4080 Pre Installation Guide 5989-6429EN-e5

Keysight 4080 Series
Parametric Test System
Preinstallation
Guide
3
Keysight 4080 Series Preinstallation Guide, Ed ition 5
Notice
The information contained in this document is subject to change without notice. Keysight Technologies makes no
warranty of any kind with regard to this material, including, but not limited to, the implied warranties of
merchantability and fitness for a particular purpose. Keysight Technologies shall not be liable for errors contained
herein or for incidental or consequential damages in connection with the furnishing, performance, or use of this
material.
Warranty
A copy of the specific warranty terms applicable to your Keysight Technologies product and replacement parts can
be obtained from your local sales and service office.
Audience
This manual is intended for customers who purchase the Keysight 4082A, 4082F, or 4083A. Keysight customer
engineers (CE) may also refer to this manual during site preparation consultation.
Printing History
The printing date and publication number indicate the current edition. The printing date changes when a new
edition is printed. (Minor corrections and updates, which are incorporated at reprint, do not require a date change.)
The publication number is updated when extensive technical changes are incorporated.
Edition 1 June 2007
Edition 2 April 2008
Edition 3 July 2008
Edition 4 February 2016
Edition 5 November 2018
4
Safety Summary
The following general safety precautions must be observed during all phases of operation, service, and repair of
this instrument. Failure to comply with these precautions or with specific warnings elsewhere in this manual may
impair the protections provided by the equipment. In addition, it violates safety standards of design, manufacture,
and intended use of the instrument. Keysight Technologies, Inc. assumes no liability for customer’s failure to
comply with these requirements.
NOTE Keysight 4080 series complies with INSTALLATION CATEGORY II for main input and
INSTALLATION CATEGORY I for measurement input terminals, and POLLUTION DEGREE 2
defined in IEC 1010-1.
The 4080 series is INDOOR USE product.
The 4080 series is CLASS 1 LASER product based on IEC 825-1 optical wave:
AEL power is less than 0.2 mW.

Wavelength is 650 nm of continuous wave.
GROUND THE INSTRUMENT

To minimize shock hazard, the instrument chassis and cabinet must be connected to an electrical ground. The
power terminal and the power cable must meet International Electrotechnical Commission (IEC) safety standards.
DO NOT OPERATE IN AN EXPLOSIVE ATMOSPHERE
Do not operate the instrument in the presence of flammable gases or fumes. Operation of any electrical instrument
in such an environment constitutes a definite safety hazard.
KEEP AWAY FROM LIVE CIRCUITS
Operation personnel must not remove instrument covers. Component replacement and internal adjustments must be
made by qualified maintenance personnel. Do not replace components with power cable connected. Under certain
conditions, dangerous voltages may exist even with the power cable removed. To avoid injuries, always disconnect
power and discharge circuits before touching them.
DO NOT SERVICE OR ADJUST ALONE
Do not attempt internal service or adjustment unless another person, capable of rendering first aid and resuscitation,
is present.
DO NOT SUBSTITUTE PARTS OR MODIFY INSTRUMENT
Because of the danger of introducing additional hazards, do not install substitute parts or perform any unauthorized
modification to the instrument. Return the instrument to a Keysight Technologies Sales and Service Office for
services and repair to ensure that safety features are maintained.
DANGEROUS PROCEDURE WARNINGS
Warnings, such as in the example below, precede potentially dangerous procedures throughout this manual.
Instructions contained in the warnings must be followed.
WARNING Dangerous voltages, capable of causing death, are present in this instrument. Use extreme
caution when handling, testing, and adjusting.
5
Safety Symbols
The general definitions of safety symbols used on equipment or in manuals are listed below.
Instruction manual symbol: the product will be marked with this symbol when it is necessary
for the user to see the instruction manual in order to protect against damage to the instrument.
Indicates dangerous voltage and potential for electrical shock. Do not touch terminals that have
this symbol when instrument is on.
Protective conductor terminal.
It is intended for connection to an external protective conductor for protection against electric
shock in case of a fault or the terminal of a protective earth electrode.
Indicate lifting hazardous heavy object.
Frame or chassis terminal. A connection to the frame (chassis) of the equipment which
normally includes all exposed metal structures.
Alternating current.
` Direct current.
Electrical shock.
ON (Supply).
OFF (Supply).
CAT1 Means INSTALLATION CATEGORY I. Measurement terminals on the test head comply with
INSTALLATION CATEGORY I.
WARNING The warning sign denotes a hazard. It calls attention to a procedure, practice, condition or the
like, which, if not correctly performed or adhered to, could result in injury or death to
personnel.
CAUTION The caution sign denotes a hazard. It calls attention to an operating procedure, practice,
condition or the like, which, if not correctly performed or adhered to, could result in damage to
or destruction of part or all of the product.
NOTE The note sign denotes important information. It calls attention to a procedure, practice,
condition or the like, which is essential to highlight.
Electrical Work Types

The type of electrical work for this product is Type 1 or 2.
Type 1: Equipment is fully deenergized.

Type 2: Equipment is energized. Energized circuits are covered or insulated.
Type 3: Equipment is energized. Energized circuits are exposed and inadvertent contact with
6
uninsulated energized parts is possible. Potential exposures are no greater than 30 volts rms,
42.4 volts peak, 60 volts dc or 240 volt-amps in dry locations.
Type 4: Equipment is energized. Energized circuits are exposed and inadvertent contact with
uninsulated energized parts is possible. Potential exposures are greater than 30 volts rms, 42.4
volts peak, 60 volts dc, or 240 volt-amps in dry locations, or hazardous radio-frequency
currents.
For more information, see the S2 guideline in the SEMI Safety Guidelines.
7
8
Contents
1. General Information
2. Site Preparation
Installation Site Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20
Space requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20
Other requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22
Air conditioning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22
Floor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22
Lighting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22
Software media storage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22
Telephone . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22
Network service. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22
Label for emergency off switch. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22
Lock for disconnect device . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 22
Purge Air . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23
Example of 4080 series tester layout. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 24
Electrical Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29
Power configurations and requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 29
Grounding . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30
Power line transients . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30
Power consumption of 4080 system instruments . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30
Main power cable . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31
Additional power outlets . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 32
Environmental Considerations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 33
Temperature and humidity . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 33
Floor vibration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34
Air cleanliness . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34
Air flow . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 34
Upgrade Kits . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 36
Upgrading from standard low current model to ultra low current model . . . . . . . . . . . . . . . . . . . . . . . . . 36
Upgrading from 4082A to 4082F . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 36
Upgrading from 4082A/4082F to 4083A . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 36
Safety Precautions. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 37
Earthquake. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 37
Fire . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 40
Chemicals . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 40
Emergency Off (EMO) System. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 41
Block diagram and operation of emergency off circuit. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 42
I/O specifications. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 46
Example design of external emergency lamp . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 46
Ergonomic Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 47
Site Preparation Checklist. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 48
3. Wafer Probers and Connection with Test Head

Wafer Probers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 52
Mounting test head on wafer prober . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 52
Mounting mechanism . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 52
Wafer prober sense switch. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 53
9
Contents
Connecting with Test Head . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 58

Probe card for direct docking . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 58
Extension cable fixture . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 61
Pin board configuration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 62
4. Receiving
Package. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 67
Shipping Damage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 67
Checking Contents . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 67
Unpacking System Cabinet . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 68
Unpacking Test Head . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 70
4082A/4082F test head . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 70
4083A test head . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 71
Unpacking Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 73
Moving Cabinet, Test Head and Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 74
Moving test head. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 76
4082A/4082F test head . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 76
4083A test head . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 78
Moving cabinet and accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 80
A. Confirming the System Power Safety

Fixing System Cabinet . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 83
Connecting Site Power Line. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 84
Confirming Power Supply Components. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 87
Confirming PDU and EMO Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 90
10
1 General Information
11
Keysight 4080 Series Preinstallation Guide, Edition5
General Information
This manual contains the preinstallation information of the Keysight 4080 series parametric tester and is the
primary reference document to assist you in installation planning and site preparation.
This manual consists of the following chapters.
Chapter 1 , “General Information.” briefly describes the Keysight 4080 series tester configuration, explains several
important preinstallation considerations, and provides a brief start-to-finish system installation overview.
Chapter 2 , “Site Preparation.” describes system layout instructions, explains power and environmental
considerations, and describes important safety precautions.
Chapter 3 , “Wafer Probers and Connection with Test Head.” outlines wafer prober requirements and
considerations.
Chapter 4 , “Receiving.” describes receiving information, including how to check for damage and uncrating and
moving your tester to its final location.
Keysight 4080 Series Tester Configuration
The Keysight 4080 Series Parametric Test System is the versatile and flexible parametric test platform that can
adapt to new parametric test that has expanded beyond pure DC measurement and now spans a variety of different
measurement types, including parallel test, Flash cell write/erase testing, and RF S-parameter characterization.
12 Chapter 1
General Information
Figure 1-1 Keysight 4080 series test system
System Cabinet
Test Head
Wafer Prober: TEL Precio
System Cabinet
Test Head
Wafer Prober: Accretech UF-3000
Keysight 4082A Parametric Test System
The Keysight 4082A Parametric Test System is designed to perform fast and precise DC measurements,
capacitance measurements, and other high frequency applications such as ring oscillator measurement. The system
supports up to eight Source Monitor Units (SMUs). Each SMU is self-calibrating, and can be individually
configured to force either current or voltage, as well as simultaneously measure either current or voltage. The
system also supports a fully guarded switching matrix customizable from 12 to 48 pins. One special additional pin
Chapter 1 13
General Information
is dedicated as a chuck connection.

