Tip-Tilt Mirrors for Free Space Optical Communication

and Astronomical Telescopes / Active Optics

Piezo Tip/Tilt Solutions

왎 Tripod and Differentional Designs
왎 Custom designs for optics up 12"
왎 Fast Rise Time to Sub-Millisecond FEA analysis of a mirror platform can help detect smallest aberrations, such
왎 Standard, OEM and custom designs as nanometer level deformation caused by gravity

왎 Resolution sub-arc-second /
왎 Closed-loop operation for highest accuracy,
왎 Frictionless wire-EDM-cut flexures, no backlash
왎 FEA optimized designes for precision trajectory control
왎 Invar, titanium, steel, aluminum:optimize thermal match
왎 Standard, custom and OEM control electronics (digital
and analog controllers, with advanced high-speed servos)

Applications of Piezo Tip-Tilt Systems

왎 Free Space Optical Communication
왎 Bore-sight systems (defense industry, law enforcement)
왎 Laser beam steering and tracking (telecom satellites, etc.)
왎 Beam switching, alignment, steering
왎 Interferometry (Fabry-Perot filters)
왎 Dynamic error correction in refraction systems PI offers a variety of high-speed Piezo Tip-Tilt mirrors
designed for image correction & active optics applica-
왎 Optical path length stabilization tions. Providing a tilt range of several milliradians, fast
왎 Vibration cancellation (laser systems, imaging) response (sub-millisecond and sub-microradian resolution,
왎 Image stabilization (astronomical telescopes, imaging) the systems are ideal for dynamic operation.
왎 Image resolution enhancement (dithering)
왎 Laser beam stabilization (resonators, optical setups)
왎 Laser beam scanning (lithography, optical setups)
왎 Mass storage (optical disk) mastering

For the latest specs visit www.tip-tilt-stage.com

Designs of Multi-Axis Piezo Tip-Tilt Platforms
Designs
I. Differential-Design II. Tripod Design TripOD-Piezo-Drive: A, B, C is the
linear displacement of the correspon-
No Piston Motion Z-Tip-Tilt (for Path- ding piezo actuator.

The platform is supported by (Length Correction) 2A
(B+C)

␣ = ___________
2a
four piezo actuators (two pairs) The platform is supported by ␤ = (B-C) / b
z = (A+B+C) / 3
spaced at 90° intervals. Each three piezo actuators spaced
actuator pair is operated as a at 120° intervals. Because
unit in push/pull mode. expansion of an individual PZT
The differential design exhibits actuator affects both ␪X and ␪Y
excellent angular stability over rotation, external coordinate
a wide temperature range. transformation (software or
Here too, temperature chan- hardware) is required to allow
ges only affect the vertical platform position commands
position of the platform (piston in ␪X and ␪Y coordinates. See
motion) and have no influence the equations.
on the angular position. After The tripod allows active ver- Dynamics
the operating voltage is re- tical control (piston motion) of In addition to the amplifier, Using the resonant frequency
moved, the platform returns to the platform––an important fea- controller and sensor band- of the unloaded platform
the center position. ture for interferometric ap- widths, the maximum operat- and the moment of inertia of
plications and correction of ing frequency of a tilt platform the mirror substrate, the sys-
path length errors. Also, the depends on its mechanical tem resonant frequency is
design allows for a central resonant frequency. To esti- calculated according to the fol-
clear aperture, ideal for trans- mate the effective resonant lowing equation:
mitted-light applications. frequency of the tilt mirror
Like the differential drives, the system (platform + mirror), Resonant frequency of a tilt
triple-piezo-actuator design the moment of inertia of the platform/mirror system
exhibits excellent angular sta- mirror substrate must first be
f’ = f 0
_______________________
_
bility over a wide temperature calculated.
range. With this arrangement Moment of inertia of a rota- 
1+I
/
I M 0

temperature changes only tionally symmetric mirror: where,

affect the vertical position of f’ = Resonant frequency of
[ (
3R2 + H2 + __
IM = m _______ H +T
)]
2
the platform (piston motion) 12 2 platform with mirror [Hz]
and have no influence on the
Moment of inertia of a f0 = Resonant frequency of
angular position.
rectangular mirror: unloaded platform [Hz]

[
L2 + H2 +
IM = m ______ ( __H2 + T) ] I0 = Moment of inertia of the
2

12 platform (see technical

where: data table for the individ-
ual model) [g⭈mm2]
m = Mirror mass [g]
IM = Moment of inertia of the
IM = Moment of inertia of the
mirror [g⭈mm2]
mirror [g⭈mm2]
L = Mirror length perpendicu-
lar to the tilt axis [mm]
H = Mirror thickness [mm]
T= Dist ance, pivot point to
platform surface (see
technical data table for
individual model) [mm]
R = Mirror radius [mm]

