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Adrian Dinescu

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Papers by Adrian Dinescu

Microfabrication and experimental characterization of an Out-of-Plane MEMS switch

This paper presents an approach to improve the performance of a MicroElectro-Mechanical (MEMS) sw... more This paper presents an approach to improve the performance of a MicroElectro-Mechanical (MEMS) switch with vertical movement, manufactured using surface micromachining technology. We focused on the investigations of the critical technological dimensions (gap, thickness of the arms) in order to obtain a released, stable mechanical structure and to avoid the stiction effect of the metallic shapes. Technological experiments, Scanning Electron Microscopy (SEM) investigations, CoventorWare and Comsol simulations were performed in order to investigate the electro-thermo-mechanical behaviour of the switch. Key-words: MEMS switch, thermal actuator, microfabrication, sacrificial layer.

Silicon Metalens Fabrication from Electron Beam to UV-Nanoimprint Lithography

Nanomaterials, 2021

This study presents the design and manufacture of metasurface lenses optimized for focusing light... more This study presents the design and manufacture of metasurface lenses optimized for focusing light with 1.55 µm wavelength. The lenses are fabricated on silicon substrates using electron beam lithography, ultraviolet-nanoimprint lithography and cryogenic deep reactive-ion etching techniques. The designed metasurface makes use of the geometrical phase principle and consists of rectangular pillars with target dimensions of height h = 1200 nm, width w = 230 nm, length l = 354 nm and periodicity p = 835 nm. The simulated efficiency of the lens is 60%, while the master lenses obtained by using electron beam lithography are found to have an efficiency of 45%. The lenses subsequently fabricated via nanoimprint are characterized by an efficiency of 6%; the low efficiency is mainly attributed to the rounding of the rectangular nanostructures during the pattern transfer processes from the resist to silicon due to the presence of a thicker residual layer.

Memtransistors Based on Nanopatterned Graphene Ferroelectric Field-Effect Transistors

Nanomaterials, 2020

The ultimate memristor, which acts as resistive memory and an artificial neural synapse, is made ... more The ultimate memristor, which acts as resistive memory and an artificial neural synapse, is made from a single atomic layer. In this manuscript, we present experimental evidence of the memristive properties of a nanopatterned ferroelectric graphene field-effect transistor (FET). The graphene FET has, as a channel, a graphene monolayer transferred onto an HfO2-based ferroelectric material, the channel being nanopatterned with an array of holes with a diameter of 20 nm.

Graphene bandgap induced by ferroelectric HfO2 doped with Zr (HfZrO)

Nanotechnology, 2020

e show experimentally that the ferroelectric HfZrO induces a bandgap of 0.18 eV in graphene monol... more e show experimentally that the ferroelectric HfZrO induces a bandgap of 0.18 eV in graphene monolayer. The experiments are performed on top-gate graphene/HfZrO transistors showing a very high transconductance of 1 mS and very carrier mobilities of 7900 cm2/Vs. SiC and hexagonal boron nitride induce also a bandgap in graphene, but HfZrO is a CMOS compatible material which can be deposited on large Si wafers.

MoS2 radio: detecting radio waves with a two-dimensional transition metal dichalcogenide semiconductor

Nanotechnology, 2019

Access to the full text of the published version may require a subscription.

Electromagnetic energy harvesting based on HfZrO tunneling junctions

Nanotechnology, 2018

HfZrO ferroelectrics with a thickness of 6 nm were grown directly on Si using atomic layer deposi... more HfZrO ferroelectrics with a thickness of 6 nm were grown directly on Si using atomic layer deposition, top and bottom metallic electrodes being subsequently deposited by electron-beam metallization techniques. Depending on the polarity of the 10 V poling voltages, the currentvoltage dependence of these tunneling diodes shows a rectifying behavior for different polarizations, the ON-OFF ratio being about 10 4. Because the currents are at mA level, the HfZrO tunneling diodes coupled to an antenna array can harvest electromagnetic energy at 26 GHz (a bandwidth designated for Internet of Things-IoT), with a responsivity of 63 V/W and a NEP of 4 nW/Hz 0.5 .

