A torsional structure for monolithical laser beam steering is proposed. The steering part of the ... more A torsional structure for monolithical laser beam steering is proposed. The steering part of the device is a torsional actuator and an edge emitting laser is integrated to the torsional beam. The device steers the laser beam in the direction perpendicular to the substrate. Index Terms — Optoelectronic devices, optical networks, DWDM systems, optical MEMS, laser display, optical switch.
Page 1. Low Drift and High Sensitivity Fiber Optic Gyroscope Using Tunable VCSEL as Optical Sourc... more Page 1. Low Drift and High Sensitivity Fiber Optic Gyroscope Using Tunable VCSEL as Optical Source Carlos FR Mateus, Member, IEEE, Camila D. Sardeto and Carmem Lúcia Barbosa Instituto de Estudos Avançados IEAv/CTA Rod. ...
Resumo-Atualmente, o acelerômetro piezoelétrico é o transdutor mais utilizado para monitoração de... more Resumo-Atualmente, o acelerômetro piezoelétrico é o transdutor mais utilizado para monitoração de vibração. Essa aplicação tem ganhado muito destaque em áreas de manutenção preditiva e preventiva de máquinas em todos os setores da indústria. No entanto, após certo tempo de uso, é necessário verificar a confiabilidade de suas medidas através do processo de calibração. Os objetivos desse trabalho são fornecer algumas informações básicas sobre esse tipo de transdutor, realizar uma análise metrológica do método de calibração por comparação (back to back method), assim como, identificar suas principais componentes de incertezas.
Lasers and Electro-Optics Society, IEEE LEOS Annual Meeting, 1999
The polarization isolation of birefringent fiber half-couplers is locally observed and characteri... more The polarization isolation of birefringent fiber half-couplers is locally observed and characterized when the device is submitted to the various steps of its fabrication. After stripping and aligning the fiber, the polarization is not affected. The mode coupling rises to the order of -40 dB after cementing and -20 dB after polishing. When the substrate is released from the jig,
Frontiers in Optics 2004/Laser Science XXII/Diffractive Optics and Micro-Optics/Optical Fabrication and Testing, 2004
Page 1. Design of Ultra-Wide Continuously Tunable Optical Filter Using Sub-Wavelength Grating Ref... more Page 1. Design of Ultra-Wide Continuously Tunable Optical Filter Using Sub-Wavelength Grating Reflectors Michael CY Huang, Carlos FR Mateus, Karen Lee, Devang Parekh, and Connie J. Chang-Hasnain Department of Electrical ...
This work describes a static mechanical analysis of a microaccelerometer. This accelerometer is f... more This work describes a static mechanical analysis of a microaccelerometer. This accelerometer is fabricated by bulk micromachining of silicon in KOH solution. The mechanical part of this device consists of an inertial mass suspended by four silicon beams fixed at the edges. The calculation of the equivalent spring constant is done using basic solid mechanics theory. Both large and small deflections cases are analyzed in this study. We determined the Young's modulus and Poisson's ratio according to the crystallographic orientation of the silicon beams. The calculation of the mass and the second moment of area is evaluated taking into account the hexagonal cross section formed during the bulk-micromachined process. The maximum normal stress failure criteria is utilized to determine the maximum stress in the mechanical structure for a given load. The effective mass of the system is calculated discussing the influence of the mass of the beams in the natural frequency and in the static sensitivity of the system. The validity of the model is discussed according to the assumptions and simplifications made. Finally, all analytical results are compared with the ones obtained by the finite element method (FEM). The results show a good agreement between the two methods, validating the analytical model for this kind of analysis.
2007 SBMO/IEEE MTT-S International Microwave and Optoelectronics Conference, 2007
Page 1. Harsh Environment Temperature and Strain Sensor Using Tunable VCSEL and Multiple Fiber Br... more Page 1. Harsh Environment Temperature and Strain Sensor Using Tunable VCSEL and Multiple Fiber Bragg Gratings Carlos FR Mateus, Member, IEEE, and Carmem Lúcia Barbosa Instituto de Estudos Avançados IEAv/CTA Rod. ...