The Keysight 4082A can be constructed in either a low-current or an ultra low-current configuration, depending
upon the type of matrix card specified. Only 4082A models containing the ultra low-current matrix cards can use
the high-resolution SMU (HRSMU).
An optional High-Speed Capacitance Measurement Unit (HSCMU) is available for the 4082A, which enables the
measurement of capacitance and impedance with unprecedented speed. External instruments can be integrated into
the system via six auxiliary input ports or forty eight extended path inputs. The extended path inputs allow the user
to connect external signals directly to the DUT pins.
Another option offered for the 4082A is a high-frequency switching matrix. The high-frequency matrix is
organized as two 3 x 24 matrices (six inputs in total), and 1 TO 2 furnished cables may be used on each matrix pair
to create one 3 x 48 matrix (three inputs in total). The system also has one 1.6 A ground unit.
The 4082A tester consists of the following:
System Cabinet:
• (Optional) DVM - Digital Volt Meter (Keysight 3458A digital multimeter)

• (Optional) CMU - Capacitance Meter Unit (Keysight E4980A precision LCR meter)
• (Optional) Signal Analyzer (Keysight N91000Asignal analyzer) or Spectrum Analyzer (Keysight E4411B
spectrum analyzer)
• System Controller (Keysight IPC2, Keysight IPC, HP Z600, HP xw8600, or xw8400), Linux operation system
• Test Head Power Supply
• Power Distribution Unit with Emergency Off panel
• Cabinet fan
• Test Head fan with an air duct
• (Optional) Keyboard tray with Flat-Panel Display arm
Test Head:
• Upto 48 pin boards (standard or ultra-low current)

• One chuck pin board (standard or ultra-low current)
• Upto 8 SMUs (Medium Power SMU, High Power SMU, or High resolution SMU)
• One ground unit
• DC switching matrix (standard or ultra-low current)
• (Optional) HF switching matrix with pulse switch
To test devices on a wafer, the test head can be mounted on an automatic wafer prober in general. You can also test
packaged devices by mounting them on a test fixture that attaches to the test head.
Keysight 4082F Flash Memory Cell Parametric Test System
In addition to the parametric test capabilities of the 4082A, the Keysight 4082F Flash Memory Cell Parametric Test
System provides a semiconductor pulse generator unit (SPGU) mainframe and a high-voltage SPGU (HV-SPGU)
module for Flash memory cell testing. The SPGU mainframe supports up to five HV-SPGUs. The HV-SPGU
provides 80 V peak-to-peak output, 20 ns rise and fall times, and tri-level output capability to meet the most
demanding Flash memory cell testing needs. It can also create three-level pulse output with +/- 40V output levels.
The 4082F tester consists of the following:
System Cabinet:
• (Optional) Signal Analyzer (Keysight N9100A signal analyzer) or Spectrum Analyzer (Keysight E4411B
spectrum analyzer)
• Upto 5 (10 channels) HV-SPGUs - high-voltage semiconductor pulse generator units (SPGU) in a mainframe
14 Chapter 1
General Information
• System Controller (Keysight IPC2, Keysight IPC, HP Z600, HP xw8600, or xw8400), Linux operation system
• Cabinet fan
Test Head:

• One ground unit
Keysight 4083A DC/RF Parametric Test System
The Keysight 4083A DC/RF Parametric Test System supports all of the parametric test capabilities of the 4082A
and 4082F, and is designed to meet the most difficult characterization challenges posed by high-speed
semiconductor processes. The system hardware and software support an Keysight PNA network analyzer for
making S-parameter and RFCV measurements. Also, they support an Keysight E5262A 2-channel SMU as the bias
source for RF measurements.
For the 4083A, the PNA is rack-mounted in the analyzer enclosure on the wafer prober side. In this case, the
external fan box is connected to the analyzer enclosure to draw out the warm air from the PNA. The PNA in the
analyzer enclosure is manipulated with the test head by the manipulator of the wafer prober.
The 4083A comes with two RF input ports and the test head has an RF docking interface with 10 RF output ports.
An optional 8 x 10 RF matrix is available and measurements from DC to 20 GHz are also possible.
The 4083A tester consists of the following:
Figure 1-2 Bird-eye view image of the Keysight 4083A

Analyzer
Enclosure PNA
(Single-deck)
System Test Head

Cabinet Air duct
To External Fan
Automatic
on the test floor
Wafer
Prober
Air duct
To Test Head Fan

in the Cabinet
Chapter 1 15
General Information
System Cabinet:

• (Optional) Signal Analyzer (Keysight N9100A signal analyzer) or Spectrum Analyzer (Keysight E4411B
spectrum analyzer)
• (Optional) Upto 5 (10 channels) HV-SPGUs - high-voltage semiconductor pulse generator units (SPGU) in a
mainframe
• Keysight E5262A 2-channel SMU as bias source for RF measurement
• System Controller (Keysight IPC2, Keysight IPC, HP Z600, HP xw8600 or xw8400), Linux operation system
• Cabinet fan
16 Chapter 1
General Information
Analyzer Enclosure:
• Keysight E8362B PNA series network analyzer (2 test ports)

• External fan with an air duct
Test Head:

• One ground unit
• (Optional) RF matrix
• DUT interface (10 RF ports) for RF measurements
Installation Overview
This section provides a brief start-to-finish system installation overview.
NOTE If the steps described in this document are not completed prior to the system installation date, the
Keysight customer engineer (CE) may not be able to install the tester.
The checklist in Chapter 2 , “Site Preparation.” is available.
NOTE Special codes and regulations covering the installation of the test system may apply in your area. It
is the customer’s responsibility to ensure that all local laws, regulations, and codes for buildings,
machinery, and electrical distribution systems are complied with before the system arrives.
NOTE The customer should appoint a principal operator or system manager. This person will be
responsible for operating the 4080 series tester, performing operator maintenance when necessary,
and scheduling periodic maintenance. The principal operator’s initial responsibilities are to
establish and monitor site preparation schedules, and to order system supplies. The principal
operator must be present for the system installation.
Chapter 1 17
General Information
Figure 1-3 Flowchart for preinstallation

START
1 month
before delivery assigning system administrator
preparing installation location

site preparation
preparing for electrical equipment chapter 2

customer
confirming environmental
considerations
confirming safety precautions
preparing the requirement to connect

testhead to wafer prober chapter 3
2 weeks
before delivery confirming plan for site verification
verification
customer and
site
Keysight CE
deciding receive day and install day
delivery day
unpacking
installation
moving to
location
customer or
checking the contents chapter 4
Keysight CE
moving to installation location
installation
Keysight CE installation by Keysight CE
END
18 Chapter 1
2 Site Preparation
19
Site Preparation
Installation Site Requirements

This chapter describes the following:
• Space requirements
• Other requirements
Space requirements
The amount of floor space required for your Keysight 4080 series tester can be quickly and accurately determined
by using the System Component Template and blank grid sheets provided in “Example of 4080 series tester
layout”. The template and grid sheets are scaled so that each square on the grid sheet represents 20 cm × 20 cm =
400 cm2 (approximately 0.43 ft2) of floor space.
From the system component template sheet of Figure 2-4, simply cut out the components included with your
system, then place the cutouts on the grid sheet of Figure 2-5 to determine the best layout for your 4080 series
tester.
Keep the following points in mind when selecting the system location and performing the final site layout.
• Provide adequate space for the wafer prober. Position the wafer prober 1 meter (3.3 ft.) or less from the tester so
the signal cables can be connected from the system cabinet to the test head. Table 2-1 shows the cable lengths
from the bottom of the system cabinet.
Table 2-1 Cable lengths from system cabinet bottom
Cable Length from system cabinet bottom
Test Head power supply cable 3 m (9.8 ft.)
Air duct (between the system cabinet and test head) 3 m (9.8 ft.)
Test lead for CMU 2.5 m (8.2 ft.)
Test leads for DVM 3 m (9.8 ft.)
Test leads for SPGU 3 m (9.8 ft.)

Test leads for Signal analyzer 2.4 m (7.9 ft.)
(For 4083A only) Air duct and cables between the 6 m (19.6 ft.)
system cabinet and PNA
• Provide at least 1 meter (39 in) of clearance at the front and rear of the system cabinet to allow space for
servicing.
• Make sure there is adequate workspace around the system so that operating personnel can move freely, without
affecting system operation.
• To ensure adequate clearance for the system, check all doors, elevators, and passageways that the tester will use
on the way to the installation site. See Figure 2-1 for the dimensions of the system cabinet.
• If the system controller is to be rack mounted in the system cabinet, the distance between the system cabinet
and the display/keyboard/mouse must be 50 cm (20 in) or less. If you want to locate them farther than it,
prepare extension cables for video and USB. At this point, the USB extension cables must be in “Repeater
type”, not “HUB type”.
20 Chapter 2
Site Preparation
Figure 2-1 System cabinet dimensions
110 degrees
max.
600 mm
Rear
1800 mm
905 mm
Front
600 mm 905 mm
506 mm
110 degrees
max.
Top View Front View Side View
Keysight 4083A tester has an additional external fan box outside of the system cabinet to cool down system
components that are placed in the analyzer enclosure on the manipulator extension shelf. You need to prepare a
floor space to locate the external fan between the system cabinet and test head. Provide at least 360 mm × 240 mm
(height: 246 mm) of space between the system cabinet and the prober manipulator to place the external fan.
Figure 2-2 External fan for 4083A

Analyzer Enclosure
Instrument Manipulator
Extension Shelf
System
Cabinet
Air Duct
External Fan
Prober
Expand Cables
Air Outlet (bottom)
Chapter 2 21
Site Preparation
Other requirements
The site requires the following environment.
Air conditioning
To satisfy the temperature and air cleanliness requirements outlined in the “Environmental Considerations” on
page 33, air conditioning is recommended. The power consumed by a standard 4080 series tester, including the
system controller and peripherals, is about 1300 watts•hour (4.7 × 106 J). Also, consider the heat dissipated by
other instruments in the room, lighting, and operating personnel. A good rule for calculating the required BTU’s of
your air conditioning system is to assume 3500 BTU’s (3.6 × 106 J) for every 1000 watts•hour. Be sure to consider
room size also.
Floor
Requirements for the site floor are as follows.
• Verify the load capacity of the floor at the installation site and all floors on the way to the site. All floors must
have a minimum load capacity of 27 kg/cm2 (approx. 384 lbs/in2).
• Make sure that tile, concrete, or other industrial floors are adequate for the system site. Use a special wiring
arrangement, or provide conduits or some type of protection for exposed power and signal cables.
• Use an antistatic rubber mat.
Lighting
Provide sufficient lighting for optimum visibility of lighted indicators, the display, and the keyboard of the system
controller. Arrange lighting so that reflected light does not make it difficult to read displayed characters. Also, the
system, and especially the software media, must not be exposed to direct sunlight.
Software media storage

Purchase a fireproof cabinet or locker for storing important items, such as documents and software media
Software media such as CD-ROM should be stored in an environment similar to that of the 4080 series tester.
Extreme temperature or humidity changes, which may alter the size of a disk, must be avoided. Do not place the
software media in or near magnetic fields.
Telephone
Install a telephone with an extra-long receiver cord, to allow the operator easy access to any part of the system
while on the phone.
Network service
If the system controller is to be connected with a network, a network service and LAN cable are necessary. Choose
a long LAN cable that can connect with the system controller. Also, prepare the IP address and hostname before the
tester installation.
Label for emergency off switch

Install the 4080 series tester to enable easy access to the main breaker or switch and adhere conspicuous labels so
that the operator will be able to cut the main power quickly in an emergency.
Lock for disconnect device

Prepare a lock for the main switch, required for lockout during maintenance of the system. Determine the lock’s
22 Chapter 2
Site Preparation
suitability by considering the hole in the disconnect device. Figure 2-3 shows the dimensions of the lock.
Figure 2-3 Dimensions of lock