For the latest specs visit www.tip-tilt-stage.com

 Custom Tip-Tilt Steering Mirror Examples

Custom tip/tilt steering mirror with controller,

for astronomical telescope

Active tip/tilt mirror for Subaru

Telescope (Mauna Kea, Hawaii). Custom tip/tilt steering mirror
Mirror diameter: 150 mm
Tip/Tilt range: ±600 µrad
Resonant frequency: 610 H

Active secondary tip/tilt mirror for the

NASA Infrared Telescope Facility
(IRTF) on Mauna Kea, Hawaii, with
Hexapod 6-degree-of-freedom align-
Tip/tilt steering mirror units for the Keck Outrigger tele- ment system
scope in Hawaii. The units are controlled by a high-per-
formance digital controller with a fiber optic interface

Tip/tilt steering mirror with

Custom tip/tilt steering mirror (250 mm diame-
manual coarse adjustment unit
ter) with digital motion controller and capacitive
sensor controller, for astronomical telescope

Custom tip/tilt steering mirror

(100 mm diameter)

Custom tip/tilt steering mirror with controller, Custom open-loop steering

for astronomical telescope mirror

Custom steering mirror,

closed-loop with capacitance sensors
Custom steering mirror with capacitance sensors
http://www.pi.ws
[email protected]
Differential Tip-Tilt Mirror for Optical Beam Pointing

Applications 쮿 ±1 mrad ␪X and ␪Y Tilt To match the CTEs (coeffi- Working principle
쮿 Free Space Communication Range cients of thermal expansion) of S-340 tip/tilt platforms are
쮿 Image stabilization 쮿 For Mirrors to 100 mm Ø various mirror materials, plat- equipped with two pairs of
쮿 Laser beam stabilization 쮿 Sub-µrad Resolution forms made from different low-voltage piezoelectric linear
쮿 Beam switching
쮿 Closed-Loop Versions materials are available (see drives (0 to 100 V) operating as
쮿 Adaptive optics systems
쮿 Laser beam steering & scanning 쮿 Differential Design for ordering information) a unit in push/pull mode (see
쮿 Correction of polygon scanner errors. Excellent Temperature p. 3-15 for schematic diagram).
Stability Materials Match The aluminum case is equip-
Platform Recommended Models
ped with an integrated, FEA-
Mirror modeled (finite element analy-
Aluminum Aluminum S-340.Ax
sis) circular flexure featuring
Invar Zerodur glass S-340.ix
Titanium BK7 glass S-340.Tx
zero stiction, zero friction
Steel S-340.Sx and exceptional guiding preci-
sion.

S-340.AL Tip/Tilt Platform

S-340 piezo tip/tilt platforms

are fast and compact tilt units,
providing precise angular
movements of the top plat-
form in two orthogonal axes.
The tilt range is ±1 mrad (each
axis) with sub-µrad resolution.
Closed-loop versions are avail-
able for highest accuracy and
repeatability. S-340 systems
are designed for mirrors up to
100 mm diameter and have
outstanding angular stability S-340
dimensions (in mm)
over a wide temperature range.

For the latest specs visit www.tip-tilt-stage.com

In open-loop operation, the
platform angle roughly corre-
sponds to the drive voltage
(see p.4-1 1 in the “Tutorial” http://www.pi.ws
section for behavior of open- [email protected]
loop piezos). The open-loop
models are ideal for applica-
tions where the position is
controlled by an external loop,
based on data provided by a
sensor (e.g. PSD quad cell,
CCD chip, ...).
The closed-loop versions are
equipped with two pairs (one
per axis) of LVDT (linear vari-
able differential transformer)
sensors operated in a bridge
circuit for ultra-high resolution
and angular stability. They pro-
vide sub-µrad resolution and
repeatability (with PI control
electronics).

Technical Data
Models S-340.A0 S-340.AL Units Notes see
p. 3-16
Active axes ␪X,␪Y ␪X,␪Y
Open-loop tilt angle @ 0 to 100 V ±1 ±1 mrad ±20% A2
Closed-loop tilt angle 욷 - ±1 mrad A3
Integrated feedback sensor - 4 x LVDT B
Closed-loop / open-loop ***resolution 울 - / 0.1 0.5 / 0.1 µrad C1
Closed-loop linearity (typ.) - ±0.1 %
Full-range repeatability (typ.) - ±1 µrad C3
Electrical capacitance 7.2 / axis 7.2 / axis µF ±20% F1
* Dynamic operating current coefficient (DOCC) 0.45 / axis 0.45 / axis µA/(Hz x µrad) F2
** Unloaded resonant frequency (f0) 1.4 1.4 kHz ±20% G2
** Resonant frequency w/ ⭋ 50 x 15 mm glass mirror 0.9 0.9 kHz ±20% G3
** Resonant frequency w/ ⭋ 75 x 22 mm glass mirror 0.4 0.4 kHz ±20% G3
Distance, pivot point to platform surface (T) 7.5 7.5 mm
** Platform moment of inertia 18000 18000 g⭈mm2
Operating temperature range - 20 to 80 - 20 to 80 °C H2
Voltage connection 3 x VL 3 x VL J1
Sensor connection - 2xL J2
Weight (w/o cables) 335 335 g ±5%
Material (case / platform) Al / depends on version Al / depends on version L
* Dynamic Operating Current Coefficient in µA per hertz and µrad.
Example: Sinusoidal scan of 100 µrad at 10 Hz requires approximately 0.45 mA drive current.
** Value for aluminum top plate. Lower resonant frequency for other platforms due to higher moment of inertia: titanium:
+60%; invar: +200%; steel: +190%.
*** Resolution of PZT tip/tilt platforms is not limited by friction or stiction. Noise equivalent motion with E-503 amplifier.

