Data Sheet MEHFEEN

HFE Filter Housing

Description
The HFE filter housings are designed to accommodate
the Pall High-Flow Emflon® filter cartridges. Typical
applications include bulk nitrogen (N2) and compressed
dry air (CDA) used in the semiconductor, flat panel
display and photovoltaic manufacturing processes.

• Holds 1 or 3 cartridges
• Available in 508 mm (20 in) or 1,016 mm (40 in) lengths
• Flow rates from 1,000 Nm3/h (588 scfm) to
20,000 Nm3/h (11,770 scfm) and above
• Bolted closure with clamp option
• Lifting davit standard with 3-around housings
• Connections are in-line “T” configuration
• Options to meet high or standard purity specifications

Specifications

Materials • 304L or 316L Stainless Steel

• Surface Treatment: Electropolished or
cleaned for oxygen service*
• < 0.25 µm (10 µin) or < 0.63 µm (25 µin) Certifications • EU Pressure Equipment Directive:
Ra internal surface finish Housings have been evaluated for
• O-ring seal: Fluorocarbon (standard), compliance with the European Union’s
other options available upon request Pressure Equipment Directive 97/28/EC
Connections • 80A up to 400A JIS Flange and buttweld and are CE marked (please refer to CE
connections marked housing options on page 2)
• 2 ˝ up to 6 ˝ ANSI Flange and buttweld • ASME: Housings are designed,
connections manufactured and stamped in accordance
• Others available upon request with the ASME Code (please refer to ASME
code stamped housing options on page 2)
Operating • Maximum Operating Pressure:
Conditions - Standard Pressure: 1.7 MPa at Leak Rating • 100% helium leak tested to 10-6 atm-cm3/s
100˚C (250 psig @ 212˚F)
- High Pressure Option: 2.5 MPa at * Housing with Emflon filters are not for use in oxygen service.
100˚C (363 psig @ 212˚F)
Dimensions

Number of Filter Nominal Nominal

cartridges length length (L) diameter (D)
L
L 1HFE1 1 508 mm (20 in) 1218 mm (47.9 in) 553 mm (21.8 in)
1HFE2 1 1,016 mm (40 in) 1715 mm (67.5 in) 553 mm (21.8 in)
3HFE1 3 508 mm (20 in) 1913 mm (75.3 in) 889 mm (35.0 in)
3HFE2 3 1,016 mm (40 in) 2410 mm (94.9 in) 889 mm (35.0 in)

Please contact Pall Microelectronics for detailed dimensions on specific

housing part numbers.
D D
1HFE 3HFE

Part Numbers/Ordering Information

1 HFE 2 3 –G 4 5 6 7 8 – 9 – 10

Table 1 Table 2 Table 3 Table 4

Code Number of cartridges Code Filter length Code Material Code Interior finish
per housing
2 508 mm (20 in) 4 304L SST Blank As received
1 1
4 1,016 mm (40 in) 6 316L SST L 0.25 µm (10 µin) Ra
3 3
LL 0.63 µm (25 µin) Ra
Table 5 Table 6
Table 7
Code Design pressure Code Connection size and style
Code Description
None 1.7 MPa (250 psig) 2T 2 inch x 0.065 inch wall butt weld tube
1 CE marked
H 2.5 MPa (363 psig) 3T 3 inch x 0.065 inch wall butt weld tube
2 ASME Section VII Div I
3F 3 inch Sch 40 300# ANSI RFWN flange
Table 8 3 CE and ASME
Code Option 4T 4 inch x 0.083 inch wall butt weld tube
Table 9
Blank Electropolished 4F 4 inch Sch 40 300# ANSI RFWN flange
Code O-ring material
C9 O2 Cleaned 6P 6 inch Sch 40 butt weld pipe
H FKM-1
6F 6 inch Sch 40 300# ANSI RFWN flange
H1 PTFE Encapsulated
8P 8 inch Sch 40 butt weld pipe FKM-1
8F 8 inch Sch 40 300# ANSI RFWN flange
Table 10
Code Option
Blank Bolted closure
C Clamp style closure

Microelectronics Visit us on the Web at www.pall.com/micro

Pall Corporation has offices and plants throughout the world. For Pall representatives in your
25 Harbor Park Drive area, please go to www.pall.com/contact.
Port Washington, NY 11050
+1 516 484 3600 telephone Because of technological developments related to the products, systems, and/or services
+1 800 360 7255 toll free US described herein, the data and procedures are subject to change without notice. Please
consult your Pall representative or visit www.pall.com to verify that this information remains
valid.

© Copyright 2010, Pall Corporation. Pall, , and Emflon are trademarks of Pall Corporation.
® Indicates a Pall trademark registered in the USA. is a service mark of Pall
Corporation.

MEHFEEN Produced in the USA November 2010