1999 SBMO/IEEE MTT-S International Microwave and Optoelectronics Conference, 1999
Measurements of polarization cross-coupling in a polarization-maintaining fiber (3M FS-PM-6621) u... more Measurements of polarization cross-coupling in a polarization-maintaining fiber (3M FS-PM-6621) under two coiling situations are carried out by optical coherence domain polarimetry. In the first situation, it is coiled around a 25.4 mm diameter piezoelectric tube and the applied voltage is increased from 0 to 900 V. In the second, the fiber is tension-coiled around a 24.6 mm diameter passive
1999 SBMO/IEEE MTT-S International Microwave and Optoelectronics Conference, 1999
Page 1. Modeling of' Birefringent Fiber-optic Directional Couplers Carlos FR Mateus, And... more Page 1. Modeling of' Birefringent Fiber-optic Directional Couplers Carlos FR Mateus, AndrC C. da Silva and JosC EB Oliveira Abstract - Extending a coupled mode theory of directional couplers with parallel step index fibers, an ...
Page 1. Low Power, High Sensitivity Temperature Sensor Using Fiber Bragg Gratings and VCSEL Carlo... more Page 1. Low Power, High Sensitivity Temperature Sensor Using Fiber Bragg Gratings and VCSEL Carlos FR Mateus, Member, IEEE, and Carmem Lúcia Barbosa Instituto de Estudos Avançados IEAv/CTA Rod. dos Tamoios ...
Microarrays and Combinatorial Techniques: Design, Fabrication, and Analysis II, 2004
We report a label-free, highly sensitive biosensor using a vertical cavity surface emitting laser... more We report a label-free, highly sensitive biosensor using a vertical cavity surface emitting laser (VCSEL) based measurement system for the detection and monitoring of biomolecular interactions. The sensor system consists of a VCSEL, a plastic guided mode resonant (GMR) filter, and two pin detectors. The system has several advantages such as extreme compactness, high sensitivity, high throughput, fast measurements, low
In this work, we describe dynamic modeling and simulation of a capacitive silicon bulk-micromachi... more In this work, we describe dynamic modeling and simulation of a capacitive silicon bulk-micromachined microaccelerometer. The modeling of the mechanical part is done through equivalent stiffness and equivalent damping coefficients analyses using the Euler-Bernoulli equation and the Modified Reynolds equation, respectively. A dynamic model is obtained taking into account the electric force influence between the electrodes. Nonlinear and linear models are compared. The analytical results are compared with numerical results obtained by computational method in both time-domain and frequencydomain and it show a quite good agreement.
General design rules and the scaling laws with wavelength for MEMS tunable optical filters are di... more General design rules and the scaling laws with wavelength for MEMS tunable optical filters are discussed for the first time. We describe how to determine dimensions and component materials from the system requirements such as tuning range, central wavelength, tuning voltage, tuning speed and resolution. The systematic design allows fair comparison among different topologies such as cantilever, bridge and trampoline.
In order to evaluate the potential of amorphous silicon carbide (a-SiC) films for piezoresistive ... more In order to evaluate the potential of amorphous silicon carbide (a-SiC) films for piezoresistive sensors applications, a pressure sensor has been developed based on this material. The deposition conditions and properties of a-SiC films deposited on thermally oxidized (100) Si substrates by two techniques enhanced by plasma, PECVD (plasma enhanced chemical vapor deposition) and RF magnetron sputtering, are briefly described and compared. Among the SiC films produced, we choose the nitrogendoped PECVD SiC film to fabricate the piezoresistors of the sensor. The structure of the sensor consists of six a-SiC piezoresistors, configured in Wheatstone bridge, on a SiO 2 / Si square diaphragm. The sensor was tested for applied pressure ranging from 0 to 12 psi and supply voltage of 12 V. A preliminary study of the influence of the temperature on the performance of the sensor was performed by experimental measurements and theoretical investigations.
We report on the detection of human anti-dengue antibodies from serum samples using a compact opt... more We report on the detection of human anti-dengue antibodies from serum samples using a compact optoelectronic label-free biosensor. The system consists of a tunable vertical-cavity surface-emitting laser, guided-mode resonant sensor surface, and two silicon pin detectors. This novel biosensor demonstrated sufficient sensitivity in a clinical-relevant assay, making it a potential new platform for simplified and rapid point-of-care diagnostic tests for the detection of infectious diseases.