Very large phase shift of microwave signals in a 6 nm Hf x Zr1−x O2 ferroelectric at ±3 V

Nanotechnology, 2017

In this letter, we report for the first time very large phase shifts of microwaves in the 1-10 GH... more In this letter, we report for the first time very large phase shifts of microwaves in the 1-10 GHz range, in a 1-mm-long gold coplanar interdigitated structure deposited over 6 nm Hf x Zr 1x O 2 ferroelectric grown directly on a high-resistivity silicon substrate. The phase shift is larger than 60 o at 1 GHz and 13 o at 10 GHz at maximum applied DC voltages of  3 V, which can be supplied by a simple commercial battery. In this way, we demonstrate experimentally that the new ferroelectrics based on HfO 2 could play an important role in the future development of wireless communication systems for very low power applications.

Systems and Methods for Assessing the Authenticity of Dynamic Handwritten Signature

Selective chemical sensor for liquid specimens based on lithium tantalate surface acoustic wave devices

2015 International Semiconductor Conference (CAS), 2015

We report in this paper the fabrication and characterization of a 121 MHz delay-line SAW device s... more We report in this paper the fabrication and characterization of a 121 MHz delay-line SAW device selective chemical sensor micro-fabricated on 36° rotated Y-cut X-propagating LiTaO3. A custom designed test fixture was manufactured for RF measurements. The proof of the sensor concept was based on detection of high molecular weight targets in liquid samples. Thus, the antigen-antibody label-free interaction was studied by monitoring the variation of the angle phase of SAW sensor with the concentration of some target biological analyte.

The electromagnetic properties of graphene in the microwave and millimeterwave spectrum

ABSTRACT The electromagnetic properties of graphene are neither well known nor well understood. T... more ABSTRACT The electromagnetic properties of graphene are neither well known nor well understood. Therefore, the aim of this paper is to present them in a coherent manner. We present first the graphene coplanar waveguide and its properties, and describe afterwards experiments involving these coplanar waveguides that are able to determine the electrical permittivity of graphene and the ability to tune electrically the phase of microwave and millimeterwave signals. The entire paper demonstrates that graphene displays unparallel electromagnetic properties enabling new microwave devices.

Realization of spiral phase plates by 3D lithography

Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies VII, 2015

In this paper we will present two technological processes necessary to experimentally obtain diff... more In this paper we will present two technological processes necessary to experimentally obtain diffractive optical elements (DOE) operating in reflection which generate optical beams presenting orbital angular momentum. This class of DOE, also known as spiral phase plates (SPP), are three-dimensional structures consisting in disks where the variation of their thickness is directly proportional with the azimuthal angle Φ. In this case a beam of light applied on the SPP surface acquires an angular orbital momentum (OAM) and a vortex – like configuration. The first technique is the 3D electron beam lithography (EBL). The materials utilized in this case are the positive electronresist PMMA 35 K which has a deposition thickness of 500 nm and the negative electronresist SU8. To obtain the three dimensional structure, the PMMA and SU-8 films were configured by different exposure doses such that after development process each exposure corresponds to a defined thickness of the electronresist. The calibration curve between exposure dose and the height of the structure was determined. The second technique investigated here is photolithography. In this case a photoresist layer was exposed through a mask presenting regions with various levels of transmittance in order to obtain different levels of heights.

The influence of the deposition time on morphological and optical properties of Cu x S films deposited on polypropylene substrate

Materials Science-Poland, 2013

Copper sulfide (CuxS) films deposited on polypropylene substrate were obtained by chemical bath d... more Copper sulfide (CuxS) films deposited on polypropylene substrate were obtained by chemical bath deposition (CBD) method. The influence of the deposition time on the morphology of CuxS films was studied by means of scanning electron microscopy. We have found that the average particles dimension increased from 37 to 49 nm with the increase of deposition time from 20 to 30 minutes. The study of optical properties of the copper sulfide films was carried out based on optical transmission spectra recorded in the 400–1000 nm wavelength range. The optical constants, such as refractive index, extinction coefficient and dielectric constant as well as electrical and optical conductivity of CuxS films were calculated. The obtained values are in accordance with the ones reported in the literature:We have shown that both, morphological and optical properties of CuxS films are strongly affected by the deposition time.

