Turbomolecular Pumping Systems: High Vacuum Pumps
Turbomolecular Pumping Systems: High Vacuum Pumps
Turbomolecular Pumping Systems: High Vacuum Pumps
H I G H VA C U U M P U M P S
Turbomolecular Pumping Systems
Turbopack
Our best selling package: compact,
robust, may be installed on a
workbench or below a vacuum
chamber.
Accommodates an 80 to 400 l/s
turbomolecular pump and
a 5 to 21 m3/h Pascal Rotary Vane
Pump, or a 28 m3/h dry pump,
plus numerous vacuum options and
accessories.
Turbostand
Designed to bring the turbomolecular
pump flange to a convenient working
height while allowing easy access to
components.
Accommodates an 80 to 400 l/s
turbomolecular pump and
a 5 to 21 m3/h Pascal Rotary Vane
Pump, or an ACP dry pump,
plus numerous vacuum options and
accessories.
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Turbomolecular Pumping Systems
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Turbomolecular Pumping Systems
Superior idea…
Inlet screen
2.5 mm mesh to prevent
foreign material
from entering the
Vent valve (option) Turbomolecular pump
Enables to softly vent back
the Turbomolecular pump
(and possibly the chamber)
to atmosphere
Alcatel vacuum gauge
(optional)
ROUGHING PUMP
INLET
Frame TURBOMOLECULAR
PUMP
Including casters and leve-
VENT
ling pads or rubber pads VALVE
(OPTION)
Compact or extended,
adjustable height, EXHAUST ISOLATION
VALVE
antivibration pads,... (OPTION)
OIL MIST
ELIMINATOR
ROTARY VANE
PUMP OR
DRY PUMP
Vacuum schematic
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Turbomolecular Pumping Systems
…superior components
(1) For the standard pumping systems equipped with CF-F flange
(2) Depends on the configuration
(3) With water cooling, the ambient temperature arround the turbomolecular pump can reach 50°C
ACP 28 RVP
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Turbomolecular Pumping Systems
Power supply
Valve circuit for up to
breaker 2 gauge
controllers
Rotary vane pump Turbomolecular pump Low vibration: antivibration isolation Low vibration: antivibration isolation
(protected) & controller (protected) of the turbomolecular pump of the Rotary Vane Pump
Electrical safety:
The electrical box provides a protected
power supply to all vacuum components
(except the vacuum gauges which include
an internal protection). Only one power
cord is needed for the complete system.
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Turbomolecular Pumping Systems
High performance
Weight and power requirement of typical configurations
10-1
10-2
ATP 80 + Pascal 2005
10-3
ATP150 + Pascal 2005
10-4
10-6
10-7
0 20 40 60 80 100 120 140 160 180 200
Time (mn)
Dimensions mm (inches)
Turbostand
Adjustable :
947 - 1157
(37.2” - 45.5”)
Turbopack
Adjustable :
447 - 657
(17.5” - 25.7”)
560 560
435 435
(22“) (22“)
(17.1“) (17.1“)
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Turbomolecular Pumping Systems
7 2
3 ISO-K or
6 CF-F Flanges
5 Air or Water
Cooling
8
9 10
Optional Alcatel
100 V - 240 V Vacuum Gauges
Several power
plugs available
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Turbomolecular Pumping Systems
Voltage
9
110/130 V 200/240 V
50/60 Hz 50/60 Hz
Code F G
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Turbomolecular Pumping Systems
Designation P/N
Special options
It is possible to fit the Turbopack/
Turbostand with more complex
options: Turbomolecular Pump
isolation valve, by-pass (3 valves)
option, spool pieces,...
Please contact your Alcatel’s represen-
tative for more information.
Pictured here:
Turbostand with ATP 400, Pascal 2015 SD,
manual gate valve, by-pass, spool piece.
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Turbomolecular Pumping Systems
Turbostand 900
Pumping Ultimate
Model Inlet flange speed pressure
l/s mbar
ATP 900 DN 200 900 5.10-10
ATH 400 M DN 200 410 8.10-9
Dimensions mm (inches)
880 (34.6”)
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China
Alcatel Vacuum Technology China
Tel.: (8621) 5027 0628
Fax.: (8621) 3895 3815
France
Alcatel Vacuum Technology France
Tel.: 33 (0) 4 50 65 77 77
Fax: 33 (0) 4 50 65 77 89
Germany
Alcatel Hochvakuum Technik GmbH
Tel.: (49) 9342 96 10 0
Fax: (49) 9342 96 10 30
Italy
Alcatel Vacuum Systems S.p.a.
Tel.: (39) 039 686 3855
Fax: (39) 039 667 125
Japan
Alcatel Japan
Tel.: (81) 44 797 5920
Fax: (81) 44 797 5932
Korea
Alcatel Vacuum Technology Korea
Tel.: (82) 2 409 6277
Fax: (82) 2 409 6279
Part Number: 791524 - May 2004 - All information can be modified without prior notice
Netherlands
Alcatel Vacuum Technology Netherlands
Tel: (31) 306 35 13 60
Fax: (31) 306 35 12 21
Singapore
Alcatel Singapore Pte Ltd
Tel: (65) 6254 0828
Fax: (65) 6254 7018
Taiwan
Alcatel Vacuum Technology Taiwan
Tel.: (886) 3 5599 230
Fax: (886) 3 5599 231
United Kingdom
Alcatel Vacuum Technology (U.K.)
Tel.: (44) 1 506 418 000
Fax: (44) 1 506 418 002
USA
Alcatel Vacuum Products
Tel.: (1) 781 331 4200
Fax: (1) 781 331 4230