A torsional structure for monolithical laser beam steering is proposed. The steering part of the ... more A torsional structure for monolithical laser beam steering is proposed. The steering part of the device is a torsional actuator and an edge emitting laser is integrated to the torsional beam. The device steers the laser beam in the direction perpendicular to the substrate. Index Terms — Optoelectronic devices, optical networks, DWDM systems, optical MEMS, laser display, optical switch.
Page 1. Low Drift and High Sensitivity Fiber Optic Gyroscope Using Tunable VCSEL as Optical Sourc... more Page 1. Low Drift and High Sensitivity Fiber Optic Gyroscope Using Tunable VCSEL as Optical Source Carlos FR Mateus, Member, IEEE, Camila D. Sardeto and Carmem Lúcia Barbosa Instituto de Estudos Avançados IEAv/CTA Rod. ...
Resumo-Atualmente, o acelerômetro piezoelétrico é o transdutor mais utilizado para monitoração de... more Resumo-Atualmente, o acelerômetro piezoelétrico é o transdutor mais utilizado para monitoração de vibração. Essa aplicação tem ganhado muito destaque em áreas de manutenção preditiva e preventiva de máquinas em todos os setores da indústria. No entanto, após certo tempo de uso, é necessário verificar a confiabilidade de suas medidas através do processo de calibração. Os objetivos desse trabalho são fornecer algumas informações básicas sobre esse tipo de transdutor, realizar uma análise metrológica do método de calibração por comparação (back to back method), assim como, identificar suas principais componentes de incertezas.
Lasers and Electro-Optics Society, IEEE LEOS Annual Meeting, 1999
The polarization isolation of birefringent fiber half-couplers is locally observed and characteri... more The polarization isolation of birefringent fiber half-couplers is locally observed and characterized when the device is submitted to the various steps of its fabrication. After stripping and aligning the fiber, the polarization is not affected. The mode coupling rises to the order of -40 dB after cementing and -20 dB after polishing. When the substrate is released from the jig,
Frontiers in Optics 2004/Laser Science XXII/Diffractive Optics and Micro-Optics/Optical Fabrication and Testing, 2004
Page 1. Design of Ultra-Wide Continuously Tunable Optical Filter Using Sub-Wavelength Grating Ref... more Page 1. Design of Ultra-Wide Continuously Tunable Optical Filter Using Sub-Wavelength Grating Reflectors Michael CY Huang, Carlos FR Mateus, Karen Lee, Devang Parekh, and Connie J. Chang-Hasnain Department of Electrical ...
This work describes a static mechanical analysis of a microaccelerometer. This accelerometer is f... more This work describes a static mechanical analysis of a microaccelerometer. This accelerometer is fabricated by bulk micromachining of silicon in KOH solution. The mechanical part of this device consists of an inertial mass suspended by four silicon beams fixed at the edges. The calculation of the equivalent spring constant is done using basic solid mechanics theory. Both large and small deflections cases are analyzed in this study. We determined the Young's modulus and Poisson's ratio according to the crystallographic orientation of the silicon beams. The calculation of the mass and the second moment of area is evaluated taking into account the hexagonal cross section formed during the bulk-micromachined process. The maximum normal stress failure criteria is utilized to determine the maximum stress in the mechanical structure for a given load. The effective mass of the system is calculated discussing the influence of the mass of the beams in the natural frequency and in the static sensitivity of the system. The validity of the model is discussed according to the assumptions and simplifications made. Finally, all analytical results are compared with the ones obtained by the finite element method (FEM). The results show a good agreement between the two methods, validating the analytical model for this kind of analysis.
2007 SBMO/IEEE MTT-S International Microwave and Optoelectronics Conference, 2007
Page 1. Harsh Environment Temperature and Strain Sensor Using Tunable VCSEL and Multiple Fiber Br... more Page 1. Harsh Environment Temperature and Strain Sensor Using Tunable VCSEL and Multiple Fiber Bragg Gratings Carlos FR Mateus, Member, IEEE, and Carmem Lúcia Barbosa Instituto de Estudos Avançados IEAv/CTA Rod. ...
