CERAVAC Transmitter

CTR 100

Operating Manual 17200257_002_02

Part Numbers 230 300 230 301 230 302 230 303 230 305 230 306 230 307 230 308 230 310 230 311 230 312 230 313 230 315 230 316 230 317 230 318 230 304 V01 230 309 V01 230 314 V01 230 319 V01 230 340 V01

Product Identification
In all communications with Oerlikon Leybold Vacuum, please specify the information given on the product nameplate. For convenient reference copy that information into the space provided below.
Oerlikon Leybold Vacuum, D-50968 Kln

Typ: No: F-No: V W

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Validity
This document applies to products with the following part numbers:
Measurement range, Full Scale (F.S.) Part number Flange DN 16 ISO-KF Torr 10-1 1000 (F.S.) 10-2 100 (F.S.) 10-3 10 (F.S.) 10-4 1 (F.S.) 10-5 0.1 (F.S.) 10-1 1000 (F.S.) 10-2 100 (F.S.) 10-3 10 (F.S.) 10-4 1 (F.S.) 10-5 0.1 (F.S.) 10-1 1000 (F.S.) (continued) Pascal 1.33101 133'322 (F.S.) 1.33100 13'332.2 (F.S.) 1.3310-1 1'333.22 (F.S.) 1.3310 133.322 (F.S.) 1.3310-3 13.3322 (F.S.) 1.33101 133'322 (F.S.) 1.3310 13'332.2 (F.S.) 1.3310 1'333.22 (F.S.) 1.3310-2 133.322 (F.S.) 1.3310-3 13.3322 (F.S.) 1.33101 133'322 (F.S.)
-1 0 -2

mbar 1.3310-1 1333 (F.S.) 10-2 133 (F.S.) 10-3 13.3 (F.S.) 10-4 1.3 (F.S.) 10-5 0.13 (F.S.) 1.3310-1 1333 (F.S.) 10-2 133 (F.S.) 10-3 13.3 (F.S.) 10-4 1.3 (F.S.) 10-5 0.13 (F.S.) 1.3310-1 1333 (F.S.)

230 300 230 301 230 302 230 303 230 304 V01 230 305 230 306 230 307 230 308 230 309 V01 230 310

DN 16 ISO-KF

DN 16 ISO-KF

DN 16 ISO-KF

DN 16 ISO-KF

DN 16 CF-R

DN 16 CF-R

DN 16 CF-R

DN 16 CF-R

DN 16 CF-R

8 VCR

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(concluded) Part number Flange 8 VCR

Torr 10-2 100 (F.S.) 10 10 (F.S.) 10-4 1 (F.S.) 10-5 0.1 (F.S.) 10 1000 (F.S.) 10-2 100 (F.S.) 10-3 10 (F.S.) 10-4 1 (F.S.) 10-5 0.1 (F.S.) 210-3 20 (F.S.)
-1 -3

Pascal 1.33100 13'332.2 (F.S.) 1.3310-1 1'333.22 (F.S.) 1.3310 133.322 (F.S.) 1.3310-3 13.3322 (F.S.) 1.33101 133'322 (F.S.) 1.33100 13'332.2 (F.S.) 1.3310-1 1'333.22 (F.S.) 1.3310 133.322 (F.S.) 1.3310-3 13.3322 (F.S.) 2.6610-1 2'666.44 (F.S.)
-2 -2

mbar 10-2 133 (F.S.) 10-3 13.3 (F.S.) 10-4 1.3 (F.S.) 10-5 0.13 (F.S.) 1.3310-1 1333 (F.S.) 10-2 133 (F.S.) 10-3 13.3 (F.S.) 10-4 1.3 (F.S.) 10-5 0.13 (F.S.) 2.6710-3 26.67 (F.S.)

