Thin Films Applications

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Thin Films and Spin Coating

Presented by Mallikarjunachari.G (AM12D005) email: [email protected] Department of Applied Mechanics

Indian Institute of Technology, Madras


Chennai - 600036

21 June 2012

Thin Films and Spin coating

Outline of Presentation:

Classification of Films Applications of Thin Films Spin Coating for Polymer Thin Films Modeling of spin coating Objective

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Mallikarjunachari.G

Date:

2/16

Thin Films and Spin coating

Outline of Presentation:

Classification of Films Applications of Thin Films Spin Coating for Polymer Thin Films Modeling of spin coating Objective

Size Material

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Mallikarjunachari.G

Date:

3/16

Thin Films and Spin coating Classification Applications

Spin coating

Modelling

Objective

Classification of Thin Films Based on material Thickness


Thick films Thin films Ultra thin films t > 300 nm 100 < t < 300 nm t < 100 nm
t film
substrate
Thin film: size reduction of bulk material in one direction

Single layer N=1


Aluminium

Multi layer N>1


Material 1 Material 2 Material 3 Material 4

substrate

substrate

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Mallikarjunachari.G

Date:

4/16

Thin Films and Spin coating Classification Applications

Spin coating

Modelling

Objective

Based on material type


Material type

Metal Eg: Al, Cu

Ceramic

Polymer Eg: PMMA, Epoxy resin

Eg: ZnO, ITO

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Mallikarjunachari.G

Date:

5/16

Thin Films and Spin coating

Outline of Presentation:

Classification of Films Applications of Thin Films Spin Coating for Polymer Thin Films Modeling of spin coating Objective

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Mallikarjunachari.G

Date:

6/16

Thin Films and Spin coating Classification Applications

Spin coating

Modelling

Objective

Applications
Electronic Components Electronic Displays Optical Coatings

Magnetic Films for data storage

Optical data storage devices

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Mallikarjunachari.G

Date:

7/16

Thin Films and Spin coating

Outline of Presentation:

Classification of Films Applications of Thin Films Spin Coating for Polymer Thin Films Modeling of spin coating Objective

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Mallikarjunachari.G

Date:

8/16

Thin Films and Spin coating Classification Applications

Spin coating

Modelling

Objective

Schematic Representation of spin coating

Spin 150 Single substrate spin processor

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Mallikarjunachari.G

Date:

9/16

Thin Films and Spin coating

Outline of Presentation:

Classification of Films Applications of Thin Films Spin Coating for Polymer Thin Films Modeling of spin coating Objective

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Mallikarjunachari.G

Date:

10/16

Thin Films and Spin coating Classification Applications

Spin coating

Modelling

Objective

Modeling of spin coating


Key stages:
Deposition
>0

Step 1

Spin - up
= 0

Step 2

Spin - off

Step 3

Evaporation

Step 4

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Mallikarjunachari.G

Date:

11/16

Thin Films and Spin coating Classification Applications

Spin coating

Modelling

Objective

Modeling of spin coating

Film Thickness

Film Thickness

Spin Speed

Spin Time

Thickness Uniformity

Film Thickness

Exhaust Volume
1 2 3 4 5 6 7 8 9 10 11 12 13 14

Exhaust Volume

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Mallikarjunachari.G

Date:

12/16

Thin Films and Spin coating

Outline of Presentation:

Classification of Films Applications of Thin Films Spin Coating for Polymer Thin Films Modeling of spin coating Objective

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Mallikarjunachari.G

Date:

13/16

Thin Films and Spin coating Classification Applications

Spin coating

Modelling

Objective

Objective:
Adhesion: A challenge for concrete repair
Substrate Coating Material Polymer

Cement

Clay

Water

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Mallikarjunachari.G

Date:

14/16

Thin Films and Spin coating Classification Applications

Spin coating

Modelling

Objective

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Mallikarjunachari.G

Date:

15/16

Thin Films and Spin coating Classification Applications

Spin coating

Modelling

Objective

Thank You

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Mallikarjunachari.G

Date:

16/16

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