . . . Part 3.3 / Page 110
ISO-K Centering Ring with Screen . . . . . . . . . . . Part 3.3 / Page 111
ISO-K Claw Clamp . . . . . . . . . . . . . . . . . . . . . . . Part 3.3 / Page 107
Part 3.2 / Page 195
Index
HiCube Classic, Turbopumps,

Turbo Pumping Stations . . . . . . . . . . . . . . . . . . Part 3.1 / Page
HiCube Eco, Turbopumps,
HiCube Pro, Turbopumps,
High performance - Compact, Leak Detectors. . . . . Part 3.2 / Page
ASM 182 T. . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page
ASM 182 TD+ . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page
High performance - Console, Leak Detectors . . . . . Part 3.2 / Page
ASM 192 T. . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page
ASM 192 T2D+ . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page
High performance - Mobile, Leak Detectors . . . . . . Part 3.2 / Page
ASM 380 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page
HiPace 10-800 l/s, Turbopumps,
Hybrid Bearing. . . . . . . . . . . . . . . . . . . . . Part 3.1 / from Page
HiPace 10 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page
HiPace 60 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page
HiPace 80 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page
HiPace 300 . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page
HiPace 400 . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page
HiPace 700 . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page
HiPace 800 . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page
HiPace 300-800, ATH 500 M, Turbopumps,
ATH 500 M . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page
HiPace 300 M . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page
HiPace 1200-2300 l/s, Turbopumps,
HiPace 1200 . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page
HiPace 1500 . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page
HiPace 1800 . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page
HiPace 2300 . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page
HiPace Accessories, Turbopumps,
Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page
Accessories package for HPU . . . . . . . . . . . . . . Part 3.1 / Page
Air cooling . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page
Backing pump control . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page
Centering rings . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page
Control and display units. . . . . . . . . . . . . . . . . . Part 3.1 / Page
Cooling accessories. . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page
DCU 002 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page
DCU with integrated power supply . . . . . . . . . . Part 3.1 / Page
External drive units . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page
Heating accessories . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page
HPU 001 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page
Mains cables and connection cables . . . . . . . . Part 3.1 / Page
Mounting kits . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page
Mounting materials . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page
Protection screen . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page
Set of hexagon screws for trough hole . . . . . . . Part 3.1 / Page
Set of stud screws for tapped hole . . . . . . . . . . Part 3.1 / Page
Set of stud screws for trough hole . . . . . . . . . . Part 3.1 / Page
Splinter screen. . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page
TPS wall rail fitting . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page
TPS-mains pack 19" rack module . . . . . . . . . . . Part 3.1 / Page
TTV 001 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page
Venting accessories . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page
Venting valve, shielded . . . . . . . . . . . . . . . . . . . Part 3.1 / Page
Vibration dampers . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page
Water cooling . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page
HiQuad, Analysis Equipment, Gas Analysis,
Gas analysis in the pressure range
up to 10-4 hPa . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page
QMG 700, 1-1024 u. . . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page
QMG 700, 1-128 u . . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page
QMG 700, 1-2048 u. . . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page
QMG 700, 1-300 u . . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page
Index
Product index
ISO-K Conical Reducer . . . . . . . . . . . . . . . . . . . .Part 3.3 / Page 132

ISO-K Corrugated Hose, Flexible . . . . . . . . . . . .Part 3.3 / Page 138
ISO-K Corrugated Hose, Flexible, Annealed . . . .Part 3.3 / Page 139
ISO-K CR Sleeve . . . . . . . . . . . . . . . . . . . . . . . . .Part 3.3 / Page 141
ISO-K Cross . . . . . . . . . . . . . . . . . . . . . . . . . . . . .Part 3.3 / Page 128
ISO-K Double Claw Clamp . . . . . . . . . . . . . . . . .Part 3.3 / Page 106
ISO-K Double Claw Clamp, Aluminum . . . . . . . .Part 3.3 / Page 107
ISO-K Flange Cap . . . . . . . . . . . . . . . . . . . . . . . .Part 3.3 / Page 122
ISO-K Flange with Pipe Thread and FPM Seal,
Male . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .Part 3.3 / Page 133
ISO-K Full Nipple. . . . . . . . . . . . . . . . . . . . . . . . .Part 3.3 / Page 123
ISO-K Half Nipple . . . . . . . . . . . . . . . . . . . . . . . .Part 3.3 / Page 118
ISO-K Hose Adapter . . . . . . . . . . . . . . . . . . . . . .Part 3.3 / Page 137
ISO-K Instrument Cross . . . . . . . . . . . . . . . . . . .Part 3.3 / Page 130
ISO-K Metal Seal, Aligned at Inner Diameter . . .Part 3.3 / Page 113
ISO-K O-Rings . . . . . . . . . . . . . . . . . . . . . . . . . . .Part 3.3 / Page 112
ISO-K PVC Hose with Embedded Spring . . . . . .Part 3.3 / Page 142
ISO-K PVC Hose with Embedded Spring and
Flanges. . . . . . . . . . . . . . . . . . . . . . . . . . . . .Part 3.3 / Page 142
ISO-K Reducer Cross. . . . . . . . . . . . . . . . . . . . . .Part 3.3 / Page 128
ISO-K Reducer Tee . . . . . . . . . . . . . . . . . . . . . . .Part 3.3 / Page 126
ISO-K Reducer, Straight . . . . . . . . . . . . . . . . . . .Part 3.3 / Page 131
ISO-K Rotatable Bolt Ring . . . . . . . . . . . . . . . . . .Part 3.3 / Page 119
ISO-K Single Claw Clamp for Base Plate with
Sealing Groove. . . . . . . . . . . . . . . . . . . . . . .Part 3.3 / Page 109
ISO-K Sleeve Coupling . . . . . . . . . . . . . . . . . . . .Part 3.3 / Page 136
ISO-K Spring Bellow with Weld Ends . . . . . . . . .Part 3.3 / Page 140
ISO-K Tee . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .Part 3.3 / Page 125
ISO-K to ISO-KF Adapter Cross. . . . . . . . . . . . . .Part 3.3 / Page 129
ISO-K to ISO-KF Reducer Tee . . . . . . . . . . . . . . .Part 3.3 / Page 127
ISO-K Weld Ring Flange . . . . . . . . . . . . . . . . . . .Part 3.3 / Page 116
ISO-K/CF Adapter . . . . . . . . . . . . . . . . . . . . . . . .Part 3.3 / Page 136
ISO-K/ISO-F Adapter Flange . . . . . . . . . . . . . . . .Part 3.3 / Page 120
ISO-K/ISO-F Screw Set . . . . . . . . . . . . . . . . . . . .Part 3.3 / Page 109
ISO-K/KF Conical Adapter . . . . . . . . . . . . . . . . . .Part 3.3 / Page 135
ISO-K/KF Straight Adapter . . . . . . . . . . . . . . . . .Part 3.3 / Page 134
ISO-K Hose Clamp, Components, Accessories . . . . .Part 3.3 / Page 215
ISO-K Ports, Vacuum Chambers . . . . . . . . . . . . . . . . . Part 3.3 / Page 31
ISO-K Viewport, Components, Viewports . . . . . . . . .Part 3.3 / Page 203
ISO-KF Glass Blank Flange, Components, Viewports Part 3.3 / Page 202
ISO-KF Hose Clamp, Components, Accessories . . . .Part 3.3 / Page 215
ISO-KF Ports, Vacuum Chambers . . . . . . . . . . . . . . . . Part 3.3 / Page 30
ISO-KF Viewport, Borosilicate, Components,
ISO-KF Viewport, Fused Silica
(Synthetic Amorphous Quartz),
Components, Viewports . . . . . . . . . . . . . . . . . . .Part 3.3 / Page 200
ISO-KF Viewport, Sapphire, Components,
ISO-KF, Components . . . . . . . . . . . . . . . . . . . . .Part 3.3 / from Page 52
ISO-K/KF Conical Adapter . . . . . . . . . . . . . . . . . . . Part 3.3 / Page 92
ISO-K/KF Straight Adapter . . . . . . . . . . . . . . . . . . Part 3.3 / Page 91
ISO-KF 4-Way Cross . . . . . . . . . . . . . . . . . . . . . . . Part 3.3 / Page 77
ISO-KF 90 Elbow with Hose Adapter. . . . . . . . . . Part 3.3 / Page 96
ISO-KF Adapter for PVC Hose. . . . . . . . . . . . . . . . Part 3.3 / Page 95
ISO-KF Blank Flange . . . . . . . . . . . . . . . . . . . . . . . Part 3.3 / Page 66
ISO-KF Bulkhead Clamp . . . . . . . . . . . . . . . . . . . . Part 3.3 / Page 65
ISO-KF Centering Ring . . . . . . . . . . . . . . . . . . . . . Part 3.3 / Page 52
ISO-KF Centering Ring with Screen . . . . . . . . . . . Part 3.3 / Page 57
ISO-KF Centering Ring with Sintered Metal Filter Part 3.3 / Page 57
ISO-KF Centering Ring, Plastic . . . . . . . . . . . . . . . Part 3.3 / Page 53
ISO-KF Chain Clamp, Aluminum. . . . . . . . . . . . . . Part 3.3 / Page 64
ISO-KF Clamp (3-Part) for Metal Seals . . . . . . . . . Part 3.3 / Page 62
ISO-KF Clamp for Elastomer Seal . . . . . . . . . . . . . Part 3.3 / Page 60
ISO-KF Clamp for Metal Seals . . . . . . . . . . . . . . . Part 3.3 / Page 62
ISO-KF Clamping Ring for Elastomer Seal,
Plastic . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.3 / Page 61
ISO-KF Clamping Ring for Elastomer Seals . . . . . Part 3.3 / Page 63
ISO-KF Claw Clamp. . . . . . . . . . . . . . . . . . . . . . . . Part 3.3 / Page 64
ISO-KF Conical Reducer . . . . . . . . . . . . . . . . . . . . Part 3.3 / Page 81
ISO-KF Corrugated Hose, Flexible. . . . . . . . . . . . . Part 3.3 / Page 97
Page 196 / Part 3.2
ISO-KF Corrugated Hose, Flexible, Annealed . . . Part 3.3 / Page 98

