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    Disk Resonator Gyroscope

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    abtin_kamelii
    This document discusses a disk resonator gyroscope (DRG). It notes that DRGs have advantages for high performance MEMS gyroscopes like thermal stability and electrostatic tuning. It also discusses using encapsulation to provide a near-vacuum hermetic environment for high quality (Q) factors. The document describes how the anisotropy of silicon causes frequency splits between drive and sense modes, and two design methods are introduced to compensate for this using the same DRG design.

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    © All Rights Reserved
    Download as PDF, TXT or read online from Scribd

    Disk Resonator Gyroscope

    Uploaded by

    abtin_kamelii
    54 views3 pages
    This document discusses a disk resonator gyroscope (DRG). It notes that DRGs have advantages for high performance MEMS gyroscopes like thermal stability and electrostatic tuning. It also discusses using encapsulation to provide a near-vacuum hermetic environment for high quality (Q) factors. The document describes how the anisotropy of silicon causes frequency splits between drive and sense modes, and two design methods are introduced to compensate for this using the same DRG design.

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    GYRO

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    This document discusses a disk resonator gyroscope (DRG). It notes that DRGs have advantages for high performance MEMS gyroscopes like thermal stability and electrostatic tuning. It also discusses using encapsulation to provide a near-vacuum hermetic environment for high quality (Q) factors. The document describes how the anisotropy of silicon causes frequency splits between drive and sense modes, and two design methods are introduced to compensate for this using the same DRG design.

    Copyright:

    © All Rights Reserved
    Download as PDF, TXT or read online from Scribd
    Download as pdf or txt
    54 views3 pages

    Disk Resonator Gyroscope

    Uploaded by

    abtin_kamelii
    This document discusses a disk resonator gyroscope (DRG). It notes that DRGs have advantages for high performance MEMS gyroscopes like thermal stability and electrostatic tuning. It also discusses using encapsulation to provide a near-vacuum hermetic environment for high quality (Q) factors. The document describes how the anisotropy of silicon causes frequency splits between drive and sense modes, and two design methods are introduced to compensate for this using the same DRG design.

    Copyright:

    © All Rights Reserved
    Download as PDF, TXT or read online from Scribd
    Download as pdf or txt
    of 3

    Disk Resonator Gyroscope

    http://www.stanford.edu/~ahn1229/DRG/Researc...

    DRG

    Disk Resonator Gyroscope

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    // 06:30

    Disk Resonator Gyroscope

    http://www.stanford.edu/~ahn1229/DRG/Researc...

    Wineglass MEMS Gyroscope


    Ring/disk wineglass resonating gyroscopes, including DRGs have been attractive candidates for high
    performance MEMS gyroscopes because of inherent advantages such as thermal stability and electrostatic
    tuning capability. In order to achieve inertial navigation grade, it is desired to operate with perfectly
    mode-matched condition such that the rotation-induced Coriolis signal is amplified by the quality factor (Q) of
    the sense mode.

    Disk Resonator Gyroscope in epi-seal


    These ring-disk designs are especially interesting because their use of purely in-plane drive and sense
    modes makes these devices inherently compatible with our encapsulation process.
    process provides near-vacuum hermetic environment, enabling high-Q devices.

    Epi-seal encapsulation

    Mode-matching in anisotropic (100) Silicon


    The geometric anisotropy in the mechanical properties of monocrystalline silicon causes frequency splits
    between the drive and sense modes of the device when we design the symmetric ring/disk shaped gyroscope.
    Recently, many researchers in recent times have focused on fabricating these gyroscopes in isotropic
    materials, such as polysilicon and (111) silicon to mitigate the frequency split problem. Unfortunately, these

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    // 06:30

    Disk Resonator Gyroscope

    http://www.stanford.edu/~ahn1229/DRG/Researc...

    approaches require development of new processes for etching, bonding, and packaging, and are likely to
    cause more challenges than they can avoid. A better approach would be to overcome the crystalline
    anisotropy in silicon through design. In this work, two design methods to compensate the anisotropy of (100)
    single crystal silicon are introduced and characterized, based on the same DRG design that we showed in
    previous work. A frequency split of less than 100Hz out of 250kHz resonant frequency was achieved for a
    particular selection of design parameters. These methods can be generalized for other similar types of
    wineglass mode resonating gyroscopes such as rings, disks, and star shapes.

    3 of 3

    // 06:30

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