B
C
A B C
35 mm 19 mm 5 mm
40 mm 21 mm 6 mm
Purge Air
If the N9100A-PA1 option is ordered, it needs dry air from the wafer prober via a tube. The tube can connect to a
dry air inlet on the side panel of the test head. The tube outside diameter must be 6 mm and the inside diameter
must be 4 mm.
Chapter 2 23
Site Preparation
Example of 4080 series tester layout

Figure 2-4 provides a system component template sheet to make it easy for you to arrange your system and decide
upon the best layout. Simply cut out, from the template sheet, the system components furnished with your Keysight
4080 series tester, and arrange them on the blank grid sheet provided in Figure 2-5. One square represents 20 cm by
20 cm (approximately 0.43 ft2).
Figure 2-6 and Figure 2-7 show layout examples for 4082A (or 4082F) with Tokyo Electron Precio and Accretech
UF3000 wafer probers, respectively.
Figure 2-8 and Figure 2-8 show layout examples for 4083A with Tokyo Electron Precio and Accretech UF3000
wafer probers, respectively.
Figure 2-4 System component template sheet

600 mm
System Cabinet with

System Cabinet flat panel display/keyboard tray Testhead
Air Duct/Connector Panel

600 mm 600 mm
680 mm
905 mm
905 mm
(hight: (hight:
1800 mm) 1800 mm) 780 mm
186
(hight: 417.5 mm for 4082A/4082F, 480 mm for 4083A)
External Fan Analyzer Enclosure

for 4083A for 4083A
211
Air Duct
506 mm
Power
Air Duct
NOTE:
(hight:
360 mm
This is mounted on
368.3
610 mm
550 mm)
the manipulator
404
extension shelf
492
(460)
of the wafer prober.
240 mm
(hight: 630 mm
246 mm)
Instrument Front Panel
24 Chapter 2
Site Preparation
Figure 2-5 Grid sheet
Chapter 2 25
Site Preparation
Figure 2-6 4082A/4082F layout example for Tokyo Electron Precio
5600 mm
TH PS cables
Test leads
3000 mm
Air duct
Testhead
Grid: 200 mm
Wafer prober
Tokyo Electron Precio
4800 mm
TH PS cables
Test leads
3400 mm
Air duct
Testhead
Grid: 200 mm
Wafer prober
26 Chapter 2
Site Preparation
Figure 2-7 4082A/4082F layout example for Accretech UF3000
5400 mm
TH PS cables
3000 mm
Test leads Air duct

Testhead
Grid: 200 mm
Wafer prober
ACCRETECH UF3000
4600 mm
TH PS cables
3000 mm
Test leads Air duct

Testhead
Grid: 200 mm
Wafer prober
ACCRETECH UF3000
Chapter 2 27
Site Preparation
Figure 2-8 4083A layout example for Tokyo Electron Precio

5600 mm
External Fan Cables for PNA Air duct Analyzer
enclosure
TH PS cables
Test leads
3400 mm
Air duct
Testhead
Grid: 200 mm
Wafer prober
Figure 2-9 4083A layout example for Accretech UF3000
5600 mm
External Fan Cables for PNA Air duct Analyzer
enclosure
3200 mm
TH PS cables
Test leads Air duct

Testhead
Grid: 200 mm
Wafer prober
ACCRETECH UF3000
28 Chapter 2
Site Preparation
Electrical Requirements
This section describes electrical requirements for the 4080 series tester’s instruments, system controller, and
peripherals.
Power configurations and requirements

The 4080 series tester requires single phase power configuration with protective earth. Its line voltage is 200, 208,
220, or 240 VAC, and line frequency is 50 or 60 Hz. The line voltage and frequency are selected by specifying
options.
The system cabinet for the 4080 series tester is equipped with a power distribution unit (PDU) for each line voltage.
The rated current of the PDU is 20 A for 200/220/240 VAC, and 24 A for 208 VAC. The short circuit current rating
is 15 kA for 200 VAC, and 50 kA for 208/220/240 VAC.
The site installation location must satisfy the power requirements described in Table 2-2. If the line voltage is too
low or too high, sporadic failures or complete system shutdown may occur. For example, if you install the 4080
series tester with a line voltage of 200 VAC and a line frequency of 60 Hz, the electric power must satisfy the line
voltage range of 180 to 220 VAC, at least 30 A, and a line frequency range of 48 to 63 Hz.
Table 2-2 Power requirements for 4080 series tester
Normal line voltagea Allowable voltage range Rated current Short circuit current rating
AC 200 V AC 180 - 220 V 30 A 10 kA

AC 208 V AC 187 - 228 V 24 A 10 kA
AC 220 V AC 198 - 242 V 30 A 10 kA
AC 240 V AC 216 - 252 V 30 A 10 kA
a. Line frequency must be 48 to 63 Hz.
NOTE Keysight Technologies recommends that the following line voltage conditions be satisfied for
measuring low-current and low-voltage with the 4080 series tester with the ultra low current
option:
Burst Noise: ≤ 1 kV (for earth, line, and neutral)
Surge Noise: ≤ 1 kV (for common and normal modes)
Keysight Technologies recommends that if the conditions above cannot be met, the tester should
use the noise cut trans.
This line voltage environment conforms to EN61326-1.
Chapter 2 29
Site Preparation
Grounding
The system cabinet, the system controller, and all computer peripherals are grounded through the three-wire power
cable grounding wire. Earth grounding protects the operator against shock hazards and protects the system
components against catastrophic events, such as lightning.
Also, all system components must have a common ground reference that is electrically isolated from any
non-system equipment owing to the interfaces between the system controller, system instruments, and computer
peripherals. Otherwise, signals generated by non-system equipment could cause system errors.
WARNING To protect operators from electric shock injury due to current leakage, a grounding
connection is essential before connecting the power supply. When you connect the system to
the power supply, connect the grounding wire before connecting other power wires.
The 208/220/240 VAC line voltage option does not contain a ground-fault circuit interrupter (GFCI). If you plan to
include GFCI in your power lines, select a breaker that has a rated sensitivity of 30 mA for the 208/220/240 VAC
line voltage option. This ensures that the breaker is not tripped by regular current leakage. For the 200 VAC line
voltage option, the PDU is equipped with a GFCI as a main circuit breaker.
Power line transients

Heavy electrical loads from nearby machinery or equipment, for example, elevators or electric welders, can cause
intermittent system errors, even if that equipment is on a different circuit breaker. To prevent this, you must provide
a separate, completely independent circuit with isolated ground and circuit breaker coming directly from the main
power source of the building.
NOTE Keysight Technologies does not recommend installing printers or plotters close to the 4080 series
tester. When the electrical motors in these peripherals begin operating and their electric
consumption increases, noise from the print head or pen movement may cause system errors.
Power consumption of 4080 system instruments

Table 2-3 lists the actual power consumption for each component in the 4080 series tester. The total power
consumption can be calculated from the table. For example, in the case of a system with 208 VAC line voltage,
where the system controller (Keysight IPC2), 19 inch flat-panel display, test head power supply, E4980A precision
LCR meter, and 3458A digital multimeter are included in the system cabinet and the power for these instruments is
supplied from the cabinet PDU, the total power consumption results in 7.5 A. If you add an SPGU mainframe and
three HV-SPGU modules in the system cabinet, the total power consumption results in 8.5 A. Note that there is a
margin of 15.5 A (= 24.0 − 8.5). If you add another instrument consuming 2.0 A, you can connect its power cable
to the cabinet PDU. The total current consumption must be less than the maximum current for instrument or
controller power outlets.
30 Chapter 2
Site Preparation
Table 2-3 Power consumption of 4080 system instruments
Line voltage
Component
AC 200 V AC 208 V AC 220 V AC 240 V
System cabinet 1.0 A 1.0 A 0.9 A 0.9 A

Test Head power supply (with test head) 2.8 A 2.7 A 2.5 A 2.3 A
E4980A precision LCR meter 0.8 A 0.8 A 0.7 A 0.7 A
3458A digital multimeter 0.4 A 0.4 A 0.4 A 0.4 A

System controller (Keysight IPC) 2.2 A 2.1 A 2.0 A 1.8 A
System controller (N9171B Keysight IPC2) 2.7 A 2.6 A 2.4 A 2.2 A
SPGU mainframe 0.4 A 0.4 A 0.4 A 0.4 A
SPGU module (1 ea) 0.2 A 0.2 A 0.2 A 0.2 A

N9000A/B signal analyzer 1.4 A 1.3A 1.3A 1.2 A
E5262A 2-channel SMU 2.0 A 1.9A 1.8 A 1.7 A
E8362C PNA series network analyzer 2.2 A 2.1A 2.0 A 1.8 A

Flat-panel display (19 inch) 0.2 A 0.2 A 0.2 A 0.2 A
Main power cable

You must prepare the power cables to connect the 4080 series tester to the switchboard because it is not bundled
with the tester. This chapter describes how to prepare the main power cables.
Figure 2-10 Connecting power cable

System Cabinet
Switchboard
400 mm
5.5 mm
9.5 mm Ground
Terminal
Neutral or line flexible cable
(E JST 5.5-5)
Line
9 mm
Power Cable
When you connect the ground wire to the PDU of the system cabinet, use the terminal as shown in Figure 2-10.
Table 2-4 shows the main power cable specification. The cable must comply with the local regulation.
If you need to perform an ELECTRICAL SAFETY LEVEL CHECKS before the installation, see Appendix A ,
“Confirming the System Power Safety,” to connect the site power line to the 4080 series tester and check it.
Chapter 2 31
Site Preparation
Table 2-4 Specification for main power cable
Connection Power line Power Number of

Cable type Cable clamp
type option cable lines
AC 200/208 V SO AWG 10 3 Use furnished cable clamp.