ISO-KF Corrugated Hose, Highly Flexible,
Thin-wall . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.3 / Page 99
ISO-KF Corrugated Hose, Sheathed . . . . . . . . . Part 3.3 / Page 100
ISO-KF CR Sleeve. . . . . . . . . . . . . . . . . . . . . . . . Part 3.3 / Page 103
ISO-KF Edged Seal. . . . . . . . . . . . . . . . . . . . . . . . Part 3.3 / Page 59
ISO-KF Elbow, 90 . . . . . . . . . . . . . . . . . . . . . . . Part 3.3 / Page 73
ISO-KF Elbow, Radius, 45. . . . . . . . . . . . . . . . . . Part 3.3 / Page 72
ISO-KF Elbow, Radius, 90. . . . . . . . . . . . . . . . . . Part 3.3 / Page 71
ISO-KF Flange Cap. . . . . . . . . . . . . . . . . . . . . . . . Part 3.3 / Page 69
ISO-KF Flange with NPT Thread, Female. . . . . . . Part 3.3 / Page 90
ISO-KF Flange with NPT Thread, Male . . . . . . . . Part 3.3 / Page 90
ISO-KF Flange with Pipe Thread and FKM Seal,
Female . . . . . . . . . . . . . . . . . . . . . . . . Part 3.3 / from Page 84
ISO-KF Flange with Pipe Thread, w/o Seal,
Female . . . . . . . . . . . . . . . . . . . . . . . . Part 3.3 / from Page 83
ISO-KF Full Nipple . . . . . . . . . . . . . . . . . . . . . . . . Part 3.3 / Page 70
ISO-KF Half Nipple. . . . . . . . . . . . . . . . . . . . . . . . Part 3.3 / Page 68
ISO-KF Hingeless Clamp . . . . . . . . . . . . . . . . . . . Part 3.3 / Page 63
ISO-KF Hose Connector . . . . . . . . . . . . . . . . . . . . Part 3.3 / Page 94
ISO-KF O-Ring . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.3 / Page 58
ISO-KF Outer Centering Ring . . . . . . . . . . . . . . . . Part 3.3 / Page 55
ISO-KF Outer Centering Ring with
Inner Support Ring . . . . . . . . . . . . . . . . . . . . Part 3.3 / Page 56
ISO-KF PVC Hose with Embedded Spring . . . . . Part 3.3 / Page 105
ISO-KF PVC Hose with Embedded Spring and
Flanges . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.3 / Page 104
ISO-KF Quick-Release Clamp. . . . . . . . . . . . . . . . Part 3.3 / Page 61
ISO-KF Reducer Cross . . . . . . . . . . . . . . . . . . . . . Part 3.3 / Page 79
ISO-KF Reducer Elbow . . . . . . . . . . . . . . . . . . . . Part 3.3 / Page 82
ISO-KF Reducer Tee. . . . . . . . . . . . . . . . . . . . . . . Part 3.3 / Page 76
ISO-KF ReduzierCentering Ring . . . . . . . . . . . . . . Part 3.3 / Page 54
ISO-KF Rubber Hose . . . . . . . . . . . . . . . . . . . . . Part 3.3 / Page 105
ISO-KF Spring Bellows. . . . . . . . . . . . . . . . . . . . Part 3.3 / Page 102
ISO-KF Spring Bellows with Weld Ends . . . . . . Part 3.3 / Page 101
ISO-KF Straight Reducer . . . . . . . . . . . . . . . . . . . Part 3.3 / Page 80
ISO-KF Swagelok Adapter . . . . . . . . . . . . . . . . . Part 3.3 / Page 87
ISO-KF Tee . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.3 / Page 74
ISO-KF VCR Adapter, Female . . . . . . . . . . . . . . . Part 3.3 / Page 88
ISO-KF VCR Adapter, Male . . . . . . . . . . . . . . . . . Part 3.3 / Page 89
ISO-KF Weld Ring Flange . . . . . . . . . . . . . . . . . . Part 3.3 / Page 67
ISO-KF/CF Adapter. . . . . . . . . . . . . . . . . . . . . . . . Part 3.3 / Page 93
ISO-KF, ISO-K, CF Glass Retainers, Components,
Viewports. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.3 / Page 208
Isolators, Feedthroughs . . . . . . . . . . . . . . . . . . . . . . Part 3.3 / Page 338
Isolators CF . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.3 / Page 338
Isolators ISO-KF . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.3 / Page 338
L
Leak Detectors . . . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / from Page
High performance - Compact . . . . . . . . . . . . . . Part 3.2 / Page
High performance - Console . . . . . . . . . . . . . . . Part 3.2 / Page
High performance - Mobile . . . . . . . . . . . . . . . . Part 3.2 / Page
Leak Detectors Accessories. . . . . . . . . . . . . . . . Part 3.2 / Page
Modular . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page
Multipurpose . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page
Portable . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / from Page
Sniffing. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page
Workstation . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page
Leak Detectors Accessories, Leak Detectors . . . . . . Part 3.2 / Page
Linear Feedthroughs, Feedthroughs. . . . . . . . Part 3.3 / from Page
Bellows-sealed Linear Feedthrough . . . . . . . . . Part 3.3 / Page
Bellows-sealed Precision Linear Feedthrough . . Part 3.3 / Page
Bellows-sealed Precision Linear Feedthrough
Motorized . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.3 / Page
Liquid nitrogen trap, Rotary Vane Pumps,
Two-stage, Pascal Accessories . . . . . . . . Part 3.1 / from Page
LNT 25 C . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page
LNT 25 P1 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page
LNT 25 S . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page
120
146
150
142
166
158
138
130
162
154
166
350
350
351
352
113
114
115
113
LNT 25 C, Rotary Vane Pumps, Two-stage,