For the latest specs visit www.tip-tilt-stage.com

 Tripod Tip-Tilt-Z for Optical Communication
Applications
쮿 Free Space Communication
쮿 Image stabilization
쮿 Laser beam stabilization
쮿 Beam switching
쮿 Adaptive optics systems
쮿 Laser beam steering & scanning
쮿 Correction of polygon scanner errors.

S-325.3SD High Resolution, Stability and High Reliability and Long

High-Dynamics Piezo Z/Tip/Tilt Dynamics Lifetime
Platform, 5 mrad, 30 µm, SGS, The S-325 offers piston move-
Sub-D Connector The compact S-325 systems
ment of up to 30 µm (ideal for
are equipped with preloaded
S-325.3SL path length adjustment) and
High-Dynamics Piezo Z/Tip/Tilt PICMA® high-performance pie-
mechanical tilt up to 5 mrad
Platform, 5 mrad, 30 µm, SGS, zo actuators which are integrat-
LEMO Connector
(equivalent to 10 mrad optical
ed into a sophisticated, FEA-
beam deflection). The zero-
S-325.30L modeled, flexure guiding sys-
friction piezo drives and flexure
High-Dynamics Piezo Z/Tip/Tilt tem. The PICMA® actuators fea-
Platform, 5 mrad, 30 µm, Open-
guidance allow sub-nanometer
ture cofired ceramic encapsula-
Loop, LEMO Connector linear resolution and sub-
tion and provide better per-
microradian angular resolu-
formance and reliability than
tion.
conventional piezo actuators.
It is designed for industrial ap- Actuators, guidance and sen-
plications where 1.000.000.000 sors are maintenance-free, not
motion cycles have to be per- subject to wear and offer extra-
formed without failure or per- ordinary reliability.

formance degradation. The

systems are designed for mir-
쮿 Optical Beam Deflection to 10 mrad, Resolution to 50 nrad
rors and optics up to 25 mm in 쮿 Piston Movement up to 30 µm (for Path Length Adjustment)
diameter and can be mounted 쮿 Compact Tripod Design with Coplanar Axes Eliminates
in any orientation. Polarization Rotation
쮿 Sub-Millisecond Responsiveness
The tripod drive offers opti- 쮿 Closed-Loop Versions for Higher Precision
mum angular stability over a
쮿 For Mirrors up to 25 mm (1") Diameter
wide temperature range. Com-
pared to stacked, (two-stage),
쮿 Frictionless, High-Precision Flexure Guiding System
piezo or galvo scanners, the 쮿 Parallel Kinematics for Enhanced Dynamics and Better Multi-
single platform design pro- Axis Accuracy
vides several advantages:
smaller package size, identical
size, identical dynamic per-
formance in all axes, faster
response and better linearity. It
also prevents polarization rota-
tion.