230 311 230 312 230 313

8 VCR

8 VCR

230 314 V01 8 VCR 230 315 230 316 230 317 230 318

" Rohr

" Rohr

" Rohr

" Rohr

230 319 V01 " Rohr 230 340 V01 DN 16 ISO-KF

The part number (No) can be taken from the product nameplate. If not indicated otherwise in the legends, the illustrations in this document correspond to CTR 100 transmitter with the DN 16 ISO-KF vacuum connection. They apply to other vacuum connections by analogy. We reserve the right to make technical changes without prior notice. All dimensions in mm. 4 17200257_002_02 - (2011-03) - Oerlikon Leybold Vacuum

Intended Use
The CERAVAC Transmitters of the CTR 100 series are intended for absolute pressure measurement of gases in their respective pressure ranges ( 3). The transmitters can be operated in connection with an Oerlikon Leybold Vacuum Controller (Center series, [1], [2]) or another appropriate measuring unit.

Function
The CTR transmitter consists of a capacitive sensor element made of aluminum oxide ceramics and electronics that convert the capacitance into a DC voltage output signal. The output signal is linear to the measured pressure and independent of the gas type.

Trademark
VCR Swagelok Marketing Co.

Patents
EP 1070239 B1, 1040333 B1 US Patents 6528008, 6591687, 7107855, 7140085

Scope of Delivery
1 transmitter 1 pin for adjusting settings via buttons 1 Calibration Test Report 1 Operating Manual German 1 Operating Manual English

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Contents
Product Identification Validity Intended Use Function Trademark Patents Scope of Delivery 1 Safety 1.1 Symbols Used 1.2 Personnel Qualifications 1.3 General Safety Instructions 1.4 Liability and Warranty 2 Technical Data 3 Installation 3.1 Vacuum Connection 3.2 Electrical Connection 4 Operation 4.1 Displays 4.2 Zeroing the Transmitter 4.3 Activating the Factory Setting (Factory Reset) 5 6 7 8 9 Deinstallation Maintenance, Repair Returning the Product Disposal Literature 2 3 5 5 5 5 5 7 7 7 8 8 9 14 14 17 19 19 19 23 24 25 26 27 28 29 30

ETL Certification EC Declaration of Conformity

For cross-references within this document, the symbol ( XY) is used, for cross-references to further documents, listed under literature, the symbol ( [Z]).

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1
1.1

Safety
Symbols Used
DANGER

Information on preventing any kind of physical injury.

WARNING
Information on preventing extensive equipment and environmental damage.

Caution
Information on correct handling or use. Disregard can lead to malfunctions or minor equipment damage. Notice

1.2

Personnel Qualifications
Skilled personnel

All work described in this document may only be carried out by persons who have suitable technical training and the necessary experience or who have been instructed by the end-user of the product.

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1.3

General Safety Instructions

Adhere to the applicable regulations and take the necessary precautions for the process media used. Consider possible reactions with the product materials. Adhere to the applicable regulations and take the necessary precautions for all work you are going to do and consider the safety instructions in this document. Before beginning to work, find out whether any vacuum components are contaminated. Adhere to the relevant regulations and take the necessary precautions when handling contaminated parts. Communicate the safety instructions to all other users.

1.4

Liability and Warranty

Oerlikon Leybold Vacuum assumes no liability and the warranty becomes null and void if the end-user or third parties disregard the information in this document use the product in a non-conforming manner make any kind of interventions (modifications, alterations etc.) on the product use the product with accessories not listed in the product documentation. The end-user assumes the responsibility in conjunction with the process media used. Transmitter failures due to contamination or wear and tear are not covered by the warranty.