1999 SBMO/IEEE MTT-S International Microwave and Optoelectronics Conference, 1999
Measurements of polarization cross-coupling in a polarization-maintaining fiber (3M FS-PM-6621) u... more Measurements of polarization cross-coupling in a polarization-maintaining fiber (3M FS-PM-6621) under two coiling situations are carried out by optical coherence domain polarimetry. In the first situation, it is coiled around a 25.4 mm diameter piezoelectric tube and the applied voltage is increased from 0 to 900 V. In the second, the fiber is tension-coiled around a 24.6 mm diameter passive
1999 SBMO/IEEE MTT-S International Microwave and Optoelectronics Conference, 1999
Page 1. Modeling of' Birefringent Fiber-optic Directional Couplers Carlos FR Mateus, And... more Page 1. Modeling of' Birefringent Fiber-optic Directional Couplers Carlos FR Mateus, AndrC C. da Silva and JosC EB Oliveira Abstract - Extending a coupled mode theory of directional couplers with parallel step index fibers, an ...
Page 1. Low Power, High Sensitivity Temperature Sensor Using Fiber Bragg Gratings and VCSEL Carlo... more Page 1. Low Power, High Sensitivity Temperature Sensor Using Fiber Bragg Gratings and VCSEL Carlos FR Mateus, Member, IEEE, and Carmem Lúcia Barbosa Instituto de Estudos Avançados IEAv/CTA Rod. dos Tamoios ...
Microarrays and Combinatorial Techniques: Design, Fabrication, and Analysis II, 2004
We report a label-free, highly sensitive biosensor using a vertical cavity surface emitting laser... more We report a label-free, highly sensitive biosensor using a vertical cavity surface emitting laser (VCSEL) based measurement system for the detection and monitoring of biomolecular interactions. The sensor system consists of a VCSEL, a plastic guided mode resonant (GMR) filter, and two pin detectors. The system has several advantages such as extreme compactness, high sensitivity, high throughput, fast measurements, low
In this work, we describe dynamic modeling and simulation of a capacitive silicon bulk-micromachi... more In this work, we describe dynamic modeling and simulation of a capacitive silicon bulk-micromachined microaccelerometer. The modeling of the mechanical part is done through equivalent stiffness and equivalent damping coefficients analyses using the Euler-Bernoulli equation and the Modified Reynolds equation, respectively. A dynamic model is obtained taking into account the electric force influence between the electrodes. Nonlinear and linear models are compared. The analytical results are compared with numerical results obtained by computational method in both time-domain and frequencydomain and it show a quite good agreement.
General design rules and the scaling laws with wavelength for MEMS tunable optical filters are di... more General design rules and the scaling laws with wavelength for MEMS tunable optical filters are discussed for the first time. We describe how to determine dimensions and component materials from the system requirements such as tuning range, central wavelength, tuning voltage, tuning speed and resolution. The systematic design allows fair comparison among different topologies such as cantilever, bridge and trampoline.
In order to evaluate the potential of amorphous silicon carbide (a-SiC) films for piezoresistive ... more In order to evaluate the potential of amorphous silicon carbide (a-SiC) films for piezoresistive sensors applications, a pressure sensor has been developed based on this material. The deposition conditions and properties of a-SiC films deposited on thermally oxidized (100) Si substrates by two techniques enhanced by plasma, PECVD (plasma enhanced chemical vapor deposition) and RF magnetron sputtering, are briefly described and compared. Among the SiC films produced, we choose the nitrogendoped PECVD SiC film to fabricate the piezoresistors of the sensor. The structure of the sensor consists of six a-SiC piezoresistors, configured in Wheatstone bridge, on a SiO 2 / Si square diaphragm. The sensor was tested for applied pressure ranging from 0 to 12 psi and supply voltage of 12 V. A preliminary study of the influence of the temperature on the performance of the sensor was performed by experimental measurements and theoretical investigations.
We report on the detection of human anti-dengue antibodies from serum samples using a compact opt... more We report on the detection of human anti-dengue antibodies from serum samples using a compact optoelectronic label-free biosensor. The system consists of a tunable vertical-cavity surface-emitting laser, guided-mode resonant sensor surface, and two silicon pin detectors. This novel biosensor demonstrated sufficient sensitivity in a clinical-relevant assay, making it a potential new platform for simplified and rapid point-of-care diagnostic tests for the detection of infectious diseases.
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Papers by Carlos Mateus