Pascal Accessories, Liquid nitrogen trap . . . . . Part 3.1 / Page 114
LNT 25 P1, Rotary Vane Pumps, Two-stage,
LNT 25 S, Rotary Vane Pumps, Two-stage,
M
Magnetically Guided Rotary/Linear
Feedthrough MDM . . . . . . . . . . . . . . . . . Part 3.3 / from Page
Magnetically Levitated, Turbopumps. . . . . . . Part 3.1 / from Page
ATH 1600-2300 M . . . . . . . . . . . . . . . . . . Part 3.1 / from Page
ATH Accessories . . . . . . . . . . . . . . . . . . . Part 3.1 / from Page
HiPace 300-800, ATH 500 M. . . . . . . . . . Part 3.1 / from Page
Mains cable, Turbopumps,
Magnetically Levitated, ATH Accessories . . . . . Part 3.1 / Page
Mains cables and connection cables, Turbopumps,
Hybrid Bearing, HiPace Accessories . . . . . . . . . Part 3.1 / Page
Mains pack, Turbopumps, Magnetically Levitated,
ATH Accessories . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page
Manipulators . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.3 / from Page
Feedthroughs DS . . . . . . . . . . . . . . . . . . . . Part 3.3 / Page
Feedthroughs MDD . . . . . . . . . . . . . . . . . . Part 3.3 / Page
Feedthroughs MDM . . . . . . . . . . . . . . . . . . Part 3.3 / Page
Bellows-sealed Linear Feedthroughs . . . . . . . . Part 3.3 / Page
Bellows-sealed Precision Linear Feedthrough . Part 3.3 / Page
Bellows-sealed Precision Linear Feedthrough
Motorized . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.3 / Page
Bellows-sealed Rotary Feedthrough . . . . . . . . . Part 3.3 / Page
Pneumatic . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.3 / Page
Feedthroughs MDD . . . . . . . . . . . . . . . . . . Part 3.3 / Page
Custom Manipulators . . . . . . . . . . . . . . . . . . . . Part 3.3 / Page
DN 16 - 40 ISO-KF . . . . . . . . . . . . . . . . . . . Part 3.3 / Page
DN 63 ISO-K . . . . . . . . . . . . . . . . . . . . . . . . Part 3.3 / Page
Feedthrough DS . . . . . . . . . . . . . . . . . . . . . Part 3.3 / Page
Feedthrough Long Version MDD . . . . . . . . Part 3.3 / Page
Feedthrough MDM . . . . . . . . . . . . . . . . . . . Part 3.3 / Page
Port Aligner for Angular and Linear Adjustment Part 3.3 / Page
Rotary Magnetic Feedthrough . . . . . . . . . . . . . Part 3.3 / Page
Rotary Magnetic Feedthrough, Motorized . . . . Part 3.3 / Page
Rotary Manipulator, Differentially-pumped. . . . Part 3.3 / Page
Standard Manipulators . . . . . . . . . . . . . . . . . . . Part 3.3 / Page
XY-Axis Precision Manipulator . . . . . . . . . . . . . Part 3.3 / Page
XY-Axis Precision Manipulator Motorized. . . . . Part 3.3 / Page
XYZ-Axis Precision Manipulator . . . . . . . . . . . . Part 3.3 / Page
Z-Axis Precision Manipulator . . . . . . . . . . . . . . Part 3.3 / Page
Z-Axis Precision Manipulator Motorized . . . . . . Part 3.3 / Page
Mantle Thermocouple Feedthroughs . . . . . . . . . . . . Part 3.3 / Page
Manual actuated Angle Valves. . . . . . . . . . . . Part 3.3 / from Page
AVC SA, flange sizes DN 16 ISO-KF to
AVC SX, flange sizes DN 16 ISO-KF to
EVB SA, flange sizes DN 63 ISO-K to
DN 100 ISO-K . . . . . . . . . . . . . . . . . . . . . . . Part 3.3 / Page
EVB SX, flange sizes DN 63 ISO-K to
DN 100 ISO-K . . . . . . . . . . . . . . . . . . . . . . . Part 3.3 / Page
UVH VI, flange sizes DN 16 CF to DN 63 CF. . . Part 3.3 / Page
Manual actuated Butterfly valves. . . . . . . . . . Part 3.3 / from Page
DN 16 KF to DN 50 KF, aluminum . . . . . . . . . . Part 3.3 / Page
DN 16 KF to DN 50 KF, stainless steel . . . . . . . Part 3.3 / Page
349
382
404
430
384
434
366
431
354
377
376
378
379
380
381
369
370
376
382
372
371
377
375
378
368
373
374
367
362
364
365
366
362
363
333
228
228
228
230
230
232
259
259
260
DN 63 ISO-F, aluminum . . . . . . . . . . . . . . . . . . . Part 3.3 / Page 261

DN 63 ISO-F, stainless steel. . . . . . . . . . . . . . . . Part 3.3 / Page 262
Manual actuatd HV gate valves . . . . . . . . . . . Part 3.3 / from Page 263
SVV HA, flange sizes DN 16 ISO-KF to
DN 40 ISO-KF . . . . . . . . . . . . . . . . . . . . . . . Part 3.3 / Page 263
SVV HA, flange sizes DN 63 ISO-F to
DN 160 ISO-F . . . . . . . . . . . . . . . . . . . . . . . Part 3.3 / Page 264
Manual actuated Inline Valves . . . . . . . . . . . .Part 3.3 / from Page 251
DVC SX, flange sizes DN 16 ISO-KF to
Manual actuated Mini angle valves . . . . . . . . . . . . . Part 3.3 / Page 274
Manual actuated UHV gate valves . . . . . . . . . . . . . . Part 3.3 / Page 270
SVV HF, flange sizes DN 63 CF-F to
DN 200 CF-F . . . . . . . . . . . . . . . . . . . . . . . . Part 3.3 / Page 270
SVV HM, flange size DN 40 CF-F . . . . . . . . . . . . Part 3.3 / Page 270
Manual actuated Venting valves. . . . . . . . . . . . . . . . Part 3.3 / Page 280
DN 10 ISO-KF, brass, nickel-plated . . . . . . . . . . Part 3.3 / Page 280
DN 10 ISO-KF, stainless steel. . . . . . . . . . . . . . . Part 3.3 / Page 280
Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / from Page 14
ActiveLine. . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / from Page 30
DigiLine . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / from Page 14
ModulLine . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / from Page 68
Measurement boards, Measurement,
ModulLine . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / from Page 76
Cold cathode measurement board. . . . . . . . . . . . Part 3.2 / Page 77
Interface and relay boards . . . . . . . . . . . . . . . . . . Part 3.2 / Page 79
Pirani measurement board . . . . . . . . . . . . . . . . . . Part 3.2 / Page 76
Pirani/cold cathode measurement board . . . . . . . Part 3.2 / Page 78
Mini angle valves, Valves . . . . . . . . . . . . . . . . Part 3.3 / from Page 274
Electropneumatic . . . . . . . . . . . . . . . . . . . . . . . . Part 3.3 / Page 276
Manual . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.3 / Page 274
Solenoid actuated . . . . . . . . . . . . . . . . . . . . . . . Part 3.3 / Page 275
Mini inline valves, Valves . . . . . . . . . . . . . . . . . . . . . Part 3.3 / Page 278
Solenoid actuated . . . . . . . . . . . . . . . . . . . . . . . Part 3.3 / Page 278
MiniTest 300, Leak Detectors, Portable . . . . . . . . . . Part 3.2 / Page 130
Modular, Leak Detectors. . . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page 158
ASI 30. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page 158
ModulLine, Measurement . . . . . . . . . . . . . . . . . Part 3.2 / from Page 68
Cold cathode gauge heads IKR . . . . . . . . . . . . . . Part 3.2 / Page 72
Gauge head accessories . . . . . . . . . . . . . . . . . . . Part 3.2 / Page 74
Measurement boards . . . . . . . . . . . . . . . . . Part 3.2 / from Page 76
Pirani gauge heads TPG . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page 70
TPG 300, basic unit . . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page 80
TPG 300, complete units . . . . . . . . . . . . . . . . . . . Part 3.2 / Page 82
TPG 300, complete units with
measurement boards and power cords . . . . Part 3.2 / Page 82
Mounting bolts, Turbopumps, Magnetically Levitated,
Mounting kits, Turbopumps, Hybrid Bearing,
Mounting materials, Turbopumps, Hybrid Bearing,
Mounting Table, Vacuum Chambers . . . . . . . . . . . . . Part 3.3 / Page 27
MPT 200, Measurement, DigiLine, Pirani/
Cold Cathode Gauge MPT . . . . . . . . . . . . . . . . . . Part 3.2 / Page 22
Multi-stage Roots Pumps . . . . . . . . . . . . . . . .Part 3.1 / from Page 158
A4 Serie . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page 206
AD73 KH . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page 208
Air cooled . . . . . . . . . . . . . . . . . . . . . . . . .Part 3.1 / from Page 164
Compact. . . . . . . . . . . . . . . . . . . . . . . . . .Part 3.1 / from Page 178
Harsh Duty Applications . . . . . . . . . . . . . Part 3.1 / from Page 200
Industrial . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / from Page 184
Medium Duty Applications . . . . . . . . . . . Part 3.1 / from Page 194
Multi-stage Roots Pumps for
Harsh Duty Applications . . . . . . . . . . . . .Part 3.1 / from Page 200
A 203 H . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page 202
A 803 H . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page 202
A 1503 H . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page 202
Part 3.2 / Page 197
Index
Product index
Product index
A 1803 H . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .Part 3.1 / Page

