JSM-6390LA/JSM-6390A/JSM-6390LV/JSM-6390

Scanning Electron Microscopes

Serving Advanced Technology

High Performance in a Compact De
Ease of operation based
on high quality optics

GUI for “Intuitive Operation”

Multi disciplinary large

specimen stage and chamber

Expandable to
analytical system

JSM-6390LV (with the optional 900mm wide table)

Space saving,
Energy saving

JSM-6390LA (with the optional 900mm wide table)

2
esign
High Performance General Purpose SEM

Ease of Operation Based

on High Quality Optics
JEOL has improved the electron optics based on a belief that
high performance optics makes its operation easier.
The new super conical objective lens guarantees 3 nm resolu-
tion at 30 kV. A sharp image with good contrast makes its oper-
ation comfortable.
The new scanning system lets you go down below 8 times mag-
nification. This low magnification improves efficiency of speci-
men survey. The zoom condenser lens maintains focus and
area of interest so that you can optimize probe current intuitive-
ly.
The new optics forms a small electron probe diameter with
large probe current for elemental analysis on a micro area.

0.1␮m
High Resolution
Gold evaporated particles 30kV
JSM-6390 series SEMs employ the newly developed super
conical objective lens. An analytical working distance of 10mm
produces superior resolution since this lens is guaranteed for
resolution at a working distance of 8mm. The super conical
shape of the lens allows a large specimen to be tilted at the
analytical working distance.

High brightness
electron gun
0.5␮m
Factory pre-centered
filament
Gold evaporated particles 3kV

Precision zoom
condenser lens

Wide angle
scanning coil

Super conical
1␮m objective lens

Gold evaporated particles 1kV

3
Principal Specifications
Resolution HV mode 3.0 nm (30kV), 15 nm (1kV)
LV mode 4.0 nm (30kV)
Magnification
8 to
300,000 (at 11kV or higher)

5 to
300,000 (at 10kV or lower)
Preset magnifications 5 steps, user selectable
User operation recipe Optics, Specimen stage, Image mode,
JSM-639
0

LV pressure*1, Standard recipe

Scaning Elecron
Microscope

Image mode Secondary electron image,

Composition*1, Topography*1, Shadowed*1
Accelerating voltage 0.5 kV to 30 kV
Filament Factory pre-centered filament
Electron gun Fully automated, manual override
Condenser lens Zoom condenser lens
Objective lens Super conical objective lens
Objective lens apertures 3 stages, XY fine adjustable
Stigmator memory Built in
Electrical image shift 50m (WD=10mm)
Auto functions Focus, brightness, contrast, stigmator
Specimen stage Large eucentric type, Installation Layout (JSM-6390LV)
X: 80mm, Y: 40mm, Z: 5mm to 48mm,
Tilt: 10 to 90, Rotation: 360 2,000
Motor control option (2 axes, 3 axes, 5 axes)
Navigator 2 images Power
Water
Specimen exchange Draw out the stage faucet/ distributor
drain Vibration
isolator Oil rotary
Maximum specimen 150mm diameter pump
Computer IBM PC/AT compatible Oil rotary
pump
OS Windows XP
Monitor 15 inch LCD, 1 or 2*2
Electron optical
Frame store 640
480, 1,280
960 pixels, column unit Monitor

2,500
1,000

900
2,560
1,920 pixels
Keyboard
Full size image display Built in
Mouse
Reference image 2 images
Specimen stage Table
Pseudo color Built in
750 750
Multi image display 2 images, 4 images
Digital zoom Built in
Dual magnification Built in Entrance
Network Ethernet 850 or more
Unit : mm
Image format BMP, TIFF, JPEG
Auto image archiving Built in
Smile View Built in*2 Installation Requirements
Pumping system Fully automated, DP: 1, RP: 1 or 2*1
Power: Single-phase, 100V AC, 50/60Hz,
Switching vacuum mode*1 Through the menu, less than 1 minute 3.0kVA
LV Pressure*1 1 to 270 Pa Voltage regulation within 10%
JED-2300 EDS*2 Built in (voltage drop at 3.0 kVA within 3%)
Grounding terminal: One, 100 ohms or less
Windows is a registered trade mark of Microsoft Cooling water:
Faucet: One,14mm OD or
ISO 7/1 Rc 1/4 internal thread
Drain: One, 25mm or more ID, or
Principal Options ISO 7/1 Rc 1/4 internal thread
쎲 Backscattered electron detector*1 Flow rate: 2L/min.
Pressure: 0.05 to 0.2 MPa
쎲 Secondary electron detector for Low Vacuum Temperature: 205C
쎲 Energy dispersive X-ray analyzer (EDS) Environment
쎲 Wave length dispersive X-ray analyzer (WDS) Temperature: 205C
쎲 Specimen exchange airlock chamber Humidity: 60% or less
Stay AC magnetic field: 0.3T or less
쎲 Chamber scope
(50/60 Hz sine wave, WD:15mm, Acc.V.: 30kV)
쎲 Operation knobs Floor vibration: 2m(p-p) or less at sine wave of over 5Hz
쎲 Specimen cooling unit frequency
쎲 LaB6 electron gun Floor space: 2,000(W)
2,500(D)
1,800(H)mm or more
쎲 Report creation software (Smile View)*2
Weight Approx. 410kg (JSM-6390),
Approx. 435kg (JSM-6390LV)
쎲 Operation console (750mm wide, 900mm wide, 1100mm wide)
Door width: 850mm or more
*1 Standard on JSM-6390LA and JSM-6390LV
*2 Standard on JSM-6390LA/JSM-6390A
* Specifications subject to change without prior notice.
19
 Certain products in this brochure are controlled under the “Foreign
Exchange and Foreign Trade Law” of Japan in compliance with
international security export control. JEOL Ltd. must provide the
MGMT. SYS. MGMT. SYS. Japanese Government with “End-user’s Statement of Assurance”
R v A C 024 R vA C 42 5 and “End-use Certificate” in order to obtain the export license need-
ISO 9001 & 14001 REGISTERED FIRM
DNV Certification B.V., THE NETHERLANDS ed for export from Japan. If the product to be exported is in this
category, the end user will be asked to fill in these certificate forms.
ISO 9001 & ISO 14001 Certificated

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