For the latest specs visit www.tip-tilt-stage.com

 S-325 dimensions in mm

Technical Data
Model S-325.30L S-325.3SL S-325.3SD Units Tolerance
Active axes Z, ⍜X, ⍜Y Z, ⍜X, ⍜Y Z, ⍜X, ⍜Y
Motion and positioning
Integrated sensor – SGS SGS
Open-loop travel, 0 to +100 V 30 30 30 µm min. (+20 %/-0 %)
Open-loop tip/tilt angle, 0 to +100 V 5 5 5 mrad min. (+20 %/-0 %)
Closed-loop travel – 30 30 µm
Closed-loop tip/tilt angle – 4 4 mrad
Open-loop resolution 0.5 0.5 0.5 nm typ. For maximum tilt range, all
three piezo actuators must be
Open-loop tip/tilt angle resolution 0.05 0.05 0.05 µrad typ.
biased at 50 V. Due to the
Closed-loop linear resolution – 0,6 0,6 nm typ. parallel-kinematics design linear
Closed-loop tip/tilt resolution – 0.1 0.1 µrad typ. travel and tilt angle are inter-
Mechanical properties dependent. The values quoted
here refer to pure linear / pure
Unloaded resonant frequency 2 2 2 kHz ±20 % angular motion. See equations
Resonant frequency 1 1 1 kHz ±20 % (p. 2-84).
(with 25 x 8 mm glass mirror) Recommended controller /
amplifier
Distance of pivot point to platform surface 6 6 6 mm ±0.5 mm
Versions with LEMO connector:
Platform moment of inertia 515 515 515 g • mm² ±20 % modular piezo controller system
Drive properties E-500 (p. 2-142) with amplifier
Ceramic type PICMA® P-885 PICMA® P-885 PICMA® P-885 module E-503.00S (three chan-
nels) (p. 2-146) or 1 x E-505.00S
Electrical capacitance 9.3 9.3 9.3 µF ±20 % and 2 x E-505 (high speed appli-
Dynamic operating current coefficient 39 39 39 µA / (Hz • mrad) ±20 % cations) (p. 2-147) and E-509
Miscellaneous controller (p. 2-152) (optional)
Single-channel (1 per axis):
Operating temperature range -20 to 80 -20 to 80 -20 to 80 °C
E-610 OEM servo controller /
Material casing Aluminum Aluminum Aluminum amplifier (p. 2-110), E-625 servo
Mass 0.065 0.065 0.065 kg ±5 % controller bench-top (p. 2-114)
Versions with Sub-D connectors:
Cable length 2 2 1.5 m ±10 mm
E-616 servo controller for tip/tilt
Sensor / voltage connection LEMO LEMO Sub-D mirror systems (p. 2-132)

For the latest specs visit www.tip-tilt-stage.com

Large Angle PZT Tip/Tilt-Mirror for Free Space Communication

Applications
쮿 Free Space Communication
쮿 Image stabilization
쮿 Laser beam stabilization
쮿 Beam switching
쮿 Adaptive optics systems
쮿 Laser beam steering & scanning
쮿 Correction of polygon scanner errors.

S-334 piezo tip/tilt mirrors / 쮿 Miniature Design

scanners provide extremely
S-334.1SD 쮿 Optical Beam Deflection to 120 mrad (~ 6.8°)
High-Dynamics Piezo Tip/Tilt large deflection angles in a
Platform, 25 mrad, SGS, Sub-D 쮿 Coplanar Axes & Fixed Pivot Point;
miniaturized package. These
Connector, incl. Mirror
fast steering mirror systems Eliminate Polarization Rotation
S-334.1SL are based on a sophisticated 쮿 Factory Installed Mirror
High-Dynamics Piezo Tip/Tilt parallel-kinematics design with 쮿 Millisecond Response, Resolution to 0.2 µrad
Platform, 25 mrad, SGS, LEMO
Connector, incl. Mirror two coplanar, orthogonal axes 쮿 Closed-loop Position Servo-Control for High Accuracy
and a fixed pivot point. 쮿 For Mirrors up to 12.5 mm (0.5”) Diameter
S-334.2SD
High-Dynamics Piezo Tip/Tilt Large Tip/Tilt Ranges with 쮿 Frictionless, High-Precision Flexure Guiding System
Platform, 50 mrad, SGS, Sub-D Excellent Motion Characteristics 쮿 Parallel Kinematics for Enhanced Dynamics and Bette
Connector, incl. Mirror
The novel flexure/lever design Multi-Axis Accuracy
S-334.2SL with minimized inertia allows
High-Dynamics Piezo Tip/Tilt
Platform, 50 mrad, SGS, LEMO for the exceptionally large tip/
Connector, incl. Mirror tilt range of 60 mrad (50 mrad
in closed-loop operation, which
is equivalent to 100 mrad opti-
cal beam deflection) and very
fast response in the millisecond
range. These parameters make
the system unique in the mar-
ket of piezo driven tip/tilt mirror
systems.

S-334 dimensions in mm

For the latest specs visit www.tip-tilt-stage.com

Sub-Microradian Resolution High Reliability and Long Differential Drive for Improved Factory Installed Mirror
Lifetime Stability and Dynamics The S-334 is equipped with a
In addition to the large angles
and the high dynamics the The compact S-334 systems The S-334 is based on a paral- factory-installed mirror 10 mm
S-334 provides sub-micro- are equipped with preloaded lel-kinematics design with co- in diameter and 2 mm thick
radian resolution. The integrat- PICMA® high-performance pie- planar axes and a single mov- (flatness λ/5, reflectivity >98 %
ed high-resolution, full-bridge zo actuators which are integrat- ing platform. Two pairs of dif- from 500 nm to 2 μm).
strain gauge sensors (SGS) ed into a sophisticated, FEA- ferentially-driven piezo actua-
provide absolute position con- modeled, flexure guiding sys- tors are employed to provide
trol, excellent repeatability and tem. The PICMA® actuators fea- the highest dynamics and posi-
high linearity, typically better ture cofired ceramic encapsula- tion stability over a wide tem-
than 0.05 % over the entire trav- tion and provide better per- perature range.
el range. formance and reliability than
conventional piezo actuators. Compared to stacked, (two-
Actuators, guidance and sen- stage), piezo or galvo scanners,
sors are maintenance-free, not the single-platform design pro-
subject to wear and offer vides several advantages:
extraordinary reliability. smaller package size, identical
dynamic performance in both
axes, faster response and bet-
ter linearity. It also prevents
polarization rotation.