A3H Serie . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .Part 3.1 / Page
Industrial Applications . . . . . . . . . . . . . . Part 3.1 / from Page
ACG 600 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .Part 3.1 / Page
ACP 120 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .Part 3.1 / Page
ACP 120/ACG 600 . . . . . . . . . . . . . . . . . . . . . . . .Part 3.1 / Page
Medium Duty Applications, . . . . . . . . . . Part 3.1 / from Page
A 203 P . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .Part 3.1 / Page
A 603 P . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .Part 3.1 / Page
A 1003 P . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .Part 3.1 / Page
A3P Serie . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .Part 3.1 / Page
Multipurpose Leak Detectors. . . . . . . . . . . . . . . . . . .Part 3.2 / Page
ASM 340 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .Part 3.2 / Page
ASM 340 D . . . . . . . . . . . . . . . . . . . . . . . . . . . . .Part 3.2 / Page
MVP, Diaphragm Pumps . . . . . . . . . . . . . . . . Part 3.1 / from Page
MVP 006-4 . . . . . . . . . . . . . . . . . . . . . . . . . . . . .Part 3.1 / Page
MVP 015-2 / MVP 015-4 . . . . . . . . . . . . . . . . . . .Part 3.1 / Page
MVP 020-3 . . . . . . . . . . . . . . . . . . . . . . . . . . . . .Part 3.1 / Page
MVP 030-3 . . . . . . . . . . . . . . . . . . . . . . . . . . . . .Part 3.1 / Page
MVP 040-2 . . . . . . . . . . . . . . . . . . . . . . . . . . . . .Part 3.1 / Page
MVP 070-3 . . . . . . . . . . . . . . . . . . . . . . . . . . . . .Part 3.1 / Page
202
200
184
190
186
184
194
196
196
196
194
138
138
138
124
130
132
134
136
138
140
Index
O
Oil drain kit, Rotary Vane Pumps, Two-stage,
OKD 1 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .Part 3.1 / Page 105
OKD 2 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .Part 3.1 / Page 106
OKD 136 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .Part 3.1 / Page 107
OKD 236 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .Part 3.1 / Page 108
Oil filter, Rotary Vane Pumps, Two-stage,
DuoLine Accessories. . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page 80
Oil level switch, Rotary Vane Pumps,
Two-stage, Pascal Accessories. . . . . . . . Part 3.1 / from Page 119
OLS 4 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .Part 3.1 / Page 119
OLS 36 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .Part 3.1 / Page 120
Oil mist eliminator, Rotary Vane Pumps,
Two-stage, Pascal Accessories. . . . . . . . . .Part 3.1 / from Page 98
OME 25 HP . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page 99
OME 25 HP+ . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page 99
OME 25 HPC/H . . . . . . . . . . . . . . . . . . . . . . . . . .Part 3.1 / Page 100
OME 25 S . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page 98
OME 40 C1 . . . . . . . . . . . . . . . . . . . . . . . . . . . . .Part 3.1 / Page 103
OME 40 C2 . . . . . . . . . . . . . . . . . . . . . . . . . . . . .Part 3.1 / Page 104
OME 40 HP+ . . . . . . . . . . . . . . . . . . . . . . . . . . . .Part 3.1 / Page 102
OME 40 S . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .Part 3.1 / Page 101
Oil mist filter, Rotary Vane Pumps,
Two-stage, DuoLine Accessories . . . . . . . .Part 3.1 / from Page 68
ONF 16 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page 68
ONF 25 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page 70
ONF 35/65 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page 72
ONF 63 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page 74
ONF 100 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page 74
ONF 160 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page 74
OKD 1, Rotary Vane Pumps, Two-stage,
Pascal Accessories, Oil drain kit . . . . . . . . . . . . .Part 3.1 / Page 107
Okta, Roots Pumps, Convection cooled . . . . Part 3.1 / from Page 220
Okta 250 / M, Roots Pumps,
Convection cooled . . . . . . . . . . . . . . . . . . . .Part 3.1 / Page 220
Convection cooled . . . . . . . . . . . . . . . . . . . Part 3.1 / Page 222
Convection cooled . . . . . . . . . . . . . . . . . . . .Part 3.1 / Page 224
Page 198 / Part 3.2

Okta, Roots Pumps, Gas-circulation-cooled . . Part 3.1 / from Page 236
Okta 500 G, Roots Pumps,
Gas-circulation-cooled . . . . . . . . . . . . . . . . Part 3.1 / Page 236
Okta ATEX, Roots Pumps, ATEX . . . . . . . . . . Part 3.1 / from Page 244
Okta 500 ATEX, Roots Pumps, ATEX . . . . . . . . Part 3.1 / Page 244
Okta 1000 ATEX, Roots Pumps, ATEX . . . . . . . Part 3.1 / Page 246
OLS 4, Rotary Vane Pumps, Two-stage,
Pascal Accessories, Oil level switch . . . . . . . . . Part 3.1 / Page 119
OLS 36, Rotary Vane Pumps, Two-stage,
Pascal Accessories, Oil level switch . . . . . . . . . Part 3.1 / Page 120
OME 25 HP, Rotary Vane Pumps, Two-stage,
Pascal Accessories, Oil mist eliminator . . . . . . . . Part 3.1 / Page 99
OME 25 HP+, Rotary Vane Pumps, Two-stage,
OME 25 HPC/H, Rotary Vane Pumps, Two-stage,
Pascal Accessories, Oil mist eliminator . . . . . . . Part 3.1 / Page 100
OME 25 S, Rotary Vane Pumps, Two-stage,
OME 40 C1, Rotary Vane Pumps, Two-stage,
OME 40 C2, Rotary Vane Pumps, Two-stage,
OME 40 HP+, Rotary Vane Pumps, Two-stage,
OME 40 S, Rotary Vane Pumps, Two-stage,
OmniStar, Analysis Equipment, Gas Analysis,
up to 1.000 hPa . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page 104
GSD 320 O1 . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page 104
GSD 320 O2 . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page 104
GSD 320 O3 . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page 104
ONF 16, Rotary Vane Pumps, Two-stage,
DuoLine Accessories, Oil mist filter . . . . . . . . . . . Part 3.1 / Page 68
ONF 35/65, Rotary Vane Pumps, Two-stage,
OnTool Booster 150, Side Channel Pumps. . . . . . . . Part 3.1 / Page 264
Operating fluid level monitoring, Rotary Vane Pumps,
Operations monitoring unit, Rotary Vane Pumps,
Product index
Pascal, Rotary Vane Pumps, Two-stage. . . . . . Part 3.1 / from Page 84