Flexible Opening has a diameter of
AC 220/240 V − AWG 10 3 16.5 to 18.5 mm
AC 200/208 V TEW AWG 10 3 Remove furnished cable

Rigid/flexible
clamp. Opening has a
conduit AC 220/240 V − AWG 10 3 diameter of 19 mm.
NOTE The torque specifications of the power cable connections at the PDU are 4.0 N-m for 208/220/240
V and 2.5 N-m for 200 V option.
Additional power outlets

To provide power for test/maintenance equipment and other equipment not included in the system, install
additional power outlets (two power outlets, 15 A) at the site. Show the locations of all additional power outlets on
your site layout drawing and include their potential load in your calculation for total site power. Additional power
outlets must be supplied with grounding circuits intact and must be used when connecting additional equipment.
32 Chapter 2
Site Preparation
Environmental Considerations
To ensure optimum 4080 series tester accuracy and performance, be sure to comply with the following
environmental conditions.
Temperature and humidity

The measurement accuracy is specified at the following temperature and humidity:
Temperature: 23 °C ± 5 °C (73 °F ± 9 °F)
Humidity: 15% to 70% RH (The 4080 series must be free of condensing.)
NOTE After the SMU calibration, the temperature change must be less than 3 °C.
In addition to the above temperature and humidity conditions, Keysight Technologies
recommends that the following conditions be satisfied for measuring low-current and low-voltage
with the 4080 series tester (ultra low current option):
Temperature change: Within ± 1 °C after the calibration
Temperature change period: ≥ 10 minutes
Humidity: ≤ 50%
The 4080 series tester must be operated under the following conditions:
Operating temperature: 5 °C to 30 °C (41 °F to 86 °F)
Operating humidity: 15 % to 70 % RH (no condensation)
Storage temperature: −20 °C to 50 °C (−68 °F to 122 °F)
Storage humidity: < 80 % RH (no condensation)
Warm up time: at least 60 minutes
NOTE When using the flat panel display with the 4080 series tester, the following conditions must be
satisfied, in addition to the conditions shown above.
Operating humidity: 20% to 70% RH (no-condensing)
Storage humidity range: 20% to 85% (−20 °C to 50 °C, −4 °F to 122 °F)
20% to 55% (50 °C to 60 °C, 122 °F to 140 °F)
Chapter 2 33
Site Preparation
Floor vibration
In addition to the conditions described in “Temperature and humidity”, Keysight Technologies recommends that
the following vibration conditions should be satisfied for measuring low-current and low-voltage with the 4080
series tester (ultra low current option):
Floor vibration: ≤ 1 mG
Floor vibration transmission frequency: ≥ 10 Hz
Air cleanliness
Your 4080 series tester must be located in an area where the air purity meets or exceeds class 100,000 standards.
Also, to ensure trouble-free disk and disk drive operation, system controller peripherals should be located in an
environment of similar air purity.
NOTE Keysight Technologies recommends that the following air cleanliness condition should be satisfied
for measuring low-current and low-voltage with the 4080 series tester (ultra low current option):
Air cleanliness: < class 10,000
Air flow
To prevent the 4080 series tester from disturbing the air flow, it is recommended that your clean room use a down
flow mechanism. The 4080 series tester uses an air cooling method to cool down system components. The system
cabinet is equipped with three cooling fans to draw out the warm air. The cooling fans are located in the top of the
rear door as shown in Figure 2-11, and can pull out a maximum of 10 cubic meters per minute (approximately
35400 ft3/min.).
Figure 2-11 Air flow and fan location
fan
rear door
side panel
air duct
air flow:
maximum 10 m3 /min
34 Chapter 2
Site Preparation
Keysight 4083A tester has an additional external fan box outside of the system cabinet to cool down system
components that are placed in the analyzer enclosure on the manipulator extension shelf.
Figure 2-12 External fan for 4083A

Analyzer Enclosure
Manipulator
Instrument
Extension Shelf
Air Duct
External Fan
Expand Cables
To cabinet (PDU)
Air Outlet
The external fan draws out the warm air from the analyzer enclosure, and can pull out a maximum of 264 cubic
meters per hour at 50 Hz or 294 cubic meters per hour at 60 Hz, from the air outlet on the bottom side.
Chapter 2 35
Site Preparation
Upgrade Kits
Upgrade Kits
Upgrading from standard low current model to ultra low current model
The Keysight N9123A upgrade kit is used to upgrade the 4080 series tester from the standard low current model to
the ultra low current model. The N9123A upgrade kit consists of the high resolution input boards and high
resolution chuck pin board. The N9123A upgrade kit upgrades the test head only.
The following space is required for upgrading:
Test Head: at least 2 × 2 m2 (6.6 × 6.6 ft2)
Upgrading from 4082A to 4082F

The Keysight N9172F upgrade kit is used to upgrade from the 4082A to the 4082F tester. The N9172F upgrade kit
consists of the SPGU mainframe and HV-SPGU module(s). The N9172A upgrade kit upgrades the system cabinet
only.
Cabinet: at least 1 × 3 m2 (3.3 × 9.8 ft2)
Upgrading from 4082A/4082F to 4083A

The Keysight N9173A upgrade kit is used to upgrade from the 4082A/4082F to the 4083A tester. The N9173A
upgrade kit consists of the DUT docking interface, RF matrix modules (option), RF cables, E8362B PNA network
analyzer, E5262A 2-ch SMU, some accessories, and rack-mount parts. For this upgrading, the prober’s manipulator
needs to have the manipulator shelf to rack-mount the analyzer enclosure. To add the manipulator shelf on the
manipulator, contact to the prober vender.
Test Head: at least 2 × 2 m2 (6.6 × 6.6 ft2)
Cabinet: at least 1 × 3 m2 (3.3 × 9.8 ft2)
36 Chapter 2
Site Preparation
Safety Precautions
Safety Precautions
To maintain safe operating conditions for the 4080 series tester, observe the following earthquake, fire, electrical,
and chemical safety precautions.
Earthquake
To prevent the system cabinet from tipping over in an earthquake, attach the system cabinet to the floor as shown in
Figure 2-13 (a). Use suitable metal fittings to attach the system cabinet, taking into account the system cabinet
screw holes and floor conditions.
For example, Figure 2-13 (b) shows the dimensions for suitable metal fittings. These metal fittings and screws are
not furnished with the system. Please prepare these parts. The metal fittings are appropriate for the Uniform
Building Code (UBC) Zone 4.
The system cabinet’s center of gravity is the center of the system cabinet, as shown in Figure 2-14. The center of
gravity may be changed when reconfiguring any instruments in the system cabinet.
Figure 2-13 Fixing system cabinet
SCREW (FIX to FLOOR)

:M12x1.75(4places)
see Detail1
Detail1
Scale 1:2
NOTE Specify SPCA-590P for the metal material of the metal fittings. For example, it is WEL-TEN590
for Nippon Steel Corporation.
Chapter 2 37
Site Preparation
Safety Precautions
Figure 2-14 System cabinet’s center of gravity

600 904.7
center of gravity center of gravity
1818.4
1028.3
W = 458 kg
(with two E5262A, SPGU mainframe,
E4411B, keyboard tray, FPD with arm,
system controller, CMU, DVM, THPS) 356.0
253.4
42.5 515.1 692.7 145.3
Figure 2-15 shows the dimensions of the bottom of the system cabinet. The figure shows the form and the position
of casters and leveling feet.
38 Chapter 2
Site Preparation
Safety Precautions
Figure 2-15 Dimensions of system cabinet bottom

145.4 692.6
42.4
115.3
515.1
369.4
193.6 536
BOTTOM
M12, P=1.75
50
24
Caster Leveling foot
F50
LEFT
see Detail1 Detail1
For the 4083A, to prevent the extra test head fan from tipping over in an earthquake, attach the external fan box to
the floor as shown in Figure 2-13 (a). Use suitable metal fittings to attach the external fan box, taking into account
the external fan screw holes and floor conditions.
For example, Figure 2-13 (b) shows the dimensions for suitable metal fittings. These metal fittings and screws are
not furnished with this kit. Please prepare these parts.
Chapter 2 39
Site Preparation
Safety Precautions
Figure 2-16 Fixing external fan
After an earthquake, confirm the system operation as follows:
1. Check the system visually for damage or disconnected parts.

2. Turn on the system and confirm that the tester starts correctly.
3. Execute the diagnostic program (diag4070) and check the measurement capability of the tester.
Fire
General cleanliness of the work area and system equipment is essential for preventing electrical fires. Only keep
paper material that is required for efficient operation in your operating area. Store extra paper in an adjacent area.
Do not allow wastepaper to accumulate, and use metal wastebaskets. Store cleaning fluids, especially those in
aerosol cans, in a separate area when not in use.
All printed-circuit boards in the 4080 series tester are manufactured from flame-retardant materials that are
self-extinguishing and represent a minimal fire hazard. Be sure, however, to observe normal fire precautions within
the operating area.
Chemicals
Normally, cleaning solvents or compounds used for repair are the only chemicals at a system site that require
careful handling. Provide adequate ventilation to prevent accumulation of fumes if the particular chemical being
used can produce harmful vapors under any conditions.
Volatile liquids, such as insulating varnish, lacquer, and turpentine are dangerous when used near energized
electrical or electronic equipment because of the danger of igniting the fumes. Do not stock alcohol or carbon
tetrachloride as cleaning agents.
40 Chapter 2
Site Preparation
Emergency Off (EMO) System

The system cabinet is equipped with an emergency off (EMO) unit. When you press the EMO switch, the main
contactor and emergency breaker in the power distribution unit (PDU) of the system cabinet opens and stops
supplying electrical power to the system components.
The EMO unit can also receive an emergency signal from another instrument or system, and can stop supplying
electric power to the system components. In addition, it can transfer an emergency signal to any other instruments
or systems.
If you configure the EMO system with a 4080 series tester, you must understand the EMO unit before connecting it
to other systems. Included are:
• Circuit diagram and its operation for the EMO switch and power distribution unit.
• I/O interface (external in/out terminals) specifications for the PDU.
• Example design for an external emergency lamp.
The 4080 series tester with a system cabinet has an emergency off (EMO) switch at the top of the cabinet, as shown
in Figure 2-17. The emergency off switch is a red, circular push-switch labeled “EMO.” Pushing the EMO switch
stops the power to the system instruments. After the EMO switch is pushed, the switch is locked in the pushed
condition. To release the locked EMO switch, turn the switch clockwise.
Figure 2-17 Emergency off (EMO) switch on system cabinet
CAUTION Use the EMO switch in case of emergencies only. Since pushing the EMO switch forces to abort
the system controller and the Windows-base instruments such as PNA in the 4083A tester, without
the normal shutdown procedure, it may provide any damage them.
Chapter 2 41
Site Preparation
Block diagram and operation of emergency off circuit

Figure 2-18, Figure 2-19, and Figure 2-20 are emergency off circuit block diagrams. If your system has the
200 VAC power line option, the main circuit breaker that is included in disconnect device also has a ground-fault
circuit interrupter (GFCI) function, which senses the earth leakage current. If your system has the 200/208/220
VAC power option, 220V/240V power outlets supply 220 V. For the 240 VAC power option, 220V/240V power
outlets supply 240 V.
The Ext control terminals are closed using a conductor installed at the factory.
Figure 2-18 Block diagram of emergency off circuit (200 V option)
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V\VWHP UHOD\ 㼒㼍㼚㻌㼟㼜㼑㼑㼐㻌㼟㼑㼚㼟㼛㼞
H[W
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FQWUO
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H[WDODUP>1&@
H[WDODUP>12@ 㼒㼍㼚㻌㼟㼜㼑㼑㼐㻌㼟㼑㼚㼟㼛㼞
FDELQHWIDQHD
IDQIDLOGHWHFWRU
$2QO\ 㼒㼍㼚㻌㼟㼜㼑㼑㼐㻌㼟㼑㼚㼟㼛㼞
H[WHUQDOIDQ$2QO\
㻞㻜㻜㼂㻌㻼㻰㼁
42 Chapter 2
Site Preparation
Figure 2-19 Block diagram of emergency off circuit (208 V option)