Model S-334.1SL S-334.2SL Units Tolerance

S-334.1SD S-334.2SD
Active Axes ␪X, ␪Y ␪X, ␪Y
Motion and positioning
Integrated sensor SGS SGS
*Open-loop tilt angle at -20 to +120 V 30 60 mrad min. (+20 %/-0 %)
*Closed-loop tilt angle 25 50 mrad
Open-loop resolution 0.2 0.5 μrad typ.
Closed-loop resolution 1 5 μrad typ.
Linearity 0.05 0.05 % typ.
Repeatability 2 5 μrad typ.
Mechanical properties
Resonant frequency underload 3.0 1.0 kHz ±20 %
(with standard mirrors)
Load capacity 0.2 0.2 N Max.
Distance of pivot point to platform surface 6 6 mm ±1 mm
Platform moment of inertia 1530 1530 g • mm² ±20 %
Standard mirror (mounted) diameter: 10 mm, diameter: 10 mm,
thickness: 2 mm; thickness: 2 mm;
BK7, λ/5, R > 98 % BK7, λ/5, R > 98 %
(λ = 500 nm to 2 μm) (λ = 500 nm to 2 μm)
Drive properties
Ceramic type PICMA® P-885 PICMA® P-885
Electrical capacitance per axis 3 3 μF ±20 %
Miscellaneous
Operating temperature range -20 to 80 -20 to 80 °C
Material casing Titanium Titanium
Mass 0.065 0.065 kg ±5 %
Cable length 2 2 m ±10 mm
Sensor / voltage connection LEMO connector / LEMO connector /
25-pin sub-D connector 25-pin sub-D connector
Recommended controller / amplifier
Closed-loop versions with D-sub connector: E-616 controller for tip/tilt mirror systems (p. 2-132);
Open-loop versions with LEMO connector: Modular piezo controller system E-500 (p. 2-142) with amplifier module E-503.00S (three channels) (p. 2-146)
or 1 x E-505.00S and 2 x E-505 (high speed applications) (p. 2-147) and E-509 servo controller (p. 2-152 / 3-16)
Open-loop: E-663 three channel amplifier (p. 2-136)
Resolution of PI piezo tip/tilt platforms is not limited by friction or stiction. Noise equivalent motion with E-503 amplifier, (p. 2-146).
*Mechanical tilt, optical beam deflection is 120 mrad (open loop) and 100 mrad (closed-loop), respectively.

For the latest specs visit www.tip-tilt-stage.com

 Tripod Tip-Tilt-Z w/ Aperture for Optical Communication

Applications 쮿 10 mm Clear Aperture

쮿 Optical filters 쮿 Triple-PZT-Actuator-
쮿 Laser cavity tuning Supported Platform
쮿 Free Space Communication 쮿 Tilt Range up to
쮿 Image stabilization
±600 µrad
쮿 Laser beam stabilization
쮿 Beam switching 쮿 Piston Movement up to
쮿 Adaptive optics systems 12 µm
쮿 Laser beam steering & scanning 쮿 Closed-Loop Versions
쮿 Correction of polygon scanner errors.
쮿 For Optics, Mirrors or
Other Components
S-310 to S-316 multi-axis tip/tilt
platforms and Z-positioners are
fast and compact units based
on the triple-piezo-drive-sup-
ported platform design (see
page 3-7 for details and equa-
tions). They offer piston move-
ment up to 12 µm and tilt S-310.10
Vertical Piezo Positioner with Clear
movement up to ±600 µrad Aperture, 6 µm
with sub-msec response and S-311.10
settling. The S-310 to S-316 Multi-Axis Piezo Tip/ Tilt Platform with
systems are designed for mir- Clear Aperture, ±300 µrad, 6 µm
rors and optics up to 25 mm S-314.10
diameter; the clear aperture is Vertical Piezo Positioner with Clear
Aperture, 12 µm
ideal for transmitted-light appli-
S-315.10
cations. The units can be Multi-Axis Piezo Tip/Tilt Platform with
mounted in any orientation. Clear Aperture, ±600 µrad, 12 µm

In open-loop operation, the S-316.10

Multi-Axis Piezo Tip/Tilt Platform with
vertical position/platform angle
Clear Aperture, ±600 µrad, 12 µm,
roughly corresponds to the Closed-Loop
drive voltage (see page Custom Designs
4-11 in the “Tutorial” section
for behavior of open-loop
piezos). The S-310 to S-315
open-loop models are ideal for
applications where the posi-
S-310 - S-316 dimensions (in mm)
tion is controlled by an external
loop based on data provided by
a sensor (e.g. PSD quad cell,
CCD chip, ...). The S-316.10
closed-loop version allows
absolute position control, high
linearity and repeatability based
on the internal ultra-high-resolu-
tion feedback sensor.