Pascal 2005 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page 86
Pascal 2010 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .Part 3.1 / Page 88
Pascal 2015 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .Part 3.1 / Page 90
Pascal 2021 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page 92
Pascal 2033 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page 94
Pascal 2063 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page 96
Pascal Accessories, Rotary Vane Pumps,
Automatic gas ballast . . . . . . . . . . . . . . . Part 3.1 / from Page 117
Condensate trap CT 25 . . . . . . . . . . . . . . . . . . . Part 3.1 / Page 116
External oil filter . . . . . . . . . . . . . . . . . . . Part 3.1 / from Page 121
Inlet dust filter DFT 25 . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page 112
Liquid nitrogen trap . . . . . . . . . . . . . . . . . Part 3.1 / from Page 113
Oil drain kit . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / from Page 105
Oil level switch . . . . . . . . . . . . . . . . . . . . Part 3.1 / from Page 119
Oil mist eliminator . . . . . . . . . . . . . . . . . . . Part 3.1 / from Page 98
Sorption trap . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / from Page 109
PBR 260, Measurement, ActiveLine,
Pirani/Bayard-Alpert transmitters PBR . . . . . . . . . Part 3.2 / Page 58
PCR 280, Measurement, ActiveLine,
Pirani/Capacitance transmitters PCR. . . . . . . . . . . Part 3.2 / Page 44
PentaLine, Rotary Vane Pumps, Two-stage . . . Part 3.1 / from Page 40
Penta 20 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page 42
Penta 35 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page 44
Piezo-resistive Gauge CPT, Measurement, DigiLine . . Part 3.2 / Page 16
CPT 200 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page 16
Piezo-Transmitter APR, Measurement, ActiveLine . . .Part 3.2 / Page 32
APR 250. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page 32
APR 260. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .Part 3.2 / Page 32
APR 262. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page 32
APR 265. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page 32
APR 266. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page 32
APR 267. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page 32
Piezo/Pirani Gauge RPT, Measurement, DigiLine. . . . .Part 3.2 / Page 18
RPT 200 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page 18
Pipe Feedthroughs . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.3 / Page 339
Tube Compression Fittings ISO-KF . . . . . . . . . Part 3.3 / Page 339
Pirani gauge heads TPG, Measurement, ModulLine . . Part 3.2 / Page 70
TPR 010 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page 70
TPR 017 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page 70
TPR 018 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .Part 3.2 / Page 70
Pirani Gauge PPT, Measurement, DigiLine . . . . . . . . . Part 3.2 / Page 20
PPT 200 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page 20
Pirani measurement board, Measurement,
ModulLine . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page 76
Pirani transmitter TPR, Measurement,
ActiveLine . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / from Page 46
TPR 280 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .Part 3.2 / Page 46
TPR 281 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page 48
Pirani/Bayard-Alpert Gauge HPT, Measurement,
DigiLine . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page 24
HPT 200. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page 24
Pirani/Bayard-Alpert transmitters PBR, Measurement,
PBR 260. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page 58
Pirani/Capacitance transmitters PCR, Measurement,
PCR 280. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page 44
Pirani/Cold Cathode Gauge MPT, Measurement,
DigiLine . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page 22
MPT 200 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page 22
Pirani/cold cathode measurement board, Measurement,
ModulLine, Measurement boards . . . . . . . . . . . . . Part 3.2 / Page 78
Pirani/Cold Cathode transmitters PKR, Measurement,
PKR 251. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page 54
PKR 261. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page 54
PKR 251, Measurement, ActiveLine, Pirani/

PKR 261, Measurement, ActiveLine, Pirani/
Plug Atmosphere Side, Electrical Feedthroughs. . . . Part 3.3 / Page 313
Plug-on Connectors for Wire Conductor and
Coaxial Feedthroughs, Electrical Feedthroughs. Part 3.3 / Page 329
without pilot valve (PV),
EVB PA, flange sizes DN 63 to DN 160 ISO-K . . Part 3.3 / Page 242
EVB PX, flange sizes DN 63 to DN 160 ISO-K . . Part 3.3 / Page 242
without pilot valve (PV), Inline-Valves . . . Part 3.3 / from Page 240
Pneumatic, without position indicator (PI),
without pilot valve (PV), All-metal angle valves . Part 3.3 / Page 244
Port Aligner for Angular and Linear Adjustment,
Manipulators . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.3 / Page 368
Portable Leak Detectors . . . . . . . . . . . . . . . . . Part 3.2 / from Page 130
ASM 310 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page 134
MiniTest 300 . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page 130
PPT 200, Measurement, DigiLine,
Pirani Gauge PPT . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page 20
Pressure monitoring, Rotary Vane Pumps,
Pressure Relief Valves . . . . . . . . . . . . . . . . . . . Part 3.3 / from Page 214
DN 16 and 40 ISO-KF, stainless steel. . . . . . . . . Part 3.3 / Page 281
PrismaPlus with C-SEM-detector, Analysis Equipment,
Residual gas analysis in ultra high vacuum . . . . Part 3.2 / Page 100
QMG 220 M1 . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page 100
QMG 220 M2 . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page 100
QMG 220 M3 . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page 100
PrismaPlus with Faraday detector, Analysis Equipment,
Residual gas analysis in high vacuum . . . . . . . . Part 3.2 / Page 100
QMG 220 F1 . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page 100
QMG 220 F2 . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page 100
QMG 220 F3 . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page 100
Protection screen, Turbopumps, Hybrid Bearing,
Q
QMG 220 F1, Residual gas analysis in
high vacuum . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page
QMG 220 M1, Residual gas analysis in
ultra high vacuum . . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page
QMG 700, 1-1024 u, Gas analysis in the
pressure range up to 10-4 hPa, HiQuad . . . . . . . Part 3.2 / Page
100
100
100
100
100
100
116
116
116
116
Part 3.2 / Page 199
Index
Product index

