CNC Video Measuring System NEXIV VMA series

CNC Video Measuring System

Wide FOV Model

 Nikon offers the ultimate usability for a wide variety of Three models with different XY strokes to suit various sample sizes
measuring applications with the wide FOV,
long XYZ stroke iNEXIV VMA series.
250 mm (X) × 200 mm(Y) × 200 mm (Z) – Standard stroke

--- Automatically measures various components, such as plastic injection molds and electronic
iNEXIV VMA-2520
A space-saving, low-cost model suited to measure small
parts, with high accuracy and repeatability
samples, such as electronic and die cast parts.

--- Allows measurements of tall and uneven objects with the long working distance of 73.5 mm Stroke 250 (X) x 200 (Y) x 200 (Z) mm
Measuring head travel Z direction (single column type)
Three models in the iNEXIV VMA series are available, each with a different XY-stroke. Stage travel X-Y direction

Wide field of view and sharp, clear images

450 mm (X) × 400 mm(Y) × 200 mm (Z) – Middle stroke
A wide FOV of up to 13 mm x 10 mm (at Optical magnification 0.35× 0.6× 1× 1.8× 3.5×
0.35x) allows easy search and alignment FOV size on stage
Horizontal ×
Vertical (mm)
13.3×
10.0
7.8×
5.8
4.7×
3.5
2.6×
1.9
1.33×
1.00
iNEXIV VMA-4540
of measuring targets. The 10x zoom with Horizontal ×
1/3” CCD size 4.8×3.6 Suitable for mid-size samples, such as molded and
five specific steps provides accurate Vertical (mm)
Video magnification 36 pressed parts.
measurement as well as high-resolution
Total magnification on
images. An excellent Apochromat objective Video Window (640 × 480 pixels)* 12.6 21.6 36 64.8 126 Stroke 450 (X) x 400 (Y) x 200 (Z) mm
lens with high NA (0.11) and low distortion has Size of 1 pixel (micrometer) 21.8 12.6 7.36 4.25 2.15 Measuring head travel X-Y direction (bridge type)
Size of objects on 0.01× (mm) 0.126 0.216 0.36 0.648 1.26 Stage travel Y direction
been specially designed for the iNEXIV series, Video Window 0.1× (mm) 1.26 2.16 3.6 6.48 12.6
providing crisp, clear images. (640 × 480 pixels) 1× (mm) 12.6 21.6 36 64.8 126
* Total magnification is that of video window with 640 × 480 pixels on 24 inch
WUXGA monitor (1920 × 1200 pixels) recommended for VMZ-R series.

650 mm (X) × 550 mm(Y) × 200 mm (Z) – Large stroke

iNEXIV VMA-6555
Smartphone charger Suitable for large sample and simultaneous
0.35x 0.6x 1x 1.8x 3.5x
13.3 mm (W) x 10.0 mm (H) 7.8 mm (W) x 5.8 mm (H) 4.7 mm (W) x 3.5 mm (H) 2.6 mm (W) x 1.9 mm (H) 1.33 mm (W) x 1.0 mm (H) measurement of multiple parts.

Stroke 650 (X) x 550 (Y) x 200 (Z) mm

Robust 73.5 mm working distance Large XY stroke and long Z stroke Measuring head travel X-Y direction (bridge type)
Stage travel Y direction
A long working distance Three models with different XY strokes are available:
minimizes the possibility of 250 x 200 mm, 450 x 400 mm and 650 x 550 mm
contact between the objective An extended 200 mm Z-axis stroke is perfect for tall
lens and valuable samples. samples.
Ideal for measuring large step
heights and deep holes. Working distance 73.5 mm
2 3
 Features Software
Fast and accurate vision AF (Auto Focus) User-friendly standard software iNEXIV VMA AutoMeasure
The high-speed vision AF offers high-repeatability and high-precision for height and depth measurement. Non- NEXIV AutoMeasure, dimensional measurement software for the ever-evolving NEXIV series. Support functions
contact measurement using the vision AF does not damage or deform parts. to create measurement programs have been further enhanced, making fast, highly accurate dimensional
measurements easier than ever before.

