Resume Dry Practical 2
Resume Dry Practical 2
Resume Dry Practical 2
195160100111028
History of SEM
In 1933, Electron Microscopy was invented by Ernst Ruska, a German
physicist. He was a
Awarded the Nobel Prize for physics for his invention in 1986
In 1938, First SEM debuted by Manfred Von Ardenne
In 1965, Cambridge Scientific Instrument (UK) and JOEL (Japan) first
commercialized SEM individually
Introduction of SEM
The light microscope used photons while the electron microscope used
electrons. Photons are substituted with electrons and glass lenses are
substituted with electromagnetic and electrostatic lenses. The size of the light
microscope is more than 100nm (the size of a Mycoplasma) and less than 1mm
(the size of a frog egg). The size of an electron microscope is more than 0.1nm
(the size of atoms) and less than 100µm (the size of eukaryotic cells). Electron
microscopes are scientific instruments that use a beam of highly energetic
electrons to examine objects on a very fine scale.
Applications of SEM
Topography is used to observe the surface features of the sample
Morphology is used to observe the shape and size of the sample
Composition is used to observe the elements that the sample is
composed of and their relative amount (%) – purity
Crystallographic info is used to observe how atoms are arranged in the
sample
The SEM image shows a more detailed picture of the object than the
compound microscope image and TEM image. The TEM image shows a more
detailed image of the object than the Compound microscope image.
Instrumentation
The parts of SEM include:
Electron cannon
Electron gun consisting of a cathode and anode
The condenser lens controls the number of electrons traveling down the
column
The objective lens focuses the beam into a spot on the sample
The deflection coil helps to deflect the electron beam
SED attracts the secondary electrons
Additional sensors detect backscattered electrons and x-rays
Vacuum pumps system
Operation panel with focus, alignment, and magnification tools and a
joystick for positioning
Screen for menu and image display
Cryo-unit to prepare frozen material before insertion in the observation
chamber in Cryo-SEM mode
Formation of an image
High-energy electrons shoot and the outgoing electron/x-rays analyze.
SEM changes the magnification of an image by reducing the size of the area
scanned by the scan coils. This form of image processing is only in gray. This
image can be colorized through the use of feature-detection software. This is
usually for aesthetic effects and adding a realistic effect.
Resolution
Best resolution that can be obtained size of the electron spot on the
surface of the sample
The introduction of FEG has dramatically improved the resolution
of SEMs
The volume from which the signal electrons are formed defines the
resolution
SE image has a higher resolution than a BSE image
Scanning speed :
A weak signal requires slow speed to improve the signal-to-noise
ratio
When doing a slow scan drift in the electron beam can affect the
accuracy of the analysis
Sample preparation
1. Coating specimen
A coating specimen is used to increase the conductivity of the specimen
and to prevent the high voltage charge on the specimen. All metals are
conductive and require no preparation before being used. Meanwhile,
non-metals need to be made conductive by using a device called a
"sputter coater". These non-metals will coat with thin layers i.e. 20nm –
30nm of conductive metal such as gold, gold-palladium alloy, platinum,
osmium, iridium, tungsten, chromium, and graphite. Appropriate size
sample that fits in the specimen chamber. Mounted rigidly on a
specimen holder in specimen stub. For imaging in the SEM, specimens
must be electrically conductive and electrically grounded.
2. Cleaning the surface of the specimen
Cleaning the specimen surface is very important because the surface
contains a lot of unwanted deposits, such as dust, mud, soil, etc.
3. Dehydrating the specimen
Dehydration of the specimen using water must be removed, air drying
causes collapse and shrinkage, this is usually achieved by replacing the
water in the cell with an organic solvent such as ethanol or acetone,
dehydration is carried out with a graded sequence of ethanol or acetone.
4. Drying the specimen
Dry the specimen by ensuring that the specimen is completely dry.
Otherwise, the sample will be destroyed.
5. Mounting the specimen
Furthermore, the way to place the specimen is that the specimen must
be mounted on a holder, rigidly mounted on specimen holder called a
specimen stub. For dry specimens, it is attached to the specimen stub
using an adhesive such as epoxy resin or electrically conductive double-
sided adhesive tape.
SEM Advantage
Gives detailed 3D and topographical imaging and versatile information
garnered from different detectors.
Works very fast.
Modern SEMs allow for the generation of data in digital form.
Most SEM samples require minimal preparation actions.
SEM Disadvantage
SEMs are expensive and large.
Special training is required to operate an SEM.
The preparation of samples can result in artifacts.
Limited to solid samples.
Carry a small risk of radiation exposure associated with the electrons
that scatter from beneath the sample surface.
Summary
SEM is a versatile instrument for many applications, especially for the
study of surface morphology.
To get a micrograph, an electron probe is scanned across the surface of
the samples and detectors interpret the signal as a function of time
A resolution of 1-2nm can be obtained when operated in a high-
resolution setup.
The introduction of ESEM and the field emission gun have simplified the
imaging of challenging samples
Signals:
Secondary electrons (SE) are mainly topography
Backscattered electrons (BSE) are mainly chemistry
X-rays (EDX) is chemistry