SURWHFWRU
OLQH LQVWUXPHQW
$ SRZHURXWOHWV
OLQH SRZHURXWOHW
SURWHFWRU 9
$
0 99
㻗㻙㼠㼞㼍㼚㼟㻚 SRZHURXWOHW
HDUWK SURWHFWRU SRZHURXWOHWV
㼒㼛㼞㻌
㻞㻜㻤㻌㼂 9
$[HD
FRQWUROOHU
IDQSURWHFWRU
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$
9
9
9
UHOD\
㼠㼞㼍㼚㼟㻚
,167580(1732:(5
(02SURWHFWRU (026: /,1( 2))6: 216:
ZKLWH JUHHQ
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7+36
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IDQIDLOGHWHFWRU
H[WHUQDOIDQ$2QO\
㻞㻜㻤㼂㻌㻼㻰㼁
Chapter 2 43
Site Preparation
Figure 2-20 Block diagram of emergency off circuit (220/240 V option)

SURWHFWRU
OLQH LQVWUXPHQW
$
SRZHURXWOHWV
OLQH SRZHURXWOHW
SURWHFWRU 9
$
0
㻗㻙 SRZHURXWOHW 99
HDUWK 㼠㼞㼍㼚㼟㻚 SURWHFWRU
㼒㼛㼞㻌㻞㻞㻜㼂 SRZHURXWOHWV
㻛㻞㻠㻜㼂 9
$[HD
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9 SRZHURXWOHWV
$
9
9
9
UHOD\
㼠㼞㼍㼚㼟㻚
,167580(1732:(5
(02SURWHFWRU (026: /,1( 2))6: 216:
ZKLWH JUHHQ
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7+36
UHOD\ WHVWKHDGIDQ
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㻞㻞㻜㻛㻞㻠㻜㼂㻌㻼㻰㼁
44 Chapter 2
Site Preparation
• Turning on system instrument

Switching on the main breaker and the emergency breaker turns on the LINE indicator (white), but the main
contactor switch does not close. Figure 2-18 through Figure 2-20 show this condition. When the system switch
closes, power is supplied to the system controller. When the EMO panel INSTRUMENT POWER ON switch
closes, the coil of the main contactor is activated and the main contactor switch closes. The INSTRUMENT
POWER ON indicator (green) also turns on. Power is then supplied to the system instruments.
• Turning off system instrument
Pressing the EMO panel INSTRUMENT POWER OFF switch stops the current through the coil of the main
contactor, so the main contactor opens. This stops power to the system instruments. At this point, the
INSTRUMENT POWER ON indicator (green) turns off.
For 4083A tester, pressing the EMO panel INSTRUMENT POWER OFF switch sends the trigger from the off
delay circuit to the Windows-base instruments via the shutdown controller box in order to shutdown the
instruments. During shutdowning the instruments, the INSTRUMENT POWER ON indicator (green) flashes.
Then, it stops the current through the coil of the main contactor after shutdowning the Windows-base
instruments, so the main contactor opens. This stops power to all of the system instruments.
• EMO switch
When the EMO switch is pressed and its contacts open, the current through the coil of the main contactor stops
and the main contactor opens. The emergency breaker contacts also open. This stops power to both the system
instruments and system controller.
At the same time, the current through the coil of Relay2 flows, so one contact opens and the other contact
closes in Relay2. The Ext alarm 1, which is normally in the closed state, is opened, and the Ext alarm 2, which
is normally in the open state, is closed.
Opening the Ext control terminal is the same as pressing the EMO switch, which stops current through the coil
of Relay2, so one contact opens and the other closes. The current through the coil of the main contactor then
stops, the main contactor opens, and power to the system instruments stops. This also stops power to the system
controller.
Table 2-5 describes conditions for normal operation.
Table 2-5 Conditions for normal operation
Results
Operation Power for Ext. alarm 1 Ext. alarm 2

system
instruments (NC) a (NO) b
Disconnect device is ON Open Close

not supply
Pressing system switch
Pressing INSTRUMENT POWER ON switch supply Close Open

pressing INSTRUMENT POWER OFF switch
Pressing EMO switch Stop

Open Close
Opening Ext. control
a. NC (“Normally Closed”) indicates that the terminals are closed when the tester operates properly.
b. NO (“Normally Open”) indicates that the terminals are open when the tester operates properly.
Chapter 2 45
Site Preparation
I/O specifications
There are five I/O interface points in the power distribution unit (PDU). The I/O specifications for these interfaces
are as follows:
Instruments power outlets Maximum current: 6 A for each outlet, Total current: 8A
220V/240V power outlets Maximum current: 2 A for each outlet, Total current: 2A
Controller power outlets Maximum current: 6 A for each outlet, Total current: 6A
Ext control Steady current: 56 ± 11.2 mA (50 Hz); 50 ± 10 mA (60 Hz) at 24 VAC
Transient current: 2 - 3 times that of the steady current
Ext alarm 1 and 2 Maximum current: 3 A at 250 VAC, 2 A at 30 VDC
Example design of external emergency lamp

The procedure below describes how to implement an external lamp (using the External alarm terminals on the
PDU) that turns on when the EMO switch is pressed.
Refer to Figure 2-21 and connect the Ext alarm 2 terminals (normally open) to an emergency lamp as follows:
1. Connect the NEUTRAL (or LINE) side of the power line outlet to a terminal of the emergency lamp.
2. Connect the LINE side of the power outlet to one terminal of the Ext alarm 2.
3. Connect the other terminal of the Ext alarm 2 to the other terminal of the emergency lamp.
Note that you must not use a power line outlet from the system cabinet because power to these outlets stops when
the EMO switch is pressed.
Figure 2-21 Example design of external emergency lamp

Emergency lamp
EMO switch
Outlet
To Ext. alarm 2 terminal
46 Chapter 2
Site Preparation
Ergonomic Safety
Ergonomic Safety
When you locate the LCD monitor, keyboard, and mouse for the tester controller, install them with the following
care points:
• Prepare a table that has enough strength and structure does not fall.
• Fix the LCD monitor on the table to prevent it from falling and dropping.
• Put the keyboard and mouse on the table so as not to drop.
• Locate them at the height as shown in Figure 2-22, for ergonomic safety.
Figure 2-22 Height of LCD monitor/keyboard/mouse
Keyboard and mouse height

Maximum 1020 mm (40 in.)
Minimum 970 mm (38 in.)
Display height
Maximum 1470 mm (58 in.)
Keyboard and mouse height

Maximum 760 mm (30 in.) Display height
Minimum 710 mm (38 in.) Maximum 1190 mm (47 in.)
Chapter 2 47
Site Preparation
Site Preparation Checklist

Table 2-6 provides a site preparation checklist. Check each planning item off as it is completed. If an item is not
applicable to your situation, mark the item “N/A”.
Table 2-6 Site preparation checklist
Check Item
Floor plan
Did you complete the layout for tester, prober, controller, table, and so on?
Is the site suitably ventilated?
Is the floor at the site suitably prepared?
Did you provide a table for service and maintenance?
Is the site suitably lit?
Did you provide a place for storing software media?
Did you install a telephone near the tester?
Did you provide network port, network cable, IP address, and host name?
Did you provide a lock for locking the main breaker (disconnect device)?
For 4083A, the parts to mount the RF instrument (PNA) on the prober side are required. Did you
contact to your prober vender?
For N9100A-PA1 option, the dry air is required from your prober. Did you contact to your prober
vender?
Electrical power
Did you confirm that voltage, frequency, and noise meet requirements? If not, have you initiated
their preparation?
Did you provide a main power cable from the switchboard to the main power supply?
Did you prepare a power line for maintenance service?
Environmental considerations
Did you check the installation area for temperatures with relative humidities?
48 Chapter 2
Site Preparation
Table 2-6 Site preparation checklist
Check Item
Did you check the installation area for the floor vibration ≤ 1 mG and floor vibration transmission
frequency ≥ 10 Hz?
If some of the following apply to your site, Keysight Technologies recommends that you measure
floor vibration.
• The floor type is the access floor.

• The floor is not durable enough for the 4080 series tester, prober, and other equipment installed
at the installation site.
• Something causing vibration is installed near the installation site.
Did you check the installation area to ensure class 10,000 or better air cleanliness?
If some of the following apply to your site, Keysight Technologies recommend that you check the
air cleanliness using a particle counter.
• Temperature, humidity, and cleanliness are not controlled.

• The flooring material is carpet.
• Outdoor air flows directly into the installation site.
• You do not change clothes and shoes.
• Items near the installation site are covered with dust.
Did you provide proper air flow?
Upgrade
For upgrading to 4083A, it is necessary to add something to mount the RF instrument (PNA) on the
prober side. Did you contact to your prober vender?
Did you provide the required floor to upgrade?
Safety precautions
Did you prepare suitable metal fittings to attach the system cabinet?
Did you keep general cleanliness of the work area and system equipment for preventing electrical
fires?
Did you check that volatile liquids, such as insulating varnish, lacquer, and turpentine have not
been placed near the tester? (Those are dangerous when used near powered-up electrical and
electronic equipment.)
Chapter 2 49
Site Preparation
50 Chapter 2
3 Wafer Probers and Connection with Test Head
51
Wafer Probers and Connection with Test Head
Wafer Probers
Wafer Probers
The Keysight 4080 series tester is typically used with a wafer prober as most of the devices under test (DUTs) are
on a wafer. You can mainly use automatic and semi-automatic wafer probers with the 4080 series tester.
NOTE The wafer prober used with the 4080 series tester must be the low noise prober for the capacitance
measurement. For the details, contact the wafer prober manufacturer.
Mounting test head on wafer prober
Most automatic or semi-automatic wafer probers have a mechanism to mount a test head using mounting hardware,
such as a manipulator or hinges (clam shell type). Figure 3-1 shows an example of a wafer prober with the test head
mounted using a manipulator.
Mounting mechanism
Figure 3-1 Mounting mechanism

Manipulator
Testhead Hinge Testhead
For a manipulator-type mounting mechanism, the test head is attached to the arm of the manipulator. You just push
the test head down on the wafer prober, and then fit it to the interface using the clamping mechanism.
For a hinge-type mounting mechanism, the test head is fixed to a hinge arm. You just rotate the hinge arm to put the
test head on the wafer prober (this movement is similar to the clam shell), and then fit the test head to the interface
using the clamping mechanism.
There are two guide pins on the test head, as shown in Figure 3-2. These pins are used to position the test head on
the wafer prober correctly.
To assist you in mounting your test head on a wafer prober, Figure 3-3 to Figure 3-6 show the test head dimensions
for the 4080 series tester.
For details on how to mount a test head, contact the wafer prober manufacturer.
52 Chapter 3
Wafer Probers
Figure 3-2 Guide pins on test head