Graphical user interface to efficiently

Even the bottom of
create programs with intuitive operation
a small hole can be and easy-to-understand guide
focused.
Top surface of implant Mid-depth of implant Mid-depth of implant Bottom of implant Measurement programs can be created by selecting the icon
for edge detection and that which should be measured.

Versatile illuminations
The iNEXIV VMA series is equipped with episcopic (top), diascopic (bottom) and 8-segment ring (with 18-degree
oblique angle) LED illuminators. Combining these illuminators with superior optics provides accurate detection of
low contrast edges. Edge detection Various measurement icons
and AF icon

Lighting optimization function《 NEW Teaching navigation《 NEW

Any 8-segment light
Automatically optimizes the type of lighting, direction of Simply follow the on-screen instructions and the required
can be selected
for effective edge ring illumination, and light intensity according to features of measurement settings are entered automatically. Even first-
detection. object measured. Makes it possible to reduce the amount time users can create basic measurement programs.
Top light Ring light from left side Ring light from rear side Ring light from right side of time and effort spent creating measurement programs.
Place a sample

Intelligent search
Set a coordinate system
Even when a sample is misaligned, the system automatically

1
2 3 searches the target location based on the target image Measurement programs can be created
Select a measurement according to sample placement and features.
recorded in a teaching file. This enables accurate, automatic template
Recorded measurement by eliminating possible detection errors.
image

1 Target is detected 2 Searching the misaligned target 3 Target is detected Specify the positions
to be measured
Showing result of lighting Showing result of lighting
optimization, detecting edge of optimization, detecting edge of Repeat above as
Misaligned target height variations in the patterned condenser component mounted on a necessary
can be automatically area of a printed circuit board. printed circuit board. Select measurement template and specify
detected using (Optimization with epi-illumination) (Optimization of light source direction positions to be measured with the on-screen
intelligent search and intensity with ring illumination) instructions, and shape will be detected and
Execute the measurement
*Optimizations may not be possible depending on shape of light will be optimized automatically to create
object measured. the measurement program.

XY coordinate after

Other software
XY coordinate searching the target

Digital chart comparator Profiler/CAD Reader EDF/Stitching Express (option)

Deviation of contours can be checked by overlaying charts generated digitally from 5D profile shape analysis program Image analysis and archiving program for creating an
2D CAD data onto video images. Digital charts always accompany video images. all-in-focus EDF (Extended Depth of Focus) image from
Virtual AutoMeasure multiple images at different Z axis. This also generates
CAD interface off-line teaching support program a stitched image with super wide FOV from multiple
images on the same XY plane.

4 5
 Optional Hardware Dimensional Diagram
Touch probe for measurement of imperceptible parts VMA-2520 Measurement range
with TP20 with
�� ��� �����������������
������������������
���������������
Controller: 145×400×390 mm / 14 kg

��������������������������
��� ����� 10 mm stylus PC rack (for all models)
The iNEXIV VMA series can accommodate optional ���

���
(without MCR20)

���
���
Vision/TP ����� �����
Renishaw® TP20 or TP200 touch probes. Touch probes offset (X)
����� ��� ����� ���

�������

��
provide measurements where vision AF cannot be used, ���

���
��� ��������������������������

���������
such as the inner diameter of an oil seal or the clearance �����������������

���
�� ���

���
������������������
���������������

��������������������������
angle of an indexable insert. Measurement can be easily ���

����
(with MCR20) �

���

��
��� ���

����
Vision/TP

���

���
���

���
switched between video and touch probe, and both can be

���
offset (X)

���
�����

��
��
�

��
controlled by one teaching file.

���
�

���
��� ���

���
��� ��� ��� ���

���
��������������������������

��
TP200 Main body with table: 650×700×1557 mm, 110 kg Unit: mm Unit: mm

VMA-4540 Measurement range �� ��� �����������������������������

with TP20 with ���������������������

��������������������������
����
��� 10 mm stylus
���
(without MCR20)

���
���
Vision/TP offset (X)

��
���
���
��������������������������

���
����
Inner diameter of oil seal Clearance angle of insert �� ��� �����������������������������

����
���������������������

��������������������������
���
(with MCR20)

���
Vision/TP offset (X)

���

���
Extended 1.5x high-magnification

���

�����
��
��� ��� ��� ���� ���

��

�
��� ����
���
��������������������������

Each model can be modified before shipment to extend the magnification to 1.5x, Main body with table: 1000×1340×1553 mm, 500 kg Unit: mm

powerful enough for precise measurement of minute electronic parts.