For the latest specs visit www.tip-tilt-stage.com

Five different versions are
available:
쮿 S-310.10
쮿 S-314.10
Open-loop Z-platforms; all
three piezo linear actuators are S-315 cable configuration
electrically connected in paral-
lel, providing vertical position-
ing (piston movement) of the
top ring. Only one drive chan-
nel is required. The three piezo
actuators are individually
matched for equal displace-
ment, providing straight
motion with tilt errors of less
than 70 µrad over the com- S-316 cable configuration

plete range.

쮿 S-311.10
Technical Data
쮿 S-315.10
Models S-310.10 S-314.10 S-311.10 S-315.10 S-316.10 Units Notes
Open-loop Z, tip/tilt position- see p. 3-16
ers; all three piezo linear actua- Active axes Z Z Z,␪X, ␪Y Z,␪X, ␪Y Z,␪X, ␪Y

tors can be driven individually * Open-loop tilt angle @ 0 to 100 V - - ±300 ±600 ±600 µrad ±20%
* Closed-loop tilt angle 욷 - - - - ±600 µrad A3
(or in parallel) by a three-chan- Open-loop linear travel @ 0 to 100 V 6 12 6 12 12 µm ±20% A5
nel amplifier. Vertical (piston Closed-loop linear travel 욷 - - - - 12 µm A6
movement) positioning and Integrated feedback sensor - - - - 3 x strain B
gauge
tip/tilt positioning is possible.
Closed-loop *** angular resolution 울 - - - - ±0.05 µrad C1
Closed-loop / open-loop *** linear resolution 울 - / 0.1 - / 0.2 - / 0.1 - / 0.2 0.2 / 0.4 nm C1
쮿 S-316.10 Stiffness (Z) 20 10 20 10 10 N/µm D1
±20%
Closed-loop Z, tip/tilt posi-
Electrical capacitance 0.7 1.4 3 x 0.23 3 x 0.45 3 x 0.45 µF ±20% F1
tioner. All three piezo linear ** Dynamic operating current coefficient (DOCC) 15 15 3x5 3x5 3x5 µA/ F2
actuators are equipped with (Hz x µm)

strain gauge position feedback Unloaded resonant frequency (f0) 9.5 5.5 9.5 5.5 5.5 kHz ±20% G2
Resonant frequency w/ ⭋ 6.5 4.4 5.5 4.1 4.1 kHz ±20% G3
sensors and can be driven 15 x 4 mm glass mirror
individually (or in parallel) by a Resonant frequency w/ ⭋
20 x 4 mm glass mirror 6.1 4.2 4.4 3.4 3.4 kHz ±20% G3
three-channel amplifier/posi- Distance, pivot point to platform surface (T) - - 5 5 5 mm
tion servo-controller. Vertical Platform moment of inertia - - 150 150 150 gmm2
positioning (piston movement) Operating temperature range - 20 to 80 - 20 to 80 - 20 to 80 - 20 to 80 - 20 to 80 °C H2

and tip/tilt positioning is possi- Voltage connection 1 x VL,

2 m cable
1 x VL,
2 m cable
3 x VL,
2 m cable
3 x VL,
2 m cable
3 x VL,
2 m cable
J1

ble. The integrated position Sensor connection - - - - 3 x L, J2

feedback sensors provide sub- 2 m cable
Weight (w/o cables) 45 55 45 55 55 g ±5%
µrad resolution and repeatabil- Material (case / platform) N-S / N-S N-S / N-S N-S / N-S N-S / N-S N-S / N-S L
ity (with PI control electron- Recommended amplifier/controller
ics). (codes explained p. 6-46) G, C G, C G, C G, C H, D
* For maximum tilt range, all three piezo actuators must be biased at 50 V. Linear travel and tilt angle are interdependent. The values quoted
here refer to pure linear / pure angular motion. See triple-piezo-drive tilt platform equation on page 3-7 for more information.
** Dynamic Operating Current Coefficient in µA per hertz and µm (per actuator). Example S-314.10: Sinusoidal scan of 10 µm at 10 Hz
requires approximately 1.5 mA drive current. For tilt calculation, calculate power requirement for the individual actuators and use
triple-piezo-drive tilt platform equation on page 3-7.
*** Resolution of PZT tip/tilt platforms is not limited by friction or stiction. Noise equivalent motion with E-503 amplifier.