pressure range up to 10-4 hPa, HiQuad . . . . . . .Part 3.2 / Page 116
pressure range up to 10-4 hPa, HiQuad . . . . . . .Part 3.2 / Page 116
R
Remote control, Turbopumps, Magnetically Levitated,
ATH Accessories . . . . . . . . . . . . . . . . . . . . . . . . .Part 3.1 / Page 431
Residual gas analysis in high vacuum,
Analysis Equipment, Residual Gas Analysis . . . .Part 3.2 / Page 100
PrismaPlus with Faraday detector . . . . . . . . . . .Part 3.2 / Page 100
Residual gas analysis in ultra high vacuum,
Analysis Equipment, Residual Gas Analysis . . . .Part 3.2 / Page 100
PrismaPlus with C-SEM-detector . . . . . . . . . . . .Part 3.2 / Page 100
Residual gas analysis, Analysis Equipment . . . .Part 3.2 / from Page 98
Residual gas analysis in high vacuum . . . . . . . .Part 3.2 / Page 100
Residual gas analysis in ultra high vacuum . . . .Part 3.2 / Page 100
Roots Pumping Stations, Roots Pumps . . . . . . . . . . .Part 3.1 / Page 254
Roots Pumps . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / from Page 210
ATEX . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / from Page 244
Convection cooled . . . . . . . . . . . . . . . . . Part 3.1 / from Page 220
Gas-circulation-cooled . . . . . . . . . . . . . . Part 3.1 / from Page 236
Roots Pumping Stations . . . . . . . . . . . . . . . . . . .Part 3.1 / Page 254
Roots Pumps Accessories. . . . . . . . . . . . . . . . . .Part 3.1 / Page 252
Roots Pumps Accessories . . . . . . . . . . . . . . . . . . . . .Part 3.1 / Page 252
Rotary Feedthroughs . . . . . . . . . . . . . . . . . . . Part 3.3 / from Page 340
Bellows-sealed Rotary Feedthroughs . . . . . . . . .Part 3.3 / Page 340
Pneumatic . . . . . . . . . . . . . . . . . . . . . . . . . .Part 3.3 / Page 341
DN 16 - 40 ISO-KF . . . . . . . . . . . . . . . . . . . .Part 3.3 / Page 343
DN 63 ISO-K. . . . . . . . . . . . . . . . . . . . . . . . .Part 3.3 / Page 342
Rotary Magnetic Feedthrough . . . . . . . . Part 3.3 / from Page 344
Rotary Magnetic Feedthrough,
Motorized . . . . . . . . . . . . . . . . . . . . . Part 3.3 / from Page 345
Rotary Manipulator, Differentially-pumped . . . . . . . .Part 3.3 / Page 367
Rotary Vane Pumps . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / from Page 8
Single-stage . . . . . . . . . . . . . . . . . . . . . . . .Part 3.1 / from Page 14
Rotary/Linear Feedthroughs. . . . . . . . . . . . . . Part 3.3 / from Page 346
Feedthroughs DS . . . . . . . . . . . . . . . . . . . . .Part 3.3 / Page 348
Feedthroughs MDD . . . . . . . . . . . . . . . . . . .Part 3.3 / Page 347
Feedthroughs MDM. . . . . . . . . . . . . . . . . . .Part 3.3 / Page 349
Feedthroughs MDD . . . . . . . . . . . . . . . . . . .Part 3.3 / Page 347
Feedthrough DS . . . . . . . . . . . . . . . . . . . . . .Part 3.3 / Page 348
Feedthrough Long Version MDD . . . . . . . . .Part 3.3 / Page 346
Feedthrough MDM . . . . . . . . . . . . . . . . . . .Part 3.3 / Page 349
Rotatable flange, Turbopumps,
Magnetically Levitated, ATH Accessories. . . . . .Part 3.1 / Page 435
RPT 200, Measurement, DigiLine,
Piezo/Pirani Gauge RPT. . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page 18
Index
S
Screw Pumps HeptaDry. . . . . . . . . . . . . . . . . Part 3.1 / from Page
Sealants, Components, Accessories . . . . . . . . . . . . .Part 3.3 / Page
Set of hexagon screws for trough hole,
Turbopumps, Hybrid Bearing,
HiPace Accessories. . . . . . . . . . . . . . . . . . . . . . .Part 3.1 / Page
Set of stud screws for tapped hole,
HiPace Accessories. . . . . . . . . . . . . . . . . . . . . . .Part 3.1 / Page
Page 200 / Part 3.2
142
213
376
376
Set of stud screws for trough hole,

Side Channel Pumps. . . . . . . . . . . . . . . . . . . . Part 3.1 / from Page 260
OnTool Booster 150 . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page 264
Side Channel Pumps . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page 260
Single-stage, Rotary Vane Pumps . . . . . . . . . . Part 3.1 / from Page 14
HenaLine . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / from Page 14
UnoLine Plus . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / from Page 36
SingleGauge measurement equipment,
Measurement, ActiveLine . . . . . . . . . . . . . . . . . . Part 3.2 / Page 60
TPG 261 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page 60
Sniffing, Leak Detectors . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page 162
ASM 102S . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page 162
Software DokuStar, Measurement, DigiLine . . . . . . . Part 3.2 / Page 29
Software for display and data logging for ActiveLine,
Measurement, ActiveLine . . . . . . . . . . . . . . . . . . Part 3.2 / Page 67
Software, ActiveLine, Measurement, ActiveLine . . . . Part 3.2 / Page 67
Solenoid actuated, All-metal angle valves . . . Part 3.3 / from Page 248
AVC MA, flange sizes DN 16 ISO-KF to
AVC MX, flange sizes DN 16 ISO-KF to
EVC 110 M, flange size DN 10 ISO-KF . . . . . . . Part 3.3 / Page 250
Solenoid actuated, Mini angle valves . . . . . . . Part 3.3 / from Page 248
Mini angle valves, solenoid actuated,
without position indicator (PI), DN 5 . . . . . Part 3.3 / Page 275
Solenoid actuated, Mini inline valves . . . . . . . Part 3.3 / from Page 248
Mini Inline Valve, solenoid actuated,
without position indicator (PI), n.c.
and n.o., DN 5. . . . . . . . . . . . . . . . . . . . . . . Part 3.3 / Page 278
Sorption trap, Rotary Vane Pumps, Two-stage,
ST 25 C . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page 110
ST 25 S. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page 109
ST 40 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page 111
Splinter screen, Turbopumps, Hybrid Bearing,
SplitFlow 50, Turbopumps . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page 440
SplitFlow, Turbopumps. . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page 436
SPM 220, 1-100 u, Analysis Equipment,
up to 10-2 hPa . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page 112
SPM 220, 1-200 u, Analysis Equipment,
up to 10-2 hPa . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page 112
ST 25 C, Rotary Vane Pumps, Two-stage,
Pascal Accessories, Sorption trap . . . . . . . . . . . Part 3.1 / Page 110
ST 25 S, Rotary Vane Pumps, Two-stage,
ST 40, Rotary Vane Pumps, Two-stage,
Standard Manipulators . . . . . . . . . . . . . . . . . . . . . . . Part 3.3 / Page 362
SVV HA, flange sizes DN 16 ISO-KF to
DN 40 ISO-KF, Valves, HV gate valves . . . . . . . Part 3.3 / Page 263
SVV HA, flange sizes DN 63 ISO-F to
DN 160 ISO-F, Valves, HV gate valves . . . . . . . Part 3.3 / Page 264
SVV HF, flange sizes DN 63 CF-F to
DN 200 CF-F, Valves, UHV gate valves . . . . . . . Part 3.3 / Page 270
SVV HM, flange size DN 40 CF-F, Valves,
UHV gate valves . . . . . . . . . . . . . . . . . . . . . . . . Part 3.3 / Page 270
SVV PA, flange sizes DN 16 ISO-KF to
DN 40 ISO-KF, Valves, HV gate valves . . . . . . . Part 3.3 / Page 265
DN 250 ISO-F, Valves, HV gate valves . . Part 3.3 / from Page 266
DN 250 ISO-F, Valves, HV gate valves . . Part 3.3 / from Page 266
SVV PF, flange sizes DN 63 CF-F to
DN 200 CF-F, Valves, UHV gate valves . . . . . . . Part 3.3 / Page 272
SVV PM, flange size DN 40 CF-F, Valves,
UHV gate valves . . . . . . . . . . . . . . . . . . . . . . . . Part 3.3 / Page 272
Product index
178
182
184
188
T
Temperature monitoring, Rotary Vane Pumps,
Thermocouple Feedthroughs . . . . . . . . . . . . . Part 3.3 / from Page 330
Combi-Feedthroughs, Flanged, Electrical
and Thermocouple, Type K . . . . . . . . . . . . Part 3.3 / Page 330
Mantle Thermocouple Feedthroughs . . . . . . . . Part 3.3 / Page 333
Thermocouple Feedthrough, Flanged, Type K . Part 3.3 / Page 331
Thermocouple Feedthrough, Type K, Flanged,
with MS Plug . . . . . . . . . . . . . . . . . . . . . . . Part 3.3 / Page 332
ThermoStar, Analysis Equipment, Gas Analysis,
up to 1.000 hPa . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page 104
GSD 320 T1 . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page 104
GSD 320 T2 . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page 104
GSD 320 T3 . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page 104
Thread Lubricant, Components, Accessories. . . . . . Part 3.3 / Page 212
TPG 201, Measurement, ActiveLine,
TPG 256 A, controller for 6 gauges,
Measurement, ActiveLine, Controllers TPG . . . . . Part 3.2 / Page 66
TPG 261, controller for 1 gauge,
Measurement, ActiveLine, Controllers TPG . . . . . Part 3.2 / Page 64
SingleGauge measurement equipment. . . . . . . . . Part 3.2 / Page 60
TPG 262, controller for 2 gauges,
Measurement, ActiveLine, Controllers TPG . . . . .Part 3.2 / Page 65
DualGauge measurement equipment . . . . . . . . . . Part 3.2 / Page 61
TPG 300, basic unit, Measurement, ModulLine . . . . . . Part 3.2 / Page 80
and power cords, Measurement, ModulLine . . . . Part 3.2 / Page 82
TPG 300, complete units, Measurement, ModulLine. . Part 3.2 / Page 82
TPR 010, Measurement, ModulLine,
TPR 280, Measurement, ActiveLine,
Pirani transmitter TPR . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page 46
TPR 281, Measurement, ActiveLine,
Pirani transmitter TPR . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page 48
TPS wall rail fitting, Turbopumps, Hybrid Bearing,
TPS-mains pack 19" rack module, Turbopumps,
TrinosLine, Vacuum Chambers . . . . . . . . . . . . Part 3.3 / from Page 18
TrinosLine High Vacuum Chamber,
Cubical, KBH . . . . . . . . . . . . . . . . . . . . . . . . .Part 3.3 / Page 18
Horizontal, KHH . . . . . . . . . . . . . . . . . . . . . . . Part 3.3 / Page 19
Vertical, KVH . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.3 / Page 20
TrinosLine Medium Vacuum Chamber,
Vertical, KVG . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.3 / Page 21
TrinosLine Modular Vacuum Chamber,
Base Plate. . . . . . . . . . . . . . . . . . . . . . . . . . . .Part 3.3 / Page 24
TrinosLine Modular Vacuum Chamber, Bell . . . . .Part 3.3 / Page 22
TrinosLine Modular Vacuum Chamber, Cover . . . Part 3.3 / Page 25
TrinosLine Modular Vacuum Chamber, Extension Part 3.3 / Page 23
TTV 001, Turbopumps, Hybrid Bearing,
Tube Compression Fittings ISO-KF,