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Technical Data
"Validity" 0.20% vom Messwert 0.50% vom Messwert 0.0050% F.S./ C 0.015% F.S./ C 0.02% F.S./ C 0.01% vom Messwert / C 0.03% vom Messwert / C 0.003% F.S. none

Measurement range Accuracy 1) 1 Torr (F.S.) 0.1 Torr (F.S.) Temperature effect on zero 10 Torr (F.S.) 1 Torr (F.S.) 0.1 Torr (F.S.) Temperature effect on span 1 Torr (F.S.) 0.1 Torr (F.S.) Resolution Gas type dependence Output signal analog (measuring signal) Voltage range Measuring range Relationship voltage-pressure Output impedance Loaded impedance Response time 1 Torr (F.S.) 0.1 Torr (F.S.) Transmitter identification

5 +10.24 V 0 +10V linear 0 (short-circuit proof) >10 k 30 ms 130 ms Resistance 13.2 k referenced to supply common

1)

Non-linearity, hysteresis, repeatability at 23 C ambient temperature without temperature effects after 2 h operation.
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RS232C interface Transmission rate Data format

Connection

9600 baud binary 8 data bits one stop bit no parity bit no handshake "Electrical Connection"

Further information about the RS232C interface [3] Supply

DANGER
The transmitter may only be connected to power supplies, instruments or control devices that conform to the requirements of a grounded protective extra-low voltage (SELV) and limited power source (LPS), Class 2. The connection to the transmitter has to be fused 2). Supply voltage at the transmitter ripple Current consumption Power consumption (depending on supply voltage) Internal fuse Class 2 / LPS +14 +30 VDC 1 Vpp <500 mA (max. starting current)

1 W 1 AT (slow), automatic reset (Polyfuse) The transmitter is protected against reverse polarity of the supply voltage. Electrical connection 15-pin D-Sub, male Sensor cable 5-pin plus shielding Cable length 100 m (0.14 mm conductor) For longer cables, larger conductor cross-sections are required (Rcable 1.0 ).
2)

Oerlikon Leybold Vacuum controllers fulfill this requirement.

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Grounding concept Vacuum flange - signal common

"Electrical Connection" Supply common - signal common conducted separately; for differential measurement (10 )

Materials exposed to vacuum Flange, tube Sensor and diaphragm Sensordiaphragm connection Ceramicsmetal connection Internal volume Admissible pressure (absolute) 1000 Torr F.S 1 100 Torr F.S. 0.1 Torr F.S. Bursting pressure (absolute) Admissible temperatures Storage Operation Bakeout (not in operation) Relative humidity

stainless steel AISI 316L ceramics (Al2O3 99.5%) glass ceramics solder AgTiCu hard solder, Vacon 70 (28% Ni, 23% Co, 49% Fe) 3.6 cm3 3 bar 2 bar 1.3 bar 5 bar

Use Degree of protection

40 C +65 C +5 C +50 C 110 C at the flange 80% at temperatures +31 C decreasing to 50% at +40C indoors only, altitude up to 2000 m NN IP 30

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Dimensions [mm]
3.8 55

69

26

OD"

DN 16 ISO-KF DN 16 CF-R 8 VCR female

Weight

370 g

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44

Analog Measuring Signal vs. Pressure

Pressure p
1.1F.S. 1.0F.S. 0.9F.S. 0.8F.S. 0.7F.S. 0.6F.S. 0.5F.S. 0.4F.S. 0.3F.S. 0.2F.S. 0.1F.S. 0.0F.S. 0 1 2 3 4 5 6 7 8 9 10

Measuring signal Uout [V]

p = (Uout / 10 V) c (F.S.) Conversion Torr Pascal Torr c 1.00 mbar 3) 1013.25 / 760 = 1.3332 Pa 3) 101325 / 760 = 133.3224

Example: Transmitter with 10 Torr F.S. Measuring signal Uout = 6 V p = (6 V / 10 V) 10 Torr = 0.6 10 Torr = 6 Torr

3)

Source: NPL (National Physical Laboratory) Guide to the Measurement of Pressure and Vacuum, ISBN 0904457x / 1998
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Installation
WARNING
WARNING: fragile components The ceramic sensor may be damaged by impacts. Do not drop the product and prevent shocks and impacts.