VMA-6555 Measurement range �� ��� �����������������������������
*Video measuring images are slightly darker with the 1.5x high-magnification option, even with the same light ����
with TP20 with
���������������������

10 mm stylus
���

��������������������������
Smartphone charger intensity setting (0 - 100). ���

(without MCR20)

���
���
Vision/TP

���
offset (X)

��
���

���
��������������������������

����
����
�� ��� �����������������������������
���������������������

��������������������������
���
�������������

(with MCR20)

���

���
0.52x 0.9x 1.5x 2.7x 5.2x Vision/TP

���
���
offset (X)

�����
8.9 mm (W) x 6.7 mm (H) 5.2 mm (W) x 3.9 mm (H) 3.1 mm (W) x 2.3 mm (H) 1.9 mm (W) x 1.3 mm (H) 0.89 mm (W) x 0.67 mm (H)

��
���� ��� ��� ���� ���
���� ����

�
��
���

Main body with table: 1200×1640×1553 mm, 665 kg

��������������������������
Unit: mm

Top view VMA-2520 VMA-4540 VMA-6555

Laser AF of stage �� ��� �� �� ��� ��� ��� ��� ��� �� �� �� ��� ��� ��� ��� ��� ��� �� ��

��

��
�� �� �� �� �� �� ��

��

��
�

�
��

����

����
With a working distance of 63 mm, the optional Laser AF enables height

��� �������������������
��
�����������������

��� �������������
�� �� ��

��������������
measurement of flat surfaces with high repeatability, while keeping a wide

���

��� �������������
���
���

��� ����������
���

���

���
FOV at low magnification. 63 mm

���
��
working
��
�����������������������
��������
distance

����
��� ��������
��� �����������������

�
��
��
�� ��� ����������� ��

����
��� �������������
����������������

��
��
�� ��� ���������� ��

�
��� ������������� �����
��������
Unit: mm

6 7
Specifications
Model VMA-2520 VMA-4540 VMA-6555
XYZ Strokes 250×200×200 mm 450×400×200 mm 650×550×200 mm
Measurement range with TP 200×200×166 mm (TP20) 400×400×166 mm (TP20) 600×550×166 mm (TP20)
(Touch Probe) 200×200×170 mm (TP200) 400×400×170 mm (TP200) 600×550×170 mm (TP200)
250×200×200 mm (with Vision AF) 450×400×200 mm (with Vision AF) 650×550×200 mm (with Vision AF)
Measurement range 175×200×166 mm (TP20) 325×400×166 mm (TP20) 525×550×166 mm (TP20)
with TP & MCR20*1 175×200×170 mm (TP200) 325×400×170 mm (TP200) 525×550×170 mm (TP200)
225×200×200 mm (with Vision AF) 375×400×200 mm (with Vision AF) 575×550×200 mm (with Vision AF)
Minimum readout 0.1 µm
Maximum sample weight 15 kg 40 kg 50 kg
Maximum sample weight
5 kg 20 kg 30 kg
(accuracy guaranteed)
Maximum permissible error*2 EUX,MPE EUY,MPE: 2+8L /1000 µm EUX,MPE EUY,MPE: 2+6 L /1000 µm
(L = Length in mm) EUXY,MPE: 3+8L /1000 µm EUXY,MPE: 3+6 L /1000 µm
EUZ,MPE*3: 3+L /50 µm EUZ,MPE*3: 3+L /100 µm
Camera Black & white 1/3” CCD, Color 1/3” CCD (option)
Working distance 73.5 mm (63 mm with Laser AF)
Magnification Optical: 0.35 to 3.5x (0.52x to 5.2x high magnification is available as an option)
On screen: 12.6 to 126x with 24-inch WUXGA (1920×1200 pixels) monitor
FOV size on stage 13.3×10 mm to 1.33×1 mm (8.9×6.7 mm to 0.89×0.67 mm with high-magnification option)
Autofocus Vision AF, Laser AF (option)
Illumination Contour illumination and Surface illumination: White LED diascopic illumination
Oblique illumination: 8-segment white LED ring illumination
Video resolution 640×480 pixels
Touch probe (optional) Renishaw® TP200/TP20
Power source 100 V-240 V, 50/60 Hz
Power consumption 5 A (100 V) - 2.5 A (240 V)
*1: The iNEXIV-dedicated MCR20 can be used for both TP20 and TP200. *2: Nikon's in-house test at 20°C ±0.5k *3: With TP or Laser AF