Design of Antimicrobial Membrane Based on Polymer Colloids/Multiwall Carbon Nanotubes Hybrid Material with Silver Nanoparticles

ACS Applied Materials & Interfaces, 2014

The aim of this study was to obtain membranes with antimicrobial activity presenting a complex sa... more The aim of this study was to obtain membranes with antimicrobial activity presenting a complex sandwichtype structure. The outer layers are comprised of poly(methyl methacrylate) membranes, whereas the inner active layer consists of a modified commercial membrane to achieve antimicrobial properties. This activity arises due to the presence of silver nanoparticles in a material with a hybrid composition deposited on a commercial membrane. This hybrid material consists of polymer colloids and multiwall carbon nanotubes used for both the stabilization of the active layer by the interconnections of the polymer particles and as active component. The filtration tests revealed a good stability of the materials and an increased hydrophilicity of the hybrid membranes. The antimicrobial properties have been evaluated using Staphylococcus aureus and Escherichia coli, and have been correlated with the content and migration rate of silver ions.

48 GHz zeroth order resonance metamaterial antenna on alumina substrate

2012 16th IEEE Mediterranean Electrotechnical Conference, 2012

The paper presents a zeroth order resonance Composite Right/Left-Handed (CRLH) coplanar waveguide... more The paper presents a zeroth order resonance Composite Right/Left-Handed (CRLH) coplanar waveguide (CPW) antenna on AlSiMag 614 alumina substrate. The device was designed, microprocessed and tested for millimeter wave frequency range (48 GHz). Experimental results for two antenna samples show return loss of −22.72 dB at f = 47.95 GHz and −19.26 dB at f = 48.12 GHz, respectively. The

Nanostructured Fe doped ZnO: TiO<inf>2</inf> for gas sensors applications

CAS 2012 (International Semiconductor Conference), 2012

ABSTRACT

Raman spectroscopy investigation of electron beam irradiated graphene

2014 International Semiconductor Conference (CAS), 2014

Structural modification of graphene after direct electron beam irradiation (acceleration voltages... more Structural modification of graphene after direct electron beam irradiation (acceleration voltages of 3 kV and 5 kV and exposure doses 200, 400, 800 μC/cm<sup>2</sup>) has been investigated by using micro-Raman spectroscopy. The amplitudes ratio - I<sub>D</sub>/I<sub>G</sub> and I<sub>2D</sub>/I<sub>G</sub> versus exposure doses for each acceleration voltage extracted from Raman spectra acquisitions with red laser (633 nm) are evidencing the increasing degradation of single layer graphene at low exposure doses.

Sensor system for on-line monitoring of cell cultures

2009 International Semiconductor Conference, 2009

The paper is presenting the development of a sensor system dedicated to monitor the environment o... more The paper is presenting the development of a sensor system dedicated to monitor the environment of eukaryotic cells culture acting as biosensors for toxins detection. The system we are presenting is containing pH, and temperature sensors integrated into microfluidic channels. The sensors have the role to characterize the cells living conditions (temperature and pH) and are monitoring the cell biochip

Porous silicon decorated metallic nanoparticles for growing vertically aligned carbon nanotubes

CAS 2012 (International Semiconductor Conference), 2012

ABSTRACT Carbon nanotubes have been envisioned as promising functional materials in nanoelectroni... more ABSTRACT Carbon nanotubes have been envisioned as promising functional materials in nanoelectronics and electron field emitters. All these applications require that the CNT are highly oriented. There are many studies to improve the growth process but only few research studies have investigated new methods to deposit metallic nanoparticles on the porous silicon. Thus this paper is aiming at synthesizing metallic nanoparticles on top of porous silicon.

Securing On-line Payment using Dynamic Signature Verification

Journal of System and …, 2011

Involvement of cyan and ester groups in surface interactions of aerosil–cyanophenyl alkyl benzoate systems with high silica density: Infrared investigations

Spectrochimica Acta Part A: Molecular and Biomolecular Spectroscopy, 2010

Rezultatele activităţii de Cercetare Dezvoltare 7.1. Lucrări ştiinţifice/tehnice publicate în rev... more Rezultatele activităţii de Cercetare Dezvoltare 7.1. Lucrări ştiinţifice/tehnice publicate în reviste de specialitate cotate ISI 7.2. Factor de impact cumulat al lucrarilor cotate ISI: 7.3. Citări în reviste de specialitate cotate ISI: 7.4. Brevete de invenţie (solicitate/acodate) 7.1. Lucrări ştiinţifice/tehnice publicate în reviste de specialitate cotate ISI (titlul, revista, autori) 1. "6.3 GHz Film Bulk Acoustic Resonator Structures Based on a Gallium Nitride/Silicon Thin Membrane