3.1

Vacuum Connection
DANGER
DANGER: overpressure in the vacuum system >1 bar Injury caused by released parts and harm caused by escaping process gases can result if clamps are opened while the vacuum system is pressurized. Do not open any clamps while the vacuum system is pressurized. Use the type clamps which are suited to overpressure.

DANGER
DANGER: overpressure in the vacuum system >2.5 bar KF flange connections with elastomer seals (e.g. O-rings) cannot withstand such pressures. Process media can thus leak and possibly damage your health. Use O-rings provided with an outer centering ring.

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DANGER
DANGER: protective ground Products that are not correctly connected to ground can be extremely hazardous in the event of a fault. Electrically connect the transmitter to the grounded vacuum chamber. This connection must conform to the requirements of a protective connection according to EN 61010: CF and VCR flanges fulfill this requirement. For transmitters with a KF flange, use a conductive metallic clamping ring. For transmitters with a " tube, take appropriate measures to fulfill this requirement.

Caution
Caution: vacuum component Dirt and damages impair the function of the vacuum component. When handling vacuum components, take appropriate measures to ensure cleanliness and prevent damages.

Caution
Caution: dirt sensitive area Touching the product or parts thereof with bare hands increases the desorption rate. Always wear clean, lint-free gloves and use clean tools when working in this area.

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Mount the transmitter so that no vibrations occur. The transmitter may be mounted in any orientation. To keep condensates and particles from getting into the measuring chamber preferably choose a horizontal to upright position. The use of a seal with a centering ring and filter keeps particles from getting into the transmitter. If adjustment should be possible after the transmitter has been installed, be sure to install it so that the buttons can be accessed with a pin ( 19). Remove the protective lid and connect the product to the vacuum system.

Seal with centering ring

or Protective lid Seal with centering ring and filter Clamp

Keep the protective lid.

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3.2

Electrical Connection
Make sure the vacuum connection is properly made ( 14).

DANGER
The gauge may only be connected to power supplies, instruments or control devices that conform to the requirements of a grounded protective extralow voltage (SELV) and limited power source (LPS), Class 2. The connection to the gauge has to be fused 4).

Ground loops, differences of potential, or EMC problems may affect the measurement signal. For optimum signal quality, please do observe the following notes: Connect the cable shield to ground on one side via the chassis ground. Do not connect the other side of the shield. Connect the supply common with protective ground directly at the power supply. Use differential measurement input (signal common and supply common conducted separately). Potential difference between supply common and housing 18 V (overvoltage protection).

4)

INFICON controllers fulfill this requirement.

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If no sensor cable is available, make one according to the following diagram.

Ident TxD RxD 10 10 13 14 2 12 7 11 5

100nF

1M

18 V

15 case

Electrical connection Pin 2 Signal Output Pin 5 Supply common, GND Pin 7, 11 Supply Pin 10 Transmitter identification Pin 12 Signal common Pin 13 RS232, TxD Pin 14 RS232, RxD Pin 15 Housing (Chassis Ground) case Housing (Chassis Ground)

15

D-Sub,15-pin female soldering side

Connect the sensor cable to the transmitter and secure it using the lock screws. Connect the sensor cable to the controller.

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Operation

Put the transmitter into operation. A warm-up time of at least 15 minutes should be allowed; for exact pressure measurements a warm-up time of at least 2 hours is required.

4.1

Displays

RUN

ZERO

LED <RUN>

State lit blinking

Meaning Measurement mode Other mode, error, over/underrange

4.2

Zeroing the Transmitter

The transmitter is factory calibrated while "standing upright" ( "Calibration Test Report"). We recommend performing a zero adjustment, when the gauge is operated for the first time. Due to long time operation or contamination, a zero drift could occur and zero adjustment may become necessary. For adjusting the zero, operate the gauge under the same constant ambient conditions and in the same mounting orientation as normally.