Nikon Corporation Industrial Metrology Business Unit is certified as Date of initial accreditation: July 1, 2009
an ISO/IEC 17025 accredited calibration laboratory for CNC video Scope of accreditation: Coordinate measuring instruments
measuring systems by the IAJapan (International Accreditation Accredited section: CS Promotion Department
Japan) as Accreditation No.JCSS0241. Industrial Metrology Business Unit
Calibration site: Customer’s laboratory (field service)
ISO/IEC 17025: International standard, which specifies the general Calibration and Measurement
requirements to ensure that a laboratory is competent to carry out Capability (CMC), (K=2, Level of L ≤ 420 mm: 0.32 µm
specific tests and/or calibrations Confidence Approximately 95%) 420 ≤ L ≤ 1000 mm : (0.29 + 0.64 × L /1000) µm
[ L=measurement length (mm)]

Specifications and equipment are subject to change without any notice or obligation on the part of the manufacturer. February 2022 ©2014-2022 NIKON CORPORATION
N.B. Export of the products* in this brochure is controlled under the Japanese Foreign Exchange and Foreign Trade Law. Appropriate export procedures shall be required in case of export from Japan.
*Products: Hardware and its technical information (including software)
Company names and product names appearing in this brochure are their registered trademarks or trademarks.

ISO 14001 Certified

for NIKON CORPORATION

NIKON CORPORATION ISO 9001 Certified

Shinagawa Intercity Tower C, 2-15-3, Konan, Minato-ku, Tokyo 108-6290, Japan for NIKON CORPORATION
phone: +81-3-6433-3701 fax: +81-3-6433-3784 Industrial Metrology Business Unit
https://www.nikon.com/products/industrial-metrology/

NIKON METROLOGY EUROPE NV NIKON METROLOGY, INC. PT. NIKON INDONESIA

Interleuvenlaan 86 B-3001 Leuven, Belgium 12701 Grand River Road, Brighton, MI 48116 U.S.A. INDONESIA phone: +62-267-864-3949 fax: +62-267-864-3950
phone: +32-16-74-01-00 fax: +32-16-74-01-03 phone: +1-810-220-4360 fax: +1-810-220-4300 E-mail: [email protected]
E-mail: [email protected] E-mail: [email protected] NIKON SALES (THAILAND) CO., LTD.
http://www.nikonmetrology.com/en-gb http://www.nikonmetrology.com/en-us THAILAND phone: +66-2633-5100 fax: 66-2633-5191
NIKON METROLOGY UK LTD. NIKON METROLOGY - MÉXICO
UNITED KINGDOM phone: +44-1332-811-349 fax: +44-1332-639-881 MEXICO phone: +52-442-688-5067
E-mail: [email protected] E-mail: [email protected]
NIKON METROLOGY SARL NIKON INSTRUMENTS (SHANGHAI) CO., LTD.
FRANCE phone: +33-1-60-86-09-76 fax: +33-1-60-86-57-35 CHINA (Shanghai branch) phone: +86-21-6841-2050 fax: +86-21-6841-2060
E-mail: [email protected] (Beijing branch) phone: +86-10-5831-2028 fax: +86-10-5831-2026
NIKON METROLOGY GMBH (Guangzhou branch) phone: +86-20-3882-0551 fax: +86-20-3882-0580
GERMANY phone: +49-211-45-44-69-51 NIKON INSTRUMENTS KOREA CO., LTD.
E-mail: [email protected] KOREA phone: +82-2-2186-8400 fax: +82-2-555-4415
NIKON INSTRUMENTS S.p.A. NIKON SINGAPORE PTE. LTD.
ITALY phone: +39-055-300-96-01 fax: +39-055-30-09-93 SINGAPORE phone: +65-6559-3651 fax: +65-6559-3668
E-mail: [email protected]

Printed in Japan (2202) Am/M Code No.2CE-IJBH-6