Microfabrication and experimental characterization of an Out-of-Plane MEMS switch

This paper presents an approach to improve the performance of a MicroElectro-Mechanical (MEMS) sw... more This paper presents an approach to improve the performance of a MicroElectro-Mechanical (MEMS) switch with vertical movement, manufactured using surface micromachining technology. We focused on the investigations of the critical technological dimensions (gap, thickness of the arms) in order to obtain a released, stable mechanical structure and to avoid the stiction effect of the metallic shapes. Technological experiments, Scanning Electron Microscopy (SEM) investigations, CoventorWare and Comsol simulations were performed in order to investigate the electro-thermo-mechanical behaviour of the switch. Key-words: MEMS switch, thermal actuator, microfabrication, sacrificial layer.

Silicon Metalens Fabrication from Electron Beam to UV-Nanoimprint Lithography

Nanomaterials, 2021

This study presents the design and manufacture of metasurface lenses optimized for focusing light... more This study presents the design and manufacture of metasurface lenses optimized for focusing light with 1.55 µm wavelength. The lenses are fabricated on silicon substrates using electron beam lithography, ultraviolet-nanoimprint lithography and cryogenic deep reactive-ion etching techniques. The designed metasurface makes use of the geometrical phase principle and consists of rectangular pillars with target dimensions of height h = 1200 nm, width w = 230 nm, length l = 354 nm and periodicity p = 835 nm. The simulated efficiency of the lens is 60%, while the master lenses obtained by using electron beam lithography are found to have an efficiency of 45%. The lenses subsequently fabricated via nanoimprint are characterized by an efficiency of 6%; the low efficiency is mainly attributed to the rounding of the rectangular nanostructures during the pattern transfer processes from the resist to silicon due to the presence of a thicker residual layer.

Memtransistors Based on Nanopatterned Graphene Ferroelectric Field-Effect Transistors

Nanomaterials, 2020

The ultimate memristor, which acts as resistive memory and an artificial neural synapse, is made ... more The ultimate memristor, which acts as resistive memory and an artificial neural synapse, is made from a single atomic layer. In this manuscript, we present experimental evidence of the memristive properties of a nanopatterned ferroelectric graphene field-effect transistor (FET). The graphene FET has, as a channel, a graphene monolayer transferred onto an HfO2-based ferroelectric material, the channel being nanopatterned with an array of holes with a diameter of 20 nm.

Graphene bandgap induced by ferroelectric HfO2 doped with Zr (HfZrO)

Nanotechnology, 2020

e show experimentally that the ferroelectric HfZrO induces a bandgap of 0.18 eV in graphene monol... more e show experimentally that the ferroelectric HfZrO induces a bandgap of 0.18 eV in graphene monolayer. The experiments are performed on top-gate graphene/HfZrO transistors showing a very high transconductance of 1 mS and very carrier mobilities of 7900 cm2/Vs. SiC and hexagonal boron nitride induce also a bandgap in graphene, but HfZrO is a CMOS compatible material which can be deposited on large Si wafers.

MoS2 radio: detecting radio waves with a two-dimensional transition metal dichalcogenide semiconductor

Nanotechnology, 2019

Access to the full text of the published version may require a subscription.

Electromagnetic energy harvesting based on HfZrO tunneling junctions

Nanotechnology, 2018

HfZrO ferroelectrics with a thickness of 6 nm were grown directly on Si using atomic layer deposi... more HfZrO ferroelectrics with a thickness of 6 nm were grown directly on Si using atomic layer deposition, top and bottom metallic electrodes being subsequently deposited by electron-beam metallization techniques. Depending on the polarity of the 10 V poling voltages, the currentvoltage dependence of these tunneling diodes shows a rectifying behavior for different polarizations, the ON-OFF ratio being about 10 4. Because the currents are at mA level, the HfZrO tunneling diodes coupled to an antenna array can harvest electromagnetic energy at 26 GHz (a bandwidth designated for Internet of Things-IoT), with a responsivity of 63 V/W and a NEP of 4 nW/Hz 0.5 .

