Moving and manipulating bio-particles and fluids on the microscale is central to many lab-on-a-ch... more Moving and manipulating bio-particles and fluids on the microscale is central to many lab-on-a-chip applications. Techniques for pumping fluids which use electric fields have shown promise using both DC and AC voltages. AC techniques, however, require the use of integrated metal electrodes which have a low resistance but can suffer from unwanted chemical reactions even at low potentials. In this paper we introduce the use of carbon MEMS technology (C-MEMS), a fabrication method which produces 3D conductive polymeric structures. Results are presented of the fabrication of an innovative design of 3D AC-electroosmotic micropump and preliminary experimental measurements which demonstrate the potential of both the technology and the design.
Handling and manipulating fluid using AC-electroosmosis pumping has recently shown some success. ... more Handling and manipulating fluid using AC-electroosmosis pumping has recently shown some success. However most AC-electroosmosis pumps studied previously were fabricated using metals such as gold and titanium, which restrict the geometry of electrodes to planar shapes. Previously we have shown that conductive polymers can be used to fabricate 3D planar and high aspect ratio electrodes to drive fluid inside microchannels. This paper presents experimental testing of two designs of AC electroosmotic micropumps for different applied voltages and fluid conductivities.
Lab-on-a-chip devices require integrated pumping and fluid control in microchannels. A recently d... more Lab-on-a-chip devices require integrated pumping and fluid control in microchannels. A recently developed mechanism that can produce fluid flow is an integrated ac-electro-osmosis micropump. However, like most electrokinetic pumps, ac-electro-osmotic pumps are incapable of handling backpressure as the pumping force mechanism acts on the surface of the fluid rather than the bulk. This paper presents a novel 3D electrode structure designed to overcome this limitation. The electrodes are fabricated using carbon-MEMS technology based on the pyrolysis of the photo-patternable polymer SU-8. The novel ac-electro-osmosis micropump shows an increase in the flow velocity compared to planar electrodes.
Lab-on-a-chip devices require integrated pumping and fluid control in microchannels. A recently d... more Lab-on-a-chip devices require integrated pumping and fluid control in microchannels. A recently developed mechanism that can produce fluid flow is an integrated ac-electro-osmosis micropump. However, like most electrokinetic pumps, ac-electro-osmotic pumps are incapable of handling backpressure as the pumping force mechanism acts on the surface of the fluid rather than the bulk. This paper presents a novel 3D electrode structure designed to overcome this limitation. The electrodes are fabricated using carbon-MEMS technology based on the pyrolysis of the photo-patternable polymer SU-8. The novel ac-electro-osmosis micropump shows an increase in the flow velocity compared to planar electrodes. (Some figures in this article are in colour only in the electronic version)
A new spring shape is designed for a MEMS three
dimensional electrostatic actuat
or. A low spr... more A new spring shape is designed for a MEMS three dimensional electrostatic actuat or. A low spring constant in Z direction for a thick structural layer is achieved. Characteristic features and challenges of this design are described and the analytical analysis is verified by FEM simulations using CoventorWare TM . The analytical models are derived for two types of serpentine springs namely a square serpentine spring (SSS) and curved serpentine spring (CSS). The analytical results are in very good agreement with the simulations.
Moving and manipulating bio-particles and fluids on the microscale is central to many lab-on-a-ch... more Moving and manipulating bio-particles and fluids on the microscale is central to many lab-on-a-chip applications. Techniques for pumping fluids which use electric fields have shown promise using both DC and AC voltages. AC techniques, however, require the use of integrated metal electrodes which have a low resistance but can suffer from unwanted chemical reactions even at low potentials. In this paper we introduce the use of carbon MEMS technology (C-MEMS), a fabrication method which produces 3D conductive polymeric structures. Results are presented of the fabrication of an innovative design of 3D AC-electroosmotic micropump and preliminary experimental measurements which demonstrate the potential of both the technology and the design.
Handling and manipulating fluid using AC-electroosmosis pumping has recently shown some success. ... more Handling and manipulating fluid using AC-electroosmosis pumping has recently shown some success. However most AC-electroosmosis pumps studied previously were fabricated using metals such as gold and titanium, which restrict the geometry of electrodes to planar shapes. Previously we have shown that conductive polymers can be used to fabricate 3D planar and high aspect ratio electrodes to drive fluid inside microchannels. This paper presents experimental testing of two designs of AC electroosmotic micropumps for different applied voltages and fluid conductivities.
Lab-on-a-chip devices require integrated pumping and fluid control in microchannels. A recently d... more Lab-on-a-chip devices require integrated pumping and fluid control in microchannels. A recently developed mechanism that can produce fluid flow is an integrated ac-electro-osmosis micropump. However, like most electrokinetic pumps, ac-electro-osmotic pumps are incapable of handling backpressure as the pumping force mechanism acts on the surface of the fluid rather than the bulk. This paper presents a novel 3D electrode structure designed to overcome this limitation. The electrodes are fabricated using carbon-MEMS technology based on the pyrolysis of the photo-patternable polymer SU-8. The novel ac-electro-osmosis micropump shows an increase in the flow velocity compared to planar electrodes.
Lab-on-a-chip devices require integrated pumping and fluid control in microchannels. A recently d... more Lab-on-a-chip devices require integrated pumping and fluid control in microchannels. A recently developed mechanism that can produce fluid flow is an integrated ac-electro-osmosis micropump. However, like most electrokinetic pumps, ac-electro-osmotic pumps are incapable of handling backpressure as the pumping force mechanism acts on the surface of the fluid rather than the bulk. This paper presents a novel 3D electrode structure designed to overcome this limitation. The electrodes are fabricated using carbon-MEMS technology based on the pyrolysis of the photo-patternable polymer SU-8. The novel ac-electro-osmosis micropump shows an increase in the flow velocity compared to planar electrodes. (Some figures in this article are in colour only in the electronic version)
A new spring shape is designed for a MEMS three
dimensional electrostatic actuat
or. A low spr... more A new spring shape is designed for a MEMS three dimensional electrostatic actuat or. A low spring constant in Z direction for a thick structural layer is achieved. Characteristic features and challenges of this design are described and the analytical analysis is verified by FEM simulations using CoventorWare TM . The analytical models are derived for two types of serpentine springs namely a square serpentine spring (SSS) and curved serpentine spring (CSS). The analytical results are in very good agreement with the simulations.
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Papers by Hamza rouabah
dimensional electrostatic actuat
or. A low spring constant in
Z direction for a thick structural layer is achieved.
Characteristic features and challenges of this design are
described and the analytical analysis is verified by FEM
simulations using CoventorWare
TM
. The analytical models
are derived for two types of serpentine springs namely a
square serpentine spring (SSS)
and curved serpentine spring
(CSS). The analytical results are in very good agreement
with the simulations.
dimensional electrostatic actuat
or. A low spring constant in
Z direction for a thick structural layer is achieved.
Characteristic features and challenges of this design are
described and the analytical analysis is verified by FEM
simulations using CoventorWare
TM
. The analytical models
are derived for two types of serpentine springs namely a
square serpentine spring (SSS)
and curved serpentine spring
(CSS). The analytical results are in very good agreement
with the simulations.