Vacuum Technology

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vacuum technology, all processes and physical measurements carried out under

conditions of below-normal atmospheric pressure. A process or physical


measurement is generally performed in a vacuum for one of the following reasons:
(1) to remove the constituents of the atmosphere that could cause a physical
or chemical reaction during the process (e.g., vacuum melting of reactive metals such
as titanium); (2) to disturb an equilibrium condition that exists at normal room
conditions, such as the removal of occluded or dissolved gas or volatile liquid from
the bulk of material (e.g., degassing of oils, freeze-drying) or desorption of gas from
surfaces (e.g., the cleanup of microwave tubes and linear accelerators during
manufacture); (3) to extend the distance that a particle must travel before it collides
with another, thereby helping the particles in a process to move without collision
between source and target (examples of uses are in vacuum coating, particle
accelerators, television picture tubes); (4) to reduce the number of molecular impacts
per second, thus reducing chances of contamination of surfaces prepared in vacuum
(useful in clean-surface studies).

For any vacuum process a limiting parameter for the maximum permissible pressure
can be defined. It can be the number of molecules per unit volume (reasons 1 and 2),
the mean free path (reason 3), or the time required to form a monolayer (reason 4).

At room temperature and normal atmospheric pressure, 1 cubic foot (0.03


cubic m) of air contains approximately 7 × 10 23 molecules moving in
random directions and at speeds of around 1,000 miles per hour (1,600
kilometres per hour). The momentum exchange imparted to the walls is
equal to a force of 14.7 pounds for every square inch of wall area. This
atmospheric pressure can be expressed in a number of units, but until
relatively recently it was commonly expressed in terms of the weight of a
column of mercury of unit cross section and 760 mm high. Thus, one
standard atmosphere equals 760 mm Hg, but to avoid the anomaly of
equating apparently different units, a term, torr, has been postulated; one
standard atmosphere = 760 torr (1 torr = 1 mm Hg). This term was replaced
in 1971 by an SI unit defined as the newton per square metre (N/m 2) and
called the pascal (one pascal = 7.5 × 10-3 torr).

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