Very large phase shift of microwave signals in a 6 nm Hf x Zr1−x O2 ferroelectric at ±3 V

Nanotechnology, 2017

In this letter, we report for the first time very large phase shifts of microwaves in the 1-10 GH... more In this letter, we report for the first time very large phase shifts of microwaves in the 1-10 GHz range, in a 1-mm-long gold coplanar interdigitated structure deposited over 6 nm Hf x Zr 1x O 2 ferroelectric grown directly on a high-resistivity silicon substrate. The phase shift is larger than 60 o at 1 GHz and 13 o at 10 GHz at maximum applied DC voltages of  3 V, which can be supplied by a simple commercial battery. In this way, we demonstrate experimentally that the new ferroelectrics based on HfO 2 could play an important role in the future development of wireless communication systems for very low power applications.

Systems and Methods for Assessing the Authenticity of Dynamic Handwritten Signature

Selective chemical sensor for liquid specimens based on lithium tantalate surface acoustic wave devices

2015 International Semiconductor Conference (CAS), 2015

We report in this paper the fabrication and characterization of a 121 MHz delay-line SAW device s... more We report in this paper the fabrication and characterization of a 121 MHz delay-line SAW device selective chemical sensor micro-fabricated on 36° rotated Y-cut X-propagating LiTaO3. A custom designed test fixture was manufactured for RF measurements. The proof of the sensor concept was based on detection of high molecular weight targets in liquid samples. Thus, the antigen-antibody label-free interaction was studied by monitoring the variation of the angle phase of SAW sensor with the concentration of some target biological analyte.

The electromagnetic properties of graphene in the microwave and millimeterwave spectrum

ABSTRACT The electromagnetic properties of graphene are neither well known nor well understood. T... more ABSTRACT The electromagnetic properties of graphene are neither well known nor well understood. Therefore, the aim of this paper is to present them in a coherent manner. We present first the graphene coplanar waveguide and its properties, and describe afterwards experiments involving these coplanar waveguides that are able to determine the electrical permittivity of graphene and the ability to tune electrically the phase of microwave and millimeterwave signals. The entire paper demonstrates that graphene displays unparallel electromagnetic properties enabling new microwave devices.

Realization of spiral phase plates by 3D lithography

Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies VII, 2015

In this paper we will present two technological processes necessary to experimentally obtain diff... more In this paper we will present two technological processes necessary to experimentally obtain diffractive optical elements (DOE) operating in reflection which generate optical beams presenting orbital angular momentum. This class of DOE, also known as spiral phase plates (SPP), are three-dimensional structures consisting in disks where the variation of their thickness is directly proportional with the azimuthal angle Φ. In this case a beam of light applied on the SPP surface acquires an angular orbital momentum (OAM) and a vortex – like configuration. The first technique is the 3D electron beam lithography (EBL). The materials utilized in this case are the positive electronresist PMMA 35 K which has a deposition thickness of 500 nm and the negative electronresist SU8. To obtain the three dimensional structure, the PMMA and SU-8 films were configured by different exposure doses such that after development process each exposure corresponds to a defined thickness of the electronresist. The calibration curve between exposure dose and the height of the structure was determined. The second technique investigated here is photolithography. In this case a photoresist layer was exposed through a mask presenting regions with various levels of transmittance in order to obtain different levels of heights.

The influence of the deposition time on morphological and optical properties of Cu x S films deposited on polypropylene substrate

Materials Science-Poland, 2013

Copper sulfide (CuxS) films deposited on polypropylene substrate were obtained by chemical bath d... more Copper sulfide (CuxS) films deposited on polypropylene substrate were obtained by chemical bath deposition (CBD) method. The influence of the deposition time on the morphology of CuxS films was studied by means of scanning electron microscopy. We have found that the average particles dimension increased from 37 to 49 nm with the increase of deposition time from 20 to 30 minutes. The study of optical properties of the copper sulfide films was carried out based on optical transmission spectra recorded in the 400–1000 nm wavelength range. The optical constants, such as refractive index, extinction coefficient and dielectric constant as well as electrical and optical conductivity of CuxS films were calculated. The obtained values are in accordance with the ones reported in the literature:We have shown that both, morphological and optical properties of CuxS films are strongly affected by the deposition time.