Guide Pins Guide Pins
Wafer Prober
Sense Switch
Testhead
Wafer Prober
4082A/4082F Sense Switch 4083A
Wafer prober sense switch

The 4080 series tester uses the wafer prober sense switch located on the bottom panel of the test head to ensure that
the test head sets on the wafer prober properly. See Figure 3-2 for the location of the wafer prober sense switch.
The wafer prober sense switch is labeled “WAFER PROBER SENSE”.
The test head mounting hardware must be designed so that a part of the mounting hardware, such as a pin, pushes
the wafer prober sense switch when the test head is set on the wafer prober. See Figure 3-3 and Figure 3-5.
Chapter 3 53
Wafer Probers
Figure 3-3 4082A/4082F test head dimensions (1 of 2)
54 Chapter 3
Wafer Probers
Figure 3-4 4082A/4082F test head dimensions (2 of 2)
Chapter 3 55
Wafer Probers
Figure 3-5 4083A test head dimensions (1 of 2)
56 Chapter 3
Wafer Probers
Figure 3-6 4083A test head dimensions (2 of 2)
Chapter 3 57
Connecting with Test Head

There are two types of interfacing techniques used between the test head and the wafer prober:
• Mounting the Test Head on the Wafer Prober
For the Keysight 4080 series tester, a probe card is mainly used to interface between the measurement pins of
the test head and probe needles for direct docking in this case. For 4083A tester, this interfacing technique is
only supported because this tester has additional pins (blind-mate connectors) for RF measurements.
• Placing the Test Head beside a Manual Wafer Prober
In this case, an Extension cable fixture, connector plate and so on can be used to interface between the
measurement pins of the test head and probe needles.
Probe card for direct docking

To improve low-leakage performance, you can use a probe card designed for direct docking. Direct docking means
that the measurement pins of the test head directly contact the probe card, which reduces the leakage current.
Figure 3-7 and Figure 3-8 show probe card examples for direct docking.
The customer is responsible for the design of the probe cards. For the design information of the probe cards,
contact your local Keysight sales representative or application engineer.
NOTE Keysight Technologies recommends the use of the direct docking probe card when using the ultra
low current model of the 4080 series tester.
The ultra low current model of the 4080 series tester may not fully perform if an extension cable
fixture is used.
Figure 3-7 Probe card for direct docking with 4082A/4082F
58 Chapter 3
Figure 3-8 Probe card for direct docking with 4083A
CAUTION The 4083A tester needs the dedicated probe cards that have the interface (ports) with the RF
signals at the center area of the cards. And, the probe cards that are used for Keysight 4070 series,
4082A, or 4082F may not be used for 4083A tester as they have additional RF ports on the test
head side.
If they satisfy some conditions on the probe card design, you can use them for the 4083A tester.
Make sure if each probe card can be used for 4083A without problems. For the details, see the later
paragraphs.
The center area (test head side) of the probe cards has some height restrictions as shown in Figure 3-9. This is
because the center area of the probe cards is used for interfacing the RF signals via the DUT docking interface on
4083A and for enhancing the shelter density by the N9100A-PA1 (“Add Passage for Purge Air”) option. If your
probe cards confirm to all these height restrictions in Figure 3-9, you can use them for any configuration of the
Keysight 4080 series and 4070. The following shows the height restrictions for some situations.
• To use your probe cards for the Keysight 4070 series and 4082A/F without the N9100A-PA1 option, confirm to
the following restriction only:
— Parts on any area must be mounted within max. 30 mm height.

• To use your probe cards for the Keysight 4070 series, 4082A/F with the N9100A-PA1 option, confirm to the
following restrictions:
— Parts on the red ring area in Figure 3-9 must be mounted within max. 2 mm height.
— Parts on the other area must be mounted within max. 30 mm height.
• To use your probe cards for the Keysight 4083A with the N9100A-PA1 option, they must confirm to all the
height restrictions.
• To use your probe cards for the Keysight 4083A without the N9100A-PA1 option, you can ignore the restriction
for the red ring area.
Chapter 3 59
Figure 3-9 Height restrictions on probe cards for 4070 series, 4082A, and 4082F
: This area allows you to mount any parts within max. 20 mm height.
: The other area allows you to mount any parts within max. 30 mm height.
NOTE This is not a guide for probe card design. For the probe card design information for Keysight 4080
series, contact your local Keysight sales representative or application engineer.
60 Chapter 3
Extension cable fixture

An extension cable fixture and connector plate are used to interface between the test head measurement pins and
the probe needles. Keysight Technologies provides the Keysight E3146A extension cable fixture for the
4082A/4082F tester.
The E3146A is designed so that all the measurement pins of the test head contact the pads of this fixture, and can be
wired to the connector plate or to the probing needles easily. For details, see theE3146A Operation Guide.
Wiring for extension cable fixture

The customer is responsible for the wiring between the extension cable fixture and the probe needles. The prober
manufacturer or its representative can help you wire the connector plate or probing needles.
See the pin board configuration table in “Pin board configuration” on page 62 to determine which test head slots
will have pin boards installed at the factory. Do not reconfigure the pin board locations. The slot numbers in the
table correspond to pin numbers on the extension cable fixture that should be used when connecting to the probe
card.
Chapter 3 61
Pin board configuration

Table lists the order in which pin boards are installed in the test head slots. In the following tables, “A.I.” indicates
the pin boards that are always installed in that slot. These are the 12 pin boards that come with the standard system.
If you order additional pin boards, the factory installs the pin boards in the order shown by the numbers in the “Pin
Board Installment Order” columns. The customer will need to know this slot information when wiring the
personality board or the extension cable fixture.
Table is an example of where pin boards are installed when additional pin boards are ordered.
NOTE Keysight Technologies recommends that you do not change the pin boards from the slots in which
they are installed at the factory.
When the 4080 series tester’s diagnostic program (diag4070) is executed, at least 12 pin boards
must be installed in designated slots in the test head. The designated slots are shown in the pin
board configuration table.
The pin board installation is also designed to allow for balancing weight and capacitance in the test
head. If the pin boards are not installed as recommended, stray capacitance between any two pins
can be off-balance, as well as the test head weight.
To balance the weight and capacitance between pins in the test head, the pin boards are not
installed in consecutive order for systems that do not use all 48 slots.Pin board configuration for
4080 series tester
Slot no. Pin board Slot Pin board Slot no. Pin board Slot no. Pin board
installment no. installment installment installment
order order order order
1 13 13 25 25 31 37 19
2 1 14 4 26 7 38 10
3 14 15 26 27 32 39 20
4 A.I. 16 A.I. 28 A.I. 40 A.I.

5 15 17 27 29 33 41 21
6 2 18 5 30 8 42 11
7 16 19 28 31 34 43 22
8 A.I. 20 A.I. 32 A.I. 44 A.I.
9 17 21 29 33 35 45 23
10 3 22 6 34 9 46 12
11 18 23 30 35 36 47 24
12 A.I. 24 A.I. 36 A.I. 48 A.I.
62 Chapter 3
Table shows pin boards configuration if you ordered 28 pin boards.Example for pin board configuration
Slot no. Pin board Slot Pin board Slot no. Pin board Slot no. Pin board
installment no. installment installment installment
order order order order
1 13 13 25 25 Empty 37 19
2 1 14 4 26 7 38 10
3 14 15 26 27 Empty 39 20
4 A.I. 16 A.I. 28 A.I. 40 A.I.
5 15 17 27 29 Empty 41 21
6 2 18 5 30 8 42 11
7 16 19 28 31 Empty 43 22
8 A.I. 20 A.I. 32 A.I. 44 A.I.
9 17 21 Empty 33 Empty 45 23
10 3 22 6 34 9 46 12
11 18 23 Empty 35 Empty 47 24
12 A.I. 24 A.I. 36 A.I. 48 A.I.
Figure 3-10 Pin board position in standard configuration
pin board 4 pin board 48


Connector Panel Side
Chapter 3 63
64 Chapter 3
4 Receiving
65
Receiving
This chapter describes how to carry in the tester, and includes information for receiving, checking for shipping
damage, checking the contents, and unpacking the system cabinet and test head.
Figure 4-1 shows the overall course of events for receiving the tester.
Figure 4-1 Overall receiving flow
START
Checking shipping
"Shipping damage"
damage
Receving
Cheking contents "Checking the contents"
Unpacking System "Unpacking the system

Cabinet cabinet"
Unpacking Testhead "Unpacking the Testhead"
Unpacking Accessories "Unpacking Accessories"
Carrying in
Adapting to the ambient
temperature and
humidity prevenging
from condensation
"Moving the Testhead"
Moving Testhead
Moving the system "Moving the system cabinet

cabinet and accessories and accessories"
END
66 Chapter 4
Receiving
Package
Package
Keysight 4080 series tester will deliver three or more packages. In many cases, it consists of packages for the
system cabinet, test head, and other accessories. For the 4083A tester, packages are added for instruments, external
fan box, and rack-mount parts. If you order other options, these additional packages will be delivered at the same
time.
The biggest package is for the system cabinet and test head. Table 4-1 describes the size and weight of each
packages. See this table when deciding how to ship.
Table 4-1 Package size and weight
Contents Size (mm) Weight (Kg)
Cabinet 1190 × 970 × 2070 Max. 415

Test Head 1150 × 1060 × 1160 Max. 157
Software, manuals, and accessories 575 × 545 × 430 Typical 10
Shipping Damage
Before unpacking any system components, inspect all boxes for any signs of damage that might have occurred
during shipment. Some typical signs of damage are dents, scratches, cuts, or water marks.
If you suspect damage, note on the bill of lading that there is “Apparent damage -- subject to inspection,” and
arrange for both the carrier’s representative and a local Keysight customer engineer (CE) to be present when that
item is unpacked.
Checking Contents
First, unpack the box labeled “Open Me First”, take out the contents list, and check the delivered items against it.
If something is missing or damaged, contact your local Keysight sales representative.
Chapter 4 67
Receiving
Unpacking System Cabinet

The customer is responsible for unpacking the Keysight 4080 series tester’s system cabinet and moving it to the
final location in the clean room.
This section covers how to unpack the system cabinet. The system cabinet is stored in the carton, and is removed
from the carton and put down on the floor using the following procedure.
CAUTION At least two persons are required to slide the cabinet down to the floor.
1. Cut the nylon straps securing the box. 2. Remove the top cover.
3. Remove the adhesive tape on the corner to 4. Remove the other side cover.
remove the side cover.
5. Remove the cover on the top.

