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This paper provides an overview of quartz crystal resonators, focusing on their operational principles, manufacturing processes, and design considerations. Various crystal cuts, like the AT-cut and SC-cut, are highlighted for their unique properties, including resonance frequency and temperature coefficients. Additionally, the impact of dimensions, electrode materials, and design configurations on resonator performance is discussed, along with relevant technological advancements.
2007
Materials in the LGT family are promising for designing bulk acoustic wave resonators with high quality factor. In our laboratory, we have manufactured a lot of planoconvex 10 MHz 5 th overtone Y-cut resonators using LGS (langasite La 3 Ga 5 SiO 14 ) and LGT (langatate La 3 Ga 5.5 Ta 0.5 O 14 ) crystals.
Solid State Sciences, 2010
The present paper reviews and compares the properties of vibrating beam resonators in length-extensional, flexural and cylindrical-torsional modes; resonators are designed and built with new piezoelectric materials: Gallium orthophosphate (GaPO 4), Langasite (LGS) and Langatate (LGT). Their characteristics are compared with the results obtained with the same structures built in classical Quartz crystal. For all 3 new crystals, temperature-compensated cuts have been found for length-extensional and flexural modes by a theoretical analysis. Experiments have been made on test beams fabricated by conventional precision lapping/machining and photolithography to deposit electrodes. The existence of temperature-compensated cuts for length-extensional resonators is experimentally confirmed. The possibilities of using temperature-compensated cylindrical resonators in the torsional modes are analysed and their temperature sensitivity is computed.
2008
In this paper, new experiments have been carried out on LGS crystal to highlight the existence of temperature compensated cuts for flexure vibration. The micro-resonators are square cross section tuning forks whose arms are vibrating in flexure-mode with clamped-free boundary conditions. Frequency versus temperature behaviors have been measured for several cut angles. The results of our experiments show that there is a first order temperature-compensated cut for Langasite crystal resonators vibrating in flexion at room temperature.
IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control, 2006
In this letter, we present experimental data showing Q change versus thickness for a quartz-crystal resonator fabricated with deep-reactive ion etching. Measurements show that Q increases as etch depth increases, and further that Q can be optimized as a function of etch depth and diameter of the resonator.
IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, 1992
Revue de Physique Appliquée, 1989
2014 Nous avons développé un modèle théorique qui décrit l'influence des états géométriques de surface sur le coefficient de qualité de résonateurs à quartz. Dans ce modèle la surface des résonateurs usinés chimiquement est représentée par une succession de facettes triangulaires planes d'orientation diverses. Le coefficient de réflexion d'une onde diffractée par une facette d'orientation donnée est calculé en prenant en compte l'anisotropie du milieu de propagation. L'atténuation supplémentaire que subissent les ondes acoustiques après réflexion sur les surfaces rugueuses du résonateur est alors fonction du critère de rugosité Rq et de la taille moyenne des facettes. Une étude expérimentale de l'évolution des états géométriques de surface et des variations du coefficient de qualité Q*F, avec la profondeur d'attaque 0394ds de lames de quartz d'orientation 03B8 = 2014 49° a été entreprise. Elle a montré que l'évolution du coefficient est corrélée aux divers états géométriques successifs qui se développent sur des surfaces de quartz usinées chimiquement. Une comparaison des courbes théoriques (Q*F, 0394ds) avec les courbes expérimentales a révélé un bon accord entre la théorie et l'expérience dès que la taille des figures de dissolution n'est pas trop petite devant la longueur d'onde.
IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, 2009
IEEE Transactions on Sonics and Ultrasonics, 1979
The frequency-temperature cf-T) behavior of a crystal resonator depends upon temperature,and its spatial and temporal gradients. For quasi-isothermal changes the static f-T curve can be used to determine frequency shifts that occur, e.g., in oven-controlled units. The frequency then depends upon the parameters of the static f-T curve, the temperature range over which the oven cycles, and upon the oven setting point. The maximum frequency excursion has been computed for the A T and SC cuts of quartz in terms of these parameters as a function of the orientation angle. When thermal-transient-compensated cuts are not utilized, oven cyclings or other temperature perturbations introduce an additional nonnegligible component of the frequency shift. This effect is quantified by means of a simple mathematical model. The model is capable of predicting the thermal transient effects for A T cuts appearing in the literature. Simulations, using the model, disclose that sinusoidal temperature variations with periods of hours can readily lead to frequency instabilities much larger than would be expected using the static f-T curve for the A T cut. This effect should be greatly diminished in the vicinity of the SC cut.
International conference Fluid Power 2019: Conference Proceedings, 2019
The International Fluid Power Conference is a two day event, intended for all those professionally-involved with hydraulic or pneumatic power devices and for all those, wishing to be informed about the 'state of the art', new discoveries and innovations within the field of hydraulics and pneumatics. The gathering of experts at this conference in Maribor has been a tradition since 1995, and is organised by the Faculty of Mechanical Engineering at the University of Maribor, in Slovenia. Fluid Power conferences are organised every second year and cover those principal technical events within the field of fluid power technologies in Slovenia, and throughout this region of Europe. This year's conference is taking place on the 19th and 20th September in Maribor.
This is a draft version including footnotes that are missing in the version that will be published. The essay is forthcoming in: Historical Understanding: Past, Present and Future. Eds. Zoltán Boldizsár Simon and Lars Deile (London: Bloomsbury, 2021), 2021
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