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The output signal (measuring signal) is depending on the mounting orientation. The signal difference between the vertical and horizontal mounting orientation is: F.S. 1000 Torr/mbar 100 Torr/mbar 10 Torr/mbar 1 Torr/mbar
U / 90

2 mV 10 mV 50 mV 300 mV

If the transmitter is operated via a controller, the zero of the whole measuring system has to be adjusted on the controller: first, adjust the zero of the transmitter and then, the zero of the controller..

4.2.1

<ZERO> Adjustment
The zero can be adjusted via the <ZERO> button on the transmitter, the RS232C interface ( [3]), an Oerlikon Leybold Vacuum Gauge Controller (CENTER series).

Evacuate the transmitter to a pressure according to the table below: F.S. 1000 Torr 100 Torr 20 Torr 10 Torr 1 Torr 0.1 Torr Recommended final pressure for zero adjustment <510-2 Torr <6.65100 Pa <510-2 mbar <510-3 Torr <6.6510-1 Pa <510-3 mbar <10-3 Torr <1.3310-1 Pa <10-3 mbar <510-4 Torr <6.6510-2 Pa <510-4 mbar <510-5 Torr <6.6510-3 Pa <510-5 mbar <510-6 Torr <6.6510-4 Pa <510-6 mbar

If the final pressure in the transmitter is too high for zero adjustment (>25% of the F.S.), the zero cannot be reached and the <RUN> LED blinks. If this is the case, activate the factory setting and adjust the zero again ( 23). 20 17200257_002_02 - (2011-03) - Oerlikon Leybold Vacuum



Operate the transmitter for at least 15 minutes (until the signal is stable). Press the <ZERO> button briefly with a pin (max. 1.1 mm). The zero adjustment runs automatically. The <RUN> LED flashes until the adjustment (duration 8 s) is completed.

Press the button briefly max. 1.1 mm

After zero adjustment the transmitter automatically returns to measurement mode. The <RUN> LED lit. The zero can also be adjusted via the RS232C interface ( [3]). The <RUN> LED blinks if the signal output is negative (< -20 mV) when the final pressure has been attained the zero adjustment has failed.

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4.2.2

<ZERO> Adjustment with Ramp Function

The ramp function allows to adjust the zero at a known reference pressure within the measuring range of the transmitter. It also permits to adjust an offset of the characteristic curve in order to compensate for the offset of the measuring system or obtain a slightly positive zero for a 0 10 V AD-converter. The offset should not exceed 2% of the F.S. (+200 mV). At a higher positive offset, the upper limit of the measuring range is passed. Recommended procedure for adjusting the offset of a measuring system: Notice 20.

Operate the transmitter for at least 15 minutes (until the signal is stable). Push the <ZERO> button with a pin (max. 1.1 mm) and keep it depressed. The <RUN> LED starts flashing. After 5 s, the zero adjustment value, starting at the current output value, keeps continually changing (ramp) until the button is released or until the setting limit (max. 25% F.S.) is reached. The corresponding output signal is delayed by about 1 s.

Keep the button depressed max. 1.1 mm

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Push the <ZERO> button again: Fine adjustment within 0...3 s: Change of direction within 3...5 s: the zero adjustment value changes by one unit (push <ZERO> button in intervals of 1 s) the zero adjustment changes its direction (the blinking frequency of the <RUN> LED changes briefly)

If the <ZERO> button is released for more than 5 s, the transmitter returns to the measurement mode. The zero with ramp function can also be adjusted via the RS232C interface ( [3]). The <RUN> LED blinks if the signal output is negative (< -20 mV).

4.3

Activating the Factory Setting (Factory Reset)

All user defined parameters (e.g. zero, filter) are restored to their default values. Loading the default parameters:

But the transmitter out of operation. Keep the <ZERO> button depressed for at least 5 s while the transmitter is being put into operation (Power ON).

