Initial Qualification
Initial Qualification
Initial Qualification
ACR = Σ [A * v] / V = Σ V˚/ V
ACR = Air change rate V = Total volume of the room in [m3]
A = Area of the filter in [m] V˚ = Air volume flow for each filter in [m3 / h]
v = Velocity oft the air in [m/s] Σ = Total air volume flow in [m3 / h]
The air exchange rate must be large enough to hold the required clean
room class, but is not specified normative!
Ø The total air outlet area of a built-in end filter scan coverage
Ø In addition, the filter media and receiving the filter seal must be checked
for leakage limit
Ø The upstream concentration should be selected so that the verification of
the absence of leakage is reliably ensured (minimum)
Ø In addition, the filter medium must not be unnecessarily contaminated by
the test aerosol (maximum)
Ø Particle size of test aerosol: ≤ 1,0 µm
The scanning speed vs recommended according to ISO 14644-3: 2020 is <12 cm/s
with the round probe and <5 cm/s with a rectangular probe (15 x 69 mm).
Round Probe:
TS = [L * W] / [(Dreal) * vS * 60 s/min]
Rectangular probe :
Fan
Air
Aerosol input
Aerosol up stream
HEPA Filter
Dilution system
Faktor 100 - 1'000
Aerosol generator
Evaporation time
ISO - Maximum value of the airborne particle concentration (Particles per cubic meter air)
classification equal or bigger as the particle sizes seen below
number (N) 0,1 µm 0,2 µm 0,3 µm 0,5 µm 1,0 µm 5,0 µm
Annex 1
Example:
For Class A GMP follows: D = 5,0 µm and Cn = 20 particles N = log [20 / (0.1 / 5) 2.08] = 4.8
For Class A and B GMP follows: D = 0,5 µm and Cn = 3’520 particles N = log [3’520 / (0.1 / 0,5) 2.08] = 5
For Class A and B GMP follows: D = 1,0 µm and Cn = 832 particles N = log [832 / (0.1 / 1,0) 2.08] = 5
For Class C GMP follows: D = 5,0 µm and Cn = 2’900 particles N = log [2’900 / (0.1 / 5) 2.08] = 7
For Class D GMP follows: D = 5,0 µm and Cn = 29’000 particles N = log [29’000 / (0.1 / 5) 2.08] = 8
6 3 64 12 192 21
8 4 68 13 232 22
10 5 72 14 276 23
24 6 76 15 352 24
28 7 104 16 436 25
32 8 108 17 636 26
The particle concentration (given in particle number per cubic meter) in the individual
sample volume at each sampling location shall not exceed the concentration limits for
the variables considered in the table after completion of the tests. If several individual
sample volumes are taken at a sampling site, the concentration shall be averaged
and the mean concentration shall not exceed the concentration limits indicated in the
table.
At sample location 4, the mean sample volume concentration of 4'165 does not meet the criteria of the
highest particle count of 3'520 of ISO class 5. At sampling site 3 and sampling location 9, one of the
concentrations of the individual particle counts does not hold the limit set in Table 1. However, neither the
mean particle concentration for sampling site 3 nor for sampling site 9 violates the limit set in Table 1.
Since the air purity is not met by the particle concentration at sample location 4, the clean room does not
meet the required classification.
100
0:00 0:04 0:08 0:12 0:16 0:20 0:24
Pressure room 6M 6M 12 M 6M 6M 12 M
Air changes n. a. 6M 12 M n. a. 6M 12 M
Pressure drop filter 12 M 12 M 12 M 12 M 12 M 12 M
BSR Ingenieur-Büro
D-68794 Oberhausen-Rheinhausen