For the latest specs visit www.tip-tilt-stage.com

Differential Tip-Tilt Mirror for High-Speed Optical Beam Control

쮿 Sub-µrad Resolution
Applications
쮿 For Mirrors to 50 mm Ø
쮿 Free Space Communication
쮿 Closed-Loop Versions 쮿 Image stabilization
쮿 Differential Design for 쮿 Laser beam stabilization
Excellent Temperature 쮿 Beam switching
쮿 Adaptive optics systems
Stability
쮿 Laser beam steering & scanning
S-330 piezo tip/tilt platforms are 쮿 Correction of polygon scanner errors.
fast and compact tilt units, pro-
viding precise angular move-
ments of the top platform in
two orthogonal axes. The tip/tilt
range is ±1 mrad (special ver-
sion with ± 2.5 mrad available
on request) with sub-µrad reso-
lution. Closed-loop versions are
available for highest accuracy
and repeatability. S-330 sys-
tems are designed for mirrors
up to 50 mm diameter and have
outstanding angular stability
S-330.10 over a wide temperature range.
␪X␪Y Piezo Tip/Tilt Platform ±1 mrad, To match the CTE (coefficient
Closed-Loop of thermal expansion) of
S-330.30 Zerodur glass, the S-330 is
␪X␪Y Piezo Tip/Tilt Platform ±1 mrad
equipped with an invar top plat-
Custom Designs
form.

Technical Data
Models S-330.30 S-330.10 Units Notes
see p. 3-16
Active axes ␪X,␪Y ␪X,␪Y
Open-loop tilt angle @ 0 to 100 V ±1* ±1 mrad ±20% A2
Closed-loop tilt angle 욷 - ±1 mrad A3
Integrated feedback sensor - 4 x strain gauge B
Closed-loop / open-loop ** resolution 울 - / 0.05 0.1 / 0.05 µrad C1
Closed-loop linearity (typ.) - ±0.2 %
Full-range repeatability (typ.) - ±2 µrad C3
Electrical capacitance 3.6 / axis 3.6 / axis µF ±20% F1
*** Dynamic operating current coefficient (DOCC) 0.22 / axis 0.22 / axis µA/(Hz x µrad) F2
Resonant frequency (f0) without mirror 3.3 3.3 kHz ±20% G2
Resonant frequency w/ ⭋ 25 x 8 mm glass mirror 2.4 2.4 kHz ±20% G3
Distance, pivot point to platform surface (T) 6 6 mm
Platform moment of inertia 1530 1530 g⭈mm2
Operating temperature range - 20 to 80 - 20 to 80 °C H2
Voltage connection 3 x VL, 2 m cable 3 x VL, 2 m cable J1
Sensor connection - 1 x L, 2 m cable J2
Weight (w/o cables) 200 200 g ±5%
Material (case/platform) N-S / I N-S / I L
* Special version with ± 2.5 mrad a vaillable on request.
** Resolution of PZT tip/tilt platforms is not limited by friction or stiction. Noise equivalent motion with E-503 amplifier.
*** Dynamic Operating Current Coefficient in µA per hertz and µrad.
Example: Sinusoidal scan of 100 µrad at 10 Hz requires approximately 0.22 mA drive current.

For the latest specs visit www.tip-tilt-stage.com

Working Principle (see p.4-1 1 in the “Tutorial”
S-330 tilt Platforms are equip- section for behavior of open-
ped with two pairs of low-volt- loop piezos). The open-loop
age piezoelectric linear drives model is ideal for applications
(0 to 100 V) operating as a unit where the position is con- http://www.pi.ws
in push/pull mode (see figure trolled by an external loop, [email protected]
p.3-1 3 for schematic diagram). based on data provided by a
The stainless steel case is sensor (e.g. PSD quad cell,
equipped with an integrated, CCD chip, ...).
FEA-modeled (finite element
The closed-loop version is
analysis) circular flexure featur-
equipped with two pairs (one
ing zero stiction, zero friction
per axis) of strain gauge sen-
and exceptional guiding preci-
sors operated in a bridge cir-
sion. In open-loop operation,
cuit for ultra-high resolution
the platform angle roughly cor-
and angular stability. They pro-
responds to the drive voltage
vide sub-µrad resolution and
repeatability (with PI control
electronics).

S-330 dimensions (in mm)