6. Cut the nylon strap that ties the cabinet and the
slope together.
68 Chapter 4
Receiving
Prop board
7. Remove the slope. 8. The slope has a prop board on the floor side
surface.
Slit
10. Place the slope so the bottom part comes on the slit
9. Unfold the prop board then lock it. so that it will not move.
11. Loosen the two nuts and remove the fixing

wooden bar from the base. 12. Loosen the nuts on both side on the base and
remove the fixing bars to release the cabinet.
13. Unfold the slope.

14. Slide the cabinet down on the slope.
Chapter 4 69
Receiving
Unpacking Test Head
Unpacking Test Head

This section covers how to unpack the test head. The test head is stored in the carton. Remove the carton using the
following procedure.
4082A/4082F test head
CAUTION At least two person are required to move the test head.
WARNING To prevent back injury, use the lifter when moving the test head with the pedestal from the
pallet to the final installation location.
The warning label is attached on the test head as Figure 4-2.
Requirements to the lifter is as follows.
• Capacity loading: 250 kg or more

• Folk (table) width, length: 400 mm - 500 mm x 900 mm - 1100 mm
• Lowered fork height: less than 80 mm
• Raised fork height: 750 mm or more
Figure 4-2 Warning label attached on the test head
70 Chapter 4
Receiving
Unpacking Test Head
1. Cut the nylon straps securing the box, remove the 2. Remove the top cover.
tape, and open the top of the carton.
3. Remove the carton on the test head. 4. The test head is wrapped in a vinyl cover. Do not
remove the vinyl cover while the test head is
outside of the clean room.
5. Take the test head to the clean room.
CAUTION The test head must adapt to the atmospheric temperature before removing the carton. Also,
measure the atmospheric temperature at the location where the test head will reside.
4083A test head
CAUTION Use a lifter or cart to move the test head.
Chapter 4 71
Receiving
Unpacking Test Head
Testhead Testhead Testhead
1. Cut and remove the nylon 2. Open the top of the carton. 3. Remove the top cover.
straps.
Testhead Testhead
Testhead
5. The testhead is wrapped in 6. Move the testhead to the

4. Remove the carton on the vinyl covers. Do not remove outside entrance of the
testhead. them while the testhead is clean room.
outside of the clean room.
CAUTION The test head must adapt to the atmospheric temperature before removing the carton. Also,
measure the atmospheric temperature at the location where the test head will reside.
72 Chapter 4
Receiving
Unpacking Accessories
Unpacking Accessories
The accessories are also wrapped in a protective vinyl cover and shipped in separate boxes. These boxes can be
unpacked whenever it is convenient for you to do so.
When unpacking the accessories, observe the following precautions:
• The accessories are sensitive to airborne contaminants. Do not remove their protective covers outside of the
clean room.
• One box contains paper documents and manuals. Do not take the paper items into the clean room.
NOTE Do not remove the protective vinyl covers outside of the clean room. When the system is shipped
from the factory, items that are used in the clean room are wrapped with a protective vinyl cover in
a clean room meeting class 10,000 air cleanliness standards.
Chapter 4 73
Receiving
Moving Cabinet, Test Head and Accessories

This section covers how to move and unwrap the cabinet, test head, and accessories in your clean room. All items
are wrapped in double protective vinyl covers.
CAUTION You must ensure that no condensation occurs in the test head. Before removing the deaeration
packaging’s vinyl cover, the test head must adapt to the ambient temperature and humidity. If
condensation does occur in the test head, the tester may not meet specifications.
• If the test head has sat at the entrance of the clean room for more than eight hours, measure the
atmospheric temperature at the entrance, then wait for the corresponding time shown in
Table 4-2.
• If the test head has sat at the entrance of the clean room for less than eight hours, measure the
atmospheric temperature of the location the test head sat at prior to being moved to the
entrance, then wait for the corresponding time shown in Table 4-2.
Example:
If the temperature of the air outside is colder than the entrance, and you move the test head to
the entrance after it has sat in a cold place for a long time, you need to check the atmospheric
temperature at that place, and then wait for the corresponding time shown in Table 4-2.
The correspondence with the waiting time for no-condensation is shown in Table 4-2.
WARNING To prevent back injury, use the lifter when moving the test head with the pedestal from the
pallet to the final installation location.
The warning label is attached on the test head as Figure 4-3.
Requirements to the lifter is as follows.
• Capacity loading: 250 kg or more

• Folk (table) width, length: 400 mm - 500 mm x 900 mm - 1100 mm
• Lowered fork height: less than 80 mm
• Raised fork height: 750 mm or more
Figure 4-3 Warning label attached on the test head
74 Chapter 4
Receiving
Figure 4-4 Test Head cover removing location
Buffer Room
Clean Room (sticky sheet)
Air Shower Room

(sticky sheet)
Remove all
vinyl cover
Remove the carton and
You must confirm outer vinyl cover
the temperature and the waiting time.
Table 4-2 Warming time to ensure no condensation occurs in test head
Atmospheric Waiting time Waiting time

temperature at entrance under 70 % humidity in buffer room under 50 % humidity in buffer room
−20 °C to 0 °C 10 hours 6 hours
0 °C to 10 °C 8 hours 4 hours
10 °C to 20 °C 5 hours 1 hour
Greater than 20 °C 1 hour 0 hour
Chapter 4 75
Receiving
Moving test head

The following describes how to move the test head.
NOTE: The test head in the following pictures is 407x and have test head handles. The 4080 test head does
not include handles.
4082A/4082F test head
1. Move the test head to the outside entrance of the clean room.
2. Remove the outer vinyl covers.
CAUTION Do not cut the deaeration packaging’s vinyl cover.
3. Move the test head into the buffer room.
4. After waiting the amount of time shown in Table 5. Remove the deaeration packaging’s vinyl cover.
4-2, cut the deaeration packaging’s vinyl cover.
76 Chapter 4
Receiving
6. Remove the inner vinyl covers. 7. Remove the protective vinyl.
8. Remove the protective vinyl. 9. Do not remove the tape holding the air duct. (This
tape indicates the final installation location.)
Chapter 4 77
Receiving
4083A test head
Outside Entrance Outside Entrance

of Clean Room of Clean Room
Testhead Testhead
1. Remove two outer vinyl CAUTION Do not cut the 2. Move the testhead into the
covers. deaeration package. buffer room.
Buffer Room Buffer Room Buffer Room

Desiccants
Air duct
& cables
Testhead
Testhead Testhead
3. After waiting time to ensure no 4. Remove two inner vinyl covers 5. Move the testhead to the final
condensation in the testhead, and two desiccants. installation location in the
cut the deaeration package. clean room.
For how to lift down the test head
from the pallet using your lifter,
see the next procedure.
78 Chapter 4
Receiving
Clean Room Clean Room
Protective vinyl
Testhead Testhead
6. Put the testhead near the 7. Remove the protective vinyl.

installation location of the Do not remove the tape holding
wafer prober. the air duct and pedestal.
NOTE Store the packaging materials of the test head in your site. They will be able to be used when the
test head for moving the 4080 series tester to other site or sending the test head to Keysight
Technologies service office. Especially, lay up the pedestal for the test head in lavender.
To lift down the test head from the pallet using your lifter, do as follows:
1. Pull out the cardboard under the test head. 2. Remove the large block of wood by removing three
bolts.
3. Use the slits to locate your lifter under the test head pedestal.
Chapter 4 79
Receiving
Moving cabinet and accessories

1. Move the items to the front of the clean room entrance. The system cabinet is equipped with casters to allow
movement of the cabinet.
CAUTION When moving the system on its casters, do not allow the casters to become caught on cables or
debris, or in cracks in the floor. The high center of gravity and the momentum caused by pushing
or pulling can cause the system to tip over, resulting in serious injury to personnel and damage to
the equipment
NOTE When moving the system, fix the mounting support under the cabinet to the uppermost position.
The collision in moving cause the system to damage.
2. Remove the outer protective vinyl cover.

3. Move the items into the buffer room.
4. Remove the inner vinyl cover.
5. Move the items to the final installation location.
CAUTION After moving the cabinet, immediately attach the cabinet using the fixing mount. If the cabinet is
not secured, the cabinet could be knocked over, the system resulting in serious injury to personnel
and damage to the equipment
80 Chapter 4
A Confirming the System Power Safety
81
Confirming the System Power Safety
If you need to perform an ELECTRICAL SAFETY LEVEL CHECKS before the installation, do as follows to
connect the site power line to the 4080 tester and check it:
1. “Fixing System Cabinet”

2. “Connecting Site Power Line”
3. “Confirming Power Supply Components”
4. “Confirming PDU and EMO Operation”
82 Appendix A
Fixing System Cabinet
Fixing System Cabinet

After the system cabinet is moved to its final location and before performing any other installation steps, fix the
system cabinet to the floor by the leveling feet to prevent the system cabinet from tipping over. Extend four
leveling feet to the floor by screwing them until they are in contact with the floor. (spanner H19)
WARNING Failure to do this task can result in serious injury to personnel and damage to the equipment.
Figure A-1 Extending the Leveling Feet
Down
Leveling Foot
Appendix A 83
Connecting Site Power Line
WARNING Main power cable connection must be performed by qualified personnel at the customer site.
Incorrect installation will result in serious injury to operating personnel and damage to the
equipment.
NOTE
• See “Electrical Requirements” on page 29 for main power cable specification.
• When to connect the power cable to the power distribution unit (PDU), ensure that it is
connected to the 30 A service (or 24 A service for 208 V power line).
Use the following procedure to connect the power distribution unit (PDU) to the site power line (source).
1. Set the switchboard breaker to OFF. 2. Open the system cabinet rear door with the key
provided.
disconnect
device
PDU side cover
emergency
breaker
3. Set the disconnect device and emergency breaker 4. Remove the PDU side cover. (pozidrive
to OFF. screwdriver)
84 Appendix A
disconnect
device cover cable clamp
5. Remove the disconnect device cover. (pozidrive 6. Loosen (for flexible cable) or remove (for
screwdriver) rigid/flexible conduit) the cable clamp and pass the
main power cable through the cable clamp
opening.
power line wires

GND wire
GND terminal
7. Connect the ground wire to the ground terminal. 8. Connect line and neutral (or line) wires to the
(Trox screwdriver, T15) terminal of the disconnect device. Use
hex L screwdriver H5 (for 208/220/240 V) or
pozidrive screwdriver (for 200 V) to fasten the
terminal screws. The torque specifications are 4.0
N-m for 208/220/240 V and 2.5 N-m for 200 V.
cable clamp
disconnect
device cover
9. (For flexible cable,) fasten the cable clamp 10. Reinstall the disconnect device cover (removed in
securely. step 5).
Appendix A 85
PDU side cover
12. Connect the main power cable to switchboard of

the installation site.
11. Reinstall the PDU side cover (removed in step 4).
86 Appendix A
Confirming Power Supply Components

In the next section, you need to access to many power supply components for checking. Before it, learn the location
of the components with referring to Figure A-2 through Figure A-6.
Figure A-2 System Cabinet Component Locations (Rear View)
The shutdown controller box is for smoothly power off the Windows-base instruments such as E8362B PNA in the
4083A tester. It connects the Windows-base instruments to the PDU. If the INSTRUMENT POWER OFF button is
pushed, the PDU sends a power-off trigger to the Windows-base instruments via the shutdown controller box. At
the factory, the serial I/O connector on the E8362B PNA rear panel is connected to one connector of the shutdown
controller box as shown in the above figure.
WARNING No operator serviceable parts inside. Refer to servicing qualified personnel.