Pipe Feedthroughs . . . . . . . . . . . . . . . . . . . . . . . Part 3.3 / Page 339
Turbo Pumping Stations, Turbopumps . . . . . . Part 3.1 / from Page 446
HiCube Classic . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page 452
HiCube Eco. . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page 450
HiCube Pro . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page 456
Turbopumps . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / from Page 266
Hybrid Bearing . . . . . . . . . . . . . . . . . . . . . Part 3.1 / from Page 278
Magnetically Levitated . . . . . . . . . . . . . Part 3.1 / from Pagen 382
SplitFlow . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page 436
SplitFlow 50 . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page 440
Turbo Pumping Stations . . . . . . . . . . . . . Part 3.1 / from Page 446
Two-stage Rotary Vane Pumps. . . . . . . . . . . . . Part 3.1 / from Page 40
DuoLine . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / from Page 46
DuoLine Accessories . . . . . . . . . . . . . . . . . Part 3.1 / from Page 68
Pascal . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / from Page 84
Pascal Accessories. . . . . . . . . . . . . . . . . . . Part 3.1 / from Page 98
PentaLine . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / from Page 40
U
UDV, Valves, Gas dosing valves,
All-metal gas dosing valve . . . . . . . . . . . . . . . . . Part 3.3 / Page 284
UHV gate valves . . . . . . . . . . . . . . . . . . . . . . .Part 3.3 / from Page 270
Electropneumatically . . . . . . . . . . . . . . . . . . . . . Part 3.3 / Page 272
Manual . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.3 / Page 270
UnoLine Plus, Rotary Vane Pumps,
Single-stage . . . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / from Page 36
UnoLine Plus BA 251 . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page 38
UnoLine Plus BA 501 . . . . . . . . . . . . . . . . . . . . . . Part 3.1 / Page 38
UVH CU, flange sizes DN 16 CF to DN 63 CF,
Valves, All-metal angle valves . . . . . . . . . . . . . . Part 3.3 / Page 233
UVH VI, flange sizes DN 16 CF to DN 63 CF,
Valves, Angle valves, Manual actuated . . . . . . . Part 3.3 / Page 232
V
Vacu2, System Technology . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page 188
Vacuum Chambers . . . . . . . . . . . . . . . . . . . . . . . Part 3.3 / from Page 8
CF Ports . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.3 / Page 28
CF Quick-Access-Door . . . . . . . . . . . . . . . . . . . . . Part 3.3 / Page 33
Chamber feet for Standard Vacuum Chamber,
Cubical (KBH) . . . . . . . . . . . . . . . . . . . . . . . . Part 3.3 / Page 26
Custom Chambers . . . . . . . . . . . . . . . . . . . . . . . . Part 3.3 / Page 36
ISO-F Ports . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.3 / Page 32
ISO-F Quick-Access-Door. . . . . . . . . . . . . . . . . . . Part 3.3 / Page 34
ISO-K Ports. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.3 / Page 31
ISO-KF Ports . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.3 / Page 30
Mounting Table . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.3 / Page 27
TrinosLine. . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.3 / from Page 18
Vacuum Greases and Oils, Components,
Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.3 / Page 212
Valve cable (Magpower external drive electronics
to venting valve), Turbopumps,
Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .Part 3.3 / from Page 218
Angle valves . . . . . . . . . . . . . . . . . . . . . . .Part 3.3 / from Page 228
Ball valves . . . . . . . . . . . . . . . . . . . . . . . . Part 3.3 / from Page 294
Butterfly valves. . . . . . . . . . . . . . . . . . . . .Part 3.3 / from Page 259
Diaphragm valves, manual, flange size
DN 16 KF to DN 40 KF . . . . . . . . . . . . . . . . Part 3.3 / Page 258
Gas dosing valves . . . . . . . . . . . . . . . . . . Part 3.3 / from Page 282
HV gate valves . . . . . . . . . . . . . . . . . . . . .Part 3.3 / from Page 263
Inline-Valves . . . . . . . . . . . . . . . . . . . . . . . Part 3.3 / from Page 251
Mini angle valves . . . . . . . . . . . . . . . . . . . Part 3.3 / from Page 274
Mini inline valves . . . . . . . . . . . . . . . . . . . . . . . . Part 3.3 / Page 278
Pressure relief valves . . . . . . . . . . . . . . . . . . . . . Part 3.3 / Page 281
UHV gate valves. . . . . . . . . . . . . . . . . . . .Part 3.3 / from Page 270
Venting valves . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.3 / Page 280
Venting accessories, Turbopumps,
Part 3.2 / Page 201
Index
System Technology . . . . . . . . . . . . . . . . . . . . Part 3.2 / from Page

Helium Leak Detection Systems . . . . . . . . . . . . Part 3.2 / Page
Helium-Recovery-Unit (HRU). . . . . . . . . . . . . . . Part 3.2 / Page
Vacu2 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . Part 3.2 / Page
Product index
Venting valve, shielded, Turbopumps,