For the latest specs visit www.tip-tilt-stage.com

 Single Axis Piezo Tilt Mirror for Optical Beam Steering

쮿 Sub-µrad Resolution Open- and Closed-Loop Applications

쮿 Sub-Millisecond Operation 쮿 Laser beam steering & scanning
Response In open-loop operation, the plat- 쮿 Beam switching
쮿 2.2 mrad Tilt Range form’s angular position is rough- 쮿 Correction of polygon scanner
쮿 Optional Position ly proportional to the drive volt- errors
쮿 Laser beam stabilization.
Feedback Sensor age (see p. 4-11 in the “Tutor-
쮿 Includes BK7 Mirror ial” section for behavior of
S-224/S-226 miniature tilt plat- open-loop piezos). The open-
forms are extremely fast and loop models are ideal for appli-
compact tilt units, providing a cations where the position is
tilt range of 2.2 mrad and sub- controlled by data provided by
millisecond response. The an external optical sensor, a
uni ts can be clamped at the CCD camera, etc. The closed-
S-224.00 flanges. The S-224 is specifi- loop version (S-226) allows
Piezo Tilt Platform 2.2 mrad with Mirror cally designed for open-loop absolute position control, high
S-226.00 operation. The S-226 closed- linearity, and repeatability ba-
Piezo Tilt Platform 2.2 mrad with Mirror, loop version is available for sed on the internal ultra-high-
Closed-Loop
highest accuracy. resolution feedback sensor.
Custom Designs
Working Principle
S-224/S-226 miniature tilt plat-
forms are equipped with low-
voltage piezoelectric linear
drives (0 to 100 V) pushing a Technical Data
frictionless, flexure-mounted Models S-224.00 S-226.00 Units Notes see
p. 3-16
platform. The flexure is FEA Active axes ␪X ␪X
(finite element analysis) mod- Open-loop tilt angle @ 0 to 100 V 2.2 2.2 mrad ±20% A2
eled for zero stiction, zero fric- Closed-loop tilt angle  - 2.2 mrad A3

tion and exceptional guiding Integrated feedback sensor - strain B

gauge
precision; it also serves as the Closed-loop / open-loop ** - / 0.05 0.1 / 0.05 µrad C1
pivot point and preload for the resolution 
Closed-loop linearity (typ.) - 0.2 %
PZT.
Full-range repeatability (typ.) - ±3 µrad C3
Electrical capacitance 1.8 1.8 µF ±20% F1
* Dynamic operating current µA/
coefficient (DOCC) 0.1 0.1 (Hz x µrad) F2
Unloaded resonant frequency (f0) 9.0 9.0 kHz ±20% G2
Resonant frequency w/ ⭋ 15 x 4 mm 7.5 7.5 kHz ±20% G3
glass mirror (included)
Resonant frequency w/ ⭋ 15 x 4 mm 5.7 5.7 kHz ±20% G3
copper mirror
Distance, pivot point to platform 4 4 mm
surface (T)
Platform moment of inertia 215 215 g⭈mm2
Operating temperature range - 20 to 80 - 20 to 80 °C H2
Voltage connection VL VL J1
Sensor connection - L J2
Weight (w/o cables) 98 98 g ±5%
Material (case / platform) N-S / N-S N-S / N-S L
Recommended amplifier/controller G, C H, D
S-224, S-226 dimensions (in mm) (codes explained p. 6-46)
* Dynamic Operating Current Coefficient in µA per hertz and µrad. Example:
Sinusoidal scan of 100 µrad at 10 Hz requires approximately 0.1 mA drive current.
** Resolution of PZT tip/tilt platforms is not limited by friction or stiction.
Noise equivalent motion with E-503 amplifier.

For the latest specs visit www.tip-tilt-stage.com

 Large Tip-Tilt Mirrors for Astronomical Telescopes

During the last decades, PI has tions required to correct for

designed several large-aper- image fluctuations, significant
ture tip/tilt systems for image forces can be induced in the
stabilization. Resolution in telescope structure, causing
large earthbound telescopes unwanted vibrations. x315}tbk{

is limited by atmospheric tur- To cancel these forces before

bulence and vibrations which they excite vibrations in the
cause image shifting. Piezo- structure, PI has developed
electrically driven active sec- momentum compensation
ondary mirrors significantly systems integrated into the
improve telescope resolution, tip/tilt platforms. Any vibration
up to 1000% during long inte- caused by the motion of the
grations, by correcting for mirror is canceled with an effi-
these image shifts in real ciency of up to 95% by the The Horsehead Nebula. Photo: Brian Lula. Active secondary tip/tilt mirror for the
United Kingdom Infra-Red Telescope
time. internal, piezoelectrically (UKIRT) on Mauna Kea, Hawaii, with
Hexapod 6-degree-of-freedom alignment
Momentum Compensation driven momentum-compen- system (for information on Hexapod
Due to the inertia of the large sation mechanism. x316}tbk{
systems see the “MicroPositioners”
section, p. 7-1 ff.).
mirrors and the high accelera- Mirror diameter: 314 mm
Tip/Tilt range: ±500 µrad
Resonant frequency: 280 Hz

Active secondary tip/tilt mirror

for ESO’s (European Southern
Observatory) 2.2 m telescope in
La Silla, Chile.
Mirror diameter: 100 mm
Tip/Tilt range: ±400 µrad
Resonant frequency: 900 Hz

Basic design of an active optics platform featuring three

actuators and four sensors

View inside the 8.2 meter optical infrared

Subaru Telescope on Hawaii. From
http://SubaruTelescope.org/index.html,
courtesy of NAOJ.

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