Design of Antimicrobial Membrane Based on Polymer Colloids/Multiwall Carbon Nanotubes Hybrid Material with Silver Nanoparticles

ACS Applied Materials & Interfaces, 2014

The aim of this study was to obtain membranes with antimicrobial activity presenting a complex sa... more The aim of this study was to obtain membranes with antimicrobial activity presenting a complex sandwichtype structure. The outer layers are comprised of poly(methyl methacrylate) membranes, whereas the inner active layer consists of a modified commercial membrane to achieve antimicrobial properties. This activity arises due to the presence of silver nanoparticles in a material with a hybrid composition deposited on a commercial membrane. This hybrid material consists of polymer colloids and multiwall carbon nanotubes used for both the stabilization of the active layer by the interconnections of the polymer particles and as active component. The filtration tests revealed a good stability of the materials and an increased hydrophilicity of the hybrid membranes. The antimicrobial properties have been evaluated using Staphylococcus aureus and Escherichia coli, and have been correlated with the content and migration rate of silver ions.

48 GHz zeroth order resonance metamaterial antenna on alumina substrate

2012 16th IEEE Mediterranean Electrotechnical Conference, 2012

The paper presents a zeroth order resonance Composite Right/Left-Handed (CRLH) coplanar waveguide... more The paper presents a zeroth order resonance Composite Right/Left-Handed (CRLH) coplanar waveguide (CPW) antenna on AlSiMag 614 alumina substrate. The device was designed, microprocessed and tested for millimeter wave frequency range (48 GHz). Experimental results for two antenna samples show return loss of −22.72 dB at f = 47.95 GHz and −19.26 dB at f = 48.12 GHz, respectively. The

Nanostructured Fe doped ZnO: TiO<inf>2</inf> for gas sensors applications

CAS 2012 (International Semiconductor Conference), 2012

ABSTRACT

Raman spectroscopy investigation of electron beam irradiated graphene

2014 International Semiconductor Conference (CAS), 2014

Structural modification of graphene after direct electron beam irradiation (acceleration voltages... more Structural modification of graphene after direct electron beam irradiation (acceleration voltages of 3 kV and 5 kV and exposure doses 200, 400, 800 μC/cm<sup>2</sup>) has been investigated by using micro-Raman spectroscopy. The amplitudes ratio - I<sub>D</sub>/I<sub>G</sub> and I<sub>2D</sub>/I<sub>G</sub> versus exposure doses for each acceleration voltage extracted from Raman spectra acquisitions with red laser (633 nm) are evidencing the increasing degradation of single layer graphene at low exposure doses.

Sensor system for on-line monitoring of cell cultures

2009 International Semiconductor Conference, 2009

The paper is presenting the development of a sensor system dedicated to monitor the environment o... more The paper is presenting the development of a sensor system dedicated to monitor the environment of eukaryotic cells culture acting as biosensors for toxins detection. The system we are presenting is containing pH, and temperature sensors integrated into microfluidic channels. The sensors have the role to characterize the cells living conditions (temperature and pH) and are monitoring the cell biochip

Porous silicon decorated metallic nanoparticles for growing vertically aligned carbon nanotubes

CAS 2012 (International Semiconductor Conference), 2012

ABSTRACT Carbon nanotubes have been envisioned as promising functional materials in nanoelectroni... more ABSTRACT Carbon nanotubes have been envisioned as promising functional materials in nanoelectronics and electron field emitters. All these applications require that the CNT are highly oriented. There are many studies to improve the growth process but only few research studies have investigated new methods to deposit metallic nanoparticles on the porous silicon. Thus this paper is aiming at synthesizing metallic nanoparticles on top of porous silicon.

Securing On-line Payment using Dynamic Signature Verification

Journal of System and …, 2011

Involvement of cyan and ester groups in surface interactions of aerosil–cyanophenyl alkyl benzoate systems with high silica density: Infrared investigations

Spectrochimica Acta Part A: Molecular and Biomolecular Spectroscopy, 2010

Rezultatele activităţii de Cercetare Dezvoltare 7.1. Lucrări ştiinţifice/tehnice publicate în rev... more Rezultatele activităţii de Cercetare Dezvoltare 7.1. Lucrări ştiinţifice/tehnice publicate în reviste de specialitate cotate ISI 7.2. Factor de impact cumulat al lucrarilor cotate ISI: 7.3. Citări în reviste de specialitate cotate ISI: 7.4. Brevete de invenţie (solicitate/acodate) 7.1. Lucrări ştiinţifice/tehnice publicate în reviste de specialitate cotate ISI (titlul, revista, autori) 1. "6.3 GHz Film Bulk Acoustic Resonator Structures Based on a Gallium Nitride/Silicon Thin Membrane