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Deinstallation
WARNING
WARNING: fragile components The ceramic sensor may be damaged by impacts. Do not drop the product and prevent shocks and impacts.

DANGER
DANGER: contaminated parts Contaminated parts can be detrimental to health and environment. Before beginning to work, find out whether any parts are contaminated. Adhere to the relevant regulations and take the necessary precautions when handling contaminated parts.

Caution
Caution: vacuum component Dirt and damages impair the function of the vacuum component. When handling vacuum components, take appropriate measures to ensure cleanliness and prevent damages.

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Caution
Caution: dirt sensitive area Touching the product or parts thereof with bare hands increases the desorption rate. Always wear clean, lint-free gloves and use clean tools when working in this area.

Vent the vacuum system. Put the transmitter out of operation.. Unfasten the lock screws and disconnect the sensor cable. Remove the transmitter from the vacuum system and install the protective lid.

Maintenance, Repair

Under clean operating conditions, the product requires no maintenance. Transmitter failures due to contamination or wear and tear are not covered by the warranty. We recommend checking the zero at regular intervals ( 20). Oerlikon Leybold Vacuum assumes no liability and the warranty becomes null and void if any repair work is carried out by the end-user or third parties.

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Returning the Product

WARNING
WARNING: forwarding contaminated products Contaminated products (e.g. radioactive, toxic, caustic or microbiological hazard) can be detrimental to health and environment. Products returned to Oerlikon Leybold Vacuum should preferably be free of harmful substances. Adhere to the forwarding regulations of all involved countries and forwarding companies and enclose a duly completed declaration of contamination *).

*)

Form under www.oerlikon.com

Components contaminated by microbiological, explosive or radioactive products will not be accepted without written evidence of decontamination. Products that are not clearly declared as "free of harmful substances" are decontaminated at the expense of the customer. Products not accompanied by a duly completed declaration of contamination are returned to the sender at his own expense.

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Disposal
DANGER
DANGER: contaminated parts Contaminated parts can be detrimental to health and environment. Before beginning to work, find out whether any parts are contaminated. Adhere to the relevant regulations and take the necessary precautions when handling contaminated parts.

WARNING
N

WARNING: substances detrimental to the environment Products or parts thereof (mechanical and electric components, operating fluids etc.) can be detrimental to the environment. Dispose of such substances in accordance with the relevant local regulations.

Separating the components

After disassembling the product, separate its components according to the following criteria: Contaminated components Contaminated components (radioactive, toxic, caustic or biological hazard etc.) must be decontaminated in accordance with the relevant national regulations, separated according to their materials, and disposed of. Other components Such components must be separated according to their materials and recycled.

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9
[1]

Literature
www.oerlikon.com Operating Manual Center One GA 09.033/1.01 (German) GA 09.033/1.02 (English) Oerlikon Leybold Vacuum GmbH, D50968 Kln, Deutschland www.oerlikon.com Operating Manual Center Two, Center Three GA 09.035/1.01 (German) GA 09.035/1.02 (English) Oerlikon Leybold Vacuum GmbH, D50968 Kln, Deutschland www.oerlikon.com Interface Manual Interface RS232C 17200961_001_00 (German) 17200961_002_00 (English) Oerlikon Leybold Vacuum GmbH, D50968 Kln, Deutschland

[2]

[3]

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ETL Certification
ETL LISTED The product CTR 100 complies with the requirements of the following Standards: UL 61010-1, Issued: 2004/07/12 Ed: 2 Rev: 2005/07/22 CAN/CSA C22.2#61010-1, Issued: 2004/07/12

3103457

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EC Declaration of Conformity

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Notes

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1720 0257. 002. 02

Oerlikon Leybold Vacuum GmbH Bonner Strae 498 D-50968 Kln Tel.: +49-(0)221-347 1234 Fax: +49-(0)221-347 1245 [email protected]

w w w . o e r l i k o n . c om

Original: German 17200257_001_02 (2011-03)