Hybrid Bearing, HiPace Accessories. . . . . . . . . .Part 3.1 / Page
Venting valves, Manual actuated. . . . . . . . . . . . . . . .Part 3.3 / Page
Vibration dampers, Turbopumps,
Hybrid Bearing, HiPace Accessories. . . . . . . . . .Part 3.1 / Page
Viewports, Components . . . . . . . . . . . . . . . . Part 3.3 / from Page
Accessories for Glass Retainers . . . . . . . . . . . . .Part 3.3 / Page
Borosilicate Float Glass. . . . . . . . . . . . . . . . . . . .Part 3.3 / Page
Calcium Fluoride . . . . . . . . . . . . . . . . . . . . . . . .Part 3.3 / Page
CF Shutter, Manual . . . . . . . . . . . . . . . . . . . . . . .Part 3.3 / Page
CF Shutter, Pneumatic . . . . . . . . . . . . . . . . . . . .Part 3.3 / Page
CF Viewport . . . . . . . . . . . . . . . . . . . . . . . . . . . .Part 3.3 / Page
Fused Silica (Synthetic Amorphous Quartz) . . . .Part 3.3 / Page
ISO-F Viewport . . . . . . . . . . . . . . . . . . . . . . . . . .Part 3.3 / Page
ISO-K Viewport . . . . . . . . . . . . . . . . . . . . . . . . . .Part 3.3 / Page
ISO-KF Glass Blank Flange . . . . . . . . . . . . . . . . .Part 3.3 / Page
ISO-KF Viewport, Borosilicate. . . . . . . . . . . . . . .Part 3.3 / Page
ISO-KF Viewport, Fused Silica
(Synthetic Amorphous Quartz). . . . . . . . . . .Part 3.3 / Page
ISO-KF Viewport, Sapphire . . . . . . . . . . . . . . . . .Part 3.3 / Page
ISO-KF, ISO-K, CF Glass Retainers . . . . . . . . . . .Part 3.3 / Page
Zinc Selenide. . . . . . . . . . . . . . . . . . . . . . . . . . . .Part 3.3 / Page
368
280
379
200
209
209
210
206
207
204
210
205
203
202
200
200
201
208
210
W
Water cooling, Turbopumps, Hybrid Bearing,
Workstation, Leak Detectors . . . . . . . . . . . . . . . . . . .Part 3.2 / Page 154
ASM 1002 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .Part 3.2 / Page 154
X
XY-Axis Precision Manipulator, Manipulators . . . . . .Part 3.3 / Page 364
XY-Axis Precision Manipulator Motorized,
Manipulators . . . . . . . . . . . . . . . . . . . . . . . . . . . .Part 3.3 / Page 365
XYZ-Axis Precision Manipulator, Manipulators . . . . .Part 3.3 / Page 366
Index
Z-Axis Precision Manipulator, Manipulators . . . . . . .Part 3.3 / Page 362

Z-Axis Precision Manipulator Motorized,
Manipulators . . . . . . . . . . . . . . . . . . . . . . . . . . . .Part 3.3 / Page 363
Zinc Selenide, Components, Viewports . . . . . . . . . . .Part 3.3 / Page 210
Page 202 / Part 3.2
Index
Product index
Part 3.2 / Page 203
Notes
Page 204 / Part 3.2
Notes
Part 3.2 / Page 205
Page 206 / Part 3.1
Masthead

April 2013
Subject to change without notice
Price: Euro 60,
Vacuum Technology Book Volume II: PI 0355 PEN
Part 3.2 Vacuum measurement, analysis, leak detection:
PI 0355_3_2 PEN
Picture credits
Pfeiffer Vacuum GmbH: Product pictures and drawings
ESO/S. Brunier
Fotolia.com: Franz Puegl / Otmar Smit / Digital_Zombie /
Onkelchen / tom / Tjefferson / sebastianreuter / Bogdan
Wankowicz / Eisknig / massivedynamic / ag visuell /
ferkelraggae / Gerhard Seybert / doris_bredow / Andreas F. /
msl33 / arsdigital / Christian Schwier / industrieblick /
werbefoto-burger.ch / creativ collection Verlag / Cern
Product pictures
Fotostudio Gleim, 35452 Heuchelheim, Germany
Publisher and responsible for content
Berliner Strasse 43
35614 Asslar, Germany
T +49 6441 802 0
F +49 6441 802 1202
[email protected]
Design
Filusch & Fiore Werbeagentur GmbH, 35423 Lich, Germany
Composing
LOTS OF DOTS MediaGroup. AG, 55129 Mainz, Germany
TANNER AG, 88131 Lindau, Germany
Printing
msp druck und medien gmbh, 57555 Mudersbach, Germany
Note
The Vacuum Technology Book Volume II, effective April 1, 2013
Regardless of their nature, the information and promotional statements contained
in this product catalog and, in particular, the descriptions, photographs, illustrations, drawings, samples and information relating to quality, nature, composition,
performance, consumption and usability, as well as the dimensions and weights
of the product portfolio, are subject to change without notice if not expressly designated as being denitive. Such information does not represent any assurance or
warranty commitment of any kind. Minor deviations from the product information
shall be deemed to be accepted if they are not unreasonable for the purchaser.
We expressly reserve the right to correct errors and modify technical information.
Part 3.1 / Page 207

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What are the different types of vacuum pumps discussed in the document?

What are the different types of vacuum pumps discussed in the document?

What topics are covered in Part 3.2 of the document?

What topics are covered in Part 3.2 of the document?

The

Vacuum measurement, analysis,

Page 2 / Part 3.2

3.2 Vacuum measurement, analysis, leak detection

Vacuum solutions from a single source

Vacuum measurement, analysis, leak detection

Chambers and components

Part 3.2 / Page 3

Scitek Australia Pty. Ltd.

Hakuto Enterprises Ltd.

Pfeiffer Vacuum (Shanghai) Co., Ltd.

Pfeiffer Vacuum Austria GmbH

Bosnia and Herzegovina

Page 4 / Part 3.2

Pfeiffer Vacuum (Shanghai) Co., Ltd.

Pfeiffer Vacuum Ltd

Analytical Instruments S.A.

Norm Electronics ltd.

Norm Electronics ltd.

Magnificat Vacuum Kft.

Pfeiffer Vacuum Scandinavia AB

Pfeiffer Vacuum Benelux B.V.

APP Machines Ltda.

Air & Vacuum Technologies (Pty) Ltd.

APVACUUM Sp.z o.o.

Tecnovac Tecnologia de Vacio S.L.

Pfeiffer Vacuum Scandinavia AB

Part 3.2 / Page 5

Pfeiffer Vacuum (Shanghai) Co., Ltd.

adixen Vacuum Products SAS

Pfeiffer Vacuum Ltd

Hakuto Enterprises Ltd.

adixen Vacuum Products SAS

Pfeiffer Vacuum Ltd

Pfeiffer Vacuum (Shanghai) Co., Ltd.

Pfeiffer Vacuum GmbH

Analytical Instruments S.A.

APP Machines Ltda.

Pfeiffer Vacuum GmbH

Norm Electronics ltd.

Scitek Australia Pty. Ltd.

SCAN, d.o.o., Preddvor

Analytical Instruments S.A.

Vakuum Servis S.R.O.

Pfeiffer Vacuum Scandinavia AB

APP Machines Ltda.

Pfeiffer Vacuum Inc.

Page 6 / Part 3.2

Pfeiffer Vacuum GmbH

Magnificat Vacuum Kft

Pfeiffer Vacuum Italia S.p.A.

SCAN, d.o.o., Preddvor

APVACUUM Sp.z o.o.

Pfeiffer Vacuum Scandinavia AB

Pfeiffer Vacuum Italia S.p.A.