To prevent from electrical shock, do not remove covers or open the rear door.
The following warning label is attached on the system cabinet, test head, and PDU.
Appendix A 87
Figure A-3 System Cabinet Component Location (Front View)
Figure A-4 PDU component locations
88 Appendix A
Figure A-5 Positions of Circuit Protector (EMO, Fan, and Power Outlet Protectors)
yellow
circuit protector circuit protector

in position out position
Figure A-6 Positions of GFCI Indicator (on 200V PDU only)
GFCI in position GFCI out position

white white
breaker test switch

gray
main breaker on position main breaker middle position
Appendix A 89
Confirming PDU and EMO Operation

When you confirm the PDU and EMO operation, use the following procedure.
1. Disconnect all power cords from the power outlets in the system cabinet, and turn off all the instruments,
controller, and peripherals.
2. Set the following:
Switch board breaker Off position
Emergency breaker Off position
Disconnect device Off position
EMO button Out position
EMO protector In position
Fan protectors In position
Power outlet protector In position
To set the EMO button on the EMO panel to the out position, rotate the switch in a clockwise direction.
The position of the EMO, cabinet fan, and test head fan protectors are exchanged by pressing the protector
button.
3. For the PDU’s 200 V option, check the ground-fault circuit interrupter (GFCI) as follows:
a. Set the door lock sensor to lock position, and then set the disconnect device to the on position.
b. Confirm that the white push-button, labeled “LEAKAGE INDICATOR”, is in its normal position
(in position).
c. Press the gray push-button to force earth leakage current. Confirm that the breaker behind the disconnect
device turns off (moved to middle position), and the leakage indicator has moved to the out position to
indicate the earth leakage condition.
d. Set the breaker behind the disconnect device to the on position (reset the leakage indicator) as follows:
i. Set the disconnect device to the off position. The GFCI indicator moves to the in position.
ii. Set the disconnect device to the on position.
4. Check the emergency breaker, disconnect device, LINE indicator, system switch, and controller power outlets
as follows:
a. Set the power board breaker to the on position.

b. Set the emergency breaker to the on position.
c. Rotate the door lock release screw counterclockwise, and then set the disconnect device to the on position.
(pozidrive screwdriver)
d. Confirm if the over voltage LED turns on. If so, check the source power line.
e. Confirm that the LINE indicator on the EMO panel turns on.
f. Press the system switch, and confirm that the green LED in the system switch turns on.
90 Appendix A
NOTE Do steps c through f within 20 seconds. After 20 seconds, the cabinet fan error LED turns on. To
recover this, set the disconnect device to the off position and repeat steps c through f.
g. Confirm that the proper voltage is applied to the controller power outlets, using a hand-held multimeter.
h. Confirm that no voltage is being applied to the instrument power outlets.
i. Confirm that no voltage is being applied to the 220V/240V power outlets.
5. Check the INSTRUMENT POWER ON/OFF switches, instrument power outlets, 220V/240V power outlets,
and power outlet protector as follows:
a. Press the INSTRUMENT POWER ON switch on the EMO panel.

b. Confirm that the green LED in the INSTRUMENT POWER ON switch turns on.
c. Confirm that the proper voltage is applied to the instrument power outlets using a hand-held multimeter.
d. Confirm that the proper voltage is applied to the 220V/240V power outlets using a hand-held multimeter.
e. Press the power outlet protector to set it to the out position.
f. Confirm that no voltage is applied to the instrument power outlets.
g. Confirm that no voltage is applied to the 220V/240V power outlets.
h. Press the power outlet protector to set it to the in position.
i. Press the INSTRUMENT POWER OFF switch on the EMO panel.
j. Confirm that the green LED in the INSTRUMENT POWER ON switch flashes, then turns off. It takes
maximum 180 seconds if any Windows-base instrument such as PNA on 4083A is connected to the
shutdown controller box via the RS232C cable. If any Windows-base instrument is not connected, the green
LED turns off immediately.
k. Confirm that no voltage is applied to the instrument power outlets.
l. Confirm that no voltage is applied to the 220V/240V power outlets.
m. Press the INSTRUMENT POWER ON switch.
6. Check the EMO button and ext alarm 1 and 2 terminals as follows:
a. Check the conductivity of the ext alarm 1 and 2 terminals on the PDU using a hand-held multimeter. The
resistance between the ext alarm 1 terminals must be set at approximately 0 ohm, and the resistance
between the ext alarm 2 terminals must be set very high.
b. Press the EMO button.
c. Confirm that the emergency breaker is set to the off position, and confirm that the LINE indicator and the
green LED in the INSTRUMENT POWER ON switch are turned off.
d. Check the conductivity of the ext alarm 1 and 2 terminals in the emergency off condition. The resistance
between the ext alarm 1 terminals must be set very high, and the resistance between the ext alarm 2
terminals must be set at approximately 0 ohm.
e. Press the INSTRUMENT POWER ON switch, and confirm that the green LED in the INSTRUMENT
POWER ON switch does not turn on.
f. Rotate the EMO button in a clockwise direction to set it to the out position (normal position).
7. Check the ext control terminals as follows:
a. Confirm that the LINE indicator is turned off.
Appendix A 91
b. Remove the shorting bar connected between the ext control terminals.
c. Confirm that you cannot set the emergency breaker to the on position.
d. Reinstall the shorting bar on the ext control terminals.
e. Set the emergency breaker to the on position, and confirm that the LINE indicator turns on.
f. Press the system switch, and confirm that the green LED in the system switch turns on.
NOTE Do steps e through f within 20 seconds. After 20 seconds, the cabinet fan error LED turns on. To
recover this, set the emergency breaker to the off position and repeat steps e through f.
g. Press the INSTRUMENT POWER ON switch, and confirm that the green LED in the INSTRUMENT
POWER ON switch turns on.
8. Check the EMO protector as follows:
a. Press the EMO protector to set it to the out position.

b. Confirm that the emergency breaker is set to the off position, and also confirm that the LINE indicator and
the green LED in the INSTRUMENT POWER ON switch turn off.
c. Press the EMO protector to set it to the in position.
d. Set the emergency breaker to the on position, and confirm that the LINE indicator turns on.
e. Press the system switch, and confirm that the green LED in the system switch turns on.
NOTE Do steps d through e within 20 seconds. After 20 seconds, the cabinet fan error LED turns on. To
recover this, set the emergency breaker to the off position and repeat steps d through e.
f. Press the INSTRUMENT POWER ON switch, and confirm that the green LED in the INSTRUMENT
9. Check the fan protector as follows:
a. Press the left fan protector to set it to the out position.

b. Confirm the conditions of the following in a few minutes:
LINE indicator On
Green LED Off
in the INSTRUMETNT POWER ON switch
Cabinet fan Stopped
Cabinet fan error LED (red) Lit
Test Head fan Stopped
Test Head fan error LED (red) Lit
c. Press the left fan protector to set it to the in position.
d. Set the emergency breaker to the off position, and wait at least 3 seconds; then set it to the on position.
Confirm that the LINE indicator turns on.
e. Press the system switch, and confirm that the green LED in the system switch turns on.
92 Appendix A
NOTE Do steps d through e within 20 seconds. After 20 seconds, the cabinet fan error LED turns on. To
recover this, set the emergency breaker to the off position and repeat steps d through e.
f. Press the INSTRUMENT POWER ON switch, and confirm that the green LED in the INSTRUMENT
g. Confirm that the cabinet fan and the test head fan operate.
h. Repeat steps a through g to check the right fan protector switch.
10. Set the disconnect device, emergency breaker, and main breaker to the off position.
Appendix A 93
94 Appendix A
This information is subject to change without notice.
© Keysight Technologies 2018
Edition 5, November 2018
*5989-6429EN*
5989-6429EN

4080 Pre Installation Guide 5989-6429EN-e5

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Keysight 4080 Series

Parametric Test System

AEL power is less than 0.2 mW.

GROUND THE INSTRUMENT

Electrical Work Types

Type 1: Equipment is fully deenergized.

3. Wafer Probers and Connection with Test Head

Connecting with Test Head . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 58

A. Confirming the System Power Safety

Figure 1-1 Keysight 4080 series test system

Wafer Prober: TEL Precio

Wafer Prober: Accretech UF-3000

Keysight 4082A Parametric Test System

is dedicated as a chuck connection.

• (Optional) DVM - Digital Volt Meter (Keysight 3458A digital multimeter)

• Upto 48 pin boards (standard or ultra-low current)

Keysight 4082F Flash Memory Cell Parametric Test System

• Upto 48 pin boards (standard or ultra-low current)

Keysight 4083A DC/RF Parametric Test System

Figure 1-2 Bird-eye view image of the Keysight 4083A

System Test Head

To Test Head Fan

• (Optional) DVM - Digital Volt Meter (Keysight 3458A digital multimeter)

• Keysight E8362B PNA series network analyzer (2 test ports)

• Upto 48 pin boards (standard or ultra-low current)

Figure 1-3 Flowchart for preinstallation

preparing installation location

preparing for electrical equipment chapter 2

confirming safety precautions

preparing the requirement to connect

moving to installation location

Installation Site Requirements

Cable Length from system cabinet bottom

Test Head power supply cable 3 m (9.8 ft.)

Test leads for DVM 3 m (9.8 ft.)

Test leads for SPGU 3 m (9.8 ft.)

Figure 2-1 System cabinet dimensions

Top View Front View Side View

Figure 2-2 External fan for 4083A

Air Outlet (bottom)

Software media storage

Label for emergency off switch

Lock for disconnect device

Figure 2-3 Dimensions of lock

Example of 4080 series tester layout

Figure 2-4 System component template sheet

System Cabinet with

Air Duct/Connector Panel

External Fan Analyzer Enclosure

Figure 2-5 Grid sheet

Figure 2-6 4082A/4082F layout example for Tokyo Electron Precio

Figure 2-7 4082A/4082F layout example for Accretech UF3000

Test leads Air duct

Test leads Air duct

Figure 2-8 4083A layout example for Tokyo Electron Precio

Figure 2-9 4083A layout example for Accretech UF3000

Test leads Air duct

Power configurations and requirements

AC 200 V AC 180 - 220 V 30 A 10 kA

a. Line frequency must